SEMICONDUCTOR

/FPD INDUSTRY

A QUICK GUIDE TO PROCESS IMPROVEMENT

KAIZEN

SEMICONDUCTOR

Checking the position of a

wafer through viewport

Measuring wafer
thickness

Suscepter positioning

The LK-G Series can stably detect wafers

through glass without complicated
configuration.

The LT-9000 Series ensures reliable

measurement without being affected by
surface patterns thanks to the
high-accuracy double scanning method.

The LK-G Series inspects rotating

suscepters to prevent defective deposition
due to improper adjustment.

CCD laser displacement sensor LK-G SERIES

Surface scanning laser confocal displacement meter LT-9000 SERIES

CCD laser displacement sensor

LK-G SERIES

SEMICONDUCTOR

Detect misalignment in a
transportation arm

Measure shapes of
RPD Ribs

Measuring the depth of

dicing grooves

If a transportation arm is misaligned, a

wafer cannot be transported or set safely,
so the wafer may become damaged. LKG
Series is used to constantly monitor the
position of the arm.

LKG Series is used to measure the shape

of the ribs and check for variations in the
shape and can be checked to improve the
display quality.

The measuring spot of 2m enables a

reliable measurement of the shape and the
depth of minute grooves.

CCD laser displacement sensor LK-G SERIES

CCD laser displacement sensor LK-G SERIES

Surface scanning laser confocal displacement meter LT-9000 SERIES

FPD

Measuring the
height of pins

Measuring the gap between

a mask and a glass plate

Measuring the gap of

a spinless coater

The LK-G Series scans a glass plate on

pins to check if the pins are the same
height. It significantly reduces the time
required for adjustment.

The LT-9000 Series can reliably measure

the gap between a mask and a glass
plate by detecting the different light
intensities reflected off both sides of the
two glass plates.

The LK-G Series adjusts the gap of a

spinless coater to control application
quantity.

CCD laser displacement sensor LK-G SERIES

Surface scanning laser confocal displacement meter LT-9000 SERIES

CCD laser displacement sensor LK-G SERIES

FPD

10

Detecting the shape of

sealing materials

11

Detecting chips on a
liquid crystal substrate

12

Positioning of a
glass plate

The LT-9000 Series can measure the profile

of wet objects and calculate the
cross-sectional area using the area
measurement function.

The LS-7000 Series provides high-speed,

reliable detection of chips and other
defects on transparent substrate to
achieve 100% in-line inspection.

The newly developed optical system

enables high-accuracy positioning of
transparent glass substrates.

Surface scanning laser confocal displacement meter LT-9000 SERIES

CCD micrometer

CCD micrometer

LS-7000 SERIES

LS-7000 SERIES

Introducing the Ultimate in

Non-contact Laser Measurement
FASTEST IN ITS CLASS

392kHz

ULTRA HIGH ACCURACY

HIGHEST REPEATABILITY IN ITS CLASS

0.02% of F.S.

0.0002 Mil (0.005 m)

CCD LASER
DISPLACEMENT SENSOR

392kHz SAMPLING RATE

MULTIPLE REFLECTIONS

The newly developed Linearized CCD performs

ultra-fast measurements on everything from
black rubber to mirror-surfaced targets.

Using the MRC*algorithm,

a metal surface with a
complicated profile can be
measured with high accuracy.
*MRC:Multiple Reflection Cancel

Target Examples:

Tire

Target Examples:

Gear

ATC Tool

Fan

Wheel

Engine Valve

Bearing

Camshaft

TRANSLUCENT TARGETS

TRANSPARENT TARGETS

Uses the RPD* algorithm for

accurate measurement of
translucent targets such as
plastic and porous materials.

Multi-able control for

the measurement of
glass used for LCD
or PDP production.

*RPD:Real Peak Detect

Target Examples:

Target Examples:

Circuit Board

Silicon Glue

Plastic Parts

Copyright (c) 2007 KEYENCE CORPORATION. All rights reserved.

Plastic Parts Plastic Covers

Glass

LKG-KaizenSemi-KA-C-E 1061-3 611106 Printed in Japan

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