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UTC-1000
NE00040-00
(1)
Thank you for your purchase of our UTC-1000 full auto wire bonder.
This manual describes the maintenance methods by disassembly and adjustment for the purpose of
maintaining the performance of this machine.
You are, therefore, requested to read through this manual without fail and understand the cautions on
work, working methods, and safety items before starting the maintenance work of this machine for the
purpose of maintaining the performance of this machine and using the machine for a long time
without any danger.
If you should have found obscure points or questions in this manual, please
Caution
a.
No part of the contents of this manual can be reproduced or reprinted in any form without our
permission.
b.
If you should have found obscure points, errors, omissions of description, Incorrect collating,
missing pages, or other defects, please inform our Engineering Service Dept.
c.
Never operate the machine by the methods other than described in this manual, otherwise
unexpected troubles or accidents may occur.
You are requested to understand that our company is not responsible for any direct or indirect
damage caused by defects of this manual, machine, and/or software.
e.
Keep this manual without fail after reading. Read this manual again if a question has arisen
during operation of this machine or if a trouble should have occurred in the machine.
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UTC-1000 third step guide is divided into three volumes consisting of third step guide (1), third step
guide (2), and third step guide (3).
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1-1
1-2
1-3
1-4
2-1
Work icons
[Point][Caution] and [Tools employed] icons are indicated on each page as occasion demands.
+.,-/*
Work points are described every description of work as occasion demands.
You can understand the work point before starting work.
Caution
Cautions on work are described every description of work as occasion demands.
You can understand the cautions on work before starting work.
2mm
-1102+, /.2
Tools and jigs necessary for work are illustrated every description of work.
Since necessary tools and jigs can be understood intuitively, the work efficiency is
improved.
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1-2
1. Lubricating oils.................................................................................................................... 14
2. Tools ................................................................................................................................... 14
3. Measuring tools .................................................................................................................. 14
1-3
1-4
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DANGER
WARNING
CAUTION
Caution
Never
disassemble
Indication
Inhibition This symbol shows an inhibited item to be not executed. Please read the indicating contents
carefully and never execute any inhibited item.
Indication This symbol indicates an indicating item to be executed without fail.
indicating contents carefully and execute it without fail.
Caution on use
Observe the following cautions for safety when using our machine.
WARNING
Be careful with an
electric shock accident
When touching the terminal board, etc. during maintenance work, make sure that a qualified trained
maintenance man (line keeper) has shut off the power supply without fail before starting the work. Negligence
of this confirmation may cause an electric shock accident, a fire, and/or troubles.
Be careful with an
electric shock accident
Internal parts in the machines may remain charged even after turning off all power supplies. Make sure that
no voltage is applied to these parts by using a circuit tester or the like before starting the maintenance work.
Negligence of this confirmation may cause an electric shock accident, a fire, and/or troubles.
Be careful with an
electric shock accident
Make sure that the breaker is turned off without fail for preventing an electric shock accident when
maintenance work is done in the vicinity of the main breaker of the machine.
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CAUTION
Be careful with a
strong magnetic field
Be careful with a
strong magnetic field
Be careful with a
strong magnetic field
Be careful with a
strong magnetic field
Never disassemble
The bonding head contains parts each having very strong magnetic force.
of iron.
Dont put any metal close to the magnet in the fulcrum shaft unit, since this magnet has very strong magnetic
force.
The swing motor moving element is a powerful magnet.
it.
The swing motor moving element is a powerful magnet. Use non-magnetic screws like stainless steel screws
without fail when fixing it to a jig.
Dont perform any adjustment or disassembly other than described in this manual, otherwise negligence of this
caution may cause personal injuries or the breakage of the machine.
The plate is fixed by a bonding agent. Never exfoliate it forcibly.
Inhibition
Dont strike the linear scale being bonded at the bond holder, otherwise it may be broken.
Inhibition
Dont click [YES] during adjustment, otherwise the capillary and reference pin may touch each other.
Inhibition
Indication
Execute routine inspection and periodical inspection of the machine without fail. Make sure before starting
every work that the machine is free of abnormal symptoms.
Indication
Indication
Fasten the fixing screws with the specified tightening torque without fail and lock them with paint for preventing
them from being loosened.
Indication
Lock the upper-limit stopper by a hexagon nut and then, lock it with paint without fail for preventing it from being
loosened.
Indication
Lock the lower-limit stopper by a hexagon nut and then, lock it with paint without fail for preventing it from being
loosened.
Lower the
temperature
Be careful with hot portions during maintenance work. For the maintenance of hot sections, turn off the heater
power supply and wait for a while until the temperature falls to be lower than 50 before starting the work for
the purpose of preventing a burn. A high temperature caution is indicated at hot portions where temperature
may exceed 50 inside the machine.
Wear protective gloves and safety shoes for preventing workers danger during maintenance work.
Indication
Shut off the air feed source without fail in advance for ensuring workers safety when units are adjusted.
Indication
OFF
ELB
Turn off
power supply
OFF
ELB
Turn off
power supply
Turn off [POWER] switch and shut off the main breaker without fail in advance for the purpose of preventing
workers danger when touching each circuit in the control unit during maintenance work, etc.
Turn off [POWER] switch and shut off the main breaker without fail in advance for the purpose of preventing
workers danger when replacing the machine fuse. Replace the fuse with a fuse having the specified capacity
without fail.
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Disassembly and
Disassembly and adjustment
adjustment of XY table
(2) Page 147 ~ 221
of bonding head
(1) Page 051~ 221
Disassembly and
Disassembly and adjustment
adjustment of loader
(3) Page 009~ 158
of unloader
(3) Page 009 ~ 158
Fig. A001
For safety
Observe the cautions for safety during machine operation.
Store your various data (production data, frame data ,magazine data, configuration machine
data) into a CD-RW ,a floppy disk, or the like frequently.
storage contents in the hard disk cannot be recovered due to a trouble of the hard disk.
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1-1
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1-1
its
maintenance
executed.
and
check
are
worn,
deteriorated,
and/or
Fig. A002
deformed.
By executing periodical inspection, proper maintenance and parts exchange, an operation stop
failure and accidents due to serious troubles can be prevented and the machine can be maintained
under the best condition.
Periodical inspection comprises weekly inspection, monthly inspection, three month intervals
inspection, three month intervals inspection, and annual inspection in addition to routine
inspection such as the inspection at the start of daily work. Perform inspection without fail as
routine work.
Caution
Indication
Execute routine inspection and periodical inspection of the machine without fail. Make sure before starting
each work that the machine is free of abnormal symptoms. If an unexpected accident occurred, perform
necessary check to treat it safely with due care.
The standards of oils, grease, adhesives, and other chemicals differ according to the
purposes of use. Use designated standard products without fail. Dont use any deteriorated
chemicals due to long-time storage.
Caution
Indication
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10
11
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12
13
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1-2
1.
WYNNS
Multemp PS-2
Alvania 2
EA2
2.
Tools
Hexagon socket wrench set
Plus (+) screwdrivers
Minus (-) screwdrivers
Cotton swab
Absolute alcohol
3.
Measuring tools
Tool names
Digital tester
Uses
Standards
Voltage measurement
Makers
Oscilloscope
XY axes shall be
measurable
Torque gauge
600ATG
Tonichi
TSK
measurement
Gap gauge set
Gap measurement
No.65M
Scale (150mm)
Length measurement
Silver scale
Tension gauge
Load measurement
Shall be measurable in
(for verification)
units of 1gf
Force adjust
J772, J773
Diamond needle
Microscope
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14
Shinkawa
Shinkawa
15
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1-3
1.
Inspectors name
Inspection date
Customers signature
Remarks
2nd year
Inspectors name
Inspection date
Customers signature
Remarks
3rd year
Inspectors name
Inspection date
Customers signature
Remarks
4th year
Inspectors name
Inspection date
Customers signature
Remarks
5th year
Inspectors name
Inspection date
Customers signature
Remarks
6th year
Inspectors name
Inspection date
Customers signature
Remarks
7th year
Inspectors name
Inspection date
Customers signature
Remarks
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16
2.
Maintenance record
This record can record provisional maintenance and maintenance execution conditions and their
results up to the next periodical inspection. This record serves as valuable data for executing
proper inspection and maintenance in the future. Fill in this record with executed maintenance
without fail.
Machine name
Delivery date
Maintenance contents
Maintenance contents
Maintenance contents
Maintenance contents
Maintenance contents
17
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18
19
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1-4
1.
2.
* Cable holder
* Torch electrode
* Wire tensioner
* Transducer
* TV camera
* Illumination unit
Bonding head
XY table
* Working sound
* Odor
* Wiring
* Metallic
Be careful not to
* Belt refuse
* Working sound
* Odor
* Metallic
Unloader
Loader
* Working sound
* Wiring
* Odor
* Metallic
* Working sound
* Odor
* Belt refuse
* Metallic
Fig. T001
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20
3.
Fig. T002
Unnecessary
-1102+, /.2
b)
Wipe the tip of a cleaning brush (example : interdental brush) with alcohol in small
quantities.
c)
Insert the cleaning brush from the lower side into the capillary mounting hole of the
transducer, and lightly rub the inside of the capillary mounting hole by moving the cleaning
brush up and down.
d)
Transducer
Cleaning brush
RPS unit
Fig. T-003
Caution
21
-1102+, /.2
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Display the short-cut menu by right clicking and click [Enter chessman mode]. Move the
capillary into the bonding area by chessman.
b)
Display the short-cut menu again by right clicking and click [Exit chessman mode].
c)
Fig. T004
Unnecessary
-1102+, /.2
d)
Lower 3mm
Z down key
Fig. T005
Unnecessary
-1102+, /.2
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22
e)
Set the bonding force to the present working load and press output (O) button.
Fig. T006
Unnecessary
-1102+, /.2
f)
Apply the arm tip of the tension gauge to the lower part of the transducer tip as illustrated,
a lift the tension gauge slowly.
g)
Check the tension gauge value when the transducer tip has lifted slightly.
h)
Check if the Bonding force being set by the tool output check dialog approximately meets
the tension gauge.
(Tension gauge measurement is subjected to an individual difference. Grasp the individual
difference in advance.)
Tension gauge
Transducer
Fig. T007
-1102+, /.2
23
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(B) Indexer
(1) Cleaning of paddle adapter
Click [Help (H)] [Maintenance manual] [Chapter 2 Adjustment and inspection of each unit]
[2-4 Universal indexer] from the machine menu, and refer to [Cleaning the paddle adapter].
Fig. T008
Unnecessary
-1102+, /.2
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24
4.
Fig. T009
Unnecessary
-1102+, /.2
Fig. T0010
Unnecessary
-1102+, /.2
25
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Fig. T011
Unnecessary
-1102+, /.2
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26
Fig. T012
Unnecessary
-1102+, /.2
27
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5.
Fig. T013
Unnecessary
-1102+, /.2
Fig. T014
Unnecessary
-1102+, /.2
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28
Fig. T015
Unnecessary
-1102+, /.2
Fig. T016
Unnecessary
-1102+, /.2
29
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Fig. T017
Unnecessary
-1102+, /.2
Fig. T018
Unnecessary
-1102+, /.2
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30
6.
3mm
Fig. T019
-1102+, /.2
Fig.T020
Unnecessary
-1102+, /.2
31
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Fig. T021
Unnecessary
-1102+, /.2
Fig. T022
Unnecessary
-1102+, /.2
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32
Fig. T023
Unnecessary
-1102+, /.2
33
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Fig. T024
Unnecessary
-1102+, /.2
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34
Fig. T025
Unnecessary
-1102+, /.2
35
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Fig. T026
Unnecessary
-1102+, /.2
Fig. T027
Unnecessary
-1102+, /.2
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36
Fig. T028
Unnecessary
-1102+, /.2
Fig. T029
Unnecessary
-1102+, /.2
37
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Fig. T030
Unnecessary
-1102+, /.2
Fig. T031
Unnecessary
-1102+, /.2
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38
Fig. T032
Unnecessary
-1102+, /.2
(8) Greasing the heater block up/down cam and lead clamper up/down cam.
Click [Help (H)] [Maintenance manual] [Chapter 2 Adjustment and inspection of each unit]
[2-4 Universal indexer], and refer to [Greasing the heater block up/down cam and lead clamper
up/down cam].
Fig. T033
Unnecessary
-1102+, /.2
39
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Fig. T034
Unnecessary
-1102+, /.2
Unnecessary
-1102+, /.2
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40
Connect the probe to ZUP-02A board. (Turn off the power supply for safety before starting
the connection work of the probe.)
b)
After connecting the probe, turn on the power supplies of the machine and oscilloscope, and
set the oscilloscope. (Setting of oscilloscope is not described here).
Item
Oscilloscope
Connection PC board
Terminal No.
GN terminal
US drive voltage
CH1
ZUP-02A
CT1
CT3
US drive current
CH2
ZUP-02A
CT2
CT3
-1102+, /.2
c) The following waveforms are displayed by executing 1 wire bonding after carrying the frame.
Make sure that the phases of these waveforms are the same. If not displayed normally,
repeat 1 bonding several times.
CH-1
US drive voltage
CH-2
US drive current
Fig. T036
-1102+, /.2
41
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7.
Make sure that the dent profile produced due to the grounding of the capillary to a specimen
when the transducer has lowered to be horizontal is round and uniform. Perform this
confirmation work each time the capillary is replaced.
b)
Make sure that four SUS CSB M4 x 15mm and two SUS CSB M3 x 14mm which fix the
supporting base (#2)to unit frame (#1) are securely fastened.
SUS CSB M3 x 14mm (from the rear side)
Fig. T036
2.5mm
-1102+, /.2
3mm
Cap Screw Wrench
4 pieces
Fig. T037
2mm
-1102+, /.2
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42
Unnecessary
-1102+, /.2
43
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Unnecessary
-1102+, /.2
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44
Fan motor
Fan motor
Fan motor
Fan motor
Fig. T038
Unnecessary
-1102+, /.2
Fig. T039
Unnecessary
-1102+, /.2
45
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+5V
GND
+3.3V
+5V
+5V
GND
-12V
Fig. T040
+12V
-1102+, /.2
Voltage
Specified tolerance
+3.3V
+3.3V
0.05V
+5Vs
+5Vs
0.25V
+5V
+5.14
0.02V
+12V
+12V
0.6V
-12V
-12V
0.6V
+15V
+15V
0.2V
-15V
-15V
0.2V
+24V
+24V
0.2V
-1102+, /.2
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46
The following figure shows the outer view with the front cover open.
Remove the black cover by loosening its five pan head screws M4 x 6mm.
Pan head screw M4 x 6mm
Fig. T041
2)
M4
-1102+, /.2
Measure the measuring points of +24V, +15V, and -15V by using a circuit tester, and
make sure that the voltage is within the specified tolerance.
If the voltage is out of the specified tolerance, adjust the voltage by each voltage control
knobs (variable resistor).
The voltage increases when turning the control knob clockwise and it decreases when
turning the control knob counterclockwise.
+24V adjustment
+15V adjustment
+24V
-15V adjustment
GND
GND
GND
-15V
+15V
Fig. T042
-1102+, /.2
47
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b)
Remove two decorated screws M4 x 16mm which fix the EPU power supply.
Open the EPU power supply, and remove the rear cover by loosening seven pan head
screws M4 x 6mm.
Fig. T043
M4
-1102+, /.2
2)
Measure the measuring points of +3.3V, +5V, +12V and -12V by using a circuit tester, and
make sure that the voltage is within the specified tolerance.
If the voltage is out of the specified tolerance, adjust the voltage by each voltage control
knob (variable resistor).
The voltage increases when turning the control knob clockwise and it decreases when
turning the control knob counterclockwise. Voltage 12V cannot be adjusted.
+5V
GND
+3.3V
+5V
+3.3V control knob
+5V
-12V
+5V control knob
+12V
GND
Fig. T044
-1102+, /.2
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48
c)
Remove two decorated screws M4x 16mm which fix the EPU power supply.
Open the EPU power supply, and remove the rear cover by loosening seven pan head
screws M4 x 6mm.
Fig.T045
M4
-1102+, /.2
2)
Measure check terminals CT6 (5V) and CT2 (GND) by a circuit tester.
Be careful since the connection of measuring terminals is very difficult.
Fig. T046
-1102+, /.2
49
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Rear side
Operator side
CT6(5V)
CT2(GND)
Red lamp
Fig.T047
-1102+, /.2
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50
2-1
51
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2-1
1.
Model
Capillary stroke
BH-171
Effective stroke
-0.9 ~ +9.6mm
Stroke
10.5mm
0.5m/pulse
Bonding force
30 ~ 2940mN 5mN/step
(3 ~ 300gf 0.5gf/step)
Wire diameter
Camera unit
Standard
CMU-28
CCD size
1/3
No. of pixels
Standard
MS-220
Low magnification
1.5X
Focal depth
0.75mm
Visual field
3.15 X 2.36mm
High magnification
6X
Focal depth
0.05mm
Viewing field
0.79 X 0.59mm
Standard
Clamper
Standard
CL-49
Drive system
Piezoelectric actuator
Output voltage
115V
Standard
UST-330A
Horn material
Ti (Titanium)
Frequency
118.5 ~ 121.5KHz
Tip material
Pt (platinum)
Body material
Transducer
Torch electrode
Electric parts
Drive motor
Linear motor
MD-12
Yasukawa Electric Co
21610242
Linear sensor
ST142B
Mitsutoyo
20028916
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52
2.
It
functions delicately at high speed. Finely adjust the linear sensor, Z-axis, torch electrode, and loop
control and calibrate them precisely.
Bonding head
Fig. B001
UTC-1000
Bonding head maintenance tools and jigs
Tools
L-type wrench (Cap Screw Wrench) M2.M2.5.M2.6.M3.M4.M5.M6
Wrench M4.M2.5
Screwdriver (-)
Meters
Torque wrench
Block gauge 33.45mm40.10mm45.80mm
Square
Oscilloscope
Others
Grease
Multi-purpose
Bonding agent
Cemedine super X
53
Jigs
Jig J501
Jig J503
Jig J685
Jig J705
Jig J706
Jig J708
Jig J709
Jig J710
Jig J712
Jig J753
Jig J772
Jig J773
Jig J775
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Removal
(A) Removing method
Remove the bonding head BH-171 from the wire bonder UTC-1000 main body according to the
following procedure.
Fig.B002
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54
Removal
PJ4
PJ5
PJ1
JBP-315
[Front of machine]
Fig. B004
Fig. B003
Unnecessary
-1102+ ,/.2
(2) Removal of rear cover (#19) from bonding head main body
Remove two SUS CSB (Cap Screw Bolt) M3 x 6mm which fix right and left wiring. The nylon
clamp and clamp are fastened together. The rear cover (#19) is removed together with clamp.
Nylon clamp
Clamp
(NK-5N)
Fig. B005
2.5mm
-1102+ ,/.2
55
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Removal
(#9)
Fig.B006
Torch electrode
Fig.B007
2mm
-1102+ ,/.2
4mm
-1102+ ,/.2
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56
Cap
Cup Screw Wrench
Removal
Fig.B009
Unnecessary
-1102+ ,/.2
Fig.B010
4mm
-1102+ ,/.2
57
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Disassembly
(B) Disassembly method
This section describes the disassembly method of the pivot shaft (fulcrum shaft) leaf spring (Plate
spring) of the bonding head and the disassembly method until the linear sensor is removed.
Remove the bonding head from the machine main body according to (A) Removing
methods (pages 54 ~57) and put it on a work bench. The bonding head main body is provided
with parts each having powerful magnetic force. Dont use any steel surface plate as a work
bench.
part
(12) Removal of leaf spring (plate spring) for fulcrum
movable unit
(5) Removal of pivot shaft (fulcrum shaft)
(6) Removal of JBP board
(7) Removal of linear sensor
(8) Removal of sensor mounting plate
(9) Removal of linear sensor
Caution
Be careful with a
strong magnetic field
The bonding head contains parts having very strong magnetic force. Dont use any steel surface plate as a
work bench.
Fig.B011
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58
Disassembly
Insulation bush
Insulation plate
Bond holder
Transducer
1.5mm
-1102+ ,/.2
cable clamp
Fig.B013
1.5mm
-1102+ ,/.2
59
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Disassembly
Fig. B014
Transducer
2mm
-1102+ ,/.2
A glass linear
Be
Fig. B015
Caution
Never
disassemble
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Dont strike the linear scale being bonded at the rear of the bond holder, otherwise
it may be broken.
60
2.5mm
-1102+ ,/.2
Disassembly
Remove four SUS CSB M4 x 15mm mounted on the right and left sides of the front panel of
pivot shaft (fulcrum shaft) unit and one upper-limit stopper SUS HSB M4 x 12mm together
with SUS lock nut M4mm.
Upper-limit stopper
Pivot shaft (fulcrum shaft) unit
Fig. B016
SUS HSB M4 x 12mm
-1102+ ,/.2
b)
2mm
Cap Screw Wrench
3mm
Cap Screw Wrench
Remove one SUS CSB M3 x 14mm from the JBP board side and also remove one SUS CSB
M3 x 14mm from the opposite side, or, 2 pieces in total.
Fig. B017
2.5mm
-1102+ ,/.2
61
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Disassembly
c)
Mount the stay (jig 775) and adjusting screws (jig 775) at the front of the pivot shaft
(fulcrum shaft) unit. Since the pivot shaft (fulcrum shaft) unit magnet has very powerful
magnetic force, remove the pivot shaft (fulcrum shaft) unit by using the stay and adjusting
screws. Screw in both right and left adjusting screws while pressing the stay by hand.
Adjusting screw
Pivot shaft (fulcrum
shaft) unit
Adjusting screw
Fig. B018
Stay
-1102+ ,/.2
d)
Jig J775
Jig J775
Stay
Adjusting screw
Remove the pivot shaft (fulcrum shaft) unit by pulling the stay when the space between the
pivot (fulcrum) stay unit and the bonding head has become approx. 3 ~ 4mm. Pull the stay
straight this side without fail when pulling it. If the stay is pulled curvedly in the lateral
or longitudinal direction, it may be bent.
Adjusting
screw
Adjusting
screw
Stay
Fig. B019
Caution
Be careful with a
strong magnetic field
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Pivot shaft (fulcrum shaft) unit magnet has very strong magnetic force.
Dont put any metallic part close to the magnet.
62
-1102+ ,/.2
Jig J775
Jig J775
Stay
Adjusting screw
Disassembly
Hexagonal stay
(spacer : BSB 2606)
Fig. B021
JBP board
(JBP-315)
Fig. B020
2mm
-1102+ ,/.2
3mm
-1102+ ,/.2
63
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Disassembly
Linear sensor
Fig. B023
Fig. B024
Linear sensor
2.5mm
-1102+ ,/.2
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64
(9)
Disassembly
Remove the linear sensor from the sensor mounting plate by removing two SUS CSB M2.6
x6mm which fix the linear sensor to the sensor mounting plate (#9).
SUS CSB M2.6 x 6mm
Fig. B026
Linear sensor
Fig. B027
2mm
-1102+ ,/.2
Fig. B028
Chrome-plated CSB M4 x 10mm
Caution
Never
disassemble
65
2mm
-1102+ ,/.2
3mm
Cap Screw Wrench
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Disassembly
(11) Removal of pivot shaft movable part (swing motor movable element)
(12) Removal
(11) Removal of pivot shaft (fulcrum shaft) movable part (swing motor movable element)
The swing motor movable element is supported by four leaf springs (Plate spring) (#16) to the
pivot (fulcrum) mounting base (#2). Remove four SUS CSB M2.6 x 6mm from the rear face and
lower face on the swing motor movable
element side.
(without
positioning
pin
holes)
are
Fig. B029
2mm
-1102+ ,/.2
(12) Removal of leaf spring (Plate spring) plates for pivot shaft (fulcrum shaft) movable unit
After removing the swing motor movable unit from the pivot (fulcrum) mounting base (#2),
remove the leaf springs (Plate spring) by removing four SUS CSB M2.6 x 6mm which fix the leaf
springs (Plate spring) (#16).
SUS CSB M2.6 x 6mm
Pressure
2mm
-1102+ ,/.2
NE00040-00
66
Assembly
(C) Assembly method
This paragraph describes the assembly method of the bonding head.
Fig. B031
67
NE00040-00
Assembly
(1) Mounting of the leaf spring (plate spring) for pivot (fulcrum) movable unit
a)
Positioning pins are protruded from the leaf spring (plate spring) mounting part of the pivot
(fulcrum) supporting base of the switching motor movable device, so that the mounting
direction of the leaf spring (plate spring) is predetermined.
Positioning pin
Positioning pin
Positioning pin
Positioning pin
Fig. B032
Unnecessary
-1102+ ,/.2
b)
Mount the leaf springs (plate spring) (#16) in the sequence starting with the vertical
direction.
The leaf spring (plate spring) (#16) has the front and rear faces.
The
chamfered face of each leaf spring (plate spring) (#16) is the front surface. The front and
rear faces of leaf spring (plate spring) (#16) are lubricated with a thin coat of Multipurpose
grease for preventing them from being rusted. After setting the front face of leaf spring
(plate spring) (#16) to the pivot (fulcrum) mounting base (#2) side, determine the
longitudinal position of leaf spring (plate spring) (#16) by aligning the leaf spring (plate
spring) (#16) hole with the positioning pin of the pivot (fulcrum) mounting base (#2) with
the front face of the leaf spring (plate spring) (#16) being set to the pivot (fulcrum) mounting
base (#2) side. Press the leaf spring (plate spring) (#16) against the reference plane of
pivot (fulcrum) mounting base (#2) to keep free of any gap between pivot (fulcrum)
mounting base (#2) and leaf spring (plate spring) (#16).
Positioning pin
Horizontal direction
Positioning pin
Horizontal direction
Fig. B033
Grease
Pivot (fulcrum)
mounting base (#2)
NE00040-00
68
-1102+ ,/.2
Multipurpose
Assembly
c)
Mount pressure plate 1 (#17) by pressing it against the reference plane of pivot (fulcrum)
mounting base (#2) after aligning the pressure plate (#17) hole with the positioning pin of
pivot (fulcrum) mounting base (#2) in the same way as in leaf spring (plate spring) (#16).
Pressure plate 1, if used once, has tightening scars of screw.
pressure plate to apply the same face to the screw so as not to press the entire leaf spring
(plate spring) (#16) by flaws of tightening scars.
Positioning pin
Leaf spring (plate spring) (#16)
Pressure plate 1 (#17)
Positioning pin
Fig. B034
Unnecessary
-1102+ ,/.2
d)
Fasten the pressure plate 1 (#17) with the tightening torque of 78Ncm (8Kgfcm) by SUS
CSB M2.6 x 6mm with spring washers so as not to move the leaf spring (plate spring) (#16).
Mount two horizontal leaf springs (plate spring) (#16) in the same way as in mounting the
vertical leaf springs (plate spring) (#16). Fasten two SUS CSB M2.6 x 6mm with spring
washers with the tightening torque of 78Ncm (8Kgfcm).
SUS CSB M2.6 x 6mm with spring washers
Fig.B035
Horizontal direction
Vertical direction
Vertical direction
Horizontal direction
Caution
Indication
Fasten the fixing screws with the specified tightening torque and lock it with paint
without fail for preventing them from being loosened.
69
2mm
-1102+ ,/.2
NE00040-00
Assembly
(2) Assembly of pivot (fulcrum) movable unit (swing motor movable device)
(2) Assembly of pivot (fulcrum) movable unit (swing motor movable device)
Fig. 036
Jig J710
Fig. 037
Caution
Jig J710
The swing motor movable device is a powerful magnet. Dont put any magnetic
substance like iron to be close to it.
Be careful with a
strong magnetic field
a)
-1102+ ,/.2
Attach the pivot shaft (fulcrum shaft) movable unit (swing motor movable device) closely to
the fit face of jig (J710) without any gap, and fix it by two non-magnetic CSB M3 x 14mm.
Mounting screws are used for fixing the jig.
They shall be 3mm screws, and their length is
Non-magnetic CSB M3 x 14mm
unit
is
powerful
magnet,
use
Jig J710
Caution
Jig J710
Be careful with a
strong magnetic field
NE00040-00
70
-1102+ ,/.2
2.5mm
Cap Screw Wrench
Assembly
(2) Assembly of pivot (fulcrum) movable unit (swing motor movable device)
b)
Mount the pivot (fulcrum) movable unit (swing motor movable device) being fixed to jig
(J710) to the pivot (fulcrum) mounting base (#2).
(fulcrum) bearing unit stand to meet the face of the pivot shaft (fulcrum shaft) movable unit
(swing motor movable device) while displacing the pivot shaft (fulcrum shaft) movable unit
rightward or leftward, and fix it by one SUS CSB M4 x 14mm.
Jig J710
Pivot (fulcrum) bearing unit stand
Jig J710
Fig. B039
3mm
-1102+ ,/.2
c)
Adjust the gap between the pivot (fulcrum) mounting base (#2) and pressure plate 2 (#8) of
leaf spring (plate spring) (#16) to a uniform space of 0.27mm by using a 0.27mm gap gauge
being attached to Jig J775.
Jig J710
Jig J775
-1102+ ,/.2
71
Jig J710
0.27mm
Gap Gauge
NE00040-00
Assembly
d)
(2) Assembly of pivot (fulcrum) movable unit (swing motor movable device)
After the gap between the pivot (fulcrum) mounting base (#2) and pressure plate 2 (#8) of
leaf spring (plate spring) (#16) has been adjusted to a uniform space of 0.27mm,fasten two
SUS CSB M2.6 x 6mm with spring washers with the tightening torque of 78Ncm (8kgfcm)
for fixing two horizontal leaf springs (plate spring).
direction of pressure plate 2 (#18) of leaf spring (plate spring) (#16) is predetermined.
SUS CSB M2.6 x 6mm with spring washer
Jig J710
Fig. B041
2mm
-1102+ ,/.2
e)
Remove jig (J710) from the pivot shaft (fulcrum shaft) movable unit (swing motor movable
device) by removing one SUS CSB M4 x 14mm and two non-magnetic CSB M3 x 14mm
which fix the jig (J710). After turning the jig (J710) by 180(upside down), fix it to pivot
(fulcrum) mounting base by one SUS CSB M4 x 14mm.
Jig J710
3mm
-1102+ ,/.2
NE00040-00
72
f)
Assembly
Adjust the gap between the pivot (fulcrum) mounting base (#2) and pressure plate 2 (#18) of
leaf spring (plate spring) (#16) to a uniform space of 0.27mm by using a 0.27mm gap gauge
being attached to jig J775. After the gap has been adjusted to an even space of 0.27mm,
fasten SUS CSB M2.6 x 6mm with spring washers with the tightening torque of 78Ncm
(8kgfcm) for fixing two vertical leaf springs (plate spring) (#16). Be careful since the
mounting direction of pressure plate 2 (#18) of leaf spring (plate spring) (#16) is
predetermined.
SUS CSB M2.6 x 6mm with spring washer
Jig J775
2mm
Fig. B043
-1102+ ,/.2
0.27mm
Gap Gauge
Mount the adjusting screws of jig J775 and stay to the pivot shaft (fulcrum shaft) unit to
which the pivot shaft (fulcrum shaft) movable unit (swing motor movable device) has been
assembled. Set two right and left adjusting screws in such a way as their threads come out
of the pivot shaft (fulcrum shaft) unit by approx. 4 ~ 5mm.
the work bench of jig J709 by using four SUS CSB M5 x 20mm.
SUS CSB M5 x 20mm
Threads come out of the fulcrum shaft unit by approx. 4 ~ 5mm
Bonding head
Work bench
(Jig 709)
Fig. B044
Jig J709
Jig J775
Jig J775
Work bench
Stay
Adjusting screw
4mm
-1102+ ,/.2
73
NE00040-00
Assembly
b)
Mount the pivot shaft (fulcrum shaft) unit (fulcrum unit to which the pivot shaft (fulcrum
shaft) movable unit has been assembled) to the bonding head. Support the stay of the
pivot shaft (fulcrum shaft) unit strongly so as not to allow the pivot shaft (fulcrum shaft)
unit and bonding head collide with each other due to the strong magnetic force of the pivot
shaft (fulcrum shaft) unit. Loosen the right and left adjusting screws (jig J775) of the pivot
shaft (fulcrum shaft) unit gradually until the convex part of the boning head is engaged
with the concave part of the pivot shaft (fulcrum shaft) unit. It is recommended to insert a
0.5mm thick plate below the pivot shaft (fulcrum shaft) unit during assembly work, and
they can be assembled with each other without any contact of the convex and concave parts.
Bonding head
Caution
The pivot shaft (fulcrum shaft) unit magnet has very strong magnetic force.
Dont put any metal to be close to it.
Be careful with a
strong magnetic field
c)
-1102+ ,/.2
Jig J775
Jig J775
Stay
Adjusting screw
After mounting the pivot shaft (fulcrum shaft) unit (fulcrum unit to which the pivot shaft
(fulcrum shaft) movable unit has been assembled) to the bonding head, remove right and
left adjusting screws (Jig J775) and stay (Jig J775). Fix the pivot shaft (fulcrum shaft)
unit temporarily by four SUS CSB M4 x 15mm and two SUS CSB M3 x 14mm with spring
washers.
SUS CSB M3 x 14mm with spring washer
Fig. B046
NE00040-00
74
2.5mm
-1102+ ,/.2
3mm
Cap Screw Wrench
Assembly
d)
Mount the bond holder (#5) to the pivot shaft (fulcrum shaft) unit (fulcrum unit to which the
pivot shaft (fulcrum shaft) movable unit has been assembled) of the bonding head. A glass
linear scale is bonded to the tail of the bond holder.
contaminate it with fingerprints or the like. Be careful with its handling so as not to break
it.
Linear scale
Fig. B047
Caution
Never
disassemble
Be careful not to strike the linear scale which is bonded to the tail of the bond holder.
c)
Unnecessary
-1102+ ,/.2
The bond holder (#5) is provided with bonding head side positioning pin receiving holes on
the rear right and left sides. Mount the notched face of the bond holder (#5) without any
gap in the pivot shaft (fulcrum shaft) movable unit. Fasten it with the tightening torque of
147Ncm (15Kgfcm) by using four SUS CSB M3 x 8mm.
Bonding head
Fig. B048
Bond holder
2.5mm
-1102+ ,/.2
75
NE00040-00
Assembly
Adjust the shaft of BH (bonding head) tilting adjusting jig (J753) to be vertical by using a
square. Check if it is vertical in two directions at least.
Square
Shaft
Fig. B049
Jig J753
-1102+ ,/.2
b)
BH tilting
adjusting jig
Square
Mount BH (bonding head) tilting adjusting jig (J753) to the bond holder. Push it until its
pin on the front right side of the jig touches the bond holder at the longitudinal position, and
press it against the front right side face in the lateral direction.
Fig.050
Shaft
Pivot shaft
(fulcrum shaft) unit
Fig.051
Work bench (Jig J709)
Jig J753
-1102+ ,/.2
NE00040-00
76
BH tilting
adjusting jig
2mm
Cap Screw Wrench
Assembly
c)
Fix the BH (bonding head) arm horizontal jig (1) on both right and left sides of the pivot
shaft (fulcrum shaft) unit of the bonding head by using SUS CSB M5 x 12mm on each, 2
pieces in total and also fix BH (bonding head) arm horizontal leveling jig (2) on the right and
left sides of the work bench (jig J709) by using SUS CSB M3 x 10mm, one each, or two
pieces in total.
SUS CSB M5 x 12mm
Bonding head
2.5mm
-1102+ ,/.2
d)
Jig
4mm
Cap Screw Wrench
Jig J753
BH tilting
adjusting jig
Jig J709
Work bench
Put a 40.1mm block gauge below BH tilting adjusting jig (J753), and press down the bond
holder.
Fig. B053
-1102+ ,/.2
77
40.1mm
Block gauge
NE00040-00
Assembly
e)
Adjust the BH tilting adjusting jig (J753) shaft to be vertical by adjusting SUS CSB M3 x
12mm of right and left BH arm horizontal jigs (1) under the closely attached condition of BH
tilting adjusting jig (J753) and block gauge.
Weight
Bond holder (#5)
BH tilting adjusting jig (J753)
Shaft
Block gauge (40.1mm)
BH arm horizontal leveling jig (1)
Square
Work bench (Jig 709)
BH arm horizontal leveling jig (2)
Fig. B054
Jig
2.5mm
-1102+ ,/.2
f)
Jig J753
BH tilting
adjusting jig
Shaft
BH arm horizontal leveling jig (1)
Square
BH arm horizontal leveling jig (2)
Fig. B055
Jig
2.5mm
-1102+ ,/.2
NE00040-00
78
Jig J753
BH tilting
adjusting jig
Assembly
g)
Y (longitudinal) direction adjustment of BH tilting adjusting jig (J753). Set a square to the
longitudinal direction of the shaft, and adjust the adjusting SUS CSBM3 x 12mm of right
and left BH arm horizontal jig (1) so that no gap exists between the shaft and square.
Shaft
BH arm horizontal leveling jig (1)
Square
BH arm horizontal leveling jig (2)
Fig. B056
Jig
2.5mm
-1102+ ,/.2
h)
After adjusting the BH tilting adjusting jig (J753) shaft, fasten the stay with the tightening
torque of 198Ncm (20kgfcm) by using four SUS CSB M4 x 15mm from the front face, and
fix it with the tightening torque of 98Ncm (10kgfcm) by using two SUS CSB M3 x 14mm
having spring washers from the opposite side. After fixing, remove the right and left BH
arm horizontal leveling jig (1) (SUS CSB M5 x 12mm), right and left BH arm horizontal
leveling jig (2) (SUS CSB M3 x 10mm), and BH tilting adjusting jig (J753) (SUS CSB M2.6 x
16mm).
SUS CSB M3 x 14mm with spring washer
SUS CSB M4 x 15mm
SUS CSB M2.6 x 16mm
CSB M5 x 12mm
CSB M3 x 10mm
Bond holder (#5)
Fig. B057
2mm
-1102+ ,/.2
79
2.5mm
Cap Screw Wrench
3mm
Cap Screw Wrench
4mm
Cap Screw Wrench
NE00040-00
Assembly
Unnecessary
-1102+ ,/.2
b)
Mount the transducer to the bond holder (#5). Lead the transducer wiring to the outside
by fixing it with the white plastic wire clamp after passing it through the hole on the upper
face of the bond holder. Set the notched front face of the bond holder (#5) to meet the front
face of the transducer as the longitudinal mounting position of the transducer. Bring the
lateral position rightward. After mounting, fix the transducer with the tightening torque
of 59Ncm (6Kgfcm) by four SUS CSB M2.6 x 16mm.
Fig B059
2mm
-1102+ ,/.2
NE00040-00
80
Assembly
Fix two SUS CSB M4 x 10mm for preventing Z from lowering to the pivot (fulcrum)
mounting base with the tightening torque of 196Ncm (20Kgfcm).
Bonding head
Bond holder (#5)
Transducer
Capillary
Pivot shaft
(fulcrum shaft) unit
Fig.B060
3mm
-1102+ ,/.2
b)
Capillary mounting /
dismounting jig (J685)
Capillary height
adjusting jig (J708)
Fig. B061
-1102+ ,/.2
81
Jig J708
Jig J685
Capillary
mounting / dismounting jig
NE00040-00
Assembly
c)
Fig. B062
Caution
Lock the upper-limit stopper by hexagon nut M4 and then, lock it
with paint for preventing it from being loosened.
Indication
d)
-1102+ ,/.2
2mm
Cap Screw Wrench
45.8mm
Block gaug
33.45mm. Lock the lower-limit stopper SUS HSB M4 x 16mm by lock nut hexagon nut M4.
SUS HSB M4 x 16mm hexagon nut M4
Lower-limit stopper
Bonding head
Bond holder (#5)
Transducer
Capillary
Block gauge
Pivot (fulcrum) shaft unit
Fig. B063
Caution
Indication
NE00040-00
82
-1102+ ,/.2
2mm
Cap Screw Wrench
33.45mm
Block gauge
Assembly
Mount the linear sensor to the sensor mounting plate (#9). Attach the sensor closely in
such a way as no gap exists between the sensor lower side and the stepped notched face of
the sensor mounting plate and also between the right side of the sensor and the
positioning pin, and then, fix the sensor by two SUS CSB M2.6 x 6mm.
SUS CSB M2.6 x 6mm
Linear sensor
Fig. B064
2mm
-1102+ ,/.2
2)
Fix the sensor mounting plate (#9) to which the linear sensor has been mounted to the
linear sensor unit temporarily by four SUS CSB M3 x 8mm. Mount the eccentric pin.
Linear sensor
Eccentric pin
Fig. B065
2.5mm
-1102+ ,/.2
83
NE00040-00
Assembly
3)
Fix the linear sensor unit to the bonding head temporarily by four SUS CSB M4 x 8mm.
Mount the eccentric pin.
SUS CSB M4 x 8mm
Bonding head
Eccentric pin
Linear sensor unit
Fig. B066
3mm
-1102+ ,/.2
b)
Fig. 067
SUS CSB M2.6 x 4mm
-1102+ ,/.2
NE00040-00
84
2mm
Cap Screw Wrench
Assembly
c)
Draw the cable holder connector (PJ-3) out of the cable holder bundled wire hole between
bond holder (#5) and transducer.
Insulating plate
cable holder
1.5mm
-1102+ ,/.2
2)
GND wire
cable holder
Transducer
Fig B069
SUS CSB M2 x 6mm with flat washer and spring washer
1.5mm
-1102+ ,/.2
85
NE00040-00
Assembly
d)
Cable clamp
Plate
Bonding agent
Fig. B070
-1102+ ,/.2
Fig. B071
NE00040-00
86
2mm
Cap Screw Wrench
Cemedyne
Super X
Black
Mounting
Fig. B072
Unnecessary
-1102+ ,/.2
Fig. B073
Unnecessary
-1102+ ,/.2
87
NE00040-00
Mounting
Positioning pin
Fig. 074
4mm
-1102+ ,/.2
Guide
Camera lens tube (#13)
Camera lens tube
positioning pin
Guide
Linear sensor
connector is present
inside this section.
Fig. B075
Unnecessary
-1102+ ,/.2
NE00040-00
88
Mounting
Bundle wires by the nylon clamp and fix them by one SUS CSB M3 x 5mm and two SUS
CSB M4 x 8mm.
SUS CSB M4 x 8mm
Nylon clamp
(NK-7N)
Nylon clamp
Nylon clamp
(NK-3N)
(NK-5N)
Fig. B076
2.5mm
-1102+ ,/.2
b)
3mm
Cap Screw Wrench
Bundle wires by the nylon clamp and fix them by two SUS CSB M3 x 6mm. Fix PJ5
(Spool) wire to the rear side of the side illumination cable by using the cable tie for
preventing it from being disconnected.
SUS CSB M3 x 6mm
Nylon clamp
Metal clamp
(NK-5N)
Fig. B077
2.5mm
-1102+ ,/.2
89
NE00040-00
Mounting
Nylon clamp
(NK-3N)
Nylon clamp
(NK-3N)
PJ4 (EFU)
PJ5 (SPOOL)
JBP board
(JBP-315)
PJ1 (XY)
Fig. B078
Unnecessary
-1102+ ,/.2
NE00040-00
90
Adjustment
XY waveform
Measurable
Channel
2 channels at least
Caution
Take an anti-static electric measure without fail when adjusting the electric unit.
-1102+ ,/.2
Indication
Fig. B079
Caution
91
Unnecessary
-1102+ ,/.2
NE00040-00
Adjustment
Perform basic adjustment by using an oscilloscope. Adjust the output voltage of the linear
sensor amplifier to be able to display at the center of the monitor screen of the oscilloscope.
If the waveform cannot be seen easily, the setting range may be changed.
Caution
Time setting
10ms/div
Voltage setting
500mV
Scan mode
DC mode
Trigger
Auto mode
For stabilizing the output voltage, wait for approx. 5 minutes after turning
on the power supply before starting the adjustment work.
b)
-1102+ ,/.2
After removing the Z-axis linear sensor cover, connect the probe of an oscilloscope. (Use
CH1 and CH2.) Connect the probe to TP1 (Vref) and also connect GND to TP6 (GND).
Adjust CH1 and CH2 in the same way.
Fig. B080
Note) Connector is not connected for imaging.
-1102+ ,/.2
NE00040-00
92
c)
Adjustment
Make sure that the voltage is approx. 2.5V, and adjust the waveform to be displayed at the
center of the screen by OFFSET setting of the oscilloscope. The waveform at the center of
the screen serves as the reference waveform. The reference waveform is the reference
setting position for origin adjustment and Lissajous waveform.
Fig. B081
Caution
Set the waveform to the center position without fail by OFFSET setting.
Dont set the position by POSITION setting, otherwise precise origin
adjustment becomes impossible.
-1102+ ,/.2
Trigger setting
Trigger mode
SINGLE
Trigger CH
CH1
Trigger level
2.5V
-1102+ ,/.2
93
NE00040-00
Adjustment
Connect CH1 to TP4 (Z phase) and connect TP1 (Vref) to CH2. Connect GND of both CH1
and CH2 to TP6.
CH1
TP4
TP6
Fig. B082
TP1
CH2
-1102+ ,/.2
b)
Fig. B083
-1102+ ,/.2
NE00040-00
94
Adjustment
c)
By moving the Z-axis of the bonding head manually to the upper-limit and lower-limit, the
origin waveform is displayed in CH1 in the vicinity of the stroke center.
Fig. B084
-1102+ ,/.2
d)
Waveform standard
The ratio at point a and point b of origin signal shall be within a range of 0.9 ~ 1.1 to the
reference waveform. (a/b =0.9 ~ 1.1)
A voltage of higher than 0.4V shall be output with reference to the reference waveform.
(0.4Va, b)
Fig. B085
-1102+ ,/.2
95
NE00040-00
Adjustment
Fig.B086
Caution
NE00040-00
96
Adjustment
Mechanical adjustment
Adjust the space between the linear scale and the linear sensor in the bonding head.
Loosen four SUS CSB M4 x 8mm which fix the sensor block. Adjust the space between the
linear sensor and the linear scale by turning the eccentric pin 3 (#12).
Perform this
adjustment while monitoring the origin waveform on the oscilloscope until the waveform
conforms to the standard.
SUS CSB M4 x 8mm
Sensor block
Eccentric pin3 (#12)
Linear sensor
Fig. B087
3mm
-1102+ ,/.2
b)
Electric adjustment
Perform this electric adjustment when the output voltage output at points and b is higher
than 0.4V with reference to the reference waveform in mechanical adjustment. Adjust the
signal output by turning the VR5 control knob of the linear sensor amplifier. By turning
the VR5 control knob of the linear sensor amplifier, the ratio at points a and b changes.
Perform the mechanical adjustment again. After the end of adjust SUS CSB M4 x 8mm.
Fig. B088
Caution
adjustment.
-1102+ ,/.2
97
NE00040-00
Adjustment
XY waveform
Measurable
Channel
2 channels at least
Caution
Take an anti-static electric measure without fail when adjusting the electric unit.
-1102+ ,/.2
Indication
Fig. B089
Caution
NE00040-00
98
Unnecessary
-1102+ ,/.2
Adjustment
Perform basic adjustment by using an oscilloscope. Adjust the output voltage of the linear
sensor amplifier to be able to display at the center of the monitor screen of the oscilloscope.
If the waveform cannot be seen easily, the setting range may be changed.
Caution
Time setting
10ms/div
Voltage setting
500mV
Scan mode
DC mode
Trigger
Auto mode
For stabilizing the output voltage, wait for approx. 5 minutes after
turning on the power supply before starting the adjustment work.
b)
-1102+ ,/.2
After removing the Z-axis linear sensor cover, connect the probe of an oscilloscope. Use CH1
and CH2. Connect the probe to TP1(Vref) and also connect GND to TP6 (GND). Adjust
CH1 and CH2 in the same way.
TP6 (GND)
TP1(Vref)
Fig. B090
-1102+ ,/.2
99
NE00040-00
Adjustment
c)
Make sure that the voltage is approx. 2.5V, and adjust the waveform to be displayed at the
center of the screen by OFFSET setting of the oscilloscope. The waveform at the center of
the screen serves as the reference waveform. The reference waveform is the reference
setting position for origin adjustment and Lissajous waveform.
Fig. B091
Caution
Set the waveform to the center position without fail by OFFSET setting.
Dont set the position by POSITION setting, otherwise precise origin
adjustment becomes impossible since the precise Lissajous waveform
-1102+ ,/.2
origin is deviated.
(3) Lissajous waveform adjustment
The Lissajous waveform is the linear sensor output waveform of the Z-axis of bonding head. If
the Lissajous waveform is not adjusted properly, an abnormal Z sound and a Z count error occur.
a)
-1102+ ,/.2
NE00040-00
100
Adjustment
b)
Connect CH1 to TP2 (A) and also connect CH2 to TP3 (B). Connect both GND to
TP6 (GND).
Fig. B092
-1102+ ,/.2
2)
By moving the Z-axis of the bonding head vertically by hand, a waveform (Lissajous
waveform) is displayed near the oscilloscope screen center.
Fig. B093
-1102+ ,/.2
101
NE00040-00
Adjustment
Moire angle is adjusted for adjusting the waveform size. The waveform is maximized
when the moir angle is adjusted in such a way as the scale line of the linear scale
becomes parallel to the linear sensor.
Linear sensor
Sensor mounting plate (#9)
Fig. B094
Caution
-1102+ ,/.2
Fig.B095
-1102+ ,/.2
NE00040-00
102
Adjustment
3)
Fig. B096
-1102+ ,/.2
4)
Loosen four SUS CSB M3 x 8mm which fix the sensor mounting plate (#9) of sensor base
(#10). Adjust the waveform to be the maximum by turning the eccentric pin 2 (#26) for
adjusting the moire angle by using a precise screwdriver ().
Fig. B097
2.5mm
-1102+ ,/.2
103
()
Driver
NE00040-00
Adjustment
5)
When turning the eccentric pin 2 (#26) for adjusting moire angle once, a peak point
(maximum point) appears twice or so. Adjust the moire angle to the maximum position.
Fix four SUS CSB M3 x 8mm which fix the sensor mounting plate (#9) of the sensor base
(#10).
SUS CSB M3 x 8mm
Fig.B098
2.5mm
-1102+ ,/.2
b)
()
Driver
Fig.B099
-1102+ ,/.2
NE00040-00
104
Adjustment
2)
Fig. B100
-1102+ ,/.2
3)
Loosen four SUS CSB M3 x 10mm which fix the sensor base (#10), and adjust the
waveform to be a true circle by turning the roll angle by means of a precise screwdriver
().
Fig B101
2.5mm
-1102+ ,/.2
105
()
Driver
NE00040-00
Adjustment
4)
When turning eccentric pin 1 (#25) for adjusting the roll angle by using a precise
screwdriver (-), the waveform tilts rightward or leftward. Adjust the roll angle until the
waveform becomes a true circle.
Fig. B102
-1102+ ,/.2
5)
()
Driver
After the end of roll angle adjustment, fix four SUS CSB M3 x 10mm which fix the sensor
base (#10).
Fig. B103
2.5mm
-1102+ ,/.2
NE00040-00
106
Adjustment
displayed near the oscilloscope screen center, the origin return can be done.
If not
-1102+ ,/.2
b)
Click [Tool] [Output check] of the menu. Select [Bond head] of [Output check] dialog box
and lower the Z-axis to 90050m horizontal level by [Z move (Z) switch]. In this case,
lower the Z-axis at the position where it does not touch the heat block or load clamper.
Fig.B104
Unnecessary
-1102+ ,/.2
107
NE00040-00
Adjustment
c)
Z Lissajous ON switch
Down switch
Fig.B105
-1102+ ,/.2
d)
Control knobs
VRl : Abscissa (phase A) size
X-axis moves.
Y-axis moves
VR2
VR1
VR4
VR3
Fig. B106
-1102+ ,/.2
NE00040-00
108
Adjustment
Fig. B107
Measuring position
90050m
(Horizontal level)
Amplitude voltage
Center voltage
2050~1910mV
50mV
Mutual difference of
amplitude voltage
Within 60mV
-1102+ ,/.2
Center
voltage
Center
voltage
Amplitude voltage B
Amplitude voltage A B
= mutual difference of amplitude voltage
Amplitude voltage A
Fig.B108
-1102+ ,/.2
109
NE00040-00
Adjustment
Check the Lissajous waveform by the Z-axis position (height) at 2 points. Click [Tool]
[Output check] from the menu.
Fig. B109
-1102+ ,/.2
b)
Select [Bond head] tab of [Output check] dialog box, and perform measurement by changing
the Z-axis to the following measuring position. Since the linear scale moves circularly, the
Lissajous waveform profile changes as the Z position changes to cause a standard change.
Set Z-axis to the following measuring value by [Z-axis move (Z) switch], and check the
Lissajous waveform by turning on [Z Lissajous adjustment].
Fig B110
Mutual difference of
Measuring position
Amplitude voltage
Amplitude voltage
260050m (1 lifting)
2080~1880mV
50mV
Within 60mV
960050m (5 lifting)
2150~1800mV
80mV
Within 120mV
NE00040-00
110
amplitude voltage
-1102+ ,/.2
c)
Adjustment
The linear scale control knob is adjusted when the measuring value is 90050m
[horizontal level]. The other measuring positions are not adjusted but checked only. If
this setting cannot be done within the standard, perform mechanical adjustment of moire
angle and roll angle again. After adjustment, fix four SUS CSB M3 x 8mm for fixing the
moir angle and four SUS CSB M3 x 10mm for fixing the roll angle, and then, lock them
with screw lock painting.
2.5mm
-1102+ ,/.2
111
NE00040-00
Calibration
(1)
Loosen two SUS CSB M6 x 12mm which fix the operation panel (SWU-182).
Fig. B111
5mm
-1102+ ,/.2
b)
Move the operation panel (SWU-182) from normal fixed position of operation panel to
fixed position of operation panel during maintenance.
Fig. B112
Unnecessary
-1102+ ,/.2
NE00040-00
112
Calibration
(1)
2)
Fig. B113
Unnecessary
-1102+ ,/.2
c)
Remove the loader side cover by removing one SUS hexagon socket head countersunk bolt
(screw) M3 x 4mm and two SUS CSB M3 x 8mm. Remove the unloader side cover by
removing one SUS hexagon socket head countersunk bolt (screw) M3 x 4mm and two SUS
CSB M3 x 8mm.
Fig. B114
2mm
-1102+ ,/.2
113
2.5mm
Cap Screw Wrench
NE00040-00
Calibration
d)
(1)
Remove two CSB M6 x 20mm which fix the universal indexer (UF-79A) to the loader side.
CSB M6 x 20mm
Fig. B115
5mm
-1102+ ,/.2
2)
Remove two CSB M6 x 20mm which fix the universal indexer (UF-79A) to the unloader
side.
CSB M6 x 20mm
Fig. B116
5mm
-1102+ ,/.2
NE00040-00
114
Calibration
(1)
e)
Vacuum piping
Fig. B117
Unnecessary
-1102+ ,/.2
f)
Move the universal indexer (UF-79A) forward up to the position shown in Fig. B118.
Fig. B118
Unnecessary
-1102+ ,/.2
115
NE00040-00
Calibration
Click [Machine management] [Machine specific] [Z calibration] from the menu. The
adjustment indicated in [Z calibration] dialog box is done in the sequence of [Z force fine].[Z
motion ratio], [Z origin correct], and [Z force correction].
Fig. B119
Unnecessary
-1102+ ,/.2
b)
Fig. B120
Unnecessary
-1102+ ,/.2
NE00040-00
116
Calibration
c)
Prepare the BH leveling jig (J712) which sets the measuring point of load cell to 200mm
from the lower side and the force adjustment jig set (J772) including the load cell.
Fig. B121
-1102+ ,/.2
d)
Jig J712
Jig J772
BH leveling jig
Set BH leveling jig (J712) to the position between the XY table and the universal indexer.
Display the short cut menu by right click, and click [Enter Chessman Mode]. Set the
capillary to the load cell center by Chessman while gradually lowering Z by the arrow on the
monitor screen.
Fig. B122
Caution
Stop the capillary just before touching the load cell without
grounding to the load cell.
-1102+ ,/.2
117
Jig J712
Jig J772
BH leveling jig
NE00040-00
Calibration
e)
Display the short cut menu by right click, and then, click [Exit chessman Mode]. Click
[Next].
Fig. B123
-1102+ ,/.2
f)
Jig J712
Jig J772
BH leveling jig
Amplifier 0 adjustment
1)
Adjust 0 by pressing [ZERO] key of the amplifier of Bonding force adjusting jig set
(J772).
[ZERO] KEY
Fig. B124
-1102+ ,/.2
NE00040-00
118
Jig J712
Jig J772
BH leveling jig
Calibration
2)
0 adjustment ends.
Fig.B125
-1102+ ,/.2
g)
Jig J712
Jig J772
BH leveling jig
Ground the capillary to the load cell by clicking the Z move arrow, then, lower it until the
load meter is kept constant. Input the fixed value to [Measured data]. The load meter
indicates 20.3.
Fig. B126
-1102+ ,/.2
119
Jig J712
Jig J772
BH leveling jig
NE00040-00
Calibration
2)
Fig. B126
-1102+ ,/.2
h)
Jig J712
Jig J772
BH leveling jig
Jig J712
Jig J772
BH leveling jig
Fig. B127
-1102+ ,/.2
NE00040-00
120
Calibration
2)
Fig. B128
-1102+ ,/.2
i)
Jig J712
Jig J772
BH leveling jig
Perform the work of (2)-g)-1~ 2) work in the same way as in 20g setting. After the screen
in Fig. B129 has been displayed, click [Finish]. Repeat the work in (2)-f)-1~ j) 3 times and
finish the Z force fine.
Fig. B129
-1102+ ,/.2
121
Jig J712
Jig J772
BH leveling jig
NE00040-00
Calibration
(1)
(2)
Fig. B131
Unnecessary
-1102+ ,/.2
(2) Set BH leveling jig (J712) before the XY table, and click [Next].
Fig. B132
-1102+ ,/.2
NE00040-00
122
Jig J712
Jig J772
BH leveling jig
Calibration
(3)
(3)
a)
Display the short cut menu by right-click and click [Enter chessman Mode].
Set the
Capillary
BH leveling jig (J712)
Load cell
Fig. B133
-1102+ ,/.2
b)
Jig J712
Jig J772
BH leveling jig
Display the shirt cut menu by right-click and click [Exit chessman Mode]. Click [Next].
Fig. B134.
-1102+ ,/.2
123
Jig J712
Jig J772
BH leveling jig
NE00040-00
Calibration
c)
(3)
If a message Measurement was not performed correctly appears after the end of
measuring operation, check the positional relation between the BH leveling jig (J712) and
the bonding head. Click [Back] and perform measurement again.
Fig. B135
-1102+ ,/.2
d)
Jig J712
Jig J772
BH leveling jig
When a message [Measurement was completed successfully] appears after the end of
measuring operation, click [Next].
B136
-1102+ ,/.2
NE00040-00
124
Jig J712
Jig J772
BH leveling jig
Calibration
(4)
(4)
a)
Display the short cut menu by right-click, and [Enter Chessman Mode]. Set the capillary
to be grounded to the lower stage of BH leveling jig (J712) by chessman.
Capillary
BH leveling jig (J712)
Load cell
Fig. B137
-1102+ ,/.2
b)
Jig J712
Jig J772
BH leveling jig
Display the shirt cut menu by right-click and click [Exit chessman Mode]. Click [Next].
Fig. B138
-1102+ ,/.2
125
Jig J712
Jig J772
BH leveling jig
NE00040-00
Calibration
c)
(4)
If a message Measurement was not performed correctly appears after the end of
measuring operation, check the positional relation between the BH leveling jig (J712) and
the bonding head. Click [Back] and perform measurement again.
Fig. B139
-1102+ ,/.2
d)
Jig J712
Jig J772
BH leveling jig
When a message [Measurement was completed successfully] appears after the end of
measuring operation, click [Next].
Fig. B140
-1102+ ,/.2
NE00040-00
126
Jig J712
Jig J772
BH leveling jig
Calibration
(5)
(5) [Z motion ratio] is calculated by measuring two points in the higher and lower stages of BH
leveling jig (J712). After calculation, click [Finish].
Fig. B141
-1102+ ,/.2
127
Jig J712
Jig J772
BH leveling jig
NE00040-00
Calibration
(1)
(2)
Fig. B142
Unnecessary
-1102+ ,/.2
(2) Set the BH leveling jig (J712) to the position before the XY table, and click [Next].
Fig. B143
-1102+ ,/.2
NE00040-00
128
Jig J712
Jig J772
BH leveling jig
Calibration
(3)
(3)
a)
Display the short cut menu by right-click, and click [Enter Chessman Mode]. Set the
capillary to be grounded to the lower stage of BH leveling jig (J712) by Chessman.
Capillary
BH leveling jig (J712)
Load cell
Fig. B144
-1102+ ,/.2
b)
Jig J712
Jig J772
BH leveling jig
Display the shirt cut menu by right-click and click [Exit chessman Mode]. Click [Next].
The transducer lowers to execute measuring operation.
Fig. B145
-1102+ ,/.2
129
Jig J712
Jig J772
BH leveling jig
NE00040-00
Calibration
(4)
(4) When the screen shown in Fig.B146 is displayed after the end of measuring operation, click
[Finish]. Remove the BH leveling jig (J712), and terminate [Z origin correct] by clicking [OK] of
[UTC-1000] dialog box.
Fig. B146
-1102+ ,/.2
NE00040-00
130
Jig J712
Jig J772
BH leveling jig
(1)
Calibration
(2)
Fig. B147
Unnecessary
-1102+ ,/.2
(2) Make sure that no obstacle exists below the capillary. If any, remove it or move the capillary by
[Chessman move] or [Move mode]. Click [Next].
Fig. B148
Unnecessary
-1102+ ,/.2
131
NE00040-00
Calibration
(3)
(3) When the screen shown in Fig. B149 has been displayed after the correction operation, click
[Finish]. Now, [Z force correction] ends.
Fig. B149
Unnecessary
-1102+ ,/.2
NE00040-00
132
(1)
(2)
(3)
(4)
(5)
(6)
(7)
Calibration
Actual load
20g
201g
200g
2001g
Caution
Make sure that the bottom side measured value of [Z motion ratio] is within a range of
9001m and [Z force fine] is within a range of the standard value.
133
NE00040-00
Mounting
Pin
Fig. B150
Caution
Mount the camera lens tube positioning jig without any gap between its
2.5mm
-1102+ ,/.2
Positioning by
applying to l plane
Camera lens tube
positioning jig (J713)
Positioning by
applying to 2 planes
Fig. B151
Caution
NE00040-00
134
3mm
-1102+ ,/.2
Mounting
Fix the ring illumination to the illumination holder (#21) of the camera lens tube mount by
two SUS M3 x 10mm with flat washers and spring washers.
Ring illumination
Fig. B152
2.5mm
-1102+ ,/.2
b)
A heat haze preventive tube is inserted between the camera lens tube ring illumination.
Insert the heat haze preventive tube securely to the tapered face on the tube camera lens
tube side and the tapered face on the ring illumination side.
Tube
Ring illumination side tapered
Ring illumination
Fig. B153
Caution
The tube is a thin and soft material. Mount it without bending it.
Unnecessary
-1102+ ,/.2
135
NE00040-00
Adjustment
Insert the fiber wire of the center lamp into the innermost of the camera lens tube unit and
fix it by one CSB M3 x 10mm.
CSB M3 x 10mm
Fiber wire
Fig. B154
2.5mm
-1102+ ,/.2
b)
Adjust the ring illumination position under a projected condition of a sample on the monitor
screen. For this adjustment, refer to (C) Ring illumination adjustment.
Fig. B155
Unnecessary
-1102+ ,/.2
NE00040-00
136
Adjustment
(B) Camera focus adjustment
The bonding head is provided with two CCD cameras for high magnification and low magnification.
The high magnification camera is indicated as H and the low magnification camera is indicated
as L. For focus adjustment, H (high magnification) and L (low magnification) are indicated
on the camera lens tube.
Fig. B156
Unnecessary
-1102+ ,/.2
Check an image by projecting a sample on the monitor screen. By selecting [Edit]-[Live image
set] from the menu, the image position, [High], and [Low] can easily be selected.
Fig.B157
Unnecessary
-1102+ ,/.2
137
NE00040-00
Adjustment
*1
*2
Fig. B158
Unnecessary
-1102+ ,/.2
Fig. B159
An image when the CCD camera is mounted obliquely
Unnecessary
-1102+ ,/.2
NE00040-00
138
Adjustment
If oblique mounting of CCD camera is adjusted referring to die (chip), the CCD camera may be
inclined according to the inclination of die if the die is mounted obliquely. For adjusting the
oblique mounting of CCD camera, set the CCD camera to meet the end face of island of the
frame without fail.
Fig. B160
An image when CCD camera is mounted normally
Unnecessary
-1102+ ,/.2
a)
*2
*1
*5
*4
*3
*6
Fig. B161
Unnecessary
-1102+ ,/.2
139
NE00040-00
Adjustment
Unnecessary
-1102+ ,/.2
b)
Display the move direction limit on the monitor screen by right-clicking. Chessman again in
the monitor screen, and set the X direction. The move limit is normally set in the XY direction.
By right-clicking chessman in the chessman mode, *1 is displayed.
*1
Fig. B162
Unnecessary
-1102+ ,/.2
NE00040-00
140
Adjustment
c)
Loosen and adjust one CSB M3 x 8mm which fixes CCD camera so that the end face of
island of the frame is displayed in parallel on the monitor screen by moving chessman
in the X direction (Chessman does not move in the Y direction).
Fig. B163
2.5mm
-1102+ ,/.2
2)
Fig B164
Unnecessary
-1102+ ,/.2
141
NE00040-00
Adjustment
3)
Position the CCD camera so that the end face of the island of the frame is displayed in
parallel with the cross mark.
Cross mark
Fig. B165
Unnecessary
-1102+ ,/.2
d)
Fig. B166
2.5mm
-1102+ ,/.2
NE00040-00
142
Adjustment
Fig.B167
Unnecessary
-1102+ ,/.2
Fig.B168
Unnecessary
-1102+ ,/.2
143
NE00040-00
Adjustment
a)
Fig. B169
Unnecessary
-1102+ ,/.2
Fig.B170
Unnecessary
-1102+ ,/.2
NE00040-00
144
Adjustment
Cross mark
Fig.B171
Unnecessary
-1102+ ,/.2
b)
CSB M3 x 8mm
Fig. B172
2.5mm
-1102+ ,/.2
145
NE00040-00
Adjustment
c)
After positioning the CCD camera, display the short cut menu by right-clicking*1, and
reset [Move direction limit] of chessman mode to [XY direction].
*1
Fig. B173
Unnecessary
-1102+ ,/.2
NE00040-00
146
Adjustment
Fig. B174
Unnecessary
-1102+ ,/.2
Fig. B175
Unnecessary
-1102+ ,/.2
147
NE00040-00
Adjustment
Fig. B176
Unnecessary
-1102+ ,/.2
Fig. B177
Unnecessary
-1102+ ,/.2
NE00040-00
148
Adjustment
a)
Focusing
1)
After loosening the CSB M3 x 6mm one each, or two in total, which fix high magnification
focus and low magnification focus respectively, adjust the focus by moving the focusing
pin longitudinally.
CSB M3 x 6mm
Fig. B178
2.5mm
-1102+ ,/.2
2)
After the end of focus adjustment, fix CSB M3 x 6mm one each, or two in total, which fix
high magnification focus and low magnification focus respectively with the torque of
0.6Nm (approx. 6kgfcm) by using the torque driver (J705) as the camera lens tube focus
adjusting jig and hex socket (J706).
CSB M3 x 6mm
Fig. B179
Jig J705
-1102+ ,/.2
149
Jig J706
Hex. Socket
NE00040-00
Adjustment
b)
Camera calibration
1)
After focusing the CCD cameras, click [Machine management] [Machine specific]
[Camera calibration] from the menu.
Fig. B180
Unnecessary
-1102+ ,/.2
2)
Make sure that numeric RY1 and RX2 are within 03 at both high magnification and
low magnification as a result of camera calibration.
Fig. B181
Unnecessary
-1102+ ,/.2
NE00040-00
150
Adjustment
3)
Within 03
Fig.B182
Jig J705
Jig J706
2.5mm
-1102+ ,/.2
c)
Hex. Socket
After calibrating the CCD cameras, click [Machine management] [Machine specific]
[Camera offset ] from the menu.
Fig. B183
Unnecessary
-1102+ ,/.2
151
NE00040-00
Adjustment
2)
The reference values in camera offset/tool offset adjustment at low magnification and
high magnification are -10000500m in X offset and 0500m in Y offset.
Fig. B184
Unnecessary
-1102+ ,/.2
3)
If the numeric values are not within the reference values, the camera lens tube is not
mounted correctly. Check if the camera lens tube or camera lens tube mount is mounted
correctly.
Fig.B185
Unnecessary
-1102+ ,/.2
NE00040-00
152
Adjustment
H : 0.05mm
L : 0.75mm
Viewing field
(Screen range)
H : 0.790.59mm
L : 3.152.39mm
Unnecessary
-1102+ ,/.2
b)
temperature, the universal indexer thermally expands to cause out of focus when the pre
heater, main heater and after heater are operated and heated.
Temperature check
Fig. B186
Unnecessary
-1102+ ,/.2
153
NE00040-00
Adjustment
2)
Fig. B187
Unnecessary
-1102+ ,/.2
3)
Check if the size of actual bonding die (chip) of actual product meets the size of dummy
die. High magnification die (chip) is normally used. Since the depth of focus (focused
range) is shallow, the focus becomes out of focus when the height changes.
Unnecessary
-1102+ ,/.2
NE00040-00
154
Adjustment
4)
Fig.B188
Unnecessary
-1102+ ,/.2
5)
If the bond level is out of the reference value, heat block height must be set again.
Click [Machine management] [Machine specific] [Indexer adjustment] from the menu
and set the heat block height again according to the setting wizard.
Fig. B189
After re-setting, measure the bond level again to make sure that it meets the reference
value (90050m).
Unnecessary
-1102+ ,/.2
155
NE00040-00
Adjustment
(C) Ring illumination adjustment (side lamp)
Finely adjust the side illumination that has been mounted in (A) Camera lens tube unit mounting
method. Transfer a raw frame without die (chip) to the bonding position.
Ring illumination
Raw frame
Fig.B190
Unnecessary
-1102+ ,/.2
After displaying the island of the raw frame on the monitor screen, set [low magnification (*2)] by
[Edit] [Live image set (*1)] (Running screen) (Live image adjusting icon). Set the center lamp
to 0(*3) to light the side illumination only.
*3
*1
*2
Fig. B191
Unnecessary
-1102+ ,/.2
NE00040-00
156
Adjustment
Adjust the brightness of side illumination while checking it on the monitor screen to such an
extent as the circular shade can be confirmed (*1). Make sure that the monitor screen center is
shaded circularly.
*1
Fig. B182
Unnecessary
-1102+ ,/.2
Side illumination fibers are bundled to be a ring-profiled to illuminate just below, so that the
center becomes dark to be donut-profiled illumination due to the structure. In case of a low
magnification image, the center dark portion only is displayed. Set the camera image center to
meet the side illumination center by placing the dark portion (shadow portion) to meet the cross
mark.
Unnecessary
-1102+ ,/.2
157
NE00040-00
Adjustment
(1) Adjustment when circular shadow exists on either right or left side
(1) Adjustment when circular shadow exists on either right or left side
a)
If the circular shade is not displayed at the center but displaced rightward or leftward, the
side illumination is deviated rightward or leftward.
Fig. B193
Unnecessary
-1102+ ,/.2
b)
Loosen two SUS CSB M3 x 12mm with spring washers and flat washers for adjusting the
illumination holder (#21) of the camera lens tube mount.
rightward or leftward to display the circular shadow at the center of the monitor screen.
Side illumination
Fig.B194
2.5mm
-1102+ ,/.2
NE00040-00
158
Adjustment
(1) Adjustment when circular shadow exists on either right or left side
c)
After adjusting to display the circular shadow at the center of the monitor screen, fix the
illumination holder (#21) of the camera lens tube mount by two SUS CSB M3 x 12mm with
spring washers and flat washers.
Ring illumination
Fig. B195
2.5mm
-1102+ ,/.2
159
NE00040-00
Adjustment
(2) Adjustment when the circular shadow exists at the upper or lower part
(2) Adjustment when the circular shadow exists at the upper or lower part
a)
If the circular shadow is not present at the center but deviated upward or downward, the
side illumination is deviated longitudinally.
Fig. B196
Unnecessary
-1102+ ,/.2
b)
Loosen two SUS CSB M3 x 10mm with spring washers and flat washers for adjusting the
illumination holder (#21) of the camera lens tube mount.
forward or backward to display the circular shadow at the center of the monitor screen.
Side illumination
Move rightward
or leftward.
Fig. B197
2.5mm
-1102+ ,/.2
NE00040-00
160
(2) Adjustment when the circular shadow exists at the upper or lower part
c)
Adjustment
After adjusting to display the circular shadow at the center of the monitor screen, fix the
illumination holder (#21) of the camera lens tube mount by two SUS CSB M3 x 10mm with
spring washers and flat washers.
Side illumination
Fig. B198
2.5mm
-1102+ ,/.2
161
NE00040-00
Adjustment
Click
Fig. B199
Caution
Unnecessary
-1102+ ,/.2
Initialization
1)
Fig. B200
Caution
capillary.
NE00040-00
-1102+ ,/.2
162
Adjustment
2)
*1
Fig. B201
Unnecessary
-1102+ ,/.2
b)
By clicking [RPS] (*1), program input can be done in wizard format. Perform RPS setting.
*1
Fig. B202
Unnecessary
-1102+ ,/.2
163
NE00040-00
Adjustment
c)
Fig. B203
Unnecessary
-1102+ ,/.2
2)
Click[Next], and CCD camera of the bonding head moves to the position above the pin
hole of the RPS unit.
Bonding head
CCD camera
Fig. B204
Unnecessary
-1102+ ,/.2
NE00040-00
164
Adjustment
d)
Set the reference pin (upper). The pin hole of the reference unit is displayed on the
monitor screen and the reference pin is provided at the center of the pin hole.
Before positioning
Fig. B205
Unnecessary
-1102+ ,/.2
2)
If the reference pin is not projected on the monitor screen, enter the [Chessman mode]
and relocate the CCD camera. Bring the reference pin to meet the center of the cross
mark at the center of the monitor screen.
After positioning
Fig.B206
Unnecessary
-1102+ ,/.2
165
NE00040-00
Adjustment
3)
When the CCD camera is set to a high magnification, the visual field narrows to difficult
to find the reference pin. By adjusting the illumination, the outer circumference of the
reference pin, etc. are seen. Find the pin center.
Unnecessary
-1102+ ,/.2
4)
If the CCD camera is not focused to the reference pin, the pin tip profile is not clear to
cause poor detection accuracy of RPS.
Before focusing
Fig. B207
Unnecessary
-1102+ ,/.2
NE00040-00
166
Adjustment
After focusing
Fig. B208
Unnecessary
-1102+ ,/.2
5)
Loosen two SUS CSB M3 x 8mm for fixing the upper face focus of the RPS unit mounted
to the universal indexer.
Fig. B209
2.5mm
-1102+ ,/.2
167
NE00040-00
Adjustment
6)
After
focusing, fix the focusing screw by two SUS CSB M3 x 8mm, and click [Next]. Now, the
pin is detected to store the reference pin position into memory.
Fig. B210
Focusing screw
2.5mm
-1102+ ,/.2
e)
()
Driver
Chessman mode and the CCD camera position is relocated by Chessman. Position the
CCD camera so that the pin is projected to the center of the cross mark located at the
center of the monitor screen.
Fig.B211
Unnecessary
-1102+ ,/.2
NE00040-00
168
Adjustment
2)
The position may be deviated more or less due to a difference between high magnification
CCD camera and low magnification CCD camera. Position the CCD camera so that the
pin is positioned at the center of the cross mark. After adjustment, click [Next].
Fig.B212
Unnecessary
-1102+ ,/.2
f)
1)
Fig. B213
Unnecessary
-1102+ ,/.2
169
NE00040-00
Adjustment
2)
The capillary of the bonding head moves to the position above the pin hole of RPS unit.
Bonding head
RPS unit
Capillary
Fig. B214
Unnecessary
-1102+ ,/.2
3)
By clicking [YES]*1), the capillary lowers automatically and stops at the last stored
position.
*1
Fig. B215
Caution
Never
disassemble
NE00040-00
Dont click [YES] during adjustment, otherwise the capillary and reference pin may
touch each other.
170
Unnecessary
-1102+ ,/.2
Adjustment
4)
Click [NO] (*1), and the capillary lowers every step in setting [Z move] of the next item.
*1
Fig. B216
Unnecessary
-1102+ ,/.2
g)
Fig. B217
Unnecessary
-1102+ ,/.2
171
NE00040-00
Adjustment
h)
The reference pin may not be seen depending upon the mounting method of the CCD
camera lens tube.
Fig. B218
Unnecessary
-1102+ ,/.2
2)
Set the CCD camera to low magnification, and adjust [Illumination] control knob (*1)
until the profile of reference pin is seen clearly.
*1
Fig. B219
Unnecessary
-1102+ ,/.2
NE00040-00
172
Adjustment
Fig. B220
Unnecessary
-1102+ ,/.2
3)
Loosen four SUS CSB M4 x 12mm which fix the camera lens tube.
Fig.B221
3mm
-1102+ ,/.2
173
NE00040-00
Adjustment
4)
Coarse adjustment
Set the reference pin to the center of the cross line by moving the camera lens tube while
monitoring the monitor screen.
Fig. B222
Unnecessary
-1102+ ,/.2
5)
Fine adjustment
After switching the CCD camera to high magnification, move the camera lens tube until
the reference pin enters the blue frame. By setting the Offset detection camera] selector
switch (*1) to [X direction], put the reference pin into the blue frame.
*1
Fig. B223
Unnecessary
-1102+ ,/.2
NE00040-00
174
Adjustment
6)
By setting [Offset detection camera] selector switch (*1) to [Y direction], put the reference
pin into the blue frame. If the reference pin does not enter the blue frame by the above
adjustment, adjust the RPS unit again.
*1
Fig. B224
Unnecessary
-1102+ ,/.2
7)
Fix four SUS CSB M4 x 12mm fixing the camera lens tube with the torque of 1.47Nm
(15Kgfcm) by using a torque wrench.
SUS CSB M4 x 12mm
Fig. B225
-1102+ ,/.2
175
NE00040-00
Adjustment
8)
After clicking [Cancel], perform the following setting again. By clicking [Cancel], the
information on the position relation being intended to store into memory is canceled.
[Machine management] [Machine specific] [Camera calibration]
[Machine management] [Machine specific] - [Camera offset]
The distance between the monitor screen angle and the capillary finely changes as a
result of the move of the camera lens tube unit, and resetting is necessary.
Unnecessary
-1102+ ,/.2
9)
After the end of resetting, start RPS setting. Perform resetting c) Reference system 1/8
~ g) Reference system 4/8. Make sure that the reference pin is put in the blue frame.
If not, perform this adjustment again by moving the camera lens tube.
Fig. B226
Unnecessary
-1102+ ,/.2
NE00040-00
176
Adjustment
*1
Fig. B227
Unnecessary
-1102+ ,/.2
Fig. B228
*1
Gap
Caution
Be careful not to allow the capillary tip to touch the reference pin.
Unnecessary
-1102+ ,/.2
177
NE00040-00
Adjustment
Fig. B229
Unnecessary
-1102+ ,/.2
*1
Fig. B230
Unnecessary
-1102+ ,/.2
NE00040-00
178
Adjustment
14) Adjust the illumination control knob (*1) until the capillary tip and reference pin profile
are seen clearly and the capillary tip turns black in a white background. Calibration
cannot be done if the illumination is too bright or too dark.
*1
Fig.B231
Unnecessary
-1102+ ,/.2
*1
1/3 of the
monitor screen
*2
Fig. B232
Unnecessary
-1102+ ,/.2
179
NE00040-00
Adjustment
i)
Offset camera adjusting results (*1) are displayed on the monitor screen.
Execute
*1
*2
Fig. B233
Unnecessary
-1102+ ,/.2
2)
Display (*1) appears on the monitor screen during the execution of calibration.
*1
Fig. B234
Unnecessary
-1102+ ,/.2
NE00040-00
180
Adjustment
3)
Calibration in X direction and Y direction (*1) and reference pin position (lateral) are
detected automatically. By setting the reference pin to [2-axes], the X and Y directions
are detected.
*1
Fig. B235
Unnecessary
-1102+ ,/.2
4)
After the end of reference system setting 5/8, calibration results of [offset detect camera]
are displayed on the monitor screen. Make sure that the calibration results of [offset
detect camera] conform to the specified values.
Unnecessary
-1102+ ,/.2
181
NE00040-00
Adjustment
5)
If the calibration results of [offset detect camera] are deviated from the specified values,
check the following items.
Unnecessary
-1102+ ,/.2
j)
Capillary lowering position is set automatically. By clicking [Auto set](*1), the capillary
moves to the optimum detection position. Click [Next] (*2).
*1
*2
Fig. B237
Caution
executed.
NE00040-00
-1102+ ,/.2
182
Adjustment
k)
Set the offset value. For [Offset value] [Auto set] (*1), and [Tool imprint] [Tool
imprint] (*2), the actual capillary position is detected by RPS unit and a calibration value
(offset value) of the detection position and actual bonding position is set.
*1
*2
Fig. B238
Unnecessary
-1102+ ,/.2
2)
By [Offset value](*1) [Auto set] (*2), the capillary is detected automatically to input an
offset value (*3) automatically.
*1
*3
*2
Fig. B239
Unnecessary
-1102+ ,/.2
183
NE00040-00
Adjustment
3)
*1
*2
Fig. B240
Unnecessary
-1102+ ,/.2
4)
By clicking [Tool imprint]](*1), bonding is done at the cross mark position to mark an
indentation.
*1
Fig. B241
Unnecessary
-1102+ ,/.2
NE00040-00
184
Adjustment
5)
Move the center of indentation to [set mark] (*2) by either chessman or [XY move] (*1).
For precise setting, circularize [set mark] (*2) and then, change the size to the same size
as the indentation size.
*1
*2
Fig.B242
Unnecessary
-1102+ ,/.2
6)
After setting the [set mark] (*2) to the center position of indentation by either chessman
or [XY move] (*1), click [Position determine] (*3) to store [offset value] (*4) into memory.
After inputting [offset value] (*4), click [Next(N)] (*5).
*1
*2
*3
*4
*5
Fig. B243
Caution
185
Unnecessary
-1102+ ,/.2
NE00040-00
Adjustment
1)
*1
Fig. B244
Unnecessary
-1102+ ,/.2
NE00040-00
186
Adjustment
If the bonding point (pad center) and bonding position (indentation ball) position are
deviated from each other during the bonding installation by executing the reference system,
correct it by RPS offset.
Fig. B245
Caution
If the reference system is not set, correct the above deviation by the
-1102+ ,/.2
camera offset.
b)
Unnecessary
Setting method
1)
Click [Machine management] [Machine specific] [RPS offset] from the menu.
Fig. B246
Unnecessary
-1102+ ,/.2
187
NE00040-00
Adjustment
2)
Display the setting screen on the monitor by clicking [RPS offset]. In this screen, the
cross mark center at the center of the screen does not meet the center of the actually
bonded ball center. When the cross mark meets the ball center, it is not offset deviation.
Check the bonding position and position detection.
Fig. B247
Unnecessary
-1102+ ,/.2
3)
*1
Fig.B248
Unnecessary
-1102+ ,/.2
NE00040-00
188
Adjustment
4)
Set the bonding ball to the matching ball by either chessman or [XY move](*1). The
offset value changes automatically. Adjustment is completed by clicking [OK] (*2).
*1
*2
Fig. B249
Caution
If [Cancel] is
Unnecessary
-1102+ ,/.2
Make sure that the bonding point (pad center) meets the bonding position by bonding
using the icon of [1 wire bonding] (*1)of the step bond.
continuous run.
*1
Fig. B250
Unnecessary
-1102+ ,/.2
189
NE00040-00
Adjustment
6)
The reference system does not operate unless [Capillary auto Calibration] is selected by
[Machine management] [Running condition] [Capillary auto Calibration] from the
menu.
Fig. B251
Unnecessary
-1102+ ,/.2
7)
The reference system does not operate unless [Calibrate] is selected when the bonding
has been started.
Fig. B252
Unnecessary
-1102+ ,/.2
NE00040-00
190
Adjustment
6.
Fig. B253
Caution
Adjust the torch electrode unit when the machine is ready for bonding
-1102+ ,/.2
Unnecessary
Make sure that the lead side (2nd) [Bond level setting value] is within the standard of 900
50m (*1).
*1
Fig. B254
Unnecessary
-1102+ ,/.2
191
NE00040-00
Adjustment
c)
Fig.B255
Unnecessary
-1102+ ,/.2
d)
Set [Pre heater], [Main heater], and [Post heater] to [None] (*1) for preventing a burn or
injuries, and start work after the heaters have cooled down.
*1
Fig. B256
Caution
Lower the
temperature
NE00040-00
Wait for a while until the temperature has become lower than 50 after turning off
the heater power supply before starting the maintenance of hot sections for the
purpose of preventing a burn.
192
Unnecessary
-1102+ ,/.2
Adjustment
e)
Clamp the frame by the lead clamper. Click [Frame feed] (*1) on the monitor screen to
transfer one frame to the bonding stage.
Fig. B257
*1
Unnecessary
-1102+ ,/.2
f)
The lead clamper height differs by the frame thickness according to whether a frame exists
or not. Adjust the height under the clamped condition (*1) of a frame by the lead clamper
without fail.
*1
Fig. B258
Unnecessary
-1102+ ,/.2
193
NE00040-00
Adjustment
Set the eccentric pins of lateral move and vertical move of the torch electrode to meet the
eccentric center.
Loosen two SUS CSB M2.6 x 14mm of the eccentric pin for vertical
adjustment, and bring the pin to meet the eccentric center. Eccentric quantity : 1.4mm
Fig. B259
2mm
-1102+ ,/.2
b)
Eccentric pin for lateral adjustment. Loosen two SUS CSB M2.6 x 14mm of the eccentric
pin for lateral adjustment, and bring the pin to meet the eccentric center.
Eccentric
quantity : 0.5mm
Fig. B260
2mm
-1102+ ,/.2
NE00040-00
194
Adjustment
c)
The main body shaft of torch electrode is made of stainless steel (2mm) and the
discharge section having a bend tip is made of platinum (Pt : 0.4mm).
Torch
Shaft
Fig. B261
Unnecessary
-1102+ ,/.2
2)
Mount the electrode holder to the torch electrode and fasten it temporarily by SUS CSB
M2.6 x 6mm.
Fix it after the position and angle of the torch electrode have been
completed.
Electrode holder
Torch electrode
Fig. B262
2mm
-1102+ ,/.2
195
NE00040-00
Adjustment
3)
Fix the electrode holder to the torch unit by one fixing screw SUS CSB M2.6 x 8mm (#9).
Electrode holder
Fig. B263
Caution
d)
2mm
-1102+ ,/.2
Fig. B264
Unnecessary
-1102+ ,/.2
NE00040-00
196
Adjustment
2)
Lower the Z-shaft by [Lowering switch](*2) of [Z move] (*1) on the monitor screen.
*1
*2
Fig. B265
Unnecessary
-1102+ ,/.2
3)
[Z move]
[Lifting switch]
[Lowering switch]
Lowers every 0.5m step
[Lowering switch]
Lowers every 100m step
Fig. B266
Unnecessary
-1102+ ,/.2
197
NE00040-00
Adjustment
4)
Lower the Z shaft so that the torch electrode tip comes to the outer diameter of capillary
(straight part of shank) so as not to allow the capillary and torch electrode to touch each
other.
Capillary
Torch electrode
Fig. B267
Unnecessary
-1102+ ,/.2
5)
Adjust the gap between the torch electrode and the outer profile of capillary to 0.1 ~
0.15mm. Adjust the eccentric pin for lateral adjustment of the torch electrode by using
the gap gauge (Jig J501 : t= 0.095mm) and gap gauge ( jig J503 : t= 0.15mm).
Capillary
Fig. B268
-1102+ ,/.2
NE00040-00
198
Jig J501
Jig J503
t:0.095mm
Gap gauge
t:0.15mm
Gap gauge
Adjustment
6)
After loosening two SUS CSB M2.6 x 14mm, adjust the eccentric pin for vertical
adjustment by turning it using a precise screwdriver (-).
Electrode holder
Longitudinal position holder
(SUS CSB M2.6 x 6mm)
Fig. B269
-1102+ ,/.2
7)
2mm
Cap Screw Wrench
()
Driver
Adjust the gap between the torch tip and the outer profile of the capillary in such a way
as the gap gauge (jig J501 : t= 0.095mm) enters smooth but the gap gauge (jig J503 : t=
0.15mm) does not enter. The portion between the torch and the capillary is not seen
from the front. Check the gap by using the mirror face of jig (J773).
Jig J503
Jig J501
Fig. B270
-1102+ ,/.2
199
Jig J501
Jig J503
Jig J773
t:0.095mm
Gap gauge
t:0.15mm
Gap gauge
Height
adjusting gauge
NE00040-00
Adjustment
8)
Check the capillary and torch electrode from the front right 45position with the
capillary as the center. When the center position of the capillary tip meets the center
position of the torch electrode, the torch electrode is adjusted at the normal position.
Fig. B271
Unnecessary
-1102+ ,/.2
e)
Put jig (J773) on the load clamper. Adjust the eccentric pin for vertical adjustment by
bringing the bottom point of the torch electrode tip (bending face at the tip) contact with
the rubber labeling face of jig (J773).
Jig J773
Fig. B272
Jig J773
-1102+ ,/.2
NE00040-00
200
Height
adjusting gauge
Adjustment
2)
After loosening two SUS CSB M2.6 x 14mm, adjust the eccentric pin for vertical
adjustment by turning it using a precise screwdriver (-) to such an extent as it touches the
rubber face of jig (J773).
SUS CSB M2.6 x 14mm
Jig J773
Fig. B273
Caution
Jig J773
-1102+ ,/.2
2mm
Cap Screw Wrench
()
Driver
Height
adjusting gauge
deformed.
3)
After the end of torch electrode height adjustment, check the gap between the torch
electrode and the capillary. When the eccentric pin is adjusted, the gap between the
torch electrode and the capillary may change. After the end of adjustment and check,
fasten the bolts at each part additionally. Each part may be displaced by retightening
the bolts at each part. Check the position of each part. After the end of adjustment,
click [Z move] [Original position] [Switch] to reset the capillary to its original position.
2mm
-1102+ ,/.2
201
NE00040-00
Adjustment
Click [Machine management] [Machine specific] [Torch level] from the menu.
Fig. B274
Unnecessary
-1102+ ,/.2
b)
The last set [Torch level] is displayed. Start setting by clicking [Torch level].
Fig. B275
Unnecessary
-1102+ ,/.2
NE00040-00
202
Adjustment
c)
If no frame is present at the bonding position, carry a frame by display icon (*1). This
frame conveyance is not necessary if adjustment is done continuously from mechanical
adjustment. Click [Next] (*2).
*1
*2
Fig. B276
Unnecessary
-1102+ ,/.2
d)
Put jig (J773) on the load clamper, and set it in such a way as the stepped portion of jig
(J773) (torch level measuring face) comes just below the capillary.
Jig J773
-1102+ ,/.2
203
Height
adjusting gauge
NE00040-00
Adjustment
e)
Repeat the torch position adjustment (mechanical adjustment) if the torch electrode touches
the rubber face of jig (J773) and the jig position cannot be adjusted. The bonding head
position (entire torch unit) can be moved by [XY move] switch.
Unnecessary
-1102+ ,/.2
f)
After the end of adjustment using jig (J773), click [Next] (*1), and the capillary lowers
automatically to measure the height of the stepped portion (torch level measuring face) of
jig (J773).
*1
Fig. B279
Unnecessary
-1102+ ,/.2
NE00040-00
204
Adjustment
g)
Fig. B280
Unnecessary
-1102+ ,/.2
h)
Terminate the torch level setting by clicking [Finish], and the torch level is stored into
memory. A message [Check whether a jig is detached] (*1) is displayed on the monitor
screen.
processing.
*1
*2
Fig. B281
Unnecessary
-1102+ ,/.2
205
NE00040-00
Adjustment
Unnecessary
-1102+ ,/.2
a)
The torch level setting determines the reference of the spark height. The spark height of
actual bonding head is obtained by subtracting the values of [Tail length] and [Spark gap] of
[Edit] [Bond parameter] from the torch level.
Fig. B282
Unnecessary
-1102+ ,/.2
NE00040-00
206
Adjustment
b)
Tail length
Spark gap
Fig. B283
Unnecessary
-1102+ ,/.2
c)
Generally, the distance from the torch electrode tip to the capillary tip is approx. 1mm ~
1.5mm. A value obtained by adding the spark gap to the tail length becomes 1000 ~
1500m as a reference for this setting.
1~1.5mm
Fig. B284
500m
Spark gap
800m
Unnecessary
-1102+ ,/.2
207
NE00040-00
Adjustment
d)
The setting value of torch level is within 4700.0 ~ 10700.0m. When this setting value is
large, the distance from the bonding position to the torch spark height becomes long to
cause slow bonding speed. When the setting value is small, on the contrary, the distance to
the load clamper becomes short, the bonding becomes fast, but the torch electrode may
touch the load clamper, etc. Adjust the torch electrode height by putting the jig (J773) to
the load clamper face under the clamped condition of a frame without fail.
Unnecessary
-1102+ ,/.2
Unnecessary
NE00040-00
208
-1102+ ,/.2
Adjustment
(1) Sensitivity adjustment of the wire presence detection sensor and wire terminal
7.
Wire presence detection (FEED) sensor detects the wire so that the wire spool rotates to
draw out the wire during bonding work. If the sensitivity is not adjusted properly, the
rotation of the wire spool becomes unstable.
Wire
Unnecessary
Fig. B285
b)
-1102+ ,/.2
If the wire of the wire spool runs short halfway, the machine stops running halfway in the
course of bonding to cause samples to be defective. Wire terminal detection (END) sensor
stops running the machine before the wire runs short.
Wire
Fig. B286
Unnecessary
-1102+ ,/.2
209
NE00040-00
Adjustment
c)
(1) Sensitivity adjustment of the wire presence detection sensor and wire terminal
The sensor amplifier sensitivity is adjusted under the bonding condition after the end of
wire threading.
control unit, air is discharged from the air tension device to apply the air tension to the
wire.
Wire spool
Wire
Wire tension
Fig.B287
Unnecessary
-1102+ ,/.2
d)
Fig.B288
Unnecessary
-1102+ ,/.2
NE00040-00
210
Adjustment
(1) Sensitivity adjustment of the wire presence detection sensor and wire terminal
e)
Move the air tension wire to the detection range of the sensor by turning the wire spool by
hand.
Wire spool
Wire tension
Unnecessary
-1102+ ,/.2
211
NE00040-00
Adjustment
Select the mode selector switch of sensor amplifier (SUNX : FX-Al) from RUN to SET.
Center
Fig. B290
Unnecessary
-1102+ ,/.2
b)
switched to the full auto switching system by continuously pressing the jog switch for longer
than 3 seconds, press the jog switch within 3 seconds again to read the luminous energy
detected by the wire.
c)
Remove the air tension wire from the detection range of the sensor by turning the wire spool
by hand again.
d)
Press the jog switch of the sensor amplifier again to read the luminous energy without wire.
e)
Reset the sensor amplifier mode selector switch from SET to RUN and terminate the
sensitivity adjustment.
f)
After the end of adjustment, stability indicator lamp (green) lights when the sensor does
not detect any wire and both stability indicator lamp(green) and operation indicator lamp
(orange) light when the sensor detects a wire.
g)
If stability indicator lamp (green) does not light when the sensor does not detect any wire,
it shows that the sensitivity is unstable. Adjust the sensitivity again.
Unnecessary
-1102+ ,/.2
NE00040-00
212
h)
Adjustment
If the sensor detection section is dirty, stability indicator lamp (green)does not light.
Clean the sensor detection section by using alcohol or the like. After cleaning, make sure
that stability indicator lamp (green) lights again.
i)
A numeric value of the indicator indicates the sensitivity. The sensitivity can be adjusted
by turning the jog switch. However, the automatic sensitivity setting is recommended.
j)
Dont change the mode of the mode selector switch, since it has been set.
k)
For setting again due to parts exchange, etc., execute the initializing method of the sensor
amplifier.
Unnecessary
-1102+ ,/.2
213
NE00040-00
Adjustment
Select the mode selector switch of the sensor amplifier (SUNX FX-Al) from RUN to
MODE.
Center
Unnecessary
Fig. B291
-1102+ ,/.2
b)
2)
c)
Setting of timer
1)
Adjust the timer by turning the jog switch toward [+] or [-] so that NON flickers.
(No-timer setting) By pressing the jog switch, the setting is stored into memory, and
changed to the next setting.
d)
After the end of setting, set the mode selector switch to RUN.
Unnecessary
-1102+ ,/.2
NE00040-00
214
Adjustment
If the cable holder is not mounted at the center of the capillary, wire bending or
off-centering occurs. Slightly loosen two SUS CSB M2 x 6mm and one SUS CSB M2 x
8mm which mount the cable holder to the bond holder. Adjust the position by loosening
the fixing bolts.
SUS CSB M2 x 6mm
Cable holder
Bond holder
Fig. B292
b)
1.5mm
-1102+ ,/.2
threading. After threading a wire, try bonding 3 ~ 4 times. Indicate [Pause bond] (*1) by
icon pause.
*1
Fig. B293
Unnecessary
-1102+ ,/.2
215
NE00040-00
Adjustment
c)
Position the cable holder in such a way as the wire is positioned at the clamp face center of
cable holder through the capillary center when the capillary has grounded to the lead bond
point.
Wire
Fig. B294
Unnecessary
-1102+ ,/.2
Wire
Fig. B295
Unnecessary
-1102+ ,/.2
NE00040-00
216
Adjustment
d)
If this confirmation is difficult, use the microscope. Focus to the upper hole of the capillary.
Adjust the mounting position of the cable holder so that the wire comes out of the center of
the capillary.
Wire
Transducer
Capillary
Fig. B296
Unnecessary
-1102+ ,/.2
e)
Fix two SUS CSB M2 x 6mm and one SUS CSB M2 x 8mm which mount the cable holder to
the bond holder.
Cable holder
Bond holder
Fig. B297
Caution
217
-1102+ ,/.2
M2
Cap Screw Wrench
NE00040-00
Adjustment
If the wire tension is not mounted at the correct position, excessive tension is applied to the
wire during wire looping to cause a loop profile failure. Adjust the longitudinal position of
the wire tension after loosening one SUS CSB M2 x 6mm, and also adjust the lateral
position and angle after loosening one SUS CSB M2.5 x 6mm.
SUS CSB M2.5 x 6mm
SUS CSB M2 x 6mm
Wire tension
Fig. B298
b)
1.5mm
-1102+ ,/.2
2mm
Cap Screw Wrench
threading. After threading a wire, try bonding 3 ~ 4 times. Indicate [Pause bond] (*1) by
icon pause.
*1
Fig. B299
Unnecessary
-1102+ ,/.2
NE00040-00
218
Adjustment
c)
Position the cable holder in such a way as the wire is positioned at the center of capillary
and the clamp face center of cable holder through the center of the capillary when the
capillary has grounded to the lead bond point.
Wire
Fig. B300
Unnecessary
-1102+ ,/.2
Wire
Fig. B301
Unnecessary
-1102+ ,/.2
219
NE00040-00
Adjustment
d) Since the distance from the wire tension to the capillary is long, adjust the mounting
position of the wire tension so that the wire is perpendicular to the lead bonding point by
visual check. It can be checked by using a square or the like when the Z-axis position is
horizontal (Z position : 90050m).
position is deviated backward when the Z-axis lifts or lowers from the horizontal position.
Unnecessary
-1102+ ,/.2
e)
Fix one SUS CSB M2 x 6mm with flat washer and one SUS CSB M2.5 x 6mm which fix the
wire tension.
Wire tension
Fig. B302
1.5mm
-1102+ ,/.2
NE00040-00
220
2mm
Cap Screw Wrench
WIRE BONDER
UTC-1000
THIRD STEP GUIDE (1)
August 1, 2004 issue
Version 1
Issue
Edit
Masao Ogawa
Toshiyuki Gomi
Nobuyuki Mitui
Hideki Izaki
C
NE00040-00
(Doc#2018-1)