Micr o Actuator s

Electrostatic actuator
- comb drive actuator
Magnetic actuator
Thermal actuator
Piezoelectric actuator
Shape memory alloy actuator
Pneumatic actuator
 Micr ovalve/pump
Electrostatic Thermal bimorph
Electromagnetic

Piezoelectric Shape memory alloy

Pneumatic
 Fundamental of Electr ostatic For ce
(I) Energy in a battery-capacitance system:
(II) Capacitance of flat plate:
Constant Char ge Mode of Electr ostatic For ce

Switch is open

(i) Fixed gap Z=Z0, moving in x-direction

U c 1 Z
Fx = =
2
( ) q0
(3) X 2k 0 WX 2

1 Z k 0WX0V0 2 1 2 W X0 2 1
Fx = ( )( ) = k V ( )( ) ~
2k 0 WX2
0 0
Z 2 Z X X2

X0
W , Z , Fx
X
q0 = C0V0=WX0V0/Z0 (ii) Fixed X=X0 position, moving in z-direction
U c 1 1
Fz = =
2
( ) q0
Z 2k 0 WX

U c 1 1 k 0WXV0 2 1 2 WX 1
Fz = = ( )( ) = k 0V0 ( 2 ) = cons tan t ~ 2
Z 2k 0 WX Z0 2 Z0 Z0
Examples
Constant Voltage Mode of Electr ostatic For ce

Switch is closed

(i) Fixed gap z, moving in x-direction

(3)

(i) Fixed x position, moving in z-direction

Examples
 X-dir ection motion of Comb Dr ive Device
Fr inged Field Cor r ection
Constant Voltage Mode A=Xt
with fringed field correction

= k 0
W=t
Z=d
For ce and Deflection (later al motion)

Electrostatic force:
V=15V, t=2m, d=2m, t/d =1, (t/d)=2
2m
2 100m

8 combs
t 1 t 1
Fx = N ( ) V 2 = 8 2 8.854 1012 152 1
a
b d 2 d 2
Fx = 1.6 10 8 N = 0.016 N

Spring constant K(a,b,L):

Ea 3b 150 109 ( N / m2 )(2 106 m)3 (2 10 6 m)
K (2,2,100) = =
4 L3 4(100 10 6 m) 3
N
K (2,2,100) = 0.6
m
F Ver y small
y = = 2.66 10 m = 0.027 m
8
deflection!
K
 How to get bigger for ce fr om combs ?
t 1 t
Fx = N ( ) V 2
d 2 d

(1) Better lithography resolution

d, t/d, Fx
(2) High aspect ratio structure (for example: LIGA)
t , t/d, Fx
(3) Submicron device: (4) Leverage structure:
 Z-dir ection motion of Comb Dr ive Device
Fr inged Field Cor r ection

t 1 Wt t 1 t X
Fz ( d ) = N ( ) k 0V 2 ( 2 ) = N ( ) V 2 ( )( ) d
d 2 d d 2 d d
x
Ex1: V=15V, t=2m, d=2m, t/d =1, (t/d)=2, 8 combs

t 1 t X 1
Fz = N ( ) V 2 ( )( ) = 8 2 8.854 10 12 152 1 5 = 1.6 10 8 5 N = 0.08N
d 2 d d 2

Ex2: X=10m, K= 1 N/m, calculate voltage V for 1 m deflection

Fz = K z = 1N

t 1 t X 1
Fz ( d ) = N ( ) V 2 ( )( ) = 8 2 8.854 10 12 V 2 1 5 = 1N
d 2 d d 2

V = 53volt
 y0
x

unstable
 Spr ings for Folded Beams

2 2 100m

m

ab

Ea 3b
K0 (a , b, L) =
4 L3 K = 4 K0

Folded Beams

K = 8K0
 Linear Resonator

Ea 3b
K = 4 K0 = 3 = 2.4 N / m
L

m = At = ( 2.3 103 kg / m3 )(100 10 6 m) 2 (2 10 6 m) = 4.6 10 11 kg

K 2.4 N / m
= = = 228416
m 4.6 10 11 kg

f= = 36 KHz
2
Metal
Poly0

Poly1
Homework #3
Magnetic For ce on a Cur r ent-car r ying Conductor

r r r
F = IL B
Magnetic Field of a Solenoid
For ce on a Cur r ent Loop in a unifor m magnetic Field
For ce on a Cur r ent Loop in a Solenoid
Magnetic Micr oflap

Poly1

Metal
coil