Академический Документы
Профессиональный Документы
Культура Документы
and measurement
in the chamber or piping can result in a
pressure rise.
1.4 Outgassing: Is the gas load created
by the evolution of gases from O-Rings,
chamber surfaces, or piping surfaces. The
Vacuum: a space that is relatively empty of matter, especially evolution of gases creates a gas load that
must be removed by the pump from the
when that void has been created through artificial means. vacuum systems, in order to reach the
T
desired vacuum level.
he earths atmosphere exerts a pressure This article revisits the basics of vacuum 1.5 Conductance: Is the amount of gas that
upon us (known as the atmospheric technology; i.e., what is a vacuum and how is it can travel through a particular device per unit
pressure), which can be measured in measured? Once the basics are understood, the of time. The conductance through any device
a number of ways. At sea level the standard more sophisticated aspects of the technology varies with pressure. I have always tried to
pressure is described in different units as: can be better understood. explain conductance by using the analogy of
101,300 Pascals water being conducted through a hose. Both
1,103 millibar How is a Vacuum Created? water through a hose and gases through
760 TORR The creation of a vacuum typically requires a vacuum piping system are fluids through
760 mm of HG a chamber, piping, and a pump (or pumps). restrictive devices.
29.92 of Hg The simplified sketches nearby can help you In vacuum piping design, its best to use
14.7 psia understand how the pump reduces the number the straightest, shortest, and largest diameter
The foregoing is the dictionary definition of of molecules inside a vacuum chamber. possible piping, so gas molecules can easily
vacuum. Not bad. Its simple and to the point... As the number of molecules in the chamber move to the inlet of the vacuum pump and be
and pretty appropriate even for high tech (Figure 1.) is decreased, it becomes more removed from the system. As the pressure
applications. How to get there (achieve a space difficult for the molecules to reach the vacuum decreases in the vacuum chamber or piping,
that is relatively empty of matter), is not so pump and therefore to be removed from the gas flow is restricted to a much larger degree
simple. As a matter of fact, getting there is one chamber. (not quite exponentially) by small diameter
of the most critical operations in the production Generally, four regions of vacuum are piping, bends, elbows, and the length of the
of specialty and medical gases. What kind of piping Consider which will get you wetter.(See
equipment is used and when? What is the best Q&A Table p40.)
practice as far as technique and process are Low-pressure Region
concerned? Measurement Gauge Considerations and
Without knowing the answers to these Selection
questions, its impossible to create pure Pump When measuring a vacuum you need to
or mixed gases with any guarantee that the gas determine what type of gauge and in what range
purity of the gas you put into the cylinder will to use: thermocouple Piriani, Penning, or
remain that way for any length of time. Without High-pressure Region capacitance manometer and their construction,
that guarantee its impossible to be in the operation, and characteristics.
specialty or medical gas business. Figure 1. The pump reduces the number of There is no universal vacuum gauge one
The term vacuum is used to describe the molecules inside the vacuum chamber. that will respond accurately throughout the range
zone of pressure below atmospheric pressure. from atmospheric pressure to 1x10-11 Pascals
Questions Answers
A 5-ft long, 1-in. dia. hose with 30 psig pressure or a The shorter hose conducts water flow better than the longer one.
50-ft-long, 1-in. diameter hose with 30 psig pressure?
A 50-ft long, 1-in. dia. hose with 30 psig pressure or a The larger diameter hose conducts water flow better than the smaller diameter
50-ft long 4-in. dia. hose with 30 psig pressure? hose.
A 50-ft long 4-in. dia. hose with 30 psig pressure or a This answer is more complex than the first two. The effect of increasing the
25-ft long 1-in. dia. hose with 30 psig pressure? diameter of the hose is raised by the power of 2 (squared), while the effect of length
is linear.
A 50-ft long, 4-in. dia. hose with 15 psig pressure or a Now were really getting complex, weve added a pressure differential to the mix. In
25-ft long, 1-in. dia. hose with 45 psig pressure? this case, even though the pressure of the smaller diameter hose is 3 times that of
the larger diameter hose, but the smaller diameter is still too much of a restriction.
The larger diameter hose conducts more water flow.
to the gauges reading for argon, helium, or semiconductor systems is limited because discharge. The combination of a strong magnetic
hydrogen. Argon absorbs heat much faster than hot wires and reactive gases are generally field and the high voltage applied to the
nitrogen, while nitrogen is much faster than not compatible. electrodes creates a directed plasma discharge
helium or hydrogen. As the pressure decreases of electrons. Ions are formed by the electron
the offset due to the gas composition decreases Penning and Ion Gauges Operation bombardment of the gases inside the confined
as well. Penning (cold cathode) and ion (hot cathode) cathode. The ions are accelerated by the
gauges are classified as indirect gauges that magnetic field towards the charged cathode. The
typically operate from one Pascal (1x10-2 TORR) impact of the ions with the cathode is measured
to 1x10-10 Pascals (1x10-12 TORR). Penning and reported by the gauges electronics.
(cold cathode) and Ion (hot cathode) gauges Penning and ion gauges are significantly
differ only a small amount, depending on the affected by the gas composition in the vacuum
manufacturer, but fundamentally they function system and cannot be used with reactive gases.
in the same manner. Some ion gauges are constructed from glass
Penning and ion gauges operate by ionizing and once the gauges glow discharge starts, the
gas within a magnetically confined cathode heat can cause the gauge to become very brittle
(and fragile). The glow discharge that is required
for the gauge to operate is also the reason
that these gauges cannot operate at pressures
above one Pascal (1x10-2 TORR).
Capacitance Manometer
This direct pressure gauge typically
operates from atmosphere to 1x10-2 Pascals
(1x10-4 TORR). The gauge contains a small
metal diaphragm (disk) with one side of the
diaphragm exposed to the vacuum chamber
and a known pressure on the backside.
The pressure in the vacuum chamber either
compresses or allows the expansion of the metal
diaphragm. The gauges electronics measures
the movement of the metal diaphragm as a
function of capacitance of the metal diaphragm
Figure 4. Wheatstone Bridge and with a fixed parallel electrode.
Pirani gauges When the metal disk and the housing are
constructed from stainless steel, this type of
gauge is very resistant to corrosive or reactive
Application of Pirani and Thermocouples gases. The range of the gauge can be changed
Thermocouples and Pirani gauges are to a degree by the changing trapped pressure.
inexpensive and are used primarily for A very small trapped volume and pressure
measuring the vacuum in non-corrosive Figure 5. Penning and Ion gauges. allows the gauge to measure small differences in
and non-reactive chambers. Their use in chamber pressure. The small gap between the
Built Right
for the Rigors of Shipping
Specd Right
for the Rigors of Code
Figure 6. Capacitance manometer.
Summary
Vacuum technology provides controlled
environment for scientific experiments and
production lines. It is the bases for almost all
areas of science and technology, materials, Certified Weldship Tube ISO-Containers
semiconductor, and display production,
surface analysis, space study, and in most Certified by the American Bureau Manufactured for maximum
R&D equipment. As science and technology of Shipping (ABS), Weldship ISO- stacking, racking and other
developed, the importance of good vacuum Containers are manufactured for the shipboard procedures
technology has increased dramatically. In the optimal weight-to-payload efficiency, All common sizes, configurations
processes where each unwanted molecules can providing the lowest shipping cost and capacities as well as
ruin the whole process, the precise control of the for your compressed and liquefied Ultra-High Purity Containers
environment, processing gases, materials and gases, and specialty chemicals.
surface treatments producing little particles and Weldship will engineer Certified
gases from all the moving parts are crucial. All specs in accordance with US Tube ISO-Containers for virtually
A basic understanding of what a vacuum and international requirements any product or project.
is, how it is measured, and where each type
With over 50 years experience, Weldship is a world leader in the manufacture
of measurement is applied is essential to
of gas storage and transport equipment. Contact Weldship for quality
understanding how and when each can be
ISO-Containers as well as any capacity tube trailers, ground storage
applied most effectively and economically. SGR
modules, CO2 transports, and retest/rehab requirements.
Woodrow D Farrow
Woodrow D Farrow,
originally trained as an w w w. w e l d s h i p . c o m
analytical chemist, has more
than 30 years experience 225 West Second St. Bethlehem, PA 18015 P610 861 7330
in specialty gases and 75 East Main Street West boro, MA 01581 P508 898 0100
industrial processes. During
his long career, he has
managed analytical labs,
production facilities, and sales/marketing programs.
He is currently a consultant in the field.
For more information contact Woodrow D Farrow,
email: woodrowdfarrow@yahoo.com