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Incoming
Elastic Surface
Wavefront
Distortions
Distorted
Wavefront
Refractive Elements
Distorted
Wavefront
Index Changes:
Temperature
Planer
Incident Reflected
Wavefront Wavefront
Window
SE WFE
WFE (n n' ) SE
Planer
Incident Transmitted
Wavefront Wavefront
SE - surface error
n - index of window
medium n - index of medium
Plate Parallel Plate
w/bump
Refracting
Undeformed Optical Surface Ray
Deformed Optical Surface
n
Common
Approximation
nominal WFE=2(SE)
ray path
SE
perturbed SE
ray path
Ray path reflecting off
deformed surface
Lumped Mass
2) For optical elements where 2D or 3D FEA models are used with many nodes
representing the optical surface have two options
FEA interpolation elements (e.g. MSC/Nastran RBE3) compute average rigid-body motions
do not use this approach for thermal loading due to radial growth
external software to perform best-fit rigid-body calculation using least-squares algorithm (see
Integrated Optomechanical Analysis Book)
Tx, Ty = decenters, Tz = despace, Rx, Ry = tilts, Rz = spin, xi,yi,zi = node position, wi = area wt
y
Motion at node i d~xi T x z i R y y i R z x
y
x
Y
d~y i T y z i R x xi R z X z z
CodeV Zemax +
d~z i T z y i R x x i R y
y
Z Oslo z x Rest of World
x z
Define error: using corrected dz y
E wi (dxi d~
xi ) 2 wi (dy i d~
y i ) 2 wi (dz i d~z i ) 2
i
Min Error E
0 CodeV x & y tilts
Tx
converted to LHS
in seq file
Solve 6 simultaneous equations for R-B motion:
wT w z R
i
i x
i
i i y wi y i R z
i
w dx
i
i i (1 eqn of the 6)
x PM
Mechanical CS
z at center of aperture
Three-Mirror PM
Anistigmat
SM Optical CS origin
TM at vertex
z
CODEV Local
multiple tilts and decenters are cumulative Coordinate Systems
yi
xi
Rotationally symmetric Tilted / decentered y3
yi
system system y2 x3 image
y3 xi
x2
y2 x3 s3
y1 x2 y1
image y0 x1 Y s2
y0 x1
x0 x0
object object
X-Y polynomials z A00 A10 x A01 y A20 x 2 A11 xy A02 y 2 ... Anm x n y m
Legendre, Legendre-Fourier Polynomials
[Ref. 2,3,4,5]
Normalized
Radius r = dimensionless normalized radius, polar angle, Anm & Bnm - polynomial coefficients
r nm
r=1
m
2
R r 1
s n s ! r ( n2 s )
nm nm
n
s 0
s! s ! s !
2 2
Example: Zernike polynomials representing a set of surface errors
x, y a 0 a 11 a 2 2 a 3 3 a i i
a0 a1 a2
Surface Error 1 2
a3 ai
3 i Residual Error
Avoid Order and Normalization Errors: specify type (n & m) and normalization:
Amplitude normalization: 1 of focus => peak-valley = 2 RMS= 0.577
RMS normalization: 1 of focus => peak-valley = 2 3 RMS = 1.0
Normalization
Zernike Term Unit Amplitude Unit RMS
Focus (n = 2) 2r 2 1
3 2r 2 1
Spherical (n = 4) 6r 4 6r 2 1
5 6r 4 6r 2 1
2017 - class 8 Copyright Sigmadyne, Inc. 15
Comparison of Power terms for different normalizations
ZRN1 = 1.732*ZRN
Power 2r 2 1
i - node number
i = perturbation of the ith node 5) Solve for {c} the Zernike Coefficients
i = Zernike polynomial representation of the ith node
Wi = area weighting of the ith node
cj - Zernike coefficients 6) Compute RMS Fit Error
how well do the Zernike Polynomials
2) Zernike Polynomial Displacements fit the data
i c j ji E W c
i i j ji
2
BFP and Power Removed in SigFit RMS=1.6 All Terms Removed in SigFit RMS=0.03
surface data
Elliptical Obscured
Aperture Aperture
no data
rddr 0
0 0
1 2
1
e.g. piston and focus 2 1
2 1 2r 2 1 rdr 2 0
0 4 2
6 r
6 r 1 ( 2 r cos 2 ) rdrd ( 6 r 7 6 r 5 r 3 )( 0 0 )dr 0
4 2 2
0 0 0
e.g. circular aperture with central hole / focus & piston terms
1
2 1 .0032 .04
2 1 2r 2 1 rdr 2
4 2 4
2
0.12 0
0. 2
Obscured Aperture
Some orthogonality of Zernike polynomials also lost when fitting terms to discrete
data such as from a FEA displacements
Spher
5
1 2
6r
4
6 1 2 r 2 1 4 2 4 set = 0
Spher 5 6r 4 6r 2 1
RB
RA
Astigmatism
a0 a1 a2
Surface Error 1 2
a3 ai
3 i Residual Error
This option
Interferogram File Examples adds perturbation
y
Zernike Format Grid Format to original surface
! Sigmadyne, Inc. SigFit ! Sigmadyne, Inc. SigFit
z ! Zernike Polynomial Coefficients ! Surface= 1 Optic-Id= 1 OpticLabel=primary mirror
! INR S01 6.5740E+02 ! INR 2.5882E+00
S01 L02 1G -Z S01 L01
ZRN 9 SUR SSZ 1.0 WVL 0.63
GRD 5 5 SUR WVL 0.63 SSZ 1.00E+02 NDA 32767
-5.86169E-02
32767 32767 32767 32767 32767
7.89198E+00
32767 32767 567 32767 32767
-5.99984E-01
0.00000E-01 32767 222 345 321 32767
1.39644E-01 32767 32767 234 32767 32767
Surface Normal Direction 2.49190E-01 32767 32767 32767 32767 32767
of Optical Surface 0.00000E-01
0.00000E-01
-3.45566E-01
zij zbase z ( xi , y j ) z z 2 z
z , , ,
x y xy Uniform Grid
z z 2z
z
x y xy
Finite Element results predict the WRONG behavior for a curved optic under an
uniform temperature increase. If T > 0, then RoC should increase in this example.
Sag displacements for vertex mounted surface subject to uniform increase in temperature
original
SagNL
node position
(zo,ro)
undeformed shape FEA computed Z
z A0 A1r A2 r 2 ... An r n
cr 2 J
a Q [r / r ]
2
z (r ) ( r / rmax ) 4
j
con
j max
1 1 (1 k )c 2 r 2 j 0
n = power on r
j= QCON index
n 42j
Ref 10
Plots of 4 Qjcon( 2) where =r/rmax
XY polynomials:
* supported by CodeV, Zemax, Olso
* NOT orthogonal over rectangle
* single normalizing radius
Legendre polynomials:
* NOT supported by optics codes
* Orthogonal over rectangle
* independent normalizations in X and Y
N M
z cnm Pn ( x) Pm ( y )
n 0 m 0
K k
Pn x 1 n
2n 2k ! x n2 k K k
Pn y 1
2m 2k ! y m2 k
k 0 2 k!n k !n 2 ! k 0 2 m k!m k !m 2 !
Pn z 1
K k
2n 2k ! z n2 k
Pn z
2n ! zn
2n 2! z n2
...
k!n k !n 2 ! 2 n! 2 1!n 1!n 2!
2 n
2 n n
k 0
P0 z 1;
P1 z z ;
1
P2 z 3 z 2 1;
2
1
P3 z 5 z 3 3 z
2
1
P4 z 35 z 4 30 z 2 3;
8
1
P5 z 63 z 5 70 z 3 15 z
8
N=0
M=0 N=1
M=0
N=2
N=3
M=0
M=0
N=1 N=2
M=1 M=1
N=3
M=3 N=4
M=3
Pn z 1 n
2n 2k ! z n2 k K k
Pn 1
2m 2k ! m2k
k 0 2 k!n k !n 2 ! k 0 2 k!m k !m 2 !
m
Surface
X-Ray
Normal
Positive polynomial
displacement is in
positive normal direction
Near-cylindrical optics
Grazing Incidence
Avg-R
Delta-R
Axial sag
Roundness
FE Displacements
Interpolated to 401x401 array
System Temperature
Distribution
Optical Analysis
Model
1) Doyle, K. B., Genberg, V. L., Michels, G. J., Bisson, G. R., "Optical modeling of finite element surface displacements using
commercial software", Proc. SPIE Vol. 5867, Bellingham, WA (2005).
2) Genberg, V. L., Structural Analysis of Optics Handbook of Optomechanical Engineering, CRC Press (1997).
3) Malacara, D., Optical Shop Testing, John Wiley and Sons, Inc., 1978.
4) Born, M. and E. Wolf, Principles of Optics, Pergamon Press, New York, 1964.
5) R. Noll, "Zernike polynomials and atmospheric turbulence", J. Opt. Soc. Am., Vol. 66, No. 3 p. 207 (1976)
6) Genberg, V. L., "Optical Surface Evaluation", in Proc. Structural Mechanics of Optics, Vol. 450-08, SPIE, Bellingham, WA, 1983.
7) Genberg, V. L., Michels, G. J., Doyle, K. B., Orthogonality of Zernike Polynomials, Proc. SPIE 4771, Bellingham, WA (2002).
8) V. N. Mahajan, "Zernike annular polynomials for imaging systems with annular pupils", J. Opt. Soc. Am., Vol. 71, No. 1, p.75 (1981)
9) Doyle, K. B., Genberg, V. L., Michels, G. J., Integrated Optomechanical Analysis, SPIE Tutorial Text, SPIE Press, 2002.
10) G. W. Forbes and C. P. Brophy, Asphere, O Asphere, how shall we describe thee, Proc SPIE Vol 7100, 710002-1 (2008)