Transmission Electron

Scanning Electron Energy Dispersive Optical Emission

No Basic Characteristics of Testing Methods Electron Focused Ion Beam Backscattered X-Ray Diffraction X-ray Fluorescence
Microscope Spectroscopy Spectroscopy
Microscope Diffraction
Species used for characterization
1
(e.g. electron, ion, etc.)
Materials used to generate characterization species *
2
(e.g. material used for electron gun, etc.)
Working condition
3
(e.g. vacuum, low pressure, etc.)
Characterization species retrieved by detector *
4
(e.g. primary ion, excited atom, etc.)
Species - sample interaction
5
(e.g. transmission, diffraction, etc.)
Type of characterization *
6
(e.g. imaging, elements measurement, etc.)
Sample requirements *
7
(e.g. conductive, thin, powder form, etc.)
Advantage *
8
(e.g. easy to perform, fast data collection, etc.)
Disadvantage *
9
(e.g. complex sample preparation, dangerous, etc.)
Special features *
10 (e.g. spot measurements, material identification, etc.)

Note: * could be more than one answer