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SiC metal oxide semiconductor field effect transistors (MOSFETs) are attractive
as power switches equivalent to Si MOSFETs or insulated gate bipolar transistors
(IGBTs), but suffer from relatively poor channel mobility, gate threshold voltage
instability, and oxide reliability at temperatures over 200 C [2].
The quality of the interface between SiC and the surface passivation layer has a
significant impact on the device performance of 4H-SiC BJTs, especially on the
current gain. This is because the recombination current caused by interface
traps at the extrinsic base surface and along the base-emitter junction sidewall
can be a main component of the base current. Due to the remaining carbon
cluster at the SiO2/SiC interface during the oxidation process, serious
degradation of the dielectric layer quality is observed.
Two possible mechanisms, which may be simultaneously present in the
device, are thought to be responsible: (a) increase in the surface
recombination particularly in the region between the emitter and the base
implant, and (b) bulk recombination in the base due to the generation and
growth of stacking faults. [Degradation of Current Gain in SiC BJTs, 2006]
Current gain degradation has been attributed to increased interface traps or reduced lifetime
in the base-emitter region or small stacking faults in the base-emitter region, while
fluctuations of the knee current might be due to stacking faults in the collector region.