MEASUREMENT

APPLICATION
GUIDE
For POSITION
CONTROL

INDEX
y Selection Guide P.2
y Measurement Principle P.3 to 4
y Position Control Using a Reflective Sensor P.5
y Position Control Using a Thrubeam Sensor P.6
y Successful Applications P.7
 POSITION CONTROL Selection Guide

Positio n c o nt ro l usin g a ref le c tive s e ns o r P.5

Measuring the position of an Measuring the gap of an Measuring the height of a

XY stage exposure mask dispenser nozzle

Measuring the height of a Measuring the deflection of a Detecting the position of heated
spinless coater tensioned sheet copper pipe

Positio n c o nt ro l usin g a t hr ub e am s e ns o r P.6

Positioning a liquid crystal plate Measuring the gap of a mill roller

Detecting the position of an Measuring the displacement in

optical fiber width of a rubber sheet

2
 POSITION CONTROL

MEASUREMENT PRINCIPLE

1D Triangulation Measurement Principle (LK-G Series) HIGH-SPEED WIDE RANGE 12 SENSOR HEADS CONNECTION

At the reference distance At a short distance At a long distance

Semiconductor Light-receiving Semiconductor Light-receiving Semiconductor Light-receiving

laser element laser element laser element

Transmitter Transmitter Transmitter

lens lens lens

Ernostar Ernostar Ernostar

lens lens lens

Light-receiving Light-receiving Light-receiving

element element element

The semiconductor laser emits the laser beam to the target as shown above. The light reflected off the target is focused by the
ernostar lens and forms an image on the light-receiving element. The position of the beam spot on the receiving element varies
with the distance to the target. This variation is evaluated and converted into a measurement of target position.

Confocal Measurement Principle (LT-9000 Series) CLEAR TARGET THICKNESS HIGH-ACCURACY DOUBLE-SCANNING

High-accuracy measurement method uses the confocal

principle
The laser beam is focused on the target surface through an objective lens
that vibrates up and down at high speed by means of a tuning fork. The
beam reflected off the target surface is converged on a pinhole and then
enters the light-receiving element. By measuring the exact position of the
objective lens at the moment of receiving the light, the sensor measures
the distance to the target surface accurately without being affected by the
VERTICAL
material, color, or angle of the target.

When focus is not obtained When the focal point is

on the target surface on the target surface

Semiconductor Semiconductor
laser laser

Light-receiving Light-receiving
element element
The coaxial optical system improves Pinhole The received Pinhole The received
measurement performance Tuning fork
light intensity
Tuning fork
light intensity is
is low. high.
High angular characteristics Measurement of film
thickness

Sensor Sensor

A small amount of received light All of the received light passes

passes through the pinhole. through the pinhole.

3
 MEASUREMENT PRINCIPLE

SI Series Measurement Principle (Spectral-interference method) COMPACT ULTRA HIGH-ACCURACY

Spectroscopic unit
SI-F01U Sensor head
SLDSLD Interference light Spectroscopic assay
Light source (SLD) Polarization maintaining SI-F01 Part of the broad wavelength The two reflected light beams Splitting the interference light
optical fiber light emitted from the SLD is interfere with each other. The into different wavelengths with
reflected by the heads intensity of the interference light the spectroscope produces an
Spectro- reference surface, while the with a specific wavelength is optical intensity distribution for
scope Interference light Emitted light part that passes the reference determined according to the a specific wavelength. The
Waveform Reference reflection surface Target surface is mirror-reflected on distance between the reference distance to the target is
analysis the target and returns into the surface and the target. The obtained by carrying out
Diffraction
CCD grating head. relative maximum interference is waveform analysis on the
reached when the determined distribution.
distance is an integral multiple
Displacement data SLD: Super Luminescent Diode of the wavelength.

1D Thru-beam Measurement Principle (LS-9000 Series) NEW METHOD LONG LIFE HIGH-ACCURACY HIGH-SPEED

[Principle] Green-LED light is emitted as a uniform collimated

beam. The CMOS detects the position of the edge between
light and dark edges of the received light and calculates
measured values.
13.3 times
than convenfaster
Fastest in its class tion
systems al

16,000 Hz
sampling rate

High performance High-intensity Fitted with a high-speed exposure CMOS and

Monitor CMOS
The Monitor CMOS tracks
workpiece inclination to
automatically correct for
tilt errors.
Target Position CMOS
The CMOS measures
the position between the
transmitter and receiver
High-speed exposure CMOS
Proprietary designed measurement
CMOS features an integrated
amplifier to maximize performance
and speed.
condenser Green-LED
high-intensity Green-LED to produce a 16,000
Lens unit efficiently High-intensity Green LED lasts
focuses LED light longer than traditional LED
Hz sampling rate, surpassing previous systems.
light sources while providing Improves production line cycle times and ensures
high intensity and evenly-
distributed lighting.
more stable measurement.

4
 POSITION CONTROL

POSITION CONTROL Position Control Using a Reflective Sensor

Measurement method
1. Set the reference point as 0. Controller

2. The position output is obtained at the reference point (0) when the target Reference
passes through. point 0.000
It is possible to obtain the output at the reference point as well as at some
distance "X*" from the reference point.
Movement Position
* x is adjustable. output

It is also possible to output the measurement value to an external device.

POINT About position accuracy

Position accuracy depends on the resolution and repeatability of the measuring instrument.

Using the averaging function stabilizes the measurement, but makes the response time slower. It is necessary to select the
optimum setting by balancing the two factors.

1st ON position 2nd ON position

Position Position
0 t 0 t

Resolution

Position ON Position ON
output output
OFF
OFF
Position accuracy
(The ON positions vary.)
Variance in the ON position = Position accuracy

Benefits of LK-G Series

LK-G Series features wide measurement range that allows the measurement through glass. It is effective for detecting the position of the robot arm
through a viewport.

* Note for measurement through glass

Setting the glass within the measurement
range may increase the possibility that the
Reflected
off the glass measurement values are affected by dirt on the
surface glass or other factors.
Glass

Set the glass as close to the

sensor head as possible.
Target object Target object
Detecting the position of the robot arm
through the view port

Multiple point simultaneous measurement

LK-G Series allows simultaneous measurement with maximum 12 sensor heads connected to a controller.

5
 POSITION CONTROL Position Control Using a Thrubeam Sensor

Measurement method
Indicator Indicator Position
0
t
Movement
0.000 0.000

Auto-zero Position Position ON

input output output
OFF

Set the target at the reference point. Activate Set the judgment value of the indicator to 0. The position output is obtained at the reference
the auto-zero function of the controller. The point (the point where the indicator is set to 0) when the target passes through.
auto-zero function instantly sets the indication
of measurement value to 0.(This operation is
performed for the first time only.)

Positioning a round workpiece

Measuring in the X and Y directions as shown in the figure on Positioning a round target
the right enables positioning of a round workpiece.
Y-axis
direction

Indicator
X-axis
direction X-axis direction 1.342
Y-axis direction 1.676

POINT L S-90 0 0 Series ensures long life due t o its solid st at e design.
The LS-9000 Series has solved
the problem of motor durability
that has been a disadvantage of
the laser scanning method.

Semiconductor laser

No moving parts used!

A moving part (motor) is used!
High-intensity GaN Green LED

Applications

Positioning a liquid crystal plate Measuring the gap of a mill roller Detecting the position of fiber

6
 POSITION CONTROL

SUCCESSFUL APPLICATIONS

STEEL/BEARING

Pinch roller total indicator Heated steel pipe positioning Material position control during Temper roller skew
runout measurement welding measurement

AUTOMOTIVE/AIRCRAFT

Engine valve stroke inspection Feed bar backlash Detection of sealant spread Cotter valve height
measurement measurement

WEB/GLASS/Li-ION/SOLAR

T-die extruder adjustment Coating material on door glass Film edge curl measurement Rubber sheet tension control
control height measurement

SEMI/ELECTRONIC PARTS/HDD

Resin mold height Checking of wafer/robot arm Z-axis positioning of a wafer Automatic focus of image
measurement position through a viewport inspection system

ELECTRONIC PARTS/CONNECTOR

Ink level measurement CCD mounting position check Inspection of return speed of Zoom lens characterization
switch

7
DISPLACEMENT METER/DIMENSION MEASUREMENT SYSTEM LINEUP
Reflective-Type Measurement Instrument
High-Speed, High-Accuracy High-speed 2D/3D Laser Scanner
CMOS Laser Displacement Sensor LJ-V7000 Series
LK-G5000 Series

HIGH-SPEED 2D/3D

WIDE RANGE MULTI POINT

12 SENSOR HEADS CONNECTION HIGH-SPEED

PROFILES

Surface Scanning Laser Confocal Micro-Head Spectral-Interference Laser

Displacement Meter Displacement Meter
LT-9000 Series SI Series

HIGH-ACCURACY COMPACT

DOUBLE-SCANNING NO HEAT

CLEAR TARGET THICKNESS

Thrubeam-Type Measurement Instrument

High-speed Optical Micrometer High-speed 2D Measurement Sensor
LS-9000 Series TM Series

GREEN LED 2D

LONG LIFE MULTI POINT

HIGH-ACCURACY

HIGH-SPEED

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The information in this publication is based on KEYENCEs internal research/evaluation at the time of release and is subject to change without notice.
Copyright (c) 2010 KEYENCE CORPORATION. All rights reserved. MeasurePosition-KA-TG-E 1064-3 E 611395 Printed in Japan
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