CHAPTER 1

EE 5344 Intro to MEMS

Some Definitions

Transducer:

Non-Electrical Quantity Electrical Quantity

Non-Electrical Quantity can be pressure, temperature, humidity, radiation, flow-rate etc.

Sensor:

Non-Electrical Quantity Electrical Quantity

Actuators:

Non-Electrical Quantity Electrical Quantity

Functional Block Diagram

Display

Input Detect Modify Record Output

Signal

Transmit

1/Intro
Sensor detects.
Processor and/or Preprocessor to modify.
Actuator to display, record, transmit.

Insert Table 1.1

Insert Table 1.2
Insert Table 1.3

Self-Exciting or Self Generating Sensor

Input Output Examples

Sensor
x(t ) y (t ) PyroelectricDetectors
Thermocouples

y (t ) = F (x(t ))

Modulating Sensor

Input Output Examples

Sensor
x(t ) y (t ) + y d Bolometers
Photodiode
xd
External Drive (such as voltage, current etc.)

y (t ) = F ( x(t ), x d )

Linear Sensor

Self Exciting: a o a n liner coefficients

dny d n 1 y
+ a o y = x(t )
dy
an n
+ a n 1 n 1
+ ...a1
dt dt dt

Ideal self-exciting sensor: a n = o for n 1

a o y (t ) = x(t )

2/Intro
 y (t ) = x(t ) = S x(t )
1
ao

Sensitivity

This assumes instantaneous response.

More Commonly: (takes into account time constant of system)

= x(t )
dy
a o y + a1
{ dt
relates 123
to relates
system to
gain time
response

Example

Step Input: x(t ) = x m u (t )

xm

t=o

Take Laplace transform of differential equation:

a oY (s ) + a1 [sY (s ) y (+ 0 )] = X (s )

Transfer function: H (s ) Y (s ) X (s )

For self-exciting: y (+0 ) = 0

1 ao
H (s ) =
1
=
a o + a1 s 1 + (a1 a o )s

Gain = 1 a o
Characteristic Response Time: z = a1 a o

X (s ) = x m s for step input

3/Intro
 (1 a o )(x m s )
Therefore: Y (s ) = H (s )X (s ) =
1 + s

Taking the inverse Laplace Transform

y (t ) =
xm
ao
[
1 e t ]
RC circuit or mass-spring system

If modulating linear sensor: y (t ) =

xm
ao
[
1 e t + y d]

Some more definitions:

Response y = y (t ) y d =
xm
ao
[
1 e t ]
y (t )
Gain = A =
x(t )

Sensitivity: S = dy dx

Insert Table 1.4

Insert Table 1.5

4/Intro