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Many facility planners, concerned about contamination the existing flooring, usually a seamless epoxy or tile,
or potential scheduling delays, once dismissed the becomes incompatible with ongoing needs. In a
thought of installing electrostatic
discharge (ESD) safe tile in
cleanroom or clean
operational clean spaces. Rather
than risk tearing their buildings manufacturing facility, there
apart and losing valuable are four main reasons why
this happens:
production time, many companies
chose alternative methods to ESD
flooring to be ANSI/ESD S20.20- 1) The existing floor, while
1999 compliant. ESD industry conductive, may not meet
control practices may include the increasingly stringent
combination of wrist straps, cleanroom criteria. Some
grounding cords, floor mats and PVC/vinyl tile is known for out-
Faraday Cage material handling gassing and plasticizer
protocols. Until recently, installing migration. The material loss
a new ESD floor most often included the difficult task from the floor can contaminate electro-optics or giant
of removing the old floor first. magnetoresitive (GMR) head manufacturing processes
(see Figure 1).
Ripping up old flooring, grinding concrete, and pouring
epoxies and leveling compounds in a functional 2) The existing flooring material is improperly bonded
cleanroom would be a production managers worst to the concrete and has become a safety or
nightmare. As one defense electronics facility manager maintenance problem. This problem could be the
put it, Even though we absolutely need a conductive result of any number of issues including vapor drive
floor in our cleanroom, we cant afford contaminating (commonly referred to as moisture problems),
our HVAC system with dust and odors from flooring alkalinity from the concrete subflooring or poor
installation processes like shotblasting, concrete repair installation of the original floor.
and skim coating. Wed have to build a back-up
cleanroom before we would even consider installing a 3) The existing floor is cleanroom compatible, but it
new floor. has no static control properties. It may not meet the
recommended minimum requirements of an ESD
The alternative is a temporary production shutdown prevention program like those described by the ESD
during flooring demolition and installation which may Association documents ANSI/ESD S20.20-1999
pose an even worse proposition. Horror stories [Protection of Electrical and Electronic Parts,
abound about companies expecting a one week Assemblies and Equipment] and ANSI/ESD STM7.1-
installation schedule for shutting down manufacturing 2005 [Resistive Characterization of MaterialsFloor
and moving equipment into rented trailers, only to Materials]. For example, the present floor may
watch one week become 10, 15, and even 20 days. generate over 100 volts when people wearing
For these reasons, space planners with an eye on risk conductive footwear walk from one place to another or
management are asking for installation methods that the floor and footwear system resistance may exceed
will neither disrupt production nor potentially corrupt 35 Megohms to ground.
their controlled environments.
4) The current floor does not meet minimum standards
Reasons for Installing ESD Flooring in for static control without the use of ESD waxes or
dissipative floor finishes. ESD floor finishes are
Occupied Areas invisible and exhibit temporary characteristics.
Because they are indistinguishable from standard floor
Let us start with the reasons why a functioning finishes, waxes and other maintenance-sensitive ESD
cleanroom facility manager might want or need to solutions, verification requires testing the floor on a
replace a floor. Regardless of the issues involved, regular basis using an ANSI/ESD STM7.1-2005
one does not replace an existing floor unless it is complaint resistance system. Relying on these
absolutely necessary. Floors are only replaced when maintenance chemicals for ESD control can give
customers, particularly those who demand rock-solid standard janitorial practices like buffing. Also, waxes
quality control, the impression that their supplier has require temporary shutdowns during periodic
little concern for quality. Quality-sensitive customers stripping and maintenance. Any carpet or textile-
fear that their parts might be compromised any time based flooring, option 3, will naturally capture and
their suppliers janitorial department fails to wax a floor accumulate particles and eventually become a dirt
that might be losing conductivity between maintenance generator.
intervals. Although option 4, the raised floor, is the defacto
standard in most wafer fabrication areas, it is
ESD Flooring Options for Cleanrooms probably an expensive overkill for many cleanroom
applications, other than offering access to wires and
In any of the four replacement scenarios above, cables and air exchange; otherwise, there is little
before any serious plans are made or dismissed, it advantage to a cleanroom raised floor system.
makes sense to start with a broad evaluation of Option 5, resinous flooring (epoxy or urethane) is
various ESD flooring alternatives. Any thoughtful rarely installed in occupied spaces due to odors,
evaluation should begin with an investigation drying times and dust generated during floor
involving process compatibility, and then an preparation. After installation, epoxies and urethanes
examination of the risks/rewards of installing a new must cure for 24 to 72 hours which may make them
floor based on successfully dealing with obstacles undesirable flooring materials in any occupied space
such as shutdowns, equipment movement, loss of that must be turned over quickly. Epoxies are also
production, contamination, odor containment and difficult to repair in a cleanroom without closing off
other considerations. At this point it is usually the area with plastic shrouds and air exhausts during
advisable to create a decision matrix or at least give grinding and reapplication process.
a cursory glance at ESD flooring solutions. Of course Floor mats and runners, option 6, are usually used as
most of the options will be quickly dismissed based stop-gap solutions until a more permanent flooring
on contamination control parameters or material is identified. Floor runners offer limited
unsatisfactory electrical properties (point to point protection because they are able to ground static
resistance, and resistance to a groundable point). charges on people or carts only if and when the latter
Below is a reasonable list of possible flooring are in direct physical contact with the runner or mat.
materials: This limitation means that the cleanroom will lack
contiguous grounding. The resulting islands or zones
of ESD protection force a continued reliance on
Various ESD flooring options: expensive shielded packaging of static sensitive
(ESDS) parts. Ensuring continuous ESD protection
Conductive paint also requires redundant grounding through the
ESD floor finish or conductive wax combination of wrist straps and ground cords (which
Conductive/dissipative carpeting and inhibits mobility). Wrist straps must be connected and
carpet tile disconnected every time parts are removed from
Raised flooring with panels covered packaging or transported through ungrounded areas.
with options 7 or 8 So through a process of elimination, let us explore
Conductive/dissipative seamless the real benefits of using option 7 and 8 in this article.
flooring including epoxies, urethanes
and quartz floors
Strategically located conductive mats
and runners
Conductive/dissipative vinyl tile and
vinyl sheet flooring
Conductive/dissipative rubber tile
and rubber sheet flooring