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Research Article
A 25 kW, 25 kHz Induction Heating Power Supply for MOVPE
System Using L-LC Resonant Inverter
Copyright 2013 M. Borage and S. Tiwari. This is an open access article distributed under the Creative Commons Attribution
License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly
cited.
A topology named L-LC resonant inverter (RI) for induction heating (IH) applications takes most of the merits of the conventional
series and parallel resonant schemes, while eliminating their limitations. In this paper, fundamental frequency AC analysis of L-LC
RI is revisited, and a new operating point is suggested featuring enhanced current gain and near in-phase operation as compared
to the conventional operating point. An approximate analysis of the circuit with square-wave voltage source is also described
highlighting the effect of auxiliary inductor on the source current waveform. The analysis also leads to an optimum choice of the
auxiliary inductance. The requirements of the metal organic vapour phase epitaxy (MOVPE) system in which a graphite susceptor
is required to be heated to 1200 C demanding a 25 kW, 25 kHz IH power supply, the configuration of developed IH system, and
experimental results are presented.
L eq Req
S1 D1 S3 D3
La
L eq
+
Figure 1: Equivalent circuit representation of an IH coil. Vd
C
Req
Tr
S2 D2 S4 D4
The analysis of these circuits has been performed in great Figure 2: Circuit diagram of L-LC RI for IH application.
details, and the comparative assessment is also reported in the
literature [12, 13].
La
A topology named L-LC RI has been proposed for IH
applications [1421], which takes most of the merits of
SRI and PRI while eliminating their limitations. It operates
with input dc voltage source, thereby eliminating bulky L eq
input current smoothening inductor. It offers high current
gain, which in turn reduces the current rating of the sec-
C
ondary winding of matching transformer and the feeder to
coil.
Metal organic vapour phase epitaxy (MOVPE) [22] is a Req
highly controlled method for the deposition of semiconduc-
tor epitaxial layers and heterostructures, which are required
for the development of several optoelectronic and electronic
devices. The process of MOVPE involves a vapour phase Figure 3: Equivalent circuit diagram of L-LC RI for analysis.
reaction between metalorganic compound and a hydride gas,
which are transported to a heated (around 1200 C) graphite
susceptor, resulting in a growth of the desired material. IH is
one of the preferred methods for noncontact heating of the power over a wide range. However, two cascaded converters
susceptor. tend to reduce the overall efficiency.
The paper aims to investigate the characteristics of L- The following analysis based on the fundamental fre-
LC RI for an application demanding a 25 kW, 25 kHz IH quency approximation examines the important characteris-
power supply to heat graphite susceptor to 1200 C in a tics of L-LC topology. In an equivalent circuit of L-LC CN,
MOVPE system for the growth of nitride semiconductors shown in Figure 3, input voltage source is assumed to be a
being developed at our Institute. Section 2 describes AC sinusoidal voltage source whose rms value is equal to the
analysis of L-LC CN and investigates various characteristics rms value of the fundamental component of the square-wave
when the converter is operated at the resonant frequency. excitation. Following definitions are made for the analysis.
The suggested operating point is different than the previously Angular resonant frequency:
proposed operating point which provides enhanced current
gain with smaller auxiliary inductance and results in near 1
= 2 = . (1)
in-phase operation. Section 3 describes the operation of eq
high- L-LC compensating network (CN) with square-wave
voltage source leading to an optimum choice of the auxiliary Normalized operating frequency:
inductor. The requirements, description, and design of the
practical system are discussed in Section 4. Experimental = , (2)
results are presented in Section 5.
where = 2 is the angular operating frequency and is
the operating or switching frequency.
2. Analysis of L-LC CN Characteristic Impedance:
Figure 2 shows the L-LC RI. Input dc source could be eq
an unregulated source (obtained with single-phase or three- = . (3)
phase diode rectifier and filter) or could be a regulated
voltage source (obtained with single-phase or three-phase Circuit :
diode/SCR rectifier and filter or another front-end switch-
eq
mode regulator). In the former case, regulation of the power = = . (4)
to the work piece should be done in the RI stage using eq eq
frequency variation [23, 24], fixed-frequency pulse width
Inductance ratio:
modulation (PWM) [2527], or pulse density modulation
(PDM) [28, 29]. In the latter case, the output control can
= . (5)
be done by varying , providing easy control of the output eq
Advances in Power Electronics 3
1.0 0
0.9
10
0.8
0.7 20
0.6
30
(deg)
ILeq N
0.5
40
0.4
0.3 50
n =1
0.2
60
0.1
0.0 70
1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10
Q = 20 Q = 10 Q = 5; n = 1 Q = 20; n = 1
Q = 15 Q=5 Q = 10; n = 1 Q = 5; n = o c
Q = 15; n = 1 Q = 20; n = o c
(a) (b)
Figure 4: The plots of eq (a) and (b) as a function of for different values of at two operating points.
22 1
H
= ,
(1/) (1 ) + [ (1 + ) 3 ]
2 10
=
/ 5 n = o c
22 (1 2 ) + (1/)
= . 0
(1/) (1 2 ) + [ (1 + ) 3 ] 0.5 0.6 0.7 0.8 0.9 1.0 1.1 1.2 1.3 1.4 1.5
(6) n
La L eq La L eq
is is
s1
s C Req C Req
h
(a) (b)
La La
is1 is1 ih
2 2
s1 Q Req s1 Q Req h
(c) (d)
Figure 6: (a) Equivalent circuit for L-LC RI for analysis with V . (b) Equivalent circuit redrawn with V decomposed into V1 and V . (c)
Approximate equivalent circuit for fundamental frequency. (d) Approximate equivalent circuit for harmonics frequencies.
current causing more conduction loss in the switches. It is 3. Behaviour of L-LC CN with Square-Wave
evident from the plots of Figure 4(b) that is small for Voltage Source
operation at = 1, particularly for operation with high
. Therefore, the source current and conduction loss in the Analysis based on the fundamental frequency approximation
switches will be smaller at this operating point. presented in Section 2 suggests that the converter, when
The current gain of the CN, , is given by operated at = 1 offers highest current gain and small
phase angle between source voltage and current resulting
eq 1
= = , (11) in low reactive power loading and low conduction loss in
(1 2 ) + (1/) the semiconductor devices of the square-wave inverter. The
analysis presented in Section 2 assumes sine wave voltage
which can further be simplified at = 1 as source at the input. In practice, the input voltage is a square-
|| =1 = . (12) wave generated by operating switches 1 4 in Figure 2 at
50 per cent duty cycle. In this section, the behaviour of L-
Figure 5 shows the plot of as a function of for = 5 LC resonant inverter for operation at = 1 with square-
and different values of . Maximum current gain (equal to wave voltage source examined. Equivalent circuit for L-LC
) is observed for operation at the proposed operating point RI for analysis with square-wave voltage source is shown in
= 1. Figure 6(a). The source voltage V can be defined as
The characteristics and design of L-LC RI for IH applica-
tions operating at = = (1 + )/ have been reported V () = sign (sin ( )) , (15)
extensively in the literature [1521]. At this operating point,
V can be decomposed into its fundamental component V1
|| = = . (13) and harmonics V as
2 + (1 + )
4
For , || = , which is less than theoretical V () = V1 () + V () = sin ( ) + V () . (16)
maximum value given by (12) at the proposed operating
point. Thus, as also shown in Figure 5, the proposed operating From (15) and (16)
point of L-LC RI results in the enhanced current gain.
Further, the expression for at the conventional operating 4
V () = sign (sin ( )) sin ( )
point can be written as
4
1+ = sin ( ) for 0 (17)
= = tan1 ( ). (14) 2
4
The plots of (14) as a function of are shown in Figure 4(b) for = sin ( ) for ,
2
= 5 and = 20. It can be seen that phase angle is smaller
at the proposed operating point than the conventional oper- wherein is the switching period. Thus, equivalent circuit
ating point, thereby resulting in less conduction loss in the of Figure 6(a) can be redrawn as Figure 6(b), wherein V
switches. decomposed into v1 and V .
Advances in Power Electronics 5
ih (t) is (t)
t is1 (t) t
ih (t)
(a) (b)
is (t)
=1 =5
=2 =7
=3 = 10
(c)
Figure 7: Typical calculated waveforms of V (), 1 (), (), and () for low- ( = 1; = 1) (a) and high- ( = 50; = 1) (b) operation.
The effect of on the waveform of () is illustrated by the calculated waveforms in (c) for = 50.
Current gain
30
of . Figure 7(c) shows the calculated waveform of () for
different values of when = 50. Since the rms value
20
of () can be reduced by increasing the value of , the
degradation in the current gain can be corrected to some 10
extent by choosing higher value of . Figure 8 shows the plots
of current gain as a function of for different values of . A 0
plot of the current gain predicted by (12) is also shown for 0 10 20 30 40 50
direct comparison. The figure also shows the evolution of the Q
current gain at the conventional operating point predicted by = 4; n =1
From (12)
(13) for = 1 and = 5. It is noticed that the actual current = 1; n = 1 = 5; n =1
gain at the proposed operating point is higher than that at the = 1.5; n = 1 = 1; n = o c
conventional operating point. = 2; n = 1 = 5; n = o c
The physical size of an inductor depends on its value, peak = 3; n = 1
current, and rms current. Since, peak and rms value of ()
Figure 8: The plots of current gain as a function of for different
decreases with increasing , it is intuitive to expect that the
values of at the at the proposed operating point = 1 and
physical size of will first reduce as increased, reach a conventional operating point = .
minimum and subsequently increase with further increase in
. To obtain a value of resulting in minimum size, the
following term is defined as its normalized size index: 0.07
Figure 10: The power circuit and the control block diagram of a 25 kHz, 25 kW induction heating power supply using L-LC RI for MOVPE
system. # The process controller, shown for the completeness, is not used in the laboratory testing of the system.
(2)
T (1) (1)
T
2> 2>
(2) T
(a) (b)
T
T T
2> 2> T
(c) (d)
Figure 12: Experimental waveforms. (a) V (trace 1, 200 V/div) and (trace 2, 25 A/div); -scale: 5 s/div. (b) Waveforms at turn-on: IGBT
collector-to-emitter voltage (trace 1, 200 V/div) and gate-to-emitter voltage (trace 2, 10 V/div) -scale: 500 ns/div. (c) Waveforms at turn-
off: IGBT collector-to-emitter voltage (trace 1, 200 V/div) and gate-to-emitter voltage (trace 2, 10 V/div) -scale: 500 ns/div. (d) V (trace 1,
200 V/div) and the voltage across the work coil (trace 2, 200 V/div) -scale: 10 s/div.
Table 1: Component values and device part numbers used in the the tune-in condition of the RI stage against the slow drift
system. of resonant frequency over varied operating conditions and
time. This loop senses the phase of the inverter output current
Component Value/Part number
using a phase detector, PD. The output of the controller
2.2 mH drives a voltage controlled oscillator (VCO) that adjusts the
3 mF switching frequency of the inverter in such a way that the
300 H inverter output current lags the voltage slightly.
30 F
150 F 5. Results
2.2
5 H The photograph of the developed induction heating power
1 0.03 F supply, being tested in laboratory to heat a graphite susceptor,
2 0.33 F is shown in Figure 11. The graphite susceptor heated to 1200 C
13.5 H
in air is shown in the inset.
The inverter output voltage, V , (trace 1, 200 V/div) and
15 F
current waveforms, , (trace 2, 25 A/div) are shown in
1 -6 VUO 82 Figure 12(a). The nature of current waveform matches with
- SKM100GAR123D the predicted waveform given in Figure 7. The waveforms of
1 -4 and 1 -4 SKM100GB123D, two modules collector-to-emitter (trace 1, 200 V/div) and gate-to-emitter
1 , 2 , 3 DSEI 31 100 (trace 2, 10 V/div) voltage of an IGBT in H-bridge inverter
during turn-on and turn-off transitions are shown in Fig-
ures 12(b) and 12(c), respectively, demonstrating the soft-
summarizes the values of the components and part numbers switching. Figure 12(d) shows the waveforms of V (trace 1,
of the semiconductor devices used in the system. 200 V/div) and the voltage across the work coil (trace 2,
200 V/div) showing that only fundamental component of
4.3. Control Circuit. The input dc voltage to the square-wave input square-wave voltage has been passed to the work coil.
inverter is controlled to regulate the susceptor temperature.
The block diagram of overall control system is also shown 6. Conclusion
in Figure 10. A thermocouple-type temperature sensor and
process PID controller module are planned to be used for The paper reports the various issues in the development
programming and controlling susceptor temperature. The of an IH power supply for MOVPE application using L-
output of PID module acts as the reference for the inner LC RI. The fundamental frequency ac analysis of L-LC RI
control loop to control the input dc voltage to the square-wave is revisited, and it is shown that the converter exhibits
inverter by controlling the duty ratio of the buck converter. enhanced current gain and near-unity power factor operation
An additional phase control loop is employed to maintain when operated at the resonant frequency. Further analysis of
Advances in Power Electronics 9
the circuit with square-wave voltage source highlights the [13] F. P. Dawson and P. Jain, A comparison of load commutated
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