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Optik
journal homepage: www.elsevier.de/ijleo
a r t i c l e i n f o a b s t r a c t
Article history: We present a novel fabrication method for micro optical waveguide mold based on y-cutting technology.
Received 7 October 2011 A micro polymer optical waveguide mold for molding process has been fabricated by ultra precision y-
Accepted 5 February 2012 cutting system. The mold, which has the trapezoidal cross-section with 65 m top width, 38 m bottom
width and 56 m height, has high depth-to-width ratio and high dimensional accuracy. The waveguide
pattern on the mold has the clear sharp edge and smooth sidewalls with nanometer root-mean-square
Keywords:
(rms) surface roughness. Prole testing results show that the dimensional errors of the mold are certied
Waveguide mold
to be approximately 1 m. Injection molding replication experiment shows that the mold is suitable for
Fly-cutting
Injection molding
the polymer optical waveguide for its simple process and ne surface prole.
Polymer waveguide 2012 Elsevier GmbH. All rights reserved.
Corresponding author. Tel.: +86 731 84574938; fax: +86 731 84574938. where R is the y-cutting slew radius, f is the feed rate and is the
E-mail address: plxhaz@126.com (W. Peng). rake angle shown in Fig. 2a.
0030-4026/$ see front matter 2012 Elsevier GmbH. All rights reserved.
doi:10.1016/j.ijleo.2012.02.020
868 Y. Wu et al. / Optik 124 (2013) 867869
Fig. 1. Schematic structure of the y-cutting system model with 3-DOF precision
linear stage.
Fig. 2. (a) The tip of diamond tool used in micro-mould fabrication and (b) the
diamond tool. Fig. 5. The cross-section prole measurement by Talysurf.
Y. Wu et al. / Optik 124 (2013) 867869 869
Acknowledgment
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