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Code: 12D86102

M.Tech - I Semester Regular Examinations, April/May 2013

MICROELECTRONIC TECHNOLOGY & IC FABRICATION
(Micro & Nano Electronics)
Time: 3 hours Max. Marks: 60
Answer any FIVE questions
All questions carry equal marks

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1. (a) Generalize the benefits of miniaturization.

(b) Discuss about MEMS market size and market character.

2. (a) Explain the various emerging lithographic technologies, in brief.

(b) Write notes on photolithography resolution enhancement technology.

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3. (a) Differentiate the processing techniques of physical etching and plasma etching.
(b) Write notes on ion etching and ion-beam milling techniques.

4. (a) What is silk-screening? Explain in detail.

(b) Describe doctors blading of ceramic substrates.

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5. (a) Write notes on wet isotropic and anisotropic etching techniques.
(b) What are the problems that arise with wet bulk micro matching? Explain.

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6. (a) Write notes on mechanical properties of thin films.

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(b) Explain the technical aspects of synchrotron orbital radiation.

7. (a) Differentiate top-down approach and bottom-up approach with respect to various parameters.

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(b) What are all the considerable parameters in substrate choice? Explain them, in brief.

8. (a) Discuss the comparison between actuators and magnetic actuators.

(b) Write notes on macroscale laws for fluid flow.

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