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7 VIEWPORTS AND FIBRE OPTICS UK:
F:
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fr@allectra.com
Sub-D
1
Viewports
In this section hermetically sealed optical components are
CM + DIL
applications.
Single and Multi-layer coatings can be added to viewports
to optimize transmission performance. All viewports are
Thermo-
couple
suitable for UHV or HV applications. Spectra of electromagnetic rays.The visible range from
5
Polishing Quality
6
other
8
Manipulation
Motion
9
Fibreoptic
For an increasing number of applications, Optical Fibres are
Process
Control
10
found.
CF
11
The Step Index Fibres are the thickest Fibres used. They are
12
KF
The best signal fibres are the Single Mode types. By having
Adaptors
Specials
- 7.1 -
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UK:
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VIEWPORTS AND FIBRE OPTICS 7.2
Sub-D
1
Viewports and Fibre Optics for HV and UHV
CM + DIL
F/T
2
7.1 STANDARD SERIES GLASS VIEWPORTS -> Page 7.3
Standard Glass Viewports for UHV and HV
Coax
F/T
Standard Glass Viewports, O-Ring Sealed ISO-K types
3
Standard Glass Viewports with Broad Band Anti-Reflective coating
High Voltage
7.2 SAPPHIRE VIEWPORTS -> Page 7.4
Power
4
- UV GRADE Sapphire Viewports
7
- DUV GRADE Sapphire Viewports
- REGULAR GRADE Sapphire Viewports
Thermo-
couple
- Large versions up to 137mm View Diameter
5
- High Vacuum Versions
Accessories
Cables
7.3 FUSED SILICA (QUARTZ) VIEWPORTS -> Page 7.5
6
Fused Silica Viewports UV grade
Fused Silica Viewports DUV grade
Fused Silica Viewports EXCIMER grade
Fiberoptic
Viewports
7
7.4 BBAR COATED VIEWPORTS -> Page 7.7
Broad Band Anti-Reflection coated Quartz
DUV Base material
Valves
40CF and 63CF sizes
8
7.5 LASER VIEWPORTS -> Page 7.8
Manipulation
Motion
Laser Viewports with AR coating
9
40CF and 63CF sizes
Process
Control
10
Non-magnetic Fused Silica Viewports
UV and DUV Quality
Crystal Quartz Viewports
Hardware
CF
11
7.7 SPECIAL MATERIALS VIEWPORTS -> Page 7.10
Calcium-Fluoride/ Magnesium Fluoride/ Zinc Selenide
BBAR Coated Zinc Selenide
Hardware
12
KF
Viewport Shutter
14
- 7.2 -
DE: Info@allectra.com
7.3 STANDARD VIEWPORTS UK:
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fr@allectra.com
Sub-D
1
glass). These viewports are for normal visible light. For more
demanding applications, Fused Silica (Quartz) is
recommended.
Coax
F/T
3
High Voltage
Power
UHV
Vacuum UHV
Material Glass Kodial FLANGE VIEW DIAM. PART NUMBER EURO
Thermo-
couple
catalogue.
Hardware
as well as the viewport. A significantly enlarged view 200 ISO 210 120-VPGO-ISO200 689,00
ISO-K
13
diameter is obtained.
Adaptors
Specials
- 7.3 - ...Viewport Shutters and Lead Glass: Page 7.12...Quartz viewports: Page 7.5...
DE: Info@allectra.com
UK:
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SAPPHIRE VIEWPORTS 7.4
Sub-D
1
Sapphire Viewports
Sapphire has high transmission over wavelengths from
CM + DIL
180nm up to 5500nm. It is a very rigid material with high
F/T
bakeout temperatures. This makes Sapphire an ideal
2
material for a lot of demanding applications.
- Three qualities are available: Regular Grade, UV and DUV
- Sizes up to 136mm View
Coax
F/T
3
- Broad band or single band Coated versions available on
request
High Voltage
Power
General Specification UHV Sapphire Viewports UV GRADE Sapphire Viewports
4
D
UCE
UHV - no coating RED
Vacuum UHV
Material Sapphire, FLANGE VIEW THICKN. PART NUMBER EURO
Thermo-
couple
90 Orientation 16CF 15 1.6 130-VPS-C16-15 200,00
5
Bakeable 400C (CF Flange) 40CF 24 2.0 130-VPS-C40-24 255,00
Max. Gradient 5oC/min 40CF 36 2.0 130-VPS-C40-36 600,00
These Viewports should be installed with annealed
Accessories
700,00
Cables
63CF 49 2.4 130-VPS-C63-49
copper gaskets.
6
Note: also available on KF flanges or as weld adaptors
Fiberoptic
Viewports
Specification UV Grade Sapphire Viewports DUV GRADE Sapphire Viewports D
UCE
UHV - no coating RED
7
Parallelism < 3 arc min
Surface finish 50-20 Scratch-Dig FLANGE VIEW THICKN. PART NUMBER EURO
Transmission ~ 180 5500nm 40CF 17.5 2.0 130-VPSDUV-C40-17 295,00
Valves
>50% at 250nm 40CF 23.8 2.0 130-VPSDUV-C40-24 335,00
8
63CF 36 2.0 130-VPSDUV-C63-36 810,00
63CF 49 2.4 130-VPSDUV-C63-49 975,00
Specification DUV Grade Sapphire Viewports
Manipulation
Note: also available as weld adaptors
Motion
9
Parallelism < 3 arc min
Surface finish 20-10 Scratch-Dig
Transmission ~ 180 5500nm
Process
Control
Regular Grade Sapphire Viewports
>70% at 250nm
10
UHV - no coating
Hardware
16CF 16 1.5 131-VPS-C16-16 380,00
CF
11
40CF 32 1.5 131-VPS-C40-32 466,00
Paralellism not specified
40CF 38 1.5 131-VPS-C40-40 605,00
Surface finish 60-40 Scratch-Dig
63CF 63 2.0 131-VPS-C63-63 1023,00
Transmission ~ 250 5500nm
100CF 89 3.0 131-VPS-C100-89 POR Hardware
12
KF
General Specification Fused Silica Viewports Fused Silica (Quartz) Viewports UV grade
4
ED
UHV 0.2 to 2 microns - NO coating UC
RED
Vacuum UHV
Leak rate <2x 10-10 mbar l /s FLANGE VIEW DIAM. PART NUMBER EURO
Thermo-
couple
Isotropy 2D Material
8
Homogenity Grade F
Manipulation
Motion
9
applications.
16
- 7.5 - ...Lead Glass Shields: Page 7.12.......BBAR coated Viewports: Page 7.7.......
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UK:
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FUSED SILICA VIEWPORTS 7.6
Sub-D
1
Excimer Grade Quartz Viewports
Designed for use with ArF based Excimer lasers (193nm) a
CM + DIL
high quality Fused Silica (Quartz) material is offered, which
F/T
2
gives an internal transmission at this wavelength of more
than 99.5%. These windows can also be used for other
demanding applications in the UV region.
Coax
F/T
3
High Voltage
Power
4
Specification EXCIMER (EUV) GRADE Fused Silica Fused Silica Viewports - EXCIMER grade D
UCE
UHV 0.18 to 2 microns - NO coating RED
Parallelism <10 arc sec.
Surface Finish 20-10 scratch/dig FLANGE VIEW DIAM. PART NUMBER EURO
Thermo-
couple
Flatness /4 @ 632nm 40CF 35 110-VPQZ-C40-EX 650,00
5
Transmission >99,5% @ 193nm (internal) 63CF 68 110-VPQZ-C63-EX 1450,00
Usable range 180 ... 2000nm
Accessories
Inclusions max. 0.03mm2/100cm3 (class 0)
Cables
Isotropy 3D Material
6
Homogenity Grade A
Fiberoptic
Viewports
7
Valves
8
Manipulation
Motion
Internal transmission curves for DUV and Excimer grade
9
material.
Process
Control
10
Fused Silica (Quartz) Viewports on KF Flanges
The UV-Quartz quality is offered for use with KF flanges.
Hardware
Other Fused Silica grades are available on request. Please
CF
11
ask the Sales Office for a quote.
Hardware
12
KF
Hardware
UC
RED
13
Versions on KF Flanges
Vacuum 10 -9 mbar
Temperature -100 to 200C <5K/min FLANGE VIEW DIAM. PART NUMBER EURO
Transmission 200 ... 20000nm 25KF 16 110-VPQZ-K25 205,00
Adaptors
Specials
Isotropy 3D Material
7
Homogenity Grade A
Valves
Bottom: IR range
Bi-Metal
Atlas
16
Sub-D
1
Laser Viewports with AR coating
For Laser applications Allectra offers high quallity Quartz
CM + DIL
viewports with optimized coatings. All viewports have more
F/T
than 99.5% transmission / surface at the given wavelength.
2
A high quality 20/10 surface finish and a flatness of /4
allow high performance. They are offered on DN40CF
flanges with 35mm view diameter and on DN63CF with
Coax
F/T
68mm view diameter.
3
High Voltage
Power
Specification for UHV Laser Viewports Laser Viewports with AR coating
4
D
UCE
40CF and 63CF flanges RED
Vacuum UHV
Temperature -100 to 200C FLANGE WAVELENGTH PART NUMBER EURO
Thermo-
couple
Parallelism <10 arc sec 40CF 193 nm 110-ARF-C40 795,00
5
Flatness /4 @ 632nm 63CF 193 nm 110-ARF-C63 1345,00
Surface finish 20/10 Scratch/Dig 40CF 248 nm 110-KRF-C40 695,00
Homogenity Grade A
Accessories
1245,00
Cables
63CF 248 nm 110-KRF-C63
Inclusion class 0
6
40CF 780 nm 110-DIODE-C40 695,00
Coating V-Coat with <0.25% Reflection/surf.
63CF 780 nm 110-DIODE-C63 1245,00
Material
40CF 1064 nm 110-YAG-C40 695,00
Fiberoptic
Viewports
ArF (193nm) Excimer Grade
63CF 1064 nm 110-YAG-C63 1245,00
KrF (248nm) DUV Grade
7
Diode (780nm) UV Grade
YAG (1064nm) IR Grade
Laser Damage Threshold
Valves
ArF 1 J/cm2 for 10ns Pulse
8
Coatings for other wave lengths are
KrF 10 J/cm2 for 10ns Pulse possible. Please ask for a quote!
Diode 10 J/cm2 for 10ns Pulse Also V-coats for 2 different wave lengths
Manipulation
YAG 10 J/cm2 for 10ns Pulse are available.
Motion
9
Process
Control
10
Hardware
CF
11
Hardware
12
KF
Hardware
ISO-K
13
coatings:
Top left: for ArF Excimer Laser
14
...external Viewport Door for Radiation protection: Page 7.12 ...... - 7.8 -
DE: Info@allectra.com
7 .9 NON-MAGNETIC VIEWPORTS UK:
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uk@allectra.com
fr@allectra.com
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1
Viewport dimensions:
DN16CF: A= 34mm, B= 8.9mm, C= 16mm
Manipulation
Motion
EURO
CF
Orientation Z-Cut
Parallelism <10 arc sec
Surface Finish 20/10 scratch/dig
Chambers
HV / UHV
Flatness /2 @ 632nm
15
- 7.9 - ...Standard Fused Silica Viewports: Page 7.5.....316LN CF Flanges: Sec. 11.....
DE: Info@allectra.com
UK:
F:
uk@allectra.com
fr@allectra.com
SPECIAL VIEWPORTS 7.10
Sub-D
1
Special Materials Viewports
UHV Viewports made of Special Materials are available
CM + DIL
when other wavelengths than standard glass or quartz are
F/T
needed. Calcium-Fluoride and Magnesium-Fluoride cover a
2
wide transmission range from UV to Infrared down to 20m
(see the transmission curves below).
With the optional AR coating higher transmission can be
Coax
F/T
reached.
3
High Voltage
Power
Specification Special Material Viewports Special Materials Viewports - NO COATING
4
ED
UHV UC
RED
Vacuum UHV, 10 -10 mbar
Temperature 200C (150C for coated ZnSe) FLANGE TYPE PART NUMBER EURO
Thermo-
couple
Transmission: 40CF CaF2 130-CAF-23-C40 595,00
5
CaF2 150nm ... 9m 63CF CaF2 130-CAF-48-C63 POR
MgF2 180nm ... 8m 40CF MgF2 130-MGF-23-C40 595,00
ZnSe 600nm ... 20m
Accessories
63CF MgF2 130-MGF-48-C63 POR
Cables
View Diameters 40CF: 23mm
6
40CF ZnSe 130-ZNSE-23-C40 595,00
63CF: 48mm 63CF ZnSe 130-ZNSE-48-C63 POR
Flatness: /4
Fiberoptic
Viewports
Surface finish 20/10 (CaF2 , MgF2)
40/20 (ZnSe)
7
Valves
8
Special Materials Viewports ZnSe - AR COATED ED
UHV UC
RED
Manipulation
Motion
FLANGE TYPE PART NUMBER EURO
9
40CF ZnSe 130-ZNSE-23-AR-C40 795,00
63CF ZnSe 130-ZNSE-48-AR-C63 POR
Process
Control
10
The standard coating for ZnSe is a Broad
Hardware
Band AR ( for 8 - 12 m); the reflection loss
CF
11
is <0.5% per surface.
Please note that coated viewports are
bakeable to 150C only.
Hardware
12
KF
Hardware
ISO-K
13
Adaptors
Specials
14
Chambers
HV / UHV
15
Bi-Metal
Atlas
16
...Beryllium X-Ray Windows: Page 7.11.......Standard Glass Viewports: Page 7.3..... - 7.10 -
DE: Info@allectra.com
7 .11 SPECIAL PURPOSE VIEWPORTS UK:
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fr@allectra.com
Sub-D
1
differentially pumped)
10
Temperature 200C
Material Cleartran (Zinc Sulfide),
AR coated 8 - 12m
Hardware
Sub-D
1
Viewport Accessories
Allectra offer Accessories for Viewports:
CM + DIL
- Viewport Shutter
F/T
2
- Lead Glass Radiation Protection Screen
- External Viewport Door for Radiation Protection
Coax
F/T
3
High Voltage
Power
Specification for Viewport Shutter Viewport Shutter
4
UHV and High Vacuum
Vacuum to 10-10 mbar
Construction All Metal FLANGE TYPE PART NUMBER EURO
Thermo-
couple
Bakeable to 250C 63CF MANUAL 140-VPSH-C63 840,00
5
Mechanism Shutter plate with rotary drive 100CF MANUAL 140-VPSH-C100 935,00
Drive with position lock 1267,00
160CF MANUAL 140-VPSH-C160
Flange Double sided wih
Accessories
1058,00
Cables
63 ISO MANUAL 140-VPSH-ISO63F
through holes
6
100 ISO MANUAL 140-VPSH-ISO100F 1176,00
Fiberoptic
Viewports
7
140-VPSH-C100
140-VPSH-ISO100F
Valves
8
Specification Lead Glass Kit Lead Glass Radiation Protection Screen
~1.5 mm lead equivalent
Thickness 5.6 mm
Manipulation
Lead Equivalent 1.6 mm (to 110kV) FLANGE TYPE PART NUMBER EURO
Motion
1.4 mm (to 200kV) 16CF KIT 140-LG-C16
9
99,00
The Lead Glass Screen is offered as a kit comprising the 40CF KIT 140-LG-C40 105,00
Lead Glass, a Retaining Ring and a Set of Long Bolts 63CF KIT 140-LG-C63 220,00
which hold the retaining ring onto the front of the
Process
Control
100CF KIT 140-LG-C100 385,00
viewport. The Viewport is not included.
10
160CF KIT 140-LG-C160 POR
Hardware
CF
11
This type is sealed by an O-ring and is suitable down to 10-8 mbar. The seal is made by the
4
in-vacuum connector. The air side Fibre can be removed without breaking the vacuum.
For air and vacuum, Fibres with an SMA-F connector are required.
Thermo-
couple
A short Fibre is sealed into the Flange with an all-metal seal. The Fibres are coupled in the
7
usual way with Fibre Couplers on the air and vacuum sides. Fibres with 200 / 400 / 600m
core diameter are used; a UV and an IR version are available.
A disadvantage is that two Fibre junctions are required
Valves
8
types
10
This type comes with the In-vacuum Fibre already attached to the flange. Only one
coupling is required, which results in lower losses and a reduced overall system price.
This system is offered with SMA connectors and 200 / 400 / 600m Step Index Multimode
Hardware
Fibres.
CF
11
FC-PC connectors
With FC-PC connectors several types of Fibres can be offered:
Adaptors
Specials
- 7.13 -
DE: Info@allectra.com
UK:
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uk@allectra.com
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FIBRE OPTICS 7.14
Sub-D
1
High Vacuum Fibre Optic Coupler Feedthrough
A low cost and simple solution for High Vacuum Fibre applications.
CM + DIL
Only one coupling is required to go into the vacuum system, the
F/T
two F-SMA terminated Fibres are connected directly within the
2
feedthrough and the seal is made with a Buna-N O Ring.
Viton O-Ring option.
As fibres versions with 200 / 400 / 600m core diameter are
Coax
F/T
offered.
3
High Voltage
Power
Fibre Optic Coupler Feedthroughs
4
Specification Fibre Optic Coupler F/T D
U CE
KF Flanges, O-Ring Sealed RED
Vacuum HV, down to 10-8 mbar
FLANGE No of F/T PART NUMBER EURO
Thermo-
couple
Temperature -20C to 150C
16KF 1 152-FCF-K16 120,00
5
Flanges 16KF, 25KF, 40KF and custom
25KF 1 152-FCF-K25 120,00
16CF, 40CF and custom
40KF 1 152-FCF-K40 125,00
Material SS for F/T and coupler
Accessories
40KF 2 152-FCF-K40-2 235,00
Cables
O-Ring Buna-N included, Viton
6
optional 40KF 3 152-FCF-K40-3 338,00
40KF 4 152-FCF-K40-4 425,00
Fiberoptic
Viewports
With the Coupler Feedthrough, a Buna-N
7
O-ring is supplied as standard. A Viton O
Ring is an option. Spare O-Rings are Fibre Optic Coupler Feedthroughs ED
CF Flanges, O-Ring Sealed UC
offered below. RED
Valves
FLANGE No of F/T PART NUMBER EURO
8
16CF 1 152-FCF-C16 130,00
40CF 1 152-FCF-C40 140,00
152-FCF-K40
Manipulation
40CF 2 152-FCF-C40-2 250,00
Motion
9
40CF 3 152-FCF-C40-3 353,00
40CF 4 152-FCF-C40-4 440,00
Process
Control
10
In-Vacuum Multimode Fibres D
Specification In-Vacuum Fibre for Coupler F/T U CE
UHV Versions 400 micron RED
Hardware
Vacuum 10-10 mbar TYPE LENGTH PART NUMBER EURO
CF
11
Fibre Type Step Index Multimode 400m UV, SMA-SMA 300 151-SMA400-UV-300 320,00
Core High Purity Synthetic Silica UV, SMA-SMA 600 151-SMA400-UV-600 350,00
Cladding Doped Silica UV, SMA-Ferrule 600 151-SMA400F-UV-600 350,00
Shielding Stainless Steel
IR, SMA-SMA 300 151-SMA400-IR-300 320,00 Hardware
12
KF
Minimum Bend Radius 80mm
IR, SMA-SMA 600 151-SMA400-IR-600 350,00
Connectors F-SMA-905
IR, SMA-Ferrule 600 151-SMA400F-IR-600 350,00
Ferrule on one side as option
Hardware
Replacement O-Rings
In-vacuum cable: F-SMA
Adaptors
Specials
shielded fibre.
BUNA-N 10 152-FCF-OB-10 27,00
VITON 1 152-FCF-OV 30,00
Chambers
HV / UHV
15
feedthroughs.
Atlas
PLUG 1 152-FPLUG
16
38,00
Multi-mode Fibre
Also available with 200m and 400m fibre
UHV Fibre Optic F-SMA Couplers - Air and Vacuum Service
Max. Power: 100kW/ cm2 CW
Coax
F/T
Side Coupler
150-FFT-UV-C40
Specification for In-Vacuum Fibre (600m) for All- In-Vacuum Fibres UHV Versions
Hardware
ED
Step Index Multimode 600m UC
metal Feedthrough RED
CF
11
Connectors F-SMA-905
ISO-K
lengths as required.
Atlas
16
Sub-D
1
UHV Fibreoptic Feedthrough with attached
In-vacuum Fibre, SMA Types
CM + DIL
Fibreoptic Feedthroughs with attached In-vacuum Fibre
F/T
2
reduce transmission losses as well as costs.The 400m fibre
has F-SMA905 connectors on both ends. A ferrule on the
vacuum end is also available.
Also avilable with 200m and 600m firbres and with FC-PC
Coax
F/T
connectors.
3
High Voltage
Power
General Specification for UHV Fibre Feedthroughs 400 micron Multi-mode
4
Multi-mode Fibres F-SMA to F-SMA, UV Type, 1m Fibre
Vacuum UHV, < 5x10-10 mbar l/s FLANGE FIBRE PART NUMBER EURO
Thermo-
couple
Seal All Metal
16CF 1x UV 150-UV-S-S-1000-C16 621,00
5
Connectors SS (Vacuum side)
40CF 1x UV 150-UV-S-S-1000-C40 625,00
Temperature 200C bakeout
40CF 2x UV 150-UV-S-S-1000-C40-2 1220,00
-25...+75C working
Accessories
40CF 3x UV 150-UV-S-S-1000-C40-3 1765,00
Cables
Fibre Type Multi-Mode Fibre,
6
Step Index, 400m Core
Nom. Aperture 0.22 Attenuation versus
Connectors FSMA-905 both sides wavelength for UV fibre.
Fiberoptic
Viewports
Values are given in
(= SMA)
dB/km
7
ferrule without nut optional (valid for 200m/400m
on vacuum side and 600m fibres)
Standard length up to 1000mm
Valves
8
Manipulation
Motion
9
Specification for UV Fibre 200/400/600 micron UHV Fibre Feedthroughs 400 micron Multi-mode
Multi-mode F-SMA to F-SMA, IR Type, 1m Fibre
Process
UV FIBRE Type
Control
FLANGE FIBRE PART NUMBER EURO
10
Transmission (200...) 400 1600nm
16CF 1x IR 150-IR-S-S-1000-C16 621,00
Damping of fibre ~3 dB /m at 200nm
40CF 1x IR 150-IR-S-S-1000-C40 625,00
~0.05 dB/m at 400nm
Hardware
40CF 2x IR 150-IR-S-S-1000-C40-2 1220,00
<0.15 dB/m 400 ... 900nm
CF
40CF 3x IR 150-IR-S-S-1000-C40-3 1765,00
Attenuation versus 11
Hardware
wavelength for IR fibre.
Values are given in
12
KF
dB/km
(valid for 200m/400m
and 600m fibres)
Hardware
ISO-K
13
IR FIBRE Type
14
both sides
6
125m OD
Motion