Micro and Smart Systems

Course coordinators
1. G.K. Ananthasuresh , Mechanical Engineering ,IISc
IIScsuresh@mecheng.iisc.ernet.in

2. K.J. Vinoy, Electrical Communications Engineering, IISc,

kjvinoy@ece.iisc.ernet.in

3. S. Gopalakrishnan, Aerospace Engineering, IISc ,

Krishnan@aero.iisc.ernet.in

4. K.N. Bhat, Electrical Communications Engineering, IISc.

knbhat@gmail.com

Prof.K.N.Bhat, IISc Bangalore 1

 Lecture Modules

Module 1: Introduction - Lectures 1 to 6

Module 2: Microfabrication processes Lectures 7 to 14
Module 3: Mechanics of Solids - Lectures 15-24
Module 4: Finite element method Lectures 25 to 30
Module 5: Electronics and packaging - Lectures 31 to 40

Prof.K.N.Bhat, IISc Bangalore 2

 Text / References
1) S.D. Senturia, Microsustem Design, Kluwer
Academic Publishers, 2001

2) Tai-Ran Hsu, MEMS & Microsystems Design and

Manufacture, McGraw Hill, 2002

3) V.K. Varadan, K.J. Vinoy, and S. Gopalakrishnan,

Smart Material Systems and MEMS: Design and
Development Methodologies, Wiley, 2006
Suggested hyperlinks
http://www.memsnet.org/mems,
/http://www.analog.com/en/mems-and-
sensors/products/index.html
http://web.mit.edu/microsystem-design/www/

Prof.K.N.Bhat, IISc Bangalore 3

 Suggested Additional Readings

1) G.T.A. Kovacs, Micromachined Transducers

Sourcebook, WCB McGraw-Hill, 1998

2) J.W. Gardner, Microsensors: principles and

applications, John Wiley & Sons, 1994

3) M. Madou, Principles of Microfabrication, CRC

Press, 1998

Prof.K.N.Bhat, IISc Bangalore 4

 Micro and Smart Systems

Lecture -1
Glimpses of Microsystems and Miniaturization

Prof K.N.Bhat,
ECE Department , IISc Bangalore
email: knbhat@gmail.com

Prof.K.N.Bhat, IISc Bangalore 5

 What are MEMS and Micro Sytems?
Micro Electro Mechanical Systems (MEMS ) are
devices that have static or movable components
with some dimensions on the scale of microns

MEMS combine microelectronics and micro-

mechanics, and sometimes micro-optics

They are referred by different names in different

countries

MEMS : USA
MicroSystems Technology (MST): Europe
Micromachines : Japan
Smart materials and Smart Structures: India
Prof.K.N.Bhat, IISc Bangalore 6
Micro Electro Mechanical Systems (MEMS) - Microsystems

This is a Revolution similar to

VLSI in Microelectronics
Deals with
1. Miniaturization and batch processing of
Sensors , Actuators and microstructures
2. Integration of mechanical components with
electronics

Prof.K.N.Bhat, IISc Bangalore 7

 Batch Processing and miniaturization

Cost Reduction
Batch Processing
Reliability &
Reproducibility

Miniaturization Low Power operation

Biomedical and
aerospace Applications

Prof.K.N.Bhat, IISc Bangalore 8

 Miniaturization approaches

Conventional Micromachining

Silicon Micromachining

Prof.K.N.Bhat, IISc Bangalore 9

Conventional Micromachining Techniques

Each component must be made piece by piece. Low

price for large production volumes are the result of
mechanization.

Ultrasonic machining, sandblasting, laser ablation and

spark erosion have aided in miniaturization.

Finest details that can be machined are one to two

orders larger than what photolithography makes
possible.

Prof.K.N.Bhat, IISc Bangalore 10

 Silicon Micromachining

Suitable for batch processing similar to

fabrication of ICs.

Production costs of whole production is

independent from number of components
fabricated.

Miniaturization with finest details in the range

of 0.1 to 10m possible based on photo-litho-
graphy

Prof.K.N.Bhat, IISc Bangalore 11

 Classification of MEMS
MEMS structures and devices can be classified into
four major groups:

Passive (nonmoving) structures (eg) microtips

Sensors, which respond to the world, (eg) pressure

Actuators (reciprocal of the sensors), which use

information to influence something in the world.
(eg) pump, valve etc

Micro-Systems that integrate both sensors and

actuators to provide some useful function

Prof.K.N.Bhat, IISc Bangalore 12

 MEMS Categories and Application areas
Application Transportation Communications Analytical &
Areas Medical
Categories

MEMS Infrared Optical & RF Micro Filters,

Structures Imagers Signal Guides, Micro
Field Emission Channels
Arrays & - Mixers
MEMS Pressure , Gas sensors
Sensors13 Acceleration, Acoustic
13 & Angular sensors
Rate
MEMS Aerodynamic Displays, Optical Micro-pumps
Actuators Flow switches, & RF & -Valves
Control13 Switches &
Filters
Prof.K.N.Bhat, IISc Bangalore 13
 Transducers

Sensors Convert Actuators

Measured Quantities into Convert different types
of energy into
Electrical Signal
Mechanical Energy
Pressure sensor,
Micropump, RF
Accelerometer, Gyro,
Temperature Sensor, Gas switches and
Resonators, micro
sensor, Flow sensor
mirror, ES comb drive

Structures AFM tip, Field Emission Arrays,

Micro-fluidic Channels
Prof.K.N.Bhat, IISc Bangalore 14
 Some Examples of Micromachined
Miniaturized Mechanical component
Micropump
Pressure
sensors

Micro RF filters
cantilevers
(DNA Sensor)

k
r
m F ma kx
Nano- tip for
Micro
AFM and for
Acceleration
FEA
Sensors Prof.K.N.Bhat, IISc Bangalore 15
 Need for Miniaturization of Sensors
1.Intracranial Pressure (ICP) and blood pressure monitoring

3.Oceanography-CTD sensor 2.Mapping pressure on

for Marine Engg (NPOL , Kochin) LCA wing
4. Air pressure and flow in the
ignition system of automobile
Prof.K.N.Bhat, IISc Bangalore 16
 Piezoresistive pressure sensor
Pressure P

Diaphragm

R1 R2 R3 R4 R
Piezo resistors : p-type
boron diffused/ implanted
R
Vo Vin
R
Vo
Sensitivity S
Prof.K.N.Bhat, IISc Bangalore
P 17
Motorolas Manifold-absolute Pressure
(MAP) Sensor and schematic of its package

Prof.K.N.Bhat, IISc Bangalore 18

 Silicon cantilever beams for detection of DNA

An array of cantilevers treated

A hybrid micromachine
/DNA system (IBM,Zurich)
Prof.K.N.Bhat, IISc Bangalore
with different strands of DNA.
When a solution containing
different fragments of DNA is
introduced, complementary
strands of DNA will naturally
bind to specific cantilevers
creating stress which deflects the
cantilever.
Can detect damaged DNA
sequences, since a single base
mismatch will cause a slightly
different stress, indicating the
presence of a damaged fragment.
19
 Need for Miniaturization of structures
Microstructures Micro geras
Field emission tips for high frequency
Vacuum Electron Devices

Micro turbine

Nanometer
size AFM Tip

Prof.K.N.Bhat, IISc Bangalore 20

 Need for Miniaturization of Actuators
Micropumps for l/minute pumping
(1) Drug delivery drug dosage control
(2) Lubricating bearings of gyro motor space appln.
Actuation
Mechanism
Pump Diaphragm Pump Chamber
Inlet Valve Outlet Valve

Inlet Outlet

Stroke Volume
Valve Threshold Chamber Pressure p
Pressure p (crit) V Chamber Volume Vo
Prof.K.N.Bhat, IISc Bangalore 21
 Microsystems and Miniaturization
Miniaturization is important for Applications
Biomedical : pressure sensors (Intra Cranial Pressure,
blood pressure) ), cantilever beams (DNA analysis),
micropump ( controlled micro dose of drug Delivery)
Aerospace and Automobile: Pressure sensors ,
accelerometers,
Space programs: Pressure sensors , accelerometers,
gyro, micropump
Micro fluidics channels and mixers: Chemical analysis
and synthesis and lab on Chip concept
Defense : Explosive detection, gas sensors, pressure
sensors , accelerationProf.K.N.Bhat,
sensorsIIScand RF MEMS
Bangalore 22