Академический Документы
Профессиональный Документы
Культура Документы
2012
A. A. Nannikar
D. N. Raut
R. M. Chanmanwar
S. B. Kamble
amolnannikar@gmail.com
VJTI, Mumbai
D. B. Patil
datta.patil@siemens.com
Siemens Ltd., Mumbai
1. Introduction
FMEA is a systematic method of identifying and preventing system, product and process problems before they
occur. It is focused on preventing problems, enhancing safety, and increasing customer satisfaction. Ideally,
FMEA’s are conducted in the product design or process development stages, although conducting an FMEA on
existing products or processes may also yield benefits.
FMEA is a tool that allows us to:
Prevent System, Product and Process problems before they occur.
Reduce costs by identifying system, product and process improvements early in the development cycle.
Create more robust processes.
Prioritize actions that decrease risk of failure.
Evaluate the system, design, and processes from a new vantage point.
FMEA is
Description
A procedure that examines each item in a system, considers how that item can fail and then determines how that
failure will affect (or cascade through) the system.
Acronyms
FMEA: Failure Modes and Effects Analysis
FMECA: Failure Modes and Effects and Criticality Analysis
2. Review of Literature
Failure Mode and Effects Analysis (FMEA) for ensuring that reliability is designed into typical semiconductor
manufacturing equipment (Mario Villacourt 1992). The FMEA is taken during the design phase of the
equipment life cycle to ensure that reliability requirements have been properly allocated and that a process for
continuous improvement exists. The guide provides information and examples regarding the proper use of
FMEA as it applies to semiconductor manufacturing equipment.
This Executive Summary is designed in a what, why, when, how format to allow the reader a relatively quick
overview of the main issues surrounding an FMEA which are contained in the main part of the Guidance
Document itself (IMCA 2002). FMEA does not attempt to give comprehensive answers to the frequently
answered questions (FAQs), which are addressed in the main document.
3. Purpose of FMEA
The purpose of performing an FMEA is to analyze the product's design characteristics relative to the planned
manufacturing process and experiment design to ensure that the resultant product meets customer needs and
expectations. When potential failure modes are identified, corrective action can be taken to eliminate them or to
continually reduce a potential occurrence. The FMEA also documents the rationale for the chosen
manufacturing process. It provides for an organized critical analysis of potential failure modes and the
associated causes for the system being defined. The technique uses occurrence and detection probabilities in
conjunction with severity criteria to develop a risk priority number (RPN) for ranking corrective action
considerations.
The FMEA can be performed as either a hardware or functional analysis. The hardware approach requires
parts identification from engineering drawings (schematics, bill of materials) and reliability performance data,
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for example mean time between failures (MTBF), and is generally performed in a part-level fashion (bottom-
up). However, it can be initiated at any level (component/assembly/subsystem) and progress in either direction
(up or down).
Typically, the functional approach is used when hardware items have not been uniquely identified or when
system complexity requires analysis from the system level downward (top-down). This normally occurs during
the design development stages of the equipment life cycle; however, any subsystem FMEA can be performed at
any time. Although FMEA analyses vary from hardware to software, and from components (i.e., integrated
circuits, bearings) to system (i.e., stepper, furnace), the goal is always the same: to design reliability into the
equipment.
Thus, a functional analysis to FMEA on a subassembly is appropriate to use as a case study for the purposes of
this guideline.
4. Process Improvement
FMEA is done in any equipment. In this process, to identify the possible failure modes and find the effect of this
failure to the equipment. To prevent this failure, possible changes in design and improvement can be made. This
identification of potential failure mode leads to a recommendation of effective reliability program.
Mainly failure mode can be set according to the FMEA’s Risk Priority Number (RPN) system. A concentrated
effort can be placed on the higher RPN items based on the Pareto analysis obtained from the analysis. As the
equipment proceeds through the life cycle phases, the FMEA analysis becomes more detailed and should be
continued. The FMEA consist of following steps:
FMEA Prerequisites
Functional Block Diagram
Failure mode analysis and preparation of work sheets
Team Review
Corrective action
5. FMEA Processes
FMEA Pre-requisites
Review specifications such as the statement of work (SOW) and the system requirement document
(SRD).
Collect all available information that describes the subassembly to be analyzed. Systems engineering
can provide system configuration
Compile information on earlier/similar designs from in-house/customer users such as data flow
diagrams and reliability performance data from the company's failure reporting, analysis and corrective
action system (FRACAS).
The above information should provide enough design detail to organize the equipment configuration to the
level required for analysis.
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support systems such as power, plumbing, actuation signals, data flow, etc. to understand the normal functional
flow requirements.
The Reliability Analysis Centre (RAC) has developed a document designed solely to address
component failure mechanisms and failure mode distributions for numerous part types including
semiconductors, mechanical and electromechanical components.
Determine the Potential Effects of the Failure Mode
The potential effects for each failure mode need to be identified both locally (subassembly) and
globally (system). Customer satisfaction is key in determining the effect of failure mode. Safety
criticality is also determined at this time based on Environmental Safety and Health (ES & H) levels.
Based on this information, a severity ranking is used to determine the criticality of the failure mode on
the subassembly to the end effect.
Determine the Potential Cause of the Failure
Most probable causes associated with potential failure modes. As a minimum, examine its relation to:
Preventive maintenance operation
Failure to operate at a prescribed time
Intermittent Operation
Degraded output or operational capability
Design causes
Determine Current Controls/Fault Detection
Many organizations have design criteria that help prevent the causes of failure modes through their
design guidelines. Checking of drawings prior to release, and prescribed design reviews are paramount
to determining compliance with design guidelines.
Detection methods are - Local hardware concurrent with operation, downstream or at a higher level,
Built-in test (BIT), Application software exception handling, Time-out, Visual methods, Alarms.
After the detection by previous method, determining the recovery method is another part. Recovery
methods are- Retry, Re-load and retry, Alternate path or redundancy, Degraded, Repair and restart.
Determining the Risk Priority Number (RPN)
RPN is the indicator for the determining proper corrective action on the failure modes. It is calculated
by multiplying the severity, occurrence and detection ranking levels resulting in a scale from 1 to 1000.
RPN = Severity × Occurrence × Detection
The small RPN is always better than the high RPN. A Pareto analysis is based on the RPN. In this all
the possible failure modes, effects and causes are determined. High RPN is gives idea for corrective
action on failure mode.
The engineering team generates the RPN and focused to the solution of failure modes. After finding
solution, improvements can be made.
Rating Scale Example:
If Severity = 10, indicates that the effect is very serious and is “worse” than Severity = 1.
If Occurrence = 10, indicates that the likelihood of occurrence is very high and is “worse” than
Occurrence = 1.
If Detection = 10, indicates that the failure is not likely to be detected before it reaches the end user is
worse than Detection =1.
An RPM is comparable to other RPM’s in the same analysis, but an RPM is not comparable to RPN’s
in another analysis. Because similar RPN’s can result in several different ways and represents different
types of risk.
Preparation of FMEA Worksheets
Action takes tasks recommended for the purpose of reducing any or all of the rankings. Only design
revision can be bringing about the revision in the severity ranking.
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Actions
All critical or significant characteristics must have recommended actions associated
with them
Recommended actions should be focused on design, and directed toward mitigating
the cause of failure, or eliminating the failure mode
If recommended actions cannot mitigate or eliminate the potential for failure,
recommended actions must force characteristics to be forwarded to process FMEA
for process mitigation
All recommended actions must have a person assigned responsibility for completion
of the action
Responsibility should be a name, not a title
Person listed as responsible for an action must also be listed as a team member
There must be a completion date accompanying each recommended action
Unless the failure mode has been eliminated, severity should not change
Occurrence may or may not be lowered based upon the results of actions
Detection may or may not be lowered based upon the results of actions
If severity, occurrence or detection ratings are not improved, additional
recommended actions must to be defined.
Worksheet
Description
Item/Function – Name or concise statement of function performed by the equipment.
Potential Failure Mode - A answer of asking simply question determines the failure.
Potential Local Effect(s) of Failure – subassembly consideration.
SEV – Severity ranking.
Class - A safety critical failure mode.
Potential Cause(s)/ Mechanism(s) of Failure - Most probable causes associated with
potential failure modes.
Occur - Occurrence ranking based on the probability of failure.
Current Design Controls - methods of prevention and detection.
Detect - Detection ranking based on the probability of detection.
RPN - Risk Priority Number.
Recommended Actions – Action recommended to reduce the possibility of occurrence of the
failure mode, reduce the severity (based on a design change) if failure mode occurs, or
improve the detection capability should the failure mode occur.
Response and Target Complete Date - This area lists the person responsible for evaluation
of the recommended actions. Besides ownership, it provides for accountability by assigning a
completion date.
Actions Taken – Following completion of a recommended action, the FMEA provides for
closure of the potential failure mode.
SEV—Following recommended corrective action.
OCC—Following recommended corrective action.
DET—Following recommended corrective action.
RPN—Following recommended corrective action.
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6. Team Review
The engineering team suggested comments and review the worksheet to consider the failure modes based upon
RPN’s. Engineering team determines potential problems, identify possible changes in design, data fill in the
worksheet etc. are updated. The worksheets need to reflect the changes until final design of equipment. When
the design is finalized, the worksheets are then distributed to the users, design engineering, technical support and
manufacturing. The worksheets may also provide information to other engineering areas.
Team members for FMEA
Process engineer
Manufacturing supervisor
Operators
Quality
Safety
Product engineer
Customers
Suppliers
7. Corrective Action
Design Engineering
Design engineering uses the completed FMEA worksheets to identify and correct potential design related
problems. This is where the FMEA becomes the basis for continuous improvement.
Technical Support
From the FMEA worksheets, the engineering team can suggest a statistically based preventive maintenance
schedule based on the frequency and type of failure. A spares provisioning list can also be generated from the
worksheet.
Manufacturing
From the FMEA worksheets, the team could suggest a process be changed to optimize installations, acceptance
testing, etc. This is done because the sensitivities of the design are known and documented. The selection of
suppliers can be optimized as well. FMEA can be a way to communicate design deficiencies in the
manufacturing of the equipment.
9. Case Study
Perform FMEA on a Pressure Cooker
Loss of hot
Increased gas Shut off water
water, more Observe at
flow and Reasonably supply, reseal or
Jammed cold water I - Safe pressure
thermostat probable replace relief
open input and relief valve
Pressure operation valve
gas
relief valve
No conseq.
Jammed Manual unless combined
None None I - Safe Probable
closed testing with other
failure modes
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Observe at
System fails
Jammed Burner ceases faucet
to produce I - Safe Remote
closed to operate (cold
hot water
water)
Fails to Observe at
Water
react to Burner fails to faucet
temperature I - Safe Remote
temp. function (cold
too low
drop water)
10. Conclusion
The failure modes included in the FMEA are the failures anticipated at the design stage. As such, they could be
compared with Failure Reporting, Analysis and Corrective Action System (FRACAS) results once actual
failures are observed during test, production and operation. Take appropriate steps to avoid either possibility.
11. References
1. B.G. Dale and P. Shaw, “Failure Mode and Effects Analysis in the U.K. Motor Industry: A State-of-Art
Study,” Quality and Reliability Engineering International, Vol. 6, 184, 1990.
2. Mario Villacourt, “Failure Mode and Effects Analysis (FMEA)”, Technology Transfer #92020963B-
ENG SEMATECH September 30, 1992.
3. Texas Instruments Inc. Semiconductor Group, “FMEA Process,” June 1991 Ciraolo, Michael,
“Software Factories: Japan,” Tech Monitoring by SRI International, April 1991, pp. 1–5.
4. Matzumura, K., “Improving Equipment Design Through TPM,” The Second Annual Total Productive
Maintenance Conference: TPM Achieving World Class Equipment Management, 1991.
5. Lalit Wankhede “Quality and reliability management”.
6. BSI Standard, BS 5760-5:1991: 'Reliability of Systems, Equipment and Components', Part 5: 'Guide to
Failure Modes, Effects and Criticality Analysis (FMEA and FMECA).
7. IEC Standard, IEC 60812: 'Analysis Techniques for System Reliability – Procedure for Failure Mode
and Effects Analysis (FMEA)’.
8. CEI/IEC812 – Analysis techniques for system reliability - Procedure for failure modes and effects
analysis (FMEA).
9. IMO MSC Resolution 36(63) Annex 4 – Procedures for Failure Mode and Effects Analysis (HSC
Code).
10. Analysis techniques for system reliability - Procedure for failure modes and effects analysis (FMEA) -
CEI/IEC 812:1985.
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