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Programmable spin coating system

Technical Specification:

 Dimension: 291mm(L)*448mm(W)*243mm(H)
 Power input: Universal
 Speed Range: 50-12,000 R.P.M
(based on glass substrate of dimension 38mm(l)*25mm(w) and thickness 1mm
 Acceleration: 5-6000 R.P.M/sec
 <1% error across full speed range
 Controlling Duration: 1-9999 sec/step
 30 pre-set editable programs
 50 editable steps/program
 Micro-controller controlled
 Calibration option
 High speed DC motor
 N2 and other inert gas purging port
 PTFE coated working chamber of 8” Diameter
 Integrated mechanical lid interlock with lid-open sensor
 Integrated Vacuum release switch with on/off indicator
 Transparent photo-resist safety lid over working chamber
 In-situ sample dispensing port on the transparent photo-resist safety lid

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