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CAD graphic data catalog available.

GENERAL CATALOG OF
AIR TREATMENT,
AUXILIARY, VACUUM
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VACUUM EQUIPMENT
INDEX

MICRO EJECTOR CONFIGURATION --------------------------------------------------------------------------------------------------------------------------------- 409


VACUUM PAD CONFIGURATION ----------------------------------------------------------------------------------------------------------------------------------------- 410
VACUUM SYSTEM CONFIGURATION AND SELECTION ---------------------------------------------------------------------- 411
MICRO EJECTOR TYPES AND FUNCTIONS ---------------------------------------------------------------------------------------------------------- 413
SPECIFICATIONS (ME03 • ME05• ME07 SERIES) ------------------------------------------------------------------------------------ 414
Order Codes -------------------------------------------------------------------------------------------------------------------------------------------------------------- 415
Operating Principles and Part Names --------------------------------------------------------------------------------------- 416
Symbols • Mass ------------------------------------------------------------------------------------------------------------------------------------------------- 417
Dimensional Drawings for the ME03 Series -------------------------------------------------------------------- 418
Dimensional Drawings for the ME05 Series -------------------------------------------------------------------- 419
Dimensional Drawings for the ME07 Series -------------------------------------------------------------------- 421
Dimensional Drawings for Electronic Vacuum Switches --------------------------------- 423
Proper Handling and Precautions ------------------------------------------------------------------------------------------------- 424
SPECIFICATIONS (MED07-E • MED10-E SERIES) -------------------------------------------------------------------------------------- 427
Order Codes -------------------------------------------------------------------------------------------------------------------------------------------------------------- 428
Operating Principles and Part Names --------------------------------------------------------------------------------------- 429
Symbols • Mass ------------------------------------------------------------------------------------------------------------------------------------------------- 430
Dimensional Drawings --------------------------------------------------------------------------------------------------------------------------------- 431
Dimensional Drawings for Electronic Vacuum Switches --------------------------------------------- 432
Proper Handling and Precautions ------------------------------------------------------------------------------------------------- 433
SPECIFICATIONS (MEDT07 • MEDT10 • MEDT12 • MEDT14 SERIES) ----------------------- 435
Order Codes -------------------------------------------------------------------------------------------------------------------------------------------------------------- 436
Dimensional Drawings --------------------------------------------------------------------------------------------------------------------------------- 437
Operating Principles and Part Names --------------------------------------------------------------------------------------- 438
SPECIFICATIONS (ME12 • ME25 • ME60 SERIES) ----------------------------------------------------------------------------------- 439
Order Codes • Operating Principles and Part Names ----------------------------------------- 440
Air Consumption and Ultimate Vacuum • Vacuum Flow ------------------------------- 441
Dimensional Drawings for the ME12 Series -------------------------------------------------------------------- 442
Dimensional Drawings for the ME25 • ME60 Series ------------------------------------------ 443
Proper Handling and Precautions ------------------------------------------------------------------------------------------------- 444
Time to Reach Vacuum Setting • Vacuum Break Time -------------------------------------- 445
SPECIFICATIONS FOR VACUUM PADS ---------------------------------------------------------------------------------------------------------------------- 446
Order Codes • Theoretical Lift Capacity ------------------------------------------------------------------------------- 447
Rubber Pads: Materials and Their Properties and Mass ---------------------------------- 448
Dimensional Drawings for Rubber Pads --------------------------------------------------------------------------------- 449
Dimensional Drawings for the KPHF Series --------------------------------------------------------------------- 451
Dimensional Drawings for the KPVF Series --------------------------------------------------------------------- 453
Dimensional Drawings for the KPPF Series --------------------------------------------------------------------- 454
Dimensional Drawings for the KPLF Series ---------------------------------------------------------------------- 455
Dimensional Drawings for the KPHS Series -------------------------------------------------------------------- 456
Dimensional Drawings for the KPVS Series --------------------------------------------------------------------- 458
Dimensional Drawings for the KPPS Series --------------------------------------------------------------------- 459
Dimensional Drawings for the KPLS Series --------------------------------------------------------------------- 460
Dimensional Drawings for Rubber Pad Fit ------------------------------------------------------------------------- 461
Proper Handling and Precautions ------------------------------------------------------------------------------------------------- 463

408
注文記号例

VACUUM EQUIPMENT
Vacuum Pad
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Micro Ejector

ME03・ME05・ME07 MED07・MED10 Fixed Spring-loaded

Standard type

KPHF・KPVF KPHS・KPVS

Swivel type
Space saving series. Ejector, solenoid valve, electronic vacuum switch and filter incorporated in a single block.
Two types of ejectors (with and without solenoid valves) Large vacuum flow is made possible by multistage nozzles.

MEDT07・MEDT10・MEDT12・MEDT14 ME12・ME25・ME60

VACUUM EQUIPMENT
KPPF KPPS

Non-rotating type

Compact, multistage nozzle ejectors. Solenoid valve comes separately and is easily replaced.
Easily installed to vacuum lines even in explosion-proof atmosphere. Large filter capacity possible with models ME25 and ME60. KPLF KPLS

What is an Ejector? Selecting the Right Micro Ejector Full selection of vacuum pads
KOGANEI micro ejectors are available in many configurations, including ejector-only types Vacuum pads use the vacuum generated by the ejector to convey workpieces and hold them in place. They come in three types: standard, swivel and non-rotating.
In the field of air pressure devices, the term “ejector” refers to a device
as well as ejectors equipped with solenoid valves, vacuum switches, filters, etc. Each of these three types comes in a fixed and spring-loaded version.
which utilizes compressed air to generate a vacuum. The operating
principle and basic structure of ejectors is shown in the illustration ※ Four types of rubber pads are available: NBR, urethane, silicone and viton.
Nozzle Vacuum Consumption ※ Solenoid valve
flow Ultimate vacuum ※ flow specifications Vacuum
below. Compressed air enters the ejector through compressed air Model diameter Manifold Comments ● Select a fixed pad when the distance between the workpiece and the pad is constant. Select a spring-loaded pad when the distance is variable.
l/min kPa{mmHg} l/mm With- switch
supply port P, passes through the nozzle at high speed and sucks air mm (ANR) (ANR) out E1 E 2
out of the vacuum generating port V, thus creating a vacuum in the Type Basic model Piping position Pad size ㎜
ME03 0.3 3 -80.7{-600}.3 5 ○ ○ ― ○
sealed chamber to which V is connected. In addition to conveyance of KPHF Horizontal piping
ME05 0.5 6 -86.7{-650.3} 12 ○ ○ ○ Electronic ○ Fixed φ2.5 φ3.5 2×4 3.5×7 φ6 φ8 φ10 φ15 φ20
electronic parts, glass plates and plastic products, this vacuum is also Standard type KPVF Vertical piping
ME07 0.7 12 -86.7{-650.3} 23 ○ ○ ○ Electronic ○ φ25 φ30 φ35 φ40 φ50 φ60 φ80 φ95 φ100
useful for a wide range of other industrial applications, including For general use KPHS Horizontal piping
MED07 0.7 25 -84.7{-630.1} 23 ○ ○ Electronic ○ Multistage Spring-loaded φ120 φ150 φ200
vacuum packing and holding workpieces in place during processing. KPVS Vertical piping
MED10 1.0 50 -84.7{-630.1} 46 ○ ○ Electronic ○ Multistage

Muffler Diffuser Nozzle MEDT07 0.7 25 -84.77{-630.1} 23 ○ Electronic Multistage Swivel type Fixed KPPF Horizontal piping
φ10 φ15 φ20 φ25 φ30
MEDT10 1.0 50 -84.7{-630.1} 46 ○ Electronic Multistage Use when the suction face of the workpiece is not
Spring-loaded KPPS Vertical piping φ35 φ40 φ50 φ60 φ80
parallel to the suction face of the rubber pads
MEDT12 1.2 85 -84.7{-630.1} 72 ○ Electronic Multistage
MEDT14 1.4 95 -84.7{-630.1} 96 ○ Electronic Multistage Fixed KPLF Horizontal piping
Non-rotating type φ6 φ8 φ10 2×4 3.5×7 4×10 5×10 6×10 4×20
Exhaust P ME12 0.7 12 -92.7{-690.1} 23 ○ ○ ― Use for workpieces which have direction Spring-loaded KPLS Vertical piping 5×20 6×20 8×20 4×30 5×30 6×30 8×30
ME25 1.0 25 -92.7{-690.1} 46 ○ ○ ○ Mechanical
ME60 1.5 60 -92.7{-690.1} 107 ○ ○ ○ Mechanical Comment: Swivel and non-rotating pads come with horizontal piping, as do standard pads measuring between φ60 ∼φ200, but the piping can easily be changed to vertical by switching parts.
Body ※These figures are based upon an assumed pressure of 0.5MPa{5.1kgf/cm2}.
V
409 410
Vacuum System Configuration and Selection

When preparing to configure a vacuum system using micro ejectors,


vacuum pads and other products from KOGANEI, analyze the production
process and the workpiece according to the procedure described below. STEP 1 Before Selecting Pads
Methods of selecting different elements are described at different steps in
the following procedure.
Use the following procedure to determine pad diameter.
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Workpiece analysis 1. Determine the mass of the workpieces.


2. Think about the workpieces’ surfaces.
(1) What is the maximum pad diameter?
When a pad applies suction to a
Setting for degree of vacuum STEP 1 workpiece, its diameter increases Workpiece
approximately 10%, as shown in the
Before selecting pads illustration to the right. If the pad
extends beyond the edge of the
workpiece’s suction face, the vacuum
Vacuum pad selection will be broken.
With suction applied

(2) Will a rough surface cause the vacuum to break?

Chamber capacity If it appears that a vacuum break is


likely to get past the pad surface, set
STEP 2 the vacuum flow to a high setting.

Before selecting the micro


Determination of response time ejector's nozzle diameter
Workpiece

Selection of nozzle diameter 3. Think about the direction in which the workpiece is to be
conveyed and the angle
STEP 3 from which the pad is to
Selection of solenoid be applied.
Before selecting solenoid
valves • vacuum switches valves • vacuum switches The two principal options are lifting
upward (a), in which the pad applies Workpiece Workpiece

suction to a horizontal surface, and


lifting sideways (b), in which the pad (a) (b)
applies suction to a vertical surface.

When calculating suction force, include a safety factor in accordance with the following data:
Lifting upward –––– Standard type: x2 min.
Example: Swivel type・Non-rotating type: x4 min.
In the following example, a 300g workpiece is lifted horizontally by a Lifting sideways –– Standard type: x4 min.
standard fixed type pads. Assuming that the degree of vacuum is set to Swivel type・Non-rotating type: x8 min.
-53.3kPa{-400mmHg}, and that no vacuum leaks from the suction surface of
the pad, the required pad diameter is calculated as shown below. (For spring-loaded pads, the safety factor should be greater than the values listed above.)

(SI units) -53.3kPa{-400mmHg}


3=-53.3×A×0.1×12 4. Calculating lift capacity
A=1.125cm 2 Use the following formula to calculate lift capacity (W).
4 ≒1.19cm
Pad diameter= 1.125×π
3N{300g} (SI units) (Metric units)
Based on the calculation performed above, the pad diameter must be of a standard size
1 1
measuring at least φ15 in diameter. W=P × A × 0.1 × W'= P' × 1.033 × A ×
S 760 S

(Metric units) W : Lift capacity (N) W' : Lift capacity(kgf)


400 P : Degree of vacuum(-kPa) P' : Degree of vacuum(-mmHg)
0.3=760×1.033×A×12

( )
A : Pad area(cm2) A : Pad area(cm2)
A=1.107cm2 S : Safety factor S : Safety factor
4 ≒1.18cm)
Pad diameter= 1.107×π

411
Precautions Regarding Vacuum System
Before Selecting the Micro Configuration
STEP 2 Ejector’s Nozzle Diameter

Calculate nozzle diameter (micro ejector type) on the basis of the response time for One pad, one ejector
chamber capacity, which is listed in the specifications for the various micro ejector When a single micro ejector provides a vacuum for more than one vacuum pad, a suction leak in
models. The method of calculation is described further below. In the following a single pad or a missing workpiece for one of the pads will lower the degree of vacuum for all the
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description, the term “response time” refers to both the time it takes for the pad to reach pads connected to that micro ejector, and suction force will be lost. To avoid this kind of trouble,
the vacuum setting after it comes in contact with the workpiece, and to the vacuum break the recommended system is one vacuum pad per micro ejector.
time, i.e., the time includes the execution of vacuum break by the control system and the
actual release of the workpiece by the pad. Since the automation system works by A moderate degree of vacuum yields the highest efficiency
repeatedly using vacuum to pick up and release workpieces, response time is a crucial
If the degree of vacuum is set unnecessarily high, response time takes longer. We recommend a
factor of system efficiency.
moderate setting for degree of vacuum, i.e., about 70% to 80% of ultimate vacuum.

Ultimate vacuum P1
1. Calculate piping volume P1×0.7

◆ Calculate the inside volume of the piping from the vacuum generating port to the P1×0.5
vacuum pad. The greater the volume, the slower the response time, so keep the piping as
short and straight as possible.
→ Response time(T)

2. Select nozzle diameter on the basis of the desired


response time and piping volume Use the specified tubes for the piping at the vacuum generating port
Referring to the micro ejector response time tables (pages 423, 432, 438), study the If the piping attached to the vacuum generating port is too narrow and has several bends, piping
response times which correspond to different micro ejector models and chamber resistance will not allow the vacuum to be transmitted effectively from the micro ejector to the
capacities, and select a micro ejector with a nozzle diameter which gives the required vacuum pad. The vacuum will reach its set level in the micro ejector first, thus tripping the

VACUUM EQUIPMENT
response time. vacuum switch before the vacuum setting has been reached at the pad. The piping attached to the
generator must meet specifications. If you have no choice but to use piping with high resistance
for a high-volume micro ejector, install the vacuum switch near the vacuum pad.

Example: Tube: φ8 ×φ6 (outer diameter x inner diameter), 70cm long Compressed air must be a stable air pressure
Required response time: 0.3s Be sure to use a regulator to provide the micro ejector with compressed air of a stable air
pressure. If the piping between the air source and the micro ejector is quite long, or if the piping
Assuming the above parameters, the inside volume of the tube is small in diameter, set the regulator to a relatively high setting.
is calculated as follows:φ6×70cm=19.8cm3 ≒20cm3
On the basis of this calculation, one would select model
Install a filter to the vacuum line
ME07 from the response time table.
For a micro ejector which does not have a built-in filter in its vacuum line, install a filter to the
line. For micro filters which have a replaceable built-in filter (models ME03/05/07,
Note: The figures in the response time tables are based upon an assumed air pressure of 0.5MPa MED07/10) , replace the filter regularly.
{5.1kgf/cm2}and a vacuum setting of -73.3kPa{-550mmHg} . Higher air pressure will [Replacement filter order codes: ME□MA-F, MED-F]
make little difference, but if air pressure falls below 0.5MPa{5.1kgf/cm2}
, response time
will become slower. The values in the tables are only approximate use.
To maintain a clean and quiet environment
● Multistage ejector: Tubing through the exhaust port (order code: -02).
Connect a tube to the exhaust port (Rc1/4) and run the tube away from the equipment so it will
release the exhaust in another location. (Fittings up to TS10-02 can be used.) Use inner
diameterφ6 min. to keep exhaust resistance to a minimum.

Before Selecting the Solenoid When picking up wet workpieces


STEP 3 Valves • Vacuum Switches With MED series micro ejectors, there is a vacuum switch next to the exhaust port. This switch
may perform erratically if moisture is put out through the exhaust port. Be sure to exhaust
moisture-contained exhaust elsewhere.
Depending on what type of micro ejector was indicated as necessary in step 2, either
select a micro ejector with a built-in solenoid valve or vacuum switch, or select a
solenoid valve or vacuum switch to be installed to the micro ejector.

412
Micro Ejector Types and Functions

Micro ejectors without a Multistage ejectors Manifolds


solenoid valve
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Use a manifold when several micro ejectors are to be used


Multistage ejectors, as shown in the illustration below, in a single place. In KOGANEI manifolds, one compressed
This type of ejector, which is shown in the photograph
reuse the exhaust from the first-stage nozzle, passing air port feeds all the ejectors.
above, consists of ejectors only. Because these ejectors
it through a second-stage nozzle to produce additional Manifolds are also useful for:
are more compact than those equipped with a solenoid
vacuum. ● picking up workpieces delivered randomly
valve, they are easily installed with grippers and in other
Although increasing the number of nozzles from one to two
positions near the workpiece to serve as a convenient ● picking up multiple workpieces simultaneously
does not mean a higher degree of vacuum can be attained,
vacuum source. By installing the micro ejector close to the
it does increase intake flow by a factor of approximately
workpiece, the inside volume of the piping from the Vacuum switches
two. However, intake flow is only increased at a vacuum of
vacuum generating port to the vacuum pad is kept to a
approximately -26.7kPa{-200.3mmHg}max. When the
minimum, and a quicker response time is achieved. Either
degree of vacuum is higher than that, the intake flow is the
a 2-way or 3-way valve can be used for control, but be
same as that of a single-nozzle ejector. The reason is that
sure the valve’s effective area is at least three times greater
up to a vacuum of -26.7kPa{-200.3mmHg} , the flow from
than the area of the micro ejector nozzle.
both Q1 and Q2 generate a vacuum, but when the degree
of vacuum exceeds this level, a built-in check valve closes
off the Q2 channel and only Q1 continues to generate a
Micro ejectors with a vacuum.
solenoid valve The multistage ejector is particularly useful for maintaining
a relatively low degree of vacuum when handling
workpieces through which air can pass.
However, the multistage ejector still offers advantages at a Vacuum switches are useful for:
high degree of vacuum. Its response time is better than that (1) controlling the degree of vacuum
of a single-valve ejector, and thus it can offer the same (2) checking for the presence of workpieces
response time while consuming less compressed air. (3) checking whether workpieces have been picked up
(4) checking whether workpieces have been released
2nd-stage nozzle 1st-stage nozzle SET:
Operating pressure is set using the pressure setting adjust screw on the
vacuum switch. The switch turns ON and the LED lights up when the
Exhaust Compressed pressure setting is reached.
air To raise the pressure setting, turn the adjust screw clockwise.
There are two different types of micro ejectors with HYS:
solenoid valves. By turning the hystersis adjustment screw, the OFF point can be
Q1 Q2 changed, and the ON point can be shifted within the range of 2-9%.
The switch turns OFF and the LED goes out at the set point. To raise the
E1(S):
Degree of vacuum

hystersis setting, turn the adjustment screw clockwise.


This type of ejector has a single solenoid valve which controls the flow
of compressed air to the nozzle. When the solenoid valve is ON, air is
Example: SET: -66.7kPa{-500.3 mmHg}HYS: 5%
supplied and vacuum is generated. When the solenoid valve is OFF, air 1st-stage nozzle
supply and vacuum generation stop, outside air enters the vacuum line
through the exhaust port, and the workpiece falls of its own weight from 2nd-stage nozzle
-26.7kPa
Air supply valve
the pad which had been holding it.
{-200.3mmHg} Degree of vacuum 0
-63.3kPa
E2(T): -66.7kPa Vacuum {-474.8mmHg}
This type of ejector has twin solenoid valves. One controls the supply Intake flow {-500.3mmHg}
of compressed air, while the other acts as a vacuum breaker. When the ON
Switch OFF 66.7×(1−0.05)≒63.3
air supply valve is ON, air is supplied and a vacuum is generated.
{500.3×(1−0.05)=475.285}
When the vacuum breaker valve is ON (air supply valve OFF), air which
has passed beyond the needle valve is discharged through the vacuum E1(S):
generating port and forcibly breaks the vacuum (negative pressure) and
Air supply valve
changes the vacuum line to a state of positive pressure, thus releasing Caution: The workpiece may sometimes not be released even
the workpiece with greater accuracy and speed. This enables
after the switch turns OFF. When designing the control
lightweight workpieces to be released relatively accurately and quickly. Open air
For lightweight workpieces, the needle valve must be adjusted so that Degree of vacuum circuits, keep this point well in mind, and be sure to
the workpiece will not be blown out of place. Vacuum take note of response times t2 and t3 (listed in the
Models with the order code “-11” (NO) only have a connection for the section entitled “Ultimate Vacuum Setting Time •
air supply valve, but it is possible to connect both the air supply valve E2 (T):
Vacuum Break Time.”
and vacuum breaking valve to this connection point and switch back Air supply valve
and forth between vacuum generation and forcible vacuum breaking.
Also, once a vacuum has been generated, the built-in check valve Vacuum breaking valve
Open air
prevents air from getting in through the exhaust port, thus maintaining Degree of vacuum
the vacuum even when the air supply valve is OFF. (Take care in Vacuum
preventing suction leaks through the piping and vacuum pad). Thus, if
the vacuum status is monitored using a vacuum switch, the degree of
vacuum can be maintained in the piping and the chamber while the air
supply valve is OFF, which minimizes compressed air consumption.

413
MICRO EJECTORS

ME03・ME05・ME07

Specifications

Basic model ME03 ME05 ME07


AME05-E2 AME07-E2
Item □ME03-E1 □ME05-E1 □ME07-E1
Media Air
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Pressure range 2 0.1∼0.6 0.1∼0.6 0.2∼0.6 0.1∼0.6 0.2∼0.6


MPa{kgf/cm } {1∼6.1} {1∼6.1} {2∼6.1} {1∼6.1} {1∼6.1}
Proof pressure MPa{kgf/cm2} 1.03{10.5}
Temperature range Without solenoid valve 0∼50(Do not allow to freeze.)

(ambient or media) With solenoid valve 5∼50
Nozzle diameter mm 0.3 0.5 0.7
Ultimate vacuum (Note 1) kPa{mmHg} -80{-600} -86.7{-650.3}
Vacuum flow (Note 1) l/min(ANR) 3.0 6.3 12.5
Compressed air consumption (Note 1) l/min(ANR) 4.5 11.5 23.0
Lubrication Not possible
Filtration rate μm 30(Manifold only)
Vacuum generator port M5×0.8 M5×0.8 Rc1/8
Port aperture (Note 2)
Compressed air supply port M3×0.5 M5×0.8 Rc1/8 M5×0.8 Rc1/8
Installation direction Any direction
Operation Direct operation
Number of positions・ports 2 positions・2 ports
Valve functions Normal OFF (NC, standard) and Normal ON (NO, optional)
Main valve
Effective area mm2 0.2 0.6 0.8
specifications 2
Shock Piping direction m/s{G} 1372.9{140} 1372.9{140} 1372.9{140}
2
resistance Axial direction m/s{G} 588.4{60} 117.7{12} 147.1{15}
Manual override Non-locking type (standard) Non-locking type (standard) and locking projection type (optional)
Notes: 1. These values are approximate only, and are based on an assumed air pressure of 0.5MPa {5.1kgf/cm2}. For more information, see page 423.
2. For more information, see the port size table.

VACUUM EQUIPMENT
Solenoid Specifications Electronic Vacuum Switch Specifications

Solenoid rating DC12V DC24V AC100V AC200V Item Model PS310E


Item Micro ejector, basic model □ME03-E1 □ME05-E□・□ME07-E□ Media Air or non-corrosive gas
Built-in flywheel diode for Temperature range ℃ -10∼60(Do not allow to freeze.)
System Shading system
surge protection Humidity range %RH 35∼95
10.8∼13.2 21.6∼26.4 90∼132 180∼264 Pressure range kPa{mmHg} -101.3∼0{-759.8}
Voltage range V
(12±10%)(24±10%)(100+ 32
−10 %) (200+ 32
−10 %) Proof pressure MPa{kgf/cm2} 0.2{2}
Current Frequency Hz — 50 60 50 60 Pressure setting range kPa{mmHg} -101.3∼10.1{-759.8∼-75.8}
(when applied Starting mA(r.m.s.) — 36 32 18 16 Hystersis (Note) % 2∼9
with rated Energizing mA(r.m.s.) 130 70 65 Repeatable accuracy ±3% FS max.(0∼50℃)
24 20 12 10
voltage) (with LED indicator) (140) (80) (75) Operation NPN open collector output, NO type (output turns ON when pressure drops below setting)
Allowable circuit current leak mA 15 5 4 4 2 Voltage range DCV 12∼24±10% (Ripple Vp-p10% max.)
Insulation resistance MΩ 100 min. DC30V・100mA max. (Internal voltage drop: 1V max.
Electrical Switching capacity
Electrical Standard Grommet: 300mm at load current of 100mA; 0.4V max. at load current of 16mA)
specifications
connection and Plug connector Special order 1L: 1000mm 20
( )
Consumption current mA max.
Optional
lead wire length length: 300mm lengths: 3L: 3000mm Insulation resistance MΩ 100 min. (DC 500V mega between the charger and case)
Brown (+)Red (+) Surge protection Zener diode (standard)
Lead wire color Yellow White
Black (ー)Black (ー) 2
Shock resistance m/s{G} 490.3{50}
Mechanical
Color of LED indicator (optional) Red Yellow Green 10∼55Hz (Double amplitude 1.5mm) or
characteristics Vibration resistance 2
Surge protection (standard) Flywheel diode Varistor 98.1m/s{10G}(2 hours max. for X,Y and Z axes)
Note: Model ME03-E1 is also available in DC5V and 6V. Contact us for information regarding Operation indicator lamp LED indicator lights up when ON
delivery time. Lead wire Vinyl cab tire: 0.14SQ × 3 leads × 500mm (total length)
Mounting direction Any direction
Material (body cover) Plastic
Note: These figures are based on an assumed air pressure setting of -86.7kPa {-650mmHg}.

Connection Port

Port aperture
Basic model
Vacuum generating port Compressed air supply port
ME03, ME03-E1 M5×0.8 M3×0.5
ejector
Micro

ME05, ME05-E1 M5×0.8


ME07, ME07-E1 Rc1/8 M5×0.8
ME03M□A M5×0.8 Rc1/8
Manifold

ME05M□A, ME05M□AS M5×0.8 Rc1/8


ME07M□A, ME07M□AS Rc1/8

414
Micro Ejector Order Codes Manifold Order Codes

● Micro ejector only (without solenoid valve) ME05M A


ME 05
Body model nozzle diameter : Maximum vacuum flow
03 φ0.3 :3.0l/min. (ANR)
05 φ0.5 :6.3l/min. (ANR)
07 φ0.7 :12.5l/min.(ANR) Electronic vacuum switch
Blank Without vacuum switch
E With vacuum switch (Note 2)
Micro ejector (AS type manifold only)
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Micro ejector model (Note 1)


● Micro ejector with solenoid valve AME03-E1 - …-
AME05-E□- …-
ME 05 E1 AC100V AME07-E□- …-

Voltage
DC12V (□ ME03-E1 only)
Stations
DC24V
(Located at the left-side micro ejector installation position,
AC100V(□ ME05・07 only)
as seen when facing the vacuum generating port.)
AC200V(□ ME05・07 only)
stn.1 Station 1
stn.2 Station 2
Solenoid ⋮ ⋮
Blank Grommet stn.5 Station 5
(Note 2)
PSL Straight connector
(with LED indicator) Manifold model
(Note 2)
PLL Elbow connector A A-type manifold (P, V manifolds)
(with LED indicator) AS AS type manifold
(For installation of vacuum switch; P, V manifolds can only
be used for models ME05M and ME07M.)
Manual override
Number of units
Blank Non-locking type
1 1 unit
83 Locking protruding type(□ ME05・07 only)
2 2 units
⋮ ⋮
Solenoid valve function (Note 1) 5 5 units
Blank Normal OFF (NC)
11 Normal ON (NO)
Manifold basic model
ME03M For installation of AME03-E1
Solenoid valve specifications ME05M For installation of AME05-E□
E1 With single solenoid valve for air supply control ME07M For installation of AME07-E□
E2 With twin solenoid valves (AME05 • 07 only) for air supply
and vacuum breaking Notes: 1. To decide which micro ejector is to be installed to the manifold, see the section entitled “Micro
Ejector Order Codes.” Stations to which you do not intend to install a micro ejector can be covered
Body model Nozzle diameter: Maximum vacuum flow instead with a block-off plate. To order, write in “-BP”.
03 φ0.3: 3.0 l/min.(ANR) 2. The electronic vacuum switch is also available on special order with a 2000mm lead wire.
05 φ0.5: 6.3 l/min.(ANR)
07 φ0.7:12.5 l/min.(ANR)

Micro ejector
ME For micro ejector only
AME For manifold use

Notes: 1. This choice applies only to ejectors with an air supply solenoid valve. Ejectors equipped with a
solenoid valve for control of vacuum breaking are available only in the NC version (always OFF).
2. The plug connector is also available on special order in versions 1L (1000mm) and 3L (3000mm).

Electronic Vacuum Switch Order Codes Additional Parts (Sold Separately)

PS310E DC24V L ● Block-off plates ● Replacement filters


Lead wire length ME 05 MA-BP ME 05 MA-F
Blank 500mm
L 2000mm 03 For ME03M 03 For ME03M
05 For ME05M 05 For ME05M
DC12∼24V switch 07 For ME07M 07 For ME07M

Electronic vacuum switch


PS310 Switch only
PS310E For installation of AS manifold (with gasket and spring pin)
PS310E-01 For installation of ejector only (with R1/8 male thread)

415
Operating Principles and Part Names

● Non-energized condition
Body
Diffuser
Nozzle
Flapper
Plunger pin
Vacuum breaking flow adjusting needle Plunger spring
Lock nut Plunger
Manual override Mold solenoid
Column
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Solenoid cover

Vacuum breaking solenoid valve Air supply solenoid valve

;;
;;
Adapter
Vacuum switch

Muffler
Check valve

Filter
V (Vacuum generating port)

Manifold
P (Compressed air supply port)

● Energized condition of the air supply solenoid valve (vacuum being generated)

VACUUM EQUIPMENT
;;
;;
V

● Energized condition of the vacuum breaking solenoid valve

Principle Materials

;;
;;
Part name Materials
Body
Aluminum alloy (anodized)
Adapter
Micro ejector

Nozzle, Diffuser Brass


O-ring
Synthetic rubber (NBR)
Gasket
V Plunger
Electromagnetic stainless steel
Column
Body Aluminum alloy (anodized)
Manifold

P Packing Synthetic rubber (NBR)


Filter Plastic (PVF)
Block-off plate Mild steel (nickel-plated)

416
Symbols

Ejector only Ejector with single solenoid valve Ejector with single solenoid valve
●ME03 ●ME05 ●ME07 ●ME03-E1 ●ME05-E1 ●ME07-E1 ●AME03-E1 ●AME05-E1 ●AME07-E1
(Installed to manifold)
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Ejector with vacuum switch and single Ejector with twin solenoid valves Ejector with vacuum switch and twin
solenoid valve ●AME05-E2 ●AME07-E2 solenoid valves
●AME05-E1-□-E ●AME07-E1-□-E (Installed to manifold) ●AME05-E2-□-E ●AME07-E2-□-E
(Installed to AS manifold) (Installed to AS manifold)

Mass

● Micro ejectors g ● Electronic vacuum switches


Item Basic model ME03 ME05 ME07
PS310E (For installation of AS manifold)..........21g
Without solenoid valve 9 34 52 PS310E-01 (For installation of ejector only).......38g
With single solenoid valve
24 80 103
ME□-E1

● Manifolds g
Model ME03 ME05 ME07
Item ME03M□A ME05M□A ME05M□AS ME07M□A ME07M□AS
Units 1 26 62 81 120 148
Units 2 49 118 154 237 292
Each manifold unit Units 3 64 156 202 313 385
Units 4 80 193 251 389 478
Units 5 95 231 299 465 571
With single solenoid valve-AME□-E1 25 83 108
Additional With twin solenoid valves-AME□-E2 ─ 167 216
mass With electronic vacuum switch-E ─ ─ 21 ─ 21
Block-off plate -BP 2 6 13

Example calculation:ME05M5AS For station 1∼2 -AME05-E1


For station 3∼4 -AME05-E2-E
For station 5, -BP the mass is calculated as follows: 299 +(83 × 2)+(167 + 21)× 2 + 6 = 847g

Mass of block-off plate


Mass of AME05-E1 Mass of vacuum switch
Mass of units 5 Mass of AME05-E2

417
Dimensional Drawings for the ME03 Series (Unit: mm)

ME03 ME03-E1
Ejector only With solenoid valve

25 50.9
9 16 9

4
4

14

19.5
4
4

Approx.
300
Exhaust port 2-φ2.1 M3×0.5 Exhaust port 2-φ2.1
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Mounting hole Compressed air supply port Mounting hole

22.2 M5×0.8
2-φ2.1 Counterbore:φ4; Depth: 1 13.8 Vacuum generating port
13.8
9 Mounting hole 9 M3×0.5
M5×0.8
Compressed air supply port

3.5
Vacuum generating port
3.5

10
10

3.5
3.5

2-φ2.1 Counterbore:φ4; Depth: 1 30 Manual override


Mounting hole

ME03M□A
With A-type manifold

● Illustration shows one unit


L Approx.
18 3.5 P 3.5 300 40.5
14.5 3.5 Manual override 12 10.2 19.5 20
7 10 Non-locking type 7 10 10 10 Compressed air supply port
  Unit 1: Rc1/8 (one on right side)
2-φ3.2 2-φ3.2 Units 2-5: Rc1/8 (one on each side, one on plug)
Mounting hole Mounting hole
51.9

VACUUM EQUIPMENT
P
30

22.4
18.5
11

14
1
4

Exhaust port AME03-E1


Dimensions of Each Unit
M5×0.8 Block-off plate
Model L P
Vacuum generating port (-BP)
Filter ME03M2A 34.2 27.2
3A 44.4 37.4
4A 54.6 47.6
6

V 5A 64.8 57.8

12 10.2

Options
● Solenoid with straight connector: -PSL ● Solenoid with elbow connector: -PLL ● Lead wire length l -PSL, -PLL: 300
For 1L; 1000
47
(To the bottom of the manifold) For 3L; 3000
26 l 53 (available on special order)
(To the bottom of the manifold)
10
32
16
l
(Total length of micro ejector)

27.5

21.5
(Total length of micro ejector)

LED indicator LED indicator


57.5

51.6

418
Dimensional Drawings for the ME05 Series (Unit: mm)

ME05 ME05-E1
Ejector only Ejector with solenoid valve

40 75
17 23 17

6
6

24
24

Approx.
6
6
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300
Exhaust port 2-φ2.8 M5×0.8 Exhaust port 2-φ2.8
Mounting hole Compressed air supply port Mounting hole
2-φ2.8 Counterbore: φ5.4; Depth: 3 35.5 M5×0.8
Mounting hole Vacuum generating port
24 24
17 M5×0.8 17 M5×0.8
Vacuum generating port Compressed air supply port
5.5

5.5
15

15
5.5

5.5
2-φ2.8 Counterbore: φ5.4; Depth: 3 47 Manual override
Mounting hole Non-locking type: standard
Locking protruding type: -83

ME05M□A
With A-type manifold

● Illustration shows one unit L


26 5 P 5
21 5 17 16 16 17 Approx.
1.5 15 Manual override 9.5 15 15 9.5 300 24 24
Compressed air supply port
Non-locking type: standard
Unit 1: Rc1/8 (one on right side)
Locking protruding type: -83 2-φ4.2 Units 2-5: Rc1/8 (one on each side, one on plug)
2-φ4.2 Mounting hole
Mounting hole
7
75

P
24

40
113.5

32
18

20
6

4.3

13
Vacuum breaking flow
adjusting needle

14.5 max.
12 min.
AME05-E1 AME05-E2
Exhaust port Block-off plate
M5×0.8 (-BP)
Vacuum generating port Filter
76.5 max. 74 min.

Dimensions of Each Unit


Model L P
62
49

ME05M2A 50 40
3A 66 56
V
4A 82 72
5A 98 88
6

17 16 Adapter

419
ME05M□AS
AS type manifold

● Illustration shows one unit


LED indicator L
Vacuum switch

Approx. 500
26 5 P 5
21 5 17 16 16 17 Approx. 24 Compressed air supply port
1.5 15 Manual override 9.5 15 15 9.5 300 24 20 3 Unit 1: Rc1/8 (one, on right side)
Non-locking type: standard Units 2-5: 2-Rc1/8 (one on each side, one on plug)
Locking protruding type: -83
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2-φ4.2
2-φ4.2 Mounting hole
Mounting hole

95
75
133.5

52

P
24
113.5

32
18

20
6

4.3
13
Vacuum breaking
flow adjusting needle

14.5 max.
12 min.
AME05-E1 AME05-E2
Exhaust port Block-off plate
M5×0.8 (-BP)
Vacuum generating port Filter

Dimensions of Each Unit


Model L P
76.5 max. 74 min.

ME05M2AS 50 40
3AS 66 56

VACUUM EQUIPMENT
62

4AS 82 72
49

5AS 98 88
V
6

17 16 Adapter

Options
● Solenoid with straight connector: -PSL ● Solenoid with elbow connector: -PLL ● Locking protruding type: -83

B
(To the bottom of the manifold) l D
34 (To the bottom of the manifold)
10 45
21
6.5
l

φ6
(Total length of micro ejector)

(Total length of micro ejector)


36.5
37

28.5
29
A

LED indicator LED indicator

Model Code A B C D l (Lead wire length)


ME05-E1, AME05-E1 84 59 76 70 -PSL, -PLL:300
AME05-E2 131.5 72 115.5 83 Special order: 1L; 1000, 3L; 3000

420
Dimensional Drawings for the ME07 Series (Unit: mm)

ME07 ME07-E1
Ejector only Ejector with solenoid valve
50 86.2
7.5 23 27 23

7.5
27

24
27
7.5

7.5

Approx.
300
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Exhaust port 2-φ3.2 M5×0.8 Exhaust port 2-φ3.2


Mounting hole Compressed air supply port Mounting hole
2-φ3.2 Counterbore: φ6; Depth: 3 46.7 Rc1/8
32 Mounting hole 32 Vacuum generating port
23 Rc1/8 23 M5×0.8
Vacuum generating port Compressed air supply port

6.5
6.5

15
18
18

6.5
6.5

2-φ3.2 Counterbore: φ6; Depth: 3 58.2 Manual override


Mounting hole Non-locking type: standard
Locking protruding type: -83

ME07M□A
With A-type manifold

● Illustration shows one unit

L
30 5 P 5
25 5 20 19 19 20
1 18 11 18 18 11 Approx. 27
15 Manual override 15 300 24 32 Compressed air supply port
Non-locking type: standard
Unit 1: Rc1/8 (one, on right side)
Locking protruding type: -83
Units 2-5: 2-Rc1/8 (one on each side, one on plug)

2-φ4.2 2-φ4.2 7.3


Mounting hole Mounting hole
86.2

P
120.2

29

50

42
22

25
10

4.6

4.3

17
Vacuum breaking flow
adjusting needle

14.5 max.
AME07-E1 AME07-E2 12 min.
Exhaust port
Rc1/ 8 Block-off plate
Vacuum generating port (-BP)
Filter

Dimensions of Each Unit


89 min. 91.5 max.

Model L P
ME07M2A 59 49
77

3A 78 68
60

4A 97 87
V 5A 116 106
8

20 19 Adapter

421
ME07M□AS
AS manifold
● Illustration shows one unit.

30 LED indicator L
25 5 Vacuum switch 5 P 5

Approx. 500
1 18 20 19 19 20 Approx. 27 32 Compressed air supply port
15 11 18 18 11 300 24 20 11 Unit 1: Rc1/8 (one, on right side)
Manual override
15 Units 2-5: 2-Rc1/8 (one on each side, one on plug)
Non-locking type: standard
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Locking protruding type: -83

2-φ4.2
Mounting hole
2-φ4.2
Mounting hole

105
86.2
139

P
62
120.2

29
22

42
25
10

4.6

4.3
17
Vacuum breaking flow
adjusting needle

14.5 max.
12 min.
AME07-E1 AME07-E2
Exhaust port
Rc1/8 Block-off plate
Vacuum generating port (-BP)
Filter

Dimensions of Each Unit


89 min. 91.5 max.

VACUUM EQUIPMENT
Model L P
ME07M2AS 59 49
77

3AS 78 68
60

4AS 97 87
V 5AS 116 106
8

20 19 Adapter

Options
● Solenoid with straight connector: -PSL ● Solenoid with elbow connector: -PLL ● Locking protruding type: -83

B
(To the bottom of the manifold) l
35.5 (To the bottom of the manifold)
10 46.5
21 6.5
l

φ6
(Total length of micro ejector)

36.5

(Total length of micro ejector)


37

28.5
29
A

LED indicator LED indicator

Model Code A B C D l (Lead wire length)


ME07-E1, AME07-E1 95.2 68.5 87.2 79.5 -PSL, -PLL:300
AME07-E2 138.2 85.5 122.2 96.5 Special order: 1L; 1000, 3L; 3000

422
Dimensional Drawings for Electronic Vacuum Switches (Unit: mm)

PS310E-01 Approx.
61 500 LED indicator
R1/8 8.5 52.5 15 Hystersis adjusting screw
M5×0.8; Depth: 5
Pressure inlet

20
Pressure adjusting screw

Air Consumption and Ultimate Vacuum • Vacuum Flow


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●ME03 ●ME05 ●ME07


l/min(ANR) l/min(ANR) kPa{mmHg} l/min(ANR)
kPa{mmHg} kPa{mmHg}
-93.3{-700} 7 -93.3{-700} 14 -93.3{-700} 35
Ultimate vacuum Ultimate vacuum Ultimate vacuum
-80 {-600} 6 -80 {-600} 12 -80 {-600} 30

Compressed air consumption


Compressed air consumption

Compressed air consumption

Ultimate vacuum
-66.7{-500} 25
Ultimate vacuum

Ultimate vacuum

-66.7{-500} 5 -66.7{-500} 10
Compressed

Vacuum flow
Vacuum flow

Vacuum flow
air consumption
-53.3{-400} 4 -53.3{-400} 8 -53.3{-400} 20
Compressed Compressed
air consumption air consumption
-40 {-300} 3 -40 {-300} 6 -40 {-300} 15
Vacuum flow Vacuum flow
Vacuum flow
-26.7{-200} 2 -26.7{-200} 4 -26.7{-200} 10

-13.3{-100} 1 -13.3{-100} 2 -13.3{-100} 5

0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6
Air supply pressure MPa Air supply pressure MPa Air supply pressure MPa
Comment: Figures in this graph are for an ejector only.
If the same degree of vacuum is required for an ejector equipped with a solenoid valve, raise the pressure setting for supply air by approximately 0.03∼0.05MPa{0.3∼0.5kgf/cm2}.

Time to Reach Vacuum Setting • Vacuum Break Time

● Method of measurement
●ME□-E1
 kPa{mmHg} Time
-101.3{-760} S
Air pressure: 0.5MPa{5.1kgf/cm2}
Oscilloscope S1: Air supply solenoid valve Ultimate vacuum
-73.3{-550} Vacuum breaking flow adjusting needle:
Degree of vacuum

fully open
t1: The time it takes for pressure in the
-18.7{-140} chamber to reach -73.3kPa
0
t1 t2 {-550mmHg}after energizing S1.
t2: The time it takes for pressure in the
Power to S1 ON Power to S1 OFF chamber to reach -18.7kPa
{-140mmHg}after ME□-E1 non-
●ME□-E2
energizing S1.
 kPa{mmHg} Time t3: The time it takes for pressure in the
-101.3{-760} S chamber to reach -18.7kPa
Ultimate vacuum {-140mmHg}after energizing S2
-73.3{-550} and ME□-E2 raises the degree of
Degree of vacuum

Chamber
vacuum in the chamber to ultimate
-18.7{-140} vacuum.
S2: Vacuum breaking solenoid valve
0
t1 t3

Energizing S1 Non-energizing S1 Energizing S2

● Response Time s
Chamber capacity cm3 5 10 20 50 100 200 500
Model Time t1 t2 t3 t1 t2 t3 t1 t2 t3 t1 t2 t3 t1 t2 t3 t1 t2 t3 t1 t2 t3
ME03 0.4 0.1 ― 0.7 0.2 ― 1.1 0.3 ― 3.2 0.6 ― 5.8 1.1 ― ― ― ― ― ― ―
ME05 0.2 0.1 0.1 0.3 0.1 0.1 0.5 0.1 0.1 1.5 0.3 0.1 2.6 0.5 0.2 7.0 0.8 0.4 12.0 1.8 0.8
ME07 0.1 0.1 0.1 0.2 0.1 0.1 0.3 0.1 0.1 0.6 0.2 0.1 1.0 0.3 0.2 1.8 0.4 0.4 4.7 1.0 0.8
Note: May vary depending on the size of the piping and the shape of the chamber. These figures are only approximate.

423
Proper Handling and Precautions

Micro Ejectors

Equipment Configuration ※This is an illustration of model ME05M2AS. 


Station 1 - AME05-E2-□
Station 2 - AME05-E1-□-E
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Micro ejector with twin solenoid

Gasket
Check valve

;;;
Adapter
Muffler Single-solenoid valve micro ejector
Adapter cover

;;; Gasket

;;; Lock pin

;;;
O-ring

;;;
Plug

End cover
;;;
Vacuum switch
Gasket
Manifold body

VACUUM EQUIPMENT
Spring pin
Filter
O-ring
Filter cap

Piping
1. Connect air supply piping to the compressed air supply port,
and connect the vacuum pad to the vacuum generating port.
2. For manifolds with two or more units, there is a P port
(compressed air supply port) on either side of the manifold,
and the piping direction can be selected on the basis of the
Functions location where they are installed. When shipped from the
In addition to ejector-only models, micro ejectors in series plant, the plug on one of the ports is only loosely tightened.
●When you intend to maintain a vacuum for
ME03, ME05 and ME07 are also available with a single Remove it and secure it with sealing tape or another
extended periods of time, use the circuitry
solenoid valve for controlling the air supply, or twin solenoid type of sealer.
shown in the illustration below to reduce
valves, one of which controls the supply of compressed air, and 3. To cover over an unused station in a manifold, use a block-off
air consumption.
the other of which acts as a vacuum breaker. (Only models plate (order code: ME□MA-BP).
AME05 and AME07 are available with twin solenoid valves.)
(+) (ー) 4. Use either nylon or urethane tubes with an inner bore of φ4 ~φ6
Start
Models with twin solenoid valves supply compressed air to the Stop
for the piping to the micro ejector. For the piping which goes
vacuum line for easy vacuum breaking and release of the Relay to the vacuum generating port, use tubes of the following
workpiece, and vacuum breaking flow can be freely adjusted sizes:
Relay ME03…φ4×2.5
using a vacuum breaking flow adjusting needle. In addition, a
built-in check valve maintains the vacuum at its setting even ME05…φ4×2.5,φ6×4
after power to the air supply solenoid valve is cut off, thereby ME07…φ6×4
saving energy.
Air supply solenoid valve Caution: 1. Fittings must be used which will not narrow effective area.
Red (Brown) If the inner bore is too small, performance could be
Relay contact point
Black affected due to insufficient pressure, low ultimate vacuum,
PS310E
White (Black) (Blue) and slow vacuum setting attainment time.
2. Do not use coiled tubes or elbow fittings between the
micro ejector and the vacuum pad. The piping should be
Comment: The illustration above shows a circuit with a NO-type as straight as possible.
air supply solenoid valve (order code: -11). 3. When several micro ejectors connected to a multi-unit
Note: The colors of the lead wires were changed in 1993. The manifold are operating at the same time or at high
new colors are enclosed in parentheses. frequency, arrange to have air supplied from P ports on
both sides.

424
Proper Handling and Precautions

Solenoids Plug Connector Manual Override

Internal Circuits Plugging/Unplugging the Plug Connector Non-Locking Type・Locking Protruding Type

● DC12V, DC24 Insert the connector by fingers into the pins until it clicks over To operate the non-locking manual override, use a thin object to
(equipped with surge protection) the latches. To take the connector out, press down on its lever to press it in as far as it will go. While it is pressed in, the micro
release it from the latches on the connector housing, then pull it ejector is energizing. When the button is released, the micro
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Standard solenoid
away from the micro ejector. ejector is turned off once again.
Short circuit protection diode To operate the locking protruding manual override, turn it by
+ hand or with a jeweler’s screwdriver as far as it will turn (a little
Lead wires: DC12V, brown Latch
DC24V, red Solenoid Pin over 45°) while pressing down on it. It will lock in that position.
It does not matter in which direction the override is turned. If the
ー Connector housing
Lever manual override is turned any further after it has locked, it will
Lead wire: black Flywheel diode
Connector assembly unlock and spring back to its original position. If the manual
override is not turned, it can be used as a non-locking manual
LED indicator with solenoid
override. At this time, while it is pressed in, the ejector is
Order codes: -PSL, -PLL energizing. When the override is released, the micro ejector is
Terminal indicator turned off again.
(DC)
LED indicator Connector
(luminescent diode) Connector

C
Lead wires: DC12V, brown
DC24V, red ※This illustration shows model ME05-E1.


Lead wire: black LED indicator, red Crimping the Connector to the Lead Wire
To crimp the connector to the lead wire, strip 4mm of insulation
from the end of the lead wire, insert the bare wire into the PUS
H
● AC100V, AC200V connector, and crimp the connector. Make sure not to crimp the
(equipped with surge protection) connector over the insulated part of the lead wire.
Standard solenoid
Bare wire 4mm
Caution: Be sure to unlock the locking protruding manual override
Connector Lead wire
before putting the micro ejector into operation.
Lead wires: AC100V, yellow
AC200V, white Solenoid
Varistor

Insulation holder
Hook Bare wire crimp section Insulation

Solenoid with LED indicators Lead wires: □ME03 AWG28 or the equivalent
□ME05
Order codes: -PSL, -PLL AWG24 or the equivalent
□ME07
Vacuum Breaking
LED indicator
(luminescent diode) Plugging/Unplugging Connectors Adjusting the Vacuum Breaking Flow
Lead wires: AC100V, yellow from Each Other
AC200V, white To lower vacuum breaking flow, turn the vacuum breaking flow
When a connector to which a lead wire is connected is inserted
adjusting needle (only a twin-solenoid valve injector has this
into the □ hole in another connector, the two connectors hook
Diode part) in a clockwise direction. To raise vacuum breaking flow,
together. Pull gently on the lead wire to be sure that the
turn the adjusting needle counterclockwise.
connectors will not pull apart. To unplug the connectors from
LED indicators: AC100V, yellow each other, insert something narrow (such as a jeweler’s screw
AC200V, green
driver) into the rectangular hole on the side of the connector,
push up on the hook, and pull out on the lead wire.

Caution: 1. Do not make a mega test on the lead wires.


2. If the positive and negative terminals are reversed on a
DC12V or DC24V solenoid it will not cause a short circuit,
but the valves will not work.
3. If a current leak occurs within the circuit, the solenoid may
not return to home position and other malfunctions may
also occur. Be sure to keep current leaks in the circuit to
P
within allowable levels. If current leaks exceed allowable
Caution: 1. Do not pull forcefully on the lead wire. Doing so could V
levels, contact us.
break the wire or result in a bad connection.
2. If the pins are bent, gently straighten them with a jeweler’s
screwdriver or a similar tool before plugging in the
connector.
3. Be sure to use a crimping tool to crimp the connector to the
lead wire. If you do not have a crimping tool, contact us.

425
Electronic Vacuum Switch General Precautions
1 When the equipment is used where it will be exposed to
Pressure Adjusting Electrical Connections: Basic Guidelines
dripping water or oil, or where there is a lot of dust, protect it
Turn the pressure adjusting screw (SET) to adjust the pressure with a cover.
setting. Turn this screw to the right (clockwise) to raise the 2. Before connecting piping to a micro ejector, be sure to
Diode (for protection of reverse wiring)
setting. To adjust the hystersis setting, turn the hystersis thoroughly flush out the piping (using compressed air). Be
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adjusting screw (HYS). To shift the OFF position and raise the careful not to let chips, seal tape, rust or other foreign
Red (Brown)(+)
hystersis setting, turn this screw to the right (clockwise). material get inside the piping while installing it. Such foreign

Main circuit
Load material may cause a malfunction.

Sensor
White (Black) DC power
source 3. Supply the micro ejector with clean air which is not
contaminated with compressor oil or other impurities. Install
Black (Blue)(ー)
Adjusting driver an air filter (filtration size of 40μm max.) near the micro
Pressure adjusting LED indicator
screw ejector to eliminate water vapor and solid matter. If the
Zener diode
(SET) compressed air contains a great deal of oil, be sure to use a
mist filter.
Red (White): This is the positive lead wire which 4. Use a regulator to stabilize the pressure of the micro ejector’s
SE
TH
YS
powers the switch. air supply. If the piping to the micro ejector is too long, set
White (Black): This is the lead wire which connects to the pressure a bit higher than you normally would. If using an
the load.
air supply valve, its effective area should be three times
Black (Blue): This is the negative lead wire.
greater than the area of the micro ejector nozzle.
Hystersis
adjusting screw LED indicator 5. Attach only one vacuum pad to each micro ejector. If two
(HYS) Caution: 1. Do not pull forcefully on the lead wires or bend them pads or more are connected to a single micro ejector, pads
sharply. are more likely to miss workpieces, and it will take longer for
2. When connecting the lead wires, pay close attention to
the pads to reach the set degree of vacuum.
their color. The lead wires which connect to the power
6. Manifolds come with a filter (order code: ME□MA-F) as
source [red (brown), black (blue)] are equipped with
Caution: 1. To adjust the setting for pressure or hysteresis, use the standard equipment. Replace the filter regularly.
diodes to protect reverse connection, but the output
screwdriver provided for this purpose, or use another tool
circuits are not protected against overcurrent, so they
of the same size. Turn the adjusting screws gently without
could be damaged if the lead wires are not connected
applying undue force.
properly.

VACUUM EQUIPMENT
2. To make accurate settings, use a pressure gauge and
3. Do not connect to a load which exceeds the switching
check to see at what point the switch triggers as you turn
capacity of the vacuum switch.
the adjusting screws.
4. The colors of the lead wires were changed in 1993. The
3. Do not apply more than 0.2MPa{2kgf/cm2}pressure
new colors are enclosed in parentheses.
to the pressure sensor.

Installation
1. Be careful during installation to avoid sharp impact to the
vacuum switch. Damage or malfunctions may occur.
2. When installing the switch (model PS310E-01) designed
for a micro ejector only, do not apply the wrench to the body
cover. Be sure to apply the wrench to the metal portion on the
adapter.

SE
TH
YS

426
MULTISTAGE
MICRO EJECTORS

MED07-E • MED10-E

Specifications

Basic model
MED07-E□ MED10-E□
Item
Media (Note 2)
Air
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Pressure range MPa{kgf/cm2} 0.2∼0.6{2∼6.1}


Proof pressure MPa{kgf/cm2} 1.03{10.5}
Temperature range (ambient or media) ℃ 5∼50
Nozzle diameter mm 0.7 1.0
Ultimate vacuum (Note 1) kPa{mmHg} -84{-630.1}
Vacuum flow (Note 1) l/min(ANR) 25 50
Compressed air consumption (Note 1) l/min(ANR) 23 46
Lubrication Not possible
Filtration rate μm 30
Vacuum generating port Rc1/4
Port aperture
Compressed air supply port Rc1/8(Rc1/4)(Note 3)
Mounting direction Any direction
Operation Indirect operation
Number of positions・ports 2 positions・2 ports
Main valve Valve function Normally closed (NC, standard) and Normally open (NO, optional)
specifications Effective area mm2 4.5
Shock resistance 2
m/s{G} 1372.9 (axial direction: 588.4) {140 (axial direction: 60)}
Manual override Non-locking type
Notes: 1. These figures, which are only approximate, are based upon an assumed air pressure of 0.5MPa{5.1kgf/cm2}.
2. It is assumed that the air has been filtered of all oil mist and solid matter before it reaches the micro ejector.
3. The type enclosed in parentheses is to be used for an ejector equipped with a manifold.

Solenoid Specifications Electronic Vacuum Switch Specifications

Solenoid rating Item Model PS310


DC 5V DC 6V DC 12V DC 24V
Item Media Air or non-corrosive gas
System Built-in flywheel diode for surge protection Temperature range ℃ -10∼60(Do not allow to freeze.)
4.5∼5.5 5.4∼6.6 10.8∼13.2 21.6∼26.4 Humidity range %RH 35∼95
Voltage range DCV
(5±10%) (6±10%) (12±10%) (24±10%) Pressure range kPa{mmHg} -101.3∼0{-759.8∼0}
Current 325(1.6W) 270(1.6W) 130(1.6W) 70(1.6W) Proof pressure MPa{kgf/cm2} 0.2{2}
335 (1.7W) if 280 (1.7W) if 140 (1.7W) if 80 (1.7W) if
(when applied with
rated voltage)
Allowable current
mA 〔
equipped with
LED indicator 〕〔 equipped with
LED indicator 〕〔 〕〔
equipped with
LED indicator 〕
equipped with
LED indicator
Pressure setting range
Hysteresis (Note)
kPa{mmHg}

-101.3∼10.1{-759.8∼-75.8}
2∼9
leakage in circuit mA 30 25 15 5 Repeatability ± 3% FS max.(0∼50℃)
Insulation
resistance MΩ 100 min. Operation system NPN open collector output, NO type (output turns ON when pressure drops below setting)
Electrical Standard Grommet type: 300mm Voltage range DCV 12∼24 ±10% (Ripple Vp-p10%max.)
connection
and lead wire
length Optional Plug connector type: 300mm DC30V・100mA max.
Electrical Switching capacity
Green(+) Blue(+) Brown(+) Red(+) (Internal voltage drop: 1V max. at load current of 100mA; 0.4V max. at load current of 16mA)
Lead wire color specifications Current
Black(−) Black(−) Black(−) Black(−) consumption mA max. 20
Insulation
Color of LED indicator Red resistance MΩ 100 min. (DC 500V mega, between charger and case)
Surge protection (standard equipment) Flywheel diode Surge protection Zener diode (standard equipment)
Shock 2
resistance m/s{G} 490.3{50}
Mechanical 2
(Double amplitude 1.5mm) or 98.1m/s{10G}
characteristics Vibration resistance
(2 hours max. for X,Y and Z axes)
Operation indicator lamp LED indicator lights up when ON
Lead wire Vinyl cab tire: 0.14SQ×3 leads ×500mm (total length)
Mounting direction Any direction
Material (body cover) Plastic
Note: These figures are based on an assumed air pressure setting of -86.7kPa{-650.3mmHg}.
Port Aperture

Port aperture
Basic model
Vacuum generating port Compressed air supply port
MED07-E1, MED07-E2 Rc1/8
ejector

Rc1/4
Micro

MED10-E1, MED10-E2 (With manifold: Rc1/4)


-02 exhaust port (optional) Rc1/4
Manifold

MEDM□A Rc1/4 Rc1/4


Port position Ejector Manifold

427
Order Codes for Ejectors with Solenoid Valve Order Codes for Manifolds

MED 07 E2 DC24V MEDM 3 A Stn.1 AMED07-M

Voltage
DC5V
DC6V
DC12V
DC24V Stations Micro ejector model
Ejector installation
position is from the left-
Solenoid hand side when facing the
Blank ── Grommet vacuum generating port
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PSL ───Straight connector (Note 2) Stn.1 ── Station 1


PLL ───Elbow connector (Note 2) Stn.2 ──Station 2
⋮  ⋮
Stn.10 ──Station 10
Electronic vacuum switch
Blank ──Without A-type manifold
E ──With PS310 (Note 3)
Number of units
2 ───Units 2 manifold
Exhaust 3 ───Units 3 manifold
Blank ── Through muffler ⋮ ⋮
02 ── Exhaust 10────Units10 manifold
── port (Rc1/4)
Manifold basic model
Solenoid valve function (Note 1)
Blank ──Normal closed (NC)…[Reference] A010E1
11─────Normal openo (NO)…[Reference] A010E1-11

Solenoid valve specifications


E1 ── With single solenoid valve for air supply
AMED 07 E2 DC24V
E2 ── With twin solenoid valves for air supply
vacuum breaking Voltage
DC5V
Body model (Nozzle diameter mm) DC6V
07 ─── φ0.7 DC12V
10 ───φ1.0 DC24V

Micro ejector Solenoid


MED ── Ejector only Blank ── Grommet (Note 2)
CMED For additional units PSL ─── Straight connector
(Note 2)
PLL ─── Elbow connector

VACUUM EQUIPMENT
Electronic vacuum switch
Notes: 1. This choice applies only to ejectors with an air supply solenoid valve (order code: -11; always Blank ── Without
ON). Ejectors with a solenoid valve for control of vacuum breaking (order code: E2) are E ──With PS310 (Note 3)
available only in the “always OFF” version.
2. The plug connector also comes in versions 1L (1000mm) and 3L (3000mm) on special order.
Exhaust method
3. The electronic vacuum switch is also available on special order with a 2000mm lead wire. Blank ── Through muffler
02 ── Exhaust
── port (Rc 1/4)
Solenoid valve function (Note 1)
Blank ──Normally closed (NC)… [Reference]
A010E1
11 ──Normally openo (NO)… [Reference]
A010E1-11
Solenoid valve specifications
E1 ──With single solenoid valve for air supply
E2 ──With twin solenoid valves for
───air supply・vacuum breaking
Body model (Nozzle diameter mm)
07 ───φ0.7
Ejector for 10 ─── φ1.0
manifold

Order Codes for Electronic Vacuum Switches Extension Unit (These order codes only apply to extend the use of a single unit.)

PS310 DC24V CMED 07-E2-M


Lead wire length Code
Blank── 500mm See the Order Codes for ejectors with solenoids.
L ── 2000mm (Fill in all sections of the order code from body model
through voltage.)

DC12∼24V Switch Extension unit code

Electronic vacuum In addition to one manifold ejector (AMED…), the extension unit also comes with two extension rods and one gasket.
switch for multistage
micro ejectors

Order Code for a Replacement Filter (Element only)

MED-F
428
Operating Principles and Part Names

● Non-energized condition

Vacuum breaking flow adjusting needle Manual override Vacuum breaking solenoid valve
Lock nut Air supply solenoid valve
Muffler Air supply valve
Vacuum switch

;;
Filter

;;
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Vacuum breaking air supply valve

V (Vacuum generating port) P (Compressed air supply port)

1st stage nozzle


2nd stage nozzle Check valve

● Energizing the air supply solenoid valve (vacuum being generated)

;;
;;
V P

● Energizing the vacuum breaking solenoid valve

;;
;; Principle Materials

Part name Material


Body Aluminum alloy (painted) and plastic
Micro ejectors

Nozzle Brass
Diffuser Plastic
O-ring
V Synthetic rubber (NBR)
P Gasket
Manifolds

Endplate Aluminum alloy (painted)

429
Symbols

Ejector with single solenoid valves Ejector with vacuum switch and single solenoid valves
●MED07-E1 ●MED10-E1 ●MED07-E1-E ●MED10-E1-E
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Ejector with twin solenoid valves Ejector with vacuum switch and twin solenoid valves
●MED07-E2 ●MED10-E2 ●MED07-E2-E ●MED10-E2-E

VACUUM EQUIPMENT
Mass

● Multistage micro ejectors g ● Electronic vacuum switch


Item Basic model MED07/MED10 PS310(Body only)–––– 15g
With single solenoid valve MED□□-E1 295
With twin solenoid valves MED□□-E2 325
Additional mass Exhaust port -02 14
Example calculation: Mass of MED07-E2-02 325 + 14=339g

Mass of exhaust port


Mass of MED07-E2

● Manifolds g

Model MED07/MED10
Item AMED□□-E1 AMED□□-E2
Unit 1 1,250 1,280
Units 2 1,500 1,560
Weight of each manifold unit Units 3 1,750 1,840
Units 4 1000 1120
Units 5 1250 1400
Manifold・Endplate 140
Additional mass
With electronic vacuum switch -E 115
Example calculation: MEDM5A Stn.1 AMED07-E1
Stn.2 AMED10-E1
Stn.3∼5 AMED10-E2-E
The mass of station 5 is calculated as follows: 250 + 250 + 3 ×(280+15)+ 140 = 1525g
Mass of AMED10-E2-E Mass of manifold endplate
Mass of AMED07-E1 and AMED10-E1
430
Dimensional Drawings (Scale: 1/3; Unit: mm)

MED07-E2
MED10-E2
Exhaust port Manual override Air supply solenoid valve

45 90 Vacuum breaking solenoid valve


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135

(300)
Vacuum breaking flow adjusting needle
Vacuum switch(-E) -11
Filter

(500)

31
93
62
V P

7 10
10

10
20.4 Rc1/4 2-φ6.2 51 20 21
(V: Vacuum generating port) (Mounting hole) Rc1/8 23.2
(P: Compressed air supply port)

MEDM□A

(5) P 5

30.5 21 10 2-Rc1/4
(Pitch) (Compressed air supply port)

P P

Manual override
90

77
48

Vacuum breaking flow


137

135

5.3

adjusting needle
(500)
7.5

Vacuum switch Exhaust


45

4-R2.65 (Mounting hole)


port
Rc1/4 (-02)
Exhaust port
Filter

Air supply solenoid valve Vacuum breaking solenoid valve


(300)

Dimensions of Each Unit


Unit L P
84.5

93.5
87.5

2 82 72
77.5
62.5

3 103 93
10.5

4 124 114
31.5

V V V V V
5

5 145 135
6 166 156
Rc1/4 (For each unit 1)
7 187 177 (Vacuum generating port)
8 208 198
9 229 219
10 250 240

431
Dimensional Drawings for Electronic Vacuum Switches (Unit: mm)

PS310

Approx.
51.5 500 LED indicator

9 42.5 15 Hysteresis adjusting screw

φ7

20
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Pressure adjusting screw

Air Consumption and Ultimate Vacuum • Vacuum Flow

●MED07 ●MED10

l/min(ANR) kPa{mmHg} l/min(ANR)


kPa{mmHg}
-93.3{-700} 70 -93.3{-700} 70
Ultimate vacuum
-80 {-600} 60
Compressed air consumption

-80 {-600} 60 Vacuum

Compressed air consumption


flow
Ultimate vacuum
-66.7{-500} 50
Ultimate vacuum

Ultimate vacuum

-66.7{-500} 50
Vacuum flow

Vacuum flow
-53.3{-400} 40 -53.3{-400} Compressed 40
Vacuum flow air consumption
-40 {-300} 30 -40 {-300} 30

-26.7{-200} Compressed air 20 -26.7{-200} 20


consumption
-13.3{-100} 10 -13.3{-100} 10

VACUUM EQUIPMENT
0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6

Air supply pressure MPa Air supply pressure MPa

Time to Reach Vacuum Setting • Vacuum Break Time

● Method of measurement ●MED□-E1


 kPa{mmHg} Time Air pressure: 0.5MPa{5.1kgf/cm2}
S1: Air supply solenoid valve --101.3{-759.8} S
Vacuum breaking flow adjusting needle:
Ultimate vacuum
S2: Vacuum breaking solenoid valve -73.3{-549.8} fully open
Oscilloscope
Degree of vacuum

t1: The time it takes for pressure in the


chamber to reach -73.3kPa
-18.7{-140.3} {-549.8mmHg}after energizing to S1.
0
t1 t2 t2: The time it takes for pressure in the
chamber to reach -18.7kPa
Energizing S1 Non-energizing S1 {-140.3mmHg}after MED□-E1
non-energizing S1.
●MED□-E2 t3: The time it takes for pressure in the
chamber to reach -18.7kPa
 kPa{mmHg} Time
S {-140.3mmHg}} after energizing
-101.3{-759.8}
Ultimate vacuum S2 and MED□-E2 raises the degree
-73.3{-549.8} of vacuum in the chamber to ultimate
Degree of vacuum

Chamber vacuum.
-18.7{-140.3}
0
t1 t3

Energizing S1 Non-energizing S1 Energizing S2


● Response Time s
Chamber capacity cm3 5 10 20 50 100 200 500 1000
Model Time t1 t2 t3 t1 t2 t3 t1 t2 t3 t1 t2 t3 t1 t2 t3 t1 t2 t3 t1 t2 t3 t1 t2 t3
MED07 0.2 0.1 0.1 0.3 0.1 0.1 0.3 0.1 0.1 0.5 0.2 0.1 0.8 0.3 0.1 1.5 0.5 0.1 3.4 0.9 0.2 6.8 1.7 0.3
MED10 0.2 0.1 0.1 0.2 0.1 0.1 0.2 0.1 0.1 0.3 0.1 0.1 0.5 0.2 0.1 0.9 0.3 0.1 2.1 0.5 0.2 4.1 0.9 0.3
Note: May vary depending on the size of the piping and the shape of the chamber. These figures are only approximate.

432
Proper Handling and Precautions

Multistage Micro Ejectors

Equipment Configuration

Endplate B Gasket (small) Gasket (large) Muffler cover


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Vacuum switch

Muffler Plug connector

Pilot solenoid valve

Connecting rod
Gasket

Ejector

Sealed cap
Gasket (small)
Filter cap

Gasket Endplate A

Filter

Hexagon socket
O-ring head cap bolts

Screw A

Base Screw B O-ring

Assembling the Manifold


Screw the two connecting rods as far as they will go into Electronic
endplate B, then slide the ejectors over the connecting rods in Vacuum Switch
any order. Finally, fit end plate A over the connecting rods,
screw the hexagon socket head cap bolts into the connecting Installation
rods, and tighten them.
To install a vacuum switch from behind, the presently installed
When tightening the bolts, the two endplates should be set on a
sealed cap has to be removed.
level surface. The large gaskets should be placed between the
● First, remove the two A screws. The base will come free of
ejectors, while the small gaskets should be placed inside each
the ejectors.
of the endplates.
● When the two B screws are removed, the sealed cap can
be removed.
● Fit the vacuum switch to the base and secure it with the two
Extending the Manifold (CMED) B screws.
Remove the two hexagon socket head cap bolts and take off ● Use the two A screws to secure the base to the ejector.
endplate A. Screw the two extension rods which come packed
Caution: 1. Be careful not to lose the O-ring while installing the
with the product into the connecting rods, and check at this time
vacuum switch. Disassemble the device on a clean site. If
to be sure that the connecting rods are firmly screwed into Extension rod impurities get into the device during installation of the
endplate B. Place the gaskets in the positions described above, Gasket (small) vacuum switch, it could cause air leakage and
Endplate A
fit the ejector and endplate over the extension rods, and tighten other malfunctions.
Hexagon socket head cap bolts
the hexagon socket head cap bolts. 2. For information regarding adjusting pressure and electrical
connections, see page 426.
Caution: MED series ejectors are mounted to a manifold, so they do
not come with a block-off plate. To extend the manifold,
assemble the extension unit (CMED) in the manner
described above. The number of units cannot be reduced. If
you must reduce the number of units, contact us. (Custom-
made connecting rods are required.)

433
Solenoid Manual Override

Functions Internal Circuits Non-Locking Type


Micro ejectors in series MED07 and MED10 are available ● DC12V, DC24 (equipped with surge Use a thin object to press the manual override in as far as it will
with a single solenoid valve for air supply, or twin solenoid protection) go. While it is pressed in, the micro ejector is turned to like
valves, one which controls the supply of compressed air, and energizing condition. When the override is released, the micro
Standard solenoid
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the other which acts as a vacuum breaker. Models with twin ejector is turned off again.
solenoid valves supply compressed air to the vacuum line for
Short circuit protection diode
easy vacuum breaking and release of the workpiece, and

vacuum breaking flow can be freely adjusted using a vacuum Lead wires: DC12V, brown
DC24V, red Solenoid
breaking flow adjusting needle. In addition, a built-in check
valve maintains the vacuum at its setting even after power to the ー
valve is cut off, thereby saving energy. Lead wire: black Flywheel diode

Solenoid LED indicator with


● When you intend to maintain a vacuum for Order codes: -PSL, -PLL
extended periods of time, use the circuit
shown in the illustration below to reduce LED indicator
air consumption. (luminescent diode) PUSH

(+) (ー)
Start Lead wires: DC12V, brown
DC24V, red
Stop
Relay Caution: Do not use anything with an extremely sharp point, such as a

needle, to push in the manual override because the button
Lead wire: black LED indicator: red
Relay contact point could be damaged.

Caution: 1. Do not perform a mega test on the lead wires.


2. If the positive and negative terminals are reversed on a
DC12V or DC24V solenoid, it will not cause a short
Air supply solenoid valve circuit, but the valves will not work.

VACUUM EQUIPMENT
Red (Brown) 3. If current leakage occurs within the circuit, the solenoid
Relay contact point
may not return to home position and other malfunctions
Vacuum Breaking
PS310E
White (Black) Black may also occur. Be sure to keep current leakage inside the
(Blue) circuit within allowable levels. If current leakage exceeds Adjusting of the Vacuum Breaking Flow
allowable levels, contact us.
Comment: The illustration above shows a circuit with a NO-type air supply To lower vacuum breaking flow, turn the vacuum breaking flow
solenoid valve (order code: -11).
adjusting needle (only the twin-solenoid valve injector has this
Note: The colors of the lead wires were changed in 1993. The new
part) in a clockwise direction. To raise vacuum breaking flow,
colors are enclosed in parentheses.
turn the adjusting needle counterclockwise.

Plug Connector

Plugging/Unplugging the Plug Connector


Insert the connector by hand along the pins until it clicks into
Piping place over the latches. To unplug the connector, press down on
1. Connect air supply piping to the compressed air supply port, the lever to release it from the latches on the connector housing,
and connect the vacuum pad to the vacuum generating port. then pull it away from the micro ejector.
2. The compressed air supply ports are located on either side of
the manifold, and piping direction can be selected on the
basis of the location where they are installed. When shipped
Latch
from the plant, the plug in one of the ports is only loosely Pin
tightened. Remove it and secure it with sealing tape or Connector housing
another type of sealer.
3. For the piping which goes to the vacuum generating port, Lever
it is recommended that you use urethane tubes of the
Connector
following sizes: assembly
For models in series MED07 and MED10:φ8×6
N8
or equivalent sized urethane tube Connector
Caution: 1. Fittings must be used which will not narrow the effective
area. If the inner bore is too small, performance could be
Contact
affected due to insufficient pressure, low ultimate vacuum,
and slow vacuum setting attainment time.
2. Do not use coiled tubes or elbow fittings between the
micro ejector and the vacuum pad. The piping should be
as straight as possible.
3. When several electronic vacuum switches connected to a
manifold are used at the same time, the maximum number
of units is as follows:
MED07→10 units
MED10→5 units
Attaching more units will cause a sharp drop in degree of
vacuum and intake flow.

434
MULTISTAGE MICRO
EJECTORS
MEDT07 • MEDT10 • MEDT12 •
MEDT14

Specifications

Basic model
MEDT07 MEDT10 MEDT12 MEDT14
Item
Media Air (Note 2)
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Pressure range MPa{kgf/cm2} 0.2∼0.6{2∼6.1}


Proof pressure MPa{kgf/cm2} 1.03{10.5}
Temperature range (ambient or media) ℃ 5∼50
Nozzle diameter mm 0.7 1.0 1.2 1.4
Ultimate vacuum (Note 1) kPa{mmHg} -84(-630.1)
Vacuum flow (Note 1) l/min(ANR) 25 50 85 95
Compressed air consumption (Note 1) l/min(ANR) 23 46 72 96
Lubrication Not possible
Filtration rate μm 30
Vacuum generating port Rc1/8 Rc1/4
Port aperture
Compressed air supply port Rc1/8 Rc1/4
Installation direction Any direction
Notes: 1. These figures, which are only approximate, are based upon an assumed air pressure of 0.5MPa {5.1kgf/cm2}.
2. It is assumed that the air has been filtered of oil mist and solid matter before it reaches the micro ejector.

Electronic Vacuum Switch Specifications Mass

Item Model PS310 ●Multistage micro ejectors g


Media Air or non-corrosive gas
Model
Temperature range ℃ -10∼60(Do not allow to freeze.) Model Mass Mass
(with electronic vacuum switch)
Humidity range %RH 35∼95 MEDT07 MEDT07-E
Pressure range kPa{mmHg} -101.3∼0{-759.8∼0} 175 105
MEDT10 MEDT10-E
2 0.2{2}
Proof pressure MPa{kgf/cm } MEDT12 MEDT12-E
Pressure setting range kPa{mmHg} -101.3∼10.1{-759.8∼-75.8} 130 170
MEDT14 MEDT14-E
(Note) 2∼9
Hysteresis %
Repeatability ±3% FS max.(0∼50℃)
Operation NPN open collector output, NO type (output turns ON when pressure drops below setting)
Voltage range DCV 12∼24±10% (Ripple Vp-p10% max.)
DC30V・100mA max.
Electrical Switching capacity
(Internal voltage drop: 1V max. at load current of 100mA; 0.4V max. at load current of 16mA)
specifications
Current consumption mA max. 20 Symbols
Insulation resistance MΩ 100 min. (DC 500V mega, between charger and case)
Surge protection Zener diode (standard equipment)
2
Shock resistance m/s{G} 490.3{50} ●MEDT07-E ●MEDT10-E
Mechanical
10∼55Hz (Double amplitude 1.5mm) or ●MEDT12-E ●MEDT14-E
characteristics Vibration resistance 2
98.1m/s{10G}(2 hours max. for X,Y and Z axes)
Operation indicator lamp LED indicator lights up when ON
Outgoing line Vinyl cab tire: 0.14SQ x 3 leads ×3×500 mm (total length)
Installation direction Any direction
Material (body cover) Plastic
Note: These figures are based on an assumed air pressure setting of -86.7kPa {-650mmHg}.

435
Order Codes for Multistage Micro Ejectors Order Codes for Electronic Vacuum Switches

MEDT 07 PS310 DC24V


Vacuum switch
Blank ––– Without (Note) Lead wire length
E ––––––– With (model PS310) Blank ––– 500mm
L ––––––– 2000mm

Body model (nozzle diameter—Unit: mm) DC12V-DC24V switch


07 –––––––φ0.7
Multistage 10 –––––––φ1.0 Electronic vacuum switch for
micro ejectors 12 –––––––φ1.2 multistage micro ejectors
14 –––––––φ1.4
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Note: When an ejector without a vacuum switch is selected, be aware that the vacuum
switch cannot be installed from behind.

Additional Parts (Sold Separately)

● Replacement mufflers ● Replacement filters

MEDT 07 KM MEDT 07 F
07 For MEDT07 07 For MEDT07
For MEDT10 For MEDT10
12 For MEDT12 12 For MEDT12
For MEDT14 For MEDT14

MEDT07-KM MEDT12-KM MEDT07-F MEDT12-F

VACUUM EQUIPMENT
Air Consumption and Ultimate Vacuum・Vacuum Flow

●MEDT07 ●MEDT10
kPa{mmHg} kPa{mmHg}
l/min(ANR) l/min(ANR)
-93.3{-700} 70 -93.3{-700} 140
Ultimate vacuum Ultimate vacuum
-80 {-600} 60 -80 {-600} 120
Compressed air consumption

Compressed air consumption


-66.7{-500} 50 -66.7{-500} 100
Ultimate vacuum

Ultimate vacuum

-53.3{-400} 40 -53.3{-400} 80
Vacuum flow

Vacuum Vacuum Vacuum flow


-40 {-300} flow 30 -40 {-300} flow 60

-26.7{-200} 20 -26.7{-200} 40
Compressed Compressed
air consumption air consumption 20
-13.3{-100} 10 -13.3{-100}

0 0 0 0
0.1 0.2 0.3 0.4 0.5 0.6 0.1 0.2 0.3 0.4 0.5 0.6
Air supply pressure MPa Air supply pressure MPa

●MEDT12 ●MEDT14
kPa{mmHg} kPa{mmHg}
l/min(ANR) l/min(ANR)
-93.3{-700} 140 -93.3{-700} 140
Ultimate vacuum Ultimate vacuum
-80 {-600} 120 -80 {-600} 120
Compressed air consumption

Compressed air consumption

Vacuum
-66.7{-500} flow 100 -66.7{-500} 100
Ultimate vacuum

Ultimate vacuum

-53.3{-400} 80 -53.3{-400} Vacuum 80


flow
Vacuum flow

Vacuum flow

-40 {-300} 60 -40 {-300} 60


Compressed Compressed
air consumption air consumption
-26.7{-200} 40 -26.7{-200} 40

-13.3{-100} 20 -13.3{-100} 20

0 0 0 0
0.1 0.2 0.3 0.4 0.5 0.6 0.1 0.2 0.3 0.4 0.5 0.6
Air supply pressure MPa Air supply pressure MPa

436
Dimensional Drawings (Scale: 1/3, Unit: mm)

MEDT07-E
MEDT10-E
105
40 65

P
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Rc1/8
53 (P: Compressed air supply port)

2-φ3.2 (Mounting hole) 35 15 16


17 9

9
17
34

Muffler

54
Muffler (Port: Rc1/8)
Rc1/8
(V: Vacuum generating port)
Vacuum switch(-E)

MEDT12-E
MEDT14-E
130
50  80
P

Rc1/4
65 (P: Compressed air supply port)
2-φ4.2 (Mounting hole) 40 20 20
11

11
21
21

42

V
57

Muffler
(Port: Rc1/4)
Rc1/4
(V: Vacuum generating port)
Vacuum switch(-E)

437
Operating Principles and Part Names

● When not in operation ● When vacuum is being generated

;;;; ;;
;;
1st stage nozzle
2nd stage nozzle
Muffler

;;;; P (air supply port)

;;
;; P
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V (vacuum generating port) Filter cap V


Check valve
Filter

Switch holder Vacuum switch

● Principal Materials
Part name Material
Body Aluminum alloy (painted)
Nozzle Brass
Filter, muffler Plastic
O-ring, gasket Synthetic rubber (NBR)
Switch holder Aluminum alloy (anodized)

Time to Reach Vacuum Setting • Vacuum Break Time

● Method of measurement ●MEDT□

VACUUM EQUIPMENT
{5.1kgf/cm2}
Air pressure: 0.5MPa
 kPa{mmHg} Time
-101.3{-759.8} S
t1 :The time it takes for pressure in
Degree of vacuum

Ultimate vacuum the chamber to reach -73.3kPa


S1 -73.3{-549.8}
{-549.8mmHg}after energizing S1.
t2 :The time it takes for pressure in
Chamber
the chamber to reach -18.7kPa
-18.7{-140.3} {-140.3mmHg}after MEDT□
Valve 0
Solenoid valve t1 t2 is non-energized S1.
(200E1) (Note)
Energizing S1 Non-energizing S1

Oscilloscope Note: The effective area of the valve should be three times greater than the area of the nozzle.

● Response Time s
2 5 10 20 50 100 200 500 1000 2000
Chamber volume cm
Time t1 t2 t1 t2 t1 t2 t1 t2 t1 t2 t1 t2 t1 t2 t1 t2 t1 t2
Model
MEDT07 0.2 0.1 0.2 0.1 0.3 0.1 0.4 0.2 0.7 0.3 1.2 0.4 2.7 0.8 5.2 1.6 ───
MEDT10 0.1 0.1 0.1 0.1 0.2 0.1 0.3 0.1 0.4 0.2 0.7 0.3 1.4 0.5 2.7 0.8 5.5 1.5
MEDT12 0.1 0.1 0.1 0.1 0.2 0.1 0.2 0.1 0.3 0.1 0.5 0.2 0.9 0.3 1.8 0.6 3.5 1.1
MEDT14 0.1 0.1 0.1 0.1 0.1 0.1 0.2 0.1 0.3 0.1 0.4 0.2 0.8 0.3 1.6 0.5 3.1 0.9
Note: May vary depending on the size of the piping and the shape of the chamber. These figures are only approximate.

438
MICRO EJECTORS

ME12 • ME25 • ME60

Specifications

● Micro ejectors ● Vacuum switches


Item Basic model ME12 ME25 ME60 Item Operation NO type NC type
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Media Air Setting for degree of vacuum kPa{mmHg} -26.7∼-80{-200.3∼-600}


Pressure range MPa{kgf/cm2} 0.1∼0.6{1∼6.1} Hysteresis kPa{mmHg} -5.3∼-13.3{-39.8∼-100}
Temperature range ℃ 0∼50 (Do not allow to freeze.) Lead wire colors Black・White Black・Red
Nozzle diameter mm 0.7 1.0 1.5 Electrical ratings 5A/AC250V, 5A/DC24V (resistance load)
Ultimate vacuum (Note) kPa{mmHg} -92{-690.1} ※The internal switch must meet JIS-S2H1PO1 standards.
Vacuum flow (Note) l /min(ANR) 12.5 25 58
Compressed air consumption (Note) l /min
(ANR) 23 46 107
Lubrication Not possible
Filtration rate µm 30

Port aperture Rc1/8 Rc1/4

Note: These figures are based upon an assumed air pressure of 0.5MPa {5.1kgf/cm2}.

● Single and Twin Solenoid Valves


For ME12 For ME25・ME60
Basic model
Single solenoid valve Single solenoid valve Twin solenoid valve
Item
ME12E1 125EE1 125EE2
Operation Direct operation Direct operation
Number of ports 2 ports (NC, NO) 2 ports (NC)
Port aperture Rc1/8 Rc1/4
Proof pressure MPa{kgf/cm2} 1.03{10.5} 1.03{10.5}
Effective area mm2 1.5 3
Maximum operating frequency c /s 5 5
Installation direction Any direction Any direction
AC100V (lead wire: yellow) AC100V (lead wires: yellow, black)
Voltage type AC200V (lead wire: white) AC200V (lead wires: white, black)
DC24V (lead wires: red, black) DC24V (lead wires: red, black)
AC100V 90∼110V(100V ± 10%) 90∼110V(100V ± 10%)
Voltage range AC200V 180∼220V(200V ± 10%) 180 ∼220V(200V ± 10%)
DC24V 21.6∼26.4V(24V ± 10%) 21.6∼26.4V(24V ± 10%)
Frequency 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz
AC100V 40 32 96 95 96 95
Current mA
AC200V 23 17 48 46 48 46
DC24V 125 412 412
Insulation resistance MΩ 100 min. 100 min.
Electrical connections Grommet type (lead wire length: 300mm) Grommet type (lead wire length: 300mm)
Manual functions For locking and non-locking types Locking type
Surge protection Flywheel diode (DC only)
Note: With a twin solenoid valve model, one of the valves controls vacuum generation, while the other controls vacuum breaking. They do not operate at the same time.

Mass

g
Item Mass of Additional mass
Model body With filter With vacuum switch With single solenoid valve With twin solenoid valves
ME12 40 25 ―― 80 ――
ME25・60 335 ―― 160 90 230
Example calculation: The mass of a micro ejector equipped with an ME25 vacuum switch and twin solenoid
valves is 335+160+230=725g

439
Order Codes

ME
Solenoid valve operation
Voltage type (applies only to models (ME12 models only)
equipped with solenoid valve) Blank Normally closed (NC)
1 ––––––– AC100V 11 Normally open (NO)
Vacuum switch (ME25 and ME60 models only)
2 ––––––– AC200V
Blank Without vacuum switch
M With vacuum switch 3 ––––––– DC24V
Solenoid valve
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Blank ──Without solenoid value


Filter (ME12 models only)
S ─────With air supply single solenoid valve
Blank Without filter
T ─────With twin solenoid valves for air supply and vacuum breaking
F With filter
● Standard equipment on ME25 and ME60 models. ─────(ME25 and ME60 models only)

Body model
12 ––––––– Maximum vacuum flow: 12.5l /min(ANR)
25 ––––––– Maximum vacuum flow: 25l /min(ANR)
60 ––––––– Maximum vacuum flow: 58l /min(ANR) ● Optional parts

Micro ejectors

Voltage
Model (solenoid valves only)
MEF12 –––––– ME12 filter (with 2 mounting screws and 1 O-ring) AC100V
MEM25 –––––– ME25・60 series vacuum switch AC200V
ME12E1 –––––– ME12 series single solenoid valve (NC) DC24V
ME12E1-11 –––––– ME12 series single solenoid valve (NO)
125EE1 –––––– ME25・60 series single solenoid valve
125EE2 –––––– ME25・60 series twin solenoid valve

Operating Principles and Part Names

● When not in operation ● When vacuum generating valve is ON ● When vacuum breaking valve is ON

VACUUM EQUIPMENT
Muffler Check valve Nozzle Vacuum breaking
Filter Diffuser flow adjusting valve

Compressed air
supply port

Vacuum generating valve

Vacuum breaking valve

Vacuum generating port

Micro switch Control nut Vacuum switch


(Note) (Note) (Note)
White (Black) (COM) White (Black) White (Black)
When compressed air is supplied from the nozzle into the diffuser,
Red (NC) Red Red
air is sucked from the gap between the nozzle and diffuser into
Black (White) (NO) Black (White) Black (White)
the diffuser, thereby generating a vacuum.
This illustration shows a micro ejector equipped with a vacuum switch and twin solenoid valves. When the degree of vacuum rises above the setting, the vacuum switch is triggered

Note: The colors of the lead wires were changed in 1993. The new colors are enclosed in parentheses.

440
Air Consumption and Ultimate Vacuum • Vacuum Flow

●ME12 ●ME25 ●ME60

kPa{mmHg} l/min(ANR) kPa{mmHg} l/min(ANR) kPa{mmHg} l/min(ANR)


-93.3{-700} 35 -93.3{-700} 70 -93.3{-700} 140
Ultimate vacuum Ultimate vacuum Ultimate vacuum
-80 {-600} 30 -80 {-600} 60 -80 {-600} 120

Compressed air consumption

Compressed air consumption


Compressed air consumption
Ultimate vacuum

Ultimate vacuum

Ultimate vacuum
-66.7{-500} 25 -66.7{-500} 50 -66.7{-500} 100
Compressed air
-53.3{-400} 20 -53.3{-400} 40 -53.3{-400} consumption 80
Compressed air Compressed air

Vacuum flow

Vacuum flow
Vacuum flow
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consumption consumption
-40 {-300} 15 -40 {-300} 30 -40 {-300} 60
Vacuum Vacuum
-26.7{-200} 10 -26.7{-200} Vacuum 20 -26.7{-200} flow 40
flow flow
-13.3{-100} 5 -13.3{-100} 10 -13.3{-100} 20

0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6
Air supply pressure MPa Air supply pressure MPa Air supply pressure MPa

Symbols

Ejector only Ejector with filter Ejector with vacuum switch and filter
●ME12 ●ME12F ●ME25 ●ME60 ●ME25-M ●ME60-M

Ejector with single solenoid valve Ejector with single solenoid valve and filter Ejector with vacuum switch, single solenoid valve and filter
●ME12-S□ ●ME12F-S□ ●ME25-S□ ●ME60-S□ ●ME25-M-S□ ●ME60-M-S□

Ejector with twin solenoid valves and filter Ejector with vacuum switch, twin solenoid valves and filter
●ME25-T□ ●ME60-T□ ●ME25-M-T□ ●ME60-M-T□

441
Dimensional Drawings for the ME12 Series (Unit: mm)

●ME12 ●ME12-S□

2-φ3.2 2-φ3.2
Mounting hole 50 Mounting hole 65
40 10 22 Rc1/8 40 25 Manual override Rc1/8
10 7.5 11 Compressed air supply port 10 7.5 Compressed air supply port

3
3
3

10
22
18
22

37
47.7
8
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Rc1/8
Vacuum generating port Approx. 300mm 11
22
11

Rc1/8

11
Vacuum generating port
8
33

●ME12F ●ME12F-S□

2-φ3.2 2-φ3.2
Mounting hole Mounting hole
50 65
40 10 22 Rc1/8 40 25 Manual override Rc1/8
10 7.5 11 10 7.5 Compressed air supply port
Compressed air supply port

3
3
3

10
9
18

22
22

37
47.7
44

44
22

22

Rc1/8 Approx. 300mm 11


Rc1/8 8 Vacuum generating port 22
Vacuum generating port

VACUUM EQUIPMENT
11
11

8
33

442
Dimensional Drawings for the ME25 and ME60 Series (Unit: mm)

●ME25 ●ME25-M
●ME60 ●ME60-M
2-φ4.2 2-φ4.2
Mounting hole 90 35 Mounting hole
90 35
75 15 10 25 Rc1/4 10 25 Rc1/4
75 15
25 17 13 Compressed 17 13 Compressed
25
4.5

air supply port air supply port

4.5
11

11
25

25
50

50
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75
25
φ44

Approx. 300mm
φ44
12

11

Rc1/4

12
Vacuum generating port 11
Rc1/4
Vacuum generating port

●ME25-S□ ●ME25-M-S□
●ME60-S□ ●ME60-M-S□
2-φ4.2 2-φ4.2
Mounting hole
Mounting hole 35
101 35 101
10 25 26 10 25 Rc1/4
75 26 Rc1/4 75
25 17 10 25 17 10 Compressed
Compressed air supply port
4.5
4.5

air supply port

10
10
50

58

50

58
Manual
75

override Manual
override
25

Approx. 300mm
Approx. 300mm

φ44 φ44
12
12

11 11
Rc1/4 Rc1/4
Vacuum generating port Vacuum generating port

●ME25-T□ ●ME25-M-T□
●ME60-T□ ●ME60-M-T□
35 2-φ4.2 35
2-φ4.2
10 25 Mounting hole 10 25
Mounting hole 126
126 15 15 Rc1/4
Rc1/4 75 51
75 51 10
10.5

10 Compressed
10.5

25 17 18.5 Compressed 25 17 18.5


air supply port
4.5

air supply port


4.5

10
10

50
50

58
58

Manual
75

Manual
override override
25

Approx. 300mm

Approx. 300mm
φ44
φ44
12
12

11
11
Rc1/4 Rc1/4
Vacuum generating port Vacuum generating port

443
Proper Handling and Precautions

Micro Ejectors

Equipment Configuration
●ME12 ●ME25・60

Single solenoid valve


Back cover Packing
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O-ring Twin solenoid valves


Ejector
Nozzle
Ejector
O-ring
Solenoid valve
ME12E1
Check valve

;;;;
O-ring Filter element

;;;;
O-ring

;;;;
Filter
;;;; Filter cap
MEF12
(With 2 mounting screws and 1 O-ring) Vacuum switch
MEM25
Muffler cap
Packing
Muffler

Piping Solenoid Valves


1. Connect air supply piping to the compressed air supply port, Micro ejectors can be optionally equipped with either a single solenoid ME25・ME60

VACUUM EQUIPMENT
and connect the vacuum pad to the vacuum generating port. valve (for control of vacuum generation) or twin solenoid valves (for
For both DC and AC (equipped with surge protection for DC circuits)
2. Use either nylon or urethane tubes with an inner bore of control of vacuum generation and vacuum breaking). (Twin solenoid
φ4-φ6 for the piping to the micro ejector. For the piping valves are available only for ME25 and ME60 series ejectors.) Short circuit protection diode
which goes to the vacuum generating port, use tubes of the Models with twin solenoid valves supply compressed air to the vacuum
following sizes: line for easy vacuum breaking and release of the workpiece, and Solenoid
Flywheel diode
ME12 φ4×2.5∼φ6×4 vacuum breaking flow can be freely adjusted using a vacuum breaking
ME25 φ6×4∼φ8×6 flow adjustment needle. In addition, a built-in check valve maintains the Lead wires: DC24V (+)Red(ー)Black
ME60 φ8×6∼φ10×8 vacuum at its setting even after power to the air supply solenoid valve      AC100V   Yellow・Black
is cut off, thereby saving energy.      AC200V   White・Black

Caution: 1. Fittings must be used which will not narrow effective area. ● When you intend to maintain vacuum for extended periods of time, use
If the inner bore is too small, performance could be Caution: 1. Do not perform a mega test on the lead wires.
the circuit shown in the illustration below to reduce air consumption.
affected due to insufficient pressure, low ultimate vacuum 2. Wrong polarity on a DC24V solenoid will not cause a
and slow vacuum setting attainment time. Start short circuit, but the valves will not work.
2. Do not use coiled tubes or elbow fittings between the Stop 3. If a current leak occurs within the circuit, the solenoid may
Relay
micro ejector and the vacuum pad. The piping should be not reset to home position and other malfunctions may
as straight as possible. Relay contact also occur. Be sure to keep current leakage within the
point Vacuum
circuit below the allowable levels. If current leakage exceed
generating
Vacuum switch solenoid valve allowable levels, contact us.
Vacuum Switches Relay contact
point

When pressure reaches the level to which it has been set using
the control nut, the micro switch is triggered and electric signals
● Adjusting the vacuum breaking flow
can be picked up. To adjust the pressure setting, slide the cover
in the direction indicated by the arrow and remove it, then turn ● Internal solenoid circuit Turn the vacuum breaking flow adjustment nut in a clockwise
the control nut. The setting is raised by turning the nut ME12 direction to reduce vacuum breaking flow. This will prolong
downward (↓), and lowered by turning the nut upward (↑). vacuum breaking. Turn it counter-clockwise to increase the flow
DC24V (equipped with surge protection)
and complete vacuum breaking more quickly.
Short circuit protection diode
(+)
Lead wire: red
Solenoid
Flywheel diode
Reduce flow Increase flow
(ー)
Lead wire: black

AC100V, AC200V (shading system)

Solenoid

Control nut
Lead wires: AC100V yellow
     AC200V white

444
Time to Reach Vacuum Setting • Vacuum Break Time

● Measurement circuits・Conditions ● Methods of measurement


Micro ejector Time Air pressure: 0.5MPa{5.1kgf/cm2}
 kPa{mmHg}
-101.3{-759.8} S
Ultimate vacuum t1: The time it takes for pressure in the

Degree of vacuum
-73.3{-549.8}
chamber to reach -73.3kPa
Oscilloscope {-549.8mmHg}after energizing S1.
-18.7{-140.3}
S1 (vacuum generating solenoid) t2: The time it takes for the degree of
0
t1 t2 vacuum in the chamber to reach
S2 (vacuum breaking solenoid)
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-18.7kPa{-140.3mmHg}after
Chamber Engergizing S1 Non-energizing S1 energizing S2.

● Response time s
Chamber volume cm2 10 50 200 1000 3000 5000
Model Time
t1 t1 t2 t1 t2 t1 t2 t1 t2 t1 t2 t1 t2
ME12 1.5 ─ 2.0 ─ 4.0 ─ 7.5 ─ 26.0 ─ 50.0 ─
ME25 1.0 0.1 1.3 0.1 2.0 0.2 3.8 0.4 13.0 1.5 23.0 3.0
ME60 0.5 0.1 1.0 0.1 1.5 0.2 3.0 0.4 10.0 1.5 15.0 3.0
Note: May vary depending on the size of the piping and the shape of the chamber. These figures are only approximate.

● Manual override
ME12E1
Turn the manual override with a screwdriver as far as it will turn
(slightly over 45°) while pressing down on it. It will lock in that
position. It does not matter in which direction the override is
turned. If the manual override is turned any further after it has
locked, it will unlock and spring back to its original position.

125EE1・125EE2
Turn the manual override with a screwdriver 45°. When the
groove in the screw head points at 45°, the valve will open and
the manual override will remain in that position. It does not matter
in which direction the override is turned. If the manual override is
turned 45° back to its original position (groove pointing
horizontally), the valve will be closed.

Closed Open

Caution: Be sure manual override is always released before


operating.

445
VACUUM PADS

Specifications

● Standard Type・Horizontal Piping


Model Horizontal piping ・fixed type (Note 3) Horizontal piping ・with built-in spring (Note 3)
Item KPHF KPHS
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2.5・3.5 10 25・30 60・80 120 2.5・3.5 10 25・30 60・80 120


Pad diameter (Note 1) mm 2×4 6・8 15 35 95 150 2×4 6・8 15 35 95 150
3.5×7 20 40・50 100 200 3.5×7 20 40・50 100 200

Tube size and piping screw size (Note 2) mm 4×2.5 6×4 Rc1/8 4×2.5 6×4 Rc1/8

Variable strokes by spring mm ─── 3 5 6 7 10 20


Spring return (1/2 stroke) force N{kgf} ─── 1.8{0.18} 2.6{0.27}1.0{0.10}3.5{0.36} 9.8{1.0} 10.8{1.1}
Pad Brass (nickel-plated) Steel (nickel-plated) Brass (nickel-plated) Steel (nickel-plated)
Main fixture parts

Case Aluminum alloy Aluminum alloy


─── ─── ─── ───
Cover (anodized) (anodized)

Material O-ring ─── Synthetic rubber: NBR ─── Synthetic rubber: NBR
Guide ─── ─── Steel (nickel-plated)
Spring ─── ─── Piano wire (zinc-plated)
Rubber pad (color) Synthetic rubber: NBR (black)・Urethane (green)・Silicone (white)・Viton (black with white markings)

● Standard Type・Vertical Piping


Model Vertical piping ・fixed type Vertical piping ・with built-in spring
Item KPVF KPVS

(Note 1)
2.5・3.5 25・30・35 2.5・3.5 25・30・35
Pad diameter mm 6・8 10・15・20 6・8 10・15・20
2×4・3.5×7 40・50 2×4・3.5×7 40・50
(Note 2) 4×2.5 6×4 4×2.5 6×4
Tube size mm
Variable strokes by spring mm ─── 3 3 5 9

VACUUM EQUIPMENT
Spring return (1/2 stroke) force N{kgf} ─── 2.4{0.24} 2.4{0.24} 1.0{0.10} 4.9{0.50}
Pad Brass (nickel-plated)
Material
Rubber pad Synthetic rubber: NBR (black)・Urethane (green)・Silicone (white)・Viton (black with white markings)
Notes: 1. All pads within a single square of pad diameter take the same fixture regardless of pad size.
2. Use tubes made piping of urethane.
3. Horizontal piping type of diameters between φ60 and φ200 can be used for vertical tubing by switching a R1/8 piping plug.

● Swivel Type ● Non-rotating Type


(Note 2)
Model Horizontal piping・fixed type Horizontal piping・with built-in spring (Note 2) Model Horizontal piping・fixed type (Note 2)
Horizontal piping・with built-in spring (Note 2)
Item KPPF KPPS Item KPLF KPLS
20 20 Pad shape Round Oval Round Oval

(Note 1)
10 25 40 60 10 25 40 60 4 × 20 4 × 20
Pad diameter mm
15 30 50 80 15 30 50 80 5 × 20 5 × 20
35 35 2 × 40 2 × 40
6 × 20 6 × 20
6 3.5 × 70 6 3.5 × 70
Tube size and piping 8 × 20 8 × 20
mm 6 × 4(M5) Rc 1/8 6 × 4(M5) Rc 1/8 Pad diameter (Note 1) mm 8 4 × 10 8 4 × 10
screw size (Note 2) 4 × 30 4 × 30
10 5 × 10 10 5 × 10
5 10 10 5 × 30 5 × 30
6 × 10 6 × 10
Variable 10 20 30 6 × 30 6 × 30
mm ───
strokes by spring 20 30 50 8 × 30 8 × 30
30 50 70 Tube size and piping
mm 4×2.5(M3)
Spring return force screw size (Note 2)
N{kgf} ─── 4.0{0.41} 14.1{1.44}
(1/2 stroke) 5
Steel Variable 10
mm
Pad Brass (nickel-plated) (nickel- strokes by spring 20
plated) 30
Main fixture parts

Main axis Steel Spring return force


N{kgf} 2.9{0.3}
Steel Steel (1/2 stroke)
Main fixture parts

Material Case Brass (nickel-plated) (nickel- Brass (nickel-plated) (nickel-


Rod Brass (nickel-plated) Brass (chrome-plated)
plated) plated)
Cover Aluminum alloy (anodized) Material Guide ─── Oil-impregnated ferroalloy
O-ring Synthetic rubber: NBR Spring ─── Stainless steel
Spring ─── Stainless steel Pad rubber (color) Synthetic rubber: NBR (black)・Urethane (green)・Silicone (white)・Viton (black with white marking)

Rubber pad (color) Synthetic rubber: NBR (black)・Urethane (green)・Silicone (white)・Viton (black with white marking) Notes: 1. All pads within a single square take the same fixture regardless of pad size.
Notes: 1. All pads within a single square of pad diameter take the same fixture regardless of pad size. 2. Vertical piping can be used by switching the horizontal piping plug and fitting.
2. Vertical piping can be used by switching the horizontal piping plug and fitting.
(For pads φ60 or φ80 in diameter, only the plug is needed to be switched.)
446
Order Codes

● Vacuum pads (with fixtures) 1 Spring Stroke


(1) KPPS spring stroke
KP
Spring stroke mm
5 10 20 30 50 70
Pad diameter
Rubber pad material
N–––––– NBR 10・15 ⃝ ⃝ ⃝ ⃝ ─ ─
S –––––– Silicone 20・25・30・35 ─ ⃝ ⃝ ⃝ ⃝ ─
U–––––– Urethane
F –––––– Viton 40・50 ─ ⃝ ⃝ ⃝ ⃝ ─
60・80 ─ ⃝ ─ ⃝ ⃝ ⃝
Spring stroke
● Only fill in this item for models KPPS and KPLS (2) KPLS spring stroke
Control & Power, Inc. - 1.877.835.5274 - www.controlandpower.com

●1 See “Spring Stroke” Table


For pads of all sizes: 5mm, 10mm, 20mm, 30mm
Pad size
●2 See “Pad Size” Table 2 Pad Size
Fixture specifications (1) Standard type (2) Swivel type (3) Non-rotating type
HF ─── Without spring, standard type, horizontal piping Model Pad type Model Pad type Model Pad type
VF ─── Without spring, standard type, vertical piping
PF ─── Without spring, swivel (universal) type 2 φ2.5 10 φ10 6 φ6
LF ─── Without spring, non-rotating type 3.5 φ3.5 15 φ15 8 φ8
HS─── Built-in spring, standard type, horizontal piping
VS ─── Built-in spring, standard type, vertical piping 2×4 2×4 (oval) 20 φ20 10 φ10
PS ─── Built-in spring, swivel (universal) type 3.5 × 7 3.5 ×7 (oval) 25 φ25 2×4 2×4 (oval)
LS ─── Built-in spring, non-rotating type
6 φ6 30 φ30 3.5 × 7 3.5 × 7 (oval)
8 φ8 35 φ35 4 × 10 4 × 10 (oval)
● Rubber pads (without fixtures) 10 φ10 40 φ40 5 × 10 5 × 10 (oval)
KP 15 φ15 50 φ50 6 × 10 6 × 10 (oval)
20 φ20 60 φ60 4 × 20 4 × 20 (oval)
Rubber pad material 25 φ25 80 φ80 5 × 20 5 × 20 (oval)
N–––––– NBR 30 φ30 6 × 20 6 × 20 (oval)
S –––––– Silicone
35 φ35 8 × 20 8 × 20 (oval)
U–––––– Urethane
F –––––– Viton 40 φ40 4 × 30 4 × 30 (oval)
Pad size 50 φ50 5 × 30 5 × 30 (oval)
●2 See “Pad Size” Table 60 φ60 6 × 30 6 × 30 (oval)
Blank ──Standard type 80 φ80 8 × 30 8 × 30 (oval)
P ─────Swivel (universal) type 95 φ95
L ─────Non-rotating type
100 φ100
Note: Swivel-type pads of sizes 60 and 80 are interchangeable with the standard type.
120 φ120
To order them, enter the order code for a standard vacuum pad.
150 φ150
200 φ200
Theoretical Lift Capacity

● Round Pads N{kg}


Degree Pad diameter mm φ2.5 φ3.5 φ6 φ8 φ10 φ15 φ20 φ25 φ30 φ35 φ40 φ50 φ60 φ80 φ95 φ100 φ120 φ150 φ200
of vacuum kPa{mmHg} Pad area Acm2 0.049 0.096 0.283 0.502 0.785 1.766
3.14 4.906 7.065 9.616 12.56 19.63 28.26 50.24 70.85 78.5 113 176.6 314
0.457 0.896 2.64 4.68 7.32 16.48 29.3 45.8 65.9 89.7 117.2 183.1 264 469 661 732 1054 1648 2930
-93.3 {-700} {0.047}
{0.091}
{0.269} {0.75}
{0.48} {1.68}
{2.99} {4.67}
{6.72}{9.15}{11.95}
{18.68}
{26.89}{48} {67} {75}{108}{168}{299}
0.392 0.768 2.26 4.02 6.28 14.13 25.1 39.2 56.5 76.9 100.5 157.0 226 402 567 628 904 1413 2512
-80 {-600} {0.040}
{0.078}
{0.231}
{0.41}
{0.64}
{1.44}
{2.56} {4.00}
{5.76}{7.84}{10.24}
{16.01}
{23.05}{41} {58} {64} {92}{144}{256}
0.327 0.640 1.89 3.35 5.24 11.78 20.9 32.7 47.1 64.1 83.8 130.9 188 335 473 524 754 1178 2094
-66.7 {-500} {0.065}
{0.033} {0.192} {0.53}
{0.34} {1.20}
{2.13} {3.33}
{4.80}{6.54}{8.54}{13.34}
{19.21}{34} {48} {53} {77}{120}{213}
0.261 0.512 1.51 2.68 4.18 9.41 16.7 26.1 37.7 51.3 66.9 104.6 151 268 378 418 602 941 1674
-53.3 {-400} {0.027}
{0.052}
{0.154}
{0.27}
{0.43}
{0.96}
{1.71} {2.67}
{3.84}{5.23}{6.83}{10.67}
{15.36}{27} {39} {43} {61} {96}{171}
0.196 0.384 1.13 2.01 3.14 7.06 12.6 19.6 28.3 38.5 50.2 78.5 113 201 283 314 452 706 1256
-40 {-300} {0.039}
{0.020} {0.20}
{0.115} {0.32}
{0.72}
{1.28} {2.00}
{2.88}{3.92}{5.12}{8.00}{11.52}{20} {29} {32} {46} {72}{128}
0.131 0.256 0.76 1.34 2.10 4.72 8.4 13.1 18.9 25.7 33.5 52.4 75 134 189 210 302 472 838
-26.7 {-200} {0.013}
{0.026}
{0.077}
{0.14}
{0.21}
{0.48}
{0.85} {1.33}
{1.92}{2.61}{3.41}{5.34}{7.68}{14} {19} {21} {31} {48} {85}
0.065 0.128 0.38 0.67 1.04 2.35 4.2 6.5 9.4 12.8 16.7 26.1 38 67 94 104 150 235 418
-13.3 {-100} {0.007}
{0.013} {0.07}
{0.038} {0.11}
{0.24}
{0.43} {0.67}
{0.96}{1.31}{1.71}{2.67}{3.84} {7} {10} {11} {15} {24} {43}
Note: All values in the table above are based on calculated values.

● Oval Pads N{kg}


Degree Pad diameter mm 2×4 3.5×7 4×10 5×10 6×10 4×20 5×20 6×20 8×20 4×30 5×30 6×30 8×30
of vacuum kPa{mmHg} Pad area Acm2 0.0714 0.2187 0.3657 0.4463 0.5227 0.7657 0.9963 1.1227 1.4627 1.1657 1.4463 1.7227 2.2627
0.666 2.040 3.412 4.16 4.88 7.14 9.30 10.47 13.65 10.88 13.49 16.07 21.11
-93.3 {-700} {0.068} {0.208} {0.348} {0.42} {0.50} {0.73} {0.95} {1.07} {1.39} {1.11} {1.38} {1.64} {2.15}
0.571 1.750 2.926 3.57 4.18 6.13 7.97 8.98 11.70 9.33 11.57 13.78 18.10
-80 {-600} {0.058} {0.178} {0.298} {0.36} {0.43} {0.62} {0.81} {0.92} {1.19} {0.95} {1.18} {1.4} {1.85}
0.476 1.459 2.439 2.98 3.49 5.11 6.65 7.49 9.76 7.78 9.65 11.49 15.09
-66.7 {-500} {0.049} {0.149} {0.249} {0.30} {0.36} {0.52} {0.68} {0.76} {0.99} {0.79} {0.98} {1.17} {1.54}
0.381 1.166 1.949 2.38 2.79 4.08 5.31 5.98 7.80 6.21 7.71 9.18 12.06
-53.3 {-400} {0.039} {0.119} {0.199} {0.24} {0.28} {0.42} {0.54} {0.61} {0.8} {0.63} {0.79} {0.94} {1.23}
0.286 0.875 1.463 1.79 2.09 3.06 3.99 4.49 5.85 4.66 5.79 6.89 9.05
-40 {-300} {0.029} {0.089} {0.149} {0.18} {0.21} {0.31} {0.41} {0.46} {0.6} {0.48} {0.59} {0.7} {0.92}
0.191 0.584 0.976 1.19 1.40 2.04 2.66 3.00 3.91 3.11 3.86 4.60 6.04
-26.7 {-200} {0.019} {0.059} {0.099} {0.12} {0.14} {0.21} {0.27} {0.31} {0.4} {0.32} {0.39} {0.47} {0.62}
0.095 0.291 0.486 0.59 0.70 1.02 1.33 1.49 1.95 1.55 1.92 2.29 3.01
-13.3 {-100} {0.010} {0.030} {0.050} {0.06} {0.07} {0.10} {0.14} {0.15} {0.2} {0.16} {0.2} {0.23} {0.31}
Note: All values in the table above are based on calculated values.
447
Rubber Pads: Materials and Their Properties

● Rubber Pads: Materials and Their Properties


Item Tensile Oil resistance Oil resistance Weather Ozone Heat Cold Resistance Abrasion Electrical Shear Adhesiveness Resistance Hardness
Extention to to gas
Material strength (gasoline) (benzol) resistance resistance resistance resistance
chemicals resistance insulation resistance (metal) permeation HS
NBR (N) ◎ ◎ ◎ △ ⃝ ⃝ ⃝ × ◎ ⃝ ⃝ ⃝ ⃝ ⃝ 70±5
Silicone (S) △ ⃝ △ △ ⃝ ⃝ ⃝ ◎ ◎ × ◎ × × △ 50±5
Standard
Urethane (U) ◎ ◎ ◎ ⃝ ◎ ◎ × ⃝ ◎ ◎ ◎ ◎ △ ◎ 70±5
Viton (F) ◎ ⃝ ◎ ◎ ◎ ◎ ⃝ ⃝ ◎ ⃝ ◎ ⃝ △ ⃝ 70±5
Comment: ◎Excellent ⃝Acceptable in some cases △Substandard ×Unacceptable
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Mass

● Standard Type g
Pad diameter mm
2.5 3.5 2 × 4 3.5 × 7 6 8 10 15 20 25 30 35 40 50 60 80 95 100 120 150 200
Model
KPHF 3 3 3 3 11 11 14 15 16 31 31 36 37 47 216 224 234 235 573 619 1085
Fixed
type

KPVF 8 8 8 8 9 9 13 14 15 33 34 34 36 36 ─ ─ ─ ─ ─ ─ ─
KPHS 5 6 6 6 21 21 35 36 36 73 73 77 75 86 368 374 384 386 800 843 1311
Spring
type

KPVS 9 9 9 9 10 10 24 25 26 50 50 51 53 63 ─ ─ ─ ─ ─ ─ ─

● Swivel Type g ● Non-rotating Type g


Model Mass Model Mass Model Mass Model Mass
KPPF-10 38 KPPS-50-10 132 KPLF-6 13 KPLS-5 × 10-5 39
KPPF-15 38 KPPS-50-20 142 KPLF-8 13 KPLS-5 × 10-10 43
KPPF-20 52 KPPS-50-30 152 KPLF-10 13 KPLS-5 × 10-20 52
KPPF-25 52 KPPS-50-50 172 KPLF-2 × 4 13 KPLS-5 × 10-30 60
Fixed type

KPPF-30 55 KPPS-60-10 702 KPLF-3.5 × 7 13 KPLS-6 × 10-5 39


Spring type

KPPF-35 55 KPPS-60-30 779 KPLF-4 × 10 13 KPLS-6 × 10-10 43


KPPF-40 101 KPPS-60-50 840 KPLF-5 × 10 13 KPLS-6 × 10-20 52

VACUUM EQUIPMENT
Fixed type

KPPF-50 104 KPPS-60-70 902 KPLF-6 × 10 13 KPLS-6 × 10-30 60


KPPF-60 436 KPPS-80-10 710 KPLF-4 × 20 15 KPLS-4 × 20-5 42
KPPF-80 445 KPPS-80-30 787 KPLF-5 × 20 15 KPLS-4 × 20-10 46
KPPS-10-5 61 KPPS-80-50 848 KPLF-6 × 20 15 KPLS-4 × 20-20 55
KPPS-10-10 66 KPPS-80-70 910 KPLF-8 × 20 15 KPLS-4 × 20-30 63
KPPS-10-20 76 KPLF-4 × 30 16 KPLS-5 × 20-5 42
KPPS-10-30 86 KPLF-5 × 30 16 KPLS-5 × 20-10 46
KPPS-15-5 61 KPLF-6 × 30 16 KPLS-5 × 20-20 55
KPPS-15-10 66 KPLF-8 × 30 16 KPLS-5 × 20-30 63
KPPS-15-20 76 KPLS-6-5 39 KPLS-6 × 20-5 42
KPPS-15-30 86 KPLS-6-10 43 KPLS-6 × 20-10 46
KPPS-20-10 80 KPLS-6-20 52 KPLS-6 × 20-20 55
Spring type

KPPS-20-20 90 KPLS-6-30 60 KPLS-6 × 20-30 63


KPPS-20-30 100 KPLS-8-5 39 KPLS-8 × 20-5 42
KPPS-20-50 122 KPLS-8-10 43 KPLS-8 × 20-10 46
KPPS-25-10 80 KPLS-8-20 52 KPLS-8 × 20-20 55
KPPS-25-20 90 KPLS-8-30 60 KPLS-8 × 20-30 63
Spring type

KPPS-25-30 100 KPLS-10-5 39 KPLS-4 × 30-5 42


KPPS-25-50 122 KPLS-10-10 43 KPLS-4 × 30-10 46
KPPS-30-10 80 KPLS-10-20 52 KPLS-4 × 30-20 55
Spring type

KPPS-30-20 90 KPLS-10-30 60 KPLS-4 × 30-30 63


KPPS-30-30 100 KPLS-2 × 4-5 39 KPLS-5 × 30-5 42
KPPS-30-50 122 KPLS-2 × 4-10 43 KPLS-5 × 30-10 46
KPPS-35-10 80 KPLS-2 × 4-20 52 KPLS-5 × 30-20 55
KPPS-35-20 90 KPLS-2 × 4-30 60 KPLS-5 × 30-30 63
KPPS-35-30 100 KPLS-3.5 × 7-5 39 KPLS-6 × 30-5 42
KPPS-35-50 122 KPLS-3.5 × 7-10 43 KPLS-6 × 30-10 46
KPPS-40-10 128 KPLS-3.5 × 7-20 52 KPLS-6 × 30-20 55
KPPS-40-20 138 KPLS-3.5 × 7-30 60 KPLS-6 × 30-30 63
KPPS-40-30 148 KPLS-4 × 10-5 39 KPLS-8 × 30-5 42
KPPS-40-50 168 KPLS-4 × 10-10 43 KPLS-8 × 30-10 46
KPLS-4 × 10-20 52 KPLS-8 × 30-20 55
KPLS-4 × 10-30 60 KPLS-8 × 30-30 63
Note: The figures in the tables above are for fixtures with rubber pads (NBR) attached.

448
Dimensional Drawings for Rubber Pads (Unit: mm)

●KP-2 φE Model
Code
A B C E F G Y ●KP-6
●KP-3.5 φF KP-2 2.5 3.3 2 3.5 2.5 0.9 0.7 φ6
φ2.8
KP-3.5 3.5 3.5 2 3.5 2.5 1.6 0.5

3
6
φG
φA Y

φ2

1.1
φ6
●KP-2×4 Model
Code
A B C D E F
φE
●KP-3.5×7 KP-2×4 5.5 4 2 2 3.5 2.4
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φF
●KP-8
KP-3.5×7 8 4.5 2 2.5 3.5 2.4
φ6
Code
Model G H J K Y φ2.8
C
B

KP-2×4 1.8 4 3.5 2 1.0


D

3
φG KP-3.5×7 2 7 4.5 3.5 1.5

5.5
Y

1.3
A φ2
φ8
K
J

●KP-10 ●KP-30
φE φE
●KP-15 ●KP-35
φF φF
●KP-20 ●KP-40

C
C

●KP-25 ●KP-50

B
B

φG φG

D
Y

φA φA

Model Code A B C D E F G Y Model Code A B C D E F G Y


KP-10 10 8 4 1.6 10 4.8 6 1.5 KP-30 30 12 5 5 15 5.8 10.2 2.6
KP-15 15 8 3 2 11 4.8 8 1.2 KP-35 35 14 6 5 15 5.8 10.2 1.8
KP-20 20 10 4 2.6 14 4.8 10.5 1.6 KP-40 40 14 6 6 16 5.8 10.2 2.6
KP-25 25 14 4 5 15 5.8 10.5 2.0 KP-50 50 15 6.5 7 24 8 20 3.1

φ20.5
●KPP-10 ●KPP-15 ●KPP-20 φ17
●KPP-25 φ14.3
φ10.4
φ10.4 ●KPP-30
φ9
φ9 ●KPP-35
3

φ7.4
φ7.4 5.5
1.4

1.5

B
3
1.4

1.8

4.4
3.4

0.5
0.5

φ12
φ6 φ6
φA
φ10 φ15

Model Code A B
KPP-20 20 9
KPP-25 25 9
KPP-30 30 10.5
●KPP-40 φE
KPP-35 35 10.5
●KPP-50 φL
●KP-60 φF M16×1.5
●KP-80
N

●KP-120 φE
●KP-95 ●KP-150
C

φ50
B

●KP-100 ●KP-200 φ17.4


M

3.2

φG
1

φA
8.8

C
B

Model Code A B C E F G L M N φ30


KPP-400 40 10.5 5.7 32.5 24.3 16 28 2 3.5
φA
KPP-500 50 12 5.9 32.5 24.3 16 28 2 3.5
KP-600 60 15 7 60.5 48.3 26 54 3 4 Model Code A B C E
KP-800 80 18 10 60.5 48.3 26 54 3 4 KP-120 120 24 13.3 100
KP-950 95 21 8.4 60.5 48.3 26 54 3 4 KP-150 150 27 10.4 100
KP-100 100 22 8 60.5 48.3 26 54 3 4 KP-200 200 32 11.9 146

449
Dimensional Drawings for Rubber Pads (Unit: mm)

●KPL-6 ●KPL-8 ●KPL-10 ●KPL-2×4

φ5 φ5 φ5 φ5
φ3.5 φ3.5 φ3.5 φ3.5

2
2
2
2

4
4
4

1.5
1.5
1.5
1.5

5
7.5
7.5
7.5
7.5

2
2
2
2

φ2 φ2 φ2 1.5
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φ6 φ8 φ10 10
9 4
9
9

φ7 φ7

7
2

4
7
4

φ7 φ7
7
4

7
4

●KPL-3.5×7 ●KPL-4×20
●KPL-4×10 ●KPL-5×20 20
●KPL-5×10 φ5 ●KPL-6×20
●KPL-6×10 φ3.5 ●KPL-8×20 φ3.5
2

2
1.5
5

1.5
5
7.5

7.5

VACUUM EQUIPMENT
2

2
G φ2
10
H 20

φ15
K

5
J

φ φ10
7
K
7

Model Code G H K Model Code K J


KPL-3.5×7 1.5 7 3.5 KPL-4×20 4 7
KPL-4×10 2 10 4 KPL-5×20 5 7
KPL-5×10 2 10 5 KPL-6×20 6 7
KPL-6×10 2 10 6 KPL-8×20 8 7

●KPL-4×30 30
●KPL-5×30
●KPL-6×30 φ3.5
●KPL-8×30
2
2

1.5
7.5
3

φ2

30
20

Model Code K J
KPL-4×30 4 7 φ10
KPL-5×30 5 7 φ15
K
5

KPL-6×30 6 7
KPL-8×30 8 7

450
Dimensional Drawings for the KPHF Series (Unit: mm)

●2・3.5 ●6・8
2×4・3.5×7
M4×0.7
M3×0.5 10
5 Depth: 6
Depth: 5

11.5
5.8

18
11
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φ8.5
10.2

8.5
12.5
16.7
φ3

22

B
φ5
φA

φA

Item Pad diameter Total length Appropriate


Pad type A B tube size
KPHF-2 φ2.5 20 Item Pad diameter Total length Appropriate
Round pad A B tube size
KPHF-3.5 φ3.5 20.2 Urethane tube Pad type
KPHF-2×4 2 ×4 20.7 4 ×2.5 KPHF-6 6 28 Urethane tube
Oval pad Round pad 6 ×4
KPHF-3.5×7 3.5 ×7 21.2 KPHF-8 8 27.5

●10・15・20 ●25・30・35・40・50

E D
10 M4×0.7
Depth: 6
F
11.5

20
18
φC

φ8.5
14
20
10.5
15

31
22.5

φ5
φ5

B
B

φA
φA

Item Pad diameter Total length Appropriate


A B
C D E F
Pad type tube size

Item Pad diameter Total length Appropriate KPHF-25 25 45 M5×0.8


11 12 13.9
Pad type A B tube size KPHF-30 30 43 Depth: 10 Urethane
KPHF-10 10 30.5 Round pad KPHF-35 35 45 tube
Urethane tube M8×1
Round pad KPHF-15 15 30.5 6×4
KPHF-40 40 45 12 14 16.5 6×4
Depth: 12
KPHF-20 20 32.5 KPHF-50 50 47

451
Dimensional Drawings for the KPHF Series (Unit: mm)

●60・80・95・100

Rc1/8
(With plug)
21 M16×1.5
(Width across flats)

22
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(Width across flats)


6
30

Rc1/8
B

20

D
C

φA

Item Pad diameter Total length Pad length Port position


Pad type A B C D
KPHF-60 60 70 20 30
KPHF-80 80 73 23 33
Round pad
KPHF-95 95 76 26 36
KPHF-100 100 77 27 37
Comment: Vertical piping can be used by switching the plug.

VACUUM EQUIPMENT
●120・150・200

Rc1/8 M16X1.5
(With plug)
21
(Width across flats)
22
(Width across flats)
6
30

Rc1/8
B

20

D
C

φA

Item Pad diameter Total length Pad length Port position


Pad type A B C D
KPHF-120 120 74 24 34
Round pad KPHF-150 150 77 27 37
KPHF-200 200 82 32 42
Comment: Vertical piping can be used by switching the plug.

452
Dimensional Drawings for the KPVF Series (Unit: mm)

●2・3.5 ●6・8
2×4・3.5×7

50 50

9.9 9.9

φ3
φ5

5.2

5.2
10

10
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8.5

10
12.7 12.7 4.9 12.7 12.7 4.9
4.8 4.8

2
3
B

B
15

2
3

15
M5×0.5

φA M5×0.5
7 (Width across flats)
8.1 (Diagonal)
7 (Width across flats) φA
8.1 (Diagonal)

Item Pad diameter Total length Appropriate


Pad type A B tube size
KPVF-2 φ2.5 26.8 Item Pad diameter Total length Appropriate
Round pad
KPVF-3.5 φ3.5 27 Pad type A B tube size
Urethane tube
KPVF-2×4 2 ×4 27.5 4 ×2.5 KPVF-6 6 31 Urethane tube
Oval pad Round pad 6 ×4
KPVF-3.5×7 3.5 ×7 28 KPVF-8 8 30.5

●10・15・20 ●25・30・35・40・50

φ5

φ5 10

M10×1.5
10

M8×1.25
22

35

B
4

17

14 (Width across flats)


B
25

16.2 (Diagonal)

10 (Width across flats)


11.5 (Diagonal)

φA
φA

Item Pad diameter Total length Appropriate


Pad type A B tube size
Item Pad diameter Total length Appropriate KPVF-25 25 59
Pad type A B tube size KPVF-30 30 58
KPVF-10 10 43 KPVF-35 35 60 Urethane tube
Round pad 6 ×4
KPVF-15 15 43 Urethane tube KPVF-40 40 60
Round pad 6 ×4
KPVF-20 20 45 KPVF-50 50 62

453
Dimensional Drawings for the KPPF Series (Unit: mm)

●10・15 ●20・25・30・35

Plug
Plug M10×1.5
M10×1.5
14 14
14 14 (Width across flats)
(Width across flats)
(Width across flats)

3
(Width across flats)

24.5
4

14.5 17
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24.5

17
4

B
B

13

D
D

C
C

30° 30°
Barb fitting Barb fitting
φA φA

17 17
φ4.7

φ4.7
Item Pad diameter Total length Port position Appropriate
Pad type A B C D tube size
Item Pad diameter Total length Port position Appropriate KPPF-20 20
55 20.5 30.5
Pad type A B C D tube size Round KPPF-25 25 Urethane tube
Round KPPF-10 10 46.5 13.5 22 pad KPPF-30 30 6 ×4
Urethane tube
6 ×4 56.5 22 32
pad KPPF-15 15 47.5 14.5 23 KPPF-35 35
Comment: Vertical piping can be used by switching the plug and the barb fitting. Comment: Vertical piping can be used by switching the plug and the barb fitting.

VACUUM EQUIPMENT
●40・50 ●60・80

Rc1/8
(With plug)

21 M16×1.5
Plug (Width across flats)
M10×1.5
14 14
23

(Width across flats)


6

(Width across flats)


32
3
φ4.7
24.5

17

22
35

(Width across Rc1/8


B

flats)
24.5

17
B

D
D

C
C

Barb fitting 30° 30°


φA φA

Item Pad diameter Total length Port position Appropriate Item Pad diameter Total length Port position
C
Pad type A B C D tube size Pad type A B C D
Round KPPF-40 40 71 26.5 46.5 Urethane tube Round KPPF-60 60 96 38 64
pad KPPF-50 50 72.5 28 48 6 ×4 pad KPPF-80 80 99 41 67
Comment: Vertical piping can be used by switching the plug and the barb fitting. Comment: Vertical piping can be used by switching the plug and the barb fitting.

454
Dimensional Drawings for the KPLF Series (Unit: mm)

●6・8・10 ●4 × 20
2×4 5 × 20
3.5 × 7 6 × 20
4 × 10 8 × 20 Plug
Plug M7×1
M7×1
5 × 10 4 × 30
10 10
6 × 10 5 × 30

3.5
(Width across flats)

3.5
(Width across flats)
6 × 30

φ2.9
φ2.9

22.5

13
3
22.5

13
8 × 30

40
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40

□7 □7

17.5
17.5

12 12

Barb fitting Barb fitting

X
X

Y
Y

Item Pad diameter Appropriate Item Pad diameter Appropriate


Pad type X ×Y tube size Pad type X ×Y tube size
KPLF-6 φ6 KPLF-4 × 20 4 × 20
Round pad KPLF-8 φ8 KPLF-5 × 20 5 × 20
KPLF-10 φ10 KPLF-6 × 20 6 × 20
Urethane Urethane
KPLF-2 × 4 2×4 KPLF-8 × 20 8 × 20
tube Oval pad tube
KPLF-3.5 × 7 3.5 × 7 KPLF-4 × 30 4 × 30
4 × 2.5 4 × 2.5
Oval pad KPLF-4 × 10 4 × 10 KPLF-5 × 30 5 × 30
KPLF-5 × 10 5 × 10 KPLF-6 × 30 6 × 30
KPLF-6 × 10 6 × 10 KPLF-8 × 30 8 × 30
Comment: Vertical piping can be used by switching the plug and the barb fitting. Comment: Vertical piping can be used by switching the plug and the barb fitting.

455
Dimensional Drawings for the KPHS Series (Unit: mm)

●2・3.5 ●6・8
2 × 4・3.5 × 7
18

M9×1

2.5
11 12 (Width across flats)
M5×0.5 13.9 (Diagonal)
7 (Width across flats)

3
8.1 (Diagonal)

22.5
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33
3

19
25

44
33

B
B
φ3

φ5

5 (Stroke)
3 (Stroke)

φA

5
φA
(Width across flats)
10
(Width across flats)

Item Pad diameter Total length Appropriate


Spring stroke
Pad type A B tube size
Round KPHS-2 φ2.5 36 Item Pad diameter Total length Appropriate
Spring stroke
pad KPHS-3.5 φ3.5 36.2 Urethane tube Pad type A B tube size
3
KPHS-2 × 4 2×4 36.7 4 × 2.5 Round KPHS-6 6 50 Urethane tube
Oval pad 5
KPHS-3.5 × 7 3.5 × 7 37.2 pad KPHS-8 8 49.5 6×4

VACUUM EQUIPMENT
●10・15・20 ●25・30・35・40・50

19

18
M14×1.5
17 (Width across flats)
4

M11×1 19.6 (Diagonal)


3.5

14 (Width across flats)


16.2 (Diagonal)
4
3

43
29.5

58

72
41

B
52.5

7 (Stroke)
φ5
φ5

6 (Stroke)

10
(Width across flats) φA
φA
12
(Width across flats)

Item Pad diameter Total length Appropriate


Spring stroke
Pad type A B tube size
Item Pad diameter Total length Appropriate KPHS-25 25 85
Spring stroke
Pad type A B tube size KPHS-30 30 83
Round Urethane tube
KPHS-10 10 60.5 KPHS-35 35 85 7
Round Urethane tube pad 6×4
KPHS-15 15 60.5 6 KPHS-40 40 85
pad 6×4
KPHS-20 20 62.5 KPHS-50 50 87

456
Dimensional Drawings for the KPHS Series (Unit: mm)

●60・80・95・100

Rc1/8 M27×1.5
(With plug)

7
32
(Width across flats) Rc1/8
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35

8
(Stroke)
B
10

22
20

(Width across flats)

D
C

φA

Item Pad diameter Total length Pad height Port position


Spring stroke
Pad type A B C D
KPHS-60 60 92 20 30
KPHS-80 80 95 23 33
Round pad 10
KPHS-95 95 98 26 36
KPHS-100 100 99 27 37
Comment: Vertical piping can be used by switching the plug.

●120・150・200

Rc1/8 M27×1.5
(With plug)
7

32
(Width across flats)
50

Rc1/8
20 (Stroke)
B

22
(Width across flats)
20

D
C

φA

Item Pad diameter Total length Pad height Port position


Spring stroke
Pad type A B C D
KPHS-120 120 121 24 34
Round pad KPHS-150 150 124 27 37 20
KPHS-200 200 129 32 42
Comment: Vertical piping can be used by switching the plug.

457
Dimensional Drawings for the KPVS Series (Unit: mm)

●2・3.5 ●6・8
2 × 4・3.5 × 7

50 50
9.9 9.9
φ3 φ5

10
5.2

5.2
10
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13

13
12.7 4.8 12.7 4.9 12.7 4.8 12.7 4.9
30

29
B

2
2
3

3
13

13
8 (Width across flats) 8 (Width across flats)
9.2 (Diagonal) 9.2 (Diagonal)
4

M6×0.75 M6×0.75
3 (Stroke)

3 (Stroke)
φA
φA

Item Pad diameter Total length Appropriate


Spring stroke
Pad type A B tube size
KPVS-2 φ2.5 33.3 Item Pad diameter Total length Appropriate
Round pad Spring stroke
KPVS-3.5 φ3.5 33.5 Urethane tube Pad type A B tube size
4
KPVS-2 × 4 2×4 34 4 × 2.5 KPVS-6 6 35 Urethane tube
Oval pad Round pad 3
KPVS-3.5 × 7 3.5 × 7 34.5 KPVS-8 8 34.5 6×4

VACUUM EQUIPMENT
●10・15・20 ●25・30・35・40・50

φ5

φ5
10
10

M14×1.5

M11×1
4
5

33
56
3

45

B
21

17 (Width across flats)


B

19.6 (Diagonal)

14 (Width across flats)


16.2 (Diagonal)
9 (Stroke)
5 (Stroke)

φA
φA

Item Pad diameter Total length Appropriate


Spring stroke
Pad type A B tube size
Item Pad diameter Total length Appropriate KPVS-25 25 70
Spring stroke
Pad type A B tube size KPVS-30 30 68
Round Urethane tube
KPVS-10 10 53 KPVS-35 35 70 9
Round Urethane tube pad 6×4
KPVS-15 15 53 5 KPVS-40 40 70
pad 6×4
KPVS-20 20 55 KPVS-50 50 72

458
Dimensional Drawings for the KPPS Series (Unit: mm)

●10・15 M14×1.5
●20・25・30・35 Plug M14×1.5
Plug
17 17
(Width across flats) (Width across flats)

31.6
31.6

20
20

5
5

Spring stroke
Spring stroke

S
C
S
C

14 14
B

B
(Width across flats) (Width across flats)
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D
30°
30°
Barb fitting φA
Barb fitting φA

17 17

φ4.7
φ4.7

Item Pad diameter Spring stroke Total length Port position Appropriate Item Pad diameter Spring stroke Total length Port position Appropriate
Pad type A S B C D tube size Pad type A S B C D tube size
15 169.5 47.5 10 87 56.5
10 178.5 56.5 KPPS-20 20 20 107 76.5
KPPS-10 10 22 30.5
20 196.5 76.5 KPPS-25 25 30 127 96.5
Urethane Urethane
Round 30 118.5 96.5 Round 50 167 136.5
tube tube
pad 15 170.5 47.5 pad 10 88.5 56.5
6×4 6×4
10 179.5 56.5 KPPS-30 30 20 108.5 76.5
KPPS-15 15 23 32.5
20 199.5 76.5 KPPS-35 35 30 128.5 96.5
30 119.5 96.5 50 168.5 136.5
Comment: Vertical piping can be used by switching the plug and barb fitting. Comment: Vertical piping can be used by switching the plug and barb fitting.

●40・50 ●60・80
Rc1/8 M30×1.5
Plug (With plug) 36
M14×1.5 (Width across flats)
17
(Width across flats)
46

10
31.6
20

(Spring stroke)
5
Spring stroke

S
S

Rc1/8
C

14
B

(Width across flats) 22


B

(Width across flats)


φ4.7

17
D
D

30°
Barb fitting 30°
φA
φA

Item Pad diameter Spring stroke Total length Port position Appropriate Item Pad diameter Spring stroke Total length Port position
Pad type A S B C D tube size Pad type A S B C D
10 103 56.5 10 138 74
20 123 76.5 30 174 110
KPPS-40 40 46.5 KPPS-60 60 64
30 143 96.5 50 204 140
Urethane
Round 50 183 136.5 Round 70 234 170
tube
pad 10 104.5 56.5 pad 10 141 74
6×4
20 124.5 76.5 30 177 110
KPPS-50 50 48.5 KPPS-80 80 67
30 144.5 96.5 50 207 140
50 184.5 136.5 70 237 170
Comment: Vertical piping can be used by switching the plug and barb fitting. Comment: Vertical piping can be used by switching the plug.

459
Dimensional Drawings for the KPLS Series (Unit: mm)

●6・8・10
Plug M14×1.5
2×4 17
3.5 × 7 (Width across flats)

4 × 10

26.4
20

5
5 × 10

Spring stroke
6 × 10

S
C
B
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□7
φ2.9
17.5

12

Barb fitting
X

Item Pad diameter Spring stroke Total length Appropriate


Pad type X ×Y S B C tube size
5 159 41.5
KPLS-6 φ6
10 169 51.5
Round pad KPLS-8 φ8
20 189 71.5
KPLS-10 φ10
30 109 91.5

5 159 41.5 Urethane


KPLS-2 × 4 2 ×4 tube
KPLS-3.5 × 7 3.5 × 7 10 169 51.5 4 × 2.5
Oval pad KPLS-4 × 10 4 × 10
KPLS-5 × 10 5 × 10 20 189 71.5

VACUUM EQUIPMENT
KPLS-6 × 10 6 × 10
30 109 91.5

Comment: Vertical piping can be used by switching the plug and barb fitting.

●4 × 20
5 × 20 Plug M14×1.5
6 × 20 17
(Width across flats)
8 × 20
Spring stroke 26.4
20

4 × 30
5

5 × 30
6 × 30
S
C

8 × 30
B

□7
φ2.9
17.5

12

Barb fitting
X

Item Pad diameter Spring stroke Total length Appropriate


Pad type X ×Y S B C tube size

KPLS-4 × 20 4 × 20 15 159 41.5


KPLS-5 × 20 5 × 20
KPLS-6 × 20 6 × 20
10 169 51.5 Urethane
KPLS-8 × 20 8 × 20
Oval pad tube
KPLS-4 × 30 4 × 30
20 189 71.5 4 × 2.5
KPLS-5 × 30 5 × 30
KPLS-6 × 30 6 × 30
KPLS-8 × 30 8 × 30 30 109 91.5

Comment: Vertical piping can be used by switching the plug and barb fitting.

460
Dimensional Drawings for Rubber Pad Fit (Unit: mm)

●KP-2 ●KP-6 ●KP-10 ●KP-15


●KP-3.5 ●KP-8 ●KP-20
M5×0.8
●KP-2 × 4 M5×0.8

●KP-3.5 × 7
φ10
φ10

3
φ2 M5×0.8
2

Cannot be chamfered
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φ2 M5×0.8
φ1.5 φ2.3

1.2
φ2.7 +0.1
0 φ3.5 +0.1 φ4

9.8
0

3.6

2.5
9.5
+0.3
0
φ5.2 ±0.05

1.5
φ6 ±0.1 φ8

●KP-25 M6×1
●KP-50
●KP-30
●KP-35
●KP-40
φ11
φ11 M6×1

φ18
φ8.1
φ6.1 φ2
M6×1
φ2 M6×1

14
7
6
2.5

3
14
3

90°
φ12
φ10
φ20

90°

●KPL-4 × 20∼8 × 30 ●KPL-6∼10


●KPL-2 × 4∼6 × 10
φ15 φ4

φ2 φ2
2

2
2

1.5

1.5
2

φ3.5 +0.0 05
2

5 +0.1
0
φ3.5 +0.05
0 C0.2
φ7 −0.01
φ10
4

●KP-60・80 ●KP-120∼200
φ60.9 ±0.1
●KPP-95・100
+0.1
φ48.4 0
45°
M16×1.5
C-shaped snap ring for shaft φ13.5 +0.1
0 O-ring
1.5

+0.25

JISB2401
+0.1

JIS2804 nominal rating: 14


0

P12.5
6

3.2

12
3

C1.5
1.15 +0.14
3
0

φ26
φ6
φ54
0
φ13.4
φ60.4±0.1 −0.1

φ14

461
Dimensional Drawings for Rubber Pad Fit (Unit: mm)

●KPP-10・15 ●KPP-20∼35 ●KPP-40・50

φ20.7±0.1
+0.1
φ7.4 ー0 φ14.4 +0.1
ー0
45°
φ32.7±0.1
1.4

+0.1
φ24.4
0.3

ー0
45°

1.5
3 5.5
0.5

3 3.5

1.5

3.5
φ6
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R0.5

1 4.5
6.5
φ9

2
φ10.5±0.05
C1.2 R1
C1.5
φ12
φ16
φ17
φ28
φ20.3±0.1
φ32.3±0.1

VACUUM EQUIPMENT

462
Proper Handling and Precautions

Vacuum Pads

Piping Replacing Rubber Pads


To keep flow resistance to a minimum, piping should be as When replacing a rubber pad, refer to the “Dimensional Drawings for the Rubber Pad Fit” while removing the rubber, screw and fixture.
short and straight as possible. Do not use coiled piping. When installing a fixture to the rubber pad of type KP-15 through KP-40, tighten the screw slowly until the fixture and the
rubber pad fit close together, then tighten the screw an additional half-turn (180°).
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Each rubber pad type for KP-10 through KP-50 is a different size. Refer to the “Dimensional Drawings for the Rubber Pad Fit.”
(For detailed information, ask us.)

General Precautions
Attach only one vacuum pad to each micro ejector. If two or more pads are connected to a single micro ejector, pads are more
likely to miss workpieces, and it will take longer for the pads to reach the degree of vacuum setting.

Installation Angle of Suction Pads


As a rule, the suction pad should pull straight up on the
workpiece, and not at an oblique angle or vertically. If the
pad must be installed in such a manner that it does not pull
straight up on the workpiece, consider an ample safety
factor in its lift capacity. (See page 411.)

Tightening Torque
When installing a vacuum pad, refer to Tightening torque
the table on the right to find out the Model Screw size
N・cm{kgf・cm}
proper torque for tightening the nut. M3×0.5 0.31{3.0}
KPHF-2∼3.5×7
KPHF-6・8 M4×0.7 0.71{7.0}
KPHF-10・20 M4×0.7 0.71{7.0}
KPHF-25・30 M5×0.8 1.53{15.0}
KPHF-35∼50 M8×1 7.14{70.0}
KPHF-60∼200 M16×1.5 61.2{600}
KPVF-2∼3.5×7 M5×0.5 3.57{35.0}
KPVF-6・8 M5×0.5 3.57{35.0}
KPVF-10∼20 M8×1.25 7.14{70.0}
KPVF-25∼50 M10×1.5 22.4{220}
KPPF-10∼50 M10×1.5 9.18{90.0}
KPPF-60・80 M16×1.5 61.2{600}
KPPF- all types M7×1 6.12{60.0}
KPHS-2∼3.5×7 M5×0.5 0.61{6.0}
KPHS-6・8 M9×1 7.14{70.0}
KPHS-10∼20 M11×1 9.18{90.0}
KPHS-25∼50 M14×1.5 13.3{130}
KPHS-60∼200 M27×1.5 204{2000}
KPVS-2∼3.5×7 M6×0.75 2.04{20.0}
KPVS-6・8 M6×0.75 2.04{20.0}
KPVS-10∼20 M11×1 9.18{90.0}
KPVS-25∼50 M14×1.5 13.3{130}
KPPS-10∼50 M14×1.5 30.6{300}
KPPS-60・80 M30×1.5 306{3000}
KPLS- all types M14×1.5 13.3{130}

463

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