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09
Senior Metrology Engineer
TOPICS COVERED
Source
Port-1 Port-2
a1 b2
b1 DUT
a2
a0 b0 b3 a3
Source
Port-1 Port-2
a1’ b2’
b1’ DUT
a2’
a1 S21 b2
• a1 = incident wave at port-1
• a2 = incident wave at port-2
S11 S22
• b1 = reflected/transmitted wave at port-1
• b2 = reflected/transmitted wave at port-2 b1 S12 a2
a0 = k1 * a1 + δ b0 = k2*b1 + r
b3 = k3*b2 + x a3 = k4*a2 + m ≠ 0
Frequency Response
a0 b0 b3 a3
Crosstalk
LEAKAGE
b1 b2
DUT
Frequency a1 a2
Source Load
Mismatch Mismatch
Frequency Response
Minimized
• Systematic Errors Removed • Errors Remaining After Calibration
• Port Match • Noise and Residuals
• Directivity • Receiver Linearity
• Tracking • Drift and Stability
• Main Leakage Paths • Connector Repeatability
• Lower Level Leakage Paths
e10
Ref a
m
b m e00 a
e11
a
Test b
e e e01
m e00 10 10 a
1 e11 a
( m e00 )(1 e11 a ) e10e01 a e00 = directivity
m e00 e11 a ( m e00 ) e10e01 a e11 = source match
m A a B C a m
where A e10e01 e11e00 ; B e00 ; C e11
Algebraic form
m1 a 1 b c m11
m2 a 2 b c m22 (4)
m3 a 3 b c m33
Matrix form
m1 1 a m1
m 2 2 b m 2 (5)
c
m3 3 m3
ZC ; Delay ; Loss ZT
SHORT
LOAD (Fixed)
SLIDING LOAD
Flat
Short
l Shim +
Flat
= Offset ~180° from
Short Short Flat Short
4
Fixed
Test Port Load
l Shim +
Fixed
=
Offset
Load Load
4
• Primary Standards
• Calculable from physical properties
• Directly traceable through physical properties
• Used in highest level (primary) calibrations in Metrology Labs
• Examples - Short, Air-Line
• Transfer Standards
• Measured Electrically with respect to Primary Standards
• Examples - Loads, Sliding Loads, Open*, Electronic Calibration Modules
* E M
* * E * M
*T *T
Least Squares (6)
E
1
* * * M
*T *T
e30
DUT
Port - 1 Port - 2
a1 b2
a0 b3
1 S21 e10-32
e00 e11 S11 S22 e22e
e10e01 S12
b0
b1 a2
e00 = Directivity
b0 S11 - e22e S
e11 = Port-1 Source Match S11M = = e00 + (e10e01) (7)
a0 1 - e11S11 - e22eS22 + e11e22e S
(e10e01) = Reflection Tracking
b3 S21
(e10-32) = Transmission Tracking S21M = = e30 + (e10-32) (8)
a0 1 - e11S11 - e22eS22 + e11e22e S
e22e = Port-2 Input Match (Load Match)
e30 = Leakage
Calibration
STEP 1: Calibrate Port-1 using One-Port procedure
S11M - e00
e22e = Perfect THRU ≡ S11 = S22 = 0, S21 = S12 = 1
S11Me11 - e
Beware of imperfect test port connectors.
a0 b0
a0 a1
X
b0 Error b1
Adapter
Perfect
DUT
Reflectometer
Imperfect Y
Switch a3 Error a2
Adapter
b3 b2
a3 b3 8 Error Terms
To remove the effects of an imperfect switch, use the procedure described later.
a0 a1
a0
e10
[ Tx ]
e00 X Error Adapter e11 DUT
e01 b1
b0 a1
b0 b1 S11
a3 a2 S22
a3 b2
e23 a2
MEASURED ACTUAL
1
Tm Tx TD Ty ; TD Tx Tm Ty 1
a0 e10 a1 b2 e32 b3
e00 2-port
e11 e22 e33
DUT
a2 a3
b0 e01 b1 e23
[ X ] [D ] [Y ]
Source
Port-1 Port-2
a1 b2
b1 DUT
a2
a0 b0 b3 a3
• Thru:
Thru
• S12 = S21 defined equal to 1 at 0°
• S11 and S22 defined to be zero Port 1 Port 2
• Reflect:
• Must be the same on each port Reflect Reflect
• || need not be known Port 1 Port 2
• must be known within 1/4λ
• Line:
• Z0 of the line establishes ref Z
• Line insertion phase ≠ Thru Line
• Usable BW for THRU/LINE pair <8:1 Port 1 Port 2
• I.E. (stop freq)/(start freq) <8
• S21 of line need not be known
• Thru LINE:
Thru LINE
• S12 and S21 must be defined
• S11 and S22 defined to be zero Port 1 Port 2
• Reflect:
• Must be the same on each port Reflect Reflect
• || need not be known Port 1 Port 2
• must be known within 1/4λ
• Delay LINE:
• Z0 of the line establishes ref Z; MUST = Thru LINE
Delay LINE
• Delay insertion phase ≠ Thru
• Usable BW for Thru/Delay pair <8:1 Port 1 Port 2
• I.E. (stop freq)/(start freq) <8
• S21 of LINE need not be known
• Must have similar propagation properties as Thru LINE
ModernNetwork
NetworkAnalyzer
AnalyzerCalibration
CalibrationBasics
Techniques 28
WHY ARE THEY SPECIAL?
a0 e10 a1 b2 e32
e00 Unknown
e11 e22 e33
Thru
b0 e01 b1 a2 e23
[X ] [U ] [Y ]
• Systematic errors of all test ports (directivity, source match, reflection tracking) can be completely
characterized – 6 terms
• “Unknown thru” calibration standard: (7th term)
• Must be reciprocal (Sij = Sji)
• Phase known to within a quarter wavelength
• Insertion loss < 40 dB
• VNA signal-path switch errors can be quantified (same as TRL)
• Requires dual reflectometers on all ports
(e.g., a 2-port 4-receiver VNA) OR
• Switch error characterization (2-tier calibration)
Unknown thru
a0 e10 a1 b2 e32
e00 Known
e11 e22 e33
Adapter
b0 e01 b1 a2 e23
[X ] [A ] [Y ]
• Ecal Advantages
• Simple to use – Just connect and Start Calibration
• Avoid human error of connecting wrong devices
• Much faster than connecting multiple standards
• Minimize cable movements
N469XA/B Series
8509X Series N443X Series
2-port, 3 / 7.5 / 9 GHz 4-port, 13.5 / 18 / 20 GHz
N775XA Series
2-port, 4 / 6.5 / 9 / 14 / 18 / 26.5 GHz
Max Frequency
Modern Network Analyzer Calibration Techniques 37
K E Y F E AT U R E S
• Mechanical Kits
COAX • Increase Skill and Time for better Accuracy
TRL - LRL
• WG TRL is simpler
Skill Level
Cal Time
• Ecal
SOLT (SL)
• Lower Skill and Time regardless of Accuracy
WG
TRL - LRL
SOLT (FL)
Ecal Ecal
Econ Prec
Accuracy
• Non-insertable devices
• Multiport devices
• No ideal thru and many many connections
CABLE MOVEMENT
DUT
2-PORT
CALIBRATION PLANE 2-PORT
CALIBRATION PLANE
0.00
-0.02
-0.04
-0.06
-0.08
Good Cable
dB
-0.10
Bad Cable
-0.12
-0.14
-0.16
-0.18
-0.20
0.00 5.00 10.00 15.00 20.00 25.00 30.00
Frequency
Unknown thru
DUT
1-PORT 2-PORT
CALIBRATION PLANES CALIBRATION PLANES
No cable movement!
CABLE MOVEMENT
DUT
2-PORT
CALIBRATION PLANE 2-PORT
CALIBRATION PLANE
DUT
Unknown thru
1-PORT 2-PORT
CALIBRATION PLANES CALIBRATION PLANES
No cable movement!
Modern Network Analyzer Calibration Techniques 51
USING UNKNOWN THRU
A B A B
1-PORT
CALIBRATION PLANES
DUT
C C
Port 1 Port 2
Different connector
on each port 1-port calibrations, ECal or mechanical
Port 3 Port N
Port 1 Port 2
Port 3 Port N
Unknown thru’s (adapters)
Modern Network Analyzer Calibration Techniques 53
MIXING THRU TYPES
Port 1 Port 2
Straight Thru’s TRL on-wafer cal
Port 3 Port 4
and/or
Port 1 Port 2
Port 3 Port 4
Unknown thru’s
Modern Network Analyzer Calibration Techniques 54
Q S O LT