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3.1 lntroductiorl
anlirnony oxide thin films are made. Both bismuth and antimony undergo
iir~tirnony[9-13lhave been reported in its thin film form. Bismuth and antimony thin
tilrns exhibit "ordinary size effect" [14-171 and "quantum size effect" [18-211. The
electrical resistivity studies made earlier on bismuth and antimony films have large
Inconsistencies [22].This inconsistency is attributed to different parameters of
evaporation and annealing. The electrical conductivity studies in metal oxides has
investigations have been made on their electrical properties. There has been an
increasing interest in the studies on the dielectric properties of thin solid films of
Ki203 for use in the fabrication of miniaturized electronic and optical devices [23].
Antimony oxide films are very attractive materials for spectroscopic studies, solar
energy applications and other industrial purposes [24]. According to the character
serniconductor.
3.2 Theory
theories developed for thin metal films by Fuchs [25], Sondeimer [26] and Mayadas
and Shatzkes [27].Investigations on bulk samples have shown that the electrical and
0a11tlrnodel [28]. In the temperatu~erange 80 to 400 K bismuth with its small band
involved problenl. According to the rlonparabolic ellipsoidal model [18, 29, 301,
~vherc.E, = 15.3meV is the energy gap between the conduction band and valence
ba~lcl,In bismuth, the n elements form the inverse effective mass tensor, and the
subscripts 1,2 and 3 refer to the binary, bisetrix and trigonal axes, respectively. The
electron energy E, is measured from the bottom of the conduction band and p's are
the momentum components. There are three electron ellipsoids in the conduction
banti. There is only one hole ellipsoid in the valence band that overlaps the
conduction band. The hole energy measured from the top of the valence band takes
the form.
pronounced and the charge carriers in each of the subbands can be treated as a
two-dimensional system. The conductivity of bismuth film would then be the sum of
the inclividual contributions of the subbands. The electron conductivity o, and the
2
oh = e T~ NhM ~ " ....3.4
where EF is the Ferrni energy, z, and zh are the relaxation times of electrons and
holes, N, and Nhare the number densities of electrons and holes respectively.
Thin film data are generally analysed using the Fuch's size effect theory [25]
in which a spherical Fermi surface arid an isotropic mean free path are assumed and
the ordinary scattering mechanism which operates in the bulk is taken to be valid in
the films. The litnitation of the electron mean free path at the film surface is taken
into account and the ratio of the resistivity p~ of a thin film to the resistivity pn of the
where y is the ratio of the film thickness t to the electron mean free path I in the
bc~llc,p is the spclcularity parameter and a = lIcos0, where 0 is the angle which
the electron mean free path makes with the normal to the film.
The limiting value is given by
Lqnation 3.6 indicates that plot of p,- Vs lit is a straight line, ps can be obtained
from the intercept of the plot and slope will give the value of l(1-p).
growing roughly vertically from the substrate to the upper surface of the film, and
the grain boundaries lie parallel or perpendicular to the applied electric field. The
linear dimensions of the crystallites in the plane of the film are often comparable
with the electron mean free path and hence the contribution from electron scattering
at the crystallite boundaries should also be taken into account. Mayadas and
at the grain boundaries together with the normal bulk ground scattering from the
P F ~ P B= 41 ( ~ ~ $ if1 (at)
where, f (a') = 3 1113 - ti12 i- tr" - t i 3 / In ( I + llcc')} .... 3.7
I
ar~tlt z = IRID(1-R)and @(p,y]is given by equation 3.5,where y = yi/f(n),
P) is the grain size and R is the coefficient of reflection at the grain boundary.
where n and 11, are the carrier concentrations and mobility of the electrons and p
a r ~ dit,, are the corresponding quantities for the holes. In an intrinsic semiconductor
the number of electrons is equal to the number of holes. If we assume that the
varialion of mobility of electrons and holes in the electric field with temperature is
constant.
3.3 Bismuth
bismuth (99.999 % of purity) ingots procured from SlSCO is used as the source
material. This ingot is evaporated from a molybdenum boat. Initially the vacuum
bonlbardment for 5 minutes in tile vacuum chamber before the film deposition. The
Conductivity is also nieasured using a four probe set-up (Model No: DFP - 02). Pre
evaporated silver electrodes and silver epoxy are used as ohmic contacts.
Figure 3.1 shows the variation of sheet resistance Rsh with thickness of
film deposited at different substrate temperatures (Ts) 30, 75, 100, 150,
bis~~nuth
200. and 250°C. The film with Ts = 30°C has a sheet resistance of 68 Q/o for film
thickness of 100 nm. For a film of thickness 550 nm, the measured sheet resistance
it; 10.2 I2In at the same substrate terrrperature. In the case of Ts = 100°C, Rsh for a
filrrl of thickness 100 nm is 5 6 Q / o . For the thickness 550 nm, the sheet resistance
the film at same substrate temperature considerably lowers the sheet resistance.
Sheet resistance of 35, 15.2, 9.7 and 4.6 Cl/o are obtained for thicknesses 100, 200,
shown in figure 3.2 for the film of thicknesses 135 nm and 550 nm. The conductivity
of the film increases with increase in temperature. Das and Soundararajan [32] has
resistivity of the film during cooling cycle is lower than the heating cycle for all the
lihr~s,indicating that the thermally unstable defects incorporated in the film during its
Fig. 3.1 P l o t of sheet resistance Rsh Vs thickness
f o r b i s m u t h t h i n f i l m deposited a t different
Substrate t e m p e r a t u r e s .
0-0 135 nm. Heating
Q
E
Q
- Cooling
=
** 550 nm. Heating
ooooo Cooling
, ~ l t l l l ~ ~ ~ ~ l l ~ ~ i I lI l l l l l l
100.0 200.0 300.0
Temperature OC
A typical plot of loy o Vs lOOO/T for Bi film for thicknesses 135 nm and 550
nln are shown in figure 3.3. From the slope of the graph the activation energy can
be determined using ttie equation (3.9).The values of activation energy for Bi thin
film for different thicknesses are reported in table 3.1. It is found that the activation
Figures 3.4, 3.5 and 3.6 show the temperature dependence of dc electrical
temperatures, 75,100 and 250 "C respectively. From these figures it can be seen
t l ~ d il~ilially
l the co~itluctivityincreases with temperature and then decreases during
the heating cycle. Here the film shows the semiconducting as well as metallic nature
in the different temperature regions. Figures 3.7 and 3.8 give the second and third
heating cycles for bismuth thin film. Das and Jagadeesh (331 have made the
Fig. 3.3 Plot of log r Vs 1000/T for bismuth
thin f i l m deposited a t 30°C
Fig. 3.4 Plot of conductivity Vs temperature for
bismuth thin film deposited a t 7 5 O C .
Fig. 3.5 Plot of corilluctivity Vs teriiperatoure for
b i s m u t h thirl film deposited a t 100 C.
Fig. 3.6 Plot of conductivity Vs temperature for
bismuth t h i n f i l m deposited a t 250°C.
Fig. 3.7 Plot of condiictivity Vs t e m p e r a t ~ r e f o r
b i s m u t h t h i n f i l m deposited a t 100 C.
(second heating)
Fig. 3.8 Plot of conductivity Vs temperature f o r
b i s m u t h thin f i l m deposited a t 1 0 0 ° C .
(third heating)
resistance measurennents with temperature variation on BiSb alloy thin films and
analy;!ed the results by classifying the different regions as: region 1 where, resistance
with the fall of temperature, region 3 where, resistance increases rapidly with
Figure 3.9 gives the typical plot of log a vs lOOOrT for Bi thin film deposited
at substrate temperatures, 75, 100 and 250°C. The slopes of the graph can be used
to calculate the activation energy using equation 3.9. Table 3.2 reports the
consists of indiviclual islands which have many of the characteristics of the liquid
- ~~ -- - ~
100 9.03
150 7.91
droplets. As the substrate temperature increases, the contact angle between droplet
and substrate decreases and the droplet grows in size. Thus a given amount of
Fig. 3.9 Plot of l o g a Vs 1000/T f o r bismuth t h i n
f i l m deposited n t d i f f e r e n t s u b s t r a t e t e m p e r a t u r e s .
matel-ial deposited on a substrate at a low temperature may be enough to form a
substrate will result in an island structure. Similar results have been observed [34]
3.4 Antimony
heatit ~gfroin a molybdenum boat using vacuum coating unit as described in chapter
FIIZIDIZL is used as the source material. The substrate temperature is varied using the
The tl~icknessof the sample is controlled using the quartz crystal thickness monitor.
The ohmic contacts are made by pre-evaporated silver electrodes. The sheet
resistance is measured using four-probe set-up (model No: DFP - 02) and electrical
conductivity cell. The temperature of the sample during the conductivity study is
Figure 3.10 gives the plot of sheet resistance Rsh Vs thickness for antimony
t h i ~ ltilrns deposited at substrate temperatures 30, 75, 100, 150 and 200 "C. For the
fib11 cleposited at 200°C. At substrate temperatures 100, 75 and 30°C, the sheet
thickness 200 nm deposited at 30, 75 and 200°C is shown in figures 3.11, 3.12 and
between the conduclion electrons and the grain boundaries often contribute more to
Saha [35]observed that the initial resistance of the antimony films decreased
irreversibly as the films were heated uniforn2ly. The maximum value of lattice
temperatures, as the annealing effect increases the fall in resistance due to the
removal of defects become greater than the increase due to the lattice vibrations
and hence a net fall in resistance is observed. Jensen et al [36]studied the electrical
~ 2.2
reached, the conductance suddenly jumps from 2.8 x 1 0 to ~ x S. The
~naynitudeof this jurnp is attributed to the crystallization of the sample. Volklein and
Kessler [37] have studied the electrical and thermal properties of antimony films and
.=-
= in air Heating
Cooling
0.01
0.0 100.0 200.0
~~~~~~I 300.0
Temperature O C
Pure bismuth is used as the source material. This material is evaporated onto glass
substrates by resistive heating method from a molybdenum boat to obtain thin films,
using a Hind Hivac coating unit. The pressure of the system is kept at 1 0 torr.
~ ~The
substrate temperature is varied using the substrate heater. The temperature of the
substrates. The rate of evaporation is 10-15nmlmin. The thickness of the films are
by the multiple beam interference technique. The bismuth films thus obtained are
then annealed in air to obtain bismuth oxide. Annealing of the bismuth film are
Figure 3.14 shows the variation in electrical conductivity of Bi203 thin film as
pressure increases. The decrease in conductivity is 4.5 times when we decrease the
pressure from atrnospheric pressure to 1 0 " m bar. Figures 3.15, 3.16 and 3.17 give
deposited at substrate temperatures (Ts) 30 and 250 " C , both for heating and
-
-
-
-
-
E "00 -
.
.
\ -
0 -
L -
E -
-
-
X .
.
>
e2.00 - -
.e
- -
-
0 -
3
u -
L -
0
0 l .oo -:
-
-
-
+-
-
-
-
-
0.00- T T l l l m ~ r m m i 1 lmml l l m m i IN-l 11'11"1 I W
0.085 mho/~nin vacuum and 0.17 mho/m in air respectively. The conductivity value
at 90°C in air is 2.2 times that in vacuum. The corresponding increase at 250°C is
nine fold for the film coated at 200°C. The plot of log G Vs lOOO/T is shown in figure
3.18,~uhichis used to determine the activation energy and the values are reported in
table 3.3.
'l'i~hlc1.3 Variation of activation erlcrgy lor bismuth oxide thin film deposited at different
suhstr;ltc tempcr;itures.
30 0.3 1
75 0.29
100 0.28
150 0.27
200 0.25
250 0.25
Vidadi et al [40] have observed that at relatively high temperatures (T > 310
threshold takes place. At low temperatures (T < 310 K) the angular slope of the
x 1 0 Rlcm.
the pre exponential factor as ~ " = 1 . 2 ~ ~ It is found that the activation
Fig. 5.18 Plot of log ff Vs 1000/T for bismuth oxide
film f o r d i f f e r e n t substrate temperatures.
energy decreases with increase in substrate temperature. It is known that the
conductive disordering structures can have both tails of the energy bands and a
non-zero density of states in the energy gap. Witti the final density of states near the
Fern~ilevel, N(E,),
the localized charge carriers can move in a small energy region,
Agasiev et a1 1421 have studied the effect of structural and impurity defects on
and obtained the values as 0.59 eV, 0.65 eV and 0.99 eV for annealing
be [luted that [43] the illumination of Bi203 film in vacuum leads to an increase of
dark conductivity and photosensitivity which can be explained by the effect of loss
obtained as 0.25 eV. Vidadi et al [40] have obtained the activation energy as 0.6
t?V.
bismuth oxide thin film with time is measured. As the steam is passed, temperature
of the system rises up to 70°C. Figure 3.19 shows the change in conductivity when
Fig. 3.19 Plot of conductivity Vs time for bismuth
oxide t h i n film at the onset of s t e a m .
2
steam is passed. lrnrnediately after passing the steam the conductivity increases 10
to 10:' times. Initially, tlhe conductivity increases as we inject the steam into the
system and reaches a saturated value. After the removal of the steam, the
concl~~ctivity
decreases and reaches a steady value. This is shown in figure 3.20.
This steady state value is 3 to 4 times smaller than the saturated value. This property
of bismuth oxide is used in humidity sensors. Suzuoki et a1 [44] reported that Bi203
thin film can be used as humidity sensors. The reproducibility in conductivity and
adhesivity of the films on glass substrates make it a good candidate for the use in
humidity sensors.
of purity) is used as the source rnaterial. The films are evaporated from a
molybdenum boat in a Hind Hivac coating unit. Glass slides have been used as the
substrates. The rate of evaporation is 10-20 nm/min. The thickness of the films is
u s i ~ ~Lhe
g Keithley electro~rleter (Model No.617) in the conductivity cell and is
~)erfo~.med
in vacuum and in air.
Figure 3.21 shows the conductivity Vs ambient pressure for Sb2O3 thin film
deposited at room temperature. The conductivity is found to increase with increase
Fig. 3.20 Plot of conductivity Vs time for bismuth
oxide t h i n f i l m a f t e r t h e r e m o v a l of s t e a m .
3,(JL, . ~ ~~ ~ . . ~ - ~
---~-
-
-
.
-
E -
-
\
rj ?.on -
1.
t .
-
.
>\
.
-w
- -
>
.*
- -
-
0 -
3 -
7
0
I .oo -
.
-
0 -
-
-
-
-
-
-
0.00 - - - r r m r r l ~mml~ 1 11111111 1 1 llllnl Tmlllll l mml
0.00001 0.1 1000
A m b i e n t Pressure ( m b a r )
Vs lOOO/T is given in figure 3.23 for films having different thicknesses. From the
slope of the graph,the activation energy is calculated using the equation (3.9).The
activation energy for different film thicknesses for antimony oxide is given in table
3.4. It is found that the activation energy decreases with decrease in thickness.
Stearn is passed through the chamber and the conductivity of Sb203 film is noted
tI11r11igand after passing the stea~n.The response of the film with time is given in
figures 3.24 and 3.25 respectively.
'l';lhlc 3.4 Variatio~iof activation energy with thickness for antimony oxide thin l'il~n.
280 0.10
230 0.07
200 0.07
150 0.06
Badawy [45] observed that the specific conductivity of antimony oxide film is
independent of thickness of the films. He had obtained the conductivity value as 2.5
I-eporl that films of antimony oxide are semiconducting in nature irrespective of their
thiclo~ess.In their study,the activation energy changes from 0.92 to 1.59 eV when
Cor~clusion
.['lie electrical conductivity study reveales that bismuth thin film exhibitsmetallic
fl-om 4.9 meV to 7.0 meV as the thickness increases from 120 to 600 nm. and it
changes from 14.19 meV to 5.41 meV when the substrate temperature increases
from 75 to 250 "C. The antimony thin film shows a metallic nature. Comparison of
conductivity of bismuth oxide and antimony oxide films in air and vacuum is made.
The conductivity in air is greater than that in vacuum. The activation energy of
Bi,O,, film decreases from 0.31 eV to 0.25 eV when the substrate temperature
changes from 30 to 250 "C and the activation energy of Sb203 film changes from
0.10 lo .06 eV when the thickness of the filrn decreases from 280 to 150 nm. The
response of the electrical conductivity for bismuth oxide and antimony oxide film in
stearn is also noted as a function of time. The use of Bi203 and Sb203as humidity
ser1sot.s is suggested.
Referetlces
1. H.T.Chu, P.N.Henriksen, Jing Jing, Hong Wang, and Xiofeng Xu, Phys. Rev.
B, 45 (1992)11233.
2359.
(1976)93.
13. A.Boyer, D.Deschacht and E.Groubert, Thin Solid Fihns, 76 (1981) 119.
19. U.Y.Jin, H.K.Wong, G.K.Wong, J.B.Ketterson and Yakov Eckstein, Thin Solid
20. Shigeru Baba, Hideaki Sugawara and Akira Kinbara, Thin Solid Films, 31
(1976)329.
34. L.I.Maissel and li.Glang, "Hand ~ o o okf Thin film Techno1ogy;Mc Graw Hill
(1970).
35. Samar K Saha. Ind. J P~ire& A I J I J I P ~ ~19
S .(1981)
, 577.
36. Pablo Jensen. Patrice Melinon, Michel Treilleux, Alain Houreau, Jian Xiong Hu
39. Joy George, B.Pradeep and K.S.Joseph, Thin Solid films, 148 (1987)181.
(1991)415.
Oxford (1971)472.
43. A.A.Agasiev and Ya.Yu.Guseinov. Phys. Sfat Sol. (a), 136 (1993)473.
46. P.S.Nikam and ll.L.Mankar, lnd. JPure & Appl. Phys., 21 (1983)361