Search Investors Support COMPANY SOLUTIONS & INDUSTRIES NEWS &EVENTS CAREERS CONTACT TECHNOLOGIES LPCVD / Diffusion Home / Industries / Semiconductor Devices - SPTS / 3 FLAT PANEL DISPLAY - FPD PRINTED CIRCUIT BOARDS - ‘SEMICONDUCTOR DEVICES ~ Pca ‘SPTS {MEMS}_/ LPCVD / Diffusionspts industries LPCVD / Diffusion for MEMS Acvorced SPTS's AVPIRVP large batch thermal process system delivers Packaging flexible, low cost, solutions that enable a simple transition from MEMS: pilot to high volume production SiDRIE - Vapor Benefits of SPTS LPCVD/diffusion processes Release Et for MEMS PECVD - Low C00 thick doped and un-doped polysilicon PvD - Highly productive stress-controlled SiN MvD - High deposition rate TEOS for HAR gap-fill Low temperature (<450°C} LPCVD SiGe LPCVD Diffusion - Highly uniform wetidry therrnal SiOz Power Devices = 100 to 1,200°C therrnal annealing Related Product Information Contact Quick Links Israel Company Investors Forward North America Overview Management — Looking Euroy Milestones ‘Support Information Japan Coreers Site m Privacy Policy Asio Pacific LotestNews Legal SPTS Contacts Social Media OOO Copyright © 2018 Orbotech. - The Language of Electronics Information on this site contains forward looking information — for more information sick here hitps:lwwnorbotech.comisptsfindustresisptsimemsiipcvd-fusion 22