In the same fashion, find Lx�, which is the horizontal distance between the central
coordinates of the upper
left Position Detection Pattern PUL and the central coordinates of the Alignment Pattern P1, and Ly�, which is the vertical distance between the central coordinates of the upper left Position Detection Pattern PUL and the central coordinates of the Alignment Pattern P2. Divide Lx� and Ly� by the formula below to obtain the module pitches CPx� in the upper side and CPy� in theIn the same fashion, find Lx�, which is the horizontal distance between the central coordinates of the upper left Position Detection Pattern PUL and the central coordinates of the Alignment Pattern P1, and Ly�, which is the vertical distance between the central coordinates of the upper left Position Detection Pattern PUL and the central coordinates of the Alignment Pattern P2. Divide Lx� and Ly� by the formula below to obtain the module pitches CPx� in the upper side and CPy� in theIn the same fashion, find Lx�, which is the horizontal distance between the central coordinates of the upper left Position Detection Pattern PUL and the central coordinates of the Alignment Pattern P1, and Ly�, which is the vertical distance between the central coordinates of the upper left Position Detection Pattern PUL and the central coordinates of the Alignment Pattern P2. Divide Lx� and Ly� by the formula below to obtain the module pitches CPx� in the upper side and CPy� in theIn the same fashion, find Lx�, which is the horizontal distance between the central coordinates of the upper left Position Detection Pattern PUL and the central coordinates of the Alignment Pattern P1, and Ly�, which is the vertical distance between the central coordinates of the upper left Position Detection Pattern PUL and the central coordinates of the Alignment Pattern P2. Divide Lx� and Ly� by the formula below to obtain the module pitches CPx� in the upper side and CPy� in theIn the same fashion, find Lx�, which is the horizontal distance between the central coordinates of the upper left Position Detection Pattern PUL and the central coordinates of the Alignment Pattern P1, and Ly�, which is the vertical distance between the central coordinates of the upper left Position Detection Pattern PUL and the central coordinates of the Alignment Pattern P2. Divide Lx� and Ly� by the formula below to obtain the module pitches CPx� in the upper side and CPy� in theIn the same fashion, find Lx�, which is the horizontal distance between the central coordinates of the upper left Position Detection Pattern PUL and the central coordinates of the Alignment Pattern P1, and Ly�, which is the vertical distance between the central coordinates of the upper left Position Detection Pattern PUL and the central coordinates of the Alignment Pattern P2. Divide Lx� and Ly� by the formula below to obtain the module pitches CPx� in the upper side and CPy� in theIn the same fashion, find Lx�, which is the horizontal distance between the central coordinates of the upper left Position Detection Pattern PUL and the central coordinates of the Alignment Pattern P1, and Ly�, which is the vertical distance between the central coordinates of the upper left Position Detection Pattern PUL and the central coordinates of the Alignment Pattern P2. Divide Lx� and Ly� by the formula below to obtain the module pitches CPx� in the upper side and CPy� in theIn the same fashion, find Lx�, which is the horizontal distance between the central coordinates of the upper left Position Detection Pattern PUL and the central coordinates of the Alignment Pattern P1, and Ly�, which is the vertical distance between the central coordinates of the upper left Position Detection Pattern PUL and the central coordinates of the Alignment Pattern P2. Divide Lx� and Ly� by the formula below to obtain the module pitches CPx� in the upper side and CPy� in theIn the same fashion, find Lx�, which is the horizontal distance between the central coordinates of the upper left Position Detection Pattern PUL and the central coordinates of the Alignment Pattern P1, and Ly�, which is the vertical distance between the central coordinates of the upper left Position Detection Pattern PUL and the central coordinates of the Alignment Pattern P2. Divide Lx� and Ly� by the formula below to obtain the module pitches CPx� in the upper side and CPy� in theIn the same fashion, find Lx�, which is the horizontal distance between the central coordinates of the upper left Position Detection Pattern PUL and the central coordinates of the Alignment Pattern P1, and Ly�, which is the vertical distance between the central coordinates of the upper left Position Detection Pattern PUL and the central coordinates of the Alignment Pattern P2. Divide Lx� and Ly� by the formula below to obtain the module pitches CPx� in the upper side and CPy� in theIn the same fashion, find Lx�, which is the horizontal distance between the central coordinates of the upper left Position Detection Pattern PUL and the central coordinates of the Alignment Pattern P1, and Ly�, which is the vertical distance between the central coordinates of the upper left Position Detection Pattern PUL and the central coordinates of the Alignment Pattern P2. Divide Lx� and Ly� by the formula below to obtain the module pitches CPx� in the upper side and CPy� in theIn the same fashion, find Lx�, which is the horizontal distance between the central coordinates of the upper left Position Detection Pattern PUL and the central coordinates of the Alignment Pattern P1, and Ly�, which is the vertical distance between the central coordinates of the upper left Position Detection Pattern PUL and the central coordinates of the Alignment Pattern P2. Divide Lx� and Ly� by the formula below to obtain the module pitches CPx� in the upper side and CPy� in theIn the same fashion, find Lx�, which is the horizontal distance between the central coordinates of the upper left Position Detection Pattern PUL and the central coordinates of the Alignment Pattern P1, and Ly�, which is the vertical distance between the central coordinates of the upper left Position Detection Pattern PUL and the central coordinates of the Alignment Pattern P2. Divide Lx� and Ly� by the formula below to obtain the module pitches CPx� in the upper side and CPy� in theIn the same fashion, find Lx�, which is the horizontal distance between the central coordinates of the upper left Position Detection Pattern PUL and the central coordinates of the Alignment Pattern P1, and Ly�, which is the vertical distance between the central coordinates of the upper left Position Detection Pattern PUL and the central coordinates of the Alignment Pattern P2. Divide Lx� and Ly� by the formula below to obtain the module pitches CPx� in the upper side and CPy� in theIn the same fashion, find Lx�, which is the horizontal distance between the central coordinates of the upper left Position Detection Pattern PUL and the central coordinates of the Alignment Pattern P1, and Ly�, which is the vertical distance between the central coordinates of the upper left Position Detection Pattern PUL and the central coordinates of the Alignment Pattern P2. Divide Lx� and Ly� by the formula below to obtain the module pitches CPx� in the upper side and CPy� in theIn the same fashion, find Lx�, which is the horizontal distance between the central coordinates of the upper left Position Detection Pattern PUL and the central coordinates of the Alignment Pattern P1, and Ly�, which is the vertical distance between the central coordinates of the upper left Position Detection Pattern PUL and the central coordinates of the Alignment Pattern P2. Divide Lx� and Ly� by the formula below to obtain the module pitches CPx� in the upper side and CPy� in theIn the same fashion, find Lx�, which is the horizontal distance between the central coordinates of the upper left Position Detection Pattern PUL and the central coordinates of the Alignment Pattern P1, and Ly�, which is the vertical distance between the central coordinates of the upper left Position Detection Pattern PUL and the central coordinates of the Alignment Pattern P2. Divide Lx� and Ly� by the formula below to obtain the module pitches CPx� in the upper side and CPy� in the