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In the same fashion, find Lx�, which is the horizontal distance between the central

coordinates of the upper


left Position Detection Pattern PUL and the central coordinates of the Alignment
Pattern P1, and Ly�, which
is the vertical distance between the central coordinates of the upper left Position
Detection Pattern PUL
and the central coordinates of the Alignment Pattern P2. Divide Lx� and Ly� by the
formula below to obtain
the module pitches CPx� in the upper side and CPy� in theIn the same fashion, find
Lx�, which is the horizontal distance between the central coordinates of the upper
left Position Detection Pattern PUL and the central coordinates of the Alignment
Pattern P1, and Ly�, which
is the vertical distance between the central coordinates of the upper left Position
Detection Pattern PUL
and the central coordinates of the Alignment Pattern P2. Divide Lx� and Ly� by the
formula below to obtain
the module pitches CPx� in the upper side and CPy� in theIn the same fashion, find
Lx�, which is the horizontal distance between the central coordinates of the upper
left Position Detection Pattern PUL and the central coordinates of the Alignment
Pattern P1, and Ly�, which
is the vertical distance between the central coordinates of the upper left Position
Detection Pattern PUL
and the central coordinates of the Alignment Pattern P2. Divide Lx� and Ly� by the
formula below to obtain
the module pitches CPx� in the upper side and CPy� in theIn the same fashion, find
Lx�, which is the horizontal distance between the central coordinates of the upper
left Position Detection Pattern PUL and the central coordinates of the Alignment
Pattern P1, and Ly�, which
is the vertical distance between the central coordinates of the upper left Position
Detection Pattern PUL
and the central coordinates of the Alignment Pattern P2. Divide Lx� and Ly� by the
formula below to obtain
the module pitches CPx� in the upper side and CPy� in theIn the same fashion, find
Lx�, which is the horizontal distance between the central coordinates of the upper
left Position Detection Pattern PUL and the central coordinates of the Alignment
Pattern P1, and Ly�, which
is the vertical distance between the central coordinates of the upper left Position
Detection Pattern PUL
and the central coordinates of the Alignment Pattern P2. Divide Lx� and Ly� by the
formula below to obtain
the module pitches CPx� in the upper side and CPy� in theIn the same fashion, find
Lx�, which is the horizontal distance between the central coordinates of the upper
left Position Detection Pattern PUL and the central coordinates of the Alignment
Pattern P1, and Ly�, which
is the vertical distance between the central coordinates of the upper left Position
Detection Pattern PUL
and the central coordinates of the Alignment Pattern P2. Divide Lx� and Ly� by the
formula below to obtain
the module pitches CPx� in the upper side and CPy� in theIn the same fashion, find
Lx�, which is the horizontal distance between the central coordinates of the upper
left Position Detection Pattern PUL and the central coordinates of the Alignment
Pattern P1, and Ly�, which
is the vertical distance between the central coordinates of the upper left Position
Detection Pattern PUL
and the central coordinates of the Alignment Pattern P2. Divide Lx� and Ly� by the
formula below to obtain
the module pitches CPx� in the upper side and CPy� in theIn the same fashion, find
Lx�, which is the horizontal distance between the central coordinates of the upper
left Position Detection Pattern PUL and the central coordinates of the Alignment
Pattern P1, and Ly�, which
is the vertical distance between the central coordinates of the upper left Position
Detection Pattern PUL
and the central coordinates of the Alignment Pattern P2. Divide Lx� and Ly� by the
formula below to obtain
the module pitches CPx� in the upper side and CPy� in theIn the same fashion, find
Lx�, which is the horizontal distance between the central coordinates of the upper
left Position Detection Pattern PUL and the central coordinates of the Alignment
Pattern P1, and Ly�, which
is the vertical distance between the central coordinates of the upper left Position
Detection Pattern PUL
and the central coordinates of the Alignment Pattern P2. Divide Lx� and Ly� by the
formula below to obtain
the module pitches CPx� in the upper side and CPy� in theIn the same fashion, find
Lx�, which is the horizontal distance between the central coordinates of the upper
left Position Detection Pattern PUL and the central coordinates of the Alignment
Pattern P1, and Ly�, which
is the vertical distance between the central coordinates of the upper left Position
Detection Pattern PUL
and the central coordinates of the Alignment Pattern P2. Divide Lx� and Ly� by the
formula below to obtain
the module pitches CPx� in the upper side and CPy� in theIn the same fashion, find
Lx�, which is the horizontal distance between the central coordinates of the upper
left Position Detection Pattern PUL and the central coordinates of the Alignment
Pattern P1, and Ly�, which
is the vertical distance between the central coordinates of the upper left Position
Detection Pattern PUL
and the central coordinates of the Alignment Pattern P2. Divide Lx� and Ly� by the
formula below to obtain
the module pitches CPx� in the upper side and CPy� in theIn the same fashion, find
Lx�, which is the horizontal distance between the central coordinates of the upper
left Position Detection Pattern PUL and the central coordinates of the Alignment
Pattern P1, and Ly�, which
is the vertical distance between the central coordinates of the upper left Position
Detection Pattern PUL
and the central coordinates of the Alignment Pattern P2. Divide Lx� and Ly� by the
formula below to obtain
the module pitches CPx� in the upper side and CPy� in theIn the same fashion, find
Lx�, which is the horizontal distance between the central coordinates of the upper
left Position Detection Pattern PUL and the central coordinates of the Alignment
Pattern P1, and Ly�, which
is the vertical distance between the central coordinates of the upper left Position
Detection Pattern PUL
and the central coordinates of the Alignment Pattern P2. Divide Lx� and Ly� by the
formula below to obtain
the module pitches CPx� in the upper side and CPy� in theIn the same fashion, find
Lx�, which is the horizontal distance between the central coordinates of the upper
left Position Detection Pattern PUL and the central coordinates of the Alignment
Pattern P1, and Ly�, which
is the vertical distance between the central coordinates of the upper left Position
Detection Pattern PUL
and the central coordinates of the Alignment Pattern P2. Divide Lx� and Ly� by the
formula below to obtain
the module pitches CPx� in the upper side and CPy� in theIn the same fashion, find
Lx�, which is the horizontal distance between the central coordinates of the upper
left Position Detection Pattern PUL and the central coordinates of the Alignment
Pattern P1, and Ly�, which
is the vertical distance between the central coordinates of the upper left Position
Detection Pattern PUL
and the central coordinates of the Alignment Pattern P2. Divide Lx� and Ly� by the
formula below to obtain
the module pitches CPx� in the upper side and CPy� in theIn the same fashion, find
Lx�, which is the horizontal distance between the central coordinates of the upper
left Position Detection Pattern PUL and the central coordinates of the Alignment
Pattern P1, and Ly�, which
is the vertical distance between the central coordinates of the upper left Position
Detection Pattern PUL
and the central coordinates of the Alignment Pattern P2. Divide Lx� and Ly� by the
formula below to obtain
the module pitches CPx� in the upper side and CPy� in theIn the same fashion, find
Lx�, which is the horizontal distance between the central coordinates of the upper
left Position Detection Pattern PUL and the central coordinates of the Alignment
Pattern P1, and Ly�, which
is the vertical distance between the central coordinates of the upper left Position
Detection Pattern PUL
and the central coordinates of the Alignment Pattern P2. Divide Lx� and Ly� by the
formula below to obtain
the module pitches CPx� in the upper side and CPy� in the

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