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The aim of this article is to propose a simple analytical model that is capable of describing the isothermal crystallization
process in materials with the formation of two crystalline phases from the same parent amorphous phase, as illustrated with
an example for Ge:Sb:Te thin films. This model explains deviations from the well-known Johnson–Mehl–Avrami-
Kolmogorov (JMAK) kinetics theory. The model predictions were compared with experimental results obtained from X-ray
measurements on the chalcogenide glasses with composition of Ge2Sb2Te5 (where the formation of a stable crystalline
phase is preceded by the formation of a metastable phase) and in Ge1Sb2Te4 films doped by 12% atomic of oxygen (where
two stable crystalline phases are formed from the same parent amorphous phase). This model allows representing similar
transformation curves as those obtained from the experiments and is capable of predicting the deviation from the classical
linear dependence in the JMAK plot.
3. Experimental results
Ge1Sb2Te4:O
1600
Fig. 1 shows the X-ray diffraction spectra for
Ge2Sb2Te5 films taken at 102 oC (temperature of
Intensivity, Counts
1200
crystallization, Tc, is about 135 oC) during isothermal
annealing at the times indicated on the graph. This figure
800
also shows the patterns corresponding to Ge1Sb4Te7 films, 250 min
fully crystallized at 170 oC. The pattern corresponding to
120 min
80 min
the sample annealed during 15 minutes shows wide bands, 400
50 min
which are characteristic of the amorphous material. The 25 min
0 min
patterns of this sample annealed during 75, 120, and 0
25 30 35 40 45 50 55
180 minutes show weak peaks, with positions 2θ, deg
corresponding to an fcc phase of Ge1Sb4Te7 composition.
After annealing longer than 180 min, the positions of the Fig. 2. X-ray diffraction patterns for a Ge1Sb2Te4 film
peaks begin to change to those corresponding to an fcc with 12 at % of oxygen during isothermal annealing at
phase of Ge2Sb2Te5 composition (pattern for an isothermal 122 oC, to the final times indicated on the figure. Vertical
annealing during 540 minutes). Thus, in Ge2Sb2Te5 films lines indicate the position of the Sb2Te3 crystalline phase.
the formation of a stable crystalline phase is preceded by
the formation of a metastable to Ge1Sb4Te7 phase.
Fig. 3 shows the evolution of the volume fraction of
crystalline material in Ge2Sb2Te5 films (Fig.3a) and
2100 Ge1Sb2Te4 with 12 atomic % of oxygen (Fig. 3b) obtained
from X-ray measurements (black square).
0
1400 Ge1Sb4Te7, 170 C
Intensity, Counts
2
0.4
Transformed fraction, X
540 min
700 375 min
270 min
180 min
150 min
120 min 0.2
75 min
0 15 min
25 30 35 40
2 θ, deg.
1
0.0
4
0.8
o
Fig. 2 shows the X-ray patterns, measured at 122 C
(Tc=132 oC), for Ge1Sb2Te4 with 12 atomic % of oxygen. 0.6 Ge1Sb2Te4
After 25 minutes of annealing time, the first crystalline fcc
0.4
GeSb2Te4 phase appears. According to previous results 5
[15, 16], it was concluded that a small amount of Ge in the 0.2
film is oxidized during deposition, forming an amorphous Sb2Te3
germanium oxide phase, not detectable by the X-ray 0.0
analysis. This is possible because Ge is more reactive than 0 50 100 150 200 250
Sb and Te; however, the composition of these films is t, min
different to the Ge1Sb2Te4 stochiometric phase. Therefore,
during isothermal annealing, the excess Sb and Te atoms b
form the second crystalline phase (patterns at the 120 and
240 minutes) was identified as crystalline Sb2Te3. The Fig. 3. Evolution of the crystalline volume fraction x,
position of the Sb2Te3 peaks is marked with dash vertical during isothermal annealing in (a) Ge2Sb2Te5 film and
lines. (b) in Ge1Sb2Te4 film with 12 at % of oxygen. Black
square – results of calculation from X-ray measurements,
continue lines- results fitting using analytical model.
2068 E. Prokhorov, G. Trapaga, Yu. Kovalenko
Fig. 4 shows the ln[-ln(1-x)] versus ln(t) plot (black where α1 represent the transformed fractions of the first
circles – experimental results, continuous line – results stable or metastable phase, αmax the maximum transformed
from fitting ) which demonstrates a large deviation from fraction of the first stable or metastable phase, with t1 as
linearity, as expected according to the classical JMAK the incubation time and K1 the crystallization rate constant
model. and n1 the Avrami exponent.
In the case when the metastable phase appears first,
0 we assume that the metastable phase grows up to a certain
fraction (due to external parameters such as temperature,
variations in concentration, etc.), and then stops growing
-2 when the stable phase, which has nucleated into it,
ln(-ln(1-X))
-1 exponent.
The third and last stage, deals with the classical
-2 growth and eventual nucleation of the stable phase α2
-3 within the amorphous one.
-4
α 2 (t ) = (1 − α max )(1 − exp( − K 2 (t − t 2 ) n 2 )) for t ≥ t2
-5
0 1 2 3 4 5 6 and
ln(t), (min) α 2 (t ) = 0 for t < t2 (3)
b
where α2 is the fraction of stable phase in amorphous
Fig. 4. Dependencies of ln(-ln(1-x)) on lnt obtained from
(from 0 to 1-αmax), Ksa and nsa are the KJMA parameters
X-ray diffraction measurements (black square) in (a) and t2- represents the incubation time.
Ge2Sb2Te5 film, (b) in Ge1Sb2Te4 film with 12 at % of The total volume fraction equals the sum of those for
oxygen and from fitting using analytical model (continue the metastable, the stable in amorphous, and the stable in
lines). metastable:
α total (t ) = α1 (t ) + α sm (t ) + α 2 (t ) (4)
4. Analytical model
In the case of formation of two stable phases, the
An analytical model based upon the combination of analytical model is based upon the linear combination of
JMAK-type equations is proposed in this article to the two JMAK equations (1) and (2), to represent and
represent and analyze the experimental data showing the analyze the experimental data and to show the formation
formation of metastable, stable, or two competitive stable of two competitive stable phases with volume fractions α1
phases. and α2. The total fraction of transformed material is given
The first stable or metastable volume fraction can be by the equation:
represented by a KJMA-type equation:
α total (t ) = α1 (t ) + α 2 (t ) (5)