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ABSTRACT
In this research work, a comparison study has been as the sensing material. A large number of hydrogen
carried out between Palladium (Pd) coated PMMA sensors based on palladium and palladium alloyed with
(Poly Methyl Meth acryl ate) optical sensor and other metals, are reported in the literature4-14 but to
Palladium thin films sensor that have been prepared date there is no single optical sensor that has all the
on glass substrates. PMMA were sputter coated with desired characteristics (such as low hydrogen
Palladium using a sputter coating facility offered by concentration (<1%) detection in the presence of
the He riot Watt University, during sputter coating the humidity with a response time of a few seconds).
target (palladium) is showered with argon gas such Palladium has been the focus of most
mo research groups
that atoms from the target are ejected by the ionized 13, 15because hydrogen is not only highly soluble in
gas and then deposited on the PMMA substrate. palladium but palladium also shows a high selectivity
Palladium thin films have been prepared on glass to hydrogen. In the presence of hydrogen, adsorption
substrates by vaporization deposition technique with occurs on the surface16, 17 of the palladium and
annealing temperature is around 600 600◦ C. Relative hydrogen dissociates into atoms. The hydrogen atoms
inertness of the sensors to relative humidity makes it penetrate the subsurface layers of the palladium metal
specific to detect hydrogen at low concentration. and palladium hydride is formed 11, 18. The
Target environments for the proposed sensors are fuel adsorption of hydrogen in the palladium lattice leads to
cell cabinets, industrial process plants, submarines, the expansion of the lattice but is dependent on the
nuclear fuel power generation and decom
decommissioning concentration of hydrogen ogen and the working
plants. temperature [3]. Hydrogen sensors exploiting the
Palladium/Palladium Hydride reaction are affected by
Results showed that optical characteristics of the humidity, whether based on optical or
prepared sensors are highly sensitive, but their electronic/catalytic detection, which poses difficulties
properties considerably vary when the measurements for operation in field or real life conditions. Gases
conducted in vacuum or in air. In the two sensors the being monitored require pre-conditioning
pre such as
response-recovery time of Pd materials
aterials to hydrogen drying, to facilitate sampling at low humidity, and the
gas characterized to be extremely short. sensor coating requires heating to maintain it at a
constant temperature [4].
Keyword: Micro electro mechanical systems,
Palladium, Poly Methyl Meth acryl ate (PMMA), II. MECHANISMS FOR HYDROGEN SENSING
Sensor, Spectrometer, Substrates, Thin-Film.
Film. Hydrogen sensor technology needs to satisfy three
basic requirements. These requirements are;
I. INTRODUCTION sensitivity, selectivity, and specificity [7].
Hydrogen, occupies aboutmoretethan90%ofthe
atmosphere “is a highly flammable gass and will burn Different approaches used to sense and detect hydro
at concentrations aslowas4%inair [1]. It is the lightest gen. Numbers of which used in industry such as gas
of elements and the smallest molecule; le; it, ttherefore, chromatography (GC), masss spectrometry (MS),
has the greatest endency to leak. Thus,, for a process catalytic bead (CB), and therm
mal conductivity.
ss safety application, a hydro gen leakk can be more
dangerous [8].Detection
Detection of hydrogen gas has been Semiconducting metal oxidee and CB sensors are
extensively investigated with various materials 11-3used popular solid-state technollogies, these, sensors