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Technical Manual
DISCLAIMER
This manual may not be reproduced, either wholly or in part, for any reason whatsoever, without prior written
permission from Asyst Technologies, Inc. Material contained within this manual is provided for informational
purposes only, and is subject to change without prior notice. Asyst Technologies, Inc. assumes no
responsibility for any errors which may appear in this manual, nor for any damages resulting from such
errors.
Any change, alteration, or modification to the equipment described herein, as well as application in a manner
inconsistent with its design and intent, without prior written permission from Asyst Technologies’ Engineering
Staff will void the system warranty and may render the equipment unsafe for use or unfit for its intended
purposes.
This manual supersedes and obsoletes all prior Asyst Technologies, Inc. material relating to the installation,
repair, service, or specifications of the product(s) described herein.
It is the responsibility of the Customer to comply with all local, state, and federal ordinances, regulations, and
laws applicable to the installation and operation of this equipment.
Asyst Technologies, Inc. assumes no liability, whatsoever, for any personal injuries or damages resulting
from the operation or service of this equipment in any manner inconsistent or contrary to the methods
supplied in Asyst Technologies, Inc. literature including, but not limited to, manuals, instructions, bulletins,
communications, and recommendations.
TRADEMARKS
Technology described in this manual may be covered under one or more of the following Asyst
U.S. patents: 4,739,882; 4,674,939; 5,097,421; 4,974,166; 5,166,884; 4,724,874; 4,815,912; 4,676,709;
4,674,936; 4,802,809; 4,859,137; 4,995,430; 5,169,272; 4,746,256; 4,880,348; 4,895,486; 5,370,491;
5,547,328; 5,469,963; 5,586,585; 5,653,565.
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2000-0900-01 Revision A
Load Port Transfer™ System 2150 / 2200 Technical Manual
TABLE OF CONTENTS
Paragraph Page
Paragraph Page
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2000-0900-01 Revision A
Load Port Transfer™ System 2150 / 2200 Technical Manual
Procedure
APPENDICES
Appendix A SPARE PARTS , BILLS OF MATERIAL, AND ASSEMBLY DRAWINGS (Pages A-1 thru A-240)
Spare Parts List, Series 1 ................................................................................................ A-1
Spare Parts List, Series 2 ................................................................................................ A-2
Spare Parts List, LPT 2150.............................................................................................. A-3
Required Tools ................................................................................................................ A-4
Electrical and Mechanical Assembly Drawings With Bills of Material.............................. A-5
Paragraph Page
INDEX
ILLUSTRATIONS
Figure Page
Figure Page
Figure Page
TABLES
Table Page
Table Page
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Load Port Transfer™ System 2150 / 2200 Technical Manual
CHANGE RECORD
Change Signature of
No. Date Title and/or Brief Description Validating Person
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2000-0900-01 Revision A
Load Port Transfer™ System 2150 / 2200 Technical Manual
CONVENTIONS
Certain conventions are used throughout this manual.
Keys or switches that must be pressed are printed in bold. Example: Press Enter or press F1.
Software commands are printed in italics. Example: ... after the UNLOAD command ...
Figures and tables are numbered in a manner similar to pages; sequential within individual chapters.
Each figure and table is identified by the number of the chapter in which it resides, hyphenated to
show its sequential order within that chapter. For example, the third figure in the second chapter
would be, Figure 2-3. Figure numbers are located immediately beneath, or immediately adjacent to,
the appropriate figure. Table numbers are located immediately above the appropriate table.
Warnings, cautions, and notes as used throughout this manual:
WARNING
Warnings alert personnel to potentially hazardous
conditions or actions that may result in personal injury.
CAUTION
Cautions alert personnel to actions that may result in
equipment damage.
NOTE
Notes emphasize, or expand upon, the presented information.
TIPþ:
Tips provide helpful hints to improve performance and/or use.
RELATED DOCUMENTS
SEMI Standards
Load Port Transfer™ System, Installation Instructions, Asyst P/N 2000-0945-01
LPT Host Communications Manual, Asyst P/N 2000-0851-01
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Chapter 1
GENERAL INFORMATION
1.0 INTRODUCTION
This manual presents the Asyst Technologies Load Port Transfer system hereinafter referred to simply as
LPT.
The LPT is a robotics-load-port transfer system capable of transferring either a 6-inch or a 8-inch wafer
cassette from a SMIF-Pod™ to a Process Tool load position. The LPT operates under the control of the
Process Tool computer, Host computer, or a user. SMIF-Pods used must conform to the relevant SEMI-
standards.
Definitions of terms used in this manual may be found in paragraph 1.3.
1.2 SAFETY
Before attempting any operation or service, it is essential that the information presented in this section be
read and thoroughly understood.
Warnings and cautions are used throughout this manual to identify potential hazards to personnel and
equipment, respectively. All warnings and cautions immediately precede the step or operation in which the
hazardous condition may be encountered. All personnel operating or performing service on Asyst equipment
must fully understand warnings, cautions, and all general safety regulations associated with
electromechanical equipment.
Personnel should become thoroughly familiar with all aspects of safety for individuals and equipment prior to
operating or performing service on this equipment.
1.2.1 RESPONSIBILITY.
It is the responsibility of the Customer to comply with all local, state, and federal ordinances, regulations, and
laws applicable to the installation and operation of this equipment.
1.2.3.1 USER.
Under normal operation of the LPT with a SMIF-Pod, the user is never exposed to direct or collateral radiation
in excess of the accessible emission limits of Class I. When the LPT is used without a SMIF-Pod the
emission limits are Class II. The laser beam is on only when the LPT is in motion; when the LPT is not in
motion, the laser system is inoperative.
CAUTION
Use of controls or adjustments or performance of
procedures other than those specified herein may result in
hazardous laser light exposure.
WARNING
For continued protection against risk of fire, replace only
with fuse of the specified type and current ratings.
• Incoming AC Fuses are located in the power connector in the LPT Interface Connector Panel.
• DC power Fuses for the distributed dc voltages are located on the Power Distribution Board.
Refer to Chapter 4, paragraph 4.1.2, for a listing of all of the fuse locations, functions, and fuse ratings of
fuses used in the LPT.
WARNING
If the POD-IN-PLACE indicator is lighted, the Laser interlock
has been defeated. If the pod-in-place switch is depressed
without a SMIF-Pod on the port plate and the LOAD
command has been issued, the user may be exposed to the
laser beam.
WARNING
The user must never place fingers or hands on any part of
the LPT while it is operating. Failure to comply may result in
bodily injury.
At the top of the minienvironment travel, fingers could be pinched between the minienvironment and the side
support if placed into the line of travel. At the bottom of the minienvironment travel, toes could be pinched
between the minienvironment and the base assembly if placed into the line of travel. A clear plastic shield
around the base of the LPT prevents toes from being pinched and the LPT should not be operated without
the shield. Pinch points are identified by a sign near the pinch-point hazard (see Figures 1-5 and 1-6).
Before performing maintenance / service on the LPT, where the removal of the panel is necessary, use
extreme care.
Figures 1-10 and 1-11 show the pinch point hazard areas on the LPT.
1.3 TERMINOLOGY
The following terminology is used throughout this manual to describe the LPT, its configuration, and options.
Asyst-SMIF™: The Asyst Technologies, Inc. automated system that utilizes clean isolation technology to
maintain a cleanroom environment around wafers during transfer to processing equipment.
Cassette: A carrier for wafers or other substrates that are being processed.
Cassette-Transfer Mechanism: An arm that moves a cassette of wafers between the LPT and the Process
Tool.
Cautions: Cautions alert personnel to actions that may result in damage to equipment or software.
Computer: In this manual the computer controlling the loading and unloading of wafer cassettes from the
LPT is either the computer within the Process Tool onto which the LPT is attached, or the Host computer
which tracks Fab operations and wafer moves.
FFU (fan / filter unit): An assembly located in the minienvironment and composed of a fan and an ULPA filter.
The FFU draws room air in and expels ultra pure air into the minienvironment.
Filtered Air System: An air flow system, part of the minienvironment, which maintains an ultra clean
environment for the product cassette when it is not enclosed in the SMIF-Pod. See FFU.
FluoroTrac: An optional Auto ID system using very low frequency (VLF) RF signals to communicate with a
MicroTag which may be located on a wafer cassette or attached to an operator. The system tracks the
cassette of wafers or registers the operator at the Process Tool interface.
H-Move: The transfer of product by gripping the face of a cassette at the minienvironment and then to place
it on the Process Tool cassette station.
Home: That position which is the starting position for moving components of the LPT. The minienvironment
is Home when the port plate is seated onto the port door. The arm is Home when vertical and down. The
gripper is Home when vertical and the gripper fingers are open. See paragraph 2.3 for Home position criteria.
Kinematic: A term associated with the Asyst method of mounting where the two opposite parts of the mount
fit together to precisely define the position.
Load: Moving a product cassette from the LPT to the Process Tool load station.
Loadlock: A loadlock is a unit for loading or unloading a wafer or wafer cassette where the Process Tool
may operate under vacuum and the wafers are stored and moved in room air. The loadlock is a means to go
from the room atmosphere to vacuum.
MicroTag: Passive transponders that are attached to the material lot, the lot carrier or transporter, or are
carried by the operator. The FluoroTrac system use MicroTags to monitor the location of a particular operator
or material lot to ensure that the product is correctly routed by communicating with both the Process Tool and
the Host production computer.
Minienvironment: The minienvironment is a moving chamber with an attached port plate which accepts the
Pod. The minienvironment ascends separating the Pod top from the cassette. The cassette remains inside
the minienvironment and under clean, isolated conditions.
MSC (MicroStation Controller): A unit for controlling the input of product at a process station via
communication with the SMART-Tag attached to the SMIF-Pod. Hereinafter referred to as MSC. Whenever
a SMIF-Pod is placed on an LPT, the MSC that controls the LPT automatically checks the process step and
process equipment data stored in the Pod's SMART-Tag to verify that the Pod is at the correct process
station (to prevent mis-processing).
Multi-load: Operational mode allowing load or unload cycles to be performed in any sequence.
Operating Mode: Manual or automatic. Manual mode is an option for the equipment or service engineer
while automatic mode is the mode used by the user where the LPT is controlled by a Host computer, Process
Tool, or the user.
Port Plate: The top portion of the LPT minienvironment that supports the SMIF-Pod. The port plate houses
the status indicators, Pod latching/unlatching mechanism, the Pod door locking/unlocking mechanism, laser
assembly, and wafer seater.
Process Tool: The Customer's process equipment to which the LPT becomes an integral part. Also referred
to as the Host Tool.
Product: That which the Customer processes; typically semiconductor wafer material in cassettes.
SECS Communications: Semiconductor Equipment Communications Standard (SECS) interface is an
industry standard for communications between equipment.
SMIF-E™: (Controlled environment option) A configuration of the Asyst SMIF-System whereby an inert gas
environment, such as nitrogen (N2) can be achieved and maintained in the SMIF-Pod and cassette transfer
zone.
SMIF-Pod™: The sealed container housing the product cassette in which a controlled clean room
environment is maintained, hereinafter referred to as the Pod.
SMIF-Port: Interface between the SMIF-Pod and the minienvironment; also referred to as the port.
SMART-Comm™: The SMART-Comm is a multiplexing and communication protocol converting device that
increases operator and Process Tool efficiency. It connects process equipment, SMIF I/Os, bar code readers,
signal towers, Smart-Tag readers (SMART-Probe™), and other devices to the CIM LAN by multiplexing eight
(8) serial communications ports and eight (8) discrete digital outputs to a single Ethernet LAN port using high-
speed SECS messaging services (HSMS).
SMART-Tag™: A small, battery operated lot tracking device, containing a microprocessor and software, that
attaches to the SMIF-Pod, hereinafter referred to as the Tag. The Tag ensures that the product is correctly
routed by communicating with both the Process Tool and the Host production computer.
STS (SMART-Traveler™ System): A method of automating the work-in-progress management on the
production floor. It eliminates mis-processing via error-free validation. It links the Process Tools to the Host
computer aided manufacturing (CAM) system. It provides automated interlocked transfer between the SMIF
system and the Process Tool.
Squat: A function of the gripper. The gripper status prior to gripping or releasing a cassette in the process of
picking up or placing a cassette.
Standard Load: Operational mode where the LPT always performs an unload cycle after a load cycle.
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Tilt: A movement of the gripper. The wafers are tilted 30 degrees to reseat all wafers to reduce the chances
of breakage.
ULPA (ultra low particulate air): A filter element which is used in the FFU to maintain the minienvironment at
Class 1 or better during the time when the wafer cassette is out of the Pod.
Unload: Moving a product cassette from the Process Tool load station to the Pod.
V-Move: The transfer of product by gripping the top of a cassette to place it at the minienvironment on the
Process Tool cassette station.
Wafer Seater: An electro-mechanical mechanism attached to the bottom side of the port plate. When
actuated by the wafer sensor circuitry, the wafer seater will mechanically push an unseated wafer back into its
cassette slot to prevent breakage, when the cassette passes through the port and into the Pod.
Warnings: Warnings alert personnel to potentially hazardous conditions or actions that may result in
personal injury.
Gripper
Port Plate Rotation Pivot
V-Move
Gripper
Gripping
Cassette
User Side of LPT
Gripper In
Home Position
Stationary
Port Door
Vertical Arm
Axis
Vertical Arm
1.5 LABELS
CAUTION
LASER RADIATION WHEN OPEN
AND INTERLOCK DEFEATED.
AVOID DIRECT EYE EXPOSURE.
Figure 1-5. Pinch Hazard Label Figure 1-6. Pinch Point Caution Label
CAUTION
As a safety precaution, the LPT must be connected to an
earth ground. Failure to comply may result in personnel
being shocked or electrocuted.
Protective Chassis
Earth Ground Ground
Figure 1-8. Hazard Label Figure 1-9. Warning, Hazardous Voltages Label
ASYST TECHNOLOGIES Page 1-9
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Load Port Transfer™ System 2150 / 2200 Technical Manual
Pinch Point,
Bodily Injury
Label
Pinch Hazard.
Keep Hands Out
Of This Area
When Operating In
Manual / Service
Mode Without a
SMIF-Pod.
Danger Pinch
Hazard Labels
Warning
Hazardous
Voltages Label
Hazard Label
Fuse
Warning
Label
(LPT Viewed From Side) (LPT Viewed From Process Tool Side)
Chapter 2
SYSTEMS OVERVIEW
2.0 INTRODUCTION
This chapter provides an overview of Asyst Technologies Load Port Transfer system.
NOTE
Due to varying hardware configurations of the LPT,
the control panel may or may not be accessible to
the user. If the panel is visible on the vertical corner
of the user side of the LPT, then it may be usable.
Direct (non-Host control) control of the LPT is normally used for service purposes or
during alignment of the LPT to the Process Tool cassette-transfer mechanism.
Direct control of the LPT is performed using LOAD, UNLOAD, and HOME switches
on the control panel located on the rear (user side) of the LPT, if it is available, and
is not intended for the user to use for production purposes.
LOAD Pressing the LOAD switch begins a load operation, which initiates all of
the functions to move the cassette from the SMIF-Pod to the Process
Tool cassette station.
HOME The HOME switch can be pressed by the user if certain types of errors
occur. See Chapter 3 for a list of possible error conditions.
SMIF-Pod
Minienvironment
Cassette
Exhaust Fan
Ambient Air is pulled by the
fan, pushed through the filter
and into the minienvironment.
Air is exhausted from
inside the vertical
ULPA-Filter drive column to
remove particles
generated by the drive
Minienvironment Fan screw and motors.
1. The port door is seated to the port plate (Pod-door-closed interlock and minienvironment down-limit
switches are made).
2. The pod hold-down latches are retracted (open).
3. The wafer seater is retracted (in).
4. The vertical drive is at its Home switch.
5. The rotating arm is at its down-limit switch.
6. The gripper fingers are open.
7. The gripper head is vertical.
8. The READY indicator is lighted.
2. When commanded by the Host computer, Process Tool, or by user action, the load sequence begins.
The pod hold-down latches activate to secure the SMIF-Pod to the port plate and the pod-door locks
are unlocked from the SMIF-Pod top.
3. The minienvironment moves upward carrying the port plate with the SMIF-Pod top attached while the
port door and attached pod door and wafer cassette remain stationary.
NOTE
As the minienvironment is moving upward, if a cassette is not found, the load
cycle will be aborted.
The LOAD switch lamp (if available) blinks until the cycle is complete.
4. The vertical arm drive assembly moves up as the rotating arm rotates to position the gripper over the
cassette and stops. The vertical arm then moves down until the top of the cassette comes in contact
with the gripper and continues moving down, pushing on the cassette until it activates the squat
switches in the gripper and then stops. (In the case of an H-move, the gripper squats on the face of the
cassette.)
6. The rotating arm rotates forward (carrying the cassette) as the vertical arm moves down, then moves
up after clearing the interface frame to move the cassette straight out from the arm and into the
Process Tool. On some models of the LPT, the gripper rotates to seat the wafers in the cassette,
then returns to its horizontal position. If the material in the cassette is vertical or this is an H-Move,
the gripper rotates down and remains down.
7. The rotating arm continues forward until it reaches a taught position. The vertical arm moves up to a
programmed height.
8. The vertical arm moves down until the bottom of the cassette comes in contact with a Process Tool
indexer or cassette station, which triggers the squat switches in the gripper and the vertical arm
stops.
9. The gripper fingers open, releasing the cassette. The vertical arm then moves up to its original
position before the squat began. Simultaneously, the rotating arm rotates to is Home position, the
vertical arm moves down to its Home position (down limit) and the gripper rotates to the vertical to
clear the minienvironment.
10. The minienvironment is returned to the Home position to wait for the unload sequence.
CAUTION
During normal operation, once a cycle is started, the pod top
is locked to the port plate and cannot be removed. Do not try
to remove it. Failure to comply may result in damage to the
port plate and SMIF-Pod.
NOTE
The next operation performed on the Arm must be an unload. In single-load
mode another load operation will not be permitted until an unload is first
completed.
11. At the conclusion of processing, the Host computer or Process Tool will give the UNLOAD command.
The minienvironment was returned Home as in the previous step, it has to be moved up to accept the
cassette. The minienvironment will move up to its maximum height.
NOTE
In standard-load mode, as the minienvironment is moving up, if a cassette is
found on the port door, the unload cycle will be aborted.
NOTE
The UNLOAD lamp (if available) blinks until the cycle is complete.
13. The rotating arm rotates forward to a programmed position as the vertical arm moves up to a taught
height and stops.
14. The vertical arm moves down until the gripper comes in contact with the top of the cassette, which
triggers the squat switches in the gripper, and the vertical arm stops.
16. The vertical arm moves up some distance. Simultaneously, in some LPT models, the rotating arm
rotates upward, then the gripper head rotates (tilts) to seat the wafers. If the material in the cassette is
vertical or this is an H-Move where the gripper rotates up and remains up, there is no gripper rotation.
17. The vertical arm moves up to its original position before the squat.
18. Simultaneously, the rotating arm and vertical arm move to position the cassette over the port door.
19. The vertical arm moves down and the bottom of the cassette comes in contact with the pod door,
then continues downward until the top of the cassette triggers the gripper squat switches and stops.
22. Simultaneously, the rotating arm moves up to the vertical position, the vertical arm moves down to a
taught position, and the gripper head rotates to the vertical.
23. The minienvironment moves down. As the cassette is passing through the port plate, the horizontal
laser sensor checks for protruding wafers.
24. The pod door locks and the pod hold-down latches unlock. The minienvironment is at its down limit
(Home), pod door closed (locked), and pod hold-down latch disengaged-interlock switches are all
made.
25. The UNLOAD switch lamp (if available) stops blinking and the LOAD switch lamp (if available) lights.
The SMIF-Pod may be removed; the LPT is now ready to perform the next load operation.
Minienvironment
Drive Mechanism
Stationary
Drive Screw
Vertical Arm
Drive
Mechanism
Minienvironment Drive
SMIF-Pod
Rotating Arm (Extended)
Port Plate
Gripper Rotation Pivot
Minienvironment
(Shown Raised)
V-Move Gripper
Cassette On
Stationary Port
Door
Arm Rotation
Axis
Access to
Electronic
Circuit Boards
And The Power
Supply
CASSETTE GRIPPER. The gripper drive (Figure 2-5) is a servo-motor driven assembly attached to the
vertical arm. This assembly enables tilt-motion for the cassette when commanded, and provides for the
continuous movement of the cassette so that the cassette can be held level at all times when the
cassette is transferred between the LPT and the Process Tool.
Displacement activated optical squat switches are located within the gripper to provide the Arm with a
sense of touch. Two (2) squat switches are used for V-Move systems and three (3) for the H-Move
systems. During load and unload cycles, the gripper performs a squat just prior to the gripper fingers
opening or closing.
2.4.2 MINIENVIRONMENT.
The top portion of the minienvironment is the SMIF-port. Located in the lower portion is a fan and ULPA
(ultra-low particle air) filter element which provides the minienvironment with a self-contained filtered air
system. The minienvironment structure is servo-motor driven to move vertically in response to a LOAD or
UNLOAD command. When a LOAD or UNLOAD command is given to the LPT, the minienvironment raises
the port plate with the attached pod top leaving the pod door and cassette stationary. The cassette remains
on the stationary port door, in a clean environment.
frame and is stationary. The 200mm port door houses the pod door lock and unlock drive mechanism and a
pod-in-place sensor. In the 150mm port, the pod door lock and unlock and pod-in-place sensor functions are
contained on the port plate. The port plate has two (2) SMIF-Pod guides / covers. One cover contains a
SMART-Tag probe and status indicator lights to indicate POWER, READY, and POD IN PLACE information.
Also part of the port assembly are the pod hold-down latch mechanism, the optical detector system, excessive
wafer protrusion sensor, wafer re-seater mechanism, and the optional FluoroTrac antenna (if equipped).
The excessive wafer protrusion sensor is a down looking sensor. The electronic circuit is adjusted to detect
an excessively protruding wafer when it is one inch below the port plate. If the sensor detects a wafer, the
system is halted. The wafer must then be manually reseated and the process restarted.
Pod Alignment
Pod In Place Pins (3)
Switch
Tag Reader
Power Light
Pod In Place
200mm Port Door
Switch
Pod Alignment
Pod In Place Light Pins (3)
Ready Light
Power Light
Tag Reader
SERVO CONTROLLER
6900-1283-01 J1 P1 PARALLEL I/O CONNECTOR PANEL
TO ELEVATOR MOTOR PCM-U1O48 9700-4084-XX
SERVO AMP P2 P/O P8
6900-1284-01 9700-4081-01 P/O J8
P1 J1 J2 PARALLEL PORT
SERVO PWR (1-34) P1
34 DB25F
9700-4083-01
6900-1355-01
J2 PORT A (SPARE)
PC/104 BUS DB9M
9700-4072-01 9700-4082-01
9 5 P6B
P10 SERIAL I/O PORT B (TEST)
SERVO AMPLIFIER PCM-COM4A J1
6900-1272-01 P3 J10 DB9M
J6 P6 6900-1290-01 CHAN2 J6B
J3 U2 CHAN3 (TAG)
J1
P3 CHAN2(11-20)
J1 P1
PORT CONTROL 5 SERVO J6 P6 10
P1 (INDEXER) 9700-4108-01 JDC J3 9700-4109-01 PORT C (LAPTOP)
9700-3717-01 J7 J4
P5 J5 P7 10 CHAN1(1-10) 20 DB9M
2 2
SPARE 10
P22 P22 5 CHAN4 (HOST)
9 2 J6A P6A P/O P7
J12 PORT D (HOST)
9700-4080-01 P/O J7 J3
2 INDEX PWR P12 DB9M
10 (11-20)
CHAN1
11 9700-3706-01 2 P/O P7
4 PC/104 BUS
9700-4080-01 P/O J7
TEST (N/C)
10 (1-10)
J11 P11 P/O P7
MINIENVIRONMENT SERIAL1(1-10)
HOST 9700-4080-01 P/O J7
DC-DC CONVERTER FAN (21-40)
3200-1061-01 SERIAL2(11-20) 20
P2 P2
(LAPTOP)
J13 P13 P/O P8
2 INX PWR SERIAL3(1-10)
(TOOL) 9700-4081-01 P/O J8
(35-54)
SERIAL4(11-20) 20
P4 P4 P10 (TEACH PENDANT)
9700-4075-01 J10 J7 P7
P3 P3 6900-1282-01 J9 LAN
CPU POWER 4 ETHERNET RJ45
POWER 8 8
SERVO PWR 2
J16 P16
9700-4267-01 J5 PORT E (TOOL)
P21 UTILITY I/O 6900-1115-01 DB9M
(7-8) 2
CPU PCB J6 TEACH PENDANT
P21 6900-1285-01 CPC8F
2 P5 P5 P/O P8
9700-4081-01 P/O J8 J10 AC POWER
FRONT 7 (CONN POWER) (55-62)
7
SWITCH
PANEL P1 P1 P20 J20
ASSY 9700-4074-01 POWER SUPPLY 9700-4073-01 9700-4078-01
24V PWR 3 6200-2009-01 3 3
OUT IN
GND
J24 P24
2
FAN
9700-4337-01 9700-4338-01
9700-3732-01 (ON/OFF CONTROL)
9700-4079-01 2
Servo Amplifier
Indexer
Control
Interface
Board
Indexer
CPU
Board
2.5.2.1 POWER.
The +24 vdc (+10%, -5%) input power is applied through external connector J5 to the Main Control PCB. The
input voltage is sent to a reverse-voltage-protection diode that ensures only the correct polarity 24 vdc is
accepted. A circuit monitors over/under voltage and over-current situations to control the +24 vdc transistor
power switch. An acceptable band of +19.5v to +30.0v (nominal) input voltage is required to allow the
transistor switch to turn on. Outside this voltage band, the transistor switch will be off.
Any over-current situation is detected via a sense resistor. If a 24v current greater than 5.0 amps nominal is
detected, the transistor power switch will turn off or will be tripped. If the switch is tripped, 24v power must be
shut off and then turned on to reset the LPT.
A second over/under voltage circuit is used to detect a power failure and signal the CPU. The acceptable
range for this circuit is from +22.8v to +26.4v (nominal). This voltage is within the range of the first over/under
voltage circuit, described above. Voltage outside the acceptable range gives a power fail signal, which allows
ASYST TECHNOLOGIES Page 2-11
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Load Port Transfer™ System 2150 / 2200 Technical Manual
for orderly shutdown of motors and the saving of certain run-time parameters and data to the battery-backed
static random access memory (SRAM). Data is saved before transistor power is switched off, as described in
the previous paragraph.
The +24v switch voltage from the transistor power switch provides power for the motor-driver circuits and the
dc-to-dc converter. The converter provides +5v to the digital circuitry and ±12v for analog and interface
circuitry.
2.5.2.2 CPU.
The CPU microprocessor is an 80C188. This processor provides a 16-bit internal and 8-bit external data
transfer bus running at 16 MHz.
2.5.2.4 SRAM.
The SRAM is battery backed to provide a long-term non-volatile random-access memory (NOVRAM). This is a
readable-writeable memory source for the storage of equipment configuration data and history. The battery
(Lithium type) is self contained in the NOVRAM socket device and has an estimated shelf life of ten years.
J7 J9
J5
J10
J6 J8
2.5.2.9 SENSORS.
All sensors used on the LPT are optical sensors. The optical sensors are either break-the-beam type or beam-
intensity-threshold type.
1. OPTICAL SENSORS. The light beam is detected by the following beam-intensity threshold optical
sensors:
• Wafer sensor
• Slot sensor
• Protrusion sensor
The light beam is sent through two (2) beam splitters and reflected off of two (2) mirrors to strike
three (3) horizontal view sensors (see Figure 2-10). These sensors feed intensity information from
the sensor, as a voltage level, to the comparators which have a programmable threshold. This
voltage level is detected by a comparator whose reference is set by a digital-to-analog converter
(DAC). Here, a 0v to 5.0v input level will equal a 0 to 255 count from the CPU to the DAC. The
outputs of the comparator are processed via the digital I/O.
a) WAFER SENSOR. The light beam is first directed to a precision optical beam splitter that
reflects a portion and transmits a portion of the light. The reflected light travels across the mid
point of the port opening. On the opposite side of the port door opening, the light is directed
through an aperture and then strikes a sensor. This sensor is used to furnish positional
information about individual wafers. The information is then stored into memory as internal data
collected for cassette wafer mapping. This sensor is also used to determine cross-slotted errors.
b) SLOT SENSOR. The transmitted light beam from the first beam splitter is directed at a second
beam splitter. This beam splitter evenly splits the light into two beams. The reflected beam
travels at an angle across the port opening. The angle of the beam is such that the light path will
pass through the cassette wafer slot openings on one side of the cassette as it travels up or
down with the minienvironment. The beam is then projected through an aperture to a sensor on
the opposite side.
c) PROTRUSION SENSOR. The transmitted light beam from the second beam splitter is projected
across the cassette opening and through an aperture and onto a sensor on the opposite side.
This sensor is used to detect any wafers which may be protruding beyond the front of the
cassette. This would cause damage to the wafer if the minienvironment was returning the
cassette into the SMIF-Pod. Activation of this sensor causes the wafer seater mechanism to
reseat the out-of-position wafer.
PROTRUSION SENSOR
<1 mW
LASER DIODE
67O NM VISIBLE RED
RETROREFLECTIVE
INFRARED SENSOR FOR PARTIAL VIEW OF
EXCESSIVE WAFER BEAMSPLITTER CASSETTE SLOTS
PROTRUSION
(Vertical View)
WAFER AT SOME
EXCESSIVELY PROTRUDED
2
POSITION 10 mm
FIRST SURFACE
BEAMSPLITTER MIRRORS
2. OPTICAL-LIMIT SWITCHES. The optical-limit switches (break-the-beam type) are small electronic
devices that provide an off and on signal via the digital I/O to interrupt the processor when actuated.
Their functional applications are:
• Pod-in-place
• Pod lock – unlock
• Pod hold-down latch – latched / unlatched
• Elevator up limit
• Elevator down limit
3. EXCESSIVE WAFER PROTRUSION SENSOR. The excessive wafer protrusion sensor, vertical
view, uses an IR emitter / receiver (retroreflective) sensor. If a wafer were to be positioned too far out
of the cassette for the wafer seater to correct, this sensor would detect the wafer long before it could
pose a problem. Detection is by direct reflection off the wafer’s top surface. Upon detection, the LPT
will halt and the Process Tool will halt so that the wafer can be manually reseated into the cassette
slot. The process must then be restarted.
NOTE
Optical limit switches associated with the actuator motors and elevator motor
have software generated time limits for actuation. Failure to actuate in a
given period of time will cause the dc-motor to stop motion.
2. POD-DOOR LOCK MOTOR. The pod-door lock motor is driven by an amplifier-driver. When the
motor runs the pod-lock mechanism to its locked position, the lock-limit (switch) is detected, thus
turning off the motor. This is the same procedure for the motor and the unlock-limit switch. Motor
current is sensed through the driver circuit. If the motor were to stall, current would be limited until the
condition was cleared. If a shorted motor winding or some other type of short circuit were to occur,
the over-current would be tripped. The trip condition can be reset by powering down the LPT and
then reapplying power.
The pod-lock motor has the pod-open and pod-closed limit switches that ensure that the motor is de-
energized when it has reached the desired position.
3. DC STEPPER MOTORS. The DC stepper motor for the pod hold-down latch and the wafer seater
motor each have their own stepper-motor driver, but they share a step sequencer, since these
motors will never be energized at the same time. A current limiter is provided should an overcurrent
or short circuit occur in the motor wiring.
Each motor has limit switches that will cause the motor to stop if a maximum travel limit is exceeded.
2. DC STEPPER MOTORS. The DC stepper motor for the pod lock / unlock and the wafer seater
motor function is the same as the LPT 2200.
Power Supply
Figure 2-12. LPT System Control Board and Power Supply Assembly
Chapter 3
3.0 INTRODUCTION
This chapter provides information for troubleshooting problems associated with the LPT.
3. The Process Tool has power, 3. Check LPT main power fuse.
the LPT power cord is
attached, but there are no
lights.
Indication: The POWER light is 1. The Host computer or the 1. Wait for the LPT to perform
lit, but the READY light will not Process Tool have issued a the task ordered.
light. command to the LPT.
2. LPT will not respond. 2. Using the Teach Pendant,
select the configuration menu
and ensure that the LPT is
configured to communicate
properly with the Process
Tool or Host computer.
Indication: The POD-IN- 1. The SMIF-Pod is not properly 1. Ensure that the SMIF-Pod is
PLACE light will not light when a seated on the port plate. sitting flat on the port plate in
SMIF-Pod is placed on the LPT the proper orientation.
port plate.
2. Pod-in-place switch is not 2. Perform procedure CAP 10 in
calibrated. Chapter 4; Service.
3. Electronic problem. 3. Troubleshoot.
Indication: The Host or 1. The serial communications 1. The Host always utilizes the
Process Tool has sent a cable is not plugged into the serial port D connector while
command to the LPT, but proper connector at the base. the SMART-Tag may be
nothing happens. configured to use port D or E.
Push the plug onto the LPT
connector and tighten the
connector hold-down
screws.
2. The communications 2. Using the Teach Pendant,
configuration has not been select the configuration menu
setup for the LPT. and ensure that the LPT is
Baud rate = 9600 configured to communicate
Parity = None with the Process Tool or Host
Data bits = 8 computer. See LPT
Stop bit = 1 Installation Instructions for
configuration setup.
3. The jumpers W1 and W2 on 3. Remove jumpers W1 and W2
the parallel interface have not to restore Host control.
been removed for Host
control.
It is important when troubleshooting the LPT to know which error messages were generated by the system for
a given problem. The error message on line 4 of the Teach Pendant is either the first alarm message or the
most critical alarm message. Additional messages may be created if additional assemblies create error
messages because of the primary error occurring. Example: the minienvironment servo has a following error
at the same time that the vertical arm is going to Home which creates an arm error.
There are two (2) types of errors: recoverable and non-recoverable. If the Teach Pendant displays a
recoverable error (see Table 3-2), the user need only provide the missing SMIF-Pod or cassette, or start the
process. If a non-recoverable error is displayed, a malfunction has occurred and troubleshooting and
adjustment or component replacement is required to clear the problem.
TIPþ
If an error occurs and the HOME light (if available) on the operator control
panel is lighted, the error is recoverable.
Recoverable Non-Recoverable
Aborted by user Elevator fails to reach target position
Cassette not present Excessive wafer out error
Indexer busy Flash sensor malfunction
Not Home Loss of configuration data
SMIF-Pod removed Port door failed to close
Page 3-6 ASYST TECHNOLOGIES
2000-0900-01 Revision A
Load Port Transfer™ System 2150 / 2200 Technical Manual
NOTE
Reported errors as noted in Tables 3-3 and 3-4 may be interactive. Example:
SMIF-Pod failed to lock, followed by an . . . alarm reported, followed by
failed to move, followed by some other alarm in sequence. In this example
the last alarm reported was not the cause. The original error was the SMIF-
Pod not locking, but the last alarm message points to something else.
TABLE 3-4. ERRORS REPORTED BY LPT GENERAL SYSTEM USAGE; ALL TASKS
Table 3-4. Errors Reported by LPT General System Usage; All Tasks (Continued)
NOTE: I: Refers to a port (minienvironment) error condition.
Table 3-4. Errors Reported by LPT General System Usage; All Tasks (Continued)
When configuration change is received and Host has defined LPT configuration
HOST set AND_REMOTE Status information
HOST set LOCAL Status information
HOST set OR_REMOTE Status information
Table 3-4. Errors Reported by LPT General System Usage; All Tasks (Continued)
These are derived from status returned by I/O task if no unique error was determined
Arm Estop status
Arm not home Status information
Arm soft stop status
Arm status failed Status information
Arm status timeout Status information
Error of unknown type Status information
Gripper closed status
Gripper open status
Gripper overtravel limit Status information
Holddown closed status
Holddown open status
SMIF-Pod detected status
SMIF-Pod door closed status
SMIF-Pod door open status
Port Estop status
Port locked status
Port not home status
Port not station status
Port overtravel limit Status information
Port status
Port status failed Status information
Port status timeout Status information
Port unlocked status
Rotate brake on Status information
Rotate forward limit Status information
Rotate home status
Table 3-4. Errors Reported by LPT General System Usage; All Tasks (Continued)
Table 3-4. Errors Reported by LPT General System Usage; All Tasks (Continued)
These can occur if Escape key is pressed and at Home and not busy
Estop busy Status information
Estop done Status information
Estop failed Status information
Estop in progress Status information
Estop request failed Status information
Estop reset busy Status information
Estop reset done Status information
Estop reset failed Status information
Estop reset in progress Status information
Not initialized Status information
Reset to HOME_TP
Gripper
Rotation
HOME
D17–D21
RLS
FLS
Gripper D1–D12
Limit
GR CLOSED
Tilt GRIPPER ROT GR OPENED
Switch
TILT SQUAT N C
Function
Vertical VERTICAL SQUAT N O
Indicators
Arm ROTATE OVER TRAVEL
Rotating
Arm
Home
Indicators
+12vdc Power
Indicator
+5vdc Power
Indicator
+12 V
–12vdc Power
+24vdc Input Indicator
+5 V
Indicator
–12 V
+24 V
Power Indicators
(Lighted When Power is Present)
Chapter 4
SERVICE
NOTES
1. Before attempting to perform service or adjustments to the LPT, this
chapter must be read and understood.
2. When making adjustments to LPT mechanisms, it may be necessary to
remove certain panels to gain access.
When the LPT is removed from the Process Tool and covers are removed from around the LPT, personnel
may be exposed to the laser light beam. Especially when the technician/engineer is aligning the mirrors,
beamsplitters, or beam sensors, the technician/engineer will be exposed to the beam. When anyone is
exposed to the laser beam, direct eye exposure to the beam is to be avoided.
CAUTION
LASER RADIATION WHEN OPEN
AND INTERLOCK DEFEATED.
AVOID DIRECT EYE EXPOSURE.
4.1.2 FUSES
Electrical fuses are used to protect personnel from electric shock and electrical components from fire and
destruction. Fuses must be replaced with the exact type and rating. A list of fuses and their locations is given
in Table 4-1. Figures 2-14 and 4-2 show fuse locations.
NOTE
All fuses are metric size 5X20mm.
Input power fuses are removed by pressing up on the latching tab on the fuse holder portion of the power
connector (see Figure 4-2). With pressure applied to the tab, pull straight out to remove the fuse holder.
4.2.1 LUBRICATION.
Lubrication of certain moving components of the LPT is required. Gears and the lead screw need grease or
oil after a certain number of cycles or elapsed time in service. These lubricants were chosen for their
performance, other lubricants should not be substituted.
NOTE
Lubricants are special low-outgassing compounds with characteristics
chosen for contamination-free operation of the LPI. Other lubricants should
not be substituted.
_______________________________________________________________________________________
NOTE
The ULPA filter will last 5 to 7 years, under normal conditions, when the LPT
is operated in a Class 1000 or better cleanroom.
NOTE
The LPT fans typically have a life of approximately 50,000 hours.
4.2.3 REQUIRED TOOLS. Specific tools are required to perform certain service tasks. Tools may
be purchased from Asyst Technologies where Asyst part numbers are provided:
Description Asyst Part Number
Grease gun 1000–0306–01
Squat switch adjustment tool 1000-0096, Rev B
Port-door clearance gage 1000-0126-01
Minienvironment test window 1000-0427-01
Description
Air velocity meter; Shortridge Instruments, Inc., Model 860 or equivalent
Process Tool Simulator – A fixture that is suggested, but not required, is a platform to support the
cassette when performing autocycling or manually controlled cassette placement testing as performed
within a service procedure. The platform would be created to be at the exact height of the cassette
landing point on the Process Tool. This fixture would prevent having to change the load height calibration
for the LPT and would exactly simulate the Process Tool for testing purposes. It need not be more
complicated than a table top surface raised to be at the proper cassette load height.
AUTHORIZED PROCEDURES
LIST OF PROCEDURES
PSP
01 Inspect and Clean the LPT and Lubricate Vertical Lead Screw
PSP 01
PREVENTIVE SERVICE PROCEDURE Semiannual Procedure
EQUIPMENT
LOAD PORT TRANSFER™ SYSTEM
TASK
INSPECT AND CLEAN THE LPT AND LUBRICATE VERTICAL LEAD SCREW
PROCEDURE
1. PRESERVICE
A. With the minienvironment in the Home position, remove power from the LPT. Remove all
cable connectors attaching the LPT to the Process Tool or Host computer. Release the
latch(es) securing the LPT to the Process Tool and remove the LPT.
B. Place the LPT in a suitable location for inspection. Using a 5/32 inch hex driver, loosen two (2)
hex screws located at the bottom of the three-sided plastic cover . Using a 7/64 inch hex
driver, unscrew the captive screw at the side, top, of the cover. Using a phillips screwdriver,
loosen two (2) screws located at the other side of the cover. Grasp the cover at the top and lift
up and pull straight off. Set cover aside.
C. Using a phillips screwdriver, remove one (1) screw on the top, center, of the vertical support
cover. Using a 3/32 inch hex driver, remove three (3) hex screws located at the top. Using the
hex driver, loosen one screw at the bottom. Grasp the handle at the top of the cover and lift
and pull straight off. Set cover aside.
D. Remove the minienvironment plastic window panel by pressing fingers onto the panel and
pushing inward and upward a small amount. When the bottom of the panel has cleared the
sheet metal, grasp the bottom of the panel by hand and pull straight out removing the panel.
Set panel aside.
E. Located on the gripper-tilt cover (see Figure PSP-1-4); LPT Series 1, using a phillips
screwdriver, remove one (1) screw on the top and one (1) screw on the bottom-front, LPT
Series 2, using a 3/32 inch hex driver, loosen two (2) hex screws on the cover top. Using the
phillips (Series 1) or hex driver (Series 2), remove one screw holding the cable clamp.
Remove the screw and clamp. Move the cable out of the way. Grasp the cover at the top and
pull out (horizontally) and then up. Set cover and screws aside.
2. SERVICE
A. Perform a visual inspection of the LPT and inspect for any of the irregularities as outlined
below. If inspection reveals a problem, correct immediately.
1. Cords and cables for nicks or abrasions.
B. If installed, visually inspect the kinematic track. If dirt and debris are found, using a lint-free
wipe, clean the track. Ensure that the track is clean and free of obvious dents and damage.
C. Visually inspect the moving components of the LPT such as the lead screw and slide assembly
components, minienvironment drive, the minienvironment guide wheels, the vertical arm
assembly, and the rotating arm / gripper drive assembly components. Look for any indications
that show abnormal wear or alignment problems. If problems are found, refer to Corrective
Service Procedures in this chapter.
WARNING
Use alcohol in a well-ventilated area. Do not inhale
vapor and avoid contact with eyes. Prolonged or
repeated breathing may cause drowsiness, nausea, or
vomiting. Alcohol may be fatal or cause blindness if
swallowed. Failure to comply may cause death.
WARNING
Keep alcohol away from heat, sparks, and open flame.
Failure to comply may result in serious burns.
D. If optical system mirrors and beam splitters show contamination, clean with alcohol using lens
tissue or cleanroom swab. DO NOT RUB – Rubbing will remove the optical coating on the
mirrors and beam splitters. Drag the cloth or swab across the glass surface to sweep the
solution across the glass and to float the contamination away.
E. Using a clean lint-free wipe moistened with alcohol, wipe both sides of the mylar tape located
on the inside of one of the vertical side columns. Wipe the full length of the tape. Continue to
wipe the tape until the cloths show no signs of dirt.
F. Connect the Teach Pendant and then connect AC power to the LPT. Provide a calibrated-height
cassette-landing position. Place a SMIF-Pod with cassette on the port. Use the Teach Pendant
to command the LPT to cycle up and down:
WARNING
Laser radiation is present when the port plate raises
and the interlock is defeated. Avoid direct eye
exposure.
H. Observe the plastic shield panels for smooth operation while the minienvironment drives up and
down, panels must not hang up.
I. From the Teach Pendant AUTO CYCLE menu, select STOP AUTOCYCLE.
J. Visually inspect the lead screw assembly. If problems are discovered, refer to Corrective
Service Procedures section of this chapter if a component needs to be replaced or repaired
contact Field Service Organization for assistance with the assembly.
K. Wearing gloves, use one hand to hold a clean, lint-free cloth as a splatter shield behind a
portion of the leadscrew. Using a synthetic bristle brush (tooth brush or equivalent) and alcohol,
clean the grooves in the lead screw in front of the cloth. Change cloths as often as necessary to
ensure that the grease is not splattered. When as much as possible of the trapped grease is
removed from the screw, using a clean, lint free cloth moistened (not dripping) with alcohol,
wipe the lead screw clean. Clean all accessible surfaces of the screw. Continue to wipe the
leadscrew using lint-free cloths and IPA until cloths show no signs of grease residue. See
Figure PSP-1-2.
L. After the IPA has dried, apply a few drops of oil to the top of the minienvironment drive nut
bearing (this is a shielded bearing, apply oil to the shield surface on the top-middle section of
the bearing).
M. Apply grease to the leadscrew. Apply a thin even coat to the section of the screw that the drive
mechanism uses to lift and lower the minienvironment and the section of the screw used by the
arm drive to raise and lower the arm assembly.
N. Use the Teach Pendant to command the LPT to cycle up and down to spread the grease:
WARNING
Laser radiation is present when the port plate raises
and the interlock is defeated. Avoid direct eye
exposure.
O. From the Teach Pendant AUTO CYCLE menu, select STOP AUTOCYCLE.
P. Using a lint-free cloth, wipe away any excess grease or oil which may have collected at the
bottom and top of the leadscrew.
R. Using a 9/64 inch hex wrench, loosen the automatic tensioner screw on the side of the arm, as
shown in Figure PSP-1-3. The chain tension will be reset. Using a torque wrench or torque
screwdriver, retorque the screw to 24 inch-pounds.
S. Remove power from the LPT then remove the Teach Pendant.
3. POSTSERVICE
A. Grasp the handle at the top of the vertical support cover and place onto the LPT. Using a hex
driver, replace three (3) screws at the top and tighten one (1) screw at the bottom-front of the
cover. Replace the one (1) phillips screw on the top center of the cover.
C. At the top of the opening in the minienvironment, replace the plastic panel on the
minienvironment by slipping the panel up and inside the minienvironment a small amount.
Push the bottom of the plastic panel toward the opening while pushing upward. When the
panel has cleared the sheet metal at the bottom of the opening, let the panel slide down onto
the metal brackets at the bottom, inside, of the opening in the minienvironment.
D. Place the LPT three-sided plastic cover with the metal brackets in place above the screws on
the sides of the LPT. Lower the cover onto the screws and using hex drivers and a phillips
screwdriver, tighten two (2) screws located at one side of the cover and two (2) screws on the
bottom at the other side. Tighten the captive at the top of one side to secure the cover to the
LPT.
E. Replace the LPT back onto the Tool and secure. Reconnect the communications cable(s) and
then the power cable.
F. Using the Teach Pendant, verify the teach points using the AUTOCYCLE key to ensure that the
LPT properly places the cassette into the Process Tool and back onto the Pod door.
Vertical
Support Plastic
Cover Shield
Panels
Fans
Mylar
Strip
Gripper-Tilt
Cover
(See Figure
PSP-1-4)
Vertical Arm
Guide Wheel
(1 of 2)
Flex Cables
Fan Inside
Minienvironment
LPT Front
Cover
LPT Plastic
Safety Shield
Series 2 Drive
Minienvironment
Drive Assembly
Drive Belt
Slide-Bearing
Block
Drive Nut
Assembly
Leadscrew
Slide
Vertical Arm
Drive
Assembly
Drive Belt
Drive-Nut
Assembly
Series 1 Drive
Auto-tensioner
Screw
Vertical Arm
Assembly
Series 2
Cover Screws
(2 each)
Series 1
Cover Screws
(2 each)
Gripper Tilt
Assembly
Cover
Gripper Cable
Clamp and Screw
PSP 02
PREVENTIVE SERVICE PROCEDURE Annual Procedure
EQUIPMENT
LOAD PORT TRANSFER™ SYSTEM
TASK
INSPECT, CLEAN, LUBRICATE AND PERFORM CLEANLINESS ASSURANCE
PROCEDURE
1. PRESERVICE
A. With the minienvironment in the Home position, remove power from the LPT. Remove all cable
connectors attaching the LPT to the Process Tool or Host computer. Release the latch(es)
securing the LPT to the Process Tool and remove the LPT.
B. Place the LPT in a suitable location for inspection. Using a 5/32 inch hex driver, loosen two (2)
hex screws located at the bottom of the three-sided plastic safety cover. Using a 7/64 inch hex
driver, unscrew the captive screw at the side, top, of the cover. Using a phillips screwdriver,
loosen two (2) screws located at the other side of the cover. Grasp the cover at the top and lift
up and pull straight off. Set cover aside.
C. Using a phillips screwdriver, remove one (1) screw on the top, center, of the vertical support
cover. Using a 3/32 inch hex driver, remove three (3) hex screws located at the top. Using the
hex driver, loosen one screw at the bottom. Grasp the handle at the top of the cover and lift and
pull straight off. Set cover aside.
D. Remove the minienvironment plastic window panel by pressing fingers onto the panel and
pushing inward and upward a small amount. When the bottom of the panel has cleared the
sheet metal, grasp the bottom of the panel by hand and pull straight out removing the panel.
Set panel aside.
E. Located on the gripper-tilt cover (see Figure PSP-2-3); LPT Series 1, using a phillips
screwdriver, remove one (1) screw on the top and one (1) screw on the bottom-front, LPT
Series 2, using a 3/32 inch hex driver, loosen two (2) hex screws on the cover top. Using the
phillips (Series 1) or hex driver (Series 2), remove one screw holding the cable clamp. Remove
the screw and clamp. Move the cable out of the way. Grasp the cover at the top and pull out
and then up. Set cover and screws aside.
B. If installed, visually inspect the kinematic track. If dirt and debris are found, using a lint-free
wipe, clean the track. Ensure that the track is clean and free of obvious dents and damage.
C. Visually inspect the moving components of the LPT such as the lead screw and slide assembly
components, minienvironment drive, the minienvironment guide wheels, the vertical arm
assembly, and the rotating arm / gripper drive assembly components. Look for any indications
that show abnormal wear or alignment problems. If problems are found, refer to Corrective
Service Procedures in this chapter.
WARNING
Use alcohol in a well-ventilated area. Do not inhale
vapor and avoid contact with eyes. Prolonged or
repeated breathing may cause drowsiness, nausea, or
vomiting. Alcohol may be fatal or cause blindness if
swallowed. Failure to comply may cause death.
WARNING
Keep alcohol away from heat, sparks, and open flame.
Failure to comply may result in serious burns.
D. If optical system mirrors and beam splitters show contamination, clean with alcohol using lens
tissue or cleanroom swab. DO NOT RUB – Rubbing will remove the optical coating on the
mirrors and beam splitters. Drag the cloth or swab across the glass surface to sweep the
solution across the glass and to float the contamination away.
E. Using a clean lint-free wipe moistened with alcohol, wipe both sides of the mylar tape located
on the inside of one of the vertical side columns. Wipe the full length of the tape. Continue to
wipe the tape until the cloths show no signs of dirt.
WARNING
Laser radiation is present when the port plate raises
and the interlock is defeated. Avoid direct eye
exposure.
G. Listen for any noises that may indicate an out of alignment component or condition. Listen for
the two (2) fans. If abnormal noises are heard, refer to the Corrective Service Procedures
section of this chapter or call for Field Service.
H. Observe the plastic shield panels for smooth operation while the minienvironment drives up and
down, panels must not hang up.
I. From the Pendant AUTO CYCLE menu, select STOP AUTOCYCLE.
J. Visually inspect the leadscrew assembly. If problems are discovered, refer to Corrective
Service Procedures section of this chapter if a component needs to be replaced or repaired
contact Field Service Organization for assistance with the assembly.
K. Wearing gloves, use one hand to hold a clean, lint-free cloth as a splatter shield behind a portion
of the leadscrew. Using a synthetic bristle brush (tooth brush or equivalent) and alcohol, clean
the grooves in the lead screw in front of the cloth. Change cloths as often as necessary to
ensure that the grease is not splattered. When as much as possible of the trapped grease is
removed from the screw, using a clean, lint free cloth moistened (not dripping) with alcohol, wipe
the lead screw clean. Clean all accessible surfaces of the screw. Continue to wipe the leadscrew
using lint-free cloths and IPA until cloths show no signs of grease residue. See Figure PSP-2-4.
L. Using a clean, lint free cloth moistened with IPA, wipe the slide clean. Clean all surfaces of the
slide assembly. Continue to wipe the slide using lint-free cloths and IPA until cloths show no
signs of grease or oil residue.
M. If equipped, remove the copper spring clip at the top of the vertical-arm drive slide-bearing block
and at the bottom of the minienvironment drive slide-bearing block. Using a 3/32 inch hex driver,
remove two (2) screws securing the clip to the block. Set the clip and screws aside.
N. After the IPA has dried, find the grease fitting on the top of the top slide-bearing block and the
fitting on the bottom of the bottom slide-bearing block. Using the grease gun, gently apply a
small amount of grease (7500-2078-01) at the grease fitting until grease is seen coming through
the seals at the bearing block-to-slide surface. See Figure PSP-2-4.
O. Using oil, apply a thin film of oil to the length of the slide. Apply oil to each of the exposed sides
of the slide.
Q. Apply grease to the leadscrew. Apply a thin even coat to the section of the screw that the drive
mechanism uses to lift and lower the minienvironment and the section of the screw used by the
arm drive to raise and lower the arm assembly.
S. Use the Teach Pendant to command the LPT to cycle up and down to spread the grease:
WARNING
Laser radiation is present when the port plate raises
and the interlock is defeated. Avoid direct eye
exposure.
T. From the Teach Pendant AUTO CYCLE menu, select STOP AUTOCYCLE.
U. Using a lint-free wipe, wipe away any excess grease or oil which may have collected at the
bottom and top of the slide and lead screw.
V. Replace the copper spring clips (if used) at the top and bottom of the slide-bearing blocks.
Secure the clips with two (2) screws each.
W. Using a 9/64 inch hex wrench, loosen the automatic tensioner screw on the side of the arm, as
shown in Figure PSP-2-2. The chain tension will be reset. Using a torque wrench or torque
screwdriver, retorque the screw to 24 inch-pounds.
X. If the LPT gripper is V-move, depending on the configuration, the gripper may be in the correct
orientation. If not, using the Teach Pendant, depress <TILT UP> to move gripper to gain
access to the top cover.
If the gripper is H-move, using the Teach Pendant, depress <HORZ OUT> and <TILT UP> as
necessary to gain access to the gripper top cover.
Y. Using a phillips screwdriver, remove nine (9) screws securing gripper-assembly top cover.
Z. Inspect gripper components for undue wear on mechanical components (see Figure PSP-2-5).
Inspect gripper for possible electrical problems such as broken wires or wires pinched by
moving mechanical components. Correct problems as they are encountered.
BB. Using a long needle-type applicator, apply a single drop of oil to each gripper-link pivot point
(see Figure PSP-2-5). There are a total of eight (8) pivot points; 4-upper and 4-lower.
Exercise gripper by depressing <Gripper Open> and <Gripper Close> several times. Using a
lint-free cloth, wipe any excess grease from gear or oil from pivot points.
CC. Replace the gripper assembly cover and secure with nine (9) screws.
EE. Grasp the handle at the top of the vertical support cover and place onto the LPT. Using a hex
driver, replace three (3) screws at the top and tighten one (1) screw at the bottom-front of the
cover.
FF. Replace the gripper-tilt assembly cover by sliding the cover over the assembly and aligning the
screw holes. Series 1; replace the two phillips screws and tighten. Series 2; tighten the two
screws on the cover top. Replace the clamp and screw for the cable and ensure that the cable
is under the clamp when securing the screw (Series 2; the exposed copper braid must be
under the clamp before securing.
GG. Replace the LPT back onto the Tool and secure. Reconnect the communications cable(s) and
then the power cable.
HH. On the minienvironment, install the test panel (P/N 1000-0427-02) by slipping the panel up and
inside the minienvironment at the top of the window opening, a small amount. Push the bottom
of the plastic panel toward the opening while pushing upward. When the panel has cleared the
sheet metal at the bottom of the opening, let the panel slide down onto the metal brackets at
the bottom, inside, of the opening in the minienvironment.
I I. Check the fan / filter unit (FFU) for clean air delivery – perform an air velocity test.
Early model filters have stitched seams across the filter top, the later model has no stitching.
Using an air velocity meter (Shortridge Instruments, Inc., Model 860 or equivalent), measure
the airflow at three (3) positions equally spaced across the front of the filter face. Position the
particle monitoring probe approximately 6 inches above the filter face with the minienvironment
in the down (Home) position. Figure PSP-2-6 shows the placement of the probe-holes. Early
style filters; the air velocity must average 140 – 160 FPM calculated from the three
measurement positions. Later style filters; average of 100 FPM with fan at full speed. If the
velocity is not proper, refer to procedure CAP 14 for adjustment procedures.
Hole 1 + Hole 2 + Hole 3 ÷ 3 = Average Airflow
JJ. Apply power to the airborne particle counter. Perform any calibration procedures necessary as
prescribed in the manufacturers documentation.
LL. Using lint-free wipes and alcohol, wipe the interior of the minienvironment, the port door top and
bottom, the rotating arm and gripper, minienvironment window, cassette landing platform, and
loadlock (if equipped). DO NOT wipe the ULPA filter or let any alcohol get into the filter
element.
MM. After the alcohol has dried, replace the minienvironment standard window.
NN. With the LPT fully Homed, using the Teach Pendant, select <PORT UP> to raise the
minienvironment. Let the fan run for 10 minutes to allow the LPT internal components to self-
clean. After 10 minutes, lower the minienvironment
OO. Position the particle monitoring probe near the cassette landing position where the LPT places
the cassette in the Process Tool or load lock. Figure PSP-2-7 shows the placement of the
probe.
PP. Place a clean SMIF-Pod with a clean cassette onto the LPT port plate.
QQ. Using the Teach Pendant, from the AUTO CYCLE menu, select BEGIN AUTOCYCLE.
RR. Sample the LPT contamination level continuously while the unit autocycles for 10 complete
cycles (load + unload = 1 complete cycle).
WW. Using the Teach Pendant, verify the teach points to ensure that the LPT properly places the
cassette into the Process Tool.
3. POSTSERVICE
A. At the minienvironment, ensure that the operating window panel is installed.
B. Place the LPT three-sided plastic safety cover with the metal brackets in place above the
screws on the sides of the LPT. Lower the cover onto the screws and using hex drivers and a
phillips screwdriver, tighten two (2) screws located at one side of the cover and two screws on
the bottom at the other side. Tighten the captive at the top of one side to secure the cover to
the LPT.
Vertical
Support Plastic
Cover Shield
Panels
Fans
Mylar
Strip
Gripper-Tilt
Cover
(See Figure
PSP-1-4)
Vertical Arm
Guide Wheel
(1 of 2)
Flex Cables
Fan Inside
Minienvironment
LPT Front
Cover
LPT Plastic
Safety Shield
Auto-tensioner
Screw
Vertical Arm
Assembly
Series 2
Cover Screws
(2 each)
Series 1
Cover Screws
(2 each)
Gripper Tilt
Assembly
Cover
Gripper Cable
Clamp and Screw
Series 2 Drive
Minienvironment
Drive Assembly
Drive Belt
Slide-Bearing
Block
Drive Nut
Assembly
Leadscrew
Slide
Vertical Arm
Drive
Assembly
Drive Belt
Drive-Nut
Assembly
Series 1 Drive
Minienvironment
3-Holes, Equally Test-Window
Spaced at 6-
Inches Above
Filter Surface
Process Tool
Load Lock
(If Equipped)
Placement of
Placement of Particle Probe
Particle Probe at Cassette
When Testing Landing
FFU Platform
Cassette Load
Platform
Fan / Filter
Unit (FFU)
Airborne
Particle
Counter
EQUIPMENT
LOAD PORT TRANSFER™ SYSTEM
Calibration/Alignment is typically scheduled service based on elapsed time, a certain number of LPT
cycles, or because corrective service was performed. It consists of adjustments that have to be made
periodically to ensure that the LPT's movements are exact and repeatable. If corrective service is
performed on the LPT, most likely a calibration or alignment will have to be performed. An individual
familiar with the operation of the LPT will periodically observe movements or hear noises which indicate
that a component may be out of alignment. The following section of this chapter, Calibration / Alignment
Procedures, lists those adjustments that are to be performed on an as-needed basis.
AUTHORIZED PROCEDURES
LIST OF PROCEDURES
CAP
01 Optical Detector System Adjustment
02 Excessive Wafer Protrusion Sensor Adjustment
03 Gripper Finger Adjustment; V- and H-Move
04 Gripper Adjustment; V-Move
05 Stop Plate Adjustment; V-Move
06 Squat Switch Adjustment; V- and H-Move
07 Gripper Level Adjustment; V- and H-Move
08 Gripper Adjustment; H-Move
09 Over-Travel Switch Adjustment; V- and H-Move
10 Port Door Leveling and Adjustment
11 Pod Hold-Down Latch Adjustment; LPT 2200
12 Pod-In-Place Switch Adjustment; LPT 2200
13 Port Lock / Unlock Mechanism Adjustment; LPT 2150
14 Wafer Seater Adjustment
15 Fan / Filter Air Velocity Adjustment
CAUTION
The LPT should be removed from the Process Tool prior to
performing mechanical adjustments if access to make the
adjustment is physically difficult or damage to the LPT, Process
Tool, or product material is possible.
EQUIPMENT
LOAD PORT TRANSFER™ SYSTEM
TASK
OPTICAL DETECTOR SYSTEM ADJUSTMENT
PROCEDURE [Perform all procedure steps in the order presented below unless otherwise instructed]
1. PRESERVICE
NOTES
1. This procedure must only be performed by a service engineer
qualified to align laser systems and aware of laser safety practices.
2. Laser beam alignment may be performed with the LPT in the
Process Tool. If the Tool does not afford enough access to the LPT, the
LPT may be removed to a suitable location (see step 1.A).
A) (Optional) With the port door in Home position, remove power from the LPT. Remove all cable
connectors attached to the LPT. Remove the LPT from the Process Tool. Place the LPT in a
suitable location for service.
B) Remove the minienvironment plastic window panel by pressing fingers onto the panel and
pushing inward and upward a small amount. When the bottom of the panel has cleared the
sheet metal, grasp the bottom of the panel by hand and pull straight out removing the panel. Set
panel aside.
C) Connect the Teach Pendant, then connect power to the LPT. Place a SMIF-Pod on the port
plate.
D) Using the Teach Pendant, press <PORT UP> to raise the minienvironment up so that the light
beam has an unobstructed path to the sensors.
NOTE
There are two (2) versions of the optical assembly (laser bracket). An early
version and a later version. The operation is identical. See Figure CAP-1-1
2. SERVICE
CAUTION
Laser radiation when power is applied to LPT and
interlock defeated. Avoid direct eye exposure.
CAUTION
When the Pod top or minienvironment smoke-colored
plastic cover is removed from the LPT, the laser
protection is defeated and personnel may be exposed
to the laser light beam. Especially when the technician
is aligning the mirrors, beamsplitters or beam sensors,
the technician will be exposed to the beam and direct
eye exposure is to be avoided.
A. Taking a white piece of paper, insert the paper into the light beam path. Observe the beam
orientation. The beam emitted from the laser is oval. The elongated part of the beam must be
parallel with the port plate. See Figure CAP-1-2.
B. If the beam is other than parallel to the port plate, refer to Corrective Service Procedure CSP 04,
Replacing Laser Diode, for alignment information.
4. Wait for the message on the Teach Pendant LCD. The message should read:
DAC #0 threshold = xx
This number (xx) needs to be as small as possible. If the displayed DAC threshold value is
less than 30, proceed to the next sensor.
If the displayed DAC threshold value is greater than 30, proceed to adjust the angle of the
beamsplitter which directs the light beam onto the wafer-presence sensor aperture (see
Figure CAP-1-3).
5. For early style; using a phillips screwdriver, remove the five (5) screws securing the optical
assembly cover. Carefully remove the cover and screws and set aside.
For later style laser assemblies, cover need not be removed.
The beamsplitter adjustment can be accomplished by slightly turning either one or both of the
adjustment screws that hold the beamsplitter support in place. See Figure CAP-1-1 to ensure
that the proper screws are adjusted. Visually verify that the center of the light beam is hitting
directly on the center of the sensor aperture.
6. Repeat step 5 above until the reported threshold value is less than *30.
*Use the best effort to calibrate the threshold value to ≤30. If this is not possible, get the
number as close as possible to 30.
4. Wait for the message on the Teach Pendant LCD. The message should read:
DAC #1 threshold = xx
This number (xx) needs to be as small as possible. If the displayed DAC threshold value is
less than 30, proceed to the next sensor.
If the displayed DAC threshold value is greater than 30, proceed to adjust the angle of the
beamsplitter which directs the light beam onto the slot sensor aperture (see Figure CAP-1-3).
5. If not done previously, using a phillips screwdriver, remove the five (5) screws securing the
optical assembly cover. Carefully remove the cover and screws and set aside.
The beamsplitter adjustment can be accomplished by slightly turning either one or both of the
adjustment screws that hold the beamsplitter support in place. See Figure CAP-1-1 to ensure
that the proper screws are adjusted. Visually verify that the center of the light beam is hitting
directly on the center of the slot sensor aperture.
6. Repeat step 5 above until the reported threshold value is less than *30.
7. *Use the best effort to calibrate the threshold value to ≤30. If this is not possible, get the
number as close as possible to 30.
2. Verify that the wafer protrusion light beam is approximately 1/16 inch away from and parallel
to the front edge of the cassette. If necessary, carefully readjust the position of the mirror for
the wafer protrusion beam (see Figure CAP-1-3) until it is within 1/16 inch of the cassette on
both sides.
6. Wait for the message on the Teach Pendant LCD. The message should read:
DAC #2 threshold = xx
This number (xx) needs to be as small as possible. If the displayed DAC threshold value is
less than 30, proceed to step F (below).
If the displayed DAC threshold value is greater than 30, proceed to adjust the angle of the
mirror which directs the light beam onto the wafer-protrusion sensor aperture (see Figure
CAP-1-3).
7. If not done previously, using a phillips screwdriver, remove the five (5) screws securing the
optical assembly cover. Carefully remove the cover and screws and set aside.
The mirror adjustment can be accomplished by slightly turning either one or both of the
adjustment screws that hold the mirror support in place. See Figure CAP-1-1 to ensure that
the proper screws are adjusted. Visually verify that the center of the light beam is hitting
directly on the center of the wafer-protrusion sensor aperture.
NOTE
At times it may be necessary to adjust the first mirror in the beam path
so that the light beam is positioned in the center of the second mirror.
This allows the beam to be properly aligned with the sensor.
8. Repeat step 8 above until the reported threshold value is less than *30.
*Use the best effort to calibrate the threshold value to ≤30. If this is not possible, get the
number as close as possible to 30.
G. When all adjustments have been performed and verified, using red varnish (Asyst part number
7500-0848-01), apply a small amount to the heads of any adjustment screws that were disturbed
during adjustment.
H. Replace the optical assembly cover and secure with the five (5) screws.
L. Using the Teach Pendant, use a combination of <HORZ IN> / <HORZ OUT>, <VERT UP> /
<VERT DOWN>, <TILT UP> / <TILT DOWN>, and <PORT UP> / <PORT DOWN> keys to
position all axes back to their Home positions.
B) Disconnect the AC power and then the Teach Pendant from the LPT.
C) If removed, return the LPT back to the Process Tool and secure. Connect communications and
power cables to the LPT.
DO NOT
ADJUST
Mirror or Beam
Splitter DO NOT
ADJUST
Adjustment
Screws (2)
Mirrors
Wafer Position
Sensor
Beam Path
Beam Aperture
1mW @ 670nm
Laser Diode
Beam Aperture
Silicon Wafer
Wafer Protrusion Sensor
EQUIPMENT
LOAD PORT TRANSFER™
TASK
EXCESSIVE WAFER PROTRUSION SENSOR ADJUSTMENT
PROCEDURE [Perform all procedure steps in the order presented below unless otherwise instructed]
1. PRESERVICE
A. With the minienvironment in the Home position, remove power from the LPT. Remove all cable
connectors attaching the LPT to the Process Tool or Host computer. Release the latch(es)
securing the LPT to the Process Tool and remove the LPT. Place the LPT in a location suitable
for servicing.
B. Attach the Teach Pendant and replace the power to the LPT.
2. SERVICE
A. On the side of the LPT that mounts to the Process Tool (LPT front side) remove the front cover
(flat metal cover that covers the bottom half of the LPT) (see Figure CAP-2-1). Set cover aside.
B. Using the Teach Pendant, press the <PORT UP> key and hold it until the port is raised seven (7)
inches as indicated on the LCD display. Next press the <VERT UP> key until the vertical arm
raises five (5) inches.
C. Through the front of the LPT, reaching inside remove the panel (see Figure CAP-2-1) to gain
access to the Indexer circuit board (see Figure CAP-15-2).
D. On the Teach Pendant press the <VERT DOWN> and then the <PORT DOWN> keys. Place a
SMIF-Pod with a cassette (with a dummy wafer in a middle slot) on the port plate of the LPT.
E. With the port plate Homed, raise the minienvironment by pressing the <PORT UP> key. Stop the
port (push in on the ESTOP switch on the top of the Teach Pendant) when the wafer is at one (1)
inch below the bottom of the port plate.
F. Reach into the cassette and extend the wafer from the cassette approximately 1/4 inch (0.6 cm).
G. Reaching through the access area on the front of the LPT, on the main processor board, the
adjustment potentiometer is placed under the connector plate located through the hole near the
J10 connector on the board, (see Figure CAP-2-2).
I. Repeat the adjustment in the above step to verify the set point where the light just lights.
J. Raise the minienvironment. With the wafer extended, lower the minienvironment to verify that the
port is halted with the wafer at one (1) inch below the port plate.
K. If adjustment is complete, replace the front port plate cover and secure with two (2) screws.
3. POSTSERVICE
A) Using the Teach Pendant, use a combination of <HORZ IN> / <HORZ OUT>, <VERT UP> /
<VERT DOWN>, <TILT UP> / <TILT DOWN>, and <PORT UP> / <PORT DOWN> keys to
position all axes back to their Home positions.
B) Disconnect the AC power and then the Teach Pendant from the LPT.
C) Return the LPT back to the Process Tool and secure. Connect communications and power
cables to the LPT.
Pinch Hazard
Keep hands out
of this area when
LPT is operating.
Front
Cover
Adjustment
Screw and
LED
Access Panel
EQUIPMENT
LOAD PORT TRANSFER™ SYSTEM
TASK
GRIPPER FINGER ADJUSTMENT; V- and H-MOVE
PROCEDURE [Perform all procedure steps in the order presented below unless otherwise instructed]
1. PRESERVICE
A. With the minienvironment in the Home position, remove power from the LPT. Remove all cable
connectors attaching the LPT to the Process Tool or Host computer. Release the latch(es)
securing the LPT to the Process Tool and remove the LPT and place in a location suitable to
service the LPT.
B. Connect the Teach Pendant and place a Pod containing an empty cassette onto the port plate.
NOTES
1) If the red LED is lighted, proceed to procedure CAP 07; Over-Travel
Switch Adjustment.
2) If the green LED is not lighted (H-move only), proceed to procedure
CAP 06; Gripper Adjustment, H-Move.
F) Grasp cassette by hand, and using only moderate pressure, attempt to slide cassette back and
forth within gripper fingers:
1) If cassette does not slide, observe that the grip is not too tight where the cassette begins to
deform.
2) If gripper-finger adjustment is proper, no adjustment is not required.
STOP! Do not proceed.
3) If cassette slides or grip is too tight, gripper-finger adjustment is necessary.
Proceed with Service section, below.
2. SERVICE
A) Using the Teach Pendant, to bring the gripper into a working position, use a combination of
<HORZ IN> / <HORZ OUT>, <VERT UP> / <VERT DOWN>, and <TILT UP> / <TILT DOWN>
keys.
B) At the H-move or V-move gripper, using a phillips screwdriver, remove nine flathead screws
(Figure CAP-3-1) securing gripper cover to gripper body. Retain screws and cover.
C) Loosen, do not remove, screw on gripper-close limit-switch flag, adjust flag, then tighten screw:
• If grip is too loose, move flag away from switch.
• If grip is too tight, move flag into switch.
D) Place an empty cassette in a position to be gripped. Press <CLOSE GRIP> on the Teach
Pendant.
E) Test gripper by placing hands, a palm on each side of the cassette, and a thumb on each
gripper finger. Using only moderate pressure, push gripper forward:
• If cassette does not slide on gripper, adjustment is correct.
• If cassette slides, repeat steps 2C thorough 2E as required.
B) Disconnect the AC power and then the Teach Pendant from the LPT.
C) Return the LPT back to the Process Tool and secure. Connect communications and then power
cables to the LPT.
Yellow LEDs
Red LED
Green LED
(H-Move)
Cover Screw
(1 of 9) Flag Screw Gripper Close-
Limit Flag
Gripper Close-
Limit Switch
EQUIPMENT
LOAD PORT TRANSFER™ SYSTEM
TASK
GRIPPER ADJUSTMENT: V-MOVE
PROCEDURE [Perform all procedure steps in the order presented below unless otherwise instructed]
1. PRESERVICE
A) With the minienvironment in the Home position, remove power from the LPT. Remove all cable
connectors attaching the LPT to the Process Tool or Host computer. Release the latch(es)
securing the LPT to the Process Tool and remove the LPT and place in a location suitable to
service the LPT.
B) With LPT in Home position and Teach Pendant connected, place a Pod containing an empty
cassette onto the port plate.
C) Using Teach Pendant, starting at Home, depress < NEXT PT > and step through the set points
to step "ABOVE INDEXER".
D) With a cassette under the gripper, align by eye the nylon tipped standoffs with the cassette
ensuring equal distances between the standoff and the cassette (cassette centered under
gripper).
1) If gripper is level and centered over the cassette, adjustment is not required. STOP! Do
not proceed.
2) If cassette does not line up, adjustment is necessary.
Proceed with Service section, below.
2. SERVICE
A) While holding the gripper securely, loosen gripper level locking screws. See Figure CAP-4-1.
B) Slide gripper shaft either in or out of gripper support bracket depending on which direction will
center gripper. See Figure CAP-4-1.
1) Place a bubble level on the top surface of the port door and note the location of the
bubble for reference.
3) Using a 5/32 inch hex driver, loosen two gripper-level locking screws (Figure CAP-4-1)
on the gripper-support bracket. This will relax the tension on the gripper shaft allowing
the gripper to rotate within the support bracket.
4) Rotate gripper until the level's bubble is in the same location as when the level was on
the port door. Tighten the two gripper-level locking screws and check the level again.
Repeat adjustment, if necessary.
E) Using the Teach Pendant, use a combination of <HORZ IN> / <HORZ OUT>, <VERT UP> /
<VERT DOWN>, <TILT UP> / <TILT DOWN>, and <PORT UP> / <PORT DOWN> keys to
position all axes back to their Home positions.
F) Depress the < AUTO CYCLE > key. From the AUTO CYCLE menu, depress BEGIN
AUTOCYCLE key. Cycle through a minimum of two load and unload cycles to verify proper
adjustment. When finished select STOP AUTOCYCLE.
3. POSTSERVICE
A) Disconnect the AC power and then the Teach Pendant from the LPT.
B) Return the LPT back to the Process Tool and secure. Connect communications and then power
cables to the LPT.
Gripper
Support Shaft
EQUIPMENT
LOAD PORT TRANSFER™ SYSTEM
TASK
STOP-PLATE ADJUSTMENT; V-MOVE
PROCEDURE [Perform all procedure steps in the order presented below unless otherwise instructed]
1. PRESERVICE
The cassette stop plate, located on the underside of the gripper, locates cassettes front and
back to prevent cassettes from sliding during load and unload cycles.
A) Before proceeding, verify that LPT components are at their Home positions.
B) With the minienvironment in the Home position, remove power from the LPT. Remove all cable
connectors attaching the LPT to the Process Tool or Host computer. Release the latch(es)
securing the LPT to the Process Tool and remove the LPT and place in a location suitable to
service the LPT.
2. SERVICE
A) With the LPT at the Home position connect the Teach Pendant, place a Pod containing an
empty cassette onto the port plate.
B) Using the Teach Pendant, starting from Home position, depress <NEXT PT> and step through
the teach points until the point "ABOVE PORT" is found.
C) With the cassette sitting on the port door and the gripper above the cassette, depress <NEXT
PT> ("ELEV PICKUP") while observing how the cassette's handle aligns with the stop plate.
1) If cassette handle and stop plate align correctly (see Figure CAP-5-1), STOP, no further
action is required.
2) If cassette handle and stop plate are misaligned, depress < PREV PT > ("ABOVE EL").
D) Using a phillips screwdriver, loosen (do not remove) two pan-head stop-plate mounting screws
(Figure CAP-5-1) and adjust stop plate to correct location. Secure screws.
E) Using the Teach Pendant, depress <NEXT PT> ("ELEV PICKUP") to check adjustment. Repeat
adjustment step D. above if required.
F) Using the Teach Pendant, use a combination of <HORZ IN> / <HORZ OUT>, <VERT UP> /
<VERT DOWN>, <TILT UP> / <TILT DOWN>, and <PORT UP> / <PORT DOWN> keys to
position all axes back to their Home positions.
ASYST TECHNOLOGIES Page 4-47
2000-0900-01 Revision A
Load Port Transfer™ System 2150 / 2200 Technical Manual
G) Depress the <AUTO CYCLE> key. From the AUTO CYCLE menu, select BEGIN
AUTOCYCLE. Cycle through a minimum of two (2) load and unload cycles to verify proper
adjustment.
H) On the Teach Pendant, select STOP AUTOCYCLE from the AUTO CYCLE menu.
3. POSTSERVICE
A) Disconnect the AC power and then the Teach Pendant from the LPT.
B) Return the LPT back to the Process Tool and secure. Connect communications and then power
cables to the LPT.
V-Move Gripper
Cassette
EQUIPMENT
LOAD PORT TRANSFER™ SYSTEM
TASK
SQUAT SWITCH ADJUSTMENT; V- AND H-MOVE
PROCEDURE [Perform all procedure steps in the order presented below unless otherwise instructed]
If LPT stops while picking up a cassette from the Pod door or Process Tool indexer or stage,
squat-switch adjustment may be required.
1. PRESERVICE
A) With the LPT in the Home position and the Teach Pendant connected, place a Pod containing
an empty production-type cassette onto the port plate.
B) Using the Teach Pendant, depress the < AUTOCYCLE > key and at the point where the gripper
moves out to the cassette, observe as the gripper grips the cassette. Three possible actions may
occur:
1) Cassette lines up and grip occurs, adjustment is not necessary.
2) Cassette lines up, grip occurs, but is jerky.
3) Cassette does not line up, and no grip occurs – system will halt and alarm.
C) Where the cassette is not gripped (step 1.B.3), re-teach a teachpoint closer to the cassette.
Using the TEACH POINT (TP) ACQUISITION OVERVIEW at the end of this procedure, reteach
the gripper position. Repeat from the beginning of this procedure. If it still does not grip, proceed
to step 1.E below.
4) If red LED is lighted, proceed to procedure CAP 09; Over-Travel Switch Adjustment; V- and
H-Move.
5) If either yellow LED or green LED (H-move only) does not light, proceed with Service
section, below.
2. SERVICE
A) If the gripper is not close to the cassette, using the Teach Pendant motion keys (see Appendix
B), manually position the gripper close to the cassette. Depress the Teach Pendant ESTOP to
stop the movement.
B) On the Teach Pendant, pull the ESTOP out. Using the Teach Pendant keys, use <NEXT
STEP> key to step the gripper onto the face of the cassette (H-Move) or to the top of the
cassette (V-Move).
C) At the gripper, verify that the bodies of sensor adjustment screws are at the bottoms of their
slots (locations shown on Figure CAP-6-1). If necessary, use a 5/64 inch hex driver to loosen,
position, and then tighten the adjustment screws.
D) Insert the pins of the squat-switch adjustment tool into the access holes at the locations shown
on Figure CAP-6-1. Depending on the orientation of the LPT, left hand or right hand, orient the
tool with the long pin in the hole nearest the shaft. Short pin on the tool will contact the bottom
of the adjustment-screw head cavity and the longer pin will contact the gripper shaft.
E) While squeezing the tool and gripper together firmly by hand, insert a 3/32 inch hex driver into
the adjustment access hole nearest the non-lighted yellow LED. Turn the adjustment screw
clockwise until the yellow LED just lights. Repeat for the second LED if necessary.
F) Turn each screw counter-clockwise slightly until associated LED goes off.
G) Verify adjustment by loading a cassette. Both LEDs should light at the same time during gripper
squat.
3. POSTSERVICE
A) Using the Teach Pendant, use a combination of <HORZ IN> / <HORZ OUT>, <VERT UP> /
<VERT DOWN>, <TILT UP> / <TILT DOWN>, and <PORT UP> / <PORT DOWN> keys to
position all axes back to their Home positions.
B) Disconnect the AC power and then the Teach Pendant from the LPT.
C) Return the LPT back to the Process Tool and secure. Connect communications and then power
cables to the LPT.
Squat Switch
Adjustment
Tool
Tool
Access
Holes (2)
Yellow
LEDs (2)
Adjustment
Access
Holes (2) Arm
Sensor
Adjustment
Screws (2)
NOTE
V-Move gripper shown,
H-Move is a similar configuration
______________________________________________________________________________________
TEACH POINT (TP) ACQUISITION OVERVIEW
__________________________________________________________________________________________
NOTES
1. Press and hold, either <NEXT PT> or <PREV PT> keys. The LPT arm
moves to the appropriate TP and stops. When stopped, release the key.
2. The first time <NEXT PT> key on the Teach Pendant is pressed, the
system goes through a Homing calibration of all axes.
1. To stop movement before reaching the programmed TP, release the key...
• A display appears indicating the actual X and Y locations and that the arm is between the
indicated TPs.
• Present X and Y locations are updated each time the LPT movement stops.
• During the movement from one TP to the next TP, the destination TP name appears on the LCD
line 4.
2. Upon arrival at the programmed TP, release the key. The LCD displays ”Key action done”.
NOTE
Some TP locations may be modified either before, or after, the original
programmed TP location is reached, it is not necessary to reach the pre-
programmed TP first.
• Using the MOTION keys (see Appendix B, paragraph B.4.6), (NOT <NEXT PT> or <PREV PT>)
move to the desired new TP location.
• Once achieving, confirming, and re-confirming, the desired new TP location, press <MOD PT>
key. The pendant will prompt, "ENTER to confirm, or ESC to abort".
Use <NEXT PT> and <PREV PT> keys repeatedly to examine entering and exiting the new TP from
different angles.
4. Upon complete examination of all TPs, press <SAVE PT> key. The Teach Pendant will prompt
“ENTER” for confirmation.
The new set of TPs will be stored in NOVRAM in a file called, D:\V_MOVES.NEW and
V_MOVES.OLD (backup).
______________________________________________________________________________________
EQUIPMENT
LOAD PORT TRANSFER™ SYSTEM
TASK
GRIPPER LEVEL ADJUSTMENT; V- and H-MOVE
PROCEDURE [Perform all procedure steps in the order presented below unless otherwise instructed]
1. PRESERVICE
A) Before attempting any gripper-level adjustment, verify that the gripper-tilt adjustments are secure.
B) Place a SMIF-Pod with a production-type cassette on the port plate. Using the Teach Pendant,
depress the <AUTOCYCLE> key and then select BEGIN AUTOCYCLE. When the gripper is
close to the cassette, depress the Teach Pendant ESTOP to stop the movement.
C) Place a bubble level on top of the cassette, as close to the center as possible. Observe the
location of the bubble.
D) Set the level on top of the gripper. Bubble should be in the same location on gripper as it is on
the cassette. If a difference between each location is half a bubble or greater, the gripper must
be leveled. Proceed with Service section below.
2. SERVICE
A) Front-To-Back Leveling.
1) Using a 5/32 inch hex driver, loosen two gripper-level locking screws (Figure CAP-7-1)
on gripper-support bracket. This will relax tension on gripper shaft, allowing gripper to
rotate within support bracket.
2) With the bubble level on top of the gripper, rotate the gripper until the bubble is in the
same location as when the level was on the cassette. Tighten two (2) gripper-level
locking screws and check the level again. Repeat adjustment, if necessary.
B) Side-To-Side Leveling.
NOTE
This adjustment should be performed ONLY after paragraph 2A above
has been successfully accomplished. Utilize a weighted production-
type cassette to perform the following adjustment.
1) Align a weighted production-type cassette with the gripper assembly and using the
Teach Pendant, pull the ESTOP out. On the Teach Pendant, depress <NEXT STEP>
key to move the gripper to the cassette and then to close the gripper fingers.
2) Place a bubble level on top of the gripper. Observe the bubble and note in which
direction adjustment is required.
3) Insert a 5/32 inch hex driver into the socket-head adjustment screw, accessible through
the tool-access hole farthest from the shaft in the gripper top cover (see Figure CAP-7-
2). Adjust this screw until the gripper body is parallel to the cassette top surface to
within ±0.02 inches. (±0.02 inches is approximately equivalent to 1/8 diameter of
bubble.)
4) Using the Teach Pendant, use a combination of <HORZ IN> / <HORZ OUT>, <VERT
UP> / <VERT DOWN>, <TILT UP> / <TILT DOWN>, and <PORT UP> / <PORT
DOWN> keys to position all axes back to their Home positions.
5) On the Teach Pendant, depress the <AUTO CYCLE> key. From the AUTO CYCLE
menu, select BEGIN AUTOCYCLE. Perform several load and unload cycles to test
adjustments, alternately using both a weighted and an empty cassette. Re-adjust if
required.
6) On the Teach Pendant, select STOP AUTOCYCLE from the AUTO CYCLE menu.
3. POSTSERVICE
A) Disconnect the AC power and then the Teach Pendant from the LPT.
B) Return the LPT back to the Process Tool and secure. Connect communications and then power
cables to the LPT.
Gripper
Support Shaft
NOTE
V-Move – Back surface of Gripper Support Support Locking
gripper support bracket to Bracket Screw (1 of 2)
remain vertical.
Tool Access
Holes (2)
EQUIPMENT
LOAD PORT TRANSFER™ SYSTEM
TASK
GRIPPER ADJUSTMENT; H-MOVE
PROCEDURE [Perform all procedure steps in the order presented below unless otherwise instructed]
1. PRESERVICE
NOTE
This procedure should be performed only if the gripper is level. If gripper
is questionable, perform CAP 07; Gripper-Level Adjustment; V-and H-
Move.
A) With the LPT in the Home position and the Teach Pendant connected, place a SMIF-Pod
containing an empty production-type cassette onto the port plate.
B) Using the Teach Pendant, starting at Home, depress <NEXT PT> and step through to step "REL
SQUAT SWITCH".
C) Observe gripper:
1) If cassette fully lines up and gripper is level, then green LED and two yellow LEDs will be
lighted and red LED will be off. STOP! Do not proceed, adjustment not necessary.
2) If cassette does not line up, where the inner wedge does not fit into the wafer slot, use the
Teach Pendant to teach the proper cassette alignment position.
3) If red LED is lighted, proceed to procedure CAP 09; Over-Travel Switch Adjustment; V- and
H-Move.
4) If green LED or either yellow LED does not light, proceed with Service section, below.
2. SERVICE
A) Using the Teach Pendant, depress <PREV PT> and step back for gripper to release cassette.
B) Using the Teach Pendant, depress <HORZ OUT> to center gripper under port. Depress
<UNLK PORT> and remove the Pod top.
1) Using a 5/32 inch hex driver or allen wrench, loosen two gripper level-locking screws
(Figure CAP-8-1) on gripper-support bracket.
2) Place a torpedo level on the center top of the cassette on the port. Observe the bubble
location, then move the torpedo level to the top side of the gripper. Bubble should be in
the same location on the gripper as it was on the cassette. Manually rotate gripper until
bubbles match, then tighten two gripper level locking screws on gripper support bracket
(see Figure CAP-8-1).
3) Using the Teach Pendant, depress <PREV PT> and step back to Home. Replace
cassette and Pod top. Depress <NEXT PT> and step through to step "ELEV PICKUP".
4) If the cassette fully lines up and gripper is level, then green LED and two (2) yellow
LEDs will be lighted and red LED will be off.
NOTE
The green LED indicator is for monitoring the nipple on the cassette
face for the cassette present switch. There is no adjustment for this
squat switch. If the green LED does not light when the switch is made,
on the squat switch printed circuit board check jumper JP1. This jumper
should be on pins 2 and 3 (EN position) for H-Move. If jumper is good,
replace circuit board or perform gripper electrical cable troubleshooting.
5) If the green LED does not light, repeat steps 1 through 5 above.
6) If only one yellow LED lights, proceed with horizontal alignment procedure, following.
D) Horizontal Alignment:
1) Using the Teach Pendant, depress <PREV PT> key to release the gripper fingers
carrying the empty cassette. Mount a half-full cassette on the port plate.
2) Using the Teach Pendant, depress <NEXT PT> key for the gripper to squat, depress
<NEXT PT> again to close gripper fingers, depress <NEXT PT> again to move
minienvironment, then depress <NEXT PT> again to rotate the gripper approximately
ninety (90) degrees.
4) Adjust Tilt-Up (Home) Limit switch (see Figure CMP-8-2). Using a 3/32 inch hex wrench,
carefully loosen the setscrew securing the home limit flag and adjust the flag a very
small amount and then tighten the screw.
6) Perform steps 4 and 5 above as necessary to ensure that the gripper is level.
3. POSTSERVICE
A) Using the Teach Pendant, use a combination of <HORZ IN> / <HORZ OUT>, <VERT UP> /
<VERT DOWN>, <TILT UP> / <TILT DOWN>, and <PORT UP> / <PORT DOWN> keys to
position all axes back to their Home positions.
B) Disconnect the AC power and then the Teach Pendant from the LPT.
C) Return the LPT back to the Process Tool and secure. Connect communications and then power
cables to the LPT.
Flag
Home Sensor
Forward
Sensor
EQUIPMENT
LOAD PORT TRANSFER™ SYSTEM
TASK
OVER-TRAVEL SWITCH ADJUSTMENT; V- AND H-MOVE
PROCEDURE [Perform all procedure steps in the order presented below unless otherwise instructed]
1. PRESERVICE
The red LED on the gripper indicates an improper adjustment of the over-travel switch. If the LED is
lighted when a cassette is present, proceed with Service section below.
2. SERVICE
A) V-Move: Using the Teach Pendant, step through the teach points by depressing <NEXT PT>
until the gripper squats and the gripper fingers close (V-move; "EL REV SQ").
H-Move: Using the Teach Pendant, step through the teach points by depressing <NEXT PT>
key until the gripper squats and the gripper fingers close (H-move; "CLEAR EL CLOSE").
Depress <TILT DOWN>, then <HORZ IN> to place the gripper into the proper position. Then
depress <VERT DOWN> to place the cassette on the Pod door.
B) Using the Teach Pendant, depress <UNLK PORT> to unlock the port door. Remove the Pod
top.
C) Using a phillips screwdriver, remove nine (9) flat-head screws securing the gripper cover. Set
the cover and screws aside.
D) With a cassette placed in the gripper, depress <CLOSE GRIP> to grip the cassette.
E) Loosen two screws (Figure CAP-9-1) on the over-travel switch mounting bracket and slowly
move the switch until the LED just goes off, then move the switch 0.030 inches (0.076 cm)
farther and tighten two screws.
V-Move: depress <OPEN GRIP> key to open gripper and release the cassette. Remove the
cassette. Then depress <CLOSE GRIP> to close gripper without a cassette and observe if the
red LED lights. Repeat adjustment step E above as required.
H-Move: depress <OPEN GRIP> to open gripper and release cassette. Remove cassette. Then
depress <CLOSE GRIP> to close gripper without a cassette and observe if LED lights. Repeat
adjustment step E above as required.
3. POSTSERVICE
A) Using the Teach Pendant, use a combination of <HORZ IN> / <HORZ OUT>, <VERT UP> /
<VERT DOWN>, <TILT UP> / <TILT DOWN>, and <PORT UP> / <PORT DOWN> keys to
position all axes back to their Home positions.
B) Disconnect the Teach Pendant and then AC power from the LPT.
C) Return the LPT back to the Process Tool and secure. Connect communications and then power
cables to the LPT.
Cover Screw
(1 of 9)
EQUIPMENT
LOAD PORT TRANSFER™ SYSTEM
TASK
PORT DOOR LEVELING AND ADJUSTMENT
PROCEDURE [Perform all procedure steps in the order presented below unless otherwise instructed]
With the minienvironment in the Home position, check that the outer edge of the port door is level with
the port plate. Next, grab by hand one of the pod-door guides on the port door and wiggle it to see if the
door moves a small amount. The port plate must not rest on the port door or deflect the door when at
the Home position. The door must move freely in the opening. If either of these requirements are not
met, continue with this procedure.
1. PRESERVICE
A. Remove power from the LPT. Remove all cable connectors attaching the LPT to the Process
Tool or Host computer. Release the latch(es) securing the LPT to the Process Tool and remove
the LPT. Place the LPT in a location suitable for servicing.
B. Attach the Teach Pendant and replace the power to the LPT.
2. SERVICE
A. If the port door is not level with the port plate, move the minienvironment up a small amount.
This is done by using the Teach Pendant. Depress the <JOG> key. Next depress the <PORT
UP> key and hold the key down until the minienvironment raises approximately 13 mm (0.5
inches).
B. Remove the minienvironment plastic window panel by pressing fingers onto the panel and
pushing inward and upward a small amount. When the bottom of the panel has cleared the
sheet metal, grasp the bottom of the panel by hand and pull straight out removing the panel.
Set panel aside. Place a cover over the exposed filter face.
NOTE
For proper operation, the port door must be centered within the port
plate opening as well as being level with the perimeter of the port plate.
3) Using a 5/64 inch hex wrench, turn in or out the set screw next to the cap screw loosened in
step above, to affect the level. When level, tighten the cap screw to lock the adjustment.
D. Using the Teach Pendant, depress the <PORT DOWN> key and hold the key down until the
minienvironment fully lowers. Remove power from the LPT
F. Minienvironment Height.
1. Using a phillips screwdriver, remove one (1) screw on the top, center, of the vertical support
cover. Using a 3/32 inch hex driver, remove three (3) hex screws located at the top. Using
the hex driver, loosen one screw at the bottom. Grasp the handle at the top of the cover and
lift and pull straight off. Set cover aside.
2. Using a 5/64 inch hex wrench, loosen the hard stop set screw (see Figure CMP-10-2).
3. By hand turn the minienvironment drive nut to lower the minienvironment down until it rests
on the port door. The hard stop should be bottomed on the garage (sheet metal shield).
4. Tighten the hard stop set screw
5. Apply power to the LPT and using the Teach Pendant, depress the <JOG/STEPS> key and
select 10 mils/0.1 deg. Next depress the <PORT UP> key and raise the minienvironment in
10 mil increments to raise the minienvironment off of the port door. The port door should be
free to move in the port plate opening when at Home.
6. using a 0.050 inch allen wrench or hex driver, adjust the port home flag to trip the sensor at
the minienvironment Home position. See Figure CMP-10-3.
E. Place a Pod with cassette on the port plate. Using the Teach Pendant, depress the <AUTO
CYCLE> key. Next select START AUTO-CYCLE.
Observe that when gripped, the cassette is picked up evenly. If cassette is not picked up evenly,
repeat this procedure and CAP 04, if necessary.
F. On the Teach Pendant, select STOP AUTOCYCLE from the AUTO CYCLE menu.
3. POSTSERVICE
A. Replace the minienvironment plastic window panel.
B. Replace the vertical support cover and secure.
C. Disconnect the AC power and then the Teach Pendant from the LPT.
D. Return the LPT back to the Process Tool and secure. Connect communications and then power
cables to the LPT.
E. Return the LPT to standard operation.
8-32 Cap
Screw
8-32 Cap
Screw 8-32 Set Screw
¼-20 Cap
Screws
Set Screw
Stop Block
Port Home
Sensor
Port Home
Flag
EQUIPMENT
LOAD PORT TRANSFER™ SYSTEM
TASK
POD HOLD-DOWN LATCH ADJUSTMENT; LPT 2200
PROCEDURE [Perform all procedure steps in the order presented below unless otherwise instructed]
NOTE
This procedure is performed when the actuator cable or other
component must be replaced, or the cable had become detached from
a slide. It is not necessary to remove the LPT from the Process Tool
for this procedure.
1. PRESERVICE
None.
2. SERVICE
A. Using a 3/32 inch hex wrench, remove the two (2) flathead screws securing the port plate top
rear cover. This will expose the Pod hold-down latch/unlatch paws and the slide assemblies
(see Figure CAP-11-1). Place the rear cover to the side. Set the hardware aside.
B. Set the LPT power switch to the to O/off position. Connect the Teach Pendant. Command the
hold-down motor using the command below:
C. The hold-down latches are synchronized when they move out and stop when they are
perpendicular (or nearly perpendicular) to the port opening. Two conditions would require an
adjustment:
• A loose actuator cable where the rear latch is not reasonably perpendicular and the sensor
flag needs to be adjusted (located on the front end), or
• A cable that needs replacement.
1) A loose actuator cable. To adjust the latch synchronization, or to set up the latches when a
cable is replaced or re-attached:
a) Visually verify that the angle of the latch is less that one tooth off of optimum
adjustment. If the angle indicates an excess of one tooth, remove the screw in center of
latch using a 1/8 inch hex wrench. Lift the latch and carefully reseat one tooth over.
Replace the screw and tighten.
b) If necessary, to fine tune the latch angle, use needlenose pliers to bend the angle of the
vertical rise portion of the flag to change the angle of the rise. This will either extend the
flag more or retract it more to actuate the sensor to stop the motor either sooner or
later. Ensure that the horizontal portion of the flag is horizontal to the sensor; bend as
necessary using needlenose pliers.
Flag With
Adjustment
Flag Without
Adjustment
d) At the Teach Pendant, press <LOCK PORT> then <UNLK PORT> keys.
2) If the cable is replaced or re-attached, set the cable end into a notch in the slide to adjust the
cable length to where the latches are as close to the correct orientation as possible. Ensure
that the cable clamp screw is tight.
3) Perform steps 1a) through 1d) above. The latch should be perpendicular to the port opening
when open and close to parallel to the port opening when closed.
4) Repeat step 1c and 1d to ensure that the latches function properly. Repeat the above steps
as necessary.
3. POSTSERVICE
A. Using the Teach Pendant, use a combination of <HORZ IN> / <HORZ OUT>, <VERT UP> /
<VERT DOWN>, <TILT UP> / <TILT DOWN>, and <PORT UP> / <PORT DOWN> keys to
position all axes back to their Home positions.
B. Disconnect the AC power and then the Teach Pendant from the LPT.
C. Return the LPT back to the Process Tool and secure. Connect communications and then power
cables to the LPT.
Port Opening
Port Plate
(Rear) Cover
Shown
Removed
EQUIPMENT
LOAD PORT TRANSFER™ SYSTEM
TASK
POD-IN-PLACE SWITCH ADJUSTMENT; LPT 2200
PROCEDURE [Perform all procedure steps in the order presented below unless otherwise instructed]
1. PRESERVICE
A) Remove the minienvironment plastic window panel by pressing fingers onto the panel and
pushing inward and upward a small amount. When the bottom of the panel has cleared the
sheet metal, grasp the bottom of the panel by hand and pull straight out removing the panel. Set
panel aside.
CAUTION
Laser radiation when power is applied to LPT and
interlock defeated. Avoid direct eye exposure.
B) With the plastic panel removed, where the pod-in-place switch is located, the technician is
exposed to the laser beam. Ensure that proper laser safety precautions are observed.
2. SERVICE
A) On the bottom of the port door, using a No. 2 phillips screwdriver, remove the four (4) screws
and lock washers securing the port door cover and remove the cover exposing the Pod door
lock/unlock mechanism (see Figure CAP-12-1). Set the cover with gasket attached and
hardware aside.
B) Using a measuring device, depress switch plunger on the port door top down 0.030 to 0.040
inches (see Figure CAP-12-2).
C) With the plunger on the underside of the port door depressed down 0.030 to 0.040 inches, using
a No. 1 phillips screwdriver, slowly and alternately turn the screws that hold the pod-in-place
switch clockwise ensuring that the switch remains parallel to the port plate. Continue to turn the
screws until the POD-IN-PLACE light lights.
D) Test the switch by depressing the plunger several times to see if the light lights when the plunger
is depressed down 0.030 to 0.040 inches. Repeat paragraph 2.C as necessary to adjust.
E) Replace the port door cover and secure with the four (4) washers and screws.
F) Place an empty 200mm Pod on the LPT and observe the POD-IN-PLACE light. If the light lights,
adjustment was successful. If light does not light, repeat procedure or troubleshoot.
3. POSTSERVICE
A) Disconnect the AC power and then the Teach Pendant from the LPT.
B) Return the LPT back to the Process Tool and secure. Connect communications and then power
cables to the LPT.
Port Door
Cover Screws
(4-Places)
Pod-In-Place
Switch
Screw (1 of 2)
EQUIPMENT
LOAD PORT TRANSFER™ SYSTEM
TASK
PORT LOCK / UNLOCK MECHANISM ADJUSTMENT; LPT 2150
PROCEDURE [Perform all procedure steps in the order presented below unless otherwise instructed]
NOTE
This procedure is performed when the pod latch / unlatch pins are
not all fully seated at the end of their slots. If one or more pins need
adjustment, proceed with this procedure.
1. PRESERVICE
A. With the minienvironment in the Home position, remove power from the LPT. Attach the
Teach Pendant and then replace the power to the LPT.
2. SERVICE
A. Using a 3/32 inch hex driver, remove the two (2) screws each securing the port plate top-
rear and top-front covers. Move the covers aside and set the hardware aside (see Figure
CAP-13-1).
B. Loosen the slider adjustment screw (see Figure CAP-13-1). Reposition the cam assemblies
so that the dowel pins on sliders are at the outside end of their travel (not toward the middle
of the port plate). See Figure CAP-13-2.
C. Tighten the slider adjustment screw and inspect the pod-lock-dowel pins for correct
placement. If not properly aligned after tightening the screw, perform step B again.
D. Using the Teach Pendant, press <LOCK PORT>. Observe the pod-lock-dowel pins move
toward the center of the port plate. All pins should be at the end of the slot. If one or more
pins did not move to the end of the slot, perform step B again.
E. Using the Teach Pendant, press <UNLK PORT>. Observe the pins return to the other end of
the slot. All should be at the end of the slot, if not, perform step B again.
F. If adjustments will not work, troubleshoot or contact Field Service. If all adjustments are
correct, proceed.
3. POSTSERVICE
A. Disconnect the AC power and then the Teach Pendant from the LPT.
Port Plate
Top-Rear
Cover
Slider
Adjustment
Screw
Pod-Lock-
Dowel Pins
Pod-Lock-
Dowel Pins
EQUIPMENT
LOAD PORT TRANSFER™
TASK
WAFER SEATER MECHANISM ADJUSTMENT
1. PRESERVICE [Perform all procedure steps in the order presented below unless otherwise instructed]
A. With the minienvironment in the Home position, remove power from the LPT.
B. Attach the Teach Pendant and replace the power to the LPT.
2. SERVICE
A. Using a 3/32 inch allen wrench, remove the two (2) screws that secure the front port plate cover.
Carefully lift the cover and lay over the side.
B. Using a 3/32 inch allen wrench, loosen the screws holding the motor bracket, push the motor
evenly forward toward the sensor printed-circuit board and tighten. The drive screw of the motor
should point directly towards the tapped hole (see Figure CAP-14-1).
C. Using a phillips screwdriver, loosen the screws holding the sensor PC board (3200-1040-01) and
push the board evenly toward the drive motor and tighten. Insure edge of the board is parallel
with edge of the port plate (see Figure CAP-14-1).
D. Using the Teach Pendant, move the wafer seater mechanism out, then back to Home to insure
that the seater arm is at rest in the Home position.
a) Press <DIAG> key
b) From the diagnostic menu, select CONTROLS . . .
c) From the Controls submenu select DC MOTOR CONTROL . . .
d) From the DC Motor Control submenu select DO WAFER SEATER OUT
e) Press <DIAG1> key
f) From the diagnostic menu, select CONTROLS . . .
g) From the Controls submenu select DC MOTOR CONTROL . . .
h) From the DC Motor Control submenu select DO WAFER SEATER HOME.
Check that the seater arm is Home by grabbing the actuator arm by hand and moving it back
and forth (see Figure CAP-14-3). If the seater arm is seen to move when moving the actuator
arm, the mechanism is not jammed and the adjustment is OK. If the seater arm does not move
easily, the mechanism is jammed and must be adjusted. To readjust, perform the following
procedures.
E. Using a 5/64 inch allen wrench, loosen the two (2) set screws holding the actuator arm to the
seater arm shaft.
F. Using the Teach Pendant, move the mechanism out, then back in to insure the seater arm is at
rest in the Home position.
a) Press <DIAG> key
b) From the diagnostic menu, select CONTROLS . . .
c) From the Controls submenu select DC MOTOR CONTROL . . .
d) From the DC Motor Control submenu select DO WAFER SEATER OUT
e) Press <DIAG> key
f) From the diagnostic menu, select CONTROLS . . .
g) From the Controls submenu select DC MOTOR CONTROL . . .
h) From the DC Motor Control submenu select DO WAFER SEATER HOME.
G. Press together by hand the base of the wafer seater arm and the actuator arm to insure that
there is a preload on the wave washers (see Figure CAP-14-3). Tighten one of the set screws
on the actuator arm, insuring a 0.030 to 0.050 inch gap between the wafer seater roller and the
edge of the port plate (see Figure CAP-14-2). Tighten the second set screw when the gap is
proper.
1. There must be a gap between the roller and the laser bracket (see Figure CAP-14-2). This is
easily checked visually, or by being able to slightly move the actuator arm and seater arm as
described in paragraph D.
2. There must be approximately 1 to 2 pounds of preload on the wave washer. This loads the
bearings for proper use and keeps the wafer seater arm away from the laser bracket.
3. If the gap is too big between the roller and the laser bracket, the excessive wafer protrusion
sensor will be tripped during self test or the seater will push wafers against the back of the
cassette.
H. Repeat step F, above, to move the seater arm out and then back to Home. Check to see that the
gap between the wafer seater roller and the edge of the port plate is maintained. If not repeat
step G.
I. Check for proper seating of the wafers into the cassette. Wafers must not hit the back of the
cassette when seated. If necessary, adjust second flag on wafer seater mechanism to achieve
proper reseating of the wafer.
NOTE
There should be approximately 0.030 inches of play in the wafer before
it hits the back of the cassette.
J. Remove one set screw from the actuator arm and place a small drop of Loctite on the threads
and reinstall. Repeat for the second set screw. Repeat steps H. and I.
3. POSTSERVICE
A) Replace the front port plate cover and secure with two (2) screws.
B) Disconnect the AC power and then the Teach Pendant from the LPT.
PORT PLATE
COVER
SENSOR PC BOARD
(edge parallel to port plate)
WAFER
SEATER
ARM
LASER BRACKET
WAFER
EXCESSIVE
PROTRUSION
SENSOR
LASER BRACKET
EQUIPMENT
LOAD PORT TRANSFER™
TASK
FAN / FILTER AIR VELOCITY ADJUSTMENT
PROCEDURE [Perform all procedure steps in the order presented below unless otherwise instructed]
1. PRESERVICE
Ensure that the minienvironment (port) is in the Home position.
2. SERVICE
A. Using a 5/32 inch hex driver, loosen two (2) hex screws located at the bottom of the three-sided
plastic cover. Using a 7/64 inch hex driver, unscrew the captive screw at the side, top, of the
cover. Using a phillips screwdriver, loosen two (2) screws located at the other side of the cover.
Grasp the cover at the top and lift up and pull straight off. Set cover aside.
B. Power down the LPT and attach the Teach Pendant. Reapply power to the LPT.
C. Using the Teach Pendant, press the <PORT UP> key and hold until the minienvironment fully
raises then release the key.
D. Using the common blade screwdriver, adjust the air velocity control on the bottom of the FFU (see
Figure CAP-15-1) using the adjustment criteria listed below:
1) For LPT Series 1 fan/filter units, using early style filter – adjust air velocity control for
approximately ¾ of full speed.
2) For LPT Series 2 fan/filter units, using later style filter – adjust air velocity control for full
speed.
NOTE
Series 1 LPTs have serial numbers of 4x97-00448 and below
Series 2 LPTs have serial numbers of 4x97-00449 and above
E. If replacing a filter on a Series 1 LPT with a new style filter, adjust the air velocity control for full
speed.
NOTE
Later (new) style filters are made of Teflon paper and show no seams.
Early style filters have glued seams and is made of paper.
G. Using the Teach Pendant, press the <PORT DOWN> key and hold until the minienvironment is
Home then release the key.
3. POSTSERVICE
A. Place the LPT three-sided plastic safety cover with the metal brackets in place above the screws
on the sides of the LPT. Lower the cover onto the screws and using hex drivers and a phillips
screwdriver, tighten two (2) screws located at one side of the cover and two screws on the bottom
at the other side. Tighten the captive at the top of one side to secure the cover to the LPT.
Minienvironment
Air Velocity
Adjustment Screw
AUTHORIZED PROCEDURES
LIST OF PROCEDURES
CSP
08 Encoder Replacement
PROCEDURE [Perform all procedure steps in the order presented below unless otherwise instructed]
1. PRESERVICE
Remove power from the LPT. Remove all cable connectors attaching the LPT to the Process Tool or
Host computer. Release the latch(es) securing the LPT to the Process Tool. Remove the LPT and
place into a location suitable for servicing.
2. SERVICE
A) Using a 5/32 inch hex driver, loosen two (2) hex screws located at the bottom of the three-sided
plastic cover. Using a 7/64 inch hex driver, unscrew the captive screw at the side, top, of the
cover. Using a phillips screwdriver, loosen two (2) screws located at the other side of the cover.
Grasp the cover at the top and lift up and pull straight off. Set cover aside.
B) Using a 3/32 inch hex driver, remove three (3) hex screws located at the top-sides of the vertical
support cover. Using the hex driver, loosen one screw at the bottom. Using a phillips
screwdriver, remove one (1) screw on the top. Grasp the handle at the top of the cover and lift
and pull straight off. Set cover aside.
C) Locate the servo motor that is to be replaced and make note of the orientation of the encoder
(this is necessary as the encoder wiring will rub on the metal enclosure if improperly aligned).
D) At the drive motor assembly, detach the connectors at the motor terminals, unplug the encoder
cable connector from the encoder.
G) Place the new motor inplace (observe the orientation of the encoder electrical connection). Pull
motor to tension drive belt to have 1/8 inch play at center of span then secure motor with four (4)
screws.
H) Align the motor shaft with the brake and push it into place.
Series 2: Secure the brake bracket with two (2) screws.
Series 1: Secure the brake to the brake bracket with two (2) screws and washers. Next,
carefully reattach the spring.
J) Connect the Teach Pendant. Connect an AC power cable to the LPT and set the power switch
on the control panel to ON / I position.
L) Wait until the LPT has Homed the minienvironment and then the vertical arm. Place a Pod with
cassette on the port plate.
M) Depress the <AUTO CYCLE> key. From the submenu select START AUTOCYCLE.
N) Auto cycle the LPT to verify that the motor assembly is functioning properly.
From the AUTO CYCLE menu select STOP AUTOCYCLE to halt the auto cycle when
verification is complete.
3. POSTSERVICE
A) Disconnect AC power and then the Teach Pendant from the LPT.
B) Grasp the handle at the top of the side cover and place back onto the LPT. Using a 3/32 inch
hex driver, replace and tighten three (3) hex screws located at the top-side of the vertical
support cover and one (1) screw at the bottom. Replace the phillips screw on the top of the
cover.
C) Place the LPT three-sided plastic cover with the metal brackets in place above the screws on
the sides of the LPT. Lower the cover onto the screws and using hex drivers and a phillips
screwdriver, tighten two (2) screws located at one side of the cover and two screws on the
bottom at the other side. Tighten the captive at the top of one side to secure the cover to the
LPT.
D) Return the LPT back to the Process Tool and secure. Connect communications cable(s) and
then power to the LPT.
Minienvironment
Drive Motor
Vertical Arm
Drive Motor
Assembly
Encoder
Motor Connectors
(2 each)
Motor
Drive Nut
Brake Bracket
Brake
(Series 1 Shown)
Encoder
Motor Terminals
Motor
Brake
(Series 2 Shown)
PROCEDURE [Perform all procedure steps in the order presented below unless otherwise instructed]
1. PRESERVICE
Remove power from the LPT. Remove all cable connectors attaching the LPT to the Process Tool or
Host computer. Release the latch(es) securing the LPT to the Process Tool. Remove the LPT and
place into a location suitable for servicing.
2. SERVICE
A) Using a 5/32 inch hex driver, loosen two (2) hex screws located at the bottom of the three-sided
plastic cover. Using a 7/64 inch hex driver, unscrew the captive screw at the side, top, of the
cover. Using a phillips screwdriver, loosen two (2) screws located at the other side of the cover.
Grasp the cover at the top and lift up and pull straight off. Set cover aside.
B) Using a 3/32 inch hex driver, remove three (3) hex screws located at the top-sides of the vertical
support cover. Using the hex driver, loosen one screw at the bottom. Using a phillips
screwdriver, remove one (1) screw on the top. Grasp the handle at the top of the cover and lift
and pull straight off. Set cover aside.
C) On the sensor rod, find the flag actuator (see Figure CSP-1B-1) and mark its exact placement.
Using a 1/16 inch hex driver, loosen the lower flag actuator’s set screws and slide the flag to the
bottom of the rod.
D) Using a 3/32 inch allen wrench, remove two (2) screws that secure the vertical arm servo-motor
brake to the brake bracket. Pull the brake off of the motor shaft.
E) At the vertical arm servo-motor drive nut (see Figure CSP-1B-1), turn the nut by hand so as to
lower the arm assembly as far down as it will go.
F) On the top of the drive column (see Figure CSP-1B-1), using a 5/32 inch hex driver, remove the
two (2) setscrews securing the lead screw anti-rotation pin.
G) Using a 3/32 inch allen wrench, remove two (2) screws that secure the minienvironment servo-
motor brake to the brake bracket. Pull the brake off of the motor shaft.
H) At the minienvironment servo-motor drive nut, turn the nut by hand so as to raise the lead screw
up until it comes out free of the drive nut and the motor assembly is free of the lead screw. Lift
the lead screw out of the drive column and set the lead screw aside.
I) At the drive motor assembly, using small wire cutters, carefully cut any tie wraps that would
prevent the motor wiring harness from becoming free. At the drive motor assembly, detach
motor terminal connectors and separate the brake connector and encoder connector from the
wiring harness.
J) Using a 3/16 inch hex driver, remove two (2) screws securing the minienvironment drive motor
assembly to the minienvironment (see Figure CSP-1B-2).
K) Using a 3/32 inch hex driver, remove four (4) screws securing the lead nut housing to the drive
motor assembly. Place the lead-nut housing on the new motor assembly and secure with four
screws.
L) Using a 3/32 inch allen wrench, remove two (2) screws that secure the brake to the brake
bracket.
M) Place the new motor assembly onto the carriage assembly and secure with two (2) screws.
N) Taking the lead screw, thread the lead screw down to the minienvironment drive nut and turning
the lead screw by hand, screw the motor assembly drive nut onto the lead screw. Continue to
turn the screw until the screw contacts the vertical arm motor. Using the vertical arm motor
drive nut, turn the nut to pull the leadscrew down until the anti-rotation pin settles into the slot on
the upper lead screw mounting casting.
O) Apply a small amount of screw adhesive, Asyst part no. 7500-0016-01, to the two (2) setscrews
that secure the anti-rotation pin to the casting. Insert the screws and tighten.
P) Reattach the brake, motor terminal connectors, brake connector, and encoder connector.
Q) Replace the flag actuator to its proper position (see Figure CSP-1B-1) on the sensor rod and
tighten the setscrew to secure.
R) Connect the Teach Pendant. Connect an AC power cable to the LPT and set the power switch
on the control panel to ON / I position.
T) Wait until the LPT has Homed the minienvironment and then the vertical arm. Place a SMIF-
Pod with cassette on the port plate.
U) Depress the <AUTO CYCLE> key. From the submenu select START AUTOCYCLE.
V) Autocycle the LPT to verify that the motor assembly is functioning properly.
From the AUTO CYCLE menu select STOP AUTOCYCLE to halt the auto cycle when
verification is complete.
3. POSTSERVICE
A) Disconnect AC power and then the Teach Pendant from the LPT.
B) Grasp the handle at the top of the side cover and place back onto the LPT. Using a 3/32 inch
hex driver, tighten three (3) hex screws located at the top of the vertical support cover and one
(1) screw at the bottom. Replace the phillips screw on the top.
C) Place the LPT three-sided plastic cover with the metal brackets in place above the screws on the
sides of the LPT. Lower the cover onto the screws and using hex drivers and a phillips
screwdriver, tighten two (2) screws located at one side of the cover and two screws on the
bottom at the other side. Tighten the captive at the top of one side to secure the cover to the
LPT.
D) Return the LPT back to the Process Tool and secure. Connect communications cable(s) and
then power to the LPT.
Lead Screw
Mounting Casting
Minienvironment
Drive Motor
Assembly
Port Home Flag
Leadscrew Actuator
Sensor Rod
Vertical Arm
Drive Motor Lead Nut
Assembly Housing
Encoder
Motor
Drive Nut
Housing
Brake
PROCEDURE [Perform all procedure steps in the order presented below unless otherwise instructed]
1. PRESERVICE
Remove power from the LPT. Remove all cable connectors attaching the LPT to the Process Tool
or Host computer. Release the latch(es) securing the LPT to the Process Tool and remove the
LPT. Place the LPT into a location suitable for servicing.
2. SERVICE
A. At the front of the LPT, locate the gripper-tilt motor-drive assembly (see Figure CSP-2-1).
Using a 3/32 inch hex driver, loosen two (2) hex screws located on the top of the gripper-tilt
cover. Using the hex driver, remove one screw at the end holding the cable clamp. Remove
the screw and clamp and set aside. Move the cable out of the way. Grasp the cover at the top
and pull out and then up. Set cover aside.
C. Using a 7/64 inch hex wrench, remove three (3) motor attaching screws.
D. Maneuver the motor to remove the drive belt from the pulley. Throw the motor away.
E. Taking the replacement motor assembly, slip the pulley into the drive belt. Pull the motor over
to tension the belt. The belt should have 1/8 inch play at the center of the span. Keeping
tension on the belt, secure the motor with three (3) screws.
F. Connect the two (2) electrical connectors to their respective motor connectors – red to
connector labeled 1 and black to connector labeled 2.
G. Replace the cover over the tilt drive assembly and ensure that the cover slips into the groove in
the reducer housing. Secure with two (2) screws on top and one (1) screw and a cable clamp
on the end.
H. Connect the Teach Pendant and connect AC power to the LPT. Set POWER switch to the O-
position.
I. On the Teach Pendant, depress the <HOMING> key. From the submenu select HOME TILT
AXIS.
K. After the LPT has successfully run a number of cycles, from the AUTOCYCLE menu, select
STOP AUTOCYCLE.
3. POSTSERVICE
A. Disconnect the AC power and then the Teach Pendant from the LPT.
B. Return the LPT back to the Process Tool and secure. Connect communications and then
power cable to the LPT.
Gripper-Tilt
Drive Motor
EQUIPMENT
LOAD PORT TRANSFER™ SYSTEM
TASK
FAN MOTOR REPLACEMENT, ULPA FAN / FILTER ASSEMBLY
PROCEDURE [Perform all procedure steps in the order presented below unless otherwise instructed]
1. PRESERVICE
A) Remove power from the LPT. Remove all cable connectors attaching the LPT to the Process
Tool or Host computer. Release the latch(es) securing the LPT to the Process Tool and remove
the LPT. Place the LPT into a location suitable for servicing.
B) Using a 5/32 inch hex driver, loosen two (2) hex screws located at the bottom of the three-sided
plastic cover . Using a 7/64 inch hex driver, unscrew the captive screw at the side, top, of the
cover. Using a phillips screwdriver, loosen two (2) screws located at the other side of the cover.
Grasp the cover at the top and lift up and pull straight off. Set cover aside.
C) Connect the Teach Pendant and then AC power to the LPT. Set the POWER switch to the ON /I
position. On the Teach Pendant, depress the <PORT UP> key.
D) After the minienvironment raises and stops, set the POWER switch to OFF / O position. Remove
the AC cable from the LPT.
2. SERVICE
A) On the bottom of the minienvironment (see Figure CSP-3-1), loosen two (2) captive thumb
screws on the rear half of the bottom cover. When the screws are free, slip the bottom cover
forward then down and off. Set cover aside.
B) While applying upward pressure to the bottom of the fan/filter unit, using a 5/16 inch socket
wrench or nut driver, remove two (2) hex nuts that secure the fan/filter unit to the
minienvironment chassis.
C) Carefully separate the fan unit from the filter. The fan assembly has wires attached and must be
placed out of the way. The filter unit can be removed from the chassis, bagged for protection,
and set aside.
D) Separate the fan wires which are bundled with other wires. Cut cable ties as necessary to free
the fan wires. Trace the wires back to the circuit board where the fan cable connector is plugged
into J12 on the top edge of the board.
F) Taking the filter unit, place into the bottom portion of the minienvironment and mate together
with the fan unit. Place the fan/filter unit into position with the threaded rod inserted through the
holding flange. Take care that the fan wiring is properly routed and that the gaskets are
positioned correctly. Taking the two (2) hex nuts, thread onto the threaded rod and secure.
G) Take the minienvironment bottom cover and put into place. Tighten the two (2) captive screws
to secure.
H) Apply power to the LPT. Set the POWER switch (if available) to the ON / I position. Listen for
the sound of the fan. If no problem is encountered, remove power cable from the LPT and
replace the front cover.
I) Return the LPT back to the Process Tool and secure. Connect communications and power
cables to the LPT and set the POWER switch to the ON / I position.
J) Perform fan speed calibration. The fan speed is adjusted to ensure proper air flow for reduced
particle count within the minienvironment. There may or may not be an interaction between the
LPT air flow and the Process Tool air flow and a balance of flow may need to be established.
The fan speed control is accessed from the underside of the minienvironment. A 1/4-inch hole
is located on the right side (facing the LPT), bottom cover of the minienvironment. The
procedure to adjust the fan speed is given below.
1) The LPT must be attached to the Process Tool and the LPT must have power applied.
2) All shields and covers must be in place on the LPT.
3) Follow the Process Tool manufacturer’s directions, if available, for setting the proper air
flow in the LPT or, if no procedure exists, proceed with the next step.
4) If the Process Tool is large, perform CAP 14; Fan / Filter Air Velocity Adjustment, to
adjust the air velocity.
5) After setting the fan speed, use a particle counter to verify that the particle count inside
the minienvironment is low. Perform the airborne particle contamination test as
contained in PSP-02; Inspect, Clean, Lubricate and Cleanliness Assurance.
6) After verifying the count, vary the fan speed to check the relationship between the fan
speed and particle count. When the count is within specifications, measure the air flow
in the minienvironment and note the air speed (flow) for future reference.
NOTE
Use the minimum airflow to achieve the desired conditions.
3. POSTSERVICE
A) Place the LPT three-sided plastic cover with the metal brackets in place above the screws on
the sides of the LPT. Lower the cover onto the screws and using hex drivers and a phillips
screwdriver, tighten two (2) screws located at one side of the cover and two screws on the
bottom at the other side. Tighten the captive at the top of one side to secure the cover to the
LPT.
Fan / Filter
Assembly
EQUIPMENT
LOAD PORT TRANSFER™ SYSTEM
TASK
ELECTRONIC CIRCUIT BOARD REPLACEMENT
PROCEDURE [Perform all procedure steps in the order presented below unless otherwise instructed]
1. PRESERVICE
A) Set the POWER switch to the OFF / O-position. Connect the Teach Pendant to the LPT. On
the Teach Pendant, depress the <PORT UP> key until the minienvironment is fully raised.
B) Remove power from the LPT. Remove all cable connectors attaching the LPT to the Process
Tool or Host computer. Release the latch(es) securing the LPT to the Process Tool and
remove the LPT. Place the LPT into a location suitable for servicing.
2. SERVICE
NOTE
After removal of the circuit board, prior to mounting the replacement board,
compare boards. Ensure that all jumpers and DIP switches are configured
on the replacement board the same as on the bad board.
4. Replacement of the Indexer Board Assembly is the reverse of the disassembly. Pay
particular attention to the replacement of electrical cable connectors back to the circuit
board connectors.
B) Removal and replacement of the Communications Processor Board and Power Supply
Assembly.
1. Remove the LPT front cover panel. Grasp connectors at the circuit boards and carefully
pull each to remove.
2. Using a phillips screwdriver, loosen four (4) LPT frame screws which secure the Process
chassis in place. Lift up slightly on the chassis for the slots in the sheet metal to clear the
screws. Remove the chassis. The following boards or assemblies can be removed and
replaced.
a) System Control Board Assembly (Boards A1, A2, and A3)
b) Power Supply
c) Power Distribution Board (Board A4).
3. Replacement of the System Control Board and Power Supply Assembly is the reverse of
the disassembly. Pay particular attention to the replacement of electrical cable connectors
back to the circuit board connectors.
C) Removal and replacement the Motion Control and Servo Amplifier Boards:
3. Using a phillips screwdriver, remove the screws that secure the Servo Amplifier board.
Remove and replace this board if necessary or remove the standoffs which secure the
Motion Control board to the chassis. Remove and replace this board if necessary.
4. When the removal and replacement is completed, replace electrical cable connectors to
the proper connectors on the circuit boards.
5. Replace the chassis cover and secure the four (4) captive screws. Replace the servo-
motor cover and secure with two (2) screws.
E) If all axes Home without an error, place a Pod with cassette onto the port plate and on the
Teach Pendant press <AUTO CYCLE> key and select START AUTOCYCLE. Evaluate the
LPT operation for a few cycles. If no problem is seen, select STOP AUTOCYCLE to stop the
autocycle at the Home position.
3. POSTSERVICE
A) Disconnect the Teach Pendant and AC power from the LPT.
B) Return the LPT back to the Process Tool and secure. Connect communications and then
power cables to the LPT.
C) Return the LPT to standard operation.
LPT User
Side View
Module C2
Minienvironment (Behind
Side View Board C1)
Board C1
Board B1
Board B2
(Underneath)
Board
A2
Board A3
Board
A4
Power Supply
EQUIPMENT
LOAD PORT INTERFACE™ SYSTEM
TASK
LASER DIODE REPLACEMENT
PROCEDURE [Perform all procedure steps in the order presented below unless otherwise instructed]
1. PRESERVICE
NOTE
This procedure must only be performed by a service engineer qualified to
align laser systems and aware of laser safety practices.
A) Set the POWER switch to the OFF / O position. Remove the Process Tool or Host
communications cable from LPT. Connect the Teach Pendant.
B) Set the POWER switch to the ON / I position. On the Teach Pendant depress the <PORT UP>
key to raise the minienvironment.
C) Set the POWER switch to the OFF / O position and remove the power cord.
D) Using a 5/32 inch hex driver, loosen two (2) hex screws located at the bottom of the three-sided
plastic cover . Using a 7/64 inch hex driver, unscrew the captive screw at the side, top, of the
cover. Using a phillips screwdriver, loosen two (2) screws located at the other side of the cover.
Grasp the cover at the top and lift up and pull straight off. Set cover aside.
E) Remove the minienvironment plastic window panel by pressing fingers onto the panel and
pushing inward and upward a small amount. When the bottom of the panel has cleared the sheet
metal, grasp the bottom of the panel by hand and pull straight out removing the panel. Set panel
aside. Place a cover over the exposed ULPA filter.
2. SERVICE
A) Using a phillips screwdriver, remove five (5) screws securing the optical system bracket cover on
the bottom of the port plate (see Figure CSP-5-1). Carefully remove cover to gain access to the
Laser tube.
B) Using a phillips screwdriver, remove two (2) screws securing the short access cover and remove
five (5) screws securing the long access cover on the bottom of the port plate as shown in Figure
CSP-5-1.
F) Using a 5/64 inch allen wrench, loosen one (1) or two (2) screws securing Laser clamping
bracket (see Figure CSP-5-1). Remove old laser and discard.
G) Slip new Laser tube into mounting fixture. Using a 5/64 inch allen wrench, tighten screw(s) on
laser clamping bracket, but do not tighten fully.
H) Plug the two (2) connector halves together. Lay the wires and connector into the port plate
cavity. Replace the short and long covers and secure with two (2) and five (5) screws
respectively.
CAUTION
Laser radiation when power is applied to LPT and
interlock defeated. Avoid direct eye exposure.
I) Plug in the AC power cord to the LPT. Set the POWER switch to the ON / I position.
J) On the Teach Pendant depress the <DIAG> key and select SENSOR ALIGNMENT to turn on
the Laser.
K) With the Laser diode in the fully seated position in its bracket, pull it back slightly.
L) The beam shape emitted from the Laser is oval. Rotate the Laser tube body until the elongated
part of the beam is parallel with the port plate. See Figure CSP-5-3.
M) After the beam has been correctly oriented, seat the Laser fully into the laser clamping fixture
and secure by tightening the two (2) allen screws while maintaining alignment.
N) Perform procedure CAP 12; Optical Detector System Adjustment to verify that the wafer sensor
system is aligned.
O) Take the Caution label (1mW laser) or Danger label (3mW laser) from the kit and cut the label
to separate the CAUTION or DANGER part of the label from the date and serial number part.
Apply the date and serial number part of the label to the laser’s wires inside the port plate where
the long cover fits.
P) On the bottom of the port plate, replace the short access cover and using a phillips screwdriver,
secure with two (2) screws. Replace the long access cover and secure with five (5) screws
Q) Carefully replace laser bracket cover and secure with five (5) screws.
B) Place the LPT three-sided plastic cover with the metal brackets in place above the screws on
the sides of the LPT. Lower the cover onto the screws and using hex drivers and a phillips
screwdriver, tighten two (2) screws located at one side of the cover and two screws on the
bottom at the other side. Tighten the captive screw at the top of one side to secure the cover to
the LPT.
Long
Access
Cover
Optical Bracket
Assembly
Short
Access
Laser Bracket Cover
Laser Tube Cover
With (5) Screws
Long
Access
Cover
Long Access
Cover Shown
Removed
Cut Laser
Wires Here To
Add Connector
Laser Serial
Number Label
Wrapped
Around The
Wires Here
Short Access
New
Cover Shown
Connector
Removed
Laser Wires
EQUIPMENT
LOAD PORT TRANSFER™ SYSTEM
TASK
PARTICLE PROTECTION STRIP REPLACEMENT
PROCEDURE [Perform all procedure steps in the order presented below unless otherwise instructed]
1. PRESERVICE
A) Connect the Teach Pendant to the LPT. Set the POWER switch to the O-position. On the
Teach Pendant, depress the <VERT UP> key to move the vertical arm up to gain access to
the lower protection-strip bracket.
B) Remove power from the LPT. Remove all cable connectors attaching the LPT to the Process
Tool or Host computer. Release the latch(es) securing the LPT to the Process Tool and
remove the LPT. Place the LPT into a location suitable for servicing.
C) Using a 5/32 inch hex driver, loosen two (2) hex screws located at the bottom of the three-
sided plastic cover . Using a 7/64 inch hex driver, unscrew the captive screw at the side, top,
of the cover. Using a phillips screwdriver, loosen two (2) screws located at the other side of the
cover. Grasp the cover at the top and lift up and pull straight off. Set cover aside.
2. SERVICE
NOTE
Observe the way the protection strip is threaded through the rollers. As the
brackets that secure the strip are removed, observe the way the strip is
threaded through the bracket.
A) Using the allen wrench, remove the upper shield assembly by removing two screws located on
the top of the lower shield bezel cap (see Figure CSP-6-1). Set cap and screws aside.
B) Lift the upper shield assembly straight up and off. Set shield aside.
C) Using the phillips screwdriver, remove the lower protection strip retainer bracket observing the
way the strip is threaded into the bracket.
D) Using the phillips screwdriver, remove the upper protection strip retainer bracket observing the
way the strip is threaded into the bracket.
E) Remove the protection strip observing the way the strip is threaded through the rollers.
F) Taking the new strip, thread the strip into the upper bracket (see Figure CSP-6-2).
H) Thread the strip down through the rollers centering the strip on the rollers.
I) Taking the bottom of the strip, thread the strip into the lower bracket (see Figure CSP-6-3) so
that when the bracket is placed into the location on the side support assembly, the screw holes
in the bracket will align just above the holes in the side support (see Figure CSP-6-4).
J) Ensure that the bracket (with strip attached) rests above the holes approximately 3 to 5mm.
Pull the bracket down into alignment (holes in the bracket with the holes in the side support)
which will put tension on the strip.
K) Connect the Teach Pendant to the LPT. Apply power to the LPT. Using the Teach Pendant,
select <VERT DOWN>. Observe the way the vertical arm moves down the strip. The rollers
should ride centered on the strip. If the strip does not ride centered on the strip, remove the
lower bracket and perform steps H through K. If the tension on the strip is not proper, perform
steps J and K again.
L) Evaluate the LPT operation for a few cycles by pressing <VERT UP> key on the Teach
Pendant followed by <VERT DOWN >.
M) If no problem is seen, place a Pod with cassette onto the port plate and on the Teach Pendant
press <AUTO CYCLE> key and select START AUTOCYCLE. Evaluate the LPT operation for a
few cycles. If no problem is seen, select STOP AUTOCYCLE to stop the autocycle at the
Home position.
3. POSTSERVICE
A) Replace the upper shield assembly. Replace the lower shield bezel cap and secure with two
(2) screws.
B) Place the LPT three-sided plastic cover with the metal brackets in place above the screws on
the sides of the LPT. Lower the cover onto the screws and using hex drivers and a phillips
screwdriver, tighten two (2) screws located at one side of the cover and two screws on the
bottom at the other side. Tighten the captive screw at the top of one side to secure the cover
to the LPT.
Protection
Bracket Strip
Upper Shield
Lower Shield
Bezel Cap
Lower Shield
Protection Strip
Retainer
Bracket
Hole In Bracket
Side Assembly
Hole In Side
Assembly
EQUIPMENT
LOAD PORT TRANSFER™ SYSTEM
TASK
MOTOR BRAKE REPLACEMENT [For LPT Serial Numbers less than 4x97-00448]
PROCEDURE [Perform all procedure steps in the order presented below unless otherwise instructed]
There are three (3) motor brakes on the LPT: minienvironment motor brake, vertical drive motor brake,
and arm rotate motor brake. In the Service section below, chose the paragraph for the brake that is to
be replaced.
1. PRESERVICE
A. With the minienvironment in the Home position, remove power from the LPT. Remove all
cable connectors attaching the LPT to the Process Tool or Host computer. Release the
latch(es) securing the LPT to the Process Tool and remove the LPT. Place the LPT in a
location where it can be serviced. Soldering may be required.
B. Using a 5/32 inch hex driver, loosen two (2) hex screws located at the bottom of the three-sided
plastic cover. Using a 7/64 inch hex driver, unscrew the captive screw at the side, top, of the
cover. Using a phillips screwdriver, loosen two (2) screws located at the other side of the cover.
Grasp the cover at the top and lift up and pull straight off. Set cover aside.
2. SERVICE
A. Rotate motor brake remove and replace:
1. Using a phillips screwdriver, remove three (3) screws that secure the gripper-tilt cover. Lift
cover off and set aside with the screws. Using a small common screwdriver, loosen the
captive screw on the servo-electronics cover. The cover is hinged, lower cover to gain
access the circuit boards. See Figure PSP-2-3 in the first section of this chapter.
2. Using small wire cutters, follow the wires from the brake and cut away the cable ties to free
the wires. Disconnect the brake cable connector at the servo controller board below the
motor.
3. Using a 3/32 inch allen wrench, remove two (2) screws that secure the brake to the brake
bracket (see Figure CSP-7A-1). Pull the brake off of the motor shaft. Discard the brake
and set the screws aside.
4. Place the new brake onto the motor shaft. Ensure that the electrical cable is positioned
toward the outside of the LPT. Replace the brake screws, and tighten to secure the brake
to the bracket.
5. Plug the brake cable connector into the wiring harness.
C. Connect the Teach Pendant to the LPT. Apply power to the LPT.
E. If all axes are at Home, place a SMIF-Pod with cassette onto the port plate and on the Teach
Pendant press <AUTO CYCLE> key and select START AUTOCYCLE. Evaluate the LPT
operation for a few cycles. Listen at the brake that was changed for a sound of a brake
dragging or a motor laboring. Select STOP AUTOCYCLE to stop the autocycle at the Home
position.
If sounds (problem) are heard, it may be the brake dragging – Engage the brake and loosen
the attaching hardware. Rotate or shift the brake to align the drive tab of the motor, then tighten
the brake mounting screws.
3. POSTSERVICE
A. Covers (replace as necessary):
1. Vertical support cover – grasp the handle at the top and place onto the LPT. Using a hex
driver, replace three (3) screws at the top-side, one (1) screw at the bottom-front of the
cover and one (1) phillips screw on top-center.
2. Tilt drive cover – close the electronics cover and tighten the screw. Replace the tilt-drive
cover over the assembly. Secure with three (3) phillips screws. Ensure that the cable is
under the clamp when securing.
B. Place the LPT three-sided plastic cover with the metal brackets in place above the screws on
the sides of the LPT. Lower the cover onto the screws and using hex drivers and a phillips
screwdriver, tighten two (2) screws located at one side of the cover and two screws on the
bottom at the other side. Tighten the captive screw at the top of one side to secure the cover
to the LPT.
Brake
EQUIPMENT
LOAD PORT TRANSFER™ SYSTEM
TASK
MOTOR BRAKE REPLACEMENT [For LPT Serial Numbers greater than 4x97-00449]
PROCEDURE [Perform all procedure steps in the order presented below unless otherwise instructed]
There are three (3) motor brakes on the LPT: minienvironment motor brake, vertical drive motor brake,
and arm rotate motor brake.
The minienvironment motor and vertical drive motor brakes use the same brake; Asyst P/N 9700-
4312-01. The rotate motor brake is Asyst P/N 9700-4104-01.
1. PRESERVICE
A. With the minienvironment in the Home position, remove power from the LPT. Remove all
cable connectors attaching the LPT to the Process Tool or Host computer. Release the
latch(es) securing the LPT to the Process Tool and remove the LPT. Place the LPT in a
location where it can be serviced. Soldering may be required.
C. Using a 5/32 inch hex driver, loosen two (2) hex screws located at the bottom of the three-
sided plastic cover. Using a 7/64 inch hex driver, unscrew the captive screw at the side, top, of
the cover. Using a phillips screwdriver, loosen two (2) screws located at the other side of the
cover. Grasp the cover at the top and lift up and pull straight off. Set cover aside.
2. SERVICE
A. Rotate motor brake remove and replace:
1. If necessary remove the gripper-tilt cover. Using a 3/32 inch hex driver, loosen two (2)
captive screws located on the top of the gripper-tilt cover. Using the hex driver, loosen one
screw on the end of the cover securing a latch. Rotate the clamp to free the cover. Move
the cable out of the way. Grasp the cover at the top and pull out and then up. Set cover
aside. See Figure PSP-2-3 in the first section of this chapter.
2. Using small wire cutters, follow the wires from the brake and cut away the cable ties to free
the wires. Disconnect the brake cable connector at the servo controller board below the
motor.
3. Using a 3/32 inch allen wrench, remove two (2) screws that secure the brake to the brake
bracket (see Figure CSP-7A-1). Pull the brake off of the motor shaft. Discard the brake
and set the screws aside.
4. Place the new brake (Asyst P/N 9700-4104-01) onto the motor shaft. Ensure that the
electrical cable is positioned toward the outside of the LPT. Replace the brake screws, and
tighten to secure the brake to the bracket.
5. Plug the brake cable connector into the circuit board. Push the wires into the wiring
harness and cable tie into place.
C. Connect the Teach Pendant to the LPT. Apply power to the LPT.
E. If all axes are at Home, place a SMIF-Pod with cassette onto the port plate and on the Teach
Pendant press <AUTO CYCLE> key and select START AUTOCYCLE. Evaluate the LPT
operation for a few cycles. Listen at the brake that was changed for a sound of a brake
dragging or a motor laboring. Select STOP AUTOCYCLE to stop the autocycle at the Home
position.
If sounds (problem) are heard, it may be the brake dragging – Engage the brake and loosen
the attaching hardware. Rotate or shift the brake to align the drive tab of the motor, then tighten
the brake mounting screws.
3. POSTSERVICE
A. Grasp the handle at the top of the vertical support cover and place onto the LPT. Using a hex
driver, replace three (3) screws on the top-side and tighten one (1) screw at the bottom-front of
the cover. Using a phillips screwdriver secure one (1) screw on the top of the cap.
B. If removed, replace the cover over the tilt drive assembly and ensure that the cover slips into
the groove in the reducer housing. Secure cover with two (2) screws on the top. Swing the
clamp into the notch on the cover and one tighten the screw on the latch. Ensure that the cable
is under the clamps after securing the cover.
C. Place the LPT three-sided plastic cover with the metal brackets in place above the screws on
the sides of the LPT. Lower the cover onto the screws and using hex drivers and a phillips
screwdriver, tighten two (2) screws located at one side of the cover and two screws on the
bottom at the other side. Tighten the captive at the top of one side to secure the cover to the
LPT.
Brake
EQUIPMENT
LOAD PORT TRANSFER™ SYSTEM
TASK
ENCODER REPLACEMENT
PROCEDURE [Perform all procedure steps in the order presented below unless otherwise instructed]
1. PRESERVICE
A. With the minienvironment in the Home position, remove power from the LPT. Remove all
cable connectors attaching the LPT to the Process Tool or Host computer. Release the
latch(es) securing the LPT to the Process Tool and remove the LPT. Place the LPT in a
location where it can be serviced.
B. If necessary remove the gripper-tilt cover. Using a 3/32 inch hex driver, loosen two (2) hex
screws located on the top of the gripper-tilt cover. Using the hex driver, remove one screw at
the end holding the cable clamp. Remove the screw and clamp and set aside. Move the cable
out of the way. Grasp the cover at the top and pull out and then up. Set cover aside.
If necessary remove the vertical support cover. Using a 3/32 inch hex driver, remove three (3)
hex screws located at the top of the vertical support cover and one (1) screw at the bottom.
Using a phillips screwdriver, remove one (1) screw on the top cover. Grasp the handle at the
top of the cover and lift and pull straight off. Set cover aside.
2. SERVICE
A. At the encoder that is to be replaced, disconnect the encoder cable connector that plugs into
the encoder.
CAUTION
It is important that the encoder be properly unlocked prior to
dismounting. Failure to comply may damage encoder base
plate, encoder wheel, or encoder housing.
B. At encoder, (see Figure CSP-8-1) using straight blade screwdriver, place into slot on top of
encoder (see Figure CSP-8-2) and turn so that the single dot on the center turnable section
matches the single dot on encoder housing.
C. After the turnable section is rotated, a hole on side of encoder becomes visible. Place 0.035
inch allen wrench (angle slightly upward) into hole and feel for screw (see Figure CSP-8-2).
Turn wrench counter-clockwise to loosen setscrew.
NOTE
It may be necessary to move the motor-drive belt slightly one way or the
other to align the setscrew in the encoder disk.
D. Loosen four (4) plastic tabs holding encoder body to its base. Remove encoder by pulling
straight off. Discard encoder body, but leave the base in place.
Important: Do not loosen or in any way move the encoder base. The base is factory aligned to
the shaft. If the base is moved, the new encoder may be damaged.
E. Take the replacement encoder, ensure that the single dots are matched on the top surface, and
insert the 0.035 inch allen wrench into encoder hub. Place the encoder onto the motor shaft
while matching with the encoder base, and then press into place.
F. Turn the allen wrench clock-wise until the screw is tight. Do not over tighten. Remove allen
wrench.
G. Take the straight blade screwdriver and turn the center turnable section of the encoder to align
the two dots on the center part with the single dot on the encoder housing.
H. Connect the Teach Pendant to the LPT. Apply power to the LPT.
I. Using the Teach Pendant, press < HOMING > key followed by selecting the HOME ALL AXES
to Home the LPT.
3. POSTSERVICE
A. Remove the LPT power cable, then remove the Teach Pendant connection.
B. If removed, replace the cover over the tilt drive assembly and ensure that the cover slips into the
groove in the reducer housing. Secure with two (2) screws on top and one (1) screw and a cable
clamp on the end. Ensure that the cable is under the clamp when securing.
If removed, grasp the handle at the top of the side cover and place it back onto the LPT. Using a
3/32 inch hex driver, tighten three (3) hex screws located at the top of the vertical support cover.
Using the hex driver, tighten one screw at the bottom.
C. Replace the LPT back onto the Tool and secure. Reconnect the communications cable(s) and
then the power cable.
Encoder
Encoder
Connector
Single Dot
Two
Dots
Turnable
Section
Appendix A
REQUIRED TOOLS
Specific tools are required to perform certain service tasks. These tools may be purchased from Asyst:
ASYST TECHNOLOGIES
POWERDISTRIBUTION
3200-1061- REV:
R1 U1
SERVO INDEXER
P4 P5 P3 P2 P1
F3 F2 F1
+
C1
R2
C C
B1 C2
3 3
5 3X
5 6 2
7 2
6 2
.125 ±.06
NOTES: UNLESS OTHERWISE SPECIFIED
B 1. MANUFACTURE PER ASYST TECHNOLOGIES WORKMANSHIP B
STANDARDS 2000-0311-01.
13 4X
4 MARK CURRENT ASSEMBLY REVISION LEVEL IN AREA INDICATED
WITH PERMANENT INK. VENDOR TO MARK I.D. ON BOARD.
PARTS LIST
8 MARK CURRENT ASSEMBLY SUFFIX -01 OR -02 IN AREA INDICATED UNLESS OTHERWISE SPECIFIED CONTRACT NO.
A WITH PERMANENT INK. VENDOR TO MARK I.D. ON BOARD.
DIMENSIONS AREININCHES.
TOLERANCES ARE:
. TECHNOLOGIES, INC.
A
FRACTIONS DECIMALS ANGLES
.XX -
. .XXX - -
APPROVALS DATE
NOTES CONTINUED ON PAGE 2 MATERIAL
DRAWN PCB ASSY, DC-DC
9700-3970-02 LPT .
B.CARLSON 3/13/96
SEE BOM
. CHECKED CONVERTER
9700-3970-01 LPT FINISH J. KYFFIN 4/12/96
. DES. ENGR. SIZE CAD FILE NAME DWG NO. REV.
NEXT ASSY PRODUCT N/A
M. NG 4/12/96
.
MFG. ENGR.
D P1061D1E 3200-1061-XX E
FIRST USED ON DO NOT SCALE DRAWING A. DEPEW 4/12/96 SCALE 2/1 SHEET 1 OF 2
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
REVISION
NOTICE TO ALL PERSONS RECEIVING THIS CONFIDENTIAL DRAWING:
Reproduction Forbidden without the specific written permission of Asyst
ZONE REV. DESCRIPTION APPROVED DATE
Technologies Inc., Fremont, California. this drawing is only conditionally
issued and neitherreceipt norpossession thereof confers or transfers
any right in, or license to use the subject matter of the drawing orany . . SEE SHEET 1 . .
designs or technical information shown theron, or any right to reproduce
thedrawing or any part thereof, except for manufacture by vendors for
Asyst Technologies, Inc. and for manufacture under the corporation's
written license. No right to reproduce this drawing is granted for the
subject matter thereof unless by written agreement with orwritten
permission from the Company. 15 4 8
7
D D
10 10
INDEXER
W1
REF R1 & R2 9 3
5 5 3X
6
7 2 2
6
2
B B
.125 ±.06
12 4X
13 4X
9 INSTALL JUMPER PLUG , ITEM 20 TO CONNECT W1-1 TO W1-2.
AFTER WAVE SOLDER.
-02 SHOWN
10 APPLY SUFFICIENT AMOUNT OF ADHESIVE, ITEM 23 UNDER
U3, ITEM 16 AND U4 ITEM 17 TO HOLD U3 VERTICAL
MULTIPLE MODULES ITEM
QTY
REQD
PART NUMBER DESCRIPTION
MATERIAL
SPECIFICATION
PARTS LIST
UNLESS OTHERWISE SPECIFIED CONTRACT NO.
A 11. IDENTIFY PART PER MARKING METHOD 12 OF ASYST CORPORATE
DIMENSIONS ARE IN INCHES.
TOLERANCES ARE:
. TECHNOLOGIES, INC.
A
PROCEDURE 2000-0311-01. FRACTIONS DECIMALS
.XX -
ANGLES
. .XXX - -
APPROVALS DATE
8 7 6 5 4 3 2 1
Load Port Transfer™ System 2150 / 2200 Technical Manual
A
x SYST TECHNOLOGIES 2000-0900-01 Revision A Page A-9
8 7 6 5 4 3 2 1
REVISION
NOTICE TO ALL PERSONS RECEIVING THIS CONFIDENTIAL DRAWING:
Reproduction Forbidden without the specific written permission of Asyst DESCRIPTION
ZONE REV. APPROVED DATE
Technologies Inc., Fremont, California. this drawing is only conditionally
issued and neither receipt norpossession thereof confers or transfers
any right in, or license to use the subject matter of the drawing or any . A ECN N4102; PRODUCTION RELEASE JK 10/21/97
designs or technical information shown theron, oranyrighttoreproduce
the drawing oranypartthereof,except for manufacture by vendors for . B ECN N4283 JK 3/4/98
Asyst Technologies, Inc. and for manufacture under the corporation's 20 2X
written license. No right to reproduce this drawing is granted for the
subject matter thereof unless by written agreement with orwritten
permission from the Company. 2 6X 3
5
D D
1.50
2
9 11 2X
3 3
6
2
C C
7
.47 2
10 2X
21 2X
3
NOTES: UNLESS OTHERWISE SPECIFIED
REF POSITION NO. 1
1. MANUFACTURE PER IPC-610 CLASS 2.
PARTS LIST
A 8 INSTALL POLARIZING KEY ITEM 22 FOR CONNECTORS J7 AND J8 UNLESS OTHERWISE SPECIFIED
DIMENSIONS AREININCHES.
CONTRACT NO.
A
AS SHOWN. TOLERANCES ARE:
FRACTIONS DECIMALS ANGLES
. TECHNOLOGIES, INC.
.XX .01
. .XXX .005 1/2
APPROVALS DATE
9. IDENTIFY PART PER MARKING METHOD 12 9. OF ASYST CORPORATE
PROCEDURE 2000-0311-01.
MATERIAL
.
DRAWN PCB ASSY, CONNECTOR
B.CARLSON 3/14/96
SEE BOM
. CHECKED I/O
9700-4084-01 LPT
10. PACKAGE PER ASYST WORKMANSHIP STANDARDS 2000-0311-01 FINISH
.
J. KYFFIN 4/12/96
DES. ENGR.
COSMETIC PART: YES X NO NEXT ASSY PRODUCT N/A M. NG 4/12/96
SIZE CAD FILE NAME DWG NO. REV.
.
MFG. ENGR.
D P1062D1B 3200-1062-01 B
FIRST USED ON DO NOT SCALE DRAWING A. DEPEW 4/12/96 SCALE 3/4 SHEET 1 OF 1
8 7 6 5 4 3 2 1
Load Port Transfer™ System 2150 / 2200 Technical Manual
TO/FROM
UART C & D INTERRUPT SERVO INT. TO +24V SW SMART TAG
ELEVATOR
INTERRUPTS INTERRUPT CONTR.
UART C & D NMI AMPLIFIER/ DC
DATA BUS/ADDRESS SELECT SERVO/MOTION DRIVER WITH J2 MECH
INTERRUPTS MOTOR
CONTROLLER OVER CURRENT
SERVO INTERRUPT * SHUT DOWN
CPU
INTERRUPT PROBE
SENSOR INTERRUPTS POSITION ENCODER ENC PCB
* * CAPTURE J19 UP
DIGITAL WATCHDOG
C I/O INTERRUPT
RESET
TIMER
CIRCUITRY OPTICAL (OPTIONAL) C
DN LIMITS
J17
INTERRUPT
+24V SW
CONTROLLER
POD LOCK POD HOLD DOWN LATCH
AMPLIFIER/ DC
I/O INTERRUPT DRIVER WITH DC STEPPER
MOTOR MECH MECH
OVER CURRENT MOTOR
SHUT DOWN POD-IN-PLACE
J3 J53
LOCK LATCHED
* OPTICAL SWITCH OPTICAL
DIGITAL OPTICAL
LIMITS UNLATCHED LIMITS
+24V STS PROBE UNLOCK
I/O
SW CURRENT
WAFER LIMITER
PRESENT J4
SENSOR STEPPER
HORIZ. VIEW ON/OFF MOTOR
J17 DRIVER J6
COMPARATORS
STEP CLOCK J20 J2
WITH
LASER CASSETTE
SLOT PROGRAMMABLE J3
EMITTER SENSOR THRESHOLD
DIRECTION 3200-1037-01
STEP PORT PLATE
B SEQUENCER
INTERCONNECT
WAFER SEATER
B
WAFER STEPPER PCB DC
PROTRUSION ON/OFF MOTOR STEPPER
SENSOR J5 MECH
DRIVER MOTOR
HORIZ. VIEW
J3
OUT
LEDS OPTICAL
VERT. VIEW J1
HOME LIMITS
WAFER MODULATED
IR
PRESENT
EMITTER AMPLIFIER
SENSOR
SEVEN OPTICALLY
ISOLATED
25 PIN D-SUB
OUTPUTS J10 LED PCB
POD-IN
POWER READY PLACE
SEVEN OPTICALLY INTERLOCKS/
3200-1044-01 INDEXER CONTROL INTERFACE (MAIN BD.) ISOLATED PARALLEL COM J1
INPUTS
3200-1045-01 INDEXER CPU (PIGGY BACK BD.)
3200-1038-02
QTY MATERIAL
ITEM PART NUMBER DESCRIPTION
REQD SPECIFICATION
PARTS LIST
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
REVISION
NOTICE TO ALL PERSONS RECEIVING THIS CONFIDENTIAL DRAWING:
Reproduction Forbidden without the specific written permission of Asyst
ZONE REV. DESCRIPTION APPROVED DATE
Technologies Inc., Fremont, California. this drawing is only conditionally
issuedandneither receipt nor possession thereof confers or transfers
any right in, or licenseto use the subject matter of the drawing or any
A ECN N4242: PRODUCTION RELEASE JK 1/19/98
designs or technical information shown theron, or any right to reproduce
the drawing oranypartthereof,except for manufacture by vendors for
Asyst Technologies, Inc. and for manufacture under the corporation's
written license. No right to reproduce this drawing is granted for the
subject matter thereof unless by written agreement with or written
permission from the Company. 6900-1283-01
SERVO CONTROLLER
D TO MOTOR J1 P1 PARALLEL I/O CONNECTOR PANEL D
SERVO AMP PCM-U1048 P2 P/O P8
WINSYSTEMS 9700-4081-01 P/O J8
P1 J1 J2 PARALLEL PORT
SERVO PWR (1-34) P1
34 DB25F
6900-1195-01
6900-1284-01
J2 PORT A (SPARE)
(See page 2 for more details) DB9M
PC/104 BUS
9700-4346-01 9700-4346-01
9700-4084-XX
9 5 P6B
P10 SERIAL I/O PORT B (TEST)
COPLEY P3 PCM-COM4A J1
J10 DB9M
6900-1272-01 WINSYSTEMS J6B
U2 J6 P6 CHAN2
J3 CHAN3 (TAG)
J1 INDEXER CHAN2(11-20)
P3 J6 P6
J1 P1 5 SERVO 10
P1 9700-4108-01 JDC J3 9700-4109-01 PORT C (LAPTOP)
J4
P5 J5 J7 P7 DB9M
10 CHAN1(1-10) 20
C 2 2 C
SPARE
9 10
P22 P22 5 CHAN4 (HOST)
2 9700-3717-01 J6A P6A P/O P7
6900-1290-01 9700-4080-01 P/O J7 J3 PORT D (HOST)
2 INDEX PWR (See page 3 for more details) DB9M
(11-20)
CHAN1 10
P/O P7
11 4 PC/104 BUS 9700-4080-01 P/O J7
TEST (N/C)
AMPRO (1-10)
10
CPU PCB J11 P11 P/O P7
SERIAL1(1-10)
486i-50MHz 9700-4080-01 P/O J7
HOST
DC-DC CONVERTER (21-40)
SERIAL2(11-20) 20
P2 P2
(LAPTOP)
J13 P13 P/O P8
INX PWR 2 SERIAL3(1-10)
9700-4081-01 P/O J8
(TOOL)
(35-54)
20
P4 SERIAL4(11-20)
P10 (TEACH PENDANT)
P4 CPU POWER
9700-4075-01 J7 P7
B J10 B
P3 P3 6900-1282-01 J9 LAN
4 4 ETHERNET RJ45
POWER 8 8
SERVO PWR 2
J16 P16
9700-4267-01 J5 PORT E (TOOL)
UTILITY I/O 6900-1115-01 DB9M
P21
(7-8) 2
J6 TEACH PENDANT
6900-1285-01
P21 CPC8F
2 P5 P5 P/O P8
9700-4081-01 9700-4081-01 P/O J8 J10 AC POWER
FRONT (55-62)
7 (CONN POWER) 7
SWITCH
PANEL P1 P1 9700-4509-01 P20 J20
ASSY 9700-4074-01 POWER SUPPLY 9700-4078-01
24V PWR 2 3
3200-1061-01
3 OUT IN QTY MATERIAL
P24 AC LINE FILTER ITEM
REQD
PART NUMBER DESCRIPTION
SPECIFICATION
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
REVISION
NOTICE TO ALL PERSONS RECEIVING THIS CONFIDENTIAL DRAWING:
Reproduction Forbidden without the specific written permission of Asyst DESCRIPTION APPROVED
ZONE REV. DATE
Technologies Inc., Fremont, California. this drawing is only conditionally
issued and neither receipt norpossession thereof confers or transfers
any right in, or license to use the subject matter of the drawing or any GR CLOSED . - SEE SHT 1 . .
designs or technical information shown theron, oranyrighttoreproduce
the drawing oranypartthereof,except for manufacture by vendors for
GRIPPER-ASSY
Asyst Technologies, Inc. and for manufacture under the corporation's
written license. No right to reproduce this drawing is granted for the
subject matter thereof unless by written agreement with orwritten
permission from the Company.
D D
C C
FROM
CPU ASSY
P1 J1
9700-4346-01
P6B
5
RS232C SERVO CONTROLLER
6900-1283-01
J90
P90
B B
P3
MFG. ENGR.
M.NEADS 11/15/96
D E0057D2A 3400-0057-01 A
FIRST USED ON DO NOT SCALE DRAWING L.TURNER 11/15/96 SCALE NONE SHEET 2 OF 3
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
REVISION
NOTICE TO ALLPERSONS RECEIVING THISCONFIDENTIAL DRAWING:
Reproduction Forbidden without the specific written permission of Asyst
ZONE REV. DESCRIPTION APPROVED DATE
Technologies Inc., Fremont, California. this drawing is only conditionally
issuedandneither receipt nor possession thereof confers or transfers
any right in, or license to use the subject matter of the drawing or any . - SEE SHT 1 . .
designs or technical information shown theron, or any right to reproduce
the drawing or any part thereof, except for manufacture by vendors for
Asyst Technologies,Inc.andformanufacture under the corporation's
written license. No right to reproduce this drawing is granted for the
9700-4052-02
subject matter thereof unless by written agreement with or written
permission from the Company.
WAFER
3200-1045-01 PROTRUSION
SENSOR, VERT.
LATCH LIMIT SW1 REAR
POD
LATCH
LATCH LIMIT SW2 SLOT SENSOR CASSETTE
SLOT SENSOR
B LASER B
STS
DIODE
PROBE
EMITTER
P17
POWER STATUS
READY PANEL
INDICATORS P22
POD IN PLACE
P10 2 P21/J21
P6 FRONT
TAG J10 9700-4072-01
CPU/COM4A (1-10) J6 SWITCH PANEL
P3 SERIAL
5 9 ASSY
9700-4108-01
FROM CPU/COM 4A
P7 9700-3732-01
CPU/COM4A (11-20) P12
HOST
J7 9700-3706-01
SERIAL J12
5
P2 2
P5
9700-4079-01
FROM DC-DC CONV J5 UNLESS OTHERWISE SPECIFIED CONTRACT NO.
A +24VDC
P1 2 DIMENSIONS ARE IN INCHES.
TOLERANCES ARE:
. TECHNOLOGIES, INC.
A
FRACTIONS DECIMALS ANGLES
.XX -
. -
TO COPLEY .XXX - APPROVALS DATE
MFG. ENGR.
M.NEADS 11/15/96
D E0057D3A 3400-0057-01 A
FIRST USED ON DO NOT SCALE DRAWING L.TURNER 11/15/96 SCALE NONE SHEET 3 OF 3
8 7 6 5 4 3 2 1
4 3 2 1
NOTICE TO ALL PERSONS RECEIVING THIS CONFIDENTIAL DRAWING: REVISIONS
Reproduction Forbidden without the specific written permission of Asyst
Technologies Inc., Fremont, California. this drawing is only conditionally ZONE REV. DESCRIPTION APPROVED DATE
issued and neither receipt nor possession therof confers or transfers
any right in, or license to use the subject matter of the drawing or any
designs or technical information shown theron, or any right to reproduce A PRODUCTION RELEASE BH 10/24/86
the drawing or any part therof, except for manufacture by vendors for
Asyst Technologies, Inc. and for manufacture under the corporation's B ECN N252 BH 4/7/87
written license. No right to reproduce this drawing is granted for the
subject matter therof unless by written agreement with or written C ECN N4408 JK 6/16/98
permission from the Company.
D D
1
2X 3 2X
2
2
C C
.275 4 2X
B B
C
NONE
NEXT ASSY PRODUCT .
DES. ENGR.
. . A2182C1C 9700-2182-01 C
MFG. ENGR.
SCALE 1/1 SHEET 1 OF 1
FIRST USED ON DO NOT SCALE DRAWING . .
4 3 2 1
Load Port Transfer™ System 2150 / 2200 Technical Manual
ASYST
x TECHNOLOGIES 2000-0900-01 Revision A Page A-18
4 3 2 1
NOTICE TO ALL PERSONS RECEIVING THIS CONFIDENTIAL DRAWING: REVISIONS
Reproduction Forbidden without the specific written permission of Asyst
Technologies Inc., Fremont, California. this drawing is only conditionally ZONE REV. DESCRIPTION APPROVED DATE
issued and neither receipt nor possession therof confers or transfers
any right in, or license to use the subject matter of the drawing or any
designs or technical information shown theron, or any right to reproduce A PRODUCTION RELEASE BH 10/24/86
the drawing or any part therof, except for manufacture by vendors for
Asyst Technologies, Inc. and for manufacture under the corporation's B ECN N252 BH 4/7/87
written license. No right to reproduce this drawing is granted for the
subject matter therof unless by written agreement with or written C ECN N393 BH 4/13/88
permission from the Company.
4 2X 5
3 2X
7
C 2 C
.275 6 2X
B B
FINISH . J. KYFFIN 6/12/98 SIZE CAD FILE NAME DWG. NO. REV.
C
NONE
NEXT ASSY PRODUCT .
DES. ENGR.
. . A2183C1F 9700-2183-01 F
MFG. ENGR.
DO NOT SCALE DRAWING SCALE 1/1 SHEET 1 OF 1
FIRST USED ON . .
4 3 2 1
Load Port Transfer™ System 2150 / 2200 Technical Manual
ASYST
x TECHNOLOGIES 2000-0900-01 Revision A Page A-20
8 7 6 5 4 3 2 1
NOTICE TO ALLPERSONS RECEIVINGTHIS CONFIDENTIALDRAWING:
REVISION REVISION
Reproduction Forbidden without the specificwrittenpermissionofAsyst
Technologies Inc., Milpitas,California. Thisdrawing isonlyconditionally
ZONE REV. DESCRIPTION APPROVED DATE ZONE REV. DESCRIPTION APPROVED DATE
issuedandneitherreceiptnorpossessiontherofconfers or transfers
any right in,orlicensetousethesubjectmatterofthedrawing or any P ECN N3540 JK 4/23/96 . A ECN N1644; PRODUCTION RELEASE DB 4/15/92
designsortechnicalinformationshownthereon,oranyrighttoreproduce
thedrawingoranyparttherof,exceptformanufacturebyvendorsfor R ECN N3737 JK 8/27/96 B ECN N1763 DB 7/2/92
AsystTechnologies, Inc. and formanufacture under thecorporation's
writtenlicense. Norighttoreproducethisdrawingis granted for the
subject matter thereofunless bywrittenagreementwithorwritten
C ECN N2695 AR 7/11/94
permission from theCompany.
D ECN N2761 AR 10/6/94
E ECN N2803 AR 11/15/94
F ECN N3187 AR 10/12/95
27 G ECN N3315 JK 11/21/95
D 2X 14 H ECN N3398 JK 2/9/96 D
2X 25 20 J ECN N3418 JK 2/9/96
2X
103 25 17 K ECN N3434 JK 2/9/96
23 L ECN N3445 JK 2/13/96
9X 99 2X
12 16 45 M ECN N3445 JK 2/13/96
6 94 83
93
4X 99
11
26 23
82
3X
6 99 3
A/R 85
21 6
26 2X 5
C C
79 99 7 12
79 20
2X
2X 9
21 27 2X
10
43 6
-01 80 102
90 8
7 87
-02 81
NOTES: UNLESS OTHERWISE SPECIFIED 101 2X 11
18 2X
43
1. MANUFACTURE PER ASYST TECHNOLOGIES WORKMANSHIP 13 29 6 100
STANDARDS 2000-0311-01. 25
89
2X 99 6 2X 41
2. REFER TO ASYST MANUFACTURING ASSEMBLY GUIDE 27
42 9
NO. P9700-2971 FOR SEQUENCE OF ASSEMBLY. 7
22
3 USE ITEM 85 , IF NECESSARY, TO ELIMINATE
AXIAL PLAY OF THE WORM GEAR, ITEM 83 .
2 26
4 LUBRICATE AREA INDICATED WITH GREASE, ASYST PART NO. 99 4X 94 2X
B REF 23
B
7500-2030-01.
NONE
APPLY AT APPROX. LOCATION SHOWN. COSMETIC PART: YES X NO NEXT ASSY PRODUCT
DES. ENGR.
. .
SIZE CAD FILE NAME DWG NO. REV.
MFG. ENGR.
D A2971D1R 9700-2971-XX R
FIRST USED ON DO NOT SCALE DRAWING . . SCALE 1/1 SHEET 1 OF 1
8 7 6 5 4 3 2 1
Load Port Transfer™ System 2150 / 2200 Technical Manual
ASYST
x TECHNOLOGIES 2000-0900-01 Revision A Page A-22
Load Port Transfer™ System 2150 / 2200 Technical Manual
ASYST
x TECHNOLOGIES 2000-0900-01 Revision A Page A-24
Load Port Transfer™ System 2150 / 2200 Technical Manual
ASYST
x TECHNOLOGIES 2000-0900-01 Revision A Page A-25
4 3 2 1
REVISIONS
NOTICE TO ALL PERSONS RECEIVING THIS CONFIDENTIAL DRAWING:
Reproduction Forbidden without the specific written permission of Asyst
Technologies Inc., Milpitas, California. This drawing is only conditionally ZONE REV. DESCRIPTION APPROVED DATE
issued and neitherreceipt nor possession therof confers or transfers
any right in, or license to use the subject matter of the drawing or any
designs or technical information shown thereon, or anyright to reproduce A ECN N2817; PRODUCTION RELEASE AR 1-10-95
the drawing or any part therof, except for manufacture by vendors for
Asyst Technologies, Inc. andformanufacture underthecorporation's B ECN N2880 AR 3-31-95
written license. No right to reproducethis drawing is grantedforthe
subject matter thereof unless by written agreement with or written
permission from the Company. OBS ECN N3755 JK 10/22/96
D D
(MIRROR) .05
3
CLEAR
AREA
2
.03
10
2X 13
12
SEE DETAIL 'A' 1
2
4
C C
2X 14
DETAIL 'B'
SCALE: 4/1
TYP 8 2X
3
4 7
2X 14 6 5 FIRST SURFACE (COATED)
3 2X 14 2X 14 2 REF
11 3
B .050 (APPROX.) B
.060
14 REF
NOTES: UNLESS OTHERWISE SPECIFIED
C
NONE
NEXT ASSY PRODUCT -
DES. ENGR.
FTR 7-29-94 A3361C1O 9700-3361-01 OBS
MFG. ENGR.
FIRST USED ON DO NOT SCALE DRAWING
DB 1-19-95 SCALE 1/1 SHEET 1 OF 1
4 3 2 1
Load Port Transfer™ System 2150 / 2200 Technical Manual
ASYST
x TECHNOLOGIES 2000-0900-01 Revision A Page A-27
8 7 6 5 4 3 2 1
NOTICE TOALLPERSONSRECEIVINGTHISCONFIDENTIALDRAWING:
REVISION
Reproduction Forbidden without thespecificwrittenpermissionof Asyst
Technologies Inc., Milpitas, California. This drawing isonly conditionally ZONE REV. DESCRIPTION APPROVED DATE
issuedandneitherreceiptnorpossessiontherofconfersortransfers
anyright in, orlicense to usethesubjectmatterofthedrawingorany
31 . A ECN N3939 ; PRODUCTION RELEASE M. AU 4/16/97
designsor technicalinformation shown thereon, oranyrighttoreproduce
the drawing oranyparttherof,exceptformanufacturebyvendors for
Asyst Technologies, Inc.andfor manufacture under the corporation's
. B ECN N4137 JK 11/5/97
written license. No rightto reproduce this drawing isgrantedfor the
subject matterthereof unlessbywrittenagreementwithorwritten 28 30 1.75 ±.25 36.00 ±1.00 . C ECN N4416 JK 7/1/98
permission from the Company.
D ECN N4486 JK 8/26/98
16 9 MOUNT 11 TO 2 AS SHOWN
4X 10 4X
29
4X 15 17 10 SLIDE 27 ONTO RED WIRE OF FAN. J-HOOK AND SOLDER 25 TO
1 REF 32
REF 32 X RED WIRE OF FAN. COVER WITH 27 AND HEAT SHRINK.
X (SEE DETAIL A)
9700-3706-01
REV _ 11 TWIST 25 AND 26 TOGETHER, TWO 360 TWISTS PER INCH
21 12 TYPE "P12" ON 6 AND APPLY AS SHOWN
2.00 ±.50
13 WIRE ASSY PER WIRING TABLE AND DETAIL 'B'
5
14 TYPE ASSY P/N AND REV ON 29 AND APPLY AS SHOWN
3.25 ±.50
15 4X FARSIDE
B 4X 8 15 INSPECT FINAL ASSY PER DWG FOR CORRECTNESS B
WIRE TABLE
2 APPLY BUBBLE WRAP OVER SCREW AND NUT TO PREVENT DAMAGE 1 UNLESS OTHERWISE SPECIFIED CONTRACT NO.
PARTS LIST
A DURING HANDLING. REMOVE BUBBLE WRAP AT NEXT ASSEMBLY. R1 DIMENSIONS ARE IN INCHES
TOLERANCES ARE:
FRACTIONS DECIMALS ANGLES
. TECHNOLOGIES, INC.
A
.XX .
3. IDENTIFY PART PER MARKING METHOD 12 OF ASYST . .XXX . . APPROVALS DATE
CORPORATE PROCEDURE 2000-0311-01. MATERIAL
DRAWN
FAN ASSY,
C.MOLERIN 12/4/95
DETAIL 'B'
SEE BOM
4. PACKAGE PER ASYST WORKMANSHIP STANDARDS CHECKED MINI-ENVIRONMENT
9700-4002-XX LPI FINISH J. KYFFIN 4/3/96
2000-0311-01. SCALE: NONE SIZE DWG NO. REV.
DES. ENGR.
COSMETIC PART: YES X NO NEXT ASSY PRODUCT NONE
MFG. ENGR.
M. NEADS 4/3/96
D A3706D1D 9700-3706-01 D
FIRST USED ON DO NOT SCALE DRAWING A. DEPEW 4/3/96 SCALE 1/1 SHEET 1 OF 1
8 7 6 5 4 3 2 1
Load Port Transfer™ System 2150 / 2200 Technical Manual
ASYST
x TECHNOLOGIES 2000-0900-01 Revision A Page A-29
8 7 6 5 4 3 2 1
NOTICE TO ALLPERSONSRECEIVING THIS CONFIDENTIAL DRAWING:
REVISION
Reproduction Forbidden withoutthe specific written permissionofAsyst
Technologies Inc., Milpitas, California. Thisdrawingisonlyconditionally
ZONE REV. DESCRIPTION APPROVED DATE
issuedandneitherreceiptnor possession therof confersortransfers
any rightin,orlicensetousethesubjectmatterofthedrawingorany . A ECN N3910 ; PRODUCTION RELEASE JK 3/20/97
designs or technicalinformation shownthereon, or anyright to reproduce
thedrawingoranyparttherof,exceptformanufacturebyvendorsfor B ECN N4005 JK 7/8/97
Asyst Technologies, Inc. andformanufactureunderthecorporation's
writtenlicense. Noright to reproduce thisdrawingisgrantedforthe
subjectmatterthereofunlessby written agreementwithorwritten C ECN N4079 JK 10/29/97
permissionfromtheCompany.
D ECN N4190 JK 11/5/97
E ECN N4265 JK 3/4/98
F ECN N4414 JK 7/23/98
D 49 2X
D
REF 100
.54 .02
8 REF
55 2X
64 2X
TAB DOWN
50
(SENSOR)
1
SEE DETAIL 'G'
R1 R3
R2
(PORT DOOR) 52 2X
68 57
2X
51
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICE TO ALL PERSONS RECEIVINGTHIS CONFIDENTIAL DRAWING:
REVISION
Reproduction Forbidden without the specificwritten permission o f A s y s t
Technologies Inc.,Milpitas, California. This drawing isonly conditionally
ZONE REV. DESCRIPTION APPROVED DATE
issuedandneither receipt norpossession therof confersortransfers
any rightin,orlicensetousethesubjectmatterofthedrawingorany
designsortechnicalinformationshownthereon, oranyrighttoreproduce . . SEE SHEET 1 . .
thedrawingor any parttherof, except for manufacture byvendorsfor
Asyst Technologies, Inc. andformanufacture under the corporation's
written license. No right to reproducethis drawing isgrantedforthe
subjectmatter thereof unlessbywrittenagreement withorwritten
permission from the Company.
D D
REF 9
68
12 RADIUS
8 SPHERICAL 24
2X 50
61 68 REF
48
62
2X 56
2X 60 29
9 (PORT DOOR)
C CSK SIDE
C
DETAIL 'A' 11
100 1 REF
DETAIL 'E'
DETAIL 'D'
B B
QTY MATERIAL
ITEM PART NUMBER DESCRIPTION
REQD SPECIFICATION
PARTS LIST
UNLESS OTHERWISE SPECIFIED CONTRACT NO.
A DIMENSIONS ARE IN INCHES
TOLERANCES ARE:
.
A
FRACTIONS DECIMALS ANGLES TECHNOLOGIES, INC.
.XX .
. .XXX . . APPROVALS DATE
MATERIAL
DRAWN PORT DOOR
SEE SHT 1 STEVE 12/20/95
CHECKED
ASSEMBLY
SEE SHT 1 SEE SHT 1 FINISH J. KYFFIN 4/3/96
SEE SHT 1 DES. ENGR. SIZE DWG NO. REV.
NEXT ASSY PRODUCT
MFG. ENGR.
M. NEADS 4/3/96
D A3707D2F 9700-3707-01 F
FIRST USED ON DO NOT SCALE DRAWING A. DEPEW 1/1 2 OF 2
4/3/96 SCALE SHEET
8 7 6 5 4 3 2 1
Load Port Transfer™ System 2150 / 2200 Technical Manual
13 33 22 11
A
issuedandneitherreceiptnorpossessiontherofconfersortransfers
. A ECN N3848 ; PRODUCTION RELEASE JK 1/29/97
any right in,orlicensetousethesubjectmatterofthedrawingorany
designs ortechnical information shown thereon, oranyrighttoreproduce 26 SEE DETAIL
the drawingoranyparttherof,exceptformanufacturebyvendors for B ECN N3927 JK 4/9/97
Asyst Technologies, Inc. andformanufacture under the corporation's
27 134
written license. Norighttoreproducethisdrawingisgrantedfor the
subject matterthereofunlessbywrittenagreement withorwritten 94 C ECN N3933 JK 5/21/97
permissionfromtheCompany.
2X D ECN N3967 M. AU 6/6/97
92
35 2X 5 82 E ECN N4047
2X 55 2 M. AU 7/30/97
76 F ECN N4203 JK 1/7/97
D
3
81
C G ECN N4335 JK 3/31/98
D
92
2X
82
2 3
1 4
25
81 2X
26
3X 58
C 52 2X C
3 REF
14 92
2X
82
4 (.38)
31
2X 15
DETAIL A 24 74
SCALE: 2/1
26
94
5 82 2X
20 92
81
B -01 ONLY B
6
NOTES: UNLESS OTHERWISE SPECIFIED 18
94 TABULATION
2. APPLY ADHESIVE ASYST P/N 7500-0716-01, P1
J2 26
92 4X DASH NO. DESCRIPTION
ITEM 143 , TO ALL SCREWS
1 J1 10
ASYST TECHNOLOGIES, INC ASSY. NO. 3200-1037-01 REV.
-01 RIGHT
WITHOUT LOCK WASHERS. 35 82
-02 LEFT
3 ATTACH ITEM 60 4 PLACES AT OTHER END OF 81
CABLES AND MARK SENSOR NAMES AND 142
LASER DIODE. 139 23 92
28 2X 1 16 ITEM
QTY
PART NUMBER DESCRIPTION
MATERIAL
58 3X 77 PARTS LIST
INSTALLATION. (1 PIECE ONLY) 92 UNLESS OTHERWISE SPECIFIED CONTRACT NO.
A 58 94 2X DIMENSIONS ARE IN INCHES
A
TOLERANCES ARE:
141 . TECHNOLOGIES, INC.
5 TORQUE AT 1 INCH/LB. 92
FRACTIONS DECIMALS
.XX .
ANGLES
.
.
.XXX . APPROVALS DATE
TOP VIEW
DRAWN
MFG. ENGR.
M. NEADS 4/3/96
D A3716D1G 9700-3716-XX G
FIRST USED ON DO NOT SCALE DRAWING A. DEPEW 4/3/96 SCALE 1/1 SHEET 1 OF 4
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICETOALLPERSONSRECEIVINGTHISCONFIDENTIALDRAWING:
REVISION
Reproduction Forbidden withoutthe specificwrittenpermissionof Asyst
TechnologiesInc., Milpitas, California. This drawingisonlyconditionally 108 10 ZONE REV. DESCRIPTION APPROVED DATE
issuedandneitherreceiptnorpossessiontherof confers ortransfers
any right in,orlicensetousethesubjectmatter of thedrawingorany 75 8 66
designs ortechnicalinformationshownthereon, or any righttoreproduce
the drawingoranyparttherof,exceptfor manufactureby vendors for
17 2X 109
. SEE SHEET 1 . .
3 60 79 4X
6 7 65 107
7D
SEE DETAIL B 117
D 29 D
92
2X
83
92 115
2X WAFER
83 EXCESSIVE 43
PROTRUSION
3 60 WAFER PROTRUSION SENSOR 79 5X
SENSOR
18
111
4X 81
2X 114
C 65 REF
112 C
84 116
DETAIL B 9 4
SECTION C-C
P20
P2
10 WHEN IN HOME POSITION THERE SHOULD BE .03/.05 INCH
26 J2 2
14 PLACE TAPE ON CABLE AS REQUIRED TO HOLD IN PLACE STEVE 3/15/96 PORT PLATE ASSEMBLY
DURING ASSEMBLY.
BOTTOM VIEW SEE SHT 1 SEE SHT 1 FINISH
SEE SHT 1
CHECKED
J. KYFFIN 4/3/96
DES. ENGR. SIZE CAD FILE NAME DWG NO. REV.
(NOTES CONTINUED ON PAGE 3) NEXT ASSY PRODUCT SEE SHT 1
MFG. ENGR.
M. NEADS 4/3/96
D A3716D2G 9700-3716-XX G
FIRST USED ON DO NOT SCALE DRAWING A. DEPEW 4/3/96 SCALE 1/1 SHEET 2 OF 4
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICE TO ALL PERSONS RECEIVINGTHIS CONFIDENTIAL DRAWING:
REVISION
Reproduction Forbidden without the specific written permission of Asyst
ZONE REV. DESCRIPTION APPROVED DATE
Technologies Inc.,Milpitas,California. Thisdrawingisonlyconditionally
33 22 11
A
issuedandneither receipt norpossession therof confersor transfers
any rightin,orlicensetousethesubjectmatterofthedrawingorany
designs or technicalinformation shown thereon, oranyrighttoreproduce 26 SEE DETAIL . . SEE SHEET 1 . .
the drawing or any parttherof, except for manufacture by vendors for
Asyst Technologies, Inc. andformanufactureunderthecorporation's
27 134
written license. No right to reproducethisdrawingisgrantedfor the
subjectmatter thereof unlessbywrittenagreementwithorwritten
13 94
permissionfromtheCompany.
2X 55 2X
35 92
2X 5 82
2
3 81 76
C
D 92 D
2X
82 25
2 3
1 4
20
C 81 2X
81
52 2X
3X 58
26 3 REF
92
2X
82
C C
138 17
14
4 (.38) 18
31
DETAIL A 24
74
2X 15
SCALE: 2/1
26
94
B
5 82 2X
-02 ONLY B
92
82
9700-3271-01
P1
17. USE SCOTCH TAPE TO TEMPORARILY ATTACH ITEM J2 26
1 J1 10
77 PARTS LIST
FINAL ASSY. 92 UNLESS OTHERWISE SPECIFIED CONTRACT NO.
A 58 94 2X DIMENSIONS ARE IN INCHES
A
TOLERANCES ARE:
141 FRACTIONS DECIMALS ANGLES
. TECHNOLOGIES, INC.
19. IDENTIFY PART PER MARKING METHOD 12 OF ASYST 92 . .XX . .
.XXX . APPROVALS DATE
CORPORATE PROCEDURE 2000-0311-01.
76 MATERIAL
TOP VIEW
DRAWN
MFG. ENGR.
M. NEADS 4/3/96
D A3716D3G 9700-3716-XX G
FIRST USED ON DO NOT SCALE DRAWING A. DEPEW 4/3/96 SCALE 1/1 SHEET 3 OF 4
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICE TO ALL PERSONS RECEIVINGTHIS CONFIDENTIAL DRAWING:
REVISION
Reproduction Forbidden without the specificwrittenpermissionofAsyst
Technologies Inc.,Milpitas,California. This drawingisonlyconditionally
ZONE REV. DESCRIPTION APPROVED DATE
issued andneitherreceipt nor possession therof confersortransfers
75 8 66
21
anyright in, or licensetousethesubjectmatter of the drawing or any
. SEE SHEET 1
designsortechnicalinformationshownthereon, or anyrighttoreproduce
the drawing or anyparttherof, except for manufacture byvendorsfor
2X . .
29
92 WAFER PROTRUSION
2X SENSOR
36.00 ±1.00 83
43
5 8 79 5X
19 92
2X
4X 81 83
60 3
C C
18
65 REF
81 3X
P20
DETAIL B
4
9
110
2X 113 WAFER PRESENCE SENSOR
B
2X 115 -02 ONLY B
136 84 CASSETTE
SLOT SENSOR
17
111
81 4X
2X 114 112 25
P2
116 26 J2 2
SECTION C-C 8
34
9 2X 8 5
46
REF 4 30 92 ITEM
QTY
PART NUMBER DESCRIPTION
MATERIAL
95 4X
REQD
PARTS LIST
SPECIFICATION
MFG. ENGR.
M. NEADS 4/3/96
D A3716D4G 9700-3716-XX G
FIRST USED ON DO NOT SCALE DRAWING A. DEPEW 4/3/96 SCALE 1/1 SHEET 4 OF 4
8 7 6 5 4 3 2 1
Load Port Transfer™ System 2150 / 2200 Technical Manual
21
D D
HOST
EQUIP AUX 2 13
POWER
SAM AUX 1 PARALLEL/
INTERLOCK 32
4X
6
35
U1
J12
1
30
J17
C 3X 50 C
J16 33
34
1 J2
J3 2
14
10 5
J1
22
1 19
J5 J7 J9
J6 J8 J10
B B
30
2X 33
30 30
34
33 33 2X
JUMPER SETTING
34 34 LOCATION CONNECTION TABULATION
-01
W36 1 TO 2 DASH DESCRIPTION
4 W38 OPEN -01 2200
W36 2 TO 3 -02 2150/2100
NOTES: UNLESS OTHERWISE SPECIFIED -02
W38 1 TO 2 51
1. MANUFACTURE PER ASYST TECHNOLOGIES WORKMANSHIP STANDARDS
2000-0311-01.
4 THE -01 CONFIGURATION IS PRESET AT LOWER LEVEL ASSEMBLY (ITEM 1 ). SEE BOM C.MOLERIN 3/22/96 PCB CHASSIS ASSEMBLY
CHECKED
9700-4002-01 LPI FINISH J. KYFFIN 4/3/96
DES. ENGR. SIZE CAD FILE NAME DWG NO. REV.
NEXT ASSY PRODUCT N/R
MFG. ENGR.
M. NEADS 4/3/96
D A3717D1D 9700-3717-XX D
FIRST USED ON DO NOT SCALE DRAWING A. DEPEW 4/3/96 SCALE 1/1 SHEET 1 OF 2
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICE TO ALLPERSONS RECEIVINGTHISCONFIDENTIAL DRAWING:
REVISION
Reproduction Forbidden without thespecific written permission of Asyst
TechnologiesInc., Milpitas, California. This drawing isonly conditionally
ZONE REV. DESCRIPTION APPROVED DATE
issuedandneitherreceiptnorpossessiontherofconfersortransfers
anyright in, orlicense to use the subjectmatter ofthedrawingorany . - SEE SHEET 1 . .
designs ortechnicalinformationshownthereon, oranyrighttoreproduce
the drawingoranyparttherof,exceptformanufacturebyvendorsfor
AsystTechnologies, Inc. and formanufacture underthecorporation's
written license. Norighttoreproducethis drawing isgrantedforthe
subject matterthereofunlessbywrittenagreement withorwritten
permission from theCompany.
D D
MANUFACTURING PROCESS INSTRUCTIONS
OPERATIONS NO: X
SET = SET-UP REQUIRED FOR TASK
TQC = QUALITY CHECK POINT MOVE = MOVEMENT OF PRODUCT
VAL = VALUE ADDED OPERATION VER = VERIFICATION OF TASK
X WITH 30 , 34 , AND 33 .
X 30 , 33 , AND 34 .
C C
4 SECURE 1 TO 6 WITH 30 , 33 , AND 34 .
7 INSERT 50 INTO J2 OF 13 .
8 PLUG 2 INTO J3 OF 13 .
11 APPLY 21 TO 6 AS SHOWN.
B B
TOOL LIST
T1 1 HTR-2262-A CRIMPER
QTY MATERIAL
ITEM PART NUMBER DESCRIPTION
REQD SPECIFICATION
PARTS LIST
UNLESS OTHERWISE SPECIFIED CONTRACT NO.
A DIMENSIONS ARE IN INCHES
TOLERANCES ARE:
.
A
FRACTIONS DECIMALS ANGLES TECHNOLOGIES, INC.
.XX .
. .
.XXX . APPROVALS DATE
MATERIAL
DRAWN
MFG. ENGR.
M. NEADS 4/3/96
D A3717D2D 9700-3717-XX D
FIRST USED ON DO NOT SCALE DRAWING A. DEPEW 4/3/96 SCALE 1/1 SHEET 2 OF 2
8 7 6 5 4 3 2 1
Load Port Transfer™ System 2150 / 2200 Technical Manual
B B
TechnologiesInc., Fremont, California. this drawing isonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
issuedandneitherreceiptnorpossessiontherofconfersortransfers
4 PCN P0250;PILOTRELEASE JK 4/24/96
(SEE SHT 2)
anyrightin,orlicensetousethesubjectmatterofthedrawingorany
designsortechnicalinformationshowntheron,oranyrighttoreproduce
thedrawing oranyparttherof,exceptformanufacturebyvendorsfor 5 PCN P0271 JK 7/8/96
H
Asyst Technologies,Inc.andformanufactureunderthecorporation's
writtenlicense. Norighttoreproducethisdrawingisgrantedforthe 6 PCN P0283 JK 7/22/96 H
C C
subject mattertherof unlessby written agreement with orwritten
permissionfromtheCompany. 7 PCN P0305 JK 8/6/96
8 PCN P0364 JK 10/3/96
8 PCN P0364 JK 12/16/96
(SEE SHT 1) OBS PCN P0381; OBSOLETE JK 1/9/97
16
PACKAGED
SEPARATELY
A SEE DETAIL P
(SEE SHT 2)
2X 41
2X 78
G 6 2X 66 G
2X 71
74
4X
73
20
VIEW H-H
74 2X (REF SHT 2)
F F
73 2X
34
27
32 REF
DANGER
21
LASERRADIATION WHEN OPEN
AND INTERLOCK DEFEATED.
AVOID DIRECTEYE EXPOSURE.
E CABLE FEEDTHRU E
CUTOUT
E (SEE SHT 2)
E
LOAD
31
2X 50 UNLOAD
55 4X
REF 3
2X 68
D
HOME
2X 67 30
(SEE SHT 1)
D D
VIEW F-F
POWER
(REF SHT 1)
VIEW D-D
SEE DETAIL R (REF SHT 1)
37
NOTES: UNLESS OTHERWISE SPECIFIED
A
23 6 ENSURE THAT ITEMS 91 AND 92 DO NOT
50 2X
INTERFERE WITH ANY COMPONENTS ON
68 2X FULL TRAVEL.
61 TABULATION
66 -01 AS SHOWN (RIGHT)
PARTS LIST
- TECHNOLOGIES, INC.
.XX± -
(REF SHT 1) - - ± - .XXX± -
± - APPROVALS DATE
- -
MATERIAL DRAWN LPT ASSEMBLY,
MAGILL
A
4/20/96
SEE B.O.M.
CHECKED FORWARD PPLT A
N/R LPT FINISH J. KYFFIN 4/22/96
(SUB-BASE) NEXT ASSY
N/R DES.ENGR. SIZE CAD FILE NAME DWG.NO. REV.
PRODUCT
MFG.ENGR.
M. NG 4/22/96
E A3740E1O 9700-3740-XX OBS
FIRST USED ON DO NOT SCALE DRAWING A. DEPEW 4/22/96 SCALE 1/2 SHEET 1 OF 4
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICE TO ALL PERSONSRECEIVING THISCONFIDENTIALDRAWING: REVISIONS
ReproductionForbidden without the specificwrittenpermission ofAsyst
TechnologiesInc.,Fremont,California. thisdrawingisonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
issuedandneitherreceiptnorpossessiontherofconfersortransfers
anyrightin,orlicensetousethesubjectmatterofthedrawingorany - - SEE SHEET 1 - -
designsortechnicalinformationshown theron,or anyrighttoreproduce
thedrawingoranyparttherof,exceptformanufacturebyvendorsfor
H H
AsystTechnologies,Inc.andformanufactureunderthecorporation's
writtenlicense. Norighttoreproducethisdrawingisgrantedforthe
subject mattertherofunlessbywrittenagreementwithorwritten
permission fromtheCompany.
28 79 3X
8X 57
36
3
58
25
40 (SEE 55 5X
G 2X 56 SHT 2)
G G G
26
THREAD
ITEM 32 THRU
5
ROLLERS
IN ITEMS
1 AND 2 REF 2
4 LOCATIONS
4 REF
F F
91 POWER READY
PODIN
PLACE
6
DETAIL N
SCALE: 1/1
2X 50
SECTION G-G
SCALE: 1/1
(REF SHT 2)
86 2X
SEE DETAIL N
POSITION WHEEL
92 IN TRACK IN
6 COLUMN
BOARD E1
D 2X 93 4 VIEW E-E (SEE SHEET 4)
D
(REF SHT 1)
44 2X
49 3X
48 8X
66 3X
2 REF
71 3X
1 REF
P53
43 2X
C C
(SEE SHEET 3) 22 REF
J
1 2
SEE VIEW L
(SEE SHT 3)
K
(SEE SHT 3)
69
B 76 B
J1
11 42 2X
77 4X
J3 63 4X 73 2X
66 4X
66 4X 81 2X
71 4X
J
71 4X 80 2X
(SEE SHT 1)
K
QTY MATERIAL
ITEM PART NUMBER DESCRIPTION
M
REQD SPECIFICATION
5 SEE VIEW
H H
PARTS LIST
UNLESSOTHERWISESPECIFIED CONTRACT NO.
(SEE SHT 3) DIMENSIONSAREININCHES.
TOLERANCES ARE:
-
FRACTIONS DECIMALS ANGLES TECHNOLOGIES, INC.
.XX± -
22 - - ± - .XXX± -
± - APPROVALS DATE
MATERIAL DRAWN LPT ASSEMBLY,
A FIT BOTTOM FLANGE - -
SEE SHEET 1 MAGILL 4/20/96
A
85 INTO BASE PLATE AND SEE SHEET 1 SEE SHEET 1
CHECKED FORWARD PPLT
FINISH J. KYFFIN 4/22/96
SNAP INTO PLACE NEXTASSY PRODUCT
SEE SHEET 1 DES. ENGR. SIZE CADFILE NAME DWG.NO. REV.
M. NG 4/22/96
MFG.ENGR.
E A3740E2O 9700-3740-XX OBS
FIRST USED ON DO NOT SCALE DRAWING A. DEPEW 4/22/96 SCALE 1/2 SHEET 2 OF 4
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICE TOALLPERSONS RECEIVINGTHISCONFIDENTIALDRAWING: REVISIONS
ReproductionForbidden without thespecificwrittenpermissionofAsyst
TechnologiesInc., Fremont, California. thisdrawingisonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
issuedandneitherreceiptnorpossessiontherofconfersortransfers
anyrightin,orlicensetousethesubjectmatterofthedrawingorany - - SEE SHEET 1 - -
SHOWN WITH
designsor technicalinformationshown theron, oranyrighttoreproduce
thedrawingorany parttherof, except formanufacturebyvendorsfor
AsystTechnologies,Inc. andformanufactureunderthecorporation's
(BLUE) (RED)
H writtenlicense. Norighttoreproducethisdrawingisgrantedforthe
subjectmattertherofunlessbywrittenagreementwithorwritten
COVER REMOVED H
permissionfromtheCompany.
POWER SUPPLY A5
(+) (-)
VIEW M + -
CPU ASSEMBLY
TO DRIVE
(REF SHT 2)
FG
BOARD A1
SIDE OF CHASSIS
NOT SHOWN FOR CLARITY
J4
BOARD A4
J1
BOARD B1
BOARD A3 P2 J3
J1
J1
CABLE H1
P1
P3
F CABLE B3 F
BOARD A2 ENET
J6 SERIAL3/SERIAL4 SERIAL1/SERIAL2
P5
BOARD B2 2 REF
(UNDERNEATH)
VIEW L
P20
P6
CABLE G1
CABLE H2
31 REF
REF 84
P7
D D
MODULE C2
DETAIL R ITEM 9
SCALE: 1/1 I/O CABLE
GND BLOCK H3
SEE DETAIL P-P
REF 3
C C
HOST
EQUIP AUX2
POWER
AUX1 PARALLEL/
SAM
INTERLOCK
LAN JACK
BOARD D1
REF 1
FROM
MINIENVIRONMENT
B
CABLE C4
REV
9700-4086-01
PANEL D2 ITEM 3 B
CABLE D3
CN1 FRAME ASSEMBLY
FROM 9700-4072-01
REV_
VENDOR_
J20
MINIENVIRONMENT J5 J7
CABLE C3 J6 J10
GRN/YEL TERM
QTY DESCRIPTION MATERIAL
ITEM REQD PARTNUMBER SPECIFICATION
VIEW K-K
PARTS LIST
UNLESS OTHERWISESPECIFIED CONTRACTNO.
DIMENSIONSAREININCHES.
TOLERANCESARE:
- TECHNOLOGIES, INC.
BOARD C1 FRACTIONS DECIMALS ANGLES
PART OF ITEM 3 - -
MATERIAL DRAWN LPT ASSEMBLY,
MAGILL 4/21/96
A MINIENVIRONMENT (REF SHT 2)
SEE SHEET 1
CHECKED FORWARD PPLT A
SEE SHEET 1 SEE SHEET 1
(REF SHT 2) FINISH
SEE SHEET 1 DES. ENGR.
J. KYFFIN 4/22/96
SIZE CAD FILENAME DWG.NO. REV.
NEXTASSY PRODUCT M. NG 4/22/96
MFG.ENGR.
E A3740E3O 9700-3740-XX OBS
FIRST USED ON DO NOT SCALE DRAWING A. DEPEW 4/22/96 SCALE 1/2 SHEET 3 OF 4
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICE TOALLPERSONSRECEIVINGTHISCONFIDENTIALDRAWING: REVISIONS
Reproduction Forbidden without thespecificwrittenpermissionofAsyst
TechnologiesInc., Fremont, California. thisdrawingisonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
issued and neitherreceipt norpossession therofconfersortransfers
anyrightin,orlicensetousethesubjectmatterofthedrawingorany - - SEE SHEET 1 - -
designsortechnicalinformationshowntheron,oranyrighttoreproduce
thedrawingoranyparttherof,exceptformanufacturebyvendorsfor
Asyst Technologies,Inc.andformanufactureunderthecorporation's
H written license. Norighttoreproducethisdrawingisgrantedforthe
subject mattertherof unlessbywrittenagreementwithor written
H
permission from theCompany.
G G
F F
Y-CABLE WIRE TABLE ITEM 14
4X 82 83 4X
83 4X
SEE BASE GROUNDING
B BLOCK WIRE LIST B
TOLERANCESARE:
- TECHNOLOGIES, INC.
FRACTIONS DECIMALS ANGLES
.XX± -
8. PACKAGE PER ASYST WORKMANSHIP STANDARDS - - ± - .XXX± -
± - APPROVALS DATE
MFG. ENGR.
M. NG 4/22/96
E A3740E4O 9700-3740-XX OBS
FIRST USED ON DO NOT SCALE DRAWING A. DEPEW 4/22/96 SCALE 1/2 SHEET 4 OF 4
8 7 6 5 4 3 2 1
Load Port Transfer™ System 2150 / 2200 Technical Manual
4X 60
5 FIT THE TWO TABS OF ITEM 2 INTO THE MATING 44
T-SLOTS IN ITEM 30 . PIVOT ITEM 2 INTO ITEM 30
C AND MOUNT WITH ITEMS 68 AND 79 . 4
86 7 C
151
10 1
24 BELT
(PART OF
10 ITEM 1 ) 18
SPEED REDUCER 68 2X 7
10
(PART OF ITEM 1 ) 2X 19
57 2X 79 2X
PIN 2X 54
3 SHAFT 84 2X
6
(PART OF ITEM 30 )
B 3 B
71 7
DIMPLE
2X 17 74 4X
11
65 2X
78 2X 3
11
83 2X
4
55 2X 3
PEM NUT 11
68
5 REF 22 3
CABLE 9 (PART OF TABULATION
79 ITEM 28 ) REF 3
FEEDTHRU
5 -01 AS SHOWN (RIGHT)
HOLE
9 -02 MIRROR IMAGE (LEFT)
27 ITEM
QTY
PART NUMBER DESCRIPTION
MATERIAL
2X 60 REQD SPECIFICATION
31 29 40 PARTS LIST
61
A 2X 77 REF 28 4 2X 2X 2X
UNLESS OTHERWISE SPECIFIED
DIMENSIONS AREININCHES.
CONTRACT NO.
A
TOLERANCES ARE:
77 (SHOWN IN FRACTIONS DECIMALS ANGLES
- TECHNOLOGIES, INC.
2X 82 INSTALLED .XX .01
- - - .XXX - -
APPROVALS DATE
82 POSITION) MATERIAL
2 DRAWN
35 2X
- -
SEE B.O.M.
MAGILL 4/3/96 ARM SERVO ASSEMBLY
25 CHECKED
9700-3740-XX LPT FINISH J. KYFFIN 4/12/96
40 2X 5 5 5 DES. ENGR. SIZE CAD FILE NAME DWG NO. REV.
30 2X T-SLOT NEXT ASSY PRODUCT N/R
M. NG
2X TAB 11 28 2X 41 D A3952D1I 9700-3952-XX INC
(PART OF ITEM 30) FIRST USED ON DO NOT SCALE DRAWING
MFG. ENGR.
A. DEPEW SCALE 1/2 SHEET 1 OF 2
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
REVISION
NOTICE TO ALL PERSONS RECEIVING THIS CONFIDENTIAL DRAWING:
Reproduction Forbidden without the specific written permission of Asyst
ZONE REV. DESCRIPTION APPROVED DATE
Technologies Inc., Fremont, California. this drawing is only conditionally
issuedandneither receipt nor possession thereof confers or transfers
any right in, or license to use the subject matter of the drawing orany
designs or technical information shown theron, or any right to reproduce
SEE DETAIL C - - SEE SHEET 1 - -
the drawing or any part thereof, except for manufacture by vendors for
Asyst Technologies, Inc. and for manufacture under the corporation's
6
written license. No right to reproduce this drawing is granted for the
subject matter thereof unless by written agreement with or written
permission from the Company.
3
LABEL OTHER END 7
NOTES: CONTINUED FROM SHEET 2 OF 2 2X 56 WITH "ER"
D D
7 AFTER FITTING ITEM 3 ONTO SHAFT OF ITEM 1 , 5 REF
22
INSERT ITEM 86 THRU SLOT IN ITEM 3
SEE DETAIL B 94
AND HOLE IN ITEM 1 UNTIL IT IS CENTERED.
68 12
8 MOUNT ITEM 21 TO ITEM 20 WITH ITEMS 60 , 9.50
79 9
77 , AND 82 PRIOR TO MOUNTING ITEM 21 TO
ITEM 23 OR ITEM 28 . 85
REF 3 BV BR
MT MR
MV
10 9700-4100-01 LV LIMITV
BRAKEG BRAKET BRAKEV BRAKER
MOTORG MOTORT MOTORV MOTORR
J4
SEE DETAIL B 10 9700-4100-01 BV BRAKEV
10 9700-4100-01 EV ENC_V
100 100 REF 10 9700-4100-01 MV MOTORV
9 9700-4101-01 MR MOTORR
10
11 9700-4104-01 BR BRAKER
4.00
QTY MATERIAL
ITEM PART NUMBER DESCRIPTION
REQD SPECIFICATION
OF COVER - - -
.XX
.XXX
.01
- -
APPROVALS DATE
VIEW D-D
MATERIAL
DRAWN
- -
SEE SHT 1
MAGILL 4/3/96 ARM SERVO ASSEMBLY
1.50 9.00 CHECKED
GRIPPER TILT SENSOR MTG SEE SHT 1 SEE SHT 1 FINISH J. KYFFIN 4/12/96
DES. ENGR. SIZE CAD FILE NAME DWG NO. REV.
NEXT ASSY PRODUCT SEE SHT 1
M. NG 4/12/96
MFG. ENGR.
D A3952D2I 9700-3952-XX INC
FIRST USED ON DO NOT SCALE DRAWING A. DEPEW 4/12/96 SCALE 1/2 SHEET 2 OF 2
8 7 6 5 4 3 2 1
Load Port Transfer™ System 2150 / 2200 Technical Manual
31 3X 10 30 2X REF 22
12 WORM HOUSING
6
18
2X 36 26
TILT SENSOR
2X 44
2X 48
STEP 4 GRIPPER TILT
50 6X
7
3 19 40 2X
B B
PARTS LIST
UNLESS OTHERWISE SPECIFIED CONTRACT NO.
A DIMENSIONS AREININCHES.
TOLERANCES ARE:
- TECHNOLOGIES, INC.
A
FRACTIONS DECIMALS ANGLES
MOTOR-1 3X 35 - - -
.XX -
-
.XXX - APPROVALS DATE
3X 43
MATERIAL
DRAWN
VENDOR_
REV_
9700-3958-01
- -
SEE B.O.M. MAGILL 3/22/96 GRIPPER TILT ASSEMBLY
3X 47 9700-3952-XX LPT FINISH
CHECKED
J.KYFFIN 4/2/96
DES. ENGR. SIZE CAD FILE NAME DWG NO. REV.
NEXT ASSY PRODUCT N/R
3 M.NG 4/2/96
D 9700-3954-01 INC
STEP 3 MOTOR FIRST USED ON DO NOT SCALE DRAWING
MFG. ENGR.
A.DEPEW 4/2/96 SCALE
A3954D1I
1/1 SHEET 1 OF 1
8 7 6 5 4 3 2 1
Load Port Transfer™ System 2150 / 2200 Technical Manual
3
PIN 1
C C
J2 J5
6
5
5 REF
6 REF
1
NOTES: UNLESS OTHERWISE SPECIFIED
THAT JUMPER LIES FLAT AGAINST BOARD. COSMETIC PART: YES X NO NEXT ASSY PRODUCT N/R
DES. ENGR. SIZE CAD FILE NAME DWG NO. REV.
MFG. ENGR.
M.NG 4/2/96
D A3965D1I 9700-3965-01 INC
FIRST USED ON DO NOT SCALE DRAWING A.DEPEW SCALE 1/1 SHEET 1 OF 2
4/2/96
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
REVISION
NOTICE TO ALLPERSONSRECEIVING THIS CONFIDENTIAL DRAWING:
Reproduction Forbidden without the specific written permission of Asyst DESCRIPTION APPROVED
ZONE REV. DATE
Technologies Inc., Fremont, California. this drawing is only conditionally
issued and neither receipt nor possession thereof confers or transfers
any right in, or license to use the subject matter of the drawing or any - - SEE SHEET 1 - -
designs or technical information shown theron, or any right to reproduce
the drawing oranypartthereof,except for manufacture by vendors for
Asyst Technologies, Inc. and for manufacture under the corporation's
written license. No right to reproduce this drawing is granted for the
subject matter thereof unless by written agreement with orwritten
permission from the Company.
D COMPONENT SIDE D
9
3
U10
6 10
C C
J5
4
U11
REF 2
10 9 10 2 REF
EXISTING JUMPER
10 8 10
B B
QTY MATERIAL
ITEM PART NUMBER DESCRIPTION
REQD SPECIFICATION
PARTS LIST
UNLESS OTHERWISE SPECIFIED CONTRACT NO.
A DIMENSIONS ARE IN INCHES.
TOLERANCES ARE:
- TECHNOLOGIES, INC.
A
FRACTIONS DECIMALS ANGLES
SOLDER SIDE
.XX -
- - - .XXX - - APPROVALS DATE
MATERIAL
DRAWN
- -
SEE SHEET 1 MAGILL 4/24/96 SERVO DRIVER ASSEMBLY
CHECKED
SEE SHEET 1 SEE SHEET 1 FINISH J. KYFFIN 4/2/96
DES. ENGR. SIZE CAD FILE NAME DWG NO. REV.
NEXT ASSY PRODUCT SEE SHEET 1
MFG. ENGR.
M. NG 4/2/96
D A3965D2I 9700-3965-01 INC
FIRST USED ON DO NOT SCALE DRAWING A. DEPEW 4/2/96 SCALE SHEET
1/1 2 OF 2
8 7 6 5 4 3 2 1
Load Port Transfer™ System 2150 / 2200 Technical Manual
J6 J9
U1 J7
J3
U2 4
J10
J4
J11
E 5 J1 J2 E
6
QTY MATERIAL
ITEM PART NUMBER DESCRIPTION
REQD SPECIFICATION
PARTS LIST
UNLESS OTHERWISE SPECIFIED CONTRACT NO.
DIMENSIONSAREININCHES
TOLERANCES ARE:
TECHNOLOGIES, INC.
FRACTIONS DECIMALS ANGLES
. .XX - -
. . .XXX - APPROVALS DATE
MATERIAL
. DRAWN
. . SEE BOM B.CARLSON 3/25/96 CPU ASSY
A 9700-3740-01 LPT
. CHECKED
4/12/96
A
FINISH
. J. KYFFIN
N/A DES. ENGR. SIZE CAD FILENAME DWG NO. REV.
NEXTASSY USED ON
M. NG 4/12/96
.
MFG.ENGR.
E A3970E1D 9700-3970-XX D
APPLICATION DO NOT SCALE DRAWING 4/12/96
A. DEPEW SCALE
3/4 SHEET 1 OF 3
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICETOALLPERSONSRECEIVINGTHISCONFIDENTIALDRAWING: REVISION
ReproductionForbiddenwithoutthespecificwrittenpermissionofAsyst
TechnologiesInc.,Milpitas,California. Thisdrawingisonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
issuedandneitherreceiptnorpossessiontherofconfersortransfers
anyrightin,orlicensetousethesubjectmatterofthedrawingorany
designsortechnicalinformationshownthereon,oranyrighttoreproduce . - SEE SHEET 1 - -
thedrawingoranyparttherof,exceptformanufacturebyvendorsfor
AsystTechnologies,Inc.andformanufactureunderthecorporation's
H subjectmatterthereofunlessbywrittenagreementwithorwritten
permissionfromtheCompany. H
13 2X
16 2X
G G
GRN/YEL (TERM 2)
20 REF 4
9
2X 13 4X 11
25
2X 21 4X 15
A A GRN/YEL
8X 23 BRN
4X 11 REF 9 VIO
TB2
4X 15 J1
BLU 8 REF
F1 3 GRN/YEL 1
18 J3
BRN 2 9700-4074-01
F F
REV_
J3
P2 22 4X 3 VENDOR_ BRN 8 REF
16 VIO 4
2X 4X
F2 16
17
24 P3
+ -
F3 PART OF ITEM 8
4X 19 V.ADJ ON RC RCG VB CB +S -S AC(L) AC(N) FG
ENET
GRN/YEL 8 REF
PARALLEL SERIAL3/SERIAL4 SERIAL1/SERIAL2 TB1
J6 (PART OF P5
FLOPPY SCSI
P4 ITEM 5 ) P10 J4
E P16
TOP VIEW OF ITEM 3 E
12 2X P20
16 2X GRN/YEL
(TERM 1)
14 4X FAR SIDE
GRN/YEL
1 3
(TERM 2)
D D
8
13 2X
5 REF
6 REF 21 2X
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICETOALLPERSONSRECEIVINGTHISCONFIDENTIALDRAWING: REVISION
ReproductionForbiddenwithoutthespecificwrittenpermissionofAsyst
TechnologiesInc.,Milpitas,California. Thisdrawingisonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
issuedandneitherreceiptnorpossessiontherofconfersortransfers
anyrightin,orlicensetousethesubjectmatterofthedrawingorany
designsortechnicalinformationshownthereon,oranyrighttoreproduce . . SEE SHEET 1 . .
thedrawingoranyparttherof,exceptformanufacturebyvendorsfor
AsystTechnologies,Inc.andformanufactureunderthecorporation's
H subjectmatterthereofunlessbywrittenagreementwithorwritten
permissionfromtheCompany. H
2
2X 13
2X 16
G G
GRN/YEL
BRN
VIO
TB2 9 REF
BLU 8 REF
25
GRN/YEL 1 GRN/YEL
9700-4074-01 2 BRN
(TERM 2) REV_
GRN/YEL VENDOR_ 3
20 4 VIO
9 8 REF
13 2X
F BRN 8 REF F
21 2X
A A + -
4 REF
23 8X
RC V.ADJ ON RCG VB CB +S -S AC(L) AC(N) FG
11 4X
PART OF
15 4X P1 ITEM 8
J1
TB1
3 F1
J3
4X 22 J3
P2
4X 16 19 4X F2 VIEW A-A
P3 TOP VIEW OF ITEM 3
E F3
E
26
ENET 2X 12
2X 16
4X FAR SIDE 14
FLOPPY SCSI
UTIL IDE P5
J4 P10
J6 (PART OF P4
P16 ITEM 5 )
REF 14
D 18 RIGHT SIDE OF ITEM 1 D
GRN/YEL NOT SHOWN FOR CLARITY
(TERM 1) P20 16
2X
1 17
10
GRN/YEL 24
(TERM 2)
5 REF
6 REF
1 CHECK PARTS FOR DAMAGES AND SCRATCHES.
J20-1 BRN TB1-AC(L) ITEM 8 TO ITEM 3 4 ADJUST 3 OUTPUT TO 24.75 TO 25.0V PRIOR TO ASSEMBLY.
J6
TERM 2 GRN/YEL TB1-FG ITEM 8 TO ITEM 3 5 ASSEMBLE ITEMS NOT IDENTIFIED PER DRAWING.
8 7 6 5 4 3 2 1
Load Port Transfer™ System 2150 / 2200 Technical Manual
11 2X
SECTION A-A 3 USE T4 TO MOUNT SPRING, 13 TO THE BASE, 1 PER VIEW A-A.
A 8
9
INSTALL 6 TO THE SHAFT, 4 .
B REF 2 A 2X .010 B
SEE DETAIL TOOL LIST
SEE DETAIL C 5
TOOL QTY PART NUMBER DESCRIPTION
B T1 1 X POWER DRILL
2 2X
15 T2 1 X FEELER GAUGE .010 THK
2X 16
B 18 REMOVE SUPPLIED T3 1 X VISE
DETAIL SET SCREW AND
REPLACE WITH 18 T4 1 X LONG NOSE PLIERS
SCALE: 2/1
C
UNLESS OTHERWISE SPECIFIED CONTRACT NO.
A DIMENSIONS AREININCHES.
A
2000-0311-01.
DETAIL TOLERANCESARE:
FRACTIONS DECIMALS
.XX
ANGLES
. TECHNOLOGIES, INC.
2. IDENTIFY PART PER MARKING METHOD 12 OF ASYST CORPORATE . .XXX APPROVALS DATE
SCALE: 2/1 MATERIAL
PROCEDURE 2000-0311-01. 001 .
DRAWN
BASE ASSEMBLY
2X SEE B.O.M. D.FRALEY 3/21/96
8 7 6 5 4 3 2 1
Load Port Transfer™ System 2150 / 2200 Technical Manual
D 2X 8 D
2X 9
MANUFACTURING PROCESS INSTRUCTIONS
B B
2X 10 (E)
1
(N) (L)
3X 16
WIRE TABLE
GRN/YEL
TABULATION
FROM COLOR TO SIGNAL NAME/REF
BLU BRN -01 RIGHT,
J20-1 BRN FL1-L AC LINE
AS SHOWN
J20-2 - NC -
-02 LEFT,
J20-3 BLU FL1-N AC NEUTRAL SEE NOTE 7
6 ITEM 6 GRN/YEL GND STUD CHASSIS GND
NOTES: UNLESS OTHERWISE SPECIFIED FL1-E GRN/YEL GND STUD CHASSIS GND, ITEM 14
J20
1. MANUFACTURE PER ASYST TECHNOLOGIES ITEM
QTY
PART NUMBER DESCRIPTION
MATERIAL
REQD SPECIFICATION
WORKMANSHIP STANDARDS 2000-0311-01. PARTS LIST
GRN/YEL UNLESS OTHERWISE SPECIFIED CONTRACT NO.
A 2 ROTATE ITEM 3 180 FOR -02 ONLY.
DIMENSIONS ARE IN INCHES.
TOLERANCES ARE:
. TECHNOLOGIES, INC.
A
FRACTIONS DECIMALS ANGLES
.XX -
. .XXX - -
APPROVALS DATE
3. IDENTIFY PART PER MARKING METHOD 12 OF
ASYST CORPORATE PROCEDURE 2000-0311-01.
MATERIAL
.
DRAWN CONNECTOR PANEL
B.CARLSON 3/20/96
SEE BOM
. CHECKED ASSY, I/O
4. PACKAGE PER ASYST WORKMANSHIP STANDARDS 2000-0311-01 9700-3962-XX LPT FINISH J. KYFFIN 4/12/96
.
COSMETIC PART: YES X NO PIN 1 NEXT ASSY PRODUCT N/A
DES. ENGR.
M. NG 4/12/96
SIZE CAD FILE NAME DWG NO. REV.
.
MFG. ENGR.
D A4084D1B 9700-4084-XX B
FIRST USED ON DO NOT SCALE DRAWING A. DEPEW 4/12/96 SCALE 1/1 SHEET 1 OF 1
8 7 6 5 4 3 2 1
Load Port Transfer™ System 2150 / 2200 Technical Manual
PIN 1 VIO
D 4 D
PIN 1
C C
6 5
J2 J5
6 REF 5 REF
REF 2
7X 8
BRN BRN 7X 14
B B
15 7X
1 2 3 4 5
7X
1 2 3 4 5
7
NOTES: UNLESS OTHERWISE SPECIFIED
20
1. MANUFACTURE PER ASYST TECHNOLOGIES
WORKMANSHIP STANDARDS 2000-0311-01. T3
8 7 6 5 4 3 2 1
Load Port Transfer™ System 2150 / 2200 Technical Manual
PIN 1 VIO
D 4 D
PIN 1
C C
6 5
J2 J5
6 REF 5 REF
REF 2
7X 8
BRN BRN 7X 14
B B
15 7X
1 2 3 4 5
7X
1 2 3 4 5
7
NOTES: UNLESS OTHERWISE SPECIFIED
20
1. MANUFACTURE PER ASYST TECHNOLOGIES
WORKMANSHIP STANDARDS 2000-0311-01. T3
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
REVISION
NOTICE TO ALL PERSONS RECEIVING THISCONFIDENTIAL DRAWING:
Reproduction Forbidden without the specific written permission of Asyst ZONE REV. DESCRIPTION APPROVED DATE
Technologies Inc., Fremont, California. this drawing is only conditionally
issued andneither receipt nor possession thereof confers or transfers
any right in, or license to use the subject matter of the drawing or any - - SEE SHEET 1 - -
designs or technicalinformation shown theron, or anyright to reproduce
the drawing or any part thereof, except for manufacture by vendors for
Asyst Technologies, Inc. and for manufacture under the corporation's
written license. No right to reproduce this drawing is granted for the
subject matter thereof unless by written agreement with or written
permission from the Company.
D D
2 INSTALL 7 ON TO 3 7X
7 PLACE 2 ON 15
TOOL LIST
B B
TOOL QTY PART NUMBER DESCRIPTION
T3 1 X #6 NUT DRIVER
QTY MATERIAL
ITEM PARTNUMBER DESCRIPTION
REQD SPECIFICATION
PARTS LIST
UNLESS OTHERWISE SPECIFIED CONTRACT NO.
A DIMENSIONS ARE IN INCHES.
TOLERANCES ARE:
- TECHNOLOGIES, INC.
A
FRACTIONS DECIMALS ANGLES
.XX -
- - - .XXX - -
APPROVALS DATE
MATERIAL
DRAWN
- -
SEE SHEET 1 MAGILL 7/30/96 SERVO DRIVER ASSEMBLY
CHECKED
SEE SHEET 1 SEE SHEET 1 FINISH - -
DES. ENGR. SIZE CAD FILE NAME DWG NO. REV.
NEXT ASSY PRODUCT SEE SHEET 1
MFG. ENGR.
- -
D A4274D2C 9700-4274-01 C
FIRST USED ON DO NOT SCALE DRAWING SHEET
- - SCALE 1/1 2 OF 2
8 7 6 5 4 3 2 1
Load Port Transfer™ System 2150 / 2200 Technical Manual
-01 SHOWN
RIGHT
C C
2X 7
2X 7 3X 5
B 1 B
TECHNOLOGIES WORKMANSHIP 3
STANDARDS 2000-0311-01.
TABULATION
2. INSPECT PARTS FOR SCRATCHES
AND DAMAGE. -01 RIGHT (SHEET 1)
3. APPLY ADHESIVE, ASYST P/N -02 LEFT (SHEET 2)
7500-0716-01, ITEM 2 TO ALL SCREWS
WITHOUT LOCK WASHERS.
QTY MATERIAL
4. VERIFY ASSY IS BUILT PER ASSY DWG AND ITEM
REQD
PART NUMBER DESCRIPTION SPECIFICATION
A FRACTIONS DECIMALS
.XX -
ANGLES - TECHNOLOGIES, INC.
A
12 OF ASYST CORPORATE PROCEDURE - - -
MATERIAL
.XXX -
-
APPROVALS DATE
ASSEMBLY,
DRAWN
2000-0311-01. - -
SEE B.O.M. MAGILL 7/31/96
ARM ROTATE SENSORS
CHECKED
9700-4279-XX LPT
FINISH E.CORTEZ 11/15/96 SIZE CAD FILE NAME DWG. NO. REV.
6. PACKAGE PER ASYST WORKMANSHIP NEXT ASSY PRODUCT
N/R DES. ENGR.
C A4276C1A 9700-4276-XX A
M.NG 11/15/96
STANDARDS 2000-0311-01. COSMETIC PART: YES X NO FIRST USED ON DO NOT SCALE DRAWING
MFG. ENGR.
SCALE 2/1 SHEET 1 OF 2
A.TAHERI 11/15/96
4 3 2 1
4 3 2 1
NOTICE TO ALL PERSONS RECEIVING THIS CONFIDENTIAL DRAWING: REVISIONS
Reproduction Forbidden without the specific written permission of Asyst
Technologies Inc., Fremont, California. this drawing is only conditionally ZONE REV. DESCRIPTION APPROVED DATE
issued and neither receipt nor possession therof confers or transfers
any right in, or license to use the subject matter of the drawing or any
- - SEE SHEET 1 - -
designs or technical information shown theron, or any right to reproduce
the drawing or any part therof, except for manufacture by vendors for
Asyst Technologies, Inc. and for manufacture under the corporation's
7 2X
written license. No right to reproduce this drawing is granted for the
subject matter therof unless by written agreement with or written
permission from the Company.
D D
3
C C
2X 7
-02 SHOWN
LEFT
2X 7
B B
2X 5
1
2
3
QTY MATERIAL
ITEM PART NUMBER DESCRIPTION
REQD SPECIFICATION
PARTS LIST
UNLESS OTHERWISE SPECIFIED CONTRACT NO.
DIMENSIONS ARE IN INCHES
TOLERANCES ARE:
A - -
FRACTIONS
-
DECIMALS
.XX
.XXX
-
-
ANGLES
-
APPROVALS
- TECHNOLOGIES, INC.
A
ASSEMBLY,
DATE
MATERIAL
DRAWN
- -
4 3 2 1
Load Port Transfer™ System 2150 / 2200 Technical Manual
ASYST
x TECHNOLOGIES 2000-0900-01 Revision A Page A-88
8 7 6 5 4 3 2 1
REVISION
NOTICE TO ALL PERSONSRECEIVING THIS CONFIDENTIAL DRAWING:
Reproduction Forbidden without the specific written permission of Asyst DESCRIPTION APPROVED
ZONE REV. DATE
Technologies Inc., Fremont, California. this drawing is only conditionally
issued and neither receipt nor possession thereof confers or transfers
anyright in, or license to use the subject matter of the drawing or any . A ECN N3926 ; PRODUCTION RELEASE JK 4/25/97
designs or technical information shown theron, or any right to reproduce
the drawing or any part thereof, except for manufacture by vendors for B ECN N4248 JK 1/14/98
Asyst Technologies, Inc. and for manufacture under the corporation's
written license. No right to reproduce this drawing is granted for the
subject matter thereof unless by written agreement with or written
permission from the Company.
D D
T3 T4
1 WARM UP 6 TO 125F T1 T2
X X
X X
TOOL LIST
B TOOL QTY PART NUMBER DESCRIPTION B
T4 1 X HAND PRESS
T6 1 X SCREWDRIVER, PHILLIPS
001
NOTES: UNLESS OTHERWISE SPECIFIED
1
1. MANUFACTURE PER ASYST TECHNOLOGIES
WORKMANSHIP STANDARDS 2000-0311-01.
QTY MATERIAL
ITEM PART NUMBER DESCRIPTION
REQD SPECIFICATION
2. APPLY ADHESIVE, ASYST P/N 7500-0716-01, PARTS LIST
TO ALL SCREWS WITHOUT LOCK WASHERS. UNLESS OTHERWISE SPECIFIED CONTRACT NO.
A DIMENSIONSARE IN INCHES.
TOLERANCES ARE:
. TECHNOLOGIES, INC.
A
FRACTIONS DECIMALS ANGLES
3. IDENTIFY PART PER MARKING METHOD 12 OF .XX .01
. .XXX .005 1/2
ASYST CORPORATE PROCEDURE 2000-0311-01. MATERIAL
APPROVALS DATE
DRAWN
4. PACKAGE PER ASYST WORKMANSHIP STANDARDS SEE B.O.M. M.MUELLER 3/23/97 GRIPPER TILT ASSEMBLY
. CHECKED
2000-0311-01. COSMETIC?: YES X NO 9700-4279-01 . FINISH 3/24/97
J.KYFFIN
. DES. ENGR. SIZE CAD FILE NAME DWG NO. REV.
NEXT ASSY PRODUCT N/R
.
MFG. ENGR.
M.NG 11/15/96
D A4278D1B 9700-4278-01 B
FIRST USED ON DO NOT SCALE DRAWING SCALE 1/1 SHEET 1 OF 4
T.RADMILOVICH 3/7/97
8 7 6 5 4 3 2 1
Load Port Transfer™ System 2150 / 2200 Technical Manual
WHITE RING TERM A5/RCG P6 C1/J6 FROM (CONN. LABEL, TO (JACK, PLUG,
ITEM NO. PART NO.
13 9700-4108-01 WIRE COLOR, ETC. ) TERMINAL, ETC.)
DETAIL 'W' 9700-4080-01 P11 A1/J11 P7 C1/J7
J5 A4/P5 14 9700-4109-01 J6A G1/P6A
REF 9700-4081-01 P13 A1/J13 C3/P10 C1/J10 DETAIL 'W' 9700-4080-01 TEST N/C
P2 A2/J2 C4/P59 H1/J59
12 9700-4347-01 P3 A4/P3
F 9700-4351-XX F
13 9700-4108-01 P3 A3/J3
14 9700-4109-01 P6 A3/J6
REF 6900-1282-01 - A1/J7
5 9700-3970-XX A6/P20 D3/J20
4X 82 83 4X
83 4X
SEE BASE GROUNDING
C BLOCK WIRE LIST C
DETAIL P
B B
MFG.ENGR.
E A4284E4E 9700-4284-XX E
FIRST USED ON DO NOT SCALE DRAWING SCALE 1/2 SHEET 4 OF 4
8 7 6 5 4 3 2 1
Load Port Transfer™ System 2150 / 2200 Technical Manual
D D
4X 8
4X 15 REF 15
FARSIDE
5 8X
4X 7 8X
14
4
16
DETAIL A
SCALE: 2/1
C C
3
2
SEE DETAIL A
10 4 6 6
2X 12 16 16 16
13
3 11 1 3
B B
PARTS LIST
PROCEDURE 2000-0311-01. UNLESS OTHERWISE SPECIFIED CONTRACT NO.
DIMENSIONS ARE IN INCHES
TOLERANCES ARE:
.
A 3. PACKAGE PER ASYST WORKMANSHIP STANDARDS 2000-0311-01 . .
FRACTIONS
.
DECIMALS
.XX -
ANGLES
-
TECHNOLOGIES, INC.
A
LASER BRACKET
.XXX - APPROVALS DATE
COSMETIC PART: YES NO X . .
MATERIAL
DRAWN
ASSY, 200MM
SEE BOM A. REYES 10/7/96
9700-3260-01 INX CHECKED
FINISH J. KYFFIN 10/22/96 SIZE CAD FILE NAME DWG. NO. REV.
C
NONE
NEXT ASSY PRODUCT
DES. ENGR.
T. SURBER 10/23/96 A4303C1C 9700-4303-01 C
MFG. ENGR.
SCALE 1/1 SHEET 1 OF 1
FIRST USED ON DO NOT SCALE DRAWING M.VODEGEL 10/29/96
4 3 2 1
Load Port Transfer™ System 2150 / 2200 Technical Manual
REF 15
any right in, or license to use the subject matter of the drawing or any
designs or technical information shown theron, or any right to reproduce A ECN N3755; PRODUCTION RELEASE JK 11/15/96
the drawing or any part therof, except for manufacture by vendors for
Asyst Technologies, Inc. and for manufacture under the corporation's B ECN N3862 JK 1/22/97
written license. No right to reproduce this drawing is granted for the
subject matter therof unless by written agreement with or written
permission from the Company.
FARSIDE C ECN N3933 . .
D D
4X 8
4X 15
5 8X
4X 7 8X
14
4 DETAIL A
16 SCALE: 2/1
2
C C
3
SEE DETAIL
4 6 6
10
16 16 16
2X 12
13
3 11 1 3
B B
6" CONFIGURATION
PARTS LIST
PROCEDURE 2000-0311-01. UNLESS OTHERWISE SPECIFIED CONTRACT NO.
DIMENSIONS ARE IN INCHES
TOLERANCES ARE:
.
A 3. PACKAGE PER ASYST WORKMANSHIP STANDARDS 2000-0311-01 . .
FRACTIONS
.
DECIMALS
.XX -
ANGLES
-
TECHNOLOGIES, INC.
A
LASER BRACKET
.XXX - APPROVALS DATE
COSMETIC PART: YES X NO . .
MATERIAL
DRAWN
C
NONE
NEXT ASSY PRODUCT
DES. ENGR.
T. SURBER 10/29/96 A4304C1C 9700-4304-01 C
MFG. ENGR.
SCALE 1/1 SHEET 1 OF 3
FIRST USED ON DO NOT SCALE DRAWING M. VODEGEL 10/29/96
4 3 2 1
4 3 2 1
NOTICE TO ALL PERSONS RECEIVING THIS CONFIDENTIAL DRAWING: REVISIONS
Reproduction Forbidden without the specific written permission of Asyst
Technologies Inc., Fremont, California. this drawing is only conditionally ZONE REV. DESCRIPTION APPROVED DATE
issued and neither receipt nor possession therof confers or transfers
any right in, or license to use the subject matter of the drawing or any
designs or technical information shown theron, or any right to reproduce - SEE SHT 1 . .
the drawing or any part therof, except for manufacture by vendors for
Asyst Technologies, Inc. and for manufacture under the corporation's
written license. No right to reproduce this drawing is granted for the
subject matter therof unless by written agreement with or written
permission from the Company.
D REF 15 D
FARSIDE
4X 8 REF 7
15 REF
8X FARSIDE
5 REF 15
4X 15
4X 7 8X REF 8
14
C DETAIL B DETAIL C C
SCALE: 2/1 SCALE: 2/1
4
2
16
3 SEE DETAIL B
6 6
4 16 16
10
B
2X 12
16 SEE DETAIL C B
13
3 11 1 3 5" CONFIGURATION
QTY MATERIAL
ITEM PART NUMBER DESCRIPTION
REQD SPECIFICATION
PARTS LIST
UNLESS OTHERWISE SPECIFIED CONTRACT NO.
DIMENSIONS ARE IN INCHES
TOLERANCES ARE:
.
A . .
FRACTIONS
.
DECIMALS
.XX -
-
ANGLES
-
TECHNOLOGIES, INC.
A
LASER BRACKET
.XXX APPROVALS DATE
MATERIAL
. . DRAWN
. . CHECKED
FINISH J. KYFFIN 10/29/96 SIZE CAD FILE NAME DWG. NO. REV.
C C
NONE
NEXT ASSY PRODUCT
DES. ENGR.
T. SURBER 10/29/96 A4304C2C 9700-4304-01
MFG. ENGR.
DO NOT SCALE DRAWING SCALE 1/1 SHEET 2 OF 3
FIRST USED ON M. VODEGEL 10/29/96
4 3 2 1
4 3 2 1
NOTICE TO ALL PERSONS RECEIVING THIS CONFIDENTIAL DRAWING: REVISIONS
Reproduction Forbidden without the specific written permission of Asyst
Technologies Inc., Fremont, California. this drawing is only conditionally ZONE REV. DESCRIPTION APPROVED DATE
issued and neither receipt nor possession therof confers or transfers
any right in, or license to use the subject matter of the drawing or any
designs or technical information shown theron, or any right to reproduce - SEE SHT 1 . .
the drawing or any part therof, except for manufacture by vendors for
Asyst Technologies, Inc. and for manufacture under the corporation's
written license. No right to reproduce this drawing is granted for the REF 15
subject matter therof unless by written agreement with or written
permission from the Company.
FARSIDE
D D
4X 8
5 8X
4X 15
4X 7 8X
14
DETAIL D
SCALE: 2/1
C C
4
16
3 SEE DETAIL D
4 6 6
10
16 16 16
2X 12
13
B B
3 11 1 3
4" CONFIGURATION
QTY MATERIAL
ITEM PART NUMBER DESCRIPTION
REQD SPECIFICATION
PARTS LIST
UNLESS OTHERWISE SPECIFIED CONTRACT NO.
DIMENSIONS ARE IN INCHES
TOLERANCES ARE:
.
A . .
FRACTIONS
.
DECIMALS
.XX
.XXX
-
-
ANGLES
-
TECHNOLOGIES, INC.
A
MATERIAL
DRAWN
APPROVALS DATE
LASER BRACKET
. .
ASSY, 6", 5", 4"
SEE BOM A. REYES 10/7/96
. . CHECKED
FINISH J. KYFFIN 10/29/96 SIZE CAD FILE NAME DWG. NO. REV.
NONE
NEXT ASSY PRODUCT
DES. ENGR.
T. SURBER 10/29/96 C A4304C3C 9700-4304-01 C
MFG. ENGR.
SCALE 1/1 SHEET 3 OF 3
FIRST USED ON DO NOT SCALE DRAWING M. VODEGEL 10/29/96
4 3 2 1
Load Port Transfer™ System 2150 / 2200 Technical Manual
D D
1
25
5 TEST LABEL
24 4X
2 20
C C
3
13
S2 S1
6 2X
19 4X
B B
2
27
26 2X
17
MFG. ENGR.
11/15/96
D A4312D1B 9700-4310-01 B
FIRST USED ON DO NOT SCALE DRAWING A.TAHERI 11/15/96 SCALE 1/1 SHEET 1 OF 1
8 7 6 5 4 3 2 1
Load Port Transfer™ System 2150 / 2200 Technical Manual
1.169±.010
.800±.010 (.369)
(RED)
B B
2 2
(BLACK)
5 2
1 2
NOTE DIRECTION OF ENCODER
B
N/R DES. ENGR.
NEXT ASSY PRODUCT
M.NEADS 11/15/96
A4317B1A 9700-4317-01 A
MFG. ENGR.
FIRST USED ON DO NOT SCALE DRAWING A.TAHERI 11/15/96
SCALE 1/1 SHEET 1 OF 1
Load Port Transfer™ System 2150 / 2200 Technical Manual
D D
1 8.00 ±.50
3.00 ±.50
2
4 2 2X
C C
9700-4337-01
BLU 1
REV_ J24
RED 2
5 4 3 3
B B
5 NOTE THAT SECOND SOURCE (SANYO) WIRE COLORS ARE RED AND BLACK. UNLESS OTHERWISE SPECIFIED
PARTS LIST
CONTRACT NO.
DIMENSIONS ARE IN INCHES
TOLERANCES ARE:
.
A 5. IDENTIFY PART PER MARKING METHOD 12 OF ASYST CORPORATE . .
FRACTIONS DECIMALS ANGLES
.XX
. .XXX
.
.
TECHNOLOGIES, INC.
A
FAN ASSY,
. APPROVALS DATE
PROCEDURE 2000-0311-01. . .
MATERIAL
DRAWN
DRIVE COLUMN
SEE BOM C.MOLERIN 8-30-96
4 3 2 1
Load Port Transfer™ System 2150 / 2200 Technical Manual
25.88 53 16X
38 16X
10 27
55
33 2X 47
47
9700-4312-01 9700-4312-01
REV_ REV_
VENDOR_ VENDOR_
G SEE DETAIL A G
33 2X
46 19X
62
40.00
60 2X
60 2X
4
SEE DETAIL E 2X 1 63
9 14
63 8 2X
59
F 61 32 F
13
D
9700-4312-01 9700-4312-01
REV_ REV_
VENDOR_ VENDOR_
E E
SEE DETAIL C
D 57
2X 3 26 4X 5 21
NOTE ORIENTATION OF GROOVE
(ON THIS THIS SIDE ONLY)
50
49 4X
D D
2. APPLY ADHESIVE, ASYST #7500-0716-01 TO ALL SCREWS WITHOUT LOCK WASHERS. QTY MATERIAL
ITEM PARTNUMBER DESCRIPTION
REQD SPECIFICATION
PARTS LIST
3. IDENTIFY PART PER MARKING METHOD 12 OF ASYST CORPORATE UNLESS OTHERWISESPECIFIED CONTRACT NO.
DIMENSIONS AREININCHES.
MFG.ENGR.
M.NG 11/15/96
E A4349E1A 9700-4349-01 A
FIRST USED ON DO NOT SCALE DRAWING A.TAHERI 11/15/96 SCALE 1/1 SHEET 1 OF 2
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICETO ALLPERSONS RECEIVING THISCONFIDENTIALDRAWING: REVISIONS
Reproduction ForbiddenwithoutthespecificwrittenpermissionofAsyst
TechnologiesInc.,Fremont,California. thisdrawingisonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
issuedandneitherreceiptnorpossessiontherofconfers ortransfers
any rightin,orlicensetousethesubjectmatterofthedrawingorany . - SEE SHT. 1 . .
designsortechnicalinformationshowntheron,oranyrighttoreproduce
thedrawingoranyparttherof,exceptformanufacturebyvendorsfor
H H
Asyst Technologies, Inc.andformanufactureunderthecorporation's
writtenlicense. Norighttoreproducethis drawingisgrantedforthe
subjectmattertherofunlessbywrittenagreementwithorwritten
permissionfromtheCompany.
REF 46 27 REF
G G
21 REF
F F
E E
25
2X 34 28 2X
D D
2X 48 12
24
REF 5
.12±.06
C C
5
4 REF
54 4X
45 4X
DETAIL C
TYP 2X
B SCALE: 2/1 B
DETAIL A
SCALE: 4/1
PARTS LIST
UNLESS OTHERWISESPECIFIED CONTRACTNO.
DIMENSIONSAREININCHES.
TOLERANCES ARE:
FRACTIONS DECIMALS ANGLES TECHNOLOGIES, INC.
.XX -
. .XXX - -
APPROVALS DATE
MATERIAL DRAWN
MAGILL VERTICAL DRIVE ASSEMBLY
A SEE SHEET 1
CHECKED
9/10/96
A
SEE SHEET 1 SEE SHEET 1
FINISH E.CORTEZ 11/15/96
SEE SHEET 1 DES. ENGR. SIZE CAD FILENAME DWG. NO. REV.
NEXT ASSY PRODUCT
MFG.ENGR.
M.NG 11/15/96
E A4349E2A 9700-4349-01 A
FIRST USED ON DO NOT SCALE DRAWING A.TAHERI 11/15/96 SCALE 1/1 SHEET 2 OF 2
8 7 6 5 4 3 2 1
Load Port Transfer™ System 2150 / 2200 Technical Manual
permissionfromtheCompany.
(SEE DETAIL G
)
65 2X
TO CONN ITEM 104
11 55 5X SEE WIRE LIST
82 5X (SEE DETAIL )F
30 2X
2X 93
1
27
TO PCB CHASSIS ASSY ITEM 7
G 64 2X G
P20
SECTION C-C 4 1 J6 4 1 J5 7 J4 1 7 J3 1
2X 61
P6 P5 P4 P3
2X 117
P1
J2 26
1 J1 10
ASYS T TE CHNOLOGIE S, INC ASSY. N O. 3200-1037-01 RE V.
2X 119
C
12
P51
2X 66
F F
9 C 2X 61
DETAIL B
BACKSIDE
SECTION A-A
18 4X
51 3X
17
E E
63 2X 74 4X 74 3X 74 3X
A A
32
74 56 2X SECTION E-E
LOAD
22 100
2X
UNLOAD
73
D 23 D
HOME
8
111 2X
POWER
21 74 7X
14
C C
E E -01 SHOWN
61
87 4X
94
24
29
118 20 2X
61
61 4X TABULATION
B 87 2X B
5 -01 AS SHOWN, (RIGHT ), SHEETS 1 & 2
2X 94
61 -02 MIRROR IMAGE, (LEFT), SHEETS 3 & 4
6
FILTER
10 2X 26 REF 60 2X SEE SHEET 2 FOR NOTES
26 4
19 ITEM
QTY
PART NUMBER DESCRIPTION
MATERIAL
REQD SPECIFICATION
PARTS LIST
41 7 UNLESS OTHERWISESPECIFIED CONTRACT NO.
77 REF 2X 81
DIMENSIONSAREININCHES.
TOLERANCESARE:
TECHNOLOGIES, INC.
FRACTIONS DECIMALS ANGLES
.XX .02
- .XXX - -
APPROVALS DATE
69 MATERIAL DRAWN
MAGILL 9/11/96 MINI ENVIRONMENT ASSY, LPT
A 28
SEE B.O.M.
A
2 87 2X 9700-4284-XX LPT
FINISH
CHECKED
E.CORTEZ 11/15/96
3 42 N/R DES.ENGR. SIZE CAD FILENAME DWG.NO. REV.
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICE TOALLPERSONSRECEIVINGTHISCONFIDENTIALDRAWING: REVISIONS
ReproductionForbiddenwithout the specificwrittenpermissionofAsyst
TechnologiesInc., Fremont, California. thisdrawingisonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
issued andneitherreceiptnorpossessiontherofconfersortransfers
anyrightin,orlicensetousethesubjectmatterofthedrawingorany - - SEE SHEET 1 - -
designsortechnicalinformationshowntheron,oranyrighttoreproduce
the drawingoranyparttherof,exceptformanufacturebyvendorsfor PLACE
POD IN
POWER READY
AsystTechnologies,Inc.andformanufactureunderthecorporation's
H writtenlicense. Norighttoreproducethisdrawingisgrantedforthe
subjectmattertherofunlessbywrittenagreementwithorwritten
H
46 16
permission fromtheCompany.
120
44
113 51
TB2
TB1
NOTES: UNLESS OTHERWISE SPECIFIED
E J61
P1 P59
1. MANUFACTURE PER ASYST WORKMANSHIP E
STANDARDS 2000-0311-01.
2. INSPECT PARTS FOR SCRATCHES OR DAMAGE.
2000-0311-01.
3 COSMETIC PART: YES X NO
FROM PORT PLATE
B B
1 REF 4
J6 J8 J10 91
43
7 114 REF
QTY MATERIAL
ITEM PARTNUMBER DESCRIPTION SPECIFICATION
REQD
PARTS LIST
UNLESSOTHERWISESPECIFIED CONTRACT NO.
9 115
DIMENSIONS ARE ININCHES.
TOLERANCES ARE:
TECHNOLOGIES, INC.
39 FRACTIONS DECIMALS
.XX .02
ANGLES
- .XXX - -
APPROVALS DATE
MATERIAL DRAWN
MAGILL MINI ENVIRONMENT ASSY, LPT
A SEE SHEET 1
CHECKED
9/11/96
A
SEE SHEET 1 SEE SHEET 1
FINISH E.CORTEZ 11/15/96
SEE SHEET 1 DES.ENGR. SIZE CADFILE NAME DWG.NO. REV.
NEXT ASSY PRODUCT
MFG.ENGR.
M.NG 11/15/96 E A4351E2C 9700-4351-XX C
FIRST USED ON DO NOT SCALE DRAWING L.TURNER 11/15/96 SCALE 1/2 SHEET 2 OF 4
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICETOALLPERSONSRECEIVINGTHISCONFIDENTIALDRAWING: REVISIONS
ReproductionForbidden withoutthespecificwrittenpermissionofAsyst
TechnologiesInc.,Fremont,California. thisdrawingisonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
issuedandneitherreceiptnorpossessiontherofconfersortransfers
any rightin,orlicensetousethesubjectmatterofthedrawingorany
designsortechnicalinformationshowntheron,oranyrighttoreproduce
TO CONN ITEM 104 - - SEE SHEET 1 - -
permission fromtheCompany.
82 5X
TO PCB CHASSIS ASSY ITEM 7
1
P20
G G
DETAIL P
BACKSIDE
4 1 J6 4 1 J5 7 J4 1 7 J3 1
P6 P5 P4 P3
REV
9700-3271-01
2X 117 J2 26
1
P1
J1 10
A SYST T ECH NO LO GIE S, INC AS SY. NO. 32 00 -1 0 37 -0 1 R EV.
119 2X
2X 61
C 45
12 P51
2X 66 61 2X
F F
C 9
(SEE SHT 1)
SECTION M-M
17
32
4X 18
56 2X
3X 51
E E
23 3X 74 3X 74 4X 74 2X 63
M M
SECTION N-N
74
LOAD
22
UNLOAD
D HOME D
100 8
2X 73 111 2X
POWER
7X 74 21
14
C C
N N
61
4X 87
94
24
29 118
2X 20
61
4X 61
B 2X 87 B
5
94 61 2X
FILTER
2X 10
6
-02 SHOWN
2X 60
26 REF
26
19 ITEM
QTY
PART NUMBER DESCRIPTION
MATERIAL
REQD SPECIFICATION
PARTS LIST
7 4 REF 77 41 UNLESSOTHERWISESPECIFIED CONTRACT NO.
DIMENSIONSAREININCHES.
81
TOLERANCESARE:
FRACTIONS DECIMALS ANGLES TECHNOLOGIES, INC.
.XX .02
- -
.XXX - APPROVALS
2X
DATE
69 MATERIAL DRAWN
MAGILL MINI ENVIRONMENT ASSY, LPT
A 2X 87
SEE SHEET 1
CHECKED
9/11/96
A
28 2 FINISH E.CORTEZ 11/15/96
42 3 SEE SHEET 1 DES.ENGR. SIZE CAD FILENAME DWG.NO. REV.
2X 94 E
77 MFG.ENGR.
M.NG 11/15/96 A4351E3C 9700-4351-XX C
DO NOT SCALE DRAWING L. TURNER 11/15/96 SCALE 1/2 SHEET 3 OF 4
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICETO ALLPERSONSRECEIVING THISCONFIDENTIALDRAWING: REVISIONS
Reproduction ForbiddenwithoutthespecificwrittenpermissionofAsyst
TechnologiesInc.,Fremont,California. thisdrawing isonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
issuedandneitherreceiptnorpossessiontherofconfersortransfers
any right in, orlicensetousethesubjectmatterofthedrawingorany - - SEE SHEET 1 - -
designsortechnicalinformationshowntheron,oranyrighttoreproduce
thedrawingoranyparttherof,exceptformanufacturebyvendorsfor
PLACE POWER READY
POD IN
Asyst Technologies, Inc.andformanufactureunderthecorporation's
H writtenlicense. Norighttoreproducethisdrawingisgrantedforthe
subjectmattertherofunlessbywrittenagreementwithorwritten
H
16
permissionfromtheCompany.
46
F RED P17-24 F
YEL P17-10
113
E E
REF 40
D D
P21
C C
54
FROM FAN
4 REF
U1
J12
104
40
P17
103
J16
43 7
QTY MATERIAL
ITEM PART NUMBER DESCRIPTION SPECIFICATION
REQD
PARTS LIST
UNLESS OTHERWISESPECIFIED CONTRACTNO.
DIMENSIONSAREININCHES.
TOLERANCES ARE:
TECHNOLOGIES, INC.
39 91 115 9 FRACTIONS
-
DECIMALS
.XX .02
ANGLES
-
.XXX - APPROVALS DATE
MFG.ENGR.
M.NG 11/15/96
E A4351E4C 9700-4351-XX C
DO NOT SCALE DRAWING A.TAHERI 11/15/96 SCALE 1/2 SHEET 4 OF 4
8 7 6 5 4 3 2 1
Load Port Transfer™ System 2150 / 2200 Technical Manual
(SEE DETAIL G)
2 3
1 4
95 2X
8
27 TO CONN ITEM 104
1 47
SEE WIRE LIST
G 94 9 G
118
119
4 1 J6 4 1 J5 7 J4 1 7 J3 1
P6 P5 P4 P3
2X 120
P1
J2 26
1 J1 10
ASYST TECHNOLOGIES, INCASSY. NO. 3200-1037-01 RE V.
J 8 122 2X 61 2X 61 2X
F 12 F
P51
9 2X 66
J
57 3X
SECTION A-A
18 4X
51 3X
58 2X
17
E E
63 2X 74 4X 74 3X 74 3X
A A
32
74 56 2X
LOAD
100
73
UNLOAD
D
22
HOME
23 SECTION E-E D
8
111 2X 65 2X
POWER
11
30 2X
2X 93
21 74 7X
27
14 7
REF 37 64 2X
C C
61
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87 4X
94
24
121 29
20 2X
61 TABULATION
61 4X
B 87 2X -01 MIRROR FINISH, RIGHT (SHEETS 1 AND 2) B
5
94 -02 MIRROR FINISH, LEFT (SHEETS 3 AND 4)
2X 61
6
FILTER -03 #4 FINISH, RIGHT (SHEETS 1 AND 2)
10 2X 26 REF 60 2X -04 #4 FINISH, LEFT (SHEETS 3 AND 4)
26 4
19 ITEM
QTY PART NUMBER DESCRIPTION
MATERIAL
REQD SPECIFICATION
PARTS LIST
41 7 UNLESSOTHERWISESPECIFIED CONTRACT NO.
77 REF 2X 81
DIMENSIONSAREININCHES.
TECHNOLOGIES, INC.
FRACTIONS DECIMALS ANGLES
.XX .02
- -
.XXX - APPROVALS DATE
94 77 2X NEXTASSY PRODUCT
E
M.NG 11/15/96 A4370E1B 9700-4370-XX B
SEE SHEET 2 FOR NOTES FIRST USED ON DO NOT SCALE DRAWING
MFG.ENGR.
L. TURNER 11/15/96 SCALE 1/2 SHEET 1 OF 4
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICETOALLPERSONSRECEIVINGTHISCONFIDENTIALDRAWING: REVISIONS
ReproductionForbiddenwithout the specific written permissionofAsyst
TechnologiesInc.,Fremont,California. thisdrawingisonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
issued andneitherreceiptnorpossessiontherofconfersortransfers
anyrightin,orlicensetousethesubjectmatterofthedrawingorany
. - SEE SHT 1 . .
designsortechnicalinformationshowntheron,oranyrighttoreproduce
thedrawing oranyparttherof,exceptformanufacturebyvendorsfor PLACE
POD IN
POWER READY
AsystTechnologies,Inc.and formanufactureunderthecorporation's
H writtenlicense. Norighttoreproducethisdrawingisgrantedforthe
subjectmattertherofunlessbywrittenagreementwithorwritten
H
permission from theCompany.
46 16 WIRE LIST 104 P17 3
FROM COLOR TO
13 RED/BRN P17-1
112 LASER DIODE
BLK/VIO P17-2
DETAIL H 5
67 4X
WAFER PRESENCE BLK P17-3
4
1.00 SENSOR RED P17-4
BACKSIDE OF PCB CHASSIS ASSY 3
2
1
5 CASSETTE SLOT BLK P17-5
6
40 SENSOR RED P17-6
WAFER PROTRUSION BLK P17-7
G
REF
DETAIL F SENSOR RED P17-8 G
WAFER EXCESSIVE PROTRUSION SENSOR AND BRN P17-13
ELEVATOR LIMITS CABLE
106
3.50 C FLAT RIBBON CABLE
ELEVATOR LIMITS
CABLE
RED
ORN
P17-14
P17-15
2X
YEL P17-16
RED WIRE
GRN P17-21
BLACK WIRE DETAIL G 3X 6 15 5
WHT P17-22
67 2X WAFER EXCESSIVE
PROTRUSION SENSOR BLK P17-23
105 .30 107
.60 C RED P17-24
YEL P17-10
F F
NOTES: UNLESS OTHERWISE SPECIFIED
TB1
4 TYPE 'P17' ON LABEL, ITEM 103 , AND APPLY
E
E J61
P1 P59
AS SHOWN.
39
5 SEPARATE CABLE WIRES 1.00 INCH BEFORE
70 4X
INSERTING INTO ITEM 104 PER DETAIL F.
J6 J8 J10
91
43
114 REF
10 ITEM
QTY
REQD
PART NUMBER DESCRIPTION
MATERIAL
SPECIFICATION
PARTS LIST
12 115
UNLESS OTHERWISESPECIFIED CONTRACT NO.
DIMENSIONSAREININCHES.
TOLERANCESARE:
FRACTIONS DECIMALS ANGLES
TECHNOLOGIES, INC.
.XX .02
-01 SHOWN
- .XXX - -
APPROVALS DATE
MATERIAL
DRAWN
MINI ENVIRONMENT ASSY,
SEE SHEET 1 MAGILL 9/12/96
A CHECKED
LPT, REV PPLT A
SEESHEET 1 SEE SHEET 1
FINISH E.CORTEZ 11/15/96
SEE SHEET 1 DES.ENGR. SIZE CAD FILENAME DWG.NO. REV.
NEXTASSY
9700-4370-XX
PRODUCT
MFG. ENGR.
M.NG 11/15/96
E A4370E2B B
FIRST USED ON DO NOT SCALE DRAWING L.TURNER 11/15/96 SCALE 1/2 SHEET 2 OF 4
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICETOALLPERSONSRECEIVINGTHISCONFIDENTIALDRAWING: REVISIONS
Reproduction Forbidden withoutthespecificwrittenpermissionofAsyst
TechnologiesInc.,Fremont,California. thisdrawingisonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
issuedandneitherreceiptnorpossessiontherofconfersortransfers
anyrightin,orlicensetousethesubjectmatterofthedrawingorany TO CONN ITEM 104 . SEE SHEET 1 . .
designsortechnicalinformationshowntheron,oranyrighttoreproduce
thedrawingoranyparttherof,exceptformanufacturebyvendorsfor
Asyst Technologies, Inc. and for manufactureunderthecorporation's
SEE WIRE LIST
H H
(SEE DETAIL G )
writtenlicense. Norighttoreproducethisdrawingisgrantedforthe
subject mattertherofunlessbywrittenagreementwithorwritten 1
2 3
4
permissionfromtheCompany.
45 8
47 TO CONN ITEM 104
TO CONN ITEM 11
SEE WIRE LIST
117 (SEE DETAIL F )
87
5X 55
94 9
5X 82
1 118
G G
119
DETAIL P 45 REF
BACKSIDE
4 1 J6 4 1 J5 7 J4 1 7 J3 1
P6 P5 P4 P3
RE V
9700-3271-01
2X 120 J2 26
1
P1
J1 10
A SYST T EC H NOLOG IES, INC ASS Y. NO. 32 00 - 10 37 -0 1 RE V.
122 2X
J 2X 61
12
P51
2X 66
F F
61 2X
J 9
(SEE SHT 1)
SECTION M-M
3X 57
17
32 2X 58 4X 18
56 2X
3X 51
E E
23 3X 74 3X 74 4X 74 2X 63
M M
SECTION N-N
74
LOAD
UNLOAD
D 22 HOME D
100 8
73 111 2X
POWER
-02 SHOWN
5
94 61 2X
2X 10
FILTER
2X 60 6
26 REF
26
QTY MATERIAL
19 ITEM REQD PART NUMBER DESCRIPTION SPECIFICATION
4 PARTS LIST
7 REF 77 CONTRACT NO.
41
UNLESS OTHERWISESPECIFIED
DIMENSIONSAREININCHES.
81 TOLERANCES ARE:
FRACTIONS DECIMALS ANGLES
TECHNOLOGIES, INC.
.XX .02
- .XXX - -
APPROVALS
2X
DATE
69 MATERIAL DRAWN MINI ENVIRONMENT ASSY,
MAGILL 9/12/96
A 87
SEE SHEET 1
LPT, REV PPLT A
28 2 FINISH
CHECKED
E.CORTEZ 11/15/96
42 3 SEE SHEET 1 DES.ENGR. SIZE CAD FILE NAME DWG.NO. REV.
2X 77 94 M.NG 11/15/96
E A4370E3B 9700-4370-XX B
MFG. ENGR.
DO NOT SCALE DRAWING L. TURNER 11/15/96 SCALE 1/2 SHEET 3 OF 4
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICETOALLPERSONSRECEIVINGTHISCONFIDENTIALDRAWING: REVISIONS
Reproduction Forbidden withoutthespecificwrittenpermissionofAsyst
Technologies Inc., Fremont,California. thisdrawingisonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
issuedandneitherreceiptnorpossessiontherofconfersortransfers
anyrightin,orlicensetousethesubjectmatterofthedrawingorany - - SEE SHEET 1 - -
designsortechnicalinformationshowntheron,oranyrighttoreproduce
the drawing or anyparttherof,exceptformanufacturebyvendorsfor
PLACE POWER READY
POD IN
AsystTechnologies, Inc.andformanufactureunderthecorporation's
H writtenlicense. Norighttoreproducethisdrawingis grantedforthe
subject matter therof unlessbywrittenagreementwithorwritten
H
16
permissionfromtheCompany.
46
37
38
113
2X 56
E E
39
4X 70
REF 40
12.5 ± .5
D D
P21
C C
54
FROM FAN
4 REF
U1
40
J12
104
P17
103
J16
SEE DETAIL H
(SEE SHT 2)
J7 J9
J6 J8 J10
43 115 12
QTY MATERIAL
10 ITEM
REQD
PART NUMBER DESCRIPTION SPECIFICATION
PARTS LIST
UNLESS OTHERWISESPECIFIED CONTRACT NO.
DIMENSIONSAREININCHES.
-02 SHOWN
TOLERANCESARE:
FRACTIONS DECIMALS ANGLES TECHNOLOGIES, INC.
.02
91
.XX
- .XXX - -
APPROVALS DATE
REF
MATERIAL DRAWN
MINI ENVIRONMENT ASSY,
114 MAGILL
A SEE SHEET 1
CHECKED
9/12/96
LPT, REV PPLT A
FINISH E.CORTEZ 11/15/96
SEE SHEET 1 DES.ENGR. SIZE CAD FILE NAME DWG.NO. REV.
MFG. ENGR.
M.Ng 11/15/96
E A4370E4B 9700-4370-XX B
DO NOT SCALE DRAWING L.TURNER 11/15/96 SCALE 1/2 SHEET 4 OF 4
8 7 6 5 4 3 2 1
Load Port Transfer™ System 2150 / 2200 Technical Manual
B B
ZONE REV. DESCRIPTION APPROVED DATE
Technologies Inc., Fremont, California. this drawing is only conditionally
issued andneitherreceipt nor possession therof confers or transfers - A ECN N4242: PRODUCTION RELEASE JK 1/21/98
any right in, or license to use the subject matter of the drawing or any (SEE SHT 2)
designs or technical information shown theron, or anyright to reproduce - B ECN N4332 JK 4/08/98
H the drawing or any part therof, except for manufacture by vendors for H
C C
C ECN N4425 JK 6/22/98
Asyst Technologies, Inc. and for manufacture under the corporation's
written license. No right to reproduce this drawing is granted for the D ECN N4565 JK 1/12/99
subject matter therof unless by written agreement with or written
permission from the Company.
27 (SEE SHT 1)
32 REF
A 24 8
(SEE SHT 2) 72 5X
32
90
THREAD INTO
107 2X
ITEM 27 , AS
SHOWN, AND
G PULL TAUT G
2X 50
REF 3
2X 68 6
2X 67
SECTION G-G
50 2X SCALE: 1/1
74
3X (REF SHT 2)
68 2X
73
VIEW F-F 20 67 2X
(REF SHT 1) 8
94 74 2X
97
F F
27
93
13 REF 73 2X
VIEW C-C 11
4X
89 7 REF
(REF SHT 1)
AA CABLE
FEEDTHRU
151 DANGER
45 -01 & -02 21 CUTOUT
LASERRADIATION WHEN OPEN
ONLY
AND INTERLOCK DEFEATED.
AVOID DIRECT EYEEXPOSURE.
8
89 2X
-01 & -02
E 17 E
ONLY
(3.50)
D
8 HOME
REF
(SEE SHT 1) SEE DETAIL R
(SEE SHT 3) VIEW D-D
D POWER
(REF SHT 1) D
D 100 2X
4.
SCREWS WITHOUT LOCK WASHERS.
SEE WIRE TABLES (SHEET 4) FOR
106 4X HARNESS TERMINATIONS.
C C
5 APPLY ITEM 84 AS SHOWN.
99
F 6 APPLY LUBRICANT, ITEM 114 , (NSK-2),
(SEE SHT 1) TO ID OF ROLLER TRACK
63
(8.50)
F PRIOR TO INSERTING ROLLERS INTO TRACK.
A
23
8
(4.00) TABULATION
103
B DASH NO. DESCRIPTION B
(2.00)
-01 MIRROR FINISH, RIGHT (AS SHOWN)
-02 MIRROR FINISH, LEFT (MIRROR IMAGE)
109
105 -03 #4 FINISH, RIGHT (AS SHOWN)
2X -04 #4 FINISH, LEFT (MIRROR IMAGE)
! CAUTION
VIEW AA-AA
MECHANICALPINCH
9
POINTS.WILLRESULT
INBODILYINJURY
QTY MATERIAL
IFPROTECTIVECOVER
ITEM PART NUMBER DESCRIPTION SPECIFICATION
ISREMOVED.
REQD
PARTS LIST
ITEM 20, 90 REMOVED UNLESS OTHERWISESPECIFIED CONTRACTNO.
FOR CLARITY
DIMENSIONS AREININCHES.
TOLERANCESARE:
- TECHNOLOGIES, INC.
FRACTIONS DECIMALS ANGLES
(REF SHT 1) - - -
.XX
.XXX
-
-
- APPROVALS DATE
MATERIAL DRAWN LPT ASSEMBLY,
A
- -
MAGILL 9/13/96
(SUB-BASE)
SEE B.O.M.
CHECKED REVERSE PPLT A
N/R LPT
AA
FINISH E.CORTEZ 11/15/96
(SUB-BASE) NEXT ASSY
N/R DES.ENGR. SIZE CAD FILENAME DWG.NO. REV.
PRODUCT
MFG.ENGR.
M.NG 11/15/96
E A4371E1D 9700-4371-XX D
FIRST USED ON DO NOT SCALE DRAWING A.TAHERI 11/15/96 SCALE 1/2 SHEET 1 OF 4
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICETO ALL PERSONSRECEIVINGTHIS CONFIDENTIALDRAWING: REVISIONS
Reproduction ForbiddenwithoutthespecificwrittenpermissionofAsyst
TechnologiesInc.,Fremont,California. thisdrawingisonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
issuedandneitherreceiptnorpossessiontherofconfersortransfers
any rightin,orlicensetousethesubjectmatterofthedrawingorany - - SEE SHEET 1 - -
designsortechnicalinformationshowntheron,oranyrighttoreproduce
thedrawingoranyparttherof,exceptformanufacturebyvendorsfor
Asyst Technologies,Inc.and formanufactureunderthecorporation's
H writtenlicense. Norighttoreproducethisdrawingisgrantedforthe
subjectmattertherofunlessbywrittenagreementwithorwritten
H
permissionfromtheCompany. TECHNOLOGIES,INC.
79 3X
48761KATORD.
FREMONT, C A . 9 4 5 3 8
28 MODEL:
55
PARTNO.:
SERIALNO.:
MANUFACTURED:
8X 57
PRODUCTCOMPLIESWITHRADIATIONPERFORMANCE
STANDARDS21CFRSUBCHAPTERJ
35
3
25
40 (SEE
G 2X 56 SHT 2)
G G 54 4X
G
26
8
THREAD
ITEM 32 THRU
ROLLERS
IN ITEMS
6
1 AND 2
4 LOCATIONS
12
REF 2
4 REF
F F
7 91
DETAIL N
PODIN
POWER READY PLACE
(REF SHT 1)
VIEW B-B
(REF SHT 1)
110
2X 130
E E
86 2X
N
SEE DETAIL
(SEE SHT 2)
REMOVE PAINT ON THIS BOSS OF
PORT DOOR PRIOR TO ASSY.
POSITION WHEEL
7 92 IN TRACK IN
COLUMN 69
1 76
2X 50
D VIEW E-E 4X 78 D
.030 ±.010 (REF SHT 1)
4X 66
4
4X 71
48 8X 49 3X
44 2X
2 REF 66 3X
1 REF 71 3X
30
98
3X 130 43 2X
C ADJUST UNTIL ITEM 4 C
IS LEVEL WITH PORT
J 7 96
PLATE (PART OF ITEM 1 )
BEFORE TIGHTENING
ITEM 49 TORQUE TO
P53
(SEE SHT 3) 2X 50
K 20 IN-LBS.
(SEE SHT 3)
2 BOARD E1
(SEE SHEET 4)
SEE VIEW L
B (SEE SHT 3) (SEE SHT 3) B
J1
T T J3 63
66
4X
4X
J
71 4X
K
ITEM PART NUMBER DESCRIPTION
M
REQD SPECIFICATION
5 SEE VIEW
H H
PARTS LIST
UNLESSOTHERWISESPECIFIED CONTRACT NO.
(SEE SHT 3) DIMENSIONSAREININCHES.
TOLERANCESARE:
-
FRACTIONS DECIMALS ANGLES TECHNOLOGIES, INC.
.XX -
- - - .XXX -
- APPROVALS DATE
22 8 - -
MATERIAL DRAWN LPT ASSEMBLY,
MAGILL 9/13/96
A 85
SEE SHEET 1
CHECKED REVERSE PPLT A
FIT BOTTOM FLANGE SEESHEET 1 SEE SHEET 1 FINISH E.CORTEZ 11/15/96
INTO BASE PLATE AND NEXT ASSY PRODUCT
SEE SHEET 1 DES.ENGR. SIZE CAD FILE NAME DWG.NO. REV.
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICETO ALLPERSONSRECEIVINGTHISCONFIDENTIALDRAWING: REVISIONS
Reproduction ForbiddenwithoutthespecificwrittenpermissionofAsyst
TechnologiesInc.,Fremont,California. thisdrawing is only conditionally ZONE REV. DESCRIPTION APPROVED DATE
issued andneitherreceiptnorpossessiontherofconfersortransfers
any right in, orlicensetousethesubjectmatterofthedrawingorany - - SEE SHEET 1 - -
designsortechnicalinformationshowntheron,oranyrighttoreproduce SHOWN WITH (BLUE)
thedrawingoranyparttherof,exceptformanufacturebyvendorsfor
CABLE G1 COVER REMOVED (RED)
H H
Asyst Technologies, Inc.andformanufactureunderthecorporation's
writtenlicense. Norighttoreproducethisdrawingisgrantedforthe
subjectmattertherofunlessbywrittenagreementwithorwritten
VIEW M
permissionfromtheCompany.
POWER SUPPLY A5
P7
CPU ASSEMBLY
(REF SHT 2) (+) (-)
REF 2 + -
X
P59 P60
MOTORG MOTORT MOTORV MOTORR
CABLE B3 TB1
REINSTALL
BOARD A4 J3
BOARD A3 P2
BOARD B1 J2 J5
J1
J1
P1
P3
F 8 REF F
ENET
12 REF BOARD A2
30 REF
VIEW L
PARALLEL SERIAL3/SERIAL4 SERIAL1/SERIAL2
FLOPPY SCSI
UTIL IDE
P5
BOARD B2 2X .80 .06
ARM SERVO ASSEMBLY P10 J4
P16
(UNDERNEATH)
SHOWN WITH COVER REMOVED
(REF SHT 2) REMOVE COVER TO GAIN GRN/YEL-TERM 1
ACCESS TO B2/SERIAL JACK,
THEN REINSTALL
P20
(REF SHT 4)
SEE DETAIL
(SEE SHT 4)
X
REF 1
{.50}
101
{.50}
{1.00} Z
108 {.75}
2X 83
9 66 31
H
REF
2X 87
71 REF 84
4X 50
D D
5 4X 66 Z
CABLE F1
4X 71
GUIDE RAIL
P6P6
VIEW T-T
MODULE C2
(REF SHT 2)
DETAIL R
SCALE: 1/1 GND BLOCK H3
(REF SHT 1) SEE DETAIL P-P
(SEE SHT 4)
C VIEW Y C
ITEM 14 HOST
REF 3
SCALE: 2/1
(REF SHT 4)
EQUIP AUX2
POWER
SAM AUX1 PARALLEL/
Y-CABLE
INTERLOCK
FROM
REF 1
MINIENVIRONMENT
CABLE C4
LAN JACK BOARD D1
REF SHIELD FROM CABLE\PMOUNT TO 6-32 PEMNUT
ITEM 3
TB2
TB1
B TB2 B
RE V_
9700-4291-01
J61
P1 P59
BOARD C1
FRAME ASSEMBLY
TB1
82
PANEL D2
J61 P1 P59 J5 J7
J6 J10
J20
QTY DESCRIPTION MATERIAL
ITEM PART NUMBER
GRN/YEL TERM REQD
PARTS LIST
SPECIFICATION
TOLERANCES ARE:
- TECHNOLOGIES, INC.
FROM
VIEW K-K
9700-4072-01
REV_
FRACTIONS DECIMALS ANGLES
VIEW J-J
VENDOR_ .XX -
MINIENVIRONMENT - - - .XXX -
- APPROVALS DATE
CABLE C3 - -
MATERIAL DRAWN LPT ASSEMBLY,
MAGILL 9/13/96
A I/O PANEL
SEE SHEET 1
REVERSE PPLT A
MINIENVIRONMENT SEE SHEET 1 SEE SHEET 1 FINISH
CHECKED
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICE TOALLPERSONSRECEIVINGTHISCONFIDENTIALDRAWING: REVISIONS
ReproductionForbiddenwithoutthespecificwrittenpermissionofAsyst
TechnologiesInc.,Fremont,California. thisdrawingisonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
issued and neitherreceiptnorpossessiontherofconfersortransfers
anyrightin,orlicensetousethesubjectmatterofthedrawingorany - - SEE SHEET 1 - -
designsortechnicalinformationshowntheron,oranyrighttoreproduce
the drawingoranyparttherof,exceptformanufacturebyvendorsfor
AsystTechnologies,Inc.andformanufactureunderthecorporation's
H written license. Norighttoreproducethisdrawingisgrantedforthe
subject mattertherofunlessbywrittenagreementwithorwritten
H
I/0 PANEL WIRE TABLE PART OF
permission from theCompany.
ITEM 3
FROM (CONN. LABEL, TO (JACK, PLUG,
ITEM NO. PART NO. WIRE COLOR, ETC. ) TERMINAL, ETC.)
FRAME WIRE TABLE ITEM 3 DETAIL 'W' 9700-4080-01 P7 D1/J7 Y-CABLE WIRE TABLE ITEM 14
REF 9700-4081-01 P8 D1/J8
FROM (CONN. LABEL, TO (JACK, PLUG, FROM (CONN. LABEL, TO (JACK, PLUG,
ITEM NO. PART NO. REF 6900-1282-01 A1/J7 D2/LAN JACK ITEM NO. PART NO.
WIRE COLOR, ETC. ) TERMINAL, ETC.) WIRE COLOR, ETC. ) TERMINAL, ETC.)
D3/J20 A6/P20
RED RING TERM (1) A5/(+) 3 9700-4373-XX 8 9700-4346-01 P6B F1/J6B
3 9700-4373-XX D3/GRN-YEL RING TERM A5/FG
BLUE RING TERM (2) A5/(-) DETAIL 'W' 9700-4080-01 P6A F1/J6A
7 9700-4079-01
J2
GRAY RING TERM
A4/P2
A5/RC
ITEM NO. PART NO.
FROM (CONN. LABEL,
WIRE COLOR, ETC. )
TO (JACK, PLUG,
TERMINAL, ETC.) I/O CABLE WIRE TABLE ITEM 14
WHITE RING TERM A5/RCG P5 C1/J5 FROM (CONN. LABEL, TO (JACK, PLUG,
ITEM NO. PART NO. WIRE COLOR, ETC. )
DETAIL 'W' 9700-4080-01 P11 A1/J11 7 9700-4079-01 P22 C3/J22 TERMINAL, ETC.)
J5 A4/P5 P1 J1 14 9700-4109-01 J6A G1/P6A
REF 9700-4081-01 P13 A1/J13 REF 9700-3724-02 P3 C1/J3 DETAIL 'W' 9700-4080-01 TEST N/C
P2 A2/J2 P6 C1/J6
13 9700-4108-01
12 9700-4347-01 P3 A4/P3 P7 C1/J7
13 9700-4108-01 P3 A3/J3 13 9700-4108-01 RING TERM. CHASSIS GND
F F
14 9700-4109-01 P6 A3/J6 C3/P10 C1/J10
REF 6900-1282-01 - A1/J7 C4/P59 H1/J59
5 9700-3970-XX A6/P20 D3/J20 C4/P1 H1/J1
1 9700-4351-XX
C4/J61 H1/P61
ARM SERVO WIRE TABLE ITEM 2 C4/TB1 MOTOR 1 (RED) BASE GROUNDING BLOCK PART OF
D 7 REF D
TO BE
4X 82 83 4X
VIEW H-H CONNECTED
TO P/S
4X 89 ITEM 37 OF FRAME ASSY\P9700-4464-01
(REF SHT 2) : STEP 1
WIRE TB1 (BLK)
83 4X
SEE BASE GROUNDING
BLOCK WIRE LIST 41 2X 88
78 4X 50
J61 66 4X 66
71 4X 71
C DETAIL P C
(REF SHT 3)
5X
SCALE: 2/1 151 ITEM 3 OF FRAME ASSY
7 ENSURE THAT ITEMS 91 , 92 , AND 96 DO (REF SHT 4) TO P/S
NOT INTERFERE WITH ANY COMPONENTS ON 15 -02 ONLY
FULL TRAVEL.
Y
8 FOR -01 AND -02 VERSIONS ONLY:
PARTIALLY PEEL BACK PROTECTIVE COVERING
11 APPLY CAUTION OR DANGER LABEL THAT COMES
VIEW H-H
FROM ITEMS 20 , 21 , 22 , 23 , 24 , AND 26 , SUPPLIED WITH PORT PLATE ASSY. (REF SHT 2) : STEP 2
J1 Y
B WITH FINGERS ONLY, WHERE REQUIRED TO (SEE SHT 4) B
COMPLETE ASSEMBLY. DO NOT USE KNIFE, 12 APPLY LASER SERIAL NUMBER LABEL THAT COMES
RAZOR BLADE, OR ANY OTHER TOOL TO CUT SUPPLIED WITH PORT PLATE ASSY JUST BEFORE DETAIL X
AWAY PROTECTIVE COVERING AS THIS WILL UNIT IS MOVED TO SHIPPING.
SCALE: 1/1
MAR THE MIRROR FINISH. RE-ADHERE THIS
(REF SHT 3)
PROTECTIVE COVERING, WHERE POSSIBLE. 13 SECURE CABLE TIES, ITEM 89 AFTER ALL CABLES
AFTER ASSEMBLY IS COMPLETE. FROM STEPS 1 & 2 ARE ROUTED.
9 REMOVE EXISTING FASTENING HARDWARE AND REPLACE 14. VERIFY ASSY IS BUILT PER DWG AND CHECK FOR DAMAGE. QTY MATERIAL
ITEM PART NUMBER DESCRIPTION
REQD SPECIFICATION
WITH THE HARDWARE SHOWN. PARTS LIST
15. IDENTIFY PART PER MARKING METHOD 12 OF UNLESSOTHERWISESPECIFIED CONTRACT NO.
ASYST CORPORATE PROCEDURE 2000-0311-01. DIMENSIONSAREININCHES.
MFG. ENGR.
E A4371E4D 9700-4371-XX D
FIRST USED ON DO NOT SCALE DRAWING SCALE 1/2 SHEET 4 OF 4
8
8 7 6 5 4 3 2 1
Load Port Transfer™ System 2150 / 2200 Technical Manual
32
43 REF
20 10 3X 30
17 2X 24
31 53
33
A 19
REF 42
A
32
6
G G
9700-4312-01 9700-4312-01
REV_ REV_
VENDOR_ VENDOR_
F F
E E
3X 61 20 28
20
13
5
B 3X 62
31
2X
30
THRU ITEM 9
9 22 53
27
3X, FROM
30 FARSIDE
32
D D
11
9X, FROM
24 14
7 FARSIDE
12
C C
SECTION B-B
RIGHT
B B
NOTES: UNLESS OTHERWISE SPECIFIED
MFG. ENGR.
B.CARLSON 6/4/97
E A4464E1A 9700-4464-XX A
FIRST USED ON DO NOT SCALE DRAWING G.KOUBIAR 6/9/97 SCALE 1/2 SHEET 1 OF 5
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICE TOALLPERSONSRECEIVINGTHISCONFIDENTIALDRAWING: REVISIONS
ReproductionForbiddenwithoutthespecificwrittenpermissionofAsyst
18
TechnologiesInc.,Fremont,California. thisdrawingisonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
issued and neitherreceiptnorpossessiontherofconfersortransfers
any right in, orlicensetousethesubjectmatterofthedrawingorany . SEE SHEET 1 . .
G C 34
designsortechnicalinformationshowntheron,oranyrighttoreproduce
thedrawingoranyparttherof,exceptformanufacturebyvendorsfor
Asyst Technologies, Inc.andformanufactureunderthecorporation's
H written license. No righttoreproducethisdrawingisgrantedforthe 2X 51 H
subjectmattertherofunlessbywrittenagreementwithorwritten
permissionfrom theCompany. 20 16 36
52 2X
G G
58
F F
J24 P24
J20
4
H G C H 22 4X 2
8 56
20 5X 2X 29
J7
E 3 E
J8
3
25
55
SNAP TABS INTO 30 4X
SEE DETAIL J 15 4X TAB
SLOTS IN ITEM 3 32
13 REF
24
D 24 REF 2X D
4X, FROM
FARSIDE 24 32
C C
16 FARSIDE
22 36 2X REF 1
VIEW A-A
34 2X
RIGHT
B B
22
-01 SHOWN
PARTS LIST
UNLESS OTHERWISESPECIFIED CONTRACT NO.
DIMENSIONSAREININCHES.
TOLERANCES ARE:
FRACTIONS DECIMALS ANGLES TECHNOLOGIES, INC.
.XX .
. .
VIEW C-C
.XXX . APPROVALS DATE
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICE TOALLPERSONSRECEIVINGTHISCONFIDENTIALDRAWING: REVISIONS
ReproductionForbiddenwithoutthespecificwrittenpermissionofAsyst
TechnologiesInc.,Fremont,California. thisdrawingisonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
issued and neitherreceiptnorpossessiontherofconfersortransfers
anyrightin,orlicensetousethesubjectmatterofthedrawingorany
. SEE SHEET 1 . .
designsortechnicalinformationshowntheron,oranyrighttoreproduce
the drawingoranyparttherof,exceptformanufacturebyvendorsfor
AsystTechnologies,Inc.andformanufactureunderthecorporation's
H written license. Norighttoreproducethisdrawingisgrantedforthe
subject mattertherofunlessbywrittenagreementwithorwritten
H
permission from theCompany.
12
7
G G
SECTION E-E 24
9X, FROM
FARSIDE 14
LEFT
11
F F
5
27
3X, FROM
30 FARSIDE
32 9
3X 62
E 31
2X
30
THRU ITEM 9 13
22 53
E 20 3X
E
61 20 28
E
D D
C C
9700-4312-01 9700-4312-01
REV_ REV_
VENDOR_ VENDOR_
19 REF 42
D 32 D
17 2X REF
20 43 24
10 3X 30
31 3X 30
53
B 32 B
33
-02 SHOWN
LEFT
QTY DESCRIPTION MATERIAL
ITEM REQD PART NUMBER SPECIFICATION
PARTS LIST
UNLESSOTHERWISESPECIFIED CONTRACT NO.
DIMENSIONSAREININCHES.
TOLERANCESARE:
FRACTIONS DECIMALS ANGLES TECHNOLOGIES, INC.
.XX .
. .
.XXX . APPROVALS DATE
MATERIAL DRAWN FRAME ASSEMBLY
STEVE
A SEE SHEET 1
A
12/17/97
CHECKED LPT 2150
SEE SHEET 1 SEE SHEET 1 B.CARLSON
FINISH 6/4/97
SEE SHEET 1 DES. ENGR. SIZE CAD FILE NAME DWG.NO. REV.
NEXT ASSY PRODUCT B.CARLSON
MFG. ENGR.
6/4/97
E A4464E3A 9700-4464-XX A
FIRST USED ON DO NOT SCALE DRAWING G.KOUBIAR 6/9/97 SCALE 1/2 SHEET 3 OF 5
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICE TOALLPERSONSRECEIVINGTHISCONFIDENTIALDRAWING: REVISIONS
ReproductionForbiddenwithoutthespecificwrittenpermissionofAsyst
TechnologiesInc.,Fremont,California. thisdrawingisonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
issued and neitherreceiptnorpossessiontherofconfersortransfers
anyrightin,orlicensetousethesubjectmatterofthedrawingorany . SEE SHEET 1 . .
designsortechnicalinformationshowntheron,oranyrighttoreproduce
the drawingoranyparttherof,exceptformanufacturebyvendorsfor
AsystTechnologies,Inc.andformanufactureunderthecorporation's
H written license. Norighttoreproducethisdrawingisgrantedforthe
subject mattertherofunlessbywrittenagreementwithorwritten
H
permission from theCompany.
LEFT
G G
22
9700-4312-01 9700-4312-01
REV_ REV_
VENDOR_ VENDOR_
22
PENDT
TEACH LAN AC POWER
F F
24
24 REF 2X
32
4X, FROM
24 13 REF
FARSIDE
4X TAB
E E
SLOTS IN ITEM 3 25
15
SNAP TABS INTO 30 4X
J8 32
5X J7
20
8 56
3
2X 29
3
F 22 4X 2
4 J20
D D
J24
55
C C
58
B B
16 51
20 18 34
2X
F 36
2X 52
-02 SHOWN
QTY DESCRIPTION MATERIAL
ITEM REQD PART NUMBER SPECIFICATION
PARTS LIST
UNLESSOTHERWISESPECIFIED CONTRACT NO.
DIMENSIONSAREININCHES.
TOLERANCESARE:
FRACTIONS DECIMALS ANGLES TECHNOLOGIES, INC.
LEFT .
.XX .
.
.XXX . APPROVALS DATE
MATERIAL DRAWN FRAME ASSEMBLY
STEVE
A SEE SHEET 1
A
12/17/97
CHECKED LPT 2150
SEE SHEET 1 SEE SHEET 1 B.CARLSON
FINISH 6/4/97
SEE SHEET 1 DES. ENGR. SIZE CAD FILE NAME DWG.NO. REV.
NEXT ASSY PRODUCT B.CARLSON
MFG. ENGR.
6/4/97
E A4464E4A 9700-4464-XX A
FIRST USED ON DO NOT SCALE DRAWING G.KOUBIAR 6/9/97 SCALE 1/2 SHEET 4 OF 5
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICETO ALLPERSONSRECEIVING THIS CONFIDENTIALDRAWING: REVISIONS
Reproduction ForbiddenwithoutthespecificwrittenpermissionofAsyst
TechnologiesInc.,Fremont,California. thisdrawingisonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
issuedandneitherreceiptnorpossessiontherofconfers ortransfers
any rightin,orlicensetousethesubjectmatterofthedrawingorany
. SEE SHEET 1 . .
designsortechnicalinformationshowntheron,oranyrighttoreproduce
thedrawingoranyparttherof,exceptformanufacturebyvendorsfor
Asyst Technologies, Inc.andformanufactureunderthecorporation's
H writtenlicense. Norighttoreproducethis drawingisgrantedforthe
subjectmattertherofunlessbywrittenagreementwithorwritten
H
permission fromtheCompany.
43
40 REF
44 2X
F
42
G G
DIRECTION
OF FLOW
41 45 2X
24
40
F F
46 2X 2X 50
J24
LABEL SIDE
F FACES OUT
48 49 47
REF 37
D TO BE CONNECTED TO D
P/S AT FINAL ASSY
P24 1 REF
12 REF
37
C C
38 2X
39 2X
FOR CONTINUATION
B
SEE SECTION G-G REF 14
SECTION G-G B
-01 SHOWN
UNLESSOTHERWISESPECIFIED
DIMENSIONSAREININCHES.
PART NUMBER
CONTRACTNO.
DESCRIPTION
PARTS LIST
MATERIAL
SPECIFICATION
-01 SHOWN
TOLERANCESARE:
FRACTIONS DECIMALS ANGLES TECHNOLOGIES, INC.
.XX .
. .XXX . .
APPROVALS DATE
MATERIAL DRAWN
STEVE
FRAME ASSEMBLY
A SEE SHEET 1
A
12/17/97
CHECKED LPT 2150
SEE SHEET 1 SEE SHEET 1 B.CARLSON
FINISH 6/4/97
8 7 6 5 4 3 2 1
Load Port Transfer™ System 2150 / 2200 Technical Manual
17
55
5X TO PCB CHASSIS ASSY ITEM 7
1 82
G G
P20
2X 61
2X 119
2X 117
F F
WAFER EXCESSIVE
9 PROTRUSION SENSOR 2X 61
57 3X
SECTION A-A
18 4X
51 3X
58 2X
.25 ±.03 74 3X
E 63 2X E
74 4X 74 3X
A POWER READY
PODIN
PLACE
LPT 2150
A
32
D 23 D
HOME
8
111 2X
POWER
21 74 7X
14
C C
118
E E -01 SHOWN
61
87 4X
94
24
29
20 2X
61
61 4X TABULATION
B 87 2X B
5 -01 AS SHOWN, (RIGHT ), SHEETS 1 & 2
2X 94
61 -02 MIRROR IMAGE, (LEFT), SHEETS 3 & 4
6
FILTER
10 2X 26 REF 60 2X SEE SHEET 2 FOR NOTES
19 26
4 ITEM
QTY
REQD
PARTNUMBER DESCRIPTION
MATERIAL
SPECIFICATION
PARTS LIST
41 7 UNLESS OTHERWISESPECIFIED CONTRACT NO.
77 REF 2X 81
DIMENSIONSAREININCHES.
TOLERANCES ARE:
TECHNOLOGIES, INC.
FRACTIONS DECIMALS ANGLES
.XX .
. .XXX . .
APPROVALS DATE
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICETOALLPERSONSRECEIVINGTHISCONFIDENTIALDRAWING: REVISIONS
ReproductionForbiddenwithoutthespecificwrittenpermissionof Asyst
TechnologiesInc.,Fremont,California. thisdrawingisonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
issuedandneitherreceiptnorpossessiontherofconfersortransfers
anyrightin,orlicensetousethesubjectmatterofthedrawingorany - SEE SHEET 1 . .
designsortechnicalinformationshowntheron,oranyrighttoreproduce
thedrawingoranyparttherof,exceptformanufacturebyvendorsfor
AsystTechnologies,Inc. andformanufactureunderthecorporation's
H writtenlicense. No righttoreproducethisdrawingisgrantedforthe
subjectmatter therofunlessbywrittenagreementwithorwritten
H
permissionfromtheCompany.
44
113 51
T B2
TB1
E J61
P1 P59 NOTES: UNLESS OTHERWISE SPECIFIED E
1. MANUFACTURE PER ASYST WORKMANSHIP
STANDARDS 2000-0311-01.
J12
104 ASYST CORPORATE PROCEDURE 2000-0311-01.
40 REF 40 11. PACKAGE PER ASYST WORKMANSHIP STANDARDS
P17
103 2 3
J16
2000-0311-01, COSMETIC PART: YES X NO
J6 J8 J10
91
43
7 114 REF
QTY MATERIAL
ITEM PARTNUMBER DESCRIPTION
REQD SPECIFICATION
PARTS LIST
UNLESSOTHERWISESPECIFIED CONTRACTNO.
DIMENSIONSAREININCHES.
TOLERANCESARE:
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICETO ALL PERSONSRECEIVINGTHISCONFIDENTIALDRAWING: REVISIONS
Reproduction ForbiddenwithoutthespecificwrittenpermissionofAsyst
TechnologiesInc.,Fremont,California. thisdrawingisonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
issuedandneitherreceiptnorpossessiontherofconfersortransfers
any rightin,orlicensetousethesubjectmatterofthedrawingorany
designsortechnicalinformationshowntheron,oranyrighttoreproduce
TO CONN ITEM 104 - SEE SHEET 1 . .
H H
Asyst Technologies,Inc.and formanufactureunderthecorporation's
writtenlicense. Norighttoreproducethisdrawingisgrantedforthe
(SEE DETAIL G )
subjectmattertherofunlessbywrittenagreementwithorwritten
permission fromtheCompany.
1
P20
G G
DETAIL P
BACKSIDE
119 2X
2X 117
2X 61
WAFER EXCESSIVE
PROTRUSION SENSOR
61 2X
F F
SECTION M-M 9
32
56 2X
3X 57
3X 74
2X 58 4X 74
23 3X 74
M PODIN
M
LPT 2150
POWER READY PLACE
E E
46
LOAD 74
SECTION N-N
UNLOAD
22
18 4X
HOME
51 3X
100 8
73 111 2X
D POWER D
63 2X
7X 74 21 14
61
4X 87
94
C N N 2X 20 C
4X 61
24 118
29
61 61 2X
2X 87
5
94
6
2X 10
FILTER
B 2X 60 B
26 REF
26
19 -02 SHOWN
7 REF 77 41
69 ITEM
QTY PART NUMBER DESCRIPTION MATERIAL
REQD SPECIFICATION
PARTS LIST
2X 87
28 2
UNLESS OTHERWISESPECIFIED
DIMENSIONSAREININCHES.
CONTRACT NO.
42 2X 81 4 3 TOLERANCES ARE:
TECHNOLOGIES, INC.
2X 94 FRACTIONS DECIMALS ANGLES
77 .
.XX
.XXX
.
. .
APPROVALS DATE
MATERIAL DRAWN MINIENVIRONMENT ASSEMBLY
STEVE
A SEE SHEET 1
CHECKED
12/17/96
LPT 2150 A
SEE SHEET 1 SEE SHEET 1 B.CARLSON
FINISH 6/4/97
SEE SHEET 1 DES.ENGR. SIZE CAD FILENAME DWG.NO. REV.
NEXTASSY PRODUCT B.CARLSON
MFG. ENGR.
6/4/97
E A4465E3C 9700-4465-XX C
FIRST USED ON DO NOT SCALE DRAWING G.KOUBIAR 6/9/97 SCALE 1/2 SHEET 3OF4
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICE TOALLPERSONSRECEIVINGTHISCONFIDENTIALDRAWING: REVISIONS
ReproductionForbiddenwithoutthespecificwrittenpermissionofAsyst
TechnologiesInc.,Fremont,California. thisdrawingisonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
issued and neitherreceiptnorpossessiontherofconfersortransfers
any right in, orlicensetousethesubjectmatterofthedrawingorany - SEE SHEET 1 . .
designsortechnicalinformationshowntheron,oranyrighttoreproduce
thedrawingoranyparttherof,exceptformanufacturebyvendorsfor
Asyst Technologies, Inc.andformanufactureunderthecorporation's
H written license. No righttoreproducethisdrawingisgrantedforthe
subjectmattertherofunlessbywrittenagreementwithorwritten
H
permissionfrom theCompany.
FROM COLOR TO
RED/BRN P17-1
LASER DIODE
BLK/VIO P17-2
WAFER PRESENCE BLK P17-3
SENSOR RED P17-4
CASSETTE SLOT BLK P17-5
6
G SENSOR RED P17-6 G
WAFER PROTRUSION BLK P17-7
SENSOR RED P17-8
BRN P17-13
ELEVATOR LIMITS RED P17-14
CABLE ORN P17-15
YEL P17-16
4 GRN P17-21
WHT P17-22
WAFER EXCESSIVE
PROTRUSION SENSOR BLK P17-23
F RED P17-24 F
YEL P17-10
113
E E
REF 40
D D
P21
C C
54
FROM FAN
4 REF
U1
J12
104
40
P17
103 2 3
J16
43 7
115 9
QTY DESCRIPTION MATERIAL
ITEM PART NUMBER SPECIFICATION
REQD
PARTS LIST
UNLESS OTHERWISESPECIFIED CONTRACT NO.
DIMENSIONSAREININCHES.
TOLERANCES ARE:
TECHNOLOGIES, INC.
91 FRACTIONS DECIMALS
.XX .
ANGLES
. .
.XXX . APPROVALS DATE
8 7 6 5 4 3 2 1
Load Port Transfer™ System 2150 / 2200 Technical Manual
B B
TechnologiesInc.,Fremont,California. thisdrawingisonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
issuedandneitherreceiptnorpossessiontherofconfersortransfers
A ECN N4264: PRODUCTION RELEASE JK
(SEE SHT 2) 2/2/98
any rightin,orlicensetousethesubjectmatterofthedrawingorany
designsortechnicalinformationshowntheron,oranyrighttoreproduce
thedrawingoranyparttherof,exceptformanufacturebyvendorsfor
Asyst Technologies,Inc.and formanufactureunderthecorporation's B ECN N4425 JK 6/22/98
H writtenlicense. Norighttoreproducethisdrawingisgrantedforthe
H
C C
subjectmattertherofunlessbywrittenagreementwithorwritten
permissionfromtheCompany.
32 REF
6 (SEE SHT 1)
32 A
(SEE SHT 2)
THREAD INTO
ITEM 27 , AS
SHOWN, AND
PULL TAUT 38
50
G VIEW F-F 27
2X 68 24 G
(REF SHT 1) 35
67 72 5X
50
68 2X
74 67
3X
73
TECHNOLOGIES,INC.
48761KATORD.
FREMONT, CA. 94538
MODEL:
PARTNO.:
SERIALNO.:
20 MANUFACTURED:
PRODUCTCOMPLIESWITHRADIATIONPERFORMANCE
STANDARDS21CFRSUBCHAPTERJ
REF 3
33
74 2X SECTION G-G
F SCALE: 1/1 F
(REF SHT 2)
VIEW C-C 27
(REF SHT 1) 73 2X
13 REF 9
39 AA
89 7 REF
4X
151 POWER READY
PODIN
PLACE
LPT 2150
21
E E
89 2X
CABLE FEEDTHRU
CUTOUT
12 REF LOAD
8 7 6 UNLOAD 31
(9.00) 55 4X
D
HOME
8 (3.50)
(SEE SHT 1) 30
REF
D POWER
SEE DETAIL R D
(SEE SHT 3)
VIEW D-D
(REF SHT 1)
104 37
81
NOTES: UNLESS OTHERWISE SPECIFIED
100 2X
(7.50)
(19.20) 1. MANUFACTURE PER ASYST TECHNOLOGIES
106 4X
D
WORKMANSHIP STANDARDS 2000-0311-01.
2. APPLY ADHESIVE, ASYST P/N 7500-0716-01,
TO ALL SCREWS WITHOUT LOCK WASHERS.
C 3. SEE WIRE TABLES (SHEET 4) FOR C
F
HARNESS TERMINATIONS.
99
4 APPLY ITEM 84 AS SHOWN.
(SEE SHT 1)
63
F
5 APPLY LUBRICANT, ASYST P/N 7500-2004-01
(NSK-2), ITEM 90 TO ID OF ROLLER TRACK
(8.50) PRIOR TO INSERTING ROLLERS INTO TRACK.
A
23
6 ENSURE THAT ITEMS 91 , 92 , AND 96 DO
NOT INTERFERE WITH ANY COMPONENTS ON
FULL TRAVEL.
103
B NOTES CONTINUED ON SHEET 4 OF 4
B
(4.00)
(2.00)
TABULATION
109
105 -01 AS SHOWN (RIGHT)
2X -02 MIRROR IMAGE (LEFT)
! CAUTION
MECHANICALPINCH
8
POINTS.WILLRESULT
INBODILYINJURY
QTY DESCRIPTION MATERIAL
IFPROTECTIVECOVER
ISREMOVED. ITEM REQD PART NUMBER SPECIFICATION
PARTS LIST
TECHNOLOGIES, INC.
ITEM 20, 99 REMOVED .
.XX
.XXX
.
.
.
APPROVALS DATE
FOR CLARITY MATERIAL DRAWN FINAL ASSEMBLY,
A (REF SHT 1) (SUB-BASE) SEE BOM STEVE 12/17/96
LPT 2150 A
CHECKED
FINAL LPT 2150
AA
FINISH B.CARLSON 6/4/97
N/R DES.ENGR. SIZE CAD FILE NAME DWG.NO. REV.
NEXT ASSY PRODUCT
MFG.ENGR.
B.CARLSON 6/4/97
E A4466E1B 9700-4466-XX B
FIRST USED ON DO NOT SCALE DRAWING G.KHOUBIAR 6/9/97 SCALE 1/2 SHEET 1 OF 4
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICE TOALLPERSONSRECEIVING THISCONFIDENTIAL DRAWING: REVISIONS
ReproductionForbidden withoutthespecificwrittenpermissionofAsyst
TechnologiesInc.,Fremont,California. thisdrawing isonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
issuedand neither receipt norpossessiontherofconfersortransfers
any right in, orlicensetousethesubjectmatterofthedrawingorany
. SEE SHEET 1 . .
designsortechnicalinformationshowntheron,oranyrighttoreproduce
the drawingoranyparttherof,exceptformanufacturebyvendorsfor
AsystTechnologies,Inc.andformanufactureunderthecorporation's
H written license. Norighttoreproducethisdrawingisgrantedforthe
subject mattertherofunlessbywrittenagreementwithorwritten
H
permission from theCompany.
28 79 3X
8X 57
36
3
58
40 (SEE
G 2X 56 SHT 2)
G G 25
55 5X
G
26
THREAD
ITEM 32 THRU
ROLLERS
IN ITEMS
1 AND 2 5
4 LOCATIONS
REF 2
F F
10
91
DETAIL N 6
SCALE: 1/1
(REF SHT 2)
VIEW A-A .030±.010 111
(REF SHT 1)
110
2X 50
VIEW B-B
E (REF SHT 1) E
12
1
86 2X
13 8
7
SEE DETAIL
(SEE SHT 2)
N POSITION WHEEL
92 IN TRACK IN
6
COLUMN
2X 50
D P3 P2 P6B
P3
D
.030 ±.010
48 8X 7 REF
2 REF TO BE
CONNECTED
1 REF VIEW H-H TO P/S
114 (REF SHT 2) : STEP 1
98
ITEM 37 OF FRAME ASSY
3X 50 9700-4464-01
C C
6 96
J 41
(SEE SHT 3) 2X 50 78
113
K 66
(SEE SHT 3)
71
2
112 SEE VIEW L
(SEE SHT 3) 11
B (SEE SHT 3) 89 B
J1 5X
VIEW H-H
T T
151 TO P/S
J3 63
(REF SHT 2) : STEP 2 15 -02 ONLY
66 4X
ITEM 3 OF FRAME ASSY
J
71
K
QTY PARTNUMBER DESCRIPTION
ITEM
M
REQD SPECIFICATION
5 SEE VIEW
H H
PARTS LIST
UNLESS OTHERWISESPECIFIED CONTRACT NO.
(SEE SHT 3) DIMENSIONSAREININCHES.
TOLERANCES ARE:
FRACTIONS DECIMALS ANGLES TECHNOLOGIES, INC.
.XX .
22 . .XXX . .
APPROVALS DATE
MATERIAL DRAWN FINAL ASSEMBLY,
A FIT BOTTOM FLANGE SEE SHEET 1 STEVE 12/17/96
LPT 2150 A
85 INTO BASE PLATE AND SEE SHEET 1 SEE SHEET 1
CHECKED
B.CARLSON
102 SNAP INTO PLACE
FINISH
SEE SHEET 1 DES. ENGR.
6/4/97
SIZE CAD FILENAME DWG.NO. REV.
NEXT ASSY PRODUCT
MFG.ENGR.
B.CARLSON 6/4/97
E A4466E2B 9700-4466-XX B
FIRST USED ON DO NOT SCALE DRAWING G.KHOUBIAR 6/9/97 SCALE 1/2 SHEET 2 OF 4
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICETOALLPERSONSRECEIVINGTHISCONFIDENTIALDRAWING: REVISIONS
Reproduction ForbiddenwithoutthespecificwrittenpermissionofAsyst
Technologies Inc., Fremont,California. thisdrawing isonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
issuedandneitherreceiptnorpossessiontherofconfersortransfers
anyrightin,orlicensetousethesubjectmatterofthedrawingorany
. SEE SHEET 1 . .
designsortechnicalinformationshowntheron,oranyrighttoreproduce
thedrawingoranyparttherof,exceptformanufacturebyvendorsfor SHOWN WITH (BLUE)
H
AsystTechnologies,Inc.andformanufactureunderthecorporation's
written license. Norighttoreproducethisdrawingisgrantedforthe
subjectmattertherofunlessbywrittenagreementwithorwritten
COVER REMOVED (RED) H
permission fromtheCompany.
POWER SUPPLY A5
(+) (-)
REF 2 VIEW M + -
CPU ASSEMBLY
TO DRIVE
FG
(REF SHT 2)
REF 5 COLUMN FAN
X
P59 P60
MOTORG MOTORT MOTORV MOTORR
CABLE B3
TB1
TB2 J4
SEE DETAIL
REMOVE COVER TO ALLOW (SEE SHT 4)
CABLE ROUTING, THEN
REINSTALL
BOARD A4
J1
J3
BOARD A3 P2
BOARD B1 J2 J5
J1
J1
P1
P3
F 8 REF F
BOARD A2
ENET
30 12 REF
VIEW L
J6 SERIAL3/SERIAL4 SERIAL1/SERIAL2
P5
THEN REINSTALL
J5 GRN/YEL TERM
END OF SPRINGS 84 4
REF SHIELD FROM CABLE
E AT HOLES MOTOR ASSY H2 E
MOUNT TO MASKED 6-32 HOLE
CABLE A6
SEE DETAIL X
.50 (SEE SHT 4)
1 REF 1.00
101 .50
CABLE G1
.75
108
31 REF
7 66 P7
REF 84
71
D D
CABLE F1
GUIDE RAIL
P6
MODULE C2
VIEW T-T
DETAIL R DETAIL W (REF)
I/O CABLE
SCALE: 1/1 GND BLOCK H3
(REF SHT 1) SEE DETAIL P-P
(SEE SHT 4)
C REF 3 C
ITEM 14 POWER
HOST
EQUIP AUX2
Y-CABLE
AUX1 PARALLEL/
SAM
INTERLOCK
LAN JACK
BOARD D1
FROM REF 1
MINIENVIRONMENT
CABLE C4
REF SHIELD FROM CABLE
MOUNT TO 6-32 PEMNUT
ITEM 3
TB2
TB1
B RE V_
9700-4291-01
J61
P1 P59
TB2 BOARD C1 PANEL D2 B
FRAME ASSEMBLY
TB1 CABLE D3
J20
J61 P1 P59 J5 J7
J6 J10
GRN/YEL TERM
QTY PART NUMBER DESCRIPTION MATERIAL
ITEM REQD SPECIFICATION
VIEW K-K
PARTS LIST
UNLESS OTHERWISESPECIFIED CONTRACTNO.
FROM 9700-4072-01
REV_
DIMENSIONS AREININCHES.
TOLERANCESARE:
TECHNOLOGIES, INC.
VENDOR_
FRACTIONS DECIMALS ANGLES
MINIENVIRONMENT
VIEW J-J I/O PANEL .XX .
. .
.
CABLE C3 .XXX APPROVALS DATE
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICETOALLPERSONSRECEIVINGTHISCONFIDENTIALDRAWING: REVISIONS
Reproduction Forbidden without the specificwrittenpermission ofAsyst
TechnologiesInc.,Fremont,California. thisdrawingisonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
issuedandneitherreceiptnorpossessiontherofconfersortransfers
any rightin,orlicensetousethesubjectmatterofthedrawingorany . SEE SHEET 1 . .
designsortechnicalinformationshowntheron,oranyrighttoreproduce
thedrawingoranyparttherof,exceptformanufacturebyvendorsfor
H H
Asyst Technologies, Inc.andformanufacture underthecorporation's
writtenlicense. Norighttoreproducethisdrawingisgrantedforthe
subjectmattertherofunlessbywrittenagreementwithorwritten
permissionfromtheCompany.
PART OF
FRAME WIRE TABLE ITEM 3 I/0 PANEL WIRE TABLE ITEM 3 Y-CABLE WIRE TABLE ITEM 14
FROM (CONN. LABEL, TO (JACK, PLUG, FROM (CONN. LABEL, TO (JACK, PLUG, FROM (CONN. LABEL, TO (JACK, PLUG,
ITEM NO. PART NO. ITEM NO. PART NO. ITEM NO. PART NO.
WIRE COLOR, ETC. ) TERMINAL, ETC.) WIRE COLOR, ETC. ) TERMINAL, ETC.) WIRE COLOR, ETC. ) TERMINAL, ETC.)
H1/CN1 C4/CN1 DETAIL W 9700-4080-01 P7 D1/J7 8 9700-4346-01 P6B F1/J6B
H2/CN1 B3/CN1 REF 9700-4081-01 P8 D1/J8 DETAIL W 9700-4080-01 P6A F1/J6A
3 9700-4350-XX
RED RING TERM (1) A5/(+) REF 6900-1282-01 A1/J7 D2/LAN JACK
BLUE RING TERM (2) A5/(-) D3/J20 A6/P20
3 9700-4350-XX
D3/GRN-YEL RING TERM A5/FG
G G
CPU WIRE TABLE ITEM 5 MINIENVIRONMENT WIRE TABLE ITEM 1 I/O CABLE WIRE TABLE ITEM 14
FROM (CONN. LABEL, TO (JACK, PLUG, FROM (CONN. LABEL, TO (JACK, PLUG, FROM (CONN. LABEL, TO (JACK, PLUG,
ITEM NO. PART NO. ITEM NO. PART NO. ITEM NO. PART NO.
WIRE COLOR, ETC. ) TERMINAL, ETC.) WIRE COLOR, ETC. ) TERMINAL, ETC.) WIRE COLOR, ETC. ) TERMINAL, ETC.)
J2 A4/P2 P5 C1/J5 14 9700-4109-01 J6A G1/P6A
7 9700-4079-01 GRAY RING TERM A5/RC 7 9700-4079-01 P22 C3/J22 DETAIL W 9700-4080-01 TEST N/C
WHITE RING TERM A5/RCG P1 J1
DETAIL W 9700-4080-01 P11 A1/J11 P6 C1/J6
13 9700-4108-01
J5 A4/P5 P7 C1/J7
F 10 9700-4081-01 P13 A1/J13 C3/P10 C1/J10 F
P2 A2/J2 C4/P59 H1/J59
12 9700-4347-01 P3 A4/P3 C4/P1 H1/J1 BASE GROUNDING BLOCK PART OF
1 9700-4351-XX
13 9700-4108-01 P3 A3/J3 C4/J61 H1/P61 WIRE LIST ITEM 3
14 9700-4109-01 P6 A3/J6 C4/TB1 MOTOR 1 (RED)
FROM (CONN. LABEL, TO (JACK, PLUG,
REF 6900-1282-01 - A1/J7 C4/TB2 MOTOR 2 (BLK) ITEM NO. PART NO.
WIRE COLOR, ETC. ) TERMINAL, ETC.)
5 9700-3970-XX A6/P20 D3/J20
8 9700-4346-01 GRN RING TERM H3
13 9700-4108-01 GRN RING TERM H3
A6 (GRN/YEL TERM) H3
3 9700-4350-XX
ITEM 2 D3 (GRN/YEL TERM) H3
ARM SERVO WIRE TABLE
E FROM (CONN. LABEL, TO (JACK, PLUG, E
ITEM NO. PART NO.
WIRE COLOR, ETC. ) TERMINAL, ETC.)
4X 82 83 4X
8 9700-4346-01 P1 B2/SERIAL JACK
12 9700-4347-01 P1 B1/J1
83 4X B3/P59 H2/J59
SEE BASE GROUNDING
B3/P1 H2/J1
BLOCK WIRE LIST
2 9700-4279-XX B3/J61 H2/P61
B3/TB1 H2/MOTOR 1 (RED)
B3/TB2 H2/MOTOR 2 (BLK)
CABLE P59
D D
(REF SHT 4) 2X 88
J61
4X 50
Z
4X 66
C NOTES: CONTINUED FROM SHEET 1 OF 4 4X 71 C
TOLERANCES ARE:
FRACTIONS DECIMALS ANGLES TECHNOLOGIES, INC.
.XX .
13. PACKAGE PER ASYST WORKMANSHIP STANDARDS . .XXX . .
APPROVALS DATE
MFG.ENGR.
B.CARLSON 6/4/97
E A4466E4B 9700-4466-XX B
FIRST USED ON DO NOT SCALE DRAWING G.KOUBIAR 6/9/97 SCALE 1/2 SHEET 4 OF 4
8 7 6 5 4 3 2 1
Load Port Transfer™ System 2150 / 2200 Technical Manual
20
D D
NOTES: UNLESS OTHERWISE SPECIFIED
10
1 4
6
11 PREPARE RESISTORS AND CAPACITORS, ITEM 72 AND 73
PER DETAIL 'B' AND INSTALL PER DETAIL 'C'. 25 67
12 TYPE 'P53' ON LABEL, ITEM 74 AND APPLY AS SHOWN. 85 2X
36
2X
13 LENGTH PRIOR TO ATTACHING ITEM 71 . 37 64
REF 72
17 USE TOOL #1000-0155-01 TO ADJUST MICRO SWITCH SETTING. 69
50
18 BEFORE INSTALLATION OF ITEM 77 :
a) REMOVE LASER DIODE FROM PROTECTIVE PACKAGING. 9
b) CUT WIRES TO APPROXIMATELY 4 INCHES FROM BACK OF LASER. 69
c) REMOVE SPANNER WRENCH, WARNING LABEL AND END CAP
FROM LASER DIODE.
d) ATTACH WARNING LABEL TO PRODUCTION RECORD.
e) BAG AND TAG SPANNER WRENCH AND END CAP FOR SHIPMENT
WITH LPT 2150. -01 SHOWN
19 USE SCOTCH TAPE TO TEMPORARY ATTACH ITEM 103 TO PORT PLATE.
QTY MATERIAL
ITEM PART NUMBER DESCRIPTION
DO NOT PERMANENTLY ATTACH LABEL UNTIL FINAL ASSY. REQD SPECIFICATION
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICE TOALLPERSONSRECEIVINGTHISCONFIDENTIALDRAWING:
REVISION
Reproduction Forbidden without the specific written permission of Asyst
TechnologiesInc.,Milpitas,California. Thisdrawingisonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
issuedandneitherreceiptnorpossessiontherofconfersortransfers
anyrightin,orlicensetousethesubjectmatterofthedrawingorany
designs or technicalinformation shown thereon, or any rightto reproduce
. SEE SHEET 1 . .
the drawing or anyparttherof,exceptformanufacture byvendorsfor
Asyst Technologies, Inc.andformanufacture under the corporation's
writtenlicense. Noright to reproducethis drawing isgranted for the
subject matterthereof unlessbywrittenagreement with or written
permission from theCompany.
D D
12
57
61
65
2X 85
4X 89
2X 79 J J
C 51 C
88 54
53 80 2X
N N 2X 94 95
26
96
91
97
30
P53
32
34
31
B 39 B
DETAIL J
DETAIL K
BACKSIDE
56
20
87 2X 21
28 86
89 2X 29
3X 82 2X
93
-01 SHOWN
86
2X QTY MATERIAL
ITEM PART NUMBER DESCRIPTION
2X 83 8 93 REQD SPECIFICATION
PARTS LIST
MFG. ENGR.
B.CARLSON 6/4/97
D A4467D2A 9700-4467-XX A
FIRST USED ON DO NOT SCALE DRAWING SCALE 1/1 SHEET 2 OF 7
G.KOUBIAR 6/9/97
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICE TO ALL PERSONS RECEIVING THIS CONFIDENTIAL DRAWING:
REVISION
Reproduction Forbidden without the specific written permission of Asyst
TechnologiesInc.,Milpitas,California. This drawingisonlyconditionally
ZONE REV. DESCRIPTION APPROVED DATE
issuedandneitherreceiptnorpossessiontherofconfersortransfers
any right in, or license to use the subjectmatter of thedrawingorany
designsortechnicalinformationshown thereon,or anyright to reproduce 6 REF 11 . SEE SHEET 1 . .
thedrawingorany part therof,exceptformanufactureby vendors for
Asyst Technologies, Inc. andformanufacture under the corporation's
written license. Norighttoreproducethis drawingisgrantedforthe
WAFER PROTRUSION SENSOR 70
subjectmatterthereofunlessbywrittenagreementwithorwritten
permission from the Company. 7
59
4X
64
17
D D
2X 39
34
SEE DETAIL 'G' 77
31
REF
18
32
SW2 39
5 2
53
81
C SEE DETAIL A 8 6 C
CASSETTE SLOT
SENSOR
7 7
39 4X
WAFER PRESENCE 4
SENSOR
7 10 4 REF
2X 70
27
59
6X 58
64
6 WAFER EXCESSIVE 7
PROTRUSION SENSOR
B B
5
DETAIL A
SQUARE NUT REMOVED
SW1 1 5 FOR CLARITY
16 15
8X 39
33
13 75 2X
14
24 3
4X 39 -01 SHOWN
90 40 4X
6X 2 38
2X 39
63 52 4X
16 ITEM
QTY
PART NUMBER DESCRIPTION
MATERIAL
53 REQD SPECIFICATION
6X 39 PARTS LIST
UNLESSOTHERWISE SPECIFIED CONTRACT NO.
A DIMENSIONS ARE IN INCHES
TOLERANCES ARE:
.
A
FRACTIONS DECIMALS ANGLES TECHNOLOGIES, INC.
.XX -
. .XXX - - APPROVALS DATE
MATERIAL
DRAWN PORT PLATE ASSEMBLY,
STEVE 12/13/97
SEE SHEET 1
LPT 2150
BOTTOM VIEW SEE SHEET 1 SEE SHEET 1 FINISH
CHECKED
B.CARLSON 6/4/97
DES. ENGR. SIZE DWG NO. REV.
NEXT ASSY PRODUCT SEE SHEET 1
MFG.ENGR.
B.CARLSON 6/4/97
D A4467D3A 9700-4467-XX A
FIRST USED ON DO NOT SCALE DRAWING SCALE 1/1 SHEET 3 OF 7
G.KOUBIAR 6/9/97
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICE TO ALL PERSONSRECEIVING THISCONFIDENTIALDRAWING:
REVISION
Reproduction Forbidden withoutthe specificwrittenpermissionofAsyst
Technologies Inc.,Milpitas,California. Thisdrawingisonlyconditionally
ZONE REV. DESCRIPTION APPROVED DATE
issued andneitherreceipt norpossessiontherof confers or transfers
anyright in,orlicense to use thesubjectmatterofthedrawingorany
designs or technical information shownthereon, or any righttoreproduce
. SEE SHEET 1 . .
the drawing or anyparttherof,except formanufacture byvendors for
Asyst Technologies, Inc. and for manufacture under the corporation's
written license. No righttoreproduce thisdrawing isgranted for the
subjectmatter thereof unless bywrittenagreement with or written
permission fromthe Company.
103 19
20
D D
SW4 17
22 19
2
23 62
2X 2X
35 64
75
40 5
4X
53 84 2X
C C
18
3X 69
66 16
3
41
4X
42 1
2 3
4
67
25
85 2X
36
2X
64
37
17 SW3
B 71 B
REF
74
6
73
REF 72
69
50
9
69
-02 SHOWN
QTY MATERIAL
ITEM PART NUMBER DESCRIPTION
REQD SPECIFICATION
PARTS LIST
UNLESS OTHERWISE SPECIFIED CONTRACT NO.
A DIMENSIONS ARE IN INCHES
TOLERANCES ARE:
.
A
FRACTIONS DECIMALS ANGLES TECHNOLOGIES, INC.
.XX .
. .XXX . . APPROVALS DATE
MATERIAL
DRAWN PORT PLATE ASSEMBLY,
STEVE 12/13/97
SEE SHEET 1
CHECKED
LPT 2150
SEE SHEET 1 SEE SHEET 1 FINISH 6/4/97
B.CARLSON
DES. ENGR. SIZE DWG NO. REV.
NEXT ASSY PRODUCT SEE SHEET 1
MFG. ENGR.
B.CARLSON 6/4/97 D A4467D4A 9700-4467-XX A
FIRST USED ON DO NOT SCALE DRAWING SCALE 1/1 SHEET 4 OF 7
G.KOUBIAR 6/9/97
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICE TO ALL PERSONS RECEIVINGTHISCONFIDENTIALDRAWING:
REVISION
Reproduction Forbidden without thespecific written permissionofAsyst
Technologies Inc., Milpitas, California. This drawing is only conditionally
ZONE REV. DESCRIPTION APPROVED DATE
issued and neither receipt nor possession therofconfersortransfers
anyright in, or license to usethesubject matter ofthedrawingorany
designs or technical information shown thereon,or anyrighttoreproduce
. SEE SHEET 1 . .
the drawingoranyparttherof,exceptformanufacturebyvendors for
Asyst Technologies, Inc. andformanufactureunderthecorporation's
written license. No right to reproduce thisdrawingis granted for the
subjectmatter thereof unlessbywrittenagreementwithorwritten
permission from theCompany.
D D
12
57
61
65
2X 85
4X 89
2X 79 J J
C C
51
88 54
53 80 2X
2X 94 95
N N 96
26
91
97 30
32
34
P53
B 31 B
39
DETAIL J
DETAIL K
BACKSIDE
56
87 2X
21
2X 3X 20 -02 SHOWN
89 82
28 86
2X
29 93 ITEM
QTY
PART NUMBER DESCRIPTION
MATERIAL
2X 83 8
REQD SPECIFICATION
PARTS LIST
86 UNLESS OTHERWISE SPECIFIED CONTRACT NO.
A 2X DIMENSIONS ARE IN INCHES
TOLERANCES ARE:
.
A
93 FRACTIONS DECIMALS ANGLES TECHNOLOGIES, INC.
92 2X .XX .
SEE DETAIL K .
MATERIAL
.XXX . .
DRAWN
APPROVALS DATE
MFG. ENGR.
B.CARLSON 6/4/97
D A4467D5A 9700-4467-XX A
FIRST USED ON DO NOT SCALE DRAWING SCALE 1/1 SHEET 5 OF 7
G.KOUBIAR 6/9/97
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICE TOALLPERSONSRECEIVINGTHISCONFIDENTIALDRAWING:
REVISION
Reproduction Forbidden withoutthe specific written permission of Asyst
Technologies Inc., Milpitas,California. This drawingisonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
issuedandneitherreceiptnorpossession therofconfersortransfers
any rightin, orlicense to use the subject matter of thedrawingorany
designsortechnical information shownthereon, or anyright to reproduce
11 . SEE SHEET 1 . .
the drawing or anyparttherof,exceptformanufactureby vendors f o r
AsystTechnologies, Inc. andformanufactureunderthecorporation's 6 REF
written license. No right to reproduce this drawingisgrantedforthe 70
subject matter thereof unless by written agreement withorwritten
permission fromthe Company. 7 WAFER PROTRUSION SENSOR
59
4X
64
17
D D
2X 39
34
SEE DETAIL 'H' 77
31
REF
18
32
SW2 39
5 2
53
81
C SEE DETAIL A 8 6 C
CASSETTE SLOT
SENSOR
7 7
39 4X
WAFER PRESENCE 4
SENSOR
7 10
2X 70
27
59
6X 58 REF
64 33 4
39 4X
6 WAFER EXCESSIVE 7
PROTRUSION SENSOR
B B
5
SW1 1 5
DETAIL A
SQUARE NUT REMOVED
FOR CLARITY
15
8X 39
75 2X 3
-02 SHOWN
14 24
13 4X
40 2X 39 16 38
2 QTY MATERIAL
90 ITEM
REQD
PART NUMBER DESCRIPTION
SPECIFICATION
6X 52 4X 6X 39 PARTS LIST
63 UNLESS OTHERWISE SPECIFIED CONTRACT NO.
A 53
DIMENSIONS ARE IN INCHES
TOLERANCES ARE:
.
A
FRACTIONS DECIMALS ANGLES TECHNOLOGIES, INC.
.XX .
. .XXX . . APPROVALS DATE
MATERIAL
DRAWN PORT PLATE ASSEMBLY,
STEVE 12/13/97
SEE SHEET 1
LPT 2150
BOTTOM VIEW SEE SHEET 1 SEE SHEET 1 FINISH
CHECKED
B.CARLSON 6/4/97
DES. ENGR. SIZE DWG NO. REV.
NEXT ASSY PRODUCT SEE SHEET 1
MFG. ENGR.
B.CARLSON 6/4/97
D A4467D6A 9700-4467-XX A
FIRST USED ON DO NOT SCALE DRAWING SCALE 1/1 SHEET 6 OF 7
G.KOUBIAR 6/9/97
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICE TO ALL PERSONS RECEIVING THIS CONFIDENTIALDRAWING:
REVISION
Reproduction Forbidden without the specific written permission o f A s y s t
Technologies Inc., Milpitas,California. Thisdrawingis onlyconditionally
ZONE REV. DESCRIPTION APPROVED DATE
issuedandneitherreceiptnorpossessiontherofconfersortransfers
anyright in,orlicense to use the subjectmatterofthedrawing or any
designsortechnicalinformationshown thereon,oranyrighttoreproduce
SWITCH -#4 SWITCH-#3 . SEE SHEET 1 . .
thedrawingoranyparttherof,exceptformanufacturebyvendorsfor
Asyst Technologies, Inc.andformanufacture under thecorporation's
written license. No right to reproduce this drawing is granted for the
(POD CONTACT) (POD CONTACT)
subject matter thereof unlessbywrittenagreementwithorwritten
permission from theCompany.
PORT LOCK MOTOR 10 ON SIDE WITH
WAFER SEATER MOTOR
D 10 BLK D
RED
9 71 48
C NO NC NC NO C P53 6X SOLDER
1.20
46 BLU (10A) APPROX WHT (2A)
WHT (12A)
47 2 A B
BRN (9A) COM
6 YEL (6A)
BRN (11A) BRN (1A)
5 BLK (5A) R 1
A B C D
4 RED (4A) SWITCH-#2 SWITCH-#1 73 2X
44
3 GRN (13A) 44 (PORT OPEN) (PORT CLOSED)
GRN (13A) GRN (3A)
2 WHT (12A) C 3
C D E F
1 BRN (11A)
NC NC
C
A B WHT (2A) 1.00/.14
E F
NO NO
PIN 1 47 R
72 2X 50 15
C D BRN (1A)
12 74 C C
C 49 14 6X C
3X SOLDER
BRN (8A)
E F GRN (3A)
45
DETAIL B DETAIL C
47
45
.50
3.00 (APPROX 1-2 TWISTS)
FINAL LENGTH
13
TO P53
QTY MATERIAL
ITEM PART NUMBER DESCRIPTION
REQD SPECIFICATION
B.CARLSON 6/4/97
SIZE
D A4467D7A
DWG NO.
9700-4467-XX
REV.
A
MFG. ENGR.
FIRST USED ON DO NOT SCALE DRAWING SCALE 1/1 SHEET 7 OF 7
G.KOUBIAR 6/9/97
8 7 6 5 4 3 2 1
Load Port Transfer™ System 2150 / 2200 Technical Manual
D D
11
4X
12
C C
3
7 2X
8 2X
B 2 B
14 6X
8 7 6 5 4 3 2 1
Load Port Transfer™ System 2150 / 2200 Technical Manual
Appendix B
TEACH PENDANT
B.0 INTRODUCTION
The quickly-attachable/detachable Teach Pendant (Asyst P/N 9600-0496-01) allows the service engineer to
perform a variety of functions. These functions include configuring the LPT interface with the Process Tool
and Host computer. The Teach Pendant configures the LPT for a large number of options including
communications options, cassette selection, and sensor enabling and disabling. Another important function is
the teaching of the Process Tool cassette landing position which entails teaching the points the LPT must
execute during the load and unload cycles.
Upon initial interface with an LPT, the Teach Pendant must be configured to communicate properly with that
LPT. This configuration is performed directly from the Teach Pendant using Setup Mode.
• System boot. During system boot, software is uploaded to perform system tasks and drive
the brakes. Motor brakes may be heard engaging or disengaging.
Emergency
Stop Switch
(ESTOP)
LCD Display
Keypad
NOTE
If it becomes necessary to enter the setup mode when the LPT is presently
powered, the following will allow entry into the Setup Mode:
1. Twist the Teach Pendant cable connector back shell counterclockwise to
unlock the connector from the LPT. Remove the cable connector.
While pressing the <MOD PT> and <ENTER> keys on the Teach Pendant,
reconnect the cable connector and turn the backshell clockwise to lock. The
Teach Pendant will enter the Setup Mode.
REQUIRED
SELECTION
19.2k
NONE
8,1
NO
YES
NO
REQUIRED
SELECTION
NO
NO
NO
YES
YES
YES
YES
REQUIRED
SELECTION
NO
OFF
YES
YES
(MAIN)
NOTE
When teaching arm movements, only one function key on the Teach
Pendant can be used at a time. When one key is pressed, all other key
presses are ignored until the first key is released. This does not apply to the
<ENTER> key.
NOTE
The Request Status messages are text messages displayed on the Teach
Pendant with the last message displayed first. To review messages, use the
PREV ITEM key.
Under Request Status, the Fetch Records file contains some bookkeeping information
relating to the LPT’s operations. It is an ASCII text file. It can be displayed through the
terminal or a connected laptop computer. The time stamp entries are: mm/dd/yy hh:mm:ss
while the count entries are totals which may range from 0 to 2,147,483,648.
The RECORDS.LOG file resides on the LPT’s drive D (NOVRAM). If records file does not
exist during the LPT’s power-on cycle, then the file is created with all numeric entries which
are zeroed and the date and time stamp entries are assigned the current date and time. This
normally occurs when the system is first powered on during manufacturing. It can also occur
after replacement of the battery-backed RAM, drive D.
The following table describes the various entries in the RECORDS.LOG file.
To access the records file entries, via the Teach Pendant, perform the following:
The Indexer variables are specified by item number as shown in table below. All items are converted
to a 16 bit value so any position counts are represented in mils.
Sub-Menus Sub-Menus
(2nd Level) (3nd Level)
DAC #0, threshold = 255
Press PREV ITEM END OF MESSAGES
WAFER SENSOR Hit ESC to exit
button to see
messages DAC #1, threshold = 255
SLOT SENSOR Hit ESC to exit
STATUS . . .
SET/RESET BRAKES . . .
NOTE
This will be the ENGAGE X BRAKE
software revision for LPT SOFTWARE PART
software loaded. Numbers
shown are only examples. NUMBER . . . DISENGAGE X BRAKE
ENGAGE Y BRAKE
L : 6006-4000-10D
DISENGAGE Y BRAKE
I : 6005-1012-10 REV. A
A : 6006-4101-10B
Press
ENTER to
S : 6016-0001-10B
activate
MOVES CONFIG . . .
ENABLE SERVO . . .
MOVES_FILE_TYPE 1
X SERVO
MOVES_FILE_REQD 1
MOTOR STATUS . . .
Y SERVO
TILT SERVO
COMM TIMEOUT . . .
PORT SERVO
NOTE
CO-ORDINATES . . . Active Menu
Selections Flash
DISABLE SERVO . . .
VERT: 0
X SERVO
HORZ: 0
Y SERVO
TILT: 1
TILT SERVO
PORT: 155
C B A PORT SERVO
C B A
ROT: AT HOME
CLOSE POD DOOR
TILT: AT HOME
OPEN HOLDDOWN LATCH
PORT: AT HOME
TERMINATE PROGRAM
ESTOP . . .
ERROR STATUS . . .
REQUEST STATUS . . . Enter to confirm
ESC to cancel / exit
ARM: NO ERROR
PORT: NO ERROR
PORT STATUS . . .
PORT SELF-TEST
VERT: SERVO ON
ROT: SERVO ON
PORT I/O STATUS
TILT: SERVO ON
PORT: SERVO ON
ARM STATUS . . .
EOM
ARM ERROR
ARM MOTOR
NOTE
Press PREV ITEM D E F
key to see messages
D F
BRAKE . . .
FETCH RECORDS . . .
PORT: CLOSE
CLOSE VTN LOG FILE
SQUAT: NO SQUAT
I O STATUS . . .
Press ENTER to activate
2: 0
3: 1 NOTE
Press PREV ITEM
4: 0 key to see messages
I O Status is for
engineering use
only. 5: 0
6: 9b
7: 1
15: 0
16: 88f9
17: 776
18: 0
19: 1
Example: Selecting Wafer Sensor Opts displays the sub-menu which has two (2) selections; enable wafer
sensor and disable wafer sensor. If the sensor is currently enabled, the item will be flashing on the display.
To change to the disable function, press <NEXT ITEM> to select the disable function and press <ENTER>
to activate the selection. Press <ESC> to exit and return to the previous menu.
Some selections will require a number to be changed. If the item requires the entry of a number, a pointer (up-
pointing arrow) will indicate the item position that can be changed. For example, if a digit is to be changed,
pressing the <NEXT ITEM> or <PREV ITEM> key will increment or decrement the digit respectively. Pressing
<ENTER>will enter the selection and move the pointer to the next digit to be changed. When the last digit has
been changed, and <ENTER> is pressed, the pointer will move to the first digit again. Press <ESC> to exit
this selection and return to the previous menu.
Sub-Menus
Sub-Menus
(2nd Level)
(3nd Level)
PICKUP POINT OPTS . . .
Sub-Menus Sub-Menus 0.50 inch height
0.75 inch height
(3nd Level) (2nd Level) 1.00 inch height
PORT ARRIVAL HT
Enter to confirm SET TOOL 1.25 inch height
1.50 inch height
ESC to cancel / exit PICKUP POSN PORT DEPARTURE HT 1.75 inch height
2.00 inch height
TOOL ARRIVAL HT 2.50 inch height
Enter to confirm SET PORT 3.00 inch height
ESC to cancel / exit PICKUP POSN 3.50 inch height
TOOL DEPARTURE HT
4.00 inch height
5.00 inch height
LOAD OPTIONS . . .
NOTE
Active Menu
SINGLE LOAD LOAD/UNLD
Selections Flash
SINGLE LOAD LOAD ONLY
SELECT PLATFORM
CASSETTE TYPE . . .
Enter to continue
ESC to backup / exit
X A
Enter to continue
SERIAL HOST OPTS . . .
ESC to backup / exit
LOCAL CONTROL
CASSETTE SLOTS . . .
CASSETTE SLOTS = 25
CASSETTE SLOTS = 26
Enter to continue
SLOT SEPARATION . . .
ESC to backup / exit
SEPARATION OF 0.188
SEPARATION OF 0.250
1000 TO 4000
Current selection
flashes SERIAL HOST
DEVICE ID=(1–29999)
ID=9000
MOVES TYPE = 1
Enter to continue
ESC to backup / exit
TILT RESEAT . . .
SCRN DEBUG
LEVEL . . . NO TILT RESEAT
DEBUG LEVEL 4
TILT RESEAT
TILT ANGLE=(0 to -6000)
DEBUG LEVEL 5 ANGLE = -1500
Enter to continue
ESC to backup / exit
PARALLEL PORT
OPTS . . .
NO HOST OR PANEL
C
READ / WRITE ITEMS NOTE
PARALLEL SIGNALS . . .
(continued) SPARE 1 and SPARE 2
selections will change
PARALLEL INPUTS . . . according to the
HARDWARE SPECIFIC
selection.
SPARE 1 . . .
SPARE 1 – LOW
SPARE 1 – HIGH
SPARE 2 . . .
SPARE 2 – LOW
SPARE 2 – HIGH
READY TO LOAD . . .
PORT LOCK . . .
READY TO UNLOAD . . .
LOAD / UNLOAD . . .
TEST 3 . . .
TEST 3 – LOW
TEST 3 – HIGH
D Y
SPARE 3 . . .
SPARE 3 – LOW
SPARE 3 – HIGH
D Y
NOTE
READ / WRITE ITEMS SPARE 1 and SPARE 2
(continued) selections will change
PARALLEL according to the
OUTPUTS . . . HARDWARE SPECIFIC
selection.
SPARE 1 . . .
SPARE 1 – LOW
SPARE 1 – HIGH
SPARE 2 – LOW
SPARE 2 – HIGH
TEST 1 – LOW
TEST 1 – HIGH
TEST 2 – LOW
TEST 2 – HIGH
PIO INTERLOCK . . .
NORMAL TILT
Enter to continue
CENTER TILT
NOTE A
These are the teachpoints
currently selected as the
points at which Pre-load and
SIO PRE-LOAD . . .
Pre-unload are reported as Enter to continue
being completed.
ESC to backup / exit
ENABLE PRE-LOAD
DISABLE PRE-LOAD
CLEAR OF TPs . . .
See
LOAD (P1) = ABV HOME
Note B
LEAVE PORT UP . . .
LEAVE UP TPs
CHECK POSITIONING . . .
RESEATING WAFER . . .
NO WAFER RESEAT BY
MANUAL RESEATING OFF
OPERATOR
Enter to continue
Enter to continue
POSITIONING SPEED . . . ESC to backup / exit
MONITOR FAN . . .
HARDWARE SPECIFIC . . .
PROGRAM SPARES . . .
PLATFORMS =
(1 - 2)
Enter to continue
PLATFORMS = 1 ESC to backup / exit
CLEAR OF TPs
CAUTION
These keys will move the LPT without safeguarding against
collision. Do not use these keys with product in the cassette.
Failure to comply may cause damage to the LPT or Process
Tool.
NOTE
Horizontal functions move both the vertical and rotational drives in a
synchronized fashion such that a smooth straight/horizontal motion of the
cassette/gripper results
• ROT OUT (Rotate Out) Moves the rotational arm out toward the Process Tool.
• ROT IN (Rotate In) Moves the rotational arm in toward the LPT.
• PORT DOWN (Port Down) Moves the minienvironment down.
• PORT UP (Port Up) Moves the minienvironment up.
• TILT DOWN (Tilt Down) Tilts the gripper toward horizontal.
• TILT UP (Tilt Up) Tilts the gripper up at approximately a 30 degree angle.
NOTES
1. When one of these keys is pressed, the motor runs until the key is
released. When the key is released, the motor stops. (The motor will also
stop if a limit switch is activated or ESTOP is pressed.)
2. Motion keys must be utilized for LPT movement during the teaching of
moves.
3. The current X/Y position is displayed (in inches) on the LCD each time
one of these keys is pressed and released.
4. When the Home position (0/0) is reached, the LPT arm motion
automatically stops. If one of these keys is released and pressed again,
the unit will pass the Home position. Use extreme CAUTION!
• CONT/ SPEED key Used to set LPT arm motion into continuous mode.
CONT (Default) Continuous mode causes motion to be performed at the current
speed towards the maximum or minimum position while the button is
depressed.
SPEED Sets the speed of movement in one of five (5) increments:
75% SPD-CONT MODE
50% SPD-CONT MODE
25% SPD-CONT MODE
10% SPD-CONT MODE
1% SPD-CONT MODE
NOTE
A single press (the key need not be held) of any of these keys will cause
continuous function. For example, press and release the <LOCK PORT>
key and the Pod will be locked in place, then the Pod door is unlocked.
• F2 Spare
(LOCATOR4.PCX)
(LOCATOR6.PCX)
Appendix C
FluoroTrac® OPTION
C.0 INTRODUCTION
The FluoroTrac system is used within a factory environment to collect and display data concerning the
movement of materials and to receive inputs from or provide directions to operators of equipment within the
facility. These activities are made possible by monitoring the location of a particular material lot or operator by
reading or writing to passive transponders known as MicroTags. These MicroTags are attached to the
material lot, the lot carrier or transporter, or are carried by the Operator. The LPT-FluoroTrac integrated
system consists of two major electronic components, a FluoroTrac Master Controller and a SMART-Comm (a
multiplexing and communication protocol converting device). Master Controllers have the ability to read and
write to MicroTags. FluoroTrac read points (antennas) operate under the direct control of the Master
Controller which in turn operates under the control of a Host computer system through the SMART-Comm.
The various electronic components which make up a FluoroTrac system communicate over serial data
cables. The Master Controller communicates with the Host over an RS-232 interface.
C.2.2 MICROTAGS.
The transponder or MicroTag used with the FluoroTrac System comes in a variety of packages and formats.
Two (2) of these packages, a glass encapsulated pill-type package and a credit card sized, plastic
encapsulated version are commonly used. They are identical electrically and differ only in their packaging.
Each is a passive unit containing no battery or other internal power source, but rather are powered by the
transmitted signal from the radio in the FluoroTrac Master Controller. An internal circuit in the MicroTag
charges up sufficiently when in range for the transponder to send out its own relatively weak return signal to
the Master Controller. This signal contains the information stored in the MicroTag. MicroTags are available in
ASYST TECHNOLOGIES Page C-1
2000-0900-01 Revision A
Load Port Transfer™ System 2150 / 2200 Technical Manual
either single page (64 data bits / 16 hexadecimal characters) or multi-page (17 pages of 64 data bits / 16
hexadecimal characters each). The write range for any antenna / MicroTag combination is approximately 30-
40% of its read range.
While MicroTags may be written to and read many times, the normal FluoroTrac mode is to operate in a write
once, read many times scenario.
J7 J3
BOARD RF2
(SMART-COMM) J2
POWER
BOARD RF1
(MASTER CONTROLLER)
DATA
ANTENNA
PORT A
ASYST TECHNOLOGIES
NOTES:
2. POWER: THE PROCESS TOOL PROVIDES AC POWER FOR THE LPT. POWER
MUST BE SUPPLIED THROUGH THE PROCESS TOOL’S EMO SWITCH, SUCH THAT
IN CASE OF AN EMERGENCY, IF THE EMO SWITCH ON THE PROCESS TOOL IS
PRESSED, POWER IS REMOVED FROM THE LPT. THE CUSTOMER IS TO SUPPLY
POWER CONNECTOR TYPE (IEC 320 STD C13 AND CABLE) TO INTERFACE WITH
AC POWER.
2000-0900-01 Revision A
4
5. PARALLEL COMMUNICATIONS: THE PARALLEL COMMUNICATIONS BETWEEN THE SEE DETAIL C
LPT AND THE HOST EQUIPMENT CONSISTS OF AN ASYST STANDARD PARALLEL
INTERFACE. THERE ARE FOUR (4) INPUT AND FOUR (4) OUTPUT SIGNALS, TWO
(2) SPARE INPUTS, TWO (2) SPARE OUTPUTS, THREE (3) TEST SIGNALS, AND
+5VDC VOLTAGE SOURCE, A 5V RETURN , AND CHASSIS GROUND. THE SIGNALS
(EXCEPT TEST SIGNALS) ARE OPTO-ISOLATED AT THE LPT. THE PARALLEL
CONNECTOR IS A STANDARD 25-PIN D-SUBMINIATURE TYPE CONNECTOR WITH
FEMALE PINS. 3
HOST
TOOL
TECHNOLOGIES, INC.
Page C-3
Load Port Transfer™ System 2150 / 2200 Technical Manual
Load Port Transfer™ System 2150 / 2200 Technical Manual
SERIAL PORT B RESERVED FOR TEST SERIAL PORT (TAG OPTION) DCD DATA CARRIER DETECT
RX RECEIVE DATA
TX TRANSMIT DATA
DETAIL A DTR
DSR
DATA TERMINAL READY
DATA SET READY
ROTATED 90° CW RTS REQUEST TO SEND
CTS CLEAR TO SEND
R1 RING INDICATOR
DETAIL B
PORTS A, B, C, D, & E
TECHNOLOGIES, INC.
Exceptions: None
Exceptions: If ACK6 is not zero, the last field FT_TAGDATA will be either blanks or null.
Exceptions: None.
Exceptions: None.
INDEX
A
Asyst-SMIF (definition)............................................ 1-5 F
Auto cycle key ........................................................B-31 Fan / filter air velocity adjustment .......................... 4-81
Automatic recovery................................................... 3-6 Fan motor replacement, ULPA fan/filter assembly . 4-95
FFU (definition) ........................................................ 1-5
B Filtered air system (definition).................................. 1-5
FluoroTrac (definition) ............................................. 1-5
C FluoroTrac ............................................................... C-1
Cable wire lists........................................................ 3-17 Following error ..............................................................
Cassette gripper ........................................................ 2-7 See Problem identification table
Cassette pick-up position (specification) .................. 1-1 Following errors........................................................ 3-4
Cassette positioning (specification) .......................... 1-1 Fuse warning label .........................................................
Cassette-transfer mechanism (definition).................. 1-5 See Labels
Cautions (definition) ................................................. 1-5 Fuses ..................................................................1-4, 4-2
Communications (specification) ............................... 1-1
Communications I/O interface board ...................... 2-19 G
Communications setup menu ....................................B-5 General inspection .................................................... 4-4
Configuration menu ................................................B-16 General menu navigation ......................................... B-3
Configuration sub-menus ................................................ Gripper adjustment: V-move................................... 4-43
See Configuration menu Gripper adjustment; H-move................................... 4-57
Control panel ............................................................ 2-2 Gripper finger adjustment; V- and H-move ............ 4-39
Gripper level adjustment; V- and H-move .............. 4-53
D Gripper-tilt motor-drive replacement ...................... 4-93
DC motor function keys ..........................................B-31 Ground labels.................................................................
DC stepper motors .......................................................... See Labels
See LPT 2150 motor controls
See LPT 2200 motor controls H
Depth (specification)................................................. 1-1 Hazard label ...................................................................
Diagnostic menu .......................................................B-9 See Labels
Diagnostic sub-menus ..................................................... Height (specification)................................................ 1-1
See Diagnostic menu H-move (definition) .................................................. 1-5
Diagnostics and troubleshooting ............................... 3-1 Home (definition)...................................................... 1-5
Display setup menu...................................................B-6 Home position criteria............................................... 2-3
Displaying indexer variables...................................B-11 Home switch ..................................................................
Drive column ............................................................ 2-6 See Control panel
Homing menu........................................................... B-9
E Host communication, SECS protocol.............................
Electrical and mechanical assembly drawings ......... A-5 See LPT Host Communications Manual
Electrical power ..............................................................
See Safety I
Electronic assemblies.............................................. 2-10 Indexer board indicators ......................................... 3-15
Electronic circuit board replacement ...................... 4-99 Initial powerup ...............................................................
Emergency stop button.................................................... See Teach pendant operation
See Teach pendant operation Inspect and clean the LPT and lubricate vertical lead
Encoder replacement............................................. 4-119 screw ..................................................................... 4-7
ENTER key.............................................................B-27 Inspect, clean, lubricate and perform cleanliness
Environmental (specification)................................... 1-2 assurance ............................................................. 4-15
Equipment tagout / lockout procedure ...................... 1-3 Interconnect diagram .....................................................
Error recovery........................................................... 3-5 See Simplified system interconnect diagram
ESC key ..................................................................B-27 Interlock label ................................................................
Excessive wafer protrusion sensor .......................... 2-14 See Labels
Excessive wafer protrusion sensor adjustment........ 4-35 J
Exit setup mode ........................................................B-8 Jog/steps................................................................. B-28
Index-1
Load Port Transfer™ System 2150 / 2200 Technical Manual
L N
Labels ........................................................................1-7 Nonrecoverable errors .............................................. 3-6
Laser .................................................................. 1-1, 1-4
Laser caution .................................................................. O
See Laser safety Operating mode (definition) ..................................... 1-6
Laser diode replacement........................................4-103 Operating sequence................................................... 2-3
Laser interlock ................................................................ Optical detector system........................................... 2-10
See Laser See Laser
Laser safety........................................................ 1-3, 4-1 Optical detector system adjustment ........................ 4-29
Liquid crystal display (LCD). ......................................... Optical sensors................................................................
See Teach pendant operation See Sensors
Load (definition)........................................................1-5 Optical-limit switches ............................................. 2-14
Load switch .................................................................... Over-travel switch adjustment; V- and H-move ..... 4-61
See Control panel
Loading and unloading sequence.................................... P
See Operating sequence Particle protection strip replacement .................... 4-107
LPT 2150 motor controls.........................................2-15 Pause/resum key .....................................................B-27
LPT 2200 motor controls.........................................2-15 Pendant setup menus.................................................B-3
LPT conventions........................................................1-7 Pinch labels.....................................................................
LPT FluoroTrac cable information...........................C-6 See Labels
LPT FluoroTrac hardware configuration..................C-2 Pinch points .............................................................. 1-5
LPT spare parts lists .................................................A-1 Pod hold-down latch adjustment; LPT 2200........... 4-67
LPT system controller board ...................................2-16 Pod-door lock motor.......................................................
LPT system overview ................................................2-1 See LPT 2200 motor controls
Lubrication ................................................................4-3 Pod-in-place light............................................................
See Status indicators
M Pod-in-place switch adjustment; LPT 2200 ............ 4-71
Main menu................................................................B-3 Port assembly............................................................ 2-7
Maximum reach of load arm (specification)..............1-1 Port control ............................................................. 2-11
Mechanical assemblies ..............................................2-6 Port door ................................................................... 2-8
Menu keys ..............................................................B-27 Port door leveling and adjustment .......................... 4-63
MicroTag (definition)................................................1-6 Port lock/unlock mechanism adjustment; LPT 2150 4-75
MicroTag........................................................................ Port plate (definition)................................................ 1-6
See FluoroTrac Power (specification) ................................................ 1-1
Minienvironment (definition) ....................................1-6 Power light......................................................................
Minienvironment .......................................................2-7 See Status indicators
Minienvironment drive or arm servo-motor assembly Power distribution board......................................... 2-19
replacement..........................................................4-89 Power fuses............................................................... 4-2
Minienvironment drive or arm servo-motor Power supply .......................................................... 2-17
replacement..........................................................4-85 Power switch...................................................................
Minienvironment servo-motor ........................................ See Control panel
See LPT 2150 motor controls Power switch label ..........................................................
See LPT 2200 motor controls See Labels
Model and serial numbers............................................... Preventive service (definition).................................. 4-3
See Labels Preventive service procedures .................................. 4-5
Motion control board...............................................2-18 Printed circuit board assemblies ............................. 2-10
Motion keys ............................................................B-28 Problem identification table...................................... 3-2