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General Electric

The Diode Laser


The First 30 Days, 40 Years Ago
Russell D. Dupuis

In the space of only a month, history was made four decades ago when four groups of researchers
independently developed and demonstrated their own versions of the injection laser. The author describes
how the experiments laid the foundation for the vast array of materials and technologies used in the
fabrication of modern compound semiconductor alloy devices.

A
little over 40 years ago, on Sept. versions of the injection laser. The efforts lasers were fabricated by zinc (Zn) diffu-
16, 1962, Gunther Fenner, a of the other three groups that also suc- sion into conventional (and commer-
member of the team headed by ceeded in making a semiconductor laser cially available) n-type gallium-arsenide
Robert N. Hall at the General Electric in late 196211 were led by: Nick Holonyak (GaAs) “bulk” crystals, one of the “first”
Research Development Center in Jr.4-6 at General Electric’s Syracuse, N.Y., laser diodes (Holonyak’s) was created
Schenectady, N.Y., operated the first facility; Marshall I. Nathan7, 8 at IBM from a small piece of single-crystal
semiconductor diode laser.1-3 Within Research Laboratory, Yorktown Heights, ternary gallium-arsenide (GaAsP) alloy
about 30 days, workers in three other N.Y.; and Robert Rediker 9, 10 at MIT material grown by vapor-phase trans-
laboratories in the United States had Lincoln Laboratory, Lexington Mass. port, making it the first alloy compound
independently demonstrated their own While three of these early p-n junction semiconductor device to assume

© 2003 IEEE. Reprinted with permission from the Feb. 2003 issue of IEEE LEOS Newsletter.

30 Optics & Photonics News ■ April 2004


1047-6938/04/04/0030/6-$0015.00 © Optical Society of America
THE DIODE LASER

commercial importance. thermodynamics!10 What


From this humble beginning, made the announcements
the vast array of materials electrifying was that it sud-
and technologies used in the denly became clear that a
fabrication of modern com- semiconductor diode could
pound semiconductor alloy be a very efficient generator
devices has emerged. of photons, perhaps the most
efficient “converter” of elec-
What are GaAs p-n trical energy into optical
junctions good for? energy ever demonstrated.16
While germanium (Ge) and This revelation was an
silicon (Si) were well-known important motivation for
semiconductors by the late some working in the field to
1950s, the III-V compound pursue their dreams of mak-
semiconductors (sometimes ing a semiconductor laser.
General Electric
referred to at that time as The race for the semicon-
“intermetallic compounds”), ductor injection laser was on.
were not well studied and had no obvious (Above) The first semiconductor laser was Of course, Lincoln Labs had a sizable
unique application. By 1960, Si had made of GaAs and had a diffused p-n junc- lead in some respects since it already had
tion. It had polished facets and operated
become the dominant semiconductor a relatively large research group experi-
only under pulsed conditions at cryogenic
because of its large bandgap relative to temperatures. (Facing page) The GE enced in the study of GaAs diodes. Earlier
Ge and because of the beneficial features Corporate Research Lab semiconductor laser in 1961 and even before, various other
of its native oxide, SiO2, discovered by team, led by Bob Hall, examines the cryostat groups, including IBM Research Labs,
Carl Frosch in 1955. It was not clear used to test the first diode laser. (Left to right) had considered the concept of a semi-
exactly what benefits could be obtained Jack Kingsley, Dick Carlson, Gunther Fenner, conductor laser. The IBM group even
by replacing Si with GaAs, since GaAs Ted Soltys and Bob Hall. had a U.S. Army-sponsored research
had no stable native oxide and was much contract to make such a device.8, 17
more difficult to make in high-purity Research groups in the United Kingdom
form. Consequently, as late as 1958, few been under study for some time and their had also joined the chase for a semicon-
device researchers considered GaAs optical properties were beginning to be ductor laser; there were well-organized
worth much effort. Only in 1952, in fact, explored as well. In fact, it was the amaz- GaAs p-n junction research activities
had GaAs been identified as a semicon- ing electroluminescence efficiencies of at the Royal Signals and Radar Estab-
ductor by Heinrich Welker of Siemens in such diodes that were reported at the lishment under Cyril Hilsum. In the
West Germany.12 Solid State Device Research Conference Soviet Union, Nikolay G. Basov and
The search for a higher voltage tunnel (SSDRC) on July 9, 1962, by R. J. Keyes co-workers at the Lebedev Institute in
diode was one of the motivations behind and T. M. Quist 13 of the MIT Lincoln Moscow and D. N. Nasledov and co-
the study of GaAs diodes. By the early Labs group and by a group led by workers at the Ioffe Physico-Technical
1960s, heavily doped n-type GaAs sub- J. Pankove at RCA Laboratories. These Institute in Leningrad were also consid-
strates—produced by both Czochralski workers reported that their GaAs p-n ering how to achieve population inver-
and horizontal Bridgman growth tech- junctions had extremely high internal sion in a semiconductor.18, 19 In France,
nologies—were commercially available; quantum efficiencies—as high as Pierre Aigrain at École Normale
fabrication of the junction of these 85-100 percent!10,14 The Lincoln Labs Supérieure had proposed that laser
devices was in some respects relatively group also reported using a GaAs diode operation of a semiconductor could
straightforward since the means of form- to demonstrate the optical transmission occur; in 1961, he was reportedly plan-
ing p-n junctions by use of diffusion and of television signals from Mount ning to visit the United States with a
alloying techniques were well known. The Wachusett to the roof of the Lincoln Labs working semiconductor laser in his
form of the p-n junction in the first GaAs facility, a distance of about 50 kilometers pocket!20 In 1961, Maurice Bernard
laser diodes was relatively conventional, as the crow flies—quite possibly the first and Guillaume Duraffourg, working at
consisting of an n-type GaAs “host” crys- demonstration of the optical transmis- CNET in France, had also published a
tal into which Zn atoms were diffused to sion of an electronic signal.10,15 paper analyzing the possibility of laser
create a heavily doped p+ region. One While the basic elements of the light- operation in semiconductors.21
application of contemporary interest for emitting properties of GaAs p-n junc-
these diffused and alloy p+-n diodes was tions had been known several years prior How do you make
the study of tunneling phenomena in to the1962 report, some of those in atten- a semiconductor laser?
heavily doped (degenerately doped) dance at the SSDRC complained that The concept and demonstration of light
p+ -n+ diodes. The electric characteris- these high-efficiency electroluminescence amplification by the stimulated emission
tics of GaAs diffused-junction diodes had results violated the second law of of radiation, i.e., LASER operation, had

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April 2004 ■ Optics & Photonics News 31
THE DIODE LASER

been under active discussion in semiconductor lasers had pro-


the late 1950s. The discussion posed to use a macroscopic
+V
culminated in the demonstra- “external cavity” into which a
tion of the solid-state ruby laser M GaAs diode was placed, Hall
on May 16, 1960, by Theodore decided to polish parallel faces
Maiman, who was working S1 P onto his GaAs diodes so that
S2
at Hughes Research Labs. By the Fabry-Pérot optical cavity
1962, it was well known that geometry was built into the
the light from a ruby laser—a device. This approach was not
visible laser operating in the L universally applied and, in fact,
red spectral region—exhibited N the importance of optical feed-
several properties unique to back into the diode’s “active
coherent radiation, including region” was not fully appreci-
M
the characteristic presence of ated by many workers. Hall’s
“laser speckle” which could be -V team operated their first suc-
observed by the human eye cessful GaAs laser diodes
when the laser was operated under pulsed conditions at
above threshold.22, 23 Since the 77 K on Sept. 16, 1962.1 A
first laser demonstration in 1960 (and Figure 1. Schematic diagram of initial con- schematic diagram of Hall’s early concept
even before), some researchers exploring cepts for an injection laser developed at for an injection laser is shown in Fig. 1.
semiconductor diodes had wondered if a General Electric Research Laboratories by The first verification of laser operation
Robert Hall in 1962. [From R. N. Hall, IEEE J.
semiconductor had the necessary qualities was made through the observation of
Quant. Electron. QE-23, 674 (1987), Fig. 1.]
to support stimulated emission and laser near- and far-field interference patterns
operation. Others believed that the possi- using an infrared (IR) up-converting
bility might indeed exist.24 John von “snooper scope” which was being used in
Neumann had considered the essential A practical problem faced by everyone Hall’s lab to study the emission from such
elements of a semiconductor laser theo- interested in making a diode laser was infrared light emitters.
retically in 1953.25 how to determine that it was in fact las- As noted above, IBM had also
ing. While it may seem somewhat diffi- mounted an early effort to develop a
Few parallels with the MASER cult to understand with the benefit of diode laser. In 1961, Rolf Landauer,
Of course, the basic quantum mechanics hindsight, many of those thinking about recently appointed a department director
occurring in a direct-bandgap semicon- diode lasers in 1960-62 were not certain at the relatively new IBM Research Lab at
ductor would be fundamentally differ- as to what to look for to determine the Yorktown Heights, N.Y., had initiated the
ent from those behind the radiative laser “threshold” or that lasing was indeed IBM team effort in the development of a
recombination and laser operation of occurring. Since 1960, it had been obvi- GaAs laser diode.8 The IBM team, like
chromium ions in ruby and the earlier ous that coherent light should produce Hall’s group and the group at Lincoln
demonstration of the microwave some type of interference pattern, but Labs, concentrated on Zn-diffused GaAs
amplification by the emission of radia- such a pattern was not perhaps uniquely p-n junction diodes, with which they had
tion (the MASER) using ammonia created by simultaneous emission origi- had previous experience in the develop-
molecules. There was no clear path for nating from a small aperture typical of a ment of GaAs bipolar transistors. The
taking what was known about stimu- GaAs diode. As Robert Hall has written: team included Rick Dill, Walter Dumke,
lated emission as demonstrated for dis- “It seems strange now, but at that time, Bob Keyes (a different person by the
crete atomic states—like those found in one of our big uncertainties was to know same name was on the Lincoln Labs
ruby—and translating it to the broad what to look for as evidence that the team), Gordon Lasher, John Marinace,
density of states found in the band diode was lasing.”3 Marshall Nathan, Michael Stern and
structure of a typical semi-conductor. For Hall, who already had extensive others.8 The IBM GaAs laser team was
In fact, some of the approaches being experience with GaAs alloy junctions, inspired to accelerate its own research
explored in 1962 involved indirect semi- tunnel diodes and light-emitting diodes, effort by the Lincoln Labs’ presentations
conductors, e.g., Si and Ge, as well as the attempt to make a laser diode was an at the 1962 SSDRC. Although no one
putting rare-earth atoms into the semi- extension of his earlier research work. It from IBM had actually been present, the
conductor “host” crystal, e.g., uranium also coupled with the optics experience team had read an article describing the
(U) or neodymium (Nd), to create he had gained in earlier youthful hobbyist results in the July 10, 1962 edition of The
“atomic-like” energy transitions (like the efforts to build telescopes and polish New York Times. They had also heard
Cr+ ions in a ruby crystal) within the lenses and mirrors.3 Hall’s laser project Sumner Mayburg of GTE Sylvania
band structure of the semiconductor team included Dick Carlson, Gunther Laboratory speak in a seminar at IBM in
crystal (an approach that has not borne Fenner, Jack Kingsley and Ted Soltys. January 1962 of his recent observations of
fruit to this date). While other groups thinking about high-efficiency radiative recombination

32 Optics & Photonics News ■ April 2004


THE DIODE LASER

from GaAs p-n junction Lincoln Labs semiconductor


diodes.26 Landauer, Dumke and laser effort presumably bene-
Keyes had clearly been thinking 0.01 fited in various ways from

DE (eV)
about the semiconductor laser In DOT
theoretical papers on semi-
problem for some time prior to P GaAs conductor lasers written by
N GaAs
the June 1962 SSDRC confer- 0.001 Au PLATED KOVAR
Benjamin Lax, Herb Zeiger
ence; Dumke, in particular, had and Bill Krag in 1959.31, 32 As
calculated the requirements for noted, above, Lincoln Labs’
population inversion in a semi- 10-4 10-3 10-2 10-1 1 10 work was devoted to the
Current (amps)
conductor.27 The first sentence development of efficient
of Dumke’s paper (submitted emitters and included several
April 3, 1962), reads: “Since the initial Figure 2. Spectral linewidth vs. current for a key contributors to the theory and the
operation of the ruby maser, there has GaAs diode made at IBM and operated at experimental characterization of the
been considerable speculation concern- 77 K. The diode did not have a Fabry-Pérot recombination radiation from GaAs p-n
geometry so cavity modes were not
ing the possibility of observing maser observed. [From Nathan, IEEE J. Quant.
junctions. In 1962, this effort—centered
action in semiconductors such as Ge and Electron. QE-23, 679 (1987).] in Rediker’s group—included Bob Keyes,
Si.” After rejecting the possibility of laser Bill Krag, Ted Quist, Al McWhorter, Herb
operation in the indirect semiconductor Zeiger and others. The search for laser
Ge due to excessive free-carrier absorption, was submitted to Applied Physics Letters operation from GaAs diodes fabricated at
near the end of this paper, he concluded: (received on Oct. 6, 1962) and published Lincoln Labs met with success on Oct. 12,
“At present, it is not clear whether or not on Nov. 1, 1962.7 Later, Rick Dill and 1962,33 with laser operation first con-
one would obtain anything like typical Dick Rutz developed a process for for- firmed by the observation of “filaments”
maser action from a device utilizing mation of the optical cavity by cleaving in the near-field pattern of a GaAs diode
direct transitions as in GaAs.” 27 all four sides of the laser diode.28 when examined with an infrared con-
After hearing the news of the 1962 The early Lincoln Labs GaAs program verter.9 The Lincoln Labs device
SSDRC reports on efficient GaAs was quite small; it involved two technical employed a Fabry-Pérot cavity having
diodes, the IBM team was spurred to an staff members and a technician. The polished parallel facets, as suggested ear-
increased level of activity. Several mem- team’s work on GaAs was initiated in lier by Zeiger.34 The paper in which
bers of the newly expanded laser team 1958 to study the possibility of making these laser results were described was
dedicated their efforts to making diodes III-V high-speed microwave devices.10, 29 submitted to the editor of Applied Physics
and analyzing their performance. Gordon The III-V program was driven by the Letters on Oct. 23, 1962. It was published
Lasher considered what might theoreti- vision of Robert Rediker, who champi- (after changes) on Dec. 1, 1962. A photo-
cally be observed in the stimulated emis- oned the study of GaAs when most other graph of one of the early Lincoln Labs’
sion spectrum of a GaAs diode. Marshall groups were concentrating on silicon. GaAs laser diodes is shown in Fig. 3.
Nathan concentrated on studying the Rediker had visited professor Heinrich
photoluminescence and electrolumines- Welker in Erlangen, Germany, in 1958 to Do alloys work?
cence from various GaAs structures oper- learn more about GaAs and related mate- It is interesting to note that in 1960-62,
ated under pulsed conditions at low rials. While working at Siemens, Welker many in the field of semiconductors were
temperatures. While the IBM team real- had been the first person in the West to convinced that an alloy was not worth
ized that for a diode laser, spectral line identify the “intermetallic” III-V materi- pursuing and, that if such materials were
narrowing should occur and that the als as semiconductors. to be successfully produced, random
light output versus current should be The Lincoln team developed a diffu- alloy “disorder” would render them use-
superlinear, because they could not figure sion technique for producing p-n junc- less because of the stochastic nature of
out how to provide proper “cavity mir- tions. The team’s laser effort had, in fact, the distribution of atoms in the lattice.35
rors” for the diodes, no provision was evolved from the work of Rediker’s group There were also different ideas about how
made in this early work for optical on the comparison of the electrolumines- to produce such alloys. One, for example,
feedback.8 On Sept. 29, 1962, Nathan cence characteristics of GaAs diffused (which has not succeeded even to date)
observed narrowing of the electrolumi- and alloy diodes. Keyes was invited to involved the diffusion of P into GaAs to
nescence to a FWHM of ~3 nm. A few join the team since “he owned the spec- create GaAsP layers. Epitaxial growth of
days later, he found that the linewidth trometer.”30 As noted above, the work semiconductors was still a very new con-
measured for this first successful diode of Keyes and Quist on the study of the cept and while the creation of alloyed
was the limit of the spectrometer: recombination radiation from diffused p-n junctions using metal “performs”
~ 0.2 nm. The GaAs diodes showing GaAs p-n junctions led to the observation was a well-known process, it lacked the
“stimulated emission” first reported by and report of high internal quantum control necessary to create true alloy
the IBM group did not employ an optical efficiencies, which “sparked” the post- semiconductors.
cavity.7,8 The IBM paper describing the SSDRC efforts at many research labs Holonyak had been working on
group’s first stimulated emission results to develop a semiconductor laser. The the growth of ternary GaAsP alloy

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April 2004 ■ Optics & Photonics News 33
THE DIODE LASER

materials since 1960. Following Holonyak decided to polish facets


John Marinace’s 1960 SSDRC report and quickly developed his own
of his work at IBM on the vapor- “home-made” process to do just
Laser diode
phase-transport epitaxial growth of that. On the first try, on Oct. 9, the
Ge on GaAs, Holonyak was inter- process was successful in produc-
ested in using the closed-tube vapor ing a “good” set of diodes that
phase epitaxy (VPE) process to cre- was tested on Oct. 19, 1962; the
ate larger bandgap tunnel diodes diode testing apparatus at Hall’s
and p-n junctions and had exploited Schenectady lab was used since
and extended this materials technol- it was better equipped for this
ogy to create GaAs 1-x Px crystals and study.35 The first of Holonyak’s
GaAsP layers on GaAs and on other GaAsP diodes to be tested oper-
GaAs 1-y Py “substrate” materials. 0.2” ated as lasers under pulsed condi-
This work was essentially the begin- tions at 77 K. But Holonyak,
ning point for all future alloy semi- believing the game was over since
conductor and III-V heterojunction Figure 3. Photograph of an early GaAs diode Hall had beaten him to a laser, did not
devices. Holonyak, working with the sup- laser fabricated at Lincoln Laboratory. [From think it urgent to write up his results.
R. H. Rediker, IEEE J. Quant. Electron. QE23,
port of a few technicians, developed tech- Consequently, it was days later in
692 (1987), Fig. 2.]
niques to grow GaAsP alloy crystals with October that he finally got around to
various As/P ratios, sawed crystals from writing up the GaAsP laser results and
these small wafers and processed and to submitting them to a new journal,
tested diffused p-n junction devices made semi-conductor device research (and, Applied Physics Letters.4 These results
from these materials. Holonyak was under this funding agreement, shared (received at Applied Physics Letters Oct.
under pressure from GE management to some ideas), they were geographically 17, 1962) demonstrated a compact and
devote more of his efforts to Si-related separated, still “competitors” and oper- efficient source of visible coherent light
work—in fact, his work on GaAsP was ated essentially independently as far as and would ultimately be the basis of the
largely funded by an Air Force contract making the first laser is concerned.37, 38 first commercially available visible semi-
managed out of Hanscom Field. On After the 1962 SSDRC, Holonyak and conductor light emitters. They would
more than one occasion, Holonyak was Hall did discuss the problem of forma- also be the genesis of the now ubiquitous
told that if his external funding stopped, tion of Fabry-Pérot cavities. They also “light-emitting diode” (LED), which is
so would his GaAsP project. The implied shared ideas on how to make a laser cav- almost universally understood to imply a
threat was: “If your external funding ity as early as Aug. 31, 1962.5 Hall pro- device that creates photons “visible to the
ends and you don’t want to work on our posed the use of the semiconductor human eye” based upon minority carrier
Si-related projects, you might as well get diode faces as mirrors. His approach was injection and radiative recombination
on the road!” to lap and polish the diode facets. of excess carriers. The demonstration
Holonyak, like Hall and others, was Holonyak decided to try to cleave the of an alloy semiconductor laser at essen-
excited by the possibilities described in Fabry-Pérot mirrors for his optical cavity tially the same time as the GaAs laser
the Lincoln Labs’ paper at the July 1962 (an idea apparently initially overlooked provided dramatic and ample proof that
SSDRC. Working with GaAsP diodes in by other groups trying to make a laser alloys were good for something after all.
his Syracuse lab, Holonyak believed he diode). This approach, although it was Sometime after the first demonstration of
had an important advantage over others later nearly universally used to create the GaAsP laser, Holonyak arranged for a
working on the diode laser problem diode laser facets, actually delayed photograph to be taken of the emission
using GaAs—he could see the light com- Holonyak’s first GaAsP laser demonstra- from one of his diodes. Reproduced in
ing from his diodes and could therefore tion because of the difficulty he experi- Fig. 4, it was the first photograph of a
also see the near- and far-field patterns. enced in identifying the appropriate diode laser made from its own light.
This meant that he could determine cleavage planes in his small “bulk”
quickly whether the diodes were lasing GaAsP crystallites. (The GE lawyers Who wants to buy
or not by looking at the diode spatial decided not to file for a patent on the lasers or LEDs?
emission characteristics and also by the idea, but the IBM team did ultimately On Nov. 28, 1962, not long after the first
same well-known “laser speckle” pro- file on the concept.) laser demonstrations, GE held a semicon-
duced by the visible ruby laser.36 At the Sometime after the successful opera- ductor laser conference at Schenectady
SSDRC, Holonyak thought about form- tion of the first semiconductor lasers at for representatives of the Department of
ing an external cavity for the optical GE’s Schenectady lab, Roy Apker, Hall’s Defense. Some in GE had already recog-
feedback. His ideas on cavity formation boss, called Holonyak at Syracuse to tell nized that this very “disruptive” technol-
changed after discussions with Hall. him that Hall’s group was running a ogy could have important defense and
Although Holonyak and Hall had a joint diode laser and suggested Holonyak commercial applications. Before the
contract with the Air Force for should stop trying to cleave facets. end of 1962, GE offered both GaAs and

34 Optics & Photonics News ■ April 2004


THE DIODE LASER

GaAsP lasers for sale, becoming 6. N. Holonyak, IEEE J. Sel. Top. Quant. Electron. 6,
1190 (2000).
the first company to offer such 7. M. I. Nathan, W. P. Dumke, G. Burns, F. H. Dill,
devices commercially.39 Since the Jr., and G. Lasher, Appl. Phys. Lett. 1, 62 (1962).
Nathan’s paper was received Oct. 6, 1962.
devices only operated pulsed at low Wire bond 8. M. I. Nathan, IEEE J. Quant. Electron. QE-23,
Laser diode 679 (1987).
temperatures, they were obviously
Contact 9. T. M. Quist, R. H. Rediker, R. J. Keyes, W. E. Krag,
useful only for research purposes or B. Lax, A. L. McWhorter, and H. J. Zeiger, Appl. Phys.
Lett. 1, 91 (1962). Quist’s paper was received Oct.
special defense applications. The Red laser 23, 1962 and in final form Nov. 5, 1962.
price for one of Hall’s IR-emitting light 10. R. H. Rediker, IEEE J. Quant. Electron. QE-23,
692 (1987).
GaAs laser diodes was initially 11. For details of this work, see the related Special
$1,600—a price which had been Issue Papers in the IEEE J. Quant. Electron. QE-23,
June 1987, Refs. 3, 5, 8, and 10.
somewhat arbitrarily set by the GE Scattered light 12. Goryunova described III-V materials as semicon-
marketing group at 10 times that 0.2 mm ductors for the first time in 1950. In her Ph.D. thesis,
completed in 1951 at Leningrad State University, she
of a currently available Texas Heat sink indicated that III-V zinc-blend compounds are semi-
conductors. Her work was not published outside of
Instruments IR incoherent “LED.” the U.S.S.R. until much later due to the Cold War.
The price was later reduced to 13. R. J. Keyes and T. M. Quist, unpublished paper
$800.39 The “visible red” GaAsP laser Figure 4. Photograph of one of Holonyak’s presented at the Solid State Device Research
Conference, Durham, N.H., July 1962.
first GaAsP injection lasers. This is the first
diode was initially priced at $3,200, then 14. R. J. Keyes and T. M. Quist, Proc. IRE 50, 1822 (1962).
direct photograph of a laser diode made
reduced to $1,600.39 This pricing deci- 15. R. J. Keyes, T. M. Quist, R. H. Rediker, M. J. Hudson, C. R.
using its own photon emission as a light Grant, and J. W. Meyer, Electron. 36, 39 (1963).
sion was based on the fact that GE’s source. The color film is overexposed in the 16. N. Holonyak, Jr., Am. J. Phys., 68, 864 (2000).
marketing managers decided that region of the facet where laser operation is 17. The IBM work was sponsored by the US Army Electronics
Research and Development Laboratory, Ft. Monmouth,
Holonyak’s visible laser was “twice as occurring. [From N. Holonyak Jr., IEEE J. N.J., under Contract DA 36-039-SC-90711). See Ref. 7.
valuable” as Hall’s IR-emitting laser Quantum Electron. QE-23, 684-91 (1987).] 18. Some of this early work is discussed briefly in R. D.
Dupuis, IEEE J. Quant. Electron. QE-23, 651 (1987).
device. Incoherent GaAsP visible LEDs 19. D. N. Nasledov, A. A. Rogachev, S. M. Rivkin, and B. V.
were also offered for sale. Interestingly, Tsarenkov, Sov. Phys. Sol. State. 4, 782 (1962).
20. J. L. Bromberg, The Laser History Project.
40 years later, GaAsP red-emitting LEDs
21. M. G. A. Bernard and G. Duraffourg, Phs. Stat. Sol. 1,
are still sold. While some researchers did heterojunction quantum-well DVD 699 (1961).
not appreciate the fundamental distinc- lasers, for example, are currently grown 22. T. Maiman, Nature 187, 493 (1960).
23. See T. Maiman, in “The Laser Odyssey,” Laser Press,
tion between “infrared” GaAs lasers and primarily by metal-organic chemical Blaine, Wash., 2000.
“visible” GaAsP lasers, Holonyak was vapor deposition and cost considerably 24. John von Neumann carried out the first documented
theoretical treatment of a semiconductor laser in 1953.
acutely aware of the significance of visi- less than $1 in packaged form. It is also This paper is reproduced in J. von Neumann, IEEE J.
ble-spectrum LEDs and lasers, a feeling interesting to note that GaAsP LEDs, Quant. Electron. QE-23, 658 (1987).
25. See the reproduction of his unpublished 1953 paper in J.
shared by others working in the field.40 closely related to those first diffused von Neumann, IEEE J. Quant. Electron. QE-23, 659
These first visible injection lasers made GaAsP diodes, are still produced com- (1987).
26. J. Black, H. Lockwood, and S. Mayburg, Postdeadline
of the ternary alloy GaAsP foreshadowed mercially. And the diode laser has become Paper P14, presented at the American Physical Society
meeting, Baltimore, Md., March 28, 1962.
the future when virtually all semiconduc- the dominant form in the commercial
27. W. P. Dumke, Phys. Rev. 127, 1559 (1962).
tor lasers would employ alloy materials. laser market, with millions produced 28. F. H. Dill and R. F. Rutz, US Patent 3247576 (filed Oct.
In addition, the GaAsP first compound each year. We enjoy a multitude of bene- 30, 1962, issued Apr. 26, 1966).
29. R. H. Rediker, private communication, Sept. 2002.
semiconductor alloy light emitters were fits from the early research and devel-
30. R. H. Rediker, private communication, Dec. 4, 2002.
the earliest progenitors of the now ubiq- opment of semiconductor diode lasers, 31. B. Lax, in “Quantum Electron., A Symposium,” C. H.
uitous LED and have spawned related multi-element semiconductor alloys Townes, Ed. New York; Columbia University, 1960, p.
428.
devices in a variety of III-V ternary and and their derivative heterojunctions. 32. H. J. Zeiger and W. E. Krag, Quarterly Progress Report on
quaternary materials systems, leading to The future seems to hold an even greater Solid State Research, Lincoln Laboratory, MIT, Oct. 1959,
p. 41.
the continued development of an “ulti- variety of applications for these devices 33. R. H. Rediker, person communication, Nov. 24, 2002.
mate light source”—the high-efficiency and their progeny. 34. The MIT Lincoln Labs’ team reviewed Hall’s Phys. Rev.
Lett. GaAs laser paper describing the optical cavity
injection luminescence source available formed by polishing so they knew that this approach
Russell D. Dupuis (russell.dupuis.@ece.gatech.edu) would work.
today in the form of advanced “high-
holds the Steve W. Chaddick Chair in electro- 35. N. Holonyak, Jr., private communication, September
brightness” LED products in the InAlGaP optics in the School of Electrical and 2002.
and InAlGaN alloy material systems. Computer Engineering at Georgia
Member Institute of Technology, Atlanta, Ga.
36. Holonyak had forgotten about the infrared converting
“snooper scope” that was used by Hall’s group at GE, as
Today, over 40 years after the first well as by Rediker’s group at Lincoln Labs, to observe the
emission patterns from their IR-emitting diode lasers.
demonstration of the injection laser in References 37. Air Force contract AF 19 (604)-6623.
September 1962 and the first demonstra- 1. Robert N. Hall, private communication, October 2002. 38. However, Hall’s GaAs laser work was funded entirely by
tion of a compound semiconductor 2. R. N. Hall, G. E. Fenner, J. D. Kingsley, T. J. Soltys, and R. GE Internal Research and Development funds and all the
technical notes and data were recorded in notebooks
O. Carlson, Phys. Rev. Lett. 9, 366 (1962). The editor of
alloy device in October of the same year, Phys. Rev. received this paper Sept. 24, 1962.
separate from those used for the Air Force contract
research. (R. N. Hall, private communication, Nov.
advances in materials and device design 3. R. N. Hall, IEEE J. Quant. Electron. QE-23, 674 (1987). 2002).
have made the injection laser an essential 4. N. Holonyak, Jr. and S. F. Bevacqua, Appl. Phys. Lett. 1, 39. Allied Industrial Electronics Catalog No. 650, Chicago,
82 (1962). Holonyak’s paper was received by the editor Ill., 1965, p. 77.
device in many important systems. High- of Appl. Phys. Lett. Oct. 17, 1962. 40. See the article by Harlan Manchester, “Light of Hope—
performance red-emitting InAlGaP 5. N. Holonyak, IEEE J. Quant. Electron. QE-23, 684 (1987). Or Terror,” Readers Digest, p. 97 (Feb. 1963).

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April 2004 ■ Optics & Photonics News 35

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