Академический Документы
Профессиональный Документы
Культура Документы
All of the systems in our Plasma Lab use pressure gauges to interact with control systems, which
make it possible to maintain a steady pressure and gas flow in the process chambers. The
following is a description of the different gauge locations.
Bourdon gauges are used on the gas regulators installed on the different gas bottles, which
regulate the gas pressure to each machine. These are located in the service chase behind the
machines.
Holly and Indy have Pirani gauges installed on the process chamber and the turbo foreline to
monitor pressures. These pressures are monitored by the MKS 146, which sends a signal to the
APC, which in turn opens or closes valves as required. Maggie has Pirani gauges on the process
chamber and the cryo pump that are used in the same manner to control the valve sequence.
Indy and Maggie have Hot Cathode Ion Gauges mounted on the process chamber whereas Holly
has a Cold Cathode Ion Gauge on the process chamber. These gauges are used to monitor the
high vacuum pressure and establish a base pressure in each process chamber.
All of our systems use MKS Baratrons (Capacitance Monometers) to monitor process pressures.
These Baratrons change pressure into a voltage signal, which is sent to the MKS 146, which in
turn sends a signal to the Throttle Valve to partially open or close. Using this technique we can
set the gas flow and let the MKS 146 and the Baratron control the Throttle Valve to maintain a
steady pressure during the process in the chamber.
We also use Atmosphere/Vacuum switches as safety interlocks on each process chamber. These
use diaphragms to activate a switch that sends a signal to a power supply or controller to use this
input to operate in a safe manner.
Vacuum Switch
LAB
In this lab you will learn the different types of gauges used on Holly, Maggie, and Indy. You will
also learn the location and pressure ranges of each. You will then use certain gauges, valves, and
MFCs ( Mass Flow Controllers) to control the pressure in the process chambers.
1: Make a table describing gauge type, # of gauges, locations, and pressure ranges for Holly,
Maggie, and Indy. (Turn in a copy of this table with your report.)
TABLE 1
SYSTEM GAUGE GAUGE LOCATION RANGE
# TYPE (mTorr)
HOLLY 1
2
3
4
5
6
MAGGIE 1
2
3
4
5
6
INDY 1
2
3
4
5
6
2: Set position of Throttle Valve to (0%, 25%, 50%, 75% closed) and vary Ar and N2 (Holly and
Indy) gas flow through the Mass Flow Controller(s). Measure the resulting pressure on all of the
gauges. Plot the pressure measured with different gas flows and valve positions. Explain the
differences that you observe.
3: Describe how to control the process pressure using mass flow controllers and Throttle Valve
position control. Explain why one might want to vary the either of these to large or smaller
values.
Data sheet for HOLLY ONLY
Gas type: Gas Type:
Throttle Flow
% closed (sccm)
0 1
0 2
0 5
0 10
Throttle Flow
% closed (sccm)
25 1
25 2
25 5
25 10
Throttle Flow
% closed (sccm)
50 1
50 2
50 5
50 10
Throttle Flow
% closed (sccm)
75 1
75 2
75 5
75 10
Throttle Flow
% closed (sccm)
90 1
90 2
90 5
90 10
Throttle Flow
% closed (sccm)
95 1
95 2
95 5
95 10
Data sheet for INDY ONLY
Gas type: Gas Type:
Throttle Flow
% closed (sccm)
0 10
0 20
0 30
0 40
Throttle Flow
% closed (sccm)
25 10
25 20
25 30
25 40
Throttle Flow
% closed (sccm)
50 10
50 20
50 30
50 40
Throttle Flow
% closed (sccm)
75 10
75 20
75 30
75 40
Throttle Flow
% closed (sccm)
90 10
90 20
90 30
90 40
Throttle Flow
% closed (sccm)
95 10
95 20
95 30
95 40