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9:00 21:00PM
Machine Unit Check items Description of problems Remark Remark
Inspector Pass or Fail Inspector Pass or Fail
Is the air flow OK? (check only thread direction is facing down and exhaust section)
9:00 21:00PM
Machine Unit Baths Check items Description of problems Remark Remark
Inspector Pass or Fail Inspector Pass or Fail
Bending of pipe
Whole
Leaked chemical in the piping rooms
Corrosion or damage of in-line heater (check only when the tank is empty)
9:00 21:00PM
Machine Unit Baths Check items Description of problems Remark Remark
Inspector Pass or Fail Inspector Pass or Fail
Is the air flow OK? (check only thread direction is facing down)
Whole
Corrosion, stains, powder, or marks on bench top/wall inside the doors
Daily check sheet (WD4)
Date : (Ver. 2_29.May.2013) Inspector Supervisor Quality Engineer Manager
9:00 21:00PM
Machine Unit Baths Check items Description of problems Remark Remark
Inspector Pass or Fail Inspector Pass or Fail
WD4 Corrosion or damage of Thermocouples (check only when the tank is empty)
Is the air flow OK? (check only thread direction is facing down)
Whole
Corrosion, stains, powder, or marks on bench top/wall inside the doors
Daily check sheet (CR10K)
Date : Inspector Supervisor Quality Engineer Manager
9:00:AM 21:00PM
Area Unit Check items Description of problems Remark Remark
Inspector Pass or Fail Inspector Pass or Fail
Is the chemical storage place having a clear, clean and safe walk path?
Work Station Is the work station is free from any metallic objects?
& PPE
Cabinet Does the PPE cabinet is clean?
Shoe Rack Is the shoe clean and fit to be use in class 10K?
Are the door and chamber clean? (Normality : Non stain and rusts)
Gowning
Room
Spin Dryer Machine Shiftily Check List
Month : …………………Year :………. ………
DATE /
ITEM DETAILS SETTING / CONDITION SHIFT 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
a: Phase 1: Rinse DAY
1 Spin Dryer Time /Speed : 40s/600rpm NIGHT
Phase 2: Dry 1 DAY
b : Time /Speed : 360s/2400rpm NIGHT
Phase 3: Dry 2 DAY
c: Time /Speed : 80s/1100rpm NIGHT
Phase 1: Rinse DAY
d : Time /Speed : 40s/600rpm NIGHT
Phase 2: Dry 1 DAY
e : Time /Speed : 360s/2400rpm NIGHT
Phase 3: Dry 2 DAY
f: Time /Speed : 80s/1100rpm NIGHT
a: Ok or Not DAY
2 N2 Supply NIGHT
a: Ok or Not DAY
3 DIW supply NIGHT
a: no any abnormality: DAY
4 overall machine area ( Leak,Smell, Vibration,sound ) NIGHT
DAY
Time : NIGHT
DAY
Check By ( Operator ID # ) NIGHT
DAY
Acknowledged By ( Supervisor ID # ) NIGHT
1 7 13
2 8 14
Any mc
issue 3 9 15
/
Remarks
Any mc
issue
/ 4 10
Remarks
5 11
6 12
NOTE : Please inform supervisor immediately for any abnormality or out -of-spec items
DATE /
ITEM DETAILS SETTING / CONDITION SHIFT 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30
a: Phase 1: Rinse DAY
1 Spin Dryer Time /Speed : 40s/600rpm NIGHT
Phase 2: Dry 1 DAY
b : Time /Speed : 360s/2400rpm NIGHT
Phase 3: Dry 2 DAY
c: Time /Speed : 80s/1100rpm NIGHT
Phase 1: Rinse DAY
d : Time /Speed : 40s/600rpm NIGHT
Phase 2: Dry 1 DAY
e : Time /Speed : 360s/2400rpm NIGHT
Phase 3: Dry 2 DAY
f: Time /Speed : 80s/1100rpm NIGHT
a: Ok or Not DAY
2 N2 Supply NIGHT
a: Ok or Not DAY
3 DIW supply NIGHT
a: no any abnormality: DAY
4 overall machine area ( Leak,Smell, Vibration,sound ) NIGHT
DAY
Time : NIGHT
DAY
Check By ( Operator ID # ) NIGHT
DAY
Acknowledged By ( Supervisor ID # ) NIGHT
16 22 28
17 23 29
Any mc
issue 18 24 30
/ 19 25 31
Remarks
20 26
21 27
NOTE : Please inform supervisor immediately for any abnormality or out -of-spec items
31
WD4 Machine Check List
Month :……
DATE /
ITEM DETAILS SETTING / CONDITION SHIFT 1 2 3 4 5 6 7
DAY
Time : NIGHT
DAY
1 Process Beaker Condition / Content No
No Abnormality
Abnormality NIGHT
(sounds, leak..etc); DAY
2 Pump Condition Functionality NIGHT
Tank #1,#3 & #5 DAY
a: recycle pump NIGHT
Tank #2, #4, #6, QDR DAY
b: DI
No suply pump
Abnormality NIGHT
(jerking…etc); DAY
3 Robotic Arm Functionaly NIGHT
DAY
4 Exhaust Functionaly
Tank #5 NIGHT
( Ultrasonic 6 ~ 7 DAY
5 Ultrasonic A) NIGHT
6 Recipe Setting
DAY
Tank #1, #3, #5 600s NIGHT
Temperatur Process
time :
DAY
Tank #1 & 5 HCL 6.0 ltrs NIGHT
ix By Liters
Chemical Mix By Liters
DAY
Tank #1 & 5 H2O2 3.0 ltrs NIGHT
DAY
Tank #1 & 5 DIW 46.0 ltrs, 41.0 ltrs NIGHT
DAY
Tank #3 H2SO4 50.0 ltrs NIGHT
DAY
c: Tank #3 H2O2 5.0 ltrs NIGHT
No Abnormality: (leak, DAY
7 Overall Machine Area smell,vibration, sound ) NIGHT
DAY
Check By ( Operator ID # ) NIGHT
DAY
Acknowledged By ( Supervisor ID # ) NIGHT
1 7 13
2 8 14
Any mc issue
3 9 15
/
Remarks 4 10
5 11
6 12
NOTE : Please inform supervisor immediately for any abnormality or out -of-spec items
DAY
Tank #1 & 5 H2O2 3.0 ltrs NIGHT
DAY
Tank #1 & 5 DIW 46.0 ltrs, 41.0 ltrs NIGHT
DAY
Tank #3 H2SO4 50.0 ltrs NIGHT
DAY
c: Tank #3 H2O2 5.0 ltrs NIGHT
No Abnormality: (leak, DAY
7 Overall Machine Area smell,vibration, sound ) NIGHT
DAY
Check By ( Operator ID # ) NIGHT
DAY
Acknowledged By ( Supervisor ID # ) NIGHT
16 22 28
17 23 29
Any mc issue
18 24 30
/
Remarks 19 25 31
20 26
21 27
NOTE : Please inform supervisor immediately for any abnormality or out -of-spec items
……………………………… Year :………………………………
8 9 10 11 12 13 14 15
……………………………… Year :………………………………
23 24 25 26 27 28 29 30 31
WD3 Machine Check List Month : ……………..…Year : ………………….
DATE /
ITEM DETAILS SETTING / CONDITION SHIFT 1 2 3 4 5 6 7 8 9 10 11 12 13 14
DAY
Time : NIGHT
Process Beaker Condition / DAY
1 Content No Abnormality NIGHT
No Abnormality (sounds, leak..etc); DAY
2 Pump Condition Functionality NIGHT
DAY
a Tank #1, #3, #5, #7, #9 recycle pump NIGHT
Tank #2, #4, #6, #8, #10 QDR DI DAY
b supply pump NIGHT
No Abnormality (jerking…etc); DAY
3 Robotic Arm Functionaly NIGHT
DAY
4 Exhaust Functionally NIGHT
DAY
5 Ultrasonic Tank #3 & #9 ( Ultrasonic 6 ~ 7 A ) NIGHT
6 Recipe Setting ( Manual Mix )
Process time : DAY
7 Tank #1, #3, #5, #7, #9 600s NIGHT
Process time : DAY
8 Tank #2, #4, #6, #8, #10 30s ( shower)/60s ( bubble) NIGHT
Temperature : DAY
9 Tank #1 & #3 40 °C ± 5 °c NIGHT
Chemical Mix Ratio DAY
10 Tank #1 NH4OH NH4OH – 7L, H2O2 – 5L, DIW- 58L NIGHT
Chemical Mix Ratio DAY
11 Tank #3 NH4OH NH4OH – 5L, H2O2 – 3.5L, DIW – 41L NIGHT
Chemical Mix Ratio DAY
12 Tank #5, #7 HF HF – 14L, DIW – 56L NIGHT
Chemical Mix Ratio DAY
13 Tank #9 Clair CLAIR – 1L, DIW – 44L NIGHT
No Abnormality; (leak, smell, DAY
14 Overall Machine Area vibration, sound ) NIGHT
DAY
Check By ( Operator ID # ) NIGHT
DAY
Acknowledged By ( Supervisor ID # )
Acknowledged By ( Supervisor ID # ) NIGHT
1 7 13
2 8 14
Any mc issue 3 9 15
/ Remarks 4 10
5 11
6 12
NOTE : Please inform supervisor immediately for any abnormality or out -of-spec items
DATE /
ITEM DETAILS SETTING / CONDITION SHIFT 16 17 18 19 20 21 22 23 24 25 26 27 28 29
DAY
Time : NIGHT
Process Beaker Condition / DAY
1 Content No Abnormality NIGHT
No Abnormality (sounds, leak..etc); DAY
2 Pump Condition Functionality NIGHT
DAY
a Tank #1, #3, #5, #7, #9 recycle pump NIGHT
Tank #2, #4, #6, #8, #10 QDR DI DAY
b supply pump NIGHT
No Abnormality (jerking…etc); DAY
3 Robotic Arm Functionaly NIGHT
DAY
4 Exhaust Functionally NIGHT
DAY
5 Ultrasonic Tank #3 & #9 ( Ultrasonic 6 ~ 7 A ) NIGHT
6 Recipe Setting ( Manual Mix )
Process time : DAY
7 Tank #1, #3, #5, #7, #9 600s NIGHT
Process time : DAY
8 Tank #2, #4, #6, #8, #10 30s ( shower)/60s ( bubble) NIGHT
Temperature : DAY
9 Tank #1 & #3 40 °C ± 5 °c NIGHT
Chemical Mix Ratio DAY
10 Tank #1 NH4OH NH4OH – 7L, H2O2 – 5L, DIW- 58L NIGHT
Chemical Mix Ratio DAY
11 Tank #3 NH4OH NH4OH – 5L, H2O2 – 3.5L, DIW – 41L NIGHT
Chemical Mix Ratio DAY
12 Tank #5, #7 HF HF – 14L, DIW – 56L NIGHT
Chemical Mix Ratio DAY
13 Tank #9 Clair CLAIR – 1L, DIW – 44L NIGHT
No Abnormality; (leak, smell, DAY
14 Overall Machine Area vibration, sound ) NIGHT
DAY
Check By ( Operator ID # ) NIGHT
DAY
Acknowledged By ( Supervisor ID # ) NIGHT
16 22 28
17 23 29
Any mc issue 18 24 30
/ Remarks 19 25 31
20 26
21 27
NOTE : Please inform supervisor immediately for any abnormality or out -of-spec items
15
30 31
WD1 Machine Check List
DATE /
ITEM DETAILS SETTING / CONDITION SHIFT 1 2 3 4 5 6 7
DAY
Time : NIGHT
DAY
1 Process Beaker Condition / Content No Abnormality NIGHT
No Abnormality ( sounds, leak..etc); DAY
2 Pump Condition Functionality NIGHT
DAY
a: Tank #7, #9 recycle pump NIGHT
DAY
c: Tank #4, #6, #8, #10 QDR DI suply pump NIGHT
DAY
3 Robotic Arm No Abnormality( jerking…etc); Functionaly NIGHT
DAY
4 Exhaust Functionaly NIGHT
DAY
5 Ultrasonic Tank #3 and #5 ( Ultrasonic 2.5 ~ 4 A ) NIGHT
6 Recipe Setting
Process time : DAY
a 1: Tank #3, #5, #7, #9 600.0s NIGHT
Process time : 20s ( shower)/160s DAY
a 2: Tank #4, #6, #8, #10 ( bubble) NIGHT
Temperature : DAY
b: Tank #7 #9 40 °C ± 5 °c NIGHT
DAY
Tank #3 VALTRON / DI 20.0 ltrs / 80.0 ltrs NIGHT
DAY
Chemical Mix By Liters
8 9 10 11 12 13 14 15
Month :………………………………… Year :………………………………
23 24 25 26 27 28 29 30 31
WD0 Machine Check List
Month :………………………………
DATE /
ITEM DETAILS SETTING / CONDITION SHIFT 1 2 3 4 5 6 7 8
DAY
Time : NIGHT
DAY
1 Process Beaker Condition / Content No Abnormality NIGHT
No Abnormality (sounds, leak..etc); DAY
2 Pump Condition Functionality NIGHT
DAY
a: Tank #3 & #5 circulation pump NIGHT
DAY
b: Tank #2, #4, #6, QDR DI shower pump NIGHT
DAY
3 Robotic Arm No Abnormality (jerking…etc); Functionaly NIGHT
DAY
4 Exhaust Functionaly NIGHT
DAY
5 Ultrasonic Tank #1 ( Ultrasonic 2.5 ~ 4 A ) NIGHT
6 Recipe Setting
DAY
Tank #1, #3 and #5 600s NIGHT
Process 20s ( shower)/ DAY
a: time : Tank #2, #4, #6 160s ( bubble) NIGHT
DAY
b: Temp: Tank #3 & 5 40 °C ± 5 °c NIGHT
DAY
Tank #1 SILCONOX 5.0 ltrs NIGHT
Chemical Mix By Liters
DAY
Tank #1 DIW 90.0 ltrs NIGHT
DAY
Tank #3 HCL 5.0 ltrs NIGHT
DAY
Tank #3 DIW 90.0 ltrs NIGHT
DAY
Tank #5 HCL 5.0 ltrs
c:
Chemical
Tank #5 HCL 5.0 ltrs NIGHT
DAY
c: Tank #5 DIW 90.0 ltrs NIGHT
No Abnormality: (leak, smell,vibration, DAY
7 Overall Machine Area sound ) NIGHT
DAY
Check By ( Operator ID # ) NIGHT
DAY
Acknowledged By ( Supervisor ID # ) NIGHT
1 7 13
2 8 14
Any mc issue
3 9 15
/
4 10
Remarks
5 11
6 12
NOTE : Please inform supervisor immediately for any abnormality or out -of-spec items
DAY
Tank #1 DIW 90.0 ltrs NIGHT
DAY
Tank #3 HCL 5.0 ltrs NIGHT
DAY
Tank #3 DIW 90.0 ltrs NIGHT
DAY
Tank #5 HCL 5.0 ltrs NIGHT
DAY
c: Tank #5 DIW 90.0 ltrs NIGHT
No Abnormality: (leak, smell,vibration, DAY
7 Overall Machine Area sound) NIGHT
DAY
Check By ( Operator ID # ) NIGHT
DAY
Acknowledged By ( Supervisor ID # ) NIGHT
16 22 28
17 23 29
Any mc issue
18 24 30
/
19 25 31
Remarks
20 26
21 27
NOTE : Please inform supervisor immediately for any abnormality or out -of-spec items
………………………………… Year :………………………………
9 10 11 12 13 14 15
………………………………… Year :………………………………
24 25 26 27 28 29 30 31