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Title: Document Number:

N
STANDARD, MECHANICAL 67-268813-00
DRAWING
Page 1 of 21 Revision: D

TABLE OF CONTENTS

1.0 PURPOSE: 33

2.0 SCOPE: 33

3.0 DEFINITIONS: 33

4.0 REFERENCE DOCUMENTS: 44

5.0 REVISION HISTORY: 44

6.0 STANDARD: 55

6.1 Types of Mechanical Drawings 55


6.1.1 Assembly Drawing 55
6.1.2 Monodetail Drawing 55
6.1.3 Altered Item Drawing 55
6.1.4 Source Control Drawing 55
6.1.5 Tabulated Monodetail Drawing 55
6.1.6 Kit Drawing 55
6.1.7 Water Flow Diagrams - 55

6.2 Detail Drawing Standards 55


6.2.1 Paper Size 55
6.2.2 Part Description 55
6.2.3 Prefix Designation 66
6.2.4 Part Number 66
6.2.5 File Naming 66
6.2.6 Revision History 66
6.2.7 Part Marking 99
6.2.8 Title Block 1010
6.2.9 Standard Tolerances 1111
6.2.10 Chamfer Annotation 1111
6.2.11 Fillet and Radii Annotation 1212
6.2.12 Surface Texture Annotation 1212
6.2.13 Drawing Notes 1414

6.3 General Dimensioning Practices 1717


6.3.1 Dimension Symbols 1818
6.3.2 Arrow Heads 1818

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6.4 Item Balloons 1818


6.4.1 Size 1818
6.4.2 Format 1818
6.4.3 Location on Drawing 1818
6.4.4 Text Outside Balloon 1919

6.5 Drawing Views 1919

6.6 Drawing Sheets 2020

6.7 Drawing Parts List 2020

6.8 TEXT 2121


6.8.1 Height for Dimension &Notes 2121
6.8.2 Views, Sections, and Details 2121

6.9 DETAILS, SECTIONS & VIEWS 2121


6.9.1 CUTTING LINE 2121

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1.0 Purpose:
To provide a clear, simple and consistent standard for the creation of mechanical engineering
drawings so that engineers and designers are capable of producing documentation which meets
or exceeds Novellus documentation and ECO requirements.
Compliance with this standard ensures that drawings will meet the requirements of the
Document Control checking procedure therefore producing a quality document.
2.0 Scope:
All major areas of the formatting of mechanical drawings are covered. Frequent, easily
understood examples and graphics are included.
This standard is written to be as CAD neutral as possible and applies to any CAD package in
use at Novellus. However, it is important to note that all new products are to be designed using
Pro/ENGINEER with few exceptions.
This drawing standard shall be used by both internal Novellus engineers and designers and
given to outside suppliers when Novellus seeks to hire outside suppliers to do design/drafting
services. This will ensure all engineering documentation is formatted the same.

UNLESS OTHERWISE SPECIFIED IN SECTION 6.0 OF THIS STANDARD ALL


DOCUMENTATION SHALL CONFORM TO THE STANDARDS LISTED IN
SECTION 4.0. THIS MEANS THAT IF THERE IS A CONFLICT BETWEEN WHAT
IS SPECIFIED IN SECTION 6.0 OF THIS STANDARD AND THE STANDARDS
REFERENCED IN SECTION 4.0, THE REQUIREMENT SPECIFIED IN SECTION
6.0 SHALL PREVAIL.
This standard does not include the creation of cable harness assembly drawings. Cable harness
assembly drawings are covered in the ELECTRICAL DRAWING STANDARDS document.
3.0 Definitions:

ASME - American Society of Mechanical Engineers


ANSI - American National Standards Institute
SAP - ERP system (Systems Applications Products)
BOM - (Bill of Material) Refers to a list of parts that make up a separable
assembly. The BOM is controlled by Windchill only and do not
appear on mechanical drawings.
Parts List - Refers to the list of required parts shown on inseparable assembly
drawings. Parts lists appear only on mechanical drawings and are
not entered in Windchill.

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4.0 Reference Documents:


ASME Y14.2M-1992 - Line Conventions and Lettering
ASME Y14.3M-1994 - Multiview and Sectional View Drawings
ASME Y14.4M-1989 - Pictorial Drawing
ASME Y14.5M-1994 - Dimensioning and Tolerancing
ASME Y14.6-2001 - Screw Thread Representation
ASME Y14.8M-1996 - Castings and Forgings
ANSI Y14.13M-1981 - Mechanical Spring Representation
ASME Y14.36M-1996 - Surface Texture Symbols
Standard Symbols for Welding, Brazing and
ANSI/AWS A2.4-93 -
Nondestructive Examination
ASME Y14.24M-1989 - Types and Applications of Engineering
Drawings
74-119910-00 - Specification, Torque, Threaded Fastener
DOC-2054 - Tabulated Drawing Standard
DOC-2002 - Part Number Assignment & File Naming
CAE-2301 - Pro/E and Pro/INTRALINK File Naming

5.0 Revision History:


ECO and Date Originated By History
Revision
51525 A 03/18/2004 A. Teresi
60794 B 04/15/2005 A. Teresi/JAD
92419 C 07/16/2008 N. KNUDSON
92625 D 9/3/2008 S.TAKAHASHI

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6.0 Standard:
6.1 Types of Mechanical Drawings
The following mechanical engineering drawings are used at Novellus Systems. Refer to
ASME Y14.24M-1989 for definition and requirements of the drawing.
6.1.1 Assembly Drawing
6.1.1.1 Separable Assembly Drawing - Tabulated drawings of separable
assemblies shall conform to Novellus Tabulated Drawing Standard 67-
269916-00. Use proper commodity code for part number in accordance
with Novellus QMS document DOC-2002.
6.1.1.2 Inseparable Assembly Drawing – This includes welded and brazed
assemblies. Tabulated drawings of inseparable assemblies shall conform
to Novellus Tabulated Drawing Standard 67-269916-00. Use proper
commodity code for part number in accordance with Novellus QMS
document DOC-2002.
6.1.2 Monodetail Drawing - Use proper commodity code for part number in accordance
with Novellus QMS document DOC-2002.
6.1.3 Altered Item Drawing
6.1.3.1 This type of drawing is a Novellus 19-XXXXXX-XX part number.
6.1.4 Source Control Drawing - Use proper commodity code for part number in
accordance with Novellus QMS document DOC-2002.
6.1.5 Tabulated Monodetail Drawing
6.1.5.1 Tabulated drawings of individual piece parts shall conform to Novellus
Tabulated Drawing Standard DOC-2054.
6.1.6 Kit Drawing - Use proper commodity code for part number in accordance with
Novellus QMS document DOC-2002.
6.1.7 Water Flow Diagrams -
6.2 Detail Drawing Standards
6.2.1 Paper Size
Detail drawings are created exclusively on “D” size CAD borders (34” X 22”).
These “D” size drawings are usually printed on “B” size paper (17” X 11”).
Depending upon the size of the part being detailed and the CAD software being
used, the border sizes are scaled to reflect the size of the part.
Refer to the specific CAD Standard for information on borders files.
6.2.2 Part Description
Assign the part a description per the format described in Novellus QMS document
DOC-2002. Limit the part description on the drawing to a length of 40
characters since SAP allows only a 40-character limit.

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6.2.3 Prefix Designation


Assign the part a prefix designation (commodity code) per Novellus QMS
document DOC-2002.
6.2.4 Part Number
Assign a part number per Novellus QMS document DOC-2002.
6.2.5 File Naming
Assign a file name per Novellus QMS document DOC-2002. For
Pro/ENGINEER, assign file names per CAE-2301 (Pro/E and Pro/INTRALINK
File Naming).
6.2.6 Revision History
Unreleased parts are tracked using numeric revisions, beginning with 1.
Revisions are converted to alpha characters upon ECO release, beginning at A.
Do not use letters I, O, Q, S, X or Z for revisions.
6.2.6.1 Revision History Tables
• Drawing Location:
Revision history tables are placed in the upper-right corner of sheet
one of the drawing. The revision history table explains the details of
the change(s).
• Space Availability:
Revision history tables should be displayed on the drawing for the
last three revisions at a minimum. If the revision history tables
begin to interfere with drawing content, the oldest revision history
tables should be removed as required.
6.2.6.2 Elements of Revision History Block Format
The six elements of the revision history block are explained in Figure 1.

ECO ZON LTR DESCRIPTION DATE APPROVED


NO. E
     
Figure 1

 ECO number as it appears on all documents in the ECO.


 The drawing zone where the change is occurring. This is obtained
from the vertical and horizontal edges of the drawing border.
 Revision level character. The character can be alpha (for
manufacture-released parts), numeric (for RADCO-released and CES-
released parts), or combination alpha/numeric (for Fast Track ECO
revision changes on manufacture-released parts).
 Numbered and detailed description of each change. Should also
indicate sheet number where change is occurring in multiple sheet

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drawings. While space permits, the full revision history should be


displayed.
 The date that the drawing is updated.
 The name of the originator of the ECO. Format of name shall be first
initial, followed by a period, a space, and the full last name. For
example, J. Doe
Refer to the appropriate CAD standard for revision history table
template files. If a template for the revision history is not available,
please create one on your drawing which matches the example above.
6.2.6.3 Revision History Block Styles
Two styles are used for describing changes on the drawing: general and
detailed. Most simple parts undergoing minor changes should use the
general style. All parts being released for the first time on an ECO
should use the general style. The detailed style should be used to
describe complex changes, changes on complex parts, crowded drawings
or on parts whose drawings spans multiple sheets. The detailed style
documents the changes much more thoroughly and although it requires a
few extra minutes to prepare the drawings using the detailed style, the
benefits are abundant. The detailed style allows engineering, suppliers,
manufacturing and purchasing personnel to quickly locate and visualize
the changes.
• General Style
The revision history table states the general nature of the changes in
a single, brief, phrase. Accompanying the revision history table are
revision triangles that indicate the point of change at the various
locations on the drawing. The revision history triangle contains the
revision letter only.
• Detailed Style
Each change is documented via an alpha-numeric code indicating
revision level and change number. For example, if the drawing is
going from revision B to revision C, each of the changes in revision
C are documented in the revision history table as displayed in the
image below. The first change is assigned C1, the second C2, the
third C3, etc.

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6.2.6.4 Revision History Triangle:


• The revision history triangle is added at the location where the
change is occurring and acts as a reference back to the revision
history table on sheet 1. For example, on sheet 4, in zone B3, a
triangle is placed next to the changing dimension. See Figure 2.

Figure 2

6.2.6.5 Text Format for Production Release From RADCO


For drawings being released for the first time on an ECO, the description
should say:

ECO Zone LT Description Date Approved


No. R
12345 - A Production Release From 10/26/0 John Doe
RADCO, Last 1 Or
Numeric Revision Was 3*. J.Doe

*Numeric revision corresponds to the last RADCO revision prior to Production Release

Figure 3

6.2.6.6 Revision Marking

Revisions are denoted by the use of a


triangle at the location where the change
is to occur and are only shown for the
current revision. Revision triangles from
earlier revisions should be deleted.
Figure 4

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6.2.7 Part Marking


Parts and assemblies are marked with the Novellus part number and revision level
per Novellus specification 74-024094-00.

• A phantom line box is shown on the part and


referenced with a boxed note to indicate the
location where the part number will be marked.
• The part number must be readable in direction
and orientation shown.

Figure 5

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6.2.8 Title Block


Fill-in the title block on the drawing per the following table.

Area Information Text


Height
Approvals The boxes for “DRAWN BY” and “DATE” should be filled-in by .12
the author of the drawing. “CHK”, “ENGR” and “MFG CHECK”
are to be filled in during the ECO release of the part or assembly.
Enter the character “-” in these boxes as a place holder. Format of
name shall be first initial, followed by a period, and the full last
name. For example, J. Doe
Finish Should refer to a boxed, numbered note or should show “NA” for .12
none.
Raw • If part consists of a single item, RAW material may be listed, .12
Material such as AL ALY 6061-T6
• If part is single item, RAW material may point to the drawing
notes using a numbered box.
• If part consists of multiple items (inseparable assemblies), the
words “SEE PARTS LIST” for inseparable assemblies, or
“SEE BOM” for separable assemblies should listed.
Tolerances See section titled Standard Tolerances (Section 6.2.9) .12
Drawing See section titled Part Description (Section 6.2.2) .15625
Title
Drawing Use only official Novellus part numbers. .18
Number See section titled Part Number (Section 6.2.4)
Revision See section titled Revision History (Section 6.2.6) .15625
Scale Overall drawing scale is listed as a fraction. Nearly all detail .12
drawings are reduced to “B” size when printed, therefore drawing
scale has nearly no meaning. Additionally, borders include the
statement “DO NOT SCALE DRAWING”
File Pro/ENGINEER - the file AutoCAD. File name is not to be .12
name of the model associated listed on the drawing
with the drawing, less the file
extension
Sheet The current sheet number, along with the total number of sheets in .12
the drawing, is listed in this cell. Example: 1 OF 1 or 2 OF 3
Table 1

Some CAD software, such as Pro/ENGINEER, can automatically fill-in many of the cells
within the drawing title block. The CAD software should fill-in the title block per the table
above.

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6.2.9 Standard Tolerances


The following table includes the standard, default tolerances for specific types of
components. These tolerances may be specified in the title block of the drawing. These
tolerances may be changed on the drawing as design intent dictates.

Component Type Commodity Tol. ±.XX Tol. ± XXX Tol ± Xº


Code
Welded tube assemblies 10 .03 .010 1º
Machined parts 15 .01 .005 ½º
General welded assemblies 16 .03 .010 1º
Sheet Metal 17 .02 .010 1º
Table 2
6.2.10 Chamfer Annotation
• Quantity, size and angle in degrees. Some
CAD software may reverse the order and
show the angle before the size, this is
acceptable.
• If quantity is one (1), do not include the
quantity in the note.

Figure 6

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6.2.11 Fillet and Radii Annotation


6.2.11.1 Bend Radius for Sheet Forming
• In sheet forming operations a bend radius callout on the drawing is
required. Two dimension options should be considered. They are (1)
direct tolerance method, and (2) minimum bend radius method.

Direct Tolerance Method:


• The bend radius dimension is called out
directly with its associated tolerance.
• The minimum allowable tolerance
should not exceed below the minimum
allowable bend radius for the material
thickness, material type, and temper of
the material.

Minimum Bend Radius Method:


• The word R MIN is specified at the bend
or a flag note is referenced with the
general note “MIN BEND RADIUS.
• This will mean that the manufacturer
shall use the smallest possible bend
radius based on sheet material properties
without cracking the material due to
excessive cold working of the material.
• This method does not directly specify a
maximum bend radius. The maximum
radius limit may be important in some
applications.

Figure 7
6.2.12 Surface Texture Annotation
Unless otherwise specified in this document all surface texture symbols and
terminology shall conform to ASME Y14.36M (SURFACE TEXTURE
SYMBOLS).
6.2.12.1 Specification of surface lay on non-circular seal areas for flat surfaces
• Specify surface roughness, waviness, or other surface texture
attributes in accordance with functional requirements. Use surface
texture symbol or use a general note to define special surface texture
requirements such as maximum allowable or no surface flaws in the
defined surface area.

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• Specify limits of seal surface boundaries using either unidirectional


(maximum or minimum in one direction only) or bi-directional
tolerances (±). Use phantom lines to represent borders of seal areas.
• If required, specify the lay direction of the seal area (same as
longitudinal direction of seal on mating part) using double-ended
arrows within or just outside of the defined seal area. Add note to
one of the double-ended arrow that states: DIRECTION OF LAY.

Figure 8
6.2.12.2 Specification of surface lay for o-ring grooves
• When defining the surface lay at the bottom of an o-ring groove use
both the “⊥” symbol on surface texture symbol and the “all around”
symbol” on the leader on the section view of the o-ring groove.
Refer to Figure 9.
• Add a reference note to surface texture symbol indicating that the
indicated seal surface shall be free of surface flaws as in Figure 8

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Figure 9
6.2.13 Drawing Notes
6.2.13.1 Types of Notes
• Local Notes: Notes that apply directly to a particular area of the
drawing, indicating local characteristics.
• General Notes: Notes that apply to the drawing in general and would
become repetitive if placed at each point of application.
6.2.13.2 Location of General Notes on Drawing
• Notes should only appear on sheet 1.
• Placement above the title block is
preferred.
• Placement in the lower left corner is
accepted.

Figure 10

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6.2.13.3 Note Format


• Notes should descend on the sheet and start with the number 1.
• Notes should be listed in order of operation to be performed.
• Notes shall be expressed in the present tense. For example, NICKEL
PLATE instead of NICKEL PLATED.
• Notes shall be brief but complete and have only one interpretation.
• Notes should not have non-essential words such as “a”, “an”, and
“the”.
• Each note shall communicate one thought (or intent). If individual
statements need to be communicated in a single note because they
share the same intent each statement is addressed as a separate
sentence separated by periods in the single note.
• Once a general note is assigned a number the intent of the note
cannot be changed without giving it a new note number. For
example, if Note 3 is a note that specifies a cleaning requirement for
the part and the content of the note is deleted then Note 3 cannot be
used to specify the heat treatment of the part.
• When a note is deleted from a drawing the contents of the original
note is removed and replaced with the word ‘REMOVED”. The
number of the note is never removed from the drawing.
• Standard approved notes in ASCII text format may be available on
the server for use in specific CAD packages. Refer to the
appropriate CAD standards for more information.
• General notes shall be listed in numerical order from TOP to
BOTTOM.
6.2.13.4 Referenced Notes
• Boxes are used as the symbol to represent notes that are referenced
throughout the drawing.
• Each boxed note must be referred to on one of the drawing sheets.
Boxed notes do not include a period after the number.

Figure 11
Sample of General Notes

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6.2.13.5 Notes that Refer to Novellus Engineering and Manufacturing


Specifications

The first note on any mechanical piece part or assembly drawing
shall be: INTERPRET DRAWINGS PER NOVELLUS
STANDARD 67-268813-00. See Note 1 in Figure 11.
• The second note on a mechanical piece part drawing shall be:
MANUFACTURE PER NOVELLUS STANDARD
WORKMANSHIP SPECIFICATION, 74-032409-00. See Note 2 in
Figure 11.
• Cleaning specification:
CLEAN PER NOVELLUS SPECIFICATION 74-106348-00.
Specify either or both a cleaning method number and a class of
cleanliness.
• Part Identification: Refer to Novellus Part Identification Standard
74-024094-00 for drawing note format.
• Painting specification: Refer to Novellus Painting Specification 75-
000001-XX for drawing note format.
• Any part (piece part or assembly) drawing shall contain the
following note to define packaged accordance with Novellus spec.
74-160156-00:
PART SHALL BE PACKAGED IN ACCORDANCE WITH
NOVELLUS PURCHASED PARTS AND ASSEMBLIES
SPECIFICATION, 74-160156-00.
• Any assembly drawing with threaded fasteners shall contain the
following note:
ALL SCREWS SHALL BE TIGHTENED IN ACCORDANCE
WITH NOVELLUS SPEC. 74-119910-00.
(Please note that any special torque requirements for screws shall be
directly specified on the drawing.)
6.2.13.6 Specifying Notes that do not Reference Novellus Standards or
Specifications.
• Plating specifications: Use Military, ASTM, or other applicable
outside source for referencing plating requirements. Refer to
standardized plating notes in Pro-E Library.

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6.3 General Dimensioning Practices


• Dimensioning schemes should be specific to design intent.
• Dimension should be aligned vertically and horizontally when possible.
• Leader should point to the center of dimensioned holes and arcs.
• Leader should meet perpendicular with the midpoint of the chamfer.
• Center marks should be shown for holes.

Figure 12

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6.3.1 Dimension Symbols


• Depth, diameter, countersink, and counter-bore symbols should be used when
dimensioning these features.
• The word “THRU” should not be included for drilled holes which extend through the
part. See Figure 4 in the appendix.
• “2X ∅.500” (correct), “2X ∅.500 THRU” (not correct)
• The word “THRU” is required for tapped holes which are through the part.
• #10-32 UNF-2B THRU
• Holes tapped to a specific depth should use the symbol for depth.

6.3.2 Arrow Heads


• Should be filled.

Figure 13

6.4 Item Balloons


6.4.1 Size
The balloon diameter is .50” relative to a “D” size border at a scale of 1/1. Depending
upon CAD software, the balloon may need to be scaled relative to the border in order to
maintain the correct size relationship.
6.4.2 Format

Balloons may be drawn with the


leader pointing directly to the center
or with a leader extension attached
to the quadrant of the balloon.

Figure 14
6.4.3 Location on Drawing
Shown in standard and or isometric views.

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6.4.4 Text Outside Balloon

Text appearing outside of the balloon, such


as a quantity multiplier, should be vertically
aligned with the text inside the balloon.

Figure 15
6.5 Drawing Views
• An isometric view should be included on first sheet whenever possible.
• Views should be displayed with hidden lines or no hidden lines depending upon the
complexity of the part. When displaying hidden lines helps clarify the design, they
should be used.
• A solid object may be displayed as transparent as a means of showing a hidden object
and as an alternative to creating a cut-away view. For example: the female nut may be
made transparent so that the VCR gland may be dimensioned. Applies primarily to
welded tube assemblies (prefix 10). Refer to Figure 16.
• Visible tangent lines created in PRO-E when creating the 3-D models should be “turned
off” when creating the 2-D orthographic views of the PRO-E drawing. Refer to Figure
17.

Figure 16

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Document #: 67-268813-00 STANDARD, MECHANICAL DRAWING Page 20 of 21

INCORRECT CORRECT

Figure 17

6.6 Drawing Sheets


Drawing sheets should not be cluttered and adequate space should be left below the
revision block for additional revisions as necessary. Additional sheets should be added as
necessary to clarify views at a reasonable scale.
6.7 Drawing Parts List
Fill-in the drawing Parts List per the following table for inseparable assemblies.

Field Name Description of Entry


QUANTITY • Should be listed as a numeric total for each item appearing in the
parts list.
• A quantity of “A/R” may be shown for RAW material items.
PART or • The manufacturers part number should be listed for commercial
IDENTIFYING parts.
NUMBER • The file name should be listed for RAW material parts such as
tube members and plates.
DESCRIPTION • RAW material description such as “SHEET, .06 THK” should be
listed.
• Commercial parts description such as “FASTENER, SELF-
CLINCHING, #10-32” should be listed.
MATERIAL • RAW material should be listed such as “AL 6061-T6”
• Manufacturer should be listed for commercial parts such as
“PEM”
CODE IDENT • Not used. Use table on drawing to code holes/fasteners if
necessary.
ITEM • Numeric item number, ascending upwards starting at 1.

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Some CAD software, such as Pro/ENGINEER, can automatically fill-in the parts list on a
detail drawing when using an appropriate border. The CAD software should produce a
parts list that meets the specification shown above.

6.8 TEXT
6.8.1 Height for Dimension &Notes
Text height for all dimensions and notes should be .156” relative to a “D” size border at a
scale of 1/1. Depending upon CAD package, the text height may need to be scaled relative
to the border.

6.8.2 Views, Sections, and Details


• Text height for titles VIEW, SECTION and
DETAIL shall be .188”
• Text height for VIEW, SECTION and DETAIL
names shall be .25”
• Use Bold Font
Figure 18
6.9 DETAILS, SECTIONS & VIEWS
• Section, Detail and View Names shall use alpha characters. The following characters
shall not be used: I, O and Q
• Scale and quantity should be listed below the Detail, View or Section name when
required.

SECTION A-A SECTION A-A SECTION A-A


SCALE: 2/1 SCALE: 2/1
4X
6.9.1 CUTTING LINE
The cutting line used for sections should use a phantom line style.

Figure 19

THE INFORMATION CONTAINED HERIN IS THE SOLE PROPERTY OF NOVELLUS SYSTEMS INC. PERMISSION TO REPRODUCE OR USE THIS
INFORMATION MUST BE OBTAINED IN WRITING FROM NOVELLUS SYSTEMS INC.

Document Control Released 02/06/2013