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STANDARD, MECHANICAL 67-268813-00
DRAWING
Page 1 of 21 Revision: D
TABLE OF CONTENTS
1.0 PURPOSE: 33
2.0 SCOPE: 33
3.0 DEFINITIONS: 33
6.0 STANDARD: 55
THE INFORMATION CONTAINED HERIN IS THE SOLE PROPERTY OF NOVELLUS SYSTEMS INC. PERMISSION TO REPRODUCE OR USE THIS
INFORMATION MUST BE OBTAINED IN WRITING FROM NOVELLUS SYSTEMS INC.
THE INFORMATION CONTAINED HERIN IS THE SOLE PROPERTY OF NOVELLUS SYSTEMS INC. PERMISSION TO REPRODUCE OR USE THIS
INFORMATION MUST BE OBTAINED IN WRITING FROM NOVELLUS SYSTEMS INC.
1.0 Purpose:
To provide a clear, simple and consistent standard for the creation of mechanical engineering
drawings so that engineers and designers are capable of producing documentation which meets
or exceeds Novellus documentation and ECO requirements.
Compliance with this standard ensures that drawings will meet the requirements of the
Document Control checking procedure therefore producing a quality document.
2.0 Scope:
All major areas of the formatting of mechanical drawings are covered. Frequent, easily
understood examples and graphics are included.
This standard is written to be as CAD neutral as possible and applies to any CAD package in
use at Novellus. However, it is important to note that all new products are to be designed using
Pro/ENGINEER with few exceptions.
This drawing standard shall be used by both internal Novellus engineers and designers and
given to outside suppliers when Novellus seeks to hire outside suppliers to do design/drafting
services. This will ensure all engineering documentation is formatted the same.
THE INFORMATION CONTAINED HERIN IS THE SOLE PROPERTY OF NOVELLUS SYSTEMS INC. PERMISSION TO REPRODUCE OR USE THIS
INFORMATION MUST BE OBTAINED IN WRITING FROM NOVELLUS SYSTEMS INC.
THE INFORMATION CONTAINED HERIN IS THE SOLE PROPERTY OF NOVELLUS SYSTEMS INC. PERMISSION TO REPRODUCE OR USE THIS
INFORMATION MUST BE OBTAINED IN WRITING FROM NOVELLUS SYSTEMS INC.
6.0 Standard:
6.1 Types of Mechanical Drawings
The following mechanical engineering drawings are used at Novellus Systems. Refer to
ASME Y14.24M-1989 for definition and requirements of the drawing.
6.1.1 Assembly Drawing
6.1.1.1 Separable Assembly Drawing - Tabulated drawings of separable
assemblies shall conform to Novellus Tabulated Drawing Standard 67-
269916-00. Use proper commodity code for part number in accordance
with Novellus QMS document DOC-2002.
6.1.1.2 Inseparable Assembly Drawing – This includes welded and brazed
assemblies. Tabulated drawings of inseparable assemblies shall conform
to Novellus Tabulated Drawing Standard 67-269916-00. Use proper
commodity code for part number in accordance with Novellus QMS
document DOC-2002.
6.1.2 Monodetail Drawing - Use proper commodity code for part number in accordance
with Novellus QMS document DOC-2002.
6.1.3 Altered Item Drawing
6.1.3.1 This type of drawing is a Novellus 19-XXXXXX-XX part number.
6.1.4 Source Control Drawing - Use proper commodity code for part number in
accordance with Novellus QMS document DOC-2002.
6.1.5 Tabulated Monodetail Drawing
6.1.5.1 Tabulated drawings of individual piece parts shall conform to Novellus
Tabulated Drawing Standard DOC-2054.
6.1.6 Kit Drawing - Use proper commodity code for part number in accordance with
Novellus QMS document DOC-2002.
6.1.7 Water Flow Diagrams -
6.2 Detail Drawing Standards
6.2.1 Paper Size
Detail drawings are created exclusively on “D” size CAD borders (34” X 22”).
These “D” size drawings are usually printed on “B” size paper (17” X 11”).
Depending upon the size of the part being detailed and the CAD software being
used, the border sizes are scaled to reflect the size of the part.
Refer to the specific CAD Standard for information on borders files.
6.2.2 Part Description
Assign the part a description per the format described in Novellus QMS document
DOC-2002. Limit the part description on the drawing to a length of 40
characters since SAP allows only a 40-character limit.
THE INFORMATION CONTAINED HERIN IS THE SOLE PROPERTY OF NOVELLUS SYSTEMS INC. PERMISSION TO REPRODUCE OR USE THIS
INFORMATION MUST BE OBTAINED IN WRITING FROM NOVELLUS SYSTEMS INC.
THE INFORMATION CONTAINED HERIN IS THE SOLE PROPERTY OF NOVELLUS SYSTEMS INC. PERMISSION TO REPRODUCE OR USE THIS
INFORMATION MUST BE OBTAINED IN WRITING FROM NOVELLUS SYSTEMS INC.
THE INFORMATION CONTAINED HERIN IS THE SOLE PROPERTY OF NOVELLUS SYSTEMS INC. PERMISSION TO REPRODUCE OR USE THIS
INFORMATION MUST BE OBTAINED IN WRITING FROM NOVELLUS SYSTEMS INC.
Figure 2
*Numeric revision corresponds to the last RADCO revision prior to Production Release
Figure 3
THE INFORMATION CONTAINED HERIN IS THE SOLE PROPERTY OF NOVELLUS SYSTEMS INC. PERMISSION TO REPRODUCE OR USE THIS
INFORMATION MUST BE OBTAINED IN WRITING FROM NOVELLUS SYSTEMS INC.
Figure 5
THE INFORMATION CONTAINED HERIN IS THE SOLE PROPERTY OF NOVELLUS SYSTEMS INC. PERMISSION TO REPRODUCE OR USE THIS
INFORMATION MUST BE OBTAINED IN WRITING FROM NOVELLUS SYSTEMS INC.
Some CAD software, such as Pro/ENGINEER, can automatically fill-in many of the cells
within the drawing title block. The CAD software should fill-in the title block per the table
above.
THE INFORMATION CONTAINED HERIN IS THE SOLE PROPERTY OF NOVELLUS SYSTEMS INC. PERMISSION TO REPRODUCE OR USE THIS
INFORMATION MUST BE OBTAINED IN WRITING FROM NOVELLUS SYSTEMS INC.
Figure 6
THE INFORMATION CONTAINED HERIN IS THE SOLE PROPERTY OF NOVELLUS SYSTEMS INC. PERMISSION TO REPRODUCE OR USE THIS
INFORMATION MUST BE OBTAINED IN WRITING FROM NOVELLUS SYSTEMS INC.
Figure 7
6.2.12 Surface Texture Annotation
Unless otherwise specified in this document all surface texture symbols and
terminology shall conform to ASME Y14.36M (SURFACE TEXTURE
SYMBOLS).
6.2.12.1 Specification of surface lay on non-circular seal areas for flat surfaces
• Specify surface roughness, waviness, or other surface texture
attributes in accordance with functional requirements. Use surface
texture symbol or use a general note to define special surface texture
requirements such as maximum allowable or no surface flaws in the
defined surface area.
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Figure 8
6.2.12.2 Specification of surface lay for o-ring grooves
• When defining the surface lay at the bottom of an o-ring groove use
both the “⊥” symbol on surface texture symbol and the “all around”
symbol” on the leader on the section view of the o-ring groove.
Refer to Figure 9.
• Add a reference note to surface texture symbol indicating that the
indicated seal surface shall be free of surface flaws as in Figure 8
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Figure 9
6.2.13 Drawing Notes
6.2.13.1 Types of Notes
• Local Notes: Notes that apply directly to a particular area of the
drawing, indicating local characteristics.
• General Notes: Notes that apply to the drawing in general and would
become repetitive if placed at each point of application.
6.2.13.2 Location of General Notes on Drawing
• Notes should only appear on sheet 1.
• Placement above the title block is
preferred.
• Placement in the lower left corner is
accepted.
Figure 10
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Figure 11
Sample of General Notes
THE INFORMATION CONTAINED HERIN IS THE SOLE PROPERTY OF NOVELLUS SYSTEMS INC. PERMISSION TO REPRODUCE OR USE THIS
INFORMATION MUST BE OBTAINED IN WRITING FROM NOVELLUS SYSTEMS INC.
THE INFORMATION CONTAINED HERIN IS THE SOLE PROPERTY OF NOVELLUS SYSTEMS INC. PERMISSION TO REPRODUCE OR USE THIS
INFORMATION MUST BE OBTAINED IN WRITING FROM NOVELLUS SYSTEMS INC.
Figure 12
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Figure 13
Figure 14
6.4.3 Location on Drawing
Shown in standard and or isometric views.
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Figure 15
6.5 Drawing Views
• An isometric view should be included on first sheet whenever possible.
• Views should be displayed with hidden lines or no hidden lines depending upon the
complexity of the part. When displaying hidden lines helps clarify the design, they
should be used.
• A solid object may be displayed as transparent as a means of showing a hidden object
and as an alternative to creating a cut-away view. For example: the female nut may be
made transparent so that the VCR gland may be dimensioned. Applies primarily to
welded tube assemblies (prefix 10). Refer to Figure 16.
• Visible tangent lines created in PRO-E when creating the 3-D models should be “turned
off” when creating the 2-D orthographic views of the PRO-E drawing. Refer to Figure
17.
Figure 16
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INFORMATION MUST BE OBTAINED IN WRITING FROM NOVELLUS SYSTEMS INC.
INCORRECT CORRECT
Figure 17
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INFORMATION MUST BE OBTAINED IN WRITING FROM NOVELLUS SYSTEMS INC.
Some CAD software, such as Pro/ENGINEER, can automatically fill-in the parts list on a
detail drawing when using an appropriate border. The CAD software should produce a
parts list that meets the specification shown above.
6.8 TEXT
6.8.1 Height for Dimension &Notes
Text height for all dimensions and notes should be .156” relative to a “D” size border at a
scale of 1/1. Depending upon CAD package, the text height may need to be scaled relative
to the border.
Figure 19
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INFORMATION MUST BE OBTAINED IN WRITING FROM NOVELLUS SYSTEMS INC.