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Configuration for PWC-4

MEE1008 - Micro Electro Mechanical Systems (MEMS)

Module 5: Microactuators

Dr. K. Anandavel
Anandavel.k@vit.ac.in
anandavelvit@gmail.com
Mob: 770 880 4923
Room: 313-A43, SJT

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Outline

 Microactuators
• Introduction
• Working principles
 Actuations using
• Thermal forces
• Shape memory alloys
• Piezoelectric crystals
• Electrostatic forces

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Microactuators

 Actuator is designed to deliver a desired motion when it is driven by a power

source. It can be as simple as simple relay switch or as complex as an electric
motor
 Electromagnetic actuation is widely used in devices and machines at
macroscales. Rarely used as micro devices because of unfavourable
miniaturization scaling laws
 For devices at micro or mesoscale, there is little room for the electrical
conducting coils required for electromagnetic induction. Hence other kinds of
power sources to be used developed

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Microactuators
Working Principle

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Actuation using Thermal forces

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Actuation using Shape Memory Alloys

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Actuation using Shape Memory Alloys
Applications

http://www.jestr.org/downloads/volume5issue1/fulltext08050112.pdf

http://citeseerx.ist.psu.edu/viewdoc/download?doi=10.1.1.727.7766&rep=
rep1&type=pdf

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Actuation using Piezoelectric crystals

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Actuation using Piezoelectric crystals

Piezoelectrtic actuation is used in a micropositioning mechanism and micro clamp

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Actuation using Electrostatic forces

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Actuation using Electrostatic forces

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Actuation using Electrostatic forces

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Application of Microactuations

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Application of Microactuations

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Application of Microactuations

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Application of Microactuations

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Application of Microactuations

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Application of Microactuations

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Application of Microactuations

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Application of Microactuations
Microgyroscope

https://www.youtube.com/watch?v=cquvA_IpEsA
http://www.segway.com/ https://www.youtube.com/watch?v=mrGfc-3uv7o

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Application of Microactuations
Microgyroscope

https://www.youtube.com/watch?v=cquvA_IpEsA

https://www.youtube.com/watch?v=mrGfc-3uv7o

https://www.youtube.com/watch?v=t34Gv39ypRo

http://www.segway.com/

https://www.youtube.com/watch?v=rmlg5QkusFQ

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Application of Microactuations

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Application of Microactuations
Microgyroscopic structure

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Application of Microactuations

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Application of Microactuations

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Application of Microactuations

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Application of Microactuations

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Application of Microactuations

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Application of Microactuations

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Application of Microactuations

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Application of Microactuations

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Application of Microactuations

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THANK YOU !!

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THANK YOU !!

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References
1. Tai-Ran Hsu, Lectures notes on MEMS and MICROSYSTEMS
DESIGN AND MANUFACTURE
2. Tai-Ran Hsu, MEMS & MICROSYSTEMS Design and Manufacture

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