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  CONFIDENTIAL AS   CYL   Manual Isolation Valve     Main   Pneumatic Valve
 

CONFIDENTIAL

AS

 

CYL

 

Manual Isolation Valve

 
 

Main

 

Pneumatic Valve

 
 

Operation Step for SiH4 ISO module

Valve

Tube-1

Tube-2

Tube-3

Tube-4

Tube-5

Tube-6

Tube-7

Tube-1

Tube-2

Tube-3

Tube-4

Tube-5

Tube-6

Tube-7

XV-0

XV-T1

XV-T2

XV-T3

XV-T4

XV-T5

XV-T6

XV-T7

HV-T1

HV-T2

HV-T3

HV-T4

HV-T5

HV-T6

HV-T7

0

Check Manifold Condition

Close

Close

Close

Close

Close

Close

Close

Close

Close

Close

Close

Close

Close

Close

Close

 

Verify close all isolation valve (HV-T1_T7) on manifold

 

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Check Maniford Pressure

 

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Open / Close HV-T1_T7 individualy to verify NO LEAK

 

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OP/CLS

OP/CLS

OP/CLS

OP/CLS

OP/CLS

OP/CLS

OP/CLS

 

Close all isolation valve on manifold (HV-T1_T7)

 

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Close

Close

Close

Close

Close

Close

Close

1

Connect Pigtail

 

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2

Open all isolation valve (HV-T1_T7) on manifold

 

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Open

Open

Open

Open

Open

Open

Open

3

Low Pressure Leak Check

Open

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4

High Pressure Leak Check

Open

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5

Cycle Purge with manifold

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6

Close all isolation valve on manifold

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Close

Close

Close

Close

Close

Close

Close

7

Open Tube valve (XV-T1)

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Open

 

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8

Open HV-T1

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Open

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9

Check manifold pressure

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10

Open all isolation valve (HV-T1_T7) on manifold

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Open

Open

Open

Open

Open

Open

11

Leak check using gas detector on Manifold and connection point

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12

Close isolation valve (HV-T2_T7)

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Close

Close

Close

Close

Close

Close

13

Switch to Standby on BSGS

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14

Switch over to "ON LINE" automatically

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15

Open XV-T2 at PT-1 Pressure down 500 psig

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Open

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16

Open HV-T2 slowly

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Open

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17

Close HV-T1

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Close

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18

Close XV-T1

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Close

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19

Open XV-T3 at PT-1 Pressure down 500 psig

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Open

 

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20

Open HV-T3 slowly

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Open

 

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21

Close HV-T2

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Close

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22

Close XV-T2

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Close

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23

Open XV-T4 at PT-1 Pressure down 500 psig

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Open

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24

Open HV-T4 slowly

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Open

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25

Close HV-T3

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Close

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26

Close XV-T3

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Close

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27

Open XV-T5 at PT-1 Pressure down 500 psig

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Open

 

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28

Open HV-T5 slowly

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Open

 

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29

Close HV-T4

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Close

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30

Close XV-T4

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Close

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31

Open XV-T6 at PT-1 Pressure down 500 psig

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Open

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32

Open HV-T6 slowly

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Open

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33

Close HV-T5

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Close

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34

Close XV-T5

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Close

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35

Open XV-T7 at PT-1 Pressure down 500 psig

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Open

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36

Open HV-T7 slowly

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Open

37

Close HV-T6

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Close

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38

Close XV-T6

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| Close

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39

Open XV-T1_T6 at PT-1 Pressure down to 500 psig

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Open

Open

Open

Open

Open

Open

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40

Open HV-T1_T6 slowly

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Open

Open

Open

Open

Open

Open

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41

Close XV-T1_T7 at PT-1 Pressure down to 150 psig (Switch over)

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Close

Close

Close

Close

Close

Close

Close

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42

Start Change out (Pre-Purge)

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43

Fill N2 at 70 psig after pre-purge

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44

Ready to change out (STEP-14 on BSGS)

Close

 

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45

Close HV-T1_T7

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Close

Close

Close

Close

Close

Close

Close

46

Go to Step-1

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Prepared by :

Approved by :