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GE Fanuc Automation

Computer Numerical Control Products

Laser C1000i―Model A

Maintenance Manual

GFZ-70255EN/01 December 2000


GFL-001
Warnings, Cautions, and Notes
as Used in this Publication

Warning
Warning notices are used in this publication to emphasize that hazardous voltages, currents,
temperatures, or other conditions that could cause personal injury exist in this equipment or may
be associated with its use.
In situations where inattention could cause either personal injury or damage to equipment, a
Warning notice is used.

Caution
Caution notices are used where equipment might be damaged if care is not taken.

Note
Notes merely call attention to information that is especially significant to understanding and
operating the equipment.

This document is based on information available at the time of its publication. While efforts
have been made to be accurate, the information contained herein does not purport to cover all
details or variations in hardware or software, nor to provide for every possible contingency in
connection with installation, operation, or maintenance. Features may be described herein which
are not present in all hardware and software systems. GE Fanuc Automation assumes no
obligation of notice to holders of this document with respect to changes subsequently made.

GE Fanuc Automation makes no representation or warranty, expressed, implied, or statutory


with respect to, and assumes no responsibility for the accuracy, completeness, sufficiency, or
usefulness of the information contained herein. No warranties of merchantability or fitness for
purpose shall apply.

©Copyright 2000 GE Fanuc Automation North America, Inc.


All Rights Reserved.
B-70255EN/01 TABLE OF CONTENTS

TABLE OF CONTENTS
1 OVERVIEW................................
OVERVIEW................................................................
................................................................................................
................................................................................................
.........................................................................
......................................... 1

1.1 ORGANIZATION OF THE MANUAL ............................................................................................. 2


1.2 APPLICABLE MODELS................................................................................................................... 3
1.3 RELATED MANUALS...................................................................................................................... 4
1.4 TO USE THE LASER OSCILLATOR SAFETY .............................................................................. 5

2 SAFETY ................................................................
................................................................................................
................................................................................................
..............................................................................
.............................................. 6

2.1 WARNING ......................................................................................................................................... 7


2.2 CAUTION ........................................................................................................................................ 10
2.3 NOTE ............................................................................................................................................... 11
2.4 WARNING LABELS ....................................................................................................................... 12
2.5 OPTICAL PATHS IN THE OSCILLATOR .................................................................................... 16

3 INTERNAL STRUCTURE
STRUCTURE................................
................................................................
................................................................................................
................................................................................
................................................ 17

3.1 OUTLINE ........................................................................................................................................ 18


3.2 COMPONENT DETAILS................................................................................................................ 20

4 INSTALLATION ................................................................
................................................................................................
...............................................................................................
............................................................... 25

4.1 INSTALLATION PROCEDURE .................................................................................................... 26


4.2 PREPARATION PRIOR TO SHIPMENT ...................................................................................... 32
4.2.1 Packing for Transportation ..................................................................................................... 33
4.2.2 Removing Cooling Water......................................................................................................... 34
4.3 DETAILS OF CHECKING ............................................................................................................. 35
4.4 OSCILLATOR CONNECTIONS .................................................................................................... 43
4.4.1 Cooling Water .......................................................................................................................... 43
4.4.2 Laser Gas.................................................................................................................................. 46
4.4.3 Electrical Connections............................................................................................................. 47
4.4.4 Inter-unit Connections ............................................................................................................ 47

5 MAINTENANCE ................................................................
................................................................................................
..............................................................................................
.............................................................. 48

5.1 DAILY INSPECTION ..................................................................................................................... 49


5.2 PERIODIC MAINTENANCE ......................................................................................................... 50
5.3 DETAILS OF MAINTENANCE ..................................................................................................... 51
5.3.1 Changing the Turbo Blower Oil.............................................................................................. 51
5.3.2 Changing the Exhaust Pump Oil............................................................................................ 53
5.3.3 Replacing the Exhaust Pump Filter ....................................................................................... 55
5.4 MAINTENANCE PARTS................................................................................................................ 56

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6 TROUBLESHOOTING ................................................................
................................................................................................
.....................................................................................
..................................................... 58

6.1 TROUBLESHOOTING PROCEDURE .......................................................................................... 59


6.2 ERROR MESSAGES AND COUNTERMEASURES .................................................................... 60
6.3 RESPONDING TO ALARM MESSAGES ON THE SCREEN ..................................................... 61
6.4 MAJOR FAULTS............................................................................................................................. 84
6.4.1 Laser Power Supply Alarm Display ....................................................................................... 84
6.4.2 Power Supply Cannot Be Switched Off Using CRT/MDI Switch ......................................... 85
6.4.3 Power Supply Cannot Be Switched On Using CRT/MDI Switch.......................................... 85
6.4.4 Laser Output Just After Switch On Is Low ........................................................................... 85
6.4.5 Display of Fluctuating Laser Output On CRT....................................................................... 85
6.4.6 Electromagnetic Contactor of Exhaust Pump Trips Thermally ........................................... 86
6.4.7 Main Breaker Trips ................................................................................................................. 86
6.4.8 Excessive Laser Gas Consumption ......................................................................................... 87
6.4.9 High-frequency Inverter Alarm Display ................................................................................ 87
6.5 OBSERVING VOLTAGE OF POWER LINE ................................................................................ 90
6.5.1 Measurement of Voltage.......................................................................................................... 90
6.5.2 Phase Relation ......................................................................................................................... 90
6.5.3 Measurement of Voltage of DC Power Supply Unit .............................................................. 90
6.5.4 Checking the IF PCB Signals.................................................................................................. 92
6.5.5 Checking the Jumper Pins ...................................................................................................... 92
6.6 INDICATION OF STATE BY MEANS OF SELF DIAGNOSTIC FUNCTION .......................... 93
6.6.1 Data Items Displayed on the Diagnosis Screen..................................................................... 93
6.6.2 Laser Oscillator Status Display .............................................................................................. 94

7 OSCILLATOR CONNECTIONS ................................................................


................................................................................................
....................................................................
.................................... 102

7.1 ELECTRICAL CONNECTIONS .................................................................................................. 103


7.2 COOLING WATER PIPING ......................................................................................................... 105
7.3 VACUUM GAS CONNECTION ................................................................................................... 106

8 OSCILLATOR CONNECTIONS ................................................................


................................................................................................
....................................................................
.................................... 107

8.1 UNIT CONFIGURATION ............................................................................................................ 108


8.2 RELAY PCB B ............................................................................................................................... 111
8.3 GAS CONTROLLER ..................................................................................................................... 112

9 SETTING AND ADJUSTMENT ................................................................


................................................................................................
....................................................................
.................................... 115

9.1 LASER POWER SUPPLY UNIT .................................................................................................. 116


9.1.1 Preparatory Settings and Checks ......................................................................................... 116
9.1.2 Base Discharge Adjustment.................................................................................................. 117
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B-70255EN/01 TABLE OF CONTENTS

9.1.3 Maximum Output Adjustment.............................................................................................. 118


9.1.4 Check ...................................................................................................................................... 118
9.1.5 RFI and DCV Value Recording and Adjustment ................................................................. 119
9.1.6 Alarm Processing after Modification of Intra-tube Pressure at Oscillation Time and Bias
Command Setting ................................................................................................................................. 119
9.1.7 Checking of Electric Shutter Operation ............................................................................... 120
9.2 TURBO PCB .................................................................................................................................. 121
9.3 HIGH-FREQUENCY INVERTER................................................................................................ 123
9.4 GAS CONTROLLER ..................................................................................................................... 133
9.4.1 Setting the Gas Supply Pressure Sensor ............................................................................. 133
9.4.2 Setting the Atmospheric Pressure Sensor............................................................................ 133
9.4.3 Adjusting the Exhaust Unit (Adjusting the Laser Gas Consumption) .............................. 135
9.5 SETTING THE GAS SUPPLY PRESSURE SENSOR AND ATMOSPHERIC PRESSURE
SENSOR .................................................................................................................................................... 137
9.5.1 Names of Components........................................................................................................... 137
9.5.2 Setting Procedure .................................................................................................................. 139
9.6 SETTING THE POWER INPUT COMPENSATION COEFFICIENT ...................................... 142
9.7 WATER FLOW SENSOR.............................................................................................................. 143
9.7.1 Adjusting the Water Flow Sensor......................................................................................... 143

10 REPLACEMENT PROCEDURES ................................................................


..............................................................................................
.............................................................. 145

10.1 INPUT UNIT ................................................................................................................................. 146


10.1.1 Replacing the Stabilized Power Supply................................................................................ 146
10.1.2 Replacing the Input Unit Control PCB ................................................................................ 146
10.1.3 Replacing the IF PCB on the Oscillator Side ....................................................................... 147
10.2 REPLACING THE LASER POWER SUPPLY ............................................................................ 148
10.3 REPLACING THE MATCHING BOX ......................................................................................... 153
10.4 REPLACING THE TURBO BLOWER......................................................................................... 154
10.5 REPLACING THE TURBO PCB.................................................................................................. 156
10.6 REPLACING RELAY PCB B........................................................................................................ 157
10.7 REPLACING THE EXHAUST PUMP ......................................................................................... 158
10.8 REPLACING THE PRESSURE CONTROL UNIT ..................................................................... 160
10.9 REPLACING THE EXHAUST UNIT .......................................................................................... 161
10.10 REPLACING A DISCHARGE TUBE....................................................................................... 162
10.11 REPLACING A FAN UNIT ...................................................................................................... 164
10.11.1 Replacing a Fan Unit......................................................................................................... 164
10.11.2 Attaching and Detaching a Cable To and From the Terminal Block ............................. 165

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TABLE OF CONTENTS B-70255EN/01

10.11.3 Replacing a Fan-assisted Radiator ................................................................................... 166


10.12 REPLACING THE POWER SENSOR UNIT........................................................................... 167
10.13 REPLACING THE SHUTTER SECTION ............................................................................... 168
10.13.1 Replacing the Shutter Unit ............................................................................................... 169
10.13.2 Replacing the Shutter Mirror............................................................................................ 169
10.13.3 Replacing the Shutter Switch (Thermal and Photoelectric Switches) ........................... 169
10.13.4 REPLACING THE BEAM ABSORBER ........................................................................... 171
10.14 REPLACING THE HIGH-FREQUENCY INVERTER ........................................................... 173
10.15 REPLACING THE WATER DISTRIBUTION UNIT .............................................................. 175
10.16 REPLACING THE CONDENSATION SENSOR .................................................................... 177
10.17 REPLACING THE GUIDE LASER.......................................................................................... 178

11 LASER OPTICAL SYSTEM................................


SYSTEM ................................................................
................................................................................................
........................................................................
........................................ 179

11.1 CLEANING AND REPLACING THE OPTICAL PARTS ........................................................... 180


11.1.1 Cleaning and Replacing the Output Mirror......................................................................... 181
11.1.2 Cleaning and Replacing the Rear Mirror............................................................................. 184
11.1.3 Cleaning and Replacing the Folding Mirrors....................................................................... 187
11.2 ALIGNMENT OF THE RESONATOR......................................................................................... 190
11.2.1 Method of Obtaining a Maximum Power by Adjusting All Mirrors ................................... 191
11.2.2 Alignment Procedure during Installation after Transportation......................................... 192
11.2.3 Alignment Procedure at Mirror Cleaning Time................................................................... 192
11.2.4 Obtaining a Maximum Power ............................................................................................... 193
11.2.5 Burn pattern Collection and Beam Mode Evaluation ......................................................... 194
11.3 ALIGNMENT OF THE GUIDE LASER ...................................................................................... 196

APPENDIX ................................................................
................................................................................................
................................................................................................
.............................................................................
............................................. 197

A EXTERNAL VIEW OF LASER OSCILLATOR


OSCILLATOR................................
................................................................
..............................................................................
.............................................. 199

B SPECIFICATIONS ................................................................
................................................................................................
.........................................................................................
......................................................... 200

C ERROR CODE LIST ................................................................


................................................................................................
.......................................................................................
....................................................... 201

D PARAMTER LIST ................................................................


................................................................................................
...........................................................................................
........................................................... 203

D.1 PARAMETERS FOR ENABLING/DISABLING VARIOUS FUNCTIONS ............................... 204


D.2 PARAMETERS FOR DISCHARGE TUBE SELECTION........................................................... 211
D.3 PARAMETERS FOR CONTOURING CONDITIONS ................................................................ 212
D.4 PARAMETERS FOR EDGE MACHINING CONDITIONS ....................................................... 213
D.5 PARAMETERS FOR PIERCING CONDITIONS........................................................................ 215

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D.6 PARAMETERS FOR POWER CONTROL................................................................................... 217


D.7 PARAMETERS FOR ASSIST GAS PRESSURE AND TIME SETTING................................... 220
D.8 PARAMETERS FOR LASER MAINTENANCE TIMING INDICATION FUNCTIONS.......... 223
D.9 PARAMETERS FOR THE OSCILLATOR................................................................................... 225
D.10 PARAMETERS FOR DISCHARGE.......................................................................................... 229
D.11 PARAMETERS FOR GAS CONTROL (1)................................................................................ 230
D.12 PARAMETERS FOR HIGHLY REFLECTIVE MATERIAL ALARMS.................................. 233
D.13 PARAMETERS FOR LASER POWER/VOLTAGE DROP ...................................................... 234
D.14 PARAMETERS FOR POWER TABLE SETTING ................................................................... 235
D.15 AUTOMATIC AGING FUNCTION.......................................................................................... 237
D.16 POWER CONTROL (2) ............................................................................................................. 240
D.17 LASER GAS MIXER FUNCTION ............................................................................................ 241
D.18 PARAMETERS FOR GAS PRESSURE CONTROL (2) .......................................................... 243

E CONTROL SEQUENCES IN LASER OSCILLATOR ................................................................


...................................................................
................................... 244

E.1 OUTLINE OF LASER OSCILLATION SEQUENCES............................................................... 245


E.2 INTRA-TUBE GAS PRESSURE CONTROL SEQUENCES ...................................................... 247
E.3 TUBE VOLTAGE CONTROL SEQUENCES .............................................................................. 249
E.4 OSCILLATION SEQUENCES FLOW CHART ........................................................................... 251

F REFIXING AND REPLACING GAS TUBE


TUBE................................
................................................................
...................................................................................
................................................... 257

G REFIXING AND REPLACING WATER TUBE................................


TUBE ................................................................
.............................................................................
............................................. 259

H GLOSSARY ................................................................
................................................................................................
................................................................................................
.....................................................................
..................................... 261

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B-70255EN/01 1.OVERVIEW

1 OVERVIEW
This manual describes the maintenance of the FANUC LASER-
MODEL C1000iA, as well as the structure, configuration, and
operation of the laser oscillator. This manual is aimed at those
personnel responsible for laser oscillator maintenance.

-1-
1.OVERVIEW B-70255EN/01

1.1 ORGANIZATION OF THE MANUAL

This manual is organized as described below.

1. Overview
This chapter describes the organization of this manual,
applicable models, related manuals, and notes on reading this
manual.
2. Safety
This chapter describes the handling of lasers, and provides
warnings, cautions and notes on high voltages, high temperatures,
and toxicity. All users must read this chapter carefully to ensure
safety.
3. Internal Structure
This chapter describes the structure and operation of the laser
oscillator.
4. Installation
This chapter describes the installation and checking of the laser
oscillator.
5. Maintenance
This chapter provides information on when and how the
consumable parts of the laser oscillator must be replaced.
6. Troubleshooting
This chapter describes the actions to be applied in the event of a
fault occurring in the laser oscillator.
7. Oscillator Connections
This chapter describes the internal connections of the electrical
system, cooling system, and gas system.
8. Unit Configuration
This chapter describes the internal units of the laser oscillator.
9. Setting and Adjustment
This chapter describes how to set and adjust the controls of the
laser oscillator.
10. Replacement Procedures
This chapter describes how to replace the individual units and
parts of the laser oscillator.
11. Laser Optical System
This chapter describes how to clean, replace, and align the
optical components of the laser oscillator.

Appendix
A. External View of Laser Oscillator
B. Specifications
C. Error Code List
D. Paramter List
E. Control Sequences in Laser Oscillator
F. Refixing and Replacing Gas Tube
G. Refixing and Replacing Water Tube
H. Glossary

-2-
B-70255EN/01 1.OVERVIEW

1.2 APPLICABLE MODELS

This manual covers the following models:

Model Abbreviation
FANUC LASER-MODEL C1000iA C1000iA

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1.OVERVIEW B-70255EN/01

1.3 RELATED MANUALS

The following manuals are available for the FANUC LASER-


MODEL C1000iA:

DESCRIPTIONS B-63192EN
CONNECTION MANUAL B-63193EN
FANUC Series 16i-LA OPERATOR’S MANUAL B-63194EN
MAINTENANCE MANUAL B-63195EN
PARAMETER MANUAL B-63200EN
DESCRIPTIONS B-70252EN
OPERATOR’S MANUAL B-70254EN
FANUC LASER-MODEL C1000iA
MAINTENANCE MANUAL
B-70255EN
(This manual)

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B-70255EN/01 1.OVERVIEW

1.4 TO USE THE LASER OSCILLATOR SAFETY

This manual contains precautions which must be observed during


operation of the laser oscillator, to ensure the operator's safety and
prevent damage to the oscillator. Each precaution is indicated by
"Warning" or "Caution" according to its severity.
Supplementary information is indicated by "Note".
Read the contents of each "Warning", "Caution", and "Note" before
attempting to use the oscillator.

WARNING
Precautions to be applied in those situations where
there is a danger of the operator being killed or
seriously injured.

CAUTION
Precautions to be applied in those situations where
there is a danger of the operator being slightly
injured or the oscillator being damaged.

NOTE
Supplementary information other than precautions.

The functions of a laser machining system depend not only on the


laser oscillator, but also on the machine, power magnetics cabinet,
servo system, CNC, and operator's panel. This manual describes only
the laser oscillator. For a description of the other components, refer to
the corresponding manuals, supplied by the machine tool builder.

- Read this manual thoroughly and store it in a safe place.

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2.SAFETY B-70255EN/01

2 SAFETY
This chapter describes precautions to be observed to ensure the safe
operation of the laser oscillator.
Read this chapter thoroughly before attempting to use the laser
oscillator.
Also, read the safety precautions in the operator's manual supplied by
the machine tool builder.
The laser oscillator may present a danger not only to the operator but
also to other people working around the oscillator, up to a
considerable distance away. The laser oscillator must, therefore, be
operated only by a person who has received appropriate training.
Only persons who have understood the internal structure of the laser
oscillator and have received appropriate training can maintain the
laser oscillator.
A warning label is put on each dangerous position of the laser
oscillator. Be extremely careful about the labeled positions.

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B-70255EN/01 2.SAFETY

2.1 WARNING

(1) It is extremely dangerous to expose your eyes to direct, scattered,


or reflected CO2 laser light. Always wear protective glasses
while the laser is operating.
Exposure to laser light can cause blindness. If your eyes are
accidentally exposed, seek medical advice immediately.

(2) Do not turn on the laser oscillator while a panel is removed or a


door is open.
Operating the laser with a door open or panel removed may
result in the operator being directly exposed to CO2 laser
radiation. Exposure to laser light can cause blindness and/or
severe burns. If your eyes are accidentally exposed to laser light,
seek medical advice immediately.
Before turning on the power during maintenance if absolutely
necessary, wear protective glasses and clothing to prevent
accidents.

(3) If the laser oscillator is operated with a panel open, ultraviolet


radiation is emitted from the high-frequency discharge section.
Gazing the discharge section for a long time can cause visual
disturbances such as impaired eyesight.
Always wear protective glasses during work. If you feel trouble
with your eyes, seek medical advice immediately.

(4) Surround the laser machining tool with a fence made of a


material which absorbs laser light well (such as acrylic). Place
appropriate warning notices on the fence.
The door in the safety fence shall be fitted with an interlock
switch such that opening the door stops the laser.
Failure to provide such a fence exposes persons in the vicinity of
the machine tool to the danger of being exposed to CO2 laser
radiation and the associated risk of blindness. If a person is
accidentally exposed to laser light, seek medical advice
immediately.

(5) The laser beam shall be no higher than average eye height.
Enclose the path of the laser beam with covers. Do not leave the
end of the beam path open. Place laser- absorbing material at the
end of the beam path to absorb the beam's energy.
A CO2 laser beam is directional and has a high energy density.
Exposure to laser light can cause blindness. Flammable material
may burn or explode if exposed to the laser beam. If your eyes
are accidentally exposed to laser light, seek medical advice
immediately.

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2.SAFETY B-70255EN/01

(6) A high voltage of 3 to 4 kV0-p is applied to some places in the


laser oscillator cabinet. Therefore, do not turn the power to the
oscillator on or operate the oscillator when an oscillator panel is
open. Operating the laser oscillator with a panel open can cause
a touch on a high-voltage place, resulting in electric shock.
Before turning on the power during maintenance if absolutely
necessary, take measures against accidents.

(7) Before daily inspection, the replacement of a maintenance part


or maintenance, open the main circuit breaker and turn the power
supply off (double power-off).
To prevent the power from being inadvertently turned on, lock
the circuit breaker open, and affix an indication of work in
progress.
Failure to turn off the power during inspection or replacement
exposes the operator to the danger of electric shock.
Before turning on the power during maintenance if absolutely
necessary, take measures against accidents.

(8) The oscillator output mirror and focusing lens on the machining
head both have a substrate made of ZnSe (zinc selenide), a toxic
substance. Therefore, do not touch the mirror or lens with your
bare hands.
Inhaling ZnSe dust may cause difficulty in breathing, completely
stopping the breathing of the victim in the worst case.
If you accidentally touch the mirror or lens with your bare hands,
wash your hands well under running water.
If you accidentally inhale ZnSe dust or debris, seek medical
advice immediately.

(9) Do not look at the machining point without eye protection.


Otherwise, your eyes may be exposed to reflected laser light,
resulting in blindness.
If your eyes are accidentally exposed to laser light, seek medical
advice immediately.

(10) Before attempting to machine any material for the first time,
consult with the manufacturer of the material.
Some materials generate toxic gases when cut or drilled by a
laser beam.
Should you accidentally inhale any toxic gas, seek medical
advice immediately.

(11) If the laser oscillator must be moved, entrust the work to the
machine tool builder whenever possible. If performed by
inexperienced personnel, the oscillator may topple or be dropped,
resulting in a potentially fatal accident.
When the machine tool builder is not available to move the
oscillator, follow the procedure described on the hanging method
label. While moving the oscillator, stand well clear and never
pass under the oscillator.

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B-70255EN/01 2.SAFETY

(12) Do not allow any dangerous or high-pressure gas to get into the
oscillator housing. The oscillator cabinet has a hermetic structure
(dustproof and dripproof), it cannot be ventilated easily.
Flammable gases such as oxygen can cause a fire or explosion.
Toxic gases can harm operators during maintenance. Organic
gases can degrade machining performance. High-pressure gases
can damage a panel or the cabinet, resulting in injury from flying
matters.
If such a gas accidentally gets into the oscillator housing, remove
a panel for ventilation. The installation room must be also well
ventilated.
To purge the oscillator housing, use purified, low-pressure air or
nitrogen.

-9-
2.SAFETY B-70255EN/01

2.2 CAUTION

(1) If there is a possibility of being exposed to CO2 laser radiation


exceeding the maximum permissible exposure (MPE) level for
skin, wear protective clothing.
Otherwise, there is a danger of being burnt.

(2) FANUC LASER-MODEL C1000iA is fitted with a red


semiconductor laser to indicate the approximate position of
invisible CO2 laser beam. Do not look directly at the
semiconductor laser beam. Otherwise, your eyes may be injured.

(3) The gas circulating system in the oscillator becomes very hot.
Do not touch the gas pipes, turbo blower, heat exchanger, or
exhaust pump, until they have cooled down sufficiently after the
oscillator has been turned off. Otherwise, you may be burnt.

(4) Do not pass your hand in the optical path of the laser machine or
under the laser head when the shutter of the oscillator is open.
When the shutter is open, a laser beam may be emitted from the
oscillator accidentally. Before work in the optical path or under
the laser head, confirm that the shutter is closed.

(5) The workpiece becomes very hot during machining. Never touch
the workpiece with your bare hands. Otherwise, you may be
burnt.

(6) During machining, extremely hot chips are likely to be


generated.
Unless sufficient caution is exercised, there is a danger of the
operator being burnt, or of a fire being started.

(7) Some materials may burn or explode when laser machined.


Before attempting to machine any material for the first time,
consult with the manufacturer of the material, to prevent the
danger of fire of or the possibility of operator injury.

(8) The oscillator contains cooling fan units. Although the fan units
are fitted with a finger guard, to prevent injury, keep your hands
well away from the fans.

(9) The oscillator is controlled according to the CNC internal


parameter settings. If a numeric value different from a setting is
entered and the oscillator is operated, the oscillator may
malfunction. In the worst case, the oscillator may be damaged.

- 10 -
B-70255EN/01 2.SAFETY

2.3 NOTE

(1) During installation or maintenance necessitating the opening of


an oscillator door or the removal of a panel, only persons who
have undergone maintenance training should operate the laser. In
such a case, extreme caution must be exercised.

(2) Warning labels are affixed to those parts of the oscillator where
there is a danger of exposure to laser radiation. Observe the
precautions given on the labels. (Section 2.4 shows the warning
labels.)

(3) Laser products shall conform to the regulations laid down in the
laser safety standard, including that stipulating control using a
key.
The oscillator start signal (RUN ON) shall be controlled with a
key switch such that the oscillator cannot be turned on without a
specific key.
Control using a key ensures that other than the authorized
personnel cannot operate the laser oscillator. It is extremely
dangerous if a person who is unfamiliar with the equipment
attempts to operate the laser oscillator.

(4) The shutter shall be unlocked only while a beam is being output.
Otherwise, keep the shutter locked to provide protection should
the laser accidentally be turned on.

(5) Do not discard a used output mirror or focusing lens together


with regular waste. If the output mirror or focusing lens is
replaced, return the original to the supplier or entrust it to a
specialized disposal company.

(6) Do not place any flammable material (such as paper, cloth, or


wood) near the workpiece table.

(7) Keep a fire extinguisher beside the unit.

(8) The FANUC LASER-MODEL C1000iA is equipped with an


alarm lamp. The alarm lamp blinks while discharge is in
progress or whenever laser radiation is possible.
While the alarm lamp is blinking, pay careful attention to laser
radiation and high voltages.

- 11 -
2.SAFETY B-70255EN/01

2.4 WARNING LABELS

The oscillator uses high voltages and laser beam radiation. Such
hazards are indicated with warning labels attached to the positions
shown in Fig. 2.4 (a) to (b).

Fig. 2.4 (a) Warning label positions (C1000iA : front view)

Fig. 2.4 (a) Warning label positions (C1000iA : rear view)

- 12 -
B-70255EN/01 2.SAFETY

(1) Class indication label (JPN)

(1) Class indication label (FDA)

(2) Warning label

- 13 -
2.SAFETY B-70255EN/01

(3) Aperture label

(4) Suspension method label

(5) Access panel

(6) Label inside the access panel

- 14 -
B-70255EN/01 2.SAFETY

(7) Discharge section label

(8) Certification label

(9) Equipment nameplate

(10) Manufacturer's address label

(11) Label for regulating the atmospheric gases in the oscillator


housing

- 15 -
2.SAFETY B-70255EN/01

2.5 OPTICAL PATHS IN THE OSCILLATOR

The figures below show the laser optical paths inside the oscillator.

Fig.2.5(a) Optical paths in the C1000iA

- 16 -
B-70255EN/01 3.INTERNAL STRUCTURE

3 INTERNAL STRUCTURE

- 17 -
3.INTERNAL STRUCTURE B-70255EN/01

3.1 OUTLINE

Fig. 3.1 show the internal structure of the laser oscillator.


The C1000iA consists of a laser resonator, discharge drive unit,
forced gas circulating system, pressure controller, CNC interface, and
a protective housing.

Fig. 3.1 C1000iA internal structure

(1) Laser resonator


The laser resonator consists of several discharge tubes,
connected in series using folding mirrors, with a rear mirror and
output mirror placed at the open ends of the discharge tubes, thus
sealing the tubes. The resonator is fitted with a gas pipe
connecting port through which laser gas is fed into the discharge
tubes.
A discharge from the electrodes of the discharge tube energizes
CO2 molecules, which emit light. This light is amplified by
stimulated emission, repeated between the rear mirror and output
mirror, a laser beam being emitted from the output mirror.

- 18 -
B-70255EN/01 3.INTERNAL STRUCTURE

(2) Discharge drive unit


The discharge drive unit consists of a laser power supply,
matching box, and discharge tubes. High-frequency output of 2
MHz that is controlled by the CNC discharges the laser gas
flows through discharge tubes to energize CO2 molecules.

(3) Forced gas circulating system


A gas circulating system is configured by connecting the
resonator and turbo blower with a circulating pipe. Laser gas is
forced through the discharge tubes at a speed of 200 m/s or
higher.
A water-cooled heat exchanger, used to cool the high-
temperature gas from the discharge tubes, is provided at the inlet
side of the turbo blower. At the outlet side of the turbo blower,
another water-cooled heat exchanger dissipates the compression
heat.

(4) Pressure controller


The laser gas pressure within the forced gas circulating system is
controlled by commands issued from the CNC, thus ensuring
stable laser output.

(5) CNC interface


Interface used to connect a FANUC Series 16i-L. CNC
commands that, control the operation of the laser oscillator, such
as start/stop and laser output, are input via this interface.

(6) Protective housing


An enclosure that houses the above components. The housing,
consisting of metal panels, completely encloses the laser
oscillator, thus protecting the operator from exposure to laser
radiation and from high voltages. All panels are screw-fixed and
cannot be removed without an appropriate tool.

- 19 -
3.INTERNAL STRUCTURE B-70255EN/01

3.2 COMPONENT DETAILS

This section describes the internal structure of the C1000iA more


specifically. Fig. 3.2 is an internal structural drawing.

Fig. 3.2 C1000iA structural drawing

(1) Resonator
The resonator consists of an output mirror, rear mirror, folding
mirrors, discharge tubes, power sensor unit, etc. It converts
electrical energy first to laser gas, then to optical energy (10.6-
mm single-wavelength laser beam).

(2) Output mirror


A transmitting/reflecting mirror which outputs the laser beam
after it has been amplified. The output mirror consists of a ZnSe
(zinc selenide) substrate, coated with dielectric. ZnSe is tightly
toxic. Be particularly careful, therefore, when handling the
output mirror.

- 20 -
B-70255EN/01 3.INTERNAL STRUCTURE

(3) Rear mirror


A reflecting mirror consisting of a Ge (germanium) substrate,
coated with dielectric.
Having a high reflectance of 99.5%, the rear mirror is used to
reflect the laser beam within the resonator while transmitting
0.5% of the laser light so that the beam can be monitored
externally.

(4) Folding mirror


A mirror unit which reflects the laser beam at a 90-degree angle.
The folding mirror consists of a block with a surface tilting to a
45-degree angle and an Si (silicon) substrate, coated with
multilayer dielectric film.

(5) Discharge tube


A pair of Ag (silver) electrodes are metallized on the surface of a
hollow quartz glass pipe. A high-frequency discharge between
these electrodes injects electrical energy into the laser gas. Each
electrode is coated with ceramic, preventing it from degrading
and thus improving system reliability.

(6) Trigger electrode


A predischarge placed outside the laser oscillation area can
facilitate the start of the main discharge. With it, the laser output
is completely zero when the beam is off.

(7) Power sensor


An optical sensor which detects the intensity of the laser beam,
transmitted through the rear mirror, thus enabling monitoring of
the laser output level.

(8) Gas circulating system


A gas circulating path including a turbo blower, heat exchangers,
and circulating pipes, which circulates laser gas in the discharge
tubes at high speed.

(9) Turbo blower


During laser oscillation, the laser gas pressure is 1330 – 9310 Pa.
The turbo blower circulates this rough-vacuum gas at high speed
without contaminating the gas.

(10) Heat exchanger (inlet)


Water-cooled heat exchanger used to cool the laser gas that has
been heated by discharge, before it is drawn into the turbo
blower.

(11) Heat exchanger (outlet)


Water-cooled heat exchanger used to cool the laser gas that has
been heated by compression in the turbo blower, before being
forced into the discharge tubes.

- 21 -
3.INTERNAL STRUCTURE B-70255EN/01

(12) Gas controller


The gas controller always monitors the gas pressure in each
discharge tube and supplies the fresh laser gas to the circulating
system to keep the pressure constant. It also monitors the supply
status of the laser gas, purge check for the circulating system,
and other items and has a function of adjusting the amount of
flow of the gas to be exhausted.

(13) Exhaust pump unit


This unit is used to vacuum-exhaust laser gas from the gas
circulating system such that its pressure falls to that used for
laser oscillation. Also, within this unit, a small amount of
circulating gas is constantly being exchanged, to prevent
degradation of the circulating gas.

(14) Hour meter


The hour meter indicates the total number of hours that the laser
oscillator has operated (how many hours the exhaust pump has
operated), to indicate whether maintenance or inspection is
necessary.

(15) Shutter
The shutter has a rotary arm operated by a rotary solenoid and an
Au (gold)-evaporated reflecting mirror attached to the arm.
It can be opened and closed by CNC commands. It also has a
position sensor and a temperature sensor for safety and always
monitors the open/close status and shutter temperature.

(16) Beam absorber


While the laser oscillator is operating with the shutter closed, the
laser beam is guided into the beam absorber. The beam absorber
absorbs nearly 100% of laser beam and is water-cooled, allowing
it to safely absorb the beam for relatively long periods. For
safety, the beam absorber is equipped with a temperature sensor
which allows the system to monitor the temperature of the beam
absorber.

(17) Distribution unit


This unit distributes cooling water, supplied from either a chiller
unit or a temperature-regulated external water supply, to each
unit in the laser oscillator.
For safety, the water distribution unit is equipped with a flow
sensor which allows the system to monitor the flow rate of the
cooling water.

(18) Laser power supply


A power supply for generating a discharge in each discharge
tube. The laser power supply receives the three-phase AC input
at 200/220V and outputs 2-MHz high-frequency power
controlled with stability by commands from the CNC.

- 22 -
B-70255EN/01 3.INTERNAL STRUCTURE

(19) Matching box


The matching box contains a matching circuit, consisting of coils
and capacitors, which ensures that power is effectively input to
the discharge tubes.

(20) Intermediate PCB B


This PCB transmits signals output by the shutter section, such as
those from the limit switch, absorber temperature sensor, power
sensor, and condensation sensor, to the interface PCB.

(21) Input unit


The power magnetics cabinet distributes power, supplied from
an external unit, to each unit in the laser oscillator. It also
protects each unit from overcurrents.

(22) Input unit control PCB


This PCB has functions of transmitting the contactor open/close
signals according to CNC commands and of notifying the CNC
of the open/close status of the circuit breaker in the input unit.

(23) Interface PCB


Transfers signals to and from the CNC via the FANUC I/O Link
(serial interface).

(24) Stabilized power supply


This unit converts the 200/220 VAC power source to DC power
for the interface PCB and other units.

(25) Condensation sensor


The condensation sensor is mounted above the output mirror
holder. If condensation occurs on this sensor, the resistance
changes, an alarm (abnormal water temperature) occurs, and the
oscillator is stopped. It prevents faults in each unit from
occurring due to condensation.

(26) High-frequency inverter


This inverter drives the turbo blower. It is responsible for
acceleration/deceleration control during start and stop of the
blower.

(27) Turbo PCB


This PCB monitors overheating, the oil level, and frequency
reached signal of the turbo blower.

(28) Guide laser (diode laser)


A diode laser is overlaid on the same optical axis as a guide
beam for checking the optical axis because the CO2 laser beam is
invisible to the unaided eye. The guide beam is emitted in
synchronization with the mechanical shutter only when the
shutter is closed. The guide laser can be used for roughly

- 23 -
3.INTERNAL STRUCTURE B-70255EN/01

adjusting the optical path of an external optical system and for


obtaining a guide for the machining point.

- 24 -
B-70255EN/01 4.INSTALLATION

4 INSTALLATION

- 25 -
4.INSTALLATION B-70255EN/01

4.1 INSTALLATION PROCEDURE

Use the following procedure to make adjustments and checks during


installation.

(1) Check the environment at the installation location.


[Environmental conditions]
1 Ambient +5 to +30 °C
temperature
2 Temperature 1.1°C /minute maximum
variation
3 Humidity 75% or below (relative humidity)
4 Vibration Acceleration not to exceed 0.05G.
Vibration amplitude not to exceed 5mm.
5 Atmosphere Dust must be minimized.
There must be no organic volatile components.
6 Laser gas Composition
CO2 : 5 ± 0.25 % Purity
He : 40 ± 2.0 % 99.99 %
N2 : 55 ± 2.75 % or more
H2O : 5 ppm maximum
CmHn : 1 ppm maximum

- 26 -
B-70255EN/01 4.INSTALLATION

(2) Remove resonator and shutter clamps.


The clamps are used only in transit. In particular, loosen the
resonator clamp before it is stored. If the resonator is left for a
long time with the clamp tightened, the resonator is likely to be
deformed. The clamp locations are shown in Fig. 4.1.

Fig.4.1 Details of resonator and shutter clamps section

- 27 -
4.INSTALLATION B-70255EN/01

(3) Check the outsides of units installed in the oscillator as follows:


Check items
1 Check whether any printed circuit boards are loose or removed.
2 Check whether any cables are damaged (such as damaged sheathing).
3 Check whether any connectors are loose or detached.
4 Check that the discharge tubes are neither cracked nor damaged.
5 Check that the turbo blowers and other units are neither loose nor
missing.
6 Check that the power supply units and matching boxes are neither
loose nor missing.
7 Check that the input unit is neither loose nor missing.
8 Check that the connection to the electrode of each discharge tube is not
loose.
9 Check whether any joint part of the water piping and gas piping is loose.
10 Check all screw terminals in the units.
11 Check the oil level in the turbo blowers, and check for oil contamination.
(See Section 5.3 for details.)

(4) Connect the power and signal lines to the oscillator. (See
Subsection 4.4.3 for details.)
Check items
1 Signal cable between the NC and oscillator (optical fiber), 24V DC
2 Oscillator power cable
3 Grounding cable (class-1)
4 Exhaust pump power cable (See Subsection 4.4.4 for details.)
Connect the power cable of the exhaust pump (to the oscillator
and pump).

(5) Check the communication setting on the interface PCB. (See


Subsection 6.5.5 for details.)
When a metal cable is used : LINK1 (JD1)
When an optical fiber cable is used : LINK1 (COP)

(6) Laser gas and cooling water pipes. (See Subsections 4.4.1 and
4.4.2 for details.)
Check items
1 Laser gas pipe type
Recommended gas pipe
Nylon tube AS1, manufactured by Junko Co. Ltd.
Polyprotube, manufactured by Imperial Co. Ltd.
Stainless bright anneal pipe
2 There must be no gas leakage in the external piping between the gas
cylinder and oscillator.
3 Laser gas composition and purity (Check whether the specifications are
satisfied.)
4 Quality of cooling water (Tap water passed through an ion exchanger is
recommended.)
5 Flow of cooling water (IN, OUT)
6 Connection of the gas feeder piping of the exhaust pump
Connect the gas feeder piping of the exhaust pump (to the
oscillator and pump).

- 28 -
B-70255EN/01 4.INSTALLATION

(7) Check the input power supply voltage, frequency and phase
sequence. (See Section 6.5 for details.)

(8) Turn on the power, then check the operation of the fan motors in
the housing.
The fan motors installed in the oscillator start as soon as the
power to the CNC is turned on. Check the operation of each fan
motor. Note, however, that the fan motor installed in the laser
power supply does not start until the oscillator sequence reaches
the turbo blower ON operation.

(9) Check the parameters and setting data.


Check the parameters against the data sheets attached to the
oscillator. If a value other than those given on the data sheets is
set, correct the setting. Note, however, that parameter No. 15270
and parameter No. 15204 are set automatically, so that these
parameters need not be modified.
CAUTION
Each oscillator has unique parameters. Check the
setting data according to the attached data sheets.
Be particularly careful to store these data sheets
safely.

(10) Check that cooling water is supplied normally, and that there is
no water leakage inside the oscillator or at any external
connection points.
(a) Turn off the main circuit breaker of the oscillator and
power supply.
(b) Check that the water inlet (IN) and outlet (OUT) of the
oscillator are connected correctly. If the water inlet and
outlet are connected incorrectly, the flow sensor mounted
on the outlet does not function, which prevents water from
flowing.
(c) Fully open the valves on the exhaust side so that the flow of
water is not impeded. By manually operating the chiller unit,
pass cooling water through the system at a flow rate of
about 10 liters/minute. Then, check that there is no water
leakage at the following locations:
1. The water inlet (IN) and outlet (OUT) of the oscillator
2. The water piping (including all tubes and joints) in the
oscillator
(d) Provided no water leakage is observed in step 3) above,
allow cooling water to flow through the oscillator at the
specified flow rate. Set the output pressure of the cooling
water circulating unit to 0.5 MPa(5 bar). Then, check that
there is no water leakage at the following locations:
1. The water inlet (IN) and outlet (OUT) of the oscillator
2. The water piping (including tubes and joints) in the
oscillator

- 29 -
4.INSTALLATION B-70255EN/01

Model Rated flow rate Pressure loss of the flow path in the
oscillator at rated flow rate
C1000iA 35 liters/minute 0.12 MPa

(e) Stop the chiller unit, then switch the operation mode from
manual (local) mode to automatic (remote) mode.
(f) If there is no water leakage, set the RUN key to ON to start
the oscillator. Check that the cooling water circulating unit
can be operated according to commands issued from the
CNC. If the flow rate is less than the specified value, alarm
No. 4072 (low cooling water flow rate) is issued soon after
the chiller unit is started. If this alarm is issued, proceed as
indicated in the guidance corresponding to this alarm.
(g) Check that the temperature of the cooling water is set to
room temperature plus 1°C. (The temperature of the cooling
water may be set to about 27°C throughout the year.) The
highest temperature that may be set is 30°C.

(11) Conduct an oscillator vacuum leakage test.


(a) Check the oscillator for any internal leakage.
The procedure for performing a leakage check is given in
Item (6) in Section 4.3.
(b) When first starting the oscillator, check that gas is output
from the gas outlet of the oscillator. Depending on the
parameter settings, it may take as long as one minute before
gas is output. If no gas is output, the exhaust pump rotation
may be reversed. Immediately turn off the circuit breaker to
stop the exhaust pump. If this situation is left uncorrected,
the exhaust pump may ultimately start to make an abnormal
sound, and the thermal switch may trip. In the worst case,
the gas circulating system may be contaminated with
exhaust pump oil.

(12) Check that the laser gas pressure is controlled normally.


(a) Set all bits of parameter No. 15025 through parameter No.
15028 to 0 because only the pressure control operation is to
be checked, without causing discharge. Set parameter No.
15240 to the standard value 10, then check the pressure
control status of the laser oscillator. Start the oscillator
(RUN ON), and check the pressure control status under the
following parameters while checking DGN905:
1. Parameter No. 15241 for discharge start state
2. Parameter No. 15242 for base discharge state
If the pressure control status is abnormal, alarm No. 4073 ,
No. 4081, or No. 4078 is issued. Proceed as indicated in the
guidance corresponding to this alarm. Check also that the
laser gas flow rate in the base discharge state satisfies the
specified value.
(b) If the laser gas flow rate is abnormal, perform adjustment as
described in Section 9.4.

- 30 -
B-70255EN/01 4.INSTALLATION

(c) Reset the values of the bits of parameter No. 15025 through
parameter No. 15028 to their original values.
This completes the check.

(13) Perform laser oscillation to achieve discharge aging. If the


oscillator is left unused for one week or more, discharge aging is
required. See Section 4.3 for details of discharge aging.

(14) Check the oscillation characteristics and output. See Item (1) in
Section 4.3 for details of the check method.

Check items
1 Oscillation characteristic check :
- Check that the correction coefficient is 1100 or less.
- Check that the discharge voltage is within the
factory-set value plus 200 V.
If the correction coefficient or discharge voltage
exceeds the maximum, repeat discharge aging.
2 Discharge margin check
- Check that a margin is provided.
3 Voltage margin check
- Check that no alarm is issued.

(15) Check the laser beam mode. For details of the check method, see
Item (4) in Section 4.3.

Check items
1 Check that there is no significant difference from the
mode specified in the data sheets attached to the
oscillator.
2 Check that the mode shape is perfectly circular.
3 Check that no interference fringes can be observed
nearby.

(16) Set the hour meter.


Set 50 Hz for those localities where the power supply frequency
is 50 Hz. Set 60 Hz for those localities where the power supply
frequency is 60 Hz. (The frequency is factory-set to 50 Hz.)

(17) Optical axis adjustment


To perform optical axis adjustment as part of the installation,
adjust the base table of the oscillator. Never place a heavy object
on the beam outlet plate. Moreover, never make a direct
mechanical connection between this plate and a part on the
mechanical side.

- 31 -
4.INSTALLATION B-70255EN/01

4.2 PREPARATION PRIOR TO SHIPMENT

For shipment and transportation, follow the steps explained below.

(1) Disconnect all CNC connecting cables.

(2) Disconnect the power cable and ground cable.

(3) Remove the laser gas pipes, and attach blanking plugs to the
pipes to prevent dust from entering.

(4) When shipping the oscillator or exhaust pump only, follow the
steps explained below. If the oscillator and exhaust pump are
mounted on the machine, and so the possibility that the exhaust
pump may tumble does not exist, these steps are unnecessary.
(a) Detach the exhaust pump power line.
(b) Detach the gas piping from the exhaust pump, and plug up
the piping and exhaust pump to prevent foreign matter from
entering the piping and pump.
(c) Before shipping the exhaust pump only, discharge the oil
from the exhaust pump. When installing the exhaust pump,
supply new oil.

(5) Remove all cooling water from the oscillator by using


compressed air. For details of how to remove the cooling water,
see Subsection 4.2.2.
CAUTION
Any residual cooling water may result in corrosion or
clogging; furthermore, if any residual cooling water
freezes, a pipe or the oscillator itself may be
damaged.

(6) Install all clamps and fit a blanking cap onto the beam outlet.

(7) Check the security of all connectors and printed circuit boards.
Install protective covers.

(8) Check that all removed mounting screws are reinstalled.

(9) Install the cabinet mounting panel.

- 32 -
B-70255EN/01 4.INSTALLATION

4.2.1 Packing for Transportation

Prior to shipment and transportation, the packing and checking


operations described below must be performed.

Specifications of the FANUC LASER-MODEL C1000iA


(1) External dimensions : See the external views.

(2) Weights :
About 350 kg (oscillator section)
About 30 kg (exhaust pump section)

(3) Maximum allowable impact : 2G


Note that the maximum allowable impact in transit depends
greatly on the means of transport employed, as indicated in
Table 4.2.1.

Table 4.2.1 Maximum allowable impacts according to means of


transport (Units: G)
Means of transport
Airplane Ship Railroad Truck
Forwards/
6 15 12 5
backwards
Direction
Left/right 2.5 12 5 4
Up/down 2.5 12 5 4

(4) Notes on transportation


When lifting the oscillator for transportation, pass wires through
the four eyebolts, and hook up the oscillator by crane.

- 33 -
4.INSTALLATION B-70255EN/01

4.2.2 Removing Cooling Water

Remove cooling water according to the procedure below.

(1) Open the cooling water inlet (IN) and outlet (OUT), and leave
both open. Cooling water will stop draining from the unit after
about 10 minutes.

(2) Once the cooling water has stopped draining, connect a


compressed air hose to the cooling water inlet (IN). Check that
the cooling water outlet is open. Gradually supply compressed
air, allowing the pressure to build up to 0.1 to 0.2 MPa. Never
apply full pressure suddenly.
CAUTION
The cooling water system of the C1000iA has a
directional property, so you cannot feed water or air
from the outlet side (OUT).

(3) Continue to supply compressed air at this pressure for about 5


minutes. Increase the compressed air pressure to 0.3 to 0.4 MPa,
and supply air until water inside the white water piping of the
oscillator is completely removed. It takes about 10 minutes to
remove water.

(4) Once all cooling water has been removed, disconnect the
compressed air tube. Then, seal the cooling water inlet (IN) and
outlet (OUT) by attaching the blanking plugs provided with the
oscillator to the PT plugs.
CAUTION
Also, the cooling water should be removed from the
oscillator whenever the oscillator is to be stored over
the winter, when there is a danger of the cooling
water freezing. If the cooling water freezes, it may
destroy the cooling water pipes or other cooling
system components.

- 34 -
B-70255EN/01 4.INSTALLATION

4.3 DETAILS OF CHECKING

External gas piping leakage check (clamp test)


(1) Using an approved gas pipe, connect the gas inlet of the
oscillator to the cluster piping, or to the secondary side of the
regulator mounted on the gas cylinder.

CAUTION
As the external gas piping, use a pipe recommended
by FANUC.(See Subsection 4.4.2.)
Using a rubber hose, urethane tube, or brazed
copper pipe lowers the quality of the laser gas
guided to the oscillator, resulting in unstable
discharging.
This can lower the output level or cause a laser
power supply abnormality.

(2) Open the adjustment valve of the regulator in advance. Then,


slowly open the main valve of the gas cylinder. Next, set the
secondary pressure of the regulator to 0.175±0.025 MPa.

(3) Upon the completion of setting, close the main valve of the gas
cylinder.
(a) If the primary pressure of the regulator is abruptly reduced
to 0, gas will leak from the gas piping. Open the main valve
of the gas cylinder and locate the leaks using a liquid
leakage checker. Then, correct the leaks.
(b) If the pressure is reduced gradually, gas will leak from the
gas piping. Recheck the joints. Very occasionally, gas may
leak from the primary pressure side to the secondary
pressure side of the regulator. In such a case, the primary
pressure decreases, while the secondary pressure is
increases.
(c) A primary pressure reduction of within 10% over 8 hours is
normal.
CAUTION
If the amount of gas leakage from the gas piping is
very small, the gas composition will change more
rapidly when the pipe is longer, when the pipe
diameter is larger, or when a smaller amount of gas
is consumed. In such cases, the output will be
reduced, and discharge will tend to turn off more
easily.

- 35 -
4.INSTALLATION B-70255EN/01

(d) Upon the completion of this check, close the main valve of
the gas cylinder.
CAUTION
Periodically check the external gas piping for
leakage.

Parameter check
Laser oscillator parameter data sheets are attached to each oscillator.
Machine tool builders may prepare a parameter table including the
laser oscillator parameter data. If the attached parameter data sheets
are missing, contact your machine tool builder.

(1) On the CNC setting screen, enable parameter rewriting.

(2) Check the parameters, and enter the same values as those given
in the parameter table.

(3) On the CNC setting screen, disable parameter rewriting, then


press the reset key.
CAUTION
1 If the oscillator is started with an incorrect parameter
value specified, there is a risk of the oscillator being
damaged or destroyed. Be particularly careful when
entering and checking parameter values.
2 Some parameters may require modification to, for
example, suit the operating state of the oscillator or
enable maintenance. When modifying the
parameters, the user should record all changes
(including dates, parameters before modification,
parameters after modification, and reasons for
modification) so that old parameters and invalid
parameters are not used.

Check for leakage within the oscillator


(1) Modify the parameters listed below.
PRM.No.15008 bit 6 1 ® 0 (Automatic aging is disabled.
PRM No.15240 Setting ® 0 (evacuation completion pressure)

(2) Set the oscillator start switch to ON. The gas pressure inside the
oscillator can be checked with DGN 905.

(3) Alarm No. 4080 is issued eleven minutes after the oscillator is
started.

(4) Set the main circuit breaker of the oscillator to OFF. Then, turn
off the power to the CNC.

(5) Set the CNC start switch (RUN ON KEY) to OFF, then turn on
the power to the CNC.

- 36 -
B-70255EN/01 4.INSTALLATION

(6) Check the gas pressure on the diagnosis screen to determine


whether there is any increase in pressure over 15 minutes. An
increase in pressure of within 10 is normal.

(7) After completing the check, turn on the start switch. Then, after
two to three seconds, turn off the switch. The oscillator will
perform a purge operation after 75 seconds.

(8) Finally, restore the parameter settings to their original values.

Locating a leakage
When there is a gas leakage, locate the leakage by using a leakage
checker or liquid leakage checker.
CAUTION
The turbo blower is not designed for pressure
application. If pressure must be applied, the upper
pressure limit is 0.08 MPa. Never apply pressure
higher than 0.08 Mpa. Applying a high pressure may
damage the connector, oil gage, and so on. To
prevent the connector from being damaged, apply
pressure with the cable left attached to the turbo
blower.

(1) Turn on the power to the oscillator, then open the valve of the
gas cylinder.

(2) Set the secondary pressure of the regulator of the laser gas
cylinder to 0.05 MPa.

(3) To make the pressure in the oscillator higher than the


atmospheric pressure, increase the atmospheric pressure sensor
(PWS2) setting by 0.02. (See Section 9.4.)

(4) Set the RUN key of the oscillator to ON, wait for two to three
seconds, then set the key to OFF. Wait until purge operation
starts.

(5) Place the leakage checker at a possibly faulty position where gas
seems to leak. If there is a leakage, the checker indicates it by
display or sound. When using the liquid leakage checker, drip
the liquid on a possibly faulty position. If gas leaks, bubbles
appear, so you can determine the location of a leakage.
NOTE
The leakage checker detects helium in the laser gas.
If ambient air flows, detection becomes difficult. So,
a gas leakage check should be made in a nearly no-
wind condition.

- 37 -
4.INSTALLATION B-70255EN/01

(6) After completing the check, reset the value set in (3) above to the
original setting.

Oscillation characteristics
(1) Modify the parameters listed below.
PRM No.15000 bit 4
Setting ® 1 (Three-minute correction is enabled.)
PRM.No.15008 bit 6
1 ® 0 (Automatic aging is disabled.)

(2) Start the oscillator. When a discharge start switch is provided, do


not set the switch to ON until after LRDY has been set.

(3) When starting discharge, the oscillator enters the correction


mode in which output is specified automatically. Record the
output observed before correction ends.

(4) Record the output, discharge voltage, and current values two
minutes after making the specification. The discharge voltage
(RFV) is indicated in DGN909, and the current value (RFI) is
indicated in DGN910.

(5) Record the output observed immediately before correction ends


since the output is specified.

(6) After ending the correction mode, record compensation


coefficient [parameter No. 15204].

(7) Three minutes after the termination of correction mode, record


the base discharge output, discharge voltage (RFV), and current
(RFI) values.

Compare the measured values of (4) and (7), above, with the
discharge voltage and current characteristics given in the data sheets.
If the discharge voltage (RFV) is high, check the external piping of
the laser gas and the laser gas composition, or perform aging.

Discharge margin check


(1) Modify the parameters listed below.
PRM No.15000 bit 4
1 ® 0 (Three-minute correction is disabled.)
PRM.No.15008 bit 6
1 ® 0 (Automatic aging is disabled.)
PRM No.15208
Setting ® 0 (Output feedback is turned off.)
PRM No.15209
Setting ® 0 (Output feedback is turned off.)
PRM No.15223
Setting ® Setting -60

- 38 -
B-70255EN/01 4.INSTALLATION

(2) If the setting in parameter No. 15223 is changed, a warning


message indicating a parameter change appears when LRDY is
set. Clear the message by resetting.

(3) Remove the top panel of the oscillator so that you can check the
discharge tubes and trigger electrode.

(4) Start the oscillator. When a discharge start switch is provided, do


not set this switch to ON until after LRDY has been set.

(5) Check that trigger electrode discharge maintains for 30 minutes


since the start of discharge.

(6) Upon the completion of the check, restore the parameters


modified in step (1) to their original values.

If discharge stops in step (5), check the external laser gas piping and
laser gas composition, or perform aging.

Power supply margin check (pulse check)


(1) Modify the parameters listed below.
PRM No.15000 bit 2
0 ® 1 (Use of assist gas is disabled at beam-on.))
PRM No.15000 bit 3
0 ® 1(Internal discharge is enabled in manual mode.)
PRM.No.15008 bit 6
1 ® 0 (Automatic aging is disabled.)
PRM No.15002 bit 0
0 ® 1 (Internal discharge is enabled in automatic operation mode.)
PRM No.15000 bit 4
1 ® 0 (Three-minute correction is disabled.)
PRM No.15208
Setting ® 0 (Output feedback is turned off.)
PRM No.15209
Setting ® 0 (Output feedback is turned off.)
PRM No.15210
1000 ® 1100

(2) Start the oscillator. When a discharge start switch is provided, do


not set this switch to ON until after LRDY has been set.

(3) Set the following values on the laser setting screen:


Pc=1100W Du=5% Fr=5Hz

(4) Set the manual mode, and perform internal discharge operation
under the above conditions.

(5) Check that no alarm occurs for 30 minutes after beam-on.

(6) Upon the completion of the check, restore the parameters modified
in step (1) to their original values.

- 39 -
4.INSTALLATION B-70255EN/01

An alarm, if issued in step (5), check the external laser gas piping and
laser gas composition, or perform aging.

Beam mode check


(1) Remove the guide pipe or the first bend mirror located between
the exit of the laser beam of the oscillator and machine.

(2) Start the oscillator.

(3) First, check the beam position. Laser light, if allowed to


penetrate the acrylic material because of incorrect operation, is
very dangerous. The paint of the machine is also likely to be
damaged. So, attach as feel plate, then an acrylic plate, about
30cm ´ 30cm in size. Then, output laser light for 0.1 seconds,
with Pc = 1000W output and Du = 100% set by programming. At
this time, provide a flow of air with a drier. If a guide laser is
used, confirm that CO2 gas laser light is directed to the same spot
as the guide laser.

(4) Next, attach an acrylic block to the position indicated by the


white acrylic mark. Ensure that the surface of the acrylic block is
perpendicular to the direction of CO2 gas laser light. If a guide
laser is used, the perpendicularity of the acrylic block surface
can be checked by adjusting the block such that the guide laser is
reflected from the acrylic block surface and returns to the beam
outlet.

(5) Set the program as follows:


Output : 1000W / Duty : 100% / Duration : 4.0 seconds

(6) Direct the drier so that it blows air at 45° to the acrylic block,
then output the beam. If air is not provided correctly, the acrylic
vapor will catch fire.

(7) Observe the burn pattern, and record the directions (X direction,
Y direction) and output conditions.

Check items
1 Compare the recorded burn pattern with the burn
pattern data attached to the oscillator. Check that
there is no significant difference. Note, however, that
the shape may vary, depending on the distance.
2 Check that the shape is perfectly circular.
3 Check that no interference fringes can be observed
nearby.

If a problem is detected, align the resonator of the oscillator.

- 40 -
B-70255EN/01 4.INSTALLATION

Discharge aging
If the oscillator is left unused for a long time (three days or more), or
if the laser gas circulating system has been opened to the atmosphere
(for example, to clean the mirrors or replace gas system components),
aging is required. This involves warming up the discharge tubes and
circulating gas by performing internal discharge to output absorbent
contaminants as gas. If the laser gas circulating system has been
opened to the atmosphere, perform a leakage check before attempting
aging.

(1) Modify the parameters listed below.


PRM No.15000 bit 3
0 ® 1 (Internal discharge is enabled in manual mode.)
PRM No.15000 bit 4
1 ® 0 (Three-minute correction is disabled.)
PRM.No.15008 bit 6
1 ® 0 (Automatic aging is disabled.)
PRM No.15002 bit 0
0 ® 1 (Internal discharge is enabled in automatic operation
mode.)
PRM No.15003 bit 2
1 ® 0 (Evacuation is not performed after the RUN OFF.)
PRM No.15208
6144 ® 0 (Output feedback is turned off.)
PRM No.15209
100 ® 0 (Output feedback is turned off.)
PRM No.15242, 15243
Setting ® -100 (The discharge gas pressure is changed.)

(2) Set the RUN key to ON to start the oscillator. Perform discharge
by setting the HV ON switch to ON.

(3) Then, perform internal discharge for thirty minutes using the
settings indicated below. Two methods of internal discharge are
supported. One is automatic operation based on programming,
while the other is manual operation using switches.
Condition : 700, 100Hz, Duty 50%
· Automatic operation
1 Create the following program.
G32 P1 Q1 ;
G24 S700 P100 Q50 R900.; S is a power command.
G32 P0;
2 Lock the shutter, then start the program.
· Manual operation
This method can be used when the machine operator's panel
has a switch enabling manual internal discharge.
1 On the setting screen, enter the output power and duty
ratio.
2 Press the internal discharge switch to perform internal
discharge.

- 41 -
4.INSTALLATION B-70255EN/01

(4) After 15 minutes has passed, set the RUN key to OFF to stop the
oscillator.

(6) Reset the discharge gas pressure to the normal value, perform
internal discharge operation with the specified output level for
15 minutes, then perform purge operation.

(7) Repeat step 6) until the discharge voltage becomes the factory-
set value plus up to 200 V.

(8) Upon the completion of aging, restore the parameter settings to


their original values.

- 42 -
B-70255EN/01 4.INSTALLATION

4.4 OSCILLATOR CONNECTIONS

The oscillator has connections for cooling water piping, laser gas
piping, and power and signal cables. For details of the electrical
connections for the CNC and machine, refer to the corresponding
connection manual.

4.4.1 Cooling Water

4.4.1.1 Specification of the cooling water

The quality of cooling water is specified in the table below. If tap


water is used, it should be treated in an ion exchanger.

Refrigerator/air-conditioner cooling water quality standard


(JRA-9001-1980)
pH (25°C) 6.0 to 8.0
Conductivity (25°C) 200ms/cm or less
-
Chlorine ion Cl 20ppm or less
Standard item 2-
Sulfate ion SO4 50ppm or less
M alkalinity CaCO3 50ppm or less
Total hardness CaCO3 50ppm or less
Iron Fe 0.3ppm or less
2-
Reference Sulfur ion S Not to be detected
+
item Ammonia ion NH4 0.2ppm or less
Ionic silica SiO2 30ppm or less

4.4.1.2 Anticorrosive

Add the following anticorrosive to cooling water immediately after


installation to prevent problems due to corroding cooling water and to
decrease the frequency of replacement of cooling water.
Consult the chiller manufacturer for use of the anticorrosive.
Product name:
CONTLIME K-6000
Manufacturer:
MITSUBISHI GAS CHEMICAL. ISC
Use:
Add the anticorrosive to cooling water in concentration of 1000
ppm (100 cc/100 liters). Monthly check the concentration of the
anticorrosive using concentration check paper dedicated to
anticorrosives and add the anticorrosive to cooling water until
the concentration reaches about 1000 ppm.
Concentration check paper:
Purchase a concentration check set (50 sheets of check paper, a
dropping pipette, etc.) together with CONTLIME K-6000
(manufactured by Mitsubishi Gas Chemical ISC).
If the above anticorrosive is added to cooling water and the
concentration is controlled, also be sure to replace the cooling water
every year.
- 43 -
4.INSTALLATION B-70255EN/01

[Reference] Cooling water capacity of the oscillator


Model Water capacity
C1000iA About 5 liters

4.4.1.3 Cleaning agent

To remove foreign matters such as fur that have adhered to the inside
of the cooling water circulating path, wash the cooling water
circulating path using the following detergent. Consult the chiller
manufacturer for use of the detergent.
Product name:
DESLIME
Manufacturer:
MITSUBISHI GAS CHEMICAL ISC
Use:
Add the detergent of 10% of the amount of cooling water,
circulate the water for an hour, then drain the water. After that,
rinse the cooling water circulating path thoroughly. Do not touch
a stock solution of DESLIME with your bare hands because the
solution is a strong chemical. If a stock solution accidentally
contacts your skin, wash the stock solution off your skin well
under running water.
If waste water used for washing is left standing, the main
ingredient, hydrogen peroxide, is decomposed. Wait until
hydrogen peroxide is decomposed, or dilute waste water with
water to reduce the concentration, then flush the waste water
down the drain.

4.4.1.4 Antifreezing solution

If the chiller is used in a cold district, it should be provided with an


antifreezing function. When it is extremely cold, the chiller should be
kept running.
If it is necessary to use an antifreezing solution for lack of an
alternative, he following antifreezing solution should be used. Its
concentration should be 30% (usually) or 40% (in an extremely cold
district). Use of an antifreezing solution should be restricted within
four months in winter. Do not use antifreezing solution together with
an anticorrosive. The following antifreezing solution is already added
with an anticorrosive.
Product name:
AURORA BRINE
Manufacturer:
TOKYO FINE CHEMICAL Co.
Use:
Refer to the description indicated on the product.

- 44 -
B-70255EN/01 4.INSTALLATION

4.4.1.5 Pure Water Supply Unit

It is recommended that a pure water supply unit (ion-exchange resin)


be installed at the water inlet of the chiller. The pure water supply
unit can prevent problems with the oscillator from occurring due to
corrosion or a clogged pipe. Replace the water periodically because
the quality of the circulating cooling water is lowered.

Product name:
Pure Water Supply Cartridge
Manufacturer:
ORUGANO Co. Ltd.
Use:
Refer to the description indicated on the product.

- 45 -
4.INSTALLATION B-70255EN/01

4.4.2 Laser Gas

4.4.2.1 Laser gas specification

Supply the laser oscillator with a mixture of gases that satisfy the
conditions listed below.

(1) Composition ratio and accuracy


CO2 : 5±0.25%
He : 40±2.00%
N2 : 55±2.75% (N2 balance)
(2) Water (H2O): 5 ppm or less
(3) Hydrocarbon (CnHm): 1 ppm or less
(4) Gas purity: 99.99% or higher

4.4.2.2 Gas pipe

Observe the following cautions for piping between the laser gas
cylinder and laser oscillator.

(1) Use nylon tube having an inside diameter of 8 mm or larger


(Junlon AS1 manufactured by Junkousha, or equivalent). Do not
use a rubber or urethane tube.
(2) Use a swage-lock vacuum joint. Do not use a one-touch coupler,
quick coupler, or hose-band joint.
(3) Minimize the length of tubing. It should be kept within 5 m.
Never exceed 15 m. For a length of 15 m or greater, use stainless
pipe.
(4) If it is necessary to use metal pipe for lack of an alternative, use
stainless bright annealed pipe. Minimize the number of joints
used. Connect pipes, if necessary, using a swage-lock vacuum
joint or by TIG welding. Do not use silver soldering or copper
piping. Piping should be installed by a vacuum piping specialist.
Do not extend metal piping over 30 m.
(5) Always keep the piping materials clean. Do not allow foreign
matter to get in the pipe.
(6) Use a pressure reducer that is free from gas leakage.
(7) After installing the pipe, check it for gas leakage, using a liquid
leak checker (Gyupoflex : A98L-0001-0856, detecting bubbles
caused by leaking gas) or a clamp test NOTE).

NOTE
Open the valve of the gas cylinder to pressurize the
inside of the pipe, then close the valve. Check to see
if the pressure in the pipe becomes low with time.
Monitor the primary pressure of the gas reducer for
over 8 hours. If the gas pressure becomes lower by
10% within 8 hours, gas is likely to be leaking. Take
an appropriate measure.

- 46 -
B-70255EN/01 4.INSTALLATION

4.4.3 Electrical Connections

Connect the cables to the laser oscillator as described below.

(1) Power cable


U(R)
V(S)
W(T)
Power supply: 200VAC +10% 50/60Hz ±1Hz 3f -15%
or 220VAC +10% 60Hz ±1Hz 3f -15%
(2) Ground cable
Connect the ground cable to the ground connection section
(class 1 : Ground resistance is 10 ohms or less.)
(3) Signal cables
When a metallic cable (shorter than 10 m) is used:
Connect the cable to IF JD1B.
(Connect jumper pin LINK1 of IF to the JD1 side.)
When an optical fiber cable (10 m or longer) is used:
Connect the cable to IF COP1B.
(Connect jumper pin LINK1 of IF to the COP side.)
(4) Signal lines
(a) Emergency stop input signals (ESP1, ESP2)
(b) OFF prohibit signals (OFI1,OFI2) - (EOF,COM) CNC side
A contact
(c) Laser power supply ON/OFF signal (CP1A) - CNC-
controlled 24 VDC

4.4.4 Inter-unit Connections

The C1000iA has an oscillator section and exhaust pump section.


Interconnection is made according to the procedure described below.

(1) Connection of the exhaust pump power cable


Use the supplied cable. Connect it correctly (with the correct
phase sequence).
(2) Gas piping
Use the supplied gas pipe and joints.

- 47 -
5.MAINTENANCE B-70255EN/01

5 MAINTENANCE
In FANUC LASER-MODEL C1000iA, periodic inspection items
have been reduced, and adjustments have been made easy. To keep
the oscillator in a satisfactory operating condition over a long period,
however, it is necessary to carry out periodic maintenance (including
daily maintenance) described in this chapter. The oscillator is
designed to maintain the same performance and reliability as it has
when it is installed, provided that maintenance is carried out as
prescribed.

- 48 -
B-70255EN/01 5.MAINTENANCE

5.1 DAILY INSPECTION

Table 5.1 lists daily inspection items. Inspect the C1000iA according
to this table. When parts (including oil) have been used for a
prescribed period, replace them quickly.

Table 5.1 Daily inspection items


Item Period Content and instruction
1 Residual laser gas Daily Check to see if the primary pressure is 1MPa or less as measured at the
regulator on the laser gas cylinder. If the primary pressure is 1MPa or lower,
replace the gas cylinder.
2 Exhaust pump oil Weekly Make sure that the oil level is between L (lower limit) and H (higher limit). If the
oil level is below L, supply oil. Be sure to replace the oil periodically, every
1500 hours of operation, whichever is earlier.
3 Exhaust pump oil leak Weekly Make sure that no oil is leaking from the exhaust pump main body, drain valve
and their periphery. If oil is leaking, immediately replace the exhaust filter,
because it is likely to have been clogged. Be sure to replace the exhaust filter
periodically, every 3000 hours of operation, whichever is earlier.
4 Turbo blower oil Weekly Make sure that the oil level is between L (lower limit) and H (higher limit). If the
oil level is below L, supply oil. Be sure to replace the oil periodically, every
1000 hours of operation, whichever is earlier.
5 Turbo blower oil leak Weekly Make sure that no oil is leaking from the turbo blower main body, oil inlet,
cock, and their periphery. If oil leaks for any reason other than a cock being
open, call FANUC.
6 Laser output Weekly If the laser output decreases within the oscillator, warning message No. 4085
is issued. If this message appears, clean or replace the mirror in the oscillator
quickly.
7 Cooling water Daily Make sure that the chiller discharge output is 5 Mpa or less.
At the start of the oscillator, also make sure that the water temperature is
20°C or higher.
Weekly Check the quality of cooling water in the chiller. Be sure to replace the cooling
water every two months. Adding an anticorrosive to cooling water can
decrease the replacement frequency.

- 49 -
5.MAINTENANCE B-70255EN/01

5.2 PERIODIC MAINTENANCE

The C1000iA contains consumables that must be replaced


periodically. Table 5.2(a) or (b) lists such consumables and the
related periodic maintenance work.
Perform periodic maintenance as well as daily inspection described in
Section 5.1 by using the listed periods as guidelines.
Note, however, that the replacement and maintenance intervals are not
guaranteed values but standard values based on field records.

Table 5.2(a) Periodic maintenance items and periods


Item Period of maintenance (operation hour)
1 Output mirror change Every 3000 to 4000 hours, or when the quality has degraded
2 Rear mirror change Every 3000 to 4000 hours, or when the quality has degraded
3 Folding mirror change Every 3000 to 4000 hours, or when the quality has degraded
4 Exhaust pump oil change Every 1500, or when the exhaust power has degraded
5 Exhaust pump filter change Every 3000, or when the exhaust power has degraded
6 Exhaust pump overhaul Every 10000, or when the exhaust power has degraded
7 Turbo blower oil change Every 1000, or when oil properties have changed
8 Turbo blower overhaul Every 12000, or when the power has degraded
9 Pressure controller gas filter change Every 12000, or when a pressure failure occurs
10 Discharge tube O-ring change Every 6000, or internal leakage occurs
11 Gas pipe O-ring replacement Every 6000, or internal leakage occurs
12 Cooling water change Every 1500, or when cooling water properties have changed
13 Water tubing cleaning Every 3000, or when the water pipe has clogged
14 Alarm lamp replacement Every 3000, or when the lamp fails to light

Table 5.2(b) Mirror cleaning periods


Item Period of maintenance (operation hour)
Cleaning of output and rear mirrors only None
Cleaning of all internal mirrors Every 3000 to 4000 hours

- 50 -
B-70255EN/01 5.MAINTENANCE

5.3 DETAILS OF MAINTENANCE

When opening the panels and doors during maintenance, keep the
power turned off. Before replacing oil, be sure to check that purging
is completed.

5.3.1 Changing the Turbo Blower Oil

Check method
Check the amount of oil in the turbo blower while referring to the
figure below. The oil level should be between graduations H and L.
This check should be made when the oscillator is at a rest. When the
turbo blower is running, it is impossible to check the amount of oil
correctly.

Fig. 4.3.1 Turbo blower oil gauge

Replenishment method
(1) Remove the hexagonal-head screw from the oil inlet with a 17
mm wrench. Be careful not to lose the O-ring on the screw.
Before supplying turbo oil, stop the oscillator according to the
correct procedure and turn off the power.
CAUTION
If the oscillator is not stopped by the correct
procedure, the pressure in the turbo blower becomes
negative. Opening the oil inlet under such a condition
lets a large amount of air get in the turbo blower.
This flow of air causes oil mist to get into the
oscillator housing, resulting in contamination of
internal mirrors.

(2) Take out a bottle of oil from an oil kit (A04B-0800-K326).


Remove the nozzle from the bottle, and take off the inner lid,
then put the nozzle back on the bottle. Put the supplied tube into
the nozzle, insert the tube into the oil inlet, pour oil being careful
to cause no foreign matters to get into oil.
Pour oil while checking the oil level from the oil level window
until the oil level reaches the three-quarter position from L

- 51 -
5.MAINTENANCE B-70255EN/01

between L and H. Either superfluous or insufficient oil can be a


cause of trouble.
(3) Lightly wipe the area around the oil inlet, hexagonal-head screw
on the oil inlet, and O-ring with a clean cloth or paper, then
check that there are no foreign matters. Foreign matters getting
into oil may cause a turbo blower fault. Check that the O-ring is
fit to the hexagonal-head screw on the oil inlet, then tighten the
screw (recommended torque: 800Ncm)
CAUTION
If the O-ring on the oil inlet is damaged, oil leaks.

(4) If oil has spilled over, wipe it up. Otherwise, the peripheral
equipment may be affected adversely.
(5) If there is oil left over, put the inner lid back on the bottle, and
keep the bottle in a dark, cool place.

Replacement method
(1) Get a container for oil drain on hand, and put the tip of the drain
tube into the container.
(2) Turn the oil drain cock through 90 degrees, and the oil will start
draining. Opening the oil inlet during draining can drain oil fast.
(3) After all the oil has been drained, close the oil drain cock by
setting it back in the initial place.
(4) Supply oil by following the same procedure as for
replenishment.
CAUTION
After replacing the turbo blower oil, perform
discharge aging.

- 52 -
B-70255EN/01 5.MAINTENANCE

5.3.2 Changing the Exhaust Pump Oil

Check method
Watch the oil gauge, and check that the oil level is between
graduations L and H. Also check whether the oil is dark.If the oil
level is below L, add oil to the turbo blower or replace the oil in it. If
the oil level is above H, drain until the oil level becomes below H.

CAUTION
The exhaust of the turbo blower contains oil mist.
The exhaust pump will capture oil mist, and the
amount of exhaust pump oil increases with time.
When the oil has increased too much, the filter gets
immersed in the oil, possibly causing white mist to
come out from the pump, or oil to leak. Furthermore,
the exhaust capacity may get lowered, or the pump
may be damaged.

- 53 -
5.MAINTENANCE B-70255EN/01

Replacement method
(1) Stop the oscillator, and turn off the power.
(2) Remove the oil inlet plug. There is an O-ring on it. Be careful
not to damage it. A missing or damaged O-ring can lower the
exhaust capacity of the pump.
(3) Insert the drain tube into a drain oil pot.
(4) Open the drain cock.
(5) After the oil has been drained up, close the cock.
(6) Supply 1.8 liters of new oil through the oil inlet, while watching
the oil gauge.
(7) Attach the oil inlet plug.

- 54 -
B-70255EN/01 5.MAINTENANCE

5.3.3 Replacing the Exhaust Pump Filter

Replacement method
When the operation time reaches 3000 hours or the exhaust capacity
gets lowered, replace the filter. A clogged filter may cause a whitish
smoke of oil mist to come out of the pump or lower the exhaust
capacity.

(1) Stop the oscillator, and turn off the power.


(2) Remove the black screw from the exhaust pump unit, then
remove the filter cover and O-ring.
(3) Remove the spring and washer.
(4) Pull out the filter element.
(5) Check the mounting orientation of a new filter element, then
insert the filter. A filter mounted improperly may cause oil mist
(whitish smoke) to come out of the exhaust pump gas outlet.
Therefore, check again that the filter is mounted properly.

Replacement work is now complete.

- 55 -
5.MAINTENANCE B-70255EN/01

5.4 MAINTENANCE PARTS

The maintenance parts are listed below. Refer to the following tables
for maintenance unit and part specification information. The part
specifications for oscillators compatible with CE marking are not
listed below.

[Nonrepairable parts]
Name Specification Q'ty
1 Output mirror A98L-0003-0045 1
2 Rear mirror A98L-0001-0750 1
3 Folding mirror A98L-0003-0047 3
4 Output rear mirror O-ring A98L-0001-0619/2025 2
5 Output rear mirror O-ring A98L-0001-0619/1028 2
6 Folding mirror O-ring JB-OR4D-P38 3
7 O-ring for discharge tube A98L-0003-0004/P22.4S 8
8 Discharge tube A290-4514-T001 4
9 Exhaust pump filter A98L-0001-0911 1
10 Exhaust pump oil A98L-0040-0093/1.0L6 (3.6 liters)
11 Turbo blower oil A04B-0800-K326 (1/3)
12 Turbo blower oil inlet O-ring JB-OR4D-P10 1
13 Condensation sensor A04B-0801-D012 1
14 Shutter switch unit A04B-0816-D002 1
15 Tempataure switch for A57L-0001-0095/B050 1
absorber (A04B-0816-D002)
16 Tempataure switch for A57L-0001-0057/090 1
shutter mirror (A04B-0816-D002)
17 Photoelectric switch for A57L-0001-0091 2
shutter (A04B-0816-D002)
18 Flow sensor unit A91L-0001-0216/50-E-00A 1
19 Guide laser A04B-0811-D401 1
(semiconductor laser unit)
20 Cooling fan A90L-0001-0396 6
21 Hour meter A91L-0001-0219 1
22 Circuit braker (JPN) A60L-0001-0308/W075JH2 1 (QF1)
Tripping 24VDC
23 Circuit braker (USA) A60L-0001-0238/080B 1 (QF1)
Tripping 24VDC
24 Circuit braker A60L-0001-0391/V050 1 (QF2)
25 Circuit braker A60L-0001-0391/V030 1 (QF3)
26 Circuit braker A60L-0001-0308/X010 1 (QF4)
27 Circuit braker A60L-0001-0308/V005 1 (QF5)
28 Circuit protector A60L-0001-0262/5W 1 (QF6)
29 Electromagnetic conductor A58L-0001-0243 2 (KM1,
KM2)
30 Electromagnetic conductor A58L-0001-0313/A2A3P13 1 (KM3)
31 Surge absorber A74L-0001-0008/10D50D 2 (Z1, Z2)
32 Surge absorber A74L-0001-0087/A 1 (Z3)
33 Surge absorber A74L-0001-0100 1 (Z110)
34 Surge absorber A74L-0001-0091/B 1 (Z111)
35 Trigger electrode assembly A98L-0005-0187 4
36 Trigger electrode O-ring JB-OR4D-P10 4

- 56 -
B-70255EN/01 5.MAINTENANCE

[Nonrepairable parts]
Name Specification Q'ty
37 Gas filter A97L-0201-0771/H-0.5-B 1
38 Nylon ferrule 1/4” A98L-0004-0348/2-N 6
39 Nylon ferrule 3/8” A98L-0004-0348/3-N 6
40 Nylon ferrule 1/2” A98L-0004-0348/4-N 2
41 Shutter mirror A290-4514-X206 1
42 Shutter mirror (for guide A98L-0001-0708 1
laser)
43 Heat exchanger (in) A97L-0201-0969 1
44 Heat exchanger (out) A97L-0201-0968 1
45 Heat Exchanger (for use A97L-0200-0849 2
within the cabinet)
46 Beam absorber A97L-0200-0937/C 1
47 Warning lamp A04B-0815-C324 1

[Repairable parts]
Name Specification Q'ty
1 Laser power supply unit A14B-0082-B209 1
2 Matching box A14B-0082-B316 1
3 IF PCB (for 16iL) A16B-2100-0141 1
4 Gas control PCB A16B-1700-0490 1
5 Relay PCB B A16B-1600-0361 1
6 Input unit control PCB A16B-1600-0660 1
7 Turbo PCB A16B-1600-0670 1
8 Stabilized power supply A20B-1005-0124 1
9 Power sensor unit A04B-0816-D001 1
10 Shutter unit A04B-0816-D410 1
11 Turbo blower A04B-0800-C013 1
12 Intake unit (gas controller) A04B-0816-D400 1
13 Exhaust unit (gas controller) A04B-0816-D401 1
14 Sensor base (gas controller) A290-4514-V040 1
15 Pressure controller A91L-0001-0217/0-T2 1 (Setting at
factory)
(Pressure sensor+cable kit) A91L-0001-0201 1
A04B-0816-K135 1
16 Control valve A04B-0816-D402 1
17 Water distributer unit (out) A04B-0816-C421 1
18 Water distributer unit (in) A290-4514-V801 1
19 High-frequency inverter A90L-0001-0500/8LF 1
20 Exhaust pump A90L-0001-0425 1

- 57 -
6.TROUBLESHOOTING B-70255EN/01

6 TROUBLESHOOTING

- 58 -
B-70255EN/01 6.TROUBLESHOOTING

6.1 TROUBLESHOOTING PROCEDURE

The troubleshooting procedure to be applied depends on the failure


occurrence status as indicated below. Perform checking according to
the items listed below.

(1) Action in response to alarm screen display (See Sections 6.2 and
6.3.)
(2) Major faults
(a) Laser power supply unit alarm display (See Section 6.4.1.)
(b) The power cannot be turned off with the CRT/MDI power
switch. (See Section 6.4.2.)
(c) The power cannot be turned on with the CRT/MDI power
switch. (See Section 6.4.2.)
(d) The laser output level is low immediately after the power is
turned on. See Section 6.4.2.)
(e) The laser output displayed on the CRT screen is unstable.
(See Section 6.4.2.)
(f) A cooling fan circuit breaker trips. (See Section 6.4.2.)
(g) The magnetic contactor for a exhaust pump causes thermal
trip. (See Section 6.4.2.)
(h) The main circuit breaker trips. (See Section 6.4.2.)
(i) Excessive laser gas consumption. (See Section 6.4.2.)
(j) A high-frequency inverter related alarm is displayed. (See
Section 6.4.2.)

CHECKING ON FAULTS

After identifying the following items, call the FANUC service center.
In some cases, a symptom is not actually a fault in the oscillator,
although it looks like a fault. So, check it with the following sections.

(1) Symptoms
(a) State of operation
(machining in progress, oscillator being started, etc.)
(b) Timing of a fault (alarm)
(c) Alarm number
(d) How often the fault occurs
(e) Oscillator serial number

(2) Other information


(a) Software system and edition indicated on the CRT screen
when power is turned on
(b) Parameter settings;
check the current parameter settings with the corresponding
values indicated on the unit, and report your finding to the
FANUC service center.

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6.TROUBLESHOOTING B-70255EN/01

6.2 ERROR MESSAGES AND COUNTERMEASURES

See the conceptual diagram of alarm processing and the list of error
code in the Appendix C.

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B-70255EN/01 6.TROUBLESHOOTING

6.3 RESPONDING TO ALARM MESSAGES ON THE SCREEN

The alarm numbers, DGNs, and parameter Nos. are of the FS16i-L.

ALM No.4061
AD converter 1 is not normal.

Alarm output condition


This alarm is issued when the A/D converter 1 does not return the conversion
completion signal in the specified time after the start of conversion. This A/D
converter is designed to read gas pressure and power data.
Related parameters
DGN. 981 Data when A/D1 conversion becomes abnormal.

No. Cause of trouble Solution


1 Anomaly of AD Replace AD converter 1 mounted on B8 on
converter 1 A16B-2100-0141.
2 Anomaly of IF PCB If this alarm is still issued after the A/D
converter 1 is replaced, replace the interface
PCB (A16B-2100-0141).

ALM No.4062
AD converter 2 is not normal.

Alarm output condition


This alarm is issued when the A/D converter 2 does not return the conversion
completion signal in the specified time after the start of conversion. This A/D
converter is designed to read discharge tube voltage and current data.
Related parameters
DGN. 982 Data when A/D2 conversion becomes abnormal.

No. Cause of trouble Solution


1 Anomaly of AD Replace AD converter 2 mounted on D7 on
converter 2 A16B-2100-0141.
Call the FANUC service center.
2 Anomaly of IF PCB If this alarm is still issued after the A/D
converter 2 is replaced, replace the interface
PCB (A16B-2100-0141).

ALM No.4063
Anomaly of laser power supply unit
This message appears when the laser power supply unit becomes
abnormal or performs protective operation. For the causes of
trouble and their solutions, see the table below and Section 6.4.
The power supply unit performs protective operation even when
a part other than the power supply unit becomes abnormal, so
sufficient investigation is required. If just the power supply unit
is replaced without removing the fundamental cause, the alarm
will recur.

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Alarm output condition


This alarm is issued when any or all of the signals from bits 0 to 7 at address
06H in DI of the laser interface are set to 0 in LRDY or a later step of the
sequence. Note that the bits not set in parameter No. 15025 or 15027 are not
checked.
Related parameters
PRM.15025, 15027 Power supply selection
DGN.966 #0-#7 Power supply unit operation status
DGN.970 #0-#7 Power supply unit selection signal
DGN.974 #0-#7 Power supply unit alarm display

(1) Preliminary inquiry


Check item Cause of trouble, Solution
1 Checking Confirm that all the parameters described in the
parameters attached parameter sheets are correctly set.
In case there exists any error, correct it.
2 Checking the 1) Check whether the mounting bracket of a
discharge tubes discharge tube are loose or missing.
2) Check whether the electrode has separated.
3) Check whether the inside and outside of a
discharge tube is dirty.
4) Check the discharge tubes for a crack.
5) Check the O-ring of each discharge tube for
damage.
3 Checking the trigger Check whether the trigger electrode is dirty.
electrode
4 Checking the 1) Check whether the matching box fan stops.
matching box 2) Check whether any coil in the matching box
becomes black.
5 Checking cooling Confirm that the cooling water temperature is in
water temperature the range of 20 to 30°C.
6 Checking cable Check the cables and connectors connected to
connectors the power supply for looseness.
7 Insufficient Perform another aging operation according to
discharge aging Item (8) in the Section 4.3.

(2) Confirming operation and investigating the cause of a fault


Switch on the failing power unit, observe the condition and
clarity the cause referring to the following tables.
Phenomenon Presumption cause
1 An alarm is issued when the LED of a laser The IF PCB is faulty.
power supply unit is not turned on. Poor cable contact
2 An alarm occurs before discharge begins. (The The laser power
time when 200 VAC is supplied to the power supply is defective.
supply)
3 The RF current is small in comparison with The laser power
other power supply units and the discharge supply is maladjusted.
tends to disappear.
4 The RF discharge current is large in
comparison with other units. The alarm is DCV
alarm.

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Phenomenon Presumption cause


5 The RF voltage of all the units is high during The external laser gas
discharge and the laser power is low. The pipe is abnormal.
discharge tends to disappear. When the purge The gas composition
is repeatedly performed, the RF voltage is not normal due to
gradually decreases and the laser power leakage of a gas.
recovers.
This phenomenon often appears after the laser
was not used for a long period.
6 The RF voltage of all the units is high during Internal leakage of
discharge and the laser power is low. The oscillator
discharge is tends to disappear. Even though Internal leakage of
the purge is repeatedly performed, the situation water of the oscillator
does not recover.
7 The RF voltage of all the units is high during The intra-tube
discharge but the laser power is normal. The pressure of the laser
discharge is tends to disappear. The output is gas is high or the gas
high for the high output command, and it is composition is not
lower than the standard for the low output normal (excessive
command. amount of N2).
8 The RF voltage of all the units is low during The intra-tube
discharge and the laser power is low. The pressure of the laser
discharge is widely spread. In the high laser gas is high or the gas
power region, the power is low but in the low composition is not
power region, it is higher than the normal value. normal (excessive
The alarm is DCV alarm. amount of He).
9 Although the RFV, RFI, and output are normal, Anomaly of the Laser
an alarm may occur. power-supply unit
itself (anomaly of
alarm circuit).

(3) Solution
Cause of trouble Solution
1 IF PCB abnormal Replace the IF PCB.
2 Laser power supply Locate the faulty component, then replace it.
abnormal
3 Laser power supply Adjust the laser power supply as explained in
maladjusted Chapter 9.
4 External laser gas Identify the faulty location, then repair the
pipe abnormal external pipe as explained in Chapter 4.
5 Laser gas Replace the laser gas with one that satisfies the
composition ratio specifications. If there is a leakage in the
abnormal external piping and a gas cylinder is attached to
the piping for a long time, the gas composition
may have changed.
6 Pressure sensor Replace the pressure sensor.
abnormal
7 Internal leakage, Check the faulty location, and replace the faulty
leakage of water part so that the leakage is within the allowable
range (not more than 10/15 minutes set as the
amount of change in DGN. 905).

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ALM No.4065
Shutter anomaly

Alarm output condition


This alarm is issued when the shutter open command and the shutter status
do not match in LRDY or a later step of the sequence.
Shutter open signal
SHOP (bit 0 at address 05H of DO of the laser interface)
Shutter status signal
SHOF (bit 5 at address 01H of DI of the laser interface)
SHON (bit 4 at address 01H of DI of the laser interface)
If SHOP = 1, SHON = 1 and SHOF = 0 are regarded as normal.
If SHOP = 0, SHON = 0 and SHOF = 1 are regarded as normal.
Any state other than the above causes an alarm. When the SHOP status
changes, the alarm monitor is masked for the time set in parameter No.
15152 (default: 3 seconds).
Related parameters
DGN.961 #4 SHON Shutter open detection
DGN.961 #5 SHOF Shutter close detection
DGN.970 #5 SHOP Shutter open command
F200 #4 Shutter ON signal
F200 #3 Shutter OFF signal
See the following table, and check the operation status.
[Open] command [Close] command
DGN No.973.bit0=1 DGN No.973.bit0=0
[Open] detector state signal 1 1 0 0 1 1 0 0
DGN No.961 bit 4
[Close] detector state signal 0 1 0 1 0 1 0 1
DGN No.961 bit 5
Normal(N)/Abnormal(A) N A A A A A A N

Cause of trouble Solution


1 Shutter clamp not removed. Remove the shutter clamp.
2 Anomaly of position detector Replace the position detector.
3 Shutter cam loosened. Tighten the screw again.
4 Shutter arm section caught Eliminate the cause of the problem. If
the problem cannot be solved, replace
the unit.
5 Relay PCB B (A16B-1600- Replace the relay PCB B.
0361) is faulty.
6 Anomaly of cables connecting Check the connection of each cable.
each PCB.

ALM No.4066
Discharge starting anomaly
After HV is turned on(start discharge), the discharge starts. This
alarm occurs when at least one discharge tube discharges hard
and causes high voltage.

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Alarm output condition


When HV is turned on, discharge starts six seconds later to reach the
maximum bias command value. After the time set in parameter No. 15222 is
passed, the voltage value of each discharge tube is compared with the value
set in parameter No. 15221. If any voltage is higher than the parameter
setting, this alarm is issued.
Related parameters
PRM.15220 Maximum bias command value
PRM.15221 Discharge start check voltage
PRM.15222 Discharge wait time
PRM.15223 Bias command
DGN.909-914 Discharge tube voltage and current

Cause of trouble Solution


1 Anomaly of parameter Make a setting using the values of
setting parameters listed in the parameter table
attached to the machine.
2 Anomaly of laser gas Use the laser gas with the specified
composition composition accuracy.
3 Discharge tube electrode Check the electrode contacts, and secure
mounting bracket any loose mounting brackets.
loosened
4 Leakage in vacuum Locate the leakage, and replace the
system or water leakage defective part.
5 The gas flow control Adjust the gas flow control valve to obtain the
valve is closed specified gas flow rate.
6 Matching box abnormal Replace the matching box.
7 Crack or pinhole in Replace the discharge tube.
discharge tube

ALM No.4067
Overheating laser oscillator housing
The temperature of the input side of the electrode cooling fan is
monitored and sends alarm when it exceeds 60°C. When the
temperature decreases, the alarm state is solved automatically.
Before that it cannot be reset. The C1000iA does not have the
sensor.

Alarm output condition


This alarm is issued when the cabinet temperature signal becomes 0 during
the time from RUN-ON to immediately before purge completion.
Cabinet temperature signal
CAT (bit 1 at address 01H of DI of the laser interface)
Related parameters
DGN.961 #1 *CAT Temperature sensor in the cabinet

Cause of trouble Solution


1 Excessive environmental Lower the ambient temperature by ventilation
temperature (5 to 30°C)
2 Excessive cooling water Set the temperature of the cooling water to
temperature within an appropriate range (20 to 30°C).
3 Anomaly of cooling fan Replace the cooling fan motor.
motor

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6.TROUBLESHOOTING B-70255EN/01

Cause of trouble Solution


4 Anomaly of temperature Check the continuity of the temperature
sensor sensor. If any disconnection is found, replace
the temperature sensor.
5 Anomaly of oscillator IF Replace the faulty PCB.
PCB(A16B-2100-0141)
6 Anomaly of connecting Check the connection of each cable.
cables between the PCBs.

ALM No.4068
Too much incident laser beam back to the resonator.
This alarm is issued, if a workpiece reflects laser beam more
than the rating to the laser oscillator. This can happen when the
laser beam is used to drill, cut, or weld materials (such as copper,
brass, and aluminum) having a high reflectivity to the laser beam
(10.6 mm).

Alarm output condition


This alarm is issued when the actual laser output is in one of the following
conditions at the time of beam output:
(1) The actual laser output is higher than the average command power
(power x duty) by more than the value set in parameter No. 15265.
(2) The actual laser output exceeds the value set in parameter No. 15266.
The actual laser output is not monitored for five seconds after the beam is
turned on or the output is changed.
Related parameters
PRM.15215 Power input compensation coefficient
PRM.15265 Allowable output increase value
PRM.15266 Output limit
DGN.906 Actual output

Cause of trouble Solution


1 Excessive returning Lower the output specified in the command, or take
beam back into the an action to reduce the reflected laser beam.
resonator
2 Anomaly of parameter Check the settings of parameter Nos. 15265 and
for alarm detection 15266 with the corresponding values in the
parameter table attached to the unit.
3 Anomaly of parameter Check the settings of parameter Nos.15280 to
for output power table 15308 with the corresponding values in the
parameter table attached to the unit.
4 Anomaly of parameter shown in the attached
for input calibration table. After replacing the rear mirror or power
coefficient sensor, it is necessary to change this parameter
setting. See Chapter 9.

ALM No.4069
Anomaly of power supply unit voltage of IF PCB
This alarm appears when there occurs the anomaly in the
stabilized power unit voltage +5, ±15, +24V of IF PCB for NC
interface.

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Alarm output condition


This alarm is issued when the enable signal in the interface becomes 0
during the time from RUN-ON to immediately before purge completion.
Enable signal in the interface
EN (bit 0 at address 00H of DI of the laser interface)
Related parameters
DGN.960#0 *ENB Enable signal in the interface

Cause of trouble Solution


1 Fuse blowing Correct the cause of the blown fuse, then
replace the fuse.
2 Anomaly of stabilized Check the output voltage (24V ±5%) of the
power source unit stabilized power source unit. If the allowable
voltage range is exceeded, replace the unit.
3 Anomaly of power unit of See Section 6.5 for details of the normal
IF PCB (A16B-2100-0141) supply voltage. If the allowable voltage range
is exceeded, replace the IF PCB.
4 Laser oscillator main Check whether the main circuit breaker is
circuit breaker abnormal conducting (ON).

ALM No.4070
Anomaly of chiller unit
Setting the RUN ON switch to ON causes the CNC to output a
chiller unit start signal to the machine, which will respond with a
chiller unit ready signal. The CNC monitors this signal. If the
chiller ready signal stops, the CNC issues this alarm. Check the
DGN status to confirm the signal from the chiller unit. If the
signal is abnormal, check the chiller unit.

Alarm output condition


Monitoring starts four seconds after the chiller start signal is output, and
monitoring is ended by setting RUN-OFF. If the chiller ready signal CLRDY
(G221#6) becomes 0 during monitoring, this alarm is issued.
Related parameters
G221#6 CLRDY Chiller ready signal
F221#4 CLON Chiller start request signal

ALM No.4071
Anomaly of assist gas
When starting machining, the CNC monitors for a ready signal
from the assist gas supply unit in the machine. If this signal is
not sent normally, the CNC issues this alarm.
Check the DGN status to confirm the signal from the assist gas
supply unit. If the signal is abnormal, check the assist gas supply
unit.
This alarm is issued also when in G32PaQb, a is not 0 to 3, or b
is not 1 to 7 during program execution.

Alarm output condition


This alarm is issued when the assist gas ready signal (G221#7) becomes 0
during the assist gas output command.

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Related parameters
G221#7 AGRDY Assist gas ready signal
G222#5 AGST Assist gas start signal
F222#2-#0 AG1-AG3 Assist gas selection signal
ALM No.4072
Shortage of cooling water
This alarm appears when the water shortage takes place.

Alarm output condition


When the chiller water level signal becomes 0 once during the time from
RUN-ON until RUN-OFF, signal re-checking is made five seconds later. If the
recheck still shows the 0 state, this alarm is issued.
Chiller water level signal
MVW (bit 0 at address 01H of DI of the laser interface)
Related parameters
DGN.961#0 *MVW Water level sensor

Cause of trouble Solution


1 Shortage of 1) The capacity of the chiller unit is insufficient, or the
cooling water water flow rate is reduced due to a clogged pipe.
Use a chiller unit having sufficient capacity, or
clean the piping.
2) Check whether the cooling water is distributed
normally throughout between the external optical
system and the laser oscillator. Ensure that cooling
water is supplied to the laser oscillator at the
specified flow rate.
2 Anomaly of sensor Check the connection of each cable.
cable
3 Anomaly of water If this alarm is issued even when the specified flow rate
flow rate sensor is satisfied, clean or replace the water flow rate sensor.

ALM No.4073
Decrease of laser gas pressure
The pressure of the laser gas supplied to the laser oscillator is
monitored.
This alarm is issued, if this pressure becomes lower than the
permissible level.

Alarm output condition


(1) This alarm is issued when the laser gas pressure signal becomes 0
during the time from RUN-ON until RUN-OFF. The alarm monitor is
masked while the purge valve is open and for five seconds after the
valve is closed, and while the exhaust valve of the external piping is
open and for five seconds after the valve is closed.
(2) This alarm is issued when purge operation is not completed in three
minutes after the start of purge operation.
(3) When a laser gas mixing device is provided, this alarm is issued if the
tank pressure signal becomes 0.
Laser gas pressure signal
MGP (bit 5 at address 00H of DI of the laser interface)
Tank pressure signal
MI12 (bit 2 at address 10H of DI of the laser interface)

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Related parameters
PRM.15009#7 TEM Tank supply pressure
DGN.960#5 *MGP Laser gas supply pressure sensor

Cause of trouble Solution


1 Tool low supply pressure Adjust the secondary pressure at the regulator
of laser gas on the gas cylinder so that the pressure of
laser gas supplied to the laser oscillator is
0.1MPa (rating) as measured at the entry of
the oscillator. If the distance between the gas
cylinder and the oscillator is larger than 5 m, it
is necessary to set the pressure slightly higher.
2 No laser gas. Check whether the gas cylinder is empty or
whether the connection valve is closed. If
empty, replace the gas cylinder.
3 Leakage from the gas tube Check that the gas pipe joint is secure. Also
leading to the oscillator check whether the tube or pipe is broken. If so,
replace it.
4 Gas supply pressure Check whether the gas supply pressure
sensor or cable abnormal sensor is set correctly. If not, set the sensor as
explained in Chapter 9. If the sensor cannot be
reset, replace the sensor.

ALM No.4074
Roots blower overheat
This alarm is issued if the maximum allowable temperature of
the motor sequence section of the Roots blower is exceeded.
When an oscillator having turbo blowers is used, this alarm is
not issued.

Alarm output condition


This alarm is issued when the blower temperature signal becomes 0 during
the time from RUN-ON to immediately before purge completion. If bit 5 of
parameter No. 15003 is set to 1, however, the signal is not monitored.
Blower temperature signal
RBT (bit 6 at address 00H of DI of the laser interface)
Related parameters
PRM.15003#5 TON Presence of the turbo blower
DGN.960#6 *RBT Roots blower temperature

Cause of trouble Solution


1 Excessively high cooling water Reduce the temperature of cooling water.
temperature
2 Insufficient cooling water The amount of cooling water being
supplied to the Roots blower may be
insufficient. Check whether the cooling
water tube between the water branch unit
and Roots blower is twisted or clogged. If
the tube is twisted or clogged, replace the
tube.
3 Anomaly in temperature sensor Check whether the cable is securely
cable connection connected to the temperature sensor. If
not, reattach the cable.

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6.TROUBLESHOOTING B-70255EN/01

Cause of trouble Solution


4 Anomaly in temperature sensor The temperature sensor is designed to
be actuated by temperatures of 60°C or
above. If the temperature sensor is
actuated at lower temperatures, replace
the sensor.

ALM No.4075
Condensation
A condensation sensor is mounted near the output mirror holder
in the oscillator. This alarm occurs when the sensor detects
condensation. After this alarm occurs, the alarm status cannot be
reset until the condensation status is released. Do not blow hot
air of 60°C or higher on the condensation sensor.

Alarm output condition


This alarm is issued when the chiller water temperature signal becomes 0
during the time from RUN-ON until RUN-OFF.
Chiller water temperature signal
WT1 (bit 2 at address 01H of DI of the laser interface)
Related parameters
DGN.961#2 *WT1 Condensation sensor

Cause of trouble Solution


1 Tool low cooling water Set the water temperature near the room
temperature temperature (plus about 1°C).
2 Connecting anomaly of Check whether the cable is securely
condensation sensor cable connected to the condensation sensor. If
not, reattach the cable.
3 Anomaly of condensation If the sensor operates when there is no
sensor condensation around the sensor, the sensor
is abnormal. Replace the sensor.

ALM No.4076
Laser output decrease
This alarm is issued, if the monitored laser output is much lower
than the specified laser output, that is the monitored laser output
is lower than the specified output by a value specified in
parameter No. 15271.

Alarm output condition


This alarm is issued when the actual laser output level is lower than the
average command power (power x duty) by more than the value set in
parameter No. 15271. Monitoring, however, is not performed for three
seconds after the beam is turned or after the output is changed.
Related parameters
PRM.15271 Allowable output drop value
DGN.906 Actual output

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Cause of trouble Solution


1 Lack of output from The thermocouple inside the power sensor unit may
laser power sensor be damaged, or there may be a poor terminal
unit connection. Measure the direct current resistance
between the terminals of the power sensor unit, and
check that the measured value falls within 100 to
500 ohms. If the measured value falls outside this
range, replace the power sensor unit.
2 Connecting anomaly Check whether the cable is securely connected to
of the cable of laser the power sensor unit. If not, reattach the cable.
power sensor unit.
3 Anomaly of If the above checks do not reveal any abnormality,
intermediate PCB B and there is no output from intermediate PCB B,
(A16B-1600-0361) replace the PCB.

ALM No.4077
Overheat of beam absorber
Laser beam is introduced into the beam absorber, when the
oscillation takes place with shutter closed. This absorber is
water-cooled and sends alarm when the temperature of the
absorber exceeds a critical one. In the usual operation, the
irradiation of the absorber takes place only during the calibration
after the oscillator start.

Alarm output condition


This alarm is issued when the absorber temperature signal becomes 0
during the time from RUN-ON to immediately before purge completion.
Absorber temperature signal
ABT (bit 7 at address 01H of DI of the laser interface)
Related parameters
DGN.961#7 *ABT Absorber temperature switch

Cause of trouble Solution


1 Insufficient cooling The amount of cooling water being supplied to the
water beam absorber may be insufficient. Check whether
the cooling water tube between the water branch
unit and beam absorber is clogged. If the tube is
clogged, replace the tube.
2 Temperature sensor Check if the cable is securely connected to the
wired incorrectly temperature sensor. If not, reattach the cable.
3 Temperature sensor The temperature sensor is designed to be
abnormal actuated by temperatures of 80°C or higher. If the
temperature sensor is actuated at lower
temperatures, replace the sensor.
4 Absorber abnormal If the temperature rises when water is flowing,
replace the absorber.

ALM No.4078
Gas pressure anomaly in discharge tube
The gas pressure is monitored after the discharge start ready
condition (LRDY) is established. This alarm is issued, if the
monitored gas pressure deviates by ±100 (1330Pa) from the set
gas pressure.

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6.TROUBLESHOOTING B-70255EN/01

Alarm output condition


This alarm is issued when the actual gas pressure deviates by ±100 or more
from the set level in LRDY or a later step. Monitoring, however, is not
performed during the time from HV OFF until LRDY.
Related parameters
DGN.905 Actual gas pressure

Cause of trouble Solution


1 Anomaly of parameter Check whether the values of PRM NO.
setting of gas pressure 15000/bit1,15244,15245,15246 are set as
control indicated in the attached data sheets. If a
different value is set, set the value specified in
the data sheets.
2 Leakage in circulating 1) Check whether any joints in the gas
system circulating system are loose. If a loose joint is
found, tighten the joint firmly.
2) Check whether any components of the gas
circulating system are cracked. If a cracked
component is found, replace that component.
3) Check whether there is a hole in a discharge
tube. If a hole is found in a discharge tube,
replace the discharge tube.
3 Stopped turbo blower Check the turbo blower and high-frequency
inverter.
4 Abnormal supply laser Adjust the secondary pressure at the regulator
gas pressure setting on the gas cylinder so that the pressure of laser
gas supplied to the laser oscillator is 0.1 to 0.2
MPa (rating) as measured at the entry of the
oscillator. If the distance between the gas
cylinder and the oscillator is larger than 5 m, it is
necessary to set the pressure slightly higher.
5 Anomaly of pressure Replace the pressure sensor.
sensor
6 The gas flow control Adjust the gas flow control valve to supply gas
valve is closed. at the specified flow rate.
7 Anomaly of gas control If the above checks do not reveal any
unit abnormality, replace the pressure controller.

ALM No.4079
Press the RESET key
If the emergency stop button is pressed after the discharge start
ready condition (LRDY) is set up, the shutter is closed,
discharge stops, and the LRDY condition is resumed, then this
alarm is displayed. To reset the alarm, remove the cause of
trouble, release the emergency stop button, and press the reset
key on the operator's panel.

Alarm output condition


This alarm is issued when an emergency stop occurs in LRDY or a later step.
Related parameters
DGN.960#1 *ESAL Emergency stop processing signal

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ALM No.4080
Leakage of gas tube/anomaly of exhaust pump
When the RUN (pressure control start) button is pressed, the
exhaust pump starts evacuating the gas in the circulating system
to place the oscillator in the low-pressure state. This alarm
occurs when the pressure does not reach the exhaust completion
pressure specified for parameter No. 15240 until the specified
time (default: 10 minutes) has elapsed after the start of exhaust.

Alarm output condition


After RUN-ON, evacuation starts. When the laser gas pressure does not
reach the level set in parameter No. 15240 within the time set in parameter
No. 15259 after the start of evacuation, this alarm is issued.
Related parameters
PRM.15240 Evacuation completion negative pressure

Cause of trouble Solution


1 Incorrect gas pressure Check if the value of PRM No. 15240 is set as
control parameter setting indicated in the attached data sheets. If a
different value is set, set the value specified in
the data sheets.
2 Anomaly of IF PCB If the gas pressure of the gas circulating system
(A16B-2100-0141) does not decrease at all, the IF PCB may be
faulty. Check whether the CP89(Solenoid valve
signal) connector on the PCB is loose. Also
check the signals of the IF PCB. If an abnormal
signal is detected, replace the IF PCB.
3 Gas leakage from piping 1) Check whether any component joints in the
gas circulating system are loose. If a loose
joint is found, tighten the joint firmly.
2) Check whether any components in the gas
circulating system are cracked. If a cracked
component is found, replace that component.
3) Check whether the O-ring of each discharge
tube is worn. Replace any O-rings that exhibit
excessive wear. If a Teflon O-ring is ever
removed, it must be replaced with a new one.
4) Check whether there is a hole or crack in a
discharge tube. If a hole is found in a
discharge tube, replace the discharge tube.
4 Anomaly of exhaust Check whether the piping between the oscillator
pump and exhaust pump is normal.

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6.TROUBLESHOOTING B-70255EN/01

Cause of trouble Solution


5 Anomaly of exhaust If the above checks do not reveal any
pump abnormality, the performance of the exhaust
pump has deteriorated. Check the following
items.
1) The oil level is too low. Supply oil as
explained in Chapter 5.
2) Other than the approved type of oil is being
used. Supply the approved type of oil as
explained in Chapter 5.
3) The exhaust filter is clogged. Replace the
exhaust filter as explained in Chapter 5.
4) The exhaust pump outlet is locked or clogged
to disable exhaust operation. Remove the
cause of the locking or clogging.
5) Check whether the exhaust pump turns in the
reverse direction because of a problem in
phase rotation.
If the steps above do not clear the fault, replace
the exhaust pump.

ALM No.4081
Anomaly of gas pressure control
Pressing the RUN (pressure control start) button starts expelling
air from the laser gas tube. When a specified degree of vacuum
is attained, laser gas is supplied into the laser gas tube, and gas
pressure control begins.
Whether the pressure is within ±20 (266 Pa) of the pressure
specified for parameter No.15241 is checked, 45 seconds after
the start of gas pressure control. This alarm occurs when the
pressure does not fall within this range. When no error occurs,
the turbo blower rotates and the discharge start ready condition
(LRDY) is established.

Alarm output condition


This alarm is issued when the actual gas pressure is not within ±20 of the
parameter setting (parameter No. 15241) after 45 seconds have passed
since the start of gas pressure control.
Related parameters
PRM.15241 Gas pressure at the start of discharge
DGN.905 Actual gas pressure

Cause of trouble Solution


1 Anomaly of Check whether the values of PRM Nos. 15000#1,
parameter setting 15244, 15245, 15246 are set as indicated in the
of gas pressure attached data sheets. If a different value is set, set the
control value specified in the data sheets.

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B-70255EN/01 6.TROUBLESHOOTING

Cause of trouble Solution


2 Gas leakage from 1) Check whether any component joints of the gas
piping circulating system are loose. If a loose joint is found,
tighten the joint firmly.
2) Check whether any components of the gas
circulating system are cracked. If a cracked
component is found, replace that component.
3) Check whether there is any hole in a discharge
tube. If a hole is found in a discharge tube, replace
the discharge tube.
3 Anomaly of supply Adjust the secondary pressure at the regulator on the
laser gas pressure gas cylinder so that the pressure of laser gas supplied
to the laser oscillator is 0.1 to 0.2 MPa (rating) as
measured at the entry of the oscillator. If the distance
between the gas cylinder and the oscillator is larger
than 5 m, it is necessary to set the pressure slightly
higher.
4 Anomaly of IF PCB Measure the pressure monitor voltage (about 0 V to 9
(A16B-2100-0141) V at the LTP test terminal) and command voltage
(about 5 V to 10 V at the GPC test terminal) being
output by the IF PCB. If a measured voltage is
abnormal, replace the IF PCB.
5 Anomaly of If the pressure indication (DGN 905) varies
pressure sensor significantly at irregular intervals, the pressure sensor
is faulty. Replace the sensor.
6 Anomaly of If the above checks do not reveal any abnormality,
pressure control replace the pressure control valve.
valve

ALM No.4082
Anomaly of pressure sensor
This alarm appears when the signal of the pressure sensor used
for pressure control detector vanishes.

Alarm output condition


This alarm is issued when the actual gas pressure lowers to 0 twice
successively during the time from RUN-ON until RUN-OFF.
Related parameters
DGN.905 Actual gas pressure

Cause of trouble Solution


1 Open or poor contact Check the cable connection. If the connection is
in connection cable abnormal, replace the cable.
between pressure
sensor and IF PCB
2 Anomaly of IF PCB If a signal is received from the pressure sensor, but
(A16B-2100-0141) there is no output from the IF PCB, the IF PCB is
faulty. Replace the IF PCB.
3 Anomaly of pressure If the power supply (+15 V) for the pressure sensor
sensor is normal, but there is no output, the pressure
sensor is faulty. Replace the pressure sensor.

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6.TROUBLESHOOTING B-70255EN/01

ALM No.4085
Decrease of laser output power
This alarm appears when the laser output power decreases and
takes an abnormally higher calibration coefficient.

Alarm output condition


This alarm is
issued when the power compensation coefficient exceeds the power
compensation limit during execution of power compensation.
Power compensation coefficient = (Pc/Pa) x 1024
Pc: Parameter No. 15200 or 15201
Pa: Actual laser output
Related parameters
PRM.15200
Power compensation command output for a half of the discharge tubes
PRM.15201
Power compensation command output for all discharge tubes
PRM.15203 Power compensation limit
PRM.15204 Power compensation coefficient

Cause of trouble Solution


1 An optical part in the laser Align the laser resonator.
resonator is out of position.
2 An optical part in the laser Clean or replace the optical part.
resonator is dirty.
3 The supplied laser gas is Replace the laser gas with the specified one,
not the one specified. that is CO2:N2:He = 5:55:40% (volume ratio)
with a composition ratio accuracy of ±5%.
4 Cooling water temperature Check whether the temperature of cooling
out of specified range water falls within the range of 20 to 30°C.
5 Laser oscillator ambient Check whether the ambient temperature falls
temperature out of specified within the range of 5 to 30°C.
range

ALM No.4087
Shutter temperature abnormal
This alarm is issued when the temperature of the shutter mirror
exceeds a preset maximum (80°C)

Alarm output condition


This alarm is issued when the shutter temperature signal becomes 0 in
LRDY or a later step.
Shutter temperature signal
SHT (bit 6 at address 01H of DI of the laser interface)
Related parameters
PRM.961#6 *SHT Shutter temperature sensor

The table below lists the causes of faults and the corresponding
countermeasures.

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B-70255EN/01 6.TROUBLESHOOTING

Cause of trouble Solution


1 Contamination of shutter mirror Clean the shutter mirror. If this alarm
recurs after the shutter mirror is
cleaned, replace the mirror.
2 Anomaly of temperature sensor Replace the temperature sensor.
3 Temperature sensor cable Replace the cable.
broken
4 Relay PCB (A16B-1600-0361) or Replace the faulty PCB.
IF PCB(A16B-2100-0141) is
faulty.
5 Anomaly of PCB connection Check the connection of each cable.
cables

ALM No.4088
Discharge tube voltage drop
This alarm is issued, if the voltage applied to the discharge tube
drops largely. More specific, the discharge tube voltage for
reference discharge is set up automatically to parameter No.
15270 each time the RUN button is pressed. This alarm is issued,
if the automatically set discharge tube voltage is lower than the
discharge voltage specified at the previous RUN time, by at least
the amount specified in parameter No. 15272.

Alarm output condition


During beam output, this alarm is issued when the actual laser output is in
one of the following conditions:
(1) Immediately before LSTR, the RF voltage of the power supply of the
discharge tube having the smallest number among the selected
discharge tubes is compared with the parameter setting (parameter No.
15270 to 15272). If the discharge tube voltage is lower than the
parameter setting, this alarm is issued. If the discharge tube voltage is
not lower than the parameter setting, the discharge tube voltage is set in
parameter No. 15270.
(2) When external power control is not performed during power
compensation or during LSTR, the discharge tube voltage is compared
with parameter setting (parameter No. 15270 to 15272). If the discharge
tube voltage is once lower than the parameter setting, a comparison is
made again 1024 msec later. If the second comparison also shows that
the discharge tube voltage is lower than the parameter setting, this
alarm is issued.
Related parameters
DGN.909-924 Discharge tube voltage and current
PRM.15270 Discharge tube voltage in normal condition
PRM.15271 Allowable discharge tube voltage drop

Cause of trouble Solution


1 The laser gas Replace the laser gas with the specified one, that is
composition is not CO2:N2:He = 5:55:40% (volume ratio) with a
as specified. composition ratio accuracy of ±5%.
2 Anomaly of If discharge is performed, but the monitored
discharge tube discharge tube voltage is extremely low, replace the
voltage detection matching box.
system
3 Degradation of Check whether the turbo blower and high-frequency

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6.TROUBLESHOOTING B-70255EN/01

Cause of trouble Solution


turbo blower gas inverter are normal. Replace the turbo blower or
circulating high-frequency inverter if found to be faulty.
performance

ALM No.4089
Assist gas not output
This alarm is issued, if an attempt is made to radiate a laser beam,
when no assist gas is selected, or an assist gas condition is not
set up.

Alarm output condition


This alarm is issued when no assist gas is output during beam output.
Assist gas signal
AG1 to AG3(F0222#0 to #2)
Related parameters
F222#0 to #2 Assist gas selection signal

ALM No.4090
Laser beam not generated
This alarm is issued, if an attempt is made to radiate a laser beam,
when the laser oscillator is not in the LSTR state (discharging
state).

Alarm output condition


This alarm is issued when LSTR is not set during beam output.
Related parameters
F221#6 Oscillation in-progress signal

ALM No.4094
Vacuum pump operation abnormal
This alarm occurs when the thermal switch of the magnetic
contactor for the exhaust pump is tripped.

Alarm output condition


This alarm is issued when the exhaust pump operation signal RPAL
becomes 0 during the time from RUN-ON to immediately before purge
completion.
Exhaust pump operation signal
RPAL (bit 3 at address 01H of DI of the laser interface)
Related parameters
DGN.972 RPA Exhaust pump start
DGN.961#3 *RPAL Exhaust pump alarm

Cause of trouble Solution


1 Exhaust pump Replace the exhaust pump.
operation abnormal
2 Anomaly of IF PCB If the thermal switch of the contactor does not trip, the
interface PCB is abnormal. Replace it.
3 Signal cable broken Replace the cable.

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B-70255EN/01 6.TROUBLESHOOTING

ALM No.4095
A/D CONVETER-3
This alarm is issued when A/D converter 3 does not return the
conversion completion signal in the specified time after the
converter starts conversion. This A/D converter is designed for
reading the amount of tracing displacement.

ALM No.4096
UNDER TRACING
This alarm is issued when an attempt is made to change the trace
axis by using the trace axis selection function during tracing
control.

ALM No.4097
TRACE AXIS SELECT
This alarm is issued when two or more trace axis selection
signals are specified using the trace axis selection function.

ALM No.4098
TRACE AXIS & PLANE
This alarm is issued when no plane is selected for the trace axis.

ALM No.4099
GAS PRES.NOT REACH
This alarm is issued, if the discharge tube gas pressure does not
reach [specified discharge tube gas pressure during oscillation -
tolerance] after HV is set to ON.

Alarm output condition


The gas pressure at the start of discharge is increased to the gas pressure
level for oscillation. Then, when the actual gas pressure does not rise to the
value obtained by subtracting the value set in parameter No. 15248 from the
value in parameter No. 15242 or 15243 within 15 seconds after the gas
pressure for oscillation is set as the target gas pressure level, this alarm is
issued if bit 3 of parameter No. 15001 is set to 1.
Related parameters
PRM.15001#3
Specifies whether to preset the integral value of gas pressure control.
PRM.15242,15243 Intra-tube pressure for oscillation
PRM.15248
Tolerable amount by which the target gas pressure is not reached

Cause of trouble Solution


1 Invalid parameter Check whether the values of PRM Nos. 15001/bit 3,
setting 15247, and 15248 are set as indicated in the attached
data sheets. If a different value is set, set the value
specified in the data sheets.

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6.TROUBLESHOOTING B-70255EN/01

Cause of trouble Solution


2 Gas leakage from 1) Check whether any component joints of the gas
internal piping circulating system are loose. If a loose joint is found,
tighten the joint firmly.
2) Check whether any components of the gas
circulating system have cracked. If a cracked
component is found, replace that component.
3) Check whether there is a hole in a discharge tube.
If any damage is found, replace the tube.
3 Pressure sensor Replace the pressure sensor.
abnormal

ALM No.4100
INVETER1
If the inverter used to power the turbo blower is abnormal, this
alarm is issued.
When this alarm is issued, check that the alarm LED on the LED
indicator section of the inverter is lit. At this time, do not turn off
the power to the inverter because the alarm will be reset if the
power is turned off.
For an explanation of faults and corresponding countermeasures,
see the Subsection 6.4.10.

Alarm output condition


This alarm is issued when the inverter 1 signal becomes 0 during the time
from RUN-ON to immediately before purge completion.
Inverter 1 signal
IAL1 (bit 0 at address 02H of DI of the laser interface)
Related parameters
DGN.962#0 *IAL1 Inverter alarm 1

Cause of trouble Solution


1 Excessive intake Check whether the values of PRM Nos. 15240,
pressure 15241, and 15242 are set according to the
attached data sheets.
2 Turbo blower rotor Replace the turbo blower. The rotor may have
locked locked as a result of one or more of the following
causes:
1) Foreign matter in the circulating system
2) Failed bearing
So, check for foreign matter.
3 Failed bearing in turbo Replace the turbo blower. The bearing may have
blower failed as a result of one or more of the following
causes:
1) Deteriorated oil
2) Foreign matter in the bearing
So, always replace the oil at the recommended
intervals.
4 Invalid inverter setting Set the inverter correctly as explained in Chapter
9.

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B-70255EN/01 6.TROUBLESHOOTING

ALM No.4101
OUT OF FREQUENCY 1
This alarm is issued, if a frequency reached signal is not received
within 120 seconds after the turbo blower is started.

Alarm output condition


This alarm is issued when the frequency reach 1 signal does not become 1
within 120 seconds after the blower starts if bit 5 of parameter No. 15003 is
set to 1.
Frequency reach 1 signal
AR1 (bit 1 at address 02H of DI of the laser interface)
Related parameters
PRM.15003#5 TON Oscillator with a turbo blower
DGN.962#1 *AR1 Frequency reach signal 1

Cause of trouble Solution


1 Cable connection Check whether the cable is securely connected to
abnormal the inverter. If not, reattach the cable.
2 Faulty turbo blower The bearing may be damaged. Open the piping at
the inlet of the turbo blower, and check the scroll
rotation.
3 Inverter abnormal See the next item explaining inverter alarms
indication.
4 Invalid inverter setting Set the inverter correctly as explained in Chapter
9.

ALM No.4105
TURBO TEMP. 1
This alarm is issued, if the temperature of the turbo blower
motor winding becomes higher than the permissible level.

Alarm output condition


This alarm is issued when the turbo temperature abnormal signal becomes 0
during the time from RUN-ON to immediately before purge completion.
Turbo temperature abnormal signal
OH1
Related parameters
DGN.962#5 *OH1 Turbo temperature abnormal signal 1

Cause of trouble Solution


1 Cooling water Reduce the temperature of the cooling water.
temperature high
2 Insufficient cooling The amount of cooling water supplied to the turbo
water blower may be insufficient.
Check whether the cooling water tube between the
water branch unit and blower is twisted or clogged.
If the tube is twisted or clogged, replace the tube.
If a tube in the turbo blower is clogged, clean the
tube.
3 Anomaly of If the sensor is abnormal, the turbo blower must be
temperature sensor replaced because the sensor is built into the
winding in the turbo blower.

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6.TROUBLESHOOTING B-70255EN/01

Cause of trouble Solution


4 Anomaly of cable Check whether the cable is securely connected to
connection the turbo PCB. If not, reattach the cable.

ALM No.4106
BLOWER OIL SHORTAGE
This alarm is issued if the signal from the turbo blower oil sensor
indicates that the oil level has fallen below the setting.

Alarm output condition


This alarm is issued when the oil level signal becomes 0 during the time from
RUN-ON to immediately before purge completion.
Oil level signal
L-V (bit 2 at address 02H of DI of the laser interface)
Related parameters
DGN.962#2 *L-V Turbo blower oil

Cause of trouble Solution


1 The oil level is lower Replenish the turbo blower with oil until the oil
than specified. level on the oil gauge is between H and L.
Replace the oil every 1000 hours of operation.
2 Invalid alarm level Set the sensor correctly as explained in Section
setting 9.2.
3 Sensor abnormal Replace the turbo blower.
4 Insufficient turbo blower When the temperature of the turbo blower motor
cooling section is high, check whether the cooling water
path is clogged. If the cooling water path is
clogged, wash the turbo blower.

ALM No.4107
MIRROR NOT INSTALLED
This alarm is issued, if the beam reflecting unit is not attached
with a mirror or mirror holder.
Because the beam reflecting unit is not mounted in the C1000iA,
this alarm is issued only when the turbo PCB is defective.

Alarm output condition


This alarm is issued when the reflecting mirror mount signal becomes 0 in
LRDY or a later step.
Reflecting mirror mount signal
M-R (bit 3 at address 02H of DI of the laser interface)
Related parameters
DGN.962#3 *M-R External reflecting mirror

Cause of trouble Solution


1 Invalid pin setting If the pin SP2 on the turbo PCB (A16B-1600-0670) is
set to "O," correct the setting to "x."
2 Faulty turbo PCB Replace the turbo PCB.

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B-70255EN/01 6.TROUBLESHOOTING

ALM No.4132
PARAMETER WAS CHANGED

Alarm output condition


This alarm is issued when the setting in parameter No. 15223, 15242, or
15243 is altered in LRDY or a later step.
Related parameters
PRM.15223 Discharge bias command value
PRM.15242,15243 Intra-tube pressure setting for oscillation
To turn on HV, press the reset key to release the alarm.

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6.TROUBLESHOOTING B-70255EN/01

6.4 MAJOR FAULTS

6.4.1 Laser Power Supply Alarm Display

(1) If an alarm is issued to indicate the occurrence of a power supply


fault, check the diagnosis screen to determine which power
supply unit issued that alarm signal. The bit corresponding to the
power supply unit that issued the alarm signal is set to 1.
Pressing the reset key or turning off the power clears the display.

#7 #6 #5 #4 #3 #2 #1 #0
DGN.974 No.8 No.7 No.6 No.5 No.4 No.3 No.2 No.1

(2) Check the LEDs of the power supply unit that issued the alarm
signal. After an alarm is issued, turning off the power to the
oscillator causes the LED indication to disappear. So, check the
LEDs while leaving the power to the oscillator on.

(3) Types of alarms displayed by the LEDs show below.


DCI1 : DC momentary overcurrent alarm
DCI2 : DC peak current alarm (DC power alarm)
DCI3 : DC steady current alarm
DCV : DC overvoltage alarm
VC : DC control power supply alarm
OH : Power supply overheat
RFV : Overcurrent alarm
RFI : Overcurrent alarm

(4) The following lists the possible causes of each alarm.


Type of alarm Source Major causes
DCI 1 This alarm is issued if the DC current of Load short-circuit
DCI 2 the power supply unit is high when the Discharge tube
DCI 3 oscillator is operating in CW/pulse dielectric
mode. breakdown
DCV This alarm is issued if the DC voltage of
the power supply unit is high when the
oscillator is operating in CW/pulse
mode.
VC This alarm is issued if an overcurrent or
overvoltage occurs in the control power
supply of the power supply unit.
OH This alarm is issued if water is not
flowing through the cooling water heat
sink of the power supply unit.
RFV This alarm is issued if a high voltage is Infinite load
applied to the discharge tube when the Discharge tube
oscillator is operating in CW/pulse separation
mode. Failure to install a
feeder

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B-70255EN/01 6.TROUBLESHOOTING

Type of alarm Source Major causes


RFI This alarm is issued if a high RF current
flows through the discharge tube when
the oscillator is operating in CW/pulse
mode.

If the power supply unit fails just because the high-speed diode or
FET module is damaged, the power supply unit can be repaired by
component or PCB replacement. Other adjustments are not required.
If the power supply unit itself is replaced, power supply adjustments
are required after aging.

6.4.2 Power Supply Cannot Be Switched Off Using CRT/MDI Switch

The power supply cannot always be switched. It can be switched only


before the switching on of RUN (pressure control start) or after the
completion of purge with RUN off and the PURGE lamp lit.

6.4.3 Power Supply Cannot Be Switched On Using CRT/MDI Switch

Non-fuse breaker for IF PCB is tripping.

6.4.4 Laser Output Just After Switch On Is Low

(1) The cooling water temperature is not normal, although the chiller
unit is operating. This phenomenon may be caused when the
ambient temperature is low. In such a case, the specified
temperature will be set in five to ten minutes after the unit starts.
So, perform activation again.
(2) Slight leakage exists in the tube between laser and gas cylinder.
This is the case in which the laser output in the first run after a
long halt is low and becomes normal after the second run. Check
for leakage, loose fixing or crack. Correct the tube and fitting if
any anomaly exists.

6.4.5 Display of Fluctuating Laser Output On CRT

First check if PRM No. 15216 is taking the value of 60, which is a
standard. In case the fluctuation continues with this value used, read
the laser output monitor value indicated in DGN=906. Its range of
fluctuation is smaller than ±50. If it exceeds this value, check the
followings.
(1) Is the coaxial cable between the laser power sensor mounted on
the rear mirror holder and the relay PCB B (A16B-1600-0361) or
the cable between the relay PCB B and the IF PCB (A16B-2100-
0141) inside the laser oscillator fixed tightly?
(2) Is there anomaly in the laser power sensor output? Is the DC
resistor between the terminals of the power sensor unit in the
range 100W-500W?
(3) Check the input signal (LPWI-0V) of the relay PCB B.

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6.TROUBLESHOOTING B-70255EN/01

If there exists any anomaly in the results of the above investigations,


replace the anomalous component.

6.4.6 Electromagnetic Contactor of Exhaust Pump Trips Thermally

Possible causes are listed below. Take appropriate action.

Cause of trouble Solution


1 Anomalous setting of Ascertain if the setting of the contacter is done
thermal relay at 5.5 A. If not so, correct it.
2 Too high viscosity of oil 1) Check if the room temperature is lower than 5
degree. If so, raise it.
2) Check the deterioration of oil which causes
the viscosity increase. If so, change it.
Recommended exchange period is 1500 H
depending on the surroundings.
3 Reverse rotation The normal direction is counterclockwise when
direction of pump seen from the side of motor fan. If not so,
correct it at the terminal.
4 Excessive oil During pump operation, check the oil level
through the oil check window. If the oil level is
between H and L, the oil level is regarded as
normal.
5 Undesignated oil is used. Use the designated oil, NEOVAC SA-H
synthetic oil manufactured by Matsumura Oil
Co. Japan, available through FANUC.
6 Exhaust filter choked. Replace it. Recommended replacement period
is 3000 hours depending on the surroundings.
7 Loosened terminal of Fix it tightly.
connecting cable
8 Vane damaged Replace the exhaust pump.

6.4.7 Main Breaker Trips

Possible causes are listed below. Take appropriate action.

Cause of trouble Solution


1 Damaged circuit breaker Check for loose terminals. If the circuit breaker
is burned black, replace it.
2 Beyond rated current Check whether the power magnetics cabinet in
the oscillator is abnormal. Turn off the circuit
breakers connected to the power supply and
high-frequency inverter sequentially to
determine the unit that caused excessive
current.

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B-70255EN/01 6.TROUBLESHOOTING

6.4.8 Excessive Laser Gas Consumption

Possible causes are listed below. Take appropriate action.

Cause of trouble Solution


1 Gas leakage between Ascertain the following.
gas cylinder and 1) Anomalous mounting of regulator.
oscillator 2) Anomalous connection between tube and
regulator.
3) Anomalous connection of gas inlet fitting of
oscillator.
2 Anomalous adjustment of Adjust in accordance with the description of
gas controller Chapter 9.
3 Gas leakage inside gas Conduct a pressure application test. If the test
controller shows a leakage, tighten the piping. There may
be a leakage from the gas piping tube attached
to the gas flow rate adjustment valve. So, check
for leakage.

6.4.9 High-frequency Inverter Alarm Display

Causes of alarms
When an inverter alarm is issued, a message as shown below appears
on the digital panel of the inverter. The causes of the inverter alarms
are listed below.

Display : Exx.z
Exx : Cause of alarm (Message)
z : Status of inverter at alarm occurred

Causes of inverter alarms (Model : SJH300)


Message Contents Cause
E01 Overcurrent (during turbo blower Turbo blower rotor locked
constant-speed operation) Motor short-circuited or
E02 Overcurrent (during turbo blower ground-fault
deceleration) Abrupt acceleration or
E03 Overcurrent (during turbo blower abrupt deceleration
acceleration)
E04 Overcurrent (others)
E05 Inverter overload (overload operation)
E06 Damping resistor overload protection Invalid inverter setting
Turbo blower faulty
E07 Overvoltage protection Inverter faulty
(NOTE)
E08 EEPROM error
E09 Insufficient voltage (voltage drop) Supply voltage drop
E10 CT error Inverter faulty
E11 CPU error
E12 External trip
E13 USP error
E14 Ground protection Turbo blower or wiring
ground-fault
E15 Overvoltage protection in receiving Increased supply voltage

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6.TROUBLESHOOTING B-70255EN/01

Causes of inverter alarms (Model : SJH300)


Message Contents Cause
power (supply voltage increase)
E16 Protection against instantaneous power Momentary loss of supply
failure voltage
E21 Temperature increase (supply voltage Inverter faulty
increase)
E23 Gate array error
E24 Protection against missing phase
E30 IGBT error
E35 Thermistor error
E36 Abnormal brake
E60 to 69 Option 1 error 1 to 9
E70 to 79 Option 2 error 1 to 9
---- Standby state because of voltage Not powered.
shortage

NOTE
If E8 (EEPROM error) occurs, check parameter
settings.

Status of inverter when the alarm was issued


Indication Status Indication Status
0 Reset 5 Operation command is
input with frequency 0.
1 Stopped 6 Being started.
2 Being decelerated. 7 DB
3 Constant speed 8 Under overload control
4 Being accelerated. ---- --------

Alarm indication
This inverter can display information on the most recently issued six
alarms as shown below. The latest alarm is indicated on trip monitor 1
(d 081).
d081 : Trip monitor 1
d082 : Trip monitor 2
d083 : Trip monitor 3
d084 : Trip monitor 4
d085 : Trip monitor 5
d086 : Trip monitor 6
Indication items
(1) Cause of alarm (See the table of causes of inverter alarms given
previously.)
(2) Frequency (Hz) when the alarm was issued
(3) Output current (A) when the alarm was issued
(4) DC voltage (V) across P and N when the alarm was issued
(5) Cumulative operation time (hours) when the alarm was issued
(6) Cumulative power-on time (hours) when the alarm was issued

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B-70255EN/01 6.TROUBLESHOOTING

Display method
d081

(Function/FUNC keys)

(1) E01.3
(Up/Down keys)

(2) 1000
(Up/Down keys)

(3) 28.0
(Up/Down keys)

(4) 280
(Up/Down keys)

(5) 15
(Up/Down keys)

(6) 18
(Up/Down keys)

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6.TROUBLESHOOTING B-70255EN/01

6.5 OBSERVING VOLTAGE OF POWER LINE

6.5.1 Measurement of Voltage

Ascertain the followings,


(1) line voltage: 200/220VAC, +10%, -15%
(2) frequency: 50/60Hz ±1Hz
(3) 3 phases
Here the combination of 220 V and 50 Hz is prohibited.

6.5.2 Phase Relation

Using a phase rotation sensor, R, S and T phases of which are


connected to U, V and W phases of the input terminal respectively as
shown in the figure, select the phase of the power line in such a way
that the rotation direction becomes clockwise. In the absence of a
phase relation indicator, complete the connection of the main breaker
so that the exhaust gas is emitted from the laser gas exhaust outlet.
Input terminal

U V W G (Class 1 Ground )

6.5.3 Measurement of Voltage of DC Power Supply Unit

Ascertain if the voltage of each DC power unit is within rated range.


Here refer to Fig.6.5.3(a) for the external view of the IF PCB in the
oscillator. Refer to Fig.6.5.3(b) for the external view of the stabilized
power supply unit.
IF PCB : A16B-2100-0141

(1) Rated output voltage


Terminal Rated Voltage Application
name voltage error
allowance
5V 5V ±5% logic circuit
+24V +24V ±10% input, output signal
+15V +15V ±5% analog circuit
-15V -15V ±5% analog circuit
0V 0V -------- Take this 0 V as the base in
measuring voltage.

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B-70255EN/01 6.TROUBLESHOOTING

(2) Fuse used on the IF PCB


FU3 : A60L-0001-0175#3.2 For +5V(3.2A)

(3) Stabilized power supply unit


Fig. 6.5.3 (b) shows the external appearance of +24V stabilized
power unit.
Designation of power supply unit : A20B-1005-0124
Designation of fuse FU : A60L-0001-0175#3.2 (3.2A) 2 pieces

Fig.6.5.3(a) IF PCB of oscillator (Series 16-iL : A14B-2100-0140, -0141)

Fig.6.5.3(b) Layout of fuse for stabilized power supply unit

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6.TROUBLESHOOTING B-70255EN/01

6.5.4 Checking the IF PCB Signals

By using the IF PCB pins, check that each signal of the IF PCB is
normal. Fig. 6.5.3(a) show the pin locations.

Signal Signal function


COR Voltage to operate the laser power supply 0 to 5V
GPC Specification of pressure inside the laser tube 0 to 13V
MOUT Sampling output of monitored laser power supply currents and
voltages.
Data is output in the order: pressure, voltage (No. 1); pressure,
current (No. 1); pressure, voltage (No. 2); and so on.
LPW Monitoring of laser output power 0 to 10V
LTP Monitoring of pressure inside the laser tube 0 to 9V
1V/1.33kPa
Monitored values are clamped to 9V.
PAN1 Sampling output of monitored laser output power values and
pressure values inside the laser tube.
These two types of data are output alternately.

6.5.5 Checking the Jumper Pins

Pin Setting Description


SH2 1-2 Enables pulse command control by using external
signals (EXTP and EXTN).
2-3 Does not perform pulse command control by using
external signals. (Normal setting)
LINK1 JD1 Enables communication with the CNC via a metal cable
(when JD1B is used).
COP Enables communication with the CNC via an optical
cable (when COP1B is used).

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B-70255EN/01 6.TROUBLESHOOTING

6.6 INDICATION OF STATE BY MEANS OF SELF DIAGNOSTIC


FUNCTION

When the machine breaks down, it is necessary to know if the trouble


is in the CNC, PMC, machine or laser. Even when there does not exist
machine failure, the machine might hang-up for waiting of external
signals. Then the check of inside state of CNC, interface between
CNC and PMC, one between laser and CNC needs to be done. Here
the description is given on the indication of troubles taking place in
laser using the self-diagnostic function of CNC. The indication of
troubles in CNC, PMC as well as machine is described in the
maintenance manual.
FANUC Series 16i/160i-LA Maintenance Manual : B-63195EN

6.6.1 Data Items Displayed on the Diagnosis Screen

When the diagnosis function is used, the data indicated below can be
displayed.
¬PMC status display
CNC¬
#7 #6 #5 #4 #3 #2 #1 #0
G220 *DU16 *DU8 *DU4 *DU2 *DU1

*DU1 to *DU16 Duty override signal (input)

#7 #6 #5 #4 #3 #2 #1 #0
G221 AGRDY CLRDY

AGRDY Assist gas prepared signal


CLRDY Chiller prepared signal

#7 #6 #5 #4 #3 #2 #1 #0
G222 HVON RUN AGST BEMON SHTON SCLON *BEMLC *SHTLC

HVON Discharge start signal


RUN Gas pressure control start signal
AGST Assist gas start signal
BEMON Beam on signal
SHTON Shutter open signal
SCLON Guide light on signal
*BEMLC Beam lock signal
*SHTLC Shutter lock signal

#7 #6 #5 #4 #3 #2 #1 #0
G223 POV7 POV6 POV5 POV4 POV3 POV2 POV1 POV0

POV7 to POV0 Power override signal

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6.TROUBLESHOOTING B-70255EN/01

®PMC status display


CNC®
#7 #6 #5 #4 #3 #2 #1 #0
F220 MWRM SHTONL SHTOFL

MWRM Laser power alarm signal


SHTONL Shutter on state signal
SHTOFL Shutter off state signal

#7 #6 #5 #4 #3 #2 #1 #0
F221 BEAM LSTR RFHV CLON WAIT PURGE LRDY LARM

BEAM Beam on signal


LSTR In-oscillating signal
RFHV Base in-discharging signal
CLON Chiller start request signal
WAIT Gas pressure in-controlling signal
PURGE Purge completed signal
LRDY Discharge start prepared signal
LARM Laser alarm signal

#7 #6 #5 #4 #3 #2 #1 #0
F222 CW PULSE AG3 AG2 AG1

CW Continuous wave mode state output signal


PULSE Pulse mode state output signal
AG1 to AG3 Assist gas select signal

6.6.2 Laser Oscillator Status Display

900 LASER POWER COMMAND

Displays a value specified in a laser output power command and sent


to the D/A converter.

901 LASER BIAS COMMAND

Displays a value specified in a base discharge command and sent to


the D/A converter.

902 PULSE ON TIME

Displays the ON time period of an output power command pulse


signal.

903 PULSE OFF TIME

Displays the OFF time period of an output power command pulse


signal.

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B-70255EN/01 6.TROUBLESHOOTING

904 GAS PRES. CONTROL

Displays a value specified in a pressure command for the pressure


controller that controls pressure inside the discharge tube, and sent to
the DA converter.

905 LASER TUBE PRES.

Displays the pressure inside the discharge tube.


Display range : 0 to 900

906 LASER POWER

Displays monitored laser output power values.


Unit : W

907 TRACE DATA

908 LASER SEQUENCE

No. Contents No. Contents


10 Purge completion state 23 Wait for change to discharge
start gas pressure
12 Purge being executed 26 HVON (wait for discharging)
14 75-s wait 27 Wait for base discharge
16 Exhaust pump activated 28 Power compensation in progress
17 Wait for completion of 30 LSTR
evacuation
18 Wait until specified turbo 49 Evacuation at RUN OFF
rotation is reached
20 LRDY 50 75-s wait at RUN restart

909 RF VOLTAGE 1
910 RF CURRENT 1

911 RF VOLTAGE 2
912 RF CURRENT 2

913 RF VOLTAGE 3
914 RF CURRENT 3

915 RF VOLTAGE 4
916 RF CURRENT 4

917 RF VOLTAGE 5
918 RF CURRENT 5

919 RF VOLTAGE 6
920 RF CURRENT 6

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6.TROUBLESHOOTING B-70255EN/01

921 RF VOLTAGE 7
922 RF CURRENT 7

923 RF VOLTAGE 8
924 RF CURRENT 8

Voltage (V) and current (mA) of discharge tubes 1 to 8 (strictly


speaking, power supply units)

925 DC VOLTAGE 1
926 DC CURRENT 1

927 DC VOLTAGE 2
928 DC CURRENT 2

929 DC VOLTAGE 3
930 DC CURRENT 3

931 DC VOLTAGE 4
932 DC CURRENT 4

933 DC VOLTAGE 5
934 DC CURRENT 5

935 DC VOLTAGE 6
936 DC CURRENT 6

937 DC VOLTAGE 7
938 DC CURRENT 7

939 DC VOLTAGE 8
940 DC CURRENT 8

Injection voltage and current of power supplies 1 to 8 (valid when bit


5 of parameter No. 15008 is 1).
Voltage (unit: 0.1 V)
Current (unit: 0.1 A)

910 DCW 1

910 DCW 2

910 DCW 3

910 DCW 4

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B-70255EN/01 6.TROUBLESHOOTING

910 DCW 5

910 DCW 6

910 DCW 7

910 DCW 8

Injection power of power supplies 1 to 8 (valid when bit 5 of


parameter No. 15008 is 1).
Unit : W

#7 #6 #5 #4 #3 #2 #1 #0
960 *SFI *RBT *MGP *AP FRQ *ESA *EN

*EN Intra-IF enable signal


0 : Disabled
1 : Enabled
*ESA Emergency stop signal
0 : Emergency stop
1 : Normal processing
FRQ Power frequency detection
0 : 50 Hz
1 : 60 Hz
*AP Air pressure sensor
0 : Lower than air pressure
1 : Same as air pressure
*MGP Laser gas pressure
0 : Low
1 : Normal
*RBT Blower temperature
0 : Abnormal
1 : Normal
*SFI Safety interlock
0 : Interlocked
1 : Normal

#7 #6 #5 #4 #3 #2 #1 #0
961 *ABT *SHT SOF SON *RAL *WT1 *CAT *MVW

*MVW Water amount sensor


0 : Abnormal
1 : Normal
*CAT Chamber temperature sensor
0 : Abnormal
1 : Normal
*WT1 Condensation sensor
0 : Abnormal
1 : Normal

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6.TROUBLESHOOTING B-70255EN/01

*RAL Exhaust pump alarm


0 : Abnormal
1 : Normal
SON Open shutter sensor
The shutter is open when this bit is set to 1.
SOF Closed shutter sensor
The shutter is closed when this bit is set to 1.
*SHT Shutter temperature sensor
0 : Abnormal
1 : Normal
*ABT Absorber temperature sensor
0 : Abnormal
1 : Normal

#7 #6 #5 #4 #3 #2 #1 #0
962 *OH1 *TC1 *RV1 *VB1 *AR1 *IA1

*IA1 Inverter alarm 1


0 : Abnormal
1 : Normal
*AR1 Frequency signal 1
0 : Mismatch
1 : Match
*VB1 Vibration sensor 1
0 : Abnormal
1 : Normal
*RV1 Rotation sensor 1
0 : Abnormal
1 : Normal
*TC1 Turbo current sensor 1
0 : Abnormal
1 : Normal
*OH1 Abnormal turbo temperature 1
0 : Abnormal
1 : Normal

#7 #6 #5 #4 #3 #2 #1 #0
963 *OH2 *TC2 *RV2 *VB2 *AR2 *IA2

*IA2 Inverter alarm 2


0 : Abnormal
1 : Normal
*AR2 Frequency signal 2
0 : Mismatch
1 : Match
*VB2 Vibration sensor 2
0 : Abnormal
1 : Normal
*RV2 Rotation sensor 2
0 : Abnormal
1 : Normal

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B-70255EN/01 6.TROUBLESHOOTING

*TC2 Turbo current sensor 2


0 : Abnormal
1 : Normal
*OH2 Abnormal turbo temperature 2
0 : Abnormal
1 : Normal

#7 #6 #5 #4 #3 #2 #1 #0
964 *OH3 *TC3 *RV3 *VB3 *AR3 *IA3

*IA3 Inverter alarm 3


0 : Abnormal
1 : Normal
*AR3 Frequency signal 3
0 : Mismatch
1 : Match
*VB3 Vibration sensor 3
0 : Abnormal
1 : Normal
*RV3 Rotation sensor 3
0 : Abnormal
1 : Normal
*TC3 Turbo current sensor 3
0 : Abnormal
1 : Normal
*OH3 Abnormal turbo temperature 3
0 : Abnormal
1 : Normal

#7 #6 #5 #4 #3 #2 #1 #0
966 *PSA08 *PSA07 *PSA06 *PSA05 *PSA04 *PSA03 *PSA02 *PSA01

*PSA01 to *PSA08
Displays the operating states of power supply units No. 1 to 8.

#7 #6 #5 #4 #3 #2 #1 #0
968 ACS PLS SL4 SL3 SL2 SL1 SL0

SL0 to SL4 Select signals for discharge tube monitor data


PLS Pulse command signal
0 : Filter provided
1 : No filter provided
ACS Access notice signal
0 : OFF
1 : ON

#7 #6 #5 #4 #3 #2 #1 #0
969 HSC SP2 SP1

SP1 Pressure/power select signal

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6.TROUBLESHOOTING B-70255EN/01

SP2 Pressure/power select signal


HSC High-speed A/D conversion start

#7 #6 #5 #4 #3 #2 #1 #0
970 PS08 PS07 PS06 PS05 PS04 PS02 PS02 PS01

PS01 to PS08 Power select signals 1 to 8


0 : Not selected
1 : Selected

#7 #6 #5 #4 #3 #2 #1 #0
972 TWV BPV PTL GRY VEN RPA RBA PUG

PUG Purge valve


0 : Closed
1 : Open
RBA Roots blower activation
0 : Stopped
1 : Activated
RPA Exhaust pump activation
0 : Stopped
1 : Started
VEN Air release valve
0 : Closed
1 : Open
GRY Laser gas supply valve
0 : Closed
1 : Open
PTL Flashing light
0 : Off
1 : On
BPV Bypass valve
0 : Closed
1 : Open
TWV Three-way valve
0 : Air release
1 : Open

#7 #6 #5 #4 #3 #2 #1 #0
973 LSC PCS FW IB *PCL OFS SOP

SOP Shutter open command


0 : Closed
1 : Open
OFS Off sequence
0 : OFF
1 : ON
*PCL DC power alarm clear
0 : Clear
1 : Normal

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B-70255EN/01 6.TROUBLESHOOTING

IB Semiconductor laser-on command


0 : OFF
1 : ON
FW Inverter start signal
0 : Stopped
1 : Started
PCS Gas pressure PWM command
0 : OFF
1 : ON
LSC Low speed A/D conversion start
0 : OFF
1 : ON

#7 #6 #5 #4 #3 #2 #1 #0
974 PSAR8 PSAR7 PSAR6 PSAR5 PSAR4 PSAR3 PSAR2 PSAR1

PSAR1 to PSAR8 Power unit alarms 1 to 8


0 : Normal
1 : Abnormal

980 GAS PRES.SENSOR ALM

981 A/D CONV-1 ALM

982 A/D CONV-2 ALM

983 VOLTAGE DOWN

984 POWER DOWN

985 BEAM REFLECTION

986 LASER EFFICIENCY

987 GAS BOTTLE CHANGE

111 : Cylinder replacement request 0 : Cylinder replaced

988 MIXING ABNORMAL

111 : Abnormal mixing 0 : Normal mixing

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7.OSCILLATOR CONNECTIONS B-70255EN/01

7 OSCILLATOR CONNECTIONS

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B-70255EN/01 7.OSCILLATOR CONNECTIONS

7.1 ELECTRICAL CONNECTIONS

An electrical connection diagram for the C1000iA is given below.

Fig.7.1 Electrical connection diagram for C1000iA (1/2)

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7.OSCILLATOR CONNECTIONS B-70255EN/01

Fig.7.1 Electrical connection diagram for C1000iA (2/2)

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B-70255EN/01 7.OSCILLATOR CONNECTIONS

7.2 COOLING WATER PIPING

A cooling water flow diagram for the C1000iA is given below.

Fig.7.2 (a) Water flow diagram for C1000iA

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7.OSCILLATOR CONNECTIONS B-70255EN/01

7.3 VACUUM GAS CONNECTION

A vacuum system diagram for the C1000iA is given below.

Fig. 7.3 Vacuum system diagram for C1000iA

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B-70255EN/01 8.OSCILLATOR CONNECTIONS

8 OSCILLATOR CONNECTIONS

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8.OSCILLATOR CONNECTIONS B-70255EN/01

8.1 UNIT CONFIGURATION

The input unit consists of a power magnetics cabinet, interface PCB,


and stabilized power supply.

Fig. 8.1(a) shows the power magnetics cabinet configuration, and Figs.
8.1(b) through (d) show the input units.
QF1 QF2 KM1 To laser power
supply

QF3 KM2 To high-frequency


inverter

QF4 KM3 To Exhaust pump

QF5 XT45 To surge absorber


Z110,Z111

QF6 To IF PCB

Fig.8.1(a) power magnetics cabinet conposition

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B-70255EN/01 8.OSCILLATOR CONNECTIONS

Fig.8.1(b) Input unit 1 (C1000iA, Japan, U.S.A.)

Fig.8.1(c) Input unit 2 (C1000iA, Japan)

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8.OSCILLATOR CONNECTIONS B-70255EN/01

Fig.8.1(d) Input unit 2 (C1000iA, U.S.A.)

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B-70255EN/01 8.OSCILLATOR CONNECTIONS

8.2 RELAY PCB B

Relay PCB B is used to group signals sent from the shutter section
and to output the grouped signals to the interface PCB. CN59 is an
output terminal for connecting a measuring instrument used in
alignment. Fig. 8.2 shows the layout of relay PCB B.

Fig.8.2 Relay PCB B

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8.OSCILLATOR CONNECTIONS B-70255EN/01

8.3 GAS CONTROLLER

The gas controller consists of components such as a suction unit,


exhaust unit, and pressure sensor. Fig.8.3(a) shows installation, and
Fig.8.3(b) shows piping of the gas controller respectively. The
functions of each of the components shown in the figures are outlined
below:

(1) Pressure sensor


This sensor continuously monitors the pressure in the oscillator,
from the heat exchanger on the inlet side of the turbo blower.
The sensor outputs a signal to the CNC. The sensor is of the
capacitance manometer type, which is notable for drifting little
with changes in temperature and for exhibiting very little
deterioration with time.

(2) Atmospheric pressure sensor


This sensor monitors whether the pressure in the oscillator has
reached atmospheric pressure.

(3) Filter
The filter prevents impurities from entering the oscillator.

(4) Gas pressure sensor


This sensor continuously monitors the pressure of the laser gas
supplied from an external source (such as a gas cylinder). When
the remaining amount of laser gas drops to a preset level or when
the supply pressure falls to 0.1 MPa or less, the sensor outputs
an alarm signal.

(5) Purge valve


This solenoid valve is used to fill the oscillator with laser gas so
that the gas pressure reaches the atmospheric pressure when the
unit operation is stopped. The valve is closed when the
atmospheric pressure sensor detects that the pressure in the
oscillator has reached the atmospheric pressure.

(6) External piping exhaust valve


When the oscillator is started, this valve is opened for a certain
time to allow laser gas to exhaust from the laser gas piping
between the oscillator and gas cylinder. When the oscillator is
stopped for a long time, this valve prevents gas of which
composition has changed or gas containing impurity from
entering the oscillator.

(7) Gas supply valve


This magnetic contactor opens to supply fresh laser gas to the
oscillator while the machine is operating. This valve is closed
when the unit is stopped, separating the oscillator from the
external piping.

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B-70255EN/01 8.OSCILLATOR CONNECTIONS

(8) Pressure control valve


This valve is provided to maintain a specified laser gas pressure
in the oscillator. The valve is consistently and precisely opened
or closed according to commands issued from the CNC,
controlling the flow rate of the fresh laser gas supply.

(9) Exhaust flow rate adjustment valve


This valve adjusts the flow rate of laser gas exhausted from the
oscillator during normal operation. This valve is factory-adjusted,
so no adjustment is required except when the valve is replaced.

(10) Exhaust valve


This solenoid valve connects the exhaust pump to the inside of
the oscillator. When the oscillator starts, this valve is opened to
allow laser gas to exhaust from the oscillator. During normal
operation, this valve is closed, and a constant amount of laser gas
exhausts through the exhaust flow rate adjustment valve attached
in parallel.

(11) Three-way valve


This solenoid valve switches among the exhaust pump, oscillator,
and atmosphere. During exhaust pump operation, the valve is
connected to the oscillator. When the exhaust pump is stopped,
the valve switches to the atmosphere so that the exhaust pump is
open to the atmospheric pressure.

(12) Bypass valve


This solenoid valve connects the motor room of the turbo blower
and the exhaust pump. When the oscillator starts, this valve is
opened to allow laser gas to exhaust from the motor room.
During normal operation, this valve is closed, and a constant
amount of gas exhausts through the orifice connected in parallel.

Fig.8.3(a) Gas controller layout

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8.OSCILLATOR CONNECTIONS B-70255EN/01

Fig.8.3(b) Block diagram of gas controller

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B-70255EN/01 9.SETTING AND ADJUSTMENT

9 SETTING AND ADJUSTMENT

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9.SETTING AND ADJUSTMENT B-70255EN/01

9.1 LASER POWER SUPPLY UNIT

This unit is precisely adjusted at the factory and should not require
any further adjustment. If the power supply unit, matching box, or
discharge tube is replaced, however, the unit should be set and
adjusted as described below. When an FET module or diode in the
laser power supply is replaced, no adjustment is necessary.
For power supply adjustment, VR11 and VR13 are used. VR11 is
used to adjust base discharge, and VR13 is used to adjust the
maximum output of the power supply.

The key to adjusting base discharge is to maintain discharge.


If an attempt is made to produce laser output when discharge is off,
the power supply issues an alarm to protect itself. If such an attempt is
repeated, a stress is imposed on the power supply.
The key to adjusting the maximum output of the power supply is to
make an adjustment so that the specified maximum output of the
power supply can be produced. Output higher than the specified value
damages the power supply and discharge tube.
Output lower than the specified value reduces laser output.

When making power supply adjustments, prepare the following tools:


(1) Cable for connection to CN17 to measure DCI and DCV
(2) Precision driver for trimmer adjustment
(3) Tester

9.1.1 Preparatory Settings and Checks

(1) Set the S2 setting pin (VR13 adjustment range setting) according
to Table 2.

(2) Set the S5 setting pin (matching box temperature sensor setting)
according to Table 2.

(3) Connect the cable for DCI and DCV measurement to CN17.

(4) Check the connections of the cables, water joints, and discharge
tube.

(5) Check that the discharge tube is not damaged.

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B-70255EN/01 9.SETTING AND ADJUSTMENT

9.1.2 Base Discharge Adjustment

9.1.2.1 Rewriting the parameter

Rewrite the parameters according to the table below. (Upon


completion of adjustment, return the parameters to the original
values.)

Table 9.1.2.1 Parameters to be modified before starting adjustment


CNC parameters Settings
(1) PRM15000 bit 4, PRM15201 0
(Output compensation disable)
(2) PRM 15208 0
(Laser power feedback disable)
(3) PRM 15207,15210,15212 Maximum command. (See Table 2)
(Maximum output power setting)
(4) PRM 15223 2850
(Bias command value)

NOTE
For the setting of the other parameters, follow the
data sheet.

9.1.2.2 Base Discharge Adjustment

(1) Start the oscillator, and wait until the gas pressure is stabilized in
the base discharge state.
(Wait about 3 minutes. See DGN 905.)

(2) Then, check that all discharge tubes are continuously discharging.
If a discharge tube stops discharge, turn VR11 of the power
supply corresponding to the discharge tube clockwise until the
discharge tube discharges.

(3) Turn VR11 counterclockwise slowly to set the state where all of
the four discharge tubes are about to stop main discharge.

(4) Record the value of RFI.----------------------------------------------(a)

(5) Turn VR11 counterclockwise to adjust the value of RFI to a


value lower than the electric shutter adjustment value. (See
Table 2.)

(6) Turn off HV and set 2790 in PRM 15223 for specifying a bias
command value. (See Appendix B.)

(7) Check that trigger electrode discharge lasts for five minutes in
the base discharge state. If discharge is turned off, turn VR11 of
the power supply clockwise slowly, and increase the value of
RFI by 4 mA or increase the value of DCV by 0.7 V. After

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9.SETTING AND ADJUSTMENT B-70255EN/01

turning off HV, turn on HV and check that stable discharge is


maintained for 5 minutes. Until this stable discharge state is
confirmed, repeat this step.

(8) Turn off HV, then set 2850 in PRM 15223 for specifying a bias
command value. (See Section 9.1.6.)

(9) When the base discharge state is set, wait for the gas pressure to
become stable.

(10) Record the value of RFI.----------------------------------------------(A)

9.1.3 Maximum Output Adjustment

(1) Specify the output of a half of the rated output value, and turn on
the beam. While checking that the power supply output (Note 1
in the Table 9.1.7) does not exceed the maximum power supply
output (Table 9.1.7) and that the value of DCV (Note 1 in the
Table 9.1.7) does not exceed 230V with A14B-0082-B209,
increase the output gradually to the maximum command value
(Table 9.1.7). If the maximum value is about to be exceeded,
turn VR13 counterclockwise to prevent the maximum value from
being exceeded.

(2) After output of the maximum command value, wait 3 minutes.


Then, adjust VR13 to set the power supply output to the
maximum power supply output.

(3) Record the value of RFI or the values of RFI and DCV
(See Subsection 9.1.5)-------(B)

9.1.4 Check

9.1.4.1 Fine adjustment of VR11 and VR13

(1) Three minutes after the beam is turned off, adjust RFI or DCV to
the value of (A) with VR11.

(2) Three minutes after the maximum command value is output,


adjust RFI or DCV to the value of (B) with VR13.

(3) Repeat (1) and (2) until no adjustment is required.

(4) Turn off the beam, and wait 3 minutes. Record the DCV, DCI,
RFV, and RFI values of each power supply. Then, check that the
laser output Pa does not exceed the maximum base output (Table
9.1.7), and that heat-sensitive paper does not react in the test of
Subsection 9.1.7. If a problem is observed, make another power
supply adjustment.

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B-70255EN/01 9.SETTING AND ADJUSTMENT

(5) After output of the maximum command value, wait 3 minutes.


Record the DCV, DCI, RFV, and RFI values of each power
supply. Then, check that the value of RFV does not exceed the
maximum RFV (Table 9.1.7).

9.1.4.2 Pulse Output Test

Output the pulse test command specified in the Table 9.1.7 by 5 Hz


and 5% for a pulse test time, and check that no alarm is issued. If a
problem is observed, make another power supply adjustment.

9.1.4.3 Completion of Adjustment

Return the modified parameter values in the Item 9.1.2.1 to the


original values.

9.1.5 RFI and DCV Value Recording and Adjustment

The laser power supply involves feedback at RFI. So, if the laser
power feedback function is disabled, RFI is stable when the
continuous output command is used. Basically, measure RFI for
power supply adjustment. If the NC monitor is away from the
oscillator, and you have no assistant, make an adjustment by using the
value of DCV instead of RFI. However, use the value of RFI for final
confirmation. The connector CN18 for RFV and RFI monitoring was
added to the power supply of B209. When using this connector,
follow the conversion formula described in Note 2 of Table 2.

9.1.6 Alarm Processing after Modification of Intra-tube Pressure at


Oscillation Time and Bias Command Setting

After modification of parameter No. 15242 and No. 15243 (intra-tube


pressure at oscillation time) and parameter No. 15223 (bias
command), take the actions below.

(1) If an alarm indicating a parameter value modification is


displayed, reset the alarm, and set HV ON.
(2) If an alarm requesting that the CNC power be turned off is
displayed, and purge operation is started, turn off the power to
the NC upon completion of purge operation, and restart.

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9.SETTING AND ADJUSTMENT B-70255EN/01

9.1.7 Checking of Electric Shutter Operation

(1) Insert heat-sensitive paper into the laser optical path after
passing through the shutter mirror.
(2) output the continuous rated command value for 3 minutes. Then,
execute the following program (specifying OW for 60 seconds):
G32 P1 Q1;
G24 S0 P500 Q0 R60. ;
G32 P0;
M02;
%
(3) Check that the heat-sensitive paper has not reacted.

Table 9.1.7 Setting value of power supply


C1000iA
S2 setting B201
S5 setting SHORT
Electric shutter adjustment 100mA
Maximum command value PRM15307
Maximum power supply output. 7600W±50W
DCI´DCV=
Maximum base output 0W
Maximum RFV <4600V
Pulse test command Maximum
Pulse test time >30min

NOTE
1 Power supply output = DCI´DCV,
DCI=
(Voltage between DCI-N and DCI-P of CN17)´5,
DCV=
(Voltage between DCV-N and DCV-P of CN17)´30
2 RFI=
(Voltage between RFI-N and RFI-O of CN18)/2,
RFV=
(Voltage between RFV-N and RFV-P of CN1)´1000

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B-70255EN/01 9.SETTING AND ADJUSTMENT

9.2 TURBO PCB

These PCBs are precisely adjusted at the factory and should not
require any further adjustment. If the turbo blower or turbo PCB is
replaced, however, VR1 to VR4 should be adjusted and set oil level
censor as described below.

(1) Prior to activating the oscillator, check the level of the turbo
blower oil through the oil window. If the level is higher than the
specified level, drain the excess oil. If the level is lower, add oil.
Specified level : 3/4 level, between Hi and Lo marks

CAUTION
When oil is added, aging is required.

(2) Turn trimmer VR1 fully counterclockwise.

(3) Start the oscillator. Execute internal discharge at the rated output
for 15 minutes. Then, set the unit to the base discharge state.

(4) Measure voltage VSO across VL1 and 0V (GND). This voltage
corresponds to the oil level sensor output.

(5) While monitoring voltage VC across VA1 and 0V (GND), turn


trimmer VR1 clockwise (VC increases). This voltage corresponds
to the alarm setting voltage.

(6) Check that the following alarm occurs when VC exceeds VSO
measured in step (4) above.
Alarm No.4106 BLOWER OIL SHORTAGE

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9.SETTING AND ADJUSTMENT B-70255EN/01

(7) In the alarm state, adjust trimmer VR1 so that VC (voltage across
VA1 and 0V) matches the following value:
VC=VSO´0.778

(8) Press the reset key of the NC. Check that the alarm is reset.

NOTE
VR1 is three-turn trimmers.

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B-70255EN/01 9.SETTING AND ADJUSTMENT

9.3 HIGH-FREQUENCY INVERTER

Connection
The following cables are connected to the inverter:
R, S, T : Main power input
U, V, W Inverter output
G : Grounding
1 : Reset signal
2 : Soft lock signal
8 : Inversion command signal
AL0, AL1 : Relay contact output (ON : Normal)
L : Analog power supply common
CM1 : Power supply common for the interface
CM2 : Common for the intelligent output terminal

Checking the parameters


The parameters of an inverter purchased by FANUC are set before shipment
from the factory. So, usually, the parameters need not be changed. The old
inverter can be replaced with a new one by reconnecting the cables, and the
new inverter can be used without any particular setting.

With the digital operator's panel attached to the inverter, all


parameters can be set and checked. Operate the digital operator's
panel with the power to the oscillator turned on.
Note, however, that no parameter can be modified when a cable is
connected to terminal 2 of the inverter control circuit.
When a parameter needs to be modified for a reason, detach the cable
connected to terminal 2 of the control circuit.

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9.SETTING AND ADJUSTMENT B-70255EN/01

(1) Names and descriptions of the components of the digital


operator's panel

Name Description
Monitor Displays settings such frequency and output current
values.
RUN (operation) Turned on when the inverter is running.
lamp
Program lamp Turned on when the monitor displays the setting of
each function.
Blinks when a warning is given (when a setting is
incorrect).
POWER lamp Power lamp of the control circuit
ALARM lamp Turned on when the inverter trips
Monitor lamp Lamp for indicating the display status of the monitor.
Hz: Frequency, V: Voltage, A: Current,
kW: Power, %: Ratio
Operation command Turned on when the operation command destination is
indication lamp set to the operator.
Operation key Key for stopping the motor.
This key, however, is enabled only when the operation
command destination is set to the operator. (Check
that the operation command indication lamp is on.)
STOP/RESET key Used to stop the motor or reset an alarm.
FUNC (function) key Used to enter the monitor mode, basic setting mode,
extended function mode, and function mode.
STR (store) key Used to store set values. (Be sure to press this key
when changing set values.)
Up/down key Used to change the extended function mode, function
mode, or set values.

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B-70255EN/01 9.SETTING AND ADJUSTMENT

(2) Method of operation


(a) Method of displaying the monitor mode, basic setting mode,
and extended function mode
Monitor (4-digit LED display)

<1> Display of set monitor state <5> The code No. of the monitor mode is
(In the initial state, 0.00 is displayed.) displayed. (d001 is displayed.)

A different value is displayed if the power is turned off The display returns to the state
then back on while the basic setting mode or extended of <2>.
function mode is indicated.

Press the key. Press the key.


Press the key. (6 times). (6 times).

<2> The code No. of the monitor mode is <4> The extended function mode is
displayed. (d001 is displayed.) displayed. (A--- is displayed.)

The monitor screen is displayed by pressing the Extended function mode


FUNC (function) key once when the code No. of The screen displays A «b«C«H«P«U in this order.
the monitor mode is displayed.

Press the key.


Press the key. Press the key. Press the key.
(8 times).
(8 times).

<3> The code No. of the basic setting mode is


(d002 is displayed.)
displayed. (F001 is displayed.)

Press the key.


(19 times).

Press the key.


(19 times).

See Item (c) Function code setting method.

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9.SETTING AND ADJUSTMENT B-70255EN/01

(b) Function setting method

Change the operation command destination


(operator ® control terminal).

<1> The extended function mode is displayed. <5> The extended function mode is displayed. (A--- is
(A--- is displayed.) displayed.)

Display "A---" according to the display method of (1).


From this state, a transition can be made to another
extended function mode, the monitor mode, or basic
Initially, the operation command destination is operator, so
mode.
the operation command indication lamp is turned on.

Press the key.

Press the key.


<4> The code No. of the monitor mode is displayed.
<2> The code No. of the function mode is displayed. (A002 is displayed.)
(A001 is displayed.)

Modified setting data is set by pressing the key.


Press the key.
The operation command indication lamp is turned off
because the operation command destination is changed to
(A002 is displayed.) control terminal.

From this state, a transition can be made to another function


code

Press the key.

Press the key.


Press the key.
<3> Function mode data display

As the operation command destination, the


The operation command destination is
initial data 02 (operator) is displayed.
changed to control terminal (01).
PRG (program) is turned on because
function mode data is displayed.

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B-70255EN/01 9.SETTING AND ADJUSTMENT

(c) Function code setting method

The code No. of the monitor mode, basic setting mode, or extended function monitor can be directly entered instead of using
the scroll method.

An example of changing from monitor mode code No. d001 to function code No. A029 is indicated below.

<1> The code No. of the monitor mode is (A029 is displayed.) <6> The setting of the function code No.
displayed. (d001 is displayed.) is completed.

Press the key.

("9" is set.)

"9" in the ones digit position blinks.


The setting of A029 is completed.
Press the and Note) If a code No. not listed in the
Press the key (2
<2> key at the same code table is entered, "A" at the
times) or press the <2>
left end blinks again. Check
time key (8 times).
<2> Extended function mode change the code No. and enter a
<5> Change the ones digit of the correct value.
function code No..

"d" blinks.

Press the key (2 "1" in the ones digit position blinks.


times).
(A001 is displayed.) Press the key.
(A021 is displayed.)

"A" blinks
"2" in the tens digit position blinks.
Pressing the key sets the value of the
blinking digit position. Press the key (2
Press the key (to times).
set "A".)
<3> Change the hundreds digit of <4> Change the tens digit of the
the function code No.. function code No..

Press the
key.

("0" is set.)

"0" in the hundreds digit position blinks. "0" in the tens digit position blinks.

"0" in this position is not changed. So,


just press the key to set 0.

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9.SETTING AND ADJUSTMENT B-70255EN/01

Parameter settings
Initial Setting
Code Name of function Remarks
value value
d001 Output frequency monitor - - Hz
d002 Output current monitor - - A
d003 Rotation direction monitor - - F (forward rotation)/o (stop)/r (reverse rotation)
d004 PID feedback monitor - -
d005 Intelligent input monitor - -
d006 Intelligent output monitor - -
d007 Frequency conversion monitor - -
d013 Output voltage monitor - - V
d014 Input power monitor - - kW
d016 Cumulative run time monitor - -
hr
d017 Power ON time monitor - -
Monitor d080 Trip count monitor - - Times

mode d081 Trip monitor 1 - -


d082 Trip monitor 2 - -
d083 Trip monitor 3 - - Cause, frequency (Hz), current (A), voltage (V), run time (hr),
d084 Trip monitor 4 - - power ON time (hr)

d085 Trip monitor 5 - -


d086 Trip monitor 6 - -
d090 Warning monitor - -
F001 Output frequency 0.00Hz 1000 0.0, start frequency to maximum frequency
F002 First acceleration time setting 30.00s 70
F202 Second acceleration time setting 30.00s 30.00s 0.01 to 3600
F003 First deceleration time setting 30.00s 70
F203 Second deceleration time setting 30.00s 30.00s
F004 Operation direction selection 00 01 00: Forward rotation, 01: Reverse rotation
00: VR, 01: Terminal, 02: Operator, 03: RS485, 04: Option 1,
A001 Frequency command selection 02 02 05: Option 2
01: Terminal, 02: Operator, 03: RS485, 04: Option 1, 05:
A002 Operation command selection 02 01 Option 2
Basic
setting A003 First base frequency 1000Hz 1000Hz 30 to maximum frequency
A203 Second base frequency 1000Hz 1000Hz 30 to second maximum control frequency
A004 First maximum frequency 1000Hz 1000Hz 30 to 1500
A204 Second maximum frequency 1000Hz 1000Hz
00: Switched between and 0 and 01 on AT terminal, 01:
A005 AT terminal selection 00 00 Switched between 0 and 02 on AT terminal
00: Single, 01: 0 and 01 auxiliary speed (with no reversing),
A006 02 selection 00 00 02: 0 and 01 auxiliary speed (with reversing)
A011 0 start 0.00Hz 0.00Hz
Analog 0.00 to 1500
input A012 0 end 0.00Hz 0.00Hz
A013 0 start ratio 0% 0% 0 to 100
A014 0 end ratio 100% 100%
A015 0 start selection 01 01 00: External start frequency, 01: 0 Hz
A016 0, 01, 02 filter 8 times 8 times 1 to 30
00: Binary (settable up to 16 stages of speed with 4 terminals),
A019 Multistage speed, jogging 00 00 01: Bit (settable up to 8 stages of speed with 7 terminals)
0.00, start frequency to maximum frequency (The value of
A020 First multistage speed 0 0.00Hz 1000 F001 is automatically entered.)
A220 Second multistage speed 0 0.00Hz 0.00Hz 0.00, start frequency to second maximum control frequency
A021 Multistage speed 1 0.00Hz 0.00Hz
A022 Multistage speed 2 0.00Hz 0.00Hz
A023 Multistage speed 3 0.00Hz 0.00Hz
A024 Multistage speed 4 0.00Hz 0.00Hz
A025 Multistage speed 5 0.00Hz 0.00Hz
Multistage
A026 Multistage speed 6 0.00Hz 0.00Hz
speed
selection A027 Multistage speed 7 0.00Hz 0.00Hz
A028 Multistage speed 8 0.00Hz 0.00Hz 0.00, start frequency to maximum frequency
A029 Multistage speed 9 0.00Hz 0.00Hz
A030 Multistage speed 10 0.00Hz 0.00Hz
A031 Multistage speed 11 0.00Hz 0.00Hz
A032 Multistage speed 12 0.00Hz 0.00Hz
A033 Multistage speed 13 0.00Hz 0.00Hz
A034 Multistage speed 14 0.00Hz 0.00Hz
A035 Multistage speed 15 0.00Hz 0.00Hz
A038 Jogging frequency 1.00Hz 1.00Hz 0.00, start frequency to 9.99

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B-70255EN/01 9.SETTING AND ADJUSTMENT

Initial Setting
Code Name of function Remarks
value value
00: Free run at JG stop time (disabled during operation), 01:
Gradual stop at JG stop time (disabled during operation), 02:
Multistage Direct current damping at JG stop time (disabled during
speed A039 Jogging selection 00 00 operation), 03: Free run at JG stop time (enabled during
selection operation), 04: Gradual stop at JG stop time (enabled during
operation), 05: Direct current damping at JG stop time
(enabled during operation)
A041 First torque boost selection 00 00 00: Manual torque boost, 01: Automatic torque boost
A241 Second torque boost selection 00 00
A042 First manual torque boost 1.0% 2.0 0.0 to 20.0
A242 Second manual torque boost 1.0% 1.0%
V/f A043 First manual torque boost breakpoint 5.0% 10
characteristics Second manual torque boost 0.0 to 50.0
A243 5.0% 5.0%
breakpoint
A044 First control method 00 00 00: VC, 01: VP raised to the power of 1.7, 02: Free V/f setting
A244 Second control method 00 00
A045 Output voltage gain 100 95 20 to 100
A051 Direct current damping selection 00 00 00: Disabled 01: Enabled
A052 Direct current damping frequency 0.50Hz 0.50Hz 0.00 to 60.00
A053 Direct current damping delay time 0.0s 0.0s 0.0 to 5.0
A054 Direct current damping power 0% 0% 0 to 100
Direct A055 Direct current damping time 0.0s 0.0s 0.0 to 60.0
current Direct current damping edge/level
A056 01 01 00: Edge operation, 01: Level operation
damping selection
A057 Start direct current damping power 0% 0% 0 to 100
A058 Start direct current damping time 0.0s 0.0s 0.0 to 60.0
Direct current damping carrier
A059 5.0kHz 5.0kHz 0.5 to 10 derating applicable
frequency
A061 First frequency upper limiter 0.00Hz 0.00Hz 0.00, first frequency lower limiter to maximum frequency
0.00, second frequency lower limiter to second setting
A261 Second frequency upper limiter 0.00Hz 0.00Hz maximum frequency
A062 First frequency lower limiter 0.00Hz 0.00Hz 0.00, start frequency to maximum frequency
A262 Second frequency lower limiter 0.00Hz 0.00Hz 0.00, start frequency to second setting maximum frequency
A063 Jump frequency 1 0.00Hz 0.00Hz 0.00 to 1500
Upper/lower A064 Jump frequency width 1 0.50Hz 0.50Hz 0.00 to 10.00
limiter/jump
A065 Jump frequency 2 0.00Hz 0.00Hz 0.00 to 1500
A066 Jump frequency width 2 0.50Hz 0.50Hz 0.00 to 10.00
A067 Jump frequency 3 0.00Hz 0.00Hz 0.00 to 1500
A068 Jump frequency width 3 0.50Hz 0.50Hz 0.00 to 10.00
A069 Acceleration stop frequency 0.00Hz 0.00Hz 0.00 to 1500
A070 Acceleration stop time 0.0s 0.0s 0.00 to 60.0
A071 PID selection 00 00 00: Disabled, 01: Enabled
A072 PID P gain 1.0 1.0 0.2 to 5.0
A073 PID I gain 1.0s 1.0s 0.0 to 3600
PID control
A074 PID D gain 0.00s 0.00s 0.00 to 100.0
A075 PID scale 1.00% 1.00% 0.01 to 99.99
A076 PID feedback selection 00 00 00: Feedback 01, 01: Feedback 0
00: On at all times, 01: Off at all times, 02: Off at deceleration
A081 AVR selection 00 00 time
AVR 200, 215, 220, 230, 240/380, 400, 415, 440, 460, 480/575,
A082 Motor voltage selection 200/400V 200/400V 600
A085 Operation mode selection 00 00 00: Normal operation, 01: Power-saving operation
Power-saving response/precision
A086 50.0s 50.0s 0.0 to 100.0
adjustment
A092 First acceleration time 2 15.00s 15.00s
A292 Second acceleration time 2 15.00s 15.00s 0.01 to 3600
A093 First deceleration time 2 15.00s 15.00s
A293 Second deceleration time 2 15.00s 15.00s
Operation Stage 12 acceleration/deceleration
mode/ A094 00 00
deceleration
selection 00: Switching by 2 channels, 01: Switching by setting
function Stage 22 acceleration/deceleration
A294 00 00
selection
A095 Stage 12 acceleration frequency 0.00Hz 0.00Hz
A295 Stage 22 acceleration frequency 0.00Hz 0.00Hz 0.00 to 1500
A096 Stage 12 deceleration frequency 0.00Hz 0.00Hz
A296 Stage 22 deceleration frequency 0.00Hz 0.00Hz
A097 Acceleration pattern selection 00 00 00: Straight line, 01: S-shaped curve, 02: U-shaped curve, 03:
A098 Deceleration pattern selection 00 00 Reversed-U-shaped curve

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9.SETTING AND ADJUSTMENT B-70255EN/01

Initial Setting
Code Name of function Remarks
value value
A101 01 start 0.00Hz 0.00Hz 0.00 to 1500
A102 01 end 0.00Hz 0.00Hz
A103 01 start ratio 20% 20% 0 to 100
External A104 01 end ratio 100% 100%
frequency A105 01 start selection 01 01 00: External start frequency, 01: 0 Hz
adjustment A111 02 start 0.00Hz 0.00Hz -1500 to 1500
A112 02 end 0.00Hz 0.00Hz
A113 02 start ratio -100% -100% -100 to 100
A114 02 end ratio 100% 100%
Acceleration/ A131 Acceleration curve constant 02 02
01 to 10 : Small swelling to Large swelling
deceleration A132 Deceleration curve constant 02 02
00: Trip, 01: 0 Hz start, 02: f-matched start, 03: trip after f-
b001 Retry selection 00 00 matched gradual stop, 04: Restart at frequency before
momentary stop
b002 Allowable momentary stop time 1.0s 1.0s 0.3 to 25.0
b003
Restart after
Retry wait time 1.0s 1.0s 0.3 to 100

momentary b004 Momentary stop during stop/shortage 00: Disabled, 01: Enabled, 02: Disabled during stop and
00 00
stop trip selection deceleration for stop
Momentary stop/shortage retry count
b005 00 00 00: 16 times, 01: Unlimited
selection
b006 Open phase selection 00 01 00: Disabled, 01: Enabled
b007 f-matched lower-limit frequency setting 0.00Hz 0.00Hz 0.00 to 1500
b012 First electronic thermal level 24A 24A 0.2*(rated current) to 1.2*(rated current)
b212 Second electronic thermal level 24A 24A
First electronic thermal characteristics
b013 00 00
selection 00: Reduction characteristics, 01: Constant torque
Second electronic thermal characteristics, 02: Free setting
b213 00 00
Electronic characteristics selection
thermal b015 Free electronic thermal frequency 1 0Hz 0Hz 0 to 1500
b016 Free electronic thermal current 1 0.0A 0.0A 0.0 to 1000
b017 Free electronic thermal frequency 2 0Hz 0Hz 0 to 1500
b018 Free electronic thermal current 2 0.0A 0.0A 0.0 to 1000
b019 Free electronic thermal frequency 3 0Hz 0Hz 0 to 1500
b020 Free electronic thermal current 3 0.0A 0.0A 0.0 to 1000
00: Disabled, 01: Enabled at acceleration or constant-speed
b021 Overload limitation selection 01 01 operation time, 02: Enabled at constant-speed operation time
b022 Overload limitation level 36 36 0.5*(rated current) to 2*(rated current)
Overload b023 Overload limitation constant 1.00s 1.00s 0.1 to 30
limitation b024 Overload limitation 2 selection 01 01
00: Disabled, 01: Enabled at acceleration or constant-speed
operation time, 02: Enabled at constant-speed operation time
b025 Overload limitation level 2 36 36 0.5*(rated current) to 2*(rated current)
b026 Overload limitation constant 2 1.00s 1.00s 0.1 to 30
00: (When the SFT terminal is on) Items other than this item
cannot be modified., 01: (When the SFT terminal is on) Items
Lock b031 Soft lock selection 01 00 other than this item a frequency cannot be modified., 02: Items
other than this item cannot be modified.
b100 Free V/f frequency 1 0Hz 0Hz 0 to free V/f frequency 2
b101 Free V/f voltage 1 0.0V 0.0V 0 to 800.0
b102 Free V/f frequency 2 0Hz 0Hz 0 to free V/F frequency 3
b103 Free V/f voltage 2 0.0V 0.0V 0 to 800.0
b104 Free V/f frequency 3 0Hz 0Hz 0 to free V/F frequency 4
b105 Free V/f voltage 3 0.0V 0.0V 0 to 800.0
b106 Free V/f frequency 4 0Hz 0Hz 0 to free V/F frequency 5
Free V/f
b107 Free V/f voltage 4 0.0V 0.0V 0 to 800.0
b108 Free V/f frequency 5 0Hz 0Hz 0 to free V/F frequency 6
b109 Free V/f voltage 5 0.0V 0.0V 0 to 800.0
b110 Free V/f frequency 6 0Hz 0Hz 0 to free V/F frequency 7
b111 Free V/f voltage 6 0.0V 0.0V 0 to 800.0
b112 Free V/f frequency 7 0Hz 0Hz 0 to 400
b113 Free V/f voltage 7 0.0V 0.0V 0 to 800.0

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B-70255EN/01 9.SETTING AND ADJUSTMENT

Initial Setting
Code Name of function Remarks
value value
C001 Intelligent input terminal 1 selection 18 18 01: RV (reverse rotation), 02: CF1 (multistage speed 1), 03:
CF2 (multistage speed 2), 04: CF3 (multistage 3), 05: CF4
C002 Intelligent input terminal 2 selection 16 15 (multistage speed 4), 06: JG (jogging), 07: DB (external
C003 Intelligent input terminal 3 selection 06 07 direction current damping), 08: SET (second damping), 09:
C004 Intelligent input terminal 4 selection 11 11 2CH (2-stage acceleration/deceleration), 11: FRS (free run),
12: EXT (external trip), 13: USP (restart prevention function at
C005 Intelligent input terminal 5 selection 09 09
power supply recovery time), 14: CS (commercial switching),
C006 Intelligent input terminal 6 selection 03 03 15: SFT (soft lock), 16: AT (analog in switching), 18: RS
C007 Intelligent input terminal 7 selection 02 02 (reset), 20: STA (3-wire activation), 21: STP (3-wire hold), 22:
F/R (3-wire forward/reverse), 23: PID (PID enable/ disable),
24: PIDC (PID integral reset), 27: UP (remote operation
Intelligent C008 Intelligent input terminal 8 selection 01 01 speedup), 28: DWN (remote operation slowdown), 29: UDC
(INT) input (remote operation data clear), 31: OPE (forced operation)
terminal C011 Intelligent input 1a/b selection 00 00
C012 Intelligent input 2a/b selection 00 00
C013 Intelligent input 3a/b selection 00 00
C014 Intelligent input 4a/b selection 00 00
C015 Intelligent input 5a/b selection 00 00 00:NO、 01:NC
C016 Intelligent input 6a/b selection 00 00
C017 Intelligent input 7a/b selection 00 00
C018 Intelligent input 8a/b selection 00 00
C019 FWa/b selection 00 00
C021 Intelligent output terminal 11 selection 01 00 00: RUN (during operation), 01: FA1 (when constant speed is
C022 Intelligent output terminal 12 selection 00 00 reached), 02: FA2 (more than set frequency), 03: OL (advance
notice of overload), 04: OD (excessive PID deviation), 05: AL
INT output C023 Intelligent output terminal 13 selection 03 03 (trip signal), 06: FA3 (setting frequency only), 08: IP (during
terminal C024 Intelligent output terminal 14 selection 02 02 momentary stop), 09: UV (insufficient voltage), 11: RNT (run
C025 Intelligent output terminal 15 selection 08 08 time exceeded), 12: ONT (ON time exceeded), 13: THM
C026 Alarm relay output terminal 05 05 (thermal warning)
00: Output frequency, 01: Output current, 03: Digital output
C027 FM selection 00 00 frequency, 04: Output voltage, 5: Output power, 06: Thermal
Monitor load ratio, 07: LAD frequency
terminal C028 AM selection 00 00 00: Output frequency, 01: Output current, 04: Output voltage,
C029 AMI selection 00 00 05: Output power, 06: Thermal load ratio, 07: LAD frequency
C031 Intelligent output 11a/b selection 00 00
C032 Intelligent output 12a/b selection 00 00
C033 Intelligent output 13a/b selection 00 00
C034 Intelligent output 14a/b selection 00 00 00:NO, 01:NC
Level C035 Intelligent output 15a/b selection 00 00
output C036 Alarm relay output a/b selection 01 01
terminal Overload advance notice signal output 00: During acceleration/deceleration or during constant-speed
C040 01 01
state mode selection operation, 01: During constant-speed operation only
C041 Overload advance notice level 24A 24A 0.0 to 2*(rated current)
C042 Acceleration reach frequency 0.00Hz 0.00Hz
C043 Deceleration reach frequency 0.00Hz 0.00Hz 0.00 to 1500
C044 PID deviation excess level 3.0% 3.0% 0.0 to 100.0
C070 Data command selection 02 02 02: Operator, 03: RS485, 04: Option 1, 05: Option 2
C071 Communication rate selection 04 04 03:2400bps、 04:4800bps、 05:9600bps、 06:19200bps
Communi- Communication station number
C072 1 1 1 to 32
cation selection
function C073 Communication bit length selection 7 7 7: 7 bits, 8: 8 bits
adjustment C074 Communication parity selection 00 00 00: With no parity, 01: Even parity, 02: Odd parity
C075 Communication stop bit selection 1 1 1: 1 bit, 2: 2 bits
C078 Communication wait time 0ms 0ms 0 to 1000
Factory- Factory-
C081 0 adjustment adjusted adjusted
Factory- Factory-
C082 01 adjustment adjusted adjusted
Analog Factory- Factory-
C083 02 adjustment adjusted adjusted
meter
setting C085 Thermistor adjustment 105.0 105.0 0.0 to 1000
C086 AM offset adjustment 0.0V 0.0V 0.0 to 10.0
C087 AMI adjustment 80 80 0 to 255
Factory- Factory-
C088 AMI offset adjustment adjusted adjusted

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9.SETTING AND ADJUSTMENT B-70255EN/01

Initial Setting
Code Name of function Remarks
value value
b034 Run time/power ON time level 0hr 0hr 0. to 9999.(0 to 99990hr)/1000 to 6553(100000 to 655300)hr
00: Forward and reverse rotation enabled, 01: Forward
b035 Operation direction limitation selection 00 02 rotation only enabled, 02: Reverse rotation only enabled
00: Short reduced-voltage start time to 06: Long reduced-
b036 Reduced-voltage start selection 06 06 voltage start time
00: All data displayed, 01: Function-by-function display, 02:
b037 Display selection 00 00 User setting/this setting
b080 AM adjustment 180 180 0 to 255
b081 FM adjustment 60 60 0 to 255
b082 Start frequency 0.50Hz 0.50Hz 0.10 to 9.99
b083 Carrier frequency 5.0kHz 5.0kHz 0.5 to 10.0 derating applicable
00: Trip history clear, 01: Data initialization, 02: Trip history
b084 Initialization selection 00 00 data clear + data initialization
b085 Initialization data selection 00 00 00: Domestic, 01: CE, 02: USA
b086 Frequency conversion factor 1.0 1.0 0.1 to 9.99
b087 Stop key selection 00 01 00: Enabled, 01: Disabled
00: 0 Hz start, 01: f-matched start, 02: Start at frequency
b088 Free run stop selection 00 00 immediately before free run
b090 BRD use ratio 0.0% 0.0% 0.0 to 100.0
b091 Stop time selection 00 00 00: Deceleration ? stop, 01: Free run stop
00: At all times, 01: During operation only (including 5 minutes
b092 Cooling fan operation selection 00 01 after power-on and stop)
00: Disabled, 01: Enabled (disabled during stop), 02: Enabled
b095 BRD selection 00 00 (enabled even during stop)
b096 BRD on level 360/720V 360/720V 330 to 380 / 660 to 760
b098 Thermistor selection 00 00 00: Disabled, 01: PTC, 02: NTC enabled
Others b099 Thermistor error level 3000Ω 3000Ω 0 to 9999
C061 Thermal warning level 80% 80% 0 to 100
C091 Debug mode selection 00 00 00: Not displayed, 01: Displayed
C101 Up/down selection 00 00 00: Frequency data not saved, 01: Frequency data saved
00: Trip released when ON, 01: Trip released when OFF, 02:
C102 Reset selection 00 00 Enabled only at trip time (released when ON)
C103 Reset selection f-matched selection 00 00 00: 0 Hz start, 01: f-matched start
Factory- Factory-
C121 0 zero adjustment adjusted adjusted
Factory- Factory-
C122 01 zero adjustment adjusted adjusted
Factory- Factory-
C123 02 zero adjustment adjusted adjusted
Factory- Factory-
H003 First motor capacity selection adjusted adjusted
Factory- Factory-
H203 Second motor capacity selection adjusted adjusted
H004 First motor pole count selection 4 2
H204 Second motor pole count selection 4 4 2, 4, 6, 8
H006 First stabilizer constant 100 100
H206 Second stabilizer constant 100 100 0 to 255
P001 Option 1 error time operation selection 00 00
P002 Option 2 error time operation selection 00 00 00:TRP, 01:RUN

U001 User 1 selection


to to no no no. d001 to P002
U012 User 12 selection

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B-70255EN/01 9.SETTING AND ADJUSTMENT

9.4 GAS CONTROLLER

This unit is precisely adjusted at the factory and should not require
any further adjustment. If the intake unit, exhaust unit, or atmospheric
pressure unit is replaced or requires re-adjustment, however, it should
be set and adjusted as described below:

9.4.1 Setting the Gas Supply Pressure Sensor

The gas supply pressure sensor is the sensor marked with PSW1 on
the gas controller.

(1) Turn the CNC on. Never turn on the gas pressure control start
signal (RUN) at this stage.

(2) Set the secondary pressure of the regulator of the external laser
gas supply (gas cylinder, for example) to 0.1 MPa.

(3) Release the lock mode, then set desired values according to
Section 9.5. After setting, check that the LED (green) of OUT1
is on.

(4) To check the setting, reduce the secondary pressure of the


regulator on the laser gas supply unit (gas cylinder, for example)
to 0.04 MPa. The green LED of the gas supply pressure sensor
(OUT1) should go off.

(5) This completes the setting. Set the lock mode.

9.4.2 Setting the Atmospheric Pressure Sensor

NOTE
While setting the sensor, the gas controller is open to
the atmosphere. To prevent dust from entering the
controller, pay particular attention to the immediate
surroundings.

The atmospheric pressure sensor is the sensor marked with PSW2 on


the gas controller.

(1) Close the main circuit breaker and turn on the power supply,
then turn on the CNC. A voltage is supplied to the sensor. Never
turn on the gas pressure control start signal (RUN).

(2) Release the lock mode, then set desired values according to
Section 9.5.

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(3) Remove the orange gas tube by loosening the hexagon cap nuts
securing the tube. This causes the atmospheric pressure sensor to
detect the atmospheric pressure.

(4) Clear the sensor to zero according to Section 9.5. Reinstall the
removed gas tube, and resecure the tube. After setting, check that
the LED (green) of OUT1 is on.

(5) Turn on the gas pressure control start signal (RUN), and check
that the exhaust pump starts exhaust. Then, check that the LED
(green) of the OUT1 of this sensor is turned off.

(6) This completes the setting. Set the lock mode.

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B-70255EN/01 9.SETTING AND ADJUSTMENT

9.4.3 Adjusting the Exhaust Unit (Adjusting the Laser Gas


Consumption)

(1) Remove the piping from the filter of the gas controller, then
attach a gas meter for laser gas.

(2) Set PRM No. 15260 to 30, then start the oscillator. Air taken in
when the outlet is opened to the atmosphere in step 1) is
exhausted. After 30 seconds, turn off RUN.

(3) Set the laser oscillator to the base discharge state (LSTR).

(4) Increase the specified output gradually from a low level of


output to the rated output. When the RF voltage is high, perform
a purge operation once, then increase the output again.

(5) While checking the flow rate of gas with a gas meter when
internal discharge is performed at the rated output, turn the
exhaust flow rate adjustment valve to adjust the flow rate to the
set value.

(6) Stop the oscillator.

(7) Return the modified parameter value to the original value.

(8) This completes the adjustment.

NOTE
Excessive parameter value modifications increase
laser gas consumption and adversely affect gas
pressure control.

Oscillator model Flow rate


C1000iA 10 liters / hour

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Fig. 9.4 Details of C1000iA gas controller sensor and flow rate adjustment valve

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9.5 SETTING THE GAS SUPPLY PRESSURE SENSOR AND


ATMOSPHERIC PRESSURE SENSOR

The sensors operate in one of four modes. In the measurement mode,


a pressure value being measured is indicated. In the initial setting
mode, basic operation is set. In the pressure setting mode, an
operating pressure is set. In the lock mode, key operation is locked.
Moreover, the sensors have a zero-clear function for canceling an
initial offset value.
Set the initial setting mode, pressure setting mode, zero-clear function,
and key lock mode in this order. For mode switching, press or hold
down the SET key as indicated below. (When the power is turned on,
the measurement mode is set.)

Measurement SET (< 2 seconds) Pressure setting mode SET


mode

SET (³ 2 seconds) Initial setting mode SET

SET (³ 4 seconds) Key lock mode SET

Note) Zero-clear operation is performed in the measurement mode.

9.5.1 Names of Components

Fig. 9.5 Details of the gas supply pressure sensor and atmospheric
pressure sensor

- LED indicator section:


Indicates a measured pressure value, settings, and error code.
- Switch output 1 operation indicator lamp (green LED):
Turned on when OUT1 is on.
- Switch output 2 operation indicator lamp (red LED):
Turned on when OUT1 is on.

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- UP ( ) and DOWN ( ) buttons:


Used to change the mode and settings.
- SET button:
Used to change the mode and set a value finally.

NOTE
The indicator section of the sensor indicates a
pressure value as a gauge pressure in MPa.

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9.5.2 Setting Procedure

When setting in each mode, follow the procedure described below.

Setting in the initial setting mode


Perform basic setting for the sensor. To enter the initial setting mode,
hold down the SET key for 2 to 4 seconds in the measurement mode.
This setting operation is common to the gas supply pressure sensor
and atmospheric pressure sensor.
List of settings (Unit: MPa)
Setting Remarks
Unit setting (Mpa) Usually, this setting need not be
made.
Output mode setting Normal Open For both OUT1 and OUT2

Response time setting 768 (ms)

Automatic/manual Manual
setting

Hold down the SET key for 2 to 4


seconds.

OUT1 output setting becomes Press and set Normal Open.


possible.

Press the SET key.

OUT2 output setting becomes Press and set Normal Open.


possible.

Press the SET key.

Response time setting Press and set 768 ms.


becomes possible.

Press the SET key.

Automatic/manual setting Press and set the manual mode.


becomes possible.

Press the SET key.

Measurement mode

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Setting in the pressure setting mode


Perform operating pressure setting for the sensor. Note that different
values are set for the gas supply pressure sensor and atmospheric
pressure sensor.
List of settings (Unit: MPa)
Gas supply pressure sensor Atmospheric pressure sensor
(PSW1) (PSW2)
P1 0.050 0.000

P2 0.045 -0.005

P3 0.200 0.100

P4 0.200 0.100

In the measurement mode, hold down the Settings for the gas supply pressure Settings for the atmospheric
SET key for less than 2 seconds. sensor (PSW1) pressure sensor (PSW2)

P_1 and a number are displayed Set 0.050 by pressing . Set 0.000 by pressing and .
alternately.

Press the SET key.

P_2 and a number are displayed Set 0.045 by pressing . Set 0.005 by pressing and .
alternately.

Press the SET key.

P_3 and a number are displayed Set 0.200 by pressing . Set 0.100 by pressing and .
alternately.

Press the SET key.

P_4 and a number are displayed Set 0.200 by pressing and . Set 0.100 by pressing .
alternately.

Press the SET key.

Measurement mode

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Zero clear
Clear the initial offset value of the sensor. This setting can be made in
the measurement mode. Set the atmospheric pressure sensor only.
Check that the measurement
mode is set.

Press and simultaneously. Set the indication to 0.

To the measurement mode

Setting in the key lock mode


Key locking protects against an inadvertent modification to the setting
of the sensor. This setting is common to the gas supply pressure
sensor and atmospheric pressure sensor.
The key lock mode is set by holding down the SET key for 4 seconds
or more in the measurement mode.

Hold down the SET key for 4


seconds or more.

After various settings, set


UnL or LoC is displayed.
LoC.

Press the SET key.

To the measurement mode

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9.6 SETTING THE POWER INPUT COMPENSATION


COEFFICIENT

This coefficient is precisely adjusted at the factory and should not


require any further adjustment.
If the rear mirror in the laser oscillator is replaced, or the power
sensor unit is replaced, however, check and set the power input
compensation coefficient. For this setting, a laser beam is directly
measured. So, be sure to observe the safety requirements related to
laser beams described in Chapter 2.

(1) Change the following parameters.


PRM No.15208 ® Settings (Enables output feedback.)
PRM No.15209 ® Settings (Enables output feedback.)

(2) Place the laser oscillator in the base discharge state (LSTR).
Then, by using the procedure described in Chapter 11, check if
the oscillator is aligned optimally. If the oscillator is not aligned
optimally, readjust the oscillator.

(3) Perform internal discharge at the rated output for one minute or
more. Then, run the program below in the automatic mode, and
place a power probe in the middle of the optical path to measure
the output value Pr of a laser beam output externally. At this
time, it is recommended to make a measurement immediately
after the beam panel. Record the laser output value Pa detected
by the internal sensor and displayed on the laser setting screen
when this measurement is made.
G32 P1 Q1 ;
G24 S1000 Q100 R10000 ;
G32 P0 ; (Radiation for 10 seconds)
M30
Use a power probe calibrated periodically. A calibrated power
probe has a calibration coefficient attached. A correct output
measurement value is Pr' (probe conversion value) = Pr (probe
indication value) ´ calibration coefficient.

(4) If the value of the power input compensation coefficient K set in


PRM No. 15215 is correct, Pa should be equal to Pr'. If the value
of Pa differs from Pr' by ±5% or more, set the power input
compensation coefficient K (PRM No. 15215) again according
to the following expression:
K (new value) = Pr' (probe conversion value)/Pa ´ K (old value)

(5) Make another measurement of (3) above, and check that Pa = Pr'.

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B-70255EN/01 9.SETTING AND ADJUSTMENT

9.7 WATER FLOW SENSOR

This sensor is precisely adjusted at the factory and should not require
any further adjustment. If the water distribution unit or water flow
sensor is replaced, however, this sensor should be set and adjusted as
described below:

9.7.1 Adjusting the Water Flow Sensor

The operation point of the water flow sensor for C1000iA depends on
the pressure at the cooling water inlet of the oscillator.
So, note that the alarm operation point may slightly shift if the length
of piping from the chiller is changed significantly for a cause such as
the movement of the oscillator.
The adjustment method described below assumes that the pressure at
the cooling water inlet of the oscillator is 0.36 to 0.50 MPa.

(1) Detach the water flow sensor cables (black, white) from the
terminal block, then connect a tester to the tips (Faston
terminals). Set the tester for the resistance measurement range or
conduction check range.

(2) Adjust the flow rate the cooling water entering the oscillator to a
predetermined alarm flow rate. To perform this adjustment, use a
flowmeter having an appropriate capacity and accuracy.

Model Predetermined alarm Rated flow rate


flow rate
C1000iA 32 liters/min 40liters/min

(3) Remove the packing at the top of the water flow sensor, then
adjust the flow rate setting screw to find the position where the
flow rate sensor is placed in the conduction state (on).

(4) From the found position, turn the flow rate setting screw of the
water flow sensor counterclockwise until the water flow sensor
just becomes off.

(5) Increase the cooling water flow rate gradually to the alarm-off
setting flow rate, then check that the water flow sensor is on.

Model Alarm-off setting flow rate

C1000iA 35 liters/min

(6) Close the valve and make an adjustment to the alarm setting flow
rate, then check that the water flow sensor is off.

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(7) Reinstall the removed packing and reconnect the detached cables
to the terminal block.

- Supplement -
If a flowmeter is unavailable, a temporary setting can be made
by positioning the flow rate indicator as shown in Fig. 9.7.1.

Fig. 9.7.1 Flow rate indicator

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10 REPLACEMENT PROCEDURES

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10.1 INPUT UNIT

10.1.1 Replacing the Stabilized Power Supply

Replace the stabilized power supply as follows:

(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.

(2) Remove the IF PCB.

(3) Disconnect all cables from the stabilized power supply.

(4) Remove the four edge supports, then remove the stabilized
power supply.

(5) Install the new PCB by reversing the procedure used for
removal.
Connect the cables, noting the alignment marks. Ensure that no
terminals are loose.

10.1.2 Replacing the Input Unit Control PCB

(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.

(2) Remove the IF PCB.

(3) Disconnect all cables from the control PCB.

(4) Remove the four edge supports, then remove the input unit
control PCB.

(5) Install the new PCB by reversing the procedure used for
removal.
Connect the cables, noting the alignment marks.
Check that the connectors are connected firmly.

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10.1.3 Replacing the IF PCB on the Oscillator Side

Replace the IF PCB on the oscillator side as follows:

(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.

(2) Disconnect all cables from the IF PCB.

(3) Remove the screws or edge supports, then remove the interface
PCB.

(4) Mount a new PCB by reversing steps (2) and (3). Connect the
cables, noting the alignment marks. Ensure that no terminals are
loose. Check that the connectors are connected firmly.

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10.2 REPLACING THE LASER POWER SUPPLY

Figs. 10.2 (a) to (c) show the laser power supply. Replace the laser
power supply as described below.

Fig. 10.2(a)

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Fig. 10.2(b)

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Fig. 10.2(c)

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B-70255EN/01 10.REPLACEMENT PROCEDURES

(1) Replacing the power supply


1) Turn off the power to the laser oscillator, then drain the
cooling water.
2) Remove the following water joints, power cables, and
signal cables:
See Fig. 10.2 (a).
- Water joint B
- XT21(200VAC)
- XT22(Output terminal)
- CP51
- CP73
- Ground cable
3) Remove the bolts securing the power supply, then remove
the power supply. If it proves difficult to pull out the power
supply, slightly shift it to the right or left, then retry.
4) Once the power supply has been replaced, tighten the bolts,
then connect the water joints, power cables, and signal
cables correctly.
The new power supply must be adjusted before it can be used.

(2) Checking for and replacing a damaged high-speed diode or FET


module PCB
(a) Preparation
1) Turn off the power to the CNC, then turn off the
power to the laser oscillator.
2) Remove the top cover of the laser power supply from
inside the oscillator.
(See Fig. 10.2 (a). To remove the top cover, remove
the screw indicated by A.)
3) Once the top cover has been removed, two FET
module PCBs (in the figure 10.2 (b)) and two diode
units appear.
(b) Checking for and replacing a damaged high-speed diode
1) To check whether a diode is damaged, measure the
resistance between the anode and cathode of each of
the diodes in the diode unit, by using a multimeter. A
resistance of less than 10W indicates that the diode is
damaged. (a normal diode will have a resistance of
about 3MW to 10MW.)
When measuring the diode resistance, apply the
positive probe of the multimeter to the cathode of the
diode, and apply the negative probe to the anode.
2) Remove the screw connecting the damaged diode and
the plate, then remove the diode fixing screw. See Fig.
10.2(c).
3) Install a normal diode, paying attention to its polarity,
then screw the plate firmly. This completes the
replacement work.
(c) Checking for and replacing a damaged FET module PCB
(See Fig. 10.2 (b).)

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1) To check whether an FET module PCB is damaged,


measure the resistance between check pins D and S
shown in the figure.
A resistance of less than 10 kW indicates that the FET
module PCB is damaged. (A normal FET module PCB
will have a resistance of about 30kW to 10MW.)
2) Mount a new FET module PCB, fix it using the screws,
then connect the cables.
(d) Checking
1) Recheck that all removed screws and disconnected
cables are securely tightened or connected.
2) Mount the top cover of the power supply.
3) Turn on the oscillator, then adjust the power supply as
described in Section 9.1.

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10.3 REPLACING THE MATCHING BOX

Replace the matching box as follows:

(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.

(2) Disconnect the power and signal cables from the matching box.

(3) Remove the resonator fan unit, then remove the discharge tube
feeder.

(4) Remove the two rods (a long one and a short one) from the
matching box, using an 8-mm spanner.

(5) Remove the two securing screws, then remove the matching box
by slightly pulling it toward you. If it proves difficult to remove
the matching box, slightly shift it to the right or left, then retry.

(6) Mount a new matching box by reversing steps (5) to (2).

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10.4 REPLACING THE TURBO BLOWER

When the turbo blower is replaced, the gas circulating system is open
to the atmosphere for a long time. Pay particular attention to the
immediate surroundings to ensure that dust and other contaminants do
not enter the gas circulating system.
Clean the flanges of the turbo blower and the pipe flanges before
replacing the turbo blower.
Do not incline the turbo blower while transporting and installing it.
Doing so will cause lubricating oil to enter the blower, contaminating
the laser gas circulating system and optical mirrors.

Fig.10.4 External view oft turbo blower

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B-70255EN/01 10.REPLACEMENT PROCEDURES

CAUTION
Usually, all oil is drained from a turbo blower prior to
shipping. Even so, however, the turbo blower must
not be inclined because trace amounts of oil will
inevitably remain inside the unit.
If a turbo blower is inclined, it can no longer be used.

Replacement procedure
Be careful not to damage the O-rings or their mating surfaces on the
pipes. A damaged O-ring or mating surface will result in gas leakage.

(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.

(2) Disconnect the cooling water tubes and power cables from the
turbo blower, then drain the oil from the turbo blower.

(3) Disconnect the two pipes from the turbo blower outlet.
Cover the removed gas pipes and turbo blower to prevent dust
from entering.

(4) Remove the hexagon headed bolt which secures the damping
rubber and blower base, then remove the turbo blower by sliding
it horizontally. Note that the turbo blower weighs about 30 kg.

(5) Remove the two metal brackets, used to secure the turbo blower,
from the removed turbo blower, then mount them on the new
turbo blower.

(6) Mount the new turbo blower on the oscillator, then fix the gas
pipes. Be careful not to damage the O-rings and ensure that no
O-ring is missing.

(7) Tighten the nut of the damping rubber. Carefully follow the
procedure below to prevent the damping rubber from being
twisted and damaged.

(8) Connect the cooling water tubes and the power and ground
cables.

(9) Check that there are no cooling water leaks, turn on the oscillator,
then check for gas leakage.

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10.5 REPLACING THE TURBO PCB

Replace the turbo PCB as follows:

(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.

(2) Disconnect all cables from the turbo PCB.

(3) Remove the four screws or four edge supports, then remove the
PCB.

(4) Mount a new PCB by reversing steps (2) and (3). Connect the
cables, noting the alignment marks.

(5) Once the turbo PCB has been replaced, the turbo blower oil level
alarm must be set. Set the alarm as explained in Section 9.2.

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B-70255EN/01 10.REPLACEMENT PROCEDURES

10.6 REPLACING RELAY PCB B

Replace relay PCB B as follows:

(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.

(2) Disconnect all cables from relay PCB B.

(3) Remove the four screws or four edge supports, then remove the
PCB.

(4) Mount a new PCB by reversing steps (2) and (3). Connect the
cables, noting the alignment marks.

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10.7 REPLACING THE EXHAUST PUMP

When the exhaust pump is replaced, the gas circulating system is


open to the atmosphere for a long time. Pay particular attention to the
immediate surroundings to ensure that dust and other contaminants do
not enter the gas circulating system.

Fig. 10.7 C1000iA External view of exhaust pump

Replace the exhaust pump as follows (refer to the accompanying


figure).

(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.

(2) Drain the cooling water from the oscillator, then disconnect the
two water tubes.

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B-70255EN/01 10.REPLACEMENT PROCEDURES

(3) Disconnect the tubes from the pump outlet and inlet. Then,
disconnect the heavy-duty power cables from the terminal block
on the side of the pump.

(4) Remove the bolts securing the exhaust pump unit, then remove
the pump unit. Remove the bolts securing the pump to the
mounting plate, then remove the pump.

(5) Position the new exhaust pump on the mounting plate, then
secure the pump unit by reversing steps (2) to (4). The new
pump may not be fitted with gas and water joints. Remove an
older pump first, then install a new pump as originally installed.
Ensure that the terminal block is wired correctly. Incorrect
wiring may cause the pump rotation to be reversed, causing the
pump oil flow to be reversed. Connect the cables, noting the
alignment marks.

(6) Pumps are shipped without lubricating oil. Fill the pump with
Matsumura Oil SA-H. Operating the pump without lubricating
oil will cause the thermal switch to trip, and will ultimately
damage the pump.

(7) Close the main circuit breaker, turn on the power to the oscillator,
then turn on the power to the CNC. Then, perform a laser
oscillator leakage test and check the operation of the exhaust
pump. When the power is first turned on, check that gas is output
from the gas outlet of the oscillator. The pump starts after gas
has been discharged from the external pipes for a few seconds.
Gas being drawn into the oscillator, or abnormal noise, indicates
that the pump rotation is reversed. In such a case, check the
wiring of the terminal block.

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10.8 REPLACING THE PRESSURE CONTROL UNIT

When the pressure control unit is replaced, the gas circulating system
is open to the atmosphere for a long time. Pay particular attention to
the immediate surroundings to ensure that dust and other
contaminants do not enter the gas circulating system.

Fig.10.8 Details of intake unit/exhaust unit for C1000iA

Replace the pressure control unit as follows:

(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.

(2) Close the valve of the external laser gas supply (for example, a
gas cylinder).

(3) Disconnect all removable tubes and cables. Pressurized laser gas
may remain in the control unit. Discharge this gas by loosening
the nut on the joint.

(4) Remove the unit securing screws, then remove the unit.

(5) Mount a new unit by reversing steps (3) and (4).

(6) The new intake unit must be adjusted. Adjust the unit as
explained in Chapter 9.

(7) Turn on the oscillator, then perform a gas leakage check.

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10.9 REPLACING THE EXHAUST UNIT

When the exhaust unit is replaced, the gas circulating system is open
to the atmosphere for a long time. Pay particular attention to the
immediate surroundings to ensure that dust and other contaminants do
not enter the gas circulating system.
Replace the exhaust unit as follows:

(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.

(2) Disconnect the tubes and cables from the exhaust unit.

(3) Remove the unit securing screws, then remove the exhaust unit.

(4) Mount a new unit by reversing steps (2) and (3). Ensure that all
tubes are connected and tightened, and that the cables are
connected correctly.

(5) Perform all settings as described in Section 9.5, then check the
operation. If a laser gas flowmeter is not provided, adjust the
exhaust valve of the new exhaust control unit such that the
amount by which it opens (the angle and number of turns by
which the valve is open relative to the fully closed state) is the
same as that of the exhaust valve of the removed control unit.

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10.10 REPLACING A DISCHARGE TUBE

When a discharge tube is replaced, the gas circulating system is open


to the atmosphere for a long time. Pay particular attention to the
immediate surroundings to ensure that dust and other contaminants do
not enter the gas circulating system.

(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator.
Remove the top cover of the oscillator.

(2) Detach the cable connecting the discharge tube with the
matching box, by loosening the thumbscrew.
Remove all the screws from the flange which secures the
discharge tube (six screws are used for each discharge tube).

(3) Move the discharge tube toward the output, rear, and folding
mirrors, while rotating it. If the O-ring is too tight to allow the
discharge tube to be moved, lubricate the O-ring with alcohol.
Before attempting to move the discharge tube, however, move
the flange to the center of the tube. Then, hold the supported end
of the discharge tube, leaving a gap of 5 mm, then push the
discharge tube while rotating it. At this time, be careful not to
damage the end of the discharge tube. If the discharge tube is
damaged, glass chips may enter the gas circulating system.

(4) Move the O-ring to the center of the discharge tube, then remove
the discharge tube. If the O-ring is at the end of the discharge
tube, the end of discharge tube may be damaged while it is being
removed.

(5) Remove the copper plate from the removed discharge tube, then
mount it on a new discharge tube.

(6) Mount the flange on the new discharge tube, then mount the O-
ring. Before mounting the O-ring, wipe it with alcohol. A Teflon
O-ring is hard, and must be expanded slightly (by hand) before
being mounted. The surface of the O-ring may exhibit cracks or
some white deposits, indicating deterioration. Such an O-ring
may cause gas leakage or generate dust. Replace it with a new
one.

(7) Insert the new discharge tube into the discharge tube holder by
reversing step (5), then perform assembly by reversing steps (5)
and (6).

(8) Turn on the oscillator, then perform a gas leakage check.

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(9) If no gas leakage is detected, perform discharge aging.


If the discharge area of the new discharge tube greatly differs
from those of the other discharge tubes, adjust the power supply.

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10.11 REPLACING A FAN UNIT

The laser oscillator contains many fan units, which are classified into
the following two types:

(1) Fan unit


Consists of several fans and a terminal block.
(2) Fan-assisted radiator
Consists of a water-cooled radiator, several fans, and a terminal
block.

The replacement of each type of fan unit is described below.

10.11.1 Replacing a Fan Unit

Replace a fan unit as follows:

(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.

(2) Remove the panel from the oscillator.

(3) Disconnect the power supply cable and ground cable from the
terminal block.

(4) Remove the fan unit from the oscillator.

(5) Mount a new fan unit, then secure it by tightening the screws.

(6) Connect the power supply cable and ground cable.

(7) Close the main circuit breaker, turn on the power to the oscillator,
then turn on the power to the CNC. Then, check that the fans
rotate.

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B-70255EN/01 10.REPLACEMENT PROCEDURES

10.11.2 Attaching and Detaching a Cable To and From the Terminal


Block

(1) As shown below, a cable is secured by a fitting. By pressing the


fitting from the top with a sharp screwdriver, the securing force
is released, and the cable can be extracted.

(2) When inserting a cable, press the fitting from the top with a
sharp screwdriver. Ensure that the cable is not pulled out.

Fig.10.11.2

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10.REPLACEMENT PROCEDURES B-70255EN/01

10.11.3 Replacing a Fan-assisted Radiator

Replace a fan-assisted radiator as follows:

(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.

(2) Cooling water is passed through the radiator of the fan unit.
Drain the water from the radiator, then disconnect the water
pipes. To drain the cooling water, open the drain valve of the
water distribution unit.

(3) Remove the panel from the oscillator.

(4) Disconnect the power supply cable and ground cable from the
terminal block.

(5) Remove the fan unit from the oscillator. At this time, the radiator
may still contain water. Therefore, plug the radiator joints with
rag to prevent water being spilled on the other units.

(6) Mount a new fan unit, then secure it by tightening the screws.

(7) Connect the water tubes.

(8) Connect the power supply cable and ground cable.

(9) Operate the chiller unit manually to circulate the cooling water.
Check that no water leaks from the joints that were disconnected
during the replacement. After checking, restore the original
chiller setting.

(10) Close the main circuit breaker, turn on the power to the oscillator,
then turn on the power to the CNC. Then, check that the fans
rotate.

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B-70255EN/01 10.REPLACEMENT PROCEDURES

10.12 REPLACING THE POWER SENSOR UNIT

The power sensor is a very delicate component. Be careful not to


touch or apply force to the black, light-sensitive surface. Also, ensure
that no dust enters the sensor. When removing the power sensor unit
from the rear mirror or mounting the unit on the rear mirror, be
careful not to touch the alignment micrometer on the rear mirror.
Replace the power sensor unit as follows:

(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.

(2) Disconnect the coaxial cable from the power sensor unit.

(3) Hold the entire power sensor unit and turn it counterclockwise to
remove the unit from the mirror holder. At this time, be careful
not to apply an excessive torque to the power sensor and the
mirror holder of the rear mirror.

(4) Mount a new unit by reversing steps (2) and (3).

(5) Close the main circuit breaker, turn on the power to the oscillator,
then turn on the power to the CNC.

(6) Turn on the laser, then check that the laser output indication
appears.

(7) The power input compensation coefficient must be changed.


Change the coefficient as explained in Section 9.6.

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10.REPLACEMENT PROCEDURES B-70255EN/01

10.13 REPLACING THE SHUTTER SECTION

Fig.10.13(a) External view of shutter section for C1000iA

Fig.10.13(b) Details of shutter unit for C1000iA

Replace the shutter section as Subsections 10.13.1 and later:

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B-70255EN/01 10.REPLACEMENT PROCEDURES

10.13.1 Replacing the Shutter Unit

(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.

(2) Disconnect the cables from intermediate PCB B.

(3) Remove the bolts which secure the unit, then remove the unit.

(4) Mount a new unit by reversing steps (2) and (3).

(5) After the shutter unit is replaced, the carbonic gas laser beam
and semiconductor laser beam may be misaligned with each
other. In such a case, align the carbonic gas laser beam and
semiconductor laser beam with each other according to
Subsection 11.2.2.

10.13.2 Replacing the Shutter Mirror

Replace the shutter mirror as follows. Be careful not to leave


fingerprints on the shutter mirror.

(1) Remove the thermal switch from the heat sink.

(2) When two bolts are removed from the reflection side of the
shutter mirror, the shutter mirror can be removed with the shutter
mirror attached to the heat sink.

(4) Apply a minute amount of thermal compound (Ryosan 910-50)


to the rear of a new shutter mirror, then mount the new shutter
mirror by reversing steps (1) to (3).

10.13.3 Replacing the Shutter Switch (Thermal and Photoelectric


Switches)

Replace the shutter switch as follows:

(1) Remove connector CN52B and CN54B from relay PCB B, then
disconnect its cable.

(2) The shutter thermal switch and photoelectric switch make up the
sensor unit. Remove the unit containing both switches.

(3) Install a new sensor unit. At this time, ensure that the wire mark
of the photoelectric switch matches the label indication (OPEN,
CLOSE) of the shutter unit. The replacement is completed by
reconnecting to relay PCB B.

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10.REPLACEMENT PROCEDURES B-70255EN/01

CAUTION
To prevent stress caused by shutter open/close
operation from being imposed on the cable, the
cable must be run with a sufficient allowance as
shown in Fig. 10.13(b).

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B-70255EN/01 10.REPLACEMENT PROCEDURES

10.13.4 REPLACING THE BEAM ABSORBER

Replace the beam absorber as follows:

(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.

(2) The beam absorber is water-cooled. Drain the water from the
beam absorber, then disconnect the water pipes. To drain the
cooling water, open the drain valve of the water distribution unit.

(3) Disconnect the temperature sensor Faston terminal.

(4) Remove the bolts, then remove the absorber. Before removing
the absorber, mark the position of the absorber or mounting
metal bracket. If the position of the absorber is shifted as a result
of the replacement, the laser beam is not directed to the center of
the absorber. In such a case, the absorber must be adjusted.

(5) Mount a new absorber, aligning it with the marked position.

(6) Connect the water tubes and temperature sensor cable.

(7) Operate the chiller unit manually to circulate the cooling water.
Check that no water leaks from the joints that were disconnected
during the replacement. After checking, restore the original
chiller setting.

(8) Close the main circuit breaker, turn on the power to the oscillator,
then turn on the power to the CNC. Check the position of the
absorber, as described below.

Adjusting the absorber position


(1) Draw a cross on an acrylic plate, then fix the plate such that the
center of the cross is aligned with the center of the absorber
aperture.

(2) Provide a flow of cooling air to the acrylic plate, using a drier,
for example.

(3) Turn on the oscillator, then press the high voltage switch.
Monitor the output display screen. Once the output reaches 300
to 500 W, immediately turn off the high voltage switch. During
this period, a laser beam is output, leaving a circular mark on the
acrylic plate.

(4) Adjust the absorber such that the mark on the acrylic plate is
aligned with the center of the absorber.

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10.REPLACEMENT PROCEDURES B-70255EN/01

(5) Repeat step 3), then check the position of the absorber. If the
mark is still not aligned with the center of the absorber, adjust
the absorber again.

(6) In step 3), soot from the burnt acrylic plate may adhere to the
shutter mirror. Check whether the shutter mirror has been
contaminated with soot or other particles, and clean the mirror if
necessary.

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B-70255EN/01 10.REPLACEMENT PROCEDURES

10.14 REPLACING THE HIGH-FREQUENCY INVERTER

Fig. 10.14 Inverter replacement diagram

Replace the high-frequency inverter as follows:

(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.

(2) Detach the cable connected to the connector (CN138) placed


under the inverter.

(3) Remove the front cover (by removing the one setscrew), then
detach the cables from the terminal block of the main circuit.

(4) Remove the four screws, then remove the inverter.

(5) From the removed inverter, detach the cable (with a plate
attached) connected to the terminal block of the control circuit
(by removing the two plate setscrews).

(6) Remove the front cover of a new inverter, then remove the blind
cover of the cabling section.
Next, connect the cable (with a plate attached) originally
connected to the inverter.

(7) Connect the cable to the terminal block of the control circuit.

(8) Mount the new inverter onto the oscillator.

(9) Connect the cables to the terminal block of the main circuit.

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10.REPLACEMENT PROCEDURES B-70255EN/01

NOTE
Wrong cable connections to these terminals can
damage the inverter, and can contaminate the
oscillator and damage the discharge tubes by turning
the turbo blower in the reverse direction.

(10) Install the front cover.


(11) Connect the cable to the connector (CN138).

CAUTION
The parameters of an inverter purchased by FANUC
are set before shipment from the factory. So, usually,
the parameters need not be changed. The inverter
can be replaced using the procedure described
above and can be used without modification.
When parameters need to be checked or modified
for a cause, however, see Section 9.3.

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B-70255EN/01 10.REPLACEMENT PROCEDURES

10.15 REPLACING THE WATER DISTRIBUTION UNIT

Fig. 10.16 Detail of water distribution unit for C1000iA


(Refer to water flow diagram.)

Replace the water distribution unit as follows. The IN side and OUT
side of the distribution unit of C1000iA are separated from each other,
and a different specification number is assigned to each side. Replace
only a side to be replaced.

(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.

(2) Drain all cooling water from the oscillator, using compressed air,
for example. Compressed air must be supplied only from the
cooling water inlet. The structure of the water flow sensor does
not allow cooling water to be drained by compressed air supplied
from the cooling water outlet.

(3) Mark the water pipes connected to the distribution unit, then
disconnect the pipes.

(4) Remove the bolts securing the distribution unit, then remove the
unit.

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10.REPLACEMENT PROCEDURES B-70255EN/01

(5) Mount a new distribution unit by reversing steps (3) and (4).
Connect the water pipes correctly, noting the alignment marks.

(6) Operate the chiller unit manually to circulate the cooling water.
Check that no water leaks from the joints that were disconnected
during the replacement. After checking, restore the original
chiller setting. Check the amount of water in the chiller unit, and
add water if necessary.

(7) Adjust the flow sensor as described in Section 9.7.

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B-70255EN/01 10.REPLACEMENT PROCEDURES

10.16 REPLACING THE CONDENSATION SENSOR

Replace the condensation sensor as follows:

(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.

(2) Disconnect the condensation sensor Faston terminal from the


terminal block.

(3) Remove the screws securing the condensation sensor, then


replace the sensor with a new one.

(4) Connect the condensation sensor Faston terminal to the terminal


block.

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10.REPLACEMENT PROCEDURES B-70255EN/01

10.17 REPLACING THE GUIDE LASER

Replace the guide laser as follows:

(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.

(2) Remove connector CN59 from relay PCB B, then disconnect the
cable.

(3) Remove the three screws securing the laser unit, then replace the
laser unit with a new one.

(4) Insert the cable of the guide laser into the connector on relay
PCB B, then secure the cable.

(5) Replacing the guide laser causes the direction of the laser output
to shift. To adjust the direction, superimpose the guide laser
beam on the CO2 laser beam, as explained in Section 11.2.

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B-70255EN/01 11.LASER OPTICAL SYSTEM

11 LASER OPTICAL SYSTEM


Table 11 lists the optical parts and their features. Use this table to
determine the feature of each optical part. When mounting these parts,
be careful to orient them correctly and ensure that they are being
mounted on compatible units. If a part is not mounted correctly, beam
mode distortion, reduced output, a deterioration in the machining
characteristics, or damage to the power sensor unit may occur.

Table 11 Optical parts and their features


Name Specification Substrate Color (front/rear) Dimensions Application
material (mm)
Marking
1 Output A98L-0003-0045 ZnSe Amber 27.94 C1000iA
mirror (Transparent)
2 Rear A98L-0001-0750 Ge Silver/silver(Opaque) 27.94 C1000iA
mirror
3 Folding A98L-0003-0047 Si Gold/(harsh) gray 38.1 C1000iA
mirror HP or DEMMR

CAUTION
ZnSe : Zinc selenide
Ge : Germanium
Si : Silicon

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11.LASER OPTICAL SYSTEM B-70255EN/01

11.1 CLEANING AND REPLACING THE OPTICAL PARTS

The optical parts in the laser oscillator, including the output mirror,
rear mirror, folding mirrors, and circular polarization mirror, must be
cleaned or replaced periodically. Similarly, if the laser output or beam
mode pattern becomes abnormal, the optical parts must be cleaned or
replaced.
When the output mirror, rear mirror, and folding mirrors are cleaned
or replaced, the discharge tubes are open to the atmosphere for a long
time. Therefore, pay particular attention to the immediate
surroundings to ensure that dust does not enter the discharge tubes.
When cleaning and replacing the output and rear mirrors, deal with
one mirror at a time. If both mirrors are removed at the same time, it
may prove impossible to attain the specified output level after they are
reinstalled. As a result, the alignment work required after mirror
replacement will become more difficult. Before removing the folding
mirrors, adjust the mode; it will subsequently be easier to perform
correction even if the folding mirrors are displaced.
To remove the folding mirrors, remove three mirrors at a time.
Reduced output or the inability to attain a good mode pattern after
cleaning or replacement indicates that the folding mirrors are
displaced. Perform adjustment using the micrometers of the folding
mirrors.

Follow the cleaning procedure given below.

C1000iA
1) Clean the output mirror

2) Clean the rear mirror

3) Clean three folding mirrors

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B-70255EN/01 11.LASER OPTICAL SYSTEM

11.1.1 Cleaning and Replacing the Output Mirror

Fig.11.1(h) Structure of diagram output mirror and rear mirror

Fig. 11.1.1(b) Attaching the holder of the output mirror and rear mirror of C1000iA

To clean the output mirror, follow the procedure given below. Since it
is necessary to touch the optical parts and vacuum parts while
cleaning the output mirror, wear clean gloves or finger cots. Do not
touch these parts with your bare hands.
The output mirror is fabricated using a toxic material. Be careful not
to touch the mirror with your bare hands. If you should touch it, wash
your hands thoroughly under clean running water.
Before starting cleaning, wipe away any foreign matter from around
the parts to be removed. If a removed part is inadvertently soiled,
wipe it clean with ethyl alcohol.

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11.LASER OPTICAL SYSTEM B-70255EN/01

Procedure
(1) Turn off the power to the CNC, then open the main circuit
breaker or turn off the power supply of the laser oscillator.

(2) Hold the entire beam cover and turn it counterclockwise


gradually to remove the beam cover. At this time, be careful not
to apply an excessive torque to the mirror holder of the output
mirror.

(3) When the pressure of the vacuum system of the oscillator is


lower than the atmospheric pressure, it may prove impossible to
remove the output mirror. Confirm that the oscillator is in the
purge state and loosen the yellow and orange tube joints to allow
the internal pressure of the vacuum system to equalize with the
atmospheric pressure. If a negative pressure exists in the vacuum
system, the atmospheric pressure sensor must be adjusted. (See
Section 9.4.2.)

(4) Loosen the mirror holder mounting screw (M4 hexagon socket
head bolt), and remove the mirror holder from the alignment
unit.
CAUTION
When removing the mirror holder, be careful not to
drop the mirror from the mirror holder.

(5) Remove the output mirror and O-ring from the mirror holder,
and place them on lens cleaning paper. To simply replace the
output mirror at this point, go to step (12).
NOTE
When cleaning or replacing a mirror, be sure to
check the states of the O-rings of the mirror holder. If
a damaged O-ring or an O-ring that has lost elasticity
is used without replacement, gas can leak. It is
recommended to replace such O-rings as early as
possible.

(6) Place the mirror with its reflecting side (the side facing the
discharge tubes) facing up. Gently blow clean air (using, for
example, a camera blower) across the mirror surface to remove
dust and dirt. Drop ethyl alcohol or lens cleaner onto the mirror
surface, moisten a cotton swab with the fluid, and gently wipe
any dirty areas.

(7) Place lens cleaning paper over the mirror, then spray ethyl
alcohol or lens cleaner over the paper and mirror.

(8) Move the lens cleaning paper horizontally to and fro across the
mirror.

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B-70255EN/01 11.LASER OPTICAL SYSTEM

NOTE
Since the lens cleaner has a high surface tension, it
may be difficult to move the cleaning paper. As the
paper is slowly moved to and fro across the mirror,
however, the ethyl alcohol will gradually evaporate.

(9) Blow clean air (using, for example, a camera blower) across the
mirror surface to completely evaporate the ethyl alcohol or lens
cleaner.

(10) Repeat steps (7) to (9) until all dirt on the mirror surface has
been removed. Finally, clean the mirror surface with ethyl
alcohol.

(11) Check the transmitting side of the mirror. If its surface is dirty,
perform steps (6) to (9) for the transmitting side also. Note that if
an excessive amount of ethyl alcohol or lens cleaner is applied, it
may flow around the back of the mirror, leading to
contamination.

(12) Wipe the mirror holder and O-ring with ethyl alcohol.

(13) Reinstall the output mirror in the mirror holder, then insert the
O-ring. When installing the output mirror, pay particular
attention to the mirror orientation. The reflecting plane (the
plane indicated by the arrow on the side of the mirror) must face
the discharge tubes. The arrow is both scribed and marked with
ink such that, even if the ink is entirely removed, it will still be
possible to find the scribed arrow. Align the arrow on the side of
the output mirror with the mirror holder position.

(14) Mount the mirror by reversing steps (2) to (4). Install the mirror
holder in the alignment unit so that the mark on the mirror holder
faces down.

(15) Close the main circuit breaker or turn on the power supply of the
laser oscillator, then turn on the power to the CNC.

(16) Perform a leak check.

(17) This completes cleaning and replacement.

(18) Perform discharge aging.

(19) Then, perform alignment.


NOTE
Do not make any adjustments other than output
mirror alignment at this time.

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11.LASER OPTICAL SYSTEM B-70255EN/01

11.1.2 Cleaning and Replacing the Rear Mirror

To clean the rear mirror, follow the procedure given below. Since it is
necessary to touch optical parts and vacuum parts while cleaning the
rear mirror, wear clean gloves or finger cots. Do not touch these parts
directly with your bare hands.
Before starting cleaning, wipe away any foreign matter from around
the parts to be removed. If a removed part is inadvertently soiled,
wipe it clean with ethyl alcohol.

Procedure
(1) Turn off the power to the CNC, then open the main circuit
breaker or turn off the power supply of the laser oscillator.

(2) Hold the entire beam cover and turn it counterclockwise


gradually to remove the beam cover. At this time, be careful not
to apply an excessive torque to the mirror holder of the output
mirror.

(3) When the pressure of the vacuum system of the oscillator is


lower than the atmospheric pressure, it may prove impossible to
remove the rear mirror. Confirm that the oscillator is in the purge
state and loosen the yellow and orange tube joints to allow the
internal pressure of the vacuum system to equalize with the
atmospheric pressure. If a negative pressure exists in the vacuum
system, the atmospheric pressure sensor must be adjusted. (See
Section 9.4.2.)

(4) Loosen the mirror holder mounting screw (M4 hexagon socket
head bolt), and remove the mirror holder from the alignment
unit.
CAUTION
When removing the mirror holder, be careful not to
drop the mirror from the mirror holder.

(5) Remove the rear mirror and O-ring from the mirror holder, and
place them on lens cleaning paper. To simply replace the rear
mirror at this point, go to step (12).
NOTE
When cleaning or replacing a mirror, be sure to
check the states of the O-rings of the mirror holder. If
a damaged O-ring or an O-ring that has lost elasticity
is used without replacement, gas can leak. It is
recommended to replace such O-rings as early as
possible.

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B-70255EN/01 11.LASER OPTICAL SYSTEM

(6) Place the mirror with its reflecting side (the side facing the
discharge tubes) facing up. Gently blow clean air (using, for
example, a camera blower) across the mirror surface to remove
dust and dirt. Drop ethyl alcohol or lens cleaner onto the mirror
surface, moisten a cotton swab with the fluid, and gently wipe
any dirty areas.

(7) Place lens cleaning paper over the mirror, then spray ethyl
alcohol or lens cleaner over the paper and mirror.

(8) Move the lens cleaning paper horizontally to and fro across the
mirror.
NOTE
Since the lens cleaner has a high surface tension, it
may be difficult to move the cleaning paper. As the
paper is slowly moved to and fro across the mirror,
however, the ethyl alcohol will gradually evaporate.

(9) Blow clean air (using, for example, a camera blower) across the
mirror surface to completely evaporate the ethyl alcohol or lens
cleaner.

(10) Repeat steps (7) to (9) until all dirt on the mirror surface has
been removed. Finally, clean the mirror surface with ethyl
alcohol.

(11) Check the transmitting side of the mirror. If its surface is dirty,
perform steps (6) to (9) for the transmitting side also. Note that if
an excessive amount of ethyl alcohol or lens cleaner is applied, it
may flow around the back of the mirror, leading to
contamination.

(12) Wipe the mirror holder and O-ring with ethyl alcohol.

(13) Reinstall the rear mirror in the mirror holder, then insert the O-
ring. When installing the rear mirror, pay particular attention to
the mirror orientation. The reflecting plane (the plane pointed to
by the arrow marked on the side of the mirror) must face the
discharge tubes. The arrow is both scribed and marked with ink
such that, even if the ink is entirely removed it will still be
possible to find the scribed arrow. Align the arrow on the side of
the rear mirror with the mirror holder position.

(14) Mount the mirror holder by reversing steps (2) to (4). Install the
mirror holder in the alignment unit so that the mark on the mirror
holder faces down.

(15) Close the main circuit breaker or turn on the power supply of the
laser oscillator, then turn on the power to the CNC.

(16) Perform a leak check.

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11.LASER OPTICAL SYSTEM B-70255EN/01

(17) This completes cleaning and replacement.

(18) Perform discharge aging.

(19) Then, perform alignment.


CAUTION
Do not make any adjustments other than rear mirror
alignment at this time.

(20) After the rear mirror is replaced, the power input compensation
coefficient (PRM No. 15215) needs to be set again. See Section
9.6 for power input compensation coefficient setting.

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B-70255EN/01 11.LASER OPTICAL SYSTEM

11.1.3 Cleaning and Replacing the Folding Mirrors

Fig.11.1.1(a) Structure diagram of folding mirror unit: C1000iA

To clean the folding mirrors, follow the procedure given below. Since
it is necessary to touch the optical parts and vacuum parts while
cleaning the folding mirrors, wear clean gloves or finger cots. Do not
touch these parts with your bare hands.
Before starting cleaning, wipe away any foreign matter from around
the parts to be removed. If a removed part is inadvertently soiled,
wipe it clean with ethyl alcohol.

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11.LASER OPTICAL SYSTEM B-70255EN/01

Procedure
(1) Turn off the power to the CNC, then open the main circuit
breaker or turn off the power supply of the laser oscillator.

(2) Loosen the mirror holder mounting screw, and remove the mirror
holder from the folding mirror unit. To simply replace the
folding mirror at this point, go to step (11).

(3) The folding mirror is attached to its holder using vacuum grease.
It is, therefore, very difficult to remove the mirror from its holder.
Therefore, clean the folding mirror without removing it from its
holder.

(4) Place the mirror with its reflecting side facing up. Gently blow
clean air (using, for example, a camera blower) across the mirror
surface to remove dust and dirt. Drop ethyl alcohol or lens
cleaner onto the mirror surface, moisten a cotton swab with the
fluid, and gently wipe any dirty areas.

(5) Place lens cleaning paper over the mirror, then spray ethyl
alcohol or lens cleaner over the paper and mirror.

(6) Move the lens cleaning paper horizontally to and fro across the
mirror.
NOTE
Since the lens cleaner has a high surface tension, it
may be difficult to move the cleaning paper. As the
paper is slowly moved to and fro across the mirror,
however, the ethyl alcohol will gradually evaporate.

(7) Blow clean air (using, for example, a camera blower) across the
mirror surface to completely evaporate the ethyl alcohol or lens
cleaner.

(8) Repeat steps (4) to (7) until all dirt on the mirror surface has
been removed.

(9) By using a cotton swab moistened with ethyl alcohol, clean that
part of the alignment unit which touches the mirror. This is
because flakes of coating may remain in this area. If the flakes of
coating are not removed, they may cause the mirror to become
misaligned.

(10) Install the mirror holder by reversing steps (2) to (3). Insert the
holder perpendicular to the alignment unit, so that the mirrors
touch the alignment unit evenly. When tightening the fixing
screws, tighten each screw evenly.

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B-70255EN/01 11.LASER OPTICAL SYSTEM

(11) When replacing a mirror, remove the mirror from its holder.
Grease is applied to the back of the mirror. So, insert the tip of a
standard screwdriver into the hole on the mirror attachment side
to push up the mirror. At this time, do not apply an excessive
force to the mirror holder and the spring section of the mirror
holder.

(12) Apply a thin coat of vacuum grease to the rear of the new mirror.
In those cases where the reflecting side of the mirror faces down,
the mirror will fall unless grease is applied.

(13) Place the mirror in its holder and, using a dryer, blow warm air
onto the holder to warm it. This will soften the vacuum grease
and bond the mirror onto the holder. Mount the mirror holder as
explained in step (10).

(14) Turn on the main circuit breaker of the laser oscillator, then turn
on the power to the CNC.

(15) Perform a leak check.

(16) This completes cleaning and replacement.

(17) Perform discharge aging.

(18) Then, perform alignment.


CAUTION
Never adjust any part other than the cleaned or
replaced folding mirrors.

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11.LASER OPTICAL SYSTEM B-70255EN/01

11.2 ALIGNMENT OF THE RESONATOR

Fig. 11.2 Alignment adjustment points of C1000iA

The internal surfaces of the output mirror and rear mirror are concave.
For laser oscillation, the curvature centers and mirror surfaces of the
two mirrors must lie on the same axis. When this axis matches the
tube axis of the discharge tubes, in other words, when the laser beam
reflected by these mirrors passes through the center of the discharge
tubes, the output level is maximized, and symmetric beam mode and a
round section are obtained.
The theory of alignment is such that while monitoring the output
power level with a tester, you adjust the angle of each mirror to obtain
a maximum output power. Once this adjustment is made, all mirrors
are set for maximum output. So, if a mirror is misaligned, the original
state or original beam mode can be restored by adjusting the
misaligned mirror only to maximize the output power. Thus, with this
method, mode adjustment is simple, and can be performed with a
good reproducibility.

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B-70255EN/01 11.LASER OPTICAL SYSTEM

- Subsection 11.2.1 describes the procedure for adjusting all


mirrors of an oscillator not adjusted with this method, to obtain
the maximum output state. This procedure takes a rather longer
time. However, once this adjustment is made, adjustment work
required at the time of mirror cleaning can be remarkably
reduced.
- Subsection 11.2.2 describes the maximum output state
adjustment procedure required to correct an optical path shift
caused by a resonator distortion during transmission or
installation.
- Subsection 11.2.3 describes the adjustment procedure at the time
of mirror cleaning for an oscillator adjusted to the maximum
output state according to Subsection 11.2.1 or 11.2.2.
- Subsection 11.2.4 describes the method of obtaining a maximum
power.
- Subsection 11.2.5 describes burn pattern collection and beam
mode evaluation.

11.2.1 Method of Obtaining a Maximum Power by Adjusting All


Mirrors

(1) Record the adjustment screw readings of the output mirror


(O.C.), rear mirror (R.M.), and folding mirrors (F.M.).
(2) Collect a burn pattern, and use it as the start state for mode
adjustment.
Near (3m) : Hot mode and Cold mode
Far : Hot mode and Cold mode
(3) For C1000iA
FM1
Beam O.C.

FM2

FM3
R.M.
Fig.11.2.1.1(a) Mirror locations of C1000iA

1) Obtain a maximum power based on O.C. by using the R.M.


as the reference.
2) Obtain a maximum power based on FM3 by using the O.C.
as the reference.
3) Obtain a maximum power based on FM3 by using the R.M.
as the reference.
4) Collect a burn pattern. If the mode is good, end this
procedure. If not, start all over again from step 1). At this
time, collect a burn pattern in each step. If the mode is
finally good, end this procedure.

- 191 -
11.LASER OPTICAL SYSTEM B-70255EN/01

11.2.2 Alignment Procedure during Installation after Transportation

(1) Record the adjustment screw readings of the output mirror


(O.C.), rear mirror (R.M.), and folding mirrors (F.M.).

(2) Collect a burn pattern, and use it as the start state for mode
adjustment. If the mode is good, end the adjustment.
Near (3m) : Hot mode and Cold mode
Far : Hot mode and Cold mode

(3) For C1000iA


1) Obtain a maximum power based on FM3.
2) Obtain a maximum power based on FM3 by using O.C. as
the reference.
3) Obtain a maximum power based on FM3 by using R.M. as
the reference.
4) Collect a burn pattern. If the mode is good, end this
procedure. If not, proceed to step 5).
5) Obtain a maximum power based on O.C. by using R.M. as
the reference. Then, repeat this procedure starting with step
2). At this time, collect a burn pattern in each step. If the
mode is finally good, end this procedure.

11.2.3 Alignment Procedure at Mirror Cleaning Time

(1) Record the adjustment screw readings of the output mirror


(O.C.), rear mirror (R.M.), and folding mirrors (F.M.).

(2) Collect a burn pattern. This is used for checking mirror dirt. If
the mode is good, end the adjustment.
Near (3m) : Hot mode and Cold mode
Far : Hot mode and Cold mode

(3) For C1000iA


1) Clean the O.C. and R.M. mirrors.
2) Obtain a maximum power based on O.C. by using R.M. as
the reference.
3) Clean the FM1 and FM2 mirrors.
4) Obtain a maximum power based on FM3.

- 192 -
B-70255EN/01 11.LASER OPTICAL SYSTEM

11.2.4 Obtaining a Maximum Power

(1) Minimize the output power of internal discharge. If a large


output is used, the mode present when a maximum power is
obtained is not always the best mode due to thermal distortion of
each mirror. However, a capability of detecting an output
variation due to base output fluctuation, tester resolution, chiller
temperature, and so forth is required, so that duty cycle of about
15% is adequate.
(2) If the area is narrow, the output variation dependent on a shift of
the internal optical axis becomes small. So, with the C1000iA,
use the base conditions Pc = 1,000 W, Duty cycle = 15%, and
Frequency = 100 Hz, and adjust the duty cycle to determine the
actual conditions for internal discharge.
(3) Start discharge, and obtain a maximum power when the output is
stabilized after 5 minutes.
(4) Using mirrors A and B, and obtaining a maximum power based
on mirror B by using mirror A as the reference
While turning mirror A in one direction in steps of an interval of
the adjustment screw, for example, 0.5 division (5mm) or 1
division (10mm), adjust mirror B for each division, and obtain a
maximum power at each point of mirror A. From data obtained
at each point of mirror A, determine a mirror A position
representing a maximum power. Then, by aligning mirror A at
such a position, adjust mirror B to obtain a maximum power.
Two adjustment screws are provided for each mirror. So, be sure
to obtain a maximum power with one axis, then obtain a
maximum power with the other axis.
For C1000iA
For each of the X and Y axes of the folding mirror (FM), an
independent adjustment screw is not provided. So, to make
adjustments in the X and Y directions, obtain a maximum power
by using corresponding adjustment screws.
(5) Method of output power measurement
An output power can be viewed by connecting a tester to the
relay PCB. A voltage signal proportional to a power is output.
See Section 8.2.

- 193 -
11.LASER OPTICAL SYSTEM B-70255EN/01

11.2.5 Burn pattern Collection and Beam Mode Evaluation

(1) For information about burn pattern collection, see Section 4.3(8).

(2) In the automatic operation mode, execute the program below to


emit a laser beam to an acrylic block.
[Example of program : C1000iA]
G32 P1 Q1;
G24 S1000 Q100 R4.0;
G32 P0;
M30;
In the program above, S represents an output (W), R represents a
time (seconds). Depending on the oscillator, rewrite the program.
Be sure to enter a decimal point when specifying R.

(3) For determination of whether a beam mode is good, see Section


4.3(8).

- 194 -
B-70255EN/01 11.LASER OPTICAL SYSTEM

5 15
Initial setting of A = 7.590
10
5

Power
Clockwise B is adjusted to obtain a maximum power.

(1) (4) (5)


(2)

Same state as 1
(3)
In 3, the power is decreased,
indicating that the direction is wrong.
A maximum power is obtained based on B. So, in 5, the adjustment screw is
returned to the original position.
A=7.580 A=7.570 A=7.590
Power B is adjusted to obtain a maximum power.
Counterclockwise

(7) (8)
(6) (9)
(1) (10)

A=7.590

A maximum power is obtained based on B.

A=7.580 A=7.610 A=7.620 A=7.630 A=7.640

Do not determine the maximum power position of A at the actual maximum power point (peak point).

Instead, find the first position (1)' with the same power after a peak, and set a position halfway between (1)
and (1)'. Adjust B to obtain a maximum power at that position.

Power Maximum power position of A

= (7.590+7.638) / 2

= 7.614
(7) (8) (1’)
(9)
(6)
(1)
(10)

A=7.590 A=7.650
A=7.614 A=7.638

- 195 -
11.LASER OPTICAL SYSTEM B-70255EN/01

11.3 ALIGNMENT OF THE GUIDE LASER

Fig.11.3

Make an adjustment so that the center of the CO2 laser beam is


aligned with the center of the laser diode beam.
(1) Attach an acrylic plate approximately 3 to 10 m from the outlet
of the laser oscillator, and obtain a burn pattern for the CO2 laser
beam (one shot, rated output, CW 100%, 0.1-second duration).
Do not attempt to touch the plate immediately after the pattern
has been obtained.
(2) By turning the X-axis and Y-axis adjustment screws, align the
semiconductor laser beam with the center of the burn pattern
obtained in step (1).When using the A04B-0811-D401 (laser
diode unit), turn the adjustment screws using a 2-mm hexagon
wrench.
(3) Compare the optical axis of the semiconductor laser beam with
the burn pattern of the CO2 laser beam, obtained approximately 1
m from the laser oscillator outlet. If the difference between the
two beam centers is within ±2 mm, the optical axis adjustment
can be regarded as being successful.
(4) If an optical axis mismatch is detected in step (3), adjust the
optical axis of the semiconductor laser beam by moving the plate
and stage of the semiconductor laser unit. Then, repeat the
adjustment procedure from step (2).

- 196 -
APPENDIX
B-70255EN/01 APPENDIX A.EXTERNAL VIEW OF LASER OSCILLATOR

A EXTERNAL VIEW OF LASER


OSCILLATOR

Fig. A EXTERNAL VIEW OF LASER OSCILLATOR

- 199 -
B.SPECIFICATIONS APPENDIX B-70255EN/01

B Item
SPECIFICATIONS
Contents
Type FANUC LASER MODEL-C1000iA
High-speed axial carbon dioxide gas laser by high-frequency discharge
Method
excitation
Structure Combination resonator/power supply type (separate exhaust pump)
Rated laser output 1,000 W
Maximum laser output 1,000 W (continuously variable output range of 100 W or greater)
Pulse peak value 1,000 W
Output stability ±1% (for 8-hour rated output under output feedback control)
Laser wavelength 10.6mm
Beam mode Low-order mode
Beam diameter(at oscillator outlet) Approximately f20 mm or less
Polarization 45° polarization
Angle of beam divergence(full angle) 2 mrad or less
Pulse output command frequency 5 to 2,000 Hz
Pulse output command duty factor 0 to 100%
Mixture of CO2:He:N2 = 5:40:55% (volume ratio with N2 balance)
Composition
with a composition ratio accuracy of ±5%.
Laser gas
Gas pressure 0.175±0.025 MPa (0.15 to 0.20 MPa) measured on a gauge
Consumption About 10 liters/h
Amount 40 liters/min or more
Temperature /
20°C to 30°C/±1°C (for laser output stability of ±1%)
Temperature stability
Cooling water
Circulating water pressure 0.5MPa or less on a gauge
Recommended cooling
11 kW or more
capacity of chiller unit
200VAC +10%, -15% 50/60 Hz±1Hz
Power requirements
or 220VAC +10%, -15% 60 Hz±1Hz
Required input power 18 kVA
Maximum current 60 A
Hour meter Total operation hours of the exhaust pump
Door interlock No
Warning lamp Blinks while discharge is in progress.
Main oscillator unit: About 350 kg
Weight
Exhaust pump unit: About 30 kg

- 200 -
B-70255EN/01 APPENDIX C.ERROR CODE LIST

C ERROR CODE LIST

Number Contents Alarm level


4061 A/D CONVERTER-1 ALARM 1
4062 A/D CONVERTER-2 ALARM 1
4063 RF POWER SUPPLY ALARM 2
4065 SHUTTER ACTION ALARM 2
4066 DISCHARGING ALARM 2
4067 LASER CABINET OH ALARM 1
4068 BEAM REFLECTION The shutter is closed and the beam is off in the LSTR state.
4069 LASER IF PCB ALARM 1
4070 CHILLER NOT READY ALARM 1
4071 ASSIST GAS NOT READY The shutter is closed and the beam is off in the LSTR state.
4072 CHILL FLOW ALARM 1
4073 LASER GAS PRES. ALARM 1
4075 CHILL TEMP. ALARM 1
4076 LASER POWER DOWN ALARM 1
4077 ABSORBER TEMP. ALARM 1
4078 LASER TUBE PRES. ALARM 1
4079 PUSH RESET KEY ALARM 2
4080 LASER TUBE EXHAUST ALARM 1
4081 GAS PRES. CONTROL ALARM 1
4082 TUBE PRES.SENSOR ALARM 1
4085 MIRROR CLEANING A warning is output. A warning can be released by a reset.
4087 SHUTTER OH ALARM 2
4088 LASER VOLTAGE DOWN ALARM 1
4089 ASSIST GAS NO SELECT The shutter is closed and the beam is off in the LSTR state.
4090 LASER NOT GENERATE
4094 VANE PUMP ALARM 1
4099 GAS PRES.NOT REACH ALARM 1
4100 INVETER1 ALARM 1
4101 OUT OF FREQUENCY 1 ALARM 1
4105 TURBO TEMP. 1 ALARM 1
4106 BLOWER OIL SHORTAGE ALARM 1
4107 MIRROR NOT INSTALLED ALARM 2
4132 PARAMETER WAS CHANGED ALARM 2

- 201 -
C.ERROR CODE LIST APPENDIX B-70255EN/01

PURGE : Completion state

RESET ALARM?

MONITOR RUN ON

LRDY : Discharge ready state

ALARM
MONITOR RESET ALARM?
1

ALARM HV ON
MONITOR
MONITOR
2

LSTR : Discharge ready


/TREAT
Fig.C Alarm treatment of C1000iA

- 202 -
B-70255EN/01 APPENDIX D.PARAMTER LIST

D PARAMETER LIST
This appendix describes the parameters for the Series 16i-L.
Many parameters depend on the laser oscillator model and unit.
Check the parameter list in the data sheet supplied with each unit,
then set parameters.

- 203 -
D.PARAMTER LIST APPENDIX B-70255EN/01

D.1 PARAMETERS FOR ENABLING/DISABLING VARIOUS


FUNCTIONS

#7 #6 #5 #4 #3 #2 #1 #0
15000 FLT CLB BMO AGA LGC LPC

Data type: Bit


LPC Power control function
0: Invalid (standard)
1: Valid
LGC Two stage gain selection of intra-tube pressure control
0: Invalid
1: Valid (standard)
(When this bit is 1, PRM No. 15245 becomes valid.)
AGA Assist gas preparation check with beam on
0: Valid (standard)
1: Invalid (for maintenance)
BMO Beam on only with beam off
0: Invalid (standard)
1: Valid (for manual only and maintenance)
CLB Power compensation
0: Disabled
1: Enabled (standard)
FLT Filter in power control
0: Invalid
1: Valid (standard)

#7 #6 #5 #4 #3 #2 #1 #0
15001 LHC PC8 NGC PES G0B EXA

Data type: Bit


EXA Selection of assist gas
0: 3 types (standard)
1: 7 types
G0B When G00 is specified, a beam
0: Outputs (standard).
1: Does not output.
PES Piercing time during machine lock or dry run
0: Enabled (standard)
1: Disabled
NGC
0: Presets an integral gas pressure control value.
1: Does not preset an integral gas pressure control value.
PC8 The power compensation function
0: Specifies a fixed value for the power.
1: Increases the power in eight levels.

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B-70255EN/01 APPENDIX D.PARAMTER LIST

LHC
0: Does not control the oscillator with external signals (standard).
1: Controls the oscillator with external signals.
In the automatic operation mode, external signals are used to
turn on and off the shutter and beam output.

#7 #6 #5 #4 #3 #2 #1 #0
15002 PSH ADC BMA

Data type: Bit


BMA
0: Disables beam output with the shutter closed in the automatic
operation mode (standard).
1: Enables beam output with the shutter closed in the automatic
operation mode (for maintenance).
ADC
0: Uses the select signal to determine AD converter 2 data.
1: the DI signal to determine AD converter 2 data. (standard)
PSH
0: Uses all discharge tubes.
1: Uses half of the discharge tubes.

#7 #6 #5 #4 #3 #2 #1 #0
15003 GVW HPT TIV

Data type: Bit


TIV
0: Inverts the sign (+/-) of the amount of tracing displacement.
1: Does not invert the sign (+/-) of the amount of tracing
displacement.
HPT
0: Rewrites parameter settings for extending or shortening piercing.
1: Does not rewrite parameter settings for extending or shortening
piercing.
GVW
0: Disables evacuation when RUN is turned off.
1: Enables evacuation when RUN is turned off.

#7 #6 #5 #4 #3 #2 #1 #0
15004 CWY ECH EDG SPB STC AGC

Data type: Bit


AGC
0: Uses the "G32 P_;" command (when Q, T, and R are not
specified) as the flow pattern command.
1: Uses the "G32 P_;" command (when Q, T, and R are not
specified) as the gas pressure control direct command.
STC
0: Controls the shutter with a G code.
1: Controls the shutter with an external signal.

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D.PARAMTER LIST APPENDIX B-70255EN/01

SPB
0: Outputs a beam in skip operation.
1: Outputs no beam in skip operation.
EDG
0: Turns the beam off when switching the assist gas during edge
machining.
1: Does not turn the beam off when switching the assist gas during
edge machining.
ECH
0: Does not clear the active E number upon reset.
1: Clears the active E number upon reset.
CWY
0: A CO2 laser oscillator is used.
1: A CW-YAG laser oscillator is used.

#7 #6 #5 #4 #3 #2 #1 #0
15005 DLY ITR GNS BPV TTD INB

Data type: Bit


INB
0: Stops beam output upon completion of pulse distribution.
1: Stops beam output upon completion of in-position check.
TTD
0: Each laser power supply drives only one discharge tube.
1: Each laser power supply drives two discharge tubes.
BPV
0: Opens the bypass valve during power calibration.
1: Closes the bypass valve during power calibration.
GNS
0: Stops the assist gas output during assist gas switching by the
assist gas direct command. (standard)
1: Does not stop assist gas output during assist gas switching by the
assist gas direct command.
ITR
0: Disables the tracing control interlock signal (G227#6 *TRIL).
1: Enables the tracing control interlock signal (G227#6 *TRIL).
DLY
0: Disables the beam output condition delay function.
1: Enables the beam output condition delay function.

#7 #6 #5 #4 #3 #2 #1 #0
15006 PCN PCL PIN TRM NCC

Data type: Bit


NCC
0: Displays the processing condition setting screen.
1: Does not display the processing condition setting screen.

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B-70255EN/01 APPENDIX D.PARAMTER LIST

TRM
0: Enables the zero-point, start-point and end-point soft keys for the
trace setting screen.
1: Disables the zero-point, start-point and end-point soft keys for
the trace setting screen.
PIN
0: Specifies a G13 address P using metric input.
1: Specifies a G13 address P using inch input.
PCL
0: On-screen pressure display of assist gas in kg/cm2.
1: On-screen pressure display of assist gas in MPa.
PCN
0: Rewrites the power compensation factor with 1024 when power
compensation is not performed.
1: Does not rewrite the power compensation factor and retains the
previous value when power compensation is not performed.

#7 #6 #5 #4 #3 #2 #1 #0
15007 STO XSC ECK ESE

Data type: Bit


ESE
0: After completion of distribution, executes piercing during edge
machining.
1: After completion of distribution, checks the smoothing errors,
then executes piercing during edge machining.
ECK
0: Determines the angle on the actual processing path during edge
machining.
1: Determines the angle on the path in the machining program
during edge machining.
XSC
0: Does not operate the edge machining function in the exact stop
mode.
1: Operates the edge machining function in the exact stop mode.
STO
0: Does not execute the after-flow and pre-flow when the assist gas
command is issued with the same type and same flow pattern.
1: Executes the after-flow and pre-flow when the assist gas
command is issued with the same type and same flow pattern.

- 207 -
D.PARAMTER LIST APPENDIX B-70255EN/01

#7 #6 #5 #4 #3 #2 #1 #0
15008 RMP EGE DCW SOC TAL GPC MST

Data type: Bit


MST
0: When a reference displacement amount is specified with a plus
sign (+) in the trace command, the nozzle approaches the
workpiece. When a reference displacement amount is specified
with a minus sign (-), the nozzle moves away from the
workpiece.
1: When a reference displacement amount is specified with a plus
sign (+) in the trace command, the nozzle moves away from the
workpiece. When a reference displacement amount is specified
with a minus sign (-), the nozzle approaches the workpiece.
GPC
0: Exercises tracing control according to the reference
displacement amount.
1: Exercises tracing control according to the gap amount (distance
between the nozzle and workpiece).
TAL
0: Invalidates the "out-of-tracing-range alarm" when the trace
check mode signal (G225#2 TRCKM) is set to "1."
1: Invalidates both of the "out-of-tracing-range alarm" and "excess
tracing displacement alarm" when the trace check mode signal
(G225#2 TRCKM) is set to "1."
SOC
0: Uses the reference displacement amount for piercing as that for
tracing control not during processing when the processing
condition setting function is used.
1: Uses the reference displacement amount for piercing as that for
tracing control only during piercing when the processing
condition setting function is used.
DCW
0: Does not display the DCV, DCI, and DCW values on the
diagnostic display.
1: Displays the DCV, DCI, and DCW values on the diagnostic
display.
EGE
0: Disables the automatic aging function.
1: Enables the automatic aging function.
RMP
0: The step function uses only the up/down step distances to
measure the travel distance.
1: The step function uses the up/down step distances and feedrate
setting to measure the travel distance.

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B-70255EN/01 APPENDIX D.PARAMTER LIST

#7 #6 #5 #4 #3 #2 #1 #0
15009 TEM BCG BEM AFZ BS2 BS1 AS2 AS1

Data type: Bit


AS1,AS2,BS1,BS2 Parameters for the laser gas mixing function.
This function stores and monitors the operating status of the mixer.
These parameters need not be set manually because they are
automatically set.
AS2,AS1 Indicates the status of tank A.

AS2 AS1 Status


0 0 Filling gases in tank A
0 1 Mixing gases in tank A
1 0 Supplying gases in tank A
1 1 Setup for filling gases in tank A in progress

BS2 BS1 Status


0 0 Filling gases in tank B
0 1 Mixing gases in tank B
1 0 Supplying gases in tank B
1 1 Setup for filling gases in tank B in progress

AFZ
1: Does not include the Z-axis in calculation for actual cutting
feedrate display.
0: Includes the Z-axis in calculation for actual cutting feedrate
display.
BEM
1: The supply pressure of the three-gas cylinder is normal.
0: The supply pressure of the three-gas cylinder is low.
BCG
1: The three-gas cylinder is not replaced.
0: The three-gas cylinder is replaced.
TEM
1: The tank supply pressure is normal.
0: The tank supply pressure is low.

#7 #6 #5 #4 #3 #2 #1 #0
15010 OVE TRG

Data type: Bit


TRG
0: Disables the trigger pulse command control function.
1: Enables the trigger pulse command control function.
OVE
0: Does not allow edge machining and feedrate clamp based on arc
radius to be used together.
1: Allows edge machining and feedrate clamp based on arc radius
to be used together.

- 209 -
D.PARAMTER LIST APPENDIX B-70255EN/01

#7 #6 #5 #4 #3 #2 #1 #0
15011 OPV CSC LVE EDS

Data type: Bit


EDS
0: Uses the conventional conditions as the cutting conditions during
execution of edge machining or start-up processing for a return.
1: Uses the piercing operating conditions in edge machining for the
laser power, assist gas type, and assist gas pressure as cutting
conditions during execution of edge machining or start-up
processing for a return.
LVE
0: Performs assist gas switching according to the conventional
specifications at the start of edge machining and at the start of
cutting for the return distance after that.
1: Ignores the time setting when the gas type and pressure do not
change for assist gas switching at the start of edge machining
and at the start of cutting for the return distance after that.
CSC When the following four values, S, P, Q, and F, are concurrently
specified in the first G01, G02, or G03 block following G24 in the
start-up processing mode,
0: Executes conventional start-up processing without using the
specified S, P, Q, and F values.
1: Cancels operation of start-up processing and performs cutting
using the specified S, P, Q, and F values.
OPV
0: The external piping exhaust valve operates only once after
power-on.
1: The external piping exhaust valve always operates when RUN is
turned on.

- 210 -
B-70255EN/01 APPENDIX D.PARAMTER LIST

D.2 PARAMETERS FOR DISCHARGE TUBE SELECTION

#7 #6 #5 #4 #3 #2 #1 #0
15025 PS8 PS7 PS6 PS5 PS4 PS3 PS2 PS1
15026 PS16 PS15 PS14 PS13 PS12 PS11 PS10 PS9

Data type: Bit


PS1 to PS16 Discharge tube selection when half of the discharge tubes are used
Set the bit for each discharge tube to be used to 1, and set the other
bits to 0.

NOTE
Parameter No. 15026 is provided for future addition of
discharge tubes. In the current specifications, this
parameter is not used. Set all bits to 0.

#7 #6 #5 #4 #3 #2 #1 #0
15027 PS8 PS7 PS6 PS5 PS4 PS3 PS2 PS1
15028 PS16 PS15 PS14 PS13 PS12 PS11 PS10 PS9

Data type: Bit


PS1 to PS16 Discharge tube selection when all discharge tubes are used
Set the bit for each discharge tube to be used to 1, and set the other
bits to 0.

NOTE
Parameter No. 15028 is provided for future addition of
discharge tubes. In the current specifications, this
parameter is not used. Set all bits to 0.

- 211 -
D.PARAMTER LIST APPENDIX B-70255EN/01

D.3 PARAMETERS FOR CONTOURING CONDITIONS

15040 Power output setting

Data type: Word


Unit of data: W
Range of data: 0 to 7000

15041 Pulse frequency setting

Data type: Word


Unit of data: Hz
Range of data: 5 to 2000

15042 Pulse duty ratio setting

Data type: Word


Unit of data: %%
Range of data: 0 to 100

- 212 -
B-70255EN/01 APPENDIX D.PARAMTER LIST

D.4 PARAMETERS FOR EDGE MACHINING CONDITIONS

15050 Edge detection angle

Data type: Word


Unit of data: deg
Range of data: 0 to 180
A corner is assumed to be present when the angle formed by two
blocks is smaller than the specified angle.

15051 Peak piercing power value

Data type: Word


Unit of data: W
Range of data: 0 to 7000
Set a peak power value for piercing to be performed at the top of a
corner.

15052 Piercing pulse frequency

Data type: Word


Unit of data: Hz
Range of data: 5 to 2000
Set a pulse frequency for piercing to be performed at the top of a
corner.

15053 Piercing pulse duty ratio

Data type: Word


Unit of data: %
Range of data: 0 to 100
Set a pulse duty ratio for piercing to be performed at the top of a
corner.

15054 Piercing time

Data type: Two-word


Unit of data: msec
Range of data: 0 to 99999999
Set a piercing time used for piercing to be performed at the top of a
corner.

15055 Piercing assist gas pressure

Data type: Word


Unit of data: 0.01Mpa or 0.1 kg/cm2
Range of data: 0 to 255
Set an assist gas pressure for piercing to be performed at the top of a
corner.

- 213 -
D.PARAMTER LIST APPENDIX B-70255EN/01

15056 Type of piercing assist gas

Data type: Word


Unit of data:
Range of data: 0 to 7
Set a type of assist gas to be used for piercing.

15057 Return distance

Data type: Two-word


Unit of data:
Setting range IS-A IS-B IS-C Unit
Metric input 0.01 0.001 0.0001 mm
Inch input 0.001 0.0001 0.00001 inch
Range of data: 0 to 65000
Set a return distance from the top of a corner to the next block.

15058 Return feedrate

Data type: Word


Unit of data: mm/min
Range of data: 0 to 9999
Set a return feedrate to be used for movement from the top of a corner
to the next block.

15059 Peak return power value

Data type: Word


Unit of data: W
Range of data: 0 to 7000
Set a peak return power value to be used for movement from the top
of a corner to the next block.

15060 Return frequency

Data type: Word


Unit of data: Hz
Range of data: 5 to 2000
Set a return frequency to be used for movement from the top of a
corner to the next block.

15061 Return duty ratio

Data type: Word


Unit of data: %
Range of data: 0 to 100
Set a return duty ratio to be applied to movement from the top of a
corner to the next block.

- 214 -
B-70255EN/01 APPENDIX D.PARAMTER LIST

D.5 PARAMETERS FOR PIERCING CONDITIONS

15080 Piercing power

Data type: Word


Unit of data: W
Range of data: 0 to 7000
Set the piercing power.

15081 Initial piercing frequency

Data type: Word


Unit of data: Hz
Range of data: 5 to 2000
Set the initial piercing frequency.

15082 Incremental piercing frequency

Data type: Word


Unit of data: Hz
Range of data: 0 to 2000
Set the incremental piercing frequency.

15083 Initial piercing duty ratio

Data type: Byte


Unit of data: %
Range of data: 0 to 100
Set the initial piercing duty ratio.

15084 Incremental piercing duty ratio

Data type: Byte


Unit of data: %
Range of data: 0 to 100
Set the incremental piercing duty ratio.

15085 piercing step time

Data type: Word


Unit of data: msec
Range of data: 0 to 32767
Set the piercing step time.

- 215 -
D.PARAMTER LIST APPENDIX B-70255EN/01

15086 Number of piercing steps

Data type: Word


Unit of data:
Range of data: 0 to 32767
Set the number of piercing steps

15087 Piercing end time

Data type: Two-word


Unit of data: msec
Range of data: 0 to 99999999
Set the piercing end time

- 216 -
B-70255EN/01 APPENDIX D.PARAMTER LIST

D.6 PARAMETERS FOR POWER CONTROL

#7 #6 #5 #4 #3 #2 #1 #0
15089 LP8 LP7 LP6 LP5 LP4 LPZ LPY LPX

Data type: Bit


LP*
0: Does not use the *-axis for speed calculation for the power
control function.
1: Uses the *-axis for speed calculation for the power control
function.
If no bit is specified, the power control function operates, assuming
the first axis (LPX) and second axis (LPY) to be specified.
Ordinarily, specify each axis to be used for interpolation. Do not
specify a synchronously controlled axis for simple synchronous
control or PMC axis.

15090 Minimum output power

Data type: Word


Unit of data: W
Range of data: 0 to 7000

15091 Minimum pulse frequency

Data type: Word


Unit of data: Hz
Range of data: 5 to 2000

15092 Minimum pulse duty ratio

Data type: Word


Unit of data: %
Range of data: 0 to 100
Set the minimum pulse duty ratio.

15093 Power control constant

Data type: Word


Unit of data: %
Range of data: 0 to 100
Set the power control constant.

15094 Power control filter time constant

Data type: Word


Unit of data: msec
Range of data: 0 to 32767
Set the power control filter time constant.

- 217 -
D.PARAMTER LIST APPENDIX B-70255EN/01

15095 Allowable variation in power control speed

Data type: Byte


Unit of data: mm/min (specified increment for B8F1-08 or earlier) or %
Range of data: 0 to 255
Standard setting: 4
Set the amount by which the power control speed is allowed to vary.
This parameter is valid when parameter No. 15450 is set to 0.
To set a value of 256 or greater, use parameter No. 15450.
Set this parameter according to the setting of bit 6 of parameter No.
15096 (SDB) as follows.

#7 #6 #5 #4 #3 #2 #1 #0
15096 EGM PCD PCF PCP

Data type: Bit


PCP
0: Does not control the output according to the feedrate in power
control.
1: Controls the output according to the feedrate in power control.
PCF
0: Does not control the frequency according to the feedrate in
power control.
1: Controls the frequency according to the feedrate in power
control.
PCD
0: Does not control the duty ratio according to the feedrate in
power control.
1: Controls the duty ratio according to the feedrate in power
control.
EGM
0: Cancels the power control mode in the edge machining or start-
up processing mode.
1: Stops power control only during return distance movement in the
edge machining or start-up processing mode.
In the edge machining or start-up processing mode, the E number for
specifying conditions for edge machining or start-up processing is
selected.

15097 Parameter for calculating the displacement of the output


(output at a speed of F = 0)

Data type: Word


Unit of data: W
Range of data: 0 to 7000

- 218 -
B-70255EN/01 APPENDIX D.PARAMTER LIST

15098 Parameter for calculating the displacement of the frequency


(frequency at a speed of F = 0)

Data type: Word


Unit of data: Hz
Range of data: 5 to 2000

15099 Parameter for calculating the displacement of the duty ratio


(duty ratio at a speed of F = 0)

Data type: Word


Unit of data: %
Range of data: 0 to 100

- 219 -
D.PARAMTER LIST APPENDIX B-70255EN/01

D.7 PARAMETERS FOR ASSIST GAS PRESSURE AND TIME


SETTING

15100 Selection of assist gas

Data type: Word


Unit of data:
Range of data: 0 to 7
Select a type of assist gas.

15101 Selection of flow pattern

Data type: Word


Unit of data:
Range of data: 1 to 3
Select a assist gas flow pattern.

15102 Pre-flow time 1

15103 Pre-flow time 2

15104 Pre-flow time 3

Data type: Word


Unit of data: 10msec
Range of data: 0 to 32767
Set the assist gas pre-flow time.

15108 After-flow time 1

15109 After-flow time 2

15110 After-flow time 3

Data type: Word


Unit of data: 10msec
Range of data: 0 to 32767
Set the assist gas after-flow time.

- 220 -
B-70255EN/01 APPENDIX D.PARAMTER LIST

15114 Pre-flow pressure 1

15115 Pre-flow pressure 2

15116 Pre-flow pressure 3

Data type: Word


Unit of data: 0.01Mpa or 0.1 kg/cm2
Range of data: 0 to 255
Set the assist gas pre-flow pressure.

15120 Processing flow pressure 1

15121 Processing flow pressure 2

15122 Processing flow pressure 3

Data type: Word


Unit of data: 0.01Mpa or 0.1 kg/cm2
Range of data: 0 to 255
Set the assist gas processing flow pressure.

15126 After flow pressure 1

15127 After flow pressure 2

15128 After flow pressure 3

Data type: Word


Unit of data: 0.01Mpa or 0.1 kg/cm2
Range of data: 0 to 255
Set the assist gas after-flow pressure.

15132 Maximum assist gas pressure

Data type: Word


Unit of data: 0.01Mpa or 0.1 kg/cm2
Range of data: 0 to 255
Set an assist gas pressure (kg/cm2 (Mpa)) at which 10V is output in
analog output.

15135 Assist gas pressure set time

Data type: Word


Unit of data: 10msec
Range of data: 0 to 32767
Set a desired assist gas pressure set time.

- 221 -
D.PARAMTER LIST APPENDIX B-70255EN/01

15136 Assist gas pressure

Data type: Word


Unit of data: 0.01Mpa or 0.1 kg/cm2
Range of data: 0 to 255
Set a desired assist gas pressure.

15137 Assist gas pressure set time for piercing

Data type: Word


Unit of data: 10msec
Range of data: 0 to 32767
Set a desired assist gas pressure set time for piercing.

15138 Assist gas pressure for piercing

Data type: Word


Unit of data: 0.01Mpa or 0.1 kg/cm2
Range of data: 0 to 255
Set a desired assist gas pressure for piercing.

15139 Assist gas stop time

Data type: Word


Unit of data: 10msec
Range of data: 0 to 32767
Set the wait time when the assist gas stops.

- 222 -
B-70255EN/01 APPENDIX D.PARAMTER LIST

D.8 PARAMETERS FOR LASER MAINTENANCE TIMING


INDICATION FUNCTIONS

15150 Laser RUN ON time

Data type: Two-word


Unit of data: 0.1hour
Range of data: 0 to 99999999
A cumulative RUN ON time is automatically set.

15151 Vacuum pump operation time

Data type: Two-word


Unit of data: 0.1hour
Range of data: 0 to 99999999
A cumulative vacuum pump operation time is automatically set.

15152 Shutter alarm mask time

Data type: Word


Unit of data: msec
Range of data: 0 to 32767
Set a time from when shutter operation is directed until shutter alarm
monitoring starts.

#7 #6 #5 #4 #3 #2 #1 #0
15153 LCK

Data type: Bit


LCK
0: Disables the leakage check function.
1: Enables the leakage check function.

15154 Leakage judgment time

Data type: Word


Unit of data: sec
Range of data: 3 to 65535
Set the time during which the valve is closed and the internal pressure
of a discharge tube is kept for leakage check. The internal pressure of
a discharge tube is measured four times within the specified time. If a
value of 0 to 2 is set, the leakage check function does not operate.

- 223 -
D.PARAMTER LIST APPENDIX B-70255EN/01

#7 #6 #5 #4 #3 #2 #1 #0
15160 MDS MNT

Data type: Bit


MNT
0: Does not display the laser maintenance screen.
1: Displays the laser maintenance screen.
When the value indicating that the laser maintenance screen is not
displayed is specified, the compensation factor is also stored and the
cumulative operating time is also set. You can display the laser
maintenance screen to check the data when required.
MDS
0: Disables data input on the laser maintenance screen.
1: Enables data input on the laser maintenance screen.
Data input on the laser maintenance screen is disabled to prevent the
end user from entering data such as the operating time unintentionally.
(The data can only be referenced.)
Setting this parameter to 1 enables data input.

- 224 -
B-70255EN/01 APPENDIX D.PARAMTER LIST

D.9 PARAMETERS FOR THE OSCILLATOR

15200 Power used for power compensation factor determination when half of the
discharge tubes are used

Data type: Word


Unit of data: W
Range of data: 0 to 32767
Set a power to find the power compensation factor when half of the
discharge tubes are used.

15201 Power used for power compensation factor determination when all
discharge tubes are used

Data type: Word


Unit of data: W
Range of data: 0 to 32767
Set a power to find the power compensation factor when all discharge
tubes are used.

15203 Power calibration limit

Data type: Word


Unit of data:
Range of data: 0 to 32767
If the power compensation factor exceeds this value, the low output
alarm signal (F220#6 MWRN) is output to notify the user of the time
to clean or replace the mirror.

15204 Power calibration coefficient

Data type: Word


Unit of data:
Range of data: 0 to 32767
This is to calibrate command power for real power. This parameter is
automatically set at power compensation after the oscillator start
signal (G222#6 RUN) is turned on.

15205 Power compensation time

Data type: Word


Unit of data: sec
Range of data: 0 to 32767
Set a power compensation time.

- 225 -
D.PARAMTER LIST APPENDIX B-70255EN/01

15206 Time constant for the power sensor input filter

Data type: Word


Unit of data: msec
Range of data: 8 to 32767
This time constant is used when the laser power monitor value input
from the power sensor is multiplied by the primary delay filter.

15207 Maximum specifiable power

Data type: Word


Unit of data: W
Range of data: 0 to 32767
If the power setting after power compensation or power feedback
addition exceeds this value, the power output is clamped to this value.

15208 Laser power feedback gain

Data type: Word


Unit of data:
Range of data: 0 to 32767
Set the laser power feedback gain.

15209 Power feedback clamp

Data type: Word


Unit of data:
Range of data: 0 to 32767
This clamp value is used to prevent the excess power setting from
being made during power feedback.

15210 Maximum command power

Data type: Word


Unit of data: W
Range of data: 0 to 7000
This is power clamp when power command is greater than this value.

15211 Minimum command power

Data type: Word


Unit of data: W
Range of data: 0 to 7000
This is power clamp when power command is smaller than this value.

- 226 -
B-70255EN/01 APPENDIX D.PARAMTER LIST

15212 Maximum specifiable power when the duty ratio is not clamped

Data type: Word


Unit of data: W
Range of data: 0 to 32767
If PRM No. 15213 does not clamp the duty ratio to 50%, and a
specified power after power compensation and power feedback
processing exceeds the setting in this parameter, the power is clamped
to the setting.
If a value of 0 is set, the setting of parameter No. 15207 is set.

15213 Duty ratio clamp criterion

Data type: Word


Unit of data: W
Range of data: 0 to 7000
When a specified power multiplied by an override value exceeds the
value set in this parameter, the duty ratio is clamped to 50% (fixed
value), and the peak value is clamped to the value set in PRM No.
15210.0, the setting of parameter No. 15210 is set.

15214 Maximum setting for the CW-YAG laser frequency

Data type: Word


Unit of data: Hz
Range of data: 0 to 32767
For a CW-YAG laser oscillator, the frequency setting is clamped to
this value.

15215 Power input calibration coefficient

Data type: Word


Unit of data: W
Range of data: 102 (0.1´210) to 10240 (10´210)
(If 0 is specified, 1024 (10´210) is assumed.)
Set the power input compensation factor.

15216 Power display filter time constant

Data type: Word


Unit of data: msec
Range of data: 0 to 32767
This is the filter time constant with which fluctuation in power
display is suppressed.

- 227 -
D.PARAMTER LIST APPENDIX B-70255EN/01

15217 Beam stop delay time

Data type: Word


Unit of data: msec
Range of data: 0 to 32767
Set the time between the in-position check and stop of the beam.

15218 Maximum setting for the CW-YAG duty clamp output

Data type: Word


Unit of data: W
Range of data: 0 to 32767
If the specified laser output, Pc, for a CW-YAG laser exceeds this
PRM .15218
setting, the duty limit is clamped to ´ 100 (%) .
Pc
If a value of 0 is set, 500 W is assumed.

15219 Beam output condition delay time

Data type: Byte


Unit of data: 8msec
Range of data: 0 to 8

- 228 -
B-70255EN/01 APPENDIX D.PARAMTER LIST

D.10 PARAMETERS FOR DISCHARGE

15220 Maximum bias command at discharge start

Data type: Word


Unit of data: mV
Range of data: 0 to 32767
Set the maximum bias setting at the start of discharge.

15221 Voltage for conforming discharge

Data type: Word


Unit of data: V
Range of data: 0 to 32767
Set the discharge starting voltage.

15222 Discharge waiting time

Data type: Word


Unit of data: 10msec
Range of data: 0 to 32767
Specifies the waiting time until the discharge is checked after the
maximum bias setting is specified at the start of discharge.

15223 Bias command

Data type: Word


Unit of data: mV
Range of data: 0 to 32767
Specify the bias setting.

15224 Modulation voltage

Data type: Word


Unit of data: mV
Range of data: 0 to 3000
Set the voltage to which the normal bias value is lowered during
modulation by the base modulation function.

15225 Modulation time

Data type: Word


Unit of data: 10msec
Range of data: 0 to 32767
Set the time during which the bias setting is lowered.

- 229 -
D.PARAMTER LIST APPENDIX B-70255EN/01

D.11 PARAMETERS FOR GAS CONTROL (1)

15240 Negative pressure in exhaust completion

Data type: Word


Unit of data: (1=13Pa)
Range This pressure is used for evacuating the discharge tubes in
laser start-up sequence.

15241 Intra-tube pressure in discharge start

Data type: Word


Unit of data: (1=13Pa)
Range of data: 0 to 32767
Internal gas pressure of the discharge tubes at the start of discharge

15242 Tube pressure for oscillation (50Hz)

Data type: Word


Unit of data: (1=13Pa)
Range of data: 0 to 32767
Internal gas pressure of the discharge tubes during laser oscillation.
(at 50 Hz)

15243 Tube pressure for oscillation (60Hz)

Data type: Word


Unit of data: (1=13Pa)
Range of data: 0 to 32767
Internal gas pressure of the discharge tubes during laser oscillation.
(at 60 Hz)

15244 Gas pressure control gain

Data type: Word


Unit of data:
Range of data: 0 to 32767
This is the gain to feedback control the intra-tube laser gas pressure.

15245 Intratube pressure control gain 2

Data type: Word


Unit of data:
Range of data: 0 to 32767
Set the gas pressure control gain during base discharge.
When bit 1 of parameter No.15000 is 1, this parameter is valid.

- 230 -
B-70255EN/01 APPENDIX D.PARAMTER LIST

15246 Pressure control integration gain

Data type: Word


Unit of data:
Range of data: 0 to 32767
This is feedback integration gain for gas pressure control.

15247 Pressure control integral element preset value

Data type: Word


Unit of data:
Range of data: -32768 to 32767
Integral element preset value for gas pressure control

15248 Allowable gas pressure insufficiency

Data type: Word


Unit of data: (1=13Pa)
Range of data: 0 to 32767
Allowable value used to determine to issue no alarm if the gas
pressure does not reach the setting

15249 Gas pressure rising time

Data type: Word


Unit of data: sec
Range of data: 0 to 60
Set the gas pressure rising time in sequence 27.

15255 RUN ON evacuation time

Data type: Word


Unit of data: sec
Range of data: 0 to 32767
Set the evacuation time at the RUN start.

15256 RUN OFF evacuation time

Data type: Word


Unit of data: sec
Range of data: 600 to 32767
When bit 2 of parameter No. 15003 (GVW) is set 1 and the oscillator
start signal (G222#6 RUN) is set to "0," evacuation is performed
according to this time setting.

- 231 -
D.PARAMTER LIST APPENDIX B-70255EN/01

15257 Number of abnormal vibrations detected

Data type: Word


Unit of data:
Range of data: 0 to 32767
If the number of abnormal vibrations detected exceeds the value
specified in this parameter, an alarm is issued.

15258 Time constant of the filter used for laser gas pressure variation suppression

Data type: Word


Unit of data: msec
Range of data: 17to 32767 (If a value less than 16 is specified, the filter does not
function.)

15259 Exhaust time when RUN is ON

Data type: Word


Unit of data: sec
Range of data: 0 to 32767
Set a desired evacuation time when RUN is ON.

15260 Period when the exhaust value of the external pipe is open

Data type: Byte


Unit of data: sec
Range of data: 0 to 60 (When a time beyond 60 sec is specified, the time is clamped
to 60 sec.)
Set the time the exhaust valve of the external pipe is open.

- 232 -
B-70255EN/01 APPENDIX D.PARAMTER LIST

D.12 PARAMETERS FOR HIGHLY REFLECTIVE MATERIAL


ALARMS

15265 Maximum allowable power increase

Data type: Word


Unit of data: W
Range of data: 0 to 32767
If the difference between the specified power and actual output power
is greater than this value, beam reflection error alarm 4068 is issued.

15266 Maximum allowable power

Data type: Word


Unit of data: W
Range of data: 0 to 32767
If the actual output exceeds this value, beam reflection error alarm
4068 is issued.

- 233 -
D.PARAMTER LIST APPENDIX B-70255EN/01

D.13 PARAMETERS FOR LASER POWER/VOLTAGE DROP

15270 Discharge tube voltage in normal operation

Data type: Word


Unit of data: V
Range of data: 0 to 32767
Set the discharge tube voltage during normal base discharge.
This parameter is automatically rewritten after the discharge start
signal (G222#7 HVON) is turned on.

15271 Power decrease limit

Data type: Word


Unit of data: W
Range of data: 0 to 32767
If the difference between the specified output and actual output is
greater than this setting, low output alarm 4076 is issued.

15272 Discharge tube voltage decrease limit

Data type: Word


Unit of data: V
Range of data: 0 to 32767
If the difference between the discharge tube voltage during use of the
laser and that at the start-up of the laser is greater than this setting,
low voltage alarm 4088 is issued.

15276 Laser gas replacement time

Data type: Word


Unit of data: sec
Range of data: 0 to 32767
Time during which a new laser gas is filled in the internal piping
system after RUN is turned on

- 234 -
B-70255EN/01 APPENDIX D.PARAMTER LIST

D.14 PARAMETERS FOR POWER TABLE SETTING

15280 Table interval when half of the discharge tubes are used

15281 Table interval when all discharge tubes are used

Data type: Word


Unit of data:
Range of data: 0 to 32767
Standard setting: Refer to the parameter data sheet delivered with the machine.
Set the increment in watts used for the setting in the output command.

15290 Power command 0 when half of the discharge tubes are used

15291 Power command 1 when half of the discharge tubes are used

15292 Power command 2 when half of the discharge tubes are used

15293 Power command 3 when half of the discharge tubes are used

15294 Power command 4 when half of the discharge tubes are used

15295 Power command 5 when half of the discharge tubes are used

15296 Power command 6 when half of the discharge tubes are used

15297 Power command 7 when half of the discharge tubes are used

15298 Power command 8 when half of the discharge tubes are used

Data type: Word


Unit of data: W
Range of data: 0 to 32767
Standard setting: Refer to the parameter data sheet delivered with the machine.
Sequentially set the output setting starting from 0 for each table
interval when half of the discharge tubes are used.

- 235 -
D.PARAMTER LIST APPENDIX B-70255EN/01

15300 Power command 0 when all discharge tubes are used

15301 Power command 1 when all discharge tubes are used

15302 Power command 2 when all discharge tubes are used

15303 Power command 3 when all discharge tubes are used

15304 Power command 4 when all discharge tubes are used

15305 Power command 5 when all discharge tubes are used

15306 Power command 6 when all discharge tubes are used

15307 Power command 7 when all discharge tubes are used

15308 Power command 8 when all discharge tubes are used

Data type: Word


Unit of data: W
Range of data: 0 to 32767
Standard setting: Refer to the parameter data sheet delivered with the machine.
Sequentially set the output setting starting from 0 for each table
interval when all discharge tubes are used.

- 236 -
B-70255EN/01 APPENDIX D.PARAMTER LIST

D.15 AUTOMATIC AGING FUNCTION

15320 Command power for power compensation coefficient calculation

Data type: Word


Unit of data: W
Range of data: 0 to 7000

15321 Oscillation frequency command for power compensation coefficient

Data type: Word


Unit of data: Hz
Range of data: 5 to 2000

15322 Pulse duty cycle command for power compensation coefficient

Data type: Word


Unit of data: %
Range of data: 0 to 100

15323 Command time for power compensation coefficient calculation

Data type: Word


Unit of data: sec
Range of data: 0 to 32767

15324 Gas pressure setting for normal compensation (50Hz)

Data type: Word


Unit of data: (1=13Pa)
Range of data: 0 to 32767

15325 Gas pressure setting for normal compensation (50Hz)

Data type: Word


Unit of data: (1=13Pa)
Range of data: 0 to 32767

15326 Power command when aging is performed with the automatic aging

Data type: Word


Unit of data: W
Range of data: 0 to 7000
15327 Oscillation frequency command for aging

Data type: Word


Unit of data: Hz
Range of data: 5 to 2000

- 237 -
D.PARAMTER LIST APPENDIX B-70255EN/01

15328 Pulse duty cycle command for aging

Data type: Word


Unit of data: %
Range of data: 0 to 100

15329 Power command time for aging

Data type: Word


Unit of data: sec
Range of data: 0 to 32767

15330 Gas pressure setting (50 Hz) for aging

Data type: Word


Unit of data: (1=13Pa)
Range of data: 0 to 32767

15331 Gas pressure setting (60 Hz) for aging

Data type: Word


Unit of data: (1=13Pa)
Range of data: 0 to 32767

15332 Oscillation frequency command value for power compensation

Data type: Word


Unit of data: Hz
Range of data: 5 to 2000

15333 Pulse duty cycle command during power compensation

Data type: Word


Unit of data: %
Range of data: 0 to 100

15334 Number of aging operations

Data type: Word


Unit of data:
Range of data: 0 to 32767 (Automatically set by the CNC)

15335 Time data 1 when the HV is turned off after LSTR

Data type: Two-word


Unit of data: Year
Range of data: 0 to 99999999 (Automatically set by the CNC)

- 238 -
B-70255EN/01 APPENDIX D.PARAMTER LIST

15336 Time data 2 when the HV is turned off after LSTR

Data type: Two-word


Unit of data: Month
Range of data: 1 to 12 (0 to 99999999) (Automatically set by the CNC)

15337 Time data 3 when the HV is turned off after LSTR

Data type: Two-word


Unit of data: Day
Range of data: 1 to 31 (0 to 99999999) (Automatically set by the CNC)

15338 Time data 4 when the HV is turned off after LSTR

Data type: Two-word


Unit of data: Hour
Range of data: 0 to 24 (0 to 99999999) (Automatically set by the CNC)

15339 Stop time for the oscillator requiring aging operation

Data type: Word


Unit of data: hour
Range of data: 0 to 32767 (range of valid settings: 30 to 120)
If the setting is less than 30, internal processing assumes the value to
be 60.

- 239 -
D.PARAMTER LIST APPENDIX B-70255EN/01

D.16 POWER CONTROL (2)

15450 Allowable variation in power control speed

Data type: Word


Unit of data: mm/min
Range of data: 0 to 32767
Standard setting: 4
Set the amount by which the power control speed is allowed to vary.
When this parameter is set to 0, parameter No. 15095 is valid.
Parameter No. 15095 and this parameter differ in the range of valid
settings.
For details of setting, see the explanation of parameter No. 15095.

- 240 -
B-70255EN/01 APPENDIX D.PARAMTER LIST

D.17 LASER GAS MIXER FUNCTION

15710 Wait time for checking the remaining amount in the gas cylinder

Data type: Word


Unit of data: sec
Range of data: 0 to 32767
Standard setting:
Wait time when the remaining amount in the gas cylinder is checked

15711 Gas mixture wait time

Data type: Word


Unit of data: min
Range of data: 0 to 32767
Standard setting: 60
Time required until gas mixture is complete and the mixed gas can be
supplied after gases are filled in the tank.

15712 Gas mixer evacuation time

Data type: Word


Unit of data: min
Range of data: 0 to 32767
Standard setting: 30
Set the time required for evacuating the mixer. This value is also
used for the time required for evaluation for leakage check.

15713 Helium exhaust time

Data type: Word


Unit of data: msec
Range of data: 0 to 32767
Standard setting:
Time required for exhausting the Helium gas from piping before the
next gas is filled after the helium gas is filled

15714 Nitrogen and CO2 exhaust time

Data type: Word


Unit of data: msec
Range of data: 0 to 32767
Standard setting:
Time required for exhausting the nitrogen gas or carbon dioxide gas
from the piping before the next gas is filled after that gas is filled

- 241 -
D.PARAMTER LIST APPENDIX B-70255EN/01

15715 Vacuum criteria gas pressure

Data type: Word


Unit of data: (1=13Pa)
Range of data: 0 to 32767
Standard setting:
This value is used for determining the degree of vacuum of the laser
gas pressure in the gas mixer.
If the laser gas pressure does not reach this value, an alarm is issued.

15716 Evacuation wait time

Data type: Word


Unit of data: min
Range of data: 0 to 32767
Standard setting: Wait time for evacuation. If the setting is 0, a value of 30 is input.

- 242 -
B-70255EN/01 APPENDIX D.PARAMTER LIST

D.18 PARAMETERS FOR GAS PRESSURE CONTROL (2)


#7 #6 #5 #4 #3 #2 #1 #0
15800 TPC

Data type: Bit


TPC The control function of driving the turbo blower with a constant
power
0: Invalid
1: Valid

15801 Maximum internal pressure when the control function of driving the turbo
blower with a constant power is enabled

Data type: Word


Unit of data: (1=13Pa)
Range of data: 1 to 32767
Maximum setting for the internal laser pressure. If the internal laser
pressure setting calculated from the laser power setting exceeds the
setting of this parameter, the internal laser pressure is clamped to this
value.

15802 Laser power setting used as the maximum internal pressure when the
control function of driving the turbo blower at a constant power is enabled

Data type: Word


Unit of data: W
Range of data: 1 to 32767
Laser power setting used when the setting of parameter No. 15801 is
used as the internal laser pressure setting. The proportional constant
for the internal laser gas pressure setting and laser power setting is
determined using this parameter and parameter No. 15801.

15803 Compensation factor for the internal pressure setting when the control
function of driving the turbo blower at a constant power is enabled

Data type: Word


Unit of data: 1/1024
Range of data: 0 to 32767
Compensation factor by which the internal laser pressure setting is
multiplied. When the parameter setting is 1024, compensation factor
1.0 is used for multiplication.

15804 Maximum exhaust valve open time for internal pressure control during
oscillation

Data type: Word


Unit of data: msec
Range of data: 0 to 3000
Set the maximum open time for exhaust valve PCV.

- 243 -
E.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70255EN/01

E CONTROL SEQUENCES IN LASER


OSCILLATOR

- 244 -
B-70255EN/01 APPENDIX E.CONTROL SEQUENCES IN LASER OSCILLATOR

E.1 OUTLINE OF LASER OSCILLATION SEQUENCES

SEQ 0
PURGE = 0
LRDY = 0
PTLP = 0
LSTR = 0

CNC POWER ON CNC POWER OFF

SEQ 10
PURGE = 1
INITIAL
LRDY = 0
PTLP = 0
LSTR = 0 SEQ11(WAIT=1)
(START KEY)
RUN ON (START KEY)
RUN OFF
SEQ19(WAIT=1) SEQ 20
PURGE = 0 READY OF DISCHARGING
LRDY = 1
PTLP = 0
LSTR = 0 SEQ21(RFHV=0)
HV ON
HV OFF
SEQ29(RFHV=1) SEQ 30
PURGE = 0
LRDY = 0 READY OF OSCILLATION
PTLP = 1
LSTR = 1

As is shown in the flow chart, the laser oscillation sequences can be


divided into four steps.
Throughout this description the following notations are used.

Descriptions of the signals used in the figure


RUN : Oscillator start switch
PURGE : Purge in tube completion signal
LRDY : Discharge preparation completion signal
PTLP : Warning light signal
LSTR : Oscillation preparation completion signal

[SQ0] POWER OFF state


This is the state prior to power on where all the signals are in off
state.

[SQ10] INITIAL state


After power is turned on, laser comes into PURGE=1 state. This
signal is on when atmospheric pressure sensor monitors that the intra-
tube pressure equals atmospheric pressure.

- 245 -
E.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70255EN/01

Usually when this signal is on, purge completion lamp on operational


board is lit.
[SQ20] READY OF DISCHARGING state
When oscillator start switch is turned on, evacuation is carried on and
then gas pressure control begins. When gas pressure reaches the set
value, laser comes into discharge preparation completion (LRDY)
state and it becomes possible to turn on HV.
[SQ30] READY OF BEAM-ON OPERATION state
When HV (high voltage command) is turned on, high voltage is
applied to discharge tube. Then with the command from CNC, base
discharge is established. Further intra-tube pressure control is
performed. When this is completed normally, laser comes into
oscillation preparation completion state.

Sequence
Meaning
number
10 Initial state (purge completed state)
12 Purge operation being performed
14 State waiting 75 seconds
16 Execution with RUN turned on
State waiting for exhaust completion and negative pressure
17
arrival
18 State waiting for the AR signal to be turned on
20 LRDY state
State waiting for setting from gas pressure during laser
23
oscillation to discharge start time gas pressure
26 Execution with HV ON (state waiting for start of discharge)
State waiting for setting from a maximum base discharge
27
value to base discharge state
28 Power compensation being performed
30 LSTR state
Vacuum being drawn with RUN turned off (parameter No.
49
15256)
50 State waiting 75 seconds with RUN turned on again

- 246 -
B-70255EN/01 APPENDIX E.CONTROL SEQUENCES IN LASER OSCILLATOR

E.2 INTRA-TUBE GAS PRESSURE CONTROL SEQUENCES

Intra-tube gas pressure control is performed in the following steps as


shown in the figure.

GAS
PRESSURE : COMMAND

: REAL

PRM15249

PRM15242
PRM 15243

±2torr

PRM15241

PRM15240

45+70sec PRM15205 PRM15256

SQ16 SQ26
SQ17 SQ18 SQ20 SQ27 SQ28 SQ30 SQ23 SQ20 SQ49 SQ12

RUN START OF LRDY HV ON LSTR HV LRDY RUN [TIME]


ON GAS CONTROL OFF OFF

[SQ10]
This is the state after power is turned on in which intra-tube gas
pressure equals atmospheric pressure.

- 247 -
E.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70255EN/01

[SQ16, 17, 18]


Setting the laser start switch to ON starts evacuation, which continues
until the pressure designated by PRM No. 15240 is reached. After
evacuation up to the value set in PRM No. 15240, gas pressure
control starts. Then, the pressure increases to the value set in PRM No.
15241. When 45 seconds has elapsed after gas pressure control starts,
a check is made to see if the intra-tube gas pressure is within ?20
relative to the value of PRM No. 15241. If the intra-tube gas pressure
is not within this range, an alarm is issued. If there is no problem, the
turbo blower starts and reaches the specified speed in about 70
seconds. Then, LRDY is set to 1 to set the discharge start preparation
completion state. If the frequency reached signal is not issued by the
inverter within 120 seconds of the turbo blower being started, an
alarm is issued.

[SQ20]
This is the state of discharge start preparation completion (LRDY=1)
and HV ON (high voltage command) is read.

[SQ26, 27, 28]


When HV is turned on in the discharge start preparation completion
state, a high voltage is applied to the discharge tube to generate the
base discharge state. At the same time, gas pressure control is
exercised. The intra-tube gas pressure increases from the value of
PRM No. 15241 to the value set in PRM No. 15242 or 15243. At this
time, a check is made to see if the intra-tube gas pressure is within
100 relative to the value of PRM No. 15242 or 15243. If the intra-tube
gas pressure is not within this range, an alarm is issued. If there is no
problem, an output compensation coefficient calculation is made.

[SQ30]
This is oscillation preparation completion state(LSTR=1) in which
laser oscillation is ready.

[SQ23]
When HV is turned off, discharge stops, and the state changes from
the oscillation preparation completion state (LSTR) to the discharge
start preparation completion state (LRDY). At this time, the intra-tube
gas pressure changes from the value set in PRM No. 15242 or 15243
to the value set in PRM No. 15241.
[SQ49, 14, 12]
When the oscillator start switch is set to OFF in the SQ20 state, gas
pressure control ends, and the termination of the turbo blower
operation is awaited for 70 seconds. If evacuation is enabled (bit 2 of
PRM No.15003 = 1) after RUN is turned off, evacuation is performed
for the period of time set in PRM No.15256, Then, laser gas is filled
until the intra-tube gas pressure becomes equal to the atmospheric
pressure. Upon completion of laser gas filling, the purge state is set.
When the purge state is set, the off-interlock contact is disconnected.

- 248 -
B-70255EN/01 APPENDIX E.CONTROL SEQUENCES IN LASER OSCILLATOR

E.3 TUBE VOLTAGE CONTROL SEQUENCES

The control of tube voltage is done simultaneously with that of gas


pressure as shown in Fig. E.3 in the following sequences.
GAS
PRESSURE

PRM15242, 15243

PRM15241

SQ20 SQ26 SQ27 SQ28 SQ30

LSTR LSTR
H.V.ON
(No compensation) (In compensation)

Command voltage
Tube voltage In output
compensation
PRM15200, 15201

Eight step of
compensation
PRM15200, 15201 ´1/2

Command voltage

PRM15220

PRM15221

PRM15223

Tube voltage In no
compensation
Gas [TIME]
PRM15222 20sec or voltage PRM15205
6sec check
30sec

SQ291 SQ292 SQ293 SQ294

- 249 -
E.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70255EN/01

[SQ291]
When HV is turned on, high voltage is applied to discharge tubes and
voltage control begins. Here command is increased in ramp mode up
to the value of PRM 15220 (maximum bias command at discharge
start). The time required to reach PRM 15220 from HV ON is 6 sec.

[SQ292]
In this sequence, discharge is maintained at the discharge command
value set in PRM 15220 for the period of time set in PRM 15222
(discharge start wait time). Here all the tubes must be in discharge.
The state of discharge is checked by comparing tube voltage with
discharge start voltage (PRM 15221).

[SQ293]
When discharge start is confirmed in SQ 292, power command
changes to PRM 15223 (bias command).Here base discharge is
established for a while and the comparison between discharge tube
voltage and PRM 15270 (tube voltage in normal discharge) is done
using the following decision equation.
Vn-1 - Vn < PRM.No.15272
Vn-1 : PRM.No.15270 (tube voltage in normal discharge)
Vn : monitored voltage of the tube of the smallest number
(power supply)
PRM.No.15272 : Tube voltage decrease limit
The decision of normal state is given by the holding of the above
inequality. When normal, monitored voltage of Vn tube is set for
PRM15270. If PRM15000#4 is 0 then, laser enters oscillation
preparation completion (LSTR) state.

[SQ294]
When normal base discharge is confirmed and PRM15000#4 is 1, this
sequence begins to obtain power calibration coefficient. Power
calibration is to calibrate so that real and command powers become
equal. The equation used is as follows.
PRM.No.15204 = Pc / Pa ´1024
PRM.No.15204 : Power calibration coefficient
Pc : Command power
Pa : Actual power
The calibration coefficient is calculated by outputting the value
specified with PRM 15200 (when half of the discharge tubes are
used) or PRM 15201 (when all the discharge tubes are used) then
assigning that value to the above equation.
The value of Pa becomes an actual value measured after the time set
in PRM 15205 (compensation time setting) has elapsed.
The difference between the specified power and actual power is also
monitored. The laser is judged as being normal provided the
difference is less than the value specified with PRM 15271(power
decrease limit).The calibration coefficient is clamped to the value
specified for PRM 15203 (power calibration limit). Once the above
procedure has terminated normally, the laser enters the LSTR state.
- 250 -
B-70255EN/01 APPENDIX E.CONTROL SEQUENCES IN LASER OSCILLATOR

E.4 OSCILLATION SEQUENCES FLOW CHART

POWER ON SEQUENCE

PURGE = ON
OF1 = OFF

No
RUN = ON

Alarm 1
Yes
Monitor treatment
start
PCR = OFF
OF1 =ON
PURGE = OFF
WAIT = ON
CLON = ON

Wait for 3 seconds

RPA = ON
Control valve = full open
Chiller monitor start

Timer A = Reset

Wait for 3 seconds

RURGE = ON : This signal becomes on after POW ON.


OF1 = OFF : Off-interlock contact OFF state
RUN = ON : Laser start switch on.
PCR = OFF : Power supply unit alarm indication and holding
circuit is cleared.
OFI = ON : CNC POWER OFF is invalid.
WAIT = ON : LRDY waiting.
CLON = ON : Chiller start requested.
RPA = ON : Exhaust pump start.
Chiller monitor : Monitoring of the start signal from the chiller
TIMER A=RESET : This timer begins counting after the start of
evacuation.

- 251 -
E.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70255EN/01

VEN = ON
PCL = OFF

Wait for 5 seconds

GRDY = ON

GRDY = OFF
Control valve full close

No
Intra-tube pressure Timer count
<PRM.15204

Timer > No
Yes
PRM.15259

Yes
VEN = OFF
RBA = ON ALM.4080
GRDY = ON

OFI = ON : CNC POWER OFF is invalid.


VEN = ON : Exhaust valve is opened.
PCL = ON : Alarm indication of power supply unit is valid.
GRDY = ON : Laser gas supply valve is opened.

The time required for intra-tube pressure to reach PRM15240 after


RUN ON is not definite. This is due to an evacuation system capacity
difference, exhaust pump characteristics variation, and oscillator
leakage characteristics difference. The pumping capacity further
depends on the state of oil contamination.

VEN = OFF : Exhaust valve is closed.


RBA =ON : Start of turbo blower.

- 252 -
B-70255EN/01 APPENDIX E.CONTROL SEQUENCES IN LASER OSCILLATOR

Gas pressure control

PRM.15240 ® 200VAC to Laser


PRM.15241 power supply unit

Wait for 120 seconds

PRM.15241+20> No
Intra-tube pressure
>PRM.15241-20
ALM.4081
Yes

WAIT = OFF
LRDY = ON

No
HV = ON

Alarm 2
Yes
Monitor treatment start
LRDY = OFF
PSS1 to 8 = Set
PSRDY = ON
RFHV = ON
PTLP = ON

After RUN ON pressure reaches that of PRM15240 and gas pressure


control begins. The gas pressure is changed to the value set in PRM
15240 to the value set in PRM 15241. In addition, when gas pressure
control starts, 200 VAC is supplied to the inverter for the turbo
blower and the power supply unit.
Forty five sec after the beginning of gas pressure control, intra-tube
pressure must be equal to the value PRM15241 within the error of
±20. If not so, alarm 4081 appears.

WAIT = OFF :
Waiting signal for LRDY is off.
LRDY = ON :
Discharge preparation completion signal is on by which HV ON
becomes ready.

- 253 -
E.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70255EN/01

HV = ON :
When HV is turned on, you proceed to the sequence below.
LRDY = OFF :
When HV is turned on, LRDY is turned off.
PSS1-8 = SET :
This is to select power units and usually is sent to the units
selected by PRM 15025 to PRM 15028.
PSRDY = ON :
This is sent to a power supply selected by the laser power supply
ready signal.
RFHV = ON :
Power is fed from the DC section of the laser power supply to
the RF section.

BIAS COMMAND
0 ® PRM.15220

PRM.15220 WAIT

No
Intra-tube pressure
ALM.4066
< PRM.15221

Yes

GAS PRESSURE CONTROL BIAS COMMAND


PRM.15241 PRM.15220
® PRM .15242,15243 ® PRM.15223

No
PRM.15242,15243-100
<PRM.15242,15243
<PRM.15242,15243+100

ALM.4078

Yes

The output command value is changed from a low level to the value
set in PRM 15220 (maximum bias command value at discharge time)
in a ramp mode by the bias command to facilitate discharge. The time
required to reach peak value is 6 sec.

- 254 -
B-70255EN/01 APPENDIX E.CONTROL SEQUENCES IN LASER OSCILLATOR

When discharge starts, the tube voltage decreases, and a certain


voltage is maintained.
The BIAS COMMAND after reaching peak is retained for the time
designated by PRM15222 (discharge start waiting time).
Then the comparison is made between intra-tube voltages and PRM
15221 (discharge start voltage). If the monitored voltage is lower than
PRM15221, discharge is confirmed. When this normal discharge is
confirmed, BIAS COMMAND is changed automatically from
PRM15220 to PRM15223 (BIAS COMMAND). If all the tubes are
confirmed normal discharge, intra-tube pressure is changed from
PRM15241 to PRM15242, 15243 (intra-tube pressure in base
discharge).

No
PRM.1500.4=1

Yes

Check command power on

Wait for time of


PRM.15205

PRM.15204= Pc/Pa ´ 1024

No
PRM.15204
>PRM.15203

Yes

PRM.15204>PRM.15203

Command power off

LSTR = ON

Enables BEAM ON

In the PRM 15000 bit 4 = 1 (setting of doing power calibration), the


following sequences proceed. In the setting of not doing power

- 255 -
E.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70255EN/01

calibration, laser enters immediately oscillation preparation


completion (LSTR) state.
Check command :
When compensation is to be performed, the value set in PRM 15200
or PRM 15201 (output at compensation) Power ON is specified.
Then, by using the output monitor value obtained when the time set in
PRM 15205 has elapsed after the specification, the value of PRM
15204 (compensation coefficient) is found from the following
formula:
PRM.No.15204 = Pc(power command)/Pa(real power)´1024
Example)Pc = 2000W,Pa = 1900W
PRM.No.15204 = 2000/1900´1024 = 1077
The result is compared with PRM15203 (power calibration limit).
When PRM15204 exceeds PRM15203, the former is clamped by the
latter.
LSTR = ON : Oscillation preparation completion signal is on.
At this time, beam output from the laser oscillator becomes possible.

- 256 -
B-70255EN/01 APPENDIX F.REFIXING AND REPLACING GAS TUBE

F REFIXING AND REPLACING GAS TUBE


Replacing both of polyethylene and copper tubes is the same. Take
care only for the combination between tube materials and ferrule
materials.

Polyethylene tube : nylon ferrule (back, front)


A98L-0004-0348/2-N : 1/4”
A98L-0004-0348/3-N : 3/8”
A98L-0004-0348/4-N : 1/2”
Copper tube : brass ferrule (back, front)
A98L-0004-0348/2-B : 1/4”
A98L-0004-0348/3-B : 3/8”
A98L-0004-0348/4-B : 1/2”
Take care also not to introduce dust into laser because exposure to
ambient air is inevitable.

REFIXING TUBE
(1) Loosen tube fixing nut.

(2) Removed the tube. Make sure that neither of tube nor ferrule is
contaminated with dust. When contaminated, wipe them with
clean and soft cloth.
Back Front
ferrule ferrule

Nut Tube
Fig.F Remounting the gas tube

(3) Fasten tube.


1) Push tube so that the front ferrule fastened to tube contacts
sealing surface of the fitting.
2) Rotate nut with finger as tight as possible.
3) Holding the fitting base with wrench, rotate the nut with
wrench by 1/4 rotation.
This completes the work.

- 257 -
F.REFIXING AND REPLACING GAS TUBE APPENDIX B-70255EN/01

REPLACING TUBE
(1) Cut the end face of the tube at right angles, and install a nut,
back ferrule, and front ferrule as shown in Fig. F. Pay attention
to the orientation of the back ferrule.

(2) Install the tube by inserting the tube until it butts against the
joint.

(3) Retighten the tube.


1) Push the front ferrule installed around the tube until the
front ferrule closely contacts the seal surface of the joint
body.
2) Tighten the nut to a maximum extent possible with your
fingers.
3) Secure the joint body with a wrench, and further tighten the
nut by about a quarter turn with a wrench.
This completes the work.

- 258 -
B-70255EN/01 APPENDIX G.REFIXING AND REPLACING WATER TUBE

G REFIXING AND REPLACING WATER


TUBE
Two types of joints for water piping are available for use in the
oscillator: one is made of brass, and the other is made of stainless
steel. However, their installation and replacement methods are the
same. Drain water completely beforehand to ensure that the inside of
the oscillator is not exposed to water when the tube is removed.

REFIXING TUBE
(1) Loosen tube fixing nut.

(2) Remove the tube. Ensure that the sleeve and the inside of the
tube are not contaminated by dust. If these are contaminated by
dust, wipe off the dust softly by using a clean cloth moistened
with alcohol.
Sleeve

Nut Tube
Fig.G Remounting the water tube

(3) Retighten the tube.


1) Push the tube into the fitting until the sleeve on the tube
butts firmly against the sealing surface of the fitting.
2) Rotate nut with finger as tight as possible.
3) Holding fitting base with wrench, rotate nut with wrench by
1 and 1/2 rotation.
This completes the work.

- 259 -
G.REFIXING AND REPLACING WATER TUBE APPENDIX B-70255EN/01

REPLACING TUBE
(1) Cut the end face of the tube at right angles, and install a nut and
sleeve as shown in Fig. G. Pay attention to the orientation of the
sleeve.

(2) Install the tube by inserting the tube until it butts against the
joint.

(3) Retighten the tube.1) Push the tube into the fitting until the
sleeve on the tube butts firmly against the sealing surface of the
fitting.
1) Push the tube into the fitting until the sleeve on the tube
butts firmly against the sealing surface of the fitting.
2) Rotate nut with finger as tight as possible.
3) Holding fitting base with wrench, rotate nut with wrench by
1 and 1/2 rotation.
This completes the work.

- 260 -
B-70255EN/01 APPENDIX H.GLOSSARY

H Name
GLOSSARY
Meaning
<A>
Access panel That protective component of a housing or enclosure which, when removed or shifted,
can cause exposure to laser radiation.
AEL Accessible emission level Maximum accessible emission level set up for each class of laser products
Alignment Optical axis adjustment
Aperture Iris, or stop
<B>
Beam Aggregate of unidirectional, diverging, or conversing rays
Beam diameter Distance between two symmetrical points in a cross section of a beam where the
power per unit area is 1/e as high as the maximum power per unit area
Beam divergence Angle through which a beam spreads
Burn pattern Laser beam mode pattern generated on a plate such as an acrylic plate for
confirmation purposes
<C>
Circular Polarization in which a plane of polarization rotates about the axis along which the light
Polarization progresses and does not have directivity; an electric or magnetic field based on circular
polarization has a constant intensity.
CO2 laser Laser that uses a carbon dioxide gas as a laser medium
CW Continuous wave Continuously radiated laser output
<D>
Discharge excitation Realization of inverted population by means of discharge
<E>
Enhanced pulse Greatly amplified peak output of a pulse
Excitation Transition of atoms or molecules to a higher energy level by supplying them with
external energy
Exposure time Duration through which laser radiation is emitted
<F>
Fast axial flow laser Laser in which gas flows rapidly in the same direction as the laser beam
Feedback Corrective action in which a quantity to be controlled is compared with a target value
generated by feeding part of an output signal to the input through a specially created
closed loop so that the quantity to be controlled matches the target value.
<L>
Laser Device for generating light by stimulated emission
Laser controlled area Area in which activities are controlled or monitored for protection from hazards
resulting from laser radiation
Laser mirror Reflecting mirror used in a laser resonator
Laser safety officer Person having sufficient knowledge about evaluation and management of hazards of
lasers and in charge of safety management of lasers
Laser safety standard Standard to protect human bodies from hazards resulting from laser beams in view of
use of lasers and about laser products for sale
Linear Polarization in which a plain of polarization is at a constant angle with the axis along
Polarization which the light progresses
<M>
Maintenance Action taken by a user to preserve normal operation of a product, such as adjustment
or other measures specified in documents created by the manufacturer for users

- 261 -
H.GLOSSARY APPENDIX B-70255EN/01

Name Meaning
Maximum output Maximum radiation power or maximum radiation energy per pulse that a laser product
outputs in all directions where there is a hazard of exposure in view of operational
capacity in every area at any point of time after the production of the laser product
Mode State of a resonant system in which an electromagnetic field has a specific distribution
MPE Maximum permissible Maximum laser radiation level that can be radiated onto human bodies without harmful
exposure influence to them in an ordinary environment
<O>
Operation Laser product's action covering all intended functions, not including maintenance or
service.
Optical resonator Device in which stimulated emission of light is used for a laser and which consists of a
pair of reflecting mirrors facing each other
<P>
Parameter Variable that is assigned a given value for a specific purpose and indicates that
purpose
Phase Amount representing a positional relationship between two adjacent highest or lowest
points on a wave
Power density Energy per unit area
Protective housing Laser product housing or its part designed to protect humans from exposure to a laser
beam exceeding an accessible emission level or strong collateral radiation
Pulse duration Time interval between the points at which an instantaneous value on the leading and
trailing edges is half the peak pulse amplitude
Pulse duty Ratio (%) of a duration in which a pulsating laser output is on, to its entire cycle
Pulse frequency Repetition frequency at which pulsating laser beams are radiated from an oscillator
Pulse laser Laser that outputs energy in the form of a single pulse or a pulse train
Pulse output Laser output radiated in the form of a pulse train
<R>
Radian Measurement unit of angle; 1 radian equals 360°/2p
Radiant energy Energy emitted, transmitted, or received (measured in joules, or J)
<S>
Safety interlock Device combined with the protective housing of a laser product to stop its operation
automatically when part of the housing is removed
Semiconductor laser Laser that uses a semiconductor as an exciting medium
Sequence A succession of steps carried out in a prescribed order
Stimulated emission Emission of an electromagnetic wave from a material in proportion to the strength of
the incident electromagnetic field
<T>
Target Jig used to radiate and position a laser beam
Threshold Physical quantity necessary to generate laser beams

- 262 -
B-70255EN/01 INDEX

INDEX
ALM No.4082 .................................................... 75

ALM No.4085 .................................................... 76
A/D CONVETER-3 ........................................... 79
ALM No.4087 .................................................... 76
AD converter 1 is not normal........................... 61
ALM No.4088 .................................................... 77
AD converter 2 is not normal........................... 61
ALM No.4089 .................................................... 78
Adjusting the Exhaust Unit (Adjusting the
ALM No.4090 .................................................... 78
Laser Gas Consumption) ............................ 135
ALM No.4094 .................................................... 78
Adjusting the Water Flow Sensor.................. 143
ALM No.4095 .................................................... 79
Alarm Processing after Modification of Intra-
ALM No.4096 .................................................... 79
tube Pressure at Oscillation Time and Bias
ALM No.4097 .................................................... 79
Command Setting ....................................... 119
ALM No.4098 .................................................... 79
ALIGNMENT OF THE GUIDE LASER ....... 196
ALM No.4099 .................................................... 79
ALIGNMENT OF THE RESONATOR.......... 190
ALM No.4100 .................................................... 80
Alignment Procedure at Mirror Cleaning Time
ALM No.4101 .................................................... 81
..................................................................... 192
ALM No.4105 .................................................... 81
Alignment Procedure during Installation after
ALM No.4106 .................................................... 82
Transportation ............................................ 192
ALM No.4107 .................................................... 82
ALM No.4061 .................................................... 61
ALM No.4132 .................................................... 83
ALM No.4063 .................................................... 61
ALM No.4062 .................................................... 61
ALM No.4065 .................................................... 64
Anomaly of assist gas ....................................... 67
ALM No.4066 .................................................... 64
Anomaly of chiller unit..................................... 67
ALM No.4067 .................................................... 65
Anomaly of gas pressure control...................... 74
ALM No.4068 .................................................... 66
Anomaly of laser power supply unit ................ 61
ALM No.4069 .................................................... 66
Anomaly of power supply unit voltage of IF
ALM No.4070 .................................................... 67
PCB ................................................................ 66
ALM No.4071 .................................................... 67
Anomaly of pressure sensor ............................. 75
ALM No.4072 .................................................... 68
Anticorrosive ..................................................... 43
ALM No.4073 .................................................... 68
Antifreezing solution ........................................ 44
ALM No.4074 .................................................... 69
APPLICABLE MODELS .................................... 3
ALM No.4075 .................................................... 70
Assist gas not output ........................................ 78
ALM No.4076 .................................................... 70
Attaching and Detaching a Cable To and From
ALM No.4077 .................................................... 71
the Terminal Block ..................................... 165
ALM No.4078 .................................................... 71
AUTOMATIC AGING FUNCTION ............... 237
ALM No.4079 .................................................... 72

ALM No.4080 .................................................... 73
ALM No.4081 .................................................... 74 Base Discharge Adjustment........................... 117

i-1
INDEX B-70255EN/01

BLOWER OIL SHORTAGE ............................. 82 Electromagnetic Contactor of Exhaust Pump


Burn pattern Collection and Beam Mode Trips Thermally ............................................ 86
Evaluation ................................................... 194 EPLACING THE PRESSURE CONTROL UNIT
...................................................................... 160

ERROR CODE LIST....................................... 201
CAUTION ......................................................... 10
ERROR MESSAGES AND
Changing the Exhaust Pump Oil..................... 53
COUNTERMEASURES ............................... 60
Changing the Turbo Blower Oil....................... 51
Excessive Laser Gas Consumption .................. 87
Checking of Electric Shutter Operation........ 120
EXTERNAL VIEW OF LASER OSCILLATOR
Checking the IF PCB Signals .......................... 92
...................................................................... 199
Checking the Jumper Pins............................... 92

Cleaning agent.................................................. 44
Cleaning and Replacing the Folding Mirrors 187 Fine adjustment of VR11 and VR13 .............. 118
CLEANING AND REPLACING THE OPTICAL

PARTS ......................................................... 180
GAS CONTROLLER............................... 112, 133
Cleaning and Replacing the Output Mirror.. 181
Gas pipe ............................................................. 46
Cleaning and Replacing the Rear Mirror...... 184
GAS PRES.NOT REACH ................................. 79
COMPONENT DETAILS................................. 20
Gas pressure anomaly in discharge tube ........ 71
Condensation .................................................... 70
GLOSSARY ..................................................... 261
CONTROL SEQUENCES IN LASER
OSCILLATOR ............................................. 244 H
Cooling Water ................................................... 43
HIGH-FREQUENCY INVERTER ................. 123
COOLING WATER PIPING .......................... 105
High-frequency Inverter Alarm Display ......... 87


DAILY INSPECTION....................................... 49
INDICATION OF STATE BY MEANS OF SELF
Data Items Displayed on the Diagnosis Screen
DIAGNOSTIC FUNCTION.......................... 93
....................................................................... 93
INPUT UNIT................................................... 146
Decrease of laser gas pressure......................... 68
INSTALLATION............................................... 25
Decrease of laser output power........................ 76
INSTALLATION PROCEDURE...................... 26
DETAILS OF MAINTENANCE ...................... 51
INTERNAL STRUCTURE ............................... 17
Discharge starting anomaly............................. 64
Inter-unit Connections ..................................... 47
Discharge tube voltage drop ............................ 77
INTRA-TUBE GAS PRESSURE CONTROL
Display of Fluctuating Laser Output On CRT 85
SEQUENCES .............................................. 247
E INVETER1 ........................................................ 80

Electrical Connections...................................... 47 L
ELECTRICAL CONNECTIONS.................... 103
Laser beam not generated................................ 78
i-2
B-70255EN/01 INDEX

Laser Gas .......................................................... 46 OUT OF FREQUENCY 1 ................................. 81


LASER GAS MIXER FUNCTION ................. 241 OUTLINE OF LASER OSCILLATION
Laser gas specification ..................................... 46 SEQUENCES .............................................. 245
LASER OPTICAL SYSTEM........................... 179 Overheat of beam absorber .............................. 71
Laser Oscillator Status Display....................... 94 Overheating laser oscillator housing............... 65
Laser output decrease ...................................... 70

Laser Output Just After Switch On Is Low .... 85
Packing for Transportation .............................. 33
Laser Power Supply Alarm Display ................ 84
Parameter settings ......................................... 128
LASER POWER SUPPLY UNIT ................... 116
PARAMETER WAS CHANGED...................... 83
Leakage of gas tube/anomaly of exhaust pump
PARAMETERS FOR ASSIST GAS PRESSURE
....................................................................... 73
AND TIME SETTING ................................ 220

PARAMETERS FOR CONTOURING
Main Breaker Trips .......................................... 86 CONDITIONS ............................................. 212
MAINTENANCE .............................................. 48 PARAMETERS FOR DISCHARGE............... 229
MAINTENANCE PARTS................................. 56 PARAMETERS FOR DISCHARGE TUBE
MAJOR FAULTS.............................................. 84 SELECTION................................................ 211
Maximum Output Adjustment ...................... 118 PARAMETERS FOR EDGE MACHINING
Measurement of Voltage .................................. 90 CONDITIONS ............................................. 213
Measurement of Voltage of DC Power Supply PARAMETERS FOR ENABLING/DISABLING
Unit................................................................ 90 VARIOUS FUNCTIONS ............................ 204
Method of Obtaining a Maximum Power by PARAMETERS FOR GAS CONTROL (1)..... 230
Adjusting All Mirrors ................................. 191 PARAMETERS FOR GAS PRESSURE
MIRROR NOT INSTALLED............................ 82 CONTROL (2).............................................. 243
PARAMETERS FOR HIGHLY REFLECTIVE

MATERIAL ALARMS................................. 233
Names of Components.................................... 137
PARAMETERS FOR LASER MAINTENANCE
NOTE................................................................. 11
TIMING INDICATION FUNCTIONS....... 223
O PARAMETERS FOR LASER
POWER/VOLTAGE DROP......................... 234
OBSERVING VOLTAGE OF POWER LINE.. 90
PARAMETERS FOR PIERCING CONDITIONS
Obtaining a Maximum Power........................ 193
...................................................................... 215
ompletion of Adjustment ................................ 119
PARAMETERS FOR POWER CONTROL .... 217
OPTICAL PATHS IN THE OSCILLATOR ..... 16
PARAMETERS FOR POWER TABLE
ORGANIZATION OF THE MANUAL .............. 2
SETTING..................................................... 235
OSCILLATION SEQUENCES FLOW CHART
PARAMETERS FOR THE OSCILLATOR .... 225
..................................................................... 251
PARAMTER LIST........................................... 203
OSCILLATOR CONNECTIONS ..... 43, 102, 107

i-3
INDEX B-70255EN/01

PERIODIC MAINTENANCE .......................... 50 REPLACING THE MATCHING BOX........... 153


Phase Relation .................................................. 90 REPLACING THE POWER SENSOR UNIT 167
POWER CONTROL (2) .................................. 240 Replacing the Shutter Mirror ........................ 169
Power Supply Cannot Be Switched Off Using REPLACING THE SHUTTER SECTION..... 168
CRT/MDI Switch........................................... 85 Replacing the Shutter Switch (Thermal and
Power Supply Cannot Be Switched On Using Photoelectric Switches)............................... 169
CRT/MDI Switch........................................... 85 Replacing the Shutter Unit............................ 169
PREPARATION PRIOR TO SHIPMENT ....... 32 Replacing the Stabilized Power Supply......... 146
Preparatory Settings and Checks.................. 116 REPLACING THE TURBO BLOWER .......... 154
Press the RESET key ....................................... 72 REPLACING THE TURBO PCB ................... 156
Pulse Output Test........................................... 119 REPLACING THE WATER DISTRIBUTION
Pure Water Supply Unit .................................. 45 UNIT............................................................ 175
RESPONDING TO ALARM MESSAGES ON

THE SCREEN ............................................... 61
REFIXING AND REPLACING GAS TUBE . 257
Rewriting the parameter................................ 117
RELATED MANUALS ....................................... 4
RFI and DCV Value Recording and Adjustment
RELAY PCB B ................................................ 111
...................................................................... 119
Removing Cooling Water.................................. 34
Roots blower overheat ...................................... 69
REPLACEMENT PROCEDURES................. 145

REPLACING A DISCHARGE TUBE............ 162
Replacing a Fan Unit ..................................... 164 SAFETY............................................................... 6
REPLACING A FAN UNIT ........................... 164 SETTING AND ADJUSTMENT.................... 115
Replacing a Fan-assisted Radiator................ 166 Setting Procedure ........................................... 139
REPLACING RELAY PCB B......................... 157 Setting the Atmospheric Pressure Sensor..... 133
REPLACING THE BEAM ABSORBER........ 171 Setting the Gas Supply Pressure Sensor ...... 133
REPLACING THE CONDENSATION SENSOR SETTING THE GAS SUPPLY PRESSURE
..................................................................... 177 SENSOR AND ATMOSPHERIC PRESSURE
REPLACING THE EXHAUST PUMP .......... 158 SENSOR ...................................................... 137
Replacing the Exhaust Pump Filter................ 55 SETTING THE POWER INPUT
REPLACING THE EXHAUST UNIT............ 161 COMPENSATION COEFFICIENT ........... 142
REPLACING THE GUIDE LASER............... 178 Shortage of cooling water ................................. 68
REPLACING THE HIGH-FREQUENCY Shutter anomaly ............................................... 64
INVERTER.................................................. 173 Shutter temperature abnormal........................ 76
Replacing the IF PCB on the Oscillator Side 147 Specification of the cooling water .................... 43
Replacing the Input Unit Control PCB ......... 146 SPECIFICATIONS ......................................... 200
REPLACING THE LASER POWER SUPPLY

..................................................................... 148
TO USE THE LASER OSCILLATOR SAFETY 5
i-4
B-70255EN/01 INDEX

Too much incident laser beam back to the V


resonator........................................................ 66
VACUUM GAS CONNECTION .................... 106
TRACE AXIS & PLANE................................... 79
Vacuum pump operation abnormal ................. 78
TRACE AXIS SELECT..................................... 79

TROUBLESHOOTING .................................... 58
TROUBLESHOOTING PROCEDURE ........... 59 WARNING........................................................... 7
TUBE VOLTAGE CONTROL SEQUENCES 249 WARNING LABELS......................................... 12
TURBO PCB ................................................... 121 WATER FLOW SENSOR ............................... 143
TURBO TEMP. 1 .............................................. 81

UNDER TRACING ........................................... 79


UNIT CONFIGURATION.............................. 108

i-5
Revision Record
FANUC LASER-MODEL C1000iA MAINTENANCE MANUAL (B-70255EN)

01 Dec., 2000

Edition Date Contents Edition Date Contents


· No part of this manual may be
reproduced in any form.

· All specifications and designs


are subject to change without
notice.