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Laser C1000i―Model A
Maintenance Manual
Warning
Warning notices are used in this publication to emphasize that hazardous voltages, currents,
temperatures, or other conditions that could cause personal injury exist in this equipment or may
be associated with its use.
In situations where inattention could cause either personal injury or damage to equipment, a
Warning notice is used.
Caution
Caution notices are used where equipment might be damaged if care is not taken.
Note
Notes merely call attention to information that is especially significant to understanding and
operating the equipment.
This document is based on information available at the time of its publication. While efforts
have been made to be accurate, the information contained herein does not purport to cover all
details or variations in hardware or software, nor to provide for every possible contingency in
connection with installation, operation, or maintenance. Features may be described herein which
are not present in all hardware and software systems. GE Fanuc Automation assumes no
obligation of notice to holders of this document with respect to changes subsequently made.
TABLE OF CONTENTS
1 OVERVIEW................................
OVERVIEW................................................................
................................................................................................
................................................................................................
.........................................................................
......................................... 1
2 SAFETY ................................................................
................................................................................................
................................................................................................
..............................................................................
.............................................. 6
3 INTERNAL STRUCTURE
STRUCTURE................................
................................................................
................................................................................................
................................................................................
................................................ 17
4 INSTALLATION ................................................................
................................................................................................
...............................................................................................
............................................................... 25
5 MAINTENANCE ................................................................
................................................................................................
..............................................................................................
.............................................................. 48
c-1
TABLE OF CONTENTS B-70255EN/01
6 TROUBLESHOOTING ................................................................
................................................................................................
.....................................................................................
..................................................... 58
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TABLE OF CONTENTS B-70255EN/01
APPENDIX ................................................................
................................................................................................
................................................................................................
.............................................................................
............................................. 197
B SPECIFICATIONS ................................................................
................................................................................................
.........................................................................................
......................................................... 200
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B-70255EN/01 TABLE OF CONTENTS
H GLOSSARY ................................................................
................................................................................................
................................................................................................
.....................................................................
..................................... 261
c-5
B-70255EN/01 1.OVERVIEW
1 OVERVIEW
This manual describes the maintenance of the FANUC LASER-
MODEL C1000iA, as well as the structure, configuration, and
operation of the laser oscillator. This manual is aimed at those
personnel responsible for laser oscillator maintenance.
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1.OVERVIEW B-70255EN/01
1. Overview
This chapter describes the organization of this manual,
applicable models, related manuals, and notes on reading this
manual.
2. Safety
This chapter describes the handling of lasers, and provides
warnings, cautions and notes on high voltages, high temperatures,
and toxicity. All users must read this chapter carefully to ensure
safety.
3. Internal Structure
This chapter describes the structure and operation of the laser
oscillator.
4. Installation
This chapter describes the installation and checking of the laser
oscillator.
5. Maintenance
This chapter provides information on when and how the
consumable parts of the laser oscillator must be replaced.
6. Troubleshooting
This chapter describes the actions to be applied in the event of a
fault occurring in the laser oscillator.
7. Oscillator Connections
This chapter describes the internal connections of the electrical
system, cooling system, and gas system.
8. Unit Configuration
This chapter describes the internal units of the laser oscillator.
9. Setting and Adjustment
This chapter describes how to set and adjust the controls of the
laser oscillator.
10. Replacement Procedures
This chapter describes how to replace the individual units and
parts of the laser oscillator.
11. Laser Optical System
This chapter describes how to clean, replace, and align the
optical components of the laser oscillator.
Appendix
A. External View of Laser Oscillator
B. Specifications
C. Error Code List
D. Paramter List
E. Control Sequences in Laser Oscillator
F. Refixing and Replacing Gas Tube
G. Refixing and Replacing Water Tube
H. Glossary
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B-70255EN/01 1.OVERVIEW
Model Abbreviation
FANUC LASER-MODEL C1000iA C1000iA
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1.OVERVIEW B-70255EN/01
DESCRIPTIONS B-63192EN
CONNECTION MANUAL B-63193EN
FANUC Series 16i-LA OPERATOR’S MANUAL B-63194EN
MAINTENANCE MANUAL B-63195EN
PARAMETER MANUAL B-63200EN
DESCRIPTIONS B-70252EN
OPERATOR’S MANUAL B-70254EN
FANUC LASER-MODEL C1000iA
MAINTENANCE MANUAL
B-70255EN
(This manual)
-4-
B-70255EN/01 1.OVERVIEW
WARNING
Precautions to be applied in those situations where
there is a danger of the operator being killed or
seriously injured.
CAUTION
Precautions to be applied in those situations where
there is a danger of the operator being slightly
injured or the oscillator being damaged.
NOTE
Supplementary information other than precautions.
-5-
2.SAFETY B-70255EN/01
2 SAFETY
This chapter describes precautions to be observed to ensure the safe
operation of the laser oscillator.
Read this chapter thoroughly before attempting to use the laser
oscillator.
Also, read the safety precautions in the operator's manual supplied by
the machine tool builder.
The laser oscillator may present a danger not only to the operator but
also to other people working around the oscillator, up to a
considerable distance away. The laser oscillator must, therefore, be
operated only by a person who has received appropriate training.
Only persons who have understood the internal structure of the laser
oscillator and have received appropriate training can maintain the
laser oscillator.
A warning label is put on each dangerous position of the laser
oscillator. Be extremely careful about the labeled positions.
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B-70255EN/01 2.SAFETY
2.1 WARNING
(5) The laser beam shall be no higher than average eye height.
Enclose the path of the laser beam with covers. Do not leave the
end of the beam path open. Place laser- absorbing material at the
end of the beam path to absorb the beam's energy.
A CO2 laser beam is directional and has a high energy density.
Exposure to laser light can cause blindness. Flammable material
may burn or explode if exposed to the laser beam. If your eyes
are accidentally exposed to laser light, seek medical advice
immediately.
-7-
2.SAFETY B-70255EN/01
(8) The oscillator output mirror and focusing lens on the machining
head both have a substrate made of ZnSe (zinc selenide), a toxic
substance. Therefore, do not touch the mirror or lens with your
bare hands.
Inhaling ZnSe dust may cause difficulty in breathing, completely
stopping the breathing of the victim in the worst case.
If you accidentally touch the mirror or lens with your bare hands,
wash your hands well under running water.
If you accidentally inhale ZnSe dust or debris, seek medical
advice immediately.
(10) Before attempting to machine any material for the first time,
consult with the manufacturer of the material.
Some materials generate toxic gases when cut or drilled by a
laser beam.
Should you accidentally inhale any toxic gas, seek medical
advice immediately.
(11) If the laser oscillator must be moved, entrust the work to the
machine tool builder whenever possible. If performed by
inexperienced personnel, the oscillator may topple or be dropped,
resulting in a potentially fatal accident.
When the machine tool builder is not available to move the
oscillator, follow the procedure described on the hanging method
label. While moving the oscillator, stand well clear and never
pass under the oscillator.
-8-
B-70255EN/01 2.SAFETY
(12) Do not allow any dangerous or high-pressure gas to get into the
oscillator housing. The oscillator cabinet has a hermetic structure
(dustproof and dripproof), it cannot be ventilated easily.
Flammable gases such as oxygen can cause a fire or explosion.
Toxic gases can harm operators during maintenance. Organic
gases can degrade machining performance. High-pressure gases
can damage a panel or the cabinet, resulting in injury from flying
matters.
If such a gas accidentally gets into the oscillator housing, remove
a panel for ventilation. The installation room must be also well
ventilated.
To purge the oscillator housing, use purified, low-pressure air or
nitrogen.
-9-
2.SAFETY B-70255EN/01
2.2 CAUTION
(3) The gas circulating system in the oscillator becomes very hot.
Do not touch the gas pipes, turbo blower, heat exchanger, or
exhaust pump, until they have cooled down sufficiently after the
oscillator has been turned off. Otherwise, you may be burnt.
(4) Do not pass your hand in the optical path of the laser machine or
under the laser head when the shutter of the oscillator is open.
When the shutter is open, a laser beam may be emitted from the
oscillator accidentally. Before work in the optical path or under
the laser head, confirm that the shutter is closed.
(5) The workpiece becomes very hot during machining. Never touch
the workpiece with your bare hands. Otherwise, you may be
burnt.
(8) The oscillator contains cooling fan units. Although the fan units
are fitted with a finger guard, to prevent injury, keep your hands
well away from the fans.
- 10 -
B-70255EN/01 2.SAFETY
2.3 NOTE
(2) Warning labels are affixed to those parts of the oscillator where
there is a danger of exposure to laser radiation. Observe the
precautions given on the labels. (Section 2.4 shows the warning
labels.)
(3) Laser products shall conform to the regulations laid down in the
laser safety standard, including that stipulating control using a
key.
The oscillator start signal (RUN ON) shall be controlled with a
key switch such that the oscillator cannot be turned on without a
specific key.
Control using a key ensures that other than the authorized
personnel cannot operate the laser oscillator. It is extremely
dangerous if a person who is unfamiliar with the equipment
attempts to operate the laser oscillator.
(4) The shutter shall be unlocked only while a beam is being output.
Otherwise, keep the shutter locked to provide protection should
the laser accidentally be turned on.
- 11 -
2.SAFETY B-70255EN/01
The oscillator uses high voltages and laser beam radiation. Such
hazards are indicated with warning labels attached to the positions
shown in Fig. 2.4 (a) to (b).
- 12 -
B-70255EN/01 2.SAFETY
- 13 -
2.SAFETY B-70255EN/01
- 14 -
B-70255EN/01 2.SAFETY
- 15 -
2.SAFETY B-70255EN/01
The figures below show the laser optical paths inside the oscillator.
- 16 -
B-70255EN/01 3.INTERNAL STRUCTURE
3 INTERNAL STRUCTURE
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3.INTERNAL STRUCTURE B-70255EN/01
3.1 OUTLINE
- 18 -
B-70255EN/01 3.INTERNAL STRUCTURE
- 19 -
3.INTERNAL STRUCTURE B-70255EN/01
(1) Resonator
The resonator consists of an output mirror, rear mirror, folding
mirrors, discharge tubes, power sensor unit, etc. It converts
electrical energy first to laser gas, then to optical energy (10.6-
mm single-wavelength laser beam).
- 20 -
B-70255EN/01 3.INTERNAL STRUCTURE
- 21 -
3.INTERNAL STRUCTURE B-70255EN/01
(15) Shutter
The shutter has a rotary arm operated by a rotary solenoid and an
Au (gold)-evaporated reflecting mirror attached to the arm.
It can be opened and closed by CNC commands. It also has a
position sensor and a temperature sensor for safety and always
monitors the open/close status and shutter temperature.
- 22 -
B-70255EN/01 3.INTERNAL STRUCTURE
- 23 -
3.INTERNAL STRUCTURE B-70255EN/01
- 24 -
B-70255EN/01 4.INSTALLATION
4 INSTALLATION
- 25 -
4.INSTALLATION B-70255EN/01
- 26 -
B-70255EN/01 4.INSTALLATION
- 27 -
4.INSTALLATION B-70255EN/01
(4) Connect the power and signal lines to the oscillator. (See
Subsection 4.4.3 for details.)
Check items
1 Signal cable between the NC and oscillator (optical fiber), 24V DC
2 Oscillator power cable
3 Grounding cable (class-1)
4 Exhaust pump power cable (See Subsection 4.4.4 for details.)
Connect the power cable of the exhaust pump (to the oscillator
and pump).
(6) Laser gas and cooling water pipes. (See Subsections 4.4.1 and
4.4.2 for details.)
Check items
1 Laser gas pipe type
Recommended gas pipe
Nylon tube AS1, manufactured by Junko Co. Ltd.
Polyprotube, manufactured by Imperial Co. Ltd.
Stainless bright anneal pipe
2 There must be no gas leakage in the external piping between the gas
cylinder and oscillator.
3 Laser gas composition and purity (Check whether the specifications are
satisfied.)
4 Quality of cooling water (Tap water passed through an ion exchanger is
recommended.)
5 Flow of cooling water (IN, OUT)
6 Connection of the gas feeder piping of the exhaust pump
Connect the gas feeder piping of the exhaust pump (to the
oscillator and pump).
- 28 -
B-70255EN/01 4.INSTALLATION
(7) Check the input power supply voltage, frequency and phase
sequence. (See Section 6.5 for details.)
(8) Turn on the power, then check the operation of the fan motors in
the housing.
The fan motors installed in the oscillator start as soon as the
power to the CNC is turned on. Check the operation of each fan
motor. Note, however, that the fan motor installed in the laser
power supply does not start until the oscillator sequence reaches
the turbo blower ON operation.
(10) Check that cooling water is supplied normally, and that there is
no water leakage inside the oscillator or at any external
connection points.
(a) Turn off the main circuit breaker of the oscillator and
power supply.
(b) Check that the water inlet (IN) and outlet (OUT) of the
oscillator are connected correctly. If the water inlet and
outlet are connected incorrectly, the flow sensor mounted
on the outlet does not function, which prevents water from
flowing.
(c) Fully open the valves on the exhaust side so that the flow of
water is not impeded. By manually operating the chiller unit,
pass cooling water through the system at a flow rate of
about 10 liters/minute. Then, check that there is no water
leakage at the following locations:
1. The water inlet (IN) and outlet (OUT) of the oscillator
2. The water piping (including all tubes and joints) in the
oscillator
(d) Provided no water leakage is observed in step 3) above,
allow cooling water to flow through the oscillator at the
specified flow rate. Set the output pressure of the cooling
water circulating unit to 0.5 MPa(5 bar). Then, check that
there is no water leakage at the following locations:
1. The water inlet (IN) and outlet (OUT) of the oscillator
2. The water piping (including tubes and joints) in the
oscillator
- 29 -
4.INSTALLATION B-70255EN/01
Model Rated flow rate Pressure loss of the flow path in the
oscillator at rated flow rate
C1000iA 35 liters/minute 0.12 MPa
(e) Stop the chiller unit, then switch the operation mode from
manual (local) mode to automatic (remote) mode.
(f) If there is no water leakage, set the RUN key to ON to start
the oscillator. Check that the cooling water circulating unit
can be operated according to commands issued from the
CNC. If the flow rate is less than the specified value, alarm
No. 4072 (low cooling water flow rate) is issued soon after
the chiller unit is started. If this alarm is issued, proceed as
indicated in the guidance corresponding to this alarm.
(g) Check that the temperature of the cooling water is set to
room temperature plus 1°C. (The temperature of the cooling
water may be set to about 27°C throughout the year.) The
highest temperature that may be set is 30°C.
- 30 -
B-70255EN/01 4.INSTALLATION
(c) Reset the values of the bits of parameter No. 15025 through
parameter No. 15028 to their original values.
This completes the check.
(14) Check the oscillation characteristics and output. See Item (1) in
Section 4.3 for details of the check method.
Check items
1 Oscillation characteristic check :
- Check that the correction coefficient is 1100 or less.
- Check that the discharge voltage is within the
factory-set value plus 200 V.
If the correction coefficient or discharge voltage
exceeds the maximum, repeat discharge aging.
2 Discharge margin check
- Check that a margin is provided.
3 Voltage margin check
- Check that no alarm is issued.
(15) Check the laser beam mode. For details of the check method, see
Item (4) in Section 4.3.
Check items
1 Check that there is no significant difference from the
mode specified in the data sheets attached to the
oscillator.
2 Check that the mode shape is perfectly circular.
3 Check that no interference fringes can be observed
nearby.
- 31 -
4.INSTALLATION B-70255EN/01
(3) Remove the laser gas pipes, and attach blanking plugs to the
pipes to prevent dust from entering.
(4) When shipping the oscillator or exhaust pump only, follow the
steps explained below. If the oscillator and exhaust pump are
mounted on the machine, and so the possibility that the exhaust
pump may tumble does not exist, these steps are unnecessary.
(a) Detach the exhaust pump power line.
(b) Detach the gas piping from the exhaust pump, and plug up
the piping and exhaust pump to prevent foreign matter from
entering the piping and pump.
(c) Before shipping the exhaust pump only, discharge the oil
from the exhaust pump. When installing the exhaust pump,
supply new oil.
(6) Install all clamps and fit a blanking cap onto the beam outlet.
(7) Check the security of all connectors and printed circuit boards.
Install protective covers.
- 32 -
B-70255EN/01 4.INSTALLATION
(2) Weights :
About 350 kg (oscillator section)
About 30 kg (exhaust pump section)
- 33 -
4.INSTALLATION B-70255EN/01
(1) Open the cooling water inlet (IN) and outlet (OUT), and leave
both open. Cooling water will stop draining from the unit after
about 10 minutes.
(4) Once all cooling water has been removed, disconnect the
compressed air tube. Then, seal the cooling water inlet (IN) and
outlet (OUT) by attaching the blanking plugs provided with the
oscillator to the PT plugs.
CAUTION
Also, the cooling water should be removed from the
oscillator whenever the oscillator is to be stored over
the winter, when there is a danger of the cooling
water freezing. If the cooling water freezes, it may
destroy the cooling water pipes or other cooling
system components.
- 34 -
B-70255EN/01 4.INSTALLATION
CAUTION
As the external gas piping, use a pipe recommended
by FANUC.(See Subsection 4.4.2.)
Using a rubber hose, urethane tube, or brazed
copper pipe lowers the quality of the laser gas
guided to the oscillator, resulting in unstable
discharging.
This can lower the output level or cause a laser
power supply abnormality.
(3) Upon the completion of setting, close the main valve of the gas
cylinder.
(a) If the primary pressure of the regulator is abruptly reduced
to 0, gas will leak from the gas piping. Open the main valve
of the gas cylinder and locate the leaks using a liquid
leakage checker. Then, correct the leaks.
(b) If the pressure is reduced gradually, gas will leak from the
gas piping. Recheck the joints. Very occasionally, gas may
leak from the primary pressure side to the secondary
pressure side of the regulator. In such a case, the primary
pressure decreases, while the secondary pressure is
increases.
(c) A primary pressure reduction of within 10% over 8 hours is
normal.
CAUTION
If the amount of gas leakage from the gas piping is
very small, the gas composition will change more
rapidly when the pipe is longer, when the pipe
diameter is larger, or when a smaller amount of gas
is consumed. In such cases, the output will be
reduced, and discharge will tend to turn off more
easily.
- 35 -
4.INSTALLATION B-70255EN/01
(d) Upon the completion of this check, close the main valve of
the gas cylinder.
CAUTION
Periodically check the external gas piping for
leakage.
Parameter check
Laser oscillator parameter data sheets are attached to each oscillator.
Machine tool builders may prepare a parameter table including the
laser oscillator parameter data. If the attached parameter data sheets
are missing, contact your machine tool builder.
(2) Check the parameters, and enter the same values as those given
in the parameter table.
(2) Set the oscillator start switch to ON. The gas pressure inside the
oscillator can be checked with DGN 905.
(3) Alarm No. 4080 is issued eleven minutes after the oscillator is
started.
(4) Set the main circuit breaker of the oscillator to OFF. Then, turn
off the power to the CNC.
(5) Set the CNC start switch (RUN ON KEY) to OFF, then turn on
the power to the CNC.
- 36 -
B-70255EN/01 4.INSTALLATION
(7) After completing the check, turn on the start switch. Then, after
two to three seconds, turn off the switch. The oscillator will
perform a purge operation after 75 seconds.
Locating a leakage
When there is a gas leakage, locate the leakage by using a leakage
checker or liquid leakage checker.
CAUTION
The turbo blower is not designed for pressure
application. If pressure must be applied, the upper
pressure limit is 0.08 MPa. Never apply pressure
higher than 0.08 Mpa. Applying a high pressure may
damage the connector, oil gage, and so on. To
prevent the connector from being damaged, apply
pressure with the cable left attached to the turbo
blower.
(1) Turn on the power to the oscillator, then open the valve of the
gas cylinder.
(2) Set the secondary pressure of the regulator of the laser gas
cylinder to 0.05 MPa.
(4) Set the RUN key of the oscillator to ON, wait for two to three
seconds, then set the key to OFF. Wait until purge operation
starts.
(5) Place the leakage checker at a possibly faulty position where gas
seems to leak. If there is a leakage, the checker indicates it by
display or sound. When using the liquid leakage checker, drip
the liquid on a possibly faulty position. If gas leaks, bubbles
appear, so you can determine the location of a leakage.
NOTE
The leakage checker detects helium in the laser gas.
If ambient air flows, detection becomes difficult. So,
a gas leakage check should be made in a nearly no-
wind condition.
- 37 -
4.INSTALLATION B-70255EN/01
(6) After completing the check, reset the value set in (3) above to the
original setting.
Oscillation characteristics
(1) Modify the parameters listed below.
PRM No.15000 bit 4
Setting ® 1 (Three-minute correction is enabled.)
PRM.No.15008 bit 6
1 ® 0 (Automatic aging is disabled.)
(4) Record the output, discharge voltage, and current values two
minutes after making the specification. The discharge voltage
(RFV) is indicated in DGN909, and the current value (RFI) is
indicated in DGN910.
Compare the measured values of (4) and (7), above, with the
discharge voltage and current characteristics given in the data sheets.
If the discharge voltage (RFV) is high, check the external piping of
the laser gas and the laser gas composition, or perform aging.
- 38 -
B-70255EN/01 4.INSTALLATION
(3) Remove the top panel of the oscillator so that you can check the
discharge tubes and trigger electrode.
If discharge stops in step (5), check the external laser gas piping and
laser gas composition, or perform aging.
(4) Set the manual mode, and perform internal discharge operation
under the above conditions.
(6) Upon the completion of the check, restore the parameters modified
in step (1) to their original values.
- 39 -
4.INSTALLATION B-70255EN/01
An alarm, if issued in step (5), check the external laser gas piping and
laser gas composition, or perform aging.
(6) Direct the drier so that it blows air at 45° to the acrylic block,
then output the beam. If air is not provided correctly, the acrylic
vapor will catch fire.
(7) Observe the burn pattern, and record the directions (X direction,
Y direction) and output conditions.
Check items
1 Compare the recorded burn pattern with the burn
pattern data attached to the oscillator. Check that
there is no significant difference. Note, however, that
the shape may vary, depending on the distance.
2 Check that the shape is perfectly circular.
3 Check that no interference fringes can be observed
nearby.
- 40 -
B-70255EN/01 4.INSTALLATION
Discharge aging
If the oscillator is left unused for a long time (three days or more), or
if the laser gas circulating system has been opened to the atmosphere
(for example, to clean the mirrors or replace gas system components),
aging is required. This involves warming up the discharge tubes and
circulating gas by performing internal discharge to output absorbent
contaminants as gas. If the laser gas circulating system has been
opened to the atmosphere, perform a leakage check before attempting
aging.
(2) Set the RUN key to ON to start the oscillator. Perform discharge
by setting the HV ON switch to ON.
(3) Then, perform internal discharge for thirty minutes using the
settings indicated below. Two methods of internal discharge are
supported. One is automatic operation based on programming,
while the other is manual operation using switches.
Condition : 700, 100Hz, Duty 50%
· Automatic operation
1 Create the following program.
G32 P1 Q1 ;
G24 S700 P100 Q50 R900.; S is a power command.
G32 P0;
2 Lock the shutter, then start the program.
· Manual operation
This method can be used when the machine operator's panel
has a switch enabling manual internal discharge.
1 On the setting screen, enter the output power and duty
ratio.
2 Press the internal discharge switch to perform internal
discharge.
- 41 -
4.INSTALLATION B-70255EN/01
(4) After 15 minutes has passed, set the RUN key to OFF to stop the
oscillator.
(6) Reset the discharge gas pressure to the normal value, perform
internal discharge operation with the specified output level for
15 minutes, then perform purge operation.
(7) Repeat step 6) until the discharge voltage becomes the factory-
set value plus up to 200 V.
- 42 -
B-70255EN/01 4.INSTALLATION
The oscillator has connections for cooling water piping, laser gas
piping, and power and signal cables. For details of the electrical
connections for the CNC and machine, refer to the corresponding
connection manual.
4.4.1.2 Anticorrosive
To remove foreign matters such as fur that have adhered to the inside
of the cooling water circulating path, wash the cooling water
circulating path using the following detergent. Consult the chiller
manufacturer for use of the detergent.
Product name:
DESLIME
Manufacturer:
MITSUBISHI GAS CHEMICAL ISC
Use:
Add the detergent of 10% of the amount of cooling water,
circulate the water for an hour, then drain the water. After that,
rinse the cooling water circulating path thoroughly. Do not touch
a stock solution of DESLIME with your bare hands because the
solution is a strong chemical. If a stock solution accidentally
contacts your skin, wash the stock solution off your skin well
under running water.
If waste water used for washing is left standing, the main
ingredient, hydrogen peroxide, is decomposed. Wait until
hydrogen peroxide is decomposed, or dilute waste water with
water to reduce the concentration, then flush the waste water
down the drain.
- 44 -
B-70255EN/01 4.INSTALLATION
Product name:
Pure Water Supply Cartridge
Manufacturer:
ORUGANO Co. Ltd.
Use:
Refer to the description indicated on the product.
- 45 -
4.INSTALLATION B-70255EN/01
Supply the laser oscillator with a mixture of gases that satisfy the
conditions listed below.
Observe the following cautions for piping between the laser gas
cylinder and laser oscillator.
NOTE
Open the valve of the gas cylinder to pressurize the
inside of the pipe, then close the valve. Check to see
if the pressure in the pipe becomes low with time.
Monitor the primary pressure of the gas reducer for
over 8 hours. If the gas pressure becomes lower by
10% within 8 hours, gas is likely to be leaking. Take
an appropriate measure.
- 46 -
B-70255EN/01 4.INSTALLATION
- 47 -
5.MAINTENANCE B-70255EN/01
5 MAINTENANCE
In FANUC LASER-MODEL C1000iA, periodic inspection items
have been reduced, and adjustments have been made easy. To keep
the oscillator in a satisfactory operating condition over a long period,
however, it is necessary to carry out periodic maintenance (including
daily maintenance) described in this chapter. The oscillator is
designed to maintain the same performance and reliability as it has
when it is installed, provided that maintenance is carried out as
prescribed.
- 48 -
B-70255EN/01 5.MAINTENANCE
Table 5.1 lists daily inspection items. Inspect the C1000iA according
to this table. When parts (including oil) have been used for a
prescribed period, replace them quickly.
- 49 -
5.MAINTENANCE B-70255EN/01
- 50 -
B-70255EN/01 5.MAINTENANCE
When opening the panels and doors during maintenance, keep the
power turned off. Before replacing oil, be sure to check that purging
is completed.
Check method
Check the amount of oil in the turbo blower while referring to the
figure below. The oil level should be between graduations H and L.
This check should be made when the oscillator is at a rest. When the
turbo blower is running, it is impossible to check the amount of oil
correctly.
Replenishment method
(1) Remove the hexagonal-head screw from the oil inlet with a 17
mm wrench. Be careful not to lose the O-ring on the screw.
Before supplying turbo oil, stop the oscillator according to the
correct procedure and turn off the power.
CAUTION
If the oscillator is not stopped by the correct
procedure, the pressure in the turbo blower becomes
negative. Opening the oil inlet under such a condition
lets a large amount of air get in the turbo blower.
This flow of air causes oil mist to get into the
oscillator housing, resulting in contamination of
internal mirrors.
- 51 -
5.MAINTENANCE B-70255EN/01
(4) If oil has spilled over, wipe it up. Otherwise, the peripheral
equipment may be affected adversely.
(5) If there is oil left over, put the inner lid back on the bottle, and
keep the bottle in a dark, cool place.
Replacement method
(1) Get a container for oil drain on hand, and put the tip of the drain
tube into the container.
(2) Turn the oil drain cock through 90 degrees, and the oil will start
draining. Opening the oil inlet during draining can drain oil fast.
(3) After all the oil has been drained, close the oil drain cock by
setting it back in the initial place.
(4) Supply oil by following the same procedure as for
replenishment.
CAUTION
After replacing the turbo blower oil, perform
discharge aging.
- 52 -
B-70255EN/01 5.MAINTENANCE
Check method
Watch the oil gauge, and check that the oil level is between
graduations L and H. Also check whether the oil is dark.If the oil
level is below L, add oil to the turbo blower or replace the oil in it. If
the oil level is above H, drain until the oil level becomes below H.
CAUTION
The exhaust of the turbo blower contains oil mist.
The exhaust pump will capture oil mist, and the
amount of exhaust pump oil increases with time.
When the oil has increased too much, the filter gets
immersed in the oil, possibly causing white mist to
come out from the pump, or oil to leak. Furthermore,
the exhaust capacity may get lowered, or the pump
may be damaged.
- 53 -
5.MAINTENANCE B-70255EN/01
Replacement method
(1) Stop the oscillator, and turn off the power.
(2) Remove the oil inlet plug. There is an O-ring on it. Be careful
not to damage it. A missing or damaged O-ring can lower the
exhaust capacity of the pump.
(3) Insert the drain tube into a drain oil pot.
(4) Open the drain cock.
(5) After the oil has been drained up, close the cock.
(6) Supply 1.8 liters of new oil through the oil inlet, while watching
the oil gauge.
(7) Attach the oil inlet plug.
- 54 -
B-70255EN/01 5.MAINTENANCE
Replacement method
When the operation time reaches 3000 hours or the exhaust capacity
gets lowered, replace the filter. A clogged filter may cause a whitish
smoke of oil mist to come out of the pump or lower the exhaust
capacity.
- 55 -
5.MAINTENANCE B-70255EN/01
The maintenance parts are listed below. Refer to the following tables
for maintenance unit and part specification information. The part
specifications for oscillators compatible with CE marking are not
listed below.
[Nonrepairable parts]
Name Specification Q'ty
1 Output mirror A98L-0003-0045 1
2 Rear mirror A98L-0001-0750 1
3 Folding mirror A98L-0003-0047 3
4 Output rear mirror O-ring A98L-0001-0619/2025 2
5 Output rear mirror O-ring A98L-0001-0619/1028 2
6 Folding mirror O-ring JB-OR4D-P38 3
7 O-ring for discharge tube A98L-0003-0004/P22.4S 8
8 Discharge tube A290-4514-T001 4
9 Exhaust pump filter A98L-0001-0911 1
10 Exhaust pump oil A98L-0040-0093/1.0L6 (3.6 liters)
11 Turbo blower oil A04B-0800-K326 (1/3)
12 Turbo blower oil inlet O-ring JB-OR4D-P10 1
13 Condensation sensor A04B-0801-D012 1
14 Shutter switch unit A04B-0816-D002 1
15 Tempataure switch for A57L-0001-0095/B050 1
absorber (A04B-0816-D002)
16 Tempataure switch for A57L-0001-0057/090 1
shutter mirror (A04B-0816-D002)
17 Photoelectric switch for A57L-0001-0091 2
shutter (A04B-0816-D002)
18 Flow sensor unit A91L-0001-0216/50-E-00A 1
19 Guide laser A04B-0811-D401 1
(semiconductor laser unit)
20 Cooling fan A90L-0001-0396 6
21 Hour meter A91L-0001-0219 1
22 Circuit braker (JPN) A60L-0001-0308/W075JH2 1 (QF1)
Tripping 24VDC
23 Circuit braker (USA) A60L-0001-0238/080B 1 (QF1)
Tripping 24VDC
24 Circuit braker A60L-0001-0391/V050 1 (QF2)
25 Circuit braker A60L-0001-0391/V030 1 (QF3)
26 Circuit braker A60L-0001-0308/X010 1 (QF4)
27 Circuit braker A60L-0001-0308/V005 1 (QF5)
28 Circuit protector A60L-0001-0262/5W 1 (QF6)
29 Electromagnetic conductor A58L-0001-0243 2 (KM1,
KM2)
30 Electromagnetic conductor A58L-0001-0313/A2A3P13 1 (KM3)
31 Surge absorber A74L-0001-0008/10D50D 2 (Z1, Z2)
32 Surge absorber A74L-0001-0087/A 1 (Z3)
33 Surge absorber A74L-0001-0100 1 (Z110)
34 Surge absorber A74L-0001-0091/B 1 (Z111)
35 Trigger electrode assembly A98L-0005-0187 4
36 Trigger electrode O-ring JB-OR4D-P10 4
- 56 -
B-70255EN/01 5.MAINTENANCE
[Nonrepairable parts]
Name Specification Q'ty
37 Gas filter A97L-0201-0771/H-0.5-B 1
38 Nylon ferrule 1/4” A98L-0004-0348/2-N 6
39 Nylon ferrule 3/8” A98L-0004-0348/3-N 6
40 Nylon ferrule 1/2” A98L-0004-0348/4-N 2
41 Shutter mirror A290-4514-X206 1
42 Shutter mirror (for guide A98L-0001-0708 1
laser)
43 Heat exchanger (in) A97L-0201-0969 1
44 Heat exchanger (out) A97L-0201-0968 1
45 Heat Exchanger (for use A97L-0200-0849 2
within the cabinet)
46 Beam absorber A97L-0200-0937/C 1
47 Warning lamp A04B-0815-C324 1
[Repairable parts]
Name Specification Q'ty
1 Laser power supply unit A14B-0082-B209 1
2 Matching box A14B-0082-B316 1
3 IF PCB (for 16iL) A16B-2100-0141 1
4 Gas control PCB A16B-1700-0490 1
5 Relay PCB B A16B-1600-0361 1
6 Input unit control PCB A16B-1600-0660 1
7 Turbo PCB A16B-1600-0670 1
8 Stabilized power supply A20B-1005-0124 1
9 Power sensor unit A04B-0816-D001 1
10 Shutter unit A04B-0816-D410 1
11 Turbo blower A04B-0800-C013 1
12 Intake unit (gas controller) A04B-0816-D400 1
13 Exhaust unit (gas controller) A04B-0816-D401 1
14 Sensor base (gas controller) A290-4514-V040 1
15 Pressure controller A91L-0001-0217/0-T2 1 (Setting at
factory)
(Pressure sensor+cable kit) A91L-0001-0201 1
A04B-0816-K135 1
16 Control valve A04B-0816-D402 1
17 Water distributer unit (out) A04B-0816-C421 1
18 Water distributer unit (in) A290-4514-V801 1
19 High-frequency inverter A90L-0001-0500/8LF 1
20 Exhaust pump A90L-0001-0425 1
- 57 -
6.TROUBLESHOOTING B-70255EN/01
6 TROUBLESHOOTING
- 58 -
B-70255EN/01 6.TROUBLESHOOTING
(1) Action in response to alarm screen display (See Sections 6.2 and
6.3.)
(2) Major faults
(a) Laser power supply unit alarm display (See Section 6.4.1.)
(b) The power cannot be turned off with the CRT/MDI power
switch. (See Section 6.4.2.)
(c) The power cannot be turned on with the CRT/MDI power
switch. (See Section 6.4.2.)
(d) The laser output level is low immediately after the power is
turned on. See Section 6.4.2.)
(e) The laser output displayed on the CRT screen is unstable.
(See Section 6.4.2.)
(f) A cooling fan circuit breaker trips. (See Section 6.4.2.)
(g) The magnetic contactor for a exhaust pump causes thermal
trip. (See Section 6.4.2.)
(h) The main circuit breaker trips. (See Section 6.4.2.)
(i) Excessive laser gas consumption. (See Section 6.4.2.)
(j) A high-frequency inverter related alarm is displayed. (See
Section 6.4.2.)
CHECKING ON FAULTS
After identifying the following items, call the FANUC service center.
In some cases, a symptom is not actually a fault in the oscillator,
although it looks like a fault. So, check it with the following sections.
(1) Symptoms
(a) State of operation
(machining in progress, oscillator being started, etc.)
(b) Timing of a fault (alarm)
(c) Alarm number
(d) How often the fault occurs
(e) Oscillator serial number
- 59 -
6.TROUBLESHOOTING B-70255EN/01
See the conceptual diagram of alarm processing and the list of error
code in the Appendix C.
- 60 -
B-70255EN/01 6.TROUBLESHOOTING
The alarm numbers, DGNs, and parameter Nos. are of the FS16i-L.
ALM No.4061
AD converter 1 is not normal.
ALM No.4062
AD converter 2 is not normal.
ALM No.4063
Anomaly of laser power supply unit
This message appears when the laser power supply unit becomes
abnormal or performs protective operation. For the causes of
trouble and their solutions, see the table below and Section 6.4.
The power supply unit performs protective operation even when
a part other than the power supply unit becomes abnormal, so
sufficient investigation is required. If just the power supply unit
is replaced without removing the fundamental cause, the alarm
will recur.
- 61 -
6.TROUBLESHOOTING B-70255EN/01
- 62 -
B-70255EN/01 6.TROUBLESHOOTING
(3) Solution
Cause of trouble Solution
1 IF PCB abnormal Replace the IF PCB.
2 Laser power supply Locate the faulty component, then replace it.
abnormal
3 Laser power supply Adjust the laser power supply as explained in
maladjusted Chapter 9.
4 External laser gas Identify the faulty location, then repair the
pipe abnormal external pipe as explained in Chapter 4.
5 Laser gas Replace the laser gas with one that satisfies the
composition ratio specifications. If there is a leakage in the
abnormal external piping and a gas cylinder is attached to
the piping for a long time, the gas composition
may have changed.
6 Pressure sensor Replace the pressure sensor.
abnormal
7 Internal leakage, Check the faulty location, and replace the faulty
leakage of water part so that the leakage is within the allowable
range (not more than 10/15 minutes set as the
amount of change in DGN. 905).
- 63 -
6.TROUBLESHOOTING B-70255EN/01
ALM No.4065
Shutter anomaly
ALM No.4066
Discharge starting anomaly
After HV is turned on(start discharge), the discharge starts. This
alarm occurs when at least one discharge tube discharges hard
and causes high voltage.
- 64 -
B-70255EN/01 6.TROUBLESHOOTING
ALM No.4067
Overheating laser oscillator housing
The temperature of the input side of the electrode cooling fan is
monitored and sends alarm when it exceeds 60°C. When the
temperature decreases, the alarm state is solved automatically.
Before that it cannot be reset. The C1000iA does not have the
sensor.
- 65 -
6.TROUBLESHOOTING B-70255EN/01
ALM No.4068
Too much incident laser beam back to the resonator.
This alarm is issued, if a workpiece reflects laser beam more
than the rating to the laser oscillator. This can happen when the
laser beam is used to drill, cut, or weld materials (such as copper,
brass, and aluminum) having a high reflectivity to the laser beam
(10.6 mm).
ALM No.4069
Anomaly of power supply unit voltage of IF PCB
This alarm appears when there occurs the anomaly in the
stabilized power unit voltage +5, ±15, +24V of IF PCB for NC
interface.
- 66 -
B-70255EN/01 6.TROUBLESHOOTING
ALM No.4070
Anomaly of chiller unit
Setting the RUN ON switch to ON causes the CNC to output a
chiller unit start signal to the machine, which will respond with a
chiller unit ready signal. The CNC monitors this signal. If the
chiller ready signal stops, the CNC issues this alarm. Check the
DGN status to confirm the signal from the chiller unit. If the
signal is abnormal, check the chiller unit.
ALM No.4071
Anomaly of assist gas
When starting machining, the CNC monitors for a ready signal
from the assist gas supply unit in the machine. If this signal is
not sent normally, the CNC issues this alarm.
Check the DGN status to confirm the signal from the assist gas
supply unit. If the signal is abnormal, check the assist gas supply
unit.
This alarm is issued also when in G32PaQb, a is not 0 to 3, or b
is not 1 to 7 during program execution.
- 67 -
6.TROUBLESHOOTING B-70255EN/01
Related parameters
G221#7 AGRDY Assist gas ready signal
G222#5 AGST Assist gas start signal
F222#2-#0 AG1-AG3 Assist gas selection signal
ALM No.4072
Shortage of cooling water
This alarm appears when the water shortage takes place.
ALM No.4073
Decrease of laser gas pressure
The pressure of the laser gas supplied to the laser oscillator is
monitored.
This alarm is issued, if this pressure becomes lower than the
permissible level.
- 68 -
B-70255EN/01 6.TROUBLESHOOTING
Related parameters
PRM.15009#7 TEM Tank supply pressure
DGN.960#5 *MGP Laser gas supply pressure sensor
ALM No.4074
Roots blower overheat
This alarm is issued if the maximum allowable temperature of
the motor sequence section of the Roots blower is exceeded.
When an oscillator having turbo blowers is used, this alarm is
not issued.
- 69 -
6.TROUBLESHOOTING B-70255EN/01
ALM No.4075
Condensation
A condensation sensor is mounted near the output mirror holder
in the oscillator. This alarm occurs when the sensor detects
condensation. After this alarm occurs, the alarm status cannot be
reset until the condensation status is released. Do not blow hot
air of 60°C or higher on the condensation sensor.
ALM No.4076
Laser output decrease
This alarm is issued, if the monitored laser output is much lower
than the specified laser output, that is the monitored laser output
is lower than the specified output by a value specified in
parameter No. 15271.
- 70 -
B-70255EN/01 6.TROUBLESHOOTING
ALM No.4077
Overheat of beam absorber
Laser beam is introduced into the beam absorber, when the
oscillation takes place with shutter closed. This absorber is
water-cooled and sends alarm when the temperature of the
absorber exceeds a critical one. In the usual operation, the
irradiation of the absorber takes place only during the calibration
after the oscillator start.
ALM No.4078
Gas pressure anomaly in discharge tube
The gas pressure is monitored after the discharge start ready
condition (LRDY) is established. This alarm is issued, if the
monitored gas pressure deviates by ±100 (1330Pa) from the set
gas pressure.
- 71 -
6.TROUBLESHOOTING B-70255EN/01
ALM No.4079
Press the RESET key
If the emergency stop button is pressed after the discharge start
ready condition (LRDY) is set up, the shutter is closed,
discharge stops, and the LRDY condition is resumed, then this
alarm is displayed. To reset the alarm, remove the cause of
trouble, release the emergency stop button, and press the reset
key on the operator's panel.
- 72 -
B-70255EN/01 6.TROUBLESHOOTING
ALM No.4080
Leakage of gas tube/anomaly of exhaust pump
When the RUN (pressure control start) button is pressed, the
exhaust pump starts evacuating the gas in the circulating system
to place the oscillator in the low-pressure state. This alarm
occurs when the pressure does not reach the exhaust completion
pressure specified for parameter No. 15240 until the specified
time (default: 10 minutes) has elapsed after the start of exhaust.
- 73 -
6.TROUBLESHOOTING B-70255EN/01
ALM No.4081
Anomaly of gas pressure control
Pressing the RUN (pressure control start) button starts expelling
air from the laser gas tube. When a specified degree of vacuum
is attained, laser gas is supplied into the laser gas tube, and gas
pressure control begins.
Whether the pressure is within ±20 (266 Pa) of the pressure
specified for parameter No.15241 is checked, 45 seconds after
the start of gas pressure control. This alarm occurs when the
pressure does not fall within this range. When no error occurs,
the turbo blower rotates and the discharge start ready condition
(LRDY) is established.
- 74 -
B-70255EN/01 6.TROUBLESHOOTING
ALM No.4082
Anomaly of pressure sensor
This alarm appears when the signal of the pressure sensor used
for pressure control detector vanishes.
- 75 -
6.TROUBLESHOOTING B-70255EN/01
ALM No.4085
Decrease of laser output power
This alarm appears when the laser output power decreases and
takes an abnormally higher calibration coefficient.
ALM No.4087
Shutter temperature abnormal
This alarm is issued when the temperature of the shutter mirror
exceeds a preset maximum (80°C)
The table below lists the causes of faults and the corresponding
countermeasures.
- 76 -
B-70255EN/01 6.TROUBLESHOOTING
ALM No.4088
Discharge tube voltage drop
This alarm is issued, if the voltage applied to the discharge tube
drops largely. More specific, the discharge tube voltage for
reference discharge is set up automatically to parameter No.
15270 each time the RUN button is pressed. This alarm is issued,
if the automatically set discharge tube voltage is lower than the
discharge voltage specified at the previous RUN time, by at least
the amount specified in parameter No. 15272.
- 77 -
6.TROUBLESHOOTING B-70255EN/01
ALM No.4089
Assist gas not output
This alarm is issued, if an attempt is made to radiate a laser beam,
when no assist gas is selected, or an assist gas condition is not
set up.
ALM No.4090
Laser beam not generated
This alarm is issued, if an attempt is made to radiate a laser beam,
when the laser oscillator is not in the LSTR state (discharging
state).
ALM No.4094
Vacuum pump operation abnormal
This alarm occurs when the thermal switch of the magnetic
contactor for the exhaust pump is tripped.
- 78 -
B-70255EN/01 6.TROUBLESHOOTING
ALM No.4095
A/D CONVETER-3
This alarm is issued when A/D converter 3 does not return the
conversion completion signal in the specified time after the
converter starts conversion. This A/D converter is designed for
reading the amount of tracing displacement.
ALM No.4096
UNDER TRACING
This alarm is issued when an attempt is made to change the trace
axis by using the trace axis selection function during tracing
control.
ALM No.4097
TRACE AXIS SELECT
This alarm is issued when two or more trace axis selection
signals are specified using the trace axis selection function.
ALM No.4098
TRACE AXIS & PLANE
This alarm is issued when no plane is selected for the trace axis.
ALM No.4099
GAS PRES.NOT REACH
This alarm is issued, if the discharge tube gas pressure does not
reach [specified discharge tube gas pressure during oscillation -
tolerance] after HV is set to ON.
- 79 -
6.TROUBLESHOOTING B-70255EN/01
ALM No.4100
INVETER1
If the inverter used to power the turbo blower is abnormal, this
alarm is issued.
When this alarm is issued, check that the alarm LED on the LED
indicator section of the inverter is lit. At this time, do not turn off
the power to the inverter because the alarm will be reset if the
power is turned off.
For an explanation of faults and corresponding countermeasures,
see the Subsection 6.4.10.
- 80 -
B-70255EN/01 6.TROUBLESHOOTING
ALM No.4101
OUT OF FREQUENCY 1
This alarm is issued, if a frequency reached signal is not received
within 120 seconds after the turbo blower is started.
ALM No.4105
TURBO TEMP. 1
This alarm is issued, if the temperature of the turbo blower
motor winding becomes higher than the permissible level.
- 81 -
6.TROUBLESHOOTING B-70255EN/01
ALM No.4106
BLOWER OIL SHORTAGE
This alarm is issued if the signal from the turbo blower oil sensor
indicates that the oil level has fallen below the setting.
ALM No.4107
MIRROR NOT INSTALLED
This alarm is issued, if the beam reflecting unit is not attached
with a mirror or mirror holder.
Because the beam reflecting unit is not mounted in the C1000iA,
this alarm is issued only when the turbo PCB is defective.
- 82 -
B-70255EN/01 6.TROUBLESHOOTING
ALM No.4132
PARAMETER WAS CHANGED
- 83 -
6.TROUBLESHOOTING B-70255EN/01
#7 #6 #5 #4 #3 #2 #1 #0
DGN.974 No.8 No.7 No.6 No.5 No.4 No.3 No.2 No.1
(2) Check the LEDs of the power supply unit that issued the alarm
signal. After an alarm is issued, turning off the power to the
oscillator causes the LED indication to disappear. So, check the
LEDs while leaving the power to the oscillator on.
- 84 -
B-70255EN/01 6.TROUBLESHOOTING
If the power supply unit fails just because the high-speed diode or
FET module is damaged, the power supply unit can be repaired by
component or PCB replacement. Other adjustments are not required.
If the power supply unit itself is replaced, power supply adjustments
are required after aging.
(1) The cooling water temperature is not normal, although the chiller
unit is operating. This phenomenon may be caused when the
ambient temperature is low. In such a case, the specified
temperature will be set in five to ten minutes after the unit starts.
So, perform activation again.
(2) Slight leakage exists in the tube between laser and gas cylinder.
This is the case in which the laser output in the first run after a
long halt is low and becomes normal after the second run. Check
for leakage, loose fixing or crack. Correct the tube and fitting if
any anomaly exists.
First check if PRM No. 15216 is taking the value of 60, which is a
standard. In case the fluctuation continues with this value used, read
the laser output monitor value indicated in DGN=906. Its range of
fluctuation is smaller than ±50. If it exceeds this value, check the
followings.
(1) Is the coaxial cable between the laser power sensor mounted on
the rear mirror holder and the relay PCB B (A16B-1600-0361) or
the cable between the relay PCB B and the IF PCB (A16B-2100-
0141) inside the laser oscillator fixed tightly?
(2) Is there anomaly in the laser power sensor output? Is the DC
resistor between the terminals of the power sensor unit in the
range 100W-500W?
(3) Check the input signal (LPWI-0V) of the relay PCB B.
- 85 -
6.TROUBLESHOOTING B-70255EN/01
- 86 -
B-70255EN/01 6.TROUBLESHOOTING
Causes of alarms
When an inverter alarm is issued, a message as shown below appears
on the digital panel of the inverter. The causes of the inverter alarms
are listed below.
Display : Exx.z
Exx : Cause of alarm (Message)
z : Status of inverter at alarm occurred
- 87 -
6.TROUBLESHOOTING B-70255EN/01
NOTE
If E8 (EEPROM error) occurs, check parameter
settings.
Alarm indication
This inverter can display information on the most recently issued six
alarms as shown below. The latest alarm is indicated on trip monitor 1
(d 081).
d081 : Trip monitor 1
d082 : Trip monitor 2
d083 : Trip monitor 3
d084 : Trip monitor 4
d085 : Trip monitor 5
d086 : Trip monitor 6
Indication items
(1) Cause of alarm (See the table of causes of inverter alarms given
previously.)
(2) Frequency (Hz) when the alarm was issued
(3) Output current (A) when the alarm was issued
(4) DC voltage (V) across P and N when the alarm was issued
(5) Cumulative operation time (hours) when the alarm was issued
(6) Cumulative power-on time (hours) when the alarm was issued
- 88 -
B-70255EN/01 6.TROUBLESHOOTING
Display method
d081
(Function/FUNC keys)
(1) E01.3
(Up/Down keys)
(2) 1000
(Up/Down keys)
(3) 28.0
(Up/Down keys)
(4) 280
(Up/Down keys)
(5) 15
(Up/Down keys)
(6) 18
(Up/Down keys)
- 89 -
6.TROUBLESHOOTING B-70255EN/01
U V W G (Class 1 Ground )
- 90 -
B-70255EN/01 6.TROUBLESHOOTING
- 91 -
6.TROUBLESHOOTING B-70255EN/01
By using the IF PCB pins, check that each signal of the IF PCB is
normal. Fig. 6.5.3(a) show the pin locations.
- 92 -
B-70255EN/01 6.TROUBLESHOOTING
When the diagnosis function is used, the data indicated below can be
displayed.
¬PMC status display
CNC¬
#7 #6 #5 #4 #3 #2 #1 #0
G220 *DU16 *DU8 *DU4 *DU2 *DU1
#7 #6 #5 #4 #3 #2 #1 #0
G221 AGRDY CLRDY
#7 #6 #5 #4 #3 #2 #1 #0
G222 HVON RUN AGST BEMON SHTON SCLON *BEMLC *SHTLC
#7 #6 #5 #4 #3 #2 #1 #0
G223 POV7 POV6 POV5 POV4 POV3 POV2 POV1 POV0
- 93 -
6.TROUBLESHOOTING B-70255EN/01
#7 #6 #5 #4 #3 #2 #1 #0
F221 BEAM LSTR RFHV CLON WAIT PURGE LRDY LARM
#7 #6 #5 #4 #3 #2 #1 #0
F222 CW PULSE AG3 AG2 AG1
- 94 -
B-70255EN/01 6.TROUBLESHOOTING
909 RF VOLTAGE 1
910 RF CURRENT 1
911 RF VOLTAGE 2
912 RF CURRENT 2
913 RF VOLTAGE 3
914 RF CURRENT 3
915 RF VOLTAGE 4
916 RF CURRENT 4
917 RF VOLTAGE 5
918 RF CURRENT 5
919 RF VOLTAGE 6
920 RF CURRENT 6
- 95 -
6.TROUBLESHOOTING B-70255EN/01
921 RF VOLTAGE 7
922 RF CURRENT 7
923 RF VOLTAGE 8
924 RF CURRENT 8
925 DC VOLTAGE 1
926 DC CURRENT 1
927 DC VOLTAGE 2
928 DC CURRENT 2
929 DC VOLTAGE 3
930 DC CURRENT 3
931 DC VOLTAGE 4
932 DC CURRENT 4
933 DC VOLTAGE 5
934 DC CURRENT 5
935 DC VOLTAGE 6
936 DC CURRENT 6
937 DC VOLTAGE 7
938 DC CURRENT 7
939 DC VOLTAGE 8
940 DC CURRENT 8
910 DCW 1
910 DCW 2
910 DCW 3
910 DCW 4
- 96 -
B-70255EN/01 6.TROUBLESHOOTING
910 DCW 5
910 DCW 6
910 DCW 7
910 DCW 8
#7 #6 #5 #4 #3 #2 #1 #0
960 *SFI *RBT *MGP *AP FRQ *ESA *EN
#7 #6 #5 #4 #3 #2 #1 #0
961 *ABT *SHT SOF SON *RAL *WT1 *CAT *MVW
- 97 -
6.TROUBLESHOOTING B-70255EN/01
#7 #6 #5 #4 #3 #2 #1 #0
962 *OH1 *TC1 *RV1 *VB1 *AR1 *IA1
#7 #6 #5 #4 #3 #2 #1 #0
963 *OH2 *TC2 *RV2 *VB2 *AR2 *IA2
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B-70255EN/01 6.TROUBLESHOOTING
#7 #6 #5 #4 #3 #2 #1 #0
964 *OH3 *TC3 *RV3 *VB3 *AR3 *IA3
#7 #6 #5 #4 #3 #2 #1 #0
966 *PSA08 *PSA07 *PSA06 *PSA05 *PSA04 *PSA03 *PSA02 *PSA01
*PSA01 to *PSA08
Displays the operating states of power supply units No. 1 to 8.
#7 #6 #5 #4 #3 #2 #1 #0
968 ACS PLS SL4 SL3 SL2 SL1 SL0
#7 #6 #5 #4 #3 #2 #1 #0
969 HSC SP2 SP1
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6.TROUBLESHOOTING B-70255EN/01
#7 #6 #5 #4 #3 #2 #1 #0
970 PS08 PS07 PS06 PS05 PS04 PS02 PS02 PS01
#7 #6 #5 #4 #3 #2 #1 #0
972 TWV BPV PTL GRY VEN RPA RBA PUG
#7 #6 #5 #4 #3 #2 #1 #0
973 LSC PCS FW IB *PCL OFS SOP
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B-70255EN/01 6.TROUBLESHOOTING
#7 #6 #5 #4 #3 #2 #1 #0
974 PSAR8 PSAR7 PSAR6 PSAR5 PSAR4 PSAR3 PSAR2 PSAR1
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7.OSCILLATOR CONNECTIONS B-70255EN/01
7 OSCILLATOR CONNECTIONS
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B-70255EN/01 7.OSCILLATOR CONNECTIONS
- 103 -
7.OSCILLATOR CONNECTIONS B-70255EN/01
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B-70255EN/01 7.OSCILLATOR CONNECTIONS
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7.OSCILLATOR CONNECTIONS B-70255EN/01
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B-70255EN/01 8.OSCILLATOR CONNECTIONS
8 OSCILLATOR CONNECTIONS
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8.OSCILLATOR CONNECTIONS B-70255EN/01
Fig. 8.1(a) shows the power magnetics cabinet configuration, and Figs.
8.1(b) through (d) show the input units.
QF1 QF2 KM1 To laser power
supply
QF6 To IF PCB
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B-70255EN/01 8.OSCILLATOR CONNECTIONS
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8.OSCILLATOR CONNECTIONS B-70255EN/01
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B-70255EN/01 8.OSCILLATOR CONNECTIONS
Relay PCB B is used to group signals sent from the shutter section
and to output the grouped signals to the interface PCB. CN59 is an
output terminal for connecting a measuring instrument used in
alignment. Fig. 8.2 shows the layout of relay PCB B.
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8.OSCILLATOR CONNECTIONS B-70255EN/01
(3) Filter
The filter prevents impurities from entering the oscillator.
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B-70255EN/01 8.OSCILLATOR CONNECTIONS
- 113 -
8.OSCILLATOR CONNECTIONS B-70255EN/01
- 114 -
B-70255EN/01 9.SETTING AND ADJUSTMENT
- 115 -
9.SETTING AND ADJUSTMENT B-70255EN/01
This unit is precisely adjusted at the factory and should not require
any further adjustment. If the power supply unit, matching box, or
discharge tube is replaced, however, the unit should be set and
adjusted as described below. When an FET module or diode in the
laser power supply is replaced, no adjustment is necessary.
For power supply adjustment, VR11 and VR13 are used. VR11 is
used to adjust base discharge, and VR13 is used to adjust the
maximum output of the power supply.
(1) Set the S2 setting pin (VR13 adjustment range setting) according
to Table 2.
(2) Set the S5 setting pin (matching box temperature sensor setting)
according to Table 2.
(3) Connect the cable for DCI and DCV measurement to CN17.
(4) Check the connections of the cables, water joints, and discharge
tube.
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B-70255EN/01 9.SETTING AND ADJUSTMENT
NOTE
For the setting of the other parameters, follow the
data sheet.
(1) Start the oscillator, and wait until the gas pressure is stabilized in
the base discharge state.
(Wait about 3 minutes. See DGN 905.)
(2) Then, check that all discharge tubes are continuously discharging.
If a discharge tube stops discharge, turn VR11 of the power
supply corresponding to the discharge tube clockwise until the
discharge tube discharges.
(3) Turn VR11 counterclockwise slowly to set the state where all of
the four discharge tubes are about to stop main discharge.
(6) Turn off HV and set 2790 in PRM 15223 for specifying a bias
command value. (See Appendix B.)
(7) Check that trigger electrode discharge lasts for five minutes in
the base discharge state. If discharge is turned off, turn VR11 of
the power supply clockwise slowly, and increase the value of
RFI by 4 mA or increase the value of DCV by 0.7 V. After
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9.SETTING AND ADJUSTMENT B-70255EN/01
(8) Turn off HV, then set 2850 in PRM 15223 for specifying a bias
command value. (See Section 9.1.6.)
(9) When the base discharge state is set, wait for the gas pressure to
become stable.
(1) Specify the output of a half of the rated output value, and turn on
the beam. While checking that the power supply output (Note 1
in the Table 9.1.7) does not exceed the maximum power supply
output (Table 9.1.7) and that the value of DCV (Note 1 in the
Table 9.1.7) does not exceed 230V with A14B-0082-B209,
increase the output gradually to the maximum command value
(Table 9.1.7). If the maximum value is about to be exceeded,
turn VR13 counterclockwise to prevent the maximum value from
being exceeded.
(3) Record the value of RFI or the values of RFI and DCV
(See Subsection 9.1.5)-------(B)
9.1.4 Check
(1) Three minutes after the beam is turned off, adjust RFI or DCV to
the value of (A) with VR11.
(4) Turn off the beam, and wait 3 minutes. Record the DCV, DCI,
RFV, and RFI values of each power supply. Then, check that the
laser output Pa does not exceed the maximum base output (Table
9.1.7), and that heat-sensitive paper does not react in the test of
Subsection 9.1.7. If a problem is observed, make another power
supply adjustment.
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B-70255EN/01 9.SETTING AND ADJUSTMENT
The laser power supply involves feedback at RFI. So, if the laser
power feedback function is disabled, RFI is stable when the
continuous output command is used. Basically, measure RFI for
power supply adjustment. If the NC monitor is away from the
oscillator, and you have no assistant, make an adjustment by using the
value of DCV instead of RFI. However, use the value of RFI for final
confirmation. The connector CN18 for RFV and RFI monitoring was
added to the power supply of B209. When using this connector,
follow the conversion formula described in Note 2 of Table 2.
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9.SETTING AND ADJUSTMENT B-70255EN/01
(1) Insert heat-sensitive paper into the laser optical path after
passing through the shutter mirror.
(2) output the continuous rated command value for 3 minutes. Then,
execute the following program (specifying OW for 60 seconds):
G32 P1 Q1;
G24 S0 P500 Q0 R60. ;
G32 P0;
M02;
%
(3) Check that the heat-sensitive paper has not reacted.
NOTE
1 Power supply output = DCI´DCV,
DCI=
(Voltage between DCI-N and DCI-P of CN17)´5,
DCV=
(Voltage between DCV-N and DCV-P of CN17)´30
2 RFI=
(Voltage between RFI-N and RFI-O of CN18)/2,
RFV=
(Voltage between RFV-N and RFV-P of CN1)´1000
- 120 -
B-70255EN/01 9.SETTING AND ADJUSTMENT
These PCBs are precisely adjusted at the factory and should not
require any further adjustment. If the turbo blower or turbo PCB is
replaced, however, VR1 to VR4 should be adjusted and set oil level
censor as described below.
(1) Prior to activating the oscillator, check the level of the turbo
blower oil through the oil window. If the level is higher than the
specified level, drain the excess oil. If the level is lower, add oil.
Specified level : 3/4 level, between Hi and Lo marks
CAUTION
When oil is added, aging is required.
(3) Start the oscillator. Execute internal discharge at the rated output
for 15 minutes. Then, set the unit to the base discharge state.
(4) Measure voltage VSO across VL1 and 0V (GND). This voltage
corresponds to the oil level sensor output.
(6) Check that the following alarm occurs when VC exceeds VSO
measured in step (4) above.
Alarm No.4106 BLOWER OIL SHORTAGE
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9.SETTING AND ADJUSTMENT B-70255EN/01
(7) In the alarm state, adjust trimmer VR1 so that VC (voltage across
VA1 and 0V) matches the following value:
VC=VSO´0.778
(8) Press the reset key of the NC. Check that the alarm is reset.
NOTE
VR1 is three-turn trimmers.
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B-70255EN/01 9.SETTING AND ADJUSTMENT
Connection
The following cables are connected to the inverter:
R, S, T : Main power input
U, V, W Inverter output
G : Grounding
1 : Reset signal
2 : Soft lock signal
8 : Inversion command signal
AL0, AL1 : Relay contact output (ON : Normal)
L : Analog power supply common
CM1 : Power supply common for the interface
CM2 : Common for the intelligent output terminal
- 123 -
9.SETTING AND ADJUSTMENT B-70255EN/01
Name Description
Monitor Displays settings such frequency and output current
values.
RUN (operation) Turned on when the inverter is running.
lamp
Program lamp Turned on when the monitor displays the setting of
each function.
Blinks when a warning is given (when a setting is
incorrect).
POWER lamp Power lamp of the control circuit
ALARM lamp Turned on when the inverter trips
Monitor lamp Lamp for indicating the display status of the monitor.
Hz: Frequency, V: Voltage, A: Current,
kW: Power, %: Ratio
Operation command Turned on when the operation command destination is
indication lamp set to the operator.
Operation key Key for stopping the motor.
This key, however, is enabled only when the operation
command destination is set to the operator. (Check
that the operation command indication lamp is on.)
STOP/RESET key Used to stop the motor or reset an alarm.
FUNC (function) key Used to enter the monitor mode, basic setting mode,
extended function mode, and function mode.
STR (store) key Used to store set values. (Be sure to press this key
when changing set values.)
Up/down key Used to change the extended function mode, function
mode, or set values.
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B-70255EN/01 9.SETTING AND ADJUSTMENT
<1> Display of set monitor state <5> The code No. of the monitor mode is
(In the initial state, 0.00 is displayed.) displayed. (d001 is displayed.)
A different value is displayed if the power is turned off The display returns to the state
then back on while the basic setting mode or extended of <2>.
function mode is indicated.
<2> The code No. of the monitor mode is <4> The extended function mode is
displayed. (d001 is displayed.) displayed. (A--- is displayed.)
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9.SETTING AND ADJUSTMENT B-70255EN/01
<1> The extended function mode is displayed. <5> The extended function mode is displayed. (A--- is
(A--- is displayed.) displayed.)
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B-70255EN/01 9.SETTING AND ADJUSTMENT
The code No. of the monitor mode, basic setting mode, or extended function monitor can be directly entered instead of using
the scroll method.
An example of changing from monitor mode code No. d001 to function code No. A029 is indicated below.
<1> The code No. of the monitor mode is (A029 is displayed.) <6> The setting of the function code No.
displayed. (d001 is displayed.) is completed.
("9" is set.)
"d" blinks.
"A" blinks
"2" in the tens digit position blinks.
Pressing the key sets the value of the
blinking digit position. Press the key (2
Press the key (to times).
set "A".)
<3> Change the hundreds digit of <4> Change the tens digit of the
the function code No.. function code No..
Press the
key.
("0" is set.)
"0" in the hundreds digit position blinks. "0" in the tens digit position blinks.
- 127 -
9.SETTING AND ADJUSTMENT B-70255EN/01
Parameter settings
Initial Setting
Code Name of function Remarks
value value
d001 Output frequency monitor - - Hz
d002 Output current monitor - - A
d003 Rotation direction monitor - - F (forward rotation)/o (stop)/r (reverse rotation)
d004 PID feedback monitor - -
d005 Intelligent input monitor - -
d006 Intelligent output monitor - -
d007 Frequency conversion monitor - -
d013 Output voltage monitor - - V
d014 Input power monitor - - kW
d016 Cumulative run time monitor - -
hr
d017 Power ON time monitor - -
Monitor d080 Trip count monitor - - Times
- 128 -
B-70255EN/01 9.SETTING AND ADJUSTMENT
Initial Setting
Code Name of function Remarks
value value
00: Free run at JG stop time (disabled during operation), 01:
Gradual stop at JG stop time (disabled during operation), 02:
Multistage Direct current damping at JG stop time (disabled during
speed A039 Jogging selection 00 00 operation), 03: Free run at JG stop time (enabled during
selection operation), 04: Gradual stop at JG stop time (enabled during
operation), 05: Direct current damping at JG stop time
(enabled during operation)
A041 First torque boost selection 00 00 00: Manual torque boost, 01: Automatic torque boost
A241 Second torque boost selection 00 00
A042 First manual torque boost 1.0% 2.0 0.0 to 20.0
A242 Second manual torque boost 1.0% 1.0%
V/f A043 First manual torque boost breakpoint 5.0% 10
characteristics Second manual torque boost 0.0 to 50.0
A243 5.0% 5.0%
breakpoint
A044 First control method 00 00 00: VC, 01: VP raised to the power of 1.7, 02: Free V/f setting
A244 Second control method 00 00
A045 Output voltage gain 100 95 20 to 100
A051 Direct current damping selection 00 00 00: Disabled 01: Enabled
A052 Direct current damping frequency 0.50Hz 0.50Hz 0.00 to 60.00
A053 Direct current damping delay time 0.0s 0.0s 0.0 to 5.0
A054 Direct current damping power 0% 0% 0 to 100
Direct A055 Direct current damping time 0.0s 0.0s 0.0 to 60.0
current Direct current damping edge/level
A056 01 01 00: Edge operation, 01: Level operation
damping selection
A057 Start direct current damping power 0% 0% 0 to 100
A058 Start direct current damping time 0.0s 0.0s 0.0 to 60.0
Direct current damping carrier
A059 5.0kHz 5.0kHz 0.5 to 10 derating applicable
frequency
A061 First frequency upper limiter 0.00Hz 0.00Hz 0.00, first frequency lower limiter to maximum frequency
0.00, second frequency lower limiter to second setting
A261 Second frequency upper limiter 0.00Hz 0.00Hz maximum frequency
A062 First frequency lower limiter 0.00Hz 0.00Hz 0.00, start frequency to maximum frequency
A262 Second frequency lower limiter 0.00Hz 0.00Hz 0.00, start frequency to second setting maximum frequency
A063 Jump frequency 1 0.00Hz 0.00Hz 0.00 to 1500
Upper/lower A064 Jump frequency width 1 0.50Hz 0.50Hz 0.00 to 10.00
limiter/jump
A065 Jump frequency 2 0.00Hz 0.00Hz 0.00 to 1500
A066 Jump frequency width 2 0.50Hz 0.50Hz 0.00 to 10.00
A067 Jump frequency 3 0.00Hz 0.00Hz 0.00 to 1500
A068 Jump frequency width 3 0.50Hz 0.50Hz 0.00 to 10.00
A069 Acceleration stop frequency 0.00Hz 0.00Hz 0.00 to 1500
A070 Acceleration stop time 0.0s 0.0s 0.00 to 60.0
A071 PID selection 00 00 00: Disabled, 01: Enabled
A072 PID P gain 1.0 1.0 0.2 to 5.0
A073 PID I gain 1.0s 1.0s 0.0 to 3600
PID control
A074 PID D gain 0.00s 0.00s 0.00 to 100.0
A075 PID scale 1.00% 1.00% 0.01 to 99.99
A076 PID feedback selection 00 00 00: Feedback 01, 01: Feedback 0
00: On at all times, 01: Off at all times, 02: Off at deceleration
A081 AVR selection 00 00 time
AVR 200, 215, 220, 230, 240/380, 400, 415, 440, 460, 480/575,
A082 Motor voltage selection 200/400V 200/400V 600
A085 Operation mode selection 00 00 00: Normal operation, 01: Power-saving operation
Power-saving response/precision
A086 50.0s 50.0s 0.0 to 100.0
adjustment
A092 First acceleration time 2 15.00s 15.00s
A292 Second acceleration time 2 15.00s 15.00s 0.01 to 3600
A093 First deceleration time 2 15.00s 15.00s
A293 Second deceleration time 2 15.00s 15.00s
Operation Stage 12 acceleration/deceleration
mode/ A094 00 00
deceleration
selection 00: Switching by 2 channels, 01: Switching by setting
function Stage 22 acceleration/deceleration
A294 00 00
selection
A095 Stage 12 acceleration frequency 0.00Hz 0.00Hz
A295 Stage 22 acceleration frequency 0.00Hz 0.00Hz 0.00 to 1500
A096 Stage 12 deceleration frequency 0.00Hz 0.00Hz
A296 Stage 22 deceleration frequency 0.00Hz 0.00Hz
A097 Acceleration pattern selection 00 00 00: Straight line, 01: S-shaped curve, 02: U-shaped curve, 03:
A098 Deceleration pattern selection 00 00 Reversed-U-shaped curve
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9.SETTING AND ADJUSTMENT B-70255EN/01
Initial Setting
Code Name of function Remarks
value value
A101 01 start 0.00Hz 0.00Hz 0.00 to 1500
A102 01 end 0.00Hz 0.00Hz
A103 01 start ratio 20% 20% 0 to 100
External A104 01 end ratio 100% 100%
frequency A105 01 start selection 01 01 00: External start frequency, 01: 0 Hz
adjustment A111 02 start 0.00Hz 0.00Hz -1500 to 1500
A112 02 end 0.00Hz 0.00Hz
A113 02 start ratio -100% -100% -100 to 100
A114 02 end ratio 100% 100%
Acceleration/ A131 Acceleration curve constant 02 02
01 to 10 : Small swelling to Large swelling
deceleration A132 Deceleration curve constant 02 02
00: Trip, 01: 0 Hz start, 02: f-matched start, 03: trip after f-
b001 Retry selection 00 00 matched gradual stop, 04: Restart at frequency before
momentary stop
b002 Allowable momentary stop time 1.0s 1.0s 0.3 to 25.0
b003
Restart after
Retry wait time 1.0s 1.0s 0.3 to 100
momentary b004 Momentary stop during stop/shortage 00: Disabled, 01: Enabled, 02: Disabled during stop and
00 00
stop trip selection deceleration for stop
Momentary stop/shortage retry count
b005 00 00 00: 16 times, 01: Unlimited
selection
b006 Open phase selection 00 01 00: Disabled, 01: Enabled
b007 f-matched lower-limit frequency setting 0.00Hz 0.00Hz 0.00 to 1500
b012 First electronic thermal level 24A 24A 0.2*(rated current) to 1.2*(rated current)
b212 Second electronic thermal level 24A 24A
First electronic thermal characteristics
b013 00 00
selection 00: Reduction characteristics, 01: Constant torque
Second electronic thermal characteristics, 02: Free setting
b213 00 00
Electronic characteristics selection
thermal b015 Free electronic thermal frequency 1 0Hz 0Hz 0 to 1500
b016 Free electronic thermal current 1 0.0A 0.0A 0.0 to 1000
b017 Free electronic thermal frequency 2 0Hz 0Hz 0 to 1500
b018 Free electronic thermal current 2 0.0A 0.0A 0.0 to 1000
b019 Free electronic thermal frequency 3 0Hz 0Hz 0 to 1500
b020 Free electronic thermal current 3 0.0A 0.0A 0.0 to 1000
00: Disabled, 01: Enabled at acceleration or constant-speed
b021 Overload limitation selection 01 01 operation time, 02: Enabled at constant-speed operation time
b022 Overload limitation level 36 36 0.5*(rated current) to 2*(rated current)
Overload b023 Overload limitation constant 1.00s 1.00s 0.1 to 30
limitation b024 Overload limitation 2 selection 01 01
00: Disabled, 01: Enabled at acceleration or constant-speed
operation time, 02: Enabled at constant-speed operation time
b025 Overload limitation level 2 36 36 0.5*(rated current) to 2*(rated current)
b026 Overload limitation constant 2 1.00s 1.00s 0.1 to 30
00: (When the SFT terminal is on) Items other than this item
cannot be modified., 01: (When the SFT terminal is on) Items
Lock b031 Soft lock selection 01 00 other than this item a frequency cannot be modified., 02: Items
other than this item cannot be modified.
b100 Free V/f frequency 1 0Hz 0Hz 0 to free V/f frequency 2
b101 Free V/f voltage 1 0.0V 0.0V 0 to 800.0
b102 Free V/f frequency 2 0Hz 0Hz 0 to free V/F frequency 3
b103 Free V/f voltage 2 0.0V 0.0V 0 to 800.0
b104 Free V/f frequency 3 0Hz 0Hz 0 to free V/F frequency 4
b105 Free V/f voltage 3 0.0V 0.0V 0 to 800.0
b106 Free V/f frequency 4 0Hz 0Hz 0 to free V/F frequency 5
Free V/f
b107 Free V/f voltage 4 0.0V 0.0V 0 to 800.0
b108 Free V/f frequency 5 0Hz 0Hz 0 to free V/F frequency 6
b109 Free V/f voltage 5 0.0V 0.0V 0 to 800.0
b110 Free V/f frequency 6 0Hz 0Hz 0 to free V/F frequency 7
b111 Free V/f voltage 6 0.0V 0.0V 0 to 800.0
b112 Free V/f frequency 7 0Hz 0Hz 0 to 400
b113 Free V/f voltage 7 0.0V 0.0V 0 to 800.0
- 130 -
B-70255EN/01 9.SETTING AND ADJUSTMENT
Initial Setting
Code Name of function Remarks
value value
C001 Intelligent input terminal 1 selection 18 18 01: RV (reverse rotation), 02: CF1 (multistage speed 1), 03:
CF2 (multistage speed 2), 04: CF3 (multistage 3), 05: CF4
C002 Intelligent input terminal 2 selection 16 15 (multistage speed 4), 06: JG (jogging), 07: DB (external
C003 Intelligent input terminal 3 selection 06 07 direction current damping), 08: SET (second damping), 09:
C004 Intelligent input terminal 4 selection 11 11 2CH (2-stage acceleration/deceleration), 11: FRS (free run),
12: EXT (external trip), 13: USP (restart prevention function at
C005 Intelligent input terminal 5 selection 09 09
power supply recovery time), 14: CS (commercial switching),
C006 Intelligent input terminal 6 selection 03 03 15: SFT (soft lock), 16: AT (analog in switching), 18: RS
C007 Intelligent input terminal 7 selection 02 02 (reset), 20: STA (3-wire activation), 21: STP (3-wire hold), 22:
F/R (3-wire forward/reverse), 23: PID (PID enable/ disable),
24: PIDC (PID integral reset), 27: UP (remote operation
Intelligent C008 Intelligent input terminal 8 selection 01 01 speedup), 28: DWN (remote operation slowdown), 29: UDC
(INT) input (remote operation data clear), 31: OPE (forced operation)
terminal C011 Intelligent input 1a/b selection 00 00
C012 Intelligent input 2a/b selection 00 00
C013 Intelligent input 3a/b selection 00 00
C014 Intelligent input 4a/b selection 00 00
C015 Intelligent input 5a/b selection 00 00 00:NO、 01:NC
C016 Intelligent input 6a/b selection 00 00
C017 Intelligent input 7a/b selection 00 00
C018 Intelligent input 8a/b selection 00 00
C019 FWa/b selection 00 00
C021 Intelligent output terminal 11 selection 01 00 00: RUN (during operation), 01: FA1 (when constant speed is
C022 Intelligent output terminal 12 selection 00 00 reached), 02: FA2 (more than set frequency), 03: OL (advance
notice of overload), 04: OD (excessive PID deviation), 05: AL
INT output C023 Intelligent output terminal 13 selection 03 03 (trip signal), 06: FA3 (setting frequency only), 08: IP (during
terminal C024 Intelligent output terminal 14 selection 02 02 momentary stop), 09: UV (insufficient voltage), 11: RNT (run
C025 Intelligent output terminal 15 selection 08 08 time exceeded), 12: ONT (ON time exceeded), 13: THM
C026 Alarm relay output terminal 05 05 (thermal warning)
00: Output frequency, 01: Output current, 03: Digital output
C027 FM selection 00 00 frequency, 04: Output voltage, 5: Output power, 06: Thermal
Monitor load ratio, 07: LAD frequency
terminal C028 AM selection 00 00 00: Output frequency, 01: Output current, 04: Output voltage,
C029 AMI selection 00 00 05: Output power, 06: Thermal load ratio, 07: LAD frequency
C031 Intelligent output 11a/b selection 00 00
C032 Intelligent output 12a/b selection 00 00
C033 Intelligent output 13a/b selection 00 00
C034 Intelligent output 14a/b selection 00 00 00:NO, 01:NC
Level C035 Intelligent output 15a/b selection 00 00
output C036 Alarm relay output a/b selection 01 01
terminal Overload advance notice signal output 00: During acceleration/deceleration or during constant-speed
C040 01 01
state mode selection operation, 01: During constant-speed operation only
C041 Overload advance notice level 24A 24A 0.0 to 2*(rated current)
C042 Acceleration reach frequency 0.00Hz 0.00Hz
C043 Deceleration reach frequency 0.00Hz 0.00Hz 0.00 to 1500
C044 PID deviation excess level 3.0% 3.0% 0.0 to 100.0
C070 Data command selection 02 02 02: Operator, 03: RS485, 04: Option 1, 05: Option 2
C071 Communication rate selection 04 04 03:2400bps、 04:4800bps、 05:9600bps、 06:19200bps
Communi- Communication station number
C072 1 1 1 to 32
cation selection
function C073 Communication bit length selection 7 7 7: 7 bits, 8: 8 bits
adjustment C074 Communication parity selection 00 00 00: With no parity, 01: Even parity, 02: Odd parity
C075 Communication stop bit selection 1 1 1: 1 bit, 2: 2 bits
C078 Communication wait time 0ms 0ms 0 to 1000
Factory- Factory-
C081 0 adjustment adjusted adjusted
Factory- Factory-
C082 01 adjustment adjusted adjusted
Analog Factory- Factory-
C083 02 adjustment adjusted adjusted
meter
setting C085 Thermistor adjustment 105.0 105.0 0.0 to 1000
C086 AM offset adjustment 0.0V 0.0V 0.0 to 10.0
C087 AMI adjustment 80 80 0 to 255
Factory- Factory-
C088 AMI offset adjustment adjusted adjusted
- 131 -
9.SETTING AND ADJUSTMENT B-70255EN/01
Initial Setting
Code Name of function Remarks
value value
b034 Run time/power ON time level 0hr 0hr 0. to 9999.(0 to 99990hr)/1000 to 6553(100000 to 655300)hr
00: Forward and reverse rotation enabled, 01: Forward
b035 Operation direction limitation selection 00 02 rotation only enabled, 02: Reverse rotation only enabled
00: Short reduced-voltage start time to 06: Long reduced-
b036 Reduced-voltage start selection 06 06 voltage start time
00: All data displayed, 01: Function-by-function display, 02:
b037 Display selection 00 00 User setting/this setting
b080 AM adjustment 180 180 0 to 255
b081 FM adjustment 60 60 0 to 255
b082 Start frequency 0.50Hz 0.50Hz 0.10 to 9.99
b083 Carrier frequency 5.0kHz 5.0kHz 0.5 to 10.0 derating applicable
00: Trip history clear, 01: Data initialization, 02: Trip history
b084 Initialization selection 00 00 data clear + data initialization
b085 Initialization data selection 00 00 00: Domestic, 01: CE, 02: USA
b086 Frequency conversion factor 1.0 1.0 0.1 to 9.99
b087 Stop key selection 00 01 00: Enabled, 01: Disabled
00: 0 Hz start, 01: f-matched start, 02: Start at frequency
b088 Free run stop selection 00 00 immediately before free run
b090 BRD use ratio 0.0% 0.0% 0.0 to 100.0
b091 Stop time selection 00 00 00: Deceleration ? stop, 01: Free run stop
00: At all times, 01: During operation only (including 5 minutes
b092 Cooling fan operation selection 00 01 after power-on and stop)
00: Disabled, 01: Enabled (disabled during stop), 02: Enabled
b095 BRD selection 00 00 (enabled even during stop)
b096 BRD on level 360/720V 360/720V 330 to 380 / 660 to 760
b098 Thermistor selection 00 00 00: Disabled, 01: PTC, 02: NTC enabled
Others b099 Thermistor error level 3000Ω 3000Ω 0 to 9999
C061 Thermal warning level 80% 80% 0 to 100
C091 Debug mode selection 00 00 00: Not displayed, 01: Displayed
C101 Up/down selection 00 00 00: Frequency data not saved, 01: Frequency data saved
00: Trip released when ON, 01: Trip released when OFF, 02:
C102 Reset selection 00 00 Enabled only at trip time (released when ON)
C103 Reset selection f-matched selection 00 00 00: 0 Hz start, 01: f-matched start
Factory- Factory-
C121 0 zero adjustment adjusted adjusted
Factory- Factory-
C122 01 zero adjustment adjusted adjusted
Factory- Factory-
C123 02 zero adjustment adjusted adjusted
Factory- Factory-
H003 First motor capacity selection adjusted adjusted
Factory- Factory-
H203 Second motor capacity selection adjusted adjusted
H004 First motor pole count selection 4 2
H204 Second motor pole count selection 4 4 2, 4, 6, 8
H006 First stabilizer constant 100 100
H206 Second stabilizer constant 100 100 0 to 255
P001 Option 1 error time operation selection 00 00
P002 Option 2 error time operation selection 00 00 00:TRP, 01:RUN
- 132 -
B-70255EN/01 9.SETTING AND ADJUSTMENT
This unit is precisely adjusted at the factory and should not require
any further adjustment. If the intake unit, exhaust unit, or atmospheric
pressure unit is replaced or requires re-adjustment, however, it should
be set and adjusted as described below:
The gas supply pressure sensor is the sensor marked with PSW1 on
the gas controller.
(1) Turn the CNC on. Never turn on the gas pressure control start
signal (RUN) at this stage.
(2) Set the secondary pressure of the regulator of the external laser
gas supply (gas cylinder, for example) to 0.1 MPa.
(3) Release the lock mode, then set desired values according to
Section 9.5. After setting, check that the LED (green) of OUT1
is on.
NOTE
While setting the sensor, the gas controller is open to
the atmosphere. To prevent dust from entering the
controller, pay particular attention to the immediate
surroundings.
(1) Close the main circuit breaker and turn on the power supply,
then turn on the CNC. A voltage is supplied to the sensor. Never
turn on the gas pressure control start signal (RUN).
(2) Release the lock mode, then set desired values according to
Section 9.5.
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9.SETTING AND ADJUSTMENT B-70255EN/01
(3) Remove the orange gas tube by loosening the hexagon cap nuts
securing the tube. This causes the atmospheric pressure sensor to
detect the atmospheric pressure.
(4) Clear the sensor to zero according to Section 9.5. Reinstall the
removed gas tube, and resecure the tube. After setting, check that
the LED (green) of OUT1 is on.
(5) Turn on the gas pressure control start signal (RUN), and check
that the exhaust pump starts exhaust. Then, check that the LED
(green) of the OUT1 of this sensor is turned off.
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B-70255EN/01 9.SETTING AND ADJUSTMENT
(1) Remove the piping from the filter of the gas controller, then
attach a gas meter for laser gas.
(2) Set PRM No. 15260 to 30, then start the oscillator. Air taken in
when the outlet is opened to the atmosphere in step 1) is
exhausted. After 30 seconds, turn off RUN.
(3) Set the laser oscillator to the base discharge state (LSTR).
(5) While checking the flow rate of gas with a gas meter when
internal discharge is performed at the rated output, turn the
exhaust flow rate adjustment valve to adjust the flow rate to the
set value.
NOTE
Excessive parameter value modifications increase
laser gas consumption and adversely affect gas
pressure control.
- 135 -
9.SETTING AND ADJUSTMENT B-70255EN/01
Fig. 9.4 Details of C1000iA gas controller sensor and flow rate adjustment valve
- 136 -
B-70255EN/01 9.SETTING AND ADJUSTMENT
Fig. 9.5 Details of the gas supply pressure sensor and atmospheric
pressure sensor
- 137 -
9.SETTING AND ADJUSTMENT B-70255EN/01
NOTE
The indicator section of the sensor indicates a
pressure value as a gauge pressure in MPa.
- 138 -
B-70255EN/01 9.SETTING AND ADJUSTMENT
Automatic/manual Manual
setting
Measurement mode
- 139 -
9.SETTING AND ADJUSTMENT B-70255EN/01
P2 0.045 -0.005
P3 0.200 0.100
P4 0.200 0.100
In the measurement mode, hold down the Settings for the gas supply pressure Settings for the atmospheric
SET key for less than 2 seconds. sensor (PSW1) pressure sensor (PSW2)
P_1 and a number are displayed Set 0.050 by pressing . Set 0.000 by pressing and .
alternately.
P_2 and a number are displayed Set 0.045 by pressing . Set 0.005 by pressing and .
alternately.
P_3 and a number are displayed Set 0.200 by pressing . Set 0.100 by pressing and .
alternately.
P_4 and a number are displayed Set 0.200 by pressing and . Set 0.100 by pressing .
alternately.
Measurement mode
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B-70255EN/01 9.SETTING AND ADJUSTMENT
Zero clear
Clear the initial offset value of the sensor. This setting can be made in
the measurement mode. Set the atmospheric pressure sensor only.
Check that the measurement
mode is set.
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9.SETTING AND ADJUSTMENT B-70255EN/01
(2) Place the laser oscillator in the base discharge state (LSTR).
Then, by using the procedure described in Chapter 11, check if
the oscillator is aligned optimally. If the oscillator is not aligned
optimally, readjust the oscillator.
(3) Perform internal discharge at the rated output for one minute or
more. Then, run the program below in the automatic mode, and
place a power probe in the middle of the optical path to measure
the output value Pr of a laser beam output externally. At this
time, it is recommended to make a measurement immediately
after the beam panel. Record the laser output value Pa detected
by the internal sensor and displayed on the laser setting screen
when this measurement is made.
G32 P1 Q1 ;
G24 S1000 Q100 R10000 ;
G32 P0 ; (Radiation for 10 seconds)
M30
Use a power probe calibrated periodically. A calibrated power
probe has a calibration coefficient attached. A correct output
measurement value is Pr' (probe conversion value) = Pr (probe
indication value) ´ calibration coefficient.
(5) Make another measurement of (3) above, and check that Pa = Pr'.
- 142 -
B-70255EN/01 9.SETTING AND ADJUSTMENT
This sensor is precisely adjusted at the factory and should not require
any further adjustment. If the water distribution unit or water flow
sensor is replaced, however, this sensor should be set and adjusted as
described below:
The operation point of the water flow sensor for C1000iA depends on
the pressure at the cooling water inlet of the oscillator.
So, note that the alarm operation point may slightly shift if the length
of piping from the chiller is changed significantly for a cause such as
the movement of the oscillator.
The adjustment method described below assumes that the pressure at
the cooling water inlet of the oscillator is 0.36 to 0.50 MPa.
(1) Detach the water flow sensor cables (black, white) from the
terminal block, then connect a tester to the tips (Faston
terminals). Set the tester for the resistance measurement range or
conduction check range.
(2) Adjust the flow rate the cooling water entering the oscillator to a
predetermined alarm flow rate. To perform this adjustment, use a
flowmeter having an appropriate capacity and accuracy.
(3) Remove the packing at the top of the water flow sensor, then
adjust the flow rate setting screw to find the position where the
flow rate sensor is placed in the conduction state (on).
(4) From the found position, turn the flow rate setting screw of the
water flow sensor counterclockwise until the water flow sensor
just becomes off.
(5) Increase the cooling water flow rate gradually to the alarm-off
setting flow rate, then check that the water flow sensor is on.
C1000iA 35 liters/min
(6) Close the valve and make an adjustment to the alarm setting flow
rate, then check that the water flow sensor is off.
- 143 -
9.SETTING AND ADJUSTMENT B-70255EN/01
(7) Reinstall the removed packing and reconnect the detached cables
to the terminal block.
- Supplement -
If a flowmeter is unavailable, a temporary setting can be made
by positioning the flow rate indicator as shown in Fig. 9.7.1.
- 144 -
B-70255EN/01 10.REPLACEMENT PROCEDURES
10 REPLACEMENT PROCEDURES
- 145 -
10.REPLACEMENT PROCEDURES B-70255EN/01
(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.
(4) Remove the four edge supports, then remove the stabilized
power supply.
(5) Install the new PCB by reversing the procedure used for
removal.
Connect the cables, noting the alignment marks. Ensure that no
terminals are loose.
(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.
(4) Remove the four edge supports, then remove the input unit
control PCB.
(5) Install the new PCB by reversing the procedure used for
removal.
Connect the cables, noting the alignment marks.
Check that the connectors are connected firmly.
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B-70255EN/01 10.REPLACEMENT PROCEDURES
(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.
(3) Remove the screws or edge supports, then remove the interface
PCB.
(4) Mount a new PCB by reversing steps (2) and (3). Connect the
cables, noting the alignment marks. Ensure that no terminals are
loose. Check that the connectors are connected firmly.
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10.REPLACEMENT PROCEDURES B-70255EN/01
Figs. 10.2 (a) to (c) show the laser power supply. Replace the laser
power supply as described below.
Fig. 10.2(a)
- 148 -
B-70255EN/01 10.REPLACEMENT PROCEDURES
Fig. 10.2(b)
- 149 -
10.REPLACEMENT PROCEDURES B-70255EN/01
Fig. 10.2(c)
- 150 -
B-70255EN/01 10.REPLACEMENT PROCEDURES
- 151 -
10.REPLACEMENT PROCEDURES B-70255EN/01
- 152 -
B-70255EN/01 10.REPLACEMENT PROCEDURES
(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.
(2) Disconnect the power and signal cables from the matching box.
(3) Remove the resonator fan unit, then remove the discharge tube
feeder.
(4) Remove the two rods (a long one and a short one) from the
matching box, using an 8-mm spanner.
(5) Remove the two securing screws, then remove the matching box
by slightly pulling it toward you. If it proves difficult to remove
the matching box, slightly shift it to the right or left, then retry.
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10.REPLACEMENT PROCEDURES B-70255EN/01
When the turbo blower is replaced, the gas circulating system is open
to the atmosphere for a long time. Pay particular attention to the
immediate surroundings to ensure that dust and other contaminants do
not enter the gas circulating system.
Clean the flanges of the turbo blower and the pipe flanges before
replacing the turbo blower.
Do not incline the turbo blower while transporting and installing it.
Doing so will cause lubricating oil to enter the blower, contaminating
the laser gas circulating system and optical mirrors.
- 154 -
B-70255EN/01 10.REPLACEMENT PROCEDURES
CAUTION
Usually, all oil is drained from a turbo blower prior to
shipping. Even so, however, the turbo blower must
not be inclined because trace amounts of oil will
inevitably remain inside the unit.
If a turbo blower is inclined, it can no longer be used.
Replacement procedure
Be careful not to damage the O-rings or their mating surfaces on the
pipes. A damaged O-ring or mating surface will result in gas leakage.
(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.
(2) Disconnect the cooling water tubes and power cables from the
turbo blower, then drain the oil from the turbo blower.
(3) Disconnect the two pipes from the turbo blower outlet.
Cover the removed gas pipes and turbo blower to prevent dust
from entering.
(4) Remove the hexagon headed bolt which secures the damping
rubber and blower base, then remove the turbo blower by sliding
it horizontally. Note that the turbo blower weighs about 30 kg.
(5) Remove the two metal brackets, used to secure the turbo blower,
from the removed turbo blower, then mount them on the new
turbo blower.
(6) Mount the new turbo blower on the oscillator, then fix the gas
pipes. Be careful not to damage the O-rings and ensure that no
O-ring is missing.
(7) Tighten the nut of the damping rubber. Carefully follow the
procedure below to prevent the damping rubber from being
twisted and damaged.
(8) Connect the cooling water tubes and the power and ground
cables.
(9) Check that there are no cooling water leaks, turn on the oscillator,
then check for gas leakage.
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10.REPLACEMENT PROCEDURES B-70255EN/01
(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.
(3) Remove the four screws or four edge supports, then remove the
PCB.
(4) Mount a new PCB by reversing steps (2) and (3). Connect the
cables, noting the alignment marks.
(5) Once the turbo PCB has been replaced, the turbo blower oil level
alarm must be set. Set the alarm as explained in Section 9.2.
- 156 -
B-70255EN/01 10.REPLACEMENT PROCEDURES
(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.
(3) Remove the four screws or four edge supports, then remove the
PCB.
(4) Mount a new PCB by reversing steps (2) and (3). Connect the
cables, noting the alignment marks.
- 157 -
10.REPLACEMENT PROCEDURES B-70255EN/01
(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.
(2) Drain the cooling water from the oscillator, then disconnect the
two water tubes.
- 158 -
B-70255EN/01 10.REPLACEMENT PROCEDURES
(3) Disconnect the tubes from the pump outlet and inlet. Then,
disconnect the heavy-duty power cables from the terminal block
on the side of the pump.
(4) Remove the bolts securing the exhaust pump unit, then remove
the pump unit. Remove the bolts securing the pump to the
mounting plate, then remove the pump.
(5) Position the new exhaust pump on the mounting plate, then
secure the pump unit by reversing steps (2) to (4). The new
pump may not be fitted with gas and water joints. Remove an
older pump first, then install a new pump as originally installed.
Ensure that the terminal block is wired correctly. Incorrect
wiring may cause the pump rotation to be reversed, causing the
pump oil flow to be reversed. Connect the cables, noting the
alignment marks.
(6) Pumps are shipped without lubricating oil. Fill the pump with
Matsumura Oil SA-H. Operating the pump without lubricating
oil will cause the thermal switch to trip, and will ultimately
damage the pump.
(7) Close the main circuit breaker, turn on the power to the oscillator,
then turn on the power to the CNC. Then, perform a laser
oscillator leakage test and check the operation of the exhaust
pump. When the power is first turned on, check that gas is output
from the gas outlet of the oscillator. The pump starts after gas
has been discharged from the external pipes for a few seconds.
Gas being drawn into the oscillator, or abnormal noise, indicates
that the pump rotation is reversed. In such a case, check the
wiring of the terminal block.
- 159 -
10.REPLACEMENT PROCEDURES B-70255EN/01
When the pressure control unit is replaced, the gas circulating system
is open to the atmosphere for a long time. Pay particular attention to
the immediate surroundings to ensure that dust and other
contaminants do not enter the gas circulating system.
(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.
(2) Close the valve of the external laser gas supply (for example, a
gas cylinder).
(3) Disconnect all removable tubes and cables. Pressurized laser gas
may remain in the control unit. Discharge this gas by loosening
the nut on the joint.
(4) Remove the unit securing screws, then remove the unit.
(6) The new intake unit must be adjusted. Adjust the unit as
explained in Chapter 9.
- 160 -
B-70255EN/01 10.REPLACEMENT PROCEDURES
When the exhaust unit is replaced, the gas circulating system is open
to the atmosphere for a long time. Pay particular attention to the
immediate surroundings to ensure that dust and other contaminants do
not enter the gas circulating system.
Replace the exhaust unit as follows:
(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.
(2) Disconnect the tubes and cables from the exhaust unit.
(3) Remove the unit securing screws, then remove the exhaust unit.
(4) Mount a new unit by reversing steps (2) and (3). Ensure that all
tubes are connected and tightened, and that the cables are
connected correctly.
(5) Perform all settings as described in Section 9.5, then check the
operation. If a laser gas flowmeter is not provided, adjust the
exhaust valve of the new exhaust control unit such that the
amount by which it opens (the angle and number of turns by
which the valve is open relative to the fully closed state) is the
same as that of the exhaust valve of the removed control unit.
- 161 -
10.REPLACEMENT PROCEDURES B-70255EN/01
(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator.
Remove the top cover of the oscillator.
(2) Detach the cable connecting the discharge tube with the
matching box, by loosening the thumbscrew.
Remove all the screws from the flange which secures the
discharge tube (six screws are used for each discharge tube).
(3) Move the discharge tube toward the output, rear, and folding
mirrors, while rotating it. If the O-ring is too tight to allow the
discharge tube to be moved, lubricate the O-ring with alcohol.
Before attempting to move the discharge tube, however, move
the flange to the center of the tube. Then, hold the supported end
of the discharge tube, leaving a gap of 5 mm, then push the
discharge tube while rotating it. At this time, be careful not to
damage the end of the discharge tube. If the discharge tube is
damaged, glass chips may enter the gas circulating system.
(4) Move the O-ring to the center of the discharge tube, then remove
the discharge tube. If the O-ring is at the end of the discharge
tube, the end of discharge tube may be damaged while it is being
removed.
(5) Remove the copper plate from the removed discharge tube, then
mount it on a new discharge tube.
(6) Mount the flange on the new discharge tube, then mount the O-
ring. Before mounting the O-ring, wipe it with alcohol. A Teflon
O-ring is hard, and must be expanded slightly (by hand) before
being mounted. The surface of the O-ring may exhibit cracks or
some white deposits, indicating deterioration. Such an O-ring
may cause gas leakage or generate dust. Replace it with a new
one.
(7) Insert the new discharge tube into the discharge tube holder by
reversing step (5), then perform assembly by reversing steps (5)
and (6).
- 162 -
B-70255EN/01 10.REPLACEMENT PROCEDURES
- 163 -
10.REPLACEMENT PROCEDURES B-70255EN/01
The laser oscillator contains many fan units, which are classified into
the following two types:
(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.
(3) Disconnect the power supply cable and ground cable from the
terminal block.
(5) Mount a new fan unit, then secure it by tightening the screws.
(7) Close the main circuit breaker, turn on the power to the oscillator,
then turn on the power to the CNC. Then, check that the fans
rotate.
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B-70255EN/01 10.REPLACEMENT PROCEDURES
(2) When inserting a cable, press the fitting from the top with a
sharp screwdriver. Ensure that the cable is not pulled out.
Fig.10.11.2
- 165 -
10.REPLACEMENT PROCEDURES B-70255EN/01
(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.
(2) Cooling water is passed through the radiator of the fan unit.
Drain the water from the radiator, then disconnect the water
pipes. To drain the cooling water, open the drain valve of the
water distribution unit.
(4) Disconnect the power supply cable and ground cable from the
terminal block.
(5) Remove the fan unit from the oscillator. At this time, the radiator
may still contain water. Therefore, plug the radiator joints with
rag to prevent water being spilled on the other units.
(6) Mount a new fan unit, then secure it by tightening the screws.
(9) Operate the chiller unit manually to circulate the cooling water.
Check that no water leaks from the joints that were disconnected
during the replacement. After checking, restore the original
chiller setting.
(10) Close the main circuit breaker, turn on the power to the oscillator,
then turn on the power to the CNC. Then, check that the fans
rotate.
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B-70255EN/01 10.REPLACEMENT PROCEDURES
(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.
(2) Disconnect the coaxial cable from the power sensor unit.
(3) Hold the entire power sensor unit and turn it counterclockwise to
remove the unit from the mirror holder. At this time, be careful
not to apply an excessive torque to the power sensor and the
mirror holder of the rear mirror.
(5) Close the main circuit breaker, turn on the power to the oscillator,
then turn on the power to the CNC.
(6) Turn on the laser, then check that the laser output indication
appears.
- 167 -
10.REPLACEMENT PROCEDURES B-70255EN/01
- 168 -
B-70255EN/01 10.REPLACEMENT PROCEDURES
(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.
(3) Remove the bolts which secure the unit, then remove the unit.
(5) After the shutter unit is replaced, the carbonic gas laser beam
and semiconductor laser beam may be misaligned with each
other. In such a case, align the carbonic gas laser beam and
semiconductor laser beam with each other according to
Subsection 11.2.2.
(2) When two bolts are removed from the reflection side of the
shutter mirror, the shutter mirror can be removed with the shutter
mirror attached to the heat sink.
(1) Remove connector CN52B and CN54B from relay PCB B, then
disconnect its cable.
(2) The shutter thermal switch and photoelectric switch make up the
sensor unit. Remove the unit containing both switches.
(3) Install a new sensor unit. At this time, ensure that the wire mark
of the photoelectric switch matches the label indication (OPEN,
CLOSE) of the shutter unit. The replacement is completed by
reconnecting to relay PCB B.
- 169 -
10.REPLACEMENT PROCEDURES B-70255EN/01
CAUTION
To prevent stress caused by shutter open/close
operation from being imposed on the cable, the
cable must be run with a sufficient allowance as
shown in Fig. 10.13(b).
- 170 -
B-70255EN/01 10.REPLACEMENT PROCEDURES
(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.
(2) The beam absorber is water-cooled. Drain the water from the
beam absorber, then disconnect the water pipes. To drain the
cooling water, open the drain valve of the water distribution unit.
(4) Remove the bolts, then remove the absorber. Before removing
the absorber, mark the position of the absorber or mounting
metal bracket. If the position of the absorber is shifted as a result
of the replacement, the laser beam is not directed to the center of
the absorber. In such a case, the absorber must be adjusted.
(7) Operate the chiller unit manually to circulate the cooling water.
Check that no water leaks from the joints that were disconnected
during the replacement. After checking, restore the original
chiller setting.
(8) Close the main circuit breaker, turn on the power to the oscillator,
then turn on the power to the CNC. Check the position of the
absorber, as described below.
(2) Provide a flow of cooling air to the acrylic plate, using a drier,
for example.
(3) Turn on the oscillator, then press the high voltage switch.
Monitor the output display screen. Once the output reaches 300
to 500 W, immediately turn off the high voltage switch. During
this period, a laser beam is output, leaving a circular mark on the
acrylic plate.
(4) Adjust the absorber such that the mark on the acrylic plate is
aligned with the center of the absorber.
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10.REPLACEMENT PROCEDURES B-70255EN/01
(5) Repeat step 3), then check the position of the absorber. If the
mark is still not aligned with the center of the absorber, adjust
the absorber again.
(6) In step 3), soot from the burnt acrylic plate may adhere to the
shutter mirror. Check whether the shutter mirror has been
contaminated with soot or other particles, and clean the mirror if
necessary.
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B-70255EN/01 10.REPLACEMENT PROCEDURES
(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.
(3) Remove the front cover (by removing the one setscrew), then
detach the cables from the terminal block of the main circuit.
(5) From the removed inverter, detach the cable (with a plate
attached) connected to the terminal block of the control circuit
(by removing the two plate setscrews).
(6) Remove the front cover of a new inverter, then remove the blind
cover of the cabling section.
Next, connect the cable (with a plate attached) originally
connected to the inverter.
(7) Connect the cable to the terminal block of the control circuit.
(9) Connect the cables to the terminal block of the main circuit.
- 173 -
10.REPLACEMENT PROCEDURES B-70255EN/01
NOTE
Wrong cable connections to these terminals can
damage the inverter, and can contaminate the
oscillator and damage the discharge tubes by turning
the turbo blower in the reverse direction.
CAUTION
The parameters of an inverter purchased by FANUC
are set before shipment from the factory. So, usually,
the parameters need not be changed. The inverter
can be replaced using the procedure described
above and can be used without modification.
When parameters need to be checked or modified
for a cause, however, see Section 9.3.
- 174 -
B-70255EN/01 10.REPLACEMENT PROCEDURES
Replace the water distribution unit as follows. The IN side and OUT
side of the distribution unit of C1000iA are separated from each other,
and a different specification number is assigned to each side. Replace
only a side to be replaced.
(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.
(2) Drain all cooling water from the oscillator, using compressed air,
for example. Compressed air must be supplied only from the
cooling water inlet. The structure of the water flow sensor does
not allow cooling water to be drained by compressed air supplied
from the cooling water outlet.
(3) Mark the water pipes connected to the distribution unit, then
disconnect the pipes.
(4) Remove the bolts securing the distribution unit, then remove the
unit.
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10.REPLACEMENT PROCEDURES B-70255EN/01
(5) Mount a new distribution unit by reversing steps (3) and (4).
Connect the water pipes correctly, noting the alignment marks.
(6) Operate the chiller unit manually to circulate the cooling water.
Check that no water leaks from the joints that were disconnected
during the replacement. After checking, restore the original
chiller setting. Check the amount of water in the chiller unit, and
add water if necessary.
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B-70255EN/01 10.REPLACEMENT PROCEDURES
(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.
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10.REPLACEMENT PROCEDURES B-70255EN/01
(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.
(2) Remove connector CN59 from relay PCB B, then disconnect the
cable.
(3) Remove the three screws securing the laser unit, then replace the
laser unit with a new one.
(4) Insert the cable of the guide laser into the connector on relay
PCB B, then secure the cable.
(5) Replacing the guide laser causes the direction of the laser output
to shift. To adjust the direction, superimpose the guide laser
beam on the CO2 laser beam, as explained in Section 11.2.
- 178 -
B-70255EN/01 11.LASER OPTICAL SYSTEM
CAUTION
ZnSe : Zinc selenide
Ge : Germanium
Si : Silicon
- 179 -
11.LASER OPTICAL SYSTEM B-70255EN/01
The optical parts in the laser oscillator, including the output mirror,
rear mirror, folding mirrors, and circular polarization mirror, must be
cleaned or replaced periodically. Similarly, if the laser output or beam
mode pattern becomes abnormal, the optical parts must be cleaned or
replaced.
When the output mirror, rear mirror, and folding mirrors are cleaned
or replaced, the discharge tubes are open to the atmosphere for a long
time. Therefore, pay particular attention to the immediate
surroundings to ensure that dust does not enter the discharge tubes.
When cleaning and replacing the output and rear mirrors, deal with
one mirror at a time. If both mirrors are removed at the same time, it
may prove impossible to attain the specified output level after they are
reinstalled. As a result, the alignment work required after mirror
replacement will become more difficult. Before removing the folding
mirrors, adjust the mode; it will subsequently be easier to perform
correction even if the folding mirrors are displaced.
To remove the folding mirrors, remove three mirrors at a time.
Reduced output or the inability to attain a good mode pattern after
cleaning or replacement indicates that the folding mirrors are
displaced. Perform adjustment using the micrometers of the folding
mirrors.
C1000iA
1) Clean the output mirror
- 180 -
B-70255EN/01 11.LASER OPTICAL SYSTEM
Fig. 11.1.1(b) Attaching the holder of the output mirror and rear mirror of C1000iA
To clean the output mirror, follow the procedure given below. Since it
is necessary to touch the optical parts and vacuum parts while
cleaning the output mirror, wear clean gloves or finger cots. Do not
touch these parts with your bare hands.
The output mirror is fabricated using a toxic material. Be careful not
to touch the mirror with your bare hands. If you should touch it, wash
your hands thoroughly under clean running water.
Before starting cleaning, wipe away any foreign matter from around
the parts to be removed. If a removed part is inadvertently soiled,
wipe it clean with ethyl alcohol.
- 181 -
11.LASER OPTICAL SYSTEM B-70255EN/01
Procedure
(1) Turn off the power to the CNC, then open the main circuit
breaker or turn off the power supply of the laser oscillator.
(4) Loosen the mirror holder mounting screw (M4 hexagon socket
head bolt), and remove the mirror holder from the alignment
unit.
CAUTION
When removing the mirror holder, be careful not to
drop the mirror from the mirror holder.
(5) Remove the output mirror and O-ring from the mirror holder,
and place them on lens cleaning paper. To simply replace the
output mirror at this point, go to step (12).
NOTE
When cleaning or replacing a mirror, be sure to
check the states of the O-rings of the mirror holder. If
a damaged O-ring or an O-ring that has lost elasticity
is used without replacement, gas can leak. It is
recommended to replace such O-rings as early as
possible.
(6) Place the mirror with its reflecting side (the side facing the
discharge tubes) facing up. Gently blow clean air (using, for
example, a camera blower) across the mirror surface to remove
dust and dirt. Drop ethyl alcohol or lens cleaner onto the mirror
surface, moisten a cotton swab with the fluid, and gently wipe
any dirty areas.
(7) Place lens cleaning paper over the mirror, then spray ethyl
alcohol or lens cleaner over the paper and mirror.
(8) Move the lens cleaning paper horizontally to and fro across the
mirror.
- 182 -
B-70255EN/01 11.LASER OPTICAL SYSTEM
NOTE
Since the lens cleaner has a high surface tension, it
may be difficult to move the cleaning paper. As the
paper is slowly moved to and fro across the mirror,
however, the ethyl alcohol will gradually evaporate.
(9) Blow clean air (using, for example, a camera blower) across the
mirror surface to completely evaporate the ethyl alcohol or lens
cleaner.
(10) Repeat steps (7) to (9) until all dirt on the mirror surface has
been removed. Finally, clean the mirror surface with ethyl
alcohol.
(11) Check the transmitting side of the mirror. If its surface is dirty,
perform steps (6) to (9) for the transmitting side also. Note that if
an excessive amount of ethyl alcohol or lens cleaner is applied, it
may flow around the back of the mirror, leading to
contamination.
(12) Wipe the mirror holder and O-ring with ethyl alcohol.
(13) Reinstall the output mirror in the mirror holder, then insert the
O-ring. When installing the output mirror, pay particular
attention to the mirror orientation. The reflecting plane (the
plane indicated by the arrow on the side of the mirror) must face
the discharge tubes. The arrow is both scribed and marked with
ink such that, even if the ink is entirely removed, it will still be
possible to find the scribed arrow. Align the arrow on the side of
the output mirror with the mirror holder position.
(14) Mount the mirror by reversing steps (2) to (4). Install the mirror
holder in the alignment unit so that the mark on the mirror holder
faces down.
(15) Close the main circuit breaker or turn on the power supply of the
laser oscillator, then turn on the power to the CNC.
- 183 -
11.LASER OPTICAL SYSTEM B-70255EN/01
To clean the rear mirror, follow the procedure given below. Since it is
necessary to touch optical parts and vacuum parts while cleaning the
rear mirror, wear clean gloves or finger cots. Do not touch these parts
directly with your bare hands.
Before starting cleaning, wipe away any foreign matter from around
the parts to be removed. If a removed part is inadvertently soiled,
wipe it clean with ethyl alcohol.
Procedure
(1) Turn off the power to the CNC, then open the main circuit
breaker or turn off the power supply of the laser oscillator.
(4) Loosen the mirror holder mounting screw (M4 hexagon socket
head bolt), and remove the mirror holder from the alignment
unit.
CAUTION
When removing the mirror holder, be careful not to
drop the mirror from the mirror holder.
(5) Remove the rear mirror and O-ring from the mirror holder, and
place them on lens cleaning paper. To simply replace the rear
mirror at this point, go to step (12).
NOTE
When cleaning or replacing a mirror, be sure to
check the states of the O-rings of the mirror holder. If
a damaged O-ring or an O-ring that has lost elasticity
is used without replacement, gas can leak. It is
recommended to replace such O-rings as early as
possible.
- 184 -
B-70255EN/01 11.LASER OPTICAL SYSTEM
(6) Place the mirror with its reflecting side (the side facing the
discharge tubes) facing up. Gently blow clean air (using, for
example, a camera blower) across the mirror surface to remove
dust and dirt. Drop ethyl alcohol or lens cleaner onto the mirror
surface, moisten a cotton swab with the fluid, and gently wipe
any dirty areas.
(7) Place lens cleaning paper over the mirror, then spray ethyl
alcohol or lens cleaner over the paper and mirror.
(8) Move the lens cleaning paper horizontally to and fro across the
mirror.
NOTE
Since the lens cleaner has a high surface tension, it
may be difficult to move the cleaning paper. As the
paper is slowly moved to and fro across the mirror,
however, the ethyl alcohol will gradually evaporate.
(9) Blow clean air (using, for example, a camera blower) across the
mirror surface to completely evaporate the ethyl alcohol or lens
cleaner.
(10) Repeat steps (7) to (9) until all dirt on the mirror surface has
been removed. Finally, clean the mirror surface with ethyl
alcohol.
(11) Check the transmitting side of the mirror. If its surface is dirty,
perform steps (6) to (9) for the transmitting side also. Note that if
an excessive amount of ethyl alcohol or lens cleaner is applied, it
may flow around the back of the mirror, leading to
contamination.
(12) Wipe the mirror holder and O-ring with ethyl alcohol.
(13) Reinstall the rear mirror in the mirror holder, then insert the O-
ring. When installing the rear mirror, pay particular attention to
the mirror orientation. The reflecting plane (the plane pointed to
by the arrow marked on the side of the mirror) must face the
discharge tubes. The arrow is both scribed and marked with ink
such that, even if the ink is entirely removed it will still be
possible to find the scribed arrow. Align the arrow on the side of
the rear mirror with the mirror holder position.
(14) Mount the mirror holder by reversing steps (2) to (4). Install the
mirror holder in the alignment unit so that the mark on the mirror
holder faces down.
(15) Close the main circuit breaker or turn on the power supply of the
laser oscillator, then turn on the power to the CNC.
- 185 -
11.LASER OPTICAL SYSTEM B-70255EN/01
(20) After the rear mirror is replaced, the power input compensation
coefficient (PRM No. 15215) needs to be set again. See Section
9.6 for power input compensation coefficient setting.
- 186 -
B-70255EN/01 11.LASER OPTICAL SYSTEM
To clean the folding mirrors, follow the procedure given below. Since
it is necessary to touch the optical parts and vacuum parts while
cleaning the folding mirrors, wear clean gloves or finger cots. Do not
touch these parts with your bare hands.
Before starting cleaning, wipe away any foreign matter from around
the parts to be removed. If a removed part is inadvertently soiled,
wipe it clean with ethyl alcohol.
- 187 -
11.LASER OPTICAL SYSTEM B-70255EN/01
Procedure
(1) Turn off the power to the CNC, then open the main circuit
breaker or turn off the power supply of the laser oscillator.
(2) Loosen the mirror holder mounting screw, and remove the mirror
holder from the folding mirror unit. To simply replace the
folding mirror at this point, go to step (11).
(3) The folding mirror is attached to its holder using vacuum grease.
It is, therefore, very difficult to remove the mirror from its holder.
Therefore, clean the folding mirror without removing it from its
holder.
(4) Place the mirror with its reflecting side facing up. Gently blow
clean air (using, for example, a camera blower) across the mirror
surface to remove dust and dirt. Drop ethyl alcohol or lens
cleaner onto the mirror surface, moisten a cotton swab with the
fluid, and gently wipe any dirty areas.
(5) Place lens cleaning paper over the mirror, then spray ethyl
alcohol or lens cleaner over the paper and mirror.
(6) Move the lens cleaning paper horizontally to and fro across the
mirror.
NOTE
Since the lens cleaner has a high surface tension, it
may be difficult to move the cleaning paper. As the
paper is slowly moved to and fro across the mirror,
however, the ethyl alcohol will gradually evaporate.
(7) Blow clean air (using, for example, a camera blower) across the
mirror surface to completely evaporate the ethyl alcohol or lens
cleaner.
(8) Repeat steps (4) to (7) until all dirt on the mirror surface has
been removed.
(9) By using a cotton swab moistened with ethyl alcohol, clean that
part of the alignment unit which touches the mirror. This is
because flakes of coating may remain in this area. If the flakes of
coating are not removed, they may cause the mirror to become
misaligned.
(10) Install the mirror holder by reversing steps (2) to (3). Insert the
holder perpendicular to the alignment unit, so that the mirrors
touch the alignment unit evenly. When tightening the fixing
screws, tighten each screw evenly.
- 188 -
B-70255EN/01 11.LASER OPTICAL SYSTEM
(11) When replacing a mirror, remove the mirror from its holder.
Grease is applied to the back of the mirror. So, insert the tip of a
standard screwdriver into the hole on the mirror attachment side
to push up the mirror. At this time, do not apply an excessive
force to the mirror holder and the spring section of the mirror
holder.
(12) Apply a thin coat of vacuum grease to the rear of the new mirror.
In those cases where the reflecting side of the mirror faces down,
the mirror will fall unless grease is applied.
(13) Place the mirror in its holder and, using a dryer, blow warm air
onto the holder to warm it. This will soften the vacuum grease
and bond the mirror onto the holder. Mount the mirror holder as
explained in step (10).
(14) Turn on the main circuit breaker of the laser oscillator, then turn
on the power to the CNC.
- 189 -
11.LASER OPTICAL SYSTEM B-70255EN/01
The internal surfaces of the output mirror and rear mirror are concave.
For laser oscillation, the curvature centers and mirror surfaces of the
two mirrors must lie on the same axis. When this axis matches the
tube axis of the discharge tubes, in other words, when the laser beam
reflected by these mirrors passes through the center of the discharge
tubes, the output level is maximized, and symmetric beam mode and a
round section are obtained.
The theory of alignment is such that while monitoring the output
power level with a tester, you adjust the angle of each mirror to obtain
a maximum output power. Once this adjustment is made, all mirrors
are set for maximum output. So, if a mirror is misaligned, the original
state or original beam mode can be restored by adjusting the
misaligned mirror only to maximize the output power. Thus, with this
method, mode adjustment is simple, and can be performed with a
good reproducibility.
- 190 -
B-70255EN/01 11.LASER OPTICAL SYSTEM
FM2
FM3
R.M.
Fig.11.2.1.1(a) Mirror locations of C1000iA
- 191 -
11.LASER OPTICAL SYSTEM B-70255EN/01
(2) Collect a burn pattern, and use it as the start state for mode
adjustment. If the mode is good, end the adjustment.
Near (3m) : Hot mode and Cold mode
Far : Hot mode and Cold mode
(2) Collect a burn pattern. This is used for checking mirror dirt. If
the mode is good, end the adjustment.
Near (3m) : Hot mode and Cold mode
Far : Hot mode and Cold mode
- 192 -
B-70255EN/01 11.LASER OPTICAL SYSTEM
- 193 -
11.LASER OPTICAL SYSTEM B-70255EN/01
(1) For information about burn pattern collection, see Section 4.3(8).
- 194 -
B-70255EN/01 11.LASER OPTICAL SYSTEM
5 15
Initial setting of A = 7.590
10
5
Power
Clockwise B is adjusted to obtain a maximum power.
Same state as 1
(3)
In 3, the power is decreased,
indicating that the direction is wrong.
A maximum power is obtained based on B. So, in 5, the adjustment screw is
returned to the original position.
A=7.580 A=7.570 A=7.590
Power B is adjusted to obtain a maximum power.
Counterclockwise
(7) (8)
(6) (9)
(1) (10)
A=7.590
Do not determine the maximum power position of A at the actual maximum power point (peak point).
Instead, find the first position (1)' with the same power after a peak, and set a position halfway between (1)
and (1)'. Adjust B to obtain a maximum power at that position.
= (7.590+7.638) / 2
= 7.614
(7) (8) (1’)
(9)
(6)
(1)
(10)
A=7.590 A=7.650
A=7.614 A=7.638
- 195 -
11.LASER OPTICAL SYSTEM B-70255EN/01
Fig.11.3
- 196 -
APPENDIX
B-70255EN/01 APPENDIX A.EXTERNAL VIEW OF LASER OSCILLATOR
- 199 -
B.SPECIFICATIONS APPENDIX B-70255EN/01
B Item
SPECIFICATIONS
Contents
Type FANUC LASER MODEL-C1000iA
High-speed axial carbon dioxide gas laser by high-frequency discharge
Method
excitation
Structure Combination resonator/power supply type (separate exhaust pump)
Rated laser output 1,000 W
Maximum laser output 1,000 W (continuously variable output range of 100 W or greater)
Pulse peak value 1,000 W
Output stability ±1% (for 8-hour rated output under output feedback control)
Laser wavelength 10.6mm
Beam mode Low-order mode
Beam diameter(at oscillator outlet) Approximately f20 mm or less
Polarization 45° polarization
Angle of beam divergence(full angle) 2 mrad or less
Pulse output command frequency 5 to 2,000 Hz
Pulse output command duty factor 0 to 100%
Mixture of CO2:He:N2 = 5:40:55% (volume ratio with N2 balance)
Composition
with a composition ratio accuracy of ±5%.
Laser gas
Gas pressure 0.175±0.025 MPa (0.15 to 0.20 MPa) measured on a gauge
Consumption About 10 liters/h
Amount 40 liters/min or more
Temperature /
20°C to 30°C/±1°C (for laser output stability of ±1%)
Temperature stability
Cooling water
Circulating water pressure 0.5MPa or less on a gauge
Recommended cooling
11 kW or more
capacity of chiller unit
200VAC +10%, -15% 50/60 Hz±1Hz
Power requirements
or 220VAC +10%, -15% 60 Hz±1Hz
Required input power 18 kVA
Maximum current 60 A
Hour meter Total operation hours of the exhaust pump
Door interlock No
Warning lamp Blinks while discharge is in progress.
Main oscillator unit: About 350 kg
Weight
Exhaust pump unit: About 30 kg
- 200 -
B-70255EN/01 APPENDIX C.ERROR CODE LIST
- 201 -
C.ERROR CODE LIST APPENDIX B-70255EN/01
RESET ALARM?
MONITOR RUN ON
ALARM
MONITOR RESET ALARM?
1
ALARM HV ON
MONITOR
MONITOR
2
- 202 -
B-70255EN/01 APPENDIX D.PARAMTER LIST
D PARAMETER LIST
This appendix describes the parameters for the Series 16i-L.
Many parameters depend on the laser oscillator model and unit.
Check the parameter list in the data sheet supplied with each unit,
then set parameters.
- 203 -
D.PARAMTER LIST APPENDIX B-70255EN/01
#7 #6 #5 #4 #3 #2 #1 #0
15000 FLT CLB BMO AGA LGC LPC
#7 #6 #5 #4 #3 #2 #1 #0
15001 LHC PC8 NGC PES G0B EXA
- 204 -
B-70255EN/01 APPENDIX D.PARAMTER LIST
LHC
0: Does not control the oscillator with external signals (standard).
1: Controls the oscillator with external signals.
In the automatic operation mode, external signals are used to
turn on and off the shutter and beam output.
#7 #6 #5 #4 #3 #2 #1 #0
15002 PSH ADC BMA
#7 #6 #5 #4 #3 #2 #1 #0
15003 GVW HPT TIV
#7 #6 #5 #4 #3 #2 #1 #0
15004 CWY ECH EDG SPB STC AGC
- 205 -
D.PARAMTER LIST APPENDIX B-70255EN/01
SPB
0: Outputs a beam in skip operation.
1: Outputs no beam in skip operation.
EDG
0: Turns the beam off when switching the assist gas during edge
machining.
1: Does not turn the beam off when switching the assist gas during
edge machining.
ECH
0: Does not clear the active E number upon reset.
1: Clears the active E number upon reset.
CWY
0: A CO2 laser oscillator is used.
1: A CW-YAG laser oscillator is used.
#7 #6 #5 #4 #3 #2 #1 #0
15005 DLY ITR GNS BPV TTD INB
#7 #6 #5 #4 #3 #2 #1 #0
15006 PCN PCL PIN TRM NCC
- 206 -
B-70255EN/01 APPENDIX D.PARAMTER LIST
TRM
0: Enables the zero-point, start-point and end-point soft keys for the
trace setting screen.
1: Disables the zero-point, start-point and end-point soft keys for
the trace setting screen.
PIN
0: Specifies a G13 address P using metric input.
1: Specifies a G13 address P using inch input.
PCL
0: On-screen pressure display of assist gas in kg/cm2.
1: On-screen pressure display of assist gas in MPa.
PCN
0: Rewrites the power compensation factor with 1024 when power
compensation is not performed.
1: Does not rewrite the power compensation factor and retains the
previous value when power compensation is not performed.
#7 #6 #5 #4 #3 #2 #1 #0
15007 STO XSC ECK ESE
- 207 -
D.PARAMTER LIST APPENDIX B-70255EN/01
#7 #6 #5 #4 #3 #2 #1 #0
15008 RMP EGE DCW SOC TAL GPC MST
- 208 -
B-70255EN/01 APPENDIX D.PARAMTER LIST
#7 #6 #5 #4 #3 #2 #1 #0
15009 TEM BCG BEM AFZ BS2 BS1 AS2 AS1
AFZ
1: Does not include the Z-axis in calculation for actual cutting
feedrate display.
0: Includes the Z-axis in calculation for actual cutting feedrate
display.
BEM
1: The supply pressure of the three-gas cylinder is normal.
0: The supply pressure of the three-gas cylinder is low.
BCG
1: The three-gas cylinder is not replaced.
0: The three-gas cylinder is replaced.
TEM
1: The tank supply pressure is normal.
0: The tank supply pressure is low.
#7 #6 #5 #4 #3 #2 #1 #0
15010 OVE TRG
- 209 -
D.PARAMTER LIST APPENDIX B-70255EN/01
#7 #6 #5 #4 #3 #2 #1 #0
15011 OPV CSC LVE EDS
- 210 -
B-70255EN/01 APPENDIX D.PARAMTER LIST
#7 #6 #5 #4 #3 #2 #1 #0
15025 PS8 PS7 PS6 PS5 PS4 PS3 PS2 PS1
15026 PS16 PS15 PS14 PS13 PS12 PS11 PS10 PS9
NOTE
Parameter No. 15026 is provided for future addition of
discharge tubes. In the current specifications, this
parameter is not used. Set all bits to 0.
#7 #6 #5 #4 #3 #2 #1 #0
15027 PS8 PS7 PS6 PS5 PS4 PS3 PS2 PS1
15028 PS16 PS15 PS14 PS13 PS12 PS11 PS10 PS9
NOTE
Parameter No. 15028 is provided for future addition of
discharge tubes. In the current specifications, this
parameter is not used. Set all bits to 0.
- 211 -
D.PARAMTER LIST APPENDIX B-70255EN/01
- 212 -
B-70255EN/01 APPENDIX D.PARAMTER LIST
- 213 -
D.PARAMTER LIST APPENDIX B-70255EN/01
- 214 -
B-70255EN/01 APPENDIX D.PARAMTER LIST
- 215 -
D.PARAMTER LIST APPENDIX B-70255EN/01
- 216 -
B-70255EN/01 APPENDIX D.PARAMTER LIST
#7 #6 #5 #4 #3 #2 #1 #0
15089 LP8 LP7 LP6 LP5 LP4 LPZ LPY LPX
- 217 -
D.PARAMTER LIST APPENDIX B-70255EN/01
#7 #6 #5 #4 #3 #2 #1 #0
15096 EGM PCD PCF PCP
- 218 -
B-70255EN/01 APPENDIX D.PARAMTER LIST
- 219 -
D.PARAMTER LIST APPENDIX B-70255EN/01
- 220 -
B-70255EN/01 APPENDIX D.PARAMTER LIST
- 221 -
D.PARAMTER LIST APPENDIX B-70255EN/01
- 222 -
B-70255EN/01 APPENDIX D.PARAMTER LIST
#7 #6 #5 #4 #3 #2 #1 #0
15153 LCK
- 223 -
D.PARAMTER LIST APPENDIX B-70255EN/01
#7 #6 #5 #4 #3 #2 #1 #0
15160 MDS MNT
- 224 -
B-70255EN/01 APPENDIX D.PARAMTER LIST
15200 Power used for power compensation factor determination when half of the
discharge tubes are used
15201 Power used for power compensation factor determination when all
discharge tubes are used
- 225 -
D.PARAMTER LIST APPENDIX B-70255EN/01
- 226 -
B-70255EN/01 APPENDIX D.PARAMTER LIST
15212 Maximum specifiable power when the duty ratio is not clamped
- 227 -
D.PARAMTER LIST APPENDIX B-70255EN/01
- 228 -
B-70255EN/01 APPENDIX D.PARAMTER LIST
- 229 -
D.PARAMTER LIST APPENDIX B-70255EN/01
- 230 -
B-70255EN/01 APPENDIX D.PARAMTER LIST
- 231 -
D.PARAMTER LIST APPENDIX B-70255EN/01
15258 Time constant of the filter used for laser gas pressure variation suppression
15260 Period when the exhaust value of the external pipe is open
- 232 -
B-70255EN/01 APPENDIX D.PARAMTER LIST
- 233 -
D.PARAMTER LIST APPENDIX B-70255EN/01
- 234 -
B-70255EN/01 APPENDIX D.PARAMTER LIST
15280 Table interval when half of the discharge tubes are used
15290 Power command 0 when half of the discharge tubes are used
15291 Power command 1 when half of the discharge tubes are used
15292 Power command 2 when half of the discharge tubes are used
15293 Power command 3 when half of the discharge tubes are used
15294 Power command 4 when half of the discharge tubes are used
15295 Power command 5 when half of the discharge tubes are used
15296 Power command 6 when half of the discharge tubes are used
15297 Power command 7 when half of the discharge tubes are used
15298 Power command 8 when half of the discharge tubes are used
- 235 -
D.PARAMTER LIST APPENDIX B-70255EN/01
- 236 -
B-70255EN/01 APPENDIX D.PARAMTER LIST
15326 Power command when aging is performed with the automatic aging
- 237 -
D.PARAMTER LIST APPENDIX B-70255EN/01
- 238 -
B-70255EN/01 APPENDIX D.PARAMTER LIST
- 239 -
D.PARAMTER LIST APPENDIX B-70255EN/01
- 240 -
B-70255EN/01 APPENDIX D.PARAMTER LIST
15710 Wait time for checking the remaining amount in the gas cylinder
- 241 -
D.PARAMTER LIST APPENDIX B-70255EN/01
- 242 -
B-70255EN/01 APPENDIX D.PARAMTER LIST
15801 Maximum internal pressure when the control function of driving the turbo
blower with a constant power is enabled
15802 Laser power setting used as the maximum internal pressure when the
control function of driving the turbo blower at a constant power is enabled
15803 Compensation factor for the internal pressure setting when the control
function of driving the turbo blower at a constant power is enabled
15804 Maximum exhaust valve open time for internal pressure control during
oscillation
- 243 -
E.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70255EN/01
- 244 -
B-70255EN/01 APPENDIX E.CONTROL SEQUENCES IN LASER OSCILLATOR
SEQ 0
PURGE = 0
LRDY = 0
PTLP = 0
LSTR = 0
SEQ 10
PURGE = 1
INITIAL
LRDY = 0
PTLP = 0
LSTR = 0 SEQ11(WAIT=1)
(START KEY)
RUN ON (START KEY)
RUN OFF
SEQ19(WAIT=1) SEQ 20
PURGE = 0 READY OF DISCHARGING
LRDY = 1
PTLP = 0
LSTR = 0 SEQ21(RFHV=0)
HV ON
HV OFF
SEQ29(RFHV=1) SEQ 30
PURGE = 0
LRDY = 0 READY OF OSCILLATION
PTLP = 1
LSTR = 1
- 245 -
E.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70255EN/01
Sequence
Meaning
number
10 Initial state (purge completed state)
12 Purge operation being performed
14 State waiting 75 seconds
16 Execution with RUN turned on
State waiting for exhaust completion and negative pressure
17
arrival
18 State waiting for the AR signal to be turned on
20 LRDY state
State waiting for setting from gas pressure during laser
23
oscillation to discharge start time gas pressure
26 Execution with HV ON (state waiting for start of discharge)
State waiting for setting from a maximum base discharge
27
value to base discharge state
28 Power compensation being performed
30 LSTR state
Vacuum being drawn with RUN turned off (parameter No.
49
15256)
50 State waiting 75 seconds with RUN turned on again
- 246 -
B-70255EN/01 APPENDIX E.CONTROL SEQUENCES IN LASER OSCILLATOR
GAS
PRESSURE : COMMAND
: REAL
PRM15249
PRM15242
PRM 15243
±2torr
PRM15241
PRM15240
SQ16 SQ26
SQ17 SQ18 SQ20 SQ27 SQ28 SQ30 SQ23 SQ20 SQ49 SQ12
[SQ10]
This is the state after power is turned on in which intra-tube gas
pressure equals atmospheric pressure.
- 247 -
E.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70255EN/01
[SQ20]
This is the state of discharge start preparation completion (LRDY=1)
and HV ON (high voltage command) is read.
[SQ30]
This is oscillation preparation completion state(LSTR=1) in which
laser oscillation is ready.
[SQ23]
When HV is turned off, discharge stops, and the state changes from
the oscillation preparation completion state (LSTR) to the discharge
start preparation completion state (LRDY). At this time, the intra-tube
gas pressure changes from the value set in PRM No. 15242 or 15243
to the value set in PRM No. 15241.
[SQ49, 14, 12]
When the oscillator start switch is set to OFF in the SQ20 state, gas
pressure control ends, and the termination of the turbo blower
operation is awaited for 70 seconds. If evacuation is enabled (bit 2 of
PRM No.15003 = 1) after RUN is turned off, evacuation is performed
for the period of time set in PRM No.15256, Then, laser gas is filled
until the intra-tube gas pressure becomes equal to the atmospheric
pressure. Upon completion of laser gas filling, the purge state is set.
When the purge state is set, the off-interlock contact is disconnected.
- 248 -
B-70255EN/01 APPENDIX E.CONTROL SEQUENCES IN LASER OSCILLATOR
PRM15242, 15243
PRM15241
LSTR LSTR
H.V.ON
(No compensation) (In compensation)
Command voltage
Tube voltage In output
compensation
PRM15200, 15201
Eight step of
compensation
PRM15200, 15201 ´1/2
Command voltage
PRM15220
PRM15221
PRM15223
Tube voltage In no
compensation
Gas [TIME]
PRM15222 20sec or voltage PRM15205
6sec check
30sec
- 249 -
E.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70255EN/01
[SQ291]
When HV is turned on, high voltage is applied to discharge tubes and
voltage control begins. Here command is increased in ramp mode up
to the value of PRM 15220 (maximum bias command at discharge
start). The time required to reach PRM 15220 from HV ON is 6 sec.
[SQ292]
In this sequence, discharge is maintained at the discharge command
value set in PRM 15220 for the period of time set in PRM 15222
(discharge start wait time). Here all the tubes must be in discharge.
The state of discharge is checked by comparing tube voltage with
discharge start voltage (PRM 15221).
[SQ293]
When discharge start is confirmed in SQ 292, power command
changes to PRM 15223 (bias command).Here base discharge is
established for a while and the comparison between discharge tube
voltage and PRM 15270 (tube voltage in normal discharge) is done
using the following decision equation.
Vn-1 - Vn < PRM.No.15272
Vn-1 : PRM.No.15270 (tube voltage in normal discharge)
Vn : monitored voltage of the tube of the smallest number
(power supply)
PRM.No.15272 : Tube voltage decrease limit
The decision of normal state is given by the holding of the above
inequality. When normal, monitored voltage of Vn tube is set for
PRM15270. If PRM15000#4 is 0 then, laser enters oscillation
preparation completion (LSTR) state.
[SQ294]
When normal base discharge is confirmed and PRM15000#4 is 1, this
sequence begins to obtain power calibration coefficient. Power
calibration is to calibrate so that real and command powers become
equal. The equation used is as follows.
PRM.No.15204 = Pc / Pa ´1024
PRM.No.15204 : Power calibration coefficient
Pc : Command power
Pa : Actual power
The calibration coefficient is calculated by outputting the value
specified with PRM 15200 (when half of the discharge tubes are
used) or PRM 15201 (when all the discharge tubes are used) then
assigning that value to the above equation.
The value of Pa becomes an actual value measured after the time set
in PRM 15205 (compensation time setting) has elapsed.
The difference between the specified power and actual power is also
monitored. The laser is judged as being normal provided the
difference is less than the value specified with PRM 15271(power
decrease limit).The calibration coefficient is clamped to the value
specified for PRM 15203 (power calibration limit). Once the above
procedure has terminated normally, the laser enters the LSTR state.
- 250 -
B-70255EN/01 APPENDIX E.CONTROL SEQUENCES IN LASER OSCILLATOR
POWER ON SEQUENCE
PURGE = ON
OF1 = OFF
No
RUN = ON
Alarm 1
Yes
Monitor treatment
start
PCR = OFF
OF1 =ON
PURGE = OFF
WAIT = ON
CLON = ON
RPA = ON
Control valve = full open
Chiller monitor start
Timer A = Reset
- 251 -
E.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70255EN/01
VEN = ON
PCL = OFF
GRDY = ON
GRDY = OFF
Control valve full close
No
Intra-tube pressure Timer count
<PRM.15204
Timer > No
Yes
PRM.15259
Yes
VEN = OFF
RBA = ON ALM.4080
GRDY = ON
- 252 -
B-70255EN/01 APPENDIX E.CONTROL SEQUENCES IN LASER OSCILLATOR
PRM.15241+20> No
Intra-tube pressure
>PRM.15241-20
ALM.4081
Yes
WAIT = OFF
LRDY = ON
No
HV = ON
Alarm 2
Yes
Monitor treatment start
LRDY = OFF
PSS1 to 8 = Set
PSRDY = ON
RFHV = ON
PTLP = ON
WAIT = OFF :
Waiting signal for LRDY is off.
LRDY = ON :
Discharge preparation completion signal is on by which HV ON
becomes ready.
- 253 -
E.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70255EN/01
HV = ON :
When HV is turned on, you proceed to the sequence below.
LRDY = OFF :
When HV is turned on, LRDY is turned off.
PSS1-8 = SET :
This is to select power units and usually is sent to the units
selected by PRM 15025 to PRM 15028.
PSRDY = ON :
This is sent to a power supply selected by the laser power supply
ready signal.
RFHV = ON :
Power is fed from the DC section of the laser power supply to
the RF section.
BIAS COMMAND
0 ® PRM.15220
PRM.15220 WAIT
No
Intra-tube pressure
ALM.4066
< PRM.15221
Yes
No
PRM.15242,15243-100
<PRM.15242,15243
<PRM.15242,15243+100
ALM.4078
Yes
The output command value is changed from a low level to the value
set in PRM 15220 (maximum bias command value at discharge time)
in a ramp mode by the bias command to facilitate discharge. The time
required to reach peak value is 6 sec.
- 254 -
B-70255EN/01 APPENDIX E.CONTROL SEQUENCES IN LASER OSCILLATOR
No
PRM.1500.4=1
Yes
No
PRM.15204
>PRM.15203
Yes
PRM.15204>PRM.15203
LSTR = ON
Enables BEAM ON
- 255 -
E.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70255EN/01
- 256 -
B-70255EN/01 APPENDIX F.REFIXING AND REPLACING GAS TUBE
REFIXING TUBE
(1) Loosen tube fixing nut.
(2) Removed the tube. Make sure that neither of tube nor ferrule is
contaminated with dust. When contaminated, wipe them with
clean and soft cloth.
Back Front
ferrule ferrule
Nut Tube
Fig.F Remounting the gas tube
- 257 -
F.REFIXING AND REPLACING GAS TUBE APPENDIX B-70255EN/01
REPLACING TUBE
(1) Cut the end face of the tube at right angles, and install a nut,
back ferrule, and front ferrule as shown in Fig. F. Pay attention
to the orientation of the back ferrule.
(2) Install the tube by inserting the tube until it butts against the
joint.
- 258 -
B-70255EN/01 APPENDIX G.REFIXING AND REPLACING WATER TUBE
REFIXING TUBE
(1) Loosen tube fixing nut.
(2) Remove the tube. Ensure that the sleeve and the inside of the
tube are not contaminated by dust. If these are contaminated by
dust, wipe off the dust softly by using a clean cloth moistened
with alcohol.
Sleeve
Nut Tube
Fig.G Remounting the water tube
- 259 -
G.REFIXING AND REPLACING WATER TUBE APPENDIX B-70255EN/01
REPLACING TUBE
(1) Cut the end face of the tube at right angles, and install a nut and
sleeve as shown in Fig. G. Pay attention to the orientation of the
sleeve.
(2) Install the tube by inserting the tube until it butts against the
joint.
(3) Retighten the tube.1) Push the tube into the fitting until the
sleeve on the tube butts firmly against the sealing surface of the
fitting.
1) Push the tube into the fitting until the sleeve on the tube
butts firmly against the sealing surface of the fitting.
2) Rotate nut with finger as tight as possible.
3) Holding fitting base with wrench, rotate nut with wrench by
1 and 1/2 rotation.
This completes the work.
- 260 -
B-70255EN/01 APPENDIX H.GLOSSARY
H Name
GLOSSARY
Meaning
<A>
Access panel That protective component of a housing or enclosure which, when removed or shifted,
can cause exposure to laser radiation.
AEL Accessible emission level Maximum accessible emission level set up for each class of laser products
Alignment Optical axis adjustment
Aperture Iris, or stop
<B>
Beam Aggregate of unidirectional, diverging, or conversing rays
Beam diameter Distance between two symmetrical points in a cross section of a beam where the
power per unit area is 1/e as high as the maximum power per unit area
Beam divergence Angle through which a beam spreads
Burn pattern Laser beam mode pattern generated on a plate such as an acrylic plate for
confirmation purposes
<C>
Circular Polarization in which a plane of polarization rotates about the axis along which the light
Polarization progresses and does not have directivity; an electric or magnetic field based on circular
polarization has a constant intensity.
CO2 laser Laser that uses a carbon dioxide gas as a laser medium
CW Continuous wave Continuously radiated laser output
<D>
Discharge excitation Realization of inverted population by means of discharge
<E>
Enhanced pulse Greatly amplified peak output of a pulse
Excitation Transition of atoms or molecules to a higher energy level by supplying them with
external energy
Exposure time Duration through which laser radiation is emitted
<F>
Fast axial flow laser Laser in which gas flows rapidly in the same direction as the laser beam
Feedback Corrective action in which a quantity to be controlled is compared with a target value
generated by feeding part of an output signal to the input through a specially created
closed loop so that the quantity to be controlled matches the target value.
<L>
Laser Device for generating light by stimulated emission
Laser controlled area Area in which activities are controlled or monitored for protection from hazards
resulting from laser radiation
Laser mirror Reflecting mirror used in a laser resonator
Laser safety officer Person having sufficient knowledge about evaluation and management of hazards of
lasers and in charge of safety management of lasers
Laser safety standard Standard to protect human bodies from hazards resulting from laser beams in view of
use of lasers and about laser products for sale
Linear Polarization in which a plain of polarization is at a constant angle with the axis along
Polarization which the light progresses
<M>
Maintenance Action taken by a user to preserve normal operation of a product, such as adjustment
or other measures specified in documents created by the manufacturer for users
- 261 -
H.GLOSSARY APPENDIX B-70255EN/01
Name Meaning
Maximum output Maximum radiation power or maximum radiation energy per pulse that a laser product
outputs in all directions where there is a hazard of exposure in view of operational
capacity in every area at any point of time after the production of the laser product
Mode State of a resonant system in which an electromagnetic field has a specific distribution
MPE Maximum permissible Maximum laser radiation level that can be radiated onto human bodies without harmful
exposure influence to them in an ordinary environment
<O>
Operation Laser product's action covering all intended functions, not including maintenance or
service.
Optical resonator Device in which stimulated emission of light is used for a laser and which consists of a
pair of reflecting mirrors facing each other
<P>
Parameter Variable that is assigned a given value for a specific purpose and indicates that
purpose
Phase Amount representing a positional relationship between two adjacent highest or lowest
points on a wave
Power density Energy per unit area
Protective housing Laser product housing or its part designed to protect humans from exposure to a laser
beam exceeding an accessible emission level or strong collateral radiation
Pulse duration Time interval between the points at which an instantaneous value on the leading and
trailing edges is half the peak pulse amplitude
Pulse duty Ratio (%) of a duration in which a pulsating laser output is on, to its entire cycle
Pulse frequency Repetition frequency at which pulsating laser beams are radiated from an oscillator
Pulse laser Laser that outputs energy in the form of a single pulse or a pulse train
Pulse output Laser output radiated in the form of a pulse train
<R>
Radian Measurement unit of angle; 1 radian equals 360°/2p
Radiant energy Energy emitted, transmitted, or received (measured in joules, or J)
<S>
Safety interlock Device combined with the protective housing of a laser product to stop its operation
automatically when part of the housing is removed
Semiconductor laser Laser that uses a semiconductor as an exciting medium
Sequence A succession of steps carried out in a prescribed order
Stimulated emission Emission of an electromagnetic wave from a material in proportion to the strength of
the incident electromagnetic field
<T>
Target Jig used to radiate and position a laser beam
Threshold Physical quantity necessary to generate laser beams
- 262 -
B-70255EN/01 INDEX
INDEX
ALM No.4082 .................................................... 75
A
ALM No.4085 .................................................... 76
A/D CONVETER-3 ........................................... 79
ALM No.4087 .................................................... 76
AD converter 1 is not normal........................... 61
ALM No.4088 .................................................... 77
AD converter 2 is not normal........................... 61
ALM No.4089 .................................................... 78
Adjusting the Exhaust Unit (Adjusting the
ALM No.4090 .................................................... 78
Laser Gas Consumption) ............................ 135
ALM No.4094 .................................................... 78
Adjusting the Water Flow Sensor.................. 143
ALM No.4095 .................................................... 79
Alarm Processing after Modification of Intra-
ALM No.4096 .................................................... 79
tube Pressure at Oscillation Time and Bias
ALM No.4097 .................................................... 79
Command Setting ....................................... 119
ALM No.4098 .................................................... 79
ALIGNMENT OF THE GUIDE LASER ....... 196
ALM No.4099 .................................................... 79
ALIGNMENT OF THE RESONATOR.......... 190
ALM No.4100 .................................................... 80
Alignment Procedure at Mirror Cleaning Time
ALM No.4101 .................................................... 81
..................................................................... 192
ALM No.4105 .................................................... 81
Alignment Procedure during Installation after
ALM No.4106 .................................................... 82
Transportation ............................................ 192
ALM No.4107 .................................................... 82
ALM No.4061 .................................................... 61
ALM No.4132 .................................................... 83
ALM No.4063 .................................................... 61
ALM No.4062 .................................................... 61
ALM No.4065 .................................................... 64
Anomaly of assist gas ....................................... 67
ALM No.4066 .................................................... 64
Anomaly of chiller unit..................................... 67
ALM No.4067 .................................................... 65
Anomaly of gas pressure control...................... 74
ALM No.4068 .................................................... 66
Anomaly of laser power supply unit ................ 61
ALM No.4069 .................................................... 66
Anomaly of power supply unit voltage of IF
ALM No.4070 .................................................... 67
PCB ................................................................ 66
ALM No.4071 .................................................... 67
Anomaly of pressure sensor ............................. 75
ALM No.4072 .................................................... 68
Anticorrosive ..................................................... 43
ALM No.4073 .................................................... 68
Antifreezing solution ........................................ 44
ALM No.4074 .................................................... 69
APPLICABLE MODELS .................................... 3
ALM No.4075 .................................................... 70
Assist gas not output ........................................ 78
ALM No.4076 .................................................... 70
Attaching and Detaching a Cable To and From
ALM No.4077 .................................................... 71
the Terminal Block ..................................... 165
ALM No.4078 .................................................... 71
AUTOMATIC AGING FUNCTION ............... 237
ALM No.4079 .................................................... 72
B
ALM No.4080 .................................................... 73
ALM No.4081 .................................................... 74 Base Discharge Adjustment........................... 117
i-1
INDEX B-70255EN/01
Electrical Connections...................................... 47 L
ELECTRICAL CONNECTIONS.................... 103
Laser beam not generated................................ 78
i-2
B-70255EN/01 INDEX
i-3
INDEX B-70255EN/01
i-5
Revision Record
FANUC LASER-MODEL C1000iA MAINTENANCE MANUAL (B-70255EN)
01 Dec., 2000