Ol Mean

GE Fanuc Automation
Computer Numerical Control Products
C Series Laser
Operator's Manual
GFZ-70114EN/04 June 2000

GFL-001
Warnings, Cautions, and Notes
as Used in this Publication
Warning
Warning notices are used in this publication to emphasize that hazardous voltages, currents,
temperatures, or other conditions that could cause personal injury exist in this equipment or may
be associated with its use.
In situations where inattention could cause either personal injury or damage to equipment, a
Warning notice is used.
Caution
Caution notices are used where equipment might be damaged if care is not taken.
Note
Notes merely call attention to information that is especially significant to understanding and
operating the equipment.
This document is based on information available at the time of its publication. While efforts
have been made to be accurate, the information contained herein does not purport to cover all
details or variations in hardware or software, nor to provide for every possible contingency in
connection with installation, operation, or maintenance. Features may be described herein which
are not present in all hardware and software systems. GE Fanuc Automation assumes no
obligation of notice to holders of this document with respect to changes subsequently made.
GE Fanuc Automation makes no representation or warranty, expressed, implied, or statutory

with respect to, and assumes no responsibility for the accuracy, completeness, sufficiency, or
usefulness of the information contained herein. No warranties of merchantability or fitness for
purpose shall apply.
©Copyright 2000 GE Fanuc Automation North America, Inc.

All Rights Reserved.
B–70114EN/04 PREFACE
PREFACE
This document describes the following models.

Model Abbreviation
FANUC LASER–MODEL C1500B C1500B
FANUC LASER–MODEL C2000C C2000C
FANUC LASER–MODEL C3000D C3000D
FANUC LASER–MODEL C4000A C4000A
p–1
PREFACE B–70114EN/04
And, these models conform with EMC Directive 89/336/EEC.
401-0597 Japan
401-0597 Japan
p–2
401-0597 Japan
401-0597 Japan
p–3
401-0597 Japan
401-0597 Japan
p–4
p–5
p–6
B–70114EN/04 Table of Contents
PREFACE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . p–1
1. OVERVIEW . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
1.1 MANUAL CONTENTS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
1.2 APPLICABLE MODELS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.3 RELATED MANUALS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.4 FOR SAFE OPERATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.5 NOTES ON READING THIS MANUAL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
2. SAFETY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.1 LASER BEAM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
2.2 HIGH VOLTAGE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
2.3 SAFETY ENCLOSURE (AT YOUR WORK STATION) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
2.4 FIRE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
2.5 TOXIC FUME . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
2.6 HIGH TEMPERATURE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
2.7 WARNING LABELS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
2.8 KEY CONTROL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
2.9 SHUTTER LOCK . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
2.10 EMERGENCY STOP BUTTON . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
2.11 WARNING LIGHT (OPTIONAL) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
2.12 INAPPOSITE USE OF LASER OSCILLATOR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
3. INSTALLATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
3.1 CONDITION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
3.1.1 Environmental Conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
3.1.2 Power Source . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
3.1.3 Laser Gas . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
3.1.4 Cooling Water . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46
3.2 TRANSPORTATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48
3.2.1 Lifting Laser Oscillator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48
3.2.2 Packing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49
3.2.3 Environmental Condition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53
3.3 STORAGE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53
3.3.1 Environmental Condition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53
3.4 BASE OF OSCILLATOR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54
3.5 MAINTENANCE AREA . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56
3.6 WATER CONNECTION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66
3.6.1 Chiller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66
3.6.2 Cooling Water Temperature . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66
3.6.3 Cooling Water Flow Rate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
3.6.4 Plumbing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
3.7 LASER GAS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75
3.7.1 Gas Bottle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75
3.7.2 Laser Gas Tubing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75
3.7.3 Gas Pipe . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75
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TABLE OF CONTENTS B–70114EN/04
3.8 LASER BEAM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76

3.8.1 Position and Tolerance of Laser Beam Exit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76
3.8.2 Beam Divergence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77
3.8.3 Tolerance of Beam Direction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77
3.8.4 Beam Guide . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77
3.9 ELECTRIC CONNECTION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78
3.9.1 Power Cable (L1, L2, L3) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82
3.9.2 Ground Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82
3.9.3 I/O Signal Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82
3.9.4 Other Signal Cables to the IF PCB . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82
3.9.5 XT20 Terminal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 85
3.9.6 EMC Countermeasure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 93
4. FUNCTIONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 94
4.1 INTERNAL STRUCTURE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 95
4.1.1 Outline . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 95
4.2 COMPONENT DETAILS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 103
4.3 OPERATION SEQUENCE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 115
4.4 LASER PROCESSING MACHINE SYSTEM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 117
5. MAINTENANCE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 119
5.1 DAILY INSPECTION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 120
5.2 PERIODIC MAINTENANCE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 121
5.3 DETAILS OF MAINTENANCE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 123
5.3.1 Maintenance Panels and Oil Gauge Position . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 123
5.3.2 Turbo Blower Oil . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 129
5.3.3 Exhaust Pump Oil . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 131
5.3.4 Exhaust Pump Filter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 132
5.3.5 Exhaust System Filter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 133
5.4 AGING . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 135
5.4.1 Leak Check Method . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 135
5.4.2 Aging Method . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 135
5.5 MAINTENANCE PARTS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 138
5.5.1 Spare Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 138
5.5.2 Maintenance Tools . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 139
6. TROUBLESHOOTING . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 140
6.1 CHECKING ON FAULTS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 141
6.2 RESPONDING TO ALARM MESSAGES ON THE SCREEN . . . . . . . . . . . . . . . . . . . . . . . . . . . . 142
APPENDIX
A. EXTERNAL VIEW . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 159
B. FANUC LASER C SERIES SPECIFICATIONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 167
C. ERROR CODE LIST . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 171
D. FANUC SERVICE NETWORK . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 173
E. GLOSSARY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 174
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B–70114EN/04 1. OVERVIEW
1 OVERVIEW
In this manual, we have tried as for as possible to address all issues.

However, space restrictions prevent us from describing everything that
must not be done, or which cannot be done, because there are so many
possibilities.
Therefore, all matters which are not specifically described as being
possible should be regarded as being “impossible”.
Contents of this chapter
1.1 MANUAL CONTENTS . . . . . . . . . . . . . . . . . . . . . . . . . 2

1.2 APPLICABLE MODELS . . . . . . . . . . . . . . . . . . . . . . . 3
1.3 RELATED MANUALS . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.4 FOR SAFE OPERATION . . . . . . . . . . . . . . . . . . . . . . . 4
1.5 NOTES ON READING THIS MANUAL . . . . . . . . . . . 4
1
1. OVERVIEW B–70114EN/04
1.1 This manual consists of the following chapters and appendixes:

MANUAL CONTENTS
1. OVERVIEW
Chapter 1 covers the configuration of the manual, applicable models,
related manuals, and provides notes on reading the manual.
2. SAFETY
Chapter 2 covers the warnings and precautions related to laser beams,
high voltages, high temperatures, and a toxic substances.
To ensure safe operation, read this chapter first.
3. INSTALLATION
Chapter 3 describes the condition for installation and connection of
electrical cables, water tubes, gas tubes.
4. FUNCTIONS
Chapter 4 describes the structure and operation of the laser oscillator.
5. MAINTENANCE
Chapter 5 describes the periodic maintenance of the laser oscillator.
6. TROUBLESHOOTING
Chapter 6 describes the actions to be taken if the oscillator
malfunctions.
APPENDIX
A. EXTERNAL VIEW
B. FANUC LASER C SERIES SPECIFICATIONS
C. ERROR CODE LIST
D. FANUC SERVICE NETWORK
E. GLOSSARY
2
B–70114EN/04 1. OVERVIEW
1.2 This manual covers the following models:

APPLICABLE Model Abbreviation
MODELS
FANUC LASER–MODEL C3000D C3000D
FANUC LASER–MODEL C4000A C4000A
1.3 The following manuals are available for the FANUC LASER C series:
RELATED MANUALS
FANUC Series 0–L DESCRIPTIONS B–61572E
CONNECTION MANUAL B–61573E
OPERATOR’S MANUAL B–61574E
MAINTENANCE MANUAL B–61575E
FANUC Series 16–LA DESCRIPTIONS B–61852E
OPERATOR’S MANUAL B–61853E
PARAMETER MANUAL B–61810E
FANUC Series 16–LB DESCRIPTIONS B–62442E

(HARDWARE)
CONNECTION MANUAL B–62443E–1

(FUNCTION)
OPERATOR’S MANUAL B–62594EN
PARAMETER MANUAL B–62600EN
FANUC Series 16i–LA DESCRIPTIONS B–63192EN
CONNECTION MANUAL B–63193EN
OPERATOR’S MANUAL B–63194EN
MAINTENANCE MANUAL B–63195EN
FANUC LASER C series OPERATOR’S MANUAL B–70114EN
MAINTENANCE MANUAL B–70115EN
3
1. OVERVIEW B–70114EN/04
1.4 This manual contains precautions which must be observed during

operation of the laser oscillator, to ensure the operator’s safety and prevent
FOR SAFE damage to the oscillator. Each precaution is indicated by “Warning” or
OPERATION “Caution” according to its severity.
Supplementary information is indicated by “Note”.
Read the contents of each “Warning”, “Caution”, and “Note” before

attempting to use the oscillator.
Warning Precautions to be applied in those situations where there is a danger of the

operator being killed or seriously injured
Caution Precautions to be applied in those situations where there is a danger of the

operator being slightly injured or the oscillator being damaged
Note Supplementary information other than precautions
1.5 The functions of a laser machining system depend not only on the laser
oscillator, but also on the machine, power magnetics cabinet, servo
NOTES ON READING system, CNC, and operator’s panel. This manual describes only the laser
THIS MANUAL oscillator. For a description of the other components, refer to the
corresponding manuals, supplied by the machine tool builder.
Read this manual thoroughly and store it in a safe place.
4
B–70114EN/04 2. SAFETY
2 SAFETY
C1500B, C2000C (C2000B), C3000D (C3000C), C4000A, C6000B

produce the rated laser output power of 1500W, 2000W, 3000W, 4000W,
6000W. The CO2 laser beam is the wavelength of 10.6 mm, far infrared,
and is invisible to human eyes. The adequate care must be taken,
therefore, in dealing with it. When removing the panel, always turn the
power source off and confirm no power is applied to the laser machine.
This oscillator fulfills the requirements of the relevant product safety

standard of EN60825–1:1994.
5
2. SAFETY B–70114EN/04
2.1 1) Potential hazards

Laser oscillator emits CO2 laser beam(10.6 mm), which is high power
LASER BEAM and invisible.
D Being directly exposed to the CO2 beam could severely burn you.
D The CO2 beam could bource off your workpiece and burn your eyes
or skin.
FANUC LASER C series have a diode laser. The diode laser beam
is visible (red color) and low power. It is used to ensure that the CO2
beam is correctly positioned on your workpiece.
D The diode laser beam is not considered harmful to your skin. But
if you stared head on into the laser diode beam, it could harm your
eyes.
2) Safety recommendations
Never expose the eyes and skin to the laser beam. Be careful of the
laser beam when performing the inspection and maintenance.
Do not turn on the power supply to the oscillator when the panel open
and do not drive. It is bleached to radiation of the laser beam and high
voltage.
Do the countermeasure (For instance, installs safety glasses and the
protection gloves) to danger in case of stopped no finish and nor
opening the panel while it energizes the oscillator.
Install beam safety cover after mirror cleaning or replacement. And if
not beam safety cover installation, do not operation and alignment.
Confirm when it does alignment, the protection pipe (Safety cover) is
installed. If it dose not install the protection pipe, it will put the finger
in the laser beam and there is possibility to do the burn.
When entering the area exposed to the scattered beam, wear the safety
glasses. Mount the stand made of acrylic resin or any material which
can absorb the CO2 laser beam to protect the personnel from the
scattered beam.
Avoid exposure of any part of your body to the CO2 laser beam.
When testing the beam output, any personnel other than the
maintenance personnel should be out of the working environment.
In designing a material processing machine utilizing FANUC LASER
C series, be sure that the CO2 laser beam goes from laser to the
workpiece only through the enclosed beam delivery system. This
prevents the exposure to laser beam by the operator switch could
otherwise take place. It is absolutely necessary to include the
instructions given here in the manuals of the laser material–processing
machine as a whole, which are to be read.
3) Position of laser beam emission
Fig. 2.1 (a) is the position of laser beam delivery in C1500B,
C2000B, C2000C.
Fig. 2.1 (b) is the position of laser beam delivery in C3000C,
C3000D.
Fig. 2.1 (c) is the position of laser beam delivery in C4000A.
Fig. 2.1 (d) is the position of laser beam delivery in C6000B.
Fig. 2.1 (e) is the position of panel that laser beam exposure is
occurred without panel in C1500B, C2000B, C2000C,
C3000C, C3000D, when your maintenance.
6
Fig. 2.1 (f) is the position of panel that laser beam exposure is
occurred without panel in C4000A, when your
maintenance.
Fig. 2.1 (g) is the position of panel that laser beam exposure is
occurred without panel in C6000B, when your
maintenance.
Fig. 2.1 (a) The position of laser beam delivery (C1500B, C2000B, C2000C)
Fig. 2.1 (b) The position of laser beam delivery (C3000C, C3000D)
7
Fig. 2.1 (c) The position of laser beam delivery (C4000A)
Fig. 2.1 (d) The position of laser beam delivery (C6000B)
8
Fig. 2.1 (e) Laser beam exposure position without panel as operating
(C1500B, C2000B, C2000C, C3000C, C3000D)
Fig. 2.1 (f) Laser beam exposure position without panel as operating (C4000A)
9
Fig. 2.1 (g) Laser beam exposure position without panel as operating (C6000B)
10

There is RF voltage of 3 to 4kVo–p in the cabinet of the laser oscillator.
HIGH VOLTAGE There is 200 VAC power in the relay panel, be careful not to touch the
high voltage.
When it checks the oscillator and exchange the unit, intercept a main
breaker of the oscillator and the power supply. Lock the breaker to
prevent misconnection and display the sign while working.
Install safety cover after unit replacement or cable connection. Unless
safety cover is installed, never perform operation.
Follow standard industrial safety practices for working with high
voltage.
EXAMPLES
D Do not work on the laser oscillator if you are tired or have taken
medicine.
D Use the buddy system.
D Do not wear anything metal, like a ring, bracelet, watch, belt
buckle, earrings, or keys.
D They might contact high voltage.
D Never stand on a wet surface.
D Do not touch electrical components in the cabinets with both hands
at once. Keep one hand in a pocket.
3) Position of high voltage
Fig. 2.2 (a) is the position of high voltage in C1500B (Front side,
Back side).
Fig. 2.2 (b) is the position of high voltage in C2000B (Front side,
Back side).
Fig. 2.2 (c) is the position of high voltage in C2000C (Front side,
Back side).
Fig. 2.2 (d) is the position of high voltage in C3000C (Front side,
Back side, AUX).
Fig. 2.2 (e) is the position of high voltage in C3000D (Front side,
Back side).
Fig. 2.2 (f) is the position of high voltage in C4000A (Front side,
Back side).
Fig. 2.2 (g) is the position of high voltage in C6000B (Front side,
Back side).
11
Front side
Back side
Fig. 2.2 (a) The position of high voltage in C1500B (Front side, Back side)
12
Front side
Back side
Fig. 2.2 (b) The position of high voltage in C2000B (Front side, Back side)
13
Front side
Back side
Fig. 2.2 (c) The position of high voltage in C2000C (Front side, Back side)
14
Front side
Back side
Auxiliary unit
Fig. 2.2 (d) The position of high voltage in C3000C (Front, Back, AUX)
15
Front side
Back side
Fig. 2.2 (e) The position of high voltage in C3000D (Front side, Back side)
16
Front side
Back side
Fig. 2.2 (f) The position of high voltage in C4000A (Front side, Back side)
17
Front side
Back side
Fig. 2.2 (g) The position of high voltage in C6000B (Front side, Back side)
18

CO2 beam is delivery from oscillator. Direct or scattered beam is
SAFETY exposed.
ENCLOSURE (AT 2) Safety recommendations
YOUR WORK Mount the safety enclosure made of acrylic resin which can absorb the
STATION) laser beam around the working environment.
Mount the interlock switch on the safety enclosure door which
extinguishes the laser beam output when the door is open. Never
perform operation without safety cover of laser machine.

When you work with the laser oscillator or machine, hot fragments or
FIRE slag can scatter from your workpiece. The CO2 beam or a reflection
of it could ignite flammable material.
The direct or scattered laser beam can ignite flammable materials such
as paper, cloth, and wood. Provide a beam absorber behind the
workpiece and around it during maintenance. The absorber can be
anodized aluminum, graphite or brick.
Put a shield between yourself and the workpiece when the CO2 beam
is on. Even diffuse reflections can harm eyes and skin and may ignite
flammable material.

Some materials such as certain plastics can emit toxic fume when they
TOXIC FUME burn under the laser beam.
Install the exhaust system to remove toxic fume from the work
environment.
Consult the manufacturer of the material you are processing to learn
if it creates any fumes when heated or burned.
19

When you touch a part of high temperature, your skin burn.
HIGH TEMPERATURE
The pipes of the gas circular system are very a high temperature. Do
not touch pipes, heat exchanger and turbo blower because it does not
do the burn. It is hot immediately after having stopped driving. After
getting cold enough in case of removing, dismount it.
3) Position of high temperature
Fig. 2.6 (a) is the position of high temperature in C1500B (Front side,
Back side).
Fig. 2.6 (b) is the position of high temperature in C2000B (Front side,
Back side).
Fig. 2.6 (c) is the position of high temperature in C2000C (Front side,
Back side).
Fig. 2.6 (d) is the position of high temperature in C3000C (Front side,
Back side, Aux).
Fig. 2.6 (e) is the position of high temperature in C3000D (Front side,
Back side).
Fig. 2.6 (f) is the position of high temperature in C4000A (Front side,
Back side).
Fig. 2.6 (g) is the position of high temperature in C6000B (Front side,
Back side).
20
Front side
Back side
Fig. 2.6 (a) The position of high temperature in C1500B (Front side, Back side)
21
Front side
Back side
Fig. 2.6 (b) The position of high temperature in C2000B (Front side, Back side)
22
Front side
Back side
Fig. 2.6 (c) The position of high temperature in C2000C (Front side, Back side)
23
Front side
Back side
Auxiliary unit
Fig. 2.6 (d) The position of high temperature in C3000C (Front , Back, Aux)
24
Front side
Back side
Fig. 2.6 (e) The position of high temperature in C3000D (Front side, Back side)
25
Front side
Back side
Fig. 2.6 (f) The position of high temperature in C4000A (Front side, Back side)
26
Front side
Back side
Fig. 2.6 (g) The position of high temperature in C6000B (Front side, Back side)
27
2.7 Fig. 2.7 (a)–(g) show the location of the warning labels indicating the high
voltage and laser beam path.
WARNING LABELS
Fig. 2.7 (a) is the location of the warning sticker at front side. (C1500B,
C2000B, C2000C, C3000C, C3000D)
Fig. 2.7 (b) is the location of the warning sticker at back side. (C1500B,
C2000B, C2000C, C3000C, C3000D)
Fig. 2.7 (c) is the location of the warning sticker (Auxiliary unit of
C3000C)
Fig. 2.7 (d) is the location of the warning sticker at front side. (C4000A)
Fig. 2.7 (e) is the location of the warning sticker at back side. (C4000A)
Fig. 2.7 (f) is the location of the warning sticker at front side. (C6000B)
Fig. 2.7 (g) is the location of the warning sticker at back side. (C6000B)
Fig. 2.7 (a) The location of warning sticker at front side (C1500B, C2000B, C2000C, C3000C, C3000D)
28
Fig. 2.7 (b) The location of warning sticker at back side (C1500B, C2000B, C2000C, C3000C, C3000D)
Fig. 2.7 (c) The location of the warning sticker (Auxiliary unit of C3000C)
29
Fig. 2.7 (d) The location of warning sticker at front side. (C4000A)
Fig. 2.7 (e) The location of warning sticker at back side. (C4000A)
30
Fig. 2.7 (f) The location of warning sticker at front side. (C6000B)
Fig. 2.7 (g) The location of the warning sticker at back side. (C6000B)
31
D Detail of warning sticker
Warning logotype
7000W
32
Warning logotype
Label for defeasible non–interlocked protective housing
Label for defeasible non–interlocked protective housing
33
Caution label for lifting
Aperture label
Label of non–interlocked protective panel
34
Identification label
80
110
110
150
150
190
300
Address label
High voltage warning label
35
Supply voltage label
Label of over–current protective
36
Label of motor and transformer (C1500B,C2000B,C2000C)
Label of motor and transformer (C3000C)
37
Label of motor and transformer (C3000D)
Label of motor and transformer (C4000A)
38
Label of motor and transformer (C6000B)
Label of warning light
Maintenance label
39
Certification label
Short–circuit interrupting capacity of main breaker
Caution label for lifting
40
2.8 All the laser products have to comply with the various kinds of laser safety
regulations, which include the use of key control. For instance, FDA
KEY CONTROL PART 1040 PERFORMANCE STANDARDS FOR
LIGHT–EMITTING PRODUCTS, Sec 1040. 10 (f), (4) states: “Each
laser system classified as a Class IIIb or IV laser product shall incorporate
a key–actuated master control. The key shall be removable and the laser
shall not be operable when the key is removed” and EN60825–1:1994, 4.5
Key control state “Any laser system belonging to one of the following
classes shall incorporate a key operation master control: Class 4 and Class
3B, except for Class 3B with not more than five times the AEL of Class
2 in the wavelength range from 400 nm to 700 nm. The key shall be
removable and the laser radiation shall not be accessible when the key is
removed.”
Because the laser package products offered by FANUC cannot produce

the laser beam as they are in the state of shipment, the system integrator
who incorporates FANUC products into the system, which generates the
laser beam, is obliged to incorporate the master key as defined by the
relevant regulation.
2.9 The shutter lock is prepared because it dose not put out the laser beam by
mistake. If you do not put out the beam, lock the shutter.
SHUTTER LOCK
Use the mechanical switch at shutter lock switch, not electrical
component (Relay)or switching circuit (Transistor, FET).
Use the one with the compulsion dissociation mechanism for the switch
used for the shutter lock circuit and the switch for welding prevention.
To designer of laser processing machine
1. Use a mechanical switch for the switch used to lock the

shutter. Do not use an electric switch (For instance,
transistor circuit, etc.). Moreover, use the one with the
contact dissociation mechanism to prevent welding for a
mechanical switch.
2. Put it in the series of the contact of the emergency stop
button in the shutter lock circuit. When the emergency stop
switch is pushed, it is necessary to intercept the power
supply to the shutter.
41
2.10 Press the emergency stop button when it is dangerous and breaks down.
The oscillator is stopped discharging, gas pressure control and stand by
EMERGENCY STOP purge state.
BUTTON
Use the one with the compulsion dissociation mechanism for the relay
used for the emergency stop circuit and the switch for welding prevention.
2.11 FANUC LASER C series are equipped with the warning light optionally.
The light is flashed during discharging and ready of laser beam emission.
WARNING LIGHT Be careful of laser beam and high voltage.
(OPTIONAL)
In EN60825–1, it needs the design with the fail safe or

redundant for warning equipment. The redundant warning
light is needed near the work–point of processing machine.
The warning light is prepared for the oscillator. Select this as
a warning light more than the second for the fail safe.
42
2.12 Inapposite use and the result are described in each explanation place.
Inapposite major use are described in the following.
INAPPOSITE USE OF
LASER OSCILLATOR (1) The gas with different composition and purity from the specification
is connected with the oscillator.
The oscillator does not work normally and do the protection
movement. In the worst case, the oscillator breaks down.
(2) The gas piping with different material and structure from the
specification is used.
A leakage of the laser gas and a defective composition are occurred.
In the worst case, the oscillator breaks down.
(3) The water piping of the material, which corrodes to water, is used.
Water is blocked by the generation of rust. If cooling water does not
flow in a regulated amount, the oscillator will not work normally.
(4) Cooling water is not regularly exchanged.
Water is blocked by the generation of rust. Moreover, it is easy for the
water fittings in the oscillator to corrode. In the worst case, the fittings
are damaged and the water leak happens.
(5) The oil of turbo blower and the exhaust pump is not regularly
exchanged.
Turbo blower is damaged and the oscillator does not work. The
exhaust pump is damaged similarly.
(6) The filter of the exhaust pump is not regularly exchanged.
The exhaust ability of the exhaust pump decreases. Moreover, white
smoke comes out from the pump exit and the oil leak happens. In the
worst case, the oscillator does not work.
(7) You will touch an unrelated place when usually maintaining.
In the oscillator there are adjustment place. The adjustment place is the
best value when shipping. When the adjustment shifts, the oscillator
will not work normally. It is necessary to adjust it by service man that
was trained.
(8) You open the panel immediately after the oscillator was stopped and
oil is exchanged.
(9) There is a place of the high temperature immediately after the
oscillator stopped. When you touches there, you will do the burn. After
getting cold of the oscillator, open the panel. Refer to safety in Chapter
2 for the place of the high temperature.
43
3. INSTALLATION B–70114EN/04
3 INSTALLATION
44
B–70114EN/04 3. INSTALLATION
3.1
CONDITION
3.1.1 (1) Ambient temperature

Environmental +5 to 30°C
Conditions (2) Temperature drift
Max 1.1°C/min
(3) Humidity
<75% (relative)
(4) Vibration
Acceleration <0.05G
Amplitude <5µm
(5) Atmosphere
Free from dust and volatile vapor
3.1.2 (1) Input power and maximum current

Power Source Model Power Maximum current
C1500B 23 KVA 80 A
C2000B, C2000C 33 KVA 110 A
C3000C, C3000D 44 KVA 150 A
C4000A 55 KVA 190 A
C6000B 90 KVA 300 A
(2) Voltage
200VAC+10%, –15%, 50/60Hz"1Hz, 3f
or 220VAC+10%, –15%, 60Hz"1Hz, 3f
(3) Earth–ground
S Ground (<10 ohm)
S Protective earth (PE)
3.1.3 For the laser gas, the following specifications are required.
Laser Gas (1) Composition and its accuracy
CO2: 5"0.25% Purity >99.99%
He: 40"2.00% >99.99%
N2; 55"2.75% (Balance) >99.99%
(2) Water vapor (H2O) <5ppm
(3) Hydrocarbon (CmHn) <1ppm
45
3.1.4 (1) Cooling water specification

Cooling Water The quality of cooling water is specified in the table below. If tap water
is used, it should be treated in an ion exchanger.
Refrigerator/air–conditioner cooling water quality standard
(JRA–9001–1980)
pH (25°C) 6.0 to 8.0
Conductivity (25°C)(m s/cm) 200 or less
Chlorine ion Cl* (ppm) 20 or less
Standard item Sulfate ion SO42* (ppm) 50 or less
M alkalinity CaCO3 (ppm) 50 or less
Total hardness CaCO3 (ppm) 50 or less
Iron Fe (ppm) 0.3 or less
Sulfur ion S2* (ppm) Not to be detected

Reference item
Ammonia ion NH4+ (ppm) 0.2 or less
Ionic silica SiO2 (ppm) 30 or less
(2) Anticorrosive
To avoid cooling water trouble and minimize the frequency of cooling
water exchange, the following anticorrosive should be added to the
cooling water. Consult the chiller manufacturer for use of the
anticorrosive.
Product name: CONTLIME K–6000
Manufacturer: MITSUBISHI GAS CHEMICAL. ISC
Use: Refer to the description indicated on the product.
Replace the cooling water every year, even if an anticorrosive has been
added to it.
(3) Cleaning agent
The following cleaning agent should be used. Consult the chiller
manufacturer for use of the cleaning agent.
Product name: DESLIME
Manufacturer: MITSUBISHI GAS CHEMICAL ISC
(4) Antifreezing solution
If the chiller is used in a cold district, it should be provided with an
antifreezing function. When it is extremely cold, the chiller should be
kept running. If it is necessary to use an antifreezing solution for lack
of an alternative, the following antifreezing solution should be used.
Its concentration should be 30% (usually) or 40% (in an extremely
cold district). Use of an antifreezing solution should be restricted
within four months in winter. Do not use antifreezing solution
together with an anticorrosive. The following antifreezing solution is
already added with an anticorrosive.
Product name: AURORA BRINE
Manufacturer: TOKYO FINE CHEMICAL Co.
46
Caution In winter or in a cold district, when the oscillator is at a rest and

the ambient temperature gets to or below the freezing point,
the cooling water in the oscillator freezes, possibly breaking
the water pipe or damaging the chilling unit. When the
oscillator is not in use, drain cooling water from it. To drain
water, keep blowing compressed air at 5 kgf/cm2 or less into
the oscillator through the cooling water inlet for 15 minutes.
47
3.2
TRANSPORTATION
3.2.1 In lifting the FANUC LASER C series, be sure to use the four eyebolts
Lifting Laser Oscillator screwed into the top surface of the cabinet as shown in the figure. Never
lift using only the two bolts. The weight is shown following tables. The
permissible impact value of the oscillator is 2G. When the impact which
exceeds the permissible impact value is given, the resonator will warp and
the shape of the beam mode worsens.
Fig. 3.2.1 Method of lifiting
48
3.2.2 1) Clamp
Packing When shipped from FANUC, the two components of the laser listed
below are in the clamped position. Because this is for shipment only,
remove the clamp during the installation. Be sure to use the clamp,
when the machine is shipped again. (1) Optical resonator (2)
Mechanical shutter.
Fig.3.2.2(a)–(d) are clamp layout.
Fig. 3.2.2 (a) Clamp layout (C1500B, C2000B, C2000C, C3000C, C3000D)
49
Fig. 3.2.2 (b) Clamp layout (C4000A)
50
Fig. 3.2.2 (c) Clamp layout (C6000B)
51
Fig. 3.2.2 (d) Clamp layout (C6000B)
CAUTION
If the machine is not clamped during transportation, the
optical resonator may cause distortion or may be damaged.
52
2) Water
Be sure to drain water in the oscillator at shipment.
Refer to the maintenance manual for draining.
CAUTION
If water remains in the oscillator, internal water pipes may
be damaged in cold climates.
3.2.3 (1) Temperature

–20 to 50°C
Environmental
Condition
CAUTION
Must be completed to drain in the oscillator. If water remain
in the oscillator, water freeze during the transportation at
cold district. Therefore oscillator is damaged.
(2) Humidity <75% (relative)

(3) Vibration
Acceleration < 0.05G
Amplitude < 5µm
(4) Atmosphere
Free from the dust and the volatile vapor
3.3 The various kinds of clamps should be used only during the
transportation. Especially the clamps used for resonator should be
STORAGE loosened during the storage. Storing the resonator as fixed with the
clamps for a long time will cause its distortion. The clamps are provided
for cavity, shutter unit.
Do not keep the oscillator in the place of the high temperature humidity.
Otherwise, it generates rust in the resonator.
3.3.1 (1) Temperature

Environmental –20 to 50°C
Condition
CAUTION
Must be completed to drain in the oscillator. If water remain
in the oscillator, water freeze during the transportation at
cold district. Therefore oscillator is damaged.
(2) Humidity < 75% (relative)

(3) Vibration
Acceleration <0.05G
Amplitude <5µm
(4) Atmosphere
Free from the dust and the volatile vapor
(5) Location
Plain, no slope
53
3.4 In FANUC LASER C series, the two type of that is the four taps and hole
are prepared in the base as shown in the figure for fixing the laser cabinet
BASE OF against the machine base.
OSCILLATOR
Fig. 3.4 (a) Mounting (A)
Fig. 3.4 (b) Mounting (B)
54
Fig. 3.4 (c) Cabinet base (C1500B, C2000B, C2000C, C3000C, C3000D, C4000A)
Fig. 3.4 (d) Cabinet base (C6000B)
55
3.5 The maintenance areas of FANUC LASER C series are shown in the
figures below. The customer is requested to prepare adequate space
MAINTENANCE AREA around the laser even for the sides, which are not requested in the figures.
Fig. 3.5 (a) Maintenace area (C1500B: Short type)
56
Fig. 3.5 (b) Maintenace area (C1500B: Long type)
57
Fig. 3.5 (c) Maintenace area (C2000B, C3000C, C3000D: Short type)
58
Fig. 3.5 (d) Maintenace area (C2000B, C3000C, C3000D: Long type)
59
Fig. 3.5 (e) Maintenance area (Auxiliary unit)
60
Fig. 3.5 (f) Maintenace area (C2000C: Short type)
61
Fig. 3.5 (g) Maintenace area (C2000C: Long type)
62
Fig. 3.5 (h) Maintenace area (C4000A: Short type)
63
Fig. 3.5 (i) Maintenace area (C4000A: Long type)
64
Fig. 3.5 (j) Maintenace area (C6000B)
65
3.6
WATER CONNECTION
3.6.1 Make the cooling water re–circulate in the closed loop using a chiller unit.
Chiller The cooling requirements of the chiller are as below.
(1) Chiller capacity
Type Capacity
C1500B >15.7kW
C2000B, C2000C >22kW
C3000C, C3000D >33.7kW
C4000A >44.2kW
C6000B >67.5kW
(2) Temperature control range 20 to 30°C

(3) Temperature accuracy "1°C
(4) Water pressure 5.0 bar or less
(5) Heat exhaust Water cooling or air cooling
(6) Attachment
f Water filter
f Water valve
f Flow switch
f Interface to externally switch of chiller
f Contact interface to send signal of normal operation of
chiller(CLRDY).
Note
Output the signal of “contact on” when everything is normal
with cooling water flow rate, temperature, water level,
overheat switch of chiller, high and low pressure switch,
over–current relay, etc.
3.6.2 Throughout the year, set the chiller water temperature to 27°C in general
Cooling Water regions and 30°C in humid regions.
Temperature
66
3.6.3 The flow rate should be chosen so that the temperature difference between
Cooling Water Flow the inlet and outlet of the chiller becomes less than 3°C. The customer can
refer to the following table.
Rate
Type Flow rate
C1500B 50 liter/min
C2000B, C2000C 75 liter/min
C3000C, C3000D 120 liter/min
C4000A 160 liter/min
C6000B 250 liter/min
3.6.4 The cooling water from chiller is temperature–regulated.

Plumbing D Choose the tubing material which can withstand corrosion, which will
choke the water flow.
D Make the hose length between the laser and chiller as short as possible.
Along hose makes the pressure 1oss high and becomes a burden to the
chiller pump.
D Place a strainer at the water inlet of laser. It will prevent the f1owing
in of the dust into the laser.
D Place flow meters both at the inlet and outlet of the laser. Daily
checking of the water f1ow contributes to the prevention of abrupt stop
of laser operation.
The water fittings of the inlet and outlet of lasers are shown below.
67
Fig. 3.6.4 (a) Water connection and gas connection (C1500B, C2000B)
68
Fig. 3.6.4 (b) Water connection and gas connection (C2000C)
69
Fig. 3.6.4 (c) Water connection and gas connection (C3000C)
70
Fig. 3.6.4 (d) Water connection and gas connection (C3000C)
71
Fig. 3.6.4 (e) Water connection and gas connection (C3000D)
72
Fig. 3.6.4 (f) Water connection and gas connection (C4000A)
73
Fig. 3.6.4 (g) Water connection and gas connection (C6000B)
74
3.7
LASER GAS
3.7.1 Use the gas bottle of the volume of 7m3. Store the necessary number of
Gas Bottle bottles according to the operation of the laser.
3.7.2 Drawing of last chapter 1 shown laser gas connection of inlet and outlet.
Laser Gas Tubing Inlet and outlet fittings on laser are female PT 3/8”.
(1) Gas inlet of oscillator
D Use the tube designated. (FANUC recommends the use of AS1
tube manufactured by Jyunkosha.)
Do not use a tube possessing high permeability to He. (In the worst
case, the laser will be damaged by improper gas composition.)
D Use the gas of the correct composition.
(2) Gas outlet of oscillator
The oil mist and the dissociated gas come out from the exit of the gas.
Tie the piping of 3/8 inches or more to the gas exit and put it out to
outdoor. It will load the exhaust pump when thin piping or extremely
1ong and the exhaust ability decreases occasionally.
3.7.3 Observe the following cautions for piping between the laser gas cylinder
Gas Pipe and laser oscillator.
D Use nylon tube having an inside diameter of 8 mm or larger (Junlon
AS1 manufactured by Junkousha, or equivalent). Do not use a rubber
or urethane tube.
D Use a swage–lock vacuum joint (Fujikin’s product or equivalent). Do
not use a one–touch coupler, quick coupler, or hose–band joint.
D Minimize the length of tubing. It should be kept within 5 m. Never
exceed 15 m. For a length of 15 m or greater, use stainless pipe.
D If it is necessary to use metal pipe for lack of an alternative, use
stainless bright annealed pipe. Minimize the number of joints used.
Connect pipes, if necessary, using a swage–lock vacuum joint or by
TIG welding. Do NOT use silver soldering or copper piping. Piping
should be installed by a vacuum piping specialist. Do not extend metal
piping over 30 m.
D Always keep the piping materials clean. Do not allow foreign matter
to get in the pipe.
D Use a pressure reducer that is free from gas leakage.
D After installing the pipe, check it for gas leakage, using a liquid leak
checker (Gyupoflex: A98L–0001–0856, detecting bubbles caused by
leaking gas) or a clamp test1).
Note
1. Open the valve of the gas cylinder to pressurize the inside
of the pipe, then close the valve. Check to see if the
pressure in the pipe becomes low with time. Monitor the
primary pressure of the gas reducer for over 8 hours. If the
gas pressure becomes lower by 10% within 8 hours, gas is
likely to be leaking. Take an appropriate measure.
75
3.8 Here explanation are given for the convenience of designing machines.
LASER BEAM
3.8.1 The following figures and attached tables show the positions and
Position and Tolerance tolerances of beam.
of Laser Beam Exit
Fig. 3.8.1 (a) Beam exit (C1500B, C2000B, C2000C, C3000C,

C3000D, C4000A)
Fig. 3.8.1 (b) Beam exit (C6000B)
76
Fig. Position of laser beam exit

Model W1 W2 W3 H
C1500B, C2000B, C2000C

310"5 65 375 876"5
Short path length type
C1500B, C2000B, C2000C

390"5 65 455 876"5
Long path length type
C3000C, C3000D, C4000A

310"5 65 375 811"5
Short path length type
C3000C, C3000D, C4000A

420"5 65 485 921"5
Long path length type
C6000B 435"5 70 505 1375"5
3.8.2 The beam divergence for FANUC LASER C series is less than 2 mrad.
Beam Divergence
3.8.3 The tolerance of beam direction is "0.3 degrees. The customer is

requested to prepare adjusting mechanism on the machine side to
Tolerance of Beam
compensate for the beam direction error.
Direction
3.8.4 The laser had better be isolated mechanically from the machine for
preventing the coupling between them. The vibration might enter the
Beam Guide
opponent from each side. It is, however, absolutely necessary to provide
the beam guide between them so that the operator is protected from the
exposure to the laser beam all the time. The structure of the beam guide
must permit the mechanical de–coupling required as shown in the figure.
77
3.9 The following cables should be connected to the laser. Refer to the
Connecting Manual of the controller (CNC).
ELECTRIC Cable connection point and clamp of cable refer to Fig. 3.9 (a) to (h). All
CONNECTION cable must be used the cable inlet.
Fig. 3.9 (a) Cable connection (C1500B)
Fig. 3.9 (b) Cable connection (C2000B)
78
Fig. 3.9 (c) Cable connection (C2000C)
Fig. 3.9 (d) Cable connection (C3000C)
79
Fig. 3.9 (e) Cable connection (C3000C)
Fig. 3.9 (f) Cable connection (C3000D)
80
Fig. 3.9 (g) Cable connection (C4000A)
Fig. 3.9 (h) Cable connection (C6000B)
81
3.9.1 Use the cable with 4 cores. (C1500B, C2000B, C2000C, C3000C,
Power Cable C3000D, C4000A)
Conductor cross section must be more than 22mm2 (C1500B), 35mm2
(L1, L2, L3) (C2000B, C2000C, C3000C, C3000D, C4000A).
Outer diameter of cable must be between f 22mm to f 32mm (C1500B),
f 28mm to f 38mm (C2000B, C2000C, C3000C, C3000D, C4000A).
Use the 4 cable (C6000B)
Conductor cross section of one cable must be more than 100 mm2.
3.9.2 The one of earth cable should be connected to the Cu plate upon which
Ground Cable the laser power supply units are mounted. (Earth [<10 ohm], Protective
earth). The other of earth cable is protective earth and should be connected
to the laser at left upper of input unit. This point is marked “PE”.
3.9.3 D For 16–L, 16–iL (one cable)

I/O Signal Cable Optical fiber cable should be connected to COPIB of IF PCB.
(Connect Jumper pins SP5 and SP6 of IF to the 2–3 side.)
D For 0–L (two cables)
Metal cables should be connected to CN1 and CN2 of IF PCB.
3.9.4 D For 16–L, 16i–L

Other Signal Cables to 1) Emergency stop signal input (ESP1, ESP2)
the IF PCB This terminal is shorted usually.
2) OFF prohibition signal (OFI1,OFI2) – (EOF, COM) CNC side
A contact
Closing the contact to inhibit the OFF switch operation.
Connection parallel with the OFF switch. Contact capacity
250VAC, 3A or 30 VDC, 5A.
3) Laser power unit ON/OFF signal (ON, OFF) – (EXR, EXS) CNC
side
When a door interlock is used. Connect 200VAC whose ON/OFF
is controlled by CNC Capacity 200VAC, 10mA
4) Door interlock contact signal (DIL1, DIL2)
B contact (AC200V applied to laser and CNC is shut in OPEN
state.)
When the door of the oscillator is open, the contact opens. When
the contact are open, the ON – OFF signal of 200 VAC, 3A or 30
VDC, 5A.
82
Fig. 3.9.4 (a) Detail of IF PCB 16–L
Fig. 3.9.4 (b) Detail of 16i–L
83
D For 0–L
1) Fuse alarm signal (FAL1, FAL2)
The warning signals contact of the thermal switch and circuit
protector. When the contact is closed, turn off either the CNC
power supply or the laser power supply ON/OFF signal. Contact
capacity 220 VAC, 6A or 24VDC, 10A.
2) OFF prohibition signal (OFS1, OFS2)
Closing the contact to inhibit the OFF switch operation. Connect
in parallel with the OFF switch. Contact capacity 250VAC, 3A or
30 VDC, 5A.
3) Laser power unit ON/OFF signal (ON, OFF)
When the door interlock is used.
Connect 200VAC whose ON/OFF is controlled by CNC
Capacity 200 VAC, 10mA
4) Door interlock contact signal (ND11, ND12)
B contact (AC200V applied to laser and CNC is shut in OPEN
state.)
Use the key switch with the compulsion dissociation mechanism
for the key switch used for welding prevention. When the door of
the oscillator is open, the contact opens. When the contact is open,
the ON–OFF signal of 200 VAC, 3A or 30 VDC, 5A.
Fig. 3.9.4 (c) Detail of IF PCB 0–L
84
3.9.5 The diagram of safety interlock circuit is shown in Fig. (a) to (g). Terminal
XT20 Terminal layout is shown in Fig. (h).
Fig. 3.9.5 (a) Safety interlock circuit (C1500B)
85
Fig. 3.9.5 (b) Safety interlock circuit (C2000B)
86
Fig. 3.9.5 (c) Safety interlock circuit (C2000C)
87
Fig. 3.9.5 (d) Safety interlock circuit (C3000C)
88
Fig. 3.9.5 (e) Safety interlock circuit (C3000D)
89
Fig. 3.9.5 (f) Safety interlock circuit (C4000A)
90
Fig. 3.9.5 (g) Safety interlock circuit (C6000B)
91
Fig. 3.9.5 (h) Detail of terminal XT20
1) PF1, PF2: These are the voltage release terminals of a main

breaker (QF1). Impress the voltage of 24VDC.
PF1: +24V
PF2: 0V
2) SHL1, SHL2: When these terminals short, the shutter can be
opened. It short of these terminals when shipping.
3) IB1, IB2: When these terminals short, diode laser will turn
on.
4) RUN1, RUN2: Connect the RUN key of the operator’s panel with
the series to these terminals. When the emergency
stop switch is pushed, the oscillator will stop the
discharge and the pressure control.
5) EMS1, EMS2: Input of emergency stop signal of operator’s panel.
6) A1, A2: Power supply for SAFETY BOX from machine
side.
A1: +24V, A2: 0V, 240 mA MAX.
7) SC: Shutter close state signal
Connected load capacity: 24 VDC 3 to 100 mA
Use the Emergency Stop Terminal (EMS1, EMS2) of XT20, in

case of stopping the laser oscillator to the interlock switch of
machine side.
92
3.9.6 Cable shield

EMC Countermeasure Install the appended Cable Shield (A04B–0811–D021) in power cable.
Fig. 3.9.6 Cable shield
Main power cable (AC220/200V 3f) is wrapped with CABLE SHIELD

and the earth cable of CABLE SHIELD is grounded.
In that case, there is no space between CODE GRIP and CABLE
SHIELD.
93
4. FUNCTIONS B–70114EN/04
4 FUNCTIONS
This chapter describes the internal structure, components, and operating

sequence of the laser oscillator.
4.1 INTERNAL STRUCTURE . . . . . . . . . . . . . . . . . . . . . 95

4.2 COMPONENT DETAILS . . . . . . . . . . . . . . . . . . . . . 103
4.3 OPERATION SEQUENCE . . . . . . . . . . . . . . . . . . . . . 115
4.4 LASER PROCESSING MACHINE SYSTEM . . . . . . 117
94
B–70114EN/04 4. FUNCTIONS
4.1 Fig. 4.1.1 (a) to (g) show the internal structure of the laser oscillator.
INTERNAL
STRUCTURE
4.1.1 The FANUC LASER C series consists of a laser resonator, laser excitation
power supply, forced gas circulating system, pressure controller, exhaust
Outline
controller, CNC interface, and a protective housing.
Laser resonator The laser resonator consists of several discharge tubes, connected in series
using folding mirrors, with a rear mirror and output mirror placed at the
open ends of the discharge tubes, thus sealing the tubes. The resonator
is fitted with a gas pipe connecting port through which laser gas is fed into
the discharge tubes.
A discharge from the electrodes of the discharge tube energizes CO2
molecules, which emit light. This light is amplified by stimulated
emission, repeated between the rear mirror and output mirror, a laser beam
being emitted from the output mirror.
Laser excitation power This is a 2–MHz high–frequency power supply, the output of which is
supply controlled by the CNC. This power supply is used to create a discharge
in the laser gas flowing through the discharge tubes, thus energizing CO2
molecules.
Forced gas circulating A gas circulating system is configured by connecting the resonator and
system turbo blower with a circulating pipe. Laser gas is forced through the
discharge tubes at a speed of 200 m/s or higher.
A water–cooled heat exchanger, used to cool the high–temperature gas
from the discharge tubes, is provided at the inlet side of the turbo blower.
At the outlet side of the turbo blower, another water–cooled heat
exchanger dissipates the compression heat.
Pressure controller The laser gas pressure within the forced gas circulating system is
controlled by commands issued from the CNC, thus ensuring stable laser
output.
Exhaust controller The laser gas flow is controlled by commands issued from the CNC.
CNC interface Interface used to connect a FANUC Series 0–L or 16–L. 16i–L CNC
commands that, control the operation of the laser oscillator, such as
start/stop and laser output, are input via this interface.
Protective housing An enclosure that houses the above components. The housing, consisting
of metal panels and doors, completely encloses the laser oscillator, thus
protecting the operator from exposure to laser radiation and from high
voltages. All panels are screw–fixed and cannot be removed without an
appropriate tool. The doors are also designed to prevent an accident from
occurring as a result of careless operation. The doors can be opened only
when the main circuit breaker is open. A door interlock function is also
supported.
95
Fig. 4.1.1 (a) Block diagram (C1500B)
96
Fig. 4.1.1 (b) Block diagram (C2000B)
97
Fig. 4.1.1 (c) Block diagram (C2000C)
98
Fig. 4.1.1 (d) Block diagram (C3000C)
99
Fig. 4.1.1 (e) Block diagram (C3000D)
100
Fig. 4.1.1 (f) Block diagram (C4000A)
101
Fig. 4.1.1 (g) Block diagram (C6000B)
102
4.2 The following describes the details of each component of the FANUC
LASER C series. Fig. 4.2 (a) to (l) show the internal structure.
COMPONENT
DETAILS (1) Resonator
The resonator consists of an output mirror, rear mirror, folding
mirrors, discharge tubes, power sensor unit, etc. It converts electrical
energy first to laser gas, then to optical energy (10.6–mm
single–wavelength laser beam).
(2) Output mirror
A transmitting/reflecting mirror which outputs the laser beam after
it has been amplified. The output mirror consists of a ZnSe (zinc
selenide) substrate, coated with dielectric. ZnSe is tightly toxic. Be
particularly careful, therefore, when handling the output mirror.
(3) Rear mirror
A reflecting mirror consisting of a Ge (germanium) substrate, coated
with dielectric. Having a high reflectance of 99.5%, the rear mirror
is used to reflect the laser beam within the resonator while
transmitting 0.5% of the laser light so that the beam can be monitored
externally.
(4) Folding mirror
The folding mirror, consisting of a 45° block and a gold–coated Si
(silicon) substrate, is used to divert the laser beam through 90°. It
also linearly polarizes the laser beam.
(5) Discharge tube
A pair of Ag (silver) electrodes are metallized on the surface of a
hollow quartz glass pipe. A high–frequency discharge between these
electrodes injects electrical energy into the laser gas. Each electrode
is coated with ceramic, preventing it from degrading and thus
improving system reliability.
(6) Power sensor
An optical sensor which detects the intensity of the laser beam,
transmitted through the rear mirror, thus enabling monitoring of the
laser output level.
(7) Gas circulating system
A gas circulating path including a turbo blower, heat exchangers, and
circulating pipes, which supplies and exhausts laser gas to and from
the discharge tubes at high speed.
(8) Turbo blower
During laser oscillation, the laser gas pressure is 100 to 700 (1330 to
9310 Pa) when DGN. The turbo blower circulates this
rough–vacuum gas at high speed (up to 200 m/s within the discharge
tubes) without contaminating the gas.
(9) Heat exchanger (inlet)
Heat exchanger used to cool the laser gas that has been heated by
discharge, before it is drawn into the turbo blower.
(10) Heat exchanger (outlet)
Heat exchanger used to cool the laser gas that has been heated by
compression in the turbo blower, before being forced into the
discharge tubes.
103
(11) Pressure controller

This unit constantly monitors the gas pressure in the discharge tubes
and supplies fresh laser gas to the gas circulating system, thus
maintaining a constant pressure in the discharge tubes. This unit also
monitors the laser gas supply state and the purging state in the gas
circulating system.
(12) Exhaust pump unit
This unit is used to vacuum–exhaust laser gas from the gas
circulating system such that its pressure falls to that used for laser
oscillation. Also, within this unit, a small amount of circulating gas
is constantly being exchanged, to prevent degradation of the
circulating gas.
(13) Exhaust controller
The exhaust controller controls the flow rate of the laser gas
exhausted by the exhaust pump unit. It adjusts the gas flow rate from
that used for gas exchange to that used for pressure control. In the
event of a power failure, the exhaust controller immediately returns
the exhaust pump unit to atmospheric pressure, thus protecting the
pump.
(14) Exhaust system filter
The exhaust system filter is used to remove oil mist from the exhaust
pump to prevent contamination of the gas circulating system and
optical parts. The C1500B, C2000B, C2000C, C3000C, C3000D,
and C4000A do not have this filter.
(15) Hour meter
The hour meter indicates the total number of hours that the laser
oscillator has operated (how many hours the exhaust pump has
operated), to indicate whether maintenance or inspection is
necessary.
(16) Shutter section
The shutter section consists of a shutter, beam absorber, shutter
cooling fan, etc., and is used to prevent output of the laser beam
during laser oscillation. While the shutter is closed, the laser beam
is reflected by the shutter then absorbed by the beam absorber. For
safety, the shutter is fitted with a photoelectric limit switch which
allows the system to monitor whether the shutter is open or closed.
(17) Shutter
The shutter consists of a gold–coated reflecting mirror, mounted on
the rotating arm of a rotary solenoid. The shutter can be opened and
closed instantaneously by issuing a CNC command. For safety, the
shutter is equipped with a temperature sensor which allows the
system to monitor the temperature of the shutter.
(18) Beam absorber
While the laser oscillator is operating with the shutter closed, the
laser beam is guided into the beam absorber. The beam absorber
absorbs nearly 100% of laser beam and is water–cooled, allowing it
to safely absorb the beam for relatively long periods. For safety, the
beam absorber is equipped with a temperature sensor which allows
the system to monitor the temperature of the beam absorber.
104
(19) Water distribution unit

This unit distributes cooling water, supplied from either a chiller unit
or a temperature–regulated external water supply, to each unit in the
laser oscillator. For safety, the water distribution unit is equipped
with a flow sensor which allows the system to monitor the flow rate
of the
(20) Laser power supply unit
This unit rectifies and smooths the 3–phase 200/220–V AC input,
then supplies DC power to the RF inverter by controlling the PWM
DC–DC converter, as directed by commands received from the CNC.
The RF inverter converts DC power to 3 to 4 kVPO–P high–frequency
(2 MHz) power, then outputs it to the matching box.
(21) Matching box
The matching box contains a matching circuit, consisting of coils and
capacitors, which ensures that power is effectively input to the
discharge tubes. The matching box is connected to the laser power
supply unit via either a high–voltage cable or coaxial cable.
(22) Beam folding unit
This unit reverses the direction of the laser beam in the oscillator.
Two zero–shift mirrors are used to ensure that the polarization of the
light remains constant. The C3000C employs a circular polarization
mirror as upper one, such that a circularly polarized beam is
produced.
(23) Intermediate PCB A
This PCB transmits signals output by the pressure control unit, such
as those from the pressure sensor, pressure control valve, and
pressure switch, to the interface PCB.
(24) Intermediate PCB B
This PCB transmits signals output by the shutter section, such as
those from the limit switch, absorber temperature sensor, power
sensor, and condensation sensor, to the interface PCB.
(25) Input unit
The input unit consists of an interface PCB, stabilized power supply,
and power magnetics cabinet. It transfers signals between the laser
oscillator and CNC, and supply power to each unit.
(26) Interface PCB
FS0–L: Transfer analog, digital input (DI), and digital output
(DO) signals to and from the CNC (parallel interface).
FS16–L/ : Transfers signals to and from the CNC via the FANUC
FS16i–L I/O LINK (serial interface). Because this is a serial
interface, optical fiber cable can be used to enable
long–distance transmission.
(27) Stabilized power supply
This unit converts the 200/220 VAC power source to DC power for
the interface PCB and other units.
(28) Power magnetics cabinet
The power magnetics cabinet distributes power, supplied from an
external unit, to each unit in the laser oscillator. It also protects each
unit from overcurrents.
105
(29) Control PCB

This PCB sends the contractor open/close signal to the power
magnetics cabinet, as directed by commands received from the CNC.
It also notifies the CNC of the open/close status of the circuit breaker
in the power magnetics cabinet.
(30) Condensation sensor unit
For the C1500B, C2000B, or C3000C, the condensation sensor unit
is mounted at the water port inlet; for the C2000C, C3000D,
C4000A, or C6000B, the unit is mounted on the output mirror holder.
If the sensor detects that the amount of condensation has exceeded
the maximum allowable level, an alarm (abnormal water
temperature) is issued and laser output is stopped, thus preventing a
fault from occurring.
(31) High–frequency inverter
This inverter drives the turbo blower. It is responsible for
acceleration/deceleration control during start and stop of the blower.
(32) Light source for superimposing visible beam (semiconductor laser
unit)
A CO2 laser beam is invisible to the naked eyes. The semiconductor
light source, therefore, is provided to enable checking of the laser
beam optical axis by superimposing a visible semiconductor laser
beam on the same optical axis. The operation of this light source is
linked to the mechanical shutter. The semiconductor laser beam is
output only while the shutter is closed. Using this beam, the optical
axis of the external optical system can be adjusted roughly and a
reference position for the machining point determined.
(33) Turbo PCB
This PCB relays signals between the turbo blower and
high–frequency inverter, interface PCB.
(34) Trigger electrode
With preparatory discharge outside the laser oscillation area, main
discharge can be started easily, and the laser output becomes
completely zero at beam–off time.
A trigger electrode is installed in the C1500B, C2000C, C3000D,
and C4000A.
106
Fig. 4.2 (a) C1500B internal structure (front)
Fig. 4.2 (b) C1500B internal structure (rear)
107
Fig. 4.2 (c) C2000B internal structure (front)
Fig. 4.2 (d) C2000B internal structure (rear)
108
Fig. 4.2 (e) C2000C internal structure (front)
Fig. 4.2 (f) C2000C internal structure (rear)
109
Fig. 4.2 (g) C3000C internal structure (front)
Fig. 4.2 (h) C3000C internal structure (rear)
110
Fig. 4.2 (i) Auxiliary unit internal structure (C3000C)
111
Fig. 4.2 (j) C3000D internal structure (front)
Fig. 4.2 (k) C3000D internal structure (rear)
112
Fig. 4.2 (l) C4000A internal structure (front)
Fig. 4.2 (m) C4000A internal structure (rear)
113
Fig. 4.2 (n) C6000B internal structure (front)
Fig. 4.2 (o) C6000B internal structure (rear)
114
B–70114EN/04 4. FUNCTION
4.3 FANUC LASER C series are controlled by CNC. When you turn on the
start key (run key), start sequence and calibrate laser power automatically.
OPERATION You make program of material processing only. When you turn off the
SEQUENCE start key, stop sequence and oscillator stops automatically. It is not
necessary for you that daily calibration or periodic calibration. Following
shows outline of laser sequences.
(1) Outline of laser oscillation sequences
SEQ 0
PURGE = 0
LRDY = 0
PTLP = 0
LSTR = 0
CNC POWER ON CNC POWER OFF
SEQ 10
PURGE = 1
Initial
LRDY = 0
PTLP = 0
LSTR = 0 (WAIT=1)
(START KEY) (START KEY)

RUN ON RUN OFF
(WAIT=1)
SEQ 20
PURGE = 0 Ready of
LRDY = 1 discharging
PTLP = 0
LSTR = 0 (RFHV=0)
HV ON HV OFF
(RFHV=1) SEQ 30
PURGE = 0
LRDY = 0 Ready of
PTLP = 1 beam on operation
LSTR = 1
As is shown in the flow chart, the laser oscillation sequences can be

divided into four steps. Throughout this description the following
notation are used.
RUN Oscillator start switch
PURGE Purge in tube completion signal
LRDY Discharge preparation completion signal
PTLP Warning light signal
LSTR Oscillation preparation completion signal
[SEQ0] POWER OFF state
This is the state prior to power on where all the signals are in off state.
[SEQ10] INITIAL state
115
4. FUNCTION B–70114EN/04
After power is turned on, laser comes into PURGE=1 state. This signal
is on when atmospheric pressure sensor monitors that the intra–tube
pressure equals atmospheric pressure. Usually when this signal is on,
purge completion lamp on operational board is lit.
[SEQ20] READY OF DISCHARGING state
When oscillator start switch is turned on, evacuation is carried on and
then gas pressure control begins. When gas pressure reaches the set
value, laser comes into discharge preparation completion (LRDY)
state and it becomes possible to turn on HV.
[SEQ30] READY OF BEAM ON OPERATION state
When HV (high voltage command) is turned on, high voltage is
applied to discharge tube. Then with the command from CNC, base
discharge is established. Further intra–tube pressure control is
performed. When this is completed normally, laser comes into
oscillation preparation complete state.
(2) Display of laser sequence
For the FS 16–L and 16i–L, a number indicating a sequence status is
displayed on diagnosis screen DGN. 908.
RUN ON Sequence
No. Status of laser sequence
10 Purge complete (Oscillator stop)
16 Rough evacuating from turbo blower (Exhaust pump ON)
17 Arrival wait of PRM.15240[235]
18 Arrival wait of turbo blower rated rotation (Turbo blower ON)
20 LRDY
HV ON (High voltage ON)

26 HVON (Discharge at low pressure)
27 Discharge pressure increase
28 Calibrating of laser power
30 LSTR
RUN OFF Sequence

No. Status of laser sequence
30 LSTR
23 Switch over to gas pressure of LRDY from gas pressure of LSTR
20 LRDY
14 75 sec wait
49 Exhaust after turning off the RUN KEY
12 Purge wait
10 Purge complete
116
B–70114EN/04 4. FUNCTION
4.4 The material processing machine using FANUC LASER C series is

usually composed in the configuration shown in the figure. In the figure
LASER PROCESSING the rectangular parts of the solid line are FANUC products. In the below
MACHINE SYSTEM each component are explained.
(1) Laser oscillator
FANUC provides MODEL C1500B, C2000B, C2000C, C3000C,
C3000D, C4000A, C6000B.
(2) Beam bender
This is the laser beam guide connecting beam path between the
oscillator and the focussing unit.
Guide
Laser Beam Beam
Bender
(Laser
diode)
Laser gas FANUC

unit LASER Focussing
Assist gas unit unit
Chiller Laser
unit Oscillator Beam
AC200/220V
FANUC Machine
Series AC200/
0–L 220V
Magnetic
16–L, 16i–L
cabinet
Operator AC Servo
PMC Panel Motor
I/O device
CNC CRT/MDI
Fig. 4.4 System configurations
Note
Components encircled by solid lines are provided by
FANUC
(3) Focussing unit

This outgoing beam from the beam bender is focussed to a minute spot
using a focussing element of this unit. Usually this unit takes the form
integrated with a nozzle for assist gas injection.
117
4. FUNCTION B–70114EN/04
(4) Guide laser (Laser diode)

A diode laser is used for coarse–control of the optical system axis after
a light beam is output from the oscillator. This laser can also be used
to identify the point to be machined.
(5) Assist gas unit
In laser material processing the injection of assist gas is required onto
the cutting spot. It work to cause exothermic reaction, blow off molt
or cool the work.
(6) Laser gas unit
Pre–mixed laser gas consisting of CO2, N2, and He is introduced to the
laser oscillator from this unit.
(7) Chiller unit
This unit supplies cooling water to laser resonator, power unit, and
optics. As the cooling water temperature affects the stability of laser
output power, the chiller works to control the water temperature within
the required range.
(8) CNC
This CNC regulates FANUC LASER–MODEL C series and the work
table.
(9) PMC
The CNC for FANUC LASER C series requires the use of PMC
regulating the interface between CNC and machine.
(10) CRT/MDI
The CRT/MDI for FANUC LASER C series are either a 9 inches
monochrome CRT or 14 inches multicolor one.
(11) Magnetic cabinet, Operator’s panel
For operating laser oscillator as well as CNC, a magnetic cabinet and
an operator’s panel are required.
(12) AC servomotor
The customer can select among FANUC AC servomotors for their
use.
(13) I/O device
The CNC for FANUC LASER C series are provided with a
reader/puncher interface and can be connected with any among
FANUC I/O devices.
118
B–70114EN/04 5. MAINTENANCE
5 MAINTENANCE
In FANUC LASER C series, periodic inspection items have been

reduced, and adjustments have been made easy. To keep the oscillator in
a satisfactory operating condition over a long period, however, it is
necessary to carry out periodic maintenance (including daily
maintenance) described in this chapter. The oscillator is designed to
maintain the same performance and reliability as it has when it is installed,
provided that maintenance is carried out as prescribed.
5.1 DAILY INSPECTION . . . . . . . . . . . . . . . . . . . . . . . . 120

5.2 PERIODIC MAINTENANCE . . . . . . . . . . . . . . . . . . 121
5.3 DETAILS OF MAINTENANCE . . . . . . . . . . . . . . . . 123
5.3.1 Maintenance Panels and Oil Gauge Position . . . 123
5.3.2 Turbo Blower Oil . . . . . . . . . . . . . . . . . . . . . . . . 129
5.3.3 Exhaust Pump Oil . . . . . . . . . . . . . . . . . . . . . . . . 131
5.3.4 Exhaust Pump Filter . . . . . . . . . . . . . . . . . . . . . . 132
5.3.5 Exhaust System Filter . . . . . . . . . . . . . . . . . . . . . 133
5.4 AGING . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 135
5.4.1 Leak Check Method . . . . . . . . . . . . . . . . . . . . . . 135
5.4.2 Aging Method . . . . . . . . . . . . . . . . . . . . . . . . . . . 135
5.5 MAINTENANCE PARTS . . . . . . . . . . . . . . . . . . . . . 138
5.5.1 Spare Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 138
5.5.2 Maintenance Tools . . . . . . . . . . . . . . . . . . . . . . . 139
119
5. MAINTENANCE B–70114EN/04
5.1 Table 5.1 lists daily inspection items. Inspect the FANUC LASER C
series according to this table. When parts (including oil) have been used
DAILY INSPECTION for a prescribed period, replace them quickly.
Table 5.1 Daily inspection items for FANUC LASER C series
Item Period Content and instruction
1 Residual laser gas Daily Check to see if the primary pressure is 10 bar or less as mea-
sured at the regulator on the laser gas cylinder. If the primary
pressure is 10 bar or lower, replace the gas cylinder. See
Section 5.6 for the gas specifications.
2 Exhaust pump oil Weekly Make sure that the oil level is between L (minimum) and H
(maximum). Usually, oil is supplied until the oil level is in the
middle between L and H. If the oil level is below L, supply oil
according to Section 5.3.3. Be sure to replace the oil periodi-
cally, every 6 months of use or every 1500 hours of operation,
whichever is earlier.
3 Exhaust pump oil leak Weekly Make sure that no oil is leaking from the vane pump main
body, drain cock and their periphery. If oil is leaking, immedi-
ately replace the exhaust filter according to Section 5.3.4, be-
cause it is likely to have been clogged. Be sure to replace the
exhaust filter periodically, every one year of use or every 3000
hours of operation, whichever is earlier.
4 Turbo blower oil Weekly Make sure that the oil level is between L (minimum) and H
(maximum) according to Fig. 5.3.2. Usually , oil is suppled
until the oil level is at 3/4 above L. If the oil level is below L,
supply oil according to Section 5.3.2. Be sure to replace the
oil periodically, every 4 months of use or 1000 hours of opera-
tion, whichever is earlier.
5 Turbo blower oil leak Weekly Make sure that no oil is leaking from the turbo blower main
body, oil inlet, cock, and their periphery. If oil is leaking, locate
the leak. If oil leaks for any reason other than a cock being
open, call FANUC.
6 Laser output Weekly 1. Check to see if the laser output measured at the outlet of
the short optical path oscillator is 5% or more lower than
the specified output. If this is the case, clean or replace
the optical components in the external reflection unit.
2. If the laser output decreases within the oscillator, warning
message No. 4085 [685] is issued. If this message ap-
pears, clean or replace the mirror in the oscillator quickly.
7 Cooling water Daily Make sure that the chiller discharge output is 5 bar or less.
Weekly Check the quality of cooling water circulating in the chiller. If

the water is colored badly, replace it completely. Be sure to
replace the cooling water every two months. Adding an anti-
corrosive to cooling water can decrease the replacement fre-
quency. See Section 5.5 for descriptions about the anticorro-
sive.
120
5.2 Table 5.2 shows the periodic maintenance items and the periods. The
operation hour can be known from the indication of hour meter. When the
PERIODIC indicated periods are more than one, employ the one whichever comes
MAINTENANCE first.
Table 5.2 (a) Periodic maintenance items and periods
Interval of maintenance (Operation hour)
Item
C2000B C3000C
C1500B
C2000C C3000D
1 Output mirror cleaning

3000–4000h 1500–2000h 800–1200h
2 Rear mirror cleaning
3 Folding mirror cleaning 3000–4000h
4 0–shift mirror cleaning 1000h or processing quality go wrong
5 Output mirror change 4000h or inferior beam mode
6 Rear mirror change 4000h or inferior beam mode
7 Folding mirror change 4000h or inferior beam mode
8 0–shift mirror change 4000h or inferior beam mode
9 Exhaust pump oil change 1500h or low exhaust ability
10 Exhaust pump filter change 3000h or low exhaust ability
11 Exhaust pump overhaul 10000h or low exhaust ability
12 Turbo blower oil change 1500h or inferior turbo blower oil
13 Turbo blower overhaul 12000h or low turbo blower ability
14 Pressure control filter change 12000h or pressure alarm occurs
15 Discharge tube O–ring change 6000h or intra–cavity leakage occurs
16 Cooling water 1500h or inferior water quality
17 Water tubing cleaning 3000h or water flow is blocked
18 Beam absorber 15000h or over heat alarm occurs
19 Nylon tube 15000h
20 Cable 15000h
121
Table 5.2 (b) Periodic maintenance items and periods

Interval of maintenance (Operation hour)
Item
C4000A C6000B
1 Output mirror cleaning

800–2000h 800–1200h
2 Rear mirror cleaning
3 Folding mirror cleaning 3000–4000h
1000h or processing quality

4 0–shift mirror cleaning No install
go wrong
5 Output mirror change 3000h or inferior beam mode
6 Rear mirror change 3000h or inferior beam mode
7 Folding mirror change 3000h or inferior beam mode
8 0–shift mirror change 4000h or inferior beam mode No install
9 Exhaust pump oil change 1500h or low exhaust ability
10 Exhaust pump filter change 3000h or low exhaust ability
11 Exhaust pump overhaul 10000h or low exhaust ability
12 Turbo blower oil change 1500h or inferior turbo blower oil
13 Turbo blower overhaul 12000h or low turbo blower ability
14 Pressure control filter change 12000h or pressure alarm occurs
15 Discharge tube O–ring change 6000h or intra–cavity leakage occurs
16 Cooling water 1500h or inferior water quality
17 Water tubing cleaning 3000h or water flow is blocked
18 Beam absorber 15000h or over heat alarm occurs
19 Nylon tube 15000h
20 Cable 15000h
122
5.3 When opening the panels during maintenance, keep the power turn off.
DETAILS OF
MAINTENANCE
5.3.1 Be sure to open the panel indicated in Fig. 5.3.1 (a), (b), (c), or (d) before
Maintenance Panels replacing oil or the filter during daily maintenance.
and Oil Gauge Position
Fig. 5.3.1 (a) Maintenance panel (C1500B, C2000B, C2000C, C3000D)
Fig. 4.3.1 (b) Maintenance panel (C3000C)
123
Fig. 5.3.1 (c) Maintenance panel (C4000A)
Fig. 5.3.1 (d) Maintenance panel (C6000B)
124
The locations of the oil gages are shown in Figs. 5.3.1 (e) to (l). These oil
gages can be checked through a window without having to open the panel.
Fig. 5.3.1 (e) Oil gauge of turbo blower and exhaust pump (C1500B)
Fig. 5.3.1 (f) Oil gauge of turbo blower and exhaust pump (C2000B)
125
Fig. 5.3.1 (g) Oil gauge of turbo blower and exhaust pump (C2000C)
Fig. 5.3.1 (h) Oil gauge of turbo blower (C3000C)
126
Fig. 5.3.1 (i) Oil gauge of exhaust pump (C3000C)
Fig. 5.3.1 (j) Oil gauge of turbo blower and exhaust pump (C3000D)
127
Fig. 5.3.1 (k) Oil gauge of turbo blower and exhaust pump (C4000A)
Fig. 5.3.1 (l) Oil gauge of turbo blower and exhaust pump (C6000B)
128
5.3.2
Turbo Blower Oil
D Check method Check the amount of oil in the turbo blower while referring to the figure
below. The oil level should be between graduations H and L.
Fig. 5.3.2 Turbo blower oil gauge
Note This check should be made when the oscillator is at a rest.

When the turbo blower is running, it is impossible to check the
amount of oil correctly.
D Replenishment method 1. Remove the hexagonal–head screw from the oil inlet with a 17 mm
wrench. Be careful not to lose the O–ring on the screw.
Caution Before supplying turbo oil, stop the oscillator according to the
correct procedure and turn off the power. If the oscillator is not
stopped by the correct procedure, the pressure in the turbo
blower becomes negative. Opening the oil inlet under such a
condition lets a large amount of air get in the turbo blower. An
air flow caused this way can bring oil mist into the oscillator,
possibly resulting in the optical mirror getting dirty.
2. Take out a bottle of oil from an oil kit (A04B–0800–K326). Remove

the nozzle from the bottle, and take off the inner lid, then put the nozzle
back on the bottle. Insert the nozzle into the oil inlet. If it is difficult
to do this job, attach a tube (attachment to the oil kit) to the nozzle.
Watch the liquid level through the oil window. Supply oil until the
liquid level reaches the middle between graduation H and the center
line. Either superfluous or insufficient oil can be a cause of trouble.
129
3. Clean the oil inlet, hexagonal–head screw, and O–ring by wiping with
clean cloth or paper. Make sure that these parts are free of dust and lint.
Put the O–ring in the groove around the hexagonal–head screw hole
at the oil inlet correctly. Fit and tighten the hexagonal–head screw into
the oil inlet. Note that if the O–ring is not inserted correctly, or the
hexagonal–head screw is not tighten correctly, the turbo blower will
not be air–tight.
4. If oil has spilled over, wipe it up. Otherwise, the peripheral equipment
may be affected adversely.
5. If there is oil left over, put the inner lid back on the bottle, and keep
the bottle in a dark, cool place.
D Replacement method 1. Get a container for oil drain on hand, and put the tip of the drain tube
into the container.
Note Replace the oil every 1000 hours of operation or every four
months of use, whichever is earlier.
2. Turn the oil drain cock through 90° clockwise, and the oil will start
draining.
3. After all the oil has been drained, close the oil drain cock by setting
it back in the initial place.
4. Supply oil by following the same procedure as for replenishment.
Caution After oil replacement, perform aging, referring to Section 5.4.
130
5.3.3 Fig. 5.3.3 shows the location of the oil gauge. See also Fig. 5.3.4.
Exhaust Pump Oil
D Check method Watch the oil gauge, and check that the oil level is between graduations
L and H. Also check whether the oil is dark.
If the oil level is below L, add oil to the turbo blower or replace the oil in
it. If the oil level is above H, drain until the oil level becomes below H.
Fig. 5.3.3 Exhaust pump oil gauge
Note The exhaust of the turbo blower contains oil mist. The exhaust
pump will capture oil mist, and the amount of exhaust pump oil
increases with time. When the oil has increased too much, the
filter gets immersed in the oil, possibly causing white mist to
come out from the pump, or oil to leak. Furthermore, the
exhaust capacity may get lowered, or the pump may be
damaged.
D Replacement method 1. Stop the oscillator, and turn off the power.
2. Remove the maintenance panel.
3. Remove the oil inlet plug. There is an O–ring on it. Be careful not to
damage it. A missing or damaged O–ring can lower the exhaust
capacity of the pump.
4. Insert the drain tube into a drain oil pot.
5. Fully open the drain cock.
6. After the oil has been drained up, close the cock.
7. Supply 1.8 liters of new oil through the oil inlet, while watching the
oil gauge.
8. Attach the oil inlet plug.
9. Put the maintenance panel back in place, and turn on the power.
131
5.3.4
Exhaust Pump Filter
D Replacement method Replace the filter every 3000 hours of operation or every year of use,
whichever is earlier. If the filter gets clogged, the pump output becomes
low.
Fig. 5.3.4 shows where the filter of a exhaust pump is located.
SCREW KNOB
FILTER COVER
O–RING
SPRING
WASHER
EXHAUST FILTER ELEMENT
OIL INLET PLUG
Fig. 5.3.4 Exchange of exhaust pump filter
1. Stop the oscillator, and turn off the power.

3. Remove the black screw button from the pump.
4. Remove the filter cover and O–ring.
5. Remove the spring and washer.
6. Pull out the exhaust filter element.
7. Orient a new exhaust filter element correctly, and reverse the
procedure from step 5 to step 2. (An upward arrow is indicated on the
front surface of the filter element.)
Note The exhaust filter element should be installed securely. If it is

installed incorrectly, or the O–ring is not inserted accurately, oil
mist (white) will come out from the exhaust outlet.
8. Put the maintenance panel back in place, and turn on the power.
132
5.3.5 Replace the filter every 1500 hours of operation or every 6 months of use,
Exhaust System Filter whichever is earlier. Fig. 5.3.5 shows the exhaust pipe filter. None of the
C1500B, C2000B, C3000C, C3000D, and C4000A is equipped with this
filter.
D Replacement method
Clamp
Housing head
Housing
O–ring
(G90 or G85, depending on model; indicated on the housing surface)
Fastening nut
Cartridge filter
(manufactured by AdvanTech Toyo; TCG–045–SIFS)
Plate gasket
Fig. 5.3.5 Exhaust system filter
1. Stop the oscillator, and turn off the power.

3. Wipe the dust off the periphery of the housing and the clamp.
4 Wash your hands and wear clean vinyl gloves.
5. Loosen the clamp, and remove the housing head from the housing.
6. Loosen the fastening nut on the cartridge filter, and take out the filter.
7. Remove the O–ring, and clean it with lint–free paper dipped with
alcohol.
8. Clean the inner surface of the housing head and the O–ring groove with
lint–free paper dipped in alcohol, then let them dry.
9. Put the O–ring back in place. If the O–ring is deformed or deteriorated,
replace it with a spare, whose rating is indicated on the periphery of
the housing.
133
10.Take out a new cartridge filter (A97L–0201–0211, AdvanTech Toyo

TCG–045–SIFS) from its bag, and put a plate gasket (supplied
together with the cartridge filter) on both ends of the filter.
11.Insert the cartridge filter into the housing head, and fasten it with the
fastening nut.
12.Fasten the housing to the housing head. Before tightening the clamp,
make sure that the O–ring touches the entire surface of the seal
uniformly.
Note If the O–ring is not installed accurately, gas may leak.
13.Put the maintenance panel back in place, and turn on the power.
134
5.4 If the machine has not been unused for an extended period of time (three
days or longer) or if the laser gas circulatory system is exposed to the
AGING atmosphere (after, for example, turbo blower oil replacement), aging is
required. Aging refers to heating the discharge tube and the circulating
gas by performing internal discharge, so that any adsorptive impurities
and any air or water in the oil turn to gas and are released. If the laser gas
circulatory system is exposed to the atmosphere, perform a leak check
before aging.
5.4.1 (1) Change the setting of the following parameter.

Leak Check Method (Be sure to record the setting. The setting may differ from that in the
data sheet.)
To change the settings of parameters, enter MDI mode and

change Parameter enable from 0 to 1 on the Setting Screen.
This causes a warning message to appear. After changing the
settings of parameters, return Parameter enable from 1 to 0
and press the RESET KEY.
PRM No. 15240 (for the 16–L and the 16i–L) or 235 (0–L)
Setting → 0
(2) Turn on the RUN ON key to start up the oscillator.
(3) In about ten minutes, ALM. 4080 [680] Abnormal exhaust air is
issued. Within one minute after it is issued, turn off the MAIN
BREAKER of the oscillator and then back on.
(4) Turn off the oscillator startup key (RUN ON key). Then, turn off the
power to the NC (machine operator’s panel) and then back on.
(5) Open the diagnosis screen DGN. 905 [860] and record the numeric
value. If the value increase does not exceed 10 in 15 minutes, it is
acceptable. Otherwise, check again the portions that were loosened.
(6) Turn on the oscillator startup key (RUN ON KEY). In a few seconds,
turn it off. When the machine enters the Purge status, return the
parameter to the previous setting.
(7) A leak check is now completed.
5.4.2 The oscillator control software provides an automatic aging function. If

aging is required after consecutive holidays, this function eliminates the
Aging Method
need to perform the following operation (for the 16i–L only).
Enabling of the automatic aging function

PRM.15008.6 bit = 1
135
(1) Change the settings of the following parameters.

(Be sure to record the settings. The settings may differ from those in
the data sheet.)
To change the settings of parameters, enter MDI mode and

change Parameter enable from 0 to 1 on the Setting Screen.
This causes a warning message to appear. After changing the
settings of parameters, return Parameter enable from 1 to 0
and press the RESET KEY.
PRM No.15000.3 bit (16–L, 16i–L), 200.3 bit (0–L)

0 → 1 Enable internal discharge during manual operation.
1 → 0 Do not perform 3–minute compensation.
0 → 1 Enable internal discharge during automatic operation
1 → 0 Do not vacuum after RUN OFF.
PRM No.15201 (16–L, 16i–L), 232 (0–L)
Setting → 0
PRM No.15208 (16–L, 16i–L), 233 (0–L)
Setting → 0 Turn off output feedback.
PRM No.15209 (16–L), 234 (0–L)
Setting → 0 Turn off output feedback.
PRM No.15242, 15243 (16–L), 236 (0–L)
Setting → 0 Setting–100
(2) Turn on the RUN ON key to start up the oscillator.
(3) Turn on the HV ON switch to start discharge. Check that discharge
is not turned off.
(4) Perform internal discharge with the following settings. Internal
discharge can be performed either automatically using the appropriate
program or manually using the appropriate operation switch.
1000W Duty 50% (C1500B, 15 minutes)
1500W Duty 50% (C2000B, C2000C, 15 minutes)
2000W Duty 50% (C3000B, C3000C, C3000D, 15 minutes)
2500W Duty 50% (C4000A, 15 minutes)
4000W Duty 30% (C6000A, 1 hour)
The frequency is 100 Hz throughout internal discharge.
D Automatic method
1) Create the following program (for the 1500B).
C32 P1 Q1;
G24 S1000 Q50 R900.;
G32 P0;
Set the output (W) for S, Duty (%) for Q, and time (seconds) for
R.
2) Set the shutter lock and start the program.
136
D Manual method
This method is possible if the machine operator’s panel provides
a manual internal discharge switch.
1) From the setting screen, enter the output and the duty.
2) Press the internal discharge switch to start internal discharge.
(5) When the prescribed time, given above, has elapsed, turn off the RUN
ON key to stop the oscillator.
(With the new version of the software, stop discharge and turn HV off.)
(6) Return the discharge gas pressure to the normal setting. Perform
internal discharge with the following settings, then perform purge.
PRM No. 15242, 15243 (16–L), 236 (0–L) Setting–100 → Setting
2000W Duty 50% (C2000B, C2000C, 15 minutes)
3000W Duty 50% (C3000B, C3000C, C3000D, 15 minutes)
4000W Duty 30% (C4000A, 15 minutes)
The frequency is 100 Hz throughout internal discharge.
(7) Upon completion of aging, return the parameters to the previous
settings.
137
5.5 To procure consumables, contact the machine builder or FANUC service

center, and tell the applicable specification number listed below.
MAINTENANCE
PARTS
5.5.1 D Consumable parts

Spare Parts Item Specification
1 Turbo blower oil kit A04B–0800–K326
2 Exhaust pump oil A98L–0040–0093/1.0L6
3 Exhaust pump filter A98L–0001–0911
4 Exhaust system filter A97L–0201–0211
D Fuse of IF PCB
Specification Quantity Capacity Remarks
1 A60L–0001–0175#3.2 1 3.2A +5V of the interface PCB for FS–0L
2 A60L–0001–0175#0.5 2 0.5A 15V of the interface PCB for FS–0L
3 A60L–0001–0175#3.2 2 3.2A 200VAC input of the stabilized PSU
4 A60L–0001–0175#3.2 1 3.2A +5V of the interface PCB for FS–16L,16i–L
D Cleaner (For optics)

Ethyl alcohol, acetate, lens cleaner (A98L–0001–0857), Blower for
lens cleaning and lens cleaning tissue (A99L–0159–0001)
138
5.5.2 Following tools are recommended for maintenance.

Maintenance Tools (1) Equipment
Equipment Condition Application
AC voltmeter Accuracy: "2% For measuring AC power
DC voltmeter Full scale: 10V, 30V For measuring DC power

Accuracy: "2%
Digital voltmeter Full scale: 10V For measuring laser output

Accuracy: "2%
Laser power meter Maximum range: 2000 W For measuring laser output
Accuracy: "5%
Acrylic block (A98L–0004–0655) Larger than 50 50 30 mm For checking beam mode

Transparent surface
(2) Tools
Tool Size Application
Hexagonal head Width: 2, 2.5, 3, 4, 5, 6, 8, 10mm Removing mechanical parts

Wrench with ball
Point tip
Driver Cross–tip (+) No.1, 2, 4
Stab driver Cross–tip (+) No.00 For adjusting various sensors

Flat–tip (–) 1.8mm
Monkey wrench 300 mm 100 mm
Nippers
Pliers
Soldering iron 30 W
Forceps For replacing the optics
Spanner 10–22mm For replacing the water and gas tubes
139
6. TROUBLESHOOTING B–70114EN/04
6 TROUBLESHOOTING
The FANUC C series laser is provided with various sensors. They are
always monitored by a CNC. If the oscillator becomes abnormal, the
CNC promptly takes safety measures and brings the oscillator to a stop
or stand–by.
6.1 CHECKING ON FAULTS . . . . . . . . . . . . . . . . . . . . . 141

6.2 RESPONDING TO ALARM MESSAGES
ON THE SCREEN . . . . . . . . . . . . . . . . . . . . . . . . . . . 142
140
B–70114EN/04 6. TROUBLESHOOTING
6.1 After identifying the following items, call the FANUC service center. In
some cases, a symptom is not actually a fault in the oscillator, although
CHECKING ON it looks like a fault. So, check it with the following sections.
FAULTS
1. Symptoms
1 State of operation
(machining in progress, oscillator being started, etc.)
2 Timing of a fault (alarm)
3 Alarm number
4 How often the fault occurs
5 Oscillator serial number
2. Other information
1 Software system and edition indicated on the CRT screen when power
is turned on
2 Parameter settings;
check the current parameter settings with the corresponding values
indicated on the unit, and report your finding to the FANUC service
center.
141
6.2 See a list of alarms in an appendix at the end of this manual. The alarm
number, DGN, and parameter number (PRM NO.) vary with the CNC
RESPONDING TO model. So, the FS–16L number comes first, and the FS–0L number is
ALARM MESSAGES enclosed in parentheses.
ON THE SCREEN
Alarm No. 4061 [661] Anomaly of AD converter 1 (Refer to DGN = 981 [844, 845/bit 7])
FS0–L: AD converter 1 on Printed Circuit Board A16B–1212–0270
(CNC side) is not normal.
FS16–L, FS16i–L: AD converter 1 on Printed Circuit Board
A16B–1110–0260 or A16B–2100–0141 (oscillator
side)
No. Cause of trouble Solution
1 Anomaly of AD converter 1 It is necessary to replace AD converter

1. Call the FANUC service center.
2 Anomaly of printed circuit It is necessary to replace the oscillator

board interface printed–circuit board. Call the
FANUC service center.
Alarm No. 4062 [662] Anomaly of AD converter 2 (Refer to DGN = 982 [846, 847/bit 7] )
FS0–L: AD converter 2 on Printed Circuit Board A16B–1212–0270
(CNC side) is not normal.
FS16–L, FS16i–L: AD converter 2 on Printed Circuit Board
A16B–1110–0260 or A16B–2100–0141 (oscillator
side) is not normal.
1 Anomaly of AD converter 2 It is necessary to replace AD converter

2. Call the FANUC service center.
2 Anomaly of printed circuit It is necessary to replace the oscillator

board interface printed–circuit board. Call the
FANUC service center.
Alarm No. 4063 [663] Laser power supply unit protective operation or failure
(Refer to DGN 966, 967, 974, 975 [842, 854].)
This alarm is issued, if a fault occurs in the laser power supply unit. The
cause of the fault and the required action are described below.
The laser power supply unit issues this alarm and stops operation to
protect itself, even if a fault occurs outside the power supply. In many
cases, this alarm is issued when the laser power supply is normal. So,
sufficient investigation is necessary. If the power supply is turned on
without removing the cause of the alarm, the alarm will be issued again.
1. Preliminary inquiry No. Cause of trouble Solution
1 Checking parameters Confirm that all the parameters de-

scribed in the attached parameter
sheets are correctly set.
In case there exists any error, correct it.
2 Checking cooling water Confirm that the cooling water tempera-

temperature ture is in the range of 20°C to 30°C. In
case it is not so, adjust it.
142
2. Confirming operation Confirm the symptom, and call the FANUC service center.
and investigating the
No. Phenomenon Presumption cause
cause of a fault
1 An alarm occurs before discharge The laser power supply is de-
begins. fective.
2 The RF discharge current is small in The laser power supply is mal-

comparison with other units. The adjusted.
base discharge is narrow and tends
to disappear.
3 The RF discharge current is large in

comparison with other units. The
alarm is DCV alarm.
4 The RF voltage of all the units is high The external laser gas pipe is
during discharge and the laser power abnormal.
is low. The base discharge is narrow
and tends to disappear. When the
purge is repeatedly performed, the
RF voltage gradually decreases and
the laser power recovers.
This phenomenon often appears af-
ter the laser was not used for a long
period.
5 The RF voltage of all the units is high Internal leakage

during discharge and the laser power
is low. The base discharge is narrow
and tends to disappear. Even though
the purge is repeatedly performed,
the situation does not recover.
6 The RF voltage of all the units is high The intra–tube pressure of the
during discharge but the laser power laser gas is high (pressure
is normal. The base discharge is sensor anomaly) or the gas
narrow and tends to disappear. In composition is not normal (ex-
the high laser power region, it is low- cessive amount of N2).
er than the normal value.
7 The RF voltage of all the units is low The intra–tube pressure of the
during discharge and the laser power laser gas is low (pressure sen-
is low. The base discharge is widely sor anomaly) or the gas com-
spread. In the high laser power re- position is not normal (exces-
gion, the power is low but in the low sive amount of He).
power region, it is higher than the
normal value.
8 An alarm is generated notwithstand- Anomaly of the Laser power–

ing the absence of anomaly either in supply unit itself (anomaly of
the diagnostic data, discharge state alarm circuit).
or laser power characteristics.
143
3. Solution No. Cause of trouble Solution
1 External laser gas pipe ab- Improve the external pipe. The pipe
normal should be installed in such a way that
neither material chips nor impurities are
released. There shall be no gas leak-
age.
2 Gas composition ratio ab- Replace the laser gas with one that sat-
normal isfies the specification.
3 Discharge tube abnormal It is necessary to replace or adjust the

part. Call the FANUC service center.
4 PCB abnormal
5 Laser power supply abnor-

mal
6 Laser power supply malad-

justed
7 Pressure sensor abnormal
Alarm No. 4065 [665] Shutter anomaly (Related DGNs are shown below.)
This alarm is issued, when the shutter does not work correctly in response
to the shutter open/close instruction. The cause of the fault and the
required action are described below.
1 Shutter clamp not removed. It is necessary to replace or adjust the

2 Anomalous detecting posi-
tion
3 Anomaly of position detect-

er
4 Shutter cam loosened.
5 Shutter balancer loosened.
6 Intermediate PCB B, oscilla-

tor IF PCB, or NC IF PCB
abnormal
7 Anomaly of cables connect-

ing each PCB.
144
Alarm No. 4066 [666] Discharge anomaly (Refer to DGN = 909 to 914 [861 to 868]
Pressing the HVON (start discharge) button causes the unit to start
discharging. This alarm is issued, if at least one discharge tube fails to
operate.
1 Anomaly of parameter set- Make a setting using the values of PRM.

ting No. 15220 [0247], 15221 [0248], 15241
[0237], 15222 [0249], 15223 [0250]
listed in the parameter table attached to
the machine.
2 Anomaly of laser gas com- Replace the laser gas with the specified
position one, that is CO2:N2:He = 5:55:40% (vol-
ume ratio) with a composition ratio accu-
racy of "5% or less.
Also make sure that gas does not leak
from the external laser gas pipe.
3 Loose fixing parts of elec- It is necessary to replace or adjust the

trode part. Call the FANUC service center.
4 Gas circulating system leak-

age of gas or water
5 The gas flow control value

is closed
Alarm No. 4067 [667] Overheat of laser cabinet (Refer to DGN = 961/bit 1 [841/bit7])
The temperature of the input side of the electrode cooling fan is monitored
and sends alarm when it exceeds 60°C. When the temperature decreases,
the alarm state is solved automatically. Before that it cannot be reset.
1 Excessive environmental Lower the ambient temperature by ven-

temperature tilation (5°C to 30°C).
2 Excessive cooling water Check the temperature adjuster of the

temperature chiller unit. Set the temperature of the
cooling water to within an appropriate
range (20°C to 30°C).
3 Anomaly of cooling fan mo- It is necessary to replace or adjust the

tor part. Call the FANUC service center.
4 Anomaly of temperature
sensor
5 Oscillator IF PCB or CNC IF

PCB abnormal
6 Anomaly of connecting
cables between the PCBs.
145
Alarm No. 4068 [668] Too much incident laser beam back to the resonator.
(Refer to DGN = 906 [878])
This alarm is issued, if a workpiece reflects laser beam more than the
rating to the laser oscillator. This can happen when the laser beam is used
to drill, cut, or weld materials (such as copper, brass, and aluminum)
having a high reflectivity to the laser beam (10.6 mm).
1 Excessive returning beam Lower the output specified in the com-

back into the resonator mand, or take an action to reduce the
reflected laser beam.
2 Anomaly of parameter for Check the settings of parameter Nos.

alarm detection 15265 [3982] and 15266 [3983] with the
corresponding values in the parameter
table attached to the unit.
3 Anomaly of parameter for Check the settings of parameter Nos.

output power table 15280 to 15308 [265 to 294] with the
corresponding values in the parameter
table attached to the unit.
4 Anomaly of parameter for Set the parameter PRM. No. 15152

input calibration coefficient [259] to be the values as shown in the
attached table.
If rear mirror or power sensor was re-
placed, change the parameter.
Alarm No. 4069 [669] Anomaly of power supply unit voltage of IF PCB
(Refer to DGN = 960/bit 0 [841/bit 0])
This alarm appears when there occurs the anomaly in the stabilized power
unit voltage 5, 15, 24V of IF PCB for NC interface.
1 Fuse blowing It is necessary to replace or adjust the

2 Anomaly of stabilized power
source unit
3 Anomaly of power unit of IF

PCB
4 Laser oscillator main circuit

breaker abnormal
Alarm No. 4070 [670] Anomaly of chiller unit (Refer to DGN = G221/bit 6 [145/bit6]
Setting the RUN (start pressure control) to ON causes the NC to output
a chiller unit start signal to the machine, which will respond with a chiller
unit ready signal. The NC monitors this signal. If the chiller ready signal
stops, the NC issues this alarm. Check the operation of the chiller.
146
Alarm No. 4071 [671] Anomaly of assist gas (Refer to DGN = G221/bit 7 [145/bit7]
When starting machining, the NC monitors for a ready signal from the
assist gas supply unit in the machine. If this signal is not sent normally,
the NC issues this alarm.
Check the operation of the assist gas supply unit. Also check whether
there is the assist gas.
This alarm is issued also when in G32Pa Qb , a is not 0 to 3, or b is not
1 to 7 during program execution.
Alarm No. 4072 [672] Shortage of cooling water (Refer to DGN = 961/bit 1 [840/bit 1])
This alarm appears when the water shortage takes place.
1 Shortage of cooling water The water flow from the chiller unit is in-
sufficient, or the water flow is decreased
due to a clogged pipe. Check the dis-
charge pressure of the pump, or clean
the inside of the pipe.
2 Anomaly of connecting A sensor cable has come off the termi-

cables nal or is broken. Call the FANUC ser-
vice center.
3 Anomaly of water flow rate If the flow meter provided outside the
sensor oscillator indicates that there is a rated
water flow, the water level sensor may
be clogged with dust or scum, or may be
defective. Call the FANUC service cen-
ter.
Alarm No. 4073 [673] Decrease of laser gas pressure (Refer to DGN = 960/bit 5 [840/bit 4])
The pressure of the laser gas supplied to the laser oscillator is monitored.
This alarm is issued, if this pressure becomes lower than the permissible
level (1 kgf/cm2).
1 Tool low supply pressure of Adjust the secondary pressure at the

laser gas regulator on the gas cylinder so that the
pressure of laser gas supplied to the la-
ser oscillator is 1 to 2 bar (rating) as
measured at the entry of the oscillator. If
the distance between the gas cylinder
and the oscillator is larger than 5 m, it is
necessary to set the pressure slightly
higher.
2 No laser gas. Check whether the gas cylinder is empty

or whether the connection valve is
closed. If empty, replace the gas cylin-
der.
3 Leakage from the gas tube Check that the gas pipe joint is secure.
leading to the oscillator Also check whether the tube or pipe is
broken. If so, replace it.
4 Gas supply pressure sensor The sensor is defective, or set incorrect-

or cable abnormal ly. Alternatively, the connector is at-
tached incorrectly. Call the FANUC ser-
vice center.
147
Alarm No. 4075 [675] Condensation (Refer to DGN = 961/bit 2 [840/bit 6])
There is a condensation sensor at the inlet of the water branch unit in the
oscillator. This alarm is issued, when condensation is detected. If this
alarm occurs, the alarm condition cannot be reset until the condensation
state is released. Let the inside of the oscillator cabinet dry.
Caution It is strictly forbidden to blow hot air higher than 60°C to the
sensor.
1 Tool low cooling water tem- Set the water temperature near the room
perature temperature (plus 1°C).
2 Connecting anomaly of con- If this alarm occurs when there is no

densation sensor cable condensation on the cooling water
branch unit, the sensor is malfunction-
3 Anomaly of condensation ing. Call the FANUC service center.
sensor
Alarm No. 4076 [676] Laser output decrease (Refer to DGN = 906 [878])
This alarm is issued, if the monitored laser output is much lower than the
specified laser output, that is the monitored laser output is lower than the
specified output by a value specified in parameter No. 15271 [242].
1 Invalid parameter setting Re–set the parameter as specified in the

attached data sheet. Check whether bit
1 of parameter No. 15271 [242] is as
specified in the attached data sheet. If
not, set the parameter as specified.
2 Lack of output from laser Call the FANUC service center.

power sensor unit
3 Connecting anomaly of the

cable of laser power sensor
unit.
4 Anomaly of intermediate
PCB B
148
Alarm No. 4077 [677] Overheat of beam absorber (Refer to DGN = 961/bit 7 [841/bit 3])
Laser beam is introduced into the beam absorber, when the oscillation
takes place with shutter closed. This absorber is water–cooled and sends
alarm when the temperature exceeds a critical one. In the usual operation,
the irradiation of the absorber takes place only during the calibration
lasting 3 minutes just after the RUN start.
1 Insufficient cooling water Call the FANUC service center.
2 Temperature sensor wired

incorrectly
3 Temperature sensor abnor-

mal
Alarm No. 4078 [678] Gas pressure anomaly in discharge tube (Refer to DGN = 905 [860])
The gas pressure is monitored after the discharge start ready condition
(LRDY) is established. This alarm is issued, if the monitored gas pressure
deviates by "10 from the set gas pressure.
1 Anomaly of parameter set- Ascertain if the values of PRM No.

ting of gas pressure control 15000/bit 1 [200/bit 1], 15244 [0264],
15245 [0207], 15246 [0246] are used as
designated in the attached data sheets.
If different, correct them.
2 Abnormal supply laser gas Adjust the secondary pressure at the

pressure setting regulator on the gas cylinder so that the
higher.
3 Gas leakage from the inter- Call the FANUC service center.
nal piping
4 Anomaly of pressure sensor
5 The gas flow control valve

is closed.
6 Anomaly of pressure control

unit
Alarm No. 4079 [679] The emergency stop button was pressed.
If the emergency stop button is pressed after the discharge start ready
condition (LRDY) is set up, the shutter is closed, discharge stops, and the
LRDY condition is resumed, then this alarm is displayed. To reset the
alarm, remove the cause of trouble, release the emergency stop button,
and press the reset key on the operator’s panel.
149
Alarm No. 4080 [680] Leakage of gas tube/anomaly of exhaust pump

(Refer to DGN = 905 [860])
When the RUN (pressure control start) button is pressed, the exhaust
pump starts operating and expels gas from the gas circulating system to
cause a low–pressure condition. This alarm is displayed, if the pressure
is not reduced to the level specified in parameter No. 15240 [0235] within
10 minutes from the start of discharging.
1 Anomaly of parameter set- Check whether parameter 15240 [0235]

ting of gas pressure control is set as specified in the attacked data
sheet.
2 Anomaly of exhaust pump Check or take the following steps:

1 The amount of supplied oil is improp-
er.
2 The type of supplied oil is incorrect.
Supply a specified type of oil.
3 The exhaust filter is clogged. Re-
place it.
4 The exhaust outlet of the exhaust
pump is blocked or clogged, result-
ing in hindered exhaust. Remove
blocking materials.
5 If normal operation cannot be re-
sumed, call the FANUC service cen-
ter.
3 IF PCB abnormal Call the FANUC service center.
4 Gas leakage from the inter-

nal piping
150
Alarm No. 4081 [681] Anomaly of gas pressure control (Refer to DGN = 905 [860]
Pressing the RUN (pressure control start) button starts expelling air from
the laser gas tube. When a specified degree of vacuum is attained, laser
gas is supplied into the laser gas tube, and gas pressure control begins.
Forty–five seconds after the turbo blower is started, a check is made to see
whether the vacuum in the laser gas tube has reached to the level specified
in parameter No. 15241 [0237] "20. If the specified level has not been
reached, this alarm is issued. When there is no abnormal condition, a
discharge start ready condition (LRDY) is set up.
1 Anomaly of parameter set- Check whether bit 1 of parameter No.

ting of gas pressure control 15000 [bit 1 of 200], and parameter Nos.
15244 [0264], 15245 [0207], and 15246
[0246] are set as specified in the at-
tached data sheet.
2 Anomaly of supply laser gas Adjust the secondary pressure at the

pressure regulator on the gas cylinder so that the
higher.
3 Gas leakage from the inter- Call the FANUC service center.
nal piping
4 IF PCB abnormal
6 Anomaly of pressure control

valve
Alarm No. 4082 [682] Anomaly of pressure sensor (Refer to DGN = 905 [860]
This alarm appears when the signal of the pressure sensor used for
pressure control detector vanishes.
1 Anomaly of connection Call the FANUC service center.

cable
2 Anomaly of IF PCB
151
Alarm No. 4083 [683] Shutter failure to open

This alarm occurs when the shutter does not reach the correct position at
a certain time (pre–flow time of assist gas) after the shutter open
command.
This alarm takes place in the following cases.
1 The pre–flow time of assist Adjust the pre–flow time on setting

gas is too short for the shut- screen. It should be longer than 0.6
ter to open. sec.
2 Anomaly of shutter opera- Call the FANUC service center.

tion
Alarm No. – – – [684] Anomalous selection of the number of discharge tubes.

Anomalous selection of the number of discharge tubes. (Only FS0–L)
1 The case of FS–0L. The number of discharge tubes should

The number of discharge be selected to be one of 2or 4. The
tubes is selected tube other selection can be done in the laser set-
than 2 or4. ting screen and the result is indicated as
PRM. No. [0226] unselected.
Alarm No. 4085 [685] Decrease of laser output power (Refer to DGN = 906 [878])
This alarm appears when the laser output power decreases and takes an
abnormally higher calibration coefficient.
1 The supplied laser gas is Replace the laser gas with the specified
not the one specified. one, that is CO2:N2:He = 5:55:40% (vol-
racy of "5%.
2 Higher temperature of cool- Make sure that the cooling water is in a

ing water temperature range between 20°C and
30°C.
3 An optical part in the laser Call the FANUC service center.

resonator is out of position.
4 An optical part in the laser

resonator is dirty.
152
Alarm No. 4087 [687] Shutter temperature abnormal

(Refer to bit 6 of DGN 961 [bit 2 of 841].)
This alarm is issued, if the temperature of the shutter mirror exceeds the
limit, which is 80°C for C1500B, C2000B, C2000C, C3000C, C3000D,
C4000A, or 90°C for C6000B.
1 Contamination of shutter Call the FANUC service center.

mirror
2 Temperature sensor abnor-

mal, or its cable broken
3 Intermediate PCB B abnor-

mal
4 Anomaly of the cables con-

necting each PCB
5 Shutter fan operation abnor-

mal
Alarm No. 4088 [688] Discharge tube voltage drop (Refer to DGN 909 [861].)
This alarm is issued, if the voltage applied to the discharge tube drops
largely. More specific, the discharge tube voltage for reference discharge
is set up automatically to parameter No. 15270 [199] each time the RUN
button is pressed. This alarm is issued, if the automatically set discharge
tube voltage is lower than the discharge voltage specified at the previous
RUN time, by at least the amount specified in parameter No. 15272 [243].
1 The laser gas composition Replace the laser gas with the specified
is not as specified. one, that is CO2:N2:He = 5:55:40% (vol-
racy of "5%.
2 Gas leakage from the exter- Check the pipe clamp for gas leakage.
nal pipe
3 Gas leakage from the oscil- Call the FANUC service center.
lator
4 Laser power supply dis-

charge tube voltage detec-
tor abnormal
153
Alarm No. 4089 [689] Assist gas not output

(Refer to bits 0 to 2 of DGN F222 [bits 0 to 2 of 173].)
This alarm is issued, if an attempt is made to radiate a laser beam, when
no assist gas is selected, or an assist gas condition is not set up.
Alarm No. 4090 [690] Laser beam not generated (Refer to bit 6 of DGN F221 [bit 6 of 172].)
This alarm is issued, if an attempt is made to radiate a laser beam, when
the laser oscillator is not in the LSTR state (discharging state).
Alarm No. 4094 [– – –] Vacuum pump operation abnormal (Refer to bit 3 of DGN.)
The thermal magnetic contactor for the exhaust pump has tripped.
1 Anomaly of exhaust pump Call the FANUC service center.
2 Anomaly of IF PCB
3 Signal cable broken
Alarm No. 4099 [695] Gas pressure not reached (Refer to DGN 905 [860].)
This alarm is issued, if the discharge tube gas pressure does not reach
[specified discharge tube gas pressure during oscillation – tolerance] after
HV is set to ON.
1 Invalid parameter setting Check whether bit 3 of parameter No.

15001 [bit 6 of 3981], and parameter
Nos. 15247 [4398], 15248 [4399] are set
as specified in the attached data sheet.
2 Gas leakage from internal Call the FANUC service center.

piping
3 Pressure sensor abnormal
Alarm No. Turbo blower invertor abnormal

4100, 4110 [– –] (Refer to bit 0 of DGN 962 [bit 1 of 841].)
This alarm is issued, if an invertor used to run the blower becomes
abnormal. When this alarm is issued, an LED on the invertor is turned
on.
If the invertor power is turned off, the message is reset.
1 Turbo blower abnormal Call the FANUC service center.
2 Invertor abnormal
3 Blower cable broken
154
Alarm No. Invertor frequency reached signal abnormal

4101, 4111 [– –] This alarm is issued, if a frequency reached signal (bit 1 of DGN 962, 963,
and 964) is not received within 120 seconds after the turbo blower is
started.
1 Cable connection abnormal Call the FANUC service center.
2 Invertor abnormal
3 Invalid invertor setting
Alarm No. Turbo blower abnormal vibration

4102, 4112 [– –] This alarm is issued, if the turbo blower vibrates abnormally (if the
monitored vibration exceeds the permissible level).
Call the FANUC service center.
Alarm No. Turbo blower running

4103, 4113 [– –] This alarm is issued, if the turbo blower does not stop within 120 seconds
after the RUN OFF is pressed. When this alarm is issued, it becomes
possible to switch off the power without purging.
Invalid invertor setting.
Alarm No. Turbo blower overcurrent

4104, 4114 [– –] This alarm is issued, if the overcurrent sensor in the sensor unit detects
an abnormal condition.
Alarm No. Turbo blower temperature abnormal

4105, 4115 [– –] This alarm is issued, if the temperature of the turbo blower motor winding
becomes higher than the permissible level.
Alarm No. 4106 [620] Low turbo blower oil

This alarm is issued, if the amount of oil in the turbo blower decreases.
Stop the oscillator, and check the oil level with the oil gauge on the turbo
blower.
1 The oil level is lower than Replenish the turbo blower with oil until
specified. the oil level on the oil gauge is between
H and L. Replace the oil every 4
months of use or every 1000 hours of
operation, whichever is earlier.
2 Invalid sensor setting Call the FANUC service center.
3 Sensor abnormal
155
Alarm No. 4107 [621] External reflecting mirror not installed

This alarm is issued, if the beam reflecting unit is not attached with a
mirror or mirror holder.
1 Reflecting mirror not Call the FANUC service center.

installed
2 Switch abnormal
3 Cable abnormal
Alarm No. 4132 [622] Parameter is changed

This alarm is issued, if the parameter that is No. 15242, 15243 [236] and
No. 15223 [250] changed during Laser operation.
Push reset key and push the HV ON button.
156
APPENDIX
B–70114EN/04 APPENDIX A. EXTERNAL VIEW
A EXTERNAL VIEW
Fig. A (a) C1500B (short optical path length type)
Fig. A (b) C1500B (long optical path length type)
159
A. EXTERNAL VIEW APPENDIX B–70114EN/04
Fig. A (c) C2000B (short optical path length type)
Fig. A (d) C2000B (long optical path length type)
160
Fig. A (e) C2000C (short optical path length type)
Fig. A (f) C2000C (long optical path length type)
161
Fig. A (g) C3000C (short optical path length type)
Fig. A (h) C3000C (long optical path length A type)
162
Fig. A (i) C3000C (long optical path length B type)
Fig. A (j) C3000C (auxiliary unit)
163
Fig. A (k) C3000D (short optical path length type)
Fig. A (l) C3000D (long optical path length type)
164
Fig. A (m) C4000A (short optical path length type)
Fig. A (n) C4000A (long optical path length type B)
165
Fig. A (o) C6000B
166
B. FANUC LASER C SERIES
B–70114EN/04 APPENDIX SPECIFICATIONS
B FANUC LASER C SERIES SPECIFICATIONS
167
SPECIFICATIONS APPENDIX B–70114EN/04
Item Contents
Model C1500B C1500B C2000B C2000B C2000C C2000C

(Short) (Long) (Short) (Long) (Short) (Long)
Principle RF discharge excited fast axial flow CO2 laser
Structure Oscillator and power source integrated
Rated power 1,500W 2,000W
Max power 1,800W 2,000W
Pulse power peak ————— 3,300W (<500Hz, <50%) 2,700W (<500Hz,<50%)
Power stability "1% (For 8 hours operation at rated power level with power feedback control and
calibration function)
Wave length 10.6 µm
Beam mode Lower order mode
Beam diameter (Exit) <f24mm <f20mm <f27mm <f23mm <f27mm <f23mm
Polarization Linear (45°) Circular/ Linear (45°)

Linear (45°)
Beam divergence Less than 2 m rad (Full angle)
Pulse command freq. 5 to 2,000 Hz
Pulse command duty 0 to 100%
Laser gas composition CO2: He: N2 = 5: 40: 55 (Volume, N2 balance "5% for each composition)
Laser gas pressure 0.175 " 0.025 MPa (Gauge pressure)
Laser gas consumption Approx. 10 liter/hour
Cooling water rate >50 liter/min >75 liter/min
Water temperature 20 to 30°C
Temperature stability "1°C (Power stability of "1%)
Cooling water pressure Less than 0.5 MPa (Gauge pressure)
Water pressure loss ————— 0.3 MPa

(Rated flow)
Chiller capacity >15.7 kW >22 kW
Electric power line 3f 200 VAC +10%, –15% 50/60Hz or 3f 220 VAC +10%, –15% 60Hz
Grounding Earth (<10 ohm), Protective earth
Electric power 23 KVA 33 KVA

Consumption
Maximum current 80A 110A
Electrical shutter –/Trigger type ————— Trigger type
Hour meter Integrated the operational time of a exhaust pump
Weight 700 kg 800 kg 700 kg
NOTE
Use mechanical shutter when stopping machine operation.
168
B–70114EN/04 APPENDIX SPECIFICATIONS
Item Contents
Model C3000C C3000C C3000D C3000D

(Short) (Long) (Short) (Long)
Structure Oscillator and auxiliary unit separated Oscillator and power source integrated
Rated power 3,000W
Max power 3,000W
Pulse power peak 4,000W (<500Hz, <50%) 3,800W (<500Hz, <50%)
Beam diameter (Exit) <f27mm <f24mm <f27mm <f24mm
Polarization Circular Linear (45°) (Circular) Circular Linear (45°) (Circular)
Laser gas consumption Approx. 20 liter/hour Approx. 10 liter/hour
Cooling water rate >120 liter/min
Cooling water pressure Less than 0.5 Mpa (Gauge pressure)
Water pressure loss <0.3 MPa <0.25 MPa

(Rated flow)
Chiller capacity >33.7 kW
Electric power 44 KVA

Consumption
Maximum current 150A
Electrical shutter ————— Trigger type
Weight 900 kg (Osc) 150 kg (Aux) 800 kg
NOTE
169
SPECIFICATIONS APPENDIX B–70114EN/04
Item Contents
Model C4000A C4000A C6000B

(Short) (Long)
Structure Oscillator and power source integrated
Rated power 4,000W 6,000W
Max power 4,000W 6,000W
Pulse power peak 5,000W (<500Hz, <50%) —————
Beam diameter (Exit) <f27mm <f24mm <f28mm
Polarization Circular Linear (90° Vertical) Linear (90° Vertical)
Laser gas consumption Approx. 10 liter/hour Approx. 40 liter/hour
Cooling water rate >160 liter/min >250 liter/min

or (125+125) twin
Cooling water pressure Less than 0.5 MPa (Gauge pressure)
Water pressure loss <0.25 MPa —————

(Rated flow)
Chiller capacity >44.2 kW >67.5 kW
Electric power 55KVA 90KVA

Consumption
Maximum current 190A 300A
Electrical shutter Trigger type —————
Weight 900 kg 1,800 kg
NOTE
170
B–70114EN/04 APPENDIX C. ERROR CODE LIST
C ERROR CODE LIST
(1/2)
Number
FS–16L, FS–0L Contents Alarm level

16iL
4061 661 Anomaly in AD converter 1 ALARM 1
4062 662 Anomaly in AD converter 2 ALARM 1
4063 663 Anomaly in laser power supply unit ALARM 2
4065 665 Anomaly in shutter action ALARM 2
4066 666 There exist discharge tube without discharge ALARM 2
4067 667 Overheat in laser oscillator ALARM 1
4068 668 Too much laser beam reflected to the inside of the oscillator Shutter : close
Beam : off in LSTR
4069 669 Anomaly in power unit voltage of IF PCB ALARM 1
4070 670 Anomaly in chiller unit ALARM 1
4071 671 Anomaly in assist gas unit Shutter : close

Beam : off in LSTR
4072 672 Shortage of cooling water ALARM 1
4073 673 Decrease of laser gas supply pressure ALARM 1
4074 674 Overheat in Roots blower ALARM 1
4075 675 Condensation ALARM 1
4076 676 Decrease of laser output ALARM 1
4077 677 Overheat in beam absorber ALARM 1
4078 678 Anomaly in discharge tube gas pressure control unit ALARM 1
4079 679 Emergency button pressed ALARM 1
4080 680 The vacuum pump is abnormal, or gas leaks from the gas ALARM 1
circulating system.
4081 681 Anomaly in gas pressure control ALARM 1
4082 682 Anomaly in pressure sensor ALARM 1
4083 683 The shutter is not open when the beam output command is Shutter : close
issued. Beam : off in LSTR
— 684 An incorrect power supply was selected. ALARM 2
171
C. ERROR CODE LIST APPENDIX B–70114EN/04
(2/2)
Number
FS–16L, FS–0L Contents Alarm level

16iL
4085 685 Decrease of laser output A warning has occurred. It can

be reset.
4087 687 Overheat in shutter mirror ALARM 2
4088 688 The discharge tube voltage is low. ALARM 1
4089 689 Selection signal of assist gas not commanded Shutter : close
(in beam on state) Beam : off in LSTR
4090 690 The oscillator is not in the LSTR state when the beam output
command is issued.
4094 — Anomaly in exhaust pump ALARM 1
4095 695 The specified gas pressure has not been reached. ALARM 1
4100 691 Anomaly of inverter ALARM 1
4101 691 An inverter frequency reached signal is abnormal. ALARM 1
4102 691 The turbo blower vibrates abnormally. ALARM 1
4103 691 The turbo blower is not at stop. ALARM 1
4104 691 Turbo blower overcurrent ALARM 1
4105 691 Turbo blower temperature abnormal ALARM 1
4106 620 There is no sufficient oil in the turbo blower. ALARM 1
4107 621 External folding mirror not mounted ALARM 2
4132 622 Parameter is changed ALARM 2
D Alarm processing levels

ALARM1: Discharge is stopped, purge is carried out, and a purge
complete state is entered.
ALARM2: Discharge is stopped, and a discharge start ready state
(LRDY) state is entered.
172
B–70114EN/04 APPENDIX D. FANUC SERVICE NETWORK
D FANUC SERVICE NETWORK
FANUC LTD
Headquarters: Oshino–mura, Yamanashi Prefecture, 401–0597, Japan
Phone 555–84–5555 Fax 555–84–5512 Country code 81
Service division: 5–1, Asahigaoka 3–Chome, Hino–shi, Tokyo 191, Japan

Phone 425–84–1111 Fax 425–85–0954 Country code 81
[SERVICE LOCATION OF EUROPE AREA]

Location Service Representative Service area
Paris FANUC FRANCE S.A. France, Belgium

FRANCE Address: 10 Rue de Valenton Luxembourg
94470 Boissy St–Leger Morocco
Country code 33 Phone: 1–4569–6333 Fax: 1–4569–0325 Tunisia, Egypt
Stockholm GE FANUC Automation Nordic AB Sweden

SWEDEN Address: Mannar backen 4, S–191 49 Finland
Sollentuna, Sweden Norway
Country code 46 Phone: 8–444–5520 Fax: 8–444–5521 Denmark
Stuttgart FANUC GERMANY GmbH Germany

GERMANY Address: Bernhauser str. 22 Netherlands
73765 Neuhausen a.d.F. Switzerland
Country code 49 Phone: 7158–187300 Fax: 7158–187411 Austria
Porland
Hilden FANUC GERMANY GmbH (Hilden Branch Office) Hungary
GERMANY Address: Elberfelder Strasse 45 Czecho, Slovakia
40724 Hilden Greece
Country code 49 Phone: 2103–241060 Fax: 2103–62202 Slovenia
London FANUC U.K. LIMITED U.K.

U.K. Address: FANUC House, 1 Station Approach Ireland
Ruislip, Middlesex HA4 8LF
Country code 44 Phone: 1895–634182 Fax: 1895–676140
Milano FANUC ITALIA S.P.A. Italy

ITALY Address: Piazza Tirana, 24/4B
20147, Milano
Country code 39 Phone: 02–4830–3272 Fax: 02–4830–1943
Madrid FANUC IBERIA S.A. Spain

SPAIN Address: C/Alfonso GOMEZ, 38 PLANTA 1–E Portugal
28037, Madrid
Sofia FANUC BULGARIA CORPORATION LTD Bulgaria

BULGARIA Address: 29–37 Cristo Smirnenski Rumania
Str. 1164, Sofia Macedonia
Istanbul FANUC TURKEY LTD Turkey

TURKEY Address: Kusbakisi Sok. No:21, k–1–2
Altunizade–Uskudar, Istanbul
173
E. GLOSSARY APPENDIX B–70114EN/04
E GLOSSARY
Name Meaning
Access panel That protective component of a housing or enclosure which, when removed or
shifted, can cause exposure to laser radiation.
AEL Accessible emission level Maximum accessible emission level set up for each class of laser products
Alignment Optical axis adjustment
Aperture Iris, or stop
Beam Aggregate of unidirectional, diverging, or conversing rays
Beam diameter Distance between two symmetrical points in a cross section of a beam where
the power per unit area is 1/e as high as the maximum power per unit area
Beam divergence Angle through which a beam spreads
Burn pattern Laser beam mode pattern generated on a plate such as an acrylic plate for
confirmation purposes
Circular Polarization in which a plane of polarization rotates about the axis along which
Polarization the light progresses and does not have directivity; an electric or magnetic field
based on circular polarization has a constant intensity.
CO2 laser Laser that uses a carbon dioxide gas as a laser medium
CW Continuous wave Continuously radiated laser output
Discharge excitation Realization of inverted population by means of discharge
Enhanced pulse Greatly amplified peak output of a pulse
Excitation Transition of atoms or molecules to a higher energy level by supplying them

with external energy
Exposure time Duration through which laser radiation is emitted
Fast axial flow laser Laser in which gas flows rapidly in the same direction as the laser beam
Feedback Corrective action in which a quantity to be controlled is compared with a target

value generated by feeding part of an output signal to the input through a spe-
cially created closed loop so that the quantity to be controlled matches the
target value.
Laser Device for generating light by stimulated emission
Laser controlled area Area in which activities are controlled or monitored for protection from hazards
resulting from laser radiation
Laser mirror Reflecting mirror used in a laser resonator
Laser safety officer Person having sufficient knowledge about evaluation and management of
hazards of lasers and in charge of safety management of lasers
174
B–70114EN/04 APPENDIX E. GLOSSARY
Name Meaning
Laser safety standard Standard to protect human bodies from hazards resulting from laser beams in
view of use of lasers and about laser products for sale
Linear Polarization in which a plain of polarization is at a constant angle with the axis
Polarization along which the light progresses
Maintenance Action taken by a user to preserve normal operation of a product, such as

adjustment or other measures specified in documents created by the
manufacturer for users
Maximum output Maximum radiation power or maximum radiation energy per pulse that a laser
product outputs in all directions where there is a hazard of exposure in view of
operational capacity in every area at any point of time after the production of
the laser product
Mode State of a resonant system in which an electromagnetic field has a specific

distribution
MPE Maximum permissible exposure Maximum laser radiation level that can be radiated onto human bodies without
harmful influence to them in an ordinary environment
Operation Laser product’s action covering all intended functions, not including mainte-
nance or service.
Optical resonator Device in which stimulated emission of light is used for a laser and which con-
sists of a pair of reflecting mirrors facing each other
Parameter Variable that is assigned a given value for a specific purpose and indicates
that purpose
Phase Amount representing a positional relationship between two adjacent highest

or lowest points on a wave
Power density Energy per unit area
Protective housing Laser product housing or its part designed to protect humans from exposure
to a laser beam exceeding an accessible emission level or strong collateral
radiation
Pulse duration Time interval between the points at which an instantaneous value on the lead-
ing and trailing edges is half the peak pulse amplitude
Pulse duty Ratio (%) of a duration in which a pulsating laser output is on, to its entire
cycle
Pulse frequency Repetition frequency at which pulsating laser beams are radiated from an os-
cillator
Pulse laser Laser that outputs energy in the form of a single pulse or a pulse train
Pulse output Laser output radiated in the form of a pulse train
Radian Measurement unit of angle; 1 radian equals 360°/2p
Radiant energy Energy emitted, transmitted, or received (measured in joules, or J)
Safety interlock Device combined with the protective housing of a laser product to stop its op-
eration automatically when part of the housing is removed
Semiconductor laser Laser that uses a semiconductor as an exciting medium
175
E. GLOSSARY APPENDIX B–70114EN/04
Name Meaning
Sequence A succession of steps carried out in a prescribed order
Stimulated emission Emission of light stimulated by incident light and having the same frequency,
phase, and polarization state as the incident light
Target Jig used to radiate and position a laser beam
Threshold Physical quantity necessary to generate laser beams
176
B–70114EN/04 Index
ƠAơ ƠGơ
Aging, 135 Gas bottle, 75
Aging method, 135 Gas pipe, 75
Applicable models, 3 Glossary, 174
Ground cable, 82
ƠBơ
Base of oscillator, 54
ƠHơ
High temperature, 20
Beam divergence, 77
High voltage, 11
Beam guide, 77
ƠIơ
ƠCơ I/O signal cable, 82
Checking on faults, 141 Inapposite use of laser oscillator, 43
Chiller, 66 Internal structure, 95
Component details, 103
Condition, 45
Cooling water, 46 ƠKơ
Cooling water flow rate, 67 Key control, 41
Cooling water temperature, 66
ƠLơ
ƠDơ Laser beam, 6, 76
Daily inspection, 120 Laser gas, 45, 75
Details of maintenance, 123 Laser gas tubing, 75
Laser processing machine system, 117
Leak check method, 135
ƠEơ Lifting laser oscillator, 48
Electric connection, 78
EMC countermeasure, 93
ƠMơ
Emergency stop button, 42
Maintenance, 44, 119
Environmental condition, 53
Maintenance area, 56
Environmental conditions, 45
Maintenance panels and oil gauge position, 123
Error code list, 171
Maintenance parts, 138
Exhaust pump filter, 132
Maintenance tools, 139
Exhaust pump oil, 131
Manual contents, 2
Exhaust system filter, 133
External view, 159
ƠNơ
Notes on reading this manual, 4
ƠFơ
FANUC laser C series specifications, 167
FANUC service network, 173 ƠOơ
Fire, 19 Operation sequence, 115
For safe operation, 4 Other signal cables to the IF PCB, 82
Functions, 94 Overview, 1
i–1
INDEX B–70114EN/04
ƠPơ ƠTơ
Packing, 49 Tolerance of beam direction, 77
Periodic maintenance, 121 Toxic fume, 19
Plumbing, 67
Transportation, 48
Position and tolerance of laser beam exit, 76
Troubleshooting, 140
Power cable (L1, L2, L3), 82
Turbo blower oil, 129
Power source, 45
ƠRơ ƠWơ
Related manuals, 3 Warning Labels, 28
Responding to alarm messages on the screen, 142
Warning light (optional), 42
Water connection, 66
ƠSơ
Safety enclosure (at your work station), 19
Shutter lock, 41 ƠXơ
Spare parts, 138 XT20 terminal, 85
Storage, 53
i–2
Revision Record
FANUC LASER C series OPERATOR’S MANUAL (B–70114EN)
04 Jun., 2000 D Addition of C2000C, C3000D, C4000A and C6000B
D Addition of C3000C
03 Jul., 1996
D Correction of errors
D Addition of C2000B
02 Apr., 1995
D Correction of errors
01 Dec., 1994
Edition Date Contents Edition Date Contents

· No part of this manual may be
reproduced in any form.
· All specifications and designs

are subject to change without
notice.

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GE Fanuc Automation

Computer Numerical Control Products

GFZ-70114EN/04 June 2000

GE Fanuc Automation makes no representation or warranty, expressed, implied, or statutory

©Copyright 2000 GE Fanuc Automation North America, Inc.

This document describes the following models.

FANUC LASER–MODEL C1500B C1500B

FANUC LASER–MODEL C2000B C2000B

FANUC LASER–MODEL C2000C C2000C

FANUC LASER–MODEL C3000C C3000C

FANUC LASER–MODEL C3000D C3000D

FANUC LASER–MODEL C4000A C4000A

FANUC LASER–MODEL C6000B C6000B

And, these models conform with EMC Directive 89/336/EEC.

3.8 LASER BEAM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76

B. FANUC LASER C SERIES SPECIFICATIONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 167

C. ERROR CODE LIST . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 171

D. FANUC SERVICE NETWORK . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 173

In this manual, we have tried as for as possible to address all issues.

Contents of this chapter

1.1 MANUAL CONTENTS . . . . . . . . . . . . . . . . . . . . . . . . . 2

1.1 This manual consists of the following chapters and appendixes:

1.2 This manual covers the following models:

FANUC LASER–MODEL C2000B C2000B

FANUC LASER–MODEL C2000C C2000C

FANUC LASER–MODEL C3000C C3000C

FANUC LASER–MODEL C3000D C3000D

FANUC LASER–MODEL C4000A C4000A

FANUC LASER–MODEL C6000B C6000B

CONNECTION MANUAL B–61573E

OPERATOR’S MANUAL B–61574E

MAINTENANCE MANUAL B–61575E

FANUC Series 16–LA DESCRIPTIONS B–61852E

CONNECTION MANUAL B–61854E

OPERATOR’S MANUAL B–61853E

MAINTENANCE MANUAL B–61855E

PARAMETER MANUAL B–61810E

FANUC Series 16–LB DESCRIPTIONS B–62442E

CONNECTION MANUAL B–62443E

CONNECTION MANUAL B–62443E–1

OPERATOR’S MANUAL B–62594EN

MAINTENANCE MANUAL B–62445E

PARAMETER MANUAL B–62600EN

FANUC Series 16i–LA DESCRIPTIONS B–63192EN

CONNECTION MANUAL B–63193EN

OPERATOR’S MANUAL B–63194EN

MAINTENANCE MANUAL B–63195EN

FANUC LASER C series OPERATOR’S MANUAL B–70114EN

MAINTENANCE MANUAL B–70115EN

1.4 This manual contains precautions which must be observed during

Read the contents of each “Warning”, “Caution”, and “Note” before

Warning Precautions to be applied in those situations where there is a danger of the

Caution Precautions to be applied in those situations where there is a danger of the

Note Supplementary information other than precautions

Read this manual thoroughly and store it in a safe place.

C1500B, C2000C (C2000B), C3000D (C3000C), C4000A, C6000B

This oscillator fulfills the requirements of the relevant product safety

2.1 1) Potential hazards

Fig. 2.1 (c) The position of laser beam delivery (C4000A)

Fig. 2.1 (d) The position of laser beam delivery (C6000B)

2.2 1) Potential hazards

2.3 1) Potential hazards

2.4 1) Potential hazards