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Reports on Progress in Physics

Rep. Prog. Phys. 81 (2018) 026401 (44pp) https://doi.org/10.1088/1361-6633/aa8732

Review

Gradient metasurfaces: a review of


fundamentals and applications
Fei Ding, Anders Pors and Sergey I Bozhevolnyi
SDU Nano Optics, University of Southern Denmark, Campusvej 55, DK-5230 Odense M,
Denmark

E-mail: feid@mci.sdu.dk and seib@mci.sdu.dk

Received 1 December 2015, revised 31 July 2017


Accepted for publication 21 August 2017
Published 18 December 2017

Corresponding Editor Professor Masud Mansuripur

Abstract
In the wake of intense research on metamaterials the two-dimensional analogue, known as
metasurfaces, has attracted progressively increasing attention in recent years due to the ease of
fabrication and smaller insertion losses, while enabling an unprecedented control over spatial
distributions of transmitted and reflected optical fields. Metasurfaces represent optically thin
planar arrays of resonant subwavelength elements that can be arranged in a strictly or quasi
periodic fashion, or even in an aperiodic manner, depending on targeted optical wavefronts
to be molded with their help. This paper reviews a broad subclass of metasurfaces, viz.
gradient metasurfaces, which are devised to exhibit spatially varying optical responses
resulting in spatially varying amplitudes, phases and polarizations of scattered fields.
Starting with introducing the concept of gradient metasurfaces, we present classification of
different metasurfaces from the viewpoint of their responses, differentiating electrical-dipole,
geometric, reflective and Huygens’ metasurfaces. The fundamental building blocks essential
for the realization of metasurfaces are then discussed in order to elucidate the underlying
physics of various physical realizations of both plasmonic and purely dielectric metasurfaces.
We then overview the main applications of gradient metasurfaces, including waveplates, flat
lenses, spiral phase plates, broadband absorbers, color printing, holograms, polarimeters and
surface wave couplers. The review is terminated with a short section on recently developed
nonlinear metasurfaces, followed by the outlook presenting our view on possible future
developments and perspectives for future applications.

Keywords: gradient metasurfaces, meta-reflectarrays, dielectric metasurfaces, flat optical


elements, wavefront shaping, surface wave couplers, nonlinearity

(Some figures may appear in colour only in the online journal)

1. Introduction accumulated knowledge and experience now being focused


towards the design and realization of novel metadevices at
With the progress and prevalence of nano-fabrication, -charac- practically any frequency regime of interest. It is difficult to
terization, and commercial design tools during the last couple precisely define the start of the meta-era, since work already
of decades, the early thoughts on new degrees of light con- from the 1960s (see, e.g. [2]) may, in today’s terminology, be
trol, particularly visualized by Versalago’s work on electro­ considered as metasurfaces. Nevertheless, it seems safe to say
magnetic waves propagating in negative index media [1], have that the intriguing work by Ebbesen et al in 1998 on extraor-
become approachable for the wide optics community, with the dinary optical transmission through arrays of subwavelength

1361-6633/18/026401+44$33.00 1 © 2017 IOP Publishing Ltd  Printed in the UK


Rep. Prog. Phys. 81 (2018) 026401 Review

holes in metal films [3] and the visionary concept of perfect


lensing by Sir Pendry in the year 2000 [4] infused a new way
of thinking and controlling light. Shortly after, and strongly
inspired by the structure of matter, the concept of metamat­
erials was born, which is artificial materials with effective
optical parameters that are (most often) unattainable with
conventional materials [5–7]. The unusual optical properties,
comprising negative permeability [8–10] and refractive index
[11–13], arise from structuring (conventional) matter on a
subwavelength scale in which each, so-called, meta-atom fea-
tures an electric and/or magnetic response that on the scale of
the wavelength transpires into effective values of the permit­
tivity and permeability. Metamaterials have been success-
fully applied in realizing proof-of-concept invisibility cloaks
[14, 15], super-resolution imaging with hyperlenses [16–18],
optical nanocircuits [19, 20], biosensors [21, 22], and media
with extreme chirality [23, 24], just to mention a few. That
Figure 1.  Sketch of the 1D system considered by the group of
said, the true breakthrough and commercialization of meta-
Cappasso in [27], where a metasurface positioned at the interface
materials have yet failed to happen, which we ascribe to the between to ordinary media (characterized by refractive indexes
increasing difficulty in structuring matter in three dimensions ni and nt) necessitates a generalization of the laws of reflection
with increasing operation frequency and the fact that metals, and refraction. Here, θi , θr , and θt are the incident, reflected,
an often used component of metamaterials, become lossy (i.e. and refracted angles, respectively, that are related to the in-
(i) (r)
plasmonic) as we approach the optical regime. Furthermore, plane wave vectors by kx = k0 ni sin θi , kx = k0 ni sin θr , and
(t)
plasmonic materials, like silver and gold, are not compatible kx = k0 nt sin θt. From [27]. Reprinted with permission from AAAS.
with the widespread CMOS technology, hence hindering easy (i,r,t)
implementation in present large-scale fabrication facilities. where kx = k0 ni,i,t sin θi,r,t is the in-plane wave vector
We note that current research efforts explore alternative mat­ comp­onent, k0 is the free-space wave number, and Φ = Φ(x)
erials for low-loss, tunable, refractory, and CMOS compatible is a position-dependent phase abruptly imprinted on the inci-
metamaterials [25, 26]. dent wave by the metasurface. It is evident that in the case of
As concerns started to appear regarding the future of dΦ/dx = 0, we recover the usual laws of reflection and refrac-
metamaterials, the group of Capasso introduced in 2011 the tion that imply continuity of the in-plane wave vector. On the
concept of interface discontinuities, nowadays referred to as other hand, when dΦ/dx = 0 we are considering a phase-gra­
metasurfaces, and generalized laws of reflection and refrac- dient metasurface with the possibility to decouple the angle
tion [27]. The main results of that paper will be discussed in of incidence and the reflected/refracted angle. The most illus-
more detail shortly, but first we clarify that metasurfaces are trative example of this anomalous behavior is a metasurface
a two-dimensional (2D) array of meta-atoms with subwave- featuring a linearly varying phase of the form Φ = ±2πx/Λ ,
length periodicity and, for this reason, can be considered the where Λ is the distance of which the phase has changed by
planar analog of metamaterials with a thickness much smaller 2π , hereby imposing an additional in-plane wave number of
than the wavelength of operation. Interestingly, a considerable dΦ/dx = ±2π/Λ on the reflected and refracted light. Overall,
amount of experimentally realized metamaterials prior to the we believe that one should appreciate the simplicity and visual
year 2011 are planar (see, e.g. [9, 10, 13, 21, 24]) due to fab- appeal of the generalized laws of reflection and refraction,
rication challenges in entering the third dimension. The con- particularly with respect to the impact of those equations on
ceptual difference in planar metamaterials and metasurfaces, the subsequent development of increasingly complex flat opti-
however, owes to the description, where the former is charac- cal components. However, the work in [27] has also received
terized by bulk effective parameters and the latter by induced critical comments due to lack of novelty. The critic is two-
(electric and magnetic) surface currents. The one-dimensional fold; first, it is easy to show that the response of phase-gra-
(1D) system considered by Capasso and coworkers is sketched dient metasurfaces directly follows well-known Fraunhofer
in figure 1, where an incident plane wave impinges at an angle diffraction [28]. For example, the (at first sight) anomalous
of θi relative to the surface normal of a metasurface, thus lead- behavior of light in metasurfaces with a constant phase gra-
ing to reflection and refraction of the wave at angles θr and θt , dient of  ±2π/Λ is equivalent to the functionality of blazed
respectively. The generalized laws of reflection and refraction gratings of period Λ, the only difference being that in blazed
can be written as gratings the linearly varying phase is achieved through a tri-
angular, sawtooth-shaped profile. The second point of critic

kx(r) − kx(i) =
(1) , comes from the microwave community, practically stating
dx that phase-gradient metasurfaces are merely a scaling of fre-
quency selective surfaces (FSSs) to higher frequencies [29].
dΦ As FSSs, including the derived concepts of reflect- and trans-
kx(t) − kx(i) =
(2) ,
dx mitarrays, are made of subwavelength arrays of metal patches

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Rep. Prog. Phys. 81 (2018) 026401 Review

or apertures in a metal film and conventionally function as fil-


ters [30], flat parabolic reflectors [31–33], and flat lenses [34–
36], respectively, it is evident that FSSs and metasurfaces can
be considered two sides of the same coin. We, however, argue
that the focus on reflect- and transmitarrays for collimation
of milli- and micrometer waves for wireless communication
has limited the full exploration of FSSs for wave manip-
ulation—a viewpoint that is substantiated by recent years
progress in design and applications of reflect- and transmit-
arrays by, for example, the groups of Grbic [37–39] and Zhou
[40, 41]. Coming full circle, we would also like to recog-
nize work from the beginning of this century by the group of
Hasman on, at that time termed, space-variant subwavelength
gratings [42–45], which in today’s terminology are known as
geometric metasurfaces.
From the above discussion, we hope it is clear that the
manipulation of electromagnetic waves by flat and subwave-
length-thin devices has been an ongoing effort for several
decades, yet only recently experiencing a significant advance-
ment in practically all regimes of the electromagnetic spec-
trum. In this review, we will attempt to unify the vast amount
of work published on metasurfaces and metadevices, hope-
fully making it the most introductory and extensive overview
of this thriving field of research. The paper is organized into
three main sections, with the first section introducing a clas- Figure 2.  (a) Sketch of configuration consisting of a metasurface
sification of metasurfaces by the properties of the meta-atoms extending the xy-plane and immersed in a homogeneous lossless
medium. The incident plane wave is x-polarized and propagates
and a discussion of the associated possibilities of efficient
normal to the metasurface. (b) Sketch of a metasurface in front
wave manipulation. The second section presents realizations of a metallic backreflector, including the equivalent configuration
of the different classes of metasurfaces that, irrespective of (bottom sketch) within the approximations of electrostatic image
the frequency regime of operation, are exemplified by phase- theory.
gradient metasurfaces functioning as blazed gratings. The last
section discusses the many and exciting applications of meta- 2.1.  Metasurfaces featuring electric dipole response
surfaces, ranging from flat realizations of conventional optical
elements to exotic devices exploiting the new degrees of light The simplest class of metasurfaces constitutes a subwave-
control. As a final comment, we would like to acknowledge length periodic array of dielectric or metallic inclusions fea-
the many and excellent reviews that already exist, some pre- turing a pure electric dipole (ED) response. For simplicity,
senting a comprehensive overview of the field [46–52], while here we assume that the metasurface has an isotropic response
others are more compact [53–56], mainly focuses on a certain and is immersed in a homogeneous medium described by
type of metasurface [57–61], or a few specific branches of the refractive index n and wave impedance η. The configura-
applications [62–65]. tion is sketched in figure 2(a), where the incident x-polarized
plane wave propagates along the z-direction (i.e. normal to the
metasurface). As the metasurface is positioned at z = 0, the
2.  Classification of metasurfaces electro­magnetic wave in the two half-spaces takes the form
 
In the following section, we will discuss different classes of (3) E− (z) = E0 eikz + re−ikz x̂,
metasurfaces and present simple formulas for their reflection
and transmission coefficients, which allow us to emphasize  
H− (z) = E0 η −1 eikz − re−ikz ŷ,
(4)
their peculiar properties. In all cases, the metasurfaces will
be considered infinitely thin, with the responses related to the
E+ (z) = tE0 eikz x̂,
(5)
(electric, magnetic, and magnetoelectric) polarizabilities of the
meta-atoms comprising the metasurface. As an illustration of
H+ (z) = tE0 η −1 eikz ŷ,
(6)
this idealized situation, it is interesting to note that an induced
magnetic response in the plane of the metasurface requires a where E0 is the amplitude of the incident electric field,
circulating current in the orthogonal direction, thus exemplify- k = nk0 is the wave number, k0 is the wave number in vac-
ing the apparent paradox of the assumption of zero-thickness uum, and r and t are the reflection and transmission coeffi-
metasurfaces. Finally, we assume the incident light to be a cients, respectively. In the above equations, we have used the
plane wave propagating normal to the metasurface and that the harmonic-time dependence exp(−iωt), where ω is the angu-
induced polarizabilities only have in-plane components. lar frequency. Since the metasurface only features an electric

3
Rep. Prog. Phys. 81 (2018) 026401 Review

response, which leads to the presence of electric surface cur­ In this context, it is important to remember that a matrix M ,
rents, the appropriate boundary conditions at the metasurface representing one of the three quantities, that is rotated by 90◦
amount to with respect to the original xy-coordinate system undergoes
ẑ × (E+ − E− ) = 0, ẑ × (H+ − H− ) = Js ,
(7) the following transformation
   
where Js is the induced electric surface current. If we approxi- Mxx Mxy 90◦ rot. Myy −Myx
(11) −→ ,
mate the optical response from the meta-atom(s) of each unit Myx Myy −Mxy Mxx
cell with an effective point dipole moment p , the average
which signifies that for passive and reciprocal materials where
surface current is Js = −iωp/A, where A is the area of the
Mxy = Myx, the cross-polarized light, represented by the off-
unit cell. Following the discussion in [66], the electric dipole
diagonal tensor elements, may gain an additional π-phase by
moment may also be written as p = εαEav, where ε = ε0 n2
rotating the anisotropic metasurface constituents by 90◦. As
is the permittivity of the surrounding medium, α is the elec-
such, metasurfaces with a pure ED-response, inherently only
tric polarizability, which might incorporate knowledge about
allowing a phase change of up to π, may utilize the above geo-
coupling between neighboring elements and spatial disper-
metrical trick to reach the control of the full 2π phase space
sion effects [67, 68], and Eav = 12 (E+ + E− ) is the average for the cross-polarized component of the light. In order for
field acting on the metasurface, hereby leading to the surface such a metasurface to be effective, however, it is important
current to maximize the conversion from co- to cross-polarized light
Js = −iωA−1 εαEav .
(8) as the incident light interacts with the metasurface. We now
gauge the limit of the conversion efficiency by studying the
By applying the boundary conditions in equation  (7) on the reflection and transmission of x-polarized normal incident
fields in equations (3)–(6), we obtain the following reflection light on anisotropic metasurfaces, where the fields in the two
and transmission coefficients half-spaces are
iC 1
r=
(9) , t= , E− (z) = E0 eikz x̂ + E0 e−ikz (rxx x̂ + ryx ŷ) ,
(12)
1 − iC 1 − iC
where C = ωα/(2Av) is a dimensionless parameter, and v is E0 ikz E0
H− (z) =
(13) e ŷ + e−ikz (−rxx ŷ + ryx x̂) ,
the speed of light in the surrounding medium. It is worth not- η η
ing that the above coefficients have the same functional form
as derived for subwavelength thin periodic metal grids, plates, E+ (z) = E0 eikz (txx x̂ + tyx ŷ) ,
(14)
and perforated films [69, 70]. Moreover, it is evident that
interaction between the incident wave and the metasurface E0 ikz
requires C = 0, meaning that it is not possible simultaneously H+ (z) =
(15) e (txx ŷ − tyx x̂) .
η
to manipulate the incoming wave while having perfect trans-
mission (i.e. |t| = 1). In order to better visualize the limits of The transmission coefficients can then be derived by apply-
metasurfaces with a purely electric response, we note that the ing the boundary conditions in equations (7) and (8) (together
continuity of the transverse electric field across the infinitely with the assumption of a symmetric polarizability tensor),
thin metasurface transpires to 1 + r = t , while (for the sake hereby yielding
of argument) the additional simplifying assumption of a loss- 1 − iCyy
less metasurface (i.e. C is a real-valued function) amounts in txx = 2
, (16)
(1 − iCxx )(1 − iCyy ) + Cyx
conservation of the electromagnetic energy, i.e. |r|2 + |t|2 = 1. 
In order to satisfy both equalities, it is straightforward to show iCyx
that the complex transmission coefficient, which we write as  tyx = ,
2
(1 − iCxx )(1 − iCyy ) + Cyx (17)
t = |t|eiφt , must obey the condition
where Cij = ωαij /(2Av). It is important to note that a specific
(10)
|t| = cos(φt ),
value of txx should, in principle, be attainable for different sets
hereby underlining that the amplitude and phase of the trans- of (Cxx , Cyy , Cyx), meaning that the cross-polarized transmis-
mitted light (and, hence, also the reflected light) are inherently sion, which can be written as tyx = iCyx txx /(1 − iCyy ), can be
connected, with the phase concurrently limited to the inter- controlled rather independently. It is also worth noting that
val −π/2  φt  π/2. In other words, isotropic ED-based the continuity of the tangential electric field across the meta-
metasurfaces do not allow for independent engineering of surface implies rxx = txx − 1 and ryx = tyx. In fact, by using
the amplitude and phase of the transmitted or reflected light, these two relations and the simplifying assumption of a loss-
while only π phase-space can be reached. less metasurface, i.e. |rxx |2 + |ryx |2 + |txx |2 + |tyx |2 = 1, we
Having clarified the limitations of the simplest form of can derive the following relation
metasurfaces, we now concentrate our attention on the slightly
more complex problem of anisotropic metasurfaces for which |tyx |2 = Re{txx } − |txx |2 ,
(18)
the polarizability and, for this reason, also the reflection and where the right hand-side can be seen as a function of two
transmission coefficients, turn into 2 × 2 tensors (we ignore variables f (Re{txx }, Im{txx }), which has a maximum of
the possibility of having an out-of-plane polarizability). |tyx |2 = 1/4 for txx = 1/2 . In other words, the theoretically

4
Rep. Prog. Phys. 81 (2018) 026401 Review

maximum conversion efficiency is 25%, but achiev- where  ±  stands for right-handed CP (RCP) and left-handed
ing this ultimate efficiency simultaneously dictates, see CP (LCP) light, respectively. The transmitted or reflected light
2 can then be written as
equation  (16), the condition (1 + iCxx )(1 − iCyy ) = Cyx .
Although this equation has multiple solutions, thus allowing 1 1
for engineering the phase of tyx , we note that most metasur- M θ · E±
0 = (Mxx + Myy ) E± 0 + (Mxx − Myy ) e±i2θ E∓
0 ,
2 2
face designs only feature efficiencies of a few percent, with (21)
the exception of a recent bi-layer configuration demonstrat- where the first term represents light of the same handedness
ing conversion efficiency as high as 17% for linearly polar- as the incident wave, while the second term signifies light of
ized incident light at optical wavelengths [71], and another opposite handedness that gains an additional geometric phase
configuration probing the limit with efficiency of 24.7% for of twice the rotation angle θ. More importantly, the sign of the
circularly polarized (CP) incident light at microwave fre- phase term depends on the handedness, meaning that if the
quencies [72]. rotation angle varies along the metasurface, like θ(x) = πx/Λ
For linearly polarized light, the control of the cross-polar- where Λ represents the periodicity, the associated plane wave
ized transmission is typically realized by utilizing a system of in the far-field will gain an in-plane wave vector component
high enough symmetry that a proper alignment of metasurface of kx = ±2π/Λ, i.e. light of opposite handedness will prop­
constituents yields a polarizability tensor that is diagonal, i.e. agate in opposite directions with respect to the normal of the
α = diag(αxx , αyy ). If we now rotate the metasurface constitu- metasurface.
ents by an angle θ in the xy-plane, the resulting polarizability Having verified the presence of a geometrically induced
tensor takes the form phase term for CP incident light, we now discuss conditions
  for 100% conversion efficiency into the second term in equa-
αxx cos2 θ + αyy sin2 θ (αxx − αyy ) cos θ sin θ
αθ = , tion (21). It is clear that the required condition is Myy = −Mxx ,
(αxx − αyy ) cos θ sin θ αxx sin2 θ + αyy cos2 θ which represents the functionality of a half-wave plate and
(19)
will make the first term in equation  (21) vanish. The 100%
where it is readily seen that the optimum rotation angle for conversion efficiency, however, is only reached for lossless
maximizing the off-diagonal components is π/4 for which metasurfaces that either fully transmit or reflect light so that
cos θ sin θ takes on the maximum value of 12. We note that the |Mxx | = |Myy | = 1 [41]. As such, it is evident that simple
possibility to engineer both αxx and αyy allows for improved ED-based metasurfaces cannot satisfy these conditions, since
control of both the amplitude and phase of tyx . This is crucial a non-negligible polarizability tensor always leads to both
in phase-gradient metasurfaces, where one would like to keep transmission and reflection.
the amplitude of tyx constant, while the phase changes along
the metasurface in some predefined manner.
2.3.  Metasurfaces near a metal screen

2.2.  Geometric metasurfaces In an attempt to reach the 100% efficiency of geometric meta-
surfaces, the straightforward implementation amounts in plac-
The extrinsic spin Hall effect of electrons is related to the ing the metasurface near an optically thick metal film, hereby
spatial separation of electrons with opposite spin on inter- ensuring that transmission is zero [41]. This type of meta-
action with certain scatterers. A similar phenomenon can surface, however, is not only limited to controlling circular
occur for circularly polarized light, where photons of oppo- polarization states, but may also fully control reflected light
site handedness (i.e. spin) are transversely separated by the of linear polarization. We note that metal-backed metasur-
interaction with a certain class of metasurfaces. The sepa- faces have different names, typically referenced as reflectar-
ration of opposite-spin photons occurs due to metasurfaces rays [31–33] or high-impedance surfaces [75] in the milli- and
featuring a geometrically-induced phase-gradient that has an micrometer wave community, while at optical wavelengths
opposite slope for the two spin states. The geometric phase they are known as either meta-reflectarrays [76], film-coupled
is also known as the Pancharatnam-Berry phase due to the nanoantenna metasurfaces [77], or gap surface plasmon-based
pioneering work on this subject by Pancharatnam [73] and (GSP-based) metasurfaces due to the crucial role of GSPs in
Berry [74]. molding the response of the reflected light [78, 79].
In order to illustrate the possibility of inducing a geometric As a way to exemplify the full control of the reflected light
phase factor on CP light, we consider, similarly to the previ- for linearly polarized incident light, we consider the simplest
ous subsection, a metasurface consisting of mirror-symmetric situation of an isotropic ED-based metasurface that is placed
constituents so that for a proper choice of coordinate system in front of a metal screen which is treated as a perfect electric
the reflection and transmission tensors are diagonal, here conductor (PEC), with optical properties of the spacer layer
represented by the matrix M = diag (Mxx , Myy ). If the meta- being the same as the surrounding medium (see figure 2(b)).
surface is rotated by an angle θ in the xy-plane, the resulting In the limit of a spacer thickness h that is much smaller than
tensor M θ takes the form of equation (19). We now define the the wavelength of the incident light, we can apply the elec-
amplitude of the incident wave trostatic image theory to draw an equivalent configuration,
as shown in the lower part of figure 2(b), which consists of
1

0 = √ (x̂ ± iŷ) ,
(20) two identical metasurfaces that are separated by the distance
2 2h and feature equal but out-of-phase ED responses. Within
5
Rep. Prog. Phys. 81 (2018) 026401 Review

the limits of quasistatic theory (i.e. currents still oscillate in being taken explicitly into account [80, 81]. Regardless of
time) it is clear that the out-of-phase (i.e. circulating) elec- the view, we emphasize that equation (24) does describe the
tric currents generate magnetic dipole (MD) radiation at the behaviour of the reflection coefficient when the configuration
expense of the total ED response being suppressed. As such, features a resonance.
an ED-based metasurface in close proximity of a metal screen As a final comment, it ought to be mentioned that the meta-
can to a first approximation be considered an interface discon- reflectarrays can be well-described by the coupled-mode the-
tinuity featuring magnetic currents and zero transmission. The ory (CMT) [82–84], which provides a general guidance for
reflection coefficient can be derived by considering the con- designing reflective metasurfaces with tailored functionali-
figuration in figure 2(a), where the field in the left half-space ties. More specifically, the properties of meta-atoms are fully
( z < 0) follows equations (3) and (4), and the field in the right controlled by the two simple parameters (i.e. the intrinsic and
half-space ( z > 0) is zero. The proper boundary condition at radiation losses), which are, in turn, dictated by the geometri-
the metasurface needs to handle the discontinuity of the elec- cal or material properties of the underlying structures [84].
tric field due to the presence of a magnetic surface current,
and it is given by
2.4.  Metasurfaces featuring electric and magnetic
ẑ × E− = Ms ,
(22) dipole responses
where Ms is the magnetic surface current in analogy to the
So far, we have only considered metasurfaces with inclusions
electric counterpart can be written as featuring ED responses. A second class of metasurfaces, which
Ms = −iωA−1 µ0 βHav .
(23) are typically known as Huygens’ metasurfaces and allow for
greater control of the light, encompass unit cells with both ED
Here, m = βHav is the magnetic dipole moment, with β
and MD responses [37]. In the study of the fundamental prop-
being the magnetic polarizability of the unit cell constituent erties of this class of metasurfaces, we again consider an iso-
and Hav = 12 (H+ + H− ) is the average magnetic field at the tropic metasurface in the simple configuration of figure 2(a).
metasurface, which in the present configuration amounts to For a x-polarized incident wave, the electromagnetic fields are
Hav = 12 H−. By applying the above boundary condition on described by equations (3)–(6), but the boundary conditions
the electric field in equation  (3), we obtain the following that must be satisfied are now
reflection coefficient
ẑ × (E+ − E− ) = −Ms , ẑ × (H+ − H− ) = Js ,
(26)
1 + iD
r=−
(24) , with the surface currents, as defined in equations (8) and (23),
1 − iD
ensuring a discontinuity in both the electric and magnetic
where D = ωβ/(2Av). If we for simplicity consider the loss- field. By applying the boundary conditions to the electro­
less situation (i.e. D is a real-valued function) and write the magnetic field, we obtain the following reflection and trans-
reflection coefficient as r = |r|eiφr , it is easily shown that mission coefficients
|r| = 1 and
i (C − D)
φr = 2 tan−1 (D) + π, r=
(27) ,
(25) (1 − iC) (1 − iD)
which signifies that the reflection phase spans the entire 2π
phase space when D varies from −∞ to ∞. In real configura- 1 + CD
t=
(28) ,
tions, we note that losses and retardation effects do decrease (1 − iC) (1 − iD)
the attainable phase space somewhat, but it is in most cases where C = ωα/(2Av) and D = ωβ/(2Av). It is readily
considerably larger than π. Moreover, we emphasize that the seen that zero transmission and reflection can occur when
Ohmic losses, which are typically considered decremental for C = −D−1 and C = D , respectively. Interestingly, it should be
the metasurface performance, may actually also be exploited noted that the latter condition is equivalent to requiring α = β ,
to take spatial control of the amplitude of the reflected light. which is actually the Kerker condition for dominant forward
Finally, we point out that when |D|  1, which might occur scattering (relative to the incident light) of light by a single
near a resonance in β, the reflection coefficient is r  1, nanoparticle [85–87]. As such, zero-reflection metasurfaces,
hereby verifying that the metasurface may behave as an arti- also conventionally just referred to as Huygens’ metasurfaces,
ficial magnetic conductor, also known as an high-impedance are the result of forward-scattering meta-atoms, with the trans-
surface [75]. mission coefficient taking on the simplified expression
In the above derivation of the functional form of the reflec-
tion coefficient for ED-based metasurfaces near a metal screen 1 + iC
t=
(29) .
(equation (24)), we utilized image theory to justify the pres- 1 − iC
ence of a magnetic response, hereby implicitly assuming that It is evident that the function is (ignoring the sign difference)
the reference geometry (i.e. without metasurface), is the free equivalent to the reflection coefficient in equation (24) from a
space, as also evident from figure 2(b). It should, however, be metal-backed metasurface, meaning that in the lossless case
noted that the metal screen can alternatively be viewed as part one can simultaneously achieve perfect transmission and full
of the reference geometry, thus entailing an ED-only response control of the transmission phase by proper choice of C and D,
of the nearby metasurface, with the interaction with the screen still keeping C = D at all times. The condition C = D might

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Rep. Prog. Phys. 81 (2018) 026401 Review

in fact also be purposely violated in order to induce an ampl­ where C = ωα/(2Av), D = ωβ/(2Av), and F = ωγ/(2Av). It
itude modulation on the transmitted fields. is readily seen that the reflection coefficient is depending on
As an alternative to utilize metasurface constituents with both the direction of incident light, which opens up the possibility
an ED and MD response, it is also possible to stack ED-based of designing metasurfaces with markedly different responses
metasurfaces that feature out-of-phase electric currents, hereby in reflection for the two directions of wave propagation.
creating an effective MD response that can be engineered to Metasurfaces utilizing this property together with suppression
achieve zero reflection. Such a stacking of metasurfaces is often of transmission (i.e. CD + F 2 = −1) are known as metamir-
referred to as transmitarrays [35, 88] or meta-transmitarrays rors [91, 92]. Another interesting property of metamirrors
[89], depending on the frequency range of operation. is the possibility to only reflect light in a narrow frequency
band, related to a resonant behavior of the metasurface, while
rendering transparent at other frequencies. In general, when
2.5.  Metasurfaces featuring magnetoelectric coupling
comparing the reflection and transmission coefficients of con-
To this end, we have demonstrated the possibility to fully ventional Huygens’ metasurfaces (equations (27) and (28))
control the reflection and transmission of light by utilizing with metasurfaces also featuring magnetoelectric coupling
metasurfaces with electric and magnetic responses. The lin- (equations (34) and (35)), it is evident that it might be easier
ear response of metasurfaces, however, can be further gen- to reach either zero reflection or transmission due to the possi-
eralized by including magnetoelectric coupling, which takes bility to engineer not only the electric and magnetic response
into account that the magnetic field may induce an electric but also the magnetoelectric contribution. For example, zero
response and vice versa. The most general expression of the reflection or transmission can (in principle) occur without a
induced surface currents on the metasurface take on the form magnetic response (i.e. D = 0 ).
  As a final comment, we emphasize that the independence of
(30) Js = −iωA−1 εαEav + v−1 γHav , the transmission coefficient in equation (35) on the direction
  of wave propagation is a direct consequence of the assumption
Ms = −iωA−1 v−1 κEav + µ0 βHav ,
(31) of reciprocity. In this regard, it is important to emphasize that
asymmetric transmission can occur for a reciprocal metasur-
where α and β are the 2 × 2 electric and magnetic polariz- face that converts light to the cross-polarized component. In
ability tensors, respectively, and γ and κ describe the magne- order to illustrate this fact, we note that the transmission coef-
toelectric coupling. It should be noted that the above relations ficient tensors for  ± z-propagating incident light are related by
define a bianisotropic metasurface, with the four tensors obey- [93]
T T T
ing the relations α = α , β = β , and κ = −γ for reciprocal    
txx txy txx −tyx
metasurfaces [90], hereby illustrating that this class of meta- (36) t+ = , t− = ,
tyx tyy −txy tyy
surfaces may be characterized by up to 10 independent param­
eters. In most cases, however, symmetry of the unit cell and its which has the consequence that transmission coefficients like
constituents reduce the number of surface parameters, possi-    
0 0 1 1 −i
bly reaching the lower bound of three independent parameters (37) t+ = , t+ =
1 0 2 −i −1
for bi-isotropic metasurfaces.
In order to exemplify the peculiar optical properties of perfectly transmit x- and RCP light for propagation along the
bianisotropic metasurfaces, we again limit ourselves to +z -axis, respectively, while these polarization states are com-
x-polarized incident light and demand the metasurface to pletely blocked for −z -propagation [39, 94]. We note that it
conserve the polarization of the light (i.e. no cross-polarized is the reciprocity condition in equation (36) that also leads to
light), meaning that the surface currents can be written as [39] asymmetric transmission for CP light in certain chiral meta-
  surfaces [95, 96].
(32) Js = −iωA−1 εαEav + v−1 γHav ,
  3.  Realization of metasurfaces
Ms = −iωA−1 −v−1 γEav + µ0 βHav ,
(33)
where the magnetoelectric coupling is described by a single With the attempt in previous section to classify the broad range
parameter γ. Moreover, we consider a configuration similar of existing metasurfaces, including a conceptual description
to figure  2(a) and calculate the reflection and transmission of the connection between polarizabilities of meta-atoms and
coefficients for light propagating in both the  ± z-directions. the reflection and transmission coefficients, we now discuss
In both cases, the boundary conditions at the metasurface are practical realizations. The illustration of the many approaches
given by equation (26), yielding towards flat optical components will be limited to the ubiqui-
tous case of a blazed diffraction grating, postponing the wide
i(C − D) ± 2iF
r± =
(34) , range of metasurface applications to the subsequent section.
(1 − iC)(1 − iD) − F 2 The blazed grating functionality, as discussed in the introduc-
tion, is realized by incorporating a constant phase gradient on
1 + CD + F 2 the metasurface so that reflected/transmitted light will gain an
t± =
(35) ,
(1 − iC)(1 − iD) − F 2 additional in-plane momentum, hereby resulting in the famous

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Rep. Prog. Phys. 81 (2018) 026401 Review

Figure 3.  Optical properties in the near-infrared regime of ((a)–(c)) gold nanorod, ((d)–(f)) MIM-resonator, ((g)–(i)) split ring resonator,
and ((j)–(l)) silicon nanodisk. ((a), (d), (g), (j)) show sketches of the four different configurations, with ((b), (e), (h), (k)) presenting the
calculated absorption (red) and scattering (black) cross sections as a function of wavelength for x-polarized plane wave incident light
propagating along the z-axis. The dimensions are L = 450 nm and w = t = 50 nm for the nanorod; L = 350 nm and w = t = h = 50 nm
for the MIM-resonator; L1 = 220 nm, L2 = 190 nm, and w = 50 nm for SRR; D = 430 nm and h = 300 nm for the silicon nanodisk. The
insets represent schematic drawings of the induced (polarization) currents in the nanostructures. ((c), (f), (i), (l)) show the amplitude and
phase of the induced electric (blue) and magnetic (green) dipole moments for incident light with amplitude 1 V m−1. The MD moment is
divided by the speed of light c to have the units of the ED moment.

anomalous propagation of light. However, before discussing In the view of nanorods as Fabry-Pérot resonators, the reso-
the many different implementations of blazed grating func- nance condition can be expressed as
tionality, we would like to pay attention to the meta-atoms that
Re{kspp }L + Γ = πm,
(38)
occupy the metasurface unit cells.
where kspp is the (complex) wave number of the plasmonic
waveguide mode, L is the length of the nanorod, Γ is the
3.1.  Fundamental building blocks
reflection phase of the mode at nanorod terminations, and m is
In the previous section, we assumed metasurfaces featuring an integer. It should be noted that the quantity Γ/Re{kspp } can
electric, magnetic, and magnetoelectric responses without be considered as an effective increase of the resonator length L
specifying the origin of this behavior. Here, we would like due to the plasmonic mode extending beyond the geometrical
to highlight the optical properties of four nanostructures end facets [101]. We note that this is in stark contrast to con-
that are indispensable building blocks for optical and near- ventional linear dipole antennas at radio frequencies where
infrared metamaterials and metasurfaces; that is, elongated electromagnetic waves induce electric currents in the metal
metallic nanorods, metal-insulator-metal (MIM) resonators, with resonances occurring at integer numbers of half wave-
metallic split ring resonators (SRRs), and silicon nanodisks. lengths [102]. In regard to the symmetry of the standing wave
We note that the metallic nanorod and SRR also have low- resonances in nanorods, it should be noted that only modes
frequency regime counterparts, though the relaxed fabrica- of odd integers m can be excited by normal incident light. At
tion constraints at these frequencies sometimes result in the same time, the requirement that metasurfaces should con-
more complex meta-atoms, like fractal-shaped configura- sist of subwavelength unit cells leads to the utilization of the
tions [97]. smallest resonant configuration, corresponding to nanorods
In the pursuit of a resonant electric dipole response, the with the fundamental resonance (m = 1) close to the work-
metallic nanorod configuration, as sketched in figure  3(a), ing wavelength. As an illustrative example, figure 3(b) shows
appears as an attractive candidate due to the simple geometry scattering and absorption cross sections of a gold nanorod in
and elongated shape. The long axis of the nanorod, which is air (with dimensions w = t = 50 nm and L = 450 nm) for a
considerably larger than the subwavelength cross sectional normal incident x-polarized plane wave. The wavelength of
dimensions (i.e. w, t  L), implies a strongly anisotropic the fundamental resonance, as characterized by maximum
response, with noticeable light-matter interaction being lim- in the optical cross sections, is λ  1.5 μm, with scattering
ited to polarizations along this axis. Since metallic nanorods being the dominant decay channel for the plasmonic mode.
can be considered as plasmonic waveguides of finite length, This is in agreement with the theory of multipole expan-
it follows that the associated resonances can be described as sion of electromagnetic fields, which dictates that systems
standing-wave resonances of constructive interfering propa- featuring a dominant ED moment will be strongly radiating
gating and counter-propagating plasmonic modes [98–100]. [102–104]. As such, it is customary to denote nanostructures

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Rep. Prog. Phys. 81 (2018) 026401 Review

with dominant or suppressed ED moments as bright and dark nm, L2 = 190 nm, and w = 50 nm, figure 3(h) demonstrates
configurations, respectively, since (by reciprocity) it provides the significant increase in both scattering and absorption cross
the link for external light to interact with the nanostructure sections at the magnetic resonance at λ  1.5 μm. It should be
[105]. In the present nanorod example, figure  3(c) displays emphasized that the resonance is equivalent to the fundamen-
the induced ED moment in the nanorod as a function of wave- tal resonance of straight nanorods (figures 3(a)–(c)), where
length. As expected, the ED moment is resonantly enhanced at the magnetic response arises from bending the nanorod into a
λ  1.5 μm, while the phase undergoes a change of close to π U-shape so that the linear plasmonic current becomes a partial
for wavelengths of opposite sides of the resonance. circulating current (see inset of figure  3(h)) [115, 116]. For
Having clarified the optical properties of elongated this reason, the SRR features both an ED and MD response
nanorods, we turn to a slightly more complicated configura- (pointing along the x- and y-axis, respectively), as depicted
tion consisting of two metal nanorods separated by a nanome- in figure  3(i), with the possibility to engineer the relative
ter-thin dielectric spacer, such as silicon dioxide (SiO2) (figure strength between these two dipole moments by the degree of
3(d)), also known as MIM resonator. The optical properties which the nanorod is bent into a one-cut loop. Moreover, it
of this kind of configuration can be qualitatively explained ought to be mentioned that SRRs, though often just referred
within the hybridization model [106], where the near-field to as a magnetic meta-atoms, also include a magnetoelectric
interaction between the two (identical) nanorods will lead to response that arises from x-polarized light inducing an MD
two new super modes: a high-energy mode characterized by along the y-axis, and, conversely, a magnetic field along the
in-phase polarization currents in the nanorods, thus having a y-axis generating an ED along the x-direction [117, 118].
large total ED moment, and a low-energy mode with out-of- The last nanostructure that we would like to highlight is a
phase currents, hereby leading to a suppression of the total silicon nanodisk (figure 3(j)), which seems to be an essential
ED moment in favor of a magnetic response (see insets in fig- building block for the realization of near-infrared all-di­electric
ure 3(e)). In order to illustrate this line of thought, figure 3(c) Huygens’ metasurfaces [119–122]. The first point to note is
presents numerical calculations of the optical cross sections of that this type of metasurface utilizes the dielectric properties
a gold-SiO2-gold resonator ( L = 350 nm and w = t = h = 50 of silicon, characterized by negligible absorption for λ > 0.7
nm, see figure 3(d)) interacting with a z-propagating x-polar- μm and a high refractive index of n ∼ 3.5 throughout the
ized incident plane wave. In accordance with the hybridiza- entire near-infrared regime. The second point has its origin
tion model, the spectra features a broad resonance at λ  1.2 in the Mie theory, stating that spherical particles in general
μm that efficiently scatters light and a narrower resonance at feature both electric and magnetic resonances [123], though
λ  1.5 μm whose existence is mainly seen in the absorption the condition for excitation of magnetic modes can only be
cross section. The noticeable different optical properties of reached in magnetodielectric [124] or high-permittivity [125,
the two plasmonic modes relate to the resonances being of 126] particles. Since the overall conclusions of Mie theory are
electric and magnetic origin, as confirmed by calculating the generally valid for arbitrarily shaped nanoparticles, it follows
induced ED and MD moments of the MIM resonator (figure that nano-disks and -cubes so too feature electric and magn­
3(f)). It is worth noting that the magnetic resonance of MIM etic resonances [127–129]. Moreover, by proper choice of
structures has been utilized in the past to create metamaterials geometrical parameters it is possible to have spectrally over-
with negative permeability [107, 108] and negative refractive lapping ED and MD resonances that, in accordance with the
index [13, 109, 110] at optical and near-infrared wavelengths. Kerker conditions [85], leads to strongly directional scattering
Moreover, in the retardation-based regime (i.e. L  λ is not of light [127, 128, 130, 131], while perfect matching of the
strictly valid), which is outside the scope of the hybridization ED and MD moments in the arrayed counterpart (i.e. meta-
model, MIM resonators also function as Fabry-Pérot resona- surface) results in zero reflection of light (see section  2.4),
tors with the magnetic resonance being the fundamental mode with the phase of the transmitted light being determined by
of standing-wave GSP waveguide modes [99, 111, 112]. the exact values of the ED and MD moments [119, 129]. As
Metallic split ring resonators, as sketched in figure  3(g), an illustration of the optical properties of silicon nanodisks,
are ubiquitous meta-atoms for realizing a magnetic response figure 3(k) displays the scattering cross section for a disk with
in practically any frequency regime. For example, SRRs diameter D = 430 nm and height h = 300 nm. It is seen that
were a key element in the first experimental verification of the spectrum features a peak at λ  1.5 μm and a shoulder at
metamaterials with negative refraction at microwave frequen- λ  1.3, which is the signature of the excitation of a second,
cies [12] and realizing negative permeability at near-infrared though weaker, mode. The origin of the spectral peaks is elu-
wavelengths [9]. It is mainly only at optical wavelengths that cidated through the calculation of the induced dipole moments
MIM resonators are used instead of SRRs, which owes to the (figure 3(l)), which clarifies that the shoulder in the spec-
fact that the finite plasma frequency of real metals leads to a trum originates from a broad ED resonance, while the peak
saturation of the magnetic resonance wavelength as the SRR at λ  1.5 μm arises from excitation of a strong MD mode.
is being scaled down [113, 114]. In order to change the scaling Interestingly, it is noticed that the ED and MD moments are
and electromagnetic response of SRRs, these configurations equal at λ  1.6 μm, meaning that this nanodisk configura-
may consist of several rings [8] or a single ring with multiple tion satisfies the criterion for becoming an element in a phase-
cuts [113], however, here we restrict ourselves to discuss the gradient Huygens’ metasurface working at 1.6 μm. As a final
simplest case of a single ring featuring only one cut (figure comment, we stress that all-dielectric metasurfaces operating
3(g)). For such a U-shaped SRR with the dimensions L1 = 220 at visible wavelengths can be advantageously designed using

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Rep. Prog. Phys. 81 (2018) 026401 Review

titanium dioxide (TiO2), which features a relatively high


refractive index (n > 2.3) in the entire visible spectrum and,
unlike silicon, negligible absorption [132].

3.2.  V-antenna metasurfaces

In connection with the derivation of the generalized laws


of reflection and refraction by Yu et al [27], the concurrent
realization of interface discontinuities was based on ED-only
metasurfaces, constructed by a periodic arrangement of
V-shaped metallic nanoantennas, as sketched in figure 4(a).
This type of nanostructure is characterized by the length h
and angle Δ, and in the wavelength range of interest it fea-
tures two resonances (termed symmetric and antisymmetric
with respect to the current flow in the two arms) that can be
excited by orthogonally polarized light. In accordance with
the discussion in section 2.1, the V-antenna can be described
by a diagonal polarizability tensor in the (â, ŝ) basis, but in
order to maximize the off-diagonal elements the V-antenna
is rotated 45° relative to the incident polarization (along the
y-axis). As a proof-of-concept experiment, the metasurface
was realized in the infrared regime at λ = 8 μm (and later
extended to the near-infrared range [134]) with the linearly
varying phase being discretized into eight steps along the
x-axis, as seen in the top-view image of the metasurface in
figure  4(b). The V-antennas (or nanorods) are 50 nm thick,
made of gold, and are fabricated on a silicon wafer with
dimensions carefully chosen so that the amplitude of cross-
polarized scattered light is roughly the same for all the meta-
atoms, while the phase increases in steps of π/4 along the
x-axis. It is worth noting that the latter four meta-atoms in
the super cell are equivalent to the first four elements, just Figure 4.  (a) Top-view of metallic V-antennas with colors
rotated 90° in the xy-plane to induce an additional π-phase indicating the current distribution of the symmetric (blue) and
antisymmetric (pink) mode. (b) Scanning electron microscopy
shift (see equation  (11)). For normal incident y-polarized (SEM) image of fabricated metasurface featuring a linear phase
light, figure 4(c) displays the transmitted far-field intensity of gradient for cross-polarized light along the x-axis with period Λ. (c)
the total (black) and cross-polarized (red) light as a function Measured far-field intensity as a function of angle and periodicity
of angle and metasurface periodicity Λ. As seen, it is only (Λ = 17, 19, 21 μm) for the total (black) and cross-polarized (red)
the cross polarized light that feels the linear phase gradient transmitted light when the incident light is y-polarized and normal
to the metasurface. The working wavelength is λ = 8 μm. (d)
and, thus, in accordance with the theory of blazed gratings, Sketch of super cell of Babinet-inverted V-antenna metasurface
is being redirected into the −1 diffraction order. Moreover, it featuring a linear phase gradient for the cross-polarized light. The
is seen that the fraction of light being anomalously refracted image shows simulations of the transmitted cross-polarized electric
compared to directly transmitted increases with decreasing field of the individual V-apertures in a gold film at the wavelength
periodicity Λ, which is a natural consequence of a closer λ = 676 nm. ((a)–(c)) From [27]. Reprinted with permission from
AAAS. (d) Reprinted by permission from Macmillan Publishers
packing of the V-antennas. That said, it should be noted that Ltd: Light: Science & Applications [133], Copyright (2013).
the absolute conversion efficiency, defined as the power in
cross-polarized light to the incident power, is only on the cross-polarized light [133]. The validity of this line of thought
order of a few percent [135]. is illustrated in figure 4(d), which shows juxtaposed transmit-
In the above example of the performance of V-antenna ted light from eight different apertures in a 30 nm thick gold
metasurfaces, it is clear that the cross-polarized component of film at the wavelength λ = 676 nm, thus verifying the possi-
the transmitted light is noticeably weaker than the co-polar- bility to induce a linear phase-gradient on the cross-polarized
ized one. Since the co-polarized component does not feel light, with the additional benefit that the ratio of cross- and
the phase-gradient, it is typically an undesirably background co-polarized light is roughly one order of magnitude higher
field that complicates measurements or the practical utility than for V-antenna metasurfaces [133]. As a final note, we
of the designed meta-device. In an attempt to increase the would like to mention that the low conversion efficiency of
ratio between cross- and co-polarized transmitted light, it has either V-antenna or -aperture metasurfaces can be considera-
been suggested to utilize Babinet’s principle, stating that the bly enhanced by a unification of the two types of metasurfaces
complementary configuration of an opaque metal film with into a single bi-layer structure with strong interlayer coupling.
V-apertures also work as a phase-gradient metasurface for Such a configuration has been realized at visible wavelengths

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Figure 5.  (a) Top-view SEM image of geometric metasurface consisting of 40 nm thick gold nanorods on an ITO coated glass substrate.
The inter-particle spacing is 400 nm, and the geometrically induced phase gradient is imprinted along the x-axis by rotating the nanorods in
steps of π/8. (b) Colormap shows the calculated (normalized) far-field intensity of RCP light in the substrate as a function of wavelength
and refraction angle when the LCP incident light impinges normally to the metasurface. Triangular markers indicate experimentally
measured anomalous refraction angles. (c) Top-view SEM image of an all-dielectric geometric metasurface for visible light with the linear
phase-gradient along the x-axis. Inset shows a side-view drawing of the metasurface. ((d), (e)) Measured far-field intensity at λ = 550 nm
for RCP ( |+) and LCP ( |−) incident light. (f) Microwave experiment of geometric metasurface placed atop a dielectric spacer and metal
back-reflector. Inset shows an image of the fabricated metasurface, with the dashed rectangle highlighting the boundary of the super-cell
within the metallic meta-atom is rotated in steps of π/6. The graph presents the fraction of light that is anomalously reflected for both RCP
(stars) and LCP (circles) incident light. ((a), (b)) Reprinted with permission from [136]. Copyright (2012) American Chemical Society.
((c)–(e)) From [137]. Reprinted with permission from AAAS. (f) [41] John Wiley & Sons. © 2015 WILEY-VCH Verlag GmbH & Co.
KGaA, Weinheim.

(λ  770 nm), demonstrating an experimental and simulated and observation angle when the LCP light impinges normally
conversion efficiency of  ∼17% and  ∼29%, respectively [71]. to the surface. In accordance with the dispersionless nature of
The (at first sight) paradox that the simulated result exceeds the phase gradient, it is seen that cross-polarized light is exclu-
the theoretical maximum value of 25% (see section 2.1) is due sively being anomalously redirected in the entire wavelength
to the finite, though subwavelength, thickness of the bi-layer range, with the angle of refraction being in agreement with
of 130 nm ∼ λ/6, thus leading to non-negligible retardation experimental measurements (triangular markers). The work in
effects and a break of the radiation symmetry. [136] does not state the conversion efficiency of the metasur-
face, but we speculate it is below 10%, which we base on the
relatively low density of nanorods (unit cell size is 400 nm)
3.3.  Geometric metasurfaces
with respect to the wavelength region, together with the fact
Whereas V-antenna and -aperture metasurfaces rely on reso- that the nanorod unit cell only features an ED response, thus
nant scattering of light, with the consequent result that the resulting in both reflection and transmission (one of which is
working bandwidth is limited due to dissimilar dispersion undesirable) and an inability to reach ∆φ = π .
of the different meta-atoms, geometric metasurfaces, on the In the strive towards the ultimate goal of real-life meta-
other hand, are dispersionless in the sense that the induced devices for efficient manipulation of light by phase-only
phase on the cross-polarized light is of pure geometric ori- engineering, plasmonic metasurfaces feature two significant
gin, cf. equation  (21). Having said that, it should be noted drawbacks, one being the unavoidable loss of electromagnetic
that the conversion efficiency may be strongly wavelength- energy to Ohmic heating in the metal nanostructures, while the
dependent, since it relies on the ability of the basic unit cell second hurdle relates to typical plasmonic materials, like gold
to function as an efficient half-wave plate, i.e, ideally we aim and silver, not being compatible with mature semiconductor
at |Mxx | = |Myy | = 1 and ∆φ = φxx − φyy = π (see equa- fabrication technologies [25]. As a way to (at least partially)
tion  (21)) . Within the concept of metasurfaces, the first circumvent these drawbacks, recent works have focused on
realization at optical wavelengths consisted of an array of all-dielectric metasurfaces consisting of nanostructured sili-
identical gold nanorods on an indium tin oxide(ITO) coated con [61]. Here, we would like to highlight a silicon-based
glass substrate that are rotated in steps of π/8 along the x-axis, geometric metasurface that works in transmission at a wave-
thus inducing a linear phase variation in this direction [136]. length of λ  550 nm (figure 5(c)) [137]. The metasurface
Figure 5(a) shows a SEM image of the fabricated metasurface, consists of subwavelength spaced silicon nanostripes for
while the colormap of figure 5(b) displays calculation of the which light of orthogonal polarizations acquires a phase dif-
transmitted cross-polarized light as a function of wavelength ference of ∆φ  π after propagation through the metasurface

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Rep. Prog. Phys. 81 (2018) 026401 Review

(see inset of figure  5(c)). As such, the working principle is


related to form birefringence [138], but it should be noted
that the 120 nm wide and 100 nm high nanostripes feature a
resonant response for x-polarization, hereby ensuring π-phase
retardation over a subwavelength thickness. The blazed grating
functionality is achieved by discretizing the geometric phase
in eight steps, as shown in figure 5(c), with the corre­sponding
measured diffraction patterns at λ = 550 nm displayed in
figure 5(d) and 5(e) for normal incident RCP and LCP light,
respectively. In accordance with theory, the two spin states
experience opposite slopes of the constant phase gradient,
thus resulting in cross-polarized light being redirected into
either  ±1 diffraction order. The noticeable power in the zeroth
diffraction order is due to |txx | = |tyy |, accordingly implying an
imperfect conversion of co- to cross-polarized light. In fact,
the conversion efficiency is estimated to  ∼20% [71], with the
limiting factors (besides |txx | = |tyy |) being reflection and the Figure 6.  (a) Image of microwave meta-reflectarray that features a
linear phase gradient on the reflection coefficient along the x-axis,
significant absorption in silicon at the working wavelength. with the inset showing a sketch of the basic unit cell consisting of
As the last example of geometric metasurfaces, we would a metallic H-shaped meta-atom atop a dielectric spacer and metal
like to pay attention to a metallic metasurface working in back-reflector (the unit cell size is 2.5 × 6 mm2). (b) Angular
reflection and realized in the microwave regime [41]. The resolved far-field intensity of reflected light when incident light is
metasurface is, in principle, a reflectarray consisting of a x-polarized and impinges normally to the metasurface featuring a
super cell periodicity of 50 mm. Solid line and open circles represent
metal film overlaid by a dielectric spacer and an array of cross- simulation and experimental results, respectively. The working
shaped meta-atoms (see inset of figure 5(f)) that are designed frequency is 15 GHz. (c) Unit cell of optical meta-reflectarray
so that rxx  −ryy near the frequency of 12 GHz. At the same consisting of an optically thick gold substrate overlaid by a
time, the small Ohmic losses in the microwave regime allow nanometer-thin glass spacer and a gold nanobrick. (d) Top-view of
for |rii | to approach one, thereby setting the scene for close to birefringent super-cell that anomalously reflects incident light to
opposite sides of the surface normal for x- and y-polarizations. The
100% conversion efficiency. The experimental measurements, design wavelength is λ = 800 nm and the unit cell size is Λ = 240
as displayed in figure  5(f) as a function of frequency, read- nm. ((e), (f)) Full-wave simulation of the reflected light for x- and y-
ily demonstrate a record-high conversion efficiency of >90% polarized normal incident light, respectively. ((a), (b)) Reprinted by
close to the design frequency. We note that a similar metasur- permission from Macmillan Publishers Ltd: Nature Materials [40],
face design can be realized at optical wavelengths without any Copyright (2012). ((c)–(f)) Reprinted by permission from Macmillan
Publishers Ltd: Nature Scientific Reports [78], Copyright (2013).
major degradation in the conversion efficiency that may still
reach 80% [139]. (to a lesser extent) a non-ideal phase gradient. For this reason,
the metasurface in figure 6(a) shows close to 100% efficiency,
3.4. Meta-reflectarrays
while the highest efficiency for similar configurations at opti-
cal and near-infrared wavelengths amounts to  ∼80% [140],
As evident from the above discussion, meta-reflectarrays pay though replacement of the metallic meta-atoms with silicon
an important role in realizing highly-efficient geometric meta- counterparts can push the efficiency towards 100% again [76].
surfaces for manipulation of CP light. Moreover, meta-reflec- Besides the ease of fabrication and high efficiency in
tarrays are also among the most efficient metasurfaces for manipulating the reflection phase, meta-reflectarrays may
control of linearly polarized light and particularly attractive show even greater control of the reflected light by engineer-
due to the simple design that only requires one step of lithog- ing of the reflection amplitude and phase for one polariza-
raphy. As a first experimental verification of the blazed grating tion or the reflection phases for two orthogonal polarizations
functionality, figure 6(a) displays a top-view image of a meta- simultaneously [78, 79, 141]. The latter property may lead to
surface designed to anomalously reflect x-polarized incident the design of birefringent metasurfaces with different opti-
light at the frequency of 15 GHz, with the inset illustrating the cal properties for orthogonal polarizations. As an example,
composition of the unit cell. By meticulously designing the figure 6(c) shows a sketch of a gold-glass-gold unit cell for
H-shaped metallic meta-atoms, the incident light experiences a birefringent metasurface working at the wavelength of
a constant phase gradient along the x-axis, thereby leading 800 nm, where the two widths of the top nanopatch can be
to diffraction into +1 order exclusively, as verified exper­ used to independently control the reflection phase of x- and
imentally by angle-resolved far-field measurements from a y-polarized light. Figure  6(d) displays a top-view image of
metasurface featuring a super cell period of 50 mm (figure a metasurface super cell that incorporates a linearly varying
6(b)). It is worth noting that this type of meta-reflectarrays phase (in steps of 60°) along the x-axis but the slope is of
manipulates the co-polarized light with (ideally) zero con- opposite sign for the two orthogonal polarizations, thus lead-
version to the cross-polarized component, while the limiting ing to a splitting of x- and y-polarized light into  ±1 diffraction
factors of the manipulation efficiency are Ohmic losses and order, respectively. The polarization splitter functionality is

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Rep. Prog. Phys. 81 (2018) 026401 Review

Figure 7. Huygens’ metasurfaces realized with ((a)–(c)) metallic meta-atoms for the microwave regime, ((d), (e)) three layers of
semiconductor-dielectric fillings for the mid-infrared regime, and ((f)–(i)) elliptically shaped silicon nanoposts for the optical frequency
range. (a) Sketch of unit cell consisting of a dielectric substrate with patterned copper traces on both the top and bottom side. The incident
light is y-polarized and propagates along the x-direction. (b) Photograph of part of the fabricated Huygens’ surface featuring a linear phase-
gradient along the y-direction, with insets showing the super cell on the two sides of the substrate. (c) Measured far-field intensity on a
logarithmic scale at the working frequency of 10 GHz. (d) Sketch of composite metasurface consisting of three layers separated by the
distance d in the propagation direction z for y-polarized incident light. The unit cell consists of blocks of AZO and silicon. (e) Simulation
of refraction of normal incident wave by metasurface featuring a linear phase gradient along the x-axis. The geometrical parameters are
l = h = 250 nm, d = 375 nm, and the working wavelength is λ = 3 μm. (f) Sketch of hexagonal unit cell, with the amorphous silicon
nanoposts being characterized by the parameters (Dx , Dy , θ). (g) Sketch of working principle of birefringent metasurface where x- and
y-polarized incident light experience phase gradients of opposite sign. (h) SEM image of fabricated metasurface featuring 715 nm tall
nanoposts with diameters varying between 65 to 455 nm and lattice constant of 650 nm. The working wavelength is λ = 915 nm. (i)
Measured far-field intensity for x- and y-polarized light. ((a)–(c)) Reprinted figure with permission from [37], Copyright (2013) by the
American Physical Society. ((d), (e)) Reprinted figure with permission from [89], Copyright (2013) by the American Physical Society.
((f)–(i)) Reprinted by permission from Macmillan Publishers Ltd: Nature Nanotechnology [122], Copyright (2015).

visualized in figures 6(e) and (f), where it is readily seen that being dominantly refracted into +1 diffraction order (figure
reflected light propagates in opposite directions relative to the 7(c)). The fabricated metasurface features a manipulation effi-
surface normal for orthogonal polarizations. The theor­etical ciency of 86% at the frequency of 10 GHz. However, scaling
efficiency of the proposed polarization splitter is  ∼80%, of the design principle to near-infrared and optical wave-
though proof-of-concept experiments show a reduced effi- lengths implies considerable degradation in the efficiency due
ciency of  ∼50% [78]. to the detrimental influence of Ohmic heating in the metallic
meta-atoms [142].
As an alternative approach in realizing Huygens’ metasur-
3.5. Huygens’ metasurfaces
faces, particularly relevant for the infrared regime, figure 7(d)
Metasurfaces that efficiently manipulate the phase of the sketches a three-layer phase-gradient metasurface for which
transmitted light can be realized in multiple ways, with the light manipulation, in continuation of the concept of optical
preferred implementation being dependent on the frequency nanoelements [19], is realized by unit cells with varying por-
regime of interest. Here, we discuss realizations in the micro- tions of positive and negative permittivity material, here real-
wave, infrared, and optical regimes that are based on metal- ized using silicon and aluminum-doped zinc oxide (AZO). We
lic, semiconductor, and dielectric meta-atoms, respectively. note that AZO is an attractive material at infrared wavelengths
Assuming a y-polarized wave that propagates in the x-direc- due to its plasmonic response and tunability of the optical
tion, figure 7(a) depicts the unit cell for a Huygen’s metasur- properties. The sketched composite metasurface is designed
face at microwave frequencies, which consists of a metallic for y-polarized incident light at a wavelength of 3 μm and
antenna at the top giving rise to an ED response and a bottom implements a constant phase-gradient along the x-axis, where
SRR that ensures a MD response. By properly adjusting both the two identical outer layers, separated by the distance
layers simultaneously, it is possible to find several unit cells 2d = 750 nm, feature out-of-phase (polarization) currents,
with the zero-reflection condition but different phases for the hereby creating an effective magnetic response, with the inner
transmitted light, thereby realizing the necessary ingredients layer producing the electric response [38]. The functionality
for a phase-gradient metasurface. Figure 7(b) shows a photo- of the composite metasurface is verified numerically (figure
graph of a fabricated metasurface that incorporates a constant 7(e)), where more than 75% of the incident power is being
phase gradient along the y-axis, thus resulting in incident light anomalously refracted.

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Rep. Prog. Phys. 81 (2018) 026401 Review

As the third, yet very different, realization of Huygens’


metasurfaces, we discuss an all-dielectric approach that is
appealing at optical and near-infrared wavelengths. The meta-
surface consists of an hexagonal array of elliptically-shaped
amorphous silicon nanoposts atop a glass substrate, where the
diameters and orientation of the nanoposts (see figure  7(f))
can be used to independently control the transmission phase
of two orthogonal polarizations simultaneously, thus creat-
ing a birefringent response at will. It should be noted that the
height of the posts is on the scale of the free-space wavelength
and, as such, may be considered as Fabry-Pérot waveguide
resonators for which orthogonally polarized modes experi-
ence different effective indexes. To be in line with section 3.1,
however, we note that each nanopost may also be viewed as
a high-permittivity resonator featuring precisely tailored ED
and MD responses, so that light is scattered in the forward
direction [122]. Moreover, we emphasize that the coupling
between the different nanoposts is weak, hereby underlining
that the posts can also be arranged into a more conventional
square lattice arrangement [120]. As a way of example, the
all-dielectric metasurface is realized at the wavelength of Figure 8.  (a) Sketch of metamirror super cell that incorporates a
915 nm using 715 nm tall nanoposts in a hexagonal array of linear phase gradient along the x-axis at 5 GHz. The unit cell size
lattice constant 650 nm. Note that the lattice constant is cho- is Λ = 14.4 mm. (b) Calculated reflectance and transmittance as
sen small enough to avoid diffraction and, thus, function as a a function of frequency for the metamirror in (a). Insets show the
magnitude of reflected and transmitted magnetic field for incident
metasurface for close-to-normal incident light. In connection light propagation along the  ± z-axis at 5 GHz. ((a), (b)) Reprinted
with the discussed birefringent meta-reflectarrays, we here figure with permission from [92], Copyright (2015) by the
present the same functionality of splitting x- and y-polarized American Physical Society.
light by phase-gradient metasurfaces imprinting a linear phase
with opposite slopes for orthogonal polarizations (see working showing the calculated reflectance and transmittance as a
principle in figure 7(g)). A top-view of part of the fabricated function of frequency. In line with the property of metamir-
metasurface is shown in figure  7(h), and the associated far- rors, the metasurface is close to being transparent for most
field diffraction patterns, as displayed in figure 7(i), verify the frequencies. Only close the the design frequency at 5 GHz
splitting of x- and y-polarized light into  ±1 diffraction order, do we observe considerably light-matter interaction, resulting
respectively. We stress that despite slight fabrication imperfec- in 6% transmitted light and 86% being anomalously reflected
tions, the experimentally measured manipulation efficiencies (see inset of figure 8(b)). It is worth noting that the presented
are above 70% for both polarizations. Finally, we note that the metasurface shows almost the same behaviour for  ± z-propa-
same level of manipulation efficiency has also been reached in gation of light (inset of figure 8(b)), which, see equation (34),
a, one might say, complementary metasurface design consist- indicates a relatively weak magnetoelectric response relative
ing of a square array of nanodisks of the same size, hereby to the ED and MD contributions. As a final comment, we note
creating a polarization-independent response, where the con- that metamirrors can also be realized using all-dielectric meta-
trol of the transmission phase is achieved through variation of atoms [145] and, hence, scalable to the near-infrared and opti-
the lattice period [143, 144]. cal regimes [146].

3.6. Metamirrors 3.7.  A note on the size of metasurface unit cells

With metamirrors, we come to the class of metasurfaces From the above discussion of realizable metasurfaces, it is
featuring resonant electric, magnetic, and magnetoelectric evident that the view of metasurfaces as interface discontinui-
responses that are tailored in such a way that transmission is ties with effective surface responses is a somewhat idealiza-
suppressed, while the reflection phase is meticulously con- tion, since many realizations, particularly dielectric Huygens’
trolled. As a way of realization in the microwave regime, metasurfaces, feature nonnegligible thicknesses and unit cell
figure  8(a) displays a drawing of a super cell consisting of sizes compared to the operation wavelength. The effect of
six metallic Ω-type meta-atoms that imprint a constant phase retardation due to the finite thickness of the unit cell is typi-
gradient on the reflection coefficient along the y-axis for cally managed automatically, as most metasurface designs
−z -propagating, x-polarized incident light. The electric and are based on full-wave numerical simulations. The influence
magnetic responses of each unit cell can be engineered by the of the finite width of the unit cell, on the other hand, is the
straight and loop section of the meta-atoms, respectively. The origin of spatial dispersion [147, 148], which might degrade
functionality of the proposed metamirror has been verified the performance of the metasurface for off-normal incident
both numerically and experimentally [92], with figure  8(b) light. Moreover, in order to avoid a square-array metasurface

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Rep. Prog. Phys. 81 (2018) 026401 Review

Figure 9.  (a) Artistic view of a plasmonic nanorod-based metasurface functioning as a QWP, together with a SEM image of a similar
structure with array periodicity of 240 nm and 190 nm along the x- and y-direction, respectively. (b) Measurements of the DoLP and AoLP
as a function of wavelength for CP incident light on the metasurface in (a). (c) Illustration of a metallic V-antenna metasurface that redirects
part of the incident light and converts the polarization from linear to circular. (d) Dielectric meta-reflectarray (see inset) that functions
as a half-wave plate at near-infrared wavelengths. The graph shows the measured (solid) and simulated (dashed) polarization conversion
efficiency, |rcr |2 /(|rco |2 + |rcr |2 ), where rco and rcr are the reflection coefficients of the co- and cross-polarized light, respectively. (e) Sketch
of a unit cell of a bianisotropic Huygens’ metasurface that is designed to function as a polarization rotator at microwave frequencies. (f)
Measured amplitude of cross-polarized transmission coefficient as a function of frequency and angle of incident linear polarization θ
measured from the x-axis. ((a), (b)) Reprinted with permission from [150]. Copyright (2013) American Chemical Society. (c) Reprinted
with permission from [157]. Copyright (2012) American Chemical Society. (d) Reprinted with permission from [76]. Copyright (2014)
American Chemical Society. ((e), (f)) Reprinted figure with permission from [39], Copyright (2014) by the American Physical Society.

to function as a diffraction grating, the angle of incidence θi polarized. The quarter-wave plate (QWP) functionality is par­
(measured from the surface normal) must be smaller than ticularly simple to realize since ∆φ = π/2 can be achieved
θmax = sin−1 (λ/Λ − 1), where Λ is the unit cell width and λ with ED-only metasurfaces, such as arrays of metallic
is the wavelength. In other words, for operation of the meta- nanorods [149–151] or the complementary configuration of
surface with close-to-normal incident light, it should satisfy slits in a metal film [152–156]. The QWP response is achieved
Λ < λ, while for grazing incident light the criterion becomes by designing nanorods or slits that have oppositely detuned
Λ < λ/2. resonances with respect to the operation wavelength for
orthogonal polarizations, hereby creating a phase difference
between light scattered by the two polarizations. One exam-
4.  Applications of metasurfaces ple is depicted in figure  9(a), where each unit cell consists
of two orthogonally-oriented silver nanorods that are detuned
Metasurfaces have been utilized in a wide range of applica-
by ∆φ = π/2 , but otherwise show similar dispersion, thereby
tions, ranging from flat and compact versions of conventional
leading to a broadband QWP operation.
optical elements, via metadevices tackling specific appli-
The particular configuration in figure 9(a) is designed for
cations, to control of enhanced nonlinear processes. Here,
visible light, and the QWP functionality is probed by meas-
we try to give an overview of the many, yet very different,
uring the degree and angle of the linear polarization (DoLP
applications.
and AoLP) in transmission for CP incident light (figure 9(b)).
The DoLP, though not perfect, demonstrates the weak wave-
4.1.  Flat optical elements length dependence between λ ∼ 620–830 nm, while the AoLP
signifies that |txx | = |tyy | for most wavelengths. In relation to
4.1.1. Wave plates.  Homogeneous metasurfaces, defined conventional QWPs, we note that the wavelength-dependent
by an array of identical unit cells, represent a subclass of AoLP corresponds to varying fast and slow axes, with λ  670
metasurfaces that cannot change the wavefront of the inci- nm representing the situation of optical axes coinciding with
dent light, but may be able to control the polarization by a the nanorod axes (i.e. AoLP = 45◦ ). As a different realization
properly engineered anisotropic response. For example, of QWP, figure 9(c) displays a drawing of a V-antenna meta-
metasurfaces featuring the reflection or transmission matrix surface consisting of two super cell units that are offset along
M = diag(Mxx , Myy ) function as quarter- and half-wave plates the x-direction by d = Λsc /4, where Λsc is the super cell perio-
when |Mxx | = |Myy | and the phase difference ∆φ = φxx − φyy dicity. Each super cell features a constant phase gradient, thus
is π/2 and π, respectively, and the incident light is circularly leading to cross-polarized light being redirected into the first
√ √
or diagonally (i.e. Ei = 1/ 2(1, ±i)T or Ei = 1/ 2(1, ±1)T ) diffraction order. The difference in rotation by 45° for mutual

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Rep. Prog. Phys. 81 (2018) 026401 Review

V-antennas and the offset d, however, ensure that cross-polar- rotator has been realized for operation at 10 GHz, and fig-
ized light from the two super cells are orthogonally polarized ure 9(f) displays the measured transmission amplitude of the
and with a phase difference of ∆φ = π/2 . Importantly, since cross-polarized light as a function of frequency and polariza-
the phase difference ∆φ is achieved by geometrical means, tion angle of the incident (linearly polarized) light. In line
this type of QWP is intrinsically broadband. The metasur- with equation (39), the transmission is close to unity (0 dB)
face has been realized in the infrared regime, demonstrating and independent of the angle of the linear polarized light at
good QWP functionality in the wavelength range 5–12 μm the design frequency, while the metasurface demonstrates a 3
with a maximum conversion efficiency of  ∼10% near λ = 8 dB-bandwidth of  ∼9%.
μm [157]. We emphasize that the two QWP metasurfaces of
figures 9(a) and (c) are (in the lossless and ultrathin approx­ 4.1.2. Lenses and reflectors.  In conventional optical sys-
imation) limited to manipulate 50% and 25% of the incident tems, light is focused by either dielectric lenses or parabolic
light, respectively, due to symmetric radiation into the two reflectors that, on the scale of the wavelength, are bulky and
half spaces. Only by utilizing more complex metasurfaces, curved components, thus preventing straightforward minia-
like meta-reflectarrays and Huygens’ metasurfaces, can the turization. Metasurfaces, on the other hand, represent flat and
polarization conversion approach 100% [158]. For example, subwavelength-thin devices that can achieve the same func-
plasmonic meta-reflectarrays have shown QWP functionality tionality by incorporating a parabolic transmission/reflection
with theoretical efficiency above 80% [159] and  ∼90% [160] phase, i.e.
around λ = 800 nm and λ = 1550 nm, respectively, and an
2π  2 
efficiency that will steady increase for designs at lower fre- φ(x, y) = x + y2 + f 2 − f ,
(40) λ
quencies. Also, we emphasize that meta-reflectarrays may
show broadband functionality, which can be achieved by where we have assumed the metasurface to lie in the xy-
proper compensation of the dispersion of the meta-atoms by plane, and f is the focal length. Since focusing is of paramount
the phase accumulation in the dielectric spacer [161, 162]. importance in practically any setup, it is also a functionality
The simplicity, high efficiency, broadband response, and that has been realized with many different types of planar
full phase control with meta-reflectarrays have also rendered configurations, comprising early work on nanohole arrays in
these metasurfaces attractive for half-wave plate (HWP) func- metal films [170, 171] and arrays of plasmonic slit waveguides
tionality. The ability to produce orthogonally polarized light [172, 173]. However, recent progress is related to wavefront
upon reflection was already shown in 2007 at microwave fre- engineering with metasurfaces, which includes focusing by
quencies [163] and later extended to the visible [164, 165], V-antenna/aperture configurations [133, 135, 174], geomet-
near-infrared [166, 167], and mid-infrared regimes [168, 169], ric metasurfaces [137, 175], meta-reflectarrays [176, 177],
though accompanied by slightly reduced efficiencies due to metallic [178, 179], semiconductor [89] and dielectric [120,
Ohmic losses. Here, we would like to highlight a dielectric- 180, 181] Huygens’ metasurfaces, and metamirrors [92, 146].
based meta-reflectarray in which the meta-atoms are made of Here, we review some of these works, while also addressing
silicon (see inset of figure 9(d)), thereby considerably reducing the important topic of achromatic lenses and metasurface dou-
the level of absorption within the metasurface for near-infra- blet lenses corrected for monochromatic aberrations. Starting
red applications. The metasurface in figure 9(d), consisting of with V-antenna metasurfaces, figure 10(a) conveniently illus-
a silver back-reflector, 200 nm PMMA spacer, and an array trates the principle of meta-lenses, where the dimensions of
of silicon nanopatches, shows a practically perfect conversion the meta-atoms are varied in the radial direction so to achieve
of the incident light to the cross-polarized component within a parabolic phase profile. As a consequence of the difficulty in
the wavelength range 1420–1620 nm, while the associated realizing meta-atoms with fully independent scattering ampl­
reflectance is measured to be above 97% within this band- itudes and phases, the continuously varying phase profile is
width [76]. We note that similar efficient polarization control conventionally approximated by a step-like function, where
can also be reached in transmission using all-dielectric meta- the phase takes on a finite number of values, thus making the
surfaces, similar to the one sketched in figure 7(f). As a last metasurfaces consist of a series of concentric rings in which
example of polarization control with metasurfaces, we would the metasurface is locally homogeneous.
like to discuss the unique properties offered by bianisotropic Despite the step-wise approximation to the true phase pro-
surfaces. Particularly, we focus on the transmission matrix file of equation  (40), we note that the profile is not derived
  from paraxial approximations and, as such, metasurface
0 −1
(39) t+ = , lenses do not for normal incident light suffer from mono-
1 0 chromatic aberrations. For off-normal incident light, aberra-
which represents a polarization rotator that rotates any inci- tions do exist, but it can be shown that spherical aberrations
dent linear polarization by 90◦—a conventional HWP only and image distortion remain suppressed [182]. Meta-lenses
achieves the same functionality for diagonally polarized light. based on geometric metasurfaces have the peculiar property
Figure  9(e) depicts a metallic Huygens’ metasurface that that the sign of the geometric phase changes with the hand-
works as a polarization rotator at microwave frequencies. The edness of the incident light. This property is shown by the
functionality can actually be achieved by three sheets only, but plasmonic metasurface in figure 10(b), which induces a para-
the present configuration adds an additional layer to increase bolic phase along the horizontal direction, thus functioning
the level of transmission and bandwidth [39]. The polarization as a cylindrical lens (i.e. light is being focused to a line). The

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Rep. Prog. Phys. 81 (2018) 026401 Review

Figure 10.  (a) SEM image of a plasmonic V-antenna metasurface that functions as a lens with focal length of 3 cm at λ = 1.55 µm (left),
together with the discretized phase profile (right) (b) Representative SEM image of a geometric metasurface consisting of gold nanorods
that behaves as a dual-polarity cylindrical lens for CP light. (c) Optical microscope images of the virtual focal plane, the metasurface,
and real focal plane for the metasurface in (b) for incident RCP (top row) and LCP (bottom row) light at λ = 740 nm. The scale bar is
50 μm. (d) SEM image of plasmonic meta-reflectarray that is designed to function as a parabolic mirror in one dimension at λ = 800
nm. (e) Measured efficiency and spot size (e−1 full width) for the metasurface mirror in (d). Inset shows the optical images of the focal
plane for three different wavelengths. (f) Sketch of the working principle of a achromatic metasurface lens (left) and a 1D realization that
uses aperiodic super cells consisting of coupled rectangular silicon meta-atoms on a glass substrate (right). (g) Experimentally measured
intensity at the focal length of ≃7.5 mm for the three wavelengths 1300, 1550, and 1800 nm. Inset shows a color-coded SEM image of
the fabricated achromatic metasurface lens. (h) Schematic illustration of focusing of on-axis and off-axis light by a metasurface doublet
lens corrected for monochromatic aberrations. (i) Simulated and measured focal plane intensity profiles of the metasurface doublet lens
for different incident angles. (j) Imaging with the metasurface doublet lens. (a) Adapted with permission from [135]. Copyright (2012)
American Chemical Society. ((b), (c)) Adapted by permission from Macmillan Publishers Ltd: Nature Communications [175], Copyright
(2012). ((d), (e)) Adapted with permission from [177]. Copyright (2013) American Chemical Society. ((f), (g)) Adapted with permission
from [183]. Copyright (2015) American Chemical Society. ((h)–(j)) Adapted by permission from Macmillan Publishers Ltd: Nature
Communications [184], Copyright (2016).

experimental proof of the dual-polarity property is conducted at the horizontal direction, thus resulting in 1D focusing of the
λ = 740 nm, and figure 10(c) shows optical images for RCP reflected light. The good focusing ability has been exper­
and LCP incident light at the virtual and real focal planes, imentally confirmed for several wavelengths, with the inset
hereby confirming that the metasurface behaves as a convex of figure 10(e) displaying optical images at the focal plane for
and concave lens, respectively. It should be noted that the λ = 650, 800, and 950 nm, while a more quantitative evalua-
V-antenna and geometric metasurfaces in figures 10(a) and (b) tion of the focusing reveals an efficiency of up to  ∼30% and a
demonstrate the principle of meta-lenses, but the associated full-width of the focusing spot on the order of the wavelength
focusing efficiencies are only  ∼1% and  ∼5%, respectively. (see figure 10(e)). We emphasize that the broadband behavior
Huygens’s metasurfaces, however, may feature considerably originates from the low quality factor associated with plas-
larger efficiencies, with, for example, an all-dielectric realiza- monic resonances.
tion demonstrating efficiencies of  ∼80% at near-infrared fre- The fact that the far-field response of phase-gradient meta-
quencies [120, 181]. surfaces follows diffraction theory [28] has the important
As complementary to conventional focusing of transmit- consequence that metasurfaces inherit the strong spectral
ted light by a dielectric lens, reflected light may be focused dispersion of conventional diffractive optical elements. The
by a parabolic mirror/reflector. The flat version of a parabolic dispersion may be an advantage in applications related to
reflector can be conveniently realized by meta-reflectarrays, separation of wavelengths, but for imaging purposes, where
one of which is exemplified in figure  10(d) for focusing the diffractive nature of meta-lenses implies a change in focal
around λ = 800 nm. The metasurface, consisting of an array length proportional to 1/λ, the dispersion results in strong
of gold nanopatches atop a thin dielectric spacer and gold chromatic aberrations. Recently, several efforts have been
film, imposes a parabolic phase on the incident light along dedicated to approach this problem by either dispersive phase
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Rep. Prog. Phys. 81 (2018) 026401 Review

compensation using metasurfaces with unit cells consisting of Moreover, the metasurface doublet lens shows superior imag-
multiple meta-atoms [183, 185, 186], birefringent unit cells ing performance over a wide field of view (figure 10(j)).
with equal focal length for orthogonally polarized light at two
different wavelengths [187], or metasurface designs based 4.1.3.  Spiral phase plates.  Vortex beams are a set of beam-
on filter circuit theory [188] or the principle of holography like solutions to the paraxial wave equation that are charac-
[189]. Of these different approaches, the utilization of com- terized by a doughnut-shaped intensity profile and a spiral
plex unit cells, thus featuring more geometrical parameters to wavefront with the phase dependence exp(ilθ), where θ is the
control the phase response at multiple wavelengths simulta- azimuthal angle in the plane perpendicular to the propagation
neously, seem most attractive with respect to versatility and direction and l is an integer, known as the topological charge,
quality of the focal spot. The left inset of figure  10(f) illus- that describes the number of twists within one wavelength.
trates the working principle of an achromatic meta-lens (in We note that vortex beams have found usage in many different
which incident light of different wavelengths is focused to the applications, which is a consequence of its unique vectorial
same point), while the right inset represents a realization of an nature and the fact that the spiral wavefront is a manifestation
all-dielectric cylindrical meta-lens that focuses three differ- of the photons carrying orbital angular momentum. For exam-
ent near-infrared wavelengths to the same focal point [183]. ple, the possibility to tightly focus vortex beams and generate
Here, the two widths of the rectangular resonators (WL and unique focal distributions can be advantageously exploited in
WR) and the separation g are the free parameters that allows high-resolution imaging [191, 192] or in optical particle trap-
one to engineer the transmission phase at the wavelengths ping/manipulation [193], while the orbital angular momentum
1300, 1550, and 1800 nm simultaneously, keeping the period property represents a new optical degree of freedom that can
and resonator height fixed at S = 1000 nm and h = 400 nm, increase the bandwidth in optical communication systems,
respectively. Based on numerical simulations of a multitude including within quantum information processing [194]. Irre-
of (WL,WR,g) combinations, a 600 μm wide meta-lens with spective of the application, however, one needs to generate
focal length of f = 7.5 mm has been realized (see inset of the vortex beam, which is typically done directly by the light
figure  10(g)), and figure  10(g) displays the measured inten- source (i.e. laser) or by an optical component that converts
sity at the focal distance at the three wavelengths. Taking into a Gaussian input beam to a vortex beam [195]. The latter
account that the numerical aperture (NA) is 0.04 (i.e. weak approach is readily realizable with metasurfaces, as exem-
focusing), the lens actually produces an almost diffraction- plified by the design of hologram-based fork-gratings [196]
limited spot, with focusing efficiencies of  ∼15, 10, and 21% and spatially-varying linear polarizers [197]. The most sought
at the three wavelengths. Overall, the meta-lens demonstrates approach, however, is concerned with the implementation of
the possibility to focus spectrally separated wavelengths to the azimuthally-varying phase
the same spot. However, it should be emphasized that wave-
lengths of light deviating from the designed ones feature vary- φ(x, y) = lθ(x, y) = l tan−1 (y/x),
(41)
ing focal lengths, meaning that no, so far, realized meta-lenses which represents the flat version of a spiral phase plate with
can image spectrally-broad sources without noticeable chro- topological charge l. This type of phase profile has been dem-
matic aberrations. onstrated from the visible to the terahertz regime by using
Aside from the comparable or even superior performance V-antenna/aperture metasurfaces [27, 198, 199], geometric
than conventional lenses in terms of point-to-point inter- metasurfaces [44, 136, 200–202], meta-reflectarrays [76], and
connection scheme at normal incidence, the meta-lenses dielectric Huygens’ metasurfaces [122, 129, 143, 203].
mentioned above are suffering from severe monochromatic Figure 11(a) illustrates the basic working principle in which
aberrations for off-normal incident light, in particular for a Gaussian incident beam is transformed to a vortex beam of
lenses with high-NA, resulting in small field of view and poor l = 1 by a metasurface implementing (in a discrete number
imaging capabilities [190]. To correct the monochromatic of steps) a 2π phase variation in the azimuthal direction. The
aberrations and increase the field of view of meta-lenses, corre­sponding all-dielectric realization is shown in figure 11(b),
Faraon’s group proposed a metasurface doublet lens for the which consists of eight sectors of silicon nanobricks on top of
operation wavelength of 850 nm by cascading two metasur- a glass substrate, hereby introducing an additional π/4 phase
face plates that are patterned on two sides of a single transpar- shift between neighboring sections. The intensity of the trans-
ent substrate [184]. Here,the first metasurface functions as a mitted beam at a wavelength of λ = 1.55 μm is presented in
corrector plate and the second operates the main portion of figure  11(c), thus confirming the doughnut-shaped intensity
focusing, thereby significantly reducing the monochromatic profile, with the characteristic zero intensity in the core of the
aberrations (figure 10(h)). The metasurface doublet lens has beam arising from the phase singularity at the center of the spi-
been realized by using all-dielectric metasurface platform (i.e. ral phase. The topological charge, on the other hand, is probed
amorphous silicon nanoposts with different diameters that by interfering the transmitted beam with a co-propagating
are covered by the SU-8 polymer), and figure 10(i) shows the Gaussian reference beam, hereby creating a spiral-shaped inter-
simulated and measured focal plane intensity profiles of the ference pattern (see figure 11(d)). As a final comment, we note
metasurface doublet lens for different incident angles. The that the metasurface in figure 11(b) features a limited efficiency
doublet lens has a nearly diffraction limited focal spot for inci- of  ∼45% due to design and realization imperfections, though
dent angles up to more than 25◦ while the singlet exhibits sig- related designs based on silicon nano-posts (see figure  7(f))
nificant aberrations even at incident angles of a few degrees. have shown efficiencies above 95% [122].

18
Rep. Prog. Phys. 81 (2018) 026401 Review

that absorbing structures also find applications within camou-


flage and stealth technology [214, 215].
When considering absorbing configurations, one simple,
yet very powerful, approach is to utilize multilayer systems
that incorporate nanometer-thin lossy films in order to func-
tion as Gires-Tournois resonators [216–218]. These systems
can be realized without the use of lithography, thus extend-
ing large areas, while the strong index contrast between
the surrounding medium and the lossy layer(s) makes them
insensitive to the polarization and angle of the incident light.
Nevertheless, since multilayer systems are homogeneous in
the plane and absorption occurs due to propagation in the lay-
ers, these configurations cannot be considered as metasurfaces
and will not be considered further in this review. Metasurface
absorbers, on the other hand, are typically characterized by
unit cells featuring single- and multi-resonant design, which
Figure 11.  (a) Illustration of a metasurface-based spiral phase plate
that converts an incident Gaussian beam into a vortex beam with translates into narrowband and broadband absorption, respec-
helical wavefront. (b) SEM image of an all-dielectric metasurface tively. In order to keep the present section  relatively com-
that implements a 2π phase-variation (along the polar angle) in pact, we limit the remaining discussion to few representative
8 steps at λ = 1.55 μm, with (c) displaying the doughnut-shaped examples of broadband absorption by metasurfaces, hence
intensity distribution of the transmitted beam. (d) Recorded image disregarding work on narrowband absorbers that, otherwise,
of a spiral-shaped intensity pattern arising from interference
between the transmitted beam and a co-propagating Gaussian are interesting with respect to sensing applications [219] and
reference beam. ((a)–(d)) Reprinted with permission from [129]. thermal emitters [220, 221]. For a more detailed discussion
Copyright (2015) American Chemical Society. on light absorption by nanostructured materials, we refer to
dedicated review papers [222–224].
Coming to the end of this subsection, we have discussed
and exemplified how the different categories of metasurfaces 4.2.1. Broadband absorbers using multi-resonances.  Intui-
can be employed to realize compact (i.e. subwavelength- tively, metasurfaces based broadband absorbers can be realized
thin) versions of some of the most widely used optical comp­ by properly designed unit cells featuring multi-resonances.
onents. The list of functionalities is, however, far greater and, One example is depicted in figure 12(a), where the broadband
in principle, only limited by your imagination and potential absorption is achieved by mixing multiple resonances via
relevance. This point will become more evident in the fol- carving the top thin metal film of an MIM multilayer stack
lowing sections, but of other flat components, not explicitly into the format of the so-called crossed trapezoid arrays [225].
discussed in the preceeding text, we mention axicons for the Due to the crossed symmetric arrangement, the fabricated
generation of non-diffracting Bessel beams [37, 135, 137] absorber yields broadband and polarization-independent reso-
and magnetic mirrors for maximizing the electric field at the nant light absorption over the entire visible spectrum (400–
surface [203–206] or for creation of low-profile planar micro- 700 nm) with an average measured absorption of 0.71, shown
wave antennas [207]. in figure 12(b). Compared with the crossed-grating structures,
the measured absorption is much broader and flatter, which
4.2.  Broadband absorbers is ascribed to the multiple adjacent plasmonic resonances
within the visible wavelength range supporting by the unit
The inherent Ohmic losses associated with plasmonic nano- cell. Besides designing particular structure featuring multiple
structures and metasurfaces are often considered detrimental resonances, an alternative is to integrate multi-sized resona-
to device performance. However, the unavoidable absorption tors parallel in the same plane within a supercell [226–228]. It
of light may in certain applications be a distinct advantage, should be noted that the feature sizes of the constituent reso-
particularly within the field of photovoltaics. For example, nators should have relatively small differences between each
plasmonic absorption may reduce the size of the semiconduc- other, thus several adjacent narrow absorption bands can mix
tor absorbing layer in solar cells [208], or harvest solar energy into one broad absorption band; otherwise, one can only obtain
below the band gap of the semiconductor by injection of ener- multiband absorbers when significant differences exist in size
getic (so-called, hot) electrons, generated by non-radiative between neighboring resonators. For this type of horizontal
decay of plasmons in metal nanostructures, into the conduc- super cell integration, the number of resonances supported
tion band of the semiconductor at the metal-semiconductor within the same unit cell is limited due to the mode competi-
interface [209–211]. Also, the technology of solar thermopho- tion and finite absorption cross section of each resonator, thus
tovoltaics, in which the solar spectrum is first absorbed and limiting the absorption efficiency. Another way to expand the
then converted to narrowband thermal emission at the band absorption band is to vertically stack different-sized resona-
edge of the photovoltaic cell [212, 213], can greatly benefit tors together within the same unit cell size [229–234]. Com-
from plasmonic configurations that either absorb light in a paratively, vertical integration of the resonators does not have
broad or narrow wavelength range. Finally, it is worth noting a limitation on the number of integrated resonators. Hence,

19
Rep. Prog. Phys. 81 (2018) 026401 Review

4.2.2. 
Nonresonant broadband absorbers. Though the
multi-resonant metasurfaces are good candidates in realiz-
ing broadband absorption, the bandwidth is still necessar-
ily limited owing to the resonant nature of surface plasmon
excitations involved. Therefore it is more desirable to have
nonresonant absorption. Nonresonant (broadband) absorption
has been demonstrated with plasmonic composite metamat­
erials involving a nanostructured metallic layer embedded in
di­electric layers [237, 238], and optical analogues of black
holes based on metamaterials [239, 240] and GSP modes
[241]. However, the involved metamaterials are often suffer-
ing from complicated three-dimensional (3D) structure and
consequently differently in fabrication. Recent progress is
related to nonresonant light absorption with pure metal meta-
surfaces, which utilizes ultra-sharp convex metal grooves via
adiabatic nanofocusing of GSP modes excited by scattering
off subwavelength-sized wedges [242–244]. Figure  12(c)
conveniently illustrates the 1D array of grooves in gold for
nonresonant absorption by adiabatic focusing of GSP modes
[242]. For subwavelength array periods and p-polarized inci-
dent light (the electric field is perpendicular to the groove
direction), GSP modes will be excited and propagate inside
the grooves towards the bottom without any reflection once the
regime of adiabatic nanofocusing is realized throughout
the groove due to small variations of the GSP propagation con-
stant. To remove the polarization-selective absorption of 1D
groove arrays, 2D arrays of crossed grooves were implemented
with focused ion-beam (FIB) milling, which have relatively
Figure 12.  (a) Sketch of plasmonic meta-reflectarray consisting of
trapezoidal-shaped 100 nm thick silver meta-atoms atop a 60 nm thin low structural anisotropy (see the inset of figure  12(d)). The
glass spacer and 100 nm silver film. The metasurface is designed fabricated 2D groove arrays show a remarkable suppression of
for broadband absorption of x-polarized incident light in the visible gold reflectivity below 13% for both polarizations in the whole
regime. (b) Measured absorption as a function of wavelength for investigated wavelength range of 450–850 nm (figure 12(d)).
x- and diagonal (i.e. 0◦ and 45◦) polarization when the unit cell
This reflectivity signifies an average absorption of 96% of
of the meta-reflectarray consists of two crossed trapezoidal meta-
atoms. Inset displays SEM image of the fabricated metasurface. (c) unpolarized light within this wavelength range in the absence
Schematic of the considered configuration for adiabatic focusing of of transmission for the 350-nm-period arrays of 400-nm-deep
GSP modes, showing the orientation of a groove array and incident grooves. Moreover, this approach can naturally be exploited
plane wave. (d) Reflectivity spectra of x-(solid lines) and y-polarized with other metals, for example, with nickel that, apart from
(dashed lines) light for crossed convex grooves of different depths H
being much cheaper than gold and having a much higher melt-
and periods Λ. (e) Schematic of a diffuse metasurface composed of
windmill shaped particles with random reflection phases illuminated ing temperature, features stronger plasmon absorption, promis-
by microwave waves, showing the occurrence of electromagnetic ing significantly lower reflectivity levels that can be fabricated
diffusion in the upper half-space. (f) The measured RCS reduction with more practical techniques, such as reactive-ion etching.
for various incident angles with horizontal polarization. The inset
shows the optical image of part of the fabricated sample. ((a), (b))
4.2.3.  Broadband absorbers with random metasurfaces.  In
Reprinted by permission from Macmillan Publishers Ltd: Nature
Communications [225], Copyright (2011). ((c), (d)) Reprinted by the aforementioned broadband absorbers, individual meta-
permission from Macmillan Publishers Ltd: Nature Communications atom effectively converts the incident wave into heat, thus the
[242], Copyright (2012). ((e), (f)) Reprinted by permission from reflected energy could be significantly reduced. However, the
Macmillan Publishers Ltd: Nature Scientific Reports [245], generated heat within the subwavelength structure inevitably
Copyright (2014).
limits the applications, for instance, hiding the objects from
radars. Diffuse reflection or low scattering is another useful
the absorption bandwidth of the constructed absorber can approach to this aim, since it diffuses the scattered energy and,
be much broader. Particularly, when the thickness of each thereby, suppresses the reflection, which can be regarded as an
dielectric and metallic slab is extremely subwavelength, alternative to realize broadband absorption. A simple example
the metal/dielectric multilayer system can be regarded as is illustrated in figure 12(e), where a low-scattering metasur-
hyperbolic metamaterials which supports slow-wave modes face operating in the microwave range is consisting of wind-
[231, 233, 234]. As a final comment, it should be mentioned mill-shaped units with randomly distributed reflection-phase
that highly-lossy plasmonic materials can replace the com- [245]. Because of the random reflection phases, the reflected
monly used gold/silver to realize broadband absorption with waves from each part of the metasurface will destructively
simple MIM configurations [235, 236]. interfere in all directions of the upper half-space, thereby

20
Rep. Prog. Phys. 81 (2018) 026401 Review

creating a low-reflection metasurface. In order to redistrib- nanodisk and nanohole arrays can be used to obtain high-
ute the scattering energy into all the directions, a large phase resolution images [261–264]. Specifically, such hybridized
range is usually required, while the magnitude of the reflec- plasmonic structures contain a metallic nanodisk suspended
tion efficient should approach unity, which is different from on top of a dielectric pillar and a complementary metallic
the typical absorbing metasurface where each meta-atom is hole as a back reflector. Thus the propagating surface plas-
required to reflect as low energy as possible. The metasurface mons supported by the holes couple with the localized surface
shows excellent broadband properties, where the radar cross plasmon resonances (LSPRs) in the disks. In this way, a high-
section (RCS) reduction is over 10 dB from 7 GHz to 14 GHz, resolution color printing technology at the diffraction limit
as shown in figure 12(f). Additionally, the low RCS proper- was reported, by depositing a thin layer of Au/Ag on hydrogen
ties are still maintained with the increased incident angle. Fol- silsesquioxane (HSQ) pillars atop a silicon substrate [261].
lowing this concept, a variety of random phase metasurfaces, With properly selected disk sizes, an image of Lena was pro-
mostly at microwave frequencies, have been demonstrated to duced, shown in figure 13(a). Remarkably, the resulting image
accomplish low-reflection [246, 247]; even at terahertz range closely reproduces the details of the original image down to
the broadband and wide-angle diffusion can be experimentally single-pixel elements, thus enabling color printing at a resolu-
maintained [248, 249]. Very recently, a GSP-based random- tion of  ∼100 000 DPI. Aluminum has also been adopted as
phase metasurface at a wavelength of 800 nm was demon- constituent material to enrich the color gamut [262–264], and
strated by Anders and co-workers [250], which convincingly to realize large-scale high-resolution color printing by using
shows the diffuse scattering of reflected light, with statistics nano-printing technology (NPT) [263].
obeying the theoretical predictions. High-resolution color printing can also be achieved using
GSP-based metasurfaces. As an example, figure 13(b) shows
a subwavelength plasmonic color orienting in a configura-
4.3.  High-resolution color printing
tion with gold nanodisks coupled to a continuous gold film
Colors are significantly important for the perception and iden- [265]. By tuning the size of nanodisks and the thickness of
tification of our surroundings due to their abilities in carry- the dielectric layer, the reflected color can be tuned. As such,
ing rich information. In principle, colors are mainly produced the optical image of the University of Southern Denmark logo
by the light scattering or partial absorption of materials. In reveals a high-quality color print in terms of high contrast,
nature, there are numerous species whose colors arise from high color uniformity, and high reproduction fidelity due to
the micro/nanostructure patterns of their skins, which selec- correct single-pixel color reproduction. Compared to other
tively diffract, reflect and scatter the light. Inspired by the plasmonic color nanostructures, the GSP-based color print-
natural colors, renewed attention has been drawn to the so- ing is insensitive to the incident angle, which is valuable in
called structural colors with well-designed micro/nanostruc- practical applications. Moreover, while the colors of most
tures for their great promise in a wide variety of fields such plasmonic nanostructures are sensitive to the surroundings,
as light modulators, light-emissive diodes, imaging sensor, the GSP nanostructure can endure a cover of transparent
and colored display devices [251–253]. Recently, artificial dielectric overlay without significantly influencing colors,
surfaces, on which the colors are generated via a resonant which is a direct result of the GSP field distribution that is
interaction between light and subwavelength nanostructures, almost entirely contained within the MIM structure itself. In
have emerged as metasurfaces for the realization of structural the right panel of figure 13(b), an optical microscope image is
colors [65, 254, 255]. In the following section, we will discuss shown to compare the colors of uncovered (left) and PMMA
recent advances in high-resolution color printing by metasur- covered (right) parts of the color printing, suggesting that
faces, and several kinds of representative metasurfaces that the overall color image remains except for a slight contrast
have excellent quality or special functionalities are presented. variation. Therefore, this GSP color device can be protected
To keep the present section compact, we are mainly focused with a transparent dielectric overlay without destroying the
on 2D high-resolution color printing, hence disregarding some colors, providing the sample with the chemical and mechani-
work on 1D grating colors [256, 257] and multilayer systems cal stability necessary for use in exposed ambient color print-
[216, 258, 259]. ing applications such as, for example, security certificates.
Similarly, Aluminum-based GSP structures have also been
4.3.1. Static color printing.  The color printing with sub- considered in this context [268]. In the context of printing new
wavelength resolution requires the juxtaposition of individual colors on a prefabricated GSP color substrate, recent work has
color pixels of dimensions smaller than the wavelength: that demonstrated ultrahigh-resolution printing with an unprec-
is, between 400 and 700 nm. However, industrial techniques edented resolution of 127 000 DPI over large areas using a
such as inkjet and laserjet methods are limited at sub-10 000 laser to induce morphology changes at the single-resonator
dots per inch (DPI) because of their micro-sized ink spots and level [269]. All primary colors can be printed with a speed of 1
accuracy in the positioning of multiple color pigments. By ns per pixel, and power consumption down to 0.3 nJ per pixel.
contrast, resonant metasurfaces enable subwavelength color As complementary to conventional subwavelength color
elements due to strong scattering and absorption. In par­ticular, printing by plasmonic metasurfaces, dielectric metasurfaces
plasmonic metasurfaces colors can even be printed with a may be tailored to produce colors with reduced mat­erial
resolution that beats the diffraction limit due to deep-sub- loss [270, 271]. One example of dielectric color printing
wavelength light localization [260]. For example, hybridized is depicted in figure  13(c), where each unit cell consists of

21
Rep. Prog. Phys. 81 (2018) 026401 Review

nano-imprinted sample shows distinct colors with high quality


(see the right panel of figure 13(c)). While dielectric metasur-
face color printing is really promising, significant challenges
remain to be addressed for practical use. For example, silicon
has very strong absorption in the visible light range especially
when the wavelength λ is smaller than 500 nm. Thus the sili-
con metasurfaces face severe challenges in producing distinct
color impressions, especially for the blue and purple colors.
To address this, TiO2 has been selected to replace silicon, and
consequently, distinct colors covering the entire visible spec-
tral range have been demonstrated very recently [272].
Polarization state is an intrinsic property of light, which
is uncorrelated with its intensity and wavelength, thereby
providing another degree of freedom to manipulate color
information. The polarization-dependent color printing could
double the information capacity by recording the color data
in different polarization states. Different from the polariza-
tion-insensitive color printing using circular-symmetric meta-
atoms, polarization-dependent color printing can be realized
with asymmetric meta-atoms, such as anisotropic nanocrosses
[267] and elliptical nanodisks [273], which respond dissimi-
larly to different polarization states. Figure 13(d) displays an
example of polarization-dependent color printing based on
subwavelength-spaced anisotropic cross-shaped aluminum
nanoantennas, which support two LSPRs for the vertical and
horizontal polarized light, rendering different colors. Each
anisotropic nanocross could work as a yellow color filter for
incident polarization along its short arms while being a blue
filter for incident polarization along the long arms. With the
controlled position and rotating angle of the nanocrosses,
active polarized images have been achieved (right panel of
figure  13(d)). When the light is polarized along one of the
principal axis, a brilliant yellow and blue LSP image emerges
Figure 13.  High-resolution color printing. (a) Individual plasmonic
pixels made of a metal disk (gold or silver) raised above a holey metal
that can be color switched by rotating the polarization of the
back-reflector by HSQ nanoposts. The resulting print of a photorealistic incident light by 90◦. In analogy to cross-shaped nanoanten-
test image that goes under the name of Lena is shown. (b) Gold nas, asymmetric cross-shaped nanoapertures can also create
nanodisk arrays supported by a continuous silica layer and by a gold polarization-switchable images [274].
metallic film acting as a back-reflector used to represent the logo of
Southern Denmark University. (c) Silicon nanodisk arrays used for
4.3.2.  Dynamically reconfigurable color printing.  The previ-
full-color image printing patterns realized using NIP. (d) Polarization-
dependent color printing with anisotropic cross nanoantennas. (a) ous discussions are mainly focused on static colors. However,
Reprinted by permission from Macmillan Publishers Ltd: Nature it is more desirable to have dynamically reconfigurable colors
Nanotechnology [261], Copyright (2012); © Playboy Enterprises, [277]. A good example of reconfigurable colors is shown in
Inc. (b) Reprinted with permission from [265]. Copyright (2014) figure 14(a), where a specially designed nanostructured plas-
American Chemical Society. (c) Reprinted with permission from [266].
Copyright (2015), AIP Publishing LLC. (d) Reprinted with permission
monic surface is in conjunction with high birefringent liq-
from [267]. Copyright (2012) American Chemical Society. uid crystals (LCs) [275]. Therefore the plasmonic field can
be modulated by the LCs, which is in turn controlled by an
silicon nanodisk patterned on top of silicon substrate [266]. external applied voltage, resulting in a large range of color
These silicon nanodisks were able to support HE1m leaky tenability. In combination with imprinted structures of vary-
modes, which depended on the diameter of the nanodisks, ing periods, a full range of colors spanning the entire vis-
resulting in wavelength-dependent reflection spectra, ena- ible spectrum has been achieved. Once a particular image
bling multicolor generation. In addition, the electric field has been printed, different color representations can be ren-
of HE1m is mainly concentrated around the nanodisks and dered by applying an external bias, paving the way towards
shows minor dependency on the gap, suggesting that the sin- dynamically reconfigure colors for reflective displays, shown
gle nanodisk can act as an individual pixel. Moreover, such in figure 14(b). Dynamic color tuning was also accomplished
silicon nanodisk patterns are quite compatible with exist- through controlled hydrogenation and dehydrogenation of the
ing CMOS technology and could be produced in large-scale constituent magnesium nanoparticles, which serve as dynamic
using NPT, superior to the present e-beam lithography (EBL) pixels [276]. Figure 14(c) schematically illustrates the work-
processing suffering from low throughput and high cost. The ing principle of this dynamic plasmonic color display, where

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Rep. Prog. Phys. 81 (2018) 026401 Review

afforded by magnesium nanoparticles, this dynamic display


has excellent reversibility and durability. Other approaches to
dynamically control the colors include using electrochromic
polymers [278] and bimetallic nanodots arrays [279].

4.4. Holograms

Holography, first developed in 1948 by Denis Gabor [280], is


a revolutionary 3D imaging technique to reconstruct the 3D
features of an object by scattering an incident coherent source
from an optically recorded interference pattern (hologram).
Owing to the computer-generated holography (CGH) [281],
holograms have gained numerous applications, such as wave-
front shaping and optical manipulation. However, the thick-
ness of conventional holograms usually remains comparable to
the wavelength since the phase modulation relies on the accu-
mulated phase through propagation. Worth still, their smallest
achievable pixel size is usually tens of the wavelengths for vis-
ible light, which suffers from issues of high-order diffraction
and twin-image. Metasurfaces enable exceptional control over
the light with surface-confined planar components, offering
the fascinating possibility of engineering the local amplitude,
phase and polarization at will, and thus are a good platform to
realize all types of computer-generated holograms. In this sec-
tion, metasurface-based holograms (metaholograms) are clas-
sified in terms of the method of phase realization: resonant
phase and geometric phase metaholograms.

Resonant phase metaholograms. Binary resonant


4.4.1. 
phase metaholograms have first been proposed by using lay-
ered nanostructures [282, 283]. Figure  15(a) shows a fishnet
metasurface consisting of an MIM layer stack with rectangular
holes, which is able to control simultaneously the amplitude
Figure 14.  Reconfigurable color printing. (a) The color appearance and phase of the transmitted field, yielding huge flexibility in
can be modulated dynamically by incorporating LCs in the near- transmission hologram design [282]. By carefully engineer-
field of the plasmonic resonances. (b) The resulting nanoimprinted ing the dispersion of apertures, coding of two different words
plasmonic color surface can be tuned by applying different
voltages. (c) Schematic of the plasmonic metasurface composed ‘META’ and ‘CGH’ has been demonstrated at different wave-
of hydrogen-responsive magnesium nanoparticles interacting lengths, λ1 = 905 nm and λ2 = 1385 nm, respectively. How-
with incident light. (d) Optical micrographs of the Minerva logo ever, due to the binary nature of the hologram, there is always
during hydrogenation and dehydrogenation for color erasing and a twin image and unwanted zero-order diffractions. It is worthy
restoring. ((a), (b)) Reproduced from [275]. CC BY 3.0.; ((c)–(d)) to point out that more complicated multicolor holograms can
Reprinted by permission from Macmillan Publishers Ltd: Nature
Communications [276], Copyright (2017). be achieved by extending the coding methods. One simple,
yet very powerful, approach is to combine multiple elements
the plasmonic metasurface is composed of hydrogen-respon- featuring totally different resonant wavelengths, thus different
sive magnesium nanoparticles. The dynamic behavior is holographic images can be reconstructed by addressing the inci-
enabled by the reversible chemical reaction of Mg in response dent wavelength [284, 285]. Nevertheless, as a consequence of
to hydrogen, that is, a metal-to-dielectric transition to form minimizing the crosstalk between different color images, the
magnesium hydride (MgH2). The performance of the dynamic efficiency of wavelength multiplexing holograms is inevitably
display with Minerva logo is presented in figure 14(d). When low, usually less than 1% [285]. As a realization of advanced
the hydrogen is loaded, the Minerva logo undergoes dynamic holograms, figure  15(b) displays an ultrathin (30 nm) planar
color changes and a series of abrupt color alterations take metasurface hologram at a wavelength of 676 nm, consisting of
place within 23 s. For example, yellow turns red, red turns an array of V-shaped nanoapertures, which could generate dis-
blue, and blue turns white. After a few minutes, all the col- crete eight-level phase distribution with a two-level amplitude
ors disappear, revealing a white surface instead of Minerva. modulation [286]. Due to the subwavelength-scale control of
By replacing the hydrogen stream with a stream of oxygen, the phase and suppressing the undesired co-polarized light in
this process is reversible, that is, the logo is gradually restored the cross-polarized images, ultra-thin, ultra-small holograms
to its original state, which takes 2224 s to complete. Because can be recorded, providing unprecedented spatial resolution,
of the unique hydrogenation/dehydrogenation kinetics low noise, and high precision of the reconstructed image. Since

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Rep. Prog. Phys. 81 (2018) 026401 Review

Figure 15.  Metaholograms. (a) Dual-wavelength binary holograms consisting of rectangular nanoapertures. (b) Visible metasurface
holography realized by V-shaped nanoapertures. (c) Polarization-multiplexing holograms based on meta-reflectarrays for linear polarization
states. (d) Polarization-switchable phase hologram that generates two arbitrary patterns for x- and y-polarized light based on silicon
nanoposts. (e) 3D holography consisting of subwavelength metallic nanorods with spatially varying orientations generates an on-axis jet
image upon normal incidence of CP light. (f) Highly-efficient reflective holograms employing geometric phase and MIM configuration. (g)
High-performance dielectric holograms for red, green, and blue wavelengths with record absolute efficiency employing TiO2. (h) Hybrid
multiplexing holograms with geometric metasurface for normal CP incident light in transmission. (a) [282] John Wiley & Sons. Copyright
© 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim. (b) Reprinted by permission from Macmillan Publishers Ltd: Nature
Communications [286], Copyright (2013). (c) Reprinted with permission from [287]. Copyright (2013) American Chemical Society. (d)
Reprinted by permission from Macmillan Publishers Ltd: Nature Nanotechnology [122], Copyright (2015). (e) Reprinted by permission
from Macmillan Publishers Ltd: Nature Communications [290], Copyright (2013). (f) Reprinted by permission from Macmillan Publishers
Ltd: Nature Nanotechnology [139], Copyright (2015). (g) Reproduced with permission from [132]. Copyright © National Academy of
Sciences. (h) [291] John Wiley & Sons. © 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

all the orders of diffraction fully contribute to the holographic that generates reflective hologram at visible wavelengths for
image, an overall efficiency of  ∼10% is achieved, which is linear polarization states (figure 15(c)) [287]. By utilizing the
about one order of magnitude greater than the existing meta- polarization-sensitive response of the gold cross nanoantennas,
material holograms [282, 283]. It is worth noting that major simultaneously encoding two holograms on the same metas-
limiting factors of efficiency here are Ohmic losses and low urface has been realized, with each image reconstructed by an
polarization conversion efficiency (see section 3.2). incident beam with polarization perpendicular to the other. The
As demonstrated in section  3.4, meta-reflectarrays play an functionality of polarization controlled dual images was veri-
important role in realizing high-efficiency metasurfaces. As fied experimentally, where the projected patterns transitioned
such, meta-reflectarray is a good candidate to realize efficient from ‘NTU’ to ‘RCAS’ with the polarization rotated from
holograms. Here, we would like to highlight a meta-reflectarray x- to y-direction. The measured efficiency at λ = 780 nm reaches

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Rep. Prog. Phys. 81 (2018) 026401 Review

18% at 15◦ incidence and drops down to 8.5% when the angle is To increase the efficiency, a reflectarray metasurface that
increased to 45◦. The efficiency for meta-reflectarray hologram introduced 16-level geometric phases was demonstrated to
can be further improved to  ∼50% at a near-infrared wavelength create holographic images [139, 292], where the MIM struc-
of 1550 nm, resulting from the decreased metal loss [288]. ture was optimized as a broadband half-wave plate main-
Though the efficiency of holograms can be increased to a taining high polarization conversion, shown in figure  15(f).
certain extent by meta-reflectarrays, it is still far from satisfac- Remarkably, this metahologram has a diffraction efficiency
tory, since the Ohmic losses of metals pose a severe issue, par­ of 80% at 825 nm and a broad bandwidth between 630 nm
ticularly in the visible frequency range. Recently, all-dielectric and 1050 nm with a high window efficiency larger than 50%,
metasurface holograms have got a rapid development due to ascribed to the antenna-orientation controlled geometric phase
their ability in addressing the efficiency issues and realizing profile combined with the reflectarrays for achieving high
Huygens’ metasurfaces [122, 144, 289]. In a recent paper polarization conversion efficiency. It should be emphasized
from Faraon’s group, a polarization-switchable phase holo- that this approach can be readily extended from phase-only to
gram that generates two distinct patterns for x- and y-polarized amplitude controlled holograms, simply by changing the size
light has been demonstrated by a dielectric metasurface [122], of the nanorods, thereby generating more complex holograms.
where elliptical amorphous silicon nanoposts provide com- As an alternative approach to realizing highly-efficient
plete control of polarization and phase in transmission (figure geometric phase metaholograms, particularly relevant for
15(d)). In this case, the word ‘Caltech’ is displayed for input x the visible spectrum, figure 15(g) shows a high-performance
polarization and an icon is displayed for input y polarization. dielectric hologram for red, green, and blue wavelengths
Additionally, the hologram features measured efficiencies with record absolute efficiency (>78%) [132]. As the basis of
of 84% and 91% for x- and y-polarized incident light at the di­electric metasurfaces, a common material, TiO2, was fab-
near-infrared wavelength of 915 nm. A similar highly-efficient ricated based on atomic layer deposition, thereby creating
polarization-insensitive metaholograms based on silicon has highly anisotropic nanostructures with spatially controlled
been realized by Wang et al [289], which produce grayscale orientations. The Harvard logo with high-resolution fine fea-
high-resolution images and transmit over 90% of light with a tures can be seen in the reconstructed images across the vis-
diffraction efficiency over 99% at a 1600 nm wavelength. It ible spectrum for the hologram with a design wavelength of
should be noted that the design approach of dielectric meta- 480 nm since the geometric phase is a wavelength-independ-
hologram is applicable to other wavelengths and, in particular, ent effect. Besides TiO2, silicon is also a good platform for
to the visible wavelengths, with properly selected materials all-dielectric geometric phase metaholograms [293–295].
with high refractive index, for example, TiO2. Similar to the resonant phase metaholograms, holography
multiplexing can be easily accomplished with geometric meta-
4.4.2. Geometric phase metaholograms.  In the metaholo- surfaces by integrating complex multiplexing methods into a
grams mentioned above, phase variations are achieved with single synthetic technique, including polarization [291, 293,
geometry-dependent resonance, thereby resulting in the lim- 295, 296], position [291, 295], and angle [291]. Figure 15(h)
ited working bandwidth due to the dissimilar dispersion of the illustrates a good example of hybrid multiplexing with plas-
meta-atoms resonance. Geometric phase metaholograms, on monic metasurface, which functions as synthetic holograms for
the other hand, gain the required phase on the cross-polarized normal incident CP light in transmission [291]. Various images
light with identical geometric parameters but spatially varying have been simultaneously reconstructed at different polariza-
orientations. In this sense, geometric phase metaholograms tion channels, with different sets of reconstruction parameters,
are dispersionless in terms of the phase. However, it should be such as positions and off-axis angles, verifying the concepts of
noted that conversion efficiency may be strongly wavelength- solely circular polarization multiplexing and multiple hybrid
dependent, as it depends solely upon the designed meta-atoms multiplexing schemes. As a final comment, we emphasize that
(see section 3.3). Because of the linear dependence of geomet- wavelength multiplexing with geometric metasurface is also
ric phase on the orientation angle of individual meta-atoms, possible [294, 297, 298], as the conversion efficiency of geo-
the engineering realization of multilevel phase holograms has metric metasurface is still wavelength-dependent. However,
been greatly simplified [139, 290, 292]. As an example of one should carefully optimize each meta-atom to feature
geometric phase metaholograms, figure  15(e) schematically resonance peak, which corresponds to a certain wavelength.
illustrates the 3D CGH images reconstruction using ultrathin Therefore, only one kind of meta-atoms is predominantly acti-
plasmonic metasurfaces made of subwavelength metallic vated to induce the geometric phase for one wavelength.
nanorods with spatially varying orientations [290]. The recon- From the above discussions, it is evident that metasurface
structed image was observed with an optical microscope, is somehow an ideal platform to realize all types of holograms
and by scanning the image plane position truly 3D images with subwavelength thickness, high-resolution, low-noise, high
were demonstrated. Due to subwavelength meta-atoms for precision, and flexibility. Moreover, geometric phase metahol-
phase encoding, metasurfaces, therefore, provide a method to ogram is more robust against fabrication tolerances and vari-
increase the field of view for digital holograms, which was ation of material properties due to the much simpler structure
evaluated as  ±40◦. Additionally, the dispersionless nature of geometry and the geometric nature of the phase. For a more
our metasurface can result in broadband operation without detailed discussion on metasurface holograms and associated
sacrificing image quality. applications, we refer to a dedicated progress report [64].

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4.5. Polarimeters

Polarimeters, which enable direct measurement of the state


of polarization (SOP), have found significant applications in
many areas of science and technology, ranging from astronomy
[299] and medical diagnostics [300] to remote sensing [301],
since the SOP carries crucial information about the composi-
tion and structure of materials interrogated with light. Despite
all scientific and technological potential, polarimetry is still
very challenging to experimentally realize as the SOP charac-
terization requires conventionally six intensity measurements
to determine the Stokes parameters [123]. Typically, the SOP
is probed by utilizing a set of properly arranged polarization
elements, for example, polarizers and waveplates, which are
consecutively placed in the light path in front of a detector.
In this way, the Stokes parameters that uniquely define the
SOP are determined by measuring the light flux transmitting
through these polarization components. Consequently, polar-
imeters based on conventional discrete optical components
amount to bulky, expensive and complicated optical systems
that go against the general trend of integration and miniatur-
ization in photonics. During recent years, SOP detection using
metasurfaces has attracted increasing interest due to their
design flexibility and compactness.
Figure 16.  Metasurface polarimeters. (a) Schematic illustration of
4.5.1. Polarimeters.  In early approaches, metasurfaces
the phase gradient metasurface. Inset: SEM image of the fabricated
together with conventional optical elements, such as polariz- metasurface on an ITO coated glass substrate. (b) Experimentally
ers and retardation waveplates [305], or the effect of a polar- obtained ellipticity η versus the incident polarization a function of β.
ization-dependent transmission of light through six carefully (c) Illustration of the metagrating’s working principle. (d) Measured
designed nano-apertures in metal films [306], were designed diffraction contrasts (denoted by filled circles) for polarization states
along the main axes of the Poincaré sphere (indicated by asterisks)
for the purposes of polarimetry. Likewise, different types of
at 800 nm wavelength. (e) Polarization-selective directional
metasurfaces were proposed to determine certain aspects of scattering of four elliptical polarization states by two pairs of
the SOP, like the degree of circular polarization [302, 307]. rows superimposed at a 45◦ relative angle. (f) Measurement of the
One example is depicted in figure  16(a) where an ultrathin state of polarization of arbitrarily selected polarizations using the
(40 nm) geometric metasurface has been proposed and dem- commercial polarimeter (blue) and the metasurface polarimeter
(orange) at 1550 nm wavelength. ((a), (b)) Reproduced with
onstrated to measure the ellipticity and handedness of the
permission from [302]. Copyright © Optical Society of America.
polarized light. Due to the spin-selected opposite slope of ((c), (d)) Reproduced with permission from [303]. Copyright ©
constant phase gradient, the decomposed RCP and LCP beam Optical Society of America. ((e), (f)) Reproduced with permission
are steered in two directions. By measuring the intensities of from [304]. Copyright © Optical Society of America.
the refracted light spots, the ellipticity and handedness of vari-
ous incident polarization states were characterized at a range metagrating is composed of three interweaved metasurfaces
of wavelengths and used to determine the polarization infor- where each metasurface functions as a polarization splitter for
mation of the incident beam (figure 16(b)). It is worth noting a certain polarization basis. The associated diffraction con-
that the information of the incident SOP is incomplete as it is trasts obtained by averaging three successive measurements at
not possible to probe the polarization azimuth angle. To fully a wavelength of 800 nm replicate reasonably well the Poincaré
characterize the SOP, an extra polarizer is needed. sphere (figure 16(d)), with points covering all octants of the
Recently, on-chip metasurface-only polarimeters have 3D parameter space and the two-norm deviation between
been proposed to simultaneously determine all polarization Stokes parameters and exper­imental diffraction contrasts
states, which includes meta-reflectarrays [303], waveguide being around  ∼0.1. It should be noted that the designed meta-
[308] and nanoaperture configurations [304]. Figure  16(c) surfaces have a rather broadband response, featuring exper­
illustrates the basic working principle in which an arbitrary imentally diffraction contrasts that closely represent Stokes
polarized incident beam is diffracted into six predesigned parameters in the wavelength range of 750–850 nm. Following
directions corre­sponding to different polarization states by a this concept, a waveguide metacoupler was proposed, which
so-called metagrating, therefore allowing one to easily ana- facilitates normal incident light to launch in-plane photonic-
lyze an arbitrary state of light polarization by conducting waveguide modes propagating in six predefined directions
simultaneous (i.e. parallel) measurements of the correspond- with the coupling efficiencies providing a direct measure of
ent diffraction intensities that reveal immediately the Stokes the incident SOP [308]. In the later work [304], an ultracom-
parameters of the polarization state [303]. Specifically, the pact in-line polarimeter has been demonstrated by using a

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Rep. Prog. Phys. 81 (2018) 026401 Review

2D metasurface covered with a thin array of subwavelength


metallic antennas embedded in a polymer film (figure 16(e)).
Based on the measured polarization-selective directional scat-
tering in four directions, the SOP was obtained after the cali-
bration experiment. The measurements of several arbitrarily
selected polarizations using the commercial polarimeter and
the metasurface polarimeter at a wavelength of 1550 nm are
given in figure 16(f), demonstrating the excellent agreement.
As a final comment, we note that the degree of polarization
(DOP) cannot be measured in the present four-output design.
For DOP measurement, more complex antenna array design
is needed.

4.5.2. Spectropolarimeters.  Besides SOP measurement,


spectral analysis is often required. Therefore, spectropolar-
imeters, which enable simultaneous measurements of the
spectrum and SOP, have received much attention during
recent years due to their superior capabilities in combining
the uncorrected information channels of intensity, wavelength
and SOP. Related developments have revealed that segmented
[309, 311] and interleaved [310, 312] metasurfaces can be
designed to conduct spectropolarimetry with simultaneous
characterization of the SOP and spectrum of optical waves.
Figure  17(a) shows a spectropolarimetric metadevice that
steers different input polarization and spectral components
into distinct directions [309]. The metadevice comprises six Figure 17.  Metasurface spectropolarimeters. (a) Illustration of
GSP metasurfaces arranged in a 2 × 3 array corresponding to the integrated plasmonic metasurface device. Inset: experimental
horizontal (0◦), vertical (90◦), ±45◦, RCP and LCP analyz- image obtained for input −45◦ linearly polarized light with six
spectral components. (b) Theoretical predictions and experimentally
ers. Upon excitation by a probe beam with an arbitrary polar- observed spectral dispersion for circular detection channels. (c)
ization state, the metadevice generates six intensity peaks in Schematic setup of the spectropolarimeter. The SPM is illuminated
far-field, arising from diffraction of each metasurface. The by a continuum light passing through a cuvette with chemical
polarization response of the spectropolarimeter at a given solvent, then four beams of intensities Iδ+, Iδ−, IL45, and IL0 are
wavelength was determined with careful calibration, that is, reflected toward a charge-coupled device camera. (d) Predicted
(red dashed curve) and measured (blue circles) polarization states,
analyzing the relationship between the intensity of individual depicted on a Poincaré sphere. (e) Measured far-field intensities
peaks and the incident SOPs. The measured angular dispersion for elliptical polarization at two spectral lines (with wavelengths
for the LCP and RCP channels are 0.053° nm−1 and 0.024° of 740 and 780 nm) and (inset) the corresponding resolving power
nm−1, respectively (figure 17(b)), revealing the potential of (black line) and calculation (blue line) of the 50 μm diameter SPM.
spectral measurement with spectral resolutions up to  ∼0.3 nm (f) Illustration of the GSP metasurface based beam-size-invariant
spectropolarimeter. (g) Normalized measured far-field intensity
if this metadevice is inserted into a typical spectrometer setup. profile for different wavelengths of the |x channel. ((a), (b))
However, the rectangular configuration is oriented toward the Reproduced from [309]. © IOP Publishing Ltd. All rights reserved.
spectropolarimetry of plane waves, so that the incident light ((c)–(e)) From [310]. Reprinted with permission from AAAS.
should cover the whole area of the metasurfaces with the same ((f), (g)) Reprinted with permission from [311]. Copyright (2017)
light intensity over all metasurface elements in order to ensure American Chemical Society.
faithful comparison of the corresponding (to particular Stokes addition to the excellent capability of polarization probe, the
parameters) diffraction orders. SPM shows good spectral resolving power (figure 17(e)),
By using center-symmetrical configuration, the spectropo- which was measured to be λ/∆λ ≈ 13 when the diameter
larimeters are more compatible with the circular laser beam is 50 μm. Similarly, this interleaved center-symmetrical
with a Gaussian profile, decreasing the footprint if the spectral approach can be applied with dielectric metasurfaces for
resolution is maintained. This property is realized in both the spectropolarimetry [312]. Here, it should be emphasized that
interleaved [310, 312] and segmented [311] metasurfaces. An additional calibration experiment is needed since only four
interleaved spectropolarimeter metasurface (SPM), shown in channels are designed; otherwise, the Stokes parameters can-
figure 17(c), has enabled simultaneous characterization of the not be determined.
SOP and spectrum in reflection, which is composed of three To increase the detection robustness, a segmented plas-
linear phase profiles associated with different nanoantenna monic spectropolarimeter, featuring the self-calibrating
subarrays formed by the random interspersing. Figure 17(d) nature, has been demonstrated [311]. Figure  17(f) schemati-
shows the measured and calculated Stokes parameters on a cally illustrates the GSP metasurface based spectropolarim-
Poincaré sphere for an analyzed beam impinging the SPM eter, which is consisting of three gap-plasmon phase-gradient
at a wavelength of 760 nm with different polarizations. In metasurfaces that occupy 120◦ circular sectors each. This

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Rep. Prog. Phys. 81 (2018) 026401 Review

center-symmetrical configuration would diffract any normally metasurface because of its spatial inhomogeneity. Therefore
incident (and centered) beam with a circular cross-section to the conversion efficiency decreases significantly when the size
six predesigned directions, whose polar angles are proportional of incident beam increases, arising from the significant scat-
to the light wavelength, while contrasts in the corresponding tering caused by inter-supercell discontinuities before cou-
diffraction intensities would provide a direct measure of the pling to another bounded mode of other system [318].
incident polarization state through retrieval of the associated To further increase the coupling efficiency, a new SPP meta-
Stokes parameters. We would like to stress that uneven illumi- coupler has been demonstrated [319]. Figure 18(c) illustrates
nation of the three metasurfaces caused by misalignment will the working principle of the high-efficiency SPP coupler con-
not affect the retrieved Stokes param­eters and no calibration sisting of a transparent gradient metasurface placed at a cer-
is needed since the Stokes parameters are only related to the tain distance above the target plasmonic metal: The incident
relative diffraction contrasts for three polarization bases which wave is first converted into a driven SW bound on the metas-
have the self-calibrating nature. The proof-of-concept 96 μm- urface and then resonantly coupled to the eigenmode (i.e. SPP
diameter spectropolarimeter operating in the wavelength range wave in optical frequencies) on the plasmonic metal. Based
of 750–950 nm exhibits excellent polarization sensitivity with on this new configuration, the nonnegligible issues [318] that
beam-size-invariant property. Additionally, the experimentally severely affect the coupling efficiency can be resolved, thus
measured angular dispersion ∆θ/∆λ for |x channel is 0.0133° leading to a theoretical efficiency up to 94% as predicted
nm−1, corresponding to a measured spectral resolving power by model calculations. As a practical realization, a realistic
of 15.2 if 0.7◦ is taken as the actual minimum resolvable angu- device operating in the microwave regime has been fabricated
lar difference from the Rayleigh criterion (figure 17(g)). It is (figure 18(d)). Both near-field and far-field experiments dem-
worth noting that the spectral resolving power can be further onstrate that the designed meta-coupler exhibits a spoof-SPP
improved with proper design, for instance, using superdisper- conversion efficiency of  ∼73% (figure 18(e)), which is much
sive off-axis metalenses that simultaneously focus and disperse higher than those of all other available devices operating in
light of different wavelengths [313, 314]. this frequency domain. In particular, the efficiency is insensi-
tive to the size of the incident beam.
4.6.  Surface waves couplers
4.6.2. Polarization-controlled SPPs couplers.  Though the
Besides the unprecedented capability of metasurfaces in aforementioned metasurfaces couplers show high perfor-
manipulating the propagating waves (PWs) in free space, mance when operating with SWs excitation, the direction of
another exciting feature of metasurfaces is the ability to con- SWs generated is predefined without any tunability. Addi-
trol surface waves (SWs), such as surface plasmon polaritons tionally, SPPs are essentially transverse magnetic waves with
(SPPs) and their low-frequency counterpart, that is, spoof the magnetic field oriented perpendicular to the propagation
SPPs on artificial surfaces [315, 316]. In the present section, plane, a very important feature that dictates the polarization
we will review some of the research progress on using meta- sensitivity of the SPPs excitation efficiency by free propa-
surfaces to unidirectionally generate SWs from freely PWs. gating radiation. Thus light power carried by the orthogonal
polarization is usually lost.
4.6.1. Unidirectional SWs couplers.  Conventionally, prisms Very recently, polarization-controlled tunable directional
or gratings can be used for unidirectional SWs generation with SPPs coupling has been demonstrated using arrays of elon-
obliquely incident beams [316]. However, this implementa- gated rectangular apertures in an otherwise opaque metal film,
tion has a stringent requirement of the oblique incident angle so that the direction of SPPs excitation was switched by the
and excitation position, limiting its practical applications. handedness of a CP incident beam [320–324]. Figures 19(a)
Additionally, prisms are too bulky and not suitable for inte- and (b) displays the spin-dependent directional SPPs coupler
grated plasmonic devices. Metasurfaces, on another hand, can by Capasso’s group [320]. An elongated rectangular shape of
achieve arbitrary phase gradient, or an in-plane effective wave each aperture in a metal film selectively interacts with incident
vector that is matched with the wave vector of SWs, thereby light that is polarized perpendicular to it, acting as an equiva-
allowing for conversion between a propagating mode in free lent electric dipole and giving rise to SPPs. If an array of such
space and a guided mode [40, 317, 318]. Figure 18(a) displays apertures is arranged in a column with a spacing that is smaller
a reflective gradient metasurface that can convert a PW into a than the SPPs wavelength, the launched SPPs are plane waves
driven SW bounded on its surface with nearly 100% efficiency that propagate perpendicularly away toward either side of the
[40]. Due to the unidirectional reflection-phase gradient, column. When two columns with apertures oriented at 90◦
asymmetric coupling between PW and SW, and consequently with respect to each other are placed in close proximity, that
unidirectional SWs launching has been realized (figure 18(b)). is, a quarter of the SPPs wavelength, the SPPs interference
Distinct from the prism or grating couplers based on resonant becomes independent of the direction of linear polarized light
coupling between PW and SW, the momentum mismatch but dependent on the helicity of CP light (figure 19(a)). The
between PW and SW is compensated by the reflection-phase top right panel of figure  19(a) illustrates the SEM image of
gradient, and a nearly perfect PW-SW conversion can happen a polarization-controlled SPPs coupler with multiple column
for any incidence angle larger than a critical value, confirming pairs. Figure  19(b) shows the near-field intensity distribu-
the robustness and flexibility of this meta-coupler. However, tion of the device by different polarization states. For circular
the generated SW is not an eigenmode of the phase-gradient polarization, the propagating direction of the SPPs waves is

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Rep. Prog. Phys. 81 (2018) 026401 Review

Figure 18.  Metasurface SWs couplers. (a) Schematic picture describing the near-field scanning technique. (b) Ez distributions (with phase
information included) on part of the ξ = 1.14k0 meta-surface under illumination of a normally incident x-polarized wave, obtained by near-
field scanning measurements (top) and simulations (bottom). (c) Configuration of the SPP meta-coupler: a transparent gradient metasurface
is placed at a certain distance above the target plasmonic metal. (d) Image of part of fabricated sample and experimental setup where
monopole antenna is used to probe the spoof SPPs field distribution. (e) Measured spectra of the integrated reflection (blue stars, left axis)
and intensities of the excited spoof SPPs (right axis) flowing to the right side (black squares) and left side (red circles). ((a), (b)) Reprinted
by permission from Macmillan Publishers Ltd: Nature Materials [40], Copyright (2012). ((c)–(e)) Reprinted by permission from Macmillan
Publishers Ltd: Nature Light: Science and Applications [319], Copyright (2016).

opposite for different handedness. In contrast, the launched momentum conservation for both directions is matched simul-
SPPs have equal intensity toward either side of the coupler taneously for the two first-order ordinary refracted beams.
when the incident light is linearly polarized. In addition, this Such a concept can also lead to spin-controlled multidirec-
metasurface coupler can be bent into a circle to achieve spin- tional SPPs excitation by using inverse asymmetric 2D kag-
dependent focus. Near-field interference can also be induced ome lattice metasurface [326].
by a CP dipole, thereby allowing unidirectional propagation Note that, in these nanoaperture configurations, the SPPs
of SPPs in a symmetric structure excited by CP light [325]. excitation involves both the transmission through narrow aper-
As an alternative, geometric metasurface can provide a tures and the coupling of the transmitted radiation to SPPs, so
spin-sensitive phase gradient, enabling polarization-controlled that the overall coupling efficiency is very low. This can be
SPPs launching [323, 324]. For this geometric metasurface improved by optimizing the array configuration and employ-
[323], the lattice constant between neighboring apertures ing GSP structures [327–329]. Here, we would like to high-
s and the step of the rotation angle ∆φ offer the necessary light an efficient unidirectional polarization-controlled SPPs
phase matching condition for a beam to excite SPPs at nor- coupler by using GSP-based metasurfaces [327]. In particular,
mal incidence, as illustrated in figure 19(c). A unidirectional arrays of GSP resonators that would produce two independent
propagating SPPs can only be excited for an incident spin σ orthogonal phase gradients upon reflection in two respective
by momentum matching: kSPP = 2σ∆φ/s + 2mπ/s , where m linear polarizations of incident radiation have been proposed,
is the chosen direction order. This asymmetric matching due so that the incident radiation (with arbitrary polarization) can
to spin-sensitive geometric phase enables unidirectional SPPs efficiently (up to 40%) be converted into SPPs propagating
excitation. For example, when σ = +1, the phase matching in orthogonal directions dictated by the phase gradients. The
condition is shifted to a higher frequency ω1 for SPPs propa- basic GSP unit cell is consisting of a gold nanobrick atop a
gating along +x direction, and to a lower frequency ω3 for 50-nm-thick SiO2 spacer layers covering 80-nm-thick gold
propagating along −x direction, which is ascribed to the extra films supported by glass substrates, shown in figure 19(e). The
positive in-plane momentum arising from the phase gradient. GSP-based coupling arrays have been fabricated for operation
As shown in figure  19(d), the propagation direction of the at telecom wavelengths, and figure 19(f) displays the recorded
SPPs can be dictated to the opposite directions when the circu- images from leakage radiation microscopy (LRM) for a free-
lar polarization of the incident beam is switched at λ = 1020 space wavelength of 1500 nm, featuring the coupling efficiency
nm and λ = 780 nm. In contrast, the SPPs are excited equally of  ∼25% for either of two linear polarizations and the directiv-
along both directions at λ = 870 nm, due to the fact that the ity of SPP excitation exceeding 100. Furthermore, this concept

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Rep. Prog. Phys. 81 (2018) 026401 Review

Figure 19.  Polarization-controlled SPPs couplers. (a) Closely spaced subwavelength apertures as polarization-selective SPPs plane-wave
sources. (b) Near-field images of the structure in (a) under illumination with different polarizations. (c) Dispersion curve of SPPs and the
momentum matching condition for ordinary and anomalous diffraction orders. (d) Experiment demonstration of selective unidirectional
SPP generation. (e) Sketch of a basic GSP unit cell, and SEM image of fabricated 2D-periodic polarization-sensitive SPP coupler composed
of 6 × 6 super cells. (f) Recorded LRM images for a free-space wavelength of 1500 nm with the coupling efficiency C, propagation
length Lp, and directivity D indicated in each image. ((a), (b)) From [320]. Adapted with permission from AAAS. ((c), (d)) Reprinted
by permission from Macmillan Publishers Ltd: Nature Light: Science and Applications [323], Copyright (2013). ((e), (f)) Reprinted by
permission from Macmillan Publishers Ltd: Nature Light: Science and Applications [327], Copyright (2014).

was applied to realize a wavelength-sized meta-scatterer for of the strong field enhancement obtained with plasmonic meta-
efficient and polarization sensitive SPPs excitation, suggesting surfaces and the intrinsic nonlinearities of metals have read-
the great potential for ultracompact plasmonics circuits. ily resulted in efficient nonlinear optical processes, including
second harmonic generation (SHG) [330, 333–335], third
harmonic generation (THG) [336–338], or four-wave mixing
4.7.  Nonlinear metasurface
(FWM) [339–341], underlining their great potential to design
The aforementioned exotic phenomena and unprecedented advanced nonlinear plasmonic devices. Many meta-atoms
applications of metasurfaces are relying on the linear light- with symmetry considerations based on selection rules [342]
matter interaction. Recently metasurfaces with tailorable non- have been designed, including SRRs [330, 343, 344], metallic
linear optical properties have offered new degrees of freedom hole arrays [345, 346], fishnet structures [347], gold T-dimers
in designing photonic devices with remarkable performance. [348], MIM nanodisks [349], L-shaped nanoparticles [335,
The key impact of metasurfaces on nonlinear responses is the 350], exacerbating specific features of the nonlinear response.
unique ability to localize electromagnetic fields in nanoscale For example, single layer metallic SRR arrays are efficient to
volumes, permitting control of the properties of light at dimen- enhance the SHG signal when magnetic dipole resonances are
sions much smaller than its wavelength. In this way, nonlinear excited, as compared with purely electric dipole resonances,
response is governed to a large extend, boosting dramatically shown in figure 20(a). In such noncentrosymmetric SRRs, the
the magnitude of available nonlinearities. At the same time, exciting field and generated nonlinear surface currents couple
metasurfaces significantly relax the phase matching condi- with the bright plasmonic modes, leading to efficient excita-
tion, which should be strictly satisfied in conventional bulky tion [330].
materials, since their thickness is reduced to the scale of sub- The fairly large absorption of metals within plasmonic
wavelength. Moreover, various parameters of the nonlinear metasurfaces ultimately affects their applications in nonlin-
optical response such as intensity, phase, and polarization can ear optics as the generated high-order harmonic suffers strong
be effectively controlled by changing the shape anisotropy attenuations during propagation. Additionally, the patterned
and geometry of a particular metasurface. metallic nanostructures have low melting point, thus they
may be damaged under strong laser illumination. An exciting
4.7.1. Nonlinear metasurfaces.  Since noble metals such as alternative to circumvent the issue of losses and heat consists
gold and silver exhibit strong second- and third-order non- in the use of all-dielectric metasurfaces (see section 3.1), in
linear susceptibilities, χ(2) and χ(3), respectively, plasmonic particular, semiconductor metasurfaces, with low absorption,
metasurfaces can be engineered to tailor the nonlinear optical high refractive index, and strong nonlinear susceptibilities.
response with properly designed meta-atoms. The combination Highly-efficient THG has been demonstrated with silicon

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Figure 20.  Nonlinear metasufaces. (a) SHG with noncentrosymmetric SRRs for different pump polarizations (red arrows). The blue
bars highlight the corresponding measured SHG signal strengths, normalized to 100% for the strongest SHG signal obtained from
the fundamental magnetic resonance. (b) Resonantly enhanced SHG using GaAs all-dielectric metasurfaces. (c) Metal/MQWs hybrid
metasurface exhibiting giant nonlinear response. (a) From [330]. Reprinted with permission from AAAS. (b) Reprinted with permission
from [331]. Copyright (2016) American Chemical Society. (c) Reprinted by permission from Macmillan Publishers Ltd: Nature [332],
Copyright (2014).

meta-atoms by utilizing the magnetic Mie resonance [351] plasmonic metasurfaces tailored the near-field polarizations,
and Fano-resonance [352]. Besides silicon, germanium nano- thereby converting giant nonlinear susceptibility of MQW
disks have also been explored to enhance THG excited at the heterostructures, which is intrinsically polarized normal to
anapole mode [353]. However, due to the centrosymmetric the surface [354], into any in-plane element of the nonlin-
crystal structure of silicon, second-order nonlinear optical ear susceptibility tensor of the metasurface. This meta-atom/
phenomena were not observed in silicon-based metasurfaces. MQW hybrid metasurfaces could achieve a nonlinear conver-
Very recently, resonantly enhanced SHG using dielectric sion efficiency of  ∼2 × 10−6 with a low pumping intensity
metasurface was demonstrated by Liu et  al, which is made of only 15 kW cm−2, corre­sponding to an effective second-
from gallium arsenide (GaAs) that possesses large intrin- order nonlinear susceptibility χ(2) of  ∼5 × 104 pm V−1
sic second-order nonlinearity (figure 20(b)) [331]. By using (figure20(c)). Following this concept, a larger susceptibility
arrays of cylindrical resonators, SHG enhancement factor as χ(2) of  ∼2.5 × 105 pm V−1 was demonstrated by a hybrid
large as 104 relative to unpatterned GaAs has been observed. nonlinear metasurface composed of SRR arrays and MQWs
Moreover, the measured nonlinear conversion efficiency where the SRRs can enhance the pump and SH signals simul-
is  ∼2 × 10−5 with a pump intensity of  ∼3.4 GW cm−2. taneously [355]. Furthermore, deeply subwavelength (∼λ/20)
The aforementioned nonlinearities in metasurfaces have metal-semiconductor nanocavities were introduced, which not
been mostly realized by exploiting the natural nonlinear only convert z-polarized MQW nonlinear susceptibility into
response of metals or dielectric materials. However, the asso- the transverse plane but provide further enhancement to the
ciated optical nonlinearities are far too small to produce sig- nonlinear response [356, 357]. Combined with innovations in
nificant nonlinear conversion efficiency and compete with the MQW design, this approach allowed to produce a record-
conventional bulky nonlinear components for pump inten- high second-order nonlinear optical response of 1.2 × 106 pm
sities below the materials damage threshold. By coupling V−1 at λ = 10 μm, which is about 3−5 orders of magnitude
electro­magnetic modes in plasmonic metasurfaces with higher than that of traditional nonlinear materials and nonlin-
intersubband transitions of multiple-quantum-well (MQW) ear plasmonic metasurfaces, and the experimentally achieved
semiconductor heterostructures, nonlinear metasurfaces with absolute conversion efficiency is up to 0.075% using pump-
giant SHG response have been experimentally demonstrated ing intensities of only 15 kW cm−2 [356]. It should be noted
in the mid-infrared range [332], shown in figure  20(c). In although the effective nonlinear susceptibility is significantly
addition to achieving strong field enhancement at both the enhanced by orders of magnitude compared to traditional non-
fundamental and second harmonic (SH) frequencies, the linear materials; the absolute conversion efficiency is still low.

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Rep. Prog. Phys. 81 (2018) 026401 Review

Figure 21.  Nonlinear metasufaces with phase control. (a) Nonlinear Fresnel zone plate. Left panel: SEM image of a portion of the sample
showing mirror inversion of the SRRs in adjacent zones; Mid-panel: recorded normalized images of SH; Right panel: simulation (top)
and experimental results (bottom) of transverse focusing of SH (m denotes focusing order). (b) Phase control of FWM in plasmonic
metasurfaces. Left panel: illustration of the anomalous phase-matching condition; Mid-panel: CCD images of FWM signals from
uniform (top), and phase gradient (bottom) structures; Right panel: angle dependence of the phase-matching angle for the uniform and
phase-gradient metasurfaces. (c) THG from nonlinear geometric metasurfaces with continuous phase control. (d) Metal/MQWs hybrid
metasurface exhibiting a geometric phase for SHG. Left panel: schematic of metasurface unit cell; Mid-panel: fabricated gradient SRR
arrays with differing angular steps ∆φ ; Right panel: far-field profiles of RCP and LCP SH output. (a) Adapted by permission from
Macmillan Publishers Ltd: Nature Photonics [358], Copyright (2015). (b) Adapted by permission from Macmillan Publishers Ltd: Nature
Communications [359], Copyright (2016). (c) Adapted by permission from Macmillan Publishers Ltd: Nature Materials [360], Copyright
(2015). (d) Reproduced with permission from [357]. Copyright © Optical Society of America.

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Rep. Prog. Phys. 81 (2018) 026401 Review

4.7.2.  Nonlinear metasurfaces with phase control.  Besides concept of spin-rotation coupling, nonlinear geometric meta-
the enhanced nonlinear responses, metasurfaces, particularly surfaces have been demonstrated, featuring homogeneous lin-
phase-gradient metasurfaces, may show even greater con- ear optical properties but spatially varying effective nonlinear
trol of the local phase, amplitude and polarization response polarizability with continuously controllable phase (figure
of high harmonic signal, thus achieving advanced nonlin- 21(c)) [360]. For a CP fundamental wave propagating along the
ear functionalities beyond the nonlinear metasurfaces with rotational axis of a meta-atom, the nonlinear polarizability can
uniform meta-atoms. As a simple demonstration, nonlinear nω
be expressed as αθ,σ,σ nω
∝ e(n−1)iθσ and αθ,−σ,σ ∝ e(n+1)iθσ,
radiation steering has been demonstrated by nonlinear meta- thus introducing geometric phase (n − 1)θσ or (n + 1)θσ into
material-based photonic crystals (NLMPCs) (figure 21(a)) the nonlinear polarizabilities of nth harmonic generation with
[358]. By simply reversing the orientation of the SRRs com- the same or opposite circular polarization to that of the fun-
prising the NLMPCs with a period, periodic inversion of the damental mode, where σ = ±1 represents the LCP or RCP
effective χ(2) can be achieved, inducing a π phase shift of light and θ is the orientation of meta-atom. Therefore the spin-
the local SHG radiation for linearly polarized light. Based induced geometric nonlinear phase, combined with selection
on the generated nonlinear binary phase, the SHG signal rules of harmonic generation for CP light [365, 366], enables
can be directed from NLMPCs with controlled emission complete control over the propagation of harmonic genera-
angle. Moreover, an NLMPC-based ultrathin nonlinear Fres- tion signals. As shown in figure 21(c), meta-atoms with two-
nel zone plate (FZP) was obtained, which focuses the SH
fold symmetry (C2) diffracts THG signals with RCP and LCP
signal to a spot of 7 μm with large SH intensity enhance-
states to the first and second diffraction orders, respectively,
ment. Similarly, the nonlinear binary phase was used to radi-
while the meta-atoms with four-fold symmetry (C4) diffracts
ate SH signals into different directions depending on their
the opposite CP THG signal only to the first diffraction order
polarization states by using SRRs/MQWs hybrid nonlinear
direction. Moreover, by combining the concept of nonlinear
metasurfaces [361]. Moreover, a binary nonlinear metasur-
geometric metasurfaces with CGH technique, spin and wave-
face consisting of SRR meta-atoms has been used to realize
SH Airy and vortices beams by manipulating both the phase length multiplexed nonlinear metasurface holography was
and amplitude of the quadratic nonlinear coefficient locally demonstrated [367].
[362]. Such binary nonlinear beam-steering devices only use Nonlinear geometric metasurfaces have also been demon-
two phase steps, which inevitably introduce undesired dif- strated by using hybrid SRRs/MQWs system, which simulta-
fraction effects. For more complex nonlinear beam manipu- neously provides nonlinear efficiencies that are many orders
lation and shaping, a continuous and spatially varying phase of magnitude larger than those in other nonlinear setups, and,
manipulation is needed. Figure 21(b) illustrates the full non- at the same time, is capable of controlling the local phase of
linear phase control for FWM with linearly polarized light the nonlinear signal with high precision and subwavelength
in plasmonic metasurfaces, which is achieved by introduc- resolution. Based on this new platform, the nonlinear wave-
ing a spatially varying phase response of a metallic metasur- front can be controlled at will, enabling beam steering, focus-
face consisting of subwavelength nonlinear nanoapertures ing and polarization manipulation [357, 364]. Figure  21(d)
designed specifically for the nonlinear signal [359]. Specifi- depicts the experimental realization of the hybrid nonlinear
cally, the nonlinear phase of FMW signals can be continu- geometric metasurfaces for SH steering, which are consist-
ously tuned from 0 to 2π through adjusting the geometry of ing of spatially arranged subwavelength metal-semiconductor
nanoapertures. For such interfaces, a new, anomalous non- resonators with an angular rotation step of ∆φ between adja-
linear phase-matching condition, that is, the nonlinear ana- cent unit cells along one direction [357]. For a RCP incident
logue of the generalized Snell’s law (middle and right panels beam, RCP and LCP SH beams will be generated toward two
of figure 21(b)), has been derived, that differs from the con- different directions θR(R) = arcsin[(3∆φ/360◦ )λ2ω /d] and
ventional phase-matching schemes in nonlinear optics. In θL(R) = arcsin[(∆φ/360◦ )λ2ω /d] respectively, where λ2ω is
addition, ultrathin frequency-converting lenses with tight the SH wavelength and d is the period of the super cell. As
focusing were demonstrated. Following this strategy, non- is seen in the right panel of figure 21(d), experimental results
linear multilayer metasurface holograms have been demon- fully confirm these predictions, steering most of the RCP and
strated, with a background free image formed at the third LCP signals away from the normal in specified directions.
harmonic of the illuminating beam [363]. Coming to the end of this subsection, we have presented
Though continuous nonlinear phase control over the 2π a brief overview of the field of nonlinear metasurfaces and
range can be achieved with linearly polarized light, the phase discussed how the metasurfaces can be employed to realize
and amplitude of high-order signal are strongly depending various functionalities with remarkable improvement. For a
upon the size and shape of each meta-atom, which may affect more detailed discussion on the nonlinear response of nano-
the nonlinear response since the giant nonlinear effects are structures, we refer to some review papers [48, 368, 369].
very sensitive to the variations in the local resonances of meta-
atoms. As an alternative, geometric phase (or Pancharatnam- 5.  Conclusions and outlook
Berry phase) approach is an ideal tool to realize full phase
control with a nearly uniform nonlinear response for CP light, Metasurfaces, especially gradient metasurface, have becom-
based on the suitably designed nonlinear meta-atoms with ing a rapidly growing field of research due to their exceptional
gradually changed orientations [360, 364]. Inspired by the capabilities of realizing novel electromagnetic properties and

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Rep. Prog. Phys. 81 (2018) 026401 Review

functionalities. In this paper, we have reviewed the develop- functionalities in the mid-infrared and THz frequency
ment of gradient metasurfaces by introducing their fundamen- ranges [383], resulting from the extraordinary optoelec-
tal concept, classification, physical realization, and a few of tronic properties and largely tunable carrier density of
representative applications. As a rapidly developing area of graphene. In addition, phase-change materials have been
research which is expanding very fast every day, to review all extensively utilized in optical data-storage systems and
aspects of metasurfaces mentioned in the available literature photonic devices due to their outstanding switchable
is impossible and hardly instructive. There are still many other optical properties by thermal, laser or electrical current
aspects not included here, such as parity-time metasurfaces pulses with controlled duration and intensity [384]. For
[370, 371], ultrathin invisibility cloaks [372], photonic spin example, germanium-antimony-tellurium (GST) chal-
Hall effects [373], mathematical operation [374, 375], etc. cogenide glass has recently been used to demonstrate
Owing to the unprecedented control over light with sur- all-optical, non-volatile, metasurface switch [385].
face-confined planar components, metasurfaces are expected ( iii) Quantum Metasurfaces. There is an explosively growing
to extend to a much broader horizon beyond what we have interest in combining the existing quantum systems with
discussed in this review article, offering fascinating possibili- metasurfaces, creating the so-called quantum metasurfaces,
ties of very dense integration and miniaturization in photonic/ which expands the properties of metasurfaces towards the
plasmonic devices. We think that metasurfaces could have a quantum regime [388]. More specifically, by integrating
significant impact on the following promising areas which non-classical light sources such as single emitters with
still remain largely unexplored. properly designed optical meta-atoms, metasurfaces are
thus endowed with quantum information processing capa-
(i) Multifunctional Metasurfaces. The up-to-date metasur-
bilities. Lončar and co-works are pioneering the research
face design is typically focused on single, on-demand
on enhanced single-photon emission by color centers in
light manipulation functionality, which is not compat-
diamond/meta-atoms hybrid systems [389, 390]. As an
ible with the desired goal of multifunctional flat optics.
emerging area of research, quantum metasurfaces opens
Metasurfaces that facilitate efficient integration of mul-
up a new frontier, which will considerably advance our
tiple diversified functionalities into one single ultrathin
understanding of the fundamental physics associated with
nanoscale device have become an emerging research area.
light-mater interaction within quantum regime, and facili-
Very recently, Hasman and colleagues have proposed a
tate the realization of novel quantum photonic devices
generic approach to realize multifunctional metasurfaces
[391–394], including nanoscale lasers, single photon/
via the synthesis of the shared-aperture antenna array and
plasmon sources, and quantum plasmonic circuitry.
geometric phase concepts [376]. By randomly mixing
of optical nanoantenna subarrays, where each subarray
provides a different phase function in a spin-dependent
Acknowledgments
manner, multiple wavefronts with different functionalities
can be achieved within a single shared aperture, without
This work was funded by the European Research Council
reducing the numerical aperture of each sub-element
(the PLAQNAP project, Grant 341054) and the University of
[310, 312, 377]. Xu et  al recently demonstrated high-
Southern Denmark (SDU2020 funding).
efficiency bifunctional devices to achieved distinct
functionalities in the microwave regime based on aniso­
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Fei Ding is a postdoctoral fellow at SDU Nano Optics, University of Southern Denmark. He received his BS and PhD degrees in
Optical Engineering from Zhejiang University in 2010 and 2015, respectively. His current research interests are in the areas of
applied electromagnetics, metasurfaces, plasmonics, and nanophotonics, with particular focus on innovative and extreme aspects of
wave interaction with engineered materials and nano-structures. He has authored or co-authored more than 25 scientific contrib­
utions published or under review in peer-reviewed journal papers and peer-reviewed conference proceedings, receiving more than
700 citations. He is serving as a reviewer for several journals, he is currently the guest-editor of a special issue on metasurface for
the journal of Applied Sciences.

Anders Pors is an optical engineer at RSP Systems A/S. He received his MS and PhD degrees in Engineering, Physics and
Technology and Applied Mathematical Modelling in 2009 and 2012, respectively, from the University of Southern Denmark (SDU),
Denmark. From 2012 to 2016 he joined SDU Nano Optics, where he designed plasmonic metasurfaces with novel functionalities
and contributed to various aspects of light-matter interaction at the nanoscale. His current research interests cover Raman
spectroscopy, biomedical optics, and mathematical modelling.

Sergey I Bozhevolnyi is a Professor and Head of Centre for Nano Optics at the University of Southern Denmark (SDU). He
received his MSc PhD degrees in quantum electronics from Moscow Institute of Physics and Technology (Russia) in 1978 and
1981, respectively. He was conferred the Dr.Sci. degree from Aarhus University, Aarhus, Denmark, in 1998 for the research on
subwavelength light confinement. He initiated experimental research in near-field optics at the Institute of Physics, Aalborg
University (Denmark) in 1991, where he has been Professor in 2003-2009 before moving to SDU. During 2001–2004, he was also
the Chief Technical Officer (CTO) of Micro Managed Photons A/S set up to commercialize plasmonic waveguides. His current
research interests include linear and nonlinear nano-optics and plasmonics, including plasmonic interconnects and metasurfaces.
Prof. Bozhevolnyi is a Fellow of Optical Society of America (2007) and a member of Danish Academy of Natural Sciences (2010).

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