Micromanufacturing

Processes
Edited by

V. K. Jain
Micromanufacturing
Processes
Micromanufacturing
Processes

Edited by

V. K. Jain
CRC Press
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 Dedicated

to

Kanti Jain (wife)

and

Aanya Jain (granddaughter)

Contents

Foreword .........................................................................................................................................ix
Preface ..............................................................................................................................................xi
Editor............................................................................................................................................. xiii
Contributors ...................................................................................................................................xv

Section I Introduction

1. Micromanufacturing: An Introduction.............................................................................. 3
V.K. Jain, Ajay Sidpara, M. Ravisankar, and Manas Das

2. Challenges in Meso-, Micro-, and Nanomanufacturing .............................................. 39

V. Radhakrishnan

Section II Micromachining
Traditional Micromachining
3. Microturning ......................................................................................................................... 55
R. Balasubramaniam and Vinod Kumar Suri

4. Microgrinding ....................................................................................................................... 75
P.V. Rao and S. Ghosh

Advanced Micromachining

5. Biomachining—Acidithiobacillus-Genus-Based Metal Removal ............................. 99

Hong Hocheng, Jei-Heui Chang, and Umesh U. Jadhav

6. Micro- and Nanomanufacturing by Focused Ion Beam ............................................. 113

Vishwas N. Kulkarni, Neeraj Shukla, and Nitul S. Rajput

Section III Nanofinishing

7. Magnetorheological and Allied Finishing Processes ................................................. 133

Ajay Sidpara and V.K. Jain

8. Magnetic Abrasive Finishing (MAF) ............................................................................. 155

D.K. Singh, S.C.Jayswal, and V.K. Jain

9. Abrasive Flow Finishing (AFF) for Micromanufacturing ......................................... 183

M. Ravisankar, J. Ramkumar, and V.K. Jain

vii
viii Contents

Section IV Microjoining

10. Laser Microwelding ........................................................................................................... 203

N.J. Vasa

11. Electron Beams for Macro- and Microwelding Applications.................................... 221

D.K. Pratihar, V. Dey, A.V. Bapat, and K. Easwaramoorthy

Section V Microforming

12. Micro- and Nanostructured Surface Development by Nano Plastic

Forming and Roller Imprinting ....................................................................................... 243
M. Yoshino, K. Willy, A. Yamanaka, T. Matsumura, S. Aravindan, and P.V. Rao

13. Microextrusion .................................................................................................................... 263

U.S. Dixit and R. Das

14. Microbending with Laser ................................................................................................. 283

U.S. Dixit, S.N. Joshi, and V. Hemanth Kumar

Section VI Miscellaneous

15. Dimensional Metrology for Micro/Mesoscale Manufacturing ................................ 307

Shawn P. Moylan

16. Micromolding—A Soft Lithography Technique .......................................................... 329

B. Radha and G.U. Kulkarni

17. Fabrication of Microelectronic Devices ......................................................................... 349

Monica Katiyar, Deepak, and Vikram Verma

18. An Integrated Wafer Surface Evolution Model for Chemical

Mechanical Planarization (CMP) .................................................................................... 373
Abhijit Chandra, Ashraf F. Bastawros, Xiaoping Wang, Pavan Karra, and
Micayla Haugen

Index .............................................................................................................................................401
Foreword

It is with great pleasure that I read the draft copy of the book Micromanufacturing Processes
by Professor V.K. Jain of the Indian Institute of Technology, Kanpur, India. I am no stranger
to his publications and presentations at Indian and international conferences. He is an
erudite scholar and a voracious writer. This book contains 18 chapters written mostly by
Indian researchers, including himself, and a few international scientists, including one
from the National Institute of Standards and Technology, Gaithersburg, USA, on dimen-
sional metrology for meso-, micro-, and nanomanufacturing and another on biomachin-
ing from the famous National Tsing Hua University, Hsinchu, Republic of China. Quite
fittingly, the book opens with challenges faced not only in micromanufacturing but also
in meso- and nanomanufacturing. India has indeed made a modest start in these areas,
which is evident from the many chapters in this book. The impact that the Indian Institutes
of Technology have had on Indian graduate education is evident from the vast number of
IIT PhD scholars who are coauthors of the chapters.
The areas covered in this book are microturning and grinding, magnetorheological fin-
ishing (MRF), abrasive flow machining, laser macro- and microwelding, and electron beam
macro- and microwelding. This book will be a valuable companion to many advanced
books on manufacturing processes, including my book, Precision Engineering (published
by McGraw Hill in 2008). The book’s creative work includes new derivations for unconven-
tional machining techniques, and researchers will find it a good source of reference. The
book has many citations to The International Academy for Production Engineering (CIRP)
work, and CIRP’s focus group on microproduction engineering will find this new book a
valuable asset.

Professor V.C. Venkatesh, DSc, PhD

Department of Mechanical Engineering

University of Nevada, Las Vegas, Nevada

ix
Preface

This introductory book on micromanufacturing is the result of the combined efforts of

more than 45 eminent professors and researchers. All these authors are actively engaged
in teaching, research, or development activities in the specific areas about which they
have written. The basic objective of this book is to acquaint readers with the principles,
basic machine tools, and latest developments in micromanufacturing processes. This
book deals not only with various micromanufacturing processes but also with measure-
ment techniques and other essential topics, making it a good textbook for undergraduate
and postgraduate students as well as a reference book for researchers. This book has a
large number of cross-references that will help readers with further in-depth study of a
particular area of specialization.
Nowadays, meso (1–10 mm) and micro (1–999 mm) manufacturing are emerging as
important technologies, especially in areas where miniaturization yields economic and
technical benefits, namely, the aerospace, automotive, optical, and biomedical industries.
With time, miniaturization of machines and devices is leading to further demand for parts
with dimensions of the order of a few micrometers (1 mm = 10−6 m) to a few hundred
nanometers (1 nm = 10−9 m). The demand of industries for micromanufacturing of vari-
ous types of materials (metallic, ceramics, and plastics) is also increasing by the day. Some
examples of the products that require micromanufacturing are microholes in optical
fibers, micronozzles for high-temperature jets, and micromolds. Scientists and researchers
are engaged in developing nanofeatured products such as nanoelectromechanical systems
(NEMS). Hence, it is quite safe to say that there is a need for manufacturing processes that
are capable of dealing with atomic and molecular dimensions.
This book deals with processes that come under the category of micromanufactur-
ing processes. The book is divided into six major parts: Introduction, Micromachining,
Nanofinishing, Microjoining, Microforming, and Miscellaneous.
Section I has two chapters, the first one being an introduction, and the second, on meso-,
micro-, and nanomanufacturing. Chapter 1 gives an overview of various micromanufac-
turing processes including applications, working principles, challenges in scaling down a
macromanufacturing process to a micromanufacturing process, and some recent develop-
ments in each category of process. The need for product realization from new material in
new configurations having micrometer sizes with complex features poses new challenges
in manufacturing concepts and procedures. Chapter 2 elaborates on the challenges being
faced in micro- and nanomanufacturing processes.
Section II deals with micromachining processes, which have been described under two
heads: traditional micromachining and advanced micromachining. Traditional microma-
chining has a chapter on microturning (Chapter 3), which discusses the need for a thor-
ough understanding of the various areas of the microturning process including the basic
differences between microturning and macroturning processes, critical requirements of
microturning machines, and mechanisms underlying material removal. Chapter 4, on
microgrinding, deals with the mechanics of grinding applicable to microgrinding. The
results of single-grit experiments have been effectively used to model grinding-specific
energy. The second area of micromachining (that is, advanced micromachining) is pre-
sented in two chapters (Chapters 5 and 6); the first one is on biomachining and the second
focuses on ion beam machining. In biomachining, the role of chemolithotrophic bacteria

xi
xii Preface

has been discussed along with micromachining of metals by culture supernatants. The
use of Acidithiobacillus thiooxidans in biomachining of metals has also been discussed. In
the case of focused ion beam machining or deposition, apart from a description of the
working principle and setup, micro- and nanodevices fabricated using focused ion beams
have been illustrated.
Section III gives an overview of the three well-known nanofinishing processes, namely,
magnetorheological finishing, magnetic abrasive finishing, and abrasive flow finishing.
The first process is capable of producing, under certain conditions, even sub-nano surface
finish on silicon wafers. Magnetic abrasive finishing, the second process, is capable of pro-
ducing surface roughness (Ra) of less than 10 nm, while the third process (abrasive flow
finishing) is capable of producing a surface finish with Ra as good as 20 nm. The principle,
experimental setup, mechanics of nanofinishing, and the applications there of, have been
elaborated.
Section IV deals with two microjoining processes, namely, laser microwelding and elec-
tron beam microwelding. Both these processes can achieve joining in the microdomain.
Chapter 11 on electron beam welding also deals with design aspects of electron beam
welding machines.
Section V has three chapters on microforming processes. One of these chapters
(Chapter  12) deals with micro- and nanostructured surfaces developed by nano plastic
forming and roller imprinting. A combination of nano plastic forming, coating, and
roller imprinting (NPF-CRI process) is used to rapidly modify the surface of a material.
Chapter 13 describes the design and development of a miniature extrusion machine and
its performance during extrusion of microgears, micropins, and microcondensers. The
final chapter in this section (Chapter 14) discusses the applications of laser beam for micro-
bending. The governing differential equations for laser microbending are developed, and
the application of finite element analysis is illustrated briefly. Microbending uses laser for
producing small bend angles on small and large-sized sheets. It also deals with the physics
underlying the laser microbending process.
Section VI has four chapters. Chapter 15 deals with the dimensional metrology for micro/
nanoscale manufacturing. It deals with the philosophy of Lord Kelvin, “If you can not
measure it, you can not improve it.” Chapter 16 deals with the soft lithography technique,
micromolding. It discusses the process in detail and gives some interesting examples of
the products obtained with this technique. Chapter 17 gives an overview of the fabrication
of microelectronic devices. It deals with the backbone of the present era, that is, precise
manufacturing of a circuit element on a single-crystal Si wafer. The final chapter describes
the model for integrated wafer surface evolution for chemical mechanical planarization.
I would like to individually thank all the authors of this book for efforts put in toward
writing their chapters.
Finally, I would highly appreciate critical suggestions from the readers of this book to
improve its quality in the next edition.

V.K. Jain
Editor

Dr. V.K. Jain completed his BE (mechanical) from Vikram University, Ujjain, India,
and ME (production) and PhD from University of Roorkee, Roorkee, India (now, Indian
Institute of Technology Roorkee). He has served as a visiting professor at the University of
California, Berkeley (U.S.) and the University of Nebraska–Lincoln (U.S.). Currently, he is
a professor at the Indian Institute of Technology Kanpur (India). He has also served on the
faculty at other Indian institutions, namely, Malviya Regional Engineering College, Jaipur,
India; Birla Institute of Technology, Pilani, India; and Motilal Nehru Regional Engineering
College, Allahabad, India.
Dr. Jain has a number of medals and best paper awards to his credit. He has written
five books and 11 chapters for different books by international publishers. He has been
appointed as full editor of two international journals and associate editor of three inter-
national journals. He has also worked as a guest editor for 12 special issues of different
international journals. He has served as a member of the editorial board of 12 international
journals.
Dr. Jain has guided 15 PhD theses and 90 MTech/ME theses. He has more than 270
publications to his credit. He has delivered more than 26 keynote lectures in different
conferences/workshops/universities. He has eight Indian patents and one U.S. patent to
his credit.

xiii
Contributors

S. Aravindan Deepak
Department of Mechanical Engineering Department of Materials Science and
Indian Institute of Technology Delhi Engineering
New Delhi, India Indian Institute of Technology Kanpur
Kanpur, India
R. Balasubramaniam
Precision Engineering Division V. Dey
Bhabha Atomic Research Centre Department of Mechanical Engineering
Mumbai, India Indian Institute of Technology Kharagpur
Kharagpur, India
A.V. Bapat
Beam Technology Development Group U.S. Dixit
Bhabha Atomic Research Centre Department of Mechanical Engineering
Mumbai, India Indian Institute of Technology Guwahati
Guwahati, India
Ashraf F. Bastawros
Department of Aerospace Engineering and K. Easwaramoorthy
Department of Mechanical Engineering Beam Technology Development Group
Iowa State University Bhabha Atomic Research Centre
Ames, Iowa Mumbai, India

Abhijit Chandra S. Ghosh

Department of Mechanical Engineering and
Department of Aerospace Engineering
Iowa State University
Ames, Iowa
Jei-Heui Chang
Department of Power Mechanical
Engineering
National Tsing Hua University
Hsinchu, Taiwan, Republic of China
Manas Das
Department of Mechanical Engineering
Indian Institute of Technology Guwahati
Guwahati, India
R. Das
Department of Mechanical Engineering
Indian Institute of Technology Guwahati
Guwahati, India
Department of Mechanical Engineering
Indian Institute of Technology Delhi
New Delhi, India
Micayla Haugen
Department of Mechanical Engineering
Iowa State University
Ames, Iowa
Hong Hocheng
Department of Power Mechanical
Engineering
National Tsing Hua University
Hsinchu, Taiwan, Republic of China
Umesh U. Jadhav
Department of Power Mechanical
Engineering
National Tsing Hua University
Hsinchu, Taiwan, Republic of China

xv
xvi Contributors

V.K. Jain Shawn P. Moylan

Department of Mechanical Engineering Engineering Laboratory
Indian Institute of Technology Kanpur National Institute of Standards and
Kanpur, India Technology
Gaithersburg, Maryland
S.C. Jayswal
Department of Mechanical Engineering D.K. Pratihar
Madan Mohan Malaviya Engineering Department of Mechanical Engineering
College Indian Institute of Technology Kharagpur
Gorakhpur, India Kharagpur, India

S.N. Joshi B. Radha

Department of Mechanical Engineering Chemistry and Physics of Materials Unit
Indian Institute of Technology Guwahati and
Guwahati, India Department of Science & Technology Unit
on Nanoscience
Pavan Karra Jawaharlal Nehru Centre for Advanced
Department of Mechanical Engineering Scientific Research
Iowa State University Bangalore, India
Ames, Iowa
V. Radhakrishnan
Monica Katiyar Indian Institute of Space Science and
Department of Materials Science and Technology
Engineering Trivandrum, India
Indian Institute of Technology Kanpur
Kanpur, India Nitul S. Rajput
Department of Physics
G.U. Kulkarni Indian Institute of Technology Kanpur
Chemistry and Physics of Materials Unit and Kanpur, India
Department of Science & Technology Unit
on Nanoscience J. Ramkumar
Jawaharlal Nehru Centre for Advanced Department of Mechanical Engineering
Scientific Research Indian Institute of Technology Kanpur
Bangalore, India Kanpur, India

Vishwas N. Kulkarni P.V. Rao

Department of Physics Department of Mechanical Engineering
Indian Institute of Technology Kanpur Indian Institute of Technology Delhi
Kanpur, India New Delhi, India

V. Hemanth Kumar M. Ravisankar

Department of Mechanical Engineering Department of Mechanical Engineering
Indian Institute of Technology Guwahati Indian Institute of Technology Guwahati
Guwahati, India Guwahati, India

T. Matsumura Neeraj Shukla

Department of Mechanical Engineering Department of Physics
Tokyo Denki University Indian Institute of Technology Kanpur
Tokyo, Japan Kanpur, India
Contributors xvii

Ajay Sidpara Xiaoping Wang

Department of Mechanical Engineering Department of Mechanical Engineering
Indian Institute of Technology Kanpur Iowa State University
Kanpur, India Ames, Iowa

D.K. Singh K. Willy

Department of Mechanical Engineering Department of Mechanical and Control
Madan Mohan Malaviya Engineering Engineering
College Tokyo Institute of Technology
Gorakhpur, India Tokyo, Japan

Vinod Kumar Suri A. Yamanaka

Precision Engineering Division Department of Mechanical and Control
Bhabha Atomic Research Centre Engineering
Mumbai, India Tokyo Institute of Technology
Tokyo, Japan
N.J. Vasa
Department of Engineering Design M. Yoshino
Indian Institute of Technology Madras Department of Mechanical and Control
Chennai, India Engineering
Tokyo Institute of Technology
Vikram Verma Tokyo, Japan
Department of Materials Science and
Engineering
Indian Institute of Technology Kanpur
Kanpur, India
 Section I

Introduction