NOVELLUS ENGINEERING SPECIFICATION

GAS PANEL SYSTEMS

TESTING & ACCEPTANCE 67-162884-00
Rev D
Page 1 of 18

1.0 Purpose ................................................................................................................................. 2

2.0 Scope .................................................................................................................................... 2
3.0 Definitions ............................................................................................................................ 2
4.0 Reference Documents........................................................................................................... 2
5.0 Revision History................................................................................................................... 3
6.0 General ................................................................................................................................. 4
7.0 Pre-Assembly Component Audits ........................................................................................ 4
8.0 Pre-Assembly Component Testing....................................................................................... 4
9.0 Post Assembly Component Audits ....................................................................................... 4
10.0 Part Serialization & Traceability.......................................................................................... 5
11.0 Visual Inspection & Fit Check ............................................................................................. 5
12.0 Enclosure Exhaust Verification (Applicable only to Gas Boxes)........................................ 5
13.0 Panel Leak Integrity ............................................................................................................. 6
14.0 Particle Testing..................................................................................................................... 7
15.0 Component Calibration & Performance Verification .......................................................... 7
16.0 Functional Tests ................................................................................................................... 8
17.0 Post Test Packaging Preparation .......................................................................................... 9
18.0 Pre-shipment Inspection and Packaging............................................................................... 9
19.0 Panel Data Files.................................................................................................................. 10
20.0 VCR Fitting Label Requirements …………………………………………………………10
21.0 Production Shipment Issues ............................................................................................... 18

ENG-3200b
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1.0 Purpose
The intent of this document is to define the test criteria and limits for gas panel systems.
These tests are to be performed by the Novellus supplier who fabricates a gas delivery
system prior to delivery to Novellus.
2.0 Scope
This document applies to gas panel assemblies that are fabricated by Novellus suppliers
and subsequently integrated into Novellus Vacuum based process tools. For the
purposes of this document the term gas panel is considered generic for purge panels, gas
boxes, and other similar assemblies.

3.0 Definitions
Gas Panel - A complete system comprised of valves, filters, MFC’s, manifolds, etc. used to
control the flow of gasses to a Novellus Process Tool. Gas panels are usually
integrated to combine and control the flows of multiple gas types within a
common set of manifolds.
Gas Box - A gas panel that has been packaged within an enclosure, usually for the purpose
of providing a controlled exhausted environment.
Assembly - A supplier compiled package used to capture all gasbox information relevant to
Data Files its assembly, test, and performance.

4.0 Reference Documents

ASTM E 498 Standard Test Methods for Leaks

SEMI E-17 Guideline for Mass Flow Controller Transient Characteristics Tests
SEMI E-49.8 Guide for High Purity and Ultrahigh Purity Gas Distribution Systems in
Semiconductor Manufacturing Equipment
SEMI F-28 Test Method for Measuring Particle Generation from Process Panels
SEMI F101 Test Methods for Determining Pressure Regulator Performance in Gas
Distribution Systems
67-162883-00 Gasbox Design Roles & Responsibilities & Requirements Specification
67-162885-00 Gasbox Airflow & Tracer Gas Bench Testing Requirements
74-024094-00 Part Marking & Identification
75-00001-XX Novellus Paint Specification
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5.0 Revision History

ECO Revision Date Originated By History
30064 A 3/11/02 R. Ostroski Initial Release
30719 B 9/6/02 R. Ostroski Add Table of Contents. General
revision per supplier and SQE inputs.
Change "binder" to "assembly data
files". Removed undefined static
pressure testing & dynamic particle test
requirement.
84212 C 8/16/07 D. Nguyen Add VCR fitting Requirement
84553 D 11/17/07 M. Kaan Section 14 Particle Testing: Reference
SEMI Standard and Test Method.
Added CNC as approved particle
counter.
Section 15 Component Verification:
Update various component test spec. to
better reflect current semi industry
standard
Section 19 Add list of MFC correction
factors
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6.0 General

6.1 Application of this specification is necessary to assure acceptable performance of

gas panel systems used in Novellus process tools. The requirements of this
document shall be applied as a routine part of the supplier QA Program on each gas
panel to be delivered to Novellus.
6.2 Gas panels and associated subassemblies are to be assembled in a minimum Class
100 cleanroom by personnel that are trained and have demonstrated proficiency in
appropriate cleanroom procedures.
6.3 All test gases (not including CDA) are to be of semiconductor grade (99.999%
purity). Bulk supply is permissible.
6.4 Pneumatically operated components may be actuated with CDA or "house" N2 per
the supplier'
s discretion.
7.0 Pre-Assembly Component Audits

7.1 It is recommended that all components to be used in gas panel assemblies be audited
against the appropriate Novellus control document prior to commencement of the
assembly process.
7.2 Audits are performed against one of the following document types, but not both:
7.2.1 The Novellus Systems, Inc. assembly BoM.
7.2.2 The Novellus specification document used to communicate new design
requirements.
7.3 Components are to be checked against the manufacturer' s documentation to verify
the functional information on the component (flow rate, gas type, flow direction,
etc) is correct.
8.0 Pre-Assembly Component Testing

8.1 Although not required, suppliers may perform pre-assembly component testing to
proactively remove non-conformant materials from the assembly process. Novellus
Systems, Inc. recommends the use of appropriate statistical methods to determine
the proper frequency and level of pre-assembly testing to be performed.
9.0 Post Assembly Component Audits

9.1 Post assembly Component audits are used to confirm that the builds have been
performed with the correct components, and are especially vital if pre-assembly
audits have not been performed.
9.2 All components in the assembly shall be audited, with particular emphasis on
critical components in the flow paths.
9.3 Verify that all VCR fittings have labels appropriately installed. See section 20.0 for
label requirements and installation examples.
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10.0 Part Serialization & Traceability

10.1 All components serialized by OEM manufacturers shall be reference catalogued for
inclusion in the data files.
10.2 Serialized components shall be identified in a matrix that associates the component
manufacturer, type/description, manufacturer serial number and Novellus reference
designator as defined in the Novellus flow schematic.
10.3 The serialized component matrix may be developed at the beginning or end of the
assembly process as dictated by Supplier preference. Often, this decision will be
based on the physical location of the OEM part serial number.
10.3.1 Note that component reject may necessitate update of this list if created
early in the process.
10.4 Serialized parts typically include, but are not limited to:
10.4.1 MFC'
s
10.4.2 MFM'
s
10.4.3 Pressure Regulators
10.4.4 Pressure Transducers & Display Units
11.0 Visual Inspection & Fit Check

11.1 Assemblies shall be visually inspected for defects in workmanship and cosmetic
flaws.
11.2 Painted surfaces to be free of scratches and chips, and should unless otherwise
specified conform to the finish requirements of Novellus Specification
75-00001-XX.
11.3 All fabricated parts shall be labeled per the appropriate section of the Novellus Part
Marking & Identification specification. ( 74-024094-00.)
11.4 Pneumatic connections are to be verified and labeled per the pneumatic schematic,
and shall be organized and tie wrapped into bundles. Extra length shall be provided
in the pneumatic lines to prevent stress or tension in the lines during operation and
maintenance.
11.5 All separable components (cover panels, doors, exhaust flanges, etc.) shall be
installed and verified for appropriate fit.
12.0 Enclosure Exhaust Verification (Applicable only to Gas Boxes)

12.1 Exhaust airflow is to be verified for all new designs and associated configurations in
accordance with the requirements defined in the Novellus Gas Box Airflow and
Tracer Gas Bench Testing Requirements Specification 67-162885-00.
12.1.1 Novellus recommends performing airflow testing directly after assembly
for new enclosure designs.
12.1.2 Subsequent design iterations are typically considered of low risk, so
testing may be performed later if preferred by the supplier.
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12.2 A new design is typically one that has one or more of the following features relative
to the "master" gas box:
12.2.1 Unique flow schematic
12.2.2 Enclosure modifications
12.2.3 Part changes that are significant enough to alter the airflow
characteristics of the finished assembly
12.3 Gas boxes considered to be of the same configuration will generally be
characterized by Novellus customer defined changes such as
12.3.1 Preferred part manufacturers or materials of construction
12.3.2 Color changes
12.3.3 Flow rate changes/special calibrations
12.4 Airflow test data shall be compiled in compliance with 67-162885-00.
12.5 Gas boxes of the same configuration may be qualified with airflow testing data from
the Master Configuration (in lieu of new testing).
12.5.1 In lieu of data is acceptable for "same" configurations, but must
reference the Novellus part number of the in lieu assembly.
13.0 Panel Leak Integrity

13.1 Refer to ASTM E 498, Method A for leak test methodology.

13.2 Inboard Helium leak testing shall be performed against all gas systems.
13.2.1 Leak testing equipment must be calibrated per the manufacturer' s
specifications prior to testing each assembly, and must have a detection
limit of 1x10-10 std. cc/Sec He or better (ref ASTM E 498).
13.3 It is recommended that individual tube weldments are fabricated and helium leak
tested to 1x10-9 std. cc/Sec prior to use in the final assembly.
13.3.1 Suppliers may opt to evaluate individual tube weldment leak integrity as
part of the completed assembly test.
13.4 Each interface fitting and component with a leak test port is to be verified to 1x10-9
std. cc/Sec He and monitored for a minimum of 10 seconds. Welds shall also be
verified if not pre-tested prior to installation.
13.4.1 In order to ensure a thorough leak test, it is recommended that the
assembly drawing be marked as each point is tested.
13.5 Upon leak testing, any fittings that leak will not be re-tightened. The fitting shall be
disassembled and inspect for the following. Make sure old VCR fitting label is
completely removed prior to disassembling the fitting.
13.5.1 Inspect VCR gland seal beads for damage.
13.5.2 Verify only one gasket is installed. Inspect gasket condition, replace if
suspect.
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13.5.3 Apply VCR fitting label after fitting is tightened. See section 20.0 for
VCR fitting label requirement and installation examples.

14.0 Particle Testing

14.1 Static Particle testing of finished assemblies is required for all assemblies.
14.1.1 Testing is to be performed after conclusion of all other functional
testing.
14.2 Static Test Criteria (Reference current SEMI E-49.8 standard and SEMI F-28 test
method)
14.2.1 Particle levels shall be confirmed by using a laser particle counter (LPC)
or a condensation nucleus counter (CNC) with a detection limit of .05µm
or better
14.2.2 Each flow channel must be tested at a minimum flow rate of .05 SCFM
N2 or Ar for a minimum duration per current SEMI standard.
14.2.3 Static Testing Detection
14.2.3.1 1 per sample for a particle size ≥ 0.05µm
14.2.3.2 Zero per sample for a particle size ≥ 0.1µm
15.0 Component Calibration & Performance Verification

15.1 Pressure regulator’s lock-up, creep, and set point stability shall meet manufacturer
specification. If manufacturer does not have the lock-up, creep, and set point
stability specified, use the following values for general purpose:
Reference SEMI F101 for test method.
Test measurement Specification
Lock-up rate 3 psi
Creep rate 10 psi for 8 hour period (include Lock-up rate)
Set point stability ± 5% of pressure set point
15.2 MFC & MFM calibration and performance is to be verified against the
manufacturer' s published literature or Novellus defined requirements (as identified
in the gasbox functional specification) using an appropriately sized calibrated
standard.
15.3 If no published standard condition and test information exists, the following
guidelines shall apply.
15.3.1 Standard Inlet pressure: As defined by Novellus Functional Specification
15.3.2 Standard Outlet pressure: Vacuum, <5 Torr
15.3.3 MFC and MFM
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Test requirement Analog MFC Digital MFC

Flow calibration test ± 1.2% of full scale at set points of ± 1% of set points at test points at
50% and 100% of full scale rated 35% and 100% of full scale
flow
± 1% of full scale at test points at
5% and 10% of full scale
Zero set point ≤2% of full scale at maximum ≤ 1% of full scale at maximum
internal leak by rate operating inlet pressure or 40 psi if operating inlet pressure or 40 psi if
operating pressure is not specified operating pressure is not specified
Downward set point 3 sec. to ± 2% of full scale at set ≤1 sec. to ± 2% full scale at set pt
response time point of >10% of full scale per of >10% of full scale per SEMI
SEMI E17-91 E17-91
Upward set point 3 sec. to - 2% of full scale at set ≤1 sec. to ± 2% full scale at set pt
response time point of >10% of full scale per of >10% of full scale per SEMI
SEMI E17-91 E17-91
15.3.3.1 MFM' s shall be verified to ± 2% of full scale at set points of
50% and 100% of full scale rated measurement.
15.4 Manual and pneumatic isolation valves shall be verified for internal leak rate per the
manufacturer'
s specifications. If manufacturer specification is not published, use
1x10e-9 atm-cc/sec as a general spec.
15.5 When installed as a safety device, FLO' s (flow limiting orifices/flow restrictors)
shall be functionally flow verified against the manufacturer' s specification.
15.5.1 Contact Novellus Engineering for clarification of use, as FLO'
s are also
used in non-safety related applications.
15.6 Pressure transducer displays shall be adjusted for zero and span per the
manufacturer' s recommendations.
15.6.1 Final calibration to be verified using a purge gas pressure of 30psig. and
vacuum level of at least 10mTorr.
16.0 Functional Tests

16.1 General
16.1.1 Functional verification against expected operation (as defined by the
component manufacturer) is to be performed against all panel
components while in the completed assembly state. Individual
component testing prior to installation into the panel may also be
performed per supplier preference.

16.2 Grounding
16.2.1 Verify that all removable panels that have a ground wire attachment to
the chassis have a panel to chassis resistance no greater than .1Ω
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16.3 Interlocks
16.3.1 All interlock hardware supplied by the gas panel supplier shall be
verified for proper operation against the Novellus interlock matrix or
schematic.
16.3.2 Interlocks shall be tested individually.
16.3.3 Interlocks shall be verified for preferential gas valve closure per the
Novellus interlock schematic.
16.3.4 Electrical interlocks shall be verified for proper switch closures and
harness continuity at the bulkhead connectors on the enclosure.
16.4 Gas Flow Channels
16.4.1 All channels shall be tested under conditions that simulate the normal
functional state of the completed assembly. This includes, but is not
limited to parameters such as:
16.4.1.1 Gasline inlet gas pressures
16.4.1.2 MFC/MFM pressure differentials
16.4.1.3 Purge loop Transducer supply pressure
16.4.2 All component Electrical and Pneumatic functional testing shall be
performed from the appropriate interface bulkhead in order to ensure
integrity of the entire control circuit.
16.4.2.1 Direct connection to flow controllers, pneumatic valving,
transducers, etc. is only to be done for troubleshooting
purposes.
16.4.2.2 Read-back signals shall be verified for all flow controllers,
meters and transducers.
16.4.2.3 Channel final functional tests shall be invalidated by
disconnection of any tested device from its associated control
input.
17.0 Post Test Packaging Preparation

17.1 All channels shall be fully N2 purged for one minute using the inlet pressure
identified within the Novellus Specification.
17.2 After completion of the 1-minute flow period, the outlet fitting shall be capped and
the line allowed charging to inlet pressure, at which point the most upstream
isolation valve shall be closed.
17.3 Cap the inlet fitting, and affix a removable tag to enclosure indicating that all
channels have been charged with N2 at the respective channel pressures.
18.0 Pre-shipment Inspection and Packaging

18.1 Verify all post-assembly workmanship requirements are met.

18.2 Label the assembly per 74-024094-00, Method 6, Style 4.
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18.3 Verify all panels or other components removed during functional test have been
reinstalled.
18.4 Verify that all necessary hazard identification labels have been applied to the
exterior of the assembly.
18.5 Verify that flow schematic label has been affixed to interior of enclosure door.
18.6 Wipe down the assembly with cleanroom wipes and IPA.
18.7 Double package the assembly in cleanroom compatible anti static bags. The first
package shall be N2 purged and sealed prior to insertion into the second bag.
19.0 Panel Data Files

19.1 General
19.1.1 Data Files serve as the quality record for production of the assembly,
and may be used for verification purposes in the future.
19.1.2 Assembly Data Files shall be archived by the supplier for a period of
five years.
19.2 Content
19.2.1 All data collected per section 10.0 Part Serialization.
19.2.2 OEM manufacturer'
s data sheets for testing, calibration, certification
19.2.3 Evidence of the component audit
19.2.4 Serialized component cross reference matrix
19.2.5 Air Flow Test report (in lieu of document if applicable)- gas boxes only
19.2.6 Supplier specific test reports and calibration verification information
19.2.6.1 Tested performance of MFC' s with list of correction factors
corresponding to nitrogen gas
19.2.6.2 Panel Leak Test Report
19.2.6.3 Visual Inspection Report

20.0 VCR Fitting Labels Requirements

20.1 Label material shall be White Destructive Vinyl, non-laminated with
perforation (2 cuts) as shown. Letter text shall be Black 6 pt. Font on
white background. Number text shall be Black 4 pt. Font on white
background. Referenced 3M 7900/7610 Destructive White Vinyl Film
or equivalent. See figure 1.
20.2 It is required that a label be applied across all VCR connections as an
indicator that a connection has been properly tightened according to
manufacturer specification (i.e. 1/8 turn past finger tight). This
requirement applies to all gas boxes, gas panels, and retrofit kit that
contain pre-assembled tube assemblies.
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20.3 Label shall be applied diagonally across a fitting as shown in examples

below. The reason for the diagonal application is to make it taunt so it
would tear easily if the fitting is loosened. If access is a problem, label
applied straight across two fitting is acceptable.
20.4 In case of component replacement or if fitting needs to be inspected,
make sure to remove existing label before fitting is disassembled.

6 pt. font bold 4 pt. font bold

Novellus Systems Inc. R 0.25"

Vendor Code

4 pt. font bold 0.30"

1.00"

FIGURE 1

Acceptable Methods

Label should be applied diagonally as shown below.

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Tightened

FIGURE 1

VCR Connection with Manual Shut Off Valve

Leak Check Port(s)

FIGURE 2

Label shown applied across fitting on the outlet of Manual Shut off valve. Do not cover leak check
port(s).

VCR Male-Female Connection

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Leak Check Port(s)

FIGURE 3

Label shown applied across Male-Female VCR fitting. Do not cover leak check port(s). Do not
cover component part number(s).
VCR connection with Filter

Acceptable, see
section 2.3

Leak Check Port(s)

FIGURE 4

Label shown applied across fitting connection on the input and output of filter. Do not cover leak
check port(s). Do not cover component part number(s).

VCR Connection with Flow Restrictor

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Leak Check Port(s)

Do not cover
component part
number(s)

FIGURE 5

Label shown applied across fitting connections on input and output flow restrictor. Do not cover leak check
port(s). Do not cover component part number(s).

Label on 1/8” VCR Fitting

Leak Check Port(s)

FIGURE 6

Label applied across 1/8” VCR fitting. Do not cover leak check port(s).
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Overall Appearance

FIGURE 7

Labels and label texts should line up in the same direction and orientation.

Unacceptable Methods

Do not wrap label around fitting

FIGURE 8
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Do not cover leak port

FIGURE 9

Damaged Label

FIGURE 10

Label not adhered to fitting

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FIGURE 11

Label install in wrong direction. See Figure 1.

Tightened

FIGURE 12
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21.0 Production Shipment Issues

21.1 Part Shortages or other build deficiencies that are not considered to be
shipment disabling may be acceptable to Novellus Systems, Inc. when
properly documented using the Novellus SRD process. Contact Novellus
Supplier Quality Engineering for further information.