6 1 2 p0883 1013 vfs1000 - en PDF

5 Port Pilot Operated Solenoid Valve
VFS1000/2000/3000/4000/5000/6000 Series
Metal Seal
SV
Series Variations [Option]
Sonic conductance Type of Voltage Electrical entry With light/surge Manual SYJ
Series C [dm3/s·bar)] actuation voltage suppressor override
4/2  5/3(A/B  R1/R2)
Single 3
(Option)
SZ
Double position
2 position single
(A)4 2(B) (Standard) Grommet (G) Grommet With light/surge voltage Non-locking
VF
100 VAC, 50/60 Hz terminal suppressor
VFS1000 1.8 1.8 513
(R1) (P) (R2)
200 VAC, 50/60 Hz
(E)
• Grommet terminal (EZ)
push type
(Flush) VP4
Body Ported
2 position double
(P.886) (A)4 2(B)
24 VDC • Conduit terminal (TZ)
• DIN terminal (DZ) VQ
513 Non-locking 1/2
(R1)(P)(R2)
With surge voltage push type
3 position closed center (Semi-standard) VQ
(A)4 2(B) suppressor (Extended)
VFS2000 3.4 3.4 110 to 120 VAC, 50/60 Hz Conduit DIN • Grommet (GS)
4/5
220 VAC, 50/60 Hz terminal (T) terminal (D)
513
(P.894) (R1)(P)(R2)
Note) • Indicator light is not VQC
3 position exhaust center available for grommet Locking type 1/2
(A)4 2(B) 240 VAC, 50/60 Hz
type. Only surge voltage (Tool required)
5 13
12 VDC suppressor can be VQC
(R1)(P)(R2)
3 position pressure center 100 VDC
equipped on the middle
Locking type ∗ 4/5
VFS3000 6.8 6.5 (A)4 2(B)
of lead wire.
• DC: There is polarity. (Lever)
(P.902) (Lead wire VQZ
513
(R1)(P)(R2)
Red: +, Black: –)
∗ Locking type (lever) is not available for body ported VFS2000/3000 series.
SQ
Plug-in With light/surge voltage
2 position single suppressor
(A)4 2(B) Conduit
terminal (F) • Plug-in type VFS
Conduit terminal (FZ)
513
(R1) (P) (R2) Non plug-in
• Non plug-in type
Grommet terminal (EZ)
VFR
2 position double Grommet Conduit terminal (TZ)
Grommet (G)
VFS2000
(A)4 2(B) terminal (E) DIN terminal (DZ) VQ7
Plug-in type With surge voltage suppressor
2.8 2.7 513
(R1)(P)(R2) • Non plug-in type
Non plug-in type
Grommet (GS) Non-locking
(P.914) 3 position
closed center Note) • Indicator light is not push type
Conduit DIN terminal available for grommet
(A)4 2(B) (Flush)
terminal (T) (D) type. Only surge voltage
suppressor can be
513 equipped on the middle
(R1)(P)(R2) of lead wire. Non-locking
(Standard)
Base Mounted
• DC: There is polarity. push type

3 position (Lead wire
exhaust center 100 VAC, 50/60 Hz Red: +, Black: –)
(Extended)
(A)4 2(B) 200 VAC, 50/60 Hz
VFS3000 24 VDC Plug-in
With light/surge voltage
suppressor Locking type
Plug-in type 5.8 5.4 5 13 Conduit (Tool required)
Non plug-in type
(R1)(P)(R2)
terminal (F) • Plug-in type
(P.940) 3 position Conduit terminal (FZ)
pressure center (Semi-standard) • Non plug-in type Locking type
VFS4000 (A)4 2(B)
110 to 120 VAC, 50/60 Hz Non plug-in Grommet terminal (EZ)
DIN terminal (DZ)
(Lever)
Plug-in type 12 11 220 VAC, 50/60 Hz Grommet DIN
513
Non plug-in type (R1)(P)(R2) 240 VAC, 50/60 Hz terminal (E) terminal (D)
(P.962) 3 position 12 VDC
VFS5000 double check
(A)4 2(B)
100 VDC
Plug-in type 20 17
Non plug-in type
513
(P.982) (R1)(P) (R2)
Plug-in
2 position single Conduit
(A)4 2(B) terminal (F)
VFS6000 Non plug-in
Non-locking
Plug-in type 513 push type
38 — (R1) (P) (R2)
Grommet DIN
Non plug-in type (Flush)
terminal (E) terminal (D)
(P.998) 2 position double
(A)4 2(B)
315
(R1)(P)(R2)
883
VFS Series
Manifold Variations
Manifold
Bar Stacking With With With With Non plug-in
base base attachment terminal multi- D-sub (Connection to
plug lead wire block connector connector each valve)
VFS1000
Body Ported
(P.891)
VFS2000 (P.899)
VFS3000 (P.908)
VFS2000 (P.922) (P.922) (P.922) (P.923)

Base Mounted
Plug-in Type
VFS3000 (P.946) (P.946) (P.946)
VFS4000 (P.968) (P.968) (P.968)
VFS5000 (P.988) (P.988) (P.988)
VFS2000 (P.923)
Non Plug-in Type
Base Mounted
VFS3000 (P.946)
VFS4000 (P.968)
VFS5000 (P.988)
Bar Base Plug-in With terminal block

(VFS1000/2000 series)
Pilot individual EXH
Pilot common EXH

With attachment
plug lead wire
With multi-connector
With D-sub connector
Stacking base
(VFS3000 series)
Pilot common EXH
Non Plug-in
Grommet terminal DIN terminal
∗ Bottom piping is available as an option.
884
Metal Seal
5 Port Pilot Operated Solenoid Valve VFS Series
Manifold Option Manifold Option Parts

With With Dripproof Serial Individual Individual SUP EXH Throttle Interface Air shutoff Air release Double Blanking
exhaust control manifold transmission SUP EXH block block valve regulator valve valve check plate SV
kit manifold
cleaner unit (Equivalent (EX123/4-type spacer spacer disk disk spacer spacer spacer spacer
to IP65) compatible)
SYJ

(P.891)
SZ

(P.899)
VF

(P.908)
VP4
  Note)
 Note)
          VQ
1/2
(P.929) (P.931) (P.934) (P.924) (P.924) (P.924) (P.924) (P.924) (P.924) (P.924) (P.924) (P.924) (P.924)
   Note)
        VQ
4/5
(P.951) (P.953) (P.956) (P.948) (P.948) (P.948) (P.948) (P.948) (P.948) (P.948) (P.948)
   Note)
        VQC
1/2
(P.973) (P.975) (P.978) (P.970) (P.970) (P.970) (P.970) (P.970) (P.970) (P.970) (P.970)
  Note)
        VQC
4/5
(P.992) (P.994) (P.989) (P.989) (P.989) (P.989) (P.989) (P.989) (P.989) (P.989)
VQZ
          
(P.924) (P.924) (P.924) (P.924) (P.924) (P.924) (P.924) (P.924) (P.924) (P.924)
(P.929)
SQ
         
(P.951) (P.953) (P.948) (P.948) (P.948) (P.948) (P.948) (P.948) (P.948) (P.948)
VFS
         
(P.973) (P.975) (P.970) (P.970) (P.970) (P.970) (P.970) (P.970) (P.970) (P.970)
VFR
        
(P.992) (P.989) (P.989) (P.989) (P.989) (P.989) (P.989) (P.989) (P.989)
VQ7
Individual SUP spacer Interface regulator
With exhaust cleaner
Air shutoff valve spacer

Individual EXH spacer
With control unit

Air release valve spacer
SUP/EXH block disk
Double check spacer

Throttle valve spacer
Dripproof Manifold (Equivalent to IP65)

With serial transmission kit
Note) Made to Order Specifications
885
Metal Seal, Body Ported
VFS1000 Series
 VFS1000 series is compatible with the old models, VF220 and VF230 series.
[Option]
Model
Flow rate characteristics (1)
Max. (2)
operating Response Weight

(3)
Type of Port 1 4/2 (P A/B) 4/2 5/3 (A/B R1/R2)
Model time
actuation size C C cycle (kg)
b Cv b Cv (cpm) (ms)
[dm3/(s·bar)] [dm3/(s·bar)]
2 position
Single VFS1120 VFS1130 18 1.7 0.22 0.38 1.8 0.19 0.40 1200 15 or less 0.18
Double VFS1220 VFS1230 18 1.7 0.22 0.39 1.8 0.19 0.40 1200 13 or less 0.26
Closed 18
center VFS1320 VFS1330 1.6 0.20 0.37 1.8 0.20 0.41 600 20 or less 0.27
3 position
Exhaust
center VFS1420 VFS1430 18 1.7 0.18 0.38 1.9 0.19 0.44 600 20 or less 0.27
Pressure
center
VFS1520 VFS1530 18 1.7 0.24 0.40 1.6 0.18 0.37 600 20 or less 0.27
Note 1) Based on JIS B 8419: 2010 (once per 30 days) for the minimum operating frequency.
Note 2) Based on JIS B 8419-2010. (The value at supply pressure 0.5 MPa, ambient/fluid temperature (≈ 20°C))
However, this excludes when in an adhered state. (Be aware that after long periods of holding time, there may be delays in the initial response time.)
Note 3) In the case of grommet type
Note 4) “Note 1)” and “Note 2)” are with controlled clean air.
Compact yet provides a Standard Specifications

large flow capacity Fluid Air
Maximum operating pressure 1.0 MPa
C: 1.8 dm3/(s·bar)
Valve specifications
2 position 0.1 MPa

Min. operating pressure
Low power consumption: 3 position 0.15 MPa
Proof pressure 1.5 MPa
1.8 W DC Ambient and fluid temperature –10 to 60°C (1)
Lubrication Non-lube (2)
Pilot valve manual override Non-locking push type (Flush)
Impact/Vibration resistance 150/50 m/s2 (3)
Enclosure Dustproof (Equivalent to IP50) (4)
Coil rated voltage 100, 200 VAC, 50/60 Hz; 24 VDC
Electricity specifications
VFS1320-D-01
Allowable voltage fluctuation –15 to +10% of rated voltage
Coil insulation type Class B or equivalent (130°C) (5)
Apparent power Inrush 5.6 VA (50 Hz), 5.0 VA (60 Hz)
(Power consumption) AC Holding 3.4 VA (2.1 W)/50 Hz, 2.3 VA (1.5 W)/60 Hz
VFS1120-G-01-F Power consumption (DC) 1.8 W (2.04 W: With light/surge voltage suppressor)
Grommet, Grommet terminal,
VFS1220-E-01 Electrical entry
Conduit terminal, DIN terminal
Note 1) Use dry air at low temperatures.
Note 2) Use turbine oil Class 1 (ISO VG32), if lubricated.
VFS1120-G-01 Note 3) Impact resistance: No malfunction occurred when it is tested with a drop tester in the axial direction
and at the right angles to the main valve and armature in both energized and de-
energized states every once for each condition. (Values at the initial period)
Vibration resistance: No malfunction occurred in a one-sweep test between 45 and 2000 Hz. Test was
Symbol performed at both energized and de-energized states in the axial direction and
at the right angles to the main valve and armature. (Values at the initial period)
2 position 3 position Note 4) Based on JIS C 0920.
Single Closed center Note 5) Based on JIS C 4003.
(A)4 2(B) (A)4 2(B)
Option Specifications
Pilot valve manual override Non-locking push type (Extended), Locking type (Tool required), Locking type (Lever)
513 513
(R1) (P) (R2) (R1)(P)(R2) 110 to 120, 220, 240 VAC (50/60 Hz)
Coil rated voltage
Double Exhaust center 12, 100 VDC
(A)4 2(B) (A)4 2(B) Option With light/surge voltage suppressor Note)
Foot bracket (With screw) Part No.: AXT626-10A, VFS1120 (single) only
Note) Grommet type is available only w/ surge voltage suppressor (which is directly connected with lead wire).
513 5 13
(R1)(P)(R2) (R1)(P)(R2)
Pressure center
Manifold
(A)4 2(B)
Body type Applicable manifold base (Pilot EXH)
VFS120 Bar manifold (Individual EXH)
VFS130 Bar manifold (Common EXH base side)
513 Note) VFS130: Manifold only. Cannot be used as a single unit.
(R1)(P)(R2)
A 886
Metal Seal, Body Ported VFS1000 Series
How to Order
VFS1 1 20 1 G 01
Symbol CE-compliant
Option
2 position single Nil —
F: With foot bracket
(A)4 2(B)
Thread type
Q CE-compliant
SV
1
Nil Rc
513
(R1)(P) (R2) Port size N∗ NPT SYJ
2 position double 01 18 T∗ NPTF
(A)4 2(B) F∗ G SZ
2 ∗ Semi-standard ∗ Mountable only for
513
Manual override
VFS1120. VF
(R1)(P)(R2)
3 position closed center Nil: Non-locking push type A∗: Non-locking push type B∗: Locking type C∗: Locking type
(A)4 2(B) (Flush) (Extended) (Lever) VP4
3 VQ
513 1/2
(R1)(P)(R2)
3 position exhaust center VQ
(A)4 2(B) 4/5
∗ Semi-standard
4 VQC
Light/Surge voltage suppressor 1/2
5 13
(R1)(P)(R2) Nil None VQC
3 position pressure center Z With light/surge voltage suppressor 4/5
S∗
(A)4 2(B)
With surge voltage suppressor
5 ∗ Grommet type is available only w/ surge voltage suppressor, not w/ indicator light. VQZ
513
(R1)(P)(R2)
Electrical entry SQ
Body (Pilot exhaust) G: Grommet E: Grommet terminal T: Conduit terminal D, Y: DIN terminal
DO, YO: DIN terminal
20: Individual EXH
without connector VFS
VFR
VQ7
Coil rated voltage
30∗: Common EXH 1 100 VAC (50/60 Hz)
2 200 VAC (50/60 Hz)
3∗ 110 to 120 VAC (50/60 Hz)
4∗ 220 VAC (50/60 Hz)
5 24 VDC
6∗ 12 VDC
7∗ 240 VAC (50/60 Hz)
∗ Semi-standard Note) No mounting bolts and gaskets are supplied with the valve single unit.
∗ Manifold only For other rated voltages, please
consult with SMC.
How to Order Pilot Valve Assembly
SF4 1 DZ 21
Applicable model
Coil rated voltage Manual override Individual pilot
1 100 VAC, 50/60 Hz Electrical entry, Light/Surge voltage suppressor Non-locking push 21 For VFS120
exhaust
2 200 VAC, 50/60 Hz G Grommet Nil
type (Flush) Common pilot
3∗ 110 to 120 VAC (50/60 Hz) GS Grommet with surge voltage suppressor Non-locking push 22 For VFS130
exhaust
A ∗
4∗ 220 VAC, 50/60 Hz D DIN terminal type (Extended)
5 24 VDC DZ DIN terminal with light/surge voltage suppressor Locking type
B∗
6∗ 12 VDC DO DIN terminal ∗∗ (Tool required)
7∗ 240 VAC, 50/60 Hz DOZ DIN terminal with light/surge voltage suppressor ∗∗ Locking type
C∗
∗ Semi-standard Y∗ DIN terminal (Lever)
For other rated voltages, YZ∗ DIN terminal with light/surge voltage suppressor ∗ Semi-standard
please consult with SMC. YO∗ DIN terminal ∗∗
YOZ∗ DIN terminal with light/surge voltage suppressor ∗∗
T Conduit terminal
TZ Conduit terminal with light/surge voltage suppressor
E Grommet terminal
EZ Grommet terminal with light/surge voltage suppressor
∗ Y: Conforming to DIN43650B standard
∗∗ DIN connector is not attached.
887 A
VFS1000 Series
Cylinder Speed Chart

Use as a guide for selection.
Please confirm the actual conditions with SMC
Body Ported Sizing Program.
Bore size
CJ2 series CM2 series MB, CA2 series
Average
Pressure 0.5 MPa Pressure 0.5 MPa Pressure 0.5 MPa
Series speed
Load factor 50% Load factor 50% Load factor 50%
(mm/s)
Stroke 60 mm Stroke 300 mm Stroke 500 mm
ø6 ø10 ø16 ø20 ø25 ø32 ø40 ø40 ø50 ø63 ø80 ø100
800 Perpendicular,
700 upward actuation
600 Horizontal
500 actuation
VFS1120-01 400
300
200
100
0
Conditions ∗ It is when the cylinder is extending that is meter-out controlled by

Body ported CJ2 series CM2 series MB, CA2 series speed controller which is directly connected with cylinder, and its
Tube bore x Length T0604 x 1 m T0806 x 1 m needle valve with being fully open.
∗ The average velocity of the cylinder is the value that the stroke is
VFS1120-01 Speed controller AS3002F-06 AS3002F-08 divided by the total stroke time.
Silencer AN101-01 ∗ Load factor: ((Load mass x 9.8)/Theoretical force) x 100%
Construction
(A)4 2(B) (A)4 2(B)
2 position single 2 position double
513 513
(R1) (P) (R2) (R1)(P)(R2)
Closed center
(A)4 2(B) 3 position closed center/exhaust center/pressure center
513
(R1)(P)(R2)
Exhaust center
(A)4 2(B)
5 13
(R1)(P)(R2)
Pressure center
(A)4 2(B)
513
(R1)(P)(R2)
Component Parts
No. Description Material Note
1 Body Aluminum die-casted —
2 Spool/Sleeve Stainless steel —
3 End plate Resin —
4 Piston Resin —
5 Return spring Stainless steel —
6 Pilot valve assembly — —
7 Detent assembly — —
∗ Refer to “How to Order Pilot Valve Assembly” on page 887.
888
2 Position Single — Grommet, Grommet terminal, Conduit terminal, DIN terminal

Grommet : VFS1120-G Foot bracket (F)
Part no. : AXT626-10A
2 x ø4.5
Manual mounting hole
override 2 x ø4.5 mounting hole
Non-locking push type SV
SYJ
SZ
Solenoid valve
VF
(Lead wire length)
Manual 2 x ø3.5
VP4
override mounting hole
VQ
≈ 300
(Locking type)
1/2
Pilot EXH VQ
(No VFS130) 4/5
VQC
1/2
VQC
4/5
5 x Rc 1/8
VQZ
M3 x 0.5 x 14L
Countersunk head screw
SQ
Tightening torque: 0.6 N·m
VFS
VFR
VQ7
Grommet terminal: VFS1120-E/EZ DIN terminal: VFS1120-D/DZ/Y/YZ
Lead wire O.D.
Max. ø3.5 Applicable heavy-duty code
O.D. ø6 to ø8
With light/surge voltage (Y: ø4.7 to ø7)
suppressor (EZ) With light/surge voltage
Light suppressor (DZ)
Manual override Connector
(Locking type) Light
Manual override
(Locking type)
Conduit terminal: VFS1120-T/TZ

Gasket
Applicable heavy-duty code ( ): Y, YZ
O.D. ø6 to ø8
With light/surge voltage
suppressor (TZ) DIN Connector/Gasket Part No.
Light Description D(Z) type Y(Z) type
Manual override
Connector B1B09-2A6 GMN209
(Locking type) Gasket CAXT623-6-7-12 CAXT623-6-7-13
889
VFS1000 Series
2 Position Double, 3 Position — Grommet, Grommet terminal, Conduit terminal, DIN terminal
Grommet: VFS1220-G, VFS1320-G, VFS1420-G, VFS1520-G
2 x ø4.5 mounting hole
Manual override
Non-locking push type
151 (3 position: 155.5)
(Lead wire length)

Manual 2 x ø3.5 mounting hole
override
≈ 300
(Locking type)
Pilot EXH
(No VFS130)
Grommet terminal: VFS1220-E/EZ VFS1320-E/EZ DIN terminal : VFS1220-D/DZ/Y/YZ

VFS1420-E/EZ VFS1320-D/DZ/Y/YZ
VFS1520-E/EZ VFS1420-D/DZ/Y/YZ
Lead wire O.D. VFS1520-D/DZ/Y/YZ
Max. ø3.5 152 (3 position: 156.5)
Applicable heavy-duty cord

With light/surge voltage O.D. ø6 to ø8
suppressor (EZ) (Y: ø4.7 to ø7) 188 (3 position: 192.5)
Light
Manual override
(Locking type) With light/surge voltage
suppressor (DZ)
Light Connector
Manual override
(Locking type)
Conduit terminal: VFS1220-T/TZ VFS1320-T/TZ

VFS1420-T/TZ
VFS1520-T/TZ
Applicable heavy-duty cord Gasket ( ): Y, YZ
O.D. ø6 to ø8 188 (3 position: 192.5)
DIN Connector/Gasket Part No.
With light/surge voltage Description D(Z) type Y(Z) type
suppressor (TZ)
Light
Gasket CAXT623-6-7-12 CAXT623-6-7-13
Manual override
(Locking type)
890
VFS1000 Series
Manifold Specifications
Single Base Type
Specifications
Manifold base type Bar manifold, Body ported
Compact and lightweight
Compact due to manifolding on a single Stations Max. 15 stations SV
base for mounting in small spaces.
Port Specifications SYJ
Keeps environmental air Porting specifications: Rc (Connecting port size)
clean from pilot exhaust Symbol
Passage
Base Valve Base SZ
Use of the VV5FS1-30 manifold can exhaust 1(P) 5(R1), 3(R2) 1(P) 4(A), 2(B) 5(R1), 3(R2)
intensively the pilot exhaust gas to the base
side, and can prevent environmental
1 Common Common Side/(1/8) Top/(1/8) Side/(1/8) VF
aggravation due to noise and oil mist.
Option VP4
Blanking plate VVFS1000-10A-1 With gasket, screw
VQ
1/2
VQ
How to Order Manifold Base [Option] 4/5
VQC
VV5FS1 20 05 1 01 1/2
VQC
VV5FS1-20 4/5
VFS1000 Series CE-compliant
Manifold Nil — VQZ
Q CE-compliant
Thread type SQ
Nil Rc
N∗ NPT VFS
P, EA, EB port size T∗ NPTF
01 1/8 F∗ G VFR
∗ Semi-standard
Symbol VQ7
VV5FS1-30 Stations Passage Porting specifications
Symbol
02 2 stations 1(P) 3(R2), 5(R1) 2(B), 4(A)
Common Common Top
•••
•••
1 1 1 1
15 15 stations 8 8 8
Part no. for mounting bolt
and gasket Base model
BG-VFS1030 Model Pilot exhaust Applicable valve model
20 VFS120--01
Pilot common EXH
VFS130--01
30
∗VFS120--01
mountable
How to Order Manifold Assembly [Example]

Add the valve and option part numbers in order starting from the first station
on the D side.
<Example>
(Manifold base) VV5FS1-20-061-01 1
(2 position single) ∗ VFS1120-1D-01 3
(2 position double) ∗ VFS1220-1D-01 2
(Blanking plate) ∗ VVFS1000-10A-1 1
The asterisk denotes the symbol for
assembly. Prefix it to the part numbers of
the solenoid valve.
891 A
VFS1000 Series
Type 20 Manifold — Pilot individual exhaust: VV5FS1-20- Station 1-01

Grommet: G
Manual override
U side D side
Blanking plate
3 position Double Single ≈ 300

(Lead wire length)
Gasket
Pilot EXH
Stations
Formula for manifold weight M = 0.049n + 0.059 (kg) n: Station
Grommet terminal: E/EZ Conduit terminal: T/TZ DIN terminal: D/DZ/Y/YZ

Applicable heavy-duty cord O.D. ø6 to ø8
Lead wire O.D. O.D. ø6 to ø8 (Y: ø4.7 to ø7)
Max. ø3.5
3 position (156.5)
3 position (192.5)
Double (152)
3 position (192.5)
Double (188)
Double (188)
Single (103.5)
Single (121.5)
Single (121.5)
(With light/surge voltage suppressor: 82.5)
(With light/surge voltage suppressor: 91.5) (With light/surge voltage suppressor: 97.5 (99.5))
(With light/surge voltage suppressor: 106.5 (108.5))
( ): Y, YZ
n: Station
Symbol Stations 2 3 4 5 6 7 8 9 10 Formula
L1 59 83 107 131 155 179 203 227 251 L1 = 24 x n + 11
L2 77 101 125 149 173 197 221 245 269 L2 = 24 x n + 29
892
Type 30 Manifold — Pilot common exhaust: VV5FS1-30- Station 1-01

Grommet: G
SV
Manual override
SYJ
SZ
U side D side
VF
VP4
4 x ø5.2 mounting hole Blanking plate VQ
4 x M5 1/2
Pilot EXH port
VQ
3 position Double Single ≈ 300 4/5
(Lead wire length) VQC
1/2
VQC
4/5
Gasket
VQZ
SQ
Stations VFS
Formula for manifold weight M = 0.079n + 0.093 (kg) n: Station VFR

VQ7
Applicable heavy-duty code
O.D. ø6 to ø8
Applicable heavy-duty code (Y: ø4.7 to ø7)
Lead wire O.D. O.D. ø6 to ø8
3 position (156.5)
3 position (191.5)
Double (152)
3 position (192.5)
Double (187)
Double (188)
Single (103.5)
Single (121)
Single (121.5)
Pilot EXH port

Pilot EXH port
Pilot EXH port
( ): Y, YZ
n: Station
Symbol Stations 2 3 4 5 6 7 8 9 10 Formula
L1 59 83 107 131 155 179 203 227 251 L1 = 24 x n + 11
L2 77 101 125 149 173 197 221 245 269 L2 = 24 x n + 29
893
VFS2000 Series [Option]

(Details → P. 912)
Model
Flow rate characteristics (1) (2) (3)
Port Max.
Type of
Model size
1 4/2 (P A/B) 4/2 5/3 (A/B R1/R2) operating Response Weight
actuation C C cycle time (kg)
Rc b Cv b Cv (cpm) (ms)
18 3.2 0.24 0.78 3.4 0.28 0.82
2 position
Single VFS2120 VFS2130 14

1200 22 or less 0.26
4.0 0.20 0.90 3.5 0.32 0.85
18 3.2 0.24 0.78 3.4 0.28 0.82
Double VFS2220 VFS2230 1200 13 or less 0.35
14 4.0 0.20 0.90 3.5 0.32 0.85
Closed 18 3.2 0.24 0.78 3.2 0.27 0.80
center VFS2320 VFS2330 14
600 40 or less 0.42
4.0 0.20 0.90 3.4 0.29 0.83
3 position
Exhaust 18 3.2 0.25 0.79 3.4 0.26 0.82

center VFS2420 VFS2430 14 4.0 0.20 0.90 3.4 0.32 0.84
600 40 or less 0.42
Pressure 18 3.1 0.23 0.75 3.3 0.27 0.80

center VFS2520 VFS2530 14 4.0 0.24 0.92 3.3 0.30 0.82
600 40 or less 0.42
Note 3) In the case of grommet type Note 4) Factors of “Note 1)” and “Note 2)” are achieved in controlled clean air.
Compact yet provides a Standard Specifications

high flow capacity Fluid Air

1/4: C: 3.4 dm3/(s·bar) Minimum operating pressure 0.1 MPa
Low power consumption: Proof pressure 1.5 MPa
Ambient and fluid temperature –10 to 60°C (1)
1.8 W DC Lubrication Non-lube (2)
VFS2320-T-02 Allowable voltage fluctuation –15 to +10% of rated voltage

Apparent power Inrush 5.6 VA (50 Hz), 5.0 VA (60 Hz)
VFS2120-E-02-F Power consumption 1.8 W (2.04 W: With light/surge voltage suppressor)
VFS2220-E-02 Electrical entry Conduit terminal, DIN terminal
Note 3) Impact resistance: No malfunction occurred when it is tested with a drop tester in the axial direction
VFS2120-G-02 and at the right angles to the main valve and armature in both energized and de-
Symbol energized states every once for each condition. (Values at the initial period)
2 position 3 position Vibration resistance: No malfunction occurred in a one-sweep test between 45 and 2000 Hz. Test was
performed at both energized and de-energized states in the axial direction and
Single Closed center
at the right angles to the main valve and armature. (Values at the initial period)
(A)4 2(B) (A)4 2(B) Note 4) Based on JIS C 0920.
Note 5) Based on JIS C 4003.
513 513 Option Specifications

(R1) (P) (R2) (R1)(P)(R2) Pilot type External pilot (1)
Double Exhaust center Pilot valve manual override Non-locking push type (Extended), Locking type (Tool required)
(A)4 2(B) (A)4 2(B) 110 to 120, 220, 240 VAC (50/60 Hz)
Coil rated voltage
12, 100 VDC
Option With light/surge voltage suppressor (2)
513 5 13 Foot bracket (With screw) Part no.: VFN200-17A, VFS2120 (single) only
(R1)(P)(R2) (R1)(P)(R2)
Note 1) Operating pressure: 0 to 1.0 MPa. Pilot pressure: 0.1 to 1.0 MPa.
Pressure center Note 2) Grommet type is available only w/ surge voltage suppressor (which is directly connected with lead
(A)4 2(B) wire), not w/ indicator light.
Manifold
513 Body type Applicable manifold base (Pilot EXH)
(R1)(P)(R2) VFS220 Bar manifold (Individual EXH)
VFS230 Bar manifold (Common EXH base side)
Note) VFS230: Manifold only. Cannot be used as a single unit.
A 894
How to Order [Option]
VFS2 1 20 1 G 01
Symbol CE-compliant
Option Nil —
1: 2 position single
(A)4 2(B)
Thread type
F: With foot bracket Q CE-compliant
SV
Nil Rc
513
(R1)(P) (R2) Port size N∗ NPT SYJ
2: 2 position double 01 18
(A)4 2(B) T∗ NPTF
02 14
F∗ G SZ
513
∗ Semi-standard
(R1)(P)(R2)
3: 3 position closed center
∗ Mountable only for VFS2120.
VF
(A)4 2(B) Manual override
Nil: Non-locking push type A∗: Non-locking push type
(Flush) (Extended)
B∗: Locking type
(Tool required)
VP4
513
(R1)(P)(R2)
VQ
4: 3 position exhaust center 1/2
(A)4 2(B)
VQ
5 13 4/5
(R1)(P)(R2)
5: 3 position pressure center ∗ Semi-standard VQC
(A)4 2(B) 1/2
Light/Surge voltage suppressor
Nil None VQC
513
(R1)(P)(R2) Z With light/surge voltage suppressor
4/5
∗ Reverse pressure: Can be S∗ With surge voltage suppressor
used by external pilot speci-
∗ Grommet type is available only w/ surge voltage suppressor, not w/ indicator light.
VQZ
fications.
Body (Pilot exhaust) Electrical entry SQ

20: Individual EXH G: Grommet E: Grommet terminal T: Conduit terminal D, Y: DIN terminal
without connector
VFS
VFR
30: Common EXH∗

VQ7
Coil rated voltage

1 100 VAC (50/60 Hz)
2 200 VAC (50/60 Hz)
3∗ 110 to 120 VAC (50/60 Hz)
∗ Manifold only
4∗ 220 VAC (50/60 Hz)
Pilot type 5 24 VDC
Nil Internal pilot 6∗ 12 VDC
R∗ External pilot 7∗ 240 VAC (50/60 Hz)
∗ Semi-standard: Individual ∗ Semi-standard Note) No mounting bolts and gaskets are supplied with the valve single unit.
external pilot (External pi- For other rated voltages, please
lot port: Body side) consult with SMC.

SF4 1 DZ 12
Applicable model
Coil rated voltage
Individual pilot
1 100 VAC, 50/60 Hz Electrical entry, Light/Surge voltage suppressor 12 For VFS220 exhaust
2 200 VAC, 50/60 Hz G Grommet
Common pilot
3∗ 110 to 120 VAC (50/60 Hz) GS Grommet with surge voltage suppressor 13 For VFS230 exhaust
4 ∗ 220 VAC, 50/60 Hz D DIN terminal
5 24 VDC DZ∗ DIN terminal with light/surge voltage suppressor
Manual override
6∗ 12 VDC DO∗ DIN terminal ∗∗
Nil Non-locking push type (Flush)
7∗ 240 VAC, 50/60 Hz DOZ∗ DIN terminal with light/surge voltage suppressor ∗∗
A∗ Non-locking push type (Extended)
∗ Semi-standard Y∗ DIN terminal ∗
B Locking type (Tool required)
For other rated voltages, please YZ∗ DIN terminal with light/surge voltage suppressor
∗ Semi-standard
consult with SMC. YO∗ DIN terminal ∗∗
T Conduit terminal
E Grommet terminal ∗ Y: Conforming to DIN43650B standard
EZ Grommet terminal with light/surge voltage suppressor ∗∗ DIN connector is not attached.
895 A
VFS2000 Series

Bore size
Average CJ2 series CM2 series MB, CA2 series
Series speed Load factor 50% Load factor 50% Load factor 50%
(mm/s) Stroke 60 mm Stroke 300 mm Stroke 500 mm
ø6 ø10 ø16 ø20 ø25 ø32 ø40 ø40 ø50 ø63 ø80 ø100
800 Perpendicular,
600 Horizontal
500 actuation
VFS2120-02 400
300
200
100
0
Conditions ∗ It is when the cylinder is extending that is meter-out

controlled by speed controller which is directly
Body ported CJ2 series CM2 series MB, CA2 series connected with cylinder, and its needle valve with being
Tube bore x Length T0604 x 1 m T1075 x 1 m fully open.
VFS2120-02 Speed controller AS3001F-06 AS4001F-10 ∗ The average velocity of the cylinder is the value that
the stroke is divided by the total stroke time.
Silencer AN110-01
∗ Load factor: ((Load mass x 9.8)/Theoretical force) x
100%
Construction
(A)4 2(B) 2 position single (A)4 2(B) 2 position double
513 513
(R1) (P) (R2) (R1)(P)(R2)
Closed center 3 position closed center/exhaust center/pressure center

(A)4 2(B)
513
(R1)(P)(R2)
Exhaust center
(A)4 2(B)
5 13
(R1)(P)(R2)
Pressure center
(A)4 2(B)
513
(R1)(P)(R2)
Component Parts
4 Piston Resin —
896

Grommet: VFS2120-G Foot bracket (F)
Part no.: VFN200-17A
SV
SYJ
Manual override SZ
(Non-locking)
2 x ø3.5 mounting hole ( M5: External pilot port
∗ Only for external pilot model. ) 2 x ø4.5
mounting hole Solenoid valve VF
(Lead wire length)
VP4
≈ 300
VQ
1/2
VQ
4/5
VQC
1/2
VQC
4/5
3 x Rc 1/8, 1/4
2 x Rc 1/8 VQZ
SQ
VFS
VFR
VQ7
With light/surge voltage suppressor (EZ)
Lead wire O.D.

Max. ø3.5 Applicable heavy-duty code O.D. ø6 to ø8 (Y: ø4.7 to ø7)
Light With light/surge voltage suppressor (DZ)
Connector
Light

Applicable heavy-duty code O.D. ø6 to ø8
Gasket 2 x ø3.5 mounting hole
With light/surge voltage suppressor (TZ)
( ): Y, YZ
Light DIN Connector/Gasket Part No.

Description D(Z) type Y(Z) type
Gasket CAXT623-6-7-12 CAXT623-6-7-13
897
VFS2000 Series
182 (3 position: 192.5)
Manual override
(Non-locking) (M5: External pilot port
2 x ø3.5 mounting hole ∗ Only for external pilot model.)
(Lead wire length)
≈ 300
3 x Rc 1/8, 1/4
2 x Rc 1/8
Grommet terminal: VFS2220-E/EZ VFS2320-E/EZ DIN terminal: VFS2220-D/DZ/Y/YZ

VFS2420-E/EZ VFS2520-E/EZ VFS2320-D/DZ/Y/YZ
VFS2420-D/DZ/Y/YZ
Lead wire O.D. Max. ø3.5 VFS2520-D/DZ/Y/YZ
182 (3 position: 193)
Applicable heavy-duty code O.D. ø6 to ø8 (Y: ø4.7 to ø7)
With light/surge voltage suppressor (DZ)
Light
219 (3 position: 229)
Light Connector
Conduit terminal: VFS2220-T/TZ VFS2320-T/TZ

VFS2420-T/TZ VFS2520-T/TZ 2 x ø3.5 mounting hole
Gasket
Applicable heavy-duty code O.D. ø6 to ø8
( ): Y, YZ
With light/surge voltage suppressor (TZ)
219 (3 position: 229) DIN Connector/Gasket Part No.
Light Connector B1B09-2A6 GMN209
Gasket CAXT623-6-7-12 CAXT623-6-7-13
898
VFS2000 Series
Single Base Type
Specifications
Keeps environmental air Manifold base type Bar manifold, Body ported
clean from pilot exhaust Stations Max. 15 stations SV
Use of the VV5FS2-30 manifold can exhaust
intensively the pilot exhaust gas to the base Port Specifications SYJ
side, and can prevent environmental Porting specifications
aggravation due to noise and oil mist. Passage
Symbol Base Valve Base SZ
1(P) 5(R1), 3(R2) 1(P) 2(B), 4(A) 3(R2), 5(R1)
1 Common Common Side: 8
3 Top: 8, 4
1 1 Side: 3 8
VF
Option VP4
VQ
1/2
VQ
How to Order Manifold Base [Option] 4/5
VQC
VV5FS2-20 VV5FS2 20 05 1 03 1/2
VQC
CE-compliant 4/5
VFS2000 Series
Nil —
Manifold VQZ
Q CE-compliant
Thread type SQ
Nil Rc
N∗
T∗
NPT
NPTF
VFS
F∗ G
∗ Semi-standard VFR
VV5FS2-30 P, EA, EB port size VQ7
03 38
Symbol
Part no. for mounting bolt and gasket
Stations Passage Porting specifications
BG-VFS2030 1(P) 3(R2), 5(R1) 2(B), 4(A)
02 2 stations
Common Common Top
•••
•••
1 38 38 1 8, 1 4
15 15 stations
Base model
Model Pilot exhaust Applicable valve model
20 VFS220--01
02
Pilot common EXH
VFS230--01
02
30
∗VFS220--01
How to Order Manifold Assembly
02
mountable
[Example]
Add the valve and option part numbers in order starting from the
first station on the D side.
<Example>
assembly. Prefix it to the part
numbers of the solenoid valve.
899 A
VFS2000 Series
Type 20 Manifold — Pilot individual exhaust: VV5FS2-20- Station 1-03

Grommet: G
2n x Rc 1/8, 1/4
M3 x 44
6 x Rc 3/8
U side D side
4 x ø5 mounting hole
Blanking plate
≈ 300
(Lead wire length)
Pilot EXH
Gasket
Stations

O.D. ø6 to ø8
O.D. ø6 to ø8 (Y: ø4.7 to ø7)
Lead wire O.D.
Max. ø3.5
6 x Rc 3/8 6 x Rc 3/8 6 x Rc 3/8

3 position (229)
3 position (229)
3 position (193)
Double (219)
Double (219)
Double (182)
Single (143.5)
Single (125)
Single (143)

(With light/surge voltage suppressor: 96)
( ): Y, YZ
n: Station
L Stations 2 3 4 5 6 7 8 9 10 Formula
L1 58 83 108 133 158 183 208 233 258 L1 = 25 x n + 8
L2 68 93 118 143 168 193 218 243 268 L2 = 25 x n + 18
900

Grommet: G
2n x Rc 1/8, 1/4
SV
M3 x 44
SYJ
SZ
U side D side
VF
VP4
VQ
4 x ø5 mounting hole 1/2
6 x Rc 3/8
VQ
4 x M5 (Pilot EXH port) 4/5
Blanking plate ≈ 300 VQC
(Lead wire length) 1/2
VQC
4/5
VQZ
Gasket
SQ
VFS
Stations VFR
VQ7
O.D. ø6 to ø8
O.D. ø6 to ø8 (Y: ø4.7 to ø7)
Lead wire O.D.
Max. ø3.5
3 position (193)
3 position (229)
3 position (229)
Double (219)
Double (182)
Double (219)
Single (143.5)
Single (125)
Single (143)

(With light/surge voltage suppressor: 115 (117))
(With light/surge voltage suppressor: 124 (126))
( ): Y, YZ
n: Station
L1 62 87 112 137 162 187 212 237 262 L1 = 25 x n + 12
L2 92 117 142 167 192 217 242 267 292 L2 = 25 x n + 42
901

Model
Flow rate characteristics (1)
Port Max. (2)

(3)
Type of 1 4/2(P A/B) 4/2 5/3(A/B R1/R2)
Model size time
actuation C C cycle (kg)
14 5.0 0.20 1.1 6.8 0.30 1.7
Single VFS3120 VFS3130 1200 20 or less 0.33
2 position
38 6.1 0.14 1.4 7.3 0.23 1.8

14 5.0 0.20 1.1 6.8 0.3 1.7
Double VFS3220 VFS3230 38
1500 15 or less 0.43
6.1 0.14 1.4 7.3 0.23 1.8
Closed 14 5.0 0.20 1.1 6.3 0.27 1.6
600 40 or less 0.45
5.7 0.20 1.4 6.8 0.21 1.7
3 position
Exhaust 14 4.9 0.24 1.1 6.5 0.28 1.6

center VFS3420 VFS3430 38 600 40 or less 0.45
5.8 0.15 1.4 7.0 0.22 1.7
Pressure 14 4.9 0.23 1.1 6.6 0.28 1.6
6.5 0.15 1.6 7.0 0.23 1.7
Note 3) In the case of grommet type.
Note 4) Factors of “Note1)” and “Note 2)” are achieved in controlled clean air.
Standard Specifications
Compact yet provides a Fluid Air
large flow capacity Maximum operating pressure 1.0 MPa

Minimun operating pressure 0.1 MPa
3/8: C: 6.8 dm3/(s·bar) Proof pressure 1.5 MPa
Low power consumption: Ambient and fluid temperature –10 to 60°C (1)
Non-lube (2)
Lubrication
1.8 W DC Pilot valve manual override Non-locking push type (Flush)
VFS3120-E-03-F
VFS3320-E-03

Apparent power Inrush 5.6 VA/50 Hz, 5.0 VA/60 Hz
Power consumption 1.8 W (2.04 W: With light/surge voltage suppressor)
Electrical entry
Conduit terminal, DIN terminal
VFS3220-T-03 Note 1) Use dry air at low temperatures.
VFS3120-G-03 energized states every once for each condition. (Values at the initial period)
Symbol performed at both energized and de-energized states in the axial direction and at
the right angles to the main valve and armature. (Values at the initial period)
2 position 3 position
Single Closed center Note 5) Based on JIS C 4003.
(A)4 2(B) (A)4 2(B)
513 513 Pilot type External pilot (1)
(R1) (P) (R2) (R1)(P)(R2) Pilot valve manual override Non-locking push type (Extended), Locking type (Tool reguired)
Double Exhaust center 110 to 120, 220, 240 VAC (50/60 Hz)
Coil rated voltage
(A)4 2(B) (A)4 2(B) 12, 100 VDC
Option With light/surge voltage suppressor (2)
Foot bracket (With screw) Part no.: VFS3000-52A, VFS3120 (single) only
513 5 13 Note 1) Operating pressure: 0 to 1.0 MPa Note 2) Grommet type is available only w/ surge
(R1)(P)(R2) (R1)(P)(R2) Pilot pressure: 0.1 to 1.0 MPa voltage suppressor (which is directly con-
Pressure center nected with lead wire), not w/ indicator light.
(A)4 2(B)
Manifold
Body type Applicable manifold base Pilot EXH
513 VFS320 Stacking manifold
Individual EXH (Valve side)
(R1)(P)(R2) VFS330 Common EXH (Manifold base side)
A 902
VFS3 1 20 1 G 02
CE-compliant
Symbol Option Nil —
1: 2 position single F: With foot bracket Q CE-compliant
(A)4 2(B)
Thread type SV
Nil Rc
Port size
513
(R1)(P) (R2)
02 14
N∗ NPT SYJ
2: position double T∗ NPTF
03 38
F∗
(A)4 2(B) G
SZ
∗ Semi-standard ∗ Mountable only for VFS3120.
513
(R1)(P)(R2)
Manual override VF
3: position closed center
Nil: Non-locking push type A∗: Non-locking push type B∗: Locking type
VP4
(A)4 2(B)
(Flush) (Extended) (Tool required)
513
(R1)(P)(R2)
VQ
1/2
4: position exhaust center
(A)4 2(B) VQ
4/5
5 13
(R1)(P)(R2)
∗ Semi-standard VQC
5: position pressure center Light/Surge voltage suppressor 1/2
(A)4 2(B)
Nil None VQC
Z With light/surge voltage suppressor 4/5
513 S∗ With surge voltage suppressor
(R1)(P)(R2)
∗ Grommet type is available only w/ surge voltage VQZ
∗ Reverse pressure: Can be used
by external pilot specifications. suppressor, not w/ indicator light.
Body (Pilot exhaust)

SQ
Electrical entry
20: Individual EXH
G: Grommet E: Grommet terminal T: Conduit terminal D, Y: DIN terminal
VFS
without connector
VFR
VQ7
30∗: Common EXH
Coil rated voltage

1 100 VAC (50/60 Hz)
2 200 VAC (50/60 Hz)
3∗ 110 to 120 VAC (50/60 Hz)
4∗ 220 VAC (50/60 Hz)
5 24 VDC
∗ Manifold only
6∗ 12 VDC
Pilot type
7∗ 240 VAC (50/60 Hz)
Nil Internal pilot ∗ Semi-standard Note) No mounting bolts and gaskets are supplied with the valve single unit.
R∗ External pilot For other rated voltages, please consult with SMC.
∗ Semi-standard:It will be an individual external pilot.
(External pilot port: Body side. For 30 type, common external pilot (on manifold side).)

SF4 1 DZ 21
Applicable model
Coil rated voltage Manual override 1
2
1 100 VAC, 50/60 Hz Electrical entry, Light/Surge voltage suppressor Non-locking push
14 A side pilot operator for VFS3 34 20
Nil 5 Individual
2 200 VAC, 50/60 Hz G Grommet type (Flush)
15 B side pilot operator for VFS3220 pilot
3∗ 110 to 120 VAC (50/60 Hz) GS
Grommet with surge voltage suppressor Non-locking push exhaust
4∗ 220 VAC, 50/60 Hz D DIN terminal A∗ type (Extended) 3
16 B side pilot operator for VFS3 45 20
5 24 VDC DZ∗
DIN terminal with light/surge voltage suppressor Locking type 1
B∗ (Tool required) 2
6∗ 12 VDC DO∗ DIN terminal ∗∗ 17 A side pilot operator for VFS3 34 30
∗ ∗∗ Common
7∗
5
240 VAC, 50/60 Hz DOZ DIN terminal with light/surge voltage suppressor ∗ Semi-standard
18 B side pilot operator for VFS3230 pilot
∗ Semi-standard Y∗ DIN terminal exhaust
3
For other rated voltages, YZ∗ DIN terminal with light/surge voltage suppressor 19 B side pilot operator for VFS3 45 30
please consult with SMC. YO∗ DIN terminal ∗∗
T Conduit terminal
∗ Y: Conforming to DIN43650B standard
E Grommet terminal ∗∗ DIN connector is not attached.
EZ Grommet terminal with light/surge voltage suppressor
903 A
VFS3000 Series

Bore size
Average CJ2 series CM2 series MB, CA2 series CS1/CS2 series
Pressure 0.5 MPa Pressure 0.5 MPa Pressure 0.5 MPa Pressure 0.5 MPa
Series speed Load factor 50% Load factor 50% Load factor 50% Load factor 50%
(mm/s) Stroke 60 mm Stroke 300 mm Stroke 500 mm Cylinder stroke 1000 mm
ø6 ø10 ø16 ø20 ø25 ø32 ø40 ø40 ø50 ø63 ø80 ø100 ø125 ø140 ø160
900 Perpendicular,
700 Horizontal
600 actuation
VFS3120-03 500
400
300
200
100
0
∗ It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.
∗ The average velocity of the cylinder is the value that the stroke is divided by the total stroke time.
∗ Load factor: ((Load mass x 9.8)/Theoretical force) x 100%
Conditions
Body ported CJ2 series CM2 series MB, CA2 series CS1/CS2 series
Tube bore x Length T0604 x 1 m T1075 x 1 m T1209 x 1 m
VFS3120-03 Speed controller AS3001F-06 AS4001F-10 AS4001F-12
Silencer AN20-02 AN202-02
904
Construction
(A)4 2(B)
2 position single (A)4 2(B)
2 position double
513 513
(R1) (P) (R2) (R1)(P)(R2)
SV
SYJ
SZ
VF
VP4
VQ
3 position closed center/exhaust center/pressure center 1/2
Closed center
(A)4 2(B)
VQ
4/5
VQC
513 1/2
(R1)(P)(R2)
VQC
Exhaust center 4/5
(A)4 2(B)
VQZ
5 13
(R1)(P)(R2) SQ
Pressure center
(A)4 2(B) VFS
513
VFR
(R1)(P)(R2)
VQ7
Component Parts
4 Piston Resin —
905
VFS3000 Series

Grommet: VFS3120-G Foot bracket (F)
Part no.: VFS3000-52A
Manual override
(Non-locking) 2 x ø6 Solenoid valve
M5: External pilot port mounting hole
(For external pilot model)
(Lead wire length)
≈ 300

Lead wire O.D.
Max. ø3.5 Applicable heavy-duty cord
Light O.D. ø6 to ø8 With light/surge voltage suppressor (DZ)
(Y: ø4.7 to ø7) Connector
Light
Gasket
2 x ø4.3
mounting hole

Applicable
With light/surge voltage suppressor (TZ) ( ): Y, YZ
heavy-duty cord
O.D. ø6 to ø8 DIN Connector/Gasket Part No.
Light
Gasket CAXT623-6-7-12 CAXT623-6-7-13
906
194 (3 position: 204)
SV
SYJ
Manual override SZ
(Non-locking)
M5: External pilot port
(For external pilot model) VF
(Lead wire
VP4
length)
≈ 300
VQ
1/2
VQ
4/5
VQC
1/2
VQC
4/5
VQZ
SQ
VFS
Grommet terminal: VFS3220-E/EZ VFS3320-E/EZ DIN terminal: VFS3220-D/DZ/Y/YZ VFR
VFS3420-E/EZ VFS3520-E/EZ VFS3320-D/DZ/Y/YZ
Lead wire O.D.
VFS3420-D/DZ/Y/YZ VQ7
Max. ø3.5 VFS3520-D/DZ/Y/YZ
194 (3 position: 204)
With light/surge voltage suppressor (EZ) Applicable heavy-duty cord
O.D. ø6 to ø8
Light (Y: ø4.7 to ø7) 231 (3 position: 241)
With light/surge voltage suppressor (DZ)
Connector
Light
Conduit terminal: VFS3220-T/TZ VFS3320-T/TZ 2 x ø4.3 mounting hole Gasket

VFS3420-T/TZ VFS3520-T/TZ
( ): Y, YZ
O.D. ø6 to ø8
231 (3 position: 241)
With light/surge voltage suppressor (TZ) DIN Connector/Gasket Part No.
Gasket CAXT623-6-7-12 CAXT623-6-7-13
907
VFS3000 Series
Stacking Type
Specifications
Keeps environmental air Manifold base type Stacking type
Stations Max. 15 stations
clean from pilot exhaust
Use of the VV5FS3-31 manifold can
exhaust intensively the pilot exhaust Port Specifications
gas to the base side, and can prevent Passage
Porting specifications
environmental aggravation due to noise Symbol Base Valve Base
and oil mist. 1(P) 3(R2), 5(R1) 1(P) 2(B), 4(A) 3(R2), 5(R1)
1 Common Common Side: (3 8) Top: ( 4 , 8 )
1 3 Side: (3 8)
Option
SUP block plate AXT636-10A —
EXH block plate AXT636-11A —
Note) Individual SUP or EXH is possible with bottom porting of SUP or EXH. For your order, please indicate
it in the manifold specification sheet.
VV5FS3-31
How to Order Manifold Base [Option]
Part no. for mounting bolt and gasket VV5FS3 31 05 1 03

BG-VFS3030
CE-compliant
VFS3000 Series
Nil —
Manifold
Q CE-compliant
Thread type
Nil Rc
N∗ NPT
T∗ NPTF
F∗ G
∗ Semi-standard
P, EA, EB port size

03 38
Symbol
Stations Passage Porting specifications
02 2 stations 1(P) 3(R2), 5(R1) 2(B), 4(A)
Common Common Top
•••
•••
1 38 38 1 4, 3 8
15 15 stations
Base model
Model Pilot exhaust Applicable valve model
Pilot common EXH
VFS320-- 02
03
31
VFS330-- 02
03
Type 20 Type 30
Note) Also VFS320 is possible to manifold. In this case, it uses an indi-

vidual pilot exhaust.

Add the valve and option part numbers in order starting from the first
station on the D side.
<Example>
The asterisk denotes the symbol for assem-
bly. Prefix it to the part numbers of the sole-
noid valve.
A 908
Manifold Base Construction — Body ported type
!6
SV
q u SYJ
D side
SZ
VF
VP4
VQ
!2 1/2
t !3 VQ
y 4/5
r w
U side VQC
!4 1/2
VQC
PE 3
EB
4/5
5
EA PE
e
VQZ
P
1
!0
!1 SQ
o
i VFS
!5
VFR
VQ7
Replacement Parts
No. Description Material Part no.
1 Gasket NBR VVFS3000-31
2 Gasket HNBR VVFS3000-9-1H
3 O-ring NBR KA00175H (GT code)
7 Hexagon socket head cap screw Carbon steel AXT335-37-1#1
8 Hexagon socket head cap screw Carbon steel CA00746 (GT code)
9 Spring washer Carbon steel EC00022 (GT code)
10 Hexagon socket head taper plug Carbon steel TB00094 (GT code)
11 Hexagon socket head taper plug Carbon steel TB00155 (GT code)
12 Tie-rod Carbon steel VVFS3000-53- Stations  For increasing the manifold bases, please order the manifold block
13 Tension bolt A Carbon steel VVFS3000-50-1Note) assembly number of the replacement parts assembly !4.
Note) For increasing the manifold bases (included in the manifold block assembly) (As the manifold block assembly includes the tension bolt A !3, it is
not necessary to additionally order the tie-rod !2.)
Replacement Parts: Sub Assembly
No. Description Assembly part no. Component parts
Manifold block
14 VVFS3000-1A-30 Manifold block !4, Gasket q, w, Hexagon socket head cap screw u, Tension bolt A !3.
assembly
End plate End plate (U) !5, O-ring e, r, t, y, Hexagon socket head cap screw i,
15 VVFS3000-2A-30
assembly (U side) Spring washer o, Hexagon socket head taper plug !0, !1
End plate
16 VVFS3000-3A-30 End plate (U) !6, Hexagon socket head cap screw u, Spring washer o
assembly (D side)
909
VFS3000 Series

Grommet: G
U side D side
Rc 1/8
External pilot port
Blanking plate
4 x Rc 1/8
Pilot EXH port: PE
≈ 300
(Lead wire length)
Gasket
Stations

Applicable heavy-duty cord Applicable heavy-duty cord
O.D. ø6 to ø8 O.D. ø6 to ø8
(Y: ø4.7 to ø7)
Lead wire O.D.

Max. ø3.5
3 position (241)
3 position (240)
Double (231)
3 position (204)
Double (230)
Double (194)
Single (135)
Single (153)
Single (153)
4 x Rc 1/8
Pilot 4 x Rc 1/8
EXH port: PE 4 x Rc 1/8
Pilot
EXH port: PE Pilot
EXH port: PE
(With light/surge voltage suppressor: 114) (With light/surge voltage suppressor: 128.5 (130.5))
( ): Y, YZ
n: Station
L1 77 108 139 170 201 232 263 294 325 L1 = 31 x n + 15
L2 92 123 154 185 216 247 278 309 340 L2 = 31 x n + 30
910
SV
SYJ
SZ
VF
VP4
VQ
1/2
VQ
4/5
VQC
1/2
VQC
4/5
VQZ
SQ
VFS
VFR
VQ7
911
VFS2000 Series
How to Order
30 VFS2 1 20 1 D 01
Conforming to
Option
CSA standard
F: With foot bracket
Symbol
1: 2 position single
(A)4 2(B)
513
(R1)(P) (R2)
2: 2 position double ∗ Mountable only for VFS2120.

(A)4 2(B)
Thread type
513 Nil Rc
(R1)(P)(R2)
N∗ NPT
3: 3 position closed center T∗ NPTF
(A)4 2(B) F∗ G
∗ Semi-standard
513
(R1)(P)(R2)
Port size
01 18
4: 3 position exhaust center
02 14
(A)4 2(B)
Manual override
5 13 Nil: Non-locking push type A∗: Non-locking push type B∗: Locking type
(R1)(P)(R2) (Flush) (Extended) (Tool required)
5: 3 position pressure center
(A)4 2(B)
513
(R1)(P)(R2)
∗ Semi-standard
∗ Reverse pressure: Can
be used by external Light/Surge voltage suppressor
pilot specifications. Nil None
Z With light/surge voltage suppressor
Electrical entry
D: DIN terminal
20: Individual EXH
30: Common EXH∗

Coil rated voltage
1 100 VAC (50/60 Hz)
2 200 VAC (50/60 Hz)
3∗ 110 to 120 VAC (50/60 Hz)
4∗ 220 VAC (50/60 Hz)
∗ Manifold only 5 24 VDC
6∗ 12 VDC
Pilot type
7∗ 240 VAC (50/60 Hz)
Nil Internal pilot
∗ Semi-standard
R∗ External pilot
∗ Semi-standard: Individual Refer to standard products for specifications and dimensions.
external pilot (External
pilot port: Body side)
A 912
VFS3000 Series
SV
How to Order SYJ
30 VFS3 1 20 1 D 02 SZ
Conforming to VF
CSA standard Option
Symbol Thread type F: With foot bracket
1: 2 position single Nil Rc VP4
N∗ NPT
(A)4 2(B)
VQ
T∗ NPTF 1/2
F∗ G
513
∗ Semi-standard
VQ
(R1)(P) (R2) 4/5
2: 2 position double Port size ∗ Mountable only for VFS3120.
(A)4 2(B)
VQC
02 14
1/2
03 38
VQC
513
(R1)(P)(R2) Manual override 4/5
Nil: Non-locking push type A∗: Non-locking push type B∗: Locking type
3: 3 position closed center
(A)4 2(B)
(Flush) (Extended) (Tool required) VQZ
SQ
513
(R1)(P)(R2)
4: 3 position exhaust center VFS
(A)4 2(B)
∗ Semi-standard
VFR
Light/Surge voltage suppressor
5 13
(R1)(P)(R2) Nil None VQ7
5: 3 position pressure center Z With light/surge voltage suppressor
(A)4 2(B)
Electrical entry
D: DIN terminal
513
(R1)(P)(R2)
∗ Reverse pressure: Can

be used by external
pilot specifications.

20: Individual EXH Coil rated voltage
1 100 VAC (50/60 Hz)
2 200 VAC (50/60 Hz)
3∗ 110 to 120 VAC (50/60 Hz)
4∗ 220 VAC (50/60 Hz)
5 24 VDC
30: Common EXH∗ 6∗ 12 VDC
7∗ 240 VAC (50/60 Hz)
∗ Semi-standard
∗ Manifold only
Pilot type
Nil Internal pilot
R∗ External pilot
∗ Semi-standard: Individual external pilot (External pilot port: Body side. For 30 type, common external pilot (on manifold side).)
Refer to standard products for specifications and dimensions.
913 A
Metal Seal, Plug-in/Non Plug-in
VFS2000 Series
[Option]
Model
Model Flow rate characteristics (1)
Port Max. (2)

(3)
Type of 1 4/2(P A/B) 4/2 5/3(A/B R1/R2)
size time
actuation Plug-in Non plug-in C C cycle (kg)
18 2.4 0.16 0.55 2.8 0.20 0.65
2 position

1200 15 or less 0.34
2.5 0.18 0.58 2.8 0.21 0.65
18 2.4 0.16 0.55 2.8 0.20 0.65
1200 13 or less 0.42
2.5 0.18 0.58 2.8 0.21 0.65
Closed 18 2.3 0.14 0.53 2.6 0.20 0.61
2.5 0.18 0.58 2.6 0.23 0.62
Exhaust 18 2.4 0.15 0.54 2.7 0.25 0.63
3 position

2.5 0.20 0.60 2.7 0.24 0.63
Pressure 18 2.5 0.11 0.55 2.7 0.20 0.62
2.8 0.17 0.63 2.7 0.22 0.63
Double 18 1.2 – – 1.3 – –
check VFS2600 VFS2610 14 600 25 or less 0.6
1.2 – – 1.3 – –
Note 1) Based on JIS B 8419: 2010 (Once per 30 days) for the minimum operating frequency. Note 3) Values for VFS200-FZ-01.
Note 2) Based on JIS B 8419-2010. (The value at supply pressure 0.5 MPa, ambient/fluid temperature (≈ 20°C)) Note 4) Factors of “Note 1)” and “Note 2)” are ones achieved
However, this excludes when in an adhered state. (Be aware that after long periods of holding time, in controlled clean air.
there may be delays in the initial response time.)
Compact yet provides a large flow Standard Specifications

capacity Fluid Air
1/4: C: 2.8 dm3/(s·bar) Maximum operating pressure 1.0 MPa
Low power consumption: 1.8 W DC Min. operating pressure

2 position 0.1 MPa
Easy maintenance 3 position 0.15 MPa
2 types of sub-plates: Proof pressure 1.5 MPa
Plug-in and non plug-in Ambient and fluid temperature –10 to 60°C (1)
Type G, E: Dustproof (Equivalent to IP50),
Enclosure
Type F, T, D: Splashproof (Equivalent to IP54) (4) (6)

Plug-in type Coil insulation type Class B or equivalent (130°C) (5)
Apparent power Inrush 5.6 VA/50 Hz, 5.0 VA /60 Hz
Power consumption DC 1.8 W (2.04 W: With light/surge voltage suppressor)
Plug-in type Conduit terminal
Electrical entry
Non plug-in type Grommet terminal, DIN terminal
Note 1) Use dry air at low temperatures. Note 2) Use turbine oil Class 1 (ISO VG32), if lubricated.
Note 3) Impact resistance: No malfunction occurred when it is tested with a drop tester in the axial direction and at the
right angles to the main valve and armature in both energized and de-energized states every
Non plug-in type once for each condition. (Values at the initial period)
Vibration resistance: No malfunction occurred in a one-sweep test between 45 and 2000 Hz. Test was performed at both ener-
gized and de-energized states in the axial direction and at the right angles to the main valve and armature.
Symbol (Values at the initial period)
2 position 3 position Note 4) Based on JIS C 0920. Note 5) Based on JIS C 4003.
Note 6) The F type enclosure described above shows that without the light/surge voltage suppressor. The F
Single Closed center
(A)4 2(B) (A)4 2(B)
type enclosure with the light/surge voltage suppressor is equivalent to IP50.
513 513
(R1) (P) (R2) (R1)(P)(R2) Pilot type External pilot Note)
Double Exhaust center Manual override Non-locking push type (Extended), Locking type (Tool required), Locking type (Lever)
(A)4 2(B) (A)4 2(B)
Coil rated voltage 110 to 120, 220, 240 VAC, 50/60 Hz
12, 100 VDC
513
(R1)(P)(R2)
5 13
(R1)(P)(R2)
Porting specifications Bottom ported
Pressure center Option With light/surge voltage suppressor
(A)4 2(B)
Note) Operating pressure: 0 to 1.0 MPa
Pilot pressure 2 position: 0.1 to 1.0 MPa 3 position: 0.15 to 1.0 MPa
513
(R1)(P)(R2) Compact, lightweight type sub-plate Sub-plate
L Weight Sonic conductance ∗
Double check
(A)4 2(B) Compared with the standard type, this is the sub-plate having the (mm) (kg) C [dm3/(s·bar)]
reduced external dimensions and lighter weight. But, use caution Standard type 31.0 0.2 2.2
that Cv factor or piping port position is different from the standards. Compact type 25.5 0.13 2.8
513
(R1)(P) (R2) For details, refer to page 938. ∗ 2 position single Rc 1/4
A 914
Metal Seal, Plug-in/Non Plug-in VFS2000 Series
Porting specifications Port size

Nil Side ported Nil Without sub-plate
B∗ Bottom ported Plug-in type conduit
∗ Semi-standard
01 18
terminal
Option (With terminal block)
Nil None 02 14
Standard type SV
With attachment plug Z With light/surge voltage suppressor Note) Plug-in type grommet
lead wire
Body type Electrical entry
P01 18
(With attachment SYJ
Note) plug lead wire)
O: Plug-in type F: Plug-in type 14
P02
sub-plate
Compact type
SZ
Thread type Note) Please note Cv factor
and piping port loca-
Nil Rc tion of compact sub- VF
N∗ NPT plate is different from
standard. Refer to
T∗
F∗
NPTF
G
page 938 for details. VP4
With terminal block
∗ Semi-standard VQ
1/2
Plug-in VFS2 2 00 5 F 01 VQ
4/5
Non plug-in VFS2 2 10 1 E 02 VQC
1/2
CE-compliant VQC
Nil — 4/5
Q CE-compliant
Port size
VQZ
Symbol Pilot valve manual override Nil Without sub-plate
2 position single Body type Nil: Non-locking push type B∗: Locking type
Non plug-in type,
SQ
(A)4 2(B) (Flush) (Tool required) 01 18
1: Non plug-in type Standard
1
sub-plate
02 14
type VFS
513
(R1) (P) (R2)
2 position double
(A)4 2(B) A∗: Non-locking push type C∗: Locking type
Note)
S01
18 Non plug-in type,
Compact
VFR
(Extended) (Lever) type
2 Note)
513 S02
14 VQ7
(R1)(P)(R2)
Pilot type Note) Please note Cv factor and
3 position closed center Nil Internal pilot
(A)4 2(B) piping port location of com-
R∗ External pilot ∗ Semi-standard pact sub-plate are different
3 Option from standard. Refer to page
∗ Semi-standard: External pilot can
513 Nil None 938 for details.
(R1)(P)(R2) be mounted on only the sub-plate
3 position exhaust center or manifold for the external pilot. Z With light/surge voltage suppressor
(A)4 2(B) S∗ With surge voltage suppressor
4
Coil rated voltage
∗ Grommet type is available only w/ surge
5 13
1 100 VAC, 50/60 Hz voltage suppressor, not w/ indicator light.
(R1)(P)(R2) 2 200 VAC, 50/60 Hz
3 position pressure center 3∗ 110 to 120 VAC, 50/60 Hz Electrical entry
(A)4 2(B)
4∗ 220 VAC, 50/60 Hz G: Grommet E: Grommet terminal T: Conduit terminal D, Y: DIN terminal
5
5 24 VDC DO, YO: DIN terminal
513
6∗ 12 VDC without connector
(R1)(P)(R2)
3 position double check 7∗ 240 VAC, 50/60 Hz
(A)4 2(B)
∗ ∗ Semi-standard
6 For other rated voltages, please
consult with SMC.
513
(R1)(P) (R2) ∗ Combining double check spacer with external pilot will not work.

SF4 1 DZ 20 Manual
override
Coil rated voltage Electrical entry, Light/Surge voltage suppressor Non-locking
1 100 VAC, 50/60 Hz YO DIN terminal∗ Nil push type
F Plug-in Plug-in
2 200 VAC, 50/60 Hz YOZ DIN terminal with light/surge voltage suppressor∗ (Flush)
3∗ G
110 to 120 VAC (50/60 Hz) Grommet T Conduit terminal Non Non-locking
4∗ 220 VAC, 50/60 Hz GS Grommet with surge voltage suppressor TZ Conduit terminal with light/surge voltage suppressor plug-in A∗ push type
5 D (Extended)
24 VDC DIN terminal E Grommet terminal
Non
6 ∗ 12 VDC DZ DIN terminal with light/surge voltage suppressor plug-in EZ Grommet terminal with light/surge voltage suppressor Locking type
B∗ (Tool required)
7 ∗ 240 VAC, 50/60 HzDO DIN terminal∗ ∗ DIN connector is not attached.
∗ Semi-standard DOZ DIN terminal with light/surge voltage suppressor∗ ∗∗ Refer to page 1009 for voltage conversion. Locking type
For other rated voltages, Y ∗∗∗ Y: Conforming to DIN43650B standard C∗ (Lever)
DIN terminal
please consult with
SMC. YZ DIN terminal with light/surge voltage suppressor ∗ Semi-standard
915 A
VFS2000 Series

Sizing Program.
Bore size
Average CM series MB, CA2 series CS1/CS2 series
System speed
Load factor 50% Load factor 50% Load factor 50%
(mm/s) Stroke 300 mm Stroke 500 mm Cylinder stroke 1000 mm
ø20 ø25 ø32 ø40 ø40 ø50 ø63 ø80 ø100 ø125 ø140 ø160
800 Perpendicular,
600 Horizontal
500 actuation
A 400
300
200
100
0
800
700
600
500
B 400
300
200
100
0
System Components
∗ It is when the cylinder is extending that is meter-out controlled by speed
Speed
System Solenoid valve Silencer Tube bore x Length controller which is directly connected with cylinder, and its needle valve
controller with being fully open.
∗ The average velocity of the cylinder is the value that the stroke is
VFS2000
AS3000-02 AN110-01 divided by the total stroke time.
A Series T0604 x 1 m ∗ Load factor: ((Load mass x 9.8)/Theoretical force) x 100%
(S = 12 mm2) (S = 35 mm2)
Rc 1 8
VFS2000
AS4000-02 AN110-01
B Series T1075 x 1 m
(S = 21 mm2) (S = 35 mm2)
Rc 1 4
Double Check Spacer/Specifications

Can hold an intermediate cylinder Specifications Check Valve Operating
position for an extended time Plug-in type Non plug-in type
Double check
If the double check spacer with a built-in spacer part no. VVFS2000-22A-1 VVFS2000-22A-2
double check valve is combined, it will en-
G Cylinder pressure Check valve
able the cylinder to stop in the intermediate Applicable E
stroke and maintain its position for a long valve model VFS2400-F VFS2410- T
D
time without being affected by the leakage
between the spools.
Caution
• In the case of 3 position double check SUP side pressure (P1)
Piston
valve (VFS260), check the leakage from
SUP side pressure P1 (MPa)
piping and fittings in between valve and

cylinder by means of synthetic detergent Operating range
Double check spacer solutions, and ensure that there is no such
leakage found there. Also check the
leakage from cylinder seal and piston seal.
If there is any leakage, sometimes the
cylinder, when valve is de-energized, can
move without stopping at intermediate
position.
• Be aware that if the exhaust side is
Cylinder pressure P2 (MPa)
restricted excessively, the intermediate
stopping accuracy will decrease and will • The combination of VFS211 0, VFS22 1 0 and
0 0
lead to improper intermediate stops. a double check spacer can be used as
• Combining double check spacer with prevention of falling at the stroke end but
external pilot will not work. cannot hold the intermediate position of the
cylinder.
916
Construction
513 513
(R1)(P)(R2) (R1)(P)(R2)
SV
SYJ
SZ
VF
VP4
VQ
1/2
VQ
4/5
VQC
1/2
VQC
4/5
3 position closed center/exhaust center/pressure center
Closed center VQZ
(A)4 2(B)
SQ
513
(R1)(P)(R2) VFS
Exhaust center
(A)4 2(B) VFR
5 13
VQ7
(R1)(P)(R2)
Pressure center
(A)4 2(B)
513
(R1)(P)(R2)
Component Parts Sub-plate Assembly (Standard) Part No.

No. Description Material Note Plug-in VFS2000-LP- 01
02 (N, T, F)
1 Body Aluminum die-casted — 01
Non plug-in VFS2000-LS- 02 (N, T, F)
2 Sub-plate Aluminum die-casted —
∗ Mounting bolt and gasket are not included.
4 Adapter plate Resin —
5 End plate Resin — Sub-plate Assembly (For External Pilot) Part No.
6 Piston Resin —
Plug-in VFS2000-LP-R 01
02 (N, T, F)
7 Junction cover Resin —
01
8 Cover Resin — Non plug-in VFS2000-LS-R 02 (N, T, F)
10 Gasket HNBR — Part no. for mounting
11 Hexagon socket head cap screw Steel — Note
bolt and gasket
13 Pilot valve assembly — — Plate gasket type
∗ Refer to “How to Order Pilot Valve Assembly” on page 915. BG-VFS2000 (Earlier than
September, 2012) Note)
Groove gasket type

BG-VFS2000-1 (After October
2012) Note)
Note) When ordering the parts shown above for the replacement, note that
the described date may slightly vary depending on the product being
used.
917 A
VFS2000 Series
Plug-in — 2 Position single/Double/3 Position closed center/Exhaust center/Pressure center/Double check

2 position single: VFS2100-F(Z)-01
02
3 x Rc 1 8, 1 4
1(P), 4(A), 2(B) bottom ported
Manual override 2 x Rc 1 8
3(R2), 5(R1) bottom ported
(Non-locking)
Bottom ported
With light/surge voltage suppressor
(External pilot port)

Electrical entry
Pilot EXH port
( ): Rc 1 8
2 position double: VFS2200-F(Z)-01

02 3 position double check: VFS2600-F(Z)-01
02
3 position closed center: VFS2300-F(Z)-01
02
3 position exhaust center: VFS2400-F(Z)-01
02
3 position pressure center: VFS2500-F(Z)-01
02
150.5 (3 position: 158) Manual override 2 x ø5

2 x ø5 (Non-locking) mounting hole
Manual override mounting hole
(Non-locking)

164.5 (3 position: 171) suppressor

suppressor
( ): Rc 1 8 ( ): Rc 1 8
918
Non Plug-in — 2 Position single

Grommet: VFS2110-G(S)-01
02
3 x Rc 1 8 , 1 4
2 x ø5 mounting hole 1(P), 4(A), 2(B) bottom ported
Manual override
2 x Rc 1 8
(Non-locking) 3(R2), 5(R1) bottom ported
SV
SYJ
SZ
Bottom ported
VF
VP4
(Lead wire length)
VQ
≈ 300
1/2
VQ
4/5
VQC
1/2
VQC
4/5
Pilot EXH port M5 x 0.8 VQZ

(External pilot port M5 x 0.8)
SQ
( ): Rc 1 8 VFS
Grommet terminal: VFS2110-E(Z)-01
02 DIN terminal: VFS2110-D 01
Y (Z)-02
VFR
Lead wire O.D. Max. ø3.5 With light/surge voltage
suppressor
VQ7
Applicable heavy-duty cord With light/surge voltage
suppressor
Light O.D. ø6 to ø8 Connector
(Y: ø4.7 to ø7) Light
Gasket
Conduit terminal: VFS2110-T(Z)-01

02 ( ): Y, YZ
Applicable heavy-duty cord With light/surge
O.D. ø6 to ø8 voltage suppressor DIN Connector/Gasket Part No.
Light Connector B1B09-2A6 GMN209
Gasket CAXT623-6-7-12 CAXT623-6-7-13
919
VFS2000 Series
Non Plug-in — 2 Position double/3 Position closed center/Exhaust center/Pressure center

Grommet: Double VFS2210-G(S)-0102
Closed center VFS2310-G(S)-01 01 01
02, Exhaust center VFS2410-G(S)-02, Pressure center VFS2510-G(S)-02
150.5 (3 position: 158) 3 x Rc 1 8,1 4

2 x ø5 1(P), 2(B), 4(A) bottom ported
mounting hole 2 x Rc 1 8
Manual override
(Non-locking) 3(R2), 5(R1) bottom ported
(Lead wire length)
Bottom ported
≈ 300
Pilot EXH port M5 x 0.8

(External pilot port M5 x 0.8)
( ): Rc 1 8
Grommet terminal: Double VFS2210-E(Z)-01

02 DIN terminal: Double VFS2210-D 01
Y (Z)-02
Closed center VFS2310-E(Z)-01
02 Closed center VFS2310-D 01
Y (Z)-02
Exhaust center VFS2410-E(Z)-01
02 Exhaust center VFS2410-D 01
Y (Z)-02
Pressure center VFS2510-E(Z)-01
02 Pressure center VFS2510-D 01
Y (Z)-02
With light/surge voltage suppressor 151 (3 position: 159)
Lead wire O.D.
Max. ø3.5 Light Applicable
heavy-duty cord 187.5 (3 position: 195)
O.D. ø6 to ø8
(Y: ø4.7 to ø7)
suppressor (DZ)
Connector
Light
Conduit terminal: Double VFS2210-T(Z)-01

02
Closed center VFS2310-T(Z)-01
02
Gasket
Exhaust center VFS2410-T(Z)-01

02
Applicable Pressure center VFS2510-T(Z)-01
02
heavy-duty
cord
187.5 (3 position: 195)
O.D. ø6 to ø8
With light/surge voltage ( ): Y, YZ
suppressor
Light
Gasket CAXT623-6-7-12 CAXT623-6-7-13
920
Non Plug-in — 3 Position double check

Grommet: VFS2610-G(S)-01
02 3 x Rc 1/8, 1/4
1(P), 2(B), 4(A) bottom ported
2 x ø5 mounting 2 x Rc 1/8
Manual override
hole 3(R2), 5(R1) bottom ported
(Non-locking)
SV
SYJ
SZ
(Lead wire length)

Bottom ported
VF
≈ 300
VP4
VQ
1/2
VQ
4/5
VQC
1/2
VQC
4/5
(M5 x 0.8) VQZ
Pilot EXH port
( ): Rc 1 8
M5 x 0.8
SQ
Grommet terminal: VFS2610-E(Z)-01
02 DIN terminal: VFS2610-D 01
Y (Z)-02 VFS
Lead wire O.D. Max. ø3.5
suppressor
VFR
Light With light/surge voltage
suppressor (DZ) VQ7
Connector
Light
Gasket
Applicable
heavy-duty
code
O.D. ø6 to ø8
(Y: ø4.7 to ø7)
Conduit terminal: VFS2610-T(Z)-01

02
With light/surge voltage ( ): Y, YZ

suppressor
Gasket CAXT623-6-7-12 CAXT623-6-7-13
Applicable
heavy-duty
code
O.D. ø6 to ø8
921
VFS2000 Series
[Option]
Plug-in Type: With Attachment Plug Lead Wire
The insert plug is attached to the manifold block
and lead wire is plugged into the valve side.
Please connect with corresponding power side.
VV5FS2 01 06 1 01
Manifold Stations Nil —
Q CE-compliant
Plug-in type 01 1 station
With attachment plug lead wire Thread type
16 16 stations
Nil Rc
Symbol (Passage) N∗ NPT
Passage Porting T∗ NPTF
Symbol F∗ G
P EA, EB specifications A, B
1 Side ∗ Semi-standard
Common Common
2∗ Bottom
Port size
With attachment plug lead wire 3∗ Side
Common Individual Symbol P, EA, EB A, B
4∗ Bottom
01 18
5∗ Side
Individual Common 02 14 14
6∗ Bottom
M Mixed
7∗ Side
Individual Individual ∗ For bottom ported,
8∗ Bottom
1/8 is only available.
∗ Semi-standard
∗ The external pilot type is not
available.
Plug-in Type: With Terminal Block

Since lead wires of solenoid valve are connect-
ed with the terminals on upper surface of termi-
nal block, corresponding lead wires from power
VV5FS2 01T 08 1 02
source can be wired at the bottom of terminal VFS2000 Series CE-compliant
block. Manifold Pilot type Nil —
Stations
Nil Internal pilot Q CE-compliant
Plug-in type R External pilot 01 1 station
With terminal block Thread type
One-piece junction cover Junction cover 16 16 stations Nil Rc
Nil Separate junction cover N∗ NPT
1 One-piece junction cover T∗ NPTF
F∗ G
Symbol (Passage)
Passage ∗ Semi-standard
Symbol Porting External
P EA,EB specifications A, B pilot
Port size
1 Side
Common Common Yes Symbol P, EA, EB A, B
2∗ Bottom
01 18
Individual junction cover Conduit port 3∗ Side
Common Individual No 02 14 14
4∗ Bottom
M Mixed
5∗ Side
Individual Common Yes ∗ For bottom ported,
6∗ Bottom
7∗ Side 1/8 is only available.
Individual Individual No
8∗ Bottom
∗ Semi-standard
Plug-in Type: With Multi-connector (Wiring specifications: Refer to page 1013.)

• Master connection of power and solenoid
valves.
• Quick wiring permits ease of installation.
VV5FS2 01C D 1 05 2 01
Manifold Connector mounting direction Stations Nil —
D D side mounting 01 1 station Q CE-compliant
U side Plug-in type
U U side mounting
With multi-connector Thread type
Pilot type 08 8 stations
Nil Rc
Plug Nil Internal pilot ∗ Max. 8 stations
assembly N∗ NPT
R External pilot T∗ NPTF
Refer to page 1013.
Symbol (Passage) F∗ G
D side
Passage Porting External ∗ Semi-standard
Multi-connector Symbol
P EA,EB specifications A, B pilot Port size
1 Side Symbol P, EA, EB A, B
Common Common Yes
2∗ Bottom 01 18
3∗ Side 02 14 14
Common Individual No
4∗ Bottom M Mixed
5∗ Side
Individual Common Yes ∗ For bottom ported,
6∗ Bottom
1/8 is only available.
7∗ Side
8∗ Bottom
∗ Semi-standard
A 922
[Option]
Plug-in Type: With D-sub Connector (Wiring specifications: Refer to page 1013.)
• Wide range of interchangeability
(D-sub connector (25P) conforming to MIL standard) VV5FS2 01F D 1 06 1 01
• Quick wiring permits easier installation.
CE-compliant
VFS2000 Series Stations
U side
Manifold 01 1 station
Nil —
Q CE-compliant SV
Thread type
Plug-in type
08 8 stations
∗ Max. 8 stations Nil Rc SYJ
With D-sub connector
N∗ NPT
Plug assembly
Refer to page 1583. Connector mounting direction Symbol (Passage) T∗ NPTF
F∗ G
SZ
D D side mounting Passage Porting
D side Symbol ∗ Semi-standard
D-sub connector U U side mounting
1
P EA, EB specifications A, B
Side
VF
Common Common Port size
2∗ Bottom
Symbol P, EA, EB A, B
3∗
Common Individual
Side
01 18 VP4
4∗ Bottom
02 14 14
5∗ Side
M Mixed VQ
Individual Common
6∗ Bottom 1/2
7∗ Side
∗ For bottom ported,
Individual Individual 1/8 is only available. VQ
8∗ Bottom
∗ Semi-standard 4/5
∗ The external pilot type is not available. VQC
1/2
Non Plug-in Type: Grommet, Grommet Terminal, Conduit Terminal, DIN Terminal VQC
• Wiring for every valve 4/5
VV5FS2 10 10 2 02
VQZ
CE-compliant
VFS2000 Series
Manifold Non plug-in type Stations Nil —
Q CE-compliant SQ
01 1 station
Pilot type
Nil Internal pilot 16 16 stations
Thread type
Nil Rc
VFS
R External pilot
N∗ NPT
Symbol (Passage) T∗ NPTF VFR
Passage Porting External F∗ G
Symbol
P EA,EB specifications A, B pilot ∗ Semi-standard
1
Common Common
Side
Yes
VQ7
2∗ Bottom Port size
3∗ Side Symbol P, EA, EB A, B
Common Individual No
4∗ Bottom 01 18
5∗ Side 02 14 14
Individual Common Yes
6∗ Bottom M Mixed
7∗ Side ∗ For bottom ported,
8∗ Bottom 1/8 is only available.
∗ Semi-standard
Note) The individual specification of the P port at the composition symbol 3 to 8 or the EA, EB, ports should be taken as individual port using a block plate. Therefore, if
an individual port is using a single SUP spacer of option or a single EXH spacer, the composition symbol mark is “1”.
How to Order Manifold Assembly Manifold Specifications

Porting
Please indicate manifold base type, Port size Rc
specifications Applicable
Base model Wiring Stations
corresponding valve, and option parts. A, B port P, EA, EB A, B valve model
• With attachment plug lead wire
<Example> Plug-in type • With terminal block
• Plug-in type with terminal block VV5FS2-01 • With multi-connector
VFS200-F
(6 stations, one-piece type junction cover) • With D-sub connector 2 to 15∗
Side/Bottom 14 1 8, 1 4
(Manifold base) VV5FS2-01T1-061-02···· 1 • Grommet stations VFS210-G
(2 position single) VFS2100-5FZ ············3 Non plug-in type • Grommet terminal VFS210-E
(2 position double) VFS2200-5FZ···········2 VV5FS2-10 • Conduit terminal VFS210-T
(Blanking plate) VVFS2000-10A············· 1 • DIN terminal VFS210-D
• Non plug-in type (6 stations) ∗ With multi-connector, with D-sub connector: 8 stations at the maximum.
(Manifold base) VV5FS2-10-061-01········ 1
(2 position single) VFS2110-5D············· 3
(3 position exhaust center) VFS2410-5D····· 3 Flow Rate Characteristics at the Number of Manifold Stations (Operated individually)
(Individual EXH spacer) VVFS2000-R-01-2··· 1 Model Passage/Stations Station 1 Station 5 Station 10
C [dm3/(s·bar)] 2.4 2.4 2.4
1 4/2
b 0.14 0.14 0.14
(P A/B)
Cv 0.50 0.50 0.50
VV5FS2
C [dm3/(s·bar)] 2.5 2.5 2.5
4/2 5/3
b 0.18 0.18 0.18
(A/B R1/R2)
Cv 0.60 0.60 0.60
∗ Port size Rc 1 4
923 B
VFS2000 Series
Manifold Option Parts Assembly

Individual SUP spacer Interface regulator (P port regulation) Blanking plate
An individual SUP spacer set on manifold Interface regulator set on manifold block can It is used by attaching on the manifold block
block can form SUP port for every valve. regulate the pressure to each valve. Refer to for being prepared for removing a valve for
“Flow Rate Characteristics” on page 1011. maintenance reasons or planning to mount a
Body type Plug-in type Non plug-in type
Body type Plug-in type Non plug-in type spare valve, etc.
Rc 1 8 VVFS2000-P-01-1 VVFS2000-P-01-2
Part no. Part no.
Standard
type P port regulation ARBF2000-00-P-1 ARBF2000-00-P-2 Body type Plug-in type Non plug-in type
Rc 1 4 VVFS2000-P-02-1 VVFS2000-P-02-2
Part no. VVFS2000-10A
External Rc 1 8 VVFS2000R-P-01-1 VVFS2000R-P-01-2
pilot Rc 1 4 VVFS2000R-P-02-1 VVFS2000R-P-02-2
Accessory
Each gasket and one set of mounting screws
with a length for one stack are supplied with
the option parts assembly.
Air shutoff valve spacer Manifold Option
When stopping supply air and releasing
Individual EXH spacer residual pressure after completion of work, With control unit
An individual EXH spacer set on manifold actuators may move from original position. Plug-in type/Non plug-in type
block can form EXH port for every valve. Air shut off valve spacer makes it possible to • Filter, regulation valve, pressure switch
(Common EXH type) stop actuators in original position for and air release valve are all combined to
extended periods. form one unit.
∗ Not applicable to the external pilot. • Piping processes are eliminated.
Rc 1 8 VVFS2000-R-01-1 VVFS2000-R-01-2
Part no. Part no.
Standard
type Rc 1 4 VVFS2000-R-02-1 VVFS2000-R-02-2 Body type Plug-in type Non plug-in type
External Rc 1 8 VVFS2000R-R-01-1 VVFS2000R-R-01-2 Part no. VVFS2000-21A-1 VVFS2000-21A-2
pilot Rc 1 4 VVFS2000R-R-02-1 VVFS2000R-R-02-2
∗ Not mountable for standard type sub-plate.
SUP block plate Air release valve spacer

The concurrent use of air release valve
When supplying manifold with more than two
spacer with VFS210 (single) can release air. For details, refer to page 929.
different pressures, high and low, insert a
block plate in between stations subjected to Body type Plug-in type Non plug-in type
different pressures. Part no. VVFS2000-24A-1 RL VVFS2000-24A-2 RL
Body type Plug-in type Non plug-in type Note) L: U side mount R: D side mount Dripproof Manifold
Part no. AXT625-12A Plug-in type
Note) The SUP and EXH block plates cannot be used • Equivalent to IP65
for the 2 stations integrated type manifold block. For details, refer to page 931.
EXH block plate
When valve exhaust affects the other
stations on the circuit or when the reverse Made to Order
pressure valve is used to standard manifold Manifold with serial transmission kit
valve, insert EXH block plate in between Plug-in type
stations to separate valve exhaust.
Double check spacer
If the double check spacer with a built-in • Solenoid valve wiring process reduced
Body type Plug-in type Non plug-in type double check valve is combined, it will considerably.
Part no. AXT625-12A enable the cylinder to stop in the For details, refer to page 934.
intermediate stroke and maintain its position
for a long time without being affected by the
leakage between the spools.
∗ Not applicable to the external pilot.
Throttle valve spacer Plug-in type Non plug-in type
Body type
Needle valve set on the manifold block can
control cylinder speed by throttling exhaust. Part no. VVFS2000-22A-1 VVFS2000-22A-2
Part no. VVFS2000-20A-1 VVFS2000-20A-2
924
Manifold — Plug-in type, Non plug-in type

Plug-in type (Insert plug with lead wire): VV5FS2-01- Station 1- Port size
U side SV
2(B), 4(A) port

SYJ
SZ
VF
VP4
VQ
Stations 1/2
VQ
D side 2(B), 4(A) port 4/5
Bottom ported: VQC
VV5FS2-01- Station 2- Port size 1/2
VQC
4/5
Pilot EXH port
Electrical entry
VQZ
SQ
1(P), 3(R2), 5(R1) port VFS
Formula for manifold weight M = 0.201n + 0.299 (kg) n: Station VFR
Non plug-in type: VV5FS2-10- Station 1- Port size VQ7
U side
2(B), 4(A) port
Stations
D side
Bottom ported:
VV5FS2-10- Station 2- Port size 2(B), 4(A) port
≈ 300 mm
(Lead wire length)
Pilot EXH port
Formula for manifold weight M = 0.174n + 0.218 (kg) n: Stations 1(P), 3(R2), 5(R1) port
L
Stations
1 2 3 4 5 6 7 8 9 10
Formula
L1 75 103 131 159 187 215 243 271 299 327 L1 = 28 x n + 47
L2 84 112 140 168 196 224 252 280 308 336 L2 = 28 x n + 56
925
VFS2000 Series
Manifold — Plug-in type: Individual/One-piece junction cover

Plug-in type with terminal block (Individual junction covers): VV5FS2-01T- Station 1- Port size
U side
2(B), 4(A) port
Stations
D side 2(B), 4(A) port
Bottom ported:
VV5FS2-01T- Station 2- Port size With light/surge voltage suppressor
Pilot EXH port
Electrical entry
1(P), 3(R2), 5(R1) port

Plug-in type with terminal block (One-piece junction covers): VV5FS2-01T1- Station 1- Port size
U side
2(B), 4(A) port
Stations

Bottom ported:
VV5FS2-01T1- Station 2- Port size
Pilot EXH port
Electrical entry
1(P), 3(R2), 5(R1) port

Stations
L 1 2 3 4 5 6 7 8 9 10
Formula
L1 75 103 131 159 187 215 243 271 299 327 L1 = 28 x n + 47
L2 84 112 140 168 196 224 252 280 308 336 L2 = 28 x n + 56
926
Manifold — Plug-in with multi-connector/with D-sub connector

Plug-in with multi-connector: VV5FS2-01CD1- Station 1- Port size , VV5FS2-01CU1- Station 1- Port size
SV
U side
SYJ
2(B), 4(A) port
SZ
VF
VP4
VQ
1/2
Stations VQ
4/5
D side VQC
Bottom ported: 2(B), 4(A) port 1/2
VQC
VV5FS2-01CD1
CU1- Station 2- Port size Plug assembly: VVFS2000-30A-
4/5
(Option: Refer to page 1013.) With light/surge voltage suppressor
VQZ
Pilot EXH port
SQ
VFS
∗ Wiring specifications: Refer to page 1013. 1(P), 3(R2), 5(R1) port
VFR
VQ7
Plug-in type with D-sub connector: VV5FS2-01FD1- Station 1- Port size , VV5FS2-01FU1- Station 1- Port size
U side
2(B), 4(A) port
Stations
Bottom ported:
Plug assembly: VVZS3000-21A-
VV5FS2-01FD1
FU1- Station 2- Port size (Option: Refer to page 1013.) With light/surge voltage suppressor
Pilot EXH port
Formula for manifold weight M = 0.178n + 0.378 (kg)

∗ Wiring specifications: Refer to page 1013.
n: Stations 1(P), 3(R2), 5(R1) port

L
Stations
1 2 3 4 5 6 7 8
Formula
L1 75 103 131 159 187 215 243 271 L1 = 28 x n + 47
L2 84 112 140 168 196 224 252 280 L2 = 28 x n + 56
927
VFS2000 Series
Manifold Option Parts — Plug-in type, Non plug-in type

Individual SUP spacer: Interface regulator:
VVFS2000(R)-P-01
02-1 (Plug-in type) ARBF2000-00-P-1 (Plug-in type)
VVFS2000(R)-P-01
02-2 (Non plug-in type) ARBF2000-00-P-2 (Non plug-in type)
Individual SUP Interface

spacer regulator
SUP port
Individual EXH spacer: Air shutoff valve spacer:

VVFS2000(R)-R-0102-1 (Plug-in type) VVFS2000-21A-1 (Plug-in type)
VVFS2000(R)-R-0102-2 (Non plug-in type) VVFS2000-21A-2 (Non plug-in type)
Individual Air shutoff valve

EXH port spacer
EXH port ∗ Not applicable to the external pilot.
SUP block plate: AXT625-12A Release valve spacer:

EXH block plate: AXT625-12A VVFS2000-24A-1RL (Plug-in type)
VVFS2000-24A-2RL (Non plug-in type)
Valve VFS210 (Single)
Release valve
spacer SUP port
Block plate
Note) The SUP and EXH block plates

cannot be used for the 2 stations
integrated type manifold block. Note) VVFS2000-24A- 12 R/D-side mounting.
Throttle valve spacer: Double check spacer:

VVFS2000-20A-1 (Plug-in type) VVFS2000-22A-1 (Plug-in type)
VVFS2000-20A-2 (Non plug-in type) VVFS2000-22A-2 (Non plug-in type)
Double check
Throttle valve spacer
spacer
∗ Not applicable to the external pilot.

928
Manifold with Control Unit

• Control unit (Filter, Regulator, Manifold Specifications
Pressure switch, Air release valve) Manifold Plug-in type: VV5FS2-01 Non plug-in type: VV5FS2-10
are all standardized to the one unit, Plug-in with attachment plug lead wire Grommet
and can be mounted on the With terminal block Grommet terminal
Wiring
manifold base without any With multi-connector Conduit terminal SV
attachments. With D-sub connector DIN terminal
• Piping processes are eliminated.
Applicable valve model VFS200-F (Z)
VFS210-G, VFS210-E
VFS210-T, VFS210-D
SYJ
Common SUP, Common EXH
2(B), 4(A) port Side: 1/8, 1/4, Bottom: 1/8 (Option) SZ
Rc
1 (P), 3(R2), 5(R1) port Side: 1/4, 1/8, Bottom: 1/8 (Option)
Stations 2 to 15 stations∗ VF
∗ With multi-connector, or D-sub connector: 8 stations max.
VP4
Control Unit Specifications Control Unit/Option
Air filter (With auto-drain/With manual drain) <Plug-in type> VQ
Plug-in type Filtration degree 5 µm (2) VVFS2000-24A-1R (D side mounting) 1/2
Air release VVFS2000-24A-1L (U side mounting)
Regulator valve VQ
Set pressure (Outlet pressure) 0.05 to 0.85 MPa spacer <Non plug-in type> 4/5
Pressure switch (1) VVFS2000-24A-2R (D side mounting)
VVFS2000-24A-2L (U side mounting) VQC
Set pressure range: OFF 0.1 to 0.6 MPa 1/2
Differential 0.08 MPa or less Pressure switch (3)
IS1000P-2-1
With control unit/Filter regulator MP2-2 VQC
Contact 1a Blanking
Pressure switch MP3-2 4/5
Indicator light LED (RED) plate
Non plug-in type Release valve AXT625-18A
Max. switch capacity 2 VA AC, 2 W DC
Filter element 111511-5B VQZ
24 VAC/DC or less: 50 mA
Caution Max. operating current
100 VAC/DC: 20 mA Note 1) Voltage: 24 VDC to 100 VAC
When using an air filter with auto-drain or Air release valve (Single only) Inner voltage drop: 4 V SQ
Note 2) Refer to manifold option parts on page 924.
manual drain, mount the filter vertically. Operating pressure range 0.1 to 1.0 MPa Note 3) The non plug-in type cannot be mounted after-
wards. VFS
Note) The manifold of plug-in type with attachment plug lead wire is applied to individual type only. VFR
How to Order Non plug-in type has no junction cover. [Option]
VQ7
VV5FS2 10 08 1 01 AP CE-compliant
Nil —
Q CE-compliant
VFS2000 Series
Manifold Air release valve coil rating
Base type/Electrical entry Nil None (F, G type only)
01 Plug-in type with attachment plug lead wire 1 100 VAC, 50/60 Hz
01T Plug-in type with terminal block 5 24 VDC
01C Plug-in type with multi-connector Control unit type 9 Other
01F Plug-in type with D-sub connector Symbol
10 Non plug-in type Nil A AP M MP F G C E
Control equipment
Connector mounting direction Stations Air filter with auto-drain   
Symbol With connector Applicable base Air filter with manual drain   
02 2 stations
Nil None 01, 01T, 10 Regulator      
···
···
D Air release valve      

D side mounting
01C, 01F 15∗ 15 stations
U U side mounting Pressure switch  
∗ Base type
01, 01T, 10 2 to 15 stations Blanking plate (Air release valve)  
01C, 01F 2 to 8 stations
Junction cover Blanking plate (Filter, Regulator) 
Nil Stacking type Symbol Blanking plate (Pressure switch)     
1 Integrated type Passage Porting Number of manifold blocks
Symbol
specifications 2 2 2 2 2 2 2 1
P EA, EB B, A required for mounting (stations)
Note) Stacking type:
Base type 01, 01T 1 Side
Common Common How to Order Manifold Assembly [Example]
Integrated type: 2∗ Bottom Thread type
Base type 01T, 01C, 01F
3∗ Side Add the valve and option part numbers in order starting
Common Individual Nil Rc from the first station on the D side.
4∗ Bottom
N∗ NPT <Example>
5∗ Side
Individual Common T∗ NPTF • Plug-in type with terminal block
6∗ Bottom (Manifold base) VV5FS2-01T1-091-02-MP5 1
F∗ G
7∗ Side ∗ Semi-standard (2 position single) ∗ VFS2100-5FZ 5
Individual Individual
∗ Semi-standard 8∗ Bottom (2 position double) ∗ VFS2200-5FZ 2
∗ 2 stations are needed to mount control unit.
The individual specification of the P port in the composition
symbol marks 3 to 8 or EA, EB ports should be taken as Port size • Non plug-in type
individual port using a block plate. Therefore, if an individual Symbol P, EA, EB B, A (Manifold base) VV5FS2-10-071-01-M 1
port is taken using a single SUP spacer of option or a single (2 position single) ∗ VFS2110-5D 5
01 18
EXH spacer, the composition symbol mark is “1”. ∗ 2 stations are needed to mount control unit.
02 14 14
The asterisk denotes the symbol for assembly. Prefix it to
M Mixed the part numbers of the solenoid valve.
929 A
VFS2000 Series
Manifold with Control Unit — Plug-in type, Non plug-in type

Plug-in type:
VV5FS2-01T- Station 1- Port size - Control unit Voltage for release valve Example for manifold
2(B)
4(A) (VVFS2000-R-01 1
U side 02-2)
Double check spacer

(VVFS2000-22A-12)
R'
2(B)
With light/surge 4(A)

voltage
suppressor
P' Individual EXH spacer
2(B)
(VVFS2000-P-01 1
02-2)
4(A)
Stations
Air release valve

Pressure switch
Air release valve Control unit
Pressure switch
D side
X
P
P' Outlet for check
Po port
regulator
Air filter
Pilot EXH port
Electrical entry
5 1 3 Po P" Control unit
(R1) (P) (R2)
1(P), 3(R2), 5(R1) port
Non plug-in type:

VV5FS2-10- Station 1- Port size - Control unit Voltage for release valve Example for manifold
2(B)
4(A) (VVFS2000-R-01 1
02-2)
Double check spacer

U side (VVFS2000-22A-12)
A, B port R'
2(B)
4(A)
P' Individual EXH spacer

2(B)
(VVFS2000-P-01 1
02-2)
4(A)
Air release valve
Stations
Pressure switch
Air release
Pressure valve Pressure switch
switch
electrical
X
P
entry
D side P' Outlet for check
regulator
Air filter
Po port
5 1 3 Po P" Control unit
(R1) (P) (R2)
Pilot EXH port
n: Stations
Stations
L 3 4 5 6 7 8 9 10 Formula
L1 131 159 187 215 243 271 299 327 L1 = 28 x n + 47
1(P), 3(R2), 5(R1) port
L2 140 168 196 224 252 280 308 336 L2 = 28 x n + 56
L3 (MP) 278 306 334 362 390 418 446 474 L3 = 28 x n + 194
L3 (AP) 319.5 347.5 375.5 403.5 431.5 459.5 487.5 515.5 L3 = 28 x n + 235.5
930
Dripproof Manifold (Equivalent to IP65)

Manifold VV5FS2-01WTBU D VV5FS2-01W
Wiring Common terminal box Attachment plug lead wire
Applicable value model VFS200-F-X54
Common SUP, Common EXH SV
Porting specifications 2(B), 4(A) port Side: 1/8, 1/4, Bottom: 1/8 (Option)
Rc
1(P), 3(R2), 5(R1) port Side: 1/4 SYJ
Stations 2 to 10 stations 2 to 15 stations
SZ
How to Order [Option] VF

How to order manifold VP4
VV5FS2 01WTBU 08 1 02 VQ
1/2
CE-compliant VQ
Nil — 4/5
Plug-in dripproof manifold Q CE-compliant VQC
(Equivalent to IP65) 1/2
Port size
01WTBU Common terminal box (U side mounting) VQC
Symbol P, R1, R2 A, B 4/5
01WTBD Common terminal box (D side mounting)
01W Attachment plug lead wire 01 18
02 14 14
VQZ
M Mixed
Stations ∗ For bottom ported, A/B port
02 2 stations is available only with 1 8 . SQ
•••
•••
15 15 stations Symbol
Porting
VFS
∗ For 01WTB, please specify the Passage specifications
Symbol
number of stations mounted on
the valve. 1
P, R1, R2 A, B
Side
VFR
Common
(2 stations mounted on the ter- 2∗ Bottom
minal block are not included.)
∗ Semi-standard
VQ7
How to order valves
VFS2 1 00 5 F X54
CE-compliant
Nil —
Symbol
Q CE-compliant
1 2 position single
2 2 position double
Dripproof
3 3 position closed center
4 3 position exhaust center Pilot valve manual override
5 3 position pressure center Nil Non-locking push type (Flush)
6 3 position double check A∗ Non-locking push type (Extended)
B∗ Locking type (Tool required)
Pilot type C∗ Locking type (Lever)
∗ Semi-standard
Nil Internal pilot
R∗ External pilot
Option
∗Semi-standard
Nil None
With light/surge
Z voltage suppressor
Coil rated voltage

1 100 VAC, 50/60 Hz
2 200 VAC, 50/60 Hz
3∗ 110 to 120 VAC, 50/60 Hz
4∗ 220 VAC, 50/60 Hz
5 24 VDC
6∗ 12 VDC
7∗ 240 VAC, 50/60 Hz
∗ Semi-standard
For other rated voltages, please
consult with SMC.
931 A
VFS2000 Series
Dripproof Manifold
With common terminal box: VV5FS2-01WTB UD - Station 1- Port size
Indicator light
Push type manual override
Pilot EXH port
101 (Single)
150.5 (Double)
158 (3 position)
1(P), 3(R2), 5(R1) port External pilot port
x 25 Printed
D side U side
Stations
Electrical entry
Bottom ported: VV5FS2-01WTBD- Station 2-01
2(B), 4(A) port
n: Stations
L
Stations
1 2 3 4 5 6 7Formula 8 9 10
∗ Terminal mounting stations are not included. L1 120 145 170 195 220 245 270 295 320 345 L1 = 25 x n + 95
Indicates solenoid valve mounting stations. L2 131 156 181 206 231 256 281 306 331 356 L2 = 25 x n + 106
With attachment plug lead wire: VV5FS2-01W- Station 1- Port size

Electrical entry
Pilot EXH port
1(P), 3(R2), 5(R1) port
Insert plug Indicator light
with lead wire Push type manual override
Lead wire length
L = 1000
101 (Single)
150.5 (Double)
158 (3 position)
External pilot port
Bottom ported: VV5FS2-01W- Station 2-01 Stations

D side U side
2(B), 4(A) port
n: Stations
L
Stations
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Formula
L1 70 95 120 145 170 195 220 245 270 295 320 345 370 395 420 L1 = 25n + 45
L2 81 106 131 156 181 206 231 256 281 306 331 356 381 406 431 L2 = 25n + 56
932
SV
SYJ
SZ
VF
VP4
VQ
1/2
VQ
4/5
VQC
1/2
VQC
4/5
VQZ
SQ
VFS
VFR
VQ7
933
VFS2000 Series
Made to Order
Serial Transmission Kit Manifold: EX123/124 Integrated-type (For Output)
Serial Transmission System
How to Order
How to Order Manifold
VV5FS2 01S V 08 1 02 X460

Plug-in type Thread type
Serial transmission kit Nil Rc
Port size N NPT
Stations Symbol P, R1, R2 A, B T NPTF
03 3 stations 01 1/8 F G
02 1/4 1/4
18 18 stations M Mixed
Note 1) Max. 18 stations. Add 2 stations for serial unit ∗ For bottom ported: 1/8 only
mounting.
Note 2) Max. 18 stations for all-single wiring. (No. of
valves: 16) Combination symbol
For the standard double wiring, the maximum Port specification Piping specification
number of stations is 10. (No. of valves: 8) Symbol
P R1, R2 A, B
1 Side
Compatible with SI unit U side Common Common
2∗ Bottom
mounating only 3∗ Side
Applicable models 4∗
Common Individual
Bottom
Symbol SI unit part no. Description 5∗ Side
0 — Without SI unit Individual Common
6∗ Bottom
H EX123U-SUH1 NKE Corporation: Fieldbus H System (16 outputs) 7∗ Side
Q EX124U-SDN1 DevieNet (2 power supply systems) Individual Individual
8∗ Bottom
R1 EX124U-SCS1 OMRON Corporation: CompoBus/S (16 outputs) (2 power supply systems) ∗ Semi-standard
R2 EX124U-SCS2 OMRON Corporation: CompoBus/S (8 outputs) (2 power supply systems)
V EX124U-SMJ1 CC-Link (2 power supply systems)
Refer to Best Pneumatics No. 1-1 and the Op-
eration Manual for the details of EX123/124 Inte-
grated-type (For Output) Serial Transmission
System. Please download the Operation Manu-
al via our website, http://www.smcworld.com
 Correspondence of SI unit output numbers and solenoid valve coils

<Wiring Example 1> Double wiring (Standard) <Wiring Example 2> Single/Double mixed wiring (Semi-standard)
D side U side D side U side
1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 11 12
SI unit output no.
SI unit output no.

Double
Double
Double
Double
Double
Double
Double
Single
Single
Single
Single
Single
Single
Single
Single
Single
Single
Single
SI unit
SI unit
AB AB AB AB AB AB AB AB AB AB A A A AB A AB A A
01 23 45 67 8 9 10 11 12 13 14 15 01 23 4 5 6 78 9 10 11 11 12
∗ Mixed wiring is available as a semi-standard.
Use the manifold specification sheet to specify this.
How to Order Valves
VFS2 00 5 F
Symbol Pilot valve manual override
1 2 position single Nil Non-locking push type (Flush)
2 2 position double A Non-locking push type (Extended)
3 3 position closed center B Locking type (Tool required)
4 3 position exhaust center C Locking type (Lever)
5 3 position pressure center
6 3 position double check Option
Nil None
Coil rated voltage

Nil None
24 VDC
B 934
Serial Transmission Kit Manifold: EX123/124 Integrated-type (For Output) Serial Transmission System
VV5FS2-01S Model - Stations Symbol - Port size -X460
6 x Rc 1/4
26.5 1(P), 5(R1), 3(R2) port
SI unit
SV
13 2 x Rc 1/8 Manual override
PE port SYJ
SZ
44
VF
22.5
14.5
79
75
63
PE
127.5
101
A A A A A
119.5
119.5
VP4
R1
EA
68
150.5
158
P
VQ
.7
40.5
R2
EB
B B B B B
R2
1/2
8.5
SMC
VQ
5.4
14.5
4/5
16.5 VQC
30.5 L1 1/2
38 L2 VQC
4/5
VQZ
D side Stations 1 2 3 4 5 6 7 8 n U side
SQ
VFS
VFR
123.5
SMC SMC SMC
SMC SMC
VQ7
88.5
B B B B B B B B
47
37.5
A A A A A A A A
2
11.5
9
42 28 37.5
2n x Rc 1/8, 1/4
4(A), 2(B) port EX123: 2 x G 1/2
∗ Use a dripproof plug assembly EX124: 4 x G 1/2
(AXT100-B04A) for the unused Electrical entry
conduit port (G 1/2).
Formula L1 = 28n + 47 L2 = 28n + 56

Dimensions n: Stations (Max. 18 stations)
L n 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18
L1 131 159 187 215 243 271 299 327 355 383 411 439 467 495 523 551
L2 140 168 196 224 252 280 308 336 364 392 420 448 476 504 532 560
Note) Actual number of manifold base stations: Add 2 SI unit mounting stations to the number of valve stations.
935
VFS2000 Series
Manifold Base Construction — Plug-in type, Non plug-in type
!3
w
U side q
e
!6
!2
t Not used for the 1st station
on D side.
!1
u
y
i
r
!4
!0 D side
o
P
EB
PE
EA
C
SM R2
R1
!5
∗ Manifold Base/Construction: Plug-in type with terminal block (01T1).

• For increasing the manifold bases, please order the manifold block assembly number of the principle number assembly !1 and !2.
For plug-in type: The manifold base with terminal stand (integrated with a junction cover) is required with the !0 junction cover assembly.
• Manifold base is consisted of the junction of 2 and 3 station bases.
Example) U side n 6 5 4 3 2 1 D side
<5 stations (Odd number)> 2 stations 2 stations 1 station
<6 stations (Even number> 2 stations 2 stations 1 station 1 station
936
Replacement Parts
1 Connection fitting assembly Steel plate AXT625-4-1A
2 Connection fitting B Steel plate AXT625-5
3 Gasket A NBR
4 Gasket B NBR
AXT625-17
AXT625-16
SV
5 Gasket HNBR VVFS2000-32-1H
6 O-ring NBR KA00292 (GT code) SYJ
7 O-ring NBR KA00276 (GT code)
8 O-ring NBR KA00326 (GT code) SZ
Adapter plate Resin For 01 AXT625-6
Adapter plate assembly —
For 01T
For 01T1
AXT625-28-13A
(Terminal section with adapter plate and lead wire assembly)
VF
9
For 01C AXT625-28-1
Adapter plate Resin For 01F VVF2000-26-6 VP4
For 01S AXT625-6 VQ
For 01 AXT625-7A 1/2
For 01T AXT625-28-3A
For 01T1 VQ
10 Junction cover assembly —
For 01C
AXT625-28-7A- Stations 4/5
For 01F VVF2000-26-5A- Stations VQC
For 01S AZ738-10A- Stations 1/2
For 01 AXT333-12 VQC
Rubber plug NBR
15 For 01T
01S
(1)
AXT625-22 4/5
Plug — For 01W EXP22S
16 Guard Resin 01
For 01T (1) AXT625-28-4 VQZ
SQ
No. Description Part no. Component parts Applicable manifold base VFS
Manifold block !1, Metal joint q, w, O-ring y, u, i, Junction cover !0, Plug-in type
AXT625-01A- 12 (-B) Note)
Adapter plate o, Pin housing, Guide, Insert plug lead wire With attachment plug lead wire
Manifold block
Manifold block !1, Metal joint q, w, O-ring y, u, i, Junction cover !0, Plug-in type
VFR
11 assembly AXT625-20A- 12 (-B) Note)
Adapter plate assembly (with terminal) o, Pin housing, Guide With terminal block
(for 1 station)
VQ7
AXT625-10A-12 (-B) Note) Manifold block !1, Metal joint q, w, O-ring y, u, i Non plug-in type
Manifold block !2, Metal joint q, w, Gasket t, Junction cover !0, Plug-in type
AXT625-01A2- 12 Note)
Adapter plate o, Pin housing, Guide, Insert plug lead wire With attachment plug lead wire
Manifold block
Manifold block !2, Metal joint q, w, Gasket t, Junction cover !0, Plug-in type
12 assembly AXT625-20A2- 12 Note)
Adapter plate assembly (with terminal) o, Pin housing, Guide With terminal block
(for 2 stations)
AXT625-10A2- 12 Note) Manifold block !1, Metal joint q, w, Gasket t Non plug-in type
Plug-in type
AXT625-2A End plate (U) !3, Metal joint q, w, Gasket A e, Guard !6
With attachment plug lead wire
End plate (U side) Plug-in type
13 AXT625-2A-20 End plate (U) !3, Metal joint q, w, Gasket A e, Guard !6
assembly With terminal block
AXT625-2A-10 End plate (U) !3, Metal joint q, w, Gasket A e Non plug-in type
Plug-in type
AXT625-3A End plate (D) !4, Metal joint q, w, Gasket B r, Guard !6, Steel ball
With attachment plug lead wire
End plate (D side) Plug-in type
14 AXT625-3A-20 End plate (D) !4, Metal joint q, w, Gasket B r, Guard !6, Steel ball
assembly With terminal block
AXT625-3A-10 End plate (D) !4, Metal joint q, w, Gasket B r, Steel ball Non plug-in type
Note) 1: A, B port size Rc 1/8, 2: A, B port size Rc 1/4, (-B): A, B port bottom ported
937
VFS2000 Series
Light Compact Type Sub-plate/C: 2.8 dm3/(s·bar)

C: 2.2 dm3/(s·bar) C: 2.8 dm3/(s·bar) Sub-plate
L dimension Weight
Type (mm) (kg)
L dimension Compact type 25.5 0.13
L dimension
Standard type 31 0.2
Compact type Standard type
Sub-plate — Compact: Plug-in, Grommet (With attachment plug lead wire)

VFS200-F-(B) P01 Sub-plate assembly part no.: VFS2000-CP-(B) 01
02 (01: Rc
1 8 , 02: Rc 1 4 )
P02
≈ 300
Lead wire
5 x bottom ported size
(Refer to the below right.)
2 x ø4.5 mounting hole Bottom ported
Port Size
Port size Port P, A, B EA, EB
P01 Rc 1 8 Rc 1 8
1 (Center) P02 Rc 1 4 Rc 1 8
Pilot EXH port
Electrical entry
5 x bottom ported size Bottom Ported Size
(Refer to the right.) Port size Port P, A, B EA, EB
( ): Port size P02 BP02 Rc 1 8 ,1 4 Rc 1 8
Sub-plate — Compact: Non plug-in

VFS210--(B) S01
S02
Sub-plate assembly part no.: VFS2000-CS-(B) 01
02
(01: Rc 1 8 , 02: Rc 1 4 )
5 x bottom ported size
(Refer to the below right.)

Bottom ported
Port Size
Port size Port P, A, B EA, EB
S01 Rc 1 8 Rc 1 8
1 (Center) S02 Rc 1 4 Rc 1 8
Pilot EXH port

5 x bottom ported size Bottom Ported Size
(Refer to the right.) Port P, A, B EA, EB
Port size
( ): Port size S02 BS02 Rc 1 8 1 4 Rc 1 8
Precautions Please pay attention to piping port location of sub-plate. Electrical Connection
Compact type, plug-in type grommet sub-
VFS20-- P01/02
S01/02 : Compact type VFS20-- 01
02 : Standard type plate (With attachment plug lead wire)
• The attachment plug lead wire is attached to the
manifold block and lead wire is plugged in with
valve side as shown in the following list. Please
connect with corresponding power side.
Solenoid A side B side
Lead wire color Red Black Brown White
• There is no polarity.
938
SV
SYJ
SZ
VF
VP4
VQ
1/2
VQ
4/5
VQC
1/2
VQC
4/5
VQZ
SQ
VFS
VFR
VQ7
939

Model
Port Max. (2)

(3)
Type of 1 4/2 (P A/B) 4/2 5/3 (A/B R1/R2)
size time
actuation Plug-in Non plug-in C C cycle (kg)
14 6.0 0.15 1.4 5.8 0.12 1.3
2 position

1200 20 or less 0.31
7.3 0.23 1.8 6.8 0.12 1.6
14 6.0 0.15 1.4 5.8 0.12 1.3
1500 15 or less 0.41
7.3 0.23 1.8 6.8 0.12 1.6
Closed 14 5.8 0.21 1.4 5.4 0.14 1.2
600 40 or less 0.43
6.8 0.22 1.7 6.3 0.12 1.5
Exhaust 14 6.1 0.23 1.4 5.0 0.14 1.2
3 position

7.4 0.20 1.8 5.6 0.18 1.3
Pressure 14 6.0 0.22 1.5 5.8 0.16 1.3
center
VFS3500 VFS3510 38 600 40 or less 0.43
7.2 0.19 1.8 7.1 0.18 1.8
Double 14 4.0 — — 3.5 — —
check
VFS3600 VFS3610 38 600 50 or less 0.91
4.0 — — 3.7 — —
Note 3) The figures in the above list are for without sub-plate. In the case of with plug-in sub-plate and with non plug-in sub-plate, add 0.30 kg and 0.27 kg respectively.
Compact yet provides a large flow capacity Standard Specifications

3/8: C: 5.8 dm3/(s·bar) Fluid Air
Low power consumption: 1.8 W DC Maximum operating pressure 1.0 MPa
Minimum operating pressure 0.1 MPa

Easy maintenance Proof pressure 1.5 MPa
2 types of sub-plates: Ambient and fluid temperature –10 to 60°C (1)
Plug-in and non plug-in Lubrication Non-lube (2)
Type E: Dustproof (Equivalent to IP50), Type F: Dripproof
Enclosure (Equivalent to IP52), Type D: Splashproof (Equivalent to IP54) (4) (6)

Plug-in type
Electrical entry
Non plug-in type DIN terminal, Grommet terminal
Non plug-in type Note 3) Impact resistance: No malfunction occurred when it is tested with a drop tester in the axial direction
2 position 3 position Vibration resistance: No malfunction occurred in a one-sweep test between 45 and 2000 Hz. Test was
Single Closed center performed at both energized and de-energized states in the axial direction and at
(A)4 2(B) (A)4 2(B) the right angles to the main valve and armature. (Values at the initial period)
513 513 Note 6) The F and D type enclosures described above show those without the light/surge voltage suppressor.
(R1) (P) (R2) (R1)(P)(R2)
The F and D type enclosures with the light/surge voltage suppressor are equivalent to IP50.
Double Exhaust center
(A)4 2(B) (A)4 2(B)
Option
513 5 13 Pilot type External pilot Note)
(R1)(P)(R2) (R1)(P)(R2)
Pressure center Manual Main valve Direct manual override type
(A)4 2(B)
override Pilot valve Non-locking push type (Extended), Locking type (Tool required), Locking type (Lever)
110 to 120, 220, 240 VAC (50/60 Hz)
Coil rated voltage
513
12, 100 VDC
(R1)(P)(R2) Porting specifications Bottom ported
Double check Option With light/surge voltage suppressor
(A)4 2(B)
Pilot pressure: 0.1 to 1.0 MPa
513
(R1)(P) (R2)
A 940
Port size
Nil Without sub-plate
Body type Electrical entry 02 14
O: Plug-in type F: Plug-in type 03 38
sub-plate conduit terminal ∗ For bottom ported, 1 4 is
Porting only available. SV
specifications Thread type
Nil Side ported Nil Rc SYJ
B∗ Bottom ported N∗ NPT CE-compliant
T∗
∗ Semi-standard
F∗
NPTF
G
Nil
Q
—
CE-compliant
SZ
∗ Semi-standard
VF
Plug-in VFS3 1 0 0 1 F 02 VP4
VQ
Non plug-in VFS3 2 1 1 2 D 02 1/2
VQ
Pilot valve 4/5
Manual override VQC
Option 1/2
Nil: Non-locking push type
Nil None (Flush)
Z With light/surge voltage suppressor VQC
4/5
Electrical entry
Symbol E: Grommet terminal D: DIN terminal VQZ
2 position single 3 position pressure center DO: DIN terminal
(A)4 2(B) (A)4 2(B) without connector
A∗: Non-locking push type SQ
1 5 (Extended)
513 513 VFS

(R1)(P) (R2) (R1)(P)(R2)
2 position double 3 position double check VFR
(A)4 2(B) (A)4 2(B)
2 6
B∗: Locking type
VQ7
513 513 (Tool required)
(R1)(P)(R2) (R1)(P)(R2) Coil rated voltage
3 position closed center 1 100 VAC, 50/60 Hz
(A)4 2(B) 2 200 VAC, 50/60 Hz
3 3∗ 110 to 120 VAC, 50/60 Hz
4∗ 220 VAC, 50/60 Hz
513
(R1)(P)(R2) 5 24 VDC
C∗: Locking type
3 position exhaust center 6∗ 12 VDC (Lever)
(A)4 2(B) 7∗ 240 VAC, 50/60 Hz
4 ∗ Semi-standard
For other rated voltages, please consult with SMC.
5 13
(R1)(P)(R2) Pilot type
∗ Reverse pressure: Can be used by Nil Internal pilot
external pilot specifications. ∗ Semi-standard
R∗ External pilot
∗ Semi-standard
Body type
1: Non plug-in type
sub-plate
SF4 1 F 30
Coil rated voltage Manual override
Symbol Rated voltage Symbol Manual override
1 100 VAC, 50/60 Hz Non-locking push type
Nil
2 200 VAC, 50/60 Hz (Flush)
3∗ 110 to 120 VAC, 50/60 Hz Non-locking push type
Body Option A∗
4∗ 220 VAC, 50/60 Hz (Extended)
0 Standard
Locking type
5 24 VDC
1∗ Direct manual override B∗
6∗ 12 VDC (Tool required)
∗ Semi-standard ∗ Locking type
7 240 VAC, 50/60 Hz C∗
∗ Semi-standard (Lever)
For other rated voltages, please consult with SMC. ∗ Semi-standard
∗∗ Refer to page 1010 for voltage conversion.
941 A
VFS3000 Series

Sizing Program.
Bore size
MB, CA2 series CS1/CS2 series
Average Pressure 0.5 MPa Pressure 0.5 MPa
System speed Load factor 50% Load factor 50%
(mm/s) Stroke 500 mm Cylinder stroke 1000 mm
ø40 ø50 ø63 ø80 ø100 ø125 ø140 ø160 ø180 ø200
1000 Perpendicular,
800 Horizontal
700 actuation
600
A 500
400
300
200
100
0
1000
900
800
700
600
B 500
400
300
200
100
0
System Components
Speed ∗ It is when the cylinder is extending that is meter-out
SGP (Steel pipe)
System Solenoid valve Silencer controlled by speed controller which is directly con-
controller Port size x Length nected with cylinder, and its needle valve with be-
VFS3000 ing fully open.
AS4000-02 AN20-02 6A x 1 m ∗ The average velocity of the cylinder is the value
A Series
(S = 24 mm2) (S = 35 mm2) that the stroke is divided by the total stroke time.
Rc1 4
∗ Load factor: ((Load mass x 9.8)/Theoretical force) x
VFS3000
AS420-03 AN30-03 100%
B Series 10A x 1 m
(S = 73 mm2) (S = 60 mm2)
Rc 3 8

Can hold an intermediate cylinder Specifications Check Valve Operation
position for an extended time Double check Plug-in type Non plug-in type
double check valve is combined, it will Applicable VFS3410-D Cylinder side Check valve
enable the cylinder to stop in the VFS3400-F pressure (P2)
valve model VFS3410-E
intermediate stroke and maintain its
position for a long time without being
affected by the leakage between the Caution
spools. • In the case of 3 position double check
Double check spacer valve (VFS360), check the leakage Piston SUP side pressure (P1)
from piping and fittings in between valve
and cylinder by means of synthetic

detergent solutions, and ensure that Operating range
there is no such leakage found there.
Also check the leakage from cylinder
seal and piston seal. If there is any
leakage, sometimes the cylinder, when
valve is de-energized, can move without
Plug-in type stopping at intermediate position.
• Be aware that if the exhaust side is Cylinder side pressure P2 (MPa)
0 0
stopping accuracy will decrease and will • The combination of VFS31 1 0, VFS32 1 0
lead to improper intermediate stops. and double check spacer can be used
as prevention for falling at the stroke end
but cannot hold the intermediate
Non plug-in type position of the cylinder.
942
Construction
513 513
(R1)(P)(R2) (R1)(P)(R2)
SV
SYJ
SZ
VF
VP4
VQ
1/2
VQ
4/5
VQC
1/2
VQC
4/5
3 position closed center/exhaust center/pressure center VQZ

Closed center
(A)4 2(B)
SQ
VFS
513
(R1)(P)(R2) VFR
Exhaust center
(A)4 2(B) VQ7
5 13
(R1)(P)(R2)
Pressure center
(A)4 2(B)
513
(R1)(P)(R2)
Component Parts Sub-plate Assembly Part No.

No. Description Material Note Plug-in VFS3000-P- 02 03 (N, T, F)
1 Body Aluminum die-casted — Non plug-in VFS3000-S- 02 03 (N, T, F)
2 Sub-plate Aluminum die-casted — ∗ Mounting bolt and gasket are not included.
4 Adapter plate Resin — Sub-plate Assembly (For External Pilot) Part No.
5 End plate Resin — Plug-in VFS3000-P-R 02
03 (N, T, F)
6 Piston Resin — Non plug-in VFS3000-S-R 02
03 (N, T, F)
7 Junction cover Resin —
8 Light cover Resin —
Part no. for mounting
9 Return spring Stainless steel — Note
bolt and gasket
10 Gasket HNBR —
11 Hexagon socket head screw Steel — Plate gasket type
12 Detent assembly — — BG-VFS3000 (Earlier than
13 Pilot valve assembly — — September, 2012) Note)
Groove gasket type
BG-VFS3000-1 (After October
2012) Note)
Note) When ordering the parts shown above for the replacement, note that the
described date may slightly vary depending on the product being used.
943 A
VFS3000 Series
Plug-in — 2 Position single/3 Position closed center/Exhaust center/Pressure center/Double check

2 position single: VFS3100-F(Z)
2 x ø5.6
mounting hole Rc 1/8 external pilot port
(Only for external pilot) 2(B), 4(A) port
(PE port)
Pilot valve manual override

Light window At FZ
2 x ø5.6
mounting hole
With direct manual override
G 1/2 electrical entry

Bottom ported
( ): Rc 1 4
2 position double: VFS3200-F(Z) 3 position double check: VFS3600-F(Z)

3 position closed center: VFS3300-F(Z)
3 position exhaust center: VFS3400-F(Z)
3 position pressure center: VFS3500-F(Z) 2 x ø5.6
mounting hole
170.5 (3 position: 175)
2 x ø5.6
mounting hole
Light window
At FZ
86.5 (3 position: 96.5)
Pilot valve
manual
override
Light window
At FZ
Pilot valve
manual
override

( ): Rc 1 4 ( ): Rc 1 4
944
Non Plug-in — 2 Position single/Double/3 Position closed center/Exhaust center/Pressure center/Double check
2 position single: VFS3110-E(Z), VFS3110-D(Z)
Rc 1/8 external pilot port
(Only for external pilot)
2 x ø5.6 2(B), 4(A) port
mounting hole
SV
SYJ
(PE port)
SZ
VF
2 x ø5.6 VP4
mounting hole
VQ
Cable ø8 to ø10 1/2
VQ
Pilot valve 4/5
manual override Light window
At DZ, EZ VQC
1/2
VQC
4/5
Bottom ported
VQZ
( ): Rc 1 4
DIN Connector/Gasket Part No. SQ

Description No.
Connector UKL-S1
VFS
Gasket DXT087-27-2
VFR
2 position double: VFS3210-E(Z), VFS3210-D(Z) 3 position double check: VFS3610-E(Z), VFS3610-D(Z) VQ7
3 position closed center: VFS3310-E(Z), VFS3310-D(Z)
3 position exhaust center: VFS3410-E(Z), VFS3410-D(Z)
3 position pressure center: VFS3510-E(Z), VFS3510-D(Z)
2 x ø5.6
mounting hole
Applicable heavy-duty cord O.D.

ø8 to ø10
Pilot valve
manual override Light window at DZ, EZ
165 (3 position: 175)

Applicable heavy-duty cord O.D.
ø8 to ø10
Pilot valve Light window

manual At DZ, EZ
override
( ): Rc 1 4 ( ): Rc 1 4
945
VFS3000 Series
[Option]

• Since lead wires of solenoid valve
are connected with the terminals VV5FS3 01T 06 1 02
on upper surface of terminal block, CE-compliant
corresponding lead wires from VFS3000 Series Nil —
power source can be wired at the Manifold Stations
Q CE-compliant
bottom of terminal Plug-in type 01 1 station
block. Thread type
···
···
with terminal block
16 16 stations Port size Nil Rc
Symbol P, EA, EB A, B T∗ NPTF
Symbol 02 14 F∗ G
Passage Porting 03 1 2 38 ∗ Semi-standard
Symbol specifications
P EA, EB (A, B) M Mixed
1 Side ∗ For bottom ported,
Common Common
Terminal block ∗ Semi-standard 2 Bottom∗ 1/4 is only available.

• Master connection of power
and solenoid valves. VV5FS3 01C D 05 2 02
• Quick wiring permits easier CE-compliant
installation. VFS3000 Series Stations Nil —
U side
Manifold 02 2 stations Q CE-compliant
Plug-in type
···
···
with multi- Connector mounting 08∗ 8 stations Thread type

connector direction ∗ Max. 8 stations Port size Nil Rc
D side D D side mounting Symbol P,EA,EB A,B T∗ NPTF
Plug assembly (Option)
U U side mounting Symbol 02 14 F∗ G
Porting 03 12 38 ∗ Semi-standard
Refer to page 1013. Passage
Multi-connector ∗ Semi- 1 Side ∗ For bottom ported,
Common Common
standard 2 Bottom∗ 1/4 is only available.

(MIL Spec D-sub connector termi- VV5FS3 01F D 06 1 02
nal 25 pcs attached.) CE-compliant
• Quick wiring permits easier VFS3000 Series Stations
Nil —
installation. Manifold 02 2 stations Q CE-compliant
···
···
U side
Plug-in type Connector mounting 08∗ 8 stations
direction Thread type
with D-sub ∗ Max. 8 stations Port size Nil Rc
connector D D side mounting
D side Symbol P,EA,EB A,B T∗ NPTF
U U side mounting
Symbol 02 14 F∗ G
Passage Porting 1 2
Plug assembly (Option) Symbol specifications 03 38 ∗ Semi-standard
Refer to page 1013. P EA, EB (A, B) M Mixed
D-sub 1 Side
connector ∗ Semi- Common Common ∗ For bottom ported,
standard 2 Bottom∗ 1/4 is only available.
Non Plug-in Type: Grommet Terminal, DIN Terminal

• Wiring for every valve.
VV5FS3 10 05 2 02
DIN terminal CE-compliant
VFS3000 Series Nil —
Grommet terminal Stations
Manifold Q CE-compliant
01 1 station
Non plug-in type
···
···
Thread type
16 16 stations Port size Nil Rc
Symbol P,EA,EB A,B T∗ NPTF
Symbol 02 14 F∗ G
Passage Porting 1 2
Symbol specifications 03 38 ∗ Semi-standard
1 Side ∗ For bottom ported,
Common Common
∗ Semi-standard 2 Bottom∗ 1/4 is only available.
A 946

Porting
specifications External Applicable(3)
Base model Wiring Stations pilot valve model
corresponding valve, and option parts. A, B port P, EA, EB A, B
• With terminal block
<Example> Plug-in type
• With multi-connector VFS30(R)-F(Z)
• Plug-in type with terminal block: 6 stations VV5FS3-01 Side/ (1) (2) (3)
• With D-sub connector 12 1 4, 3 8 1 to 16 Yes
(Manifold base) VV5FS3-01T-061-02 ······1 Bottom
Non plug-in type • DIN terminal VFS31(R)-D(Z)
(2 position single) VFS3100-5FZ ············3 VV5FS3-10 • Grommet terminal VFS31(R)-E(Z) SV
(2 position double) VFS3200-5FZ ···········2
(Blanking plate) VVFS3000-10A ·············1 Note 1) Appropriate silencer for EA, EB port: “AN40-04”.
Note 2) With multi-connector, or with D-sub connector: 8 stations max. SYJ
Note 3) It is possible to mount the standard valve and the external pilot type valve together.
<Example>
• Non plug-in type: 6 stations SZ
(Manifold base) VV5FS3-10-061-03 ········1
(2 position single) VFS3110-5D ···············5 Flow Rate Characteristics at the Number of Manifold Stations (Operated individually)
(3 position exhaust center) VFS3410-5D ·····1 Model Passage/Stations Station 1 Station 5 Station 10 VF
(Individual EXH spacer) VVFS3000-R-03-2 ···1 C [dm3/(s·bar)] 6.0 6.0 6.0
1 4/2
(P A/B)
b 0.20 0.20 0.20 VP4
Cv 1.4 1.4 1.4
VV5FS3 VQ
C [dm3/(s·bar)] 7.0 7.0 7.0
4/2 5/3 1/2
b 0.20 0.20 0.20
(A/B R1/R2)
Cv 1.8 1.8 1.8 VQ
∗ Port size: Rc 3/8 4/5
VQC
1/2
VQC
4/5
VQZ
SQ
VFS
VFR
VQ7
947
VFS3000 Series
Manifold Option Parts Assembly Manifold Option

Individual SUP spacer Throttle valve spacer With exhaust cleaner
An individual SUP spacer set on manifold Needle valve set on the manifold block can Plug-in type/Non Plug-in type
block can form SUP port for every valve. control cylinder speed by throttling exhaust. • Valve exhaust noise dampening: 35 dB
Body type Plug-in type Non plug-in type Body type Plug-in type Non plug-in type or more.
Part no. VVFS3000-P-03-1 VVFS3000-P-03-2 Part no. VVFS3000-20A-1 VVFS3000-20A-2 • Oil mist collection: Rate of collection
99.9% or more.
• Piping process reduced.
Individual EXH spacer Double check spacer

An individual EXH spacer set on manifold If the double check spacer with a built-in double
check valve is combined, it will enable the For details, refer to page 951.
block can form EXH port for every valve.
(common EXH type) cylinder to stop in the intermediate stroke and
maintain its position for a long time without being
Body type Plug-in type Non plug-in type affected by the leakage between the spools. With control unit
Part no. VVFS3000-R-03-1 VVFS3000-R-03-2 Plug-in type/Non Plug-in type
Part no. VVFS3000-22A-1 VVFS3000-22A-2 • Filter, regulation valve, pressure switch
and air release valve are all combined
to form one unit.
∗ SUP block plate

When supplying manifold with more than two Interface regulator
different pressures, high and low, insert a Interface regulator set on manifold block can
block plate in between stations subjected to regulate the pressure to each valve. (Refer to
different pressures. page 1011 for “Flow Rate Characteristics”.)
Body type Plug-in type Non plug-in type Body type Plug-in type Non plug-in type For details, refer to page 953.
Part no. AXT636-1A P port regulation ARBF3050-00-P-1 ARBF3050-00-P-2
A port regulation ARBF3050-00-A-1 ARBF3050-00-A-2
∗ EXH block plate B port regulation ARBF3050-00-B-1 ARBF3050-00-B-2 Made to Order
When valve exhaust affects the other Serial transmission kit manifold
stations on the circuit or when the reverse Plug-in type
pressure valve is used to standard manifold • Solenoid valve wiring process reduced
valve, insert EXH block plate between considerably.
stations to separate valve exhaust.
For details, refer to page 956.
Part no. AXT636-1A
Blanking plate
It is used by attaching on the manifold block
for being prepared for removing a valve for
When mounting on the 2 stations integrated type maintenance reasons or planning to mount a
manifold block, mount it after cutting the gasket.
spare valve, etc.
948

Plug-in type (With terminal block): VV5FS3-01T- Station 1- Port size
U side
SV
SYJ
Pilot valve
manual override
SZ
VF
VP4
Light window
VQ
Stations
1/2
VQ
4/5
Bottom ported: VQC
VV5FS3-01T- Station 2- Port size D side
1/2
VQC
4/5
(Pilot EXH port: PE) (External pilot port) VQZ

SQ
VFS
Electrical entry
VFR
VQ7
Non plug-in type: VV5FS3-10- Station 1- Port size
U side
Pilot valve
manual override
Light window
Stations
Bottom ported:
VV5FS3-10- Station 2- Port size D side
Applicable cabtire cable O.D.
ø8 to ø10
(Pilot EXH port: PE) (External pilot port)
Formula for manifold weight M = 0.309n + 0.532 (kg) n: Stations

L
Stations
2 3 4 5 6 7 8 9 10
Formula
L1 129 162 195 228 261 294 327 360 393 L1 = 33 x n + 63
L2 141 174 207 240 273 306 339 372 405 L2 = 33 x n + 75
949
VFS3000 Series
Manifold — Plug-in type with multi-connector/D-sub connector

Plug-in type with multi-connector: VV5FS3-01CD- Station 1- Port size , VV5FS3-01CU- Station 1- Port size
U side
Light
window
Stations
Bottom ported: D side

VV5FS3-01 CD
CU - Station 2- Port size
Plug assembly VVFS2000-30A-
(Option: Refer to page 1013.)
(Pilot EXH port: PE)


Plug-in type with D-sub connector: VV5FS3-01FD- Station 1- Port size , VV5FS3-01FU- Station 1- Port size
U side
Pilot valve
manual override
Light window
Stations
Bottom ported:
VV5FS3-01FD
FU - Station 2- Port size
D side
Plug assembly VVZS3000-21A-


Formula for manifold weight M = 0.41n + 0.677 (kg) n: Station (External pilot port)
n: Stations
L
Stations
2 3 4 5 6 7 8
Formula
L1 129 162 195 228 261 294 327 L1 = 33 x n + 63
L2 141 174 207 240 273 306 339 L2 = 33 x n + 75
950
Manifold with Exhaust Cleaner

• Serves to protect working Manifold Plug-in type: VV5FS3-01 Non plug-in type: VV5FS3-10
environment. With terminal blocks
• Valve exhaust noise dampening: 35 Wiring DIN terminal
With multi-connector
Grommet terminal
dB or more. With D-sub connector SV
• Collection rate of drainage and oil Applicable valve model VFS300-F VFS310-D, VFS310-E
mist: 99.9% or more. Common SUP, Common EXH
SYJ
• Piping work is reduced. Rc
2(B), 4(A) port 1/4, 3/8
1(P), 3(R2), 5(R1) port P: 1/2, EXH: 1
Stations 2 to 10 (1) SZ
Applicable exhaust cleaners AMC610-10 (Connecting port size R 1) (2)
Note 1) With multi-connector, or with D-sub connector: 8 stations max. VF
Note 2) Exhaust cleaner “AMC610-10” is not attached.
VP4
How to Order [Option] VQ
1/2
Plug-in type VQ
Exhaust cleaner AMC610-10 VV5FS3 10 06 1 03 CD 4/5
(Option) VQC
VFS3000 Series CE-compliant 1/2
Manifold Nil —
VQC
U side Q CE-compliant 4/5
Base type/Electrical
entry
Plug-in type
Exhaust cleaner
mounting direction
VQZ
01T
with terminal block
Plug-in type
Exhaust cleaner
Symbol mounting direction SQ
01C
with multi-connector CD D side D side mounting
01F
Plug-in type CU U side U side mounting VFS
with D-sub connector
D side
Thread type
Non plug-in type 10 Non plug-in type
VFR
Nil Rc
Connector mounting direction T∗ NPTF
Exhaust cleaner AMC610-10
(Option) Symbol With connector Applicable base F∗ G VQ7
Nil None 01T, 10 ∗ Semi-standard
D D side mounting Port size
01C, 01F
U U side mounting
Symbol P A, B
Stations 02 14
02 2 stations 03 1 2 38
M Mixed
···
···
10 10 stations ∗ For bottom ported, 1/4 is only available.

Base type 01T, 10: 2-10 stations
Symbol
Base type 01C, 01F: 2-8 stations
Passage Porting
P R1, R2 (A, B)
1 Side
Common Common
2 Bottom∗
∗ Semi-standard

Caution Add the valve and option part numbers in order starting from the first station
on the D side.
When using an exhaust cleaner, mount it
<Example>
downwards. • Plug-in type with terminal block (6 stations)
(Manifold base) VV5FS3-01T-061-03-CD 1
(2 position single) ∗ VFS3100-5FZ 3
(2 position double) ∗ VFS3200-5FZ 2
(Blanking plate) ∗ VVFS3000-10A 1
(Exhaust cleaner) AMC610-10 1
• Non plug-in type (6 stations)
(Manifold base) VV5FS3-10-061-03-CU 1
(2 position single) ∗ VFS3110-5E 3
∗ For details about exhaust cleaners, refer to Best (2 position double) ∗ VFS3210-5E 2
Pneumatic No. 7. (Blanking plate) ∗ VVFS3000-10A 1
the solenoid valve.
951 A
VFS3000 Series
Manifold with Exhaust Cleaner — Plug-in type, Non plug-in type

Plug-in type: VV5FS3-01T- Station 1- Port size - CD
CU
U side
Light
Pilot valve
manual override Pilot valve D side
manual override
Stations
Exhaust cleaner
(Option)
≈
D side U side
D side mounting
(Pilot EXH port: PE) (External pilot port: X12) Note)

U side mounting
Electrical entry
Note) The external pilot port is located on a side
opposite to the exhaust cleaner mounting side.
D side mounting: External pilot port U side
U side mounting: External pilot port D side
Non plug-in type: VV5FS3-10- Station 1- Port size - CD

CU
U side
Pilot valve D side

manual override
Light
Stations
Exhaust cleaner
(Option)
≈
D side U side
D side mounting
(External pilot port: X12) Note)

(Pilot EXH port: PE) U side mounting
Note) The external pilot port is located on a side
opposite to the exhaust cleaner mounting side.
D side mounting: External pilot port U side
U side mounting: External pilot port D side
n: Stations
L
Stations
2 3 4 5 6 7 8 9
Formula 10
L1 129 162 195 228 261 294 327 360 393 L1 = 33 x n + 63
L2 141 174 207 240 273 306 339 372 405 L2 = 33 x n + 75
952

• Control unit (Filter, Regulator, Manifold Specifications
Pressure switch, Air release valve) Manifold Plug-in type: VV5FS3-01 Non plug-in type: VV5FS3-10
are all standardized to the one unit, With terminal block
DIN terminal
and can be mounted on the Wiring With multi-connector
Grommet terminal
manifold base without any With D-sub connector SV
Applicable valve model VFS300-F VFS310-D, VFS310-E
attachments.
• Piping processes are eliminated. Porting specifications 2(B), 4(A) port
Common SUP, Common EXH
1/4, 3/8
SYJ
Rc
1(P), 3(R2), 5(R1) port 1/2
Stations 2 to 10 ∗ SZ
∗ With multi-connector, or with D-sub connector: 8 stations max.
VF
Control Unit Specifications Control Unit/Option VP4
U side
Air filter (With auto-drain/With manual drain) <Plug-in type>
Air release VVFS3000-24A-1R (D side mounting) VQ
Plug-in type Filtration degree 5 µm valve 1/2
Regulator spacer (2) <Non plug-in type>
Set pressure (Outlet pressure) 0.05 to 0.85 MPa VVFS3000-24A-2R (D side mounting) VQ
Pressure
IS1000P-2-1 4/5
Pressure switch(1) switch (3)
Set pressure range: OFF 0.1 to 0.6 MPa Blanking
Filter regulator MP2-3 VQC
Differential 0.08 MPa or less plate Pressure switch MP3-2 1/2
Contact 1a Release valve VVFS3000-24A-10
D side Filter VQC
Indicator light LED (RED) INA-13-854-12-5B 4/5
Non plug-in type element
Max. switch capacity 2 VA AC, 2 W DC Note 1) Voltage: 24 VDC to 100 VAC
Max. operating current

24 VAC/DC or less: 50 mA Inner voltage drop: 4 V
Note 2) Combination of valve VFS31 (single)
VQZ
Caution 100 VAC/DC: 20 mA
and a release valve spacer can be used
When using an air filter with auto-drain or Air release valve (Single only)
Operating pressure range 0.1 to 1.0 MPa
an air release valve.
Note 3) The non plug-in type cannot be mounted
SQ
manual drain, mount the filter vertically.
afterwards.
VFS
How to Order [Option] VFR
VV5FS3 10 08 1 02 AP VQ7
CE-compliant
VFS3000 Series Air release valve coil rating Nil —
Manifold
Nil None (F, G type only) Q CE-compliant
Base type/Electrical entry
1 100 VAC, 50/60 Hz
01T Plug-in type with terminal block
5 24 VDC
01C Plug-in type with multi-connector
01F Plug-in type with D-sub connector
10 Non plug-in type Control unit type
Connector mounting direction Symbol
Nil A AP M MP F G C E
Control equipment
Symbol With connector Applicable base
Air filter with auto-drain
Nil None 01T, 10
Air filter with manual drain
D D side mounting
01C, 01F Regulator
U U side mounting
Air release valve
Stations Pressure switch
02 2 stations Blanking plate (Air release valve)
Symbol
Blanking plate (Filter, Regulator)
···
···
Passage Porting
10 10 stations Symbol specifications Blanking plate (Pressure switch)
P EA, EB (A, B)
Base type 01T, 10: Number of manifold blocks
1 Side 2 2 2 2 2 2 2 1
2 to 10 stations Common Common required for mounting (stations)
Base type 01C, 01F: 2 Bottom∗
2 to 8 stations ∗ Semi-standard How to Order Manifold Assembly [Example]
Port size station on the D side.
Symbol P, EA, EB A, B
<Example>
02 14 Thread type • Plug-in type with terminal block — In order to mount control unit,
03 12 38 Nil Rc it requires 2 stations.
M Mixed T∗ NPTF (Manifold base) VV5FS3-01T-081-03-AP5 1
∗ For bottom ported, F∗ G (2 position single) ∗ VFS3100-5FZ 4
1/4 is only available. ∗ Semi-standard (2 position double) ∗ VFS3200-5FZ 2
• Non plug-in type — In order to mount control unit, it requires 2 stations.
(Manifold base) VV5FS3-10-061-03-A 1
(2 position single) ∗ VFS3110-5D 4
The asterisk denotes the symbol for assembly. Prefix it to the part
953 A
VFS3000 Series
Manifold with Control unit — Plug-in type, Non plug-in type

Plug-in type: VV5FS3-01T- Station 1- Port size -AP Voltage for release valve
Example for manifold
2(B) Individual EXH spacer

(VVFS3000-R-03-12)
4(A)
(VVFS4000-R-04-12)
Double check spacer
(VVFS3000-22A-12)
U side R' (VVFS4000-22A-12)
2(B)
4(A)
Light
Pressure 2(B) P'
(VVFS3000-P-03-12)
switch
(VVFS4000-P-03-12)
Air release valve 4(A)
Stations
Air release valve

(192: -MP)
D side
Pressure switch
≈ (Po port)
(External pilot port: X12)
X
P
P' Outlet for check
regulator
Air filter
≈
5 1 3 Po P"
(R1) (P) (R2) Control unit
Electrical entry
Non plug-in type: VV5FS3-10- Station 1- Port size -AP Voltage for release valve
(VVFS3000-R-03-12)
4(A)
(VVFS4000-R-04-12)
Double check spacer
Pilot valve (VVFS3000-22A-12)
manual override R' (VVFS4000-22A-12)
2(B)
U side
4(A)
Pressure
switch Light
Air release 2(B) P'
valve (VVFS3000-P-03-12)
4(A) (VVFS4000-P-03-12)
Stations
Air release valve
(192: -MP)
D side
Pressure
switch
≈
X
P
P' Outlet for check
Rc 1/2 (Po port)
regulator
Air filter
(External pilot port: X12)

(Pilot EXH port: PE) 5 1 3 Po P"
≈
L
Stations
3 4 5 6 7 8 9 10 Formula
L1 162 195 228 261 294 327 360 393 L1 = 33 x n + 63
L2 174 207 240 273 306 339 372 405 L2 = 33 x n + 75
L3 (MP) 360 393 426 459 492 525 558 591 L3 = 33 x n + 261
L3 (AP) 379.5 412.5 445.5 478.5 511.5 544.5 577.5 610.5 L3 = 33 x n + 280.5
954
SV
SYJ
SZ
VF
VP4
VQ
1/2
VQ
4/5
VQC
1/2
VQC
4/5
VQZ
SQ
VFS
VFR
VQ7
955
VFS3000 Series
Made to Order
Serial Transmission Kit Manifold: EX123/124 Integrated Type (For Output)
How to Order
VV5FS3 01S V 08 1 02 X279

Plug-in type Thread type
Serial transmission kit Nil Rc
Port size T NPTF
Stations Symbol P, R1, R2 A, B F G
2 2 stations 02 1/4
03 1/2 3/8
17 17 stations M Mixed
Note 1) Max. 17 stations. Add 1 station for serial unit ∗ For bottom ported: 1/4 only
mounting.
Note 2) Max. 17 stations for all-single wiring. (No. of
valves: 16) Combination symbol
For the standard double wiring, the maximum Port specification
Piping specification
number of stations is 9. (No. of valves: 8) Symbol
P R1, R2 A, B
1 Side
Compatible with SI unit U side 2∗
Common Common
Bottom
mounating only ∗ Semi-standard
Applicable models
Symbol SI unit part no. Description
0 — Without SI unit
H EX123U-SUH1 NKE Corporation: Fieldbus H System (16 outputs)
Q EX124U-SDN1 DevieNet (2 power supply systems)
R1 EX124U-SCS1 OMRON Corporation: CompoBus/S (16 outputs) (2 power supply systems)
R2 EX124U-SCS2 OMRON Corporation: CompoBus/S (8 outputs) (2 power supply systems) Refer to Best Pneumatics No. 1-1 and the Op-
V EX124U-SMJ1 CC-Link (2 power supply systems) eration Manual for the details of EX123/124 Inte-
grated- type (For Output) Serial Transmission
System. Please download the Operation Manu-
al via our website, http://www.smcworld.com

1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 10
SI unit output no.
SI unit output no.

Double
Double
Double
Double
Double
Double
Double
Single
Single
Single
Single
Single
Single
Single
Single
Single
Single
SI unit
SI unit
AB AB AB AB AB AB AB AB AB AB A A A AB A AB A
01 23 45 67 8 9 10 11 12 13 14 15 01 23 4 5 6 78 9 10 11 11
∗ Mixed wiring is available as a semi-standard. Use the manifold specification sheet to specify this.
How to Order Valves
VFS3 00 5F
Nil None
Pilot type Z With light/surge voltage suppressor
Nil Internal pilot
Coil rated voltage
R External pilot
Nil None
24 VDC
B 956
Serial Transmission Kit Manifold: EX123/124 Integrated-type (For Output) Serial Transmission System
VV5FS3-01S Model - Stations Symbol - Port size Thread -X279
2 x Rc 1/8 Light SI unit

Pilot EXH port L2 SV
32 L1
SYJ
SMC SMC SMC

SMC SMC SZ
96.5
VF
86.5
79.5
PE
9
A A A A A
R4
129
VP4
44
.5
185
24.5 24.5
181
175
EA
165
P
VQ
2
1/2
EB
44
54.5
B B B B B
VQ
X
SMC SMC SMC

4/5
27
VQC
46 1/2
2 x Rc 1/8
54 (External pilot port) VQC
4/5
6 x Rc 1/2
1(P), 5(R1), 3(R2) port Pilot valve manual override VQZ
D side U side
Stations 1 2 3 4 5 6 7 n SQ
VFS
VFR
VQ7
SMC SMC
139
123
104
B B B B B B B
79.5
14.5
63.5
49.5
A A A A A A A
19
2
54 33
2n x Rc 1/4, 3/8
4(A), 2(B) port EX123: 2 x G 1/2
EX124: 4 x G 1/2
∗ Use a dripproof plug assembly
Electrical entry
(AXT100-B04A) for the unused
conduit port (G 1/2).
Formula L1 = 33n + 63 L2 = 33n + 75

Dimensions n: Stations (Max. 17stations)
L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17
L1 129 162 195 228 261 294 327 360 393 426 459 492 525 558 591 624
L2 141 174 207 240 273 306 339 372 405 438 471 504 537 570 603 636
Note) Actual number of manifold base stations: Add 1 SI unit mounting station to the number of valve stations.
957
VFS3000 Series

Individual SUP spacer: Double check spacer:
VVFS3000-P-03-1 (Plug-in type) VVFS3000-22A-1 (Plug-in type)
VVFS3000-P-03-2 (Non plug-in type) VVFS3000-22A-2 (Non plug-in type)
(157: With direct manual override)
Individual
SUP
spacer
Double check
spacer
Individual EXH spacer: Interface regulator/P port regulation:

VVFS3000-R-03-1 (Plug-in type) ARBF3050-00-P-1 (Plug-in type)
VVFS3000-R-03-2 (Non plug-in type) ARBF3050-00-P-2 (Non plug-in type)

Individual
EXH Interface
spacer regulator
SUP/EXH block plate: AXT636-1A Interface regulator/A port regulation:

ARBF3050-00-A-1 (Plug-in type)
ARBF3050-00-A-2 (Non plug-in type)
Interface
regulator
Block disk mounting position
When mounting on the 2 stations integrated type manifold block, mount it after
cutting the gasket.
Throttle valve spacer: Interface regulator/B port regulation:

VVFS3000-20A-1 (Plug-in type) ARBF3050-00-B-1 (Plug-in type)
VVFS3000-20A-2 (Non plug-in type) ARBF3050-00-B-2 (Non plug-in type)
Throttle
valve
spacer Interface
regulator
958
SV
SYJ
SZ
VF
VP4
VQ
1/2
VQ
4/5
VQC
1/2
VQC
4/5
VQZ
SQ
VFS
VFR
VQ7
959
VFS3000 Series
!4
t
D side
!2
For side ported
!1
e
q
w
y
u
!3
U side
12
X r
y
u
i
P
1
EB
3
EA
5
For bottom ported
!0
∗ Manifold Base Construction: Plug-in type with terminal block (01T1).

• For increasing the manifold bases, please order the manifold block assembly number of the principle number assembly !1 and !2.
For plug-in type, o junction cover assembly is required.
• Manifold base is consisted of the junction of 2 and 3 station bases.
Example) U side n 6 5 4 3 2 1 D side
<5 stations (Odd number)> 1 station 2 stations 2 stations
<6 stations (Even number)> 1 station 1 station 2 stations 2 stations
960
Replacement Parts
1 Connection fitting assembly For 01T VVFS3000-5-1A
2 Connection fitting B For 01T VVFS3000-5-2
3 Gasket NBR VVFS3000-7-1
4 Gasket NBR VVFS3000-8
SV
5 Gasket NBR VVFS3000-32-1
6 O-ring NBR KA00232 (GT code) SYJ
8 Terminal assembly — VVFS3000-6A SZ
— For 01T VVFS3000-4A- Stations Note)
9 Junction cover assembly
10 Rubber plug
NBR For 01S AZ738-22A- Stations Note)
AXT336-9
VF
Note) Example to indicate the number of stations when ordering the junction cover assembly.
• For 5 stations: VVFS3000-4A-5 VP4
VQ
1/2
VQ
No. Description Part no. Component parts Applicable manifold base
4/5
Manifold block !1, Metal joint q, w, Gasket e, t,
Bottom ported Side ported
VVFS3000-1A-1-02 Note 1) Plug-in type VQC

03 Terminal i, Receptacle assembly
1/2
Manifold block VVFS3000-1A-2- 02
03
Note 1) Manifold block !1, Metal joint q, w, Gasket e, t Non plug-in type
11 assembly
VQC
(for 1 station) 02 Manifold block !1, Metal joint q, w, Gasket e, r, 4/5
VVFS3000-1A-1-B 03 Note 1) Plug-in type
O-ring y, u, Terminal i, Receptacle assembly
02
VVFS3000-1A-2-B 03 Note 1)
Manifold block !1, Metal joint q, w, Gasket e, r,
Non plug-in type
VQZ
O-ring y, u
VVFS3000-1A2-1- 02
03
Note 1)
Manifold block q, w, Metal joint q, w, Gasket e, t,
Plug-in type SQ
Manifold block assembly Terminal i, Receptacle assembly
12
(for 2 stations) Note 2)
VVFS3000-1A2-2- 02
03
Note 1) Manifold block !2, Metal joint q, w, Gasket e, t Non plug-in type VFS
End plate (U side)
VVFS3000-2A-1 End plate (U) !3, Metal joint q, w, O-ring y, u Plug-in type VFR
13
assembly
VVFS3000-2A-2 End plate (U) !3, Metal joint q, w, O-ring y, u Non plug-in type
VQ7
VVFS3000-3A-1 End plate (D) !4, Metal joint q, w, Gasket e Plug-in type
End plate (D side)
14
assembly
VVFS3000-3A-2 End plate (D) !4, Metal joint q, w, Gasket e Non plug-in type
Note 1) 02: A, B port size Rc 1/4, 03: A, B port size Rc 3/8

Note 2) The bottom ported type manifold block for 2 stations is not available.
961
Model

Max.
(1)
(2)

(3)(4)
Type of Port 1 → 4/2 (P → A/B) 4/2 → 5/3 (A/B → R1/R2)
cycle time (kg)
actuation Plug-in Non plug-in size C C (ms)
[dm3/(s·bar)] b Cv [dm3/(s·bar)] b Cv (cpm)
38 11 0.18 2.6 12 0.20 2.8
2 position
Single VFS4100 VFS4110 1,000 40 or less 0.63

12 12 0.15 2.8 12 0.22 3.1
38 11 0.18 2.6 12 0.20 2.8
Double VFS4200 VFS4210 12 1,200 15 or less 0.75
12 0.15 2.8 12 0.22 3.1
Closed 38 10 0.18 2.5 10 0.14 2.3
VFS4300 VFS4310 600 50 or less 0.82
center 12 11 0.18 2.7 11 0.22 2.6
Exhaust 38 11 0.16 2.6 10 0.15 2.3
3 position
VFS4400 VFS4410 600 50 or less 0.82

center 12 12 0.15 2.9 10 0.15 2.4
38 11 0.22 2.7 11 0.22 2.7
Pressure 50 or less 0.82
VFS4500 VFS4510 600
center 12 12 0.22 2.9 11 0.22 2.8
Double 38 6.3 — — 6.5 — —
VFS4600 VFS4610 200 55 or less 1.71
check 12 6.8 — — 6.8 — —
Note 3) The figures in the above list are for without sub-plate. In the case of with plug-in sub-plate and with non plug-in sub-plate, add 0.50 kg and 0.43 kg respectively.
Compact yet provides a large flow capacity
Fluid Air
1/2: C: 12 dm3/(s·bar)
Low power consumption: 1.8 W DC 2 position 0.1 MPa

Minimum operating pressure
Easy maintenance 3 position 0.15 MPa
2 types of sub-plates: Proof pressure 1.5 MPa
Plug-in and non plug-in Ambient and fluid temperature –10 to 60°C (1)
Plug-in type Enclosure (Equivalent to IP52), Type D: Splashproof (Equivalent to IP54) (4) (6)

Non plug-in type Electrical entry
2 position 3 position
performed at both energized and de-energized states in the axial direction and at
Single Closed center the right angles to the main valve and armature. (Values at the initial period)
(A)4 2(B) (A)4 2(B)
513 513
Note 6) The F and D type enclosures described above show those without the light/surge voltage suppressor.
(R1) (P) (R2) (R1)(P)(R2) The F and D type enclosures with the light/surge voltage suppressor are equivalent to IP50.
Double Exhaust center
(A)4 2(B) (A)4 2(B)
513 5 13 Pilot type External pilot Note)
(R1)(P)(R2) (R1)(P)(R2)
Manual Main valve Direct manual override
Pressure center override Pilot valve Non-locking push type (Extended), Locking type (Tool required), Locking type (Lever)
(A)4 2(B)
110 to 120, 220, 240 VAC, 50/60 Hz
Coil rated voltage
12, 100 VDC
513
(R1)(P)(R2) Porting specifications Bottom ported
Double check Option With light/surge voltage suppressor, Non-rotating DIN terminal
(A)4 2(B)
Pilot pressure 2 position: 0.1 to 1.0 MPa, 3 position: 0.15 to 1.0 MPa
513
(R1)(P) (R2)
A 962
Port size
Porting Nil Without sub-plate
Body type Electrical entry specifications
03 38
O: Plug-in type F: Plug-in type Nil Side ported 04∗ 12
sub-plate conduit terminal B∗ Bottom ported
∗ EA, EB: 3 8
∗ In the case of external
pilot (Semi-standard),
SV
bottom piping is not
Thread type
available. Nil Rc SYJ
N∗ NPT CE-compliant
T∗
F∗
NPTF
G
Nil
Q
—
CE-compliant
SZ
∗ Semi-standard
VF
VQ
Non plug-in VFS4 2 1 1
0 1 E 03 1/2
VQ
Pilot valve 4/5
Option Manual override VQC
Nil None Nil: Non-locking push type 1/2
(Flush)
Z With light/surge voltage suppressor VQC
P∗ Non-rotating DIN terminal 4/5
∗ In the case of w/ “Z”, enter “ZP”.
∗ Type “P” is available for DIN type only. VQZ
Symbol
2 position single 3 position pressure center
Electrical entry
A∗: Non-locking push type SQ
E: Grommet terminal D: DIN terminal (Extended)
(A)4 2(B) (A)4 2(B)
1 5
DO: DIN terminal
without connector
VFS
513
(R1)(P) (R2)
513
(R1)(P)(R2) VFR
2 position double 3 position double check
(A)4 2(B) (A)4 2(B)
B∗: Locking type VQ7
2 6 (Tool required)
513 513
(R1)(P)(R2) (R1)(P)(R2)
3 position closed center
(A)4 2(B)
Coil rated voltage
1 100 VAC, 50/60 Hz
3
2 200 VAC, 50/60 Hz C∗: Locking type
513 3∗ 110 to 120 VAC, 50/60 Hz (Lever)
(R1)(P)(R2)
4∗ 220 VAC, 50/60 Hz
3 position exhaust center 5 24 VDC
(A)4 2(B)
6∗ 12 VDC
4 7∗ 240 VAC, 50/60 Hz
5 13
∗ Semi-standard
(R1)(P)(R2) For other rated voltages, please consult with SMC.
∗ Semi-standard
∗ Reverse pressure: Can be used by
external pilot specifications. Pilot type
Nil Internal pilot
Body type R∗ External pilot
1: Non plug-in type ∗ Semi-standard
sub-plate How to Order Pilot Valve Assembly
SF4 1 F 30
Nil (Flush)
2 200 VAC, 50/60 Hz
∗
3 110 to 120 VAC, 50/60 Hz Non-locking push type
A∗
Body option 4∗ 220 VAC, 50/60 Hz (Extended)
0 Standard 5 24 VDC Locking type
B∗ (Tool required)
1∗ Direct manual override 6∗ 12 VDC
∗ Semi-standard 7 ∗ 240 VAC, 50/60 Hz Locking type
C∗
∗ Semi-standard (Lever)
For other rated voltages, please consult with SMC. ∗ Semi-standard
∗∗ Refer to page 1010 for voltage conversion.
963 A
VFS4000 Series

Sizing Program.
Bore size
CA2 series Note) The CA1 series CS1/CS2 series
Average
Pressure 0.5 MPa has been changed Pressure 0.5 MPa
System speed
Load factor 50% to the CA2 series. Load factor 50%
(mm/s)
Stroke 500 mm Cylinder stroke 1000 mm
ø50 ø63 ø80 ø100 ø125 ø140 ø160 ø180 ø200 ø250 ø300
1000 Perpendicular,
800 Horizontal
700 actuation
600
A 500
400
300
200
100
0
1000
900
800
700
600
B 500
400
300
200
100
0
System Components
∗ It is when the cylinder is extending that is meter-out
Speed SGP (Steel pipe)
System Solenoid valve Silencer controlled by speed controller which is directly connected
controller Port size x Length
with cylinder, and its needle valve with being fully open.
A
VFS4000 Series AS420-03 AN30-03 10A x 1 ∗ The average velocity of the cylinder is what the stroke is
Rc3 8 (S = 73 mm2) (S = 60 mm2) divided by the total stroke time.
VFS4000 Series AS420-04 AN40-04 ∗ Load factor: ((Load mass x 9.8)/Theoretical force) x 100%
B Rc1 2 15A x 1
(S = 97 mm2) (S = 90 mm2)

Can hold an intermediate cylinder Specifications Check Valve Operation
position for an extended time Double check Plug-in type Non plug-in type
double check valve is combined, it will Applicable VFS4410-D Cylinder side Check valve
VFS4400-F
enable the cylinder to stop in the valve model VFS4410-E pressure (P2)
position for a long time without being
affected by the leakage between the Caution
spools. • In the case of 3 position double check
valve (VFS460), check the leakage Piston SUP side pressure (P1)
Double check spacer and cylinder by means of synthetic

Plug-in type stopping at intermediate position.
0 0
stopping accuracy will decrease and will • The combination of VFS4110, VFS4210
lead to improper intermediate stops. and Double check spacer for prevention
of falling at the stroke end but cannot
Non plug-in type hold the intermediate position of the
cylinder.
964
Construction
513 513
(R1)(P)(R2) (R1)(P)(R2)
SV
SYJ
SZ
VF
VP4
VQ
1/2
VQ
4/5
VQC
1/2
VQC
4/5
3 position closed center/exhaust center/pressure center VQZ
Closed center SQ
(A)4 2(B)
VFS
513
(R1)(P)(R2)
VFR
Exhaust center
(A)4 2(B)
VQ7
5 13
(R1)(P)(R2)
Pressure center
(A)4 2(B)
513
(R1)(P)(R2)

No. Description Material Note Plug-in VFS4000-P- 03
04 (N, T, F)
1 Body Aluminum die-casted — Non plug-in VFS4000-S- 03
04 (N, T, F)
4 Adapter plate Resin —
End plate
Sub-plate Assembly (For External Pilot) Part No.
5 Resin —
—
Plug-in VFS4000-P-R 03
04 (N, T, F)
6 Piston Resin
—
Non plug-in VFS4000-S-R 03
04 (N, T, F)
7 Junction cover Resin
8 Light cover Resin —
9 Return spring Stainless steel — Part no. for mounting
bolt and gasket Note
10 Gasket HNBR —
11 Hexagon socket head screw Steel —
Plate gasket type
BG-VFS4000 (Earlier than July,
13 Pilot valve assembly — — 2010) Note)
Groove gasket type
BG-VFS4000-1 (After August
2010) Note)
965 A
VFS4000 Series

2 x ø6.5 mounting hole Rc 1/8 external pilot port
(Only for external pilot)
2(B), 4(A) port
(PE port)
Pilot valve
manual override With light/surge voltage suppressor
(With direct manual override)
107 (FZ)
Electrical entry (R1, R2: Rc 3 8)
mounting hole
Bottom ported
(R1, R2: Rc 3 8)

3 position closed center: VFS4300-F(Z) 2 x ø6.5 mounting hole
3 position pressure center: VFS4500-F(Z)

187 (3 position: 196.5)
With light/surge voltage suppressor Light window
Pilot valve
With light/surge voltage suppressor Light window manual override
Pilot valve
manual override
177 (FZ)
107 (FZ)

966
Rc1 8: External pilot port
(Only external pilot port)
2(B), 4(A) port
SV
SYJ
(PE port)
SZ
VF
VP4
DIN terminal
Applicable cabtire cable O.D. VQ
ø8 to ø10 1/2
Pilot valve VQ
manual override 4/5
VQC
1/2
2 x ø6.5
mounting hole VQC
4/5
(R1, R2: Rc 3 8)
VQZ
Bottom ported
SQ
(R1, R2: Rc 3 8) DIN Connector/Gasket Part No.
Description Part No. VFS
Connector UKL-S1
Gasket DXT087-27-2 VFR
VQ7
2 position double: VFS4210-E(Z), VFS4210-D(Z) 3 position double check: VFS4610-E(Z), VFS4610-D(Z)
3 position exhaust center: VFS4410-E(Z), VFS4410-D(Z) 2 x ø6.5 mounting hole
3 position pressure center: VFS4510-E(Z), VFS4510-D(Z)

187 (3 position: 196.5)
DIN terminal
Applicable cabtire
cable O.D. ø8 to ø10
Applicable cabtire DIN terminal

cable O.D. ø8 to ø10 Pilot valve
manual
With direct manual overide
Pilot valve override

manual override
(R1, R2: Rc 3 8)
(R1, R2: Rc 3 8)
967 A
VFS4000 Series
[Option]

corresponding lead wires from VFS4000 Series Stations Nil —
power source can be wired at the Manifold 02 2 stations Q CE-compliant
bottom of terminal Plug-in type Port size
···
···
block. with terminal block 10 10 stations Symbol P, R1, R2 A, B Thread type
03 38 Nil Rc
Symbol 04 1 2 12 N∗ NPT
Passage Porting M Mixed T∗ NPTF
∗ For bottom ported, F∗ G
P R1, R2 (A, B)
3 8 is only available. ∗ Semi-standard
1 Side
Common Common
2 Bottom∗ ∗ Semi-standard
Terminal block

• Quick wiring permits easier Stations CE-compliant
installation. VFS4000 Series Nil —
02 2 stations
U side
Manifold ··· Q CE-compliant
···
Plug-in type 08∗ 8 stations Port size

with multi-connector ∗ Max. 8 stations Thread type
Symbol P, R1, R2 A, B
Connector mounting 03 38 Nil Rc
D side
direction 1 2 12 N∗ NPT
Symbol 04
D D side mounting T∗ NPTF
M Mixed
Plug assembly U U side mounting Symbol Passage Porting
specifications F∗ G
(Option)
P R1, R2 (A, B)
∗ For bottom ported,
Refer to page 1013. 1 Side
Multi-connector Common Common
Plug-in Type With: D-sub Connector (Wiring specifications: Refer to page 1013.)
(MIL Spec D-sub connector termi- VV5FS4 01F D 06 1 03
nal 25 pcs attached.) CE-compliant
• Quick wiring permits easier Stations
VFS4000 Series Nil —
installation. 02 2 stations
···
···
U side Plug-in type 08∗ 8 stations Port size

with D-sub connector ∗ Max. 8 stations Thread type
Connector mounting 38 Nil Rc
direction 03
D side 1 2 12 N∗ NPT
04
D D side mounting Symbol T∗ NPTF
Plug assembly M Mixed
(Option) U U side mounting Passage Porting F∗ G
Symbol specifications ∗ For bottom ported,
Refer to page 1013. P R1, R2 (A, B) 3 8 is only available. ∗ Semi-standard
1 Side
Common Common
D-sub connector 2 Bottom∗ ∗ Semi-standard

VV5FS4 10 05 2 03
DIN terminal CE-compliant
VFS4000 Series Stations Nil —
Grommet terminal
Manifold 02 2 stations Q CE-compliant
Non plug-in Port size
···
···
type 10 10 stations Symbol P, R1, R2 A, B Thread type

03 38 Nil Rc
04 1 2 12 N∗ NPT
Symbol
Porting M Mixed T∗ NPTF
Passage
P R1, R2 (A, B)
1 Side
Common Common
A 968

Porting
specifications External Applicable (2)
Base model Wiring Stations
corresponding valve, and option parts. A, B port P, EA, EB A, B pilot valve model
<Example> • With terminal block
Plug-in type
• Plug-in type with terminal block: 6 stations • With multi-connector VFS40(R)-F(Z)
VV5FS4-01 Side/ (1) (2)
(Manifold base) VV5FS4-01T-061-03 ······1 • With D-sub connector 12 3 8,1 2 2 to 10 Yes
Bottom
Non plug-in type
(2 position single) VFS4100-5FZ ·············3
(2 position double) VFS4200-5FZ ············2 VV5FS4-10
• DIN terminal
• Grommet terminal
VFS41(R)-D(Z)
VFS41(R)-E(Z)
SV
(Blanking plate) VVFS4000-10A ··············1 Note 1) With multi-connector, or with D-sub connector: 8 stations max.
• Non plug-in type: 6 stations Note 2) It is possible to mount the standard valve and the external pilot type valve together. SYJ
(Manifold base) VV5FS4-10-061-04 ········1
(2 position single) VFS4110-5D ···············5
(3 position exhaust center) VFS4410-5D ····1
Flow Rate Characteristics at the Number of Manifold Stations (Operated individually) SZ
(Individual EXH spacer) VVFS4000-R-04-2·····1 Model Passage/Stations Station 1 Station 5 Station 10
C [dm3/(s·bar)] 10.5 10.5 10.5 VF
1 4/2
b 0.20 0.20 0.20
(P A/B)
VV5FS4
Cv 2.5 2.5 2.5 VP4
C [dm3/(s·bar)] 11 11 11
4/2 5/3 VQ
b 0.20 0.20 0.20
(A/B R1/R2) 1/2
Cv 2.9 2.9 2.9
∗ Port size: Rc 1/2 VQ
4/5
VQC
1/2
VQC
4/5
VQZ
SQ
VFS
VFR
VQ7
969
VFS4000 Series
Manifold Option Parts Assembly Manifold Option

An individual SUP spacer set on manifold Needle valve set on the manifold block can Plug-in type/Non Plug-in type
or more.
Body type Plug-in type Non plug-in type Body type Plug-in type Non plug-in type
• Oil mist collection: Rate of collection
Part no. VVFS4000-P-03-1 VVFS4000-P-03-2 Part no. VVFS4000-20A-1 VVFS4000-20A-2 99.9% or more.
• Piping process reduced.
Double check spacer

Individual EXH spacer If the double check spacer with a built-in
An individual EXH spacer set on manifold double check valve is combined, it will
block can form EXH port for every valve. enable the cylinder to stop in the
intermediate stroke and maintain its position For details, refer to page 973.
(common EXH type)
for a long time without being affected by the
Body type Plug-in type Non plug-in type leakage between the spools.
Part no. VVFS4000-R-04-1 VVFS4000-R-04-2 With control unit
Part no. VVFS4000-22A-1 VVFS4000-22A-2 Plug-in type/Non Plug-in type
• Filter, regulation valve, pressure switch
and air release valve are all combined
to form one unit.
∗ SUP block plate
block plate in between stations subjected to Interface regulator
Plug-in different pressures. Interface regulator set on manifold block can
regulate the pressure to each valve. (Refer to
page 1011 for “Flow Rate Characteristics”.)
Part no. AXT634-10A
P port regulation ARBF4050-00-P-1 ARBF4050-00-P-2
∗ EXH block plate A port regulation ARBF4050-00-A-1 ARBF4050-00-A-2
When valve exhaust affects the other B port regulation ARBF4050-00-B-1 ARBF4050-00-B-2
stations on the circuit or when a reverse
pressure valve is used to a standard
manifold valve, insert EXH block plate in
Made to Order
between stations to separate valve exhaust. Manifold with serial transmission kit
Plug-in type
Body type Plug-in type Non plug-in type • Solenoid valve wiring process reduced
Part no. AXT634-11A considerably.
Blanking plate
maintenance reasons or planning to mount a
spare valve, etc.
EXH block plate SUP block plate
970


SV
U side
SYJ
SZ
VF
VP4
VQ
Light 1/2
Stations
VQ
4/5
D side
VQC
Bottom ported: 1/2
VV5FS4-01T- Station 2- Port size VQC
4/5
VQZ
Electrical entry SQ
VFS
Formula for manifold weight M = 0.565n + 0.923 (kg) n: Stations VFR
Non plug-in type: VV5FS4-10- Station 1- Port size VQ7

U side
Light
Stations
D side
Bottom ported: Cable

VV5FS4-10- Station 2- Port size
Formula for manifold weight M = 0.478n + 0.671 (kg) n: Stations

L
Stations
2 3 4 5 6 7 8 9 10
Formula
L1 156 199 242 285 328 371 414 457 500 L1 = 43 x n + 70
L2 168 211 254 297 340 383 426 469 512 L2 = 43 x n + 82
971
VFS4000 Series

U side Pilot valve manual override
Light
Stations
D side
Bottom ported:
VV5FS4-01CD
CU - Station 2- Port size Plug assembly VVFS2000-30A-


U side Pilot valve manual override
Light
Stations
D side
Bottom ported:
VV5FS4-01 FD
FU - Station 2- Port size

Formula for manifold weight M = 0.57n + 0.935 (kg)
n: Stations
L
Stations
2 3 4 5 6 7 8 Formula
L1 156 199 242 285 328 371 414 L1 = 43 x n + 70
L2 168 211 254 297 340 383 426 L2 = 43 x n + 82
972

environment. With terminal block
• Valve exhaust noise dampening: 35 DIN terminal
Wiring With multi-connector
dB or more. With D-sub connector Grommet terminal SV
mist: 99.9% or more.
Common SUP/Common EXH SYJ
• Piping work is reduced. 2(B), 4(A) port Side: 3/8, 1/2, Bottom: 3/8 (Option)
Rc
Stations
1(P), 3(R2), 5(R1) port P: 1/2, EXH: 1, 1 1/2
2 to 10 (1)
SZ
Applicable exhaust cleaners AMC610-10 (Connecting port size R 1), AMC810-14 (Connecting port size R 1 1/2) (2)
Note 1) With multi-connector, or with D-sub connector: 8 stations max.
VF
Note 2) Stations of 5 or more and high frequency of operation should be used with AMC810-14.
Exhaust cleaners AMC610-10 and AMC810-14 are not attached. VP4
VQ
1/2
Plug-in type Exhaust cleaner
(Option)
How to Order [Option] VQ
4/5
U side
VV5FS4 10 06 1 03 CD VQC
1/2
VQC
VFS4000 Series 4/5
CE-compliant
Manifold
Nil —
Q CE-compliant VQZ
D side Base type/Electrical entry
Non plug-in type Plug-in type Exhaust cleaner SQ
Exhaust cleaner 01T with terminal block Thread type mounting direction
(Option)
01C
Plug-in type Nil Rc
Symbol
Exhaust
Exhaust cleaner
VFS
with multi-connector N∗ NPT mounting direction
Plug-in type T∗ NPTF CD D side D side mounting VFR
01F with D-sub connector F∗ G CU U side U side mounting
10 Non plug-in type ∗ Semi-standard ∗ Please indicate exhaust
cleaner size or port size. VQ7
Connector mounting direction Port size
Symbol With connector Applicable base Symbol P A, B
Nil None 01T, 10 03 38
D D side mounting 1 2 12
01C, 01F 04
U U side mounting
M Mixed
Stations ∗ For bottom ported,
3 8 is only available.
02 2 stations
···
···
10 10 stations Symbol
Passage Porting
Base type 01T, 10: 2 to 10 stations Symbol specifications
Base type 01C, 01F: 2 to 8 stations P R1, R2 (A, B)
1 Side
Common Common
2 Bottom∗
∗ Semi-standard
Caution How to Order Manifold Assembly [Example]

When using an exhaust cleaner, mount it Add the valve and option part numbers in order starting from the first station
on the D side.
downwards.
<Example>
• Plug-in type with terminal block (6 stations)
(Manifold base) VV5FS4-01T-061-03-CD 1
∗ Refer to Best Pneumatics No. 7 for Exhaust (Manifold base) VV5FS4-10-061-04-CU 1
Cleaner details. (2 position single) ∗ VFS4110-5E 3
(2 position double) ∗ VFS4210-5E 2
The asterisk denotes the symbol for assembly.
Prefix it to the part numbers of the solenoid valve.
973 A
VFS4000 Series

CU
U side
D side
R1, 1 1 2
Stations D side
Manual
override
Exhaust cleaner
≈
(Option)
≈
U side
D side mounting

Electrical entry U side mounting
( ): AMC810

CU
Pilot valve
U side manual override D side
Manual
Stations override
D side
≈
Exhaust cleaner
(Option)
U side
≈
D side mounting
U side mounting
( ): AMC810 n: Stations
L
Stations
2 3 4 5 6 7 8 9 10
Formula
L1 156 199 242 285 328 371 414 457 500 L1 = 43 x n + 70
L2 168 211 254 297 340 383 426 469 512 L2 = 43 x n + 82
974

• Control unit (Filter, Regulator, Pres- Manifold Plug-in type: VV5FS4-01 Non plug-in type: VV5FS4-10
sure switch, Air release valve) are With terminal block
DIN terminal
all standardized to the one unit, Wiring With multi-connector
and can be mounted on the mani- With D-sub connector
Grommet terminal
SV
Applicable valve model VFS400-F VFS410-D, VFS410-E
fold base without any attachments.
• Piping processes are eliminated. Porting specifications
Common SUP, Common EXH SYJ
2(B), 4(A) port Side: 3/8, 1/2, Bottom: 3/8
Rc (PT)
1(P), 3(R2), 5(R1) port Side: 1/2
Stations 2 to 10 (1)
SZ
VF
Control Unit Specifications Control Unit/Option VP4
Air filter (With auto-drain/With manual drain) <Plug-in type>
Plug-in type Air release VVFS4000-24A-1R (D side mounting) VQ
Filtration degree 5 µm 1/2
valve (2)
Regulator spacer <Non plug-in type>
Set pressure (Outlet pressure) 0.05 to 0.85 MPa VVFS4000-24A-2R (D side mounting) VQ
Pressure switch (1)
Pressure
switch IS1000P-2-1 4/5
Set pressure range: OFF 0.1 to 0.6 MPa Filter regulator MP2-3 VQC
Blanking
Differential 0.08 MPa or less plate (3) Pressure switch MP3-2 1/2
Non plug-in type
Contact 1a Release valve VVFS4000-24A-10
Filter
VQC
Indicator light LED (RED) element 11104-5B 4/5
Max. switch capacity 2 VA AC, 2 W DC Note 1) Voltage: 24 VDC to 100 VAC
Caution Max. operating current
24 VAC/DC or less: 50 mA
48 VAC/DC: 40 mA
Inner voltage drop: 4 V
Note 2) Combination of a valve VFS41 (single)
VQZ
100 VAC/DC: 20 mA
When using an air filter with auto-drain or and a release valve spacer can be used
manual drain, mount the filter vertically. Air release valve (Single only)
Operating pressure range 0.1 to 1.0 MPa
as an air release valve.
Note 3) The non plug-in type cannot be mounted
SQ
afterwards.
VFS
How to Order [Option] VFR
VV5FS4 01C D 08 1 03 AP CE-compliant

Nil —
VQ7
Air release valve coil rating Q CE-compliant
VFS4000 Series
Manifold Nil None (F, G type only)
Base type/Electrical entry 1 100 VAC, 50/60 Hz
5 24 VDC
01T Plug-in type with terminal block
01C Plug-in type with multi-connector
01F Plug-in type with D-sub connector Control unit type
10 Non plug-in type Symbol
Nil A AP M MP F G C E
Control equipment
Connector mounting direction
Air filter with auto-drain
Symbol With connector Applicable base
Air filter with manual drain
Nil None 01T, 10
Regulator
D D side mounting
01C, 01F Air release valve
U U side mounting Pressure switch
Stations Blanking plate (Air release valve)
02 2 stations Blanking plate (Filter, Regulator)
Symbol Blanking plate (Pressure switch)
···
···
Passage Porting
10∗ 10 stations Symbol specifications Number of manifold blocks 2 2 2 2 2 2 2 1
P R1, R2 (A, B) required for mounting (stations)
∗ Base type 01T, 10:
2 to 10 stations 1 Side
Common Common
Bottom∗
Base type 01C, 01F:
2 to 8 stations
2
∗ Semi-standard
Port size station on the D side.
Symbol P, R1, R2 A, B <Example>
03 38 Thread type • Plug-in type with terminal block: In order to mount control unit,
1 2 Nil it requires 2 stations.
04 12 Rc
N∗ (Manifold base) VV5FS4-01T-081-03-AP5 1
M Mixed NPT
∗ For bottom ported, T∗ NPTF
3 8 is only available. F∗ G
• Non plug-in type: In order to mount control unit, it requires 2 stations.
∗ Semi-standard
(Manifold base) VV5FS4-10-061-03-A 1
(2 position single) ∗ VFS4110-5D 4
The asterisk denotes the symbol for assembly. Prefix it to the part
975 A
VFS4000 Series
Manifold with Control Unit — Plug-in type, Non plug-in type

Plug-in type: VV5FS4-01T- Station 1- Port size -AP Voltage for release valve
Pilot valve manual 2(B) Individual EXH spacer

override
(VVFS3000-R-03-12)
4(A) (VVFS4000-R-04-12)
Pilot valve Double check spacer
manual override (VVFS3000-22A-12)
R' (VVFS4000-22A-12)
U side 2(B)
4(A)

2(B) P'
(VVFS3000-P-03-12)
Pressure switch (VVFS4000-P-03-12)
4(A)
Air release valve
Air release valve

Stations
222 (180.5: -MP)
D side
Pressure switch
X
P
≈ P' Outlet for check
regulator
Air filter
(Po port)
5 1 3 Po P"
Pilot EXH port: PE (R1) (P) (R2) Control unit
≈
Electrical entry
Non plug-in type: VV5FS4-10- Station 1- Port size -AP Voltage for release valve
(VVFS3000-R-03-12)
Pilot valve 4(A) (VVFS4000-R-04-12)
manual override
Double check spacer
(VVFS3000-22A-12)
U side R' (VVFS4000-22A-12)
2(B)
4(A)
Pressure switch Individual EXH spacer

2(B) P'
Air release valve (VVFS3000-P-03-12)
4(A) (VVFS4000-P-03-12)
Stations
Air release valve
(180.5: -MP)
D side
Pressure switch
≈
X
P
P' Outlet for check
regulator
(Po port)
Air filter
≈
Pilot EXH port: PE 5 1 3 Po P"

n: Stations
(External pilot port) L
Stations
3 4 5 6 7 8 9 10 Formula
L1 199 242 285 328 371 414 457 500 L1 = 43 x n + 70
L2 211 254 297 340 383 426 469 512 L2 = 43 x n + 82
L3 (MP) 385.5 428.5 471.5 514.5 557.5 600.5 643.5 686.5 L3 = 43 x n + 256.5
L3 (AP) 427 470 513 556 599 642 685 728 L3 = 43 x n + 298
976
SV
SYJ
SZ
VF
VP4
VQ
1/2
VQ
4/5
VQC
1/2
VQC
4/5
VQZ
SQ
VFS
VFR
VQ7
977
VFS4000 Series
Made to Order
How to Order
VV5FS4 01S U V 08 1 03 X199

Thread type
Plug-in type
Nil Rc
Serial transmission kit
N NPT
T NPTF
SI unit mounting position F G
D D side mounting Stations
02 2 stations Port size
U U side mounting
10 10 stations 03 3/8
Note 1) Max. 10 stations. Add 1 station for serial unit mounting. 04 1/2 1/2
Note 2) Max. 10 Stations: For single and double mixed wiring. (No. of M Mixed
valves: 9)
∗ For bottom ported: 3/8 only
Max. 9 stations: For standard double wiring (No. of valves: 8)
Combination symbol
SI unit can be mounted on Piping
Port specification
either U or D side. Symbol specification
Applicable models P A, B R1, R2
SI unit part no. 1 Side
Common Common
Symbol
For U side mouning For D side mouning
Description 2∗ Bottom
0 — — Without SI unit ∗ Semi-standard
H EX123U-SUH1 EX123D-SUH1 NKE Corporation: Fieldbus H System (16 outputs)
Refer to Best Pneumatics No. 1-1
Q EX124U-SDN1 EX124D-SDN1 DevieNet (2 power supply systems)
R1 EX124U-SCS1 EX124D-SCS1 OMRON Corporation: CompoBus/S (16 outputs) (2 power supply systems) and the Operation Manual for the
R2 EX124U-SCS2 EX124D-SCS2 OMRON Corporation: CompoBus/S (8 outputs) (2 power supply systems) details of EX123/124 Integrated-
V EX124U-SMJ1 EX124D-SMJ1 CC-Link (2 power supply systems) type (For Output) Serial Transmis-
sion System. Please download the
Operation Manual via our website,
http://www.smcworld.com

1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 10
SI unit output no.
SI unit output no.

Double
Double
Double
Double
Double
Double
Double
Single
Single
Single
Single
Single
Single
Single
Single
Single
Single
SI unit
SI unit
01 23 45 67 8 9 10 11 12 13 14 15 01 23 4 5 6 78 9 10 11 11
How to Order Valves
VFS4 00 5F
Nil None
Nil Internal pilot
R External pilot
Coil rated voltage
Nil None
24 VDC
B 978
Serial Transmission Kit Manifold (EX123/124): Plug-in Type

VV5FS4-01S Mounting position Model - Stations Symbol - Port size Thread -X199
2 x Rc 1/8 SV
2 x G 1 1/4 (Pilot EXH port: PE) SI unit
(Electrical entry)
L2 SYJ
38 6 L1
18 43 91.5 SZ
VF
VP4
SMC SMC SMC
SMC SMC
105
95.5
VQ
86
A A A A A
1/2
166
EA
PE
155.5
5.5
47
205.5
202.5
VQ
196.5
28
24
187
4/5
X
P
24
VQC
45
55
9
EB
B B B B B 1/2
VQC
23
4/5
SMC SMC SMC SMC
42
63.5 VQZ
6 x Rc 1/2
D side Stations 1 2 3 4 5 6 7 n U side
SQ
1(P), 5(R3), 3(R1)
Manual override VFS
VFR
SMC
VQ7
150.5
141.00
115.5
A A A A A A A
91.5
74.00
58
18
14
B B B B B B B
3 3
3
2n x Rc 3/8, 1/2 30
62.5 43 4(A), 2(B) port
EX123: 2 x G 1/2
EX124: 4 x G 1/2
∗ Use a dripproof plug assembly
(AXT100-B04A) for the unused conduit Electrical entry
port (G 1/2).
Formula L1 = 43n + 70 L2 = 43n + 82

L n 2 3 4 5 6 7 8 9 10
L1 156 199 242 285 328 371 414 457 500
L2 168 211 254 297 340 383 426 469 512
979
VFS4000 Series

Individual
SUP
spacer
169
Double check
spacer


Individual Interface
EXH regulator
spacer
SUP block plate: AXT634-10A Interface regulator/A port regulation:

EXH block plate: AXT634-11A ARBF4050-00-A-1 (Plug-in type)
Interface
regulator
Block plate mounting

position
( ): EXH block plate

Throttle Interface
valve regulator
spacer
980
Manifold Base Construction — Plug-in type, Non Plug-in type
End plate (D side)
SV
SYJ
SZ
VF
VP4
VQ
1/2
VQ
4/5
VQC
1/2
VQC
4/5
VQZ
Manifold block SQ
VFS
VFR
VQ7
End plate (U side)
Replacement Parts
1 Connection fitting A Steel plate VVF4000-5-1A
Steel plate
• For increasing the manifold bases, please order the manifold
2 Connection fitting B VVF4000-5-2
block assembly number of the principal part assembly !0.
3 Gasket NBR VVF4000-7 (End plate)
For plug-in type: The manifold base with terminal stand
4 Gasket NBR VVF4000-7-1 (Manifold block)
5
(integrated with a junction cover) is required with the o junction
Gasket NBR VVF4000-8
6
cover assembly.
O-ring NBR KA00407 (GT code)
8 Terminal assembly — VVF4000-6A
For 01T VVF4000-4A- Stations
For 01S AZ738-30A- Stations D
U
13 Rubber plug NBR AXT336-9
∗ D : For mounting the D side of the SI unit, U : For mounting the U side of the SI unit
Replacement Parts: Sub Assembly Note) Manifold Base/Construction: Plug-in type with terminal block.
No. Description Assembly part no. Component parts Applicable manifold base
Manifold block !0, Terminal i, Metal joint q, w,
Manifold block VVF4000-1A-1- 03
04 Plug-in type
10 Gasket r, Receptacle assembly
assembly
VVF4000-1A-2-03
04 Manifold block !0, Metal joint q, w, Gasket r Non plug-in type
End plate (U side) VVF4000-2A-1 End plate (U) !1, Metal joint q, w Plug-in type
11
assembly VVF4000-2A-2 End plate (U) !1, Metal joint q, w Non plug-in type
End plate (D) !2, Metal joint q, w, Gasket e, t,
VVF4000-3A-1 Plug-in type
End plate (D side) O-ring y, u
12
assembly End plate (D) !2, Metal joint q, w, Gasket e, t,
VVF4000-3A-2 Non plug-in type
O-ring t, y
981
VFS5000 Series
[Option]
Model
Port Max. (2) (3)

Type of 1 4/2 (P A/B) 4/2 5/3 (A/B R1/R2) operating Response Weight
actuation Plug-in Non plug-in size cycle time (kg)
C C (ms)
Rc [dm3/(s·bar)] b Cv [dm3/(s·bar)] b Cv (cpm)
38 15 0.30 3.7 15 0.30 4.1
Single VFS5100 VFS5110 12 16 0.15 3.7 19 0.15 4.5 600 45 or less 0.88
2 position
34 17 0.15 3.9 20 0.13 4.7

38 15 0.30 3.7 15 0.30 4.1
Double VFS5200 VFS5210 12 16 0.15 3.7 19 0.15 4.5 600 25 or less 1.06
34 17 0.15 3.9 20 0.13 4.7
38 14 0.25 4.0 14 0.24 4.1
Closed
VFS5300 VFS5310 12 16 0.25 4.1 16 0.24 4.1 300 55 or less 1.16
center
34 16 0.25 4.1 16 0.23 4.1
38 14 0.32 3.8 14 0.25 3.5
Exhaust
VFS5400 VFS5410 12 16 0.17 3.8 16 0.18 4.1 300 55 or less 1.14
3 position
center
34 17 0.20 4.2 17 0.13 4.1
38 14 0.30 3.7 14 0.31 3.8
Pressure
center
VFS5500 VFS5510 12 16 0.23 3.9 16 0.22 4.1 300 55 or less 1.14
34 18 0.25 4.6 17 0.22 4.3
38 9.0 — — 9.0 — —
Double VFS5600 VFS5610 12 9.0 — 60 or less 1.99
— 9.0 — — 180
check 34 9.0 — — 9.0 — —
Note 1) Based on JIS B 8419: 2010 (once per 30 days) for the minimum operating frequency. Note 3) The figures in the above list are without sub-plate. In the
Note 2) Based on JIS B 8419-2010. (The value at supply pressure 0.5 MPa, ambient/fluid case of with plug-in sub-plate and, with non plug-in sub-plate
temperature (≈ 20°C)) add Rc 3/8, 1/2—0.744 kg, Rc 3/4—0.966 kg and Rc 3/8,
However, this excludes when in an adhered state. (Be aware that after long 1/2—0.577 kg, Rc 3/4—0.823 kg respectively.
Note 4) “Note 1) ” and “Note 2) ” are with controlled clean air.
periods of holding time, there may be delays in the initial response time.)
Compact yet provides a large flow capacity Standard Specifications

3/4: C: 20 dm3/(s·bar) Fluid Air
Low power consumption: 1.8 W DC Minimum operating pressure 0.1 MPa

Easy maintenance Proof pressure 1.5 MPa
2 types of sub-plates: Ambient and fluid temperature –10 to 60°C (1)
Plug-in and non plug-in Lubrication Non-lube (2)
Plug-in type Impact/Vibration resistance 150/50 m/s2 (3)
Enclosure
(Equivalent to IP52), Type D: Splashproof (Equivalent to IP54) (4) (6)

Non plug-in type
Electrical entry
Symbol Non plug-in type Grommet terminal, DIN terminal
2 position 3 position Note 1) Use dry air at low temperatures. Note 2) Use turbine oil Class 1 (ISO VG32), if lubricated.
Single Closed center Note 3) Impact resistance: No malfunction occurred when it is tested with a drop tester in the axial direction
(A)4 2(B) (A)4 2(B) and at the right angles to the main valve and armature in both energized and
de-energized states every once for each condition. (Values at the initial period)
513 513 performed at both energized and de-energized states in the axial direction and at
(R1) (P) (R2) (R1)(P)(R2) the right angles to the main valve and armature. (Values at the initial period)
Double Exhaust center Note 4) Based on JIS C 0920. Note 5) Based on JIS C 4003.
(A)4 2(B) (A)4 2(B) Note 6) The F type enclosure described above shows that without the light/surge voltage suppressor. The F
type enclosure with the light/surge voltage suppressor is equivalent to IP50.
513
(R1)(P)(R2)
5 13
(R1)(P)(R2)
Pressure center Pilot type External pilot Note)
(A)4 2(B) Manual Main valve Direct manual override
override Pilot valve Non-locking push type (Extended), Locking type (Tool required), Locking type (Lever)
513 110 to 120, 220, 240 VAC (50/60 Hz)
(R1)(P)(R2) Coil rated voltage
Double check 12, 100 VDC
(A)4 2(B) Porting specifications Bottom ported
Option With light/surge voltage suppressor, Non-rotating DIN terminal
513 Note) Operating pressure: 0 to 1.0 MPa
(R1)(P) (R2) Pilot pressure: 0.1 to 1.0 MPa
A 982
Port size
Porting Nil Without sub-plate
Body type Electrical entry specifications
03 38
O: Plug-in type F: Plug-in type Nil Side ported
04 12
sub-plate conduit terminal B∗ Bottom ported
06 34
∗ In the case of external
pilot (Semi-standard),
SV
bottom piping is not
Thread type
available. Nil Rc CE-compliant SYJ
N∗ NPT
Nil —
T∗
F∗
NPTF
G
Q CE-compliant SZ
∗ Semi-standard
VF
VQ
Non plug-in VFS5 1 1 0 5 D 06 1/2
VQ
Pilot valve 4/5
Option Manual override
Nil None Nil: Non-locking push type VQC
Z With light/surge voltage suppressor (Flush) 1/2
P∗ Non-rotating DIN terminal VQC
ZP∗
Light/Surge Voltage Suppressor 4/5
Non-rotating DIN terminal
∗ Type “P”, “ZP” is available for DIN type only. VQZ
Symbol Electrical entry A∗: Non-locking push type
2 position single 3 position pressure center (Extended)
SQ
E: Grommet terminal D: DIN terminal
(A)4 2(B) (A)4 2(B) DO: DIN terminal
1 5
without connector VFS
513
(R1)(P) (R2)
513
(R1)(P)(R2) VFR
(A)4 2(B) (A)4 2(B) B∗: Locking type
(Tool required)
VQ7
2 6
513 513
(R1)(P)(R2) (R1)(P)(R2)
3 position closed center Coil rated voltage
(A)4 2(B) 1 100 VAC, 50/60 Hz
3 2 200 VAC, 50/60 Hz
C∗: Locking type
3∗ 110 to 120 VAC, 50/60 Hz (Lever)
513 4∗ 220 VAC, 50/60 Hz
(R1)(P)(R2)
5 24 VDC
3 position exhaust center ∗
6 12 VDC
(A)4 2(B)
7 ∗ 240 VAC, 50/60 Hz
4 ∗ Semi-standard
5 13 For other rated voltages, please consult with SMC.
(R1)(P)(R2) ∗ Semi-standard
Body type Pilot type
1: Non plug-in type Nil Internal pilot
sub-plate R∗ External pilot
∗ Semi-standard
SF4 1 F 30
Nil
Body option 2 200 VAC, 50/60 Hz (Flush)
0 Standard 3∗ 110 to 120 VAC, 50/60 Hz A∗
Non-locking push type
1∗ Direct manual override 4∗ 220 VAC, 50/60 Hz (Extended)
5 24 VDC Locking type
∗ Semi-standard B∗ (Tool required)
6∗ 12 VDC
7∗ 240 VAC, 50/60 Hz C∗
Locking type
(Lever)
∗ Semi-standard
For other rated voltages, ∗ Semi-standard
please consult with SMC.
∗∗ Refer to page 1010
for voltage conversion.
983 A
VFS5000 Series

Sizing Program.
Bore size
CS1/CS2 series
Average Pressure 0.5 MPa
Series speed Load factor 50%
(mm/s) Stroke 300 mm
ø125 ø140 ø160 ø180 ø200 ø250 ø300
800 Perpendicular,
600 Horizontal
500 actuation
VFS5100-06 400
300
200
100
0
∗ It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected
∗ The average velocity of the cylinder is what the stroke is divided by the total stroke time.
Conditions
CS1 series
Tube bore x Length SGP20A x 1 m
VFS5100-06 Speed controller AS500-06
Silencer AN500-06
Specifications Check Valve Operation

Can hold an intermediate cylinder Double check Plug-in type Non plug-in type
position for an extended time spacer part no. VVFS5000-22A-1 VVFS5000-22A-2
If the double check spacer with a built-in Applicable
VFS5400-F
VFS5410-D Cylinder side pressure Check valve
double check valve is combined, it will valve model VFS5410-E (P2)
enable the cylinder to stop in the
position for a long time without being Caution
affected by the leakage between the • In the case of 3 position double check
spools. valve (VFS560), check the leakage SUP side pressure (P1)
Piston
and cylinder by means of synthetic

Double check spacer
stopping at intermediate position.
Plug-in type restricted excessively, the intermediate
stopping accuracy will decrease and will • The combination of VFS5101 0, VFS52 01 0
lead to improper intermediate stops. and a double check spacer can be used
as prevention of falling at the stroke end
but cannot hold the intermediate
position of the cylinder.
Non plug-in type
984
Construction
(A)4 2(B) (A)4 2(B)
2 position single 2 position double
513 513
(R1)(P)(R2) (R1)(P)(R2)
SV
SYJ
SZ
VF
VP4
VQ
1/2
VQ
4/5
VQC
1/2
VQC
4/5
3 position closed center/exhaust center/pressure center
VQZ
Closed center
(A)4 2(B) SQ
513 VFS
(R1)(P)(R2)
Exhaust center VFR
(A)4 2(B)
VQ7
5 13
(R1)(P)(R2)
Pressure center
(A)4 2(B)
513
(R1)(P)(R2)

No. Description Material Note Plug-in VFS5000-P- 04
06
03
(N, T, F)
1 Body Aluminum die-casted — Non plug-in VFS5000-S- 04
03
06 (N, T, F)
4 Adapter plate Resin — Sub-plate Assembly
5 End plate Resin — (For External Pilot) Part No.
6 Piston Resin — 03
Plug-in VFS5000-P-R 04 (N, T, F)
7 Junction cover Resin — 06
03
8 Light cover Resin — VFS5000-S-R 04

06 (N, T, F)

10 Gasket NBR — Part no. for mounting
bolt and gasket Note
11 Hexagon socket head screw Steel —
Plate gasket type
13 Pilot valve assembly — — BG-VFS5000 (Earlier than August,
∗ Refer to “How to Order Pilot Valve Assembly” on page 983. 2012) Note)
Groove gasket type

BG-VFS5000-1 (After September
2012) Note)
985 A
VFS5000 Series

Bottom ported
2 x ø7
mounting hole
3(R2), 5(R1): Rc 1/2
Pilot valve
manual override With light/surge
voltage suppressor
Direct manual override
2(B), 4(A) port

Rc 1/8 external pilot
(Port size: Rc 3/8, 1/2)

Rc 1/8 external pilot
(Pilot EXH port) (Port size: Rc 3/4)
( ): Rc 3 4

3 position closed center: VFS5300-F(Z)
3 position pressure center: VFS5500-F(Z)
2 x ø7 mounting
hole
219.3 (218) 3 position 227.3 (226)
2 x ø7 mounting
hole
With light/surge
voltage suppressor
Pilot valve
manual override
With light/surge
voltage suppressor Direct manual
override
Pilot valve
manual override
G 1/2 G 1/2
electrical entry electrical entry
( ): Rc 3 4 ( ): Rc 3 4
986
Rc 3/4: 3(R2), Rc 1/2: 5(R1)
SV
SYJ
SZ
G 1 2
VF
ø8 to ø10
VP4
Pilot valve VQ
manual override 1/2
VQ
2(B), 4(A) port

Rc 1/8
external pilot 4/5
(Port size Rc 3/8, 1/2)
VQC
1/2
VQC
Direct manual override 4/5
2 x Rc 1/8 Rc 1/8 external pilot

VQZ
(Pilot EXH port) (Port size: Rc 3/4)
( ): Rc 3/4 SQ
DIN Connector/Gasket Part No. VFS
Description Part no.
Connector UKL-S1 VFR
Gasket DXT087-27-2
VQ7
2 position double: VFS5210-E(Z), VFS5210-D(Z) 3 position double check: VFS5610-E(Z), VFS5610-D(Z)
3 position exhaust center: VFS5410-E(Z), VFS5410-D(Z)
2 x ø7 mounting
3 position pressure center: VFS5510-E(Z), VFS5510-D(Z) hole
101.5 (3 position: 109.5)

2 x ø7 mounting
hole

ø8 to ø10
Pilot valve
Applicable cabtire cable O.D. manual
ø8 to ø10 override
Pilot valve
manual
override
Direct manual
override
Direct manual
override
( ): Rc 3/4 ( ): Rc 3/4
987
VFS5000 Series
[Option]

corresponding lead wires from VFS5000 Series Stations Nil —
power source can be wired at the Manifold 02 2 stations Q CE-compliant
bottom of terminal
Plug-in type
···
Thread type
···
block.
with terminal block 10 10 stations Port size Nil Rc
Symbol P, R1, R2 A, B N∗ NPT
Symbol 04 12 T∗ NPTF
Symbol
Passage Porting
specifications 06 34 34 F∗ G
P R1, R2 (A, B) M Mixed ∗ Semi-standard
1 Side
Common Common ∗ Semi- ∗ For bottom ported,
2 Bottom∗ standard

• Quick wiring permits easier CE-compliant
installation. VFS5000 Series Stations
02 2 stations Nil —
U side
···
···
Plug-in type 08∗ 8 stations Port size

with multi-connector Symbol P, R1, R2 A, B Thread type
∗ Max. 8 stations
Connector 04 12 Nil Rc
D side mounting Symbol 06 34 34 N∗ NPT
direction Porting M Mixed T∗ NPTF
Plug assembly Passage
(Option) D D side mounting Symbol specifications
P R1, R2 (A, B)
Refer to page U U side mounting 1 2 is only available. ∗ Semi-standard
1 Side
1013. Common Common
Multi-connector 2 Bottom∗ ∗ Semi-standard

(MIL Spec. D-sub connector terminal VV5FS5 01F D 06 1 04
25 pcs attached.) CE-compliant
• Quick wiring permits easier VFS5000 Series Stations
Nil —
installation. Manifold 02 2 stations
Q CE-compliant
···
···
U side Plug-in type Port size

08∗ 8 stations
with D-sub connector Symbol P, R1, R2 A, B Thread type
∗ Max. 8 stations
Connector 04 12 Nil Rc
mounting 06 34 34 N∗ NPT
D side Symbol
direction Porting M Mixed T∗ NPTF
Passage
Plug assembly D D side mounting Symbol specifications ∗ For bottom ported, F∗ G
(Option) P R1, R2 (A, B)
U U side mounting 1 2 is only available. ∗ Semi-standard
Refer to page 1 Side
1013. Common Common
D-sub connector

VV5FS5 10 05 2 04
DIN terminal
CE-compliant
VFS5000 Series Stations Nil —
Grommet terminal Manifold 02 2 stations Q CE-compliant
Port size
···
Non plug-in
···
Thread type
type 10 10 stations Symbol P, R1, R2 A, B Nil Rc
04 12
N∗ NPT
Symbol 06 34 34
T∗ NPTF
Passage Porting M
Mixed F∗ G
P R1, R2 (A, B) ∗ For bottom ported, ∗ Semi-standard
1 Side 1 2 is only available.
Common Common
A 988
How to Order Manifold Assembly Base model Wiring
Porting
specifications Port size Rc
Stations
External Applicable(2)
A, B port P, EA, EB A, B pilot valve model
Please indicate manifold base type,
corresponding valve, and option parts. • With terminal block
Plug-in type
• With multi-connector VFS50(R)-F(Z)
<Example> VV5FS5-01 Side/ (1) (2)
• With D-sub connector 34 1 2, 3 4 2 to 10 Yes
• Plug-in type with terminal block: 6 stations Bottom
Non plug-in type • DIN terminal VFS51(R)-D(Z)
(Manifold base) VV5FS5-01T-061-04 ······1
VV5FS5-10 • Grommet terminal VFS51(R)-(E)
(2 position single) VFS5100-5FZ ··········· 3
(2 position double) VFS5200-5FZ ·········· 2 Note 1) With multi-connector, or with D-sub connector: 8 stations max.
(Blanking plate) VVFS5000-10A ·············1 Note 2) It is possible to mount the standard valve and the external pilot type valve together.
• Non plug-in type: 6 stations SV

(Manifold base) VV5FS5-10-061-04 ········1 Flow Rate Characteristics at the Number of Manifold Stations (Operated individually)
(2 position single) VFS5110-5D ·············5
Model Passage/Stations Station 1 Station 5 Station 10
SYJ
(3 position exhaust center) VFS5410-5D ········1
C [dm3/(s·bar)] 15.0 15.0 15.0
(Individual EXH center) VVFS5000-R-04-2 ····1 1
(P
4/2
A/B)
b 0.20 0.20 0.20 SZ
Cv 4.0 4.0 4.0
VV5FS5
4/2 5/3
3
C [dm /(s·bar)] 16.0 16.0 16.0 VF
b 0.20 0.20 0.20
(A/B R1/R2)
Cv 4.2 4.2 4.2
VP4
∗ Port size: Rc 1/2, 3/4
VQ
1/2
Manifold Option Parts Assembly Manifold Option VQ
4/5
Plug-in type/Non plug-in type VQC
An individual SUP spacer set on manifold Needle valve set on the manifold block can 1/2
Body type Plug-in type Non plug-in type Body type Plug-in type Non plug-in type or more. VQC
• Oil mist collection: Rate of collection 4/5
Part no. VVFS5000-P-04-1 VVFS5000-P-04-2 Part no. VVFS5000-20A-1 VVFS5000-20A-2
99.9% or more.
• Piping process reduced. VQZ
SQ
Double check spacer

VFS
Individual EXH spacer If the double check spacer with a built-in
An individual EXH spacer set on manifold double check valve is combined, it will VFR
block can form EXH port for every valve. enable the cylinder to stop in the
(common EXH type) intermediate stroke and maintain its position VQ7
Body type Plug-in type Non plug-in type for a long time without being affected by the
Part no. VVFS5000-R-04-1 VVFS5000-R-04-2
leakage between the spools. For details, refer to page 992.
Part no. VVFS5000-22A-1 VVFS5000-22A-2
Made to Order
Manifold with serial transmission kit
Plug-in type
• Solenoid valve wiring process reduced
considerably.
SUP block plate For details, refer to page 994.
Interface regulator
block plate in between stations subjected to Interface regulator set on manifold block can
different pressures. regulate the pressure to each valve. (In the
event of using, refer to “Flow Rate
Body type Plug-in type Non plug-in type Characteristics” on page 1011).
Part no. AXT628-12A
P port regulation ARBF5050-00-P-1 ARBF5050-00-P-2
EXH block plate
A port regulation ARBF5050-00-A-1 ARBF5050-00-A-2
When valve exhaust affects the other B port regulation ARBF5050-00-B-1 ARBF5050-00-B-2
stations on the circuit or when a reverse
pressure valve is used on a standard
manifold valve, insert EXH block plate in
between stations to separate valve exhaust.
Part no. AXT512-14-1A
Blanking plate
EXH block plate SUP block plate maintenance reasons or planning to mount a
spare valve, etc.
989
VFS5000 Series

U side
Pilot valve
manual override
P = 51
Pitch
Stations
D side
Bottom ported: (External pilot)
VV5FS5-01T- Station 2- Port size

(Pilot EXH)
Electrical entry
( ): 2(B)/4(A) port Rc 3 4
Non plug-in type: VV5FS5-10- Station 1- Port size

U side
Pilot valve
manual override
P = 51
Pitch
Stations
D side
DIN terminal
VV5FS5-10- Station Applicable cabtire
cable O.D. (External pilot)
2- Port size ø8 to ø10 (External pilot)
(Pilot EXH)
(Pilot EXH)

L
Stations
2 3 4 5 6 7 8 9 10 Formula
L1 194 245 296 347 398 449 500 551 602 L1 = 51 x n + 92
L2 212 263 314 365 416 467 518 569 620 L2 = 51 x n + 110 ( ): 2(B)/4(A) port Rc 3 4
990

Direct manual override U side

SV
Pilot valve
manual override
SYJ
SZ
VF
VP4
P = 51
Pitch
VQ
1/2
Stations
VQ
4/5
VQC
D side 1/2
Plug assembly VVFS2000-30A-
(Option: Refer to page 1013.) VQC
Bottom ported: 4/5
VV5FS5-01CD
CU - Station 2- Port size (External pilot)
(Pilot EXH) VQZ
SQ

VFS
∗ Refer to page 1013. For wiring specifications.
( ): 2(B)/4(A) port Rc 3 4 VFR
VQ7
Pilot valve manual override U side

P = 51
Pitch
Stations
D side
Bottom ported: (External pilot)
VV5FS5-01 FD
FU - Station 2- Port size (Pilot EXH)

∗ Refer to page 1013. For wiring specifications.
L
Stations
2 3 4 5 6 7 8 Formula
L1 194 245 296 347 398 449 500 L1 = 51 x n + 92
L2 212 263 314 365 416 467 518 L2 = 51 x n + 110 ( ): 2(B)/4(A) port Rc 3 4
991
VFS5000 Series

environment. With terminal blocks DIN terminal
• Valve exhaust noise dampening: 35 Wiring With multi-connector
Grommet terminal
dB or more. With D-sub connector
mist: 99.9% or more. Common SUP/Common EXH
Porting specifications 2(B), 4(A) port
• Piping work is reduced. Side: 1/2, 3/4, Bottom: 1/2 (Option)
Rc
1(P), 3(R2), 5(R1) P: 3/4, EXH: 1 1/2
Stations 2 to 10 (1)
Applicable exhaust cleaners AMC810-14 (Connecting port size R 1 1/2) (2)
Note 2) Exhaust cleaner: Not attached.
Plug-in type
VV5FS5 10 06 1 04 CD
Exhaust cleaner
(Option)
U side
VFS5000 Series
CE-compliant
Manifold
Nil —
Base type/Electrical Q CE-compliant
entry
01T with terminal block mounting direction
D side 01C Symbol
with multi-connector mounting direction
Non plug-in type
Exhaust cleaner CD D side D side mounting
Plug-in type
(Option) 01F with D-sub connector
CU U side U side mounting
10 Non plug-in type
Thread type
Connector mounting direction Nil Rc
Symbol With connector Applicable base N∗ NPT
Nil None 01T, 10 T∗ NPTF
D D side mounting F∗ G
01C, 01F ∗ Semi-standard
U U side mounting
Stations Port size

02 2 stations Symbol P A, B
04 12
···
···
06 34 34
10 10 stations
M Mixed
Base type 01T, 10: 2 to 10 stations
Base type 01C, 01F: 2 to 8 stations ∗ For bottom ported,
Symbol
Passage Porting
P R1, R2 (A, B)
1 Side
Common Common
2 Bottom∗
∗ Semi-standard

Add the valve and option part numbers in order starting from the first station
on the D side.
<Example>
Caution • Plug-in type with terminal block (6 stations)
When using an exhaust cleaner, mount it (Manifold base) VV5FS5-01T-061-04-CD 1
downwards. (2 position single) ∗ VFS5100-5FZ 3
(Manifold base) VV5FS5-10-061-04-CU 1
(2 position single) ∗ VFS5110-5E 3
(2 position double) ∗ VFS5210-5E 2
∗ Refer to Best Pneumatics No. 7 for Exhaust (Exhaust cleaner) AMC810-14 1
Cleaner details.
A 992 the solenoid valve.

CU
U side
Direct manual
override SV
Pilot valve
manual override SYJ
D side
SZ
VF
VP4
Stations
VQ
1/2
D side
VQ
4/5
Exhaust cleaner
VQC
≈
(Option)
1/2
VQC
D side mounting 4/5
U side
VQZ
Electrical entry
U side mounting SQ
VFS
( ): 2(B)/4(A) port Rc 3/4 VFR

CU
VQ7
Direct manual U side

override
Pilot valve
manual override
D side
Stations
D side
≈
≈
Exhaust cleaner
U side
(Option)
D side mounting
U side mounting
n: Stations
L
Stations
2 3 4 5 6 7 8 9 10 Formula
( ): 2(B)/4(A) port Rc 3/4
L1 194 245 296 347 398 449 500 551 602 L1 = 51 x n + 92
L2 212 263 314 365 416 467 518 569 620 L2 = 51 x n + 110
993
VFS5000 Series
Made to Order
How to Order
VV5FS5 01S U V 08 1 04 X199

Thread type
Plug-in type
Nil Rc
Serial transmission kit
N NPT
T NPTF
SI unit mounting position F G
D D side mounting
Stations
02 2 stations Port size
U U side mounting
10 10 stations 04 1/2
Note 1) Max. 10 stations. Add 1 station for serial unit mounting. 06 3/4 3/4
Note 2) Max. 10 Stations: For single and double mixed wiring. (No. of M Mixed
valves: 9) ∗ For bottom ported: 1/2 only
Max. 9 stations: For standard double wiring (No. of valves: 8)
Combination symbol
SI unit can be mounted on Piping
Port specification
either U or D side. Symbol specification
Applicable models P R1, R2
A, B
SI unit part no. 1 Side
Common Common
Symbol
For U side mouning For D side mouning
Description 2∗ Bottom
0 — — Without SI unit ∗ Semi-standard
H EX123U-SUH1 EX123D-SUH1 NKE Corporation: Fieldbus H System (16 outputs)
Q EX124U-SDN1 EX124D-SDN1 DevieNet (2 power supply systems) Refer to Best Pneumatics No. 1-1
R1 EX124U-SCS1 EX124D-SCS1 OMRON Corporation: CompoBus/S (16 outputs) (2 power supply systems) and the Operation Manual for the
R2 EX124U-SCS2 EX124D-SCS2 OMRON Corporation: CompoBus/S (8 outputs) (2 power supply systems) details of EX123/124 Integrated-
V EX124U-SMJ1 EX124D-SMJ1 CC-Link (2 power supply systems) type (For Output) Serial Transmis-
sion System. Please download the
Operation Manual via our website,
http://www.smcworld.com

1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 10
SI unit output no.
SI unit output no.

Double
Double
Double
Double
Double
Double
Double
Single
Single
Single
Single
Single
Single
Single
Single
Single
Single
SI unit
SI unit
01 23 45 67 8 9 10 11 12 13 14 15 01 23 4 5 6 78 9 10 11 11
How to Order Valves
VFS5 00 5F
Nil None
Nil Internal pilot
R External pilot
Coil rated voltage
Nil None
24 VDC
B 994
Serial Transmission Kit Manifold: EX123/124 Integrated Type (For Output) Serial Transmission System
VV5FS5-01S Mounting position Model - Stations Symbol - Port size Thread -X199
4 x Rc 1/8
SI unit
L2 SV
2 x G 1 1/4 L1
Electrical entry 2 x Rc 1/8 SYJ
SZ
PE
VF
103.5
EA
103
A A A
61
60
VP4
174.5
37
244
200
240
223
207
SMC
P
VQ
37
43
1/2
60
72
111.5
B B B
VQ
PE
EB
31
4/5
11
.5
VQC
R5
50
1/2
67
81 VQC
D side Stations 1 2 3 4 5 6 7 n U side 4/5
6 x Rc 3/4
VQZ
Manual override
1(P), 5(R1), 3(R2) port
SQ
SMC VFS
24(23)
VFR
179
167
B B B B B B B
132
VQ7
70(71.5)
91
20
A A A A A A A
3(1) 3(1) 48.5

2n x Rc 1/2, 3/4
80.5 51 4(A), 2(B) port
EX123: 2 x G 1/2
EX124: 4 x G 1/2
Electrical entry
∗ Use a dripproof plug assembly ( ): 2(B)/4(B) port Rc 3/4
(AXT100-B04A) for the unused conduit
port (G 1/2).
Formula L1 = 51n + 92 L2 = 51n + 110

L n 2 3 4 5 6 7 8 9 10
L1 194 245 296 347 398 449 500 551 602
L2 212 263 314 365 416 467 518 569 620
995
VFS5000 Series

Individual
SUP
spacer
Double check
spacer

Interface
Individual regulator
EXH
spacer
SUP block plate: AXT628-12A Interface regulator/A port regulation:

EXH block plate: AXT512-14-1A ARBF5050-00-A-1 (Plug-in type)
Interface
regulator
Block plate
mounting position
( ) : SUP block plate

Interface
regulator
Throttle valve
spacer
996
SV
SYJ
End plate (D side)
SZ
VF
VP4
VQ
1/2
VQ
4/5
VQC
1/2
VQC
4/5
Manifold
block VQZ
SQ
VFS
VFR
End plate (U side) VQ7
Replacement Parts
1 Connection fitting A Steel plate AXT628-6-1A
2 Connection fitting B Steel plate AXT628-6-2 • For increasing the manifold bases, please order the manifold
3 O-ring NBR KA00078 (GT code) block assembly number of the principal part assembly !0.
4 O-ring NBR KA00495 (GT code) For plug-in type: The manifold base with terminal stand
(integrated with a junction cover) is required with the o junction
cover assembly.
8 Terminal assembly — AXT628-5-1A
For 01T VVFS5000-4A- Stations
For 01S AZ738-31A- Stations D
U
13 Rubber plug NBR AXT336-9
∗ D : For mounting the D side of the SI unit, U : For mounting the U side of the SI unit
Replacement Parts: Sub Assembly Note) Manifold Base/Construction: Plug-in type with terminal block.
No. Description Assembly part no. Component parts Applicable manifold base
Manifold block !0, Metal joint q, w,
VVFS5000-1A-1- 04
06 Plug-in type
10 Manifold block assembly Terminal i, O-ring e, r, t, y, u, Receptacle assembly
VVFS5000-1A-2- 04
06 Manifold block !0, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type
VVFS5000-2A-1 End plate (U) !1, Metal joint q, w Plug-in type
11 End plate (U side) assembly
VVFS5000-2A-2 End plate (U) !1, Metal joint q, w Non plug-in type
VVFS5000-3A-1 End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u Plug-in type
12 End plate (D side) assembly
VVFS5000-3A-2 End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type
997

Model
Model Flow rate characteristics Max.
(1)
(2)
Port
(3)
Type of 1 4/2 (P A/B) 4/2 5/3 (A/B R1/R2)
size cycle time (kg)
actuation Plug-in Non plug-in C C (ms)
Rc [dm3/(s·bar)] b Cv [dm3/(s·bar)] b Cv (cpm)
34
2 position
Single VFS6100 VFS6110 29 0.10 6.8 38 0.10 9.0 180 160 or less 2.5
1
34
Double VFS6200 VFS6210 29 0.10 6.8 38 0.10 9.0 180 60 or less 2.75
1
Note 1) Based on JIS B 8419: 2010 (once per 30 days) for the min. operating frequency.
Note 3) The figures in the above list are for without sub-plate. In case of with sub-plate, add 1.65 kg for Rc 3/4 and 1.5 kg for RC 1 respectively.
Note 5) The flow rate characteristics is for the port size Rc 4/3.
Compact yet provides a large flow capacity Fluid Air
3/4: C: 38 dm3/(s·bar) Maximum operating pressure 1.0 MPa
Low power consumption: 1.8 W DC Minimum operating pressure 0.1 MPa

Easy maintenance Ambient and fluid temperature –10 to 60°C (1)
2 types of sub-plates: Lubrication Non-lube (2)
Plug-in and non plug-in Pilot valve manual override Non-locking push type (Flush)
Enclosure
(Equivalent to IP52), Type D: Splashproof (Equivalent to IP54) (4) (6)

AC
(Power consumption) Holding 3.4 VA (2.1 W)/50 Hz, 2.3 VA (1.5 W)/60 Hz
Electrical entry
and at the right angles to the main valve and armature in both energized and
de-energized states every once for each condition. (Values at the initial period)
Symbol performed at both energized and de-energized states in the axial direction and at
the right angles to the main valve and armature. (Values at the initial period)
2 position Note 4) Based on JIS C 0920.
Single Note 5) Based on JIS C 4003.
(A)4 2(B) Note 6) The F and D type enclosures described above show those without the light/surge voltage suppressor.
The F and D type enclosures with the light/surge voltage suppressor are equivalent to IP50.
513 Option Specifications

(R1)(P)(R2) Pilot type External pilot Note)
Double Manual override Main valve Direct manual override
(A)4 2(B) 110 to 120, 220, 240 VAC (50 Hz/60 Hz)
Coil rated voltage
12, 100 VDC
Porting specifications Bottom ported
513 Option With light/surge voltage suppressor, Non-rotating DIN terminal
(R1)(P)(R2)
Pilot pressure: 0.1 to 1.0 MPa
A 998
Porting Port size

specifications Nil Without sub-plate
Nil Side ported 06 34
10 1
Body type Electrical entry
Thread type SV
O: Plug-in type F: Plug-in type
Nil Rc
sub-plate conduit terminal
N∗ NPT SYJ
T∗ NPTF
F∗ G
∗ Semi-standard
SZ
CE-compliant VF
Nil —
Q CE-compliant VP4
VQ
Plug-in VFS6 1 0 0 5 F Z 10 1/2
VQ
4/5
Non plug-in VFS6 1 1 0 5 D Z 10 VQC
1/2
Option VQC
Nil None 4/5
VQZ
Electrical entry
Symbol E: Grommet terminal D: DIN terminal SQ
2 position single D0: DIN terminal
without connector
(A)4 2(B) VFS
1
513
VFR
(R1)(P)(R2)
2 position double VQ7
(A)4 2(B)
2
513 Coil rated voltage
(R1)(P)(R2) 1 100 VAC, 50/60 Hz
2 200 VAC, 50/60 Hz
Body type 3∗ 110 to 120 VAC, 50/60 Hz
1: Non plug-in type 4∗ 220 VAC, 50/60 Hz
sub-plate 5 24 VDC
6∗ 12 VDC
7∗ 240 VAC, 50/60 Hz
∗ Semi-standard
Pilot type
Nil Internal pilot
R∗ External pilot
Body Option ∗ Semi-standard
0 Standard How to Order Pilot Valve Assembly
1∗ Direct manual override
∗ Semi-standard SF4 1 F 22
Coil rated voltage
1 100 VAC, 50/60 Hz
2 200 VAC, 50/60 Hz
3∗ 110 to 120 VAC, 50/60 Hz
4∗ 220 VAC, 50/60 Hz
5 24 VDC
6∗ 12 VDC
7∗ 240 VAC, 50/60 Hz
∗ Semi-standard
∗∗ Refer to page 1010
for voltage conversion.
999 A
VFS6000 Series

Sizing Program.
Bore size
CS1/CS2 series
Average Pressure 0.5 MPa
Series speed Load factor 50%
(mm/s) Stroke 300 mm
ø125 ø140 ø160 ø180 ø200 ø250 ø300
800 Perpendicular,
600 Horizontal
500 actuation
VFS6100-10 400
300
200
100
0
∗ It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected
∗ The average velocity of the cylinder is what the stroke is divided by the total stroke time.
Conditions
CS1/CS2 series
Tube bore x Length SGP25A x 1 m
VFS6100-10 Speed controller AS600-10
Silencer AN600-10
Construction
513 513
(R1)(P)(R2) (R1)(P)(R2)

06
No. Description Material Note Plug-in VFS6000-P- 10 (N, T, F)
1 Body Aluminum die-casted Platinum silver
Non plug-in VFS6000-S- 06
10 (N, T, F)
2 Sub-plate Aluminum die-casted Platinum silver
∗ Mounting bolt and gasket are not included.
4 Adapter plate Aluminum die-casted Black
5 End plate Aluminum die-casted Black
6 Piston Resin —
Sub-plate Assembly (For External Pilot) Part No.
7 Junction cover Resin — Plug-in VFS6000-P-R 06
10 (N, T, F)
06
8 Light cover Resin — Non plug-in VFS6000-S-R 10 (N, T, F)
10 Gasket NBR —
Part no. for mounting bolt and gasket
BG-VFS6000
1000
Plug-in — 2 Position single/Double

2 position single: VFS6100-F
SV
SYJ
SZ
VF

4 x ø9 mounting hole VP4
Solenoid valve mounting bolt
(Hexagon socket head cap screw) VQ
with SW 1/2
Light window (FZ)
VQ
4/5
VQC
1/2
VQC
4/5
VQZ
(A, B port)
SQ
VFS
G 1/2 electrical entry Rc 1/8 external pilot port
2 x Rc 1/8 pilot EXH port (VFS6100R)
VFR
VQ7
2 position double: VFS6200-F

Light window (FZ)
(Hexagon socket head cap screw)
4 x M8 x 80 with SW
(A, B port)

Rc 1/8 external pilot port
1001
VFS6000 Series
Non Plug-in — 2 Position single/Double

2 position single: VFS6110-E, VFS6110-D
Light window (EZ, DZ)
Pilot valve manual override Solenoid valve mounting bolt
4 x M8 x 80 with SW
ø8 to ø10
(A, B port)
external pilot port
2 position double: VFS6210-E, VFS6210-D

Light window (EZ, DZ)
4 x M8 x 80 with SW
ø8 to ø10
(A, B port)
2 x Rc 1/8 pilot EXH port Rc 1/8 external pilot port

(VFS6210R)
1002
SV
SYJ
SZ
VF
VP4
VQ
1/2
VQ
4/5
VQC
1/2
VQC
4/5
VQZ
SQ
VFS
VFR
VQ7
1003
Metal Seal, Non Plug-in
VFS2000 Series
How to Order
Non plug-in 30 VFS2 2 10 1 D 02

Thread type
Conforming to Nil Rc
CSA standard N∗ NPT
T∗ NPTF
F∗ G
Symbol ∗ Semi-standard
2 position single Body type
(A)4 2(B) 1: Non plug-in type
Port size
sub-plate Nil Without sub-plate
1
Non plug-in type,
513
01 18
Standard
(R1)(P) (R2)
type
2 position double 02 14
(A)4 2(B)
2 Pilot type Porting specifications

Nil Internal pilot Nil Side ported
513
(R1)(P)(R2) R∗ External pilot B∗ Bottom ported
3 position closed center ∗ Semi-standard
∗ Option: External pilot is
(A)4 2(B) possible only to the one
3 with sub-plate.
513 Coil rated voltage Nil: Non-locking push type B∗: Locking type
(R1)(P)(R2) (Flush) (Tool required)
1 100 VAC, 50/60 Hz
3 position exhaust center
(A)4 2(B) 2 200 VAC, 50/60 Hz
3∗ 110 to 120 VAC, 50/60 Hz
4
4∗ 220 VAC, 50/60 Hz
5 13 5 24 VDC A∗: Non-locking push type C∗: Locking type
(R1)(P)(R2) (Extended) (Lever)
6∗ 12 VDC
3 position pressure center
(A)4 2(B)
7∗ 240 VAC, 50/60 H
∗ Semi-standard
5
513 ∗ Semi-standard
(R1)(P)(R2)
Option
3 position double check Nil None
(A)4 2(B)
Note) Z With light/surge voltage suppressor
6
513 Electrical entry
(R1)(P)(R2) D: DIN terminal
Note) Combining double check spacer with external pilot will not work.
A 1004
VFS3000 Series
SV
How to Order SYJ
SZ
Non plug-in 30 VFS3 2 1 1 2 D 02 VF
Thread type
Conforming to
Nil Rc VP4
CSA standard
N∗ NPT VQ
T∗ NPTF 1/2
F∗ G
∗ Semi-standard
VQ
4/5
Symbol Port size
2 position single 3 position pressure center VQC
Nil Without sub-plate 1/2
(A)4 2(B) (A)4 2(B) 02 14
1 5 03 38 VQC
∗ For bottom ported, 1 4 is
4/5
513 513
(R1)(P) (R2) only available.
VQZ
(R1)(P)(R2)
2 position double 3 position double check Porting specifications
(A)4 2(B) (A)4 2(B)
2 6
Nil
B∗
Side ported
Bottom ported
SQ
∗ Semi-standard
513
(R1)(P)(R2)
513
(R1)(P)(R2)
Pilot valve VFS
3 position closed center manual override
Option
(A)4 2(B)
Nil None Nil: Non-locking push type VFR
3 (Flush)
513 VQ7
(R1)(P)(R2) Electrical entry
3 position exhaust center D: DIN terminal
(A)4 2(B)
4
A∗: Non-locking push type
5 13 (Extended)
(R1)(P)(R2)

external pilot specifications.
Body type
1: Non plug-in type
sub-plate
Coil rated voltage B∗: Locking type
1 100 VAC, 50/60 Hz (Tool required)
2 200 VAC, 50/60 Hz
3∗ 110 to 120 VAC, 50/60 Hz
4∗ 220 VAC, 50/60 Hz
5 24 VDC
6∗ 12 VDC
7∗ 240 VAC, 50/60 Hz C∗: Locking type
Body option ∗ Semi-standard (Lever)
0 Standard
Pilot type
∗ Semi-standard Nil Internal pilot
R∗ External pilot
∗ Semi-standard
∗ Semi-standard
1005 A
VFS4000 Series
How to Order
Non plug-in 30 VFS4 2 1 0

1 1 D 03
Thread type
Conforming to
Nil Rc
CSA standard
N∗ NPT
T∗ NPTF
F∗ G
∗ Semi-standard
Port size
Symbol Nil Without sub-plate
2 position single 3 position pressure center 03 38
(A)4 2(B) (A)4 2(B) 04∗ 12
1 5 ∗ EA, EB: 3 8
513 513
(R1)(P) (R2) (R1)(P)(R2)
(A)4 2(B) (A)4 2(B) Nil Side ported
B∗ Bottom ported
2 6
∗ In the case of external pilot (Option),
513 513 bottom piping is not available.
(R1)(P)(R2) (R1)(P)(R2)
3 position closed center Pilot valve
(A)4 2(B)
Option manual override
3 Nil: Non-locking push type
Nil None
(Flush)
513 Z With light/surge voltage suppressor
(R1)(P)(R2)
3 position exhaust center Electrical entry
(A)4 2(B)
D: DIN terminal
4
5 13 A∗: Non-locking push type
(R1)(P)(R2)
(Extended)
external pilot specifications.
Body type
1: Non plug-in type
sub-plate Coil rated voltage B∗: Locking type
1 100 VAC, 50/60 Hz (Tool required)
2 200 VAC, 50/60 Hz
3∗ 110 to 120 VAC, 50/60 Hz
4∗ 220 VAC, 50/60 Hz
5 24 VDC
6∗ 12 VDC
7∗ 240 VAC, 50/60 Hz C∗: Locking type
Body option ∗ Semi-standard (Lever)
0 Standard
Pilot type
Nil Internal pilot
∗ Semi-standard
R∗ External pilot
∗ Semi-standard
∗ Semi-standard
A 1006
VFS5000 Series
SV
How to Order SYJ
SZ
Non plug-in 30 VFS5 1 1 0 5 D 06 VF
Conforming to Port size VP4
CSA standard Nil Without sub-plate VQ
03 38
1/2
04 12
06 34 VQ
4/5
Porting specifications Thread type VQC
Symbol
Nil Side ported Nil Rc 1/2
B∗ Bottom ported N∗ NPT
2 position single 3 position pressure center T∗
VQC
∗ In the case of external NPTF
(A)4 2(B) 4/5
F∗
(A)4 2(B)
pilot (Option), bottom G
1 5 piping is not available. ∗ Semi-standard VQZ
513
(R1)(P) (R2)
513
(R1)(P)(R2)
Pilot valve
manual override SQ
(A)4 2(B) (A)4 2(B) Nil: Non-locking push type
(Flush)
2 6 VFS
513 513
(R1)(P)(R2) (R1)(P)(R2) VFR
3 position closed center
Body type
(A)4 2(B)
1: Non plug-in type
VQ7
3 A∗: Non-locking push type
sub-plate (Extended)
513
(R1)(P)(R2)
3 position exhaust center
(A)4 2(B)
4
5 13 B∗: Locking type
(R1)(P)(R2)
(Tool required)
Body option
0 Standard
∗ Semi-standard
Pilot type
Nil Internal pilot C∗: Locking type
R∗ External pilot (Lever)
∗ Semi-standard
Coil rated voltage
1 100 VAC, 50/60 Hz
2 200 VAC, 50/60 Hz
3∗ 110 to 120 VAC, 50/60 Hz
4∗ 220 VAC, 50/60 Hz ∗ Semi-standard
5 24 VDC
6∗ 12 VDC Option
7∗ 240 VAC, 50/60 Hz Nil None
∗ Semi-standard Z With light/surge voltage suppressor
Electrical entry
D: DIN terminal
1007 A
VFS6000 Series
How to Order
Non plug-in 30 VFS6 1 1 0 5 D Z 10

Conforming to Thread type
CSA standard Nil Rc
N∗ NPT
T∗ NPTF
F∗ G
Symbol ∗ Semi-standard
2 position single Port size

(A)4 2(B) Nil Without sub-plate
1 06 34
10 1
513
(R1)(P)(R2)
2 position double
Nil Side ported
(A)4 2(B)
2 Option
Nil None
513
(R1)(P)(R2) Z With light/surge voltage suppressor
Electrical entry
Body type
D: DIN terminal
1: Non plug-in type
sub-plate
Coil rated voltage

Body option 1 100 VAC, 50/60 Hz
0 Standard 2 200 VAC, 50/60 Hz
1∗ Direct manual override 3∗ 110 to 120 VAC, 50/60 Hz
∗ Semi-standard 4∗ 220 VAC, 50/60 Hz
5 24 VDC
Pilot type
6∗ 12 VDC
Nil Internal pilot
7∗ 240 VAC, 50/60 Hz
R∗ External pilot
∗ Semi-standard
∗ Semi-standard
A 1008
VFS Series
Specific Product Precautions 1
Be sure to read this before handling the products.
Refer to back page 50 for Safety Instructions and pages 3 to 9 for 3/4/5 Port
Solenoid Valve Precautions.
Caution
Light/Surge Voltage Suppressor, Electrical Entry Single unit
Body Ported
VFS1000/2000/3000 Series Base Mounted VFS2000 Series
SV
Exchange of pilot valve (Voltage exchange)
Light/Surge Voltage Suppressor Light/Surge Voltage Suppressor
AC and 100 VDC • In the case of surge voltage suppressor,
• When changing rated voltage and electrical
entry etc., pilot valve assembly can be
SYJ
Terminal no. 1 (+) With indicator light surge voltage absorption device ZNR is at- changed. But in case of a plug-in type with
tached to AC power. light/surge voltage suppressor, pilot valve SZ
assembly cannot be changed for changing
Varistor
Single SOL.
AC and 100 VDC rated voltage.
Terminal no. 2 (–)
Lead wire, red With indicator light Pilot valve assembly
VF
Varistor
With indicator light With indicator light
B side
Terminal no. 1 (+) Terminal no. 1 (+)
A side
Single SOL.
Pilot valve assembly VP4
Double
Varistor
Varistor
Black
SOL. SOL. VQ
With indicator light lead wire, brown Red With indicator light 1/2
Terminal no. 2 (–) Terminal no. 2 (–) B side A side
VQ
Varistor
Varistor
24 VDC or less Double SOL. SOL.
• When mounting pilot Pilot Valve Assembly 4/5
Terminal no. 1 (+) With indicator light
White Black valve assemblies and SF4-- VQC
+(–) 24 VDC or less solenoid valve bod- Holding screw Proper tightening torque (N·m) 1/2
Varistor
Single SOL.
With indicator light ies, tighten equally
–(+) Terminal no. 1 +(–)
M3 0.45 to 0.6
with the tightening VQC
Terminal no. 2 (–) +(–) torque shown in the Solenoid Valve Body 4/5
Varistor
Note) There is no polarity (+, –). Single SOL.

–(+) right to prevent gas- Holding screw Proper tightening torque (N·m)
With indicator light Terminal no. 1 (+) Terminal no. 1 (+) With indicator light
kets from slipping.
B side
+(–)
A side Terminal no. 2 –(+) M3 0.8 to 1.2 VQZ
Varistor
Varistor
Double SOL. SOL. Note) There is no polarity (+, –).

–(+) Electrical Connection
With indicator light Terminal no. 1 +(–) Terminal no. 1 +(–) With indicator light SQ
Terminal no. 2 (–) Terminal no. 2 (–) B side A side Single unit/Plug-in type sub-plate: T
+(–) Conduit terminal (With terminal block)
Varistor
Varistor
Note) There is no polarity (+, –).

• Type G: Lead wire comes directly from the
Double SOL.
–(+)
SOL.
• If the junction cover (1) of the sub-plate is VFS
solenoid part. Connect it with the power removed, you can see the plug-in type ter-
Terminal no. 2 –(+) Terminal no. 2 –(+)
source. Grommet with DC voltage surge Note) There is no polarity (+, –).
minal block (2) (part no. NVF2000-27A-1)
mounted inside the sub-plate. The following VFR
voltage suppressor has polarity. Connect
• Type G: Use lead wire from solenoid to markings are on the terminal block board.
red lead wire to + (positive) side and black
to – (negative) side.
connect with power side. Connect with corresponding power side. VQ7
Grommet with DC voltage surge voltage Description Solenoid A side Solenoid B side
Surge voltage suppressor suppressor has polarity. Connect red lead Terminal block A A B B
DC AC wire to + (positive) side and black to marking + – + –
Red + – (negative) side.
Diode Varistor Surge voltage suppressor
• When ground wiring and COM wiring are
DC AC required, please specify separately.
Black –
Red + • Applicable terminal: 1.25-3, 1.25-3S, 1.25Y-
Wiring Diode Varistor 3N, 1.25Y-3S
In the case of DIN terminal and terminal (1) (2)
Black –
block (with indicator light/surge voltage sup-
pressor), the interior wiring is shown below. With light/surge
With DIN With terminal Applicable terminal: 1.25- voltage suppressor
terminal block block 3, 1.25-3S, 1.25Y-3N,
1.25Y-3S, but in the case
of with DIN terminal
block, is not a terminal
structure.
Single unit/Non plug-in type sub-plate: G, E, T, D
Note) There is no polarity. • Type G: Use lead wire from solenoid to
connect with power side.
Changing Direction of DIN Terminal/Cable Entry Plug-in type Non plug-in type • Type E, T, D: In the case of a DIN terminal
To change direction of DIN and terminal block (with light/surge voltage
terminal retaining screw,
How to Exchange suppressor), the interior wiring is shown below.
pull off outer cover, rotate Solenoid valve Connect with corresponding power side.
connector board through • Loosen 3 set screws (hexagonal socket head With DIN With terminal Applicable terminal: 1.25-
180°. Replace cover and cap screw M3 x 31) and pull solenoid valve terminal block block 3, 1.25-3S, 1.25Y-3N,
out vertically, otherwise it may cause damage 1.25Y-3S, but in the case
tighten screw. to the solenoid valve. Never remove a valve at of with DIN connector
an angle. board, is not a terminal
Changing Direction of Electrical Entry and Manual Override • When mounting sole- structure.
noid valve onto the Tightening torque for ter-
Loosen the set screw (M3–2 pcs.), take out minal: 0.6 N·m
base, plug pin assem-
pilot operator, turn solenoid valve 180° de- bly (base side) into
grees to change the direction of lead wire and Note) There is no polarity.
receptacle assembly Receptacle assembly
manual override. (Possible on the VFS1000 (body-side) vertically. Changing Direction of DIN Terminal/Cable Entry
series only.)
• Change of the electrical entry of DIN type connector cable
Unscrew retaining screw, pull off outer
cover, rotate connector board through
180°. Replace cover and tighten screw. Ap-
Manual position plicable cable: O.D. ø6 to ø8.
1009
VFS Series
Caution
Light/Surge Voltage Suppressor, Electrical Entry Single unit
Base Mounted VFS3000/4000/5000/6000 Series
Light/Surge Voltage Suppressor • When mounting pilot Pilot Valve Assembly Plug-in type (With terminal)
valve assemblies and SF4-- • If the junction cover (1) of the sub-plate is
In the case of surge voltage suppressor, solenoid valve bod- Holding screw Proper tightening torque (N·m) removed, you can see the plug-in type terminal
surge voltage absorption element is ies, tighten equally block (2) mounted inside the sub-plate.
with the tightening M3 0.45 to 0.6
attached to terminal block on body area.
torque shown in the Solenoid Valve Body (2) (1)
100 VAC/DC or more right to prevent gas- Holding screw Proper tightening torque (N·m)
Light/Surge voltage ~ kets from slipping.
absorption element
With indicator light
M3 0.8 to 1.2
Varistor
SOL. M4 1.4 to 2.5

~ M5 2.8 to 5
24 VDC or less
+(–) Lead Wire Connection
Varistor
SOL.
DIN terminal block type
–(+) • Male pin terminal of
Note) There is no polarity. DIN terminal block
board of solenoid • The following markings are on the terminal
How to Exchange valve and wires as block. Connect with corresponding power
Solenoid valve shown below. Con- side.
• Loosen set screw and take solenoid valve nect to correspond- Solenoid A side Solenoid B side
out vertically, otherwise it may cause ing terminal block on Terminal block A B
damage to the solenoid valve. Never the connector. marking +– +–
remove a valve at an angle. • Applicable terminal:
DIN terminal (Wiring)
• When mounting solenoid valve onto the VFS3000: 1.25-3, 1.25-3S, 1.25Y-3N,
Ground
base, plug pin assembly (base side) into 1 A side 1.25Y-3S
receptacle assembly (body side) vertically. 2 B side VFS4000: 1.25-3.5M, 1.25Y-3L, 1.25Y-3M
3 COM VFS5000: 1.25-4, 1.25-4M
Ground VFS6000: 1.25-3.5M, 1.25Y-3L, 1.25-3M
• There is no polarity. • There is no polarity.
• Tightening torque for terminal: 0.6 N·m
100 VAC/DC or more Non plug-in type (With terminal)
Single • Remove cover (1), over terminal block (2)
With indicator light attached to the inside of body. Connect
Pilot valve 1 2 with corresponding power side. For a type
3
• When changing the rated voltage, electrical with indicator light and surge voltage
Varistor
entry, etc., pilot valve assembly can be ex- SOL.A suppressor, pull out the light and surge
changed easily since this is plug-in type. voltage suppressor substrate (3) in a
Then, when changing the rated voltage Double straight direction and then connect them.
with indicator light/surge voltage suppres- (1)
sor, change of indi- 1 2
cator light/surge 3
(3)
Varistor
Varistor
voltage suppressor SOL.A SOL.B

substrate is also (2)
needed. So, order
together with pilot
24 VDC or less
valve assembly.
Single
VFS3000/4000/5000
1 2
3
Varistor
SOL.A
Pilot cover A side B side
Double
A side B side
Pilot valve assembly
1 2
3
Mounting screw A side B side
Varistor
Varistor
SOL.A SOL.B
VFS6000
• Applicable terminal:
Light/Surge Voltage Suppressor Substrate Part No. VFS3000: 1.25-3, 1.25-3S, 1.25Y-3N,
VFS3000 VFS3000-10A-#1
• Heavy-duty cord 1.25Y-3S
Applicable cable O. D.: ø8 to ø10 VFS4000/5000/6000: 1.25-3.5M,
100V or more VF4000-9A-#1
VFS4000 • Applicable terminal 1.25Y-3L,
24V or less VF4000-9B-#1 Applicable terminal on block board: 3
100V or more AXT627-7A-#1 1.25Y-3M
VFS5000 (kinds) • There is no polarity.
24V or less AXT627-7B-#1 1.25Y-3L, 1.25-3.5S, 1.25-4M • Tightening torque for terminal: 0.6 N·m
100V or more VF4000-9A-#1 • Connector/Clamping torque
VFS6000
24V or less VF4000-9B-#1 Set screw 0.6 N·m
-: Coil rated voltage Symbol: Refer to below. Terminal screw 0.6 N·m
1: 100 to 120 V 6: 12 V • Incorrect common (DIN terminal no. 3)
2: 200 to 220 V 7: 240 V causes damage on power side circuit.
1010 5: 24 V
VFS Series
Caution Interface Regulator Specifications
How to Calculate the Flow Rate Interface regulator ARBF2000 ARBF3050 ARBF4050
(3) (4)
ARBF5050
Applicable solenoid valve series VFS2000 VFS3000 VFS4000 VFS5000
Refer to front matter for How to Calculate Regulating port P A B P A B P A B P
the Flow Rate.
Maximum operating pressure 1.0 MPa SV
Set pressure range (1) 0.05 to 0.83 MPa 0.1 to 0.83 MPa
Ambient and fluid temperature
Port size for connection of pressure gauge M5 x 0.8
–5 to 60°C (No freezing)
Rc 1/8
SYJ
Weight (kg) 0.16 0.46 0.72 0.83
Effective area at supply side (mm ) P → A
2 (2)
5.5 21 18.5 11 35 31 26 44 38 32 SZ
S at P1 = 0.7 MPa, P2 = 0.5 MPa P→B 5.1 18.5 22 12 31 31 24 38 40 31
Effective area at exhaust side (mm2) (2) A → EA 12 40 55 90 VF
S at P2 = 0.5 MPa B → EB 11 36 45 77
Note 1) Set within the operating pressure range of solenoid valve.
Note 2) Synthesized effective area with solenoid valve 2 position single type.
VP4
Note 3) • Operate an interface regulator only by applying pressure from the “P” port of the base, except
when using it as a reverse pressure valve.
VQ
• To combine a pressure center valve and the A and B port pressure reduction of an interface 1/2
regulator, use the ARBF3000, 4000, or 5000 model.
• To combine a reverse pressure valve and an interface regulator, use the ARBF3000, 4000, or 5000
VQ
model. Furthermore, the P port pressure reduction cannot be used for the reverse pressure valve. 4/5
• When combining a double check valve and an interface regulator, use a manifold or sub-plate as a
basis, and stack them in the following order; the perfect spacer → the interface regulator → the valve.
VQC
• When a closed center valve is combined with the interface regulator's A, B port regulation, note 1/2
that it cannot be used for intermediate stops of a cylinder because there is leakage from relief port
on the regulator. VQC
Note 4) Note that the pressure gauge (G27) for the ARBF2000-00-P- cannot be used for the oil lubricating air. 4/5
Flow Rate Characteristics (P → A) (Representative value conditions: Inlet pressure 0.7 MPa.
when 2 position solenoid valve is mounted.) VQZ
ARBF2000-00-P
Symbol A B
SQ
A B
B A Outlet pressure (MPa)
R1 R2
VFS
R1 R2 R1 R2
VFR
P P P
P port A port B port
VQ7
regulation regulation regulation
Flow rate (L/min (ANR))
ARBF3050-00-P ARBF3050-00-A
Outlet pressure (MPa)
Flow rate (L/min (ANR)) Flow rate (L/min (ANR))
ARBF4050-00-P ARBF4050-00-A
ARBF5050-00-P ARBF5050-00-A
1011
VFS Series
Caution
Lead Wire Connection Manifold/Plug-in
Type 01 Insert Plug with Lead Wire Type 01 with Terminal Block
VFS2000 Series VFS2000 Series

(Insert plug with lead wire is not available for the VF3000, 4000, and 5000 series.)
• Remove junction cover of manifold, exposing terminal block at-
How to remove junction cover (Type 01) tached to the manifold block. Lead wires from solenoid valve are
Turn the knob (2) of junction cover (1) on the manifold block side by connected with the terminals on upper side of terminal block. (On
hand or slotted screwdriver to the C → O direction (counterclockwise) the terminal block, lead wire is connected with both A and B sides
90°. While holding the knob and upper part of junction cover, pull of solenoid valve in accordance with the corresponding markings A
outward to remove junction cover. and B on the block.) Connect each lead wire of power side corre-
When reassembling, do the opposite. sponding to respective solenoid valve on the lower terminal block.
VFS2000 has the marking + COM on the block board, but – COM
specification is also available.
Model
Terminal block marking
A COM B
(2) VFS2100 A side COM
(1) VFS2200 A side COM B side
VFS2 34 00 A side COM B side
• Applicable terminal: 1.25-3, 1.25-3S, 1.25Y-3N, 1.25Y-3S
• Plugging COM bridge (part no. AXT625-73: 5 stations) in between
each + COM on the block board will make the specifications of all the
stations + COM and enables you to understand the wiring process.
(It is designed for 5 stations. So,
cut the COM bridge according
to the number of stations.
Wiring Additionally, when it is used for
The insert plug (1) is attached to the manifold block and lead wire is 6 or more stations, combine the Connection
plugged in with valve side as shown in the following list. COM bridges and cut appropri-
Marking
( Single solenoid: AXT624-52A-S-1
Double solenoid: AXT624-52A-D-1 ( ately.)
Connect with corresponding power side. • Tightening torque for terminal:
0.6 N·m
Power Valve Solenoid Solenoid
supply model A B (1) VFS3000 Series
Single Model
A COM B
Red, Black —
AC solenoid VFS3100 A side COM
DC Double VFS3200 A side COM B side
Red, Black Brown, White
solenoid VFS3 34 00 A side COM B side
∗ There is no polarity. • Applicable terminal: 1.25-3.5M, 1.25Y-3L, 1.25-3M
∗ Lead wire length is 1 m.
• Plugging the lead wire assembly for all COM in between COM
terminals on the block board will make the specifications of all the
stations all COM. This rationalizes the wiring.
Part no. of lead wire assembly for all COM (common to VFS3000,
How to Use Insert Plug 4000, and 5000): AZ683-56A (Since it is designed for 20 terminals,
• When removing insert plug (2) the VFS3000 is applicable to up to 20 stations. Cut lead wires
(1) from manifold base, appropriately according to the number of stations.)
push the lever area (2) of • There is no polarity.
inset plug downward with (1) • VFS 3000 has the marking + COM on the block board, but – COM
thumb and pull it together specification is also available.
with the lead wire (3) • Tightening torque for terminal: 0.6 N·m
outward.
VFS4000/5000 Series
(3) Model
A+ A– B+ B–
VFS 45 100 A side A side
• When placing the inset plug VFS 45 200 A side A side B side B side
(1) into the manifold base, VFS4 34 00
push the lever area of inset 3 A side A side B side B side
(4) VFS5 4 00
plug with thumb and plug it
in its place in the receptacle • Applicable terminal: 1.25-3.5M, 1.25Y-3L, 1.25Y-3M
housing (4) horizontally. • Plugging the lead wire assembly for all COM in between COM
(1) terminals on the block board will make the specifications of all the
After plugging, pull lead
wire out a little bit to ensure stations all COM. This rationalizes the wiring.
that insert plug is secure. Part no. of lead wire assembly for all COM (common to VFS3000,
4000, and 5000): AZ683-56A (Since it is designed for 20 terminals,
the VFS4000 and 5000 are applicable to up to 10 stations. Cut lead
wires appropriately according to the number of stations.)
• Tightening torque for terminal: 0.6 N·m
1012
VFS Series
Caution
Lead Wire Connection Manifold/Plug-in
Type 01C Circular Connector Type 01F D-sub Connector SV
VFS2000/3000/4000/5000 Series VFS2000/3000/4000/5000 Series SYJ

• Wire connection specifications • Wire connection specifications
Lead wire for both solenoid A and B sides in manifold are Lead wire for both solenoid A and B sides in manifold are SZ
connected to connector terminal as COM specifications. connected to connector terminal as COM specifications.
(n)
(3) (n) VF
Fig. (1) U side (2) (3)
(1) Fig. (2) U side (2)
(1) VP4
Stations
Stations VQ
1/2
D side
D side VQ
4/5
Applicable plug assembly (Option)
Applicable plug assembly (Option) VQC
1/2
VQC
Internal Wiring of Manifold Internal Wiring of Manifold 4/5
Standard wiring Wiring with control unit Standard wiring Wiring with control unit
Connector terminal no. Connector terminal no. Connector terminal no.
SOL.A
Connector terminal no.
VQZ
SOL.A Air release valve 1 Air release valve
2 SOL.B 1
SOL.B 2 1
1 station 3 1 1 station 14
SQ
Control unit
station
Control unit
COM station COM 2

1 1 2
Multi-connector SOL.A
D-sub connector SOL.A Pressure switch
Pressure switch 15
2 station
SOL.B
5
6 2
station
5 Connector
terminal no. 2 station
SOL.B
COM
3 2
station
15
VFS
COM 4 4 16 16
SOL.A
SOL.B
8
SOL.A
SOL.B
8
3 station
SOL.A
SOL.B
4
17 3 station
SOL.A
SOL.B
4
17
VFR
3 station 9 3 station 9
COM COM COM 5 COM 5
7 7
SOL.A
11
SOL.A
11
SOL.A
18
SOL.A
18
VQ7
SOL.B SOL.B SOL.B SOL.B
4 station 12 4 station 12 4 station 6 4 station 6
COM COM COM 19 COM 19
10 10
SOL.A SOL.A SOL.A SOL.A
14 14 7 7
Connector COM COM COM 8 COM 8
13 13
terminal no.
17 17 21 21
16 16
20 20 10 10
19 19
23 23 24 24
Max. SOL.B Max. SOL.B Max. SOL.B Max. SOL.B
24 24 8 stations 12 8 stations 12
8 stations COM 8 stations COM COM 25 COM 25
22 22
Note 1) Maximum stations are 8. Note 1) Maximum stations are 8.
Note 2) There is no polarity. Note 2) There is no polarity.
Note 3) Indication of stations are one station from D side regardless of the Note 3) Indication of stations are one station from D side regardless of the
connector mounting side, D or U. connector mounting side, D or U.
Applicable Plug Assembly (Option) Applicable Plug Assembly (Option)
Assembly part no. Cable length Component parts Assembly part no. Cable length Component parts
VVFS2000-30A-1 1.5 m AXT100-DS25-015 1.5 m
VVFS2000-30A-2 3m Plug 206837-1 1 pc. AXT100-DS25-030 3m
VVFS2000-30A-3 5m Cable clamp 206138-1 1 pc. AXT100-DS25-050 5m Plug: MIL standard D type
VVFS2000-30A-4 ∗ 7m Socket 66101-2 24 pcs. AXT100-DS25-080 8m connector
VVFS2000-30A-5 ∗ 10 m Cable VCTF 24 cores x 0.75 mm2 AXT100-DS25-100 10 m 25 terminals
VVFS2000-30A-6 ∗ 15 m made by Tyco Electronics AMP K.K. AXT100-DS25-150 15 m Cable: 25 cores wire x 0.3 mm2
VVFS2000-30A-7 ∗ 20 m AXT100-DS25-200 30 m
∗ Option AXT100-DS25-300 20 m
Cable Color List of Each Terminal No. Cable Color List of Each Terminal No.
Terminal no. 1 2 3 4 5 6 7 8 9 10 11 12 Terminal no. 1 2 3 4 5 6 7 8 9 10 11 12 13
Lead wire color Orange Orange Black Black Green Green Red Red Blue Blue Yellow Yellow Lead wire color Black Brown Red Orange Yellow Pink Blue Purple Gray White White Yellow Orange
Dot marking — Yes — Yes — Yes — Yes — Yes — Yes Dot marking — — — — — — — White Black Black Red Red Red
Terminal no. 13 14 15 16 17 18 19 20 21 22 23 24 Terminal no. 14 15 16 17 18 19 20 21 22 23 24 25

Lead wire color Brown Brown White White Pink Pink Gray Gray Sky blue Sky blue Light green Light green Lead wire color Yellow Pink Blue Purple Gray Orange Red Brown Pink Gray Black White
Dot marking — Yes — Yes — Yes — Yes — Yes — Yes Dot marking Black Black White — — Black White White Red Red White —
1013

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5 Port Pilot Operated Solenoid Valve

• DC: There is polarity. push type

VFS2000 (P.922) (P.922) (P.922) (P.923)

VFS3000 (P.946) (P.946) (P.946)

VFS4000 (P.968) (P.968) (P.968)

VFS5000 (P.988) (P.988) (P.988)

Bar Base Plug-in With terminal block

Pilot common EXH

Grommet terminal DIN terminal

∗ Bottom piping is available as an option.

Manifold Option Manifold Option Parts

Individual SUP spacer Interface regulator

With exhaust cleaner

Air shutoff valve spacer

With control unit

SUP/EXH block disk

Double check spacer

Dripproof Manifold (Equivalent to IP65)

Note) Made to Order Specifications

operating Response Weight

Compact yet provides a Standard Specifications

2 position 0.1 MPa

Cylinder Speed Chart

Conditions ∗ It is when the cylinder is extending that is meter-out controlled by

2 Position Single — Grommet, Grommet terminal, Conduit terminal, DIN terminal

Conduit terminal: VFS1120-T/TZ

2 x ø4.5 mounting hole

151 (3 position: 155.5)

(Lead wire length)

Grommet terminal: VFS1220-E/EZ VFS1320-E/EZ DIN terminal : VFS1220-D/DZ/Y/YZ

Applicable heavy-duty cord

Conduit terminal: VFS1220-T/TZ VFS1320-T/TZ

Pilot common EXH

How to Order Manifold Assembly [Example]

Type 20 Manifold — Pilot individual exhaust: VV5FS1-20- Station 1-01

3 position Double Single ≈ 300

Formula for manifold weight M = 0.049n + 0.059 (kg) n: Station

Grommet terminal: E/EZ Conduit terminal: T/TZ DIN terminal: D/DZ/Y/YZ

Applicable heavy-duty cord

(With light/surge voltage suppressor: 82.5)

Type 30 Manifold — Pilot common exhaust: VV5FS1-30- Station 1-01

Formula for manifold weight M = 0.079n + 0.093 (kg) n: Station VFR

Grommet terminal: E/EZ Conduit terminal: T/TZ DIN terminal: D/DZ/Y/YZ

Pilot EXH port

VFS2000 Series [Option]

Single VFS2120 VFS2130 14

Exhaust 18 3.2 0.25 0.79 3.4 0.26 0.82

Pressure 18 3.1 0.23 0.75 3.3 0.27 0.80

Compact yet provides a Standard Specifications

Maximum operating pressure 1.0 MPa

VFS2320-T-02 Allowable voltage fluctuation –15 to +10% of rated voltage

513 513 Option Specifications

How to Order [Option]

Body (Pilot exhaust) Electrical entry SQ

30: Common EXH∗

Coil rated voltage

How to Order Pilot Valve Assembly

Cylinder Speed Chart

Conditions ∗ It is when the cylinder is extending that is meter-out

Closed center 3 position closed center/exhaust center/pressure center

2 Position Single — Grommet, Grommet terminal, Conduit terminal, DIN terminal

Lead wire O.D.

2 x ø3.5 mounting hole