ES EXPERT

INCORPORATING THE SERVOMEX

PRODUCT
GUIDE

SOLUTIONS
PRODUCT FOCUS ISSUE
NINETEEN

SE RV OP RO UL TR A- TR AC E GA S AN AL YS IS

CHROMA NANOCHROME
VER SAT ILE TRA CE GAS
ANA LYZ ER FOR A WID E
RAN GE OF APP LICA TIO NS
SU B- PP B TR AC E ME AS UR EM EN
T AN AL YZ ER
FOR THE SE MIC ON DU CTO R IND US
TR Y

VERSATILE RELIABLE STABLE COMPLETE

The Chroma provides Stable gas analysis Get superb accuracy with An integrated system
a flexible solution with the NanoChrome Plasma Emission Detection for total UHP analysis

READ ES ONLINE AT servomex.expert/esmagazine

SEE THE FULL PICTURE ONLINE
SERVOPRO Chroma - UNBOXED
Watch our experts unbox the versatile Chroma, an accurate
trace gas analysis solution for industrial gas applications.
DF-500 SERIES
Servomex’s ultra-trace ppt oxygen analyzer range, with updated
firmware for lower detection levels.
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P02
WE CAN BUILD YOUR ANALYZER INTO A COMPLETE GAS ANALYSIS SYSTEM
WELCOME TO ISSUE 19
SERVOPRO NanoChrome - UNBOXED
The NanoChrome delivers safe, reliable UHP gas analysis for the
EXPERT SOLUTIONS
THE SERVOMEX PRODUCT MAGAZINE
semiconductor industry. See it unboxed by our experts.
DISCOVER OUR
YOUR GUIDE TO THE SERVOMEX
PRODUCTS AND SERVICES THAT SUPPORT
SOLUTIONS FOR
GLOBAL CUSTOMER PROCESSES
IN THIS ISSUE TRACE GASES
P04
Welcome to the latest edition of Expert Solutions. In this issue,
we turn the spotlight on two of our key analyzer solutions for
UHP gases, the SERVOPRO Chroma and SERVOPRO NanoChrome.
VERSATILE TRACE
GAS ANALYSIS Both based around Gas Chromatography sensing technology,
the two products each offer high-performance gas analysis,
The SERVOPRO Chroma provides a with sensitive measurements at trace and ultra-trace levels
flexible solution for a wide range of of concentration.
DF-700 SERIES gas monitoring applications.
They share advanced digital communications protocols for
Discover all the benefits of our ultra-trace moisture analyzers, P06 remote access using a network or web browser, and each have a
monitoring high performance in specialist environments. large color display screen and keyboard for easy operation.
ULTRA-TRACE ANALYSIS
The NanoChrome has been specifically designed for the
The reliable SERVOPRO NanoChrome semiconductor manufacturing industry, and uses our Plasma
has been specifically designed for the Emission Detector (PED) sensor to provide highly reliable
semiconductor industry. monitoring of ultra-trace contaminants in a wide range of
common background gases.
P08 We look at how our PED sensing technology was developed, and
explain why it offers a number of significant advantages over
TECHNOLOGY FOCUS alternative sensor methods.
Learn how our Plasma Emission Our application feature also explores the NanoChrome’s role in
Detector delivers stable, selective our unique, single-supplier, comprehensive solution for UHP gas
and sensitive UHP gas measurements. analysis. Find out how we integrate our analyzers into expertly
designed holistic systems with advanced software control.
P10 The Chroma is our versatile solution for trace gas applications,
and can be fitted with a range of sensing options, including a
THE COMPLETE SOLUTION PED, Flame Ionization Detector or Thermal Conductivity Detector.
FOR UHP GASES
Our feature examines the principles involved for each
Discover how Servomex provides technology, and also explains how the Chroma can be optimized
a unique, single-supplier for for medical gas applications.
monitoring trace impurities in
electronics-grade gases. Both analyzers are fully supported by our global service
network, including spares and maintenance contracts. On page
P12
12 we also look at how commissioning for the Chroma ensures
optimum performance from day one of operation. This can
SERVICE FOCUS
be a complex analyzer to set up, so installation by a trained
Find out how our commissioning Servomex engineer will provide peace of mind from the outset.
service helps you get optimum
performance from your
SERVOPRO Chroma.
If you need any further information about
the NanoChrome or Chroma analyzers and
how they can support your application,
See our latest product ranges please contact me.
Charles Segar, Product Manager, Industrial
Analyzer guide starts on p13 and Trace Analyzers
csegar@servomex.com
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servomex (search Servomex Group)
ES is published by Servomex Group Limited, Jarvis Brook, Crowborough, East Sussex, TN6 3FB.
www.facebook.com
Editorial inquiries and feedback should be sent to Colin Jones, Marketing Communications Director. @servomex linkedin.com/company/servomex (search Servomex Group)
Email: cjones@servomex.com. Printed November 2019.
P03
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P3
SERVOPRO

PRODUCT FOCUS SERVOPRO

Chroma
OPTIMIZABLE FOR
MEDICAL GAS
APPLICATIONS
For medical gas applications, the Chroma

A VERSATILE SOLUTION FOR

uses TCD to provide a nitrogen assay and
carbon dioxide (CO2) impurity analysis
in nitrous oxide (N2O). The Chroma also
delivers impurity analysis of carbon

TRACE GAS ANALYSIS monoxide (CO) in CO2 and N2O through

FID with a methanizer.
The Chroma nitrogen assay measurement
meets the European Pharmacopeia’s
required concentration limit of greater
than 99.5% purity (the US National
Formulary requirement is slightly less
stringent at 99%).
The European Pharmacopeia required
concentration limit for CO2 impurity is
less than 300 parts-per-million (ppm) and
for CO impurity is less than 5ppm – the
US National Formulary requires a gas
detector tube for these measurements.
The SERVOPRO Chroma trace gas analyzer

A customizable mainframe analyzer based
around Gas Chromatography technology,
the SERVOPRO Chroma provides one
of the most versatile gas monitoring
solutions available.
It delivers percentage and parts-per-
million (ppm) measurements using Flame
Ionization Detection (FID) and Thermal
Conductivity (TCD) sensing technologies,
and can utilize Servomex’s advanced
Plasma Emissions Detection (PED) for
parts-per-billion (ppb) levels of detection.
One of the most compact and powerful
trace analyzers available to the market,
the Chroma is rack-mountable for easy
integration into a gas analysis system.
It is a standalone device that does not
require third-party software and is
designed to be easy to operate, with an
intuitive user interface and integrated
software providing access to all functions,
measurements and system status.
The Chroma has separate 4-20mA outputs
for each measurement, ensuring peak
impurity values and chromatogram
signals. Comprehensive digital and analog
communications deliver flexible operation,
with internet and Ethernet connectivity
for remote control and monitoring via a
network or web browser.
The analyzer’s PlasmaHC system enables
accurate, low-maintenance
measurements of methane and non-
methane hydrocarbons, with no need for
hydrogen fuel.
It can also use ArgonSep technology
to separate argon and oxygen without
the requirement for oxygen scrubbers,
providing a highly sensitive and
maintenance-free measurement.
GAS CHROMATOGRAPHY
Gas Chromatography (GC) is an
exceptionally accurate method of
separating gas mixtures, measuring
concentrations down to parts-per-billion
(ppb) levels.
It is well suited for use in high-purity
processes such as medical gas purity
analysis since, unlike most gas analysis
techniques, the measurement is made
The Chroma is ideal for many medical gas purity applications
once the sample has been separated
rather than within the sample. By
circulating a gas sample, the individual
gases are separated using an inert
carrier gas, such as helium or argon. This
mobile phase flows through a tubular
column, where the component gases are
separated due to their interaction with
the stationary phase.
The gas content is quantified by a
detector at the column outlet measuring
the retention times of specific molecules
as they bind to the column material at
different rates. Each gas type elutes after
a different retention time in the column.
Gas types are identified by the order in
which they elute from the column.
GC process conditions can be varied to
suit a variety of applications. The column
temperature may be altered, as can the
carrier gas flow rates, sample loop size
and the dimensions of the column itself.

FLAME IONIZATION DETECTOR THERMAL CONDUCTIVITY DETECTOR

The FID sensor works on the principle of detecting ions The Chroma’s Thermal Conductivity Detector consists of an
SERVOPRO Chroma OVERVIEW formed in the combustion of organic compounds in a electrically heated Wheatstone bridge in a temperature-
sample, producing charged molecules that cause electrical controlled cell. Helium is passed over the reference arm of

MEASURES BACKGROUND GASES KEY APPLICATIONS
Medical gas production
Medical gas verification
Air separation plants
Argon purification plants
Cryogenic truck-loading station
Hydrogen purification plants
Specialty gas laboratories
Semiconductor plants
Helium liquefaction plants
conduction between two electrodes. The ions are attracted
to a collector plate and induce a current upon hitting the
plate. The FID measures this conduction and produces an
output which is directly proportional to the concentration
of Total Hydrocarbons (THC) in the sample. Using a
methanizer, this technology can be also used to measure
very low concentrations of CO.
Discover the flexibility of the Chroma:
servomex.expert/video-chroma
the bridge and the column effluent passes over the sample
arm of the bridge. When the column effluent is helium
carrier gas, the heat loss from the sample arm of the bridge
matches the heat loss from the reference arm. When an
analyte elutes this affects the thermal conductivity of the
effluent and will change the heat loss from the sample
arm of the bridge, and hence its electrical resistance. This
change is measured as a signal.

P04 P05
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SERVOPRO
PRODUCT FOCUS
SAFE, STABLE AND RELIABLE
ULTRA-TRACE GAS ANALYSIS
The SERVOPRO NanoChrome
A high-performance analyzer specifically
designed for the semiconductor
manufacturing industry, the SERVOPRO
NanoChrome offers reliable ultra-trace
measurements of impurities in
electronic gases.
The NanoChrome is a comprehensive
solution for ultra-trace measurements of
hydrogen, methane, carbon monoxide,
carbon dioxide, nitrogen, argon and non-
methane hydrocarbon compounds in a
wide range of common background gases.
At its heart is the Plasma Emission
Detector (PED) sensor, developed by
Servomex, which offers significant
advantages over traditional Flame
Emission Detector (FID) and Reduction
Gas Detection (RGD) sensing technologies.
Using a Direct Analysis Methodology, the
NanoChrome removes the doubt associated
with FID and RGD measurements, and has
SERVOPRO NanoChrome OVERVIEW
ultra-trace impurities
P06
WE CAN BUILD YOUR ANALYZER INTO A COMPLETE GAS ANALYSIS SYSTEM
benefits for performance, safety, stability
and ongoing costs. Advanced signal
recovery, using Servomex’s patented
ProPeak filtering, delivers highly sensitive,
selective and reliable measurements.
This industry-leading accuracy ensures
maximized process uptime.
Neither a methanizer nor a flammable fuel
gas are required, so there are appreciable
cost benefits for the customer.
General Gas (G-Gas) used in a
semiconductor fab before the main
purifier, requires a Lower Detection Limit
(LDL) of around 10 parts per billion (ppb),
which can be achieved with a FID sensor.
However, the Pure Gas (P-Gas) used after the
purifier stage has much more demanding
requirements, with a LDL of 1ppb or less.
The NanoChrome offers the most stable
P-Gas analysis on the market, delivering
BACKGROUND GASES
SERVOPRO
NanoChrome
a sub-ppb measurement of the
contaminant gases and hydrocarbons
that can be present at ultra-trace levels in
semiconductor manufacture.
Comprehensive digital communication
protocols and access via a network or web
browser facilitate flexible remote device
interaction. In addition, updated software
ensures increased security and stability, using
a robust, Windows 10 operating system.
A large, clear display screen makes the
NanoChrome easy to operate, while
maintenance requirements are simple.
The non-depleting sensor and intelligent
software extends the interval between
calibrations, considerably reducing ongoing
costs across the life of the product.
A 19” rack-mountable analyzer, the
NanoChrome can be easily installed
into an existing rack system or cabinet,
or integrated into one of Servomex’s
Continuous Quality Control or Multi-gas
Monitoring Systems.
The NanoChrome can be combined with
the DF-500 ultra-trace oxygen analyzer
range and DF-700 moisture analyzer range
for a comprehensive, reliable UHP gas
analysis solution for the semiconductor
industry, all from a single supplier.
See pages 10 & 11 to learn more.
An experienced Servomex service technician can ensure high performance from start-up
ENSURE A RELIABLE MEASUREMENT FROM START-UP
While simple to operate, the NanoChrome is a complex device. Servomex highly
Find out more about service
recommends the analyzer is commissioned by one of our experienced service
technicians to ensure a reliable measurement from start-up. The technician will also support and commissioning:
provide hands-on training so that users can feel confident operating the analyzer. servomex.expert/service
We also provide lifetime service support for your product.
Watch our new NanoChrome product video:
servomex.expert/video-nanochrome
P07
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SERVOMEX
TECHNOLOGY FOCUS
PLASMA SENSING – FOR STABLE
MEASUREMENT OF UHP GASES
In the field of Gas Chromatography,
many sensors are available that cover
a broad range of measurements. Each
sensor has advantages and drawbacks,
so a solid understanding of the different
technologies is important.
Thermal Conductivity Detector (TCD) and
Flame Ionization Detector (FID) sensors
are long-established and are the most
widely used measurement technologies.
However, a more recent technological
development has surpassed their
performance, especially when ultra-trace
level measurement is required.
FID technology is commonly used for
hydrocarbons analysis, being relatively
simple to use and offering a very sensitive,
selective and linear measurement.
However, this sensor type uses a flame
to burn hydrocarbons, which requires air
and hydrocarbon-free hydrogen fuel gas.
Increasingly stringent health and safety
requirements means concerns over using
flammable pure hydrogen have been
raised by users.
ADVANTAGES OF PLASMA EMISSION DETECTOR TECHNOLOGY
The Servomex PED sensor offers many
advantages over FID technology. It is very
sensitive and selective to any molecules
containing carbons (organic or inorganic),
being up to 100 times more sensitive than
a FID measurement, depending on the
carrier gas.
FID sensors are traditionally renowned
for sensitivity, with the best FID sensors
offering a detection limit between
10 parts per billion (ppb) and 20ppb
methane equivalent. This limitation is
due to the FID sensor requiring carrier
gas, fuel and air to operate, making the
sensor more prone to noise from low-
level hydrocarbon contamination from
those three potential sources.
Hydrocarbons contained in any of
these gases are ionized by the sensor,
P08
ENSURE A FULL LIFETIME OF PERFORMANCE
Challenged to find a safer alternative to
the FID, Servomex’s R&D team undertook
extensive research on Servomex’s
existing Plasma Emission Detector (PED)
technology, aiming to improve the
technology’s sensitivity and identify a
Gas Chromatography is used for a wide range of applications
causing drift and noise which limits
reliable performance for ultra-trace level
measurements.
This level of detection is usually acceptable
for General Gas (G-Gas) made before
the main purifier, which requires a lower
detection limit (LDL) of about 10ppb.
However, the Pure Gas (P-Gas), used inside
the fab after the purifier stage, has much
lower LDL requirements of 1ppb or less.
As the PED sensor requires only a carrier
gas, external contamination from air
and fuel is removed. While it is still very
important to have a clean carrier gas,
techniques exist to obtain a clean helium
or argon carrier gas with a total impurity
level below 1ppb. In addition, avoiding
the use of hydrogen and air reduces cost
configuration specific to hydrocarbons,
while avoiding the use of explosive gases.
Their intensive research led to the
development of a PED sensor optimized for
the trace-level analysis of hydrocarbons.
of ownership, as less gas is consumed and
fewer purification systems are required.
There are some limitations to using
PED technology. The sensitivity of the
measurement means it is suitable only for
trace analysis applications (<1000 parts per
million). Due to the nature of the plasma,
the sensor also exhibits some occasional
mild cross-interferences due to the sample
matrix, which requires more demanding
chromatographic methods – also
sometimes the case with FID technology.
Overall, however, the PED sensor
revolutionizes the analysis of
hydrocarbons, CO and CO2, improving
measurement sensitivity, successfully
addressing the safety concerns associated
with the use of hydrogen and reducing
the cost of ownership.
SERVOPRO NanoChrome -
POWERED BY PED
The PED sensor is at the heart of the
SERVOPRO NanoChrome analyzer,
designed to measure ultra-trace levels of
impurities in electronic gases.
Offering the most stable P-Gas analysis on
the market, even at the lowest levels, the
NanoChrome delivers a superb sub-ppb
measurement of the contaminant gases and
hydrocarbons that can be present at ultra-
trace levels in semiconductor manufacture.
Download the NanoChrome brochure today:
servomex.expert/nanochrome-brochure
Visit servomex.expert/service
PED SENSITIVITY TO
CH4, CO2 AND NMHC
WITH NanoChrome
A chromatogram obtained with a PED
sensor at 5ppb for CH4, CO2 and NMHC.
This chromatogram shows clear sensitivity
to hydrocarbons, as well as sensitivity
to CO2 achieved without the use of a
methanizer which converts CO and CO2
to CH4. While a methanizer is always
required to measure CO and CO2 with
a FID sensor, it is not required by the
PED – improving measurement reliability,
avoiding catalyst poisoning risks
associated with methanizers and creating
a further reduction in cost of ownership.
NEW PED SENSITIVITY
STEP CHANGE
A step response using a NanoChrome
analyzer at ppb level, again showing the
sensitivity achieved with this sensor. The
achievable limit of detection for CO, CO2,
CH4 and NMHC is below 1ppb.
P09
or contact your local business center today
SERVOMEX

APPLICATION FOCUS THE SERVOMEX UHP SOLUTION

A SINGLE-SUPPLIER
SOLUTION FOR UHP
GAS ANALYSIS
DF-500 Range
The DF-500 range Coulometric analyzers
deliver industry-leading, ultra-trace
oxygen measurements at parts-per-trillion
(ppt) levels. The DF-550 offers a lower
detection limit (LDL) of 200ppt, while
the DF-560 has the lowest available LDL
at 45ppt.
DF-700 Range
The DF-700 range provides the lowest
LDLs for moisture, using Tunable Diode
Laser sensing technology to reach an LDL
of 100ppt. Configured to suit a range of
applications, seven models are available
in the range, including the DF-760E
combined oxygen and moisture analyzer.
SERVOPRO NanoChrome
The SERVOPRO NanoChrome analyzer
provides sub-parts-per-billion
measurements for a range of ultra-trace
impurities. Its innovative Plasma Emission
Detector (PED) sensing technology does
not require the use of flammable gas,
delivering a safe, stable measurement.

UHP gases are essential Non-depleting, Broad detection range for Sensitive, non-depleting
factory-calibrated sensor ultra-trace measurements PED sensor
for semiconductor
wafer fabrication

Negates effects of Laser sensor is unaffected Patented ProPeak

upset-prone applications by gas contaminants filtering software
Monitors multiple Line lock system for Highly reliable,
background gases reliability and high accuracy ultra-trace measurements

INTUITIVE GAS SOFTWARE

Servomex offers an expertly designed
holistic systems solution for the analysis
and quality control of UHP gases. The
brain of this system is the Intuitive Gas
Software (IGS), a modular Windows

FIXED RACK SYSTEM PORTABLE CART SYSTEM INTUITIVE GAS SOFTWARE

10-based package enabling real-time
monitoring and reporting.

Ultra-high-purity (UHP) gases play an
essential role in semiconductor
wafer fabrication.
Microscopic and sub-microscopic
particulates, and vapor phase impurities
below 100 parts per trillion by volume
(pptv), can disrupt and react within the
fabrication processes, creating wafer
defects and leading to costly scrap and
waste product.
A high-purity, electronic-grade substrate
(usually silicon) must be between 9N and
11N (99.9999999% to 99.999999999%)
purity. For example, 9N purity silicon
can only have impurities totaling one
part per billion (ppb) at most. To ensure
gases remain free of contamination,
semiconductor manufacturers employ
many resources, including strict gas
supplier specifications, multiple gas
purification techniques, real-time
continuous gas purity monitoring,
and post-process inspection, all aimed
at delivering ultra-pure gases to the
manufacturing process.
Servomex provides an integrated, reliable
solution for these UHP gas analysis
measurements, seamlessly combining
industry-leading technology into a
comprehensive system that reaches the
lowest available detection limits.
The DF-500 and DF-700 series of analyzers
provide accurate, ultra-trace oxygen and
moisture measurements, while the remaining
impurities can be monitored by the versatile,
reliable SERVOPRO NanoChrome.
Developed to meet
These analyzers can be easily integrated customer requirements
into a fixed rack or portable cart system,
providing a modular, scalable Continuous Can monitor a process
Quality Control (CQC) infrastructure for
gas distribution systems.
continuously or on demand
Servomex’s Intuitive Gas Software Allows multiple operators
to log in at the same time
(IGS) provides full control, creating a
unique, single-supplier solution that can
continuously monitor process gases prior
to entering the wafer manufacturing
process, measuring every impurity present.
Fully supported by Servomex’s global
Service Network, this measurement and
Watch our new total UHP solution video to learn more:
monitoring system delivers a complete, servomex.expert/video-totaluhp
high-performance, cost-effective solution
for UHP gas analysis.

P10 P11
WE CAN BUILD YOUR ANALYZER INTO A COMPLETE GAS ANALYSIS SYSTEM Visit servomex.expert/systems or contact your local business center today
SERVICE FOCUS SERVOMEX
COMMISSIONING
OPTIMUM PERFORMANCE FROM DAY ONE PRODUCT GUIDE
O U R I N D U S T R Y- L E A D I N G G A S A N A LY Z E R R A N G E A N D
SYSTEMS, MATCHED TO YOUR INDUSTRY REQUIREMENTS

FIND YOUR PRODUCT NOW

HOW TO GUIDE
ENSURING YOU GET RELIABLE PERFORMANCE FROM
YOUR Chroma OR NanoChrome
YOU RECEIVE GAS MEASURES
Fast, seamless
It is essential to correctly install and
configure a gas analyzer to ensure it
delivers the expected performance from
with a fast, seamless and comprehensive
service that ensures correct analyzer
operation. They will assess installation
commissioning service O2 %
PERCENT
Trained Servomex engineers
the outset, meeting safety, compliance suitability, as well as commission the OXYGEN
COMBUSTION
and operational needs. analytical equipment to perform safely, Ensures optimum performance
Commissioning is the process of making
accurately and reliably.
Qualifies analyzers for six
CO
certain that systems and components are This delivers optimum performance and
designed, installed, tested, operated, and reliability from your Chroma or NanoChrome, months of additional warranty CARBON
MONOXIDE PROCESS CONTROL
maintained according to requirements. along with peace of mind that operational
The Chroma and NanoChrome are complex processes are operating correctly.
devices making a highly sensitive Gas
A Servomex engineer will provide a fully
CO2
Chromatography measurement, so it is critical
customized commissioning program CARBON DIOXIDE
that they are set up properly from the start. SAFETY
that meets compliance and operational
Commissioning activities such as optimizing requirements. They will then hand over SENSING TECHNOLOGY
valve timing, peak windows and carrier control to your technicians with a face-to-
gas consumption are crucial to ensuring face training session.
the Chroma and NanoChrome operate
In addition, Commissioning qualifies your
efficiently and cost-effectively from
Chroma or NanoChrome analyzer for
day one. In addition, the likelihood of
an additional 6-month warranty period.
downtime throughout the initial days of
Should you experience any analyzer
operation is significantly reduced.
failures during the six-month warranty
Servomex’s highly trained commissioning period, an engineer will attend the site to Find out how to get the
engineers will support your installation investigate and repair the issue.
analyzer performance you
expect from the outset:
Analyzers can be protected for a whole two years by purchasing a Health Check with
the Commissioning package. Servomex will validate the analyzer’s performance after
servomex.expert/
one year of installation and provide the customer with a further 12-month warranty. service-commissioning POWER GENERATION HYDROCARBON SPECIALIST METALS & MINING INDUSTRIAL GASES
PROCESSING APPLICATIONS

P12 P13
 S E R V O T O U G H Oxy 1800 SAFE AREA S E R V O T O U G H SpectraScan 2400 HAZARDOUS AREA

ACCURATE AND STABLE FEATURES AND BENEFITS GAS MEASURES APPLICATION REVOLUTIONARY INLINE FEATURES AND BENEFITS GAS MEASURES APPLICATION

%
SAFE AREA O2 ANALYZER
%
Internal/external use REAL-TIME ANALYSIS OF North American Cat 1, Div 2 ATEX Cat 3
CO
Designed to reliably measure up to 100% O2 in
many industrial applications, the Oxy 1800 is a
(IP66/NEMA 4X rated)
Special version for solvent-bearing
O2 PERCENT
HYDROCARBON
COMPONENTS C1-C6
IECEx Zone 2
Tunable band-pass filter enables CARBON MONOXIDE PERCENT
stable, accurate and highly specific O2 analyzer samples A real-time optical analyzer utilizing the simultaneous scanning of selected
for safe area use.
Range of alarm outputs aids integration
with other systems
OXYGEN PROCESS
CONTROL
Precisive field-proven optical bench, the
SpectraScan 2400 delivers a breakthrough
wavelength bands for gases including
methane, ethane, propane and
CO2 CV PROCESS
CONTROL
CALORIFIC VALUE
capability in the continuous analysis of light iso-butane CARBON DIOXIDE
hydrocarbons C1-C6.
Unique tunable filter process with Infrared
APPLICATIONS photometer technology delivers industry- C1-C6
leading interference compensation
Waste water treatment SAFETY QUALITY
Food storage H2S
APPLICATIONS
Marine inerting applications HYDROGEN SULFIDE
BTU/Wobbe content measurement
Inert blanketing SENSING TECHNOLOGY SENSING TECHNOLOGY
Gas turbine, engines, fuel cells
Flare stack monitoring

S E R V O T O U G H Oxy 1900 HAZARDOUS AREA S E R V O T O U G H SpectraExact 2500 HAZARDOUS AREA

AWARD-WINNING FEATURES AND BENEFITS GAS MEASURES APPLICATION RUGGED PHOTOMETRIC GAS FEATURES AND BENEFITS GAS MEASURES APPLICATION
PARAMAGNETIC DIGITAL O2 ANALYZER FOR DEMANDING
% %
Can be used in Safe Area to Zone 1/Div 1 IECEx and North American hazardous
ANALYZER DESIGNED FOR
HAZARDOUS AREA USE
Offering industry-standard features alongside
hazard-rated locations
Heated sample cell allowing simplified
sample system requirements
O2 PERCENT
PROCESS APPLICATIONS
Servomex’s iconic industry-leading Photometric
analyzer delivers flexible single and multi-
area approvals
Easy integration with DCS – from 4-20mA
to Modbus TCP
?
TOXIC
PERCENT

revolutionary, value-added options, the Oxy

Unique Servomex Flowcube flow sensor OXYGEN PROCESS component gas analysis capability for corrosive,
Sample cell and electronics segregated – for ppm PROCESS

?
1900 O2 gas analyzer sets new standards of CONTROL toxic and flammable sample streams. The CONTROL
technology for improved safety SpectraExact 2500’s reliable, accurate and easy maintenance and safe operation FLAMMABLE TRACE
flexibility, stability and reliability from a single,
cost-effective unit. SIL 2 compliant stable real-time online process analysis makes
it ideal for a range of process, combustion and
emissions gas analysis applications. APPLICATIONS
APPLICATIONS
Process control
SAFETY
Water in EDC/solvents
Ethylene production
?
CORROSIVE

Safety-critical oxidation, such as ethylene TDI production

oxide and propylene oxide purity
SENSING TECHNOLOGY Chlorine production SENSING TECHNOLOGY
Flare stack analysis
Vapor recovery

S E R V O T O U G H OxyExact 2200 HAZARDOUS AREA S E R V O T O U G H FluegasExact 2700 HAZARDOUS AREA

HIGH-SPEC PROCESS O2 FEATURES AND BENEFITS GAS MEASURES APPLICATION ADVANCED FLUE GAS ANALYZER FEATURES AND BENEFITS GAS MEASURES APPLICATION
ANALYZER OFFERS SAFE OR FOR HIGH-TEMPERATURE
% %
Zone 1 certified to ATEX Cat 2, IECEx and ATEX Cat. 3, IECEx Zone 2 & North America
MEASUREMENT OF O2
HAZARDOUS AREA CONTROL
WITH UP TO SIX TRANSMITTERS
FM/CSA Class 1 Div 1
Three enclosure systems allow sampling of
O2 PERCENT
AND COMBUSTIBLES
Class I, Div 2
Unique Flowcube flow sensor technology
O2 PERCENT
The OxyExact 2200 high-specification O2 any flammable gas up to 100% O2 and Designed to measure O2 and COe in flue enables positive flow conditions to be
analyzer offers an unrivaled combination
of precision, flexibility and performance for
pressures of up to 40psi OXYGEN PROCESS
CONTROL
gases for improved combustion efficiency and
reduced emissions, the FluegasExact 2700
validated OXYGEN ppm COMBUSTION

High-temperature version eliminates the Sulfur-resistant combustibles sensor enables TRACE

optimum process and safety control. gas analyzer is designed to suit the most
The OxyExact can be configured with a safe
or hazardous area control unit with up to
need to condense hot sample prior to
analysis
demanding needs of combustion efficiency
applications in the power generation and
sensor to operate at elevated sulfur levels
Close-coupled extractive measurement
COe
six transmitters. SIL 2 compliant process industries. principle
COMBUSTIBLES PROCESS
SAFETY CONTROL

APPLICATIONS APPLICATIONS
Oxidation control reactions Process heaters

EO, PTA and EDC manufacturing SENSING TECHNOLOGY Utility boilers SENSING TECHNOLOGY
Catalyst regeneration Thermal crackers

Solvent recovery Crematoria and incinerators

P14 P15
WE CAN BUILD YOUR ANALYZER INTO A COMPLETE GAS ANALYSIS SYSTEM Visit servomex.expert/systems or contact your local business center today
 S E R V O T O U G H Laser 3 Plus Ammonia HAZARDOUS AREA S E R V O T O U G H DF-140E HAZARDOUS AREA

WORLD-LEADING NH3 FEATURES AND BENEFITS GAS MEASURES APPLICATION RELIABLE RESULTS IN A TESTING FEATURES AND BENEFITS GAS MEASURES APPLICATION
MEASUREMENT, OPTIMIZED RANGE OF ENVIRONMENTS
FOR AMMONIA SLIP DeNOx
High measurement reliability utilizing
ppm Long-term reliability and stability with
ppm
APPLICATIONS
Servomex’s own line lock cuvette technology
ATEX, IECEx and North American hazardous
NH3 TRACE
The DF-140E allows for reliable oxygen
measurement in a wide variety of
minimal maintenance
Durability – can be used in Class 1,
O2 TRACE

This Tunable Diode Laser (TDL) analyzer area approvals environments, including outdoors and in Div 1 or 2 areas
specifically optimized for ammonia slip explosive environments with a NEMA 7 remote
AMMONIA PROCESS OXYGEN PROCESS
A compact analyzer specifically optimized for sensor enclosure. Using the revolutionary STAB-EL option allows for accurate
measurement provides all the benefits of CONTROL CONTROL
the fast, accurate and responsive DeNOx measurement in the presence of acid gases
Servomex’s TDL technology in a compact, light non-depleting E-Sensor, the DF-140E delivers
measurement of NH3 reliable readings without frequent recalibration
unit, offering unparalleled installation flexibility
plus cost and performance benefits. Ideal for slip ammonia application on power and periodic sensor replacement.
plants and fired heaters APPLICATIONS
Reactor process control
EMISSIONS QUALITY
Pressure swing absorber nitrogen skids
APPLICATIONS
Process heaters Blanketing and inerting

Incinerators SENSING TECHNOLOGY SENSING TECHNOLOGY

Power stations
Furnaces

S E R V O T O U G H Laser 3 Plus Combustion HAZARDOUS AREA S E R V O T O U G H DF-320E HAZARDOUS AREA

THE REVOLUTIONARY COMPACT FEATURES AND BENEFITS GAS MEASURES APPLICATION HIGH-RELIABILITY TRACE AND FEATURES AND BENEFITS GAS MEASURES APPLICATION

%
COMBUSTION ANALYZER PERCENT O2 MEASUREMENTS IN
OPTIMIZED FOR CO, O2, OR
High safety integrity utilizing Servomex’s own
O2 HAZARDOUS AREA LOCATIONS
For use in Class 1/Div 2
ppb
CO + CH4 MEASUREMENTS
line lock cuvette technology
Compact size means quick and easy PERCENT Designed for use in harsh and hazardous
Microprocessor-driven for easy configuration
and maintenance
O2 ULTRA TRACE

Containing all the benefits of Servomex’s TDL

technology in a light, compact unit, with
unmatched installation flexibility plus cost and
performance benefits, this analyzer is optimized
for fast, accurate and responsive measurements
installation by one person with
on-board display negating the need for
OXYGEN
ppm PROCESS
areas, the DF-320E uses Servomex’s unique,
non-depleting Coulometric sensor technology Coulometric sensor delivers accurate results ppm PROCESS
with no sensor drifting, false low readings, OXYGEN
CONTROL to give highly stable O2 measurements, making TRACE CONTROL
laptop configuration
ATEX, IECEx and North American hazardous
CO TRACE
it ideal for applications including hydrogen,
propene and polyethylene production, oil
or frequent calibration requirements

in combustion and process control, making it a area approvals. Approved for process refining and petrochemical process monitoring.
must for safety applications. Zone 2. SIL 2 assessed and CE marked
CARBON
MONOXIDE APPLICATIONS
Optimized for combustion processes Hydrogen production
COMBUSTION QUALITY
CO+CH4 Polypropylene production

APPLICATIONS Polyethylene production

CARBON
Process heaters MONOXIDE Oil refining
+ SENSING TECHNOLOGY
Incinerators METHANE Petrochemical applications
Power stations SENSING TECHNOLOGY
Furnaces

S E R V O T O U G H Laser 3 Plus Process HAZARDOUS AREA S E R V O T O U G H DF-340E HAZARDOUS AREA

THE WORLD’S SMALLEST TDL FEATURES AND BENEFITS GAS MEASURES APPLICATION HIGH-SENSITIVITY TRACE/ FEATURES AND BENEFITS GAS MEASURES APPLICATION
GAS ANALYZER, OPTIMIZED FOR PERCENT COULOMETRIC O2
High safety integrity utilizing Servomex’s
ppb
%
ATEX II and IECEx Certified
PROCESS O2 MEASUREMENTS own line lock cuvette technology ANALYZER CERTIFIED FOR
All the benefits of Servomex’s TDL technology
ATEX, IECEx and North American hazardous
area approvals. Approved for process
O2 HAZARDOUS AREA USE
Class 1/Div 2 Groups A,B,C and D
certified
O2 ULTRA TRACE

in a small, light unit offering unparalleled

installation flexibility plus cost and performance
benefits. Optimized for the fast, accurate and
responsive measurement of process oxygen in
hot or hazardous conditions.
Zone 2. SIL 2 assessed and CE marked
PERCENT
Designed for heated or external locations, the
DF-340E remains stable in changing sample and
Suitable for outdoor installation, with NEMA ppm PROCESS
OXYGEN PROCESS 4-rated sensor enclosure options OXYGEN
Quick and easy installation by one person TRACE CONTROL
CONTROL flow rate conditions, and is designed to provide
with on-board display negating the need for Multiple background gas stream monitoring,
measurements of trace or percent level O2 in
laptop configuration with simplified ongoing maintenance
pure gas streams and multi-gas backgrounds. It
Suitable for a range of combustion and is ideal for upset-prone conditions. requirements
process control applications

QUALITY
COMBUSTION APPLICATIONS
APPLICATIONS
Oxidation control Pressure swing absorber N2 skids
Inerting Reactor process control
Safety monitoring SENSING TECHNOLOGY Blanketing and inerting SENSING TECHNOLOGY
Flare gas monitoring
Oil refinery monitoring
Combustion control (<500°C)
Coal to chemical Petrochemical process monitoring

P16 P17
ENSURE A FULL LIFETIME OF PERFORMANCE Visit servomex.expert/service or contact your local business center today
 H2scan HAZARDOUS AREA S E R V O P R O MonoExact DF150E SAFE AREA

EXPLOSION-PROOF IN-LINE FEATURES AND BENEFITS GAS MEASURES APPLICATION TOUCHSCREEN PPM OXYGEN FEATURES AND BENEFITS GAS MEASURES APPLICATION
HYDROGEN PROCESS ANALYZER, ANALYZER FOR GENERAL
% ppm
UL Class 1, Div 1, Groups B, C, D. Updated digital sensor includes new
USING A SOLID-STATE, NON- INDUSTRIAL APPLICATIONS
O2
ATEX & CSA certifications operation and maintenance features that
CONSUMABLE SENSOR Easily configurable alongside SERVOTOUGH H2 PERCENT
Using a new and improved digital touchscreen reduce cost of ownership TRACE

CONFIGURED TO OPERATE IN
PROCESS GAS STREAMS
SpectraScan 2400
Simple system integration HYDROGEN PROCESS
with icon-driven guided user interface (GUI)
for easier operation, the MonoExact DF150E
Back-compatible with DF-150E platform,
including hardware wiring inputs and OXYGEN
ppb PROCESS
CONTROL combines the reliability of Servomex’s tried gas inlets ULTRA TRACE CONTROL
The H2scan hydrogen process analyzer and tested Coulometric oxygen sensor with
features thin film technology that provides a user-friendly package. Servomex proprietary software makes
a direct hydrogen measurement that is not APPLICATIONS reporting and parameter control simple
cross-sensitive to other gases.
Refinery
Petrochemical QUALITY APPLICATIONS QUALITY

Manufacturing Glove boxes

Industrial gas supply Heat treating

SENSING TECHNOLOGY Solder reflow ovens SENSING TECHNOLOGY
Industrial gas production
H2scan thin film

S E R V O M E X AquaXact 1688 SAFE AREA S E R V O P R O MonoExact DF310E SAFE AREA

A FAST, ACCURATE AND FEATURES AND BENEFITS GAS MEASURES APPLICATION NEXT-GENERATION DIGITAL FEATURES AND BENEFITS GAS MEASURES APPLICATION
RESILIENT MOISTURE OXYGEN ANALYZER DESIGNED
%
Functions as a standalone 4-20 mA Advanced touchscreen GUI for intuitive
MEASUREMENT SOLUTION DEW FOR INDUSTRIAL GAS
The AquaXact 1688 is a rugged ultra-thin film
transmitter or remotely interfaces with our
digital controller, MonoExact DF310E and H2O POINT APPLICATIONS
setup and operation
Back-compatible with the DF-310E
O2 PERCENT
Aluminum Oxide moisture sensor that enables MultiExact 4100
Designed specifically for accurate measurements platform's wiring inputs and gas connections
the measurement of moisture in a wide variety
of gas phase process applications, such as
NIST-traceable field-replaceable sensor WATER ppmv PROCESS
CONTROL
of oxygen in industrial gas applications, the
Paramagnetic sensor capable for % level O2 OXYGEN ppm PROCESS
element, for hassle-free recalibration MonoExact DF310E is a next-generation digital CONTROL
glove boxes, air separation units, natural gas measurements TRACE
Stainless steel, weatherproof casing (Class 1 oxygen analyzer that combines precise,
processing, transportation, and instrument trace-level measurement with a new icon-driven AquaXact Aluminum Oxide sensor is
air, with no calibration required after sensor

Div 2 in 2019) enables operation in ambient
temperatures ranging from -10oC to +70oC guided user interface (GUI) and advanced digital optional for simultaneous O2 and H2O H2O ppb
replacement or dry-out. communications. monitoring ULTRA TRACE
RS232, RS485, Modbus, PROFIBUS, and WATER QUALITY
APPLICATIONS Ethernet Modbus TCP/IP
Glove boxes
Solder reflow ovens APPLICATIONS
SENSING TECHNOLOGY SENSING TECHNOLOGY
Compressed air generation Air separation units
Ethylene production ALUMINUM OXIDE Medical/industrial gases
Specialty gas blending

S E R V O M E X AquaXact 1688 Controller SAFE AREA S E R V O P R O 4200/4210 SAFE AREA

DIGITAL CONTROLLER PLATFORM FEATURES AND BENEFITS GAS MEASURES APPLICATION GAS ANALYZER SUITABLE FOR FEATURES AND BENEFITS GAS MEASURES APPLICATION

%
FOR THE AQUAXACT 1688 Dew point and ppmv H2O measurements FLAMMABLE GAS MIXTURES Meets the requirements of
DEW
Built specifically to work in harmony
with the AquaXact 1688 ultra-thin film
Dense Al2O3 pore structure and geometry
provides the AquaXact sensor with greater
H2O POINT
The 4200/4210 multi-gas analyzer is
designed to monitor flammable gas samples
EN 61010-1:2010 and EN 61326-1:2013
Measures up to four gases
MULTIPLE
PERCENT
Aluminum Oxide moisture transmitter, this stability and reduced drift over 12 months including H2/CO, ‘HyCO’ or ‘Syngas’ mixtures simultaneously
digital controller provides a high-clarity
color touchscreen display, alarms, relays and Compact footprint for easy integration into WATER ppmv PROCESS
CONTROL
for trace level contaminants and percent level
components. The 4200/4210 offers oxygen RS232/RS485 and Modbus ppm PROCESS
CONTROL
advanced communication protocols, and allows your system control using Servomex’s unique Paramagnetic communications TRACE
easy sensor tip replacement in the field. Advanced digital communications including cell, trace level measurement of CO, CO2, N2O
Modbus, Ethernet Modbus TCP/IP and and CH4 and percent levels of CO, CO2, CH4
PROFIBUS using Photometric sensor technology. APPLICATIONS
Product quality validation in QUALITY
hydrogen plants
APPLICATIONS SENSING TECHNOLOGY
HyCO process control
Air separation units
Bottling/filling plants producing
Glove boxes SENSING TECHNOLOGY flammable gas blends
Instrument air units
ALUMINUM OXIDE
Refining gases

P18 P19
WE CAN BUILD YOUR ANALYZER INTO A COMPLETE GAS ANALYSIS SYSTEM Visit servomex.expert/systems or contact your local business center today
S E R V O P R O 4900 Multigas SAFE AREA S E R V O P R O Plasma SAFE AREA

GAS MEASURES APPLICATION RELIABLE MONITORING OF FEATURES AND BENEFITS GAS MEASURES APPLICATION
AN ADVANCED DIGITAL FEATURES AND BENEFITS

%
MULTI-GAS CEMS ANALYZER NITROGEN IN ARGON AND
A comprehensive solution for CEMS analysis
HELIUM, OPTIMIZED FOR AIR
Electrical safety to IEC 61010-1: Ed 3. In
ppm
Specifically designed for Continuous
Emissions Monitoring (CEMS) of flue gas, the
of multiple flue gas components
Low maintenance and cost of ownership
MULTIPLE
PERCENT SEPARATION UNIT (ASU) PLANT
compliance with Low Voltage, EMC and
applicable Directives N2 TRACE

SERVOPRO 4900 Multigas provides up to four OPERATIONS Wide measurement range – 0-1ppm,
simultaneous gas stream measurements. It
combines Servomex’s leading-edge sensing
Advanced digital communications including
Ethernet, Modbus TCP/IP and PROFIBUS ppm EMISSIONS
Specifically designed for the continuous 0-10ppm, 0-100ppm (higher on request) NITROGEN QUALITY
TRACE monitoring of N2 in Ar or He or both, the Electronic flow control system for low flow
technologies with a modern digital platform Automated calibration/validation routines
Plasma’s unique plasma emission detector consumption and reading stability
for next-generation performance. triggered by internal timer or external
triggers provides an accurate, highly stable and reliable
measurement ideal for the requirements of
Completely updated icon-driven software ASU plant operators.
interface for easy set-up and operation APPLICATIONS
Argon production
APPLICATIONS SENSING TECHNOLOGY
Track loading
Utility boilers
Pure gas bottling
Chemical incinerators SENSING TECHNOLOGY
Specialty gas laboratories
Crematoria
Mobile labs

S E R V O P R O FID SAFE AREA S E R V O P R O MultiExact 4100 SAFE AREA

TRACE HYDROCARBON FEATURES AND BENEFITS GAS MEASURES APPLICATION A SOPHISTICATED, NEXT- FEATURES AND BENEFITS GAS MEASURES APPLICATION

%
ANALYZER IDEAL FOR AIR GENERATION MULTI-GAS
SEPARATION UNITS (ASU)
Electrical safety to IEC 61010-1. In
compliance with Low Voltage, EMC and
ppm ANALYZER PROVIDING A HIGHLY
Comprehensive solution for industrial
and medical gas manufacture and for
SAFETY AND QUALITY CONTROL applicable Directives THC TRACE
ADAPTABLE ANALYSIS SOLUTION pharmacopeia applications
MULTIPLE
PERCENT
APPLICATIONS Excellent output resolution over three The MultiExact 4100 is a high-performance Integrated support for the AquaXact 1688
A Flame Ionization Detector analyzer designed
operating ranges TOTAL
HYDROCARBONS
SAFETY multi-gas analyzer designed to provide up to Aluminum Oxide moisture transmitter ppm PROCESS
CONTROL
four simultaneous gas stream measurements TRACE
to assure safe operation for cryogenic ASU, Electronic flow controllers for air, Uses ultra-stable, non-depleting digital
including: O2 (trace, control, and purity), CO2,
the FID ensures the level of Total Hydrocarbons fuel and sample for no dependency to sensing technologies that help extend
CO, N2O, CH4 (trace) and H2O.
(THC) is maintained below flammable limits, as atmospheric pressure variations and inlet maintenance intervals
well as providing quality control in pure O2, N2, pressure variation
Ar, air, He and CO2. QUALITY QUALITY
APPLICATIONS SENSING TECHNOLOGY
APPLICATIONS
Product purity on air separation plant
Cryogenic air separation
Process control on air separation plant
Process control
SENSING TECHNOLOGY Monitor trace CO2 on scrubbed air inlet ALUMINUM OXIDE
Food gas manufacture
to air separation process
FLAME IONIZATION
Product validation DETECTOR
Validation of medical O2, N2 and air

S E R V O P R O Chroma SAFE AREA S E R V O P R O MultiExact 5400 SAFE AREA

HIGHLY VERSATILE TRACE FEATURES AND BENEFITS GAS MEASURES APPLICATION DIGITAL MULTI-GAS ANALYZER, FEATURES AND BENEFITS GAS MEASURES APPLICATION
OPTIMIZED FOR WIDE RANGE
%
GAS ANALYZER PLATFORM
%
Fully automated – tune to the application IEC 61010-1. European Pharmacopeia
CONFIGURABLE TO A WIDE – system for unique simplicity of use OF AIR SEPARATION UNIT (ASU) compliant. US Pharmacopeia compliant (O2).
MULTIPLE In compliance with Low Voltage, EMC and MULTIPLE
RANGE OF APPLICATIONS Standalone systems requires no third-party MEASUREMENTS PERCENT
PERCENT applicable Directives
Offering a unique, non-depleting plasma software or computer to operate Combining industry-leading performance and a
emission detector, the Chroma analyzer is one
For THC measurements the PlasmaHC ppm QUALITY range of new and enhanced functions as standard, Measures trace level with accuracy
and reliability
ppm PROCESS
CONTROL
of the most versatile gas analyzers for trace TRACE
the MultiExact 5400 offers air separation plants
system requires no FID and therefore no H2 TRACE
gas measurement available. Most applications a multi-gas analyzer specifically optimized to Options include digital communication
will be satisfied by a single 4U rack analyzer
fuel gas
ppb industry requirements – with industry leading,
non-depleting technologies for ultra-stable,


options, an integrated valve block function
and unique Servomex Flowcube flow
configuration, making the Chroma a compact, ULTRA TRACE
cost-effective solution for continuous process accurate and selective measurements. sensor technology
control or quality monitoring. APPLICATIONS PROCESS
CONTROL QUALITY
Medical gas production
Air separation plants
SENSING TECHNOLOGY APPLICATIONS
Product purity on air separation plant
Cryogenic truck loading station
Process control on air separation plant SENSING TECHNOLOGY
High purity gas production Validation of medical O2, N2 and air
FLAME IONIZATION
DETECTOR

P20 P21
ENSURE A FULL LIFETIME OF PERFORMANCE Visit servomex.expert/service or contact your local business center today
S E R V O P R O NanoChrome SAFE AREA S E R V O P R O HFID SAFE AREA

SUB-PPB TRACE MEASUREMENT FEATURES AND BENEFITS GAS MEASURES APPLICATION HIGH-PERFORMANCE FAST FEATURES AND BENEFITS GAS MEASURES APPLICATION
OF H2, CH4, CO, CO2, N2, Ar ANALYSIS USING HEATED FID
AND NMHC FOR THE
In compliance with Low Voltage, EMC and
ppb Four user-definable measurement ranges, ppm
applicable Directives
MULTIPLE
Using a highly sensitive heated Flame Ionization reconfigurable in the field THC TRACE
SEMICONDUCTOR INDUSTRY New PED Sensor technology enables sub-ppb
ULTRA TRACE Detector (HFID) for measuring volatile High-accuracy, gas-selective FID technology
hydrocarbon concentrations in industrial or
Incorporating the latest advances in gas
sensing technology and signal processing
measurements of H2, CH4, CO, CO2, N2, Ar
and NMHC
ppt QUALITY
vehicle emission applications, the HFID utilizes
for maximized uptime
Heated oven for maximum stability and
TOTAL
HYDROCARBONS PROCESS CONTROL

methodology, the NanoChrome revolutionizes ULTRA TRACE an internally heated oven set to 190oC to
Enables unique total Servomex solution for "hot/wet" sampling
maintain the sample gas above the dew point
ultra-trace purity measurements for the
UHP gas analysis of most hydrocarbons expected to be present, EPA Method 25A compliant CH4
semiconductor industry.
for optimum performance in total hydrocarbon EPA 1065/1066 and LD Euro 6, HD
METHANE
(THC) analysis. Can be equipped with a Euro V1 compliant EMISSIONS
APPLICATIONS non-methane cutter for additional methane
Heated FID detector at 190oC for the most
(CH4) and non-methane hydrocarbon (NMHC) accurate THC determination NMHC
Semiconductor production – quality
reporting.
control measurements
Semiconductor production – stationary
APPLICATIONS NON-METHANE
HYDROCARBONS
QUALITY
analytical systems Continuous emissions monitoring (CEM)
SENSING TECHNOLOGY SENSING TECHNOLOGY
VOC abatement
UHP gas production – quality control
measurements Scrubber efficiency FLAME IONIZATION
DETECTOR
Compliance monitoring and testing

S E R V O P R O NOx SAFE AREA G A S D E T E C T I O N OxyDetect SERVOMEX

CHEMILUMINESCENCE DETECTOR FEATURES AND BENEFITS GAS MEASURES APPLICATION NON-DEPLETING PARAMAGNETIC FEATURES AND BENEFITS GAS MEASURES APPLICATION

%
(CLD) ANALYZER FOR KEY O2 MONITOR DESIGNED FOR LIFE
High-dynamic-range NOx emissions
ppm IP66 (indoor use only)
EMISSIONS APPLICATIONS
INVOLVING ULTRA-LOW NO,
monitoring solution with a fast response
Non-depleting light-based measurement and
NO TRACE
SAFETY APPLICATIONS
Life safety monitor designed for safe area or
The most reliable O2 detector
on the market
O2 PERCENT
hazardous area environments, utilizing superior
NO2 AND NOx electronic flow control keeps costs low
NITRIC OXIDE performance of award-winning, non-depleting No more false readings or false alarms
PROCESS CONTROL OXYGEN SAFETY
Utilizing Chemiluminescence detection Heated version available for wet-to-dry Hummingbird Paramagnetic O2 sensing caused by depleting cell technologies
technology to measure NO or NO/NO2 /NOx conversion option technology.
concentrations in industrial gas and vehicle
Mobile Source emissions standard EPA
NO2 SIL 2 compliant
emission applications, the versatile SERVOPRO
NOx can be calibrated for four measurement 1065/1066 and LD Euro 6, HD Euro V1
ranges starting from ultra-low to high ppm and compliant
NITROGEN DIOXIDE
EMISSIONS APPLICATIONS
is easy to install and operate. Pharmaceutical plants
NOx Helium production and storage
APPLICATIONS
Continuous emissions monitoring (CEMS) NITROGEN OXIDES Semiconductor facilities
QUALITY
Scrubber efficiency SENSING TECHNOLOGY Laboratories and universities SENSING TECHNOLOGY
Turbine/generator feedback control
CHEMILUMINESCENCE
SCR/SNCR feedback control

S E R V O P R O SO2 SAFE AREA S E R V O F L E X Micro i.s. 5100 PORTABLES

INTRINSICALLY SAFE ANALYZER FEATURES AND BENEFITS GAS MEASURES APPLICATION

USES PROVEN PULSED UV FEATURES AND BENEFITS GAS MEASURES APPLICATION

%
FLUORESCENCE TECHNOLOGY MEASURES O2, CO OR CO2
TO DELIVER A PRECISE AND
Ultra-long-lasting UV light source
ppm Designed for the measurement of toxic and
Intrinsically safe design to ATEX and IEC
standards ensures safety operation in O2
RELIABLE MEASUREMENT OF
Removable flash memory stores up to
10 years of data
SO2 TRACE flammable gas samples, the intrinsically safe hazardous environments
PERCENT
Micro i.s. 5100 is a unique analyzer certified to
ULTRA-LOW SULFUR DIOXIDE IN
EMISSIONS AND AMBIENT AIR
Operation over wide temperature range SULFUR
ppb PROCESS CONTROL Zone 0 and Zone 1 and suitable for measuring
Ergonomic design ensures easy operation
on the move
OXYGEN
COMBUSTION
reduces cost of ownership DIOXIDE ULTRA TRACE percent levels of O2, CO and CO2.
For industrial applications that require ultra-low
emissions monitoring of sulfur dioxide, this
User selectable dual ranges with
Available in non-pump or pump versions
with optional sample conditioning kit
CO
auto-ranging
robust analyzer is designed to slot seamlessly CARBON
into rack systems, making it easy to integrate Easy maintenance procedures MONOXIDE PROCESS CONTROL
EMISSIONS
with existing emissions monitoring systems to APPLICATIONS
provide unrivaled performance.
APPLICATIONS
Hazardous area combustion optimization
CO2
Continuous emissions monitoring (CEMS) Refineries – catalytic cracker regeneration
CARBON DIOXIDE
QUALITY Process monitoring SAFETY
Ambient air monitoring
SENSING TECHNOLOGY SENSING TECHNOLOGY
Inerting applications

UV FLUORESCENCE

P22 P23
WE CAN BUILD YOUR ANALYZER INTO A COMPLETE GAS ANALYSIS SYSTEM Visit servomex.expert/systems or contact your local business center today
S E R V O F L E X MiniMP 5200 PORTABLES D E LTA F DF-500 Range HIGH PURITY

BENCHTOP ANALYZER FEATURES AND BENEFITS GAS MEASURES APPLICATION LEADING ULTRA-TRACE PPT FEATURES AND BENEFITS GAS MEASURES APPLICATION
OFFERING SINGLE OR DUAL O2 ANALYZER RANGE
% ppb
EN15267-3 (MCERTS V3.3, Annex F) makes The industry standard for the reliable
MEASUREMENTS OF O2 AND CO2
The only truly portable battery-powered gas
the MiniMP ideal for source testers that
require reference O2 analysis for CEMS O2 PERCENT
Verified by independent experts as measuring
O2 to the lowest ppt levels available, the
measurement of O2 in semiconductor
manufacture O2 ULTRA TRACE
verification DF-500 analyzer range delivers the premium
analyzer with MCERTS certification, the
MiniMP 5200 is designed to offer single or dual Li-ion battery system offers unique OXYGEN
EMISSIONS performance in ultra-trace O2 measurement.
Fast response and quick upset recovery
ensures ultimate performance OXYGEN
ppt QUALITY
measurement of O2 and CO2 by utilizing Consisting of the DF-550E NanoTrace and ULTRA TRACE
true portability
Servomex’s advanced Paramagnetic and Infrared DF-560E NanoTrace II, the NanoTrace series Options include flexible configurations and
sensing technologies.

Non-depleting sensor design ensures long
service with minimal calibration CO2
delivers exceptional O2 measurements at trace
and ultra-trace ppt levels.
hand-carry portable option ppm
TRACE
PROCESS CONTROL

CARBON DIOXIDE
APPLICATIONS
APPLICATIONS Continuous quality control monitoring
Laboratories and research
Inert gases control checks for electronics
Air separation and gas bottling plants QUALITY grade gases

Transfilling SENSING TECHNOLOGY Post purifier quality certification SENSING TECHNOLOGY

Combustion analysis Leak detection for electronics grade gases

S E R V O F L E X MiniHD 5200 PORTABLES D E LTA F DF-700 Range HIGH PURITY

PORTABLE GAS ANALYZER FOR FEATURES AND BENEFITS GAS MEASURES APPLICATION TUNABLE DIODE LASER FEATURES AND BENEFITS GAS MEASURES APPLICATION
(TDL) TRACE MOISTURE
MEASUREMENT OF COMMON ppm
%
Robust IP65 construction meets the Exceptional range from 100 ppt to 20 ppm
ANALYZER RANGE
GAS MIXTURES
Designed for use in field locations or light
demanding needs of field location analysis
O2 A sophisticated process moisture analyzer
moisture level readings depending on the model
Only true Laser Absorption Spectroscopy
H2O TRACE
Long life Li-ion rechargeable batteries PERCENT
industrial applications, the MiniHD 5200 portable
gas analyzer is a rugged, heavy duty analyzer
and range of sampling options ensure OXYGEN
COMBUSTION
range which offers users the comprehensive
solution for trace and ultra-trace moisture


technology in the market space which is
unaffected by gas contaminants that plague WATER
ppb QUALITY
ease of use
designed to accurately measure the levels of O2, measurement, the DF-700 series combines CRDS laser systems ULTRA TRACE

CO and CO2 within common gas mixtures. The

MiniHD 5200 utilizes Servomex’s non-depleting
Accurate measurement of O2, CO and CO2
levels with no background interference
Paramagnetic and Infrared sensors to give
dependable and accurate results.
APPLICATIONS
Physiology studies
Universities
CARBON DIOXIDE
Combustion optimization
Medical gas verification
CO the latest TDL Absorption Spectroscopy
technology, a robust measuring cell and TDLAS line lock technology keeps the laser on
ppt
a true baseline reference for highly accurate the moisture peak centroid measuring the
CARBON entirety of the moisture's mass under the ULTRA TRACE
MONOXIDE PROCESS CONTROL moisture measurement.
Voigt curve
CO2 APPLICATIONS
730: Quality control of HCl gas
740: Analysis of electronics-grade NH3 specialty gas
SAFETY
745: Inert gases leak detection for LED and LCD plants
SENSING TECHNOLOGY 745 SGMax: Specialty gas cylinder quality control SENSING TECHNOLOGY
749: HP bulk gases used in semiconductor applications
750: Bulk UHP gas CQC for semiconductor fabs
760: O2 and H2O monitoring in UHP bulk gases used
in semiconductor applications

S E R V O F L E X MiniFoodPack 5200 PORTABLES

SEE THE FULL PICTURE OF GAS ANALYSIS ONLINE
BENCHTOP ANALYZER FOR FEATURES AND BENEFITS GAS MEASURES APPLICATION

%
QUALITY CONTROL/CHECKS CE marked and in compliance with EEC, EMC Find out more about our analyzers,
IN MODIFIED ATMOSPHERE
PACKAGING


and WEEE Directives. UL approved and CE
marked 100-240V/43-70Hz AC power supply
O2 PERCENT
learn about our technologies, and see
inside our state-of-the-art manufacturing
A small sample volume portable benchtop Range of sampling accessories is available for facilities with our range of videos.
analyzer designed specifically for the checking QUALITY
taking measurement from rigid or flexible pack OXYGEN
and quality control of gas mixtures in Modified We have a growing lineup of short,
Atmosphere Packaging (MAP) used in the Rechargeable battery option enables complete informative videos showcasing the
food and pharmaceutical industries, the
MiniFoodPack 5200 enables single or dual
portability for flexible operation
CO2 benefits of our product range. You
can also discover what goes on behind
measurements for percent levels of O2 and CO2.
APPLICATIONS the scenes at our UK and US technical
CARBON DIOXIDE
centers, and take a tour of our systems
Modified Atmosphere Packaging (MAP) quality
engineering facility.
testing for food and beverage products

Modified Atmosphere Packaging (MAP) for
packaged pharmaceuticals
Watch all of these
Equilibrium Modified Atmosphere Packaging
SENSING TECHNOLOGY videos and more at:
(EMAP) fresh consumable produce testing servomex.expert/videos
Laboratory and research

P24 P25
ENSURE A FULL LIFETIME OF PERFORMANCE Visit servomex.expert/service or contact your local business center today
 GAS MEASUREMENT GUIDE WANT TO VIEW OUR PRODUCTS ONLINE? Visit servomex.com

SERVOTOUGH NH3 Ar CO CO2 He C1-C6 NMHC H2 HCl HF H2S CH4 NO NOx NO2 N2 N2O O2 C3H6 THC H2O SO2 KEY APPLICATIONS PAGE

Oxy 1800 % Waste water treatment Food storage Marine inerting applications Inert blanketing 14

Oxy 1900 % Process control Flare stack analysis Vapor recovery Safety-critical oxidation 14

OxyExact 2200 % Oxidation control reactions EO, PTA and EDC manufacturing Catalyst regeneration Solvent recovery 14

SpectraScan 2400 %CV %CV %CV %CV BTU/Wobbe content measurement Gas turbine, engines, fuel cells Flare stack monitoring 15

SpectraExact 2500 % %ppm %ppm % %ppm % %ppm %ppm % % % Water in EDC/solvents Ethylene production TDI production Chlorine production 15

FluegasExact 2700 ppm % Process heaters Utility boilers Thermal crackers Crematoria and incinerators 15

Laser 3 Plus Ammonia ppm Process heaters Incinerators Power stations Furnaces 16

Laser 3 Plus Combustion ppm % % Process heaters Incinerators Power stations Furnaces 16

Laser 3 Plus Process % Oxidation control Inerting Safety monitoring Flare gas monitoring Combustion control (<500°C) Coal to chemical 16

DF-140E ppm Reactor process control Pressure swing absorber nitrogen skids Blanketing and inerting 17

DF-320E ppm/b Hydrogen production Polypropylene production Polyethylene production Oil refining Petrochemical applications 17

DF-340E ppm/b Pressure swing absorber N2 skids Reactor process control Blanketing and inerting Petrochemical process monitoring 17

H2scan % Refinery Petrochemical Manufacturing Industrial gas supply 18

SERVOPRO NH3 Ar CO CO2 He C1-C6 NMHC H2 HCl HF H2S CH4 NO NOx NO2 N2 N2O O2 C3H6 THC H2O SO2 KEY APPLICATIONS PAGE

AquaXact 1688 ppmvdp Glove boxes Solder reflow ovens Compressed air generation Ethylene production 18

AquaXact 1688 Controller ppmvdp Glove boxes Solder reflow ovens Compressed air generation Ethylene production 18

MonoExact DF150E ppm/b Glove boxes Heat treating Solder reflow ovens Industrial gas production 19

MonoExact DF310E %ppm Air separation units Medical/industrial gases Specialty gas blending 19

4200/4210 %ppm %ppm %ppm ppm % Product quality validation in hydrogen plants HyCO process control Bottling/filling plants producing flammable gas blends 19

4900 Multigas %ppm % ppm ppm ppm % ppm Utility boilers Clinical waste incinerators Chemical incinerators Mobile labs 20

FID ppm Cryogenic air separation Process control Food gas manufacture Product validation 20

Chroma ppm/b ppm/b ppm/b ppm/b ppm ppm/b ppm/b %ppm/b ppm/b Medical gas production Air separation unit Cryogenic truck loading station High purity gas production 20

Plasma ppm Argon production Track loading Pure gas bottling Specialty gas laboratories 21

MultiExact 4100 % %ppm %ppm % ppm % ppm %ppm ppm Product purity on air separation unit Validation of medical O2, N2, air and He Process control on air separation unit 21

MultiExact 5400 %ppm Validation of medical O2, N2, and air Process control on air separation unit 21

NanoChrome ppb/t ppb/t ppb/t ppb/t ppb/t ppb/t ppb/t ppb/t Semiconductor production – Stationary analytical systems UHP gas production – Quality control measurements 22

NOx ppm ppm ppm Scrubber efficiency Turbine/generator feedback control SCR/SNCR feedback control 22

SO2 ppm Continuous emissions monitoring (CEMS) Ambient air monitoring 22

HFID ppm ppm ppm Compliance monitoring and testing VOC abatement Scrubber efficiency 23

GAS DETECTION NH3 Ar CO CO2 He C1-C6 NMHC H2 HCl HF H2S CH4 NO NOx NO2 N2 N2O O2 C3H6 THC H2O SO2 KEY APPLICATIONS PAGE

OxyDetect % Pharmaceutical plants Helium production and storage Semiconductor facilities Laboratories and universities 23

SERVOFLEX NH3 Ar CO CO2 He C1-C6 NMHC H2 HCl HF H2S CH4 NO NOx NO2 N2 N2O O2 C3H6 THC H2O SO2 KEY APPLICATIONS PAGE

Micro i.s. 5100 % % % Refineries – catalytic cracker regeneration Process monitoring Inerting applications 23

MiniMP 5200 % % Laboratories and research Air separation and gas bottling plants Transfilling Combustion analysis 24

MiniHD 5200 % % % Physiology studies Universities Combustion optimization Medical gas verification 24

MiniFoodPack 5200 % % Equilibrium Modified Atmosphere Packaging (EMAP) fresh consumable produce testing Laboratory and research 24

DELTA F NH3 Ar CO CO2 He C1-C6 NMHC H2 HCl HF H2S CH4 NO NOx NO2 N2 N2O O2 C3H6 THC H2O SO2 KEY APPLICATIONS PAGE

DF-500 Range ppb/b/t Continuous quality control monitoring Post purifier quality certification Leak detection for electronics grade gases 25

DF-700 Range ppb/b/t ppb/b/t Continuous quality control monitoring Bulk gas cylinder quality control Trace moisture analysis 25

MEASUREMENT TYPE: PERCENT/PARTS PER MILLION/PER BILLION/PER TRILLION/BY VOLUME/DEW POINT MEASUREMENT TYPE: PERCENT/PARTS PER MILLION/PER BILLION/PER TRILLION/BY VOLUME/DEW POINT
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