TEKNOLOGI RANGKAIAN TERINTEGRASI Reza Diharja, S.Si., M.T.

Pertemuan - 1
KONTRAK PERKULIAHAN
Kehadiran : 10 %
Tugas : 20 %
UTS : 30 %
UAS : 40%
REFERENSI
1. Sze, S.M., Lee, M.K., Semiconductor Devices : Physics and Technology. John Wiley
& Sons., 2010
2. May, Gary. S., Spanos, Costas. J., Fundamentals of Semiconductor Manufacturing
and Process Control. John Wiley & Sons. 2006
3. Mishra, Umesh.K., Singh, Jasprit., Semiconductor Device : Physics and Design.
Springer., 2008
4. http://www-inst.eecs.berkeley.edu/~ee130/sp03/lecture.html
5. http://ecee.colorado.edu/~bart/book/book/contents.htm
6. https://web.njit.edu/~rlopes/Mod2.1.pdf
HARI PENGGANTI KARENA LIBUR NASIONAL

Hari Libur & Tanggal Hari Pengganti & Tanggal

Rabu, 25 Maret 2020 Rabu, 1 Juli 2020
Jumat, 10 April 2020 Jumat, 3 Juli 2020
Kamis, 7 Mei 2020 Selasa, 30 Juni 2020
Kamis, 21 Mei 2020 Kamis, 2 Juli 2020
Senin, 1 Juni 2020 Senin, 29 Juni 2020
RPS INSIGHT
OUTLINES PERTEMUAN 1
1. Pengertian mengenai IC (Integrated Circuit)
2. Semikonduktor Intrinsik
3. Semikonduktor Ektrinsik
4. Kepadatan (konsentrasi) Semikonduktor
INTEGRATED CIRCUIT DEVICES - TIMELINE
MICROPROCESSOR EVOLUTION
IC TECHNOLOGY ADVANCEMENT
BENEFIT OF TRANSISTOR SCALING
WHAT IS A SEMICONDUCTOR?
The conductivity of a semiconductor is generally sensitive to temperature, illumination, magnetic field, and minute
amounts of impurity atoms (typically, about 1 μg to 1 g of impurity atoms in 1 kg of semiconductor materials).
 UNSUR BERSIFAT SEMIKONDUKTOR

• Device-grade silicon costs much less than any other semiconductor material.
• Silicon in the form of silica and silicates comprises 25% of the Earth’s crust, and silicon is second only to
oxygen in abundance.
• Currently, silicon is one of the most studied elements in the periodic table, and silicon technology is by far the
most advanced among all semiconductor technologies.
• The relationship between this cell and the lattice is characterized by three vectors a, b, and c, which
need not be perpendicular to each other and may or may not be equal in length.
• Every equivalent lattice point in the three-dimensional crystal can be found using the set:

R = ma + nb + pc,
• m, n and p are integers
The dimension a is called the lattice constant. In the periodic table, only polonium is crystallized in the
simple cubic lattice.
THE SILICON ATOM
THE SILICON CRYSTAL
• The body-centered cubic (bcc) crystal where, in addition to the eight corner atoms, an atom is located
at the center of the cube.
• Face-centered cubic (fcc) crystal that has one atom at each of the six cubic faces in addition to the
eight corner atoms. In this case, each atom has 12 nearest-neighbor atoms.
SENYAWA BERSIFAT SEMIKONDUKTOR
• Many of the compound semiconductors have electrical and optical properties that are different from those
of silicon.
• These semiconductors, especially GaAs, are used mainly for high-speed electronic and photonic application.
THE SEMICONDUCTOR COMPOUND CRYSTAL
 MILLER INDICES

• Miller indices are used to specify directions and planes.

• These directions and planes could be in lattices or in crystals.
• The number of indices will match with the dimension of the lattice or the crystal.
• E.g. in 1D there will be 1 index and 2D there will be two indices etc.
• A vector r passing from the origin to a lattice point can be written as: r = r1 a + r2 b + r3 c
• where, a, b, c → basic vectors and miller indices → (r1 r2 r3 )
• Fractions in (r1 r2 r3 ) are eliminated by multiplying all components by their common
denominator. [e.g. (1, ¾ ,½ ) will be expressed as (432)]

The index represents a set of all such parallel vectors

 Miller Indices for Planes: Illustration

Miller Indices are the reciprocals of the parameters of each crystal face. Thus:
• Pink Face = (1/1, 1/∞, 1/∞) = (100)
• Green Face = (1/∞, 1/∞, 1/1) = (001)
• Yellow Face = (1/∞, 1/1, 1/∞) = (010)
Berapa Indeks Miller untuk Kristal di bawah Ini?

A B C
 Family of Directions

In Materials Science it is important to have a notation system for atomic planes since these
planes influence
• Optical properties
• Reactivity
• Surface tension
• Dislocations