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  • Bai 3-Nanoimpriting Litho

    Загружено:

    Bé Kem Xưởng May
    10 просмотров10 страниц
    The document discusses soft lithography and nanoimprint lithography techniques. Soft lithography uses self-assembly and molding to generate micro and nano-scale patterns without photolithography. Nanoimprint lithography involves imprinting nano-scale patterns by mechanical deformation and molding of resist materials like polymers or glasses. There are different types of nanoimprint lithography such as thermal NIL, UV-NIL, and soft UV-NIL which use heat, UV light, or self-assembly respectively to imprint resist materials. The document also discusses the use of positive and negative resists in nanoimprint processes and combinations with other techniques like electron beam lithography and plasma etching.

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    The document discusses soft lithography and nanoimprint lithography techniques. Soft lithography uses self-assembly and molding to generate micro and nano-scale patterns without photolithography. Nanoimprint lithography involves imprinting nano-scale patterns by mechanical deformation and molding of resist materials like polymers or glasses. There are different types of nanoimprint lithography such as thermal NIL, UV-NIL, and soft UV-NIL which use heat, UV light, or self-assembly respectively to imprint resist materials. The document also discusses the use of positive and negative resists in nanoimprint processes and combinations with other techniques like electron beam lithography and plasma etching.

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    © All Rights Reserved
    Скачайте в формате PDF, TXT или читайте онлайн в Scribd
    Отметить как неприемлемый контент
    10 просмотров10 страниц

    Bai 3-Nanoimpriting Litho

    Загружено:

    Bé Kem Xưởng May
    The document discusses soft lithography and nanoimprint lithography techniques. Soft lithography uses self-assembly and molding to generate micro and nano-scale patterns without photolithography. Nanoimprint lithography involves imprinting nano-scale patterns by mechanical deformation and molding of resist materials like polymers or glasses. There are different types of nanoimprint lithography such as thermal NIL, UV-NIL, and soft UV-NIL which use heat, UV light, or self-assembly respectively to imprint resist materials. The document also discusses the use of positive and negative resists in nanoimprint processes and combinations with other techniques like electron beam lithography and plasma etching.

    Авторское право:

    © All Rights Reserved
    Скачайте в формате PDF, TXT или читайте онлайн в Scribd
    Отметить как неприемлемый контент
    из 10

    2/8/2017

    SOFT & NANOIMPRITING


    LITHOGRAPHY

    Outline

    - Introduction
    - Soft lithography
    - Nano-imprinting Lithography (NIL)
    - UV - NIL

    Introduction

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    2
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    Thermal (T) NIL vs. UV-NIL vs. Soft UV-NIL

    Soft lithography

    Soft lithography represents a


    non-photolithographic strategy
    based on self assembly and
    replica molding for carrying out
    micro- and nanofabrication

    1. Generate patterns & structures


    with feature sizes ranging from
    30 nm to 100 mm ;
    2. Convenient, effective, and low-
    cost

    Xia, Y. N. and Whitesides, G. M. “Soft Lithography”.


    Annu. Rev. Mater. Sci. 28, 153-184 (1998)

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    4
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    5
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    Positive and Negative resists

    Schematic of the Process 1, based on positive-tone PMMA resist


    and of the Process 2, based on negative-tone HSQ resist

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    7
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    8
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    EBL & Plasma Etching & NIL

    9
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    End of Chapter

    28

    10

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