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First single-chip gyroscopic sensor in which micro-mechanical and electronic components are intimately entwined on the same chip. Tiny, robust, low-power, angular-rate-to-voltage transducer has a sensitivity of 2.5111 V / 0 / s and resolution of O.OI5" /s (or SOo / hour)
First single-chip gyroscopic sensor in which micro-mechanical and electronic components are intimately entwined on the same chip. Tiny, robust, low-power, angular-rate-to-voltage transducer has a sensitivity of 2.5111 V / 0 / s and resolution of O.OI5" /s (or SOo / hour)
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First single-chip gyroscopic sensor in which micro-mechanical and electronic components are intimately entwined on the same chip. Tiny, robust, low-power, angular-rate-to-voltage transducer has a sensitivity of 2.5111 V / 0 / s and resolution of O.OI5" /s (or SOo / hour)
Авторское право:
Attribution Non-Commercial (BY-NC)
Доступные форматы
Скачайте в формате PDF, TXT или читайте онлайн в Scribd
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without the prior permission of Oxford University Press.
ISBN 0-19-517268-X
Cover Illustration: The chip shown is an inside view of a mass-produced surface-micromachined gyroscope system, integrated on a 3mm by 3mm die, and using a standard 3 - fun 2- V BiCMOS process suited for the harsh automotive environment This first single-chip gyroscopic sensor, in which micro-mechanical and electronic components are intimately entwined on the same chip, provides unprecedented performance through the use of a collection of precision-directed techniques, including emphasis on differential operation (both mechanically and electronically) bolstered bytrimmable thin-film resistive components. This tiny. robust, low-power, angular-rate-to-voltage transducer, having a sensitivity of) 2.5111 V /0 /s and resolution of O.OI5"/s (or SOo/hour), has a myriad of applications-including automotive skid control and rollover detection, dead reckoning for GPS backup and robot motion control. and camera-field stabilization. The complete gyroscope package, weighing 1/3 gram with a volume of 1/6 cubic centimeter, uses 30mW from a 5-V supply. Source: John A. Geen, Steven J. Sherman, John F. Chang, Stephen R. Lewis; Single-chip surface micromachined integrated Gyroscope with 500/h Allan deviation, IEEE Journal of SolidState Circuits. vol, 37. pp. 1860 - 1866, December 2002. (Originally presented at ISSCC 2002.) Photographed by John Chang, provided by John Geen, both of Analog Devices, Micromachine Products Division, Cambridge, MA, USA.
Printing number' 987654 3 2 I
Printed in the United States of America on acid-free paper
CHAPTER 1-EXERCISES
1.3 f = 1. = _1_ = 1000 Hz T 10-3
W= 21!f = 21!X 103 rad/s
1.4 (a) T = l = _!_ s = 16.7 ms f 60
(b)
T=l=_I_= lO00s f 10-3
1 I
T = - = - s = I p,s
f 106
(c)
T 2
1.6 P= ~f~ dt
o
1 V2 V2
=-x-xT=-
T R R
Alternatively,
P=PI +P3+P5+····
= (~)2 l + (~)2 l + (~)21. + ....
Jh R 3J21! R 5J21! R
= V2 X !_ X (1 + ! + .L + .L + .... )
R 1!2 9 25 49
It can be shown by direct calculation that the infinite series in the parentheses has a sum that approaches i/8; thus P becomes V2/R as found from direct calculation.
Fraction of energy in fundamental = 8/ rr? = 0.81 Fraction of energy in first five harmonics
= !_(1 +! + _!_) = 0.93
1!2 9 25
Fraction of energy in first nine harmonics
= ~(1 + ~ + 215 + ;9 + 8\) = 0.96
Note that 90% of the energy of the square wave is in the first three harmonics; that is, in the fundamental and the third harmonic.
1.7 (a) D can represent 15 distinct values between 0 and + 15 V. Thus,
VA =0 V =* D = 0000
vA= I V =* D =0001
VA = 2 V =* D = 0010
VA = 15 V =* D=llll (b) (i) +1 V (ii) +2 V (iii) +4 V (iv) +8 V
(c) The closest discrete value represented by Dis 5 V; thus D = 0101. The error is -0.2 V or -0.2/5.2 x 100 = -4%.
1.8 Voltage gain = 20 log 100 = 40 dB Current gain = 20 log 1000 = 60 dB Power gain = 10 log Ap = 10 log (AvA;) = 10 log 105 = 50 dB
1.9 Pdc=15x8=120mW
PL = (6/J2 )2 = 18 mW
1
P dissipated = 120 - 18 = 102 m W
PL 18
1]= -x 100=-x 100= 15%
Pdt 120
1.10 Refer to Example 1.4
-11 4Ov{ va=10-10 e
Let VI = V I + Vi and vo = Va + Vo = 5 + Vo Thus,
_II 40VJ 40lJj 5+vo=IO-1O e e
= 1O_5e40v,
40.· Vo = 5 - 5e '
(1)
For Vi = I mY:
(a) Using the small-signal gain of -200 VN, VO = -200 x l mV = -0.2 V
(b) Using Eq. (1) above
Vo = 5 - 5e40xO.OOI = -0.204 V For Vi = 5 mY:
(a) Small-signal approx. =* Vo = -200 x 5 = -I V. (b) Transfer characteristic =* Vo = 5 _ 5e40xO.OO5 = -1.107 V.
For Vi = 10 mY:
(a) Small-signal approx. =* Vo = -200 x 10 = -2 V. (b) Transfer characteristic =* Vo = 5 - 5e40XO.OI = -2.459 V.
111 10-5
• Vo = I x --- = 10 V = 10 p,V
106 + 10
PL = v2 / RL = (10 X 10-6)2 = 10-11 W
o 10
With the buffer amplifier:
v = Ix~xA x~
o Rj+R, vo RL+Ro
= 1 x _1_ x 1 x _1_0_ = 0.25 V
1+1 10+10
v~ 0.252
PL = - = -- = 6.25 mW
RL 10
V I . Vo 0.25 V 025 VN
o tage gam = - = -_ = .
v, 1 V
= -12 dB
Power gain (Ap) == PL
Pj
where PL = 6.25 mW and Pj = V;ij,
o, = 0.5 V and i, = 1 V = 0.5 J1A
1 MQ+ 1 MQ
Thus,
Pj = 0.5 x 0.5 = 0.25 J1W
and,
A = 6.25 X 10-3 = 25 X 103
p 0.25 X 10-6
10 log Ap = 44 dB
1.12 Open-circuit (no load) output voltage = Av Vj
NM H = V Off - V lH = 5 - 1.2 = 3.8 V NML == V1L - VOL = 0.8 - 0.55 == 0.25 V
The inverter dissipates power in only one state: when the output is low. The power dissipated in this state is
p = V 00 x V 00 - V offset = 5 x 5 - 0.1 == 22.3 m W
R + Ron 1 + 0.1
Thus, the average power dissipation is
Po=~P= 11.1 mW
1.25 P D = IC V;>D
=50x 1Q6x2x 1O-12x52=2.5mW
Cho..pte.r .2- Exerc.ises
!he minj",CM'I" n~e.r of +e.r"'\II\0.15 r~v.ire.d by 0. sin!)le op o.no-p is filfe.: two inp""'+ ~e.rrn;no.ls. one. o,,",Tp""'+ i"e.,.".\lno.l,one +er.....it'O-l ~o,. p05ifilfe power su.pply o.nd one +er,..·,,, ... 1 fo,. ne,9o.+ive power su..pply.
"The mini",u.,... nu. .... be,. o.f +e.,......·1(\0.15 ~u:lred by 0. ~~ op CU'np is • .Jot: eo-c.h opc.,.,.p
.. e,.~,.e~ +wo inpu..+ +e.,.",i(\o.ls o.nd one o..d"pc.d" -te,..,.,.ino.l (o.c:c.o~;~ for 1:1. +e.r~,no.I5 .for the fou..r op Q..r¥\ps). 1:n oc:Wi+ion,+he .fo.....,..
op o.rt\p c.Q.I\ 0.11 sh.o.re one. +&,. ..... ·,,, .... 1 for po5i+ilfe. power s""'Pply c:u'\d one +e.r",;no.l for n~o.+ive. power 5u..pP'y.
1:),,2
We )c.now +ho.+ "'3= A ("._v,) o.nc:l A:.looo. -rhe.re.fore. ..
Iho.+ is +he. open-loop c;,o..in of fhe. op o.""p is A=)"G ... R. For G ... ::.IOrnR/v, R=-Iok..n. o.nc:l J" = 100 we. h""\le.:
A = 100 " 10" '0 =- 10 .... "/,, or e,_ .... ,lfoJenHy 'lode.
1"he. ~cMn ~cl inp"'+ re.sis-ho..nc:e. of. +he. inve.r+in,::, ~p'i.f.ie.r c.irc. ..... :'+ shown in R9wo.'l.1!» o-re. _~ o.nc:l RI re.~pe.c;.+ively.-rr.ere.fo,..e.we.
~I howe:
RI =- '00 K..l\... o.nd _ RJ,. =- _'0 ~ R:a.=-IORI R.
1l\145 :
R:a.=- IO.'oo!c:J'\.. = I M..n..
Fro", To-ble I.' we. hc..ve:
R - vo \
..... --
l.; ·t.::.o , l.e, owctp ... t i. ope." c.;,.c.":'+
the I'\~"""+;vt. inplA.t ter""'·lno.l of. +he. op OJOoB i.e..,"; is 0. v;"+",,,,"1 3ro"""d.+h ..... S "i:.o
Vo=v;_Ri;= o_Rii=-Ri;
R ... = ~o 1= -~i: =-R :::;,-R~:._R=_lolc..n.
t·· r:
· ,.:.0 ·
R j = ~,' ~d vi is. 0. vir+IAOoI ~ro"",d (vi ::'0) I 1 i
+h"",s Rj=..2... = 0 ~ R;:o..n.. ij
Sinc.e. we. ...... e. o..ss ........ ;nj -tn_+ +he. op ~p;n -tnis -trCU"sras',sfOJ\c;e o-rnpli.f;er is ideD-I,the op C)oI'np ho-S ~ o~pu;t r e.sis~nc:.e.. o.nd +he.teh:,re,. +he. o""ip~+ resisf.o.nce. of +his -tro.r6resisf1:,..nce. Ql\o\plihe..r is cJso ~o.-n:"o:t is Ro=o..n...
Con"e.ch'n_' -the. :5i.jl'\o.l so ...... ca shown in F.!)uJ"e. E,:l..5 +0 +he.. il'\p~t of +his C1oorftplifie.r
we. ha..ve:
R=lo ... .n..
v; is 0. vir+u....1 !':Jro .... nd +ho.+ is V; ::.o,fhu..s +he. c.,...rren+ ~Iowin_j -K.ro~h +he.. 10 ".n..
re~s-h:oY" c:..onne..c+e.d be+we.e.o Vi o.nd ~r-...d is ~e..ro. ihe.re..+O .... e.
Vo=Vi- R ... 0.S ...... A::.o-IO"',.0.S ..... A=_5v
IV
V, is Q, vi r: t~f ~ro"""d, thu..s i,=~:, 1_0 =' .... A
R I '",Jl..
v.=OV
Ass"",",,',~ o..n ide.a..1 op ~p, -the. c.....rre..n-f flowil'\j info +he. n~o-+-ive in\,u..+ flu'rn·'I'Q.I of ~e. opo.""P 'I~ ~o.lhe.re..fore., i~=i., ~
iz.= ' ...... A
"0= v, _ i1.R~::. 0_ I ...... A)( IOJ(.n...::.. _IOV
i =::!.2-=~=_IOrnA
... R... \ "n...
vol+oae. !3o..in::. .:!..2_ = ~::.. _'0 Vlv or .l.odB
Iv I V
c.c.o.rre..n+ ~Wl'\:' ~ ::::. _10 no'" :._10 AlA or ;u,da
" I",.f\
. _ p,- _10".(-10 ... ",) I oow/,-, 01" ""'~dmL
POWe.t" ~c.,n __ .:. "::.,"" .-IN 10
Pi I "alMA
Note.+ho.f powe.r~o-in i" dB is ,o~ \..5:....1.
'0 PI'
For the c:.irc.u..;+ shown Q,bove. we. ho.ve..:
Vo=- (~VI + ~V~)
R, R'1.
5inc.e. it- is re'_"";re.d tha..+ vo=-(V.+SV;l)' we wo..n+ +0 ho..ve.:
R.f = I R.
I+- is 0.150 desirc.d +ho.+ +Or Q, rnO"l<irnl4 ..... o .... +p"'+ vol+o..~ of 10V +he. c:.......-ren+ in -the. .fee.dbo..c.k. nuis+Or dOe.5 not e~c..ea.d I ~A.
9o.in-b .... ndwicl+h prodlOoc,t:::. Ao"f .. : I MHz. ~o.in a:+ I "-H Z. :: .20 20.3 ~:::. 60dB
I "-Hz.
I :1.:L.O
Sjnce. dc.~o-i'" of i-he.. opo."'P is"" .... c.hlct.r.!)e.r tho.n ihe.. de. 3a.in of the.. de.si_::Jne.d non.i"vu+i".:J ~"'flifie.r~ we. c:o..n u.se. ~"",,"+ion (2.. '35). Ihere.+ore. :
f -4=
3"&=- +
I+~
Ft..
He.nCoe.
.f _
3"&-
:1.0 "-Hz..
1.2.·2.1
For #e. inp .... + vol+o.~e 5+e.p of ""o..j"j~e 'I +he. o ..... +p~ w~vefor,... will s+\11 be. 3iv&n by -fhe. e.)(poner.+ic:oJ woo.Ve~orm of e.,_'--tion (.l.."to) if w+V~SR
1h""s the. worst c..o..se. o~+pu..+ pe.o..k i ~ 10_O.'5::.q.5v which c.orre5ponds +0
~e.. inpu..+ si "e._wo."e. peA"- of ~ = <l.S .... v 1000
I ::l..:15
(a-) i'h& e."r"ivC>oIe.....f c.ir~+ for de.(oe.rl""'r'lin,:, de. a.dp~ offse.,f vo't~e.. is:
~,.
~
-= "'os \oU5ct_..f~e. O¥ """"f
Th",,~, the. de. ov.+p~t YO'~e. du..e. +0 the. inp~+ offse.+ is Vos-=- 31"r\'"
Henc:e. the. M~i"" ....... ~fli~cle. of 0.. ~ine. ~o.ve.. 0.+ -the. op """"P OIA.+pu.-t w· ... -houd- diPP'''_j is 10V'_ 3 ...... V' ~ '" .q~T v which eort"e.sponcl~ +0 the. inp""+ siM~.-WC>oI(e. pe.o..~ of
q.'fQ1..:! 10",'" 1000
"1l\e.re.fore, there.. is no need .fo r: offse+
+rim .... i~.
(b) "The. ....,.~n·'~e. of the. ~~"" of +hi~ Q, ..... p'·,fie.r is
IAdl = R~ = R'ao
I RI ... 'c.1 I .[R;a. .... ...L-
J W I c~~ ...
:l.o1l0~ IFyI > 5T- ~'Adl > '7o?-.cfI:;:,
FC~ > ':1 0=1. ct 5 ~ I M.n.. >":10~.ct5
b~.;~+..!- [lOOQ~".-!--
C'w'" c2."""
Jlooo1-+ _L <.. 1.£t1:l..5 ==>..l- <.,'fq?6
c. 2.t.) 2. C. c,.)
c:,ONT.
He.nc.e., we c.o..n c.hoose. C= I. E:.)C-F
12.·2.6
F-ro", e'l .... o..+ion (2.~..It) we.. ho.lle:
"0=.I eo. Rl. ~ I&Rl.= 100 nA,.1 M.n..= O.lv From e"\CMlo-+ion (2. . ..It6) +he vc:70lu.e of re.s;stor R3 (plQ.c.ed in se..rie.s wifh posi+ive. inpu.+ to I"f'\'n~",ize -the o .... tp .... t offset vol+~e) is:
R~.::d~.,IIR).= R,R~ :: IOIU\.,.IHA. =q.9,,~
R, -+ R). 1 0 ~ .l\. + I M.n.
R!o = q.q Io:.n.. = 10 I:-.n..
With this IICIoIu.e of R .. +he. new ".J~ ot +he.
o .... tp"'-+ de. vol+o:je. (u.sin.:) e,. +ion(.J..Jt?) is:
Va=- Ios. R).-::. 10 nA " lO,,".n. = 0.0\ v
c
v •. (+)~ 'I+
V (+)=::- "';(+).1+
o CR.
The w .... ve+o .. ""s for one. period of -+he. inp<4+ ~d -+k o..,.fpl4+ sijno.ls ore $hown below:
lOY 11,·(+)
ri,
o U.a. ... $·+
_lOY
We. ho,."e
I ... ~
- 2.0:...;:.!_ J 10 dt eR-
G
o'--~"""-"""+ ~ ... ~
_~o
1.2. 2.~
lhe inpu.+ r-esis+o.nc:.e. of this inver-+i,,~ in+e~ ..... +or- i!So R., +here:for-e.) R:.lo Jc..n.. Sine.e +he. de..si~ in+e.~r ... +ion +i .... e. con'Sft..n-T
c = 0.01 J"F ;s +ke i .. p",,+ c.oop....c.i+o..nc:e C)f #.;$ diffe.re.n+icdC)r. We w"",,-+ CFl::.IO-a.(+fc +irwe. cons-h....+ of the di~+io.+or), +hv..5,
-:I.
R= 10 ::. 1 M..n_
o.OI)"F
F,..o,... e,.""o.+&on (.:l..S?), we know +ho.~ +he. +ro."S~ f"",c.+ion of ~he. diHe.re.n+io..+or is of ... he. +0,..... V.(jc..) =_jwC.Fl
For Vo= 5'0') fro,...., ~lAo.+ .. on (6.:1..6) we. hQ.ve. :
:to-=- :tR6F (I ... VO-V&E)
1 ... (~/~) VA
I.o= O.~9,:?- (,+5-0.~)::.O.S3~A
1+ 2../100 So
..:r~"or;n~ +ke, e..ffe.c..+ 0+ +ini+e. o .... +p .... t resis+o.nc..e.s. we. h~"e..
I..=- .I.l.= ... = .I.N= IC.QR6F
.I LC.Q-Ef Ic:.1 .:cc. ..
= ~ +-- ..... ···T-
~ ~ ~
1'01 .... 1 + ...... c. ..
L =- ICQ~6F (_I_+_I_~ ... +....L)
~ ~ ~
I=.ICQ ~
~EF ~
Ff"o""" (-It") We... "0.'0' e. ..
For 0.." e.rror 00+ e.)C.c.ee.din" 10i:. we.. need :
IRE.F '- I (._ 0.1)
1 N+ 1":- REF
+-
~
N+I~IJ~ N~IO
Ihe Mo.~il"f\ ......... "",,,,,,ber of OI.A.+p .... t$ for
CaNT.
an error no+eJCc:.e.e..d;~ '0'- is N.=IO. 1.f fhe error is re.1-\Aire.d +0 be.. Ie.~s~ IOZ +hen we. ne.ed N < 10. In -this C4.Se. +he. MC."~I"Y\""-M nu.mbe.'" of o ..... +p~$ for 0." erro ... of Ie..S5 -fho.." l0i. i~ N:.9.
USi"j ~wo.-+-ionS (6.:2-q) o.nd (6..31), we. Co.n w,.i+e +ke, ,e.ne..ro.l form of #.e. +ro..I"sfe.r ~+ion of a. direc.+-c.ov.ple.d ~l'Y\pl;fier as:
Also} AM=_.2..3v/v »there+ore., +h~ ~o.in-bc::r..ndwid-th proch .. c.-+ (GBW) is:
12..31' 1-'1'3.3~ I.~ G"''Z.
Si"c.e. Gf3W is less +ho.n fp;a.:'..J. ...... 5 GH'l. o-ncl fz.:: ~oG.Hz,~erE!fore i+ is a. ~ood "'pf'f"b7<,m ... +ior\ for +he U¥\.rty ~.,.;n .fr-e.~enc::.y.
16.1~
Re:fer .. ;n~ to +he. -s.o/",,+ion of E.xG\,.""'ple 6.9, j,f Q. lo ... d res;s+or is c.annec..+e.d 0.+ -+he OI.A.+p ..... +, ho..lvi"_j the. vo.l .... e, of R'L.,+).,e.n we ho.ve Ro'L.= ro, II r01 o.nd therefore.
2..
U$i".j e.,}I.U>'o+ion 6.E.6 o. .... d o..S.s ............ inj +M=fp, we ho.ve
Refe. rri,,~ +0 +he sol",,+ion of bQ. ... pl4to.lo we. howe f +-= I RM I f .... Si nc.e lAM I r'e.""o.inS +he.. SQ."",e. 0.5 +ho..+ of +he.. e.ICo.'-ple., +0 pi a.c.e. f ... 0..+ .2. GHz. we. I'\e~d
2.GaH-z. -= f.,.:::. I RM I f H:::' ' AM I
.2n (C,-+ C901) R' ...
=;> CI..::' I A~ I _ Cqd= 12.'3 _sfF
.l.n R ... .f... ;l n.9 .'82.lC-.A.a 2GtHl-
For 0.. C5 o..""'p' .. .fie..r .fed ~i+h RSi~=o we know (~IAA.+ion 6.'8'0) +ho..+:
Go ..... pQ.r-ed +0 -the. c..e:.. .,..,....plif .. ~ i\"'\ E.xerc..;se 6..2-0, I AM I h~'5 inc.r-e.o.~e.d frorr- I':fS!.+o :J.42v/vJ + ... has ;f\Creo..'se.d
v
+rom ~5.1 "-H'2. +0 "'1 f,q tc.H-z. o."d f+ ho.~
i nc:..reo.sed +rorY\ 13. I MHz. +0 1I'3.5HHz. 10 inc:..reo..se.. f ... +0 I MHz we.. need CI-I:' __!,__ -= '5Gt "s ,-H,.""s,
(~) ID.=- I o.nd Ipl.=:I. Si .... ce V01f, ... x,i-0I
we ho..ve: 1-
~::. ± ",peo", (~)1. Yo"" ::...!...
1.0• J_ J",. Co~ (!!::!..), Yo;' .I.
:2.. L..
~ K~ (:C-h = I ==r ( C):l::' ~" (~),
~~(~). Kp ~
L-
~ (~) =.J.t (~)
'- ~ '- I
(b) Since. c.""",re."+ Sou.rc.e.. I, is G'- Simple sj,,~Ie. +ro. .... sis+or c:.ir-c.<.4'+ s+""d;ed in Se.c.+i on 6. '2.. +or- prope..r ope..rc>..+i on i+ re.'lu..~ res Vov = 0.2." o.c..r-oss if.
I.f "" 0.1 II peo.l:;._'to-pea.k si_jn"" I swin,j is +0 be. ""lIowed .... + +he. clro..in of Q." +"e.n +he hi~he.s+ de. bio.s lIol+o..,je tho..+ c.o..n be. ~secl 0..+ +ho..+ poi n+ i ... :
Since RL, = 2. ro (+h",,,, R .... is on +he orde.r 0+ '-0) and Re.«ro, usin_j e'J."",o..+ion b.15i we. hcwe:
Ri"=(~TI)re+((3T')Re __ I_ '+ &::.. ro
Rin = 10 1)1. 2~.~5.n.. + 101 ,. TS.fLJ(_~I_ 1+ :l.ro r.
Rj,,= 5K.!L
From ~,"",~+ion (6.1&0) we """ye:
Ro::=' ro ( I +9 .... Role) whe..re. R,'e..=R.e,1I rl'\-=-'\,
Ro =- 100 (, + -'to" o.or,=,) = ~ 001'-.0..
Av ,.. q ~ - _40)0. 100 =_4000::L
0---.1 ..... 0- V
'Om = ~ 0 :; ~ = lO..!!!B.
I + B ... Re,. I-t- ~ O}l 0.01-5""1 V
R· ~ R. . R
an "'Yo - • Q.'SS ........ I~ R...:f Q
Rin+Rsi,:J R,-~R.o., .. t
Sk..n. ,,(_~ooo.Y.) .).,.100
5 k..n. ... 5 "-s\. V .:L~"oo+40o
16.33
For +he SO\.O.T"c::e. followe.r +0 provide a. de.. level sh.i++ 0+ o.C!y we ne.ed VGos:.oRv 1'here.fore., vo.,: VGS- V+ ... = O."'I_o.6=O:~v I , '( IN ) 'Z. I A (.l-O ) ( ,1
I;n., t ~ "'" LA ~ fq fio.-: 10/"2..5'G:. 4·2v'$ (1)C;_\\x lolZS'b -= ,./7/qv Itb~o/u.. -I-< -4 r'f'o-r ~ - o . (J 2 i I Y '1001 ,"PM.t - - O. LIS -x. -~%