Diaphragm Valve

DIAPHRAGM VALVES
Microelectronics Product Line
Catalog 4505/USA
October 2003
DIAPHRAGM
VALVES
Microelectronics Product Line
Catalog 4508/USA
October 2003
table of contents
Veriflo Division . . . . . . . . . . . . . . . . . . . 1
SM917 1-1/8””. . . . . . . . . . . . . . . . . 2 - 3
SM930 1-1/8” & 1-1/2” . . . . . . . . . . 4 - 7
SM955 1-1/2” . . . . . . . . . . . . . . . . 8 - 11
930 . . . . . . . . . . . . . . . . . . . . . . . 12 - 15
930Y . . . . . . . . . . . . . . . . . . . . . . 16 - 17
945 . . . . . . . . . . . . . . . . . . . . . . . 18 - 21
945Y . . . . . . . . . . . . . . . . . . . . . . 22 - 23
955 . . . . . . . . . . . . . . . . . . . . . . . 24 - 25
955AOPLP . . . . . . . . . . . . . . . . . 26 - 27
955Y . . . . . . . . . . . . . . . . . . . . . . 28 - 29
TITAN II AOP PLUS HP . . . . . . . 30 - 31
TITAN II AOP PLUS MP . . . . . . . 32 - 33
TITAN II AOP PLUS LP. . . . . . . . 34 - 35
TITAN II MANUAL PLUS. . . . . . . 36 - 37
TITAN II Metal-Seal. . . . . . . . . . . 38 - 39
928AOPHP . . . . . . . . . . . . . . . . . 40 - 41
LockOut-TagOut . . . . . . . . . . . . . 42 - 43
VAC100. . . . . . . . . . . . . . . . . . . . 44 - 45
Parker Hannifin Corporation . . . . . . . . 46
Parker Hannifin Corporation

Veriflo Division
250 Canal Boulevard
Richmond, CA 94804-0034
Telephone 510.235.9590
Fax 510.232.7396
http://www.veriflo.com
VERIFLO DIVISION
V
eriflo Division, Parker
Hannifin Corporation
Maintained Industry
is a leading manu- Leadership By Placing A
facturer of precision valves, Premium On Quality
regulators and surface mount
components for the control
Customer Care
Veriflo Division has achieved
and application of liquids and
an ISO 9001 registration at
gases used in the fabrication
both its Richmond, CA
of semiconductors, as well as
manufacturing plant and at
in the chemical and
its Carson City, NV facility. This
petrochemical industries.
certification confirms Veriflo's
A Leading Manufacturer commitment to quality and
Of Precision Valves, excellence as recognized by
the international community.
Regulators & Surface
Mount Components The Instrumentation Group of
Parker Hannifin specializes in
Veriflo has maintained industry
high quality, critical flow com-
leadership over the past 95
ponents for world-wide process
years through innovative
instrumentation, ultra-high-
engineering, manufacturing
purity, medical, analytical
and by placing a premium on
and biopharmaceutical
quality customer care.
applications.
The division maintains two
Parker’s Instrumentation Group
state-of-the-art Class 10 Clean
has ten manufacturing plants
Rooms at its Richmond, CA,
and over 300 authorized
facility and has adopted a
distributor locations around
corporate wide "Lean
the world to provide local
Manufacturing" philosophy,
inventory and technical
which is delivering greater
support. Key markets for the
value to the customer by
Instrumentation Group include:
eliminating wasteful steps
Chemical Process, Power
through continuous improve-
Generation, Oil and Gas
ment activities.
Exploration, Semiconductor
Manufacturing, Biomedical,
Veriflo Division's two manufac-
and Analytical Equipment.
turing facilities develop and
manufacture applications for
Note: For further information on
the Semiconductor/High Purity
Veriflo Division and or its product
and Instrument/Analyzer
line visit the division web site at
industries. www.veriflo.com. For more
information on Parker Hannifin
With the focus of maintaining Corporation visit the corporation’s
the highest industry standards, web site at www.parker.com.
1 • D I A P H R A G M VA LV E S
Ultra High Purity
SM917 1-1/8” Diaphragm Valve
Parker Hannifin Corporation’s Veriflo Division
▼
materials of construction
presents the Surface Mount 917 1-1/8”Ultra
Wetted
High Purity Diaphragm Valves providing
Body. . . . . . . . . . . . . “VeriClean”, Veriflo's custom
exceptional performance for today’s
. . . . . . . . . . . high purity type 316L Stainless Steel™
modular surface mount systems. Seat. . . . . . . . . . PCTFE, Optional Vespel® or PEEK™
Diaphragm . . . . . . . . . . . . . . Elgiloy® or equivalent
Non-wetted
Nut. . . . . . . . . . . . . . . . . . . . . . . . . . . Stainless Steel
▼
operating conditions
Maximum operating pressure:
AOP . . . . . . . . . . . . . . . . . . . . . . 125 psig(8.6 barg)
Manual . . . . . . . . . . . . . . . . . . 250 psig (17.2 barg)
Minimum operating pressure. . . . . . . . . . Vacuum

AOP Actuation . . . . . . . 75 psig (5 barg) nominal
Temperature. . . . . . -40°F to 150°F (-40°C to 66°C)
Bake out . . . . . 250°F (121°C) in the open position
▼
functional performance
Flow capacity:
AOP . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Cv = .17
1/4 Turn manual. . . . . . . . . . . . . . . . . . . . . Cv = .15
. . . . . . . . (SEMI Flow Coefficient Test# F-32-0998)
Design Leak Rate:

Outboard . . . . . . . . . . . . . . . . . . 4x10-9 scc/sec He
Inboard . . . . . . . . . . . . . . . . . . . 2x10-10 scc/sec He
Across seat . . . . . . . . . . . . . . . . . 1x10-9 scc/sec He
Design Proof Pressure:

AOP . . . . . . . . . . . . . . . . . . . . . . 188 psig (13 barg)
features 1/4 Turn Manual . . . . . . . . . . . . 375 psig (26 barg)
0.17 Cv for AOP style or 0.15 Cv for

▼
Design Burst Pressure:

1/4 turn manual style valves. AOP . . . . . . . . . . . . . . . . . . . . . . 375 psig (26 barg)
1/4 Turn Manual . . . . . . . . . . . . 750 psig (52 barg)
“VeriClean”, Veriflo’s low sulfur high
▼
purity 316L Stainless Steel™, which

▼
standard connetctions
enhances electropolishing, and SEMI Modular Interface
corrosion resistance.
▼
surface finishes
Standard surface finish 5 micro inch Ra
▼
Standard Ra . . . . . . . . . . . . . . . . . . . . 5 micro inch

(.13 micro meter).
. . . . . . . . . . . . . . . . . . . . . (.13 micro meter) or less
Internally threadless and springless.
▼ ▼
approximate weight
Fully functional for pressure ranges from .7 lbs. (.32 kg)
vacuum to 125 psig for Air Operated
valves and 250 psig for manual valves.
Change from air operated actuator
▼
to lever or visa versa without intruding

into wetted area.
100% Helium leak tested.
▼
D I A P H R A G M VA LV E S • 2
SM917 1-1/8”
Dimensional Drawings
Ø1.12 Ø1.12
(28.4 mm) (28.4 mm) Ø1.29
(32.8 mm)
2.77 2.77 2.35 .305

(70.3 mm) (70.3 mm) (59.7 mm) (7.7 mm)
4X Ø.187 INLET
(4.7 mm)
.86
(22 mm)
SM917LP1NC SM917LPNC SM917LPNO OUTLET

1.125 SQ
(29 mm)
1-1/8" Standard C-Seal (10)
(OPEN)
1.125 SQ
(28.6 mm)
4X Ø.173
(CLOSE) (4.4 mm)
.86
(21.8 mm)
2.64
2.52 (67 mm)
1.91 (64 mm)
(49 mm) OUTLET INLET
.79
(20.1 mm)
1-1/8" W Seal (60)
SM917M SM917MLK
*Standard Mini-Lever Is Blue
Ordering Information
SM917 M S 10 VESP
OPTIONAL FEATURES
BASIC SERIES LK = LockOut-TagOut*
SM917*** VESP = Vespel® Seat**
PEEK = PEEK™ Seat
TYPE (Note: Consult Factory For Additional Handle Colors)
M = Mini Lever
LPNC = Air Operated Normally Closed PORTING
LPNO = Air Operated Normally Open
LP1NC = Air Operated Normally Closed with Integral Cartridge Fitting Inlet 10 = = 2 Port, Standard C-Seal
(Note: Cartridge Fitting for 1/8" O.D. Plastic Tubing)
LP1NO = Air Operated Normally Open with Integral Cartridge Fitting
(Note: Cartridge Fitting for 1/8" O.D. Plastic Tubing) Outlet 20 = = 3 Port, Standard C-Seal
MATERIAL
S = 316L Stainless Steel 30 = = 3 Port, Standard C-Seal
* LK Includes LOTO Lever for Mini Lever type Valve.

60 = = "W" Seal
** Recommended for Nitrous Oxide (N20) Service.
*** Only available with 1-1/8" body size

Vespel® is a registered trademark of DuPont Company.
Elgiloy® is a registered trademark of Elgiloy Company.
PEEK™ is a trademark of Victrex plc.
UHP
SM930 1-1/8” & 1-1/2” Diaphragm
Valve
Parker Hannifin Corporation’s Veriflo Division materials of construction
▼
presents the Surface Mount 930 Air Operated Wetted
and Manual Diaphragm Valve. The SM930 Body . . . . . . . . . . . “VeriClean”, Veriflo's custom
diaphragm valve provides exceptional . . . . . . . . . high purity type 316L Stainless Steel™
Seat . . . . . . . . . PCTFE, optional Vespel® or PEEK™
performance for today’s modular surface Diaphragm . . . . . . . . . . . . . Elgiloy® or equivalent
mount systems. Non-wetted
Nut . . . . . . . . . . . . . . . . . . . . . . . . . . Stainless Steel
Cap . . . . . . . . . . . . . . . . . . . . . . . . . Stainless Steel
▼
AOP. . . . . . . . . . . . . . . . . . . . . 125 psig (8.6 barg)
Manual . . . . . . . . . . . . . . . . . . 250 psig (17 barg)
Minimum operating pressure. . . . . . . . . Vacuum
AOP Actuation . . . . . . 75 psig (5 barg) nominal
Temperature . . . . . . . . . . . . . . . . . . -40°F to 150°F
. . . . . . . . . . . . . . . . . . . . . . . . . . . (-40°C to 66°C)
Bake out . . . . 250°F (121°C) in the open position
▼
Flow capacity:
Standard Seal
AOP . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Cv = .25
1/4 Turn manual. . . . . . . . . . . . . . . . . . . . Cv = .20
(SEMI Flow Coefficient Test# F-32-0998)
Design Leak Rate:

Outboard . . . . . . . . . . . . . . . . . 1x10-9 scc/sec He
Inboard . . . . . . . . . . . . . . . . . . 2x10-10 scc/sec He
Across seat . . . . . . . . . . . . . . . . 1x10-9 scc/sec He

AOP . . . . . . . . . . . . . . . . . . . . . 188 psig (13 barg)
1/4 Turn Manual . . . . . . . . . . . 375 psig (26 barg)
features
Meets SEMI modular interface. Design Burst Pressure:
▼ ▼
AOP . . . . . . . . . . . . . . . . . . . . . 375 psig (26 barg)

“VeriClean”, Veriflo’s low sulfur high 1/4 Turn Manual . . . . . . . . . . . 750 psig (52 barg)
purity 316L Stainless Steel™, which
▼
standard connections
enhances electropolishing, and
SEMI Modular Interface
▼
surface finishes
Standard surface finish 5 micro
▼
Standard Ra . . . . . . . . . . . . . . . . . . . 5 micro inch

inch Ra (.13 micro meter). . . . . . . . . . . . . . . . . . . . . (.13 micro meter) or less

▼ ▼
Fully field serviceable seat (special

tool required).
Fully functional for pressure ranges from
▼
vacuum to 125 psig for Air Operated

valves and 250 psig for manual valves.
▼

into wetted area.
▼
SM930 1-1/8” & 1-1/2”
Dimensional Drawings 1-1/2”
ø1.12
(28.4 mm) 1/8"-27NPT
1.40
(35.6 mm)
3.46
87.9 mm)
2.74
(69.7 mm) 2.05
(52.1 mm)
.32 2.44
(8.1 mm) (62 mm)
SM930 LP NC SM930 M LK
1.50 ø1.50
(38.1 mm) (38.1 mm)
1.95 1.98
(49.5 mm) (50.3 mm)
SM930 M SM930 I
Standard Mini-Lever Color Is Blue Standard Indicating Knob Color Is Black
.305 4X Ø.219 1.50

(7.7 mm) Ø.290 (5.6 mm) (38.1 mm)
(7.4 mm)
OUTLET
1.19 SQ 1.18 1.50
(30.2 mm) (30 mm) (38.1 mm)
INLET
OUTLET 1.02 INLET

4xØ.22 1.50 SQ (26.0 mm)
(5.6 mm) (38.1 mm)
1-1/2" W-Seal (60)
1-1/2" Standard C-Seal (10)
SM930 1-1/8” & 1-1/2”
Dimensional Drawings 1-1/8”
1.12 Ø.218
(28.6 mm) (5.5 mm)
3.52 3.41
(89.4 mm) (86.6 mm)
2.80
(71.1 mm)
.26 .26
(6.6 mm) (6.6 mm)
SM930M_2 SM930M_2LK
Standard Mini-Lever Color Is Blue Standard Loto-Mini-Lever Color Is Red
Ø 1.12 ø1.12
(28.4 mm) (28.4 mm)
3.61 3.61
(91.7 mm) (91.7 mm)
.26 .26
(6.6 mm) (6.6 mm)
SM930LP1NC_2 SM930LPNC_2
New Integral Cartridge Fitting Connects
To 1/8" O.D. Plastic Tubing 1.125 SQ
(28.6 mm)
4X Ø.173
.305 (4.4 mm)
4x Ø .187 (7.75 mm)
(4.7 mm)
INLET
.86 .86
(21.7 mm) (21.8 mm)
OUTLET
1.125 SQ OUTLET .79 INLET

(28.6 mm) (20.1 mm)
1-1/8" Standard C-Seal (10) 1-1/8" W-Seal (60)
SM930 1-1/8” & 1-1/2”
SM930 M S 10 VESP
BASIC SERIES OPTIONAL FEATURES

SM930 LK = LockOut-TagOut*
VESP = Vespel® Seat**
PEEK = PEEK™ Seat
TYPE
G = Toggle
I = Indicating Handwheel Consult Factory For Additional
Handle Colors
M = Mini-Lever
LPNC = Air Operated Normally Closed BASE SIZE
LPNO = Air Operated Normally Open = 1-1/2" Interface
LP1NC = Air Operated Normally Closed 2 = 1-1/8" Interface
with 1/8" O.D.Integral
Cartridge Fitting
LP1NO = Air Operated Normally Open PORTING
with 1/8" O.D.Integral
Cartridge Fitting Inlet 10 = = 2 Port, Standard C-Seal
MATERIAL Outlet 20 = = 3 Port, Standard C-Seal

S = 316L Stainless Steel
* LK includes LockOut-TagOut bracket 30 = = 3 Port, Standard C-Seal

for G-Type Valve; LOTO Clamp or Lever
for M type Valve 60 = = "W" Seal
** Recommended for Nitrous Oxide (N20) Service

Vespel® is a registered trademark of DuPont.
High Flow
SM955 Valve 1-1/2” Diaphragm Valve
Parker Hannifin Corporation’s Veriflo
▼
Division presents the Surface Mount 955
Air Operated and Manual Diaphragm Wetted
Body. . . . . . . “VeriClean”, Veriflo’s custom high
Valve. The SM955 provides exceptional .. purity Type 316L VAR Stainless Steel™
performance for today’s modular surface Seat . . . . . . . . PCTFE, optional Vespel®, or PEEK™
mount systems that have high flow Diaphragm . . . . . . . . . . . . . Elgiloy® or equivalent
requirements. Non-Wetted
Nut . . . . . . . . . . . . . . . . . . . . . . 316L Stainless Steel
Cap . . . . . . . . . . . . . . . . . . . . . 316L Stainless Steel
▼
AOP . . . . . . . . . . . . . . . . . . . . . 125 psig (8.6 barg)
Manual . . . . . . . . . . . . . . . . . . . 250 psig (17 barg)
Minimum operating pressure . . . . . . . . . Vacuum

Temperature. . . . . –40°F to 150°F (–40°C to 66°C)
▼
Flow capacity:
Standard Seal
AOP . . . . . . . . . . . . . . . . . . . . . . . . . . . . Cv = .30
1/4 Turn Manual . . . . . . . . . . . . . . . . . . Cv = .25
features High Flow Seal

AOP . . . . . . . . . . . . . . . . . . . . . . . . . . . . Cv = .50
Meets SEMI Modular Interface.
▼ ▼
1/4 Turn Manual . . . . . . . . . . . . . . . . . . Cv = .35

. . . . . . . . (SEMI Flow Coefficient Test# F-32-0998)
Standard Seal: 0.30 Cv for AOP style,
0.25 Cv for 1/4 turn manual style. High Design Leak Rate:
Flow Seal: 0.50 CV for AOP style, 0.35 Outboard. . . . . . . . . . . . . . . . . 1 x 10–9 scc/sec He
CV for 1/4 turn style valves. Inboard . . . . . . . . . . . . . . . . . . 2 x 10–10 scc/sec He
Across seat. . . . . . . . . . . . . . . . 4 x 10–9 scc/sec He
“VeriClean” low sulfur high purity
▼
316L VAR Stainless Steel™, which Design Proof Pressure:

AOP. . . . . . . . . . . . . . . . . . . . 188 psig (13 barg)
enhances electropolishing, and
1/4 Turn Manual . . . . . . . . . . 375 psig (26 barg)
Standard surface finish 5 micro inch Ra
▼
AOP. . . . . . . . . . . . . . . . . . . . 375 psig (26 barg)

(.13 micro meter). 1/4 Turn Manual . . . . . . . . . . 750 psig (52 barg)
▼ ▼
Fully field serviceable seat (special tool SEMI modular interface
required).
▼
internal volume
Fully functional for pressure ranges .70 cc
▼
from vacuum to125 psig for Air

▼
surface finishes
Operated valves and 250 psig for Standard Ra. . . . . . . . . . . . . . . . . . . . 5 micro inch
manual valves. . . . . . . . . . . . . . . . . . . . . . (.13 micro meter) or less
Change from air operated actuator to

▼
approximate weight
lever or visa versa without intruding .70 lbs (.32 kg)
into wetted area.
▼

SM955 Valve 1-1/2”
1/8-27 NPT
1/8 - 27 NPT
Ø1.55
(39.4mm)
1.29
(32.8 mm)
2.81
(71.4 mm) 2.35
(59.7 mm)
SM955 LP NC SM955 LP N0
OPEN
CLOSE
1.50
(38.1 mm) 1.50
(38.1 mm)
2.02 1.97
(51.3 mm) (50.0 mm)
SM955 I SM955 M
SM955 Valve 1-1/2”
.57
(14.5 mm)
OPEN
OPEN
CLOSE
1.43 1.40
(36.6 mm) (35.6 mm)
CLOSED 3.52
3.23 89.4 mm)
(82.0 mm)
ø.390
(9.9 mm) 2.50
(63.5 mm)
SM955 G LK SM955 M LK
.305 4X Ø.219 1.50

Ø.290
(7.7 mm) (7.4 mm) (5.6 mm) (38.1 mm)
OUTLET
1.19 SQ 1.18 1.50
(30.2 mm) (30 mm) (38.1 mm)
INLET
4xØ.22 1.50 SQ OUTLET 1.02 INLET

(5.6 mm) (38.1 mm) (26.0 mm)
1-1/2" Standard C-Seal (10) 1-1/2" W Seal (60)
.455 Ø.440
(11.6 mm) (11.2 mm)
OUTLET
1.19 SQ
(30.2 mm)
INLET
1.50 SQ
(38.1 mm) 4xØ.22
(5.6 mm)
1-1/2" High Flow C-Seal (11)
SM955 Valve 1-1/2”
SM955 M S 10 VESP

SM955 LK = LockOut-TagOut*
VESP = Vespel® Seat**
TYPE PEEK = PEEK™ Seat
G = Toggle Consult Factory For Additional Handle Colors
M = Mini-Lever
LPNC = Air Operated Normally Closed PORTING
LPNO = Air Operated Normally Open
Inlet 10 = = 2 Port, Standard C-Seal
MATERIAL
S = 316L VAR Stainless Steel
Outlet 11 = = 2 Port, High Flow C-Seal
* LK includes LockOut-TagOut bracket for
G-Type Valve or LOTO Clamp for M type Valve
20 = = 3 Port, Standard C-Seal
** Recommended for Nitrous Oxide (N20) Service
Vespel® is a registered trademark of DuPont.
Elgiloy® is a registered trademark of Elgiloy Company. 21 = = 3 Port, High Flow C-Seal
30 = = 3 Port, Standard C-Seal
60 = = "W" Seal
930 Valve
▼
Division presents the 930 valve for use
in ultra high purity applications. Wetted
Body . . “VeriClean”, Veriflo's custom high purity
type 316L VAR Stainless Steel™, Hastelloy C-22®
Seat . . . . . . . . . . . . . . . . PCTFE, optional Vespel®
Diaphragm . . . . . . . . . . . . . Elgiloy® or equivalent
Non-wetted
Nut. . . . . . . . . . . . . . . . . . . . . . 316L Stainless Steel
Cap. . . . . . . . . . . . . . . . . . . . . 316L Stainless Steel
▼
AOP. . . . . . . . . . . . . . . . . . . . . 125 psig (8.6 barg)
Manual . . . . . . . . . . . . . . . . . . 250 psig (17 barg)
AOP Actuation . . . . . . 75 psig (5 barg) nominal
Temperature . . . . . . 0°F to 150°F (-18°C to 66°C)
▼
Flow capacity:
AOP . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Cv = .3
Lever. . . . . . . . . . . . . . . . . . . . . . . . . . . . . Cv = .22
Design Leak Rate:

Outboard . . . . . . . . . less than 1x10 -9 scc/sec He
Inboard . . . . . . . . . . less than 2x10 -10 scc/sec He
Across seat . . . . . . . . less than 1x10 -9 scc/sec He

AOP . . . . . . . . . . . . . . . . . . . . . 188 psig (13 barg)
Manual . . . . . . . . . . . . . . . . . . 375 psig (26 barg)

features AOP . . . . . . . . . . . . . . . . . . . . . 375 psig (26 barg)
Manual . . . . . . . . . . . . . . . . . . 750 psig (52 barg)
“VeriClean”, Veriflo’s low sulfur high
▼
standard configuration
purity 316L VAR Stainless Steel™, which
Any configuration of FS male and/or female fittings.
enhances electropolishing, welding 1/4” gland to gland length . . . . . . . 2.78± .02 in.
and corrosion resistance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . (70.6± .05 mm)
Optional. . . . . . . . . . 3.06± .02 in. (77.7 ± .05 mm)
Standard surface finish 5 micro inch Ra 1/2” gland to gland length . . . . . . . 4.14 ± .02 in.
▼
(.13 micro meter). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . (105.2 mm)

1/4” tube stubs inlet and outlet
Internally threadless and springless. End to end length . . . 1.75±.02 in. (44.5± .05 mm)
▼ ▼
Optional. . . . . . . . . . . 1.61±.02 in. (40.7± .05 mm)

Fully functional from vacuum to 3/8” & 1/2” tube stubs inlet and outlet
125 psig (for Air Operated Actuator), End to end length . . . 2.24±.02 in. (56.9± .05 mm)
250 psig for manual versions. Other configurations available including as
many as five ports.
▼ ▼
Aerodynamic, fully swept flow passages.

See Valve Selection Guide.
Minimum particle generation and
particle entrapment areas.
▼
internal volume
2.64 cc (including face seal fittings)
▼
surface finish
Standard Ra . . . . . . . . . . . . . . . . . . . 5 micro inch
into wetted area. . . . . . . . . . . . . . . . . . . . . (.13 micro meter) or less

▼ ▼
approximate weight
1.75 lbs. (.80 kg)
Maintains key dimensions of Veriflo’s
944 and 945 valves.
930 Valve
930 AOP LP NC 930 AOP LP NO
1/8-27 NPT 1/8-27 NPT

Ø1.12
(28.4 mm)
Ø1.29
(32.8mm)
3.35
(85.1 mm) 2.97
(75.4mm)
OUTLET INLET OUTLET INLET
.44 .44
(11.2 mm) (11.2 mm)
1.125 SQ 1.125 SQ
(28.6 mm) (28.6 mm)
2.78 2.78
(70.6 mm) (70.6 mm)
930 L FS8 930 L TS8
OPEN
OPEN
1.75 R
CLOSE (44.5 mm) 1.75 R
(44.5 mm)
CLOSE
1.75 1.75
(44.5 mm) (44.5 mm)
2.56 2.56
(65 mm) INLET (65 mm)
OUTLET
OUTLET INLET
.44 .44
(11.2 mm) (11.2 mm)
1.25 SQ 1.25 SQ
(31.8 mm) (31.8 mm)
4.14 2.24
(105.2 mm) (56.9 mm)
#10-32 UNF
4 PL
.708
(18 mm)
1.00
(25.4 mm)
Standard Mounting Hole Pattern
930 Valve
930 M 930 I
R
OPEN
CLOSE
1.50 1.50
(38.1 mm) (38.1 mm)
2.56 2.58
(65 mm) (65.5 mm)
.44 .44
(11.2 mm) (11.2 mm)
1.125 SQ 1.125 SQ
(28.6 mm) (28.6 mm)
2.78 2.78
(70.6 mm) (70.6 mm)
930 G LK BRACKET 930 M LK CLAMP
.57
(14.5 mm)
OPEN
OPEN
CLOSE
1.43
(36.3 mm)
1.40
CLOSED (35.6 mm)
3.35
Ø.390
(85.1 mm)
(9.9 mm) 3.58
2.13 (90.9MM)
(54.1 mm)
3.00
OUTLET 2.61 (7.62MM)
INLET
(66.3 mm)
OUTLET INLET
.44
1.75 (11.2 mm)
(44.5 mm)
1.125 SQ
(28.6 mm)
#10-32 UNF 2.78

4 PL (70.6 mm)
.708
(18 mm)
1.00
(25.4 mm)
930 Valve
Flow Curve
.3 C v Actuator Types
125.0
120.0
115.0
∆P = 1 psi
110.0
105.0
100.0 ∆P = 2 psi
95.0
Inlet Pressure (PSIG)
90.0
85.0
80.0 ∆P = 3 psi
75.0
70.0
65.0
60.0
55.0
50.0 ∆P = 5 psi
45.0
40.0
35.0
30.0
25.0
20.0
15.0
10.0
5.0
0.0
0 50 100 150 200 250 300 350
N2 Flow (SLPM)
930 AOPLPNC S FSFM VESP

930 VESP = Vespel® Seat (For N20 use)
TYPE LK = LockOut-TagOut **
AOPLPNC = Air Operated, Low Pressure, PM = Panel Mount ***
Normally Closed 2.3 = 1/4" Fixed Male Face Seal (2 Port Only)
AOPLPNO = Air Operated, Low Pressure,
Normally Open CONNECTIONS
G = Toggle FSMM = 1/4" Face Seal, Male in-Male out
I = Indicating Handwheel FSFF = 1/4" Face Seal, Female in-Female out
L = Lever FSFM = 1/4" Face Seal, Female in-Male out
M = Mini Lever FSMF = 1/4" Face Seal, Male in-Female out
S = Spin Handwheel FS8MM* = 1/2" Face Seal, Male in-Male out
FS8FF* = 1/2" Face Seal, Female in-Female out
MATERIAL FS8FM* = 1/2" Face Seal, Female in-Male out
S = 316L VAR Stainless Steel FS8MF* = 1/2" Face Seal, Male in-Female out
H = Hastelloy C-22® TS = 1/4" Tube Stub
* 1/2" Connections use larger size body, TS6 = 3/8" Tube Stub
please see dimensional drawings TS8* = 1/2" Tube Stub
** LockOut-TagOut Clamp for M Type Valves
LockOut-TagOut Bracket for G Type Valves
*** Not available on I and AOP versions
Hastelloy C-22® is a registered trademark of Haynes International, Inc.
Kel-F 81® is a registered trademark of 3M Company.
High Purity
930Y Manifold Valve
▼
Division presents the 930Y, a diaphragm
valve engineered to meet the specific Wetted
Body . . . . . . . “VeriClean”, Veriflo’s custom high
requirements of semiconductor OEM tool . purity Type 316L Stainless Steel™
manufacturers. Seat . . . . . . . . . . PCTFE (optional Vespel®, PEEK™)
The 930Y is a sophisticated design with Veriflo’s
Non-wetted
proven ultra high purity, low internal volume Nut. . . . . . . . . . . . . . . . . . . . . . 316L Stainless Steel
components. Space savings and fewer welds Cap . . . . . . . . . . . . . . . . . . . . . 316L Stainless Steel
make the 930Y ideal for process control and Actuator material
purge systems. Body . . . . . . . . . . . . . . . . . . . Anodized Aluminum
Pistons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Brass
O-ring seals. . . . . . . . . . . . . . . . . . . . . . . . . . Viton®
▼
AOP . . . . . . . . . . . . . . . . . . . . . 125 psig (8.6 barg)
Manual . . . . . . . . . . . . . . . . . . . 250 psig (17 barg)

Temperature . . . . . . . 0°F to 150°F (-18°C to 66°C)
Bake out. . . . . 250°F (121°C) in the open position
▼
Flow capacity:
AOP . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Cv = .3
Lever . . . . . . . . . . . . . . . . . . . . . . . . . . . . Cv = .22
(SEMI Flow Coeffiecient Test #F-32-0998)
Design Leak Rate:

Outboard . . . . . . . . . . less than 1x10-9 scc/sec He
Inboard . . . . . . . . . . . less than 2x10-10 scc/sec He
Across seat . . . . . . . . . less than 1x10-9 scc/sec He
features Design Proof Pressure:

AOP . . . . . . . . . . . . . . . . . . . . . . 188 psig (13 barg)
High cycle life. Manual . . . . . . . . . . . . . . . . . . . 375 psig (26 barg)
▼ ▼ ▼ ▼ ▼
Ideal for valve manifold boxes (VMB). Design Burst Pressure:

AOP . . . . . . . . . . . . . . . . . . . . . . 375 psig (26 barg)
Manual . . . . . . . . . . . . . . . . . . . 750 psig (52 barg)
Ultra high performance.
▼
surface finishes
Internally threadless and springless. Standard Ra . . . . . . . . . . . . . . . . . . 10 micro inch
. . . . . . . . . . . . . . . . . . . . (.25 micro meter) or less
NO (normally open),NC (normally Optional Ra . . . . . . . . . . . . . . . EV = 5 micro inch
closed), or manual actuators . . . . . . . . . . . . . . . . . . . . (.13 micro meter) or less
available.
▼
Any combination of FS male and / or female fittings:
Fully functional under vacuum
▼
1/4” Gland to gland length . . . . . . . . 4.69 or 4.06

conditions.
. . . . . . . . . . . . . . . . . . (see dimensional drawing)
1/4” tube stubs inlet and outlet available:

End to end length . . . . . . . . . . . . . . . . . . . . . 3.62
▼
internal volume
4.26 cc
▼
approximate weight
2.1 lbs (0.95 kgs)
930Y
NC NO NC NO NC NO
2.66
2.15
2.75 2.75
930Y1NO/NCFSMFFA 4.69 4.06
930Y1NO/NCFSFFFA 930Y1NO/NCFSFFFB
NO NC
Ordering Example
Connection 2
V2 - Second V1 - First
Valve Valve
930Y2NC/NOFSFMFA
NC NC
Connection 3 Connection 1
930Y3NC/NCFSFFMA 930Y1M/NCFSMFFA
Ordering Information Flow Curve

.3 Cv Actuator Types
930Y 1 NO/NC FS MMF A 125.0
120.0
115.0
∆P = 1 psi
BASIC SERIES 110.0
105.0
930Y 100.0 ∆P = 2 psi
95.0
FLOW PATH 90.0

85.0
1 = Down Stream Purge 80.0 ∆P = 3 psi
75.0
2 = Up Stream Purge 70.0
65.0
3 = Common 60.0
TYPE (V1/V2)
55.0
50.0 ∆P = 5 psi
45.0
I = Indicating Handwheel 40.0
35.0
M = Mini Lever 30.0
NC = AOP LP Normally Closed 25.0
20.0
NO = AOP LP Normally Open 15.0
10.0
PORT STYLE 5.0

0.0
0 50 100 150 200 250 300 350
FS = 1/4" Face Seal
TS = 1/4" Tube Stub N2 Flow (SLPM)
* Recommended for Nitrous Oxide (N20) Service. DIMENSIONS

Elgiloy® is a registered trademark of Elgiloy Company. A = 4.69 x 2.15
Vespel® is a registered trademark of DuPont Company. B = 4.06 x 2.66 (FSF or TS only)
PEEK™ is a registered trademark of Pictrex plc.
OPTIONAL FEATURES
RD = Red Lever
BK = Black Lever
PEEK = PEEK™ Seats
VESP = Vespel® Seats*
PORT CONFIGURATION
M = Face Seal Male
F = Face Seal Female
Blank = Tube Stub
945 Valve
▼
presents the Quantum 945 Valve. The 945
Wetted
was designed specifically for semiconductor Body. . . . “VeriClean”, Veriflo’s custom high purity
process control and have all of the features type 316L Stainless Steel™, optional Hastelloy C-22®
and benefits of the 944 Series with reduced Seat . . . . . . . . . . . . . . . . . . PCTFE, optional Vespel®
Diaphragm . . . . . . . . . . . . . . Elgiloy® or equivalent
internal volume and body size. Compression member . . . . . “VeriClean”, Veriflo’s
. . . . . custom high purity type 316L Stainless Steel,
A unique feature of the 945 is the machined- . . . . . . . . . . . . . . . . . . . . . optional Hastelloy C-22®
on tube stubs, which allows for improved
Non-wetted
dimensional control. Nut . . . . . . . . . . . . . . . . . . . . . . . 316L Stainless Steel
Cap . . . . . . . . . . . . . . . . . . . . . . 316L Stainless Steel
▼
AOPHP and Manual . . . . . . . 3500 psig (240 barg)
AOPLP and Toggle . . . . . . . . . 125 psig (8.6 barg)
For oxygen . . . . . . . . . . . . . . . Refer to CGA G-4.4
. . . . . . . . Industrial Practices for Gaseous Oxygen
Actuation pressure:
AOPLP. . . . . . . 60 to 120 psig (4 barg to 8.3 barg)
AOPHP . . . . . . . . . . . . . . 75 psig nominal (5 barg)
Temperature. . . . . . -40°F to 150°F (-40°C to 66°C)
▼ Bakeout . . . . . 250°F (121°C) in the open position
Flow capacity:
AOP,G,S,I . . . . . . . . . . . . . . . . . . . . . . . . . . Cv= 0.25
Lever. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Cv= 0.18
features (SEMI Flow Coefficient Test #F-32-0998)
“VeriClean”, low sulfur high purity 316L Design Leak Rate:

▼
Outboard. . . . . . . . . . . . . . . . . . 1 x 10-9 scc/sec He

Stainless Steel™ enhances electropolishing, Inboard . . . . . . . . . . . . . . . . . . 2 x 10-10 scc/sec He
welding and corrosion resistance. Across Seat . . . . . . . . . . . . . . . . 4 x 10-9 scc/sec He
Standard Surface Finish is 5 micro inch Ra.

▼ ▼

Machined on tube stubs or fixed AOPLP and Toggle . . . . . . . . . . 188 psig (13 barg)
male Face Seal connections.
AOPHP and Manual . . . . . . 10500 psig (724 barg)
Fully field serviceable seat can be
▼
AOPLP and Toggle . . . . . . . . . . 375 psig (26 barg)

replaced without special tools.
▼
Interchangeable actuators without Any combination of FS male and / or female
▼
fittings or tube stubs including as many as

breaking into wetted area.
five ports.
▼ ▼
See Valve Selection Guide
NO (normally open) or NC (normally

▼
interrnal volume
closed) actuator available. 1.26 cc (no glands); 2.7 cc (including glands)
Fully functional under vacuum conditions.

▼
▼ ▼
surface finishes
5 micro inch Ra (.13 micro meter) or less
Unique patented compression member
▼
approximate weight
which loads the seal uniformly without 0.9 lbs (0.42 kgm)
the need for threaded components or
crimping operations.
945 Valve
Dimensional Drawing
945M 945I
945 I
R
OPEN
CLOSE
1.50
1.50 (38 mm)
(38 mm)
2.56 2.58
(65 mm) (65.5 mm)
.44 .44
(11.2 mm) (11.2 mm)
1.125 SQ 1.125 SQ
(28.6 mm) (28.6 mm)
2.78 2.78
(70.6 mm) (70.6 mm)
945GLK BRACKET 945MLK CLAMP
.57
(14.5 mm)
OPEN
OPEN
CLOSE
1.43
(36.3 mm)
1.40
CLOSED (35.6 mm)
3.35
(85 mm) Ø.390
(10 mm) 3.58
2.13 (90.9 mm)
(54 mm)
3.00
OUTLET INLET 2.61 (7.62 mm)
(66.3 mm)
OUTLET INLET
.44
1.75 (11.2 mm)
(44.5 mm)
1.125 SQ
(28.6 mm)
#10-32 UNF 2.78

4 PL (70.6 mm)
.708
(18 mm)
1.00
(25.4 mm)
945 Valve
Dimensional Drawing
945AOPLPNC 945AOPLPNO
1/8-27 NPT 1/8-27 NPT

1.12
(28.4 mm)
1.29
(32.8 mm)
3.35
(85 mm) 2.97
(75.4 mm)
.44 .44
(11.2 mm) (11.2 mm)
1.125 SQ 1.125 SQ
(28.6 mm) (28.6 mm)
2.78 2.78
(70.6 mm) (70.6 mm)
945LSFS8FM 945AOPHPNCSTS6
OPEN
CLOSE 1.75 R
(44.5 mm)
1/8-27 NPT
1.75
(44.5 mm) Ø2.22
(56.4 mm)
2.56
(65 mm) OUTLET INLET
.44
(11.2 mm)
4.04
1.25 SQ (102.6 mm)
(31.8 mm)
4.14
(105.2 mm)
TS6 OUTLET TS6 INLET
.44
(11.2 mm)
#10-32 UNF
4 PL
.708 1.125 SQ
(18 mm) (28.6 mm)
2.78
(70.6 mm)
1.00
(25.4 mm)
945 Valve
Flow Curve
Flow (SCFM)
.7 1.4 2.1 2.8 3.5 4.2 4.9 5.6
250 17.2
DP=1 psi
DP=5 psi
Inlet Pressure (BARG)

200 13.8
DP=2.5 psi
150 DP=25 psi 10.3

DP=10 psi
100 7
50 3.4
0
0 20 40 60 80 100 120 140 160
Flow (SLPM)
945 L S FSMM VESP

945 LK = LockOut-TagOut**
PM = Panel Mount***
TYPE TH = Hastelloy C-22® Trim (Compression Member)
AOPHPNC = Air Operated, High Pressure,
VESP = Vespel® Seat****
Normally Closed
BK = Black Lever or Handwheel
AOPLPNC = Air Operated, Low Pressure,
BU = Blue Indicating Handwheel
Normally Closed
2.3 = 1/4" Fixed Male Face Seals (2 ported only)
AOPLPNO = Air Operated, Low Pressure,
Normally Open
G = Toggle
CONNECTIONS
FSMM = 1/4" Face Seal, Male in-Male out
I = Indicating Handwheel
FSFF = 1/4" Face Seal, Female in-Female out
L = Lever
FSFM = 1/4" Face Seal, Female in- Male out
M = Mini Lever
FSMF = 1/4" Face Seal, Male in-Female out
S = Handwheel
FS8MM = 1/2" Face Seal, Male in-Male out
MATERIAL FS8FF = 1/2" Face Seal, Female in-Female out
S = 316L Stainless Steel FS8FM = 1/2" Face Seal, Female in- Male out
H = Hastelloy C-22®* FS8MF = 1/2" Face Seal, Male in-Female out
* Includes Hastelloy C-22® body and compression member
TS = 1/4" Tube Stubs
** LockOut-TagOut Clamp for M Type Valves TS6 = 3/8" Tube Stubs
LockOut-TagOut Bracket for G Type Valves TS8♦ = 1/2" Tube Stubs
*** Not available with Indicating Handwheel (I) or AOP Type Valves
**** Recommended for Nitrous Oxide (N20) Service
♦ 1/2" Connections Use Larger Body Size, Please See Dimensional Drawings
Note: See Valve Selection Guide for multiple porting selections.

PEEK™ is a registered trademark of Victrex plc.
945Y High Purity
Manifold Valve
▼
presents the 945Y. The 945Y is a custom
built high-purity diaphragm valve manifold, Wetted
engineered to meet the specific require- . . . . . . . . . . purity Type 316L VAR Stainless Steel™
ments of semiconductor OEM tool Seat . . . . . . . . . . . PCTFE,optional Vespel®, PEEK™
®
Diaphragm . . . . . . . . . . . . . Elgiloy or equivalent
manufacturers. Compression memeber . . “VeriClean”, Veriflo’s
custom high purity type 316L VAR Stainless Steel
The 945Y is a sophisticated design with . . . . . . . . . . . . . . . . . . . . optional Hastelloy C-22®
Veriflo’s proven ultra high purity, low Non-wetted
Nut:. . . . . . . . . . . . . . . . . . . . . . 316L stainless steel
internal volume components. Space Cap:. . . . . . . . . . . . . . . . . . . . . 316L stainless steel
savings and fewer welds make the
945Y ideal for process control and Actuator material
Body . . . . . . . . . . . . . . . . . . . Anodized aluminum
purge systems. Pistons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Brass
▼
AOPLP and Manual. . . . . . . . . 125 psig (8.6 barg)
For oxygen . . . . . . . . . . . . . . . Refer to CGA G-4.4
. . . . . . . . Industrial Practices for Gaseous Oxygen
Actuation pressure:
AOPLP. . . . . . . 60 to 120 psig (4 barg to 8.3 barg)
AOPHP . . . . . . . . . . . . . . 75 psig nominal (5 barg)
features Temperature. . . . . . -40°F to 150°F (-40°C to 66°C)
Bakeout . . . . . 250°F (121°C) in the open position
High cycle life.
▼ ▼ ▼
Ideal for valve manifold boxes (VMB). Flow capacity
Process valve. . . . . . . . . . . . . . . . . . . . . . . Cv 0.25
Fully field serviceable seat can be Purge Valve . . . . . . . . . . . . . . . . . . . . . . . . Cv0.17
. . . . . . . . (SEMI Flow Coefficient Test #F-32-0998)
replaced without special tools.
Design Leak Rate:
▼ ▼ ▼
Across Seat . . . . . . . . . . . . . . 4 x 10-9 scc/sec He

Inboard . . . . . . . . . . . . . . . . . 2 x 10-10 scc/sec He
Internally threadless and springless. Outboard . . . . . . . . . . . . . . . . 1 x 10-9 scc/sec He
NO (normally open),NC (normally

▼
surface finishes
closed), or manual actuators Standard Ra . . . . . . . . . . . . . . . . . . 10 micro inch
available.
Optional Ra . . . . . . . . . . . . . . . EV = 5 micro inch
Fully functional under all vacuum
▼

conditions.
▼
Unique patented compression
▼
member which loads the seal 1/4” Gland to gland length . . . . . . . . 4.69 or 4.06
uniformly without the need for . . . . . . . . . . . . . . . . . . (see dimensional drawing)
threaded component or crimping 1/4” tube stubs inlet and outlet available:
operations. End to end length:. . . . . . . . . . . . . . . . . . . . . 3.62
▼
internal volume
4.26 cc
▼
approximate weight
2.1 lbs (0.98 kgm)
945Y
945Y1NO/NCFSMFFA 945Y1NO/NCFSFFFA 945Y1NO/NCFSFFFB

NC NO NC NO
NC NO
2.66
2.15 (66.6 mm)
(54.6 mm)
2.75 2.75
(69.9 mm) (69.9 mm)
4.69 4.06
(119.1 mm) (103.1 mm)
Ordering Example
V2-Second Connection 2
NO NC Valve V1-First
Valve
945Y2NC/NOFSFMFA 945Y1M/NCFSMFFA
Flow Curve
Flow (SCFM)
.7 1.4 2.1 2.8 3.5 4.2 4.9 5.6
250 17.2
DP=1 psi
DP=5 psi
Inlet Pressure (BARG)
200 13.8
DP=2.5 psi
945Y 1 NO/NC FS MFF TH A 150 DP=25 psi 10.3

DP=10 psi
100 7
BASIC SERIES
945Y 50 3.4
FLOW PATH
0
1 = Down Stream Purge
0 20 40 60 80 100 120 140 160
2 = Up Stream Purge
3 = Common Flow (SLPM)
DIMENSIONS
TYPE (V1/V2) A = 4.69 x 2.15
HP= AOPHP Normally Closed* B = 4.06 x 2.66 (FSF or TS Only)
M = Mini Lever
OPTIONAL FEATURES
TH = Hastelloy C-22®
NC= AOPLP Normally Closed
Trim (Compression Member)
NO = AO LP Normally Open
PEEK = PEEK™ Seats
* Note: HP can only be used in combination VESP = Vespel® Seats**
with HP or M type actuators.
** Recommended for Nitrous Oxide (N20) Service PORT CONFIGURATION
M = Face Seal Male
Hastelloy C-22® is a registered trademark of Haynes International, Inc. F = Face Seal Female
Viton® is a registered trademark of DuPont Elastomers Company.
PORT STYLE
PEEK™ is a registered trademark of Victrex plc. FS = 1/4" Face Seal Male
TS = 1/4" Tube Stub
High Flow
955 Diaphragm Valve
▼
presents the Quantum 955 Manually Operated
diaphragm valve. The 955 provides higher flows Wetted
Body. . . . . . . . “VeriClean”, Veriflo’s custom high
in an exceptionally clean, compact device.
. purity Type 316L Stainless Steel™, Hastelloy® C-22
Seat . . . . . . . . . . PCTFE, optional Vespel®, PEEK™
Non-Wetted
Nut . . . . . . . . . . . . . . . . . . . . . . 316L Stainless Steel
▼
Maximum operating pressure . . . . . . . . . 250 psig
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . (17.22 barg)
For oxygen . . . . . . . . . . . . . . Refer to CGA G-4.4
Industrial practices for gaseous oxygen

Temperature. . . . . –40°F to 150°F (–40°C to 65°C)
▼
Flow capacity . . . . . . . . . . . . . . . . . . . . . . Cv= .55
. . . . . . . (SEMI Flow Coefficient Test #F-32-0998)
features Design Leak Rate:
.55 Cv flow capacity. Outboard. . . . . . . . . . . . . . . . . 1 x 10–9 scc/sec He
▼ ▼
Inboard . . . . . . . . . . . . . . . . . . 2 x 10–10 scc/sec He

“VeriClean” low sulfur high purity Across seat. . . . . . . . . . . . . . . . 4 x 10–9 scc/sec He
316L Stainless Steel™, which
Design Proof Pressure . . . . . . . . 375 psig (26 barg)
enhances electropolishing, welding,
Design Burst Pressure . . . . . . . . 750 psig (52 barg)
and corrosion resistance.
▼
▼ ▼ ▼

Any combination of FS male and/or female fittings:
Ideal for low vapor pressure gases.
1/4” Gland to gland length . . . . . . . . . . . . 2.96 in.
Fully functional from vacuum .. (75.1 mm)
to 250 psig. Optional . . . . . . . . . . . . . . . . . . 2.78 in. (70.6 mm)
Aerodynamic, smooth flow passages. Tube stubs inlet and outlet:

▼ ▼
End to end length . . . . . . . . . . 2.25 in. (57.1 mm)

Minimum particle generation and
entrapment. Note : Other configurations available as options
including as many as five ports
High cycle life.
▼ ▼ ▼
internal volume
100% Helium leak tested. 3.29 cc (including face seal fittings)
“Hurricane” cleaning, Veriflo’s

▼
surface finishes
proprietary cleaning process, Standard Ra. . . . . . . . . . . . . . . . . . . . 5 micro inch
removes metallic ions, organic films . . . . . . . . . . . . . . . . . . . . . (.13 micro meter) or less
and surface adhering particles.
▼
approximate weight
.81 lbs (.36 kg)
955
Dimensional Drawing Flow Curve

2.96 FLOW (scfm)
(75.2 mm)
3.5 7.1 10.6 14.1 17.7 21.2 24.7
250
DP=1 psi
225 15.5
1/4 FS-M 1/4 FS-F
Instrumentation
DP=2.5 psi
OUTLET INLET 200 13.8
INLET PRESSURE (barg)

INLET PRESSURE (psig)
DP=5 psi
175 12.0
150 10.3
Ø1.50 DP=10 psi
(38.1 mm) 125 8.6
100 7.0
75 5.2
50 3.4
25 1.7
2.65
(67.3 mm) 0 0
0 100 200 300 400 500 600 700
N2 FLOW (slpm)
.44
(11.2 mm) Nitrogen gas was used for flow curves.
1.25 SQ 1/4” FS 2.96” (75.1 mm) STD

(32 mm)
1/2” FS8 4.20” (106.7 mm) STD
#10 - 32 UNF - 2B
4 PL 1/4” TS 2.25” (57.1 mm)
3/8” TS6 2.25” (57.1 mm) STD
.708
(18 mm) 1/2” TS8 2.25” (57.1mm) STD
1/4” FS 2.78 (70.6 mm) Optional
1.00
(25.4 mm)
955 L S FSMM VESP

955 BL008 = Bleed Valve .008 Orifice
BL015 = Bleed Valve .015 Orifice
TYPE LK = LockOut-TagOut*
G = Toggle PM = Panel Mount**
I = Indicating Handwheel VESP = Vespel® Seat***
L = Lever PEEK = PEEK™ Seat
M = Mini Lever 2.78 = 2.78" End-To-End (1/4" FS Only)
MATERIAL
S = 316L VAR Stainless Steel CONNECTIONS
H = Hastelloy C-22® FSMM = 1/4" Face Seal, Male in-Male out
FSFF = 1/4" Face Seal, Female in-Female out
* LockOut-TagOut Clamp for M Type Valves FSFM = 1/4" Face Seal, Female in-Male out
LockOut-TagOut Bracket for G Type Valves
** Not available with Indicating Handwheel (I)
*** Recommended for Nitrous Oxide (N20) Service FS8MM= 1/2" Face Seal, Male in-Male out
FS8FF = 1/2" Face Seal, Female in-Female out
Note: See Valve Selection Guide for multiple porting selections. FS8FM = 1/2" Face Seal, Female in-Male out
Hastelloy C-22® is a registered trademark of Haynes International, Inc. FS8MF = 1/2" Face Seal, Male in-Female out
Elgiloy® is a registered trademark of Elgiloy Company. TS = 1/4" Tube Stub
PEEK™ is a registered trademark of Victrex plc. TS6 = 3/8" Tube Stub
TS8 = 1/2" Tube Stub
25 • HIGH PURITY
High Flow
955AOPLP Diaphragm
Valve
▼
presents the Quantum 955 Air-Operated materials of construction
diaphragm valve. The 955AOPLP is ideal for Wetted
low vapor pressure gasses such as WF6 and Body . . . . . . “VeriClean”, Veriflo’s custom high
BCL3. . . . . . . . . . . purity type 316L VAR Stainless Steel™,
. . . . . . . . . . . . . . . . . . . . . . . . . . . . Hastelloy C-22®
Seat. . . . . . . . . . PCTFE, optional Vespel®, PEEK™
Diaphragm. . . . . . . . . . . . . . Elgiloy®or equivalent
Non-Wetted
Nut . . . . . . . . . . . . . . . . . 316L Stainless Steel
Cap . . . . . . . . . . . . . . . . 316L Stainless Steel
Actuator Housing . . . . . . . . . . . . . . . . . Aluminum
▼
Maximum operating pressure 125 psig (8.6 barg)
Temperature . . . . . -40°F to 150°F (-40°C to 66°C)

Actuator pressure. . . . . . 60-120 psig (4-8.3 barg)
features
▼
.55 Cv flow capacity. Flow capacity . . . . . . . . . . . . . . . . . . . . .Cv = .55
▼ ▼
. . . . . . . .(SEMI Flow Coefficient Test #F-32-0998)

“VeriClean” low sulfur high purity
Design Leak Rate:
316L VAR Stainless Steel™, which
Outboard . . . . . . . . . . . . . . . . 1 x 10-9 scc/sec He
enhances electropolishing, welding, Inboard . . . . . . . . . . . . . . . . . 2 x 10-10 scc/sec He
and corrosion resistance. Across seat . . . . . . . . . . . . . . . 4 x 10-9 scc/sec He

▼ ▼
Any combination of 1/4” FS male and/or
Fully functional from vacuum to
female fittings:
125 psig.
Gland to gland length . . . . . . 2.96 in. (75.1 mm)
Ideal for low vapor pressure gasses.
▼ ▼ ▼
Optional . . . . . . . . . . . . . . . . . . 2.78 in. (70.6 mm)

Aerodynamic, smooth flow passages.
Tube stubs inlet and outlet:
Minimum particle generation and End to end length . . . . . . . . . . 2.25 in. (57.1 mm)
entrapment.
Other configurations available as options–
High cycle life (including corrosive
▼
including as many as four ports.

service). see Valve Selection Guide

▼ ▼
internal volume
“Hurricane” cleaning, proprietary
cleaning process, removes metallic
▼
surface finishes
ions, organic films and surface Standard Ra . . . . . . . . . . . . . . . . . . . 5 micro inch
adhering particles. (.13 micro meter) or less
▼
approximate weight
.81 lbs (.36 kg)
955AOPLP

FLOW (SCFM)
3.5 7.1 10.6 14.1 17.7 21.2 24.7

250
1/8-27 NPT DP=1 psi
955 AOP LP NC 1.55 DIA 225 15.5
(39.4 mm) DP=2.5 psi
200 13.8
INLET PRESSURE (BARG)

INLET PRESSURE (PSIG)
DP=5 psi
175 12.0
3.44 1.47 DIA 150 10.3

(87.4 mm) (37.3 mm) DP=10 psi
125 8.6
1.60
(40.6 mm) 100 7.0
75 5.2
1.25 SQ
(31.8 mm) .44
(11.2 mm) 50 3.4
2.96
(75.2 mm)
25 1.7
SEE TABLE FOR OTHER
CONNECTION DIMENSIONS 0 0
0.0 100.0 200.0 300.0 400.0 500.0 600.0 700.0
#10-32 UNF
4PL
.707
(18.0 mm) FLOW (std L/min)
1.00
(25.4 mm)
955 AOP LP NO 1.28 DIA Connection End to End Length

(32.5 mm) 1/4” FS 2.96” (75.1 mm) STD
1/4” FS 2.78” (70.6 mm) Optional
3.05 1/4” TS 2.25” (57.1 mm) STD

(77.5 mm)
3/8” TS6 2.25” (57.1 mm) STD
1/2” TS8 2.25” (57.1mm) STD
1/2” FS8 4.20 (106.7 mm) STD

955AOPLP NC S FSMM VESP
BASIC SERIES
955AOPLP = 955 Air Operated, Low Pressure OPTIONAL FEATURES
TYPE BL008 = Bleed Valve .008 Orifice
NC = Normally Closed BL015 = Bleed Valve .015 Orifice
NO = Normally Open LS = Limit Switch
PEEK = PEEK™ Seat
MATERIAL VESP = Vespel® Seat*
S = 316L VAR Stainless Steel 2.78 = 2.78" End-To-End (1/4" FS Only)
H = Hastelloy C-22® CONNECTIONS
* Recommended for Nitrous Oxide (N20) Service FSMM = 1/4" Face Seal, Male in-Male out
Note: Refer to Valve Selection Guide for multiple porting selections. FSFF = 1/4" Face Seal, Female in-Female out
Hastelloy C-22® is a registered trademark of Haynes International, Inc. FSFM = 1/4" Face Seal, Female in-Male out
Vespel® is a registered trademark of DuPont Company. FSMF = 1/4" Face Seal, Male in-Female out
FS8MM = 1/2" Face Seal, Male in-Male out
PEEK™ is a registered trademark of Victrex plc. FS8FF = 1/2" Face Seal, Female in-Female out
FS8FM = 1/2" Face Seal, Female in-Male out
FS8MF = 1/2" Face Seal, Male in-Female out
TS = 1/4" Tube Stub
955Y High Purity, High Flow
Manifold Valve
▼
presents the 955Y. The 955Y is a custom
built high-purity, high-flow diaphragm
Wetted
valve manifold, engineered to meet the
specific requirements of semiconductor purity Type 316L VAR Stainless SteelTM
OEM tool manufacturer and point-of-use Seal. . . . . . . . . . . PCTFE, optional Vespel®, PEEKTM
gas delivery systems. Diaphragm . . . . . . . . . . . . . Elgiloy® or equivalent
The 955 Y is a sophisticated design with Non-wetted

Veriflo’s proven ultra high purity, low Nut . . . . . . . . . . . . . . . . . . . . . . 316L stainless steel
Cap . . . . . . . . . . . . . . . . . . . . . 316L stainless steel
internal volume components. Space
savings and fewer welds make the Actuator material
955Y ideal for process control and Body . . . . . . . . . . . . . . . . . . . Anodized aluminum
purge systems. Pistons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Brass
▼
AOPLPNCNO . . . . . . . . . . . . . 125 psig (8.6 barg)
Manual . . . . . . . . . . . . . . . . . . 125 psig (8.6 barg)
For oxygen . . . . . . . . . . . . . . Refer to CGA G-4.4
Industrial Practices for Gaseous Oxygen
Temperature . . . . -40°F to 150°F (-40°C to 66°C)
Bakeout. . . . . 250°F (121°C) in the open position
▼
surface finishes
Standard Ra . . . . . . . . . . . . . . . . . 10 micro inch
. . . . . . . . . . . . . . . . . . . (.25 micro meter) or less
Optional Ra. . . . . . . . . . . . . . . . EV=5 micro inch
. . . . . . . . . . . . . . . . . . . (.13 micro meter) or less
▼
Flow capacity . . . . . . . . . . Cv 0.43 Process valve
. . . . . . . . (SEMI Flow Coefficient Test #F-32-0998)
Purge Valve. . . . . . . . . . . . . . . . . . . . . . . . Cv 0.35
Design Leak Rate:

features Across Seat . . . . . . . . . . . . . . 4 x 10-9 scc/sec He
Inboard . . . . . . . . . . . . . . . . . 2 x 10-10 scc/sec He
High cycle life.
▼ ▼ ▼ ▼
Outboard . . . . . . . . . . . . . . . . 1 x 10-9 scc/sec He
Ideal for valve manifold boxes (VMB).

▼
1/4” Gland to gland length . . . . . . . . 4.69 or 4.06
Change over from normally closed (see dimensional drawing)
(NC) to normally open (NO) without
1/4” tube stubs inlet and outlet available:
intruding into wetted area. End to end length:. . . . . . . . . . . . . . . . . . . . . 3.62
▼
Fully functional under vacuum

▼
internal volume
conditions. 4.49 cc
Large Cv ideal for low vapor pressure

▼
approximate weight
▼
gases such as WF6 and chlorinated 2.11 lbs (0.98 kgm)

gases such as HCI, CI2 and BCI3.
955Y
Cross Sectional Drawings Dimensional Drawings

NC NO NC NO NC NO
2.66
2.15
2.75 2.75
4.69 4.06
955Y1NO/NCFSMFFA 955Y1NO/NCFSFFFA 955Y1NO/NCFSFFFB
NO NC
Ordering Example
Connection 2
V2 - Second V1 - First
Valve Valve
955Y2NC/NOFSFMFA
NC NC
955Y3NC/NCFSFFMA 955Y1M/NCFSMFFA
Ordering Information Flow Curve

955Y 1 NO/NC FS MFF TH A FLOW (scfm)
3.5 7.1 10.6 14.1 17.7 21.2 24.7

250
DP=1 psi
225 15.5
BASIC SERIES DP=2.5 psi
200 13.8
955Y
INLET PRESSURE (barg)

INLET PRESSURE (psig)
DP=5 psi
175 12.0
FLOW PATH 150 10.3
1 = Down Stream Purge DP=10 psi
125 8.6
2 = Up Stream Purge
3 = Common 100 7.0
75 5.2
TYPE (V1/V2) 50 3.4
NC = AOP LP Normally Closed
25 1.7
NO = AOP LP Normally Open
0 0
M = Mini Lever
0 100 200 300 400 500 600 700
* Recommended for Nitrous Oxide (N2O) Service N2 FLOW (slpm)
DIMENSIONS
Hastelloy C-22® is a registered trademark of Haynes International, Inc. A = 4.69 x 2.15 (FS M or FS F)
Kel-F 81® is a registered trademark of 3M Company. B = 4.06 x 2.66 (FS F only)
PEEK™ is a registered trademark of Victrex plc. OPTIONAL FEATURES
VESP = Vespel®*
PEEK™= PEEK™ Seat
PORT CONFIGURATION
M = Face Seal Male
F = Face Seal Female
PORT STYLE
FS = 1/4" Face Seal
TS = 1/4" Tube Stub
High Pressure
TITAN II® AOP PLUS Diaphragm
Valve
▼
presents the TITAN II® AOP Plus high pressure materials of construction
diaphragm valve. The TITAN II® AOP is Wetted

specifically designed for high pressure, Body . . . . . . . . . . . “VeriClean”, Veriflo’s custom
high cycle, ultra high purity applications. high purity Type 316L Stainless Steel™
optional Hastelloy C-22® or Nickel 200
Diaphragm. . . . . . . . . . . . . . . . . . . . . . . . . Elgiloy®
Non-wetted
▼
Maximum operating pressure. . . . . . . . 3000 psig
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . (207 barg)
AOP Actuation:
Normally Closed . . . . . . . . . . . . . . 70 to 125 psig
. . . . . . . . . . . . . . . . . . . . . . . . . . . . (4.8 to 8.6 bar)
Normally Open . . . . . . . . . . . . . . . 70 to 125 psig
. . . . . . . . . . . . . . . . . . . . . . . . . . . . (4.8 to 8.6 bar)
See Chart Below
features
Temperature:
“VeriClean”, Veriflo’s custom high purity
▼
PCTFE Seat. . . . . . . . . . . . . . . . . . . . -65°F to 150°F

Type 316L Stainless Steel ™ . . . . . . . . . . . . . . . . . . . . . . . . . . . (-54°C to 65°C)
Springless, stemless design. Vespel®Seat. . . . . . . . . . . . . . . . . . . -65°F to 250°F
▼ ▼ ▼ ▼ ▼ ▼
. . . . . . . . . . . . . . . . . . . . . . . . . . (-54°C to 121°C)
Metal diaphragm sealed.
▼
Back panel mounting capabilities. Flow Capacity. . . . . . . . . . . . . . . . . . . . . . CV 0.25
High cycle life. Design Leak Rate:

Outboard. . . . . . . . . . . . . . . . . . 1x10 -9 scc/sec He
Fully swept flow path.
Inboard . . . . . . . . . . . . . . . . . . . 1x10 -9 scc/sec He
Standard 6 inch micro Ra (0.15 Across seat . . . . . . . . . . . . . . . . 1x10 -9 scc/sec He
micro meter), EP Surface Finish.

▼
internal volume
100% Helium leak tested. 1.55 cc
▼ ▼ ▼
Reduced seat volume.

▼
surface finishes
Normally open and normally Standard Ra . . . . . . . . . . . . . . . . 6 micro inch Ra
closed designs from vacuum . . . . . . . . . . (0.15 micro meter) EP surface finish
to 3000 psig (207 barg)
Actuator Pressure vs. System Pressure (Minimum Values)

System Pressure, barg
Actuator Pressure, barg
Actuator Pressure, psig
0 20 40 60 80 100 120 140 160 180 200

100
6.0
80
5.0
60 4.0
3.0
40
2.0
20
1.0
0 0
0 500 1000 1500 2000 2500 3000
System Pressure, psig
TITAN II® AOP PLUS
Pa rk e r End to End “A” O.D.

94+06 Series: End Connections Designator “L” in (mm) in (mm)
Pneumatic 3000 psig (207 barg)
1/4” Tube Weld TWTW 1.76 (44.7) 1/4 (6.4)
3/8” Tube Weld TWTW 1.76 (44.7) 3/8 (9.5)
2X#10-32 1/4” VacuSeal™ Male VMVM 2.31(58.6) -

Ø2.00 1/8 NPT
Actuation Port 1.00 Diameter
5/16" Deep 1/4” VacuSeal™ Female VFVF 2.94 (74.7) -
1/4” VacuSeal™ Male VMSVMS 3.94 (100.1) -
1.125 Dimensions are for reference only.
3.79
2.32
(58.9 mm)
Flow Curves
Flow Rate, STD L/Min
0 600 1200 1800 2400 3000 3600 4200 4800 5400
3000 200
R
A 2700 180
Inlet Pressure, barg

.44
Inlet Pressure, psig
2400 160
1.06 .350 2100 140

1800 120
2.94 1.76
(74.7 mm) (44.7 mm) 1500 100
1200 80
900
60
600 40
300 20
0 0
Ordering Information 0 20 40 60 80 100 120 140 160 180 200
Flow Rate, STD Ft3/Min

94 + 06 4 4 2 TW TW - NO
SERIES
94+06 Series = Pneumatic Actuated
OPTIONAL FEATURES
CB1 = Constant Bleed 1 slpm
3000 psig (207 barg)
INLET PORT SIZE PI = Vespel® Seat†
4 = 1/4” PCTFE Seat (Standard) Leave Blank
6 = 3/8” NO = Normally Open Actuator
OUTLET PORT SIZE Normally Closed Actuator (Standard) Leave Blank
4 = 1/4” OUTLET CONNECTION
6 = 3/8” TW = Tube Weld
MATERIAL VF = VacuSeal™ Female
2 = 316L Stainless Steel VM = VacuSeal™ Male (1/4”)
16 = Hastelloy C-22® VMS = VacuSeal™ Male Swivel
31 = Nickel
† Recommended for Nitrous Oxide (N O) Service
2
INLET CONNECTION
TW = Tube Weld VacuSeal™ is a trademark of Parker Hannifin Corporation.
Elgiloy® is a registered trademark of Elgiloy Corporation.
VF = VacuSeal™ Female Hastelloy® is a registered trademark of Haynes International.
VM = VacuSeal™ Male (1/4”) Vespel® is a registered trademark of DuPont Company.
VMS = VacuSeal™ Male Swivel
TITAN II® AOP PLUS Medium
Pressure
Diaphragm Valve
▼
presents the TITAN II® AOP Plus medium pres-
sure diaphragm valve. The TITAN II AOP® is Wetted
specifically designed for medium pressure, Body . . . . . . . . . . . “VeriClean”, Veriflo’s custom
medium cycle, ultra high purity applications. high purity Type 316L Stainless Steel ™
Non-wetted
▼
Maximum operating pressure. . . . . . . . . 300 psig
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . (20.7 barg)
AOP Actuation:
Normally Open . . . . . . . . . . . . . . 70 to 125 psig
. . . . . . . . . . . . . . . . . . . . . . . . . . . . (4.8 to 8.6 bar)
features Normally Closed . . . . . . . . . . . . . . . 70 to 125 psig
. . . . . . . . . . . . . . . . . . . . . . . . . . . . (4.8 to 8.6 bar)
▼
See chart below

Type 316L Stainless Steel ™
Springless, stemless design. Temperature:
▼ ▼ ▼ ▼ ▼ ▼
PCTFE Seat. . . . . . . . . . . . . . . . . . . . -65°F to 150°F

Metal diaphragm sealed. . . . . . . . . . . . . . . . . . . . . . . . . . . . (-54°C to 65°C)
Vespel®Seat. . . . . . . . . . . . . . . . . . . -65°F to 250°F
Back panel mounting capabilities. . . . . . . . . . . . . . . . . . . . . . . . . . . (-54°C to 121°C)
High cycle life.

▼
Flow Capacity. . . . . . . . . . . . . . . . . . . . . . CV 0.25
Design Leak Rate:
Standard 6 inch micro Ra (0.15
micro meter), EP Surface Finish.
Inboard. . . . . . . . . . . . . . . . . . . . 1x10-9 scc/sec He
Across seat. . . . . . . . . . . . . . . . . 1x10-9 scc/sec He
▼ ▼ ▼

▼
internal volume
1.55 cc
Normally open and normally closed
designs from vacuum to 300 psig
▼
(20.7 barg) surface finishes

Standard Ra . . . . . . . . . . . . . . . . 6 micro inch Ra
. . . . . . . . . . (0.15 micro meter) EP surface finish
Actuator Pressure vs. System Pressure (Minimum Values)
0.0 2.0 4.0 6.0 8.0 10.0 12.0 14.0 16.0 18.0 20.0
100
6.0
80
5.0
60 4.0
3.0
40
2.0
20
1.0
0 0.0
0 50 100 150 200 250 300
TITAN II® AOP PLUS
Pa r k e r End to End “A” O.D.

End Connections Designator “L” in (mm) in (mm)
92+06 Series:
Pneumatic 300 psig (20.7 barg) 1/4” Tube Weld TWTW 1.76 (44.7) 1/4 (6.4)
3/8” Tube Weld TWTW 1.76 (44.7) 3/8 (9.5)
1/4” VacuSeal™ Male VMVM 2.31 (58.6) -
Ø 1.98 1/8 NPT 2X #10-32 1/4” VacuSeal™ Female VFVF 2.94 (74.7) -
Actuation Port 1.00 Diameter
5/16" Deep 1/4” VacuSeal™ Male VMSVMS 3.94 (100.1) -
Dimensions are for reference only.
1.25
2.99 2.32 Flow Curves

(58.9 mm)
Flow Rate, STD. L/Min
0 200 400 600 800 1000 1200 1400
300 20

R
270 18
A
240 16
.44
210 14
.350 180 12
1.06
150 10
2.94 1.76 120 8
(74.7 mm) (44.7 mm) 90 6
60 4
30 2
0 0
0 5 10 15 20 25 30 35 40 45 50
3
Flow Rate, STD. Ft /Min
92 + 06 4 4 2 TW TW - NO
SERIES OPTIONAL FEATURES

92+06 Series = Pneumatic Actuated CB1 = Constant Bleed 1 slpm
300 psig (20.7 bar) CB3 = Constant Bleed 3 slpm
PI = Vespel® Seat†
INLET PORT SIZE PCTFE Seat (Standard) Leave Blank
4 = 1/4”
NO = Normally Open Actuator
6 = 3/8”
Normally Closed Actuator (Standard) Leave Blank
OUTLET PORT SIZE
VF = VacuSeal Female
MATERIAL VM = VacuSeal Male (1/4”)
2 = 316L Stainless Steel VMS = VacuSeal Male Swivel
16 = Hastelloy C-22®
31 = Nickel † Recommended for Nitrous Oxide (N O) Service
2
INLET CONNECTION VacuSeal™ is a trademark of Parker Hannifin Corporation.

TW = Tube Weld Hastelloy® is a registered trademark of Haynes International.
VF = VacuSeal™ Female Vespel® is a registered trademark of DuPont Company.
VM = VacuSeal™ Male (1/4”)
Low Pressure
TITAN II® AOP PLUS Diaphragm
Valve
▼
presents the TITAN II® AOP Plus low pressure materials of construction
diaphragm valve. TITAN II® AOP is specifically Wetted

designed for low pressure, low cycle, ultra high Body . . . . . . . . . . . “VeriClean”, Veriflo’s custom
purity applications. high purity Type 316L Stainless Steel ™
Non-wetted
▼
Maximum operating pressure. . . . . . . . . 150 psig
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . (10.5 barg)
Minimum operating pressure rating . . . Vacuum
AOP Actuation:
features Normally Open . . . . . . . . . . . . . . . 70 to 125 psig
. . . . . . . . . . . . . . . . . . . . . . . . . . . . (4.8 to 8.6 bar)
▼
Normally Closed . . . . . . . . . . . . . . . 70 to 125 psig

Type 316L Stainless Steel ™ . . . . . . . . . . . . . . . . . . . . . . . . . . . . (4.8 to 8.6 bar)
See chart below
Springless, stemless design.
▼ ▼ ▼ ▼ ▼ ▼
Temperature:
PCTFE Seat. . . . . . . . . . . . . . . . . . . . -65°F to 150°F
Back panel mounting capabilities. . . . . . . . . . . . . . . . . . . . . . . . . . . . (-54°C to 65°C)
Vespel®Seat. . . . . . . . . . . . . . . . . . . -65°F to 250°F
High cycle life. . . . . . . . . . . . . . . . . . . . . . . . . . . (-54°C to 121°C)

▼
Flow Capacity. . . . . . . . . . . . . . . . . . . . . . CV 0.25
Standard 6 inch micro Ra (0.15
micro meter), EP Surface Finish. Design Leak Rate:
▼ ▼ ▼
100% Helium leak tested. Inboard. . . . . . . . . . . . . . . . . . . . 1x10-9 scc/sec He

Normally open and normally closed

▼
internal volume
designs from vacuum to 150 psig 1.55 cc
(10.5 barg).
▼
surface finishes
Actuator Pressure vs. System Pressure (Minimum Values) . . . . . . . . . . (0.15 micro meter) EP surface finish
0.0 2.0 4.0 6.0 8.0 10.0 12.0

100
6.0
80
5.0
60 4.0
3.0
40
2.0
20
1.0
0 0.0
0 25 50 75 100 125 150
TITAN II® AOP PLUS
Parker 90+06 Series: End to End “A” O.D.

End Connections Designator “L” in (mm) in (mm)
Pneumatic 150 psig (10.5 barg)
1/4” Tube Weld TWTW 1.76 (44.7) 1/4 (6.4)
3/8” Tube Weld TWTW 1.76 (44.7) 3/8 (9.5)
1/4” VacuSeal™ Male VMVM 2.31 (58.6) -
2X #10-32
Ø 1.65 1.00 Diameter 1/4” VacuSeal™ Female VFVF 2.94 (74.7) -
1/8 NPT 5/16" Deep
Actuation Port 1/4” VacuSea™l Male VMSVMS 3.94 (100.1) -
Dimensions are for reference only.

1.25
2.18 Flow Curves

2.32
(58.9 mm) Flow Rate, STD. L/Min
0 6 0 120 180 240 300 360 420 480 540 600 660
150 10
140

R
130
A 120 8
.44
110
100
1.06 .350 90 6
80
2.94 1.76 70
(74.7 mm) 60 4
(44.7 mm)
50
40
30 2
20
10
0 0
0 2 4 6 8 10 12 14 16 18 20 22 24
3
Flow Rate, STD. Ft /Min
90 + 06 4 4 2 TW TW - NO

90+06 Series = Pneumatic Actuated
150 psig (10.5 bar)
INLET PORT SIZE PI = Vespel® Seat†
4 = 1/4” PCTFE Seat (Standard)Leave Blank
6 = 3/8” NO = Normally Open Actuator
OUTLET PORT SIZE Normally Closed Actuator (Standard) Leave Blank
4 = 1/4” OUTLET CONNECTIONS
2 = 316L Stainless Steel VM = VacuSeal™ Male (1/4”)
31 = Nickel
† Recommended for Nitrous Oxide (N O) Service
2
INLET CONNECTION
TW = Tube Weld VacuSeal™ is a trademark of Parker Hannifin Corporation.
VM = VacuSeal™l Male (1/4”) Vespel® is a registered trademark of DuPont Company.
VMS = VacuSeal™l Male Swivel
TITAN II® MANUAL PLUS High
Pressure
Diaphragm
Valve
▼
presents the TITAN II® Manual Plus, springless materials of construction
diaphragm valve, which is specifically
Wetted
designed for high pressure, high cycle, Body . . . . . . . . . . . “VeriClean”, Veriflo’s custom
and ultra high purity applications. high purity Type 316L Stainless Steel™
optional Hastelloy C-22®or Nickel 200
Seat . . . . . . . . . . . . . . . . PCTFE, Optional Vespel®
Non-wetted
Bonnet . . . . . . . . . . . . . . . . . . . 303 Stainless Steel
Handle. . . . . . . . . . . . . . . . . . . . . . . . . . Aluminum
▼
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . (207 barg)
Temperature:
PCTFE Seat. . . . . . . . . . . . . . . . . . . . -65°F to 150°F
. . . . . . . . . . . . . . . . . . . . . . . . . . . (-54°C to 65°C)
Vespel®Seat. . . . . . . . . . . . . . . . . . . -65°F to 250°F
. . . . . . . . . . . . . . . . . . . . . . . . . . (-54°C to 121°C)
▼
Flow capacity . . . . . . . . . . . . . . . . . . . . . . CV 0.25

“VeriClean”, Veriflo’s custom high purity Inboard. . . . . . . . . . . . . . . . . . . . 1x10-9 scc/sec He
▼
Type 316L Stainless Steel™. Across seat. . . . . . . . . . . . . . . . . 1x10-9 scc/sec He
Springless, stemless design.

▼ ▼ ▼ ▼ ▼ ▼
internal volume
1.55 cc
Back panel mounting capabilities.

▼
surface finishes
High cycle life. . . . . . . . . . . (0.15 micro meter) EP surface finish
Standard 6 inch micro Ra (0.15 mm),

EP Surface Finish.

▼ ▼ ▼
Position changeable 1/4 turn

lever handle.
TITAN II® MANUAL PLUS
Dimensional Drawings Flow Curves

06 - Series 07 - Series: 07L - Series: Flow Rate, STD L/Min
1/2 & 1/4 Turn 1/4 Turn Lever Handle 1/4 Turn Lever Indicator 0 600 1200 1800 2400 3000 3600 4200 4800 5400
Round Handle Positional Handle 3000 200
PANEL MOUNTING:
HOLE SIZE: 2700 180
.88-1.00"

OP E N PANEL THICKNESS: 2400
C LO S E
0.06"-0.37" 160
Parker
OPE N
Parker
O
2100 140
N
CLOSE
1800 120
1.48 1.46
1.87 DIA. 1500 100
1200 80
900
60
2.50 2.56
2.48
600 40
A 300 20
0 0
.44 .44 .44 0 20 40 60 80 100 120 140 160 180 200
1.06 .350 Flow Rate, STD Ft3/Min

2.32 1.76 2.94
(58.9 mm) (44.7 mm) (74.7 mm)
2X #10-32 at End to End “A” O.D.

1.00 Diameter End Connections Designator
“L” in (mm) in (mm)
5/16" Deep
1/4” Tube Weld TWTW 1.76 (44.7) 1/4 (6.4)
1.125 3/8” Tube Weld TWTW 1.76 (44.7) 3/8 (9.5) R
A
1/4” VacuSeal Male VMVM 2.32 (58.9) -
2.32 1/4” VacuSeal Female VFVF 2.96 (75.2) -
(58.9 mm)
1/4” VacuSeal Male VMSVMS 3.94 (100.1) -
Swivel Nut
Dimensions are for reference only. .350
1.76
(44.7 mm)
07+ 4 4 2 TW TW- PI

06 + Series = Round Handle 1/2 turn (Standard) CB1 = Constant Bleed 1 slpm
06I + Series = Round Handle 1/4 turn (Optional) CB3 = Constant Bleed 3 slpm
07 + Series = Lever Handle 1/4 turn (Standard) PI = Vespel® Seat†
07L + Series = Indicating Lever Handle 1/4 turn PCTFE Seat - Standard - Leave Blank
(Optional) RD = Red Handle
INLET PORT SIZE WH = White Handle
4 = 1/4” Blue Handle - Standard - Leave Blank
6 = 3/8” Note: Consult factory for additional handle options.
OUTLET PORT SIZE
2 = 316L Stainless Steel™ VM = VacuSeal™ Male (1/4”)
31 = Nickel †Recommended for Nitrous Oxide (N O) Service
2
INLET CONNECTION VacuSeal™ is a trademark of Parker Hannifin Corporation.
TW = Tube Weld Elgiloy® is a registered trademark of Elgiloy Corporation.
Notes: Consult factory for additional Connection options
All Metal, High Pressure
TITAN II® MS Diaphragm Valves
▼
presents the TITAN II® MS manual, springless materials of construction
diaphragm valve, which is specifically
Wetted
designed for high temperature, high Body . . . . . . . . . . . “VeriClean”, Veriflo’s custom
pressure, high cycle, and ultra high high purity Type 316L Stainless Steel™
purity applications. optional Hastelloy C-22®or Nickel 200
Seat. . . . . . . . . . . . . . . . . . . . . . . . . Integral Metal
Non-wetted
Bonnet . . . . . . . . . . . . . . . . . . . 303 Stainless Steel
Handle. . . . . . . . . . . . . . . . . . . . . . . . . . Aluminum
▼
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . (207 barg)
Maximum Temperature limit: . . . . . 150°F(65.5°C)
AOPActuation . . . . . . . . . . . . -70 psig to 125 psig

. . . . . . . . . . . . . . . . . . . . . . (4.8 barg to 8.6 barg)
▼
Flow capacity . . . . . . . . . . . . . . . . . . . . . . CV 0.27

Springless stemless design. Inboard. . . . . . . . . . . . . . . . . . . . 1x10-9 scc/sec He
▼ ▼

6 Ra electropolished (EP) internal
surface finish.
▼
internal volume
1.55 cc
Maximum allowable leakage:
▼
1x10-9 scc/sec Helium.

▼
surface finishes
▼
. . . . . . . . . . (0.15 micro meter) EP surface finish

Type 316L Stainless Steel™.
Manual and pneumatically actuated designs.

▼
Actuator pressure to open 70 psig min to 125

psig max.
TITAN II® MS
Dimensional Drawings Flow Curves
06 - Series 07 - Series: 07L - Series: Flow Rate, STD L/Min

1/2 & 1/4 Turn 1/4 Turn Lever Handle 1/4 Turn Lever Indicator 0 600 1200 1800 2400 3000 3600 4200 4800 5400
Round Handle Positional Handle 3000 200
PANEL MOUNTING:
HOLE SIZE: 2700 180
.88-1.00"

OP E N PANEL THICKNESS: 2400
C LO S E
0.06"-0.37" 160
Parker
OPE N
Parker
O
2100 140
N
CLOSE
1800 120
1.48 1.46
1.87 DIA. 1500 100
1200 80
900
60
2.50 2.56
2.48
600 40
A 300 20
0 0
.44 .44 .44 0 20 40 60 80 100 120 140 160 180 200
1.06 .350 Flow Rate, STD Ft3/Min

2.32 1.76 2.94
(58.9 mm) (44.7 mm) (74.7 mm)
2X #10-32 at End to End “A” O.D.

1.00 Diameter End Connections Designator
“L” in (mm) in (mm)
5/16" Deep
1/4” Tube Weld TWTW 1.76 (44.7) 1/4 (6.4)
1.125 3/8” Tube Weld TWTW 1.76 (44.7) 3/8 (9.5) R
A
1/4” VacuSeal Male VMVM 2.32 (58.9) -
2.32 1/4” VacuSeal Female VFVF 2.96 (75.2) -
(58.9 mm)
1/4” VacuSeal Male VMSVMS 3.94 (100.1) -
Swivel Nut
Dimensions are for reference only. .350
1.76
(44.7 mm)
07- 4 4 2 TW TW- MS

06 - Series = Round Handle 1/2 turn (Standard) CB1 = Constant Bleed 1 slpm
06I - Series = Round Handle 1/4 turn (Optional) CB3 = Constant Bleed 3 slpm
07 - Series = Lever Handle 1/4 turn (Standard) MS = Metal Seat
07L - Series = Indicating Lever Handle 1/4 turn (Optional) Clear Handle - Standard - Leave Blank
94 - 06 = Pneumatic Actuator 3000 psig
Note: Consult factory for additional handle options.
INLET PORT SIZE
OUTLET PORT SIZE VF = VacuSeal™ Female
4 = 1/4” VM = VacuSeal™ Male (1/4”)
6 = 3/8” VMS = VacuSeal™ Male Swivel
MATERIAL VacuSeal™ is a trademark of Parker Hannifin Corporation.
2 = 316L Stainless Steel™ Elgiloy® is a registered trademark of Elgiloy Corporation.
16 = Hastelloy C-22® Hastelloy® is a registered trademark of Haynes International.
31 = Nickel
INLET CONNECTION
TW = Tube Weld
VF = VacuSeal™ Female
Notes: Consult factory for additional Connection options
High Pressure
928AOPHP Air Operated
Valve
▼
presents the Quantum 928AOPHP. The
928AOPHP is a poppet-style diaphragm Wetted
valve for remote control of gases or liquids. Body . . “VeriClean” ,Veriflo’s custom high purity
. Type 316L VAR Stainless SteelTM, Hastelloy C-22®
The 928AOPHP serves two functions: it acts Seal . . . . . . . . . . . . . . . . . PCTFE, optional Vespel®
as the system inlet valve, and it reduces the
Poppet. . . . . 316L Stainless Steel, Hastelloy C-22®
system pressure to a safer working range. Compression Member . . . . . 316L Stainless Steel,
Hastelloy C-22®
Spring . . . . . . . . . . . . . . . . . . . . . . Hastelloy C-22®
Screen . . . . . . . . . . . . . . . . . . . . . . Hastelloy C-22®
Non-Wetted
Nut. . . . . . . . . . . . . . . . . . . . . . 316L Stainless Steel
Actuator Materials
Actuator Housing . . . . . . . . . Brass, Nickel Plated
▼
Maximum inlet pressure . . . 3500 psig (240 barg)
For Oxygen . . . . . . . . . . . . . 2200 psig (151 barg)
Nominal outlet pressure . . . . . 350 psig (24 barg)
. with 2000 psig (138 barg) inlet pressure and 80
. . . . . . . . . . . . . psig (5.5 barg) actuator pressure
features
“VeriClean”, Veriflo’s low sulfur high Outlet pressure varies with inlet and actuator pressure
▼
purity 316L VAR Stainless Steel™

Temperature . . . . . -40°F to 150°F (-40°C to 66°C)
enhances electropolishing, welding
and corrosion resistance. Flow capacity . . . . . . . . . . . . . . . . . . . . . . Cv=.04
Improves system safety by lowering or
▼
regulating system pressure to 350 psig. Design Leak Rate:
Outboard . . . . . . . Less than 1 x 10 -9 scc/sec He
The 928 AOPHP is field-convertible, in
▼
-10
Inboard . . . . . . . . . Less than 2 x 10 scc/sec He
place, to a 928 L (lever operated) Across seat . . . . . . Less than 4 x 10 -9 scc/sec He
valve by a simple exchange of Design Proof Pressure . . . . . 5,250 psig (362 barg)
non-wetted parts. Design Burst Pressure . . . . 10,500 psig (724 barg)
Fully functional from a vacuum to

▼
standard configurations
3500 psig inlet and outlet. Any combination of 1/4” FS male and/or female fittings
Gland to gland length . . . . . . 2.78 in. (70.6 mm)
Aerodynamic, smooth flow passages.
▼ ▼
Optional . . . . . . . . . . . . . . . . . . 3.06 in. (77.7 mm)

1/4 inch tube stubs inlet and outlet
Minimum particle generation and End to end length . . . . . . . . . . 1.75 in. (44.5 mm)
entrapment. Other configurations available as options -
including as many as five ports
▼ ▼
A unique patented compression internal volume

member which loads the seal
uniformly without the need for
▼
surface finishes
threaded components or crimping Standard Ra . . . . . . . . . . . . . . . . 15-20 micro inch
operations. (.38 to .5 micro meter) or less
Optional Ra. . . . . . . . . . . . . . . . EX=10 micro inch
▼
“Hurricane” cleaning, optional (.25 micro meter) or less

proprietary cleaning process,
▼
approximate weight
removes metallic ions, organic films
1.1 lbs (.49 kg)
and surface adhering particles.
928AOPHP
FLOW (SCFM)
.7 1.4 2.1 2.8 3.5 4.2 4.9 5.6
250 17.2
DP = 1 psi
1/8 NPT
200 13.8
DP = 25 psi
2.10 DP = 10 psi
(53.3 mm)
INLET PRESSURE (BARG)

INLET PRESSURE (PSIG)
DP = 5 psi
150 10.3
DP = 25 psi
3.23 1.25 100 7

(82 mm) (31.8 mm)
1.67
(42.4 mm) 50 3.4
.44
(11.2 mm)
1.25 SQ
(31.8 mm) 0
0 20 40 60 80 100 120 140 160
2.78 (70.6 mm)
OPTIONAL 3.06 (77.7 mm) FLOW (LPM)
#10-32 UNF-2B
4-PL
.708
(42.4 mm)
1.00
(25.4 mm)
928 AOPHP S FSMM VESP

928 TH = Hastelloy C-22® Trim **
VESP = Vespel® Seat***
TYPE
AOPHP = Air Operated High Pressure CONNECTIONS†
FSMM = 1/4" Face Seal, Male in-Male out
MATERIAL FSFF = 1/4" Face Seal, Female in-Female out
H = Hastelloy C-22®*
FSFM = 1/4" Face Seal, Female in-Male out
S = 316L VAR Stainless Steel
* Hastelloy C-22® Material Option includes: body, compression TS = 1/4" Tube Stub
member, poppet, spring, and screen. P = 1/4" NPTF
** TH option includes: Hastelloy C-22® compression member,
poppet, spring, and screen.
*** Recommended for Nitrous Oxide (N20) Service.
† See Valve Selection Guide for multiple porting selections.

Kel-F 81® is a registered trademark of 3M Company.
Viton® is a registered trademark of DuPont Dow Elastomers Company
Safety
LockOut-TagOut Option
▼
presents the LockOut-TagOut safety option
available for its standard diaphragm valve Clamp. . . . . . . . . . . . . . . . . . . ZA-27 alloy casting
product line. . . . . . . . . . . . . . . . . . . . . . . . . Powder coat (Red)
This design allows for tools or gas lines to be Nut . . . . . . . . . . . . . . . . . . . . . . 303 Stainless Steel
locked out for maintenance activities. This Washer . . . . . . . . . 304 Stainless Steel Annealed
durable metal design can be used with Dowel Pin . . . . . . . . . . . . . . . . Stainless Steel 18-8
confidence while doing repairs.
Note: Refer to individual valve literature sheet for
specific product specifications.
Designed to hold pressures up to 3500 psig (see table below for specific pressures).
▼ ▼ ▼
Durable metal design for added safety
Easy field upgrades to Mini-Lever actuated valves

(special tool required PN: 15000333).
Adaptable to the 944, 945, 930, 955, NV55, and NOVA valves.
▼ ▼ ▼
Use with padlock sizes #7(.187” diameter) through #3(.281” diameter).
Adaptable for panel mount use (.065”-.125”)
Product Maximum Operating Maximum Safety Inlet Pressure

Pressure in Closed & Locked Position
944M ....... LK 3500 PSIG (240 barg) 3500 PSIG (240 barg)
945M ....... LK 3500 PSIG (240 barg) 3500 PSIG (240 barg)
930M ....... LK 250 PSIG (17.2 barg) 250 PSIG (17.2 barg)
955M ....... LK 250 PSIG (17.2 barg) 250 PSIG (17.2 barg)
NV55M ....... LK 250 PSIG (17.2 barg) 250 PSIG (17.2 barg)
NOVAM ....... LK 3500 PSIG (240 barg) 3500 PSIG (240 barg)
LockOut-TagOut
OFF
Dimensional Drawing
ON
Valve Type Dimension A Dimension B

2.17 typ.
930M 3.57 (90.7) 2.55 (64.7)
944M 3.80 (96.5) 2.78 (70.6)
945M 3.57 (90.7) 2.55 (64.8)
955M 3.72 (94.5) 2.70 (68.6)
NV55M 3.57 (90.7) 2.55 (64.8)
NOVAM 3.45 (87.6) 2.43 (61.7) PANEL
A
.065"-.125"
Refer to each individual basic series valve type
literature sheet for proper ordering information.
LockOut-TagOut
BASIC SERIES
944M ....... LK 1.40 typ.
945M ....... LK
930M ....... LK
955M ....... LK
NV55M .....LK
NOVAM ....LK
B
VAC100 Vacumm
Generator
▼
presents the VAC100 vacuum generator
which has been designed to be used in Wetted
conjunction with purge systems. Body . . . . . . . . . . . . . . . . . . . . 316L Stainless Steel

Venturi. . . . . . . . . . . . . . . . . . . 316L Stainless Steel
Nozzle . . . . . . . . . . . . . . . . . . . 316L Stainless Steel
▼
Temperature . . . . . . . . . . . . . . . . . . -40°F to 200°F
(-40°C to 95°C)
▼
standard configurations
1/8" NPT (2 male NPT and 1 female NPT)
1/4" FS male and/or female fittings
▼
approximate weight
2.0 oz (.03 kg)
features
The vacuum generated is a function of
▼
the pressure of the purge gas which

flows through the generator.
Vacuum generator will improve the

▼
effectiveness of cycle purging.
The VAC100 will increase the efficiency

▼
of the dilution process in purge systems,

when the vacuum port of the VAC100
is connected to the outlet of the vent
valve.
VAC100
Dimensional Drawing
1.20
(30.5 mm)
1.20
1/4" FS-F (30.5 mm)
ø.875 INLET
(22.2 mm) 1/4" FS-M
INLET
1/8-27NPT
INLET
3.56 3.56
1/8-27NPT 1.77 1/4" FS-F (90.4 mm) (90.4 mm)
VACUUM (44.9 mm)
VACUUM
1/4" FS-M
1.78 VACUUM 1.78
(45.2 mm) (45.2 mm)
1/8-27NPT
OUTLET
1/4" FS-M
1/4" FS-F OUTLET
OUTLET
Flow Curves
25.0 100.0
90.0
VACUUM
20.0 80.0
Vacuum (In. Hg.)
Flow (lpm N2)
70.0
TYPICAL VALUES
15.0 60.0
Pressure Flow Vacuum
50.0
40 psig (2.7 barg) 30 SLPM 13 in. Hg. (330 mm Hg)
10.0 40.0 60 psig (4.1 barg) 40 SLPM 21 in. Hg. (533 mm Hg)
FLOW 30.0 80 psig (5.5 barg) 55 SLPM 24 in. Hg. (635 mm Hg)
5.0 20.0
10.0
0.0 0.0
20 30 40 50 60 70 80 90 100
VAC100 S FSF
BASIC SERIES CONNECTIONS

VAC100 2 = 1/8" NPTM
MATERIAL FSF = 1/4" Face Seal Female
S = 316L Stainless Steel FSM = 1/4" Face Seal Male
Parker Hannifin Corporation
6035 Parkland Blvd.
Cleveland, Ohio 44124-4141 Parker Hannifin Corporation
Telephone: (216) 896-3000
Fax: (216) 896-4000
www.parker.com
About Parker Hannifin Corporation Parker’s Charter

Parker Hannifin is a leading global motion-control To be a leading worldwide manufacturer of compo-
company dedicated to delivering premier customer nents and systems for the builders and users of durable
service. A Fortune 500 corporation listed on the New goods. More specifically, we will design, market and
York Stock Exchange (PH), our components and sys- manufacture products controlling motion, flow and
tems comprise over 1,400 product lines that control pressure. We will achieve profitable growth through
motion in some 1,000 industrial and aerospace mar- premier customer service.
kets. Parker is the only manufacturer to offer its
customers a choice of hydraulic, pneumatic, and Product Information
electromechanical motion-control solutions. Our North American customers seeking product infor-
Company has the largest distribution network in its mation, the location of a nearby distributor, or repair
field, with over 7,500 distributors serving nearly services will receive prompt attention by calling the
400,000 customers worldwide. Parker Product Information Center at our toll-free
number: 1-800-C-PARKER (1-800-272-7537). In Europe,
call 00800-C-PARKER-H (00800-2727-5374).
The Aerospace Group is The Climate & Industrial

a leader in the development, Controls Group designs,
design, manufacture and ser- manufactures and markets sys-
vicing of control systems and tem-control and fluid-handling
components for aerospace and components and systems to
related high-technology mar- refrigeration, air-conditioning
kets, while achieving growth and industrial customers
through premier customer worldwide.
service.
The Fluid Connectors The Seal Group designs,

Group designs, manufactures manufactures and distributes
and markets rigid and flexible industrial and commercial
connectors, and associated sealing devices and related
products used in pneumatic products by providing
and fluid systems. superior quality and total
customer satisfaction.
The Hydraulics Group The Filtration Group

designs, produces and markets designs, manufactures and
a full spectrum of hydraulic markets quality filtration and
components and systems to clarification products, provid-
builders and users of industrial ing customers with the best
and mobile machinery and value, quality, technical sup-
equipment. port, and global availability.
The Automation Group The Instrumentation

is a leading supplier of pneu- Group is a global leader in
matic and electromechanical the design, manufacture and
components and systems to distribution of high-quality
automation customers world- critical flow components for
wide. worldwide process instrumen-
tation, ultra-high-purity, medi-
cal and analytical applications.
Parker Hannifin Corporation Catalog: 4505
Veriflo Division LitPN: 25000179
250 Canal Boulevard Revision: A • 10/03
Richmond, CA 94804-0034
Telephone 510.235.9590
Fax 510.232.7396
Web site: http://www.veriflo.com

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DIAPHRAGM VALVES

Microelectronics Product Line

SM930 1-1/8” & 1-1/2” . . . . . . . . . . 4 - 7

TITAN II AOP PLUS HP . . . . . . . 30 - 31

TITAN II AOP PLUS MP . . . . . . . 32 - 33

TITAN II AOP PLUS LP. . . . . . . . 34 - 35

TITAN II MANUAL PLUS. . . . . . . 36 - 37

Parker Hannifin Corporation . . . . . . . . 46

Parker Hannifin Corporation

Parker Hannifin Corporation’s Veriflo Division

Minimum operating pressure. . . . . . . . . . Vacuum

Design Leak Rate:

Design Proof Pressure:

0.17 Cv for AOP style or 0.15 Cv for

Design Burst Pressure:

purity 316L Stainless Steel™, which

Standard Ra . . . . . . . . . . . . . . . . . . . . 5 micro inch

to lever or visa versa without intruding

2.77 2.77 2.35 .305

SM917LP1NC SM917LPNC SM917LPNO OUTLET

* LK Includes LOTO Lever for Mini Lever type Valve.

*** Only available with 1-1/8" body size

Parker Hannifin Corporation’s Veriflo Division materials of construction

Design Leak Rate:

Design Proof Pressure:

AOP . . . . . . . . . . . . . . . . . . . . . 375 psig (26 barg)

Standard Ra . . . . . . . . . . . . . . . . . . . 5 micro inch

Internally threadless and springless.

Fully field serviceable seat (special

vacuum to 125 psig for Air Operated

to lever or visa versa without intruding

Dimensional Drawings 1-1/2”

.305 4X Ø.219 1.50

OUTLET 1.02 INLET

Dimensional Drawings 1-1/8”

1.125 SQ OUTLET .79 INLET

1-1/8" Standard C-Seal (10) 1-1/8" W-Seal (60)

BASIC SERIES OPTIONAL FEATURES

MATERIAL Outlet 20 = = 3 Port, Standard C-Seal

* LK includes LockOut-TagOut bracket 30 = = 3 Port, Standard C-Seal

Elgiloy® is a registered trademark of Elgiloy Company.

Parker Hannifin Corporation’s Veriflo

Minimum operating pressure . . . . . . . . . Vacuum

features High Flow Seal

1/4 Turn Manual . . . . . . . . . . . . . . . . . . Cv = .35

316L VAR Stainless Steel™, which Design Proof Pressure:

AOP. . . . . . . . . . . . . . . . . . . . 375 psig (26 barg)

from vacuum to125 psig for Air

Change from air operated actuator to

100% Helium leak tested.

.305 4X Ø.219 1.50

4xØ.22 1.50 SQ OUTLET 1.02 INLET

1-1/2" Standard C-Seal (10) 1-1/2" W Seal (60)

1-1/2" High Flow C-Seal (11)

BASIC SERIES OPTIONAL FEATURES

30 = = 3 Port, Standard C-Seal

Design Leak Rate:

Design Proof Pressure:

Design Burst Pressure:

(.13 micro meter). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . (105.2 mm)

Optional. . . . . . . . . . . 1.61±.02 in. (40.7± .05 mm)

Aerodynamic, fully swept flow passages.

100% Helium leak tested.