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Ultrasonics
journal homepage: www.elsevier.com/locate/ultras
a r t i c l e i n f o a b s t r a c t
Article history: A reflection non-contact ultrasonic microscope system working both in amplitude and phase difference
Received 10 April 2007 modes at 2 MHz has been developed using an air-coupled concave transducer made of piezoelectric poly-
Received in revised form 19 December 2007 mer films of poly(vinylidene fluoride/trifluoroethylene) [P(VDF/TrFE)]. The transducer is composed of
Accepted 15 October 2008
three 95 lm-thick P(VDF/TrFE) films stacked together, each of which is activated electrically in parallel
Available online 12 January 2009
by a driving source. The transducer has a wide aperture angle of 140° and a focal length of 10 mm.
The measured two-way transducer insertion loss is 80 dB at 1.83 MHz. Despite 20 dB higher insertion loss
PACS:
than that estimated from Mason’s equivalent circuit, we have obtained clear amplitude acoustic images
43.28.Tc
43.38.Fx
of a coin with transverse resolution of 150 lm, and clear phase difference acoustic images of the rough
43.35.Sx surface of a paper currency bill with depth resolution of sub-micrometer. Using two planar transducers of
P(VDF/TrFE), we have also successfully measured in through-transmission mode the sound velocity and
Keywords: absorption of a 3 mm-thick silicone-rubber plate. The present study proves that, owing to its low acoustic
Piezoelectric polymer transducer impedance and flexibility, P(VDF/TrFE) piezoelectric film is very useful for high frequency acoustic imag-
P(VDF/TrFE) ing in air in the MHz range.
Air-coupled ultrasonic transducer Ó 2009 Elsevier B.V. All rights reserved.
Ultrasonic imaging in air
1. Introduction much smaller than PZT, and the highest electromechanical cou-
pling factor kt among piezoelectric polymers (kt 0.3) [3].
Ultrasonic imaging and inspection using ultrasound propagat- We have developed air-coupled ultrasonic transducers using
ing in air in the MHz range has been actively studied in recent P(VDF/TrFE) piezoelectric films, along with a two-dimensional
years, owing to significant advantages for inspection of objects scanning acoustic microscope system for operating P(VDF/TrFE)
incompatible with liquid couplants (water or gels), such as paper transducers. The acoustic image and phase acoustic image were
products, electronic products etc. In addition, ultrasound imaging formed by the P(VDF/TrFE) transducers in this ultrasonic experi-
in air is advantageous because the position of the transducers ment system. It is confirmed from the experimental results that
can be set freely. Furthermore, imaging in air provides much higher the P(VDF/TrFE) transducer is very effective as a transducer of
resolution than in water because sound wavelength is shorter in air ultrasonic waves in air.
at a given frequency. However, there are two difficulties in trans-
mitting and receiving ultrasound propagating in the air at high fre-
quencies: (1) transducer efficiency decreases extremely due to 2. Acoustic air transducer
large acoustic impedance mismatching between transducers and
air. The situation is also pertains when ultrasound in air is trans- Fig. 1 shows a photograph of the concave type P(VDF/TrFE) air-
mitted to the interfaces between air and the object materials under coupled ultrasonic transducer. This transducer is composed of
inspection. (2) Attenuation of ultrasonic energy in air is about three three 90 lm-thick P(VDF/TrFE) films bonded together on a Cu-
orders of magnitude larger than in water at 1 MHz [1]. Despite plate electrode backed with a polymer substrate. These films were
such difficulties, Khuri-Yakub et al. first demonstrated ultrasonic stacked so that the polarization direction of each alternate film is
scanning images at 2 MHz using an air-coupled PZT transducer reversed. The Al-electrodes were metallized on the surfaces of each
[2]. Piezoelectric polymer P(VDF/TrFE) has an acoustic impedance P(VDF/TrFE) film, through which the RF-field can be applied di-
rectly from the electric source to vibrate in the same phase as other
two piezoelectric films. With this configuration of P(VDF/TrFE)
films, the electric impedance matching between the transducer
* Corresponding author. Tel./fax: +81 23 628 4378. and the electric source is much improved (by a factor of 32) as
E-mail address: takahasi@kekexafs.kj.yamagata-u.ac.jp (S. Takahashi). compared to transducers with a single P(VDF/TrFE) film 270 lm
0041-624X/$ - see front matter Ó 2009 Elsevier B.V. All rights reserved.
doi:10.1016/j.ultras.2008.10.020
496 S. Takahashi, H. Ohigashi / Ultrasonics 49 (2009) 495–498
thick. The focused P(VDF/TrFE) transducer in Fig. 1 has a wide that a concave transducer with wide aperture angle can be fabri-
angular aperture of 140° to improve the angular (transverse) reso- cated because of its flexibility. The frequency dependence of two-
lution of the acoustic image. P(VDF/TrFE) film has an advantage way insertion loss (2transducer-loss) observed for two planar type
transducers made of three P(VDF/TrFE) films with the same config-
uration as the concave transducer is shown in Fig. 2, where the
insertion loss is defined by the ratio of output acoustic power in
air to the input electric power. The transducer insertion loss
(2TL) of the planar type transducers is about 20 dB larger at
2 MHz compared to the value calculated using the Mason’s equiv-
alent circuit [4,5]. The increased insertion loss may be attributed to
Pulse
Generator
Frequency Power
Switch
Synthesizer Amp
Personal Pulse-motor
Computer Driver XYZ Stage
Fig. 1. A photograph of a P(VDF/TrFE) concave transducer.
100
80
Loss (dB)
60
Observed(2TL ) Calculated(2TL )
40
20
1 .5 1 .6 1 .7 1 .8 1 .9 2 2 .1
Frequency (MHz)
Fig. 2. Measured (open circles) and calculated (closed square dot) frequency
dependence of two-way insertion loss (2TL) for planar type P(VDF/TrFE) air-coupled Fig. 4. Air-ultrasonic image (left) of a commemorative coin at 2 MHz and its
transducers. photograph (right).
Pulse
Generator
P hase Mixer IF
Detector Amp
Oscillo-
Scope
100 mV
Intensity
0
0 0.09 5 0.19 0 (mm)
Fig. 8. Phase output signal intensity of a 1.83 MHz wave in air measured by the
system in Fig. 5 as a function of distance difference between the two planar
transducers.
a b
(1 ),(2 ),(3 ) (1 ) (2 ) (3 )
+30.0
(2)
+17.5
Height (µm)
-20.0
0.00 0.10 0.20 0.30 0.40 0.50 0.60
Distance (mm)
Fig. 7. The height-scanning signal of the convex side of the printed part measured by an interference microscope. The corresponding microscope image of the scanning part is
shown in (a) optical microscope image, and (b) interference microscope image.
498 S. Takahashi, H. Ohigashi / Ultrasonics 49 (2009) 495–498
5. Conclusion