A PASSION

FOR PERFECTION
Safety Technical Data
Symbols Used Measurement principle
100 mbar 1) … 1500 mbar capacitance diaphragm
sensor
-4
DANGER 5×10 … 1 mbar thermal conductance
according to Pirani
Information on preventing any kind of physical injury. 1 … 100 mbar 1) crossover range
Measurement range
(air, O2, CO, N2) 5×10-4 … 1500 mbar
WARNING Accuracy (N2)
1×10-3 … 50 mbar ±15% of reading
Information on preventing extensive equipment and en- 50 … 950 mbar ±5% of reading
vironmental damage. Atmospheric pressure
(950 … 1050 mbar) ±2.5% of reading
Repeatability (N2) ±2% of reading
Caution (1×10-3 … 1100 mbar)
PCR 260 Output signal
Compact Pirani Capacitance Gauge
Information on correct handling or use. Disregard can lead
to malfunctions or minor equipment damage. (measurement signal)
Voltage range 0 … +9.0 V
Mesasurement range +2.2 … +8.68 V
Operating Instructions
Personnel Qualifications Voltage vs. pressure 1 V/decade, logarithmic
BG 805 180 BE / D (2010-04)

Output impedance 2 × 4.7 Ω, short circuit-proof

Minimum load impedance 10 kΩ
Skilled personnel Response time 10 ms

All work described in this document may only be carried Gauge identification resistor 3 kΩ between pin 1
out by persons who have suitable technical training and and pin 5 of electrical
the necessary experience or who have been instructed by connector
the end-user of the product. (→ "Electrical Connection")
Product Identification
HV Adjustment at <<10-4 mbar
In all communications with Pfeiffer Vacuum, please specify (with potentiometer <HV>)
the information given on the product nameplate. For conven- General Safety Instructions
ient reference copy that information into the space provided • Adhere to the applicable regulations and take the ne- Supply
below. cessary precautions for the process media used.
Consider possible reactions with the product materials.
Pfeiffer Vacuum, D-35614 Asslar DANGER
Consider possible reactions (e.g. explosion) of the
Typ: process media due to the heat generated by the product.
The gauge must only be connected to power
No:
• Adhere to the applicable regulations and take the ne- supplies, instruments or control devices that
F-No: cessary precautions for all work you are going to do and conform to the requirements of a grounded pro-
V W consider the safety instructions in this document. tective extra-low voltage (SELV). The connection
to the gauge has to be fused
• Before beginning to work, find out whether any vacuum
components are contaminated. Adhere to the relevant
regulations and take the necessary precautions when Supply voltage at gauge +15 … +30 VDC
handling contaminated parts. (ripple ≤1 Vpp)
Communicate the safety instructions to all other users. Power consumption ≤2.5 W
Fuse to be connected 1 AT

Liability and Warranty Electrical connection Hirschmann connector

type GO 6, 6 pin, male
Pfeiffer Vacuum assumes no liability and the warranty Sensor cable 5 pins plus shielding
Validity becomes null and void if the end-user or third parties
Cable length ≤150 m (5×0.25 mm2)
• disregard the information in this document ≤200 m (5×0.34 mm2)
This document applies to products with the following part
numbers: • use the product in a non-conforming manner
• make any kind of changes (modifications, alterations etc.) Grounding concept (→ "Power Connection")
PT R26 850 (DN 16 ISO-KF) to the product Vacuum connection to
PT R26 851 (DN 16 CF-F) signal ground connected via 1 MΩ
• use the product with accessories not listed in the product
The part number (No) can be taken from the product
documentation. Materials exposed to vacuum
nameplate.
The end-user assumes the responsibility in conjunction with Vacuum connection stainless steel
If not indicated otherwise in the legends, the illustrations in
the process media used. Pirani filament tungsten
this document correspond to DN 16 ISO-KF vacuum con-
Feedthrough glass
nection. They apply to other vacuum connections by analogy. Gauge failures due to contamination or wear and tear, as
Orifice stainless steel
We reserve the right to make technical changes without prior well as expendable parts (filament), are not covered by the
warranty. Other materials Ni, Cu, NiFe, SnAg, glass,
notice.
Al2O3 (>99.5%), AgPd
All dimensions are indicated in mm.
Internal volume
DN 16 ISO-KF ≈ 6 cm3
DN 16 CF-F ≈ 8 cm3
Intended Use Admissible pressure ≤5 bar (absolute)
The Compact Pirani Capacitance Gauge PCR 260 has been
Admissible Temperatures
designed for vacuum measurement of gases in the pressure
Storage –20 … +65 °C
range of 5×10-4 … 1500 mbar.
Operation (ambient) +10 … +50 °C
It must not be used for measuring flammable or combustible Bake-out 2) ≤80 °C
gases in mixtures containing oxidants (e.g. atmospheric oxy-
Filament temperature <160 °C
gen) within the explosion range.
The gauge can be operated in connection with a Pfeiffer Relative humidity ≤80% at temperatures
Vacuum controller or with another evaluation unit.
≤+31 °C, decreasing to 50%
at +40 °C
Mounting orientation any
Use indoors only
Functional Principle altitudes up to 2000 m NN
The PCR gauge is a combination gauge consisting of a Protection category IP 40
Pirani sensor and a capacitive diaphragm sensor. Both
sensors are constantly active.
At low pressures, only the signal of the Pirani sensor is used 1)
for pressure measurement; at high pressures, only the signal Crossover range for air, O2, CO and N2 10 mbar,
of the capacitive diaphragm sensor. To determine the output 100 mbar in heavy gases.
2)
signal in the intermediate range, both signals are used Temperature at vacuum connection with horizontal moun-
proportional to the pressure. ting orientation. During bake-out, measurement range,
accuracy, and repeatability may deviate from specifi-
cations.
Dimensions [mm] Gas Type Dependence Caution

28 Indicated pressure (gauge calibrated for air) Caution: vacuum component

20
p [mbar]
4
Dirt and damages impair the function of the
2 vacuum component.
103 Cross Capacitance When handling vacuum components, take ap-
8 Pirani
6 over diaphragm
4 sensor propriate measures to ensure cleanliness and
65.3
range Sensor
2
prevent damages.
16
HV
102
8
6
22.5 4

101
8
Caution
43 6
4

2 Caution: dirt sensitive area

100
8
6
Touching the product or parts thereof with bare
4 hands increases the desorption rate.
26.3

10–1
Air, O2, CO, N2 Always wear clean, lint-free gloves and use
39

8
6 He clean tools when working in this area.
4
Ar
DN 16 ISO-KF 2

DN 16 CF-F 10–2
8
6
4
The gauge may be mounted in any orientation. To
Weight 2
keep condensates and particles from getting into the
10–3
DN 16 ISO-KF 90 g 8
6 measuring chamber preferably choose a horizontal
DN 16 CF-F 120 g 4
to upright position and possibly use a seal with a
2
centering ring and filter. If adjustment should be
10–4
10–4 2 4 6 10–3 2 4 6 10–2 2 4 6 10–1 2 4 6 100 2 4 6 101 2 4 6 102 2 4 6 103 2 possible after the gauge has been installed, be sure
peff [mbar] to install it so that the potentiometer can be
accessed (→ "Adjustment").
Output Signal vs. Pressure Calibration factors
Pressure p [mbar]
valid for Pirani pressure range below 1 mbar Remove the protective lid and install the product at the
1E+05
vacuum system.
1E+04 Pa

1E+03 mbar peff = C × indicated pressure

Torr
1E+02

Gas Calibration Gas type Calibration

Underrange

Overrange

1E+01
type factor C factor C Seal with centering ring
1E+00
He 0.8 H2 0.5
1E–01 Clamping
Ne 1.4 air, O2, CO, N2 1.0
1E–02
Ar 1.7 CO2 0.9 oder
1E–03 Kr 2.4 water vapour 0.5
1E–04
Xe 3.0 Freon 12 0.7
1E–05
0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0 7.5 8.0 8.5 9.0
Protective lid
8.68
Output signal U [V] Seal with center-
ing ring and filter
(U-c)
p = 10 ⇔ U = c + log10 p Keep the protective lid
valid in the range 5×10-4 mbar <p< 1500 mbar Installation
U p c U p c Vacuum Connection
[V] [mbar] 5.5 [V] [micron] 2.625
[V] [µbar] 2.5 [V] [Pa] 3.5 DANGER
[V] [Torr] 5.625 [V] [kPa] 6.5
[V] [mTorr] 2.625 DANGER: overpressure in the vacuum system
>1 bar
where p pressure
Injury caused by released parts and harm
U output signal
caused by escaping process gases can result if
c constant (pressure unit dependent)
clamps are opened while the vacuum system is
pressurized.
Do not open any clamps while the vacuum sys-
tem is pressurized. Use the type clamps which
are suited to overpressure.

DANGER

DANGER: overpressure in the vacuum system

>2.5 bar
KF flange connections with elastomer seals (e.g.
O-rings) cannot withstand such pressures.
Process media can thus leak and possibly
damage your health.
Use O-rings provided with an outer centering
ring.

DANGER

DANGER: protective ground

Incorrectly grounded products can be extremely
hazardous in the event of a fault.
The gauge must be electrically connected to the
grounded vacuum chamber. This connection
must conform to the requirements of a protective
connection according to EN 61010:
• CF connection fulfill this requirement
• For gauges with a KF flange, use a conduc-
tive metallic clamping ring

bg805180bd/ d (2010-04)

Original: Deutsch BG 805 180 BD / D (2010-04)

Power Connection Operation Deinstallation
Make sure the vacuum connection is properly made When the supply voltage is being applied, the measurement
(→ "Vacuum Connection"). signal is available at the connector (→ "Electrical Connec- DANGER
tion").

n If no sensor cable is available, make one according to

DANGER: contaminated parts
Contaminated parts can be detrimental to health
the following diagram. Allow a stabilization period of ≈10 minutes after and environment.
power has been applied. Before beginning to work, find out whether any
2 It is advisable to operate the gauge continuously, irrespective parts are contaminated. Adhere to the relevant
4.7 + regulations and take the necessary precautions
3 of the pressure.
4.7 – when handling contaminated parts.
3.0k 1
Ident
1M 4
+
5 – Caution
18V Gas Type Dependence
6
Pressure Range Measurement Gas Type Caution: vacuum component
Principle Dependence Dirt and damages impair the function of the vac-
2 uum component.
Electrical connection 3 capacitance independent of gas
1 100 1) … 1500 mbar diaphragm type, no correction When handling vacuum components, take ap-
Pin 1 Identification propriate measures to ensure cleanliness and
Pin 2 Signal outpout sensor required
prevent damages.
Pin 3 Signal common
Pin 4 Supply 6 capacitance
4 5 diaphragm
Pin 5 Supply common (GND) Connector 1 … 100 1) mbar crossover range
Pin 6 Screen sensor and Caution
soldering side Pirani sensor
Caution: dirt sensitive area
5×10-4 … 1 mbar Pirani sensor proportional to
o Connect the sensor cable to the gauge and the con-
pressure 3) Touching the product or parts thereof with bare
hands increases the desorption rate.
troller or PLC and secure it with the locking screw. Always wear clean, lint-free gloves and use
clean tools when working in this area.
Adjustment
The gauge is factory calibrated. Due to long time operation or
contamination, a zero drift could occur. Periodically check the n Vent the vacuum system.
zero and adjust it if necessary.
The zero must be adjusted at the ambient temperature at
which the gauge is normally operated. o Put the gauge out off operation.

n If you are using a seal with centering ring and filter,

p Loosen locking screw of sensor cable connector and
check that they are clean or replace them if necessary
(→ "Deinstallation"). unplug sensor cable.

o Activate the gauge.

p Connect a DC voltmeter to output signal (→ "Electrical

Connection").

q Evacuate vacuum system to p <<10-4 mbar.

Wait at least 2 minutes. q Remove the gauge from the vacuum system and cover
the vacuum connection with the protective lid.
r Carry out adjustment with potentiometer <HV> by
means of the enclosed screwdriver.

Keep button pressed

Adjust to 1.95 V
(±0.02 V)

PCR 260 gauges do not require adjustment at

atmospheric pressure.

3)
The pressure reading applies to dry air, O2, CO and N2.
For other gases, it has to be converted
(calibration factors → "Technical Data").
Maintenance, Troubleshooting EC Declaration of Conformity

Gauge failures due to contamination or wear and We, Pfeiffer Vacuum, hereby declare that the
tear, as well as expendable parts (filament), are not equipment mentioned below complies with the
covered by the warranty. provisions of the Directive relating to electro-
magnetic compatibility 2004/108/EC.

The product requires no maintenance.

Product

PCR 260
Accessories
Standards
Part number
Centering ring DN 16 ISO-KF with fine filter PT 120 132-T Harmonized and international/national standards and specifi-
cations:
• EN 61000-6-2:2005 (EMC: generic emission standard)
• EN 61000-6-3:2007 (EMC: generic immunity standard)
• EN 61010-1:2001 (Safety requirements for electrical equip-
ment for measurement, control and laboratory use)
Returning the Product • EN 61326-1:2006 (EMC requirements for electrical equip-
ment for measurement, control and laboratory use)

WARNING

WARNING: forwarding contaminated products Manufacturer / Signatures

Contaminated products (e.g. radioactive, toxic, Pfeiffer Vacuum GmbH, Berliner Strasse 43, D-35614 Asslar
caustic or microbiological hazard) can be detri-
mental to health and environment. 8 April 2010 8 April 2010
Products returned to Pfeiffer Vacuum should
preferably be free of harmful substances. Ad-
here to the forwarding regulations of all involved
countries and forwarding companies and en-
close a duly completed declaration of contami- Manfred Bender Dr. Matthias Wiemer
nation *). Managing director Managing director

*)
Form under www.pfeiffer-vacuum.net

Products that are not clearly declared as "free of harmful

substances" are decontaminated at the expense of the
customer.
Products not accompanied by a duly completed declaration
of contamination are returned to the sender at his own
expense.

Disposal

DANGER

DANGER: contaminated parts

Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.

WARNING

N
WARNING: substances detrimental to the en-
vironment
Products or parts thereof (mechanical and elec-
tric components, operating fluids etc.) can be de-
trimental to the environment.
Dispose of such substances in accordance with
the relevant local regulations.

Separating the components

After disassembling the product, separate its components
according to the following criteria:
• Contaminated components
Contaminated components (radioactive, toxic, caustic, or
biological hazard etc.) must be decontaminated in accord-
ance with the relevant national regulations, separated
according to their materials, and recycled.
• Other components
Such components must be separated according to their
materials and recycled.
Berliner Strasse 43
D–35614 Asslar
Deutschland
Tel +49 (0) 6441 802-0
Fax +49 (0) 6441 802-202
info@pfeiffer-vacuum.de
www.pfeiffer-vacuum.net