3.155J/6.

152J Lecture 13:

MEMS Lab Testing
Prof. Martin A. Schmidt
Massachusetts Institute of
Technology
10/31/2005

Outline

Review of the Process and Testing Mechanics

Cantilever Fixed-Fixed Beam Second-order effects

Residual stress Support compliance Senturia, Microsystems Design, Kluwer

References

Fall 2005 M.A. Schmidt

3.155J/6.152J Lecture 13 Slide 2

The Process Lab 1

Grow 1.0m of Si-Rich Silicon Nitride (SiNx)

LPCVD Process (details to follow) Characterize (UV1280)

Thickness
Refractive index

Fall 2005 M.A. Schmidt

3.155J/6.152J Lecture 13 Slide 3

The Process Lab 1

Pattern Transfer

Deposit photoresist Expose on contact aligner Plasma etch using SF6 chemistry Strip resist

Fall 2005 M.A. Schmidt

3.155J/6.152J Lecture 13 Slide 4

The Process Lab 2

KOH Undercut Etch

20%, 80C

Fall 2005 M.A. Schmidt

3.155J/6.152J Lecture 13 Slide 5

The Process Lab 3

Break the wafer into die Mount the die on a metal plate Test using the Hysitron Nanoindenter
F

Fall 2005 M.A. Schmidt

3.155J/6.152J Lecture 13 Slide 6

Testing

Cantilever

Youngs Modulus

Fixed-Fixed Beams

Youngs Modulus Residual Stress

Fall 2005 M.A. Schmidt

3.155J/6.152J Lecture 13 Slide 7

The Mask

Fall 2005 M.A. Schmidt

3.155J/6.152J Lecture 13 Slide 8

The Mask - Cantilevers

Fall 2005 M.A. Schmidt

3.155J/6.152J Lecture 13 Slide 9

The Mask Fixed-Fixed Beams

Fall 2005 M.A. Schmidt

3.155J/6.152J Lecture 13 Slide 10

Cantilever Data
F=kx
Force (m icroN ewtons)
12 10 8 6 4 2 0 0 100 200 300 400 500 600 Displacement (nanometers)

Fall 2005 M.A. Schmidt

3.155J/6.152J Lecture 13 Slide 11

Force on a Beam

Fall 2005 M.A. Schmidt

3.155J/6.152J Lecture 13 Slide 12

C.V. Thompson 6.778J

Uniaxial Stress

C.V. Thompson 6.778J

Fall 2005 M.A. Schmidt 3.155J/6.152J Lecture 13 Slide 13

Material Properties: Elastic/Plastic

Figure removed for copyright reasons.

C.V. Thompson 6.778J

Fall 2005 M.A. Schmidt 3.155J/6.152J Lecture 13 Slide 14

Material Properties: Brittle

Figure removed for copyright reasons.

C.V. Thompson 6.778J

Fall 2005 M.A. Schmidt 3.155J/6.152J Lecture 13 Slide 15

Differential Equation of Bending

w(x) x dx ds z d x (x)

d2w = M EI dx2

Figure by MIT OCW.

H = thickness
W = width

I=

1 WH3 12

Reference: Senturia, S.D. Microsystems Design. Norwell, MA: Kluwer Academic Publisher, 2001.

C.V. Thompson 6.778J

Fall 2005 M.A. Schmidt 3.155J/6.152J Lecture 13 Slide 16

POINT LOAD

MR 0 FR x L

Figure by MIT OCW.

Deflection of a Cantilever - 2

3L Ref: Senturia (Kluwer) C.V. Thompson 6.778J

Fall 2005 M.A. Schmidt 3.155J/6.152J Lecture 13 Slide 18

Deflection of a Cantilever - 3

W = width H = thickness L = length

Ref: Senturia (Kluwer) C.V. Thompson 6.778J

Fall 2005 M.A. Schmidt 3.155J/6.152J Lecture 13 Slide 19

Deflection of a Plate - 1

ANTICLASTIC CURVATURE

Given axial strain x = z

Poission effect leads to transverse strain y given by y=-x where is Poisson's ratio (unitless and about 1/3 for most materials) So y = z

More important as W L (beams approach plates) Original cross-section

Figure by MIT OCW.
Fall 2005 M.A. Schmidt

Ref: Senturia (Kluwer) C.V. Thompson 6.778J

3.155J/6.152J Lecture 13 Slide 20

Deflection of a Plate - 2

E But y is
constrained to be zero 0 = y = y x E
Replace Modulus(E) with Plate Modulus
Ref: Senturia (Kluwer)
Fall 2005 M.A. Schmidt 3.155J/6.152J Lecture 13 Slide 21

x =

x y

E x = 2 x 12 4 3 1 4
Plate Modulus

Fixed-Fixed Beam
1800
Load (m icroN ewtons)

1600 1400 1200 1000 800 600 400 200 0 0 500 1000 1500 2000 2500 3000 3500 Displacement (nanometers)

Fall 2005 M.A. Schmidt

3.155J/6.152J Lecture 13 Slide 22

Fixed-Fixed Beam: Large Displacement

Beam stretches under large displacement

Becomes stiffer c=w

Solved by Energy Methods

Ref: Senturia (Kluwer)

Fall 2005 M.A. Schmidt 3.155J/6.152J Lecture 13 Slide 23

Residual Axial Stress in Beams

Residual axial stress in a beam contributes to it bending stiffness

2WP0 = 20WH

0 H P0 = Leads to the Euler beam equation which is equivalent to a distributed load d 2w q0 = P0W = 0WH 2 dx Insert as added load into beam equation : d 4w EI 4 = q + q0 dx d 4w d 2w EI 4 0WH 2 = q dx dx
Ref: Senturia (6.777)

Fall 2005 M.A. Schmidt

3.155J/6.152J Lecture 13 Slide 24

Effect of stress on stiffness

Figure removed for copyright reasons.

Graph found in Senturia, S.D. Microsystems Design. Norwell, MA: Kluwer Academic Publisher, 2001.

Ref: Senturia (6.777)

Fall 2005 M.A. Schmidt 3.155J/6.152J Lecture 13 Slide 25

Effect of Residual Stress

Not an issue in cantilevers For a point load, F, in the center of a bridge

Important when

Ref: Senturia (Kluwer)

Fall 2005 M.A. Schmidt 3.155J/6.152J Lecture 13 Slide 26

Compliant Supports

C.V. Thompson 6.778J

Fall 2005 M.A. Schmidt 3.155J/6.152J Lecture 13 Slide 27

MEMS Lab Report

Report Youngs Modulus extracted from

Cantilevers
Fixed-Fixed Beams

Explain differences from ideal theory

Compare to literature values for mechanical
properties
Assess the effects of:

Residual stress

Experimental error
Compliant supports
Beam versus Plate
Others.

Estimate from measurements

Fall 2005 M.A. Schmidt

3.155J/6.152J Lecture 13 Slide 28