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MEZHERITSKY Consultant for Dong IL Technology, Ltd., Kyonggi-Do, R. Korea 445-850 A piezoceramic homogeneous thin plate polarized and electrically excited in its thickness direction can vibrate in thickness-extensional (TE) as well as thickness-shear (TS) modes which are coupled. If selective characteristics of the basic TE-mode have been researched in details, the unwanted TS resonances in this coupled couple did not use to get an appropriate attention. The physical nature of the even and odd TS harmonics in a TE- mode resonator configuration and their influence on the first and third TE working vibration characteristics, particularly filter stopband attenuation, were investigated analytically and experimentally. A classic mechanical oscillatory model of two coup led vibrators, symmetric and asymmetric fringe-effects in a partly metallized piezo-plate were involved to describe a frequency and amplitude behavior of unwanted TS resonances in a set of PZT piezoceramic materials prepared with a wide range of energy-trap
D E E ,D parameter c33 c 44 variation from 3 up to 9, where cij is the elastic stiffness.
In a vicinity of the fundamental (first) TE resonance, relative intensity of the second TS resonance, which is excited both electrically due to a symmetric fringe-effect and mechanically due to coupling interaction with the basic TE resonance, rapidly decreases with growth of the figure-ofE E merit parameter m 0.5 c33 c44 > 1 as m ( m 1) ; relative intens ity of the third TS resonance,
which is excited electrically due to an asymmetric fringe-effect, slightly increases with growth of piezoactivity ( k15 ) their intensities are equal on magnitude at m = 1.12 0.02 that is considered as an optimal value. For the third TE harmonic, its coincidence with any TS resonances is unwanted: if it happens, the coupled even (6th or 8th ) TS resonances fully depress the major third TE mode, while the odd TS resonances (5th , 7th , 9th ) lead to a distortion of the working characteristic due to a superposition. A set of values c33 c44 = 3.3 0.3, 4.8 0.4, 6.3 0.4, 8.1 0.5 provides optimal disposition of the third TE and corresponding TS resonances.
D E
Submitted to the Joint Meeting 2003 IEEE International Frequency Control Symposium and PDA Exhibition and 17th European Frequency and Time Forum 0n December 14, 2002.
A.V. Mezheritsky
ABSTRACT
A piezoceramic homogeneous thin plate polarized and electrically excited in its thickness direction can vibrate in thickness-extensional (TE) as well as thickness-shear (TS) modes of vibration which are coupled. The effect of coupling is a necessary condition for the energy-trapped phenomenon. Influence of even and odd TS harmonics on the first and third TE- mode working vibration characteristics was investigated. Energy-trapped criteria for isotropic and anisotropic due to strong piezoeffect cases were analyzed and summarized; their equality was experimentally confirmed for non-polarized state of piezoceramics. A classic mechanical system of two coupled vibrators was applied to describe frequency and amplitude behavior of a piezo resonator at variation of energy-trapped parameters. Though the effect of trapping exists due to TE and TS modes interaction, the shear mode resonant properties in a TE PR has not been described yet. On the basis of proposed criterion for energy-trapped material parameter optimization, its optimal values for the fundamental and third TE harmonics were established:
E E D E m = 1.12 0.02 (or c33 c44 = 4.8 0.2 , or c33 c44 = 6.2 0.3 for typical k t ; 0.5 ) D E and a set of values c33 c44 = 3.3 0.3, 4.8 0.4, 6.3 0.4, 8.1 0.5 , respectively.
1. INTRODUCTION.
High sensitivity of energy-trapping effect to the piezomaterial parameters requires optimization
procedure for p iezoceramic materials (PCM) of a PZT system [1], having unique electroelastic properties
with possibility of their purposeful variation in a wide range of compositions, degree of polarization, etc.
The thickness mode high- frequency piezo resonators (PR) and monolithic filters employing thickness TE and TS modes of vibration with energy-trapping effect are the most commonly used since their performances and their frequencies correspond well to the specifications of modern electronic systems /1, 2/. Among them the TE mode has the advantages higher obtainable frequency (up to 150 MHz) due to about twice higher velocity, and higher quality factor /3/. Typical thin plate made from piezoelectric ceramics (PCM) /2, 4/ is polarized and, at least partially, covered with inner metallic electrodes in order to excite it with an applied RF field by means of the piezoelectric effect (Fig. 1). The principal of functioning of such devices presumes that propagation of the TE modes is possible under an electroded area, surrounded by a non-electroded marginal region where the modes decay outwards.
thickness homogeneous polarization P , conductive metallized areas (E-region) of active zone L and terminals, surrounded by non-covered D-region.
In general, energy-trapped thickness vibrations are very complicated, since coupling of different modes may occur in the vicinity of the fundamental resonance frequency and its higher harmonics, causing spurious resonances, etc. The resulting vibrational spectrum is influenced additionally by the finite boundaries of the resonator and the actual values of a number of material coefficients. Theoretical models of the energy-trapping effect describe the lateral distribution of thickness modes characteristics in a piezoelectric body, such as an infinite plate /1, 5/ or finite disk /6/ etc., where a one-side criteria is established for realizing in principal the effect of trapping.
Then, for practical purposes, there is a number of techniques for getting suitable filter or resonator characteristics in a band-pass frequency range in respect to a relative electrode size, its shape, symmetry and arrangement, electrode mass- loading, plate thickness profile /7-10/, etc., for a given state of piezomaterial (energy-trapped parameters). It is of a great interest to determine what the material energy-trapped parameter value is optimal, especially for the piezoceramic materials with a wide range of a property variation. Usually, a pieroceramic material is considered to be suitable for thickness resonator applications if its losses ( Q1 = f f ) and temperature coefficients are fairly low and its relevant coupling factor ( k 2 > f f ) exceeds a value fixed by the bandwidth ( f f ) of the device. Towards narrower relative bandwidths, high-order harmonics are more suitable. In energy-trapped TE mode bandpass filters using piezoceramic substrates, since vibrations other than vibration to be used are considered spurious, or unwanted, vibrations (high-order planar vibrations, even and odd TS harmonics, and TE inharmonic overtones), suppression of such spurious vibrations is strongly demanded to reach a high level of stopband attenuation. Energy-trapped phenomenon for TE mode of a planar plate is a result of extension-shear coupled interaction, so that even non-piezoactive shear harmonic s are excited through the interaction. The behavior of the shear resonances in such a coupled couple was not properly researched and described, nevertheless their intensity in the thickness PR spectrum is the next after TE resonance.
Since standing waves occur in the E-region at frequencies between E and D , trapped energy resonance is dependent on the relative values of E and D , and on the lateral dimensions of the Eregion. Obviously a whole series of such responses can occur between E and D , and these are called the inharmonic (spurious ) overtone series; the lowest of which is considered the fundamental thickness extensional response of the resonator. Inharmonics represent opposite-phase TE vibrations of adjacent regions under an electrode. The series ends at D , because at D standing wave amplitudes approach zero as the waves escape into the D-region. The odd inharmonics (with an odd number of the lateral half- wavelength on the electrode size) are excited, since the even ones, with appropriate symmetry, should not be excited electrically because of total charge compensation on the electrode. Because of boundary conditions, a portion of the vibratory energy trapped in the E-region fringes out into the D-region and tails off exponentially with distance away from the electrode. For a finite piezo plate, operating frequencies must be far enough below the cut-off frequency D , so that vibrations are effectively attenuated by the cut-off phenomenon. The effect of limitation of electrode area to reduce spurious responses was first observed by Bechmann /7/, who found the progressive disappearance of inharmonic overtone responses with reduction of electrode diameter and suggested design criteria on electrode and plate diameter in terms of plate thickness to obtain a single resonance characteristic: L h ; t r , where
r = D E 1 - frequency resonance interval (ultimately, corresponding CEMC) of the harmonic, factor t is of order 1.
2. ENERGY-TRAPPED PARAMETERS
The electro- mechanical behavior of a piezoelectric body /1/ in the common case is described by r an equation of motion utt = T at given boundary and initial conditions, by piezoelectric equations
E T Si = sij T j + d ki Ek ; Dn = nm Em + dnl Tl ;
where T and S , E and D are the components of mechanical stress and strain, electric field and
E E electric displacement, respectively, sij , D ( cij , D ) are elastic material coefficients at constant electric
T field or displacement, km is permittivity at constant mechanical strain, and piezoelectricity is
described by piezoelectric constant dki , is a vector operator. The electric field is determined by its r electric potential as E = grad ( ) .
the CEMC parameter k t2 , not by special thickness profile, etc. There is a theoretical primary criterion of trapping, that follows from the dispersion relations consideration ( 2 vs. ( x h /2) 2 representation): 2 ( 2) ( x2 ) 2 = 0 > 0 /10/ , when the
x
dispersion curve is described as 2 = 20 + 2 x2 in a vicinity of the TE cut-off frequency 0 , where = 0.5 r, 1 s is the normalized frequency in respect to the shear fundamental resonance frequency r, 1 s . At the same time, the value of a lateral group velocity x
x
=0
=0.
According to theoretical results /1, 6/, planar TE-resonators or monolithic filters exploiting the fundamental mode (N =1) should be made from ceramics for which the extensional cutoff frequency ( E , D ) lies well above the nearest shear cutoff frequency ? s (second harmonic). The following short review includes a discussion of the energy-trapped material parameters to determine which of them is paramount for the effect, or figure of merit. For isotropic (non-piezoelectric) solid media, which is described by two independent elastic parameters of compliance S and Poisson coefficient , there are only one extensional f t ( D = E )
and one shear f s sets of resonances determined by the elastic stiffnesses c33 and c44 , respectively. Their fundamental frequencies are f 1 t = c33 2 h and
s (1 2 1
2
f 1s =
c44 2 h .
1 . 2 s (1 + )
(1)
and c44 =
The fundamental TE and second TS resonances are involved in the energy trapping process, and energy-trapped condition is expressed as:
f1t > 2 f1s m f1t 2 f1s > 1 ,
or
(2)
where m is a convenient parameter of the frequencies disposition and is considered as a figure-ofmerit of energy trapping criteria. From (1) and (2) for the isotropic case follows:
c33 >4 c44
or
m =
1 2
c33 = c44
1 >1, 2(1 2 )
(3)
then
(4)
In an anisotropic media with strong piezoeffect each electric response resonance has two resonant frequencies, resonance and antiresonance, with respective elastic constant s. When piezoactivity (CEMC) rises, an isotropic elastic stiffness is split into two elastic constants, corresponding to limited boundary electrical conditions at constant electric field strength E and constant electric
E D E D E D displacement D: c44 c44 and c44 , c33 c33 and c33 with their relationships c33 = c33 (1 kt2 ) and
E D 2 c44 = c44 (1 k15 ) , where k t and k 15 are the thickness extensional and shear CEMCs.
For the considered piezo-plate configuration with direction of the collinear vectors of polarization and exciting electric field strictly along the plate thickness, the thickness extensional mode is a stiffened mode /12/ with the fundamental (N =1) resonance and antiresonance frequencies for a fully metallized plate:
E D B1 c33 q1 c33 f r, 1 t = = 2h h
and
D 1 c33 f a, 1 t = 2h
(5)
where B1 = 2 q1 1 kt2 , q1 is the first root of the frequency equation tan q = q kt2 . Note, that the resonance frequency of the non-electroded D-region, or D cut-off frequency, is equal to the antiresonance frequencies D 2 = f a ,N t , while E 2 = f r, N t . The resonance frequency can be expressed by first-order approximation on CEMC k t < 1 ( q1 ; 0.5 (1 4kt2 2 + ... ) ) as :
f r, 1 t ;
k2 1 + t 2
(6)
Meantime, in the ideal case of the considered plate configuration, the thickness shear mode is non-piezoactive - it can not be excited by the electric field parallel to the vector of polarization. It has a response at least in two cases: when there is an electric field component parallel to the major plate planes (that occurs in the case of asymmetric fringe-effect in a partially metallized plate), and r when the polarization vector P in PR volume is not strictly perpendicular to the major surfaces /16/. Anyway, for a small-order of the effects, such a shear mode itself is a one-dimensional unstiffened mode /17/, hence the resonance frequencies of all the shear overtones are integer (n) multiples of the
E fundamental resonance f r, n s = n f r, 1 s = n c44 2 h . The antiresonance frequency is greater than
the resonance one on the value, proportional to the respective CEMC of a given resonance. However, even for a homogeneous electric field suitable for a shear mode (perpendicular to the polarization direction), the even harmonics n = 2, 4 can not be excited electrically (an even number of half- wavelengths along the plate thickness), but they have a low intensity response (mostly mechanical, not electro- mechanical) due to coupling with another vibration, particularly with TE vibration. There are two approaches to the criteria of energy trapping for the fundamental (N =1) TE resonance depending on the frequency disposition. The first, the TE antiresonance frequency must be greater than the second TS resonance:
f a, 1 t > f r , 2 s = 2 f r, 1 s ,
D E c33 c44 2 1 > . D E 2 ( c33 c44 1) 3
then
or
(7)
where t is the extension-shear Poisson coefficient (an artificial parameter as an analog of (4) for the isotropic case). As was shown in /6/, that is a necessary, but not sufficient condition for energy trapping because of piezoelectricity (CEMC k t ). The second, the TE resonance frequency must be greater than the second TS resonance:
f r, 1 t > f r, 2 s = 2 f r ,1 s m f r , 1 t f r , 2 s = fr, 1 t 2 f r, 1 s > 1 ,
or or
(8) (9)
then
m=
B1 2
m=
q1
m; then
1 2
E c33 E c44
k2 8 1 + t 1 2 2
D c33 E c44
4 2 1 2 kt + ... > 1 .
( 10 ) ( 11 )
E E D E From (10, 11) follows that neither c33 c44 , nor c33 c44 can not be itself an exact parameter for
energy-trapped criteria because of CEMC influence. Note, that all the mentioned energy-trapped parameters establish the lowest limit only, but there is no upper limit considered. Isotropic and anisotropic cases /13/ match to each other for non-polarized state of piezoceramics:
D c33 E c44 E c 33 E ur c 44 P 0 ur P 0
c 33 1 0 =2 c 44 1 2 0
and
r m ( P 0) =
1 0 2(1 2 0 )
( 12 )
where 0 - Poisson coefficient of non-polarized piezoceramics. For the third (N = 3) TE harmonic and higher, the most convenient parameter of a relative TE and
D E TS resonances disposition is c33 c44 , because the resonance frequencies of high-order TE overtones D E are determined mostly by the c33 , not c33 constant, as well as the antiresonance frequency.
For the 3rd TE harmonic antiresonance or resonance frequencies to be higher than the 6th TS
D E resonance, it is required that c33 c44 > 4 for the f a, 3 t > f r , 6 s = 6 f r , 1 s disposition, and
D E c33 c44 > 4 ( 1 0.1 kt2 + ...) for the f r, 3 t > f r , 6 s = 6 f r, 1 s disposition, respectively. The difference in
D E the c33 c44 value is sufficiently small
Energy-trapping effect is very sensitive to critical values of the energy-trapped parameters, so that some two piezo ceramics which differ slightly in their material properties can differ largely in their dispersion.
The dot resonators were excited in their fundamental TE- mode and their TE resonance f r and antiresonance frequencies f a were measured. In Fig. 2 the effective thickness coupling factor k eff ( r , %) is plotted versus the normalized electrode size L/h. There is experimental evidence for
E E m ( 0.5 c33 c44 ) to govern energy trapping at fundamental TE resonance. Its effectiveness can be
judged from the measurement of the effective CEMC k eff of partially electroded resonators, or its equivalent r = f a f r 1 (%) with the relationship 1 k 2 = a r + b , where a, b coefficients according to IEC Standard /12/. If energy trapping works the frequency separation between f a and f r is fairly large and k eff approaches k t even if the diameters of the resonator's electrodes are small. If, however, energy trapping is missing then, for the same electrode diameter, f a and f r draw near and k eff decreases. How rapidly the dependence reaches saturation at increasing the electrode size is a strong indication for lack of energy trapping. Furthermore, the vibrational spectrum of the resonators showed a great number of inharmonic overtones which were largely suppressed for smaller electrode sizes in the spectrum of ceramics compositions with a greater CEMC k t value.
Fig. 2 . Experimental dependence of the fundamental TE r, 1 t and planar r, 1 p relative resonance frequency intervals ( CEMCs kt and k p ) on the relative electrode size L/h for different values of the energy-trapped parameters
D E E E c33 c44 ( c33 c44 ) in connection
with PZT-35 type Zr/Ti composition (Appendix). PR 6x6x0.3 mm. Dashed line graph region corresponding to a single mode TE resonance.
For comparison, the behavior of the effective CEMC of planar mode (max CEMC k p ) of vibration is presented in Fig. 2 , that does not exhibit the effect of trapping.
coefficient kp for PZT-35 type ceramics near PZT-35 (2, 5, 6) compositions (Appendix).
In Fig. 3 the experimental dependence of the planar p and extension-shear t Poisson coefficients, energy-trapped parameters
D E c33 c44 and m upon degree of polarization
(k p as a measure of piezoactivity) are presented for three PZT-35 type compositions (Appendix). It is clear, for PZT with strong piezoeffect, planar Poisson coefficient p does not reflect the efficiency of trapping. The energy-trapped
D E E E parameters c33 c44 and m ( c33 c44 ) grows as D E kp value increases, c33 c44 more rapidly
because of the additional influence of k t piezo-factor (10). All the mentioned energytrapped parameters correspond to each other, as a trapping criterion, for non-polarized state of
E E piezoceramics. The difference between t (defined by c33, D c44 ) and p is extremely high for
morphotropic PCM compositions (with relatively high k p value about 0.5-0.7 ), while for far tetragonal compositions (with relatively small k p value less 0.3 and typical high k t value more than 0.4) they coincide. According to the data presented in Fig. 3 fo llows that, if the condition of energytrapping ( 0) > 1 3 for isotropic non-polarized PCM is satisfied, energy trapping effect takes place in polarized PCM either.
3. ELEMENTARY MECHANICAL ANALOG of COUPLED VIBRATORS The concept of the energy trapping is based on coupled vibrations phenomenon. Mechanical analogies can be very useful in gaining an intuitive understanding of complex phenomena.
Fig. 4 . The swing of a pendulum : a parametric vibration of the pendulum (swing) with one degree of freedom; b schematic diagram of the pendulum (swing) and man trajectory and displacements; c two coupled vibration modes of a string pendulum with two degrees of freedom.
A classic example of an oscillator is a planar pendulum as a one-degree-of- freedom vibratory system. Vibration of a swing, which is well known due to our life experience, is a parametric vibration /14, 15/, when the most effective gain of the horizontal vibration with its own frequency f corresponds to the twice frequent vertical vibration f b = 2 f of a man on the swing (Fig. 4 a,b). Such a simple model illustrates the behavior of a string pendulum (Fig. 4 c), that is a vibrator with two degrees of freedom: it can swing from right to left, and from up to down. The most effective modes interaction - maximum efficiency of vibration transferring from one vibration (mode) to the other of two, horizontal and vertical, modes takes place when the own frequency fb of a string is near twice pendulum frequency f b ; 2 f . As to the subject of our consideration, it can be imagined the equivalency of a TE mode of a resonator with vertical vibration of a string pendulum, and a TS mode with its horizontal vibration, when the first TE resonance is coupled with the second TS resonance in a PR.
constant c (Fig. 5). This is a two-degree-of- freedom system for particular case of equal masses, which is under a stimulated regime of excitation (stimulated displacement ).
2 The basic parameters of the system are: 1 1 m and 2 2 m - uncoupled string- mass 2
2 oscillators self- frequencies, 1 (1 + c ) m and 2 ( 2 + c ) m - partial frequencies, then 2 2 2 2 2 c m = 1 1 = 2 2 . The complex representation i = i (1 + i Qi ) , where Qi quality factor
of ith string ( i = 1, 2 ) is used for taking into account the dissipation effect, the harmonic time dependence is represented by the factor e it , where ? frequency of external excitation. We will further discuss only the main conclusions for the particular case when the only mass 1 elastic parameter 1 (1 ) varies. Relative mass displacements are:
2 2 u1 2 = 1 2 R( )
and
2 2 u2 2 2 = 1 2 , R ( )
( 13 )
2 4 where R( ) = ( 1 2 )( 2 2 ) 2 2
- resonant factor,
( c 2 )
(1 + c
2 2 4 2 ) = ( 2 2 ) 2 - factor of coupling 2 2
Simple considerations show several characteristic frequencies of the system: - the displacement u1 characteristic (as well as u2 ) has two resonant maximums according to the equation R( ) = 0 at the following frequencies (normal resonance frequencies of the system)
2 1 + 2 2 = 2 2 2 1 2 4 2 + 2 2 2
( 14 )
- the mass 1 displacement equals zero u1 = 0 at the frequency 0 = 2 , when mass 1 is in equilibrium, and mass 2 moves in counter-phase to external influence to compensate its action. There is a co-phase relative motion of the two masses at frequencies below < 2 , and a counterphase relative motion above > 2 .
- the mass 1 displacement equals the external one u1 = +1 at the characteristic frequency ? 1 in the frequency interval of coupling according to 12 2 (1 + ) . 2 - the displacements of the two masses are equal u1 = u2 at the characteristic frequency = = 2 . The characteristic frequencies 0 , 1 and = are schematically presented in Fig. 6. Note that they do not depend on the variation parameter 1 (1 ) . The energy stored by each masses is Wi = 0.5 m 2 ui2 , where i = 1, 2 . In the particular case of equal strings 1 = 2 ( then 1 = 2 eq and 1 = 2 eq ):
2 2 = 2 and + = 2 + 2 c m , where - frequency of a co-phase anti-symmetric mode of eq eq
the system (center-of- gravity vibration, the string c is not strengthened), + - frequency of a counter-phase symmetric mode of the system (relative vibration, the string c is double2 2 strengthened), and the frequency of the mass 1 zero-displacement 02 = eq = eq + c m lies in
the middle of them. Note, that in the particular case of a free vibration, the system of two coupled natural modes exhibits a beating oscillation, when energy is transferred between the two coupled modes with the beat frequency equal to the difference between normal frequencies + and . The dynamic frequency characteristic (u1 ) 2 of mass 1, which is directly excited by the external force, is presented in Fig. 6. There are two maximums at the frequencies and + , which exhibit typical behavior for a system with coupling (Fig. 7). There is a dead zone between them, where the vibration of mass 1 is extremely weak (at least in the interval 1 0 ). The maximum of the effective coupling is attained for natural modes that have the same frequencies 1 2 = 1 in the uncoupled state. Relative amplitude dependences are presented in Fig. 8, 9 as functions of frequency ratio 1 2 for two different conditions: as a ratio of the kinetic energies of masses 1 and 2 at the same resonance frequency ( + and , respectively), and as an amplitude ratio of the mass 1 displacements at the resonance frequencies + and . Modes with a frequency ratio of
1 : 2 = 1 : 2 or higher consequently should not affect each other, effect of string- mass 2 quality
factor Q2 on mass 1 vibration becomes negligible.
c 2 = 0.5 ( = 0.11 ),
frequency ratio
1 2 = 1 2 0.2...2.4
and for two sets of the quality factors.
Fig. 7 . Dependence of the analog normal resonance frequencies + and on the frequency separation parameter 1 2 for c 2 = 0.1 ( = 0.008 ). Dashed line region of the most effective coupling of the two string mass oscillators.
We can make the following observations for the analog as a coupled system that relates to the energy-trapped effect of a PR: - there is a dead zone between the two resonances, where vibrations are extremely low; - the resonance frequencies of a coupled system ( ) never coinside, even in the case of equal two string- mass oscillators; - mass 1 , that is excited directly by an external force, has two resonances with a certain energy share of each vibrating mass: for 1 > 2 the energy of the higher frequency resonance (+ ) is
predominantly of mass 1, and the energy of the lower frequency resonance ( ) is predominantly of mass 2, so that the energy losses in the string- mass 2 oscillator do not have effect on the string- mass 1 vibration; for 1 < 2 at frequency a share of mass 2 energy is essential, so the mass 1 resonance is more sensitive to the losses of string- mass 2 oscillator; - for 1 > 2 in the amplitude- frequency spectrum the relative amplitudes of the two resonances decreases rapidly with the frequency separation increasing, so that the vibration amplitude of nondirectly excited mass 2 is extremely high at 1 ; 2 .
Fig. 8 . A relative share of the mass 2 kinetic energy in respect to the mass 1 energy at two resonances + and of the system at c 2 = 0.5 ( = 0.11 ) and Qi = 100.
Fig. 9 . The ratio of the mass 1 displacements at the resonance frequencies + and as a function of frequency separation parameter 1 2 at c 2 = 0.5 ( = 0.11 ).
Variation of the dispersion curves under a change of the energy-trapped parameter is schematically presented in Fig. 10.
Fig. 10 . Dependence of a qualitative character of the radial ( r ) and TE-TS dispersion curves on the
D E E E energy-trapped parameter c33 c44 ( c33 c44 ) :
D E - metallized plate region at c33 c44 4 - 5.4 (b), 5.6 - 7.1 (c), 7.3 - 9 (d);
D E When the energy-trapped parameter value c33 c44 < 9 , the fundamental (first) TE harmonic is
coupled with the second TS harmonic with a different slope at x = 0 in a 2 x2 representation for
D E E E D E E E c33 c 44 ( c33 c 44 ) < 4 (negative slope) and c33 c 44 (c 33 c 44 ) > 4 (positive slope). For the third TE
harmonic, the dispersion curves are split into two branches that reflect a coupling with the 6th and 8th TS harmonics. The slope of the curves at x = 0 is always positive /21/ that provides the energytrapped effect. Note one supposition that was not discussed yet. For extremely high values of the energy-trapped
D E parameter c33 c44 > 9 there is a prevail coupling effect of the fundamental TE harmonic with the 4th
TS resonance. Most likely, a positive slope of the dispersion curves takes place in this case, however
D E for c33 c44 = 9...11 sufficiently different dispersion curves can occur for the electroded (coupling
with the 2nd TS resonance) and non- electroded (coupling with the 4th TS resonance) PR regions for relatively high value of CEMC k t , that may result in energy-trapping efficiency lowering.
The nature of the even and odd TS harmonics is discussed below, that allows estimate their amplitude characteristic s in a TE PR.
Fig. 11 . Lateral (a) and thickness (b) wave intensity distribution of TE and TS coupled modes. Fig. 12 . Displacement distribution of natural modes in a solid body, excited mechanically in the middle -line.
According to /6/, in the case of a circular symmetry (disc PR), the exact analytical solution provides variable separation as u z ( z , r ) = F (r ) f ( z ) and ur ( z , r ) = Fr( r ) h( z ) . Then, the shear deformation is s4 ( z , r ) = (u z )r + (ur )z = u z ( z , r ) hz ( z ) u z ( z ) . 1+ = r f ( z) r ( 15 )
where ( z ), f ( z), h( z ) are some functions of the z-coordinate only, F(r) - some function of the rcoordinate. It means that in radial r-direction (x,y plane) maximum TS- mode intensity corresponds to the PR region with maximum gradient (degree of changing) of TE- mode intensity, moreover TSmode deformation equals zero where maximum TE intensity takes place. For optimal electrode size, when the Bechmann condition is satisfied, that is the only main TE harmonic (no inharmonics) is excited, maximum TE-mode r-derivative lies exactly at the border of the electrode (the point of junction the cos(x) in the E-region and exp(-x) in the D-region type functions), as shown in Fig. 11. For a larger electrode size the TS vibration maximums additionally take place predominantly in the regions between counter-phase TE vibrations of inharmonics.
Under the condition of a center-applied force T to a solid body (Fig. 12), the only symmetricdisplacement shear mode harmonics are possible. Among them, a zero center-of- mass displacement (natural modes) corresponds to the even harmonics only.
Fig. 14 . A schematic field wave pattern in plate zones under electrical excitation of the TS-mode resonances for the symmetric (a) and asymmetric (b) fringe-effect.
However, the presence of an electrical field component perpendicular to the vector of polarization
E /16-20/ results in excitation of unwanted TS vibration ( c44, D , k15 , typically k 15 > k t ) (unstiffened
mode /12/). The result of the asymmetric fringe-effect due to asymmetric disposition of electrodes ( electrodes misalignment, or if an electrode on one face is larger than on the other face, because of
(or between) PR terminals, etc.), as shown in Fig. 13, is an excitation of the odd TS harmonics (Fig. 14b). A symmetric fringe-effect results in an electrical excitation of a restricted set n = 2, 6, 10 of the odd TS-mode harmonics (Fig. 14b). In Fig. 14 a pattern of the electrically excited (AC) TSmode harmonics are presented as idealized models of symmetric and asymmetric fringe-effect. Electric field distribution corresponds to some voltage polarity. The TS modes for a symmetric fringe-effect are modeled by two mechanically homogeneous piezo-plates separated electrically by a thin dielectric layer with low permittivity. So, maximum intensity of the electrically excited TS harmonics lies in the border of electrodes, as well as in a particular case of coupled even TS modes. Another reason of the odd TS- mode r harmonics excitation is when the polarization vector P in PR volume is not strictly perpendicular to the major surfaces /16, 18-20/, hence the odd TS harmonics are excited in a whole volume under the electrodes. As to material parameters, the relative intensity of a shear resonance for a small appearance of the described effects under the conditions of similar construction factors is proportional to the CEMC k15 and k t anisotropy, and in the case of asymmetric fringe-effect additionally to the dielectric
T T permittivity 33 and 11 anisotropy.
As was shown, the relative arrangement of the high-order (third and higher) TE and TS resonances,
D E E E including shear odd harmonics, is determined by the parameter c33 c44 ( not c33 c44 ).
dependence for the 2nd TS resonance is similar to presented in Fig. 9 for a simple mechanical model, and can be estimated as follows: in respect to the TE resonance frequency f r the TE mechanical stress decreases as T ( f ) : 1 for ? Q 1 , where = ( f fr ) f r - relative frequency
displacement. At the frequency f = f r , 2 s of the 2nd TS resonance ( for f r > f r , 2 s , when energy trapping effect takes place): T ( f2s ) : fr m f a (1 + r ) ; = = fr f2 s m 1 f a (1 + r ) f 2s
D E c33 c44 D E c33 c44 2(1 + r )
( 16 )
Fig. 15 . Experimental dependence of the relative intensity of the second ( A2S ) and third ( A3S ) shear harmonics on the energyD E E E trapped parameter c33 c44 c33 c44
According to a common analytical approach , for the fundamental (first) TE resonance the values
D E E E of c33 c44 from 4.8 ( c33 c44 > 4) up to 9 are allowed only, that corresponds to the frequency
arrangement of the basic TE resonance between the 2nd and 3rd shear harmonics. Moreover, the
E E D E value of m = 1.12 0.02 (or c33 c44 = 4.8 0.2 , or c33 c44 = 6.2 0.3 for typical k t ; 0.5 ) provides
the optimal disposition of equal and low intensity the 2nd and 3rd TS harmonics in respect to the first TE resonance.
between the 5th up to 10th TS harmonics, that includes two even TS harmonics (6th and 8th ) inside
exhibit ing coupling with TE mode. As shown in Fig. 16, the third TE resonance can coincide with the 6th , 7th or 8th TS harmonics, when the first fundamental TE resonance is located between the second and third TS harmonics. The situation is illustrated in Fig. 17 , where the filter characteristics are presented for a series of piezoceramic compositions with the energy-trapped parameter
D E c33 c44 allowing to locate the third TE resonance between appropriate TS resonances, or exactly on
some TS resonance.
Fig. 16 . TE-TS frequency spectrum of a thin PR in respect to the fundamental shear resonance frequency
D E f r, 1 s as a dependence on the energy-trapped parameter c33 c44 .
Fig. 17 . Change of amplitude-frequency characteristics of narrow-band filters with the third TE basic mode
D E in respect to the energy-trapped parameter c33 c44 .
( 17 )
are optimal, when it is located accordingly between the 5th and 6th , 6th and 7th , 7th and 8th , 8th and 9th unwanted TS resonances. Additionally, if a HF filter is executed as a set of several discrete piezoelements, there is a supplementary way to improve its stopband attenuation using piezoplates made from slightly different PCMs. Having the same working TE resonance characteristics, the plates have differing
D E frequencies of similar unwanted resonances, when c33 c44 parameter varies to separate similar TS
harmonics, and the planar parameters CEMC ( k p ), velocity ( V1E ), Poisson coefficient ( p ), planar sizes ( t x , y ) vary to separate similar high frequency planar harmonics close to the TE resonance. The frequency separation of similar unwanted resonances on different plates on the relative value more than Q-1 allows to essentially increase filter attenuation out of the bandwidth /23, 24/.
CONCLUSIONS. A piezoceramic thin plate polarized and excited in its thickness direction can vibrate in TE as well as TS modes of vibration which are coupled. The effect of coupling is a necessary condition for TE-mode energy trapping phenomenon. Influence of even and odd TS harmonics on the first and third TE- mode working vibration characteristics was investigated. Energy-trapped criteria for isotropic and anisotropic due to strong piezoeffect cases were analyzed and summarized, the relationship between dispersion curves and material constants were
E E D E established. The figure-of- merit is: c33 c44 ( m ) for the fundamental (first) TE harmonic, and c33 c44
for the third and higher TE harmonics. Equality of energy-trapped parameters was shown for nonpolarized state of piezoceramics. Energy-trapped material parameters behavior with PCM composition, degree of piezoceramic polarization, their appearance in respect to relative electrode size was experimentally investigated. Energy-trapped material parameter criteria are quite different in isotropic and anisotropic cases, their difference is extremely high for morphotropic PCM compositions (with relatively high k p value about 0.5-0.7 ), while for far tetragonal compositions (with relatively small k p value less 0.3 and typical high k t value more than 0.4) they coincide. According to the data presented in Fig. 3 follows that, if the condition of energy-trapping ( 0) > 1 3 for isotropic (non-polarized) PCM is satisfied, energy trapping effect takes place in a polarized PCM either. Mechanisms of the odd and even TS harmonics excitation in the active zone of a TE- mode PR, their frequencies and space predominant location in a PR volume were considered. Considering an energy-trapped PR as a system with coupled modes (oscillators), an elementary classic mechanical system of two coupled vibrators was applied to describe frequency and amplitude behavior of a TE energy trapping mode piezoresonator at a variation of material energy-trapped parameters. In agreement with the model, experiments show strong (resonant character) dependence of the coupled second (even) TS resonance intensity on the frequency difference to the TE resonance
E E (energy-trapped parameter c33 c44 ), while the third (odd) TS resonance intensity depends on mainly
constraction features of a PR, such as asymmetric fringe effect and non-collinearity of the polarization and exciting electric field vectors. A criterion and principle for material energy-trapped parameters optimization was proposed on the basis of comparison of relative intensities of the even and odd TS resonances close to the TE resonance. The optimal values for the fundamental and third TE harmonics were established. The
second and third TS resonances near the fundamental TE harmonic reach equal and sufficiently low
E E D E intensity at m = 1.12 0.02 (or c33 c44 = 4.8 0.2 , or c33 c44 = 6.2 0.3 for typical k t ; 0.5 ). For
the third TE harmonic its coincidence with the TS resonances is unwanted: if it happens the coupled even TS resonances fully depress the major third TE mode, while the odd TS resonances lead to a
D E distortion of working characteristic due to a superposition. A set of values c33 c44 = 3.3 0.3,
4.8 0.4, 6.3 0.4, 8.1 0.5 provides optimal disposition of the third TE and corresponding TS resonances. This research is being conducted to obtain a better understanding of the behavior of piezoceramic resonators and to develop means to increase the stopband attenuation characteristics for RF and VHF filter. This paper covers some aspects of that work. This gives a mechanism for energy-trapping, which is essential to the performance of all high frequency piezoresonators. The same approach can be applied to the trapping effect of other types of vibrations.
REFERENCES [1] R. Holland E.P. and Eer Nisse, Design of resonant piezoelectric devices (M.I.T. Press, Cambridge, 1969). [2] B. Jaffe, W.R. Cook, and H. Jaffe, Piezoelectric Ceramics. London : Academic Press, 1971 [3] A.V. Mezheritsky, Quality factor of piezoceramics, Ferroelectrics, vol. 266, pp. 277-304, 2002. [4] OCT 11 0444 87, Piezoceramic Materials. Specifications. Moscow : ElectronStandard, 1987 (Russian). [5] H.F. Tiersten, Thickness vibrations of piezoelectric plates, J. Ac. Soc. Am., vol. 35, no. 53, 1963. [6] P. Schnabel, Dispersion of thickness vibration of piezoceramic disk resonators, IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. SU-25, N 1, pp. 16-24, 1978. [7] R. Bechmann, US Pat. No. 2249933 (1941). [8] A. Glowinski, R. Lanqon, R. Lefevre, Effects of asymmetry in trapped energy piezoelectric resonators, Proceed Frequency Control pp. 233-242, 1973, [9] H. Sekimoto, H. Nataka, M. Miura, Analysis of Trapped Energy Resonators with Tabs, IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 34, N 6, 1987, pp. 674-680. [10] K. Yamada and H. Shimizu, Thickness-extensional trapped-energy mode transducers with no inharmonic spurious modes for any size of vibrational area, Ultrason. Symp., 1984, pp. 383-387. [11] W. Shockley, D.R. Curran, and D.J. Koneval, Energy trapping and related studies of multiple electrode filter crystals, Proc. 17 An. Symp. on Freq. Contr., 1963, pp. 88-126. [12] IEC Standard. Guide to dynamic measurements of piezoelectric ceramics with high electromechanical coupling. Publication 483, 1976.
[13] D. Berlincourt, Variation of electroelastic constants of poly-crystalline lead titanate zirconate with thoroughness of poling, J. Ac. Soc. Am., vol. 36, no. 3, pp. 515-520, 1964. [14] V.G. Shironosov, The Kapitsa pendulum in and beyond the parametric resonance zone, Journal of Technical Physics, 1990, v. 60, No. 12, pp. 1-7 (in Russian) [15] E.I. Butikov, On the dynamic stabilization of an inverted pendulum, Am. J. Phys., Vol. 69, No. 6, June 2001 pp 1-14 [16] N.F. Foster, G.A. Coquin, G.A. Rozgonyi, F.A. Vannatta, Cadmium sulphide and zinc oxide thin-film transducers, IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. SU-15, N 1, pp. 28-41, 1968. [17] T. Yamada and N. Niizeki, Formulation of admittance for parallel field excitation of piezoelectric plates, J. Appl. Phys., vol. 41, no. 9, pp. 3604-3609, 1970. [18] H. Schweppe, Excitation of two adjacent resonances with a chosen frequency separation in a ceramic piezoelectric resonator, IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. SU-17, N 1, pp. 12-17, 1970. [19] S.N. Wickstrom, Characterization of PZT-5A dual thickness mode resonators, IEEE Ultrasonics Symposium Proc., pp. 577-580, 1990.
Appendix.
Table. Electro-elastic material constants of PZT-35 type piezoceramics (Russia) involved in the research with the composition 0.97(Pb0.96 Sr0.04 )(Zrx Ti1-x )O 3 + 0.03 [complex additive]
E E ( sij : [1013 m2 N ] , cij : [109 N m2 ] , : [103 kg m3 ] )
PCM [x]
Parameter
E s11 E s33 E c44
D E c33 c44 E E c33 c44
PZT-35 ( 1 ) [ 0.54 ]
PZT-35 ( 2 ) [ 0.52 ]
PZT-35 ( 3 ) [ 0.51 ]
PZT-35 ( 4 ) [ 0.50 ]
PZT-35 ( 5 ) [ 0.49 ]
PZT-35 ( 6 ) [ 0.42 ]
91 129 30 6.3 4.5 0.26 0.34 405 900 7.8 880 0.48 0.66 0.52 0.70
95 134 27 7.1 5.2 0.25 0.36 516 1150 7.8 710 0.51 0.67 0.51 0.74
105 142 28 6.3 4.7 0.28 0.35 905 1275 7.8 500 0.53 0.68 0.50 0.69
108 138 30 5.9 4.4 0.30 0.34 1110 1200 7.8 510 0.52 0.67 0.49 0.64
106 132 33 5.4 4.2 0.30 0.32 1090 1110 7.8 540 0.48 0.63 0.47 0.60
93 98 42 4.0 3.4 0.30 0.29 600 630 7.8 1040 0.31 0.48 0.40 0.44
0
T 33 0 T 11 0
Qm ,plan.
kp
k33 kt k15
Glossary of Terms: N, n E , D - harmonic numbers of TE and TS modes of vibration, respectively - TE mode cut-off frequencies of electroded (E-region) and non-electroded (D-region) regions of a plate, respectively - current angular frequency - normalized current and cut-off frequency mechanical displacement ( i = z, r (x,y) or i = 1, 2 ) electric field stress and displacement mechanical stress and strain quality factor thickness and planar sizes of a plate, respectively electrode size vector of polarization (z-direction)
, 0 ui
E, D T, S Q h and tx, ty L
r P E T cij , D , mn , dki - piezoceramic material constants k, kt , k 15 , k p - generalized, TE- , TS-mode and planar coefficients of electromechanical coupling (CEMC), respectively m - energy-trapped figure-of-merit , t , p , 0 - isotropic, extension-shear Poisson coefficients, planar Poisson coefficients of
polarized ( p = s12 s11 ) and non-polarized ( 0 = s12 s11 ) piezoceramics, respectively
E E
f f
Q
t , BN qN - N-root of a frequency equation x - planar wave-number f r, N t , f a, Nt - TE-mode ( t ) N-harmonic resonance and antiresonance frequencies of fully metallized plate
f r, n s , f a ,n s
- TS-mode ( s ) n-harmonic resonance and antiresonance frequencies - fundamental TE-mode resonance and antiresonance frequencies of a real PR (including partly electroded case) AN t , Ans - relative intensity of N TE-harmonic and n TS-harmonic Mechanical analog f b (Tb ) , f (T ) - resonance frequency (period) of vertical and horizontal pendulum vibration
generalized resonator or filter bandwidth relative frequency displacement quality factor dimensionless factors
fr , fa
i ( i ) 0 , 1 , =
- uncoupled (partial) string mass oscillators ( i = 1,2 ) self-frequencies - resonance frequencies - characteristic frequencies (zero, unit and equal masses displacement) - factor of coupling
Author:
A.V. Mezheritsky
2753 Ocean Ave., 2F, Brooklyn, NY 11229 Ph.D. in Physics (1985, MIPT, Moscow, Russia), IEEE Member
This work was done at the Ceramics Department of PHONON Co., Moscow, Russia.