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Vacuum gauges for the fine and high vacuum

Karl Jousten, PTB, Berlin 1. Measurement of vacuum pressures and the calibration chain 2. Overview of measurement principles and gauge types 3. Direct gauges, indirectly measuring gauges 4. Accuracy of vacuum gauges

CAS_2006

Measurement of vacuum pressure


The definition of pressure p:

F p= A

Mass

Time

Length It follows one of the measurement principles.

Fine and high vacuum gauges

Measurement of vacuum pressure

Gas pressure p A

F p= A
F p0 Balance as force meter

This is a traceable instrument usable as primary standard

Fine and high vacuum gauges

Errors and uncertainties


Error: A wrong reading of a gauge. A deviation from a true value defined by the SI units.

True value Error/deviation Indicated value

Uncertainty: The possible range by Possible which a reading may not reflect the true value true value defined by the SI units.

Uncertainty Indicated value

Fine and high vacuum gauges

Measurement of vacuum pressure

Gas pressure p A

F p= A
F p0 Balance as force meter

Fine and high vacuum gauges

Errors and uncertainties


The calibration chain

primary standard
Reliability increases

secondary standard
Uncertainty increases

working standard ordinary vacuum gauge

Fine and high vacuum gauges

Traceability and primary standards


Fully developed primary standards partly developed standards

Fine and high vacuum gauges

Best accuracy available


Relative uncertainties of pressures in primary standards
1E+00

Relative Uncertainties (k =2)

1E-01
2E-02 1E-02

1E-02 1E-03 1E-04 1E-05 1E-06 1E-10 1E-08 1E-06 1E-04

4E-03 2E-03

Mercury Manometer Continuous expansion Series expansion


3E-04 1E-04 3E-05 7E-06

p atm
3E-06

1E-02

1E+00

1E+02

1E+04

1E+06

p in Pa

Traceability and primary standards

Measurement principles and gauges


1E+00

M e a s u re m e n t u n c e rta in ty

1E-01

Ionisation and Suppression of X-ray and ESD


-D nt de

1E-02

in to lt cu i Ionisation iff

et pr ter

1E-03

n pe e sd Ga

Viscosity

Ga s in F To p = dep ta l e pr A nde nt es s ur e Piezo Piezoresistive Membrane Mechanical Resonance Capacitance

Heat conductivity Piston/Cyl U-tube

1E-04 1E-12

1E-10

1E-08

1E-06

1E-04 pressure in Pa

1E-02

1E+00

1E+02

1E+04

Fine and high vacuum gauges

Measurement principles and gauges

Fine and high vacuum gauges

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Measurement principles and gauges

Fine and high vacuum gauges

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Measurement principles and gauges

Gas inlet

F p = = gh A

The mercury U-tube exists since Torricelli (1644). It is still the most accurate vacuum gauge > 100 Pa (1 mbar)!

Fine and high vacuum gauges

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Measurement principles and gauges

The rotating piston gauge

Gap: 0.2m

F p= A

Gas

Fine and high vacuum gauges

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Measurement principles and gauges Mechanical gauges

M R A Raum 1 P1 Raum 2 P2 Z

3 Groups: 1. 2. Ref.side patm and contains meas.dev. Ref.side p=0, meas.dev. on test side (1) 3. Ref.side p=0 and contain meas.dev.

Fine and high vacuum gauges

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Measurement principles and gauges


Mechanical gauges: Bourdon gauges

Fine and high vacuum gauges

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Measurement principles and gauges


Mechanical gauges: Bourdon gauges
Light source 2 Photo cells

Mirror Coils

Amplifier

Precise Quartz spiral Resistor

Fine and high vacuum gauges

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Measurement principles and gauges


Mechanical gauges: Bourdon gauges

Fine and high vacuum gauges

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Measurement principles and gauges


Piezoeffect used by membrane

Fine and high vacuum gauges

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Measurement principles and gauges


Piezoresistive effect
Material: Silicon (MEMS)

Fine and high vacuum gauges

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Measurement principles and gauges


Capacitance diaphragm gauge

Sensitivity of deflection: 0.4 nm! Membrane (INVAR, Ceramic): as low as 25 m. Two improve zero stability: 2 capacitors plus thermostated housing

Fine and high vacuum gauges

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Measurement principles and gauges


Electrical block diagram of capacitance diaphragm gauge

Fine and high vacuum gauges

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Measurement principles and gauges


Thermal transpiration effect
Cross section

n2 T = 1 n1 T2
p2 T = 2 p1 T1

Fine and high vacuum gauges

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Measurement principles and gauges


Thermal transpiration effect

318 = 1.036 296

Fine and high vacuum gauges

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Measurement principles and gauges

Resonance Silicon Gauges Designed by MEMS

Fine and high vacuum gauges

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Fine and high vacuum gauges

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Measurement principles and gauges


Heat conductivity through a gas

Fine and high vacuum gauges

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Measurement principles and gauges


Uncertainties due to the physical principle of measurement
Example: Pirani gauge
convection

Heat transport by gas

Radiation and conduction

Fine and high vacuum gauges

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Measurement principles and gauges


Electrical circuit for Pirani gauge

Constant temperature Constant heating voltage, current, or power

Fine and high vacuum gauges

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Measurement principles and gauges

Mikro Pirani (MEMS manufactured) by MKS

Heated sheet 60C MEMS: higher Knudsen number, no convection

Fine and high vacuum gauges

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Measurement principles and gauges


Correction factor for helium for 4 different Pirani gauges
1,40

1,20
Helium

1,00
Correction factor CF He/N2

0,80
VM1 (Pfeiffer) VM2 (Thyracont) VM3 (MKS) VM4 (Leybold) Mean

MEMS Pirani

0,60

0,40

0,20

0,00 1E-03

1E-02

1E-01
p in mbar

1E+00

1E+01

1E+02

Fine and high vacuum gauges

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Measurement principles and gauges


Experimental standard deviations of repeat calibrations for 4 different Pirani gauges at various pressures

# 1 2 3 4

Gauge

s in % 0,05 mbar 3 mbar 30 mbar Pfeiffer TPR 280 0,19 0,13 0,09 Thyracont VSP52 0,06 0,35 3,30 MKS 925C 0,10 0,12 0,19 Leybold TTR91 0,03 0,09 0,12

Fine and high vacuum gauges

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Measurement principles and gauges


Thermocouple gauge

Fine and high vacuum gauges

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Measurement principles
Viscosity

& 8kT d p= RD ( ) m 20

Fine and high vacuum gauges

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Measurement principles and gauges

Sprinning rotor gauge

Fine and high vacuum gauges

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Measurement principles and gauges


Sprinning rotor gauge
Residual drag vs. frequency of rotor
2,15E-07 s-1 2,10E-07

2,05E-07 DCR-Signal

2,00E-07

1,95E-07

1,90E-07

1,85E-07 404 406 408 410 Rotor frequency f 412 414

s-1

416

Fine and high vacuum gauges

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Measurement principles and gauges


Sprinning rotor gauge No gas consumption (e.g. by ionization) No dissociation (hot cathode) Low outgassing rate Predictable reading High accuracy High long-term stability

Fine and high vacuum gauges

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Measurement principles
Ionisation

Fine and high vacuum gauges

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Measurement principles

Ionization gauges for different vacuum ranges

Fine vacuum IG

Fine and high vacuum gauges

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Measurement principles
Ionisation gauges for fine vacuum

Fine and high vacuum gauges

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Measurement principles

I 1 = I0 1 eS n L
I 0 ( 1 ) p= ln 1 1 I ( 1 ) S (T ) ( 0 ) L kT
Previous investigations showed that TDLAS is applicable for vacuum measurement:
2.5 Intensity (a.u.)

( ) ( )

Partial A bsorpion, Reference Predicted fromch2

CO, mid-infrared (5 m), resolution down to 10-5 Pa, high accuracy.

2.0 1.5 1.0 0.5 0.0 35 40 45 50 55 60 65 70 75 80

time (ms )

Fine and high vacuum gauges

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How accurate are vacuum gauges ?


Reasons for inaccuracies of vacuum gauges
General Uncertainties chain due to Example calibration Has the vacuum gauge been ever calibrated? Against what standard? Pressure at gauge position may not reflect the pressure where the experiment takes place. Outgassing of an ion gauge may falsify an outgassing rate measurement.

Uncertainties due to installation

Uncertainties due to operation

Inaccuracies caused by the physical Thermal conductivity or ion gauge is used, principle of measurement but gas mixture is not (accurately) known. Uncertainties caused by the device See Table 2. itself

Fine and high vacuum gauges

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How accurate are vacuum gauges ?


Reasons for inaccuracies Gas species dependence: Real total pressure only for force/area measuring gauges and > 100 Pa (1 mbar)! Below 100 Pa consider the thermal transpiration effect. Spinning rotor gauges: Use a weighted mean mass, if approximate relative composition is known. 2 n n meff = ai mi ai = 1
i =1
i =1

Thermal conductivity gauges and ionisation gauges : Scaling factors are available, but do have high uncertainties.

CFeff = ai CFi
i =1

Fine and high vacuum gauges

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How accurate are vacuum gauges ?


Uncertainties due to the vacuum gauge itself
General Offset measurement Offset instability (drift) Examples residual drag in SRG, zeroing of Pirani gauge, X-ray- and ESD-effect for ion gauges Offset drifts with environmental temperature (Piroutte effect in SRG), bridge is no more balanced with time Number of digits shown Enclosure temperature of Pirani changes varies, thermal transpiration effect changes in CDG, amplifier changes amplification Ion gauge (sensitivity changes with pressure) Same signal at repeat measurements? Integration time in SRG, in picoammeter with ion gauge. Calibration constants change with time. Mechanical gauges (up, down measurement) Surfaces change, accommodation coefficients change, secondary yield changes 43

Resolution Influences of environment (mainly temperature)

Non-Linearity Integration time (scatter of data), repeatibility

Reproducibility (stability of calibration constant) Hysteresis Prior usage, cleanliness

Fine and high vacuum gauges

How accurate are vacuum gauges ?


Table: Relative measurement uncertainty of commercially available vacuum gauges. Gauge type Piston gauges Quartz-Bourdon-manometer Resonance silicon gauges Mechanical vacuum gauge Membrane vacuum gauge Piezo Thermocouple gauge Pirani gauges Capacitance diaphragm gauges Spinning rotor gauges Penning gauges Magnetron gauges Measurement range in Pa 10...105 103...105 10 ... 105 102 ... 105 102 ... 105 102 ... 105 10-1 ... 102 10-1... 104 10-4 ...105 10-5 ...10 10-7 ... 1 10-8 ... 1
-10 -2

Normal uncertainty

Optimum range Lowest in Pa uncertainty 102...105 10-4... 10-5 103...105 3x10-4... 2x10-4 2x10-4... 5x10-5 100 ... 105

0.003... 0.0005 0.1 ...0.01 0.1 ...0.01 1 ...0.01 1... 0.3 1 ... 0.1 0.1... 0.003 0.1 ... 0.007 0.5 ... 0.2 1 ...0.1 1...0.05

1 ... 100 10-1 ... 105 10-3 ...10-1 10-5 ... 1 10-6 ... 1 10 ... 10
-8 -2

0.02 ... 0.01 0.006... 0.001 0.006...0.004 0.3...0.1 0.1...0.02 0.2...0.02

Ionisation gauges (Emission cathodes) 10

... 10

Fine and high vacuum gauges

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How accurate are vacuum gauges ?


1E+00
1 0,2

Relative Uncertainties ( k =2)

Ionisation gauge
0,1 0,05 0,05 0,02 0,004

1E-01

Mechanical
0,02 0,01

Pirani
0,01 0,003

1E-02 1E-03 1E-04 1E-05

SRG
0,006

CDG
0,002 0,001

Continuous expansion

Series expansion

QBS Piston p atm Mercury Manometer

1E-06 1E-10

1E-08

1E-06

1E-04

1E-02

1E+00

1E+02

1E+04

1E+06

p in Pa

Lowest relative uncertainties for vacuum gauges and primary standards Errors > 100 % (error factor > 1) are possible.

Fine and high vacuum gauges

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Todays commercial gauges


Pirani gauge
Old classical gauges: Gauge head + controller Today: Active gauges or transmitter (all in one) or Digital gauges (digital output via interface)

Fine and high vacuum gauges

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Todays commercial gauges


Transmitter gauge plus Profibus Converter

Fine and high vacuum gauges

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Todays commercial gauges


Commercial active Line vacuum gauges

Fine and high vacuum gauges

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Fine and high vacuum gauges


We have discussed:

Metrological system - primary standards- calibration chain Measurement principles and gauges Direct, indirect measuring gauges Sources of uncertainties with values from 0.001% up to 100% or factor

CAS_2006

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