Ultra Precision Engineering - some recent developments

Professor Pat McKeown OBE FREng

What is Precision Engineering?

It is multi-disciplinary, based heavily on the application of metrology (dimensional and thermal) to manufacturing, and covers materials, machining and fabrication processes, design of high-precision machines, mechatronics and thus, microsensors, servo-drives, actuators, high speed control systems, etc. Precision Engineering means working to tolerances from 1 part in 104 (McKeown, P.A.,1979) . but now reaching 1 part in 108 this is Ultra-Precision Engineering Precision Engineering involves working at the forefront of current technology. (Jones, RV 1979).it still does! Precision Engineering has led to the ultra-precision technologies of _ Micro-engineering. Engineering nanotechnology.
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Development of single point diamond machining

Ultra-precision air-bearing spindles Ultra-precision air-bearing spindles

1960
Microtome knives Microtome knives

Encoder feedback < 100 nm Encoder feedback < 100 nm

1970
Radius tools Radius tools Waviness < 1 m Waviness < 1 m

1980

Waviness < 0.1 m Waviness < 0.1 m Non-circular cutting edges Non-circular cutting edges

1990

CNC control CNC control

2000

2010
Glass scale feedback Glass scale feedback Multi-axis machines and FTS turning Multi-axis machines and FTS turning
From Brinksmeier & Courtesy: Moore Nanotechnology Systems , ALMT

Aspheric IR optics Aspheric IR optics

1960

1970 1980

Off-axis Mirrors Off-axis Mirrors

FTS-turned moulds and mirrors FTS-turned moulds and mirrors

1990
Triangular microprisms Triangular microprisms

2000 2010
Freeform surfaces Freeform surfaces
From Brinksmeier & Courtesy: Moore Nanotechnology Systems , ALMT

Development of spdt machinable geometries

From Brinksmeier, Bremen

Chemical wear in diamond machining

Diamond turning process capability.nanotechnology

Ref, Technodiamant

Undeformed chip thickness of 1nm on amorphous copper

Ref, Ikawa & Donaldson, circa. 1990
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400 mm dia Axicon for space laser systems

Diamond micro-tools manufactured using focussed ion beam machining

Ref. Adams, Sandia Nat. Labs. California

8

1980s Triangular prisms

2010s Hexagonal prisms

Fly-cutting of intersecting Fly-cutting of intersecting systems of V-grooves systems of V-grooves

From Brinksmeier, Bremen

Micro-chiselling Micro-chiselling of corner cubes of corner cubes

Diamond machining of prism arrays

The NION Nanocentre Diamond Machining Centre (1990)

the worlds most accurate machine tool of its size

Thermal stability of the NION machine provided by 5 advanced temperature control systems (+/- 0.001 deg C)

Ref, McKeown, Carlisle, Shore, 1990

James Webb Space Telescope Infrared Spectrometer Image Slicer

Mirror 12 Mirror 11 Mirror 1

29 mm

Individual mirrors: 12 x 1mm Form error: < 10nm RMS Curvature radius: 162.5mm

Ref, Cranfield University Precision Engineering Centre

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James Webb Space Telescope Launch 2017

Integrated Science Instrument Module ~ spectographic analysis

Infrared optimised space telescope searching for first galaxies formed in the Universe 13

Ultra Precision Large Roll Diamond Turning Machines

designed and produced at Cranfield Precision (from 1992)

Workpiece Accuracy < 1 micron per metre Workpiece weight up to 2000 Kg Oil shower temp control

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Ultra Precision Manufacturing capability for structured drums

Purpose built facility @ OpTIC Clean room class 10,000

Lab temperature control +/- 1C Enclosure temperature control +/- 0.1C Active vibration isolation

Replicating film from a structured drum

UV-curing Extrusion

Applications for micro-structured films

Solar Energy
thermal collectors 140000 120000 photovoltaics

Displays
Flat panel 120 100 80 60 40 20 0 CRT

80000 60000 40000 20000 0

19 96 19 98 20 00 20 02 20 04

US$ Billions turnover

100000

2003

2005

2007

2009

Optical films: solar concentrators and antireflection film, increasing efficiency, reducing silicon costs

Optical films are utilised in all flat panel displays for backlighting, depixelation, 3D displays etc.

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Applications for micro-structured films

Security Lighting / illumination

Identity fraud:~ 25 billion US$ p.a. Optical security devices business ~ 1.25 billion US$ growing 12% p.a. Applications - fraud prevention: note printing, securency, ID, etc.

Film-based lighting market expected to total US$10 billion by 2010 including domestic and industrial applications using LED and OLED technologies

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Ultra precision optics demands

Telescopes E-ELT

Space - IXO telescope mirror

Lithography - EUV [ASML] Microlithography Systems

Fusion - Focusing lens wedge optic

European Extra Large Telescope (ELT)

[the 400th year of the telescope..Galileo 1609-2009]

E-ELT
42 metre diameter primary mirror Aspheric primary mirror design based on 984 x 1.46 metre hexagonal segments 6 metre diameter secondary monolithic deformable mirror adaptive optics
Ref: www.eso.org operational by 2020 estimated cost 950m

E-ELT primary mirror design having ~ 984 1.46 metre hexagonal segments
Form accuracy : 20 nm RMS, roughness 1 nm RMS
size to

part 1

8 10 in

e lativ re

f on o si reci p

cy ura acc form

Ref, www.eso.org

Primary mirror
42m diameter Far off-axis ellipsoidal form 984 segments @1.46m

7 Prototype Segments from peripheral region

Process Chain
Major new UK-based research initiative - processing time for large (1+ metre scale) freeform optical surfaces reduced from 100 hours to 10 hours

Aspherisation
Develop grinding and support technology for the aspherisation of large metre scale optics Machine; Grinding Process; Metrology; Handling

Grinding Requirement:

1 Segment per day 1mm material removed 1m form accuracy No edge chipping or roll-off

Ultra Precision Machining Technologies

1000

Roughness [nm] RMS

Fixed abrasive grinding ductile mode grinding Computer controlled polishing

RAPT

1 2

100

10

IBF
0.1

diamond turning

MRF
0.01 0.1 1 10 100 1000

Removal Rate [mm3/minute]

Grinding machine
Free-form grinding capability Hydrostatic bearings 10 KW grinding power High performance thermal control (0.1c) Integrated metrology capability

Rapid material removal rate, (200 mm3/sec) Form accuracy < 1 m/m RMS Low sub-surface damage < 10 m Compact machine size
http://www.hembrug.com

Cranfield University BoX Machine

Metrology frame/optical straightedge Grinding spindle Laser interferometer / LVDT metrology Grinding wheel Truing/dressing All axes/spindle oil hydrostatic
Lowest control and structural eigenfrequencies > 100 Hz

Ultra-precision, ultra stiff 3 axis freeform grinding machine for large optics up to 2 metres diameter

Ref: Shore/Morantz (2006)

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Workpiece Metrology
Workpiece metrology has full system accuracy ~ 0.25 m
Optical Straightedge Mini-laser interferometer X axis Z axis

Workpiece

LVDT probes
www.cranfield.ac.uk

Low cost high performance temperature control

Use a commercial unit to provide cooled water to a pumped loop Divide cooled water between services using mass flow control Complex algorithms to control cross-talk Total of 11 channels of temperature control Services located with mK resolution , << 0.1 C accuracy

machine (chilled water supply is remote)

Grinding motion
Z X C
20 Free-form grinding capability Novel 3 axes configuration R-theta grinding mode Toroidal shape grinding wheel Sophisticated toolpath software C X Z

Grinding technology
Grinding Wheels 325mm DIA Resin bond D25, D46, D76 50 concentration Multi-stage grinding process
GrindingConditions Gritsize (m) Depthof cut(m) Feedrate (mm/rev) Workspeed (mm/s) Cuttingspeed (m/s) MMR (mm3/s)

Roughcut(D76) Semifinishcut(D46) Finishcut(D25)

76 46 25

500 200 50

15 10 1.5

25 20 25

30 30 30

187.5 40 1.87

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Mirror segment (1)CMM Metrology

Results:
Surface map (CMM) RMS < 1 m, P-V < 5.5 m No visible edge chipping No attributable cavity effect Some error attributable to the CMM

ELT segment SPN01 (15:15) Material Zerodur 580,000 measurement points Data to within 0.5mm of the edge.

Mirror segment (2) CMM Metrology

Results:
Surface map (CMM) 580,000 measurement points PV < 4.5 m RMS < 0.6 m

ELT segment SPN04 (16:15)

Material ULE Grinding cycle 20 hours Max MMR 187.5mm3/sec

Reactive Atom Plasma Figuring

Major new UK-based research initiative processing metre scale freeform optical surfaces

Final figure correction Developing RAP technology for the final figuring of large metre scale optics

Figuring requirement:
1 Segment per day Form accuracy < 20 nm RMS Surface roughness < 1 nm RMS Removal of process signatures

RAP technology
Rapid nanometer dexterity surface process for figure correction of ultra precision metre-scale optics. Technology employs inductively Coupled Plasma Torch.

Dry etch process fluorine based gas

Atmospheric pressure processing

Gaussian beam distribution Dwell time based raster figuring algorithm No induced SSD

Surface deviation (nm)

Dimension (mm)

RAP facility

Processed materials:
Fused silica ULE SiC Silicon Borosilicate

Refs

3 axes CNC Fanuc motion control Low cost operation 1.2 m capacity Compact machine size

1: Jourdain et al., (2011). Fast 3D Figuring of Large Optical Surfaces Using Reactive Atom Plasma (RAP) Processing, 2nd EOS Conference on Manufacturing of Optical Components, Munich (D), May 2011. 2: Castelli et al., (2010). Initial Strategies for 3D RAP Processing of Optical Surfaces Based on a Temperature Adaptation Approach 36th Matador Conference, Manchester, section:18, pp 569-572 , July 2010

Expected processing time for NIF focussing lens

420 mm x 420mm surface 2 iteration process Removal depth of 1m Average MMR 1.5 mm3/min Figuring time ~ 3 hours x10 times faster than IBF

Contact: Prof Paul Shore, Precision Engineering Centre, Cranfield University, UK

Spherical surface results

Spherical form Residual error

rms:80nm

Spherical hollow 500 nm depth

18 nm RMS 146 nm PV

Thank you for your attention

Courtesy of Paul Morantz peacock butterfly (2004)

Summary Rapid production of large freeform surfaces

Polishing
Form accuracy < 16.8 nm RMS

Reactive Atomic Plasma

Removal rates up to 1.5 mm3/s

Grinding
Removal rates up to 187.5 mm3/s Grinding time 20 hours - 1.45 m ELT segment Form accuracy < 1 m RMS, SSD < 10 m Form accuracy < 16 nm RMS No induced SSD
Acknowledgements: The authors acknowledge funding support from the UK research councils Basic Technologies Programme, the EPSRC Integrated Knowledge Centre in Ultra Precision and Structured Surfaces (UPS2) and the McKeown Foundation.

Wheel form

Inclined spindle configuration

Truing imparts toric wheel form using formed electroplate wheels Dressing using AlO stick Wheel profile imprinted onto soft dressing stick can be measured in-situ and used to compute wheel shape/wear A full multi-pass grinding cycle may take 10 hours wheel wear compensation critical to maintain accuracy

Simulation of contact point compensation

Ref: Shore, P. et al., 2005

Mirror segment processing

Segment fixture

Transportation Metrology Loading Grinding Location using master spheres

Grinding

Input spherical form 1mm material removed Finish grind

D25 wheel 50 um depth of cut Compensated path

Lithography is at the heart of i/c chip manufacturing

Repeat 30 to 40 times to build 3 dimensional structures

1 part in 108 relative precision of form accuracy to size

Advanced DUV Lithography Systems employ fused silica optics of up to 250 mm diameter having form accuracy of 2.5nm RMS and roughness < 0.5nm RMS ; 38nm linewidths

.the ASML TWINSCAN

Ref, Zeiss SMT

1nm

wavelength

EUV / soft X-ray lithography scheme (ASML Veldhoven )

reticle stage

pump

lens

laser illuminator

wafer stage

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EUV / soft X-ray lithography scheme reflective optics (ASML)

EUV (extreme ultraviolet)
= 13 nm linewidth < 35nm (potentially 10nm) reflective optics essential (no available EUV transparent materials) tilt control of mirrors is highly critical

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NXE:3100 first shipment Q4 2010

1st generation of the NXE platform

NA=0.25 Sigma=0.8 Resolution 27 nm SMO=4.5 nm MMO=7.0 nm Productivity 60wph at 10mJ/cm2 resist

Weve Come a Long Way in 60 years!

One transistor/cm2 Dec. 23, 1947

Today: Each die contains 500 million transistors/cm2

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Process Chain
Major new UK-based research initiative processing metre scale freeform optical surfaces

Polishing
Computer control polishing Machine; Polishing Process; Metrology; Fixturing

Requirement:

20m material removed 20nm RMS form accuracy No edge roll-off

Next generation of large telescopes

Hale (1948)

Keck (1993)

GMT (2018)

TMT (2018)

E-ELT (2018)

Mirror technology
Active segmented mirror technology pioneered through the Keck telescope

36 segments Production rate: 1 per month

Optical Test Tower

Segment radius of curvature 84m Test tower 10m Folded path using spherical mirror 45 fold mirror near intermediate focus (central
obscuration)

Focus relayed to interferometer by pair of

aspheric lenses

Spherical aberration corrected by aspheric plate

off-axis and a pair of cylindrical lenses.

Option for final residual aberrations to be

corrected by CGH

Located over polishing machine

Acknowledgement: Dr John Mitchell, Cranfield Ultra Precision and Structured Surfaces (UPS2)

Master spherical segment (MSS)

1.490 m across corners 200 mm thickness Spherical form 84 m ROC

Composite measurements constructed from lateral and rotational shears Form 16.8 nm 2nm RMS Mid spatial frequencies < 5nm RMS

Source: David Walker, University of Wales Professor of Optics at Glyndwr University , Professorial Research Associate, University College London, Research Director, Zeeko Ltd

Sub-surface Damage
Evaluation technique:
Polished tapered grooves Etched HF, target removal 1m Groove depth - contact profilometery Crack observation using optical microscope

GrindingConditions Roughcut(D76) Semifinishcut(D46) Finishcut(D25)

Clusterdepth(m) Zerodur 5 4 3 ULE 8.5 4.5 4

Lastfracturedepth(m) Zerodur 8 7.5 4 ULE 18.5 9 8

Ref: Tonnellier, T. et al. 2008, Sub-surface damage issues for effective fabrication of large optics, Proc of SPIE Vol. 7018, pg 701836-1 to 701836-10

Micro-textured cylindrical mould

Cutting a varying included angle: corner sharpness

Flat Lens Parquets

Arrayed flat fresnel lenses on optical film Laminate in one shot to support frame

Manufacture Conical Lenses

Diamond cut master Lens Film in r2r process Fold assemble and glue lens structure

Solar Power technologies

Solar Power Photovoltaic Thin Film Flat Panel Concentrated Thin Lenses Film Mirrors Thermal

Advanced Surface Structuring Micro-textured light diffusers

Advanced Surface Structuring

Micro-textured light reflectors

Micro-textured retro-reflecting surfaces

Summary Accuracy capability a 1 part in 108

(metre class surfaces in 10 hours)

BoX Ultra Precision fixed abrasive Grinding & Measuring System, Cranfield

IRP1200 Ultra Precision 7 axes free abrasive polishing system, UCL & Zeeko Ltd

RAP Re-active atom plasma surface figuring system, Cranfield and RAPT Industries

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High Precision Diamond Turning of Structured / Textured Surfaces on rolls for large scale replication of plastic films

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Structured / Textured Surfaces on rolls

Textured roll

Diamond turned micro-structured surface

Side view Plan view

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CPV installations growth 1.5GW capacity will be installed in 2014 forecast Equates to 7 million m2 of solar units

Reactive Atomic Plasma Processing

Plasma (main) gas Quartz tube CF4 Ar Ar Reactive precursor gas

Copper coils for Inductively-coupled energy source

Ar F F Ar Ar C F Ar FC Ar F Ar C Ar Ar F Ar Ar

Excitation Region Plasma Discharge

Si, SiO2, SiC

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Shallow trench, approximately 15 nm deep, created by 4 passes

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Segmented mirrors
Pioneered by Keck

Image credit: A. Miller

Repeated by GTC, SALT, JWST etc.

New process chain for large optics

1 mm form accuracy Stage 1 Fixed abrasive Grinding 1 m form accuracy Stage 2 10 nm form accuracy Stage 3

Computer control polishing

Reactive atom Plasma

Major new UK-based research initiative* processing time for large (1+ metre scale) freeform optical surfaces reduced from 100 hours to 10 hours 3 step process chain

* Ultra Precision Surfaces: A New Paradigm Cranfield/UCL collaboration (2004-2008)

1st ESO segment in ground condition