TEM lens system

Types of Electron Lenses

Condenser Lens - demagnies beam, spot size Objec:ve lens - nal probe focusing, focus Projector lens - magnies the beam following specimen interac:on or controls camera length in dirac:on mode

Optics- Parallel Beam TEM Mode

C2 forms underfocused image of C1 crossover

OR
C2 is focused to produce C1 crossover at FFP of upper objective lens

Useful to obtain Selected Area Diffraction Pattern

Parallel Beam TEM Mode

C2 aperture reduces electron current falling on the specimen, low intensity

Small aperture decreases angle of beam convergence, makes it more parallel

Convergent Beam (S)TEM Mode

C2 is focused to produce image of C1 crossover at specimen. Most convergent beam, minimum contrast.
OR
If C1 and C2 strength is not enough, turn off C2, C2 aperture limits convergence, smaller probe size
Useful to obtain Convergent Beam Electron Diffraction Pattern,
STEM and AEM

Convergent Beam (S)TEM Mode

Strong C1 gives a small probe

Decreases v for C1
Increases u for C2
Increases C2 demagnication
Less intensity at specimen
Weak C1 gives larger probe
Increases v for C1
Decreases u for C2
Decreases C2 demagnication
More intensity at specimen

Convergent Objective Lens

Used to provide both parallel and convergent beam at the specimen

Mini lens used to make beam perfectly parallel
Increasing C2 lens strength
//->con -> div -> //
Changes focus of probe,
Spatial resolution

Translation and Tilting the Beam

Varying current through the scan coils

To translate the beam
Deector scan coils
To tilt the beam
Tilt scan coils situated between C2 and C3

TEM imaging system - the two modes

Diffraction Mode:
BFP of Objective lens is the Object Plane of Intermediate lens
Reduce illumination by
Converging beam: CBED disks
Inserting SAD Aperture:
- Area of interest
- Reduced intensity SAD pattern
Imaging Mode:
Image Plane of Objective lens is the Object plane of Intermediate lens
Inserting Objective Aperture:
- Selecting direct or diffracted spots
- Bright Field or Dark Field imaging

TEM imaging system- use of SAD aperture

Aperture inserted in Image plane of Objective lens

Image of aperture on viewing screen
Any electron that hits the specimen outside the area dened by the virtual aperture will hit the diaphragm

TEM imaging system- BF and DF imaging

TEM imaging system- BF and DF imaging

Selected Area Diffraction Pattern (SADP):
In Imaging Mode: Can select a particular area using SAD aperture
(located at the image plane)
Then in Diffraction Mode: Bright central spot=direct beam; Other spots= diffracted beam
Objective Aperture inserted in BFP of objective lens
Selects only one spot (direct or diffracted)
If direct beam is selected in Diffraction Mode
the corresponding image in Imaging Mode is BF image
If diffracted beam is selected in Diffracted Mode
the corresponding image is Imaging Mode is DF image
Diffraction Mode-> Diffraction Pattern -> SAD aperture in, Objective aperture out
Imaging Mode-> BF/DF Image -> SAD aperture out, Objective aperture in
Centered Dark Field -> to reduce off-axis aberrations, beam is tilted so that it hits specimen as an angle equal and opp to scattering angle, diffracted beam along optic axis
Displaced aperture Dark Field (Dirty Dark Field)-> physically moving aperture, diffracted beam not along optic axis, off-axis aberrations are present

STEM imaging system- Serial Recording

STEM images require a ne probe

Double deection scan coils to pivot the beam about the FFP of third condenser lens (C3).
C3 ensures that beam is parallel to optic axis and the image of C1 crossover forms on specimen plane
Probe size and NOT lens defect affect image resolution

STEM imaging system- BF and Annular DF images

Bright Field Detector
- semiconductor or scintillator detector
- inserted below projector lens

Annular Dark Field Detector

- centered on optic axis
- hole in the middle
- can break up the detector into
different quadrants and can get signals
from each part (not possible in TEM mode)

Calibration of Imaging system - Magnication Calibration

Why do we need this?
- TEM lens strength varies with ambience,
cooling system and lens hysteresis
- actual readings need to be taken at the time
of doing experiments

Standard specimen used to calibrate magnication

- Thin carbon lm replicas of optical diffraction
grating of known spacing (2160 lines/mm)
- for high mag (0002) spacing in graphite (0.344nm)
Record images of grating at different magnication
Calculate magnication experimentally from image

Calibration of Imaging system - Camera Length Calibration

We dene magnication of DP by camera length (L)

Distance between direct and diffracted spot (R) is dependent on L as

2
From Bragg eqn we know
So camera const
Standard specimen used to calibrate magnication
- Polycrystalline Au or Al with known crystal spacing (d)
- Measurement of ring radius R is done
- is known
Thus L can be calculated for every magnication of DP

Calibration of Imaging system - Rotation Calibration

Why do we need this?

- To determine angle between directions in
the image and directions in the DP
- At xed CL, DP is xed
At different magnication image rotates wrt DP

Standard specimen used to calibrate magnication

- -MoO3 crystals whose long edge is parallel to
<001> direction
- Double exposure of DP and image
- Has to be repeated for different magnications
- Can be done with different camera lengths (L)

Additional Readings from Ch 9, W&C - useful for TEM Lab

Alignment Procedures:
- Gun (sec 9.1.D)
- C2 Aperture (sec 9.1.D)
- Lens Rotation Centering (sec 9.5.A)
Correction of Condenser Lens Defects:(sec 9.1.E)
- Spherical Aberration
- Chromatic Aberration
- Astigmatism
Correction of Imaging Lens Defects:(sec 9.5.B)
- Astigmatism
Concept of Eucentric Plane: (sec 9.2)
- Reference plane so that the calibrations would be reproducible
- When specimen located in this plane, image in focus then objective lens current optimal
- At this plane, a point exists where the specimen ht does not change when tilted
around the holder axis ( tilt)
- Out of axis rotation or tilting normal to holder axis ( tilt) would cause the point
to move out of eucentric