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P. Heremans1, J. Genoe1, S. Steudel1, K. Myny1, S. Smout1, P. Vicca1, L. Ruppel3, C. Grillberger3, O. R. Hild3, F. Furthner2, B. van der Putten2, A. K. Tripathi2, G. H. Gelinck2
Acknowledgement
FLAME
http://www.imec.be/FLAME
Paul Heremans, SID-ME 2010, Dresden
Introduction
Goal:
Technology for flexible and rollable OLED display
Implementation:
Plastic foil substrate (with moisture barrier) Organic transistor backplane Small molecule top-emitting OLED stack Topstrate barrier foil
T. Someya and T. Sekitani: many other backplane appliations! Examples: pressure sensors, image scanner, actuators,
Outline
Pixel
Requirement IOFF Mobility L Cox VT < 1pA 0.5 0.03 cm2/Vs 5 m > 20 nF/cm2 0.2 V
Technology
Laminate foil on carrier
Freedom of foil type Flexibility in process
Technology
Laminate foil on carrier
Freedom of foil type Flexibility in process
cfr. DowCorning
Technology
Laminate foil on carrier
Freedom of foil type Flexibility in process
Backplane process
Organic Vapor Phase Deposition Drop-on-demand Ink jet
J. Anthony, JACS123, 9482, (2001) T. Jackson, AdvMat15,2009 (2003)
resist Au (30nm) Al2O3 (100-150 nm) Au (30nm) Planarization PEN Teonex glue
resist Au (30nm) Al2O3 (100-150 nm) Au (30nm) Planarization PEN Teonex glue
Carrier
C. Rolin et al., Appl. Phys. Expr. 2, 086503 (2009)
Carrier
C. Kjellander et al., MRS Fall (2009)
Paul Heremans, SID-ME 2010, Dresden 10
[cm2/ Vs]
0.6
0.8
1.0
3.0 2.5 2.0 Number 1.5 1.0 0.5 0.0 -10 -5 0 VT [V] 5 10 VT (AVG) = 0.906096 V VT (StDev) = 0.496683 V
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12
Performance
Requirement IOFF Mobility L Cox VT < 1pA 0.5 0.03 cm2/Vs 5 m > 20 nF/cm2 0.2 V
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Array
Generation 1:
32 x 32 Pixels 1 mm2
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OLED on foil
Top emitting (transparent cathode) Silver anode
target
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interlayer dielectric
resist pentacene Au (30nm) Al2O3 (100-150 nm) Au (30nm) Planarization PEN Teonex glue Carrier
Via hole
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17
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Aperture ratio
off
on
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Brightness
D65 white color point
100 800 Cd/m 80 Cox [nF/cm ]
2 2
60 40 20
500 Cd/m
Al2O3
2000 Cd/m
200 Cd/m
0.1
4 5 6 2
Brightness
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Moisture barrier
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Barrier foil
Integration of barrier with OLED on foil
OLED stack
Radius 0.8 cm
Paul Heremans, SID-ME 2010, Dresden 23
Summary
Status :
Pentacene/Al2O3 backplane with green and orange OLEDs integrated on foil in 32x32 test vehicles Moisture barrier with OLEDs integrated on foil and tested for rollability
Near future :
Integrate row and column drivers Develop top-emitting blue OLED pixels on foil Apply 3 colors on backplane Scale pixel size Integrate all in demonstrator
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Thank you
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