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Towards a flexible OLED display with an organic active matrix backplane

P. Heremans1, J. Genoe1, S. Steudel1, K. Myny1, S. Smout1, P. Vicca1, L. Ruppel3, C. Grillberger3, O. R. Hild3, F. Furthner2, B. van der Putten2, A. K. Tripathi2, G. H. Gelinck2

Acknowledgement

FP7 STREP project #216546


start Jan 2008

Flexible Organic Active Matrix OLED displays forNomadic Applications

FLAME
http://www.imec.be/FLAME
Paul Heremans, SID-ME 2010, Dresden

Introduction
Goal:
Technology for flexible and rollable OLED display

Implementation:
Plastic foil substrate (with moisture barrier) Organic transistor backplane Small molecule top-emitting OLED stack Topstrate barrier foil

Paul Heremans, SID-ME 2010, Dresden

State of the art


48X48 bottom-emitting monochrome OLEDs on flexible substrate T. Jackson: Pentacene TFT driven AM OLED displays, Electron device letters 26, 640 (2005) T. Jackson: All-organic active matrix flexible display, Appl. Phys. Lett. 88, 083502 (2006) 12X12 (2mm pixel size), Ta2O5 gate dielectric, aperture ratio 37% M. Mizukami et al.: Flexible AM OLED panel driven by bottom-contact OTFTs, IEEE El. Dev. Lett. 26, 9 (2006)

SONY SID07-1753 QQVGA full color

T. Someya and T. Sekitani: many other backplane appliations! Examples: pressure sensors, image scanner, actuators,

Paul Heremans, SID-ME 2010, Dresden

Outline

Backplane OLED Integration Moisture Barrier

Paul Heremans, SID-ME 2010, Dresden

Pixel

Requirement IOFF Mobility L Cox VT < 1pA 0.5 0.03 cm2/Vs 5 m > 20 nF/cm2 0.2 V

Paul Heremans, SID-ME 2010, Dresden

Technology
Laminate foil on carrier
Freedom of foil type Flexibility in process

Paul Heremans, SID-ME 2010, Dresden

Technology
Laminate foil on carrier
Freedom of foil type Flexibility in process

Use of conventional process technology


Transferable to flat panel line CD 2 m
cfr. Yokogawa

cfr. DowCorning

Paul Heremans, SID-ME 2010, Dresden

Technology
Laminate foil on carrier
Freedom of foil type Flexibility in process

Use of conventional process technology


Transferable to flat panel line CD 2 m

Organic thin-film transistors


Pentacene (and soluble derivatives) semiconductor (p-type only) Bottom-gate bottom-contact geometry

Paul Heremans, SID-ME 2010, Dresden

Backplane process
Organic Vapor Phase Deposition Drop-on-demand Ink jet
J. Anthony, JACS123, 9482, (2001) T. Jackson, AdvMat15,2009 (2003)

resist Au (30nm) Al2O3 (100-150 nm) Au (30nm) Planarization PEN Teonex glue

resist Au (30nm) Al2O3 (100-150 nm) Au (30nm) Planarization PEN Teonex glue

Carrier
C. Rolin et al., Appl. Phys. Expr. 2, 086503 (2009)

Carrier
C. Kjellander et al., MRS Fall (2009)
Paul Heremans, SID-ME 2010, Dresden 10

Performance evaporated pentacene


7 6 5 Number 4 3 2 1 0 0.0 0.2 0.4 (AV =0.472 cm / Vs G) 2 (StDev) =0.0174 cm / V s
2

[cm2/ Vs]

0.6

0.8

1.0

3.0 2.5 2.0 Number 1.5 1.0 0.5 0.0 -10 -5 0 VT [V] 5 10 VT (AVG) = 0.906096 V VT (StDev) = 0.496683 V

Paul Heremans, SID-ME 2010, Dresden

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Inkjet printed TIPS pentacene formulation

Paul Heremans, SID-ME 2010, Dresden

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Performance

Requirement IOFF Mobility L Cox VT < 1pA 0.5 0.03 cm2/Vs 5 m > 20 nF/cm2 0.2 V

Pentacene/Al2O3 < 1pA 0.5 0.05 cm2/Vs 5 m 50-70 nF/cm2 0.4 V

Paul Heremans, SID-ME 2010, Dresden

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Array
Generation 1:
32 x 32 Pixels 1 mm2

Paul Heremans, SID-ME 2010, Dresden

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OLED on foil
Top emitting (transparent cathode) Silver anode
target

Paul Heremans, SID-ME 2010, Dresden

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Integration of OLED on backplane


Transparent cathode

OLED layer stack Ag anode

interlayer dielectric
resist pentacene Au (30nm) Al2O3 (100-150 nm) Au (30nm) Planarization PEN Teonex glue Carrier

Via hole

Paul Heremans, SID-ME 2010, Dresden

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Example green OLED

Paul Heremans, SID-ME 2010, Dresden

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Example orange OLED

Paul Heremans, SID-ME 2010, Dresden

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Aperture ratio

off

on

Top-emitting OLED Aperture ratio : 79.7%

Paul Heremans, SID-ME 2010, Dresden

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Brightness
D65 white color point
100 800 Cd/m 80 Cox [nF/cm ]
2 2

60 40 20

500 Cd/m

Al2O3

2000 Cd/m

200 Cd/m

Polymer gate dielectrics


02
3 4 5 6

0.1

4 5 6 2

Carrier Mobility [cm /Vs]


Paul Heremans, SID-ME 2010, Dresden 20

Brightness

Paul Heremans, SID-ME 2010, Dresden

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Moisture barrier

5 X 5 m RMS 1.1 nm Rmax 10 nm

Paul Heremans, SID-ME 2010, Dresden

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Barrier foil
Integration of barrier with OLED on foil

OLED stack

Radius 0.8 cm
Paul Heremans, SID-ME 2010, Dresden 23

Summary
Status :
Pentacene/Al2O3 backplane with green and orange OLEDs integrated on foil in 32x32 test vehicles Moisture barrier with OLEDs integrated on foil and tested for rollability

Near future :
Integrate row and column drivers Develop top-emitting blue OLED pixels on foil Apply 3 colors on backplane Scale pixel size Integrate all in demonstrator

Paul Heremans, SID-ME 2010, Dresden

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Thank you

Paul Heremans, SID-ME 2010, Dresden

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